CN108527016B - An ultra-precision magnetic grinding device and method using low-frequency alternating magnetic field - Google Patents
An ultra-precision magnetic grinding device and method using low-frequency alternating magnetic field Download PDFInfo
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- CN108527016B CN108527016B CN201810618804.6A CN201810618804A CN108527016B CN 108527016 B CN108527016 B CN 108527016B CN 201810618804 A CN201810618804 A CN 201810618804A CN 108527016 B CN108527016 B CN 108527016B
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- 238000000034 method Methods 0.000 title claims description 18
- 239000006249 magnetic particle Substances 0.000 claims abstract description 45
- 238000005498 polishing Methods 0.000 claims abstract description 36
- 230000009471 action Effects 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims abstract 2
- 239000012530 fluid Substances 0.000 claims description 33
- 239000002245 particle Substances 0.000 claims description 24
- 239000002002 slurry Substances 0.000 claims description 11
- 230000001360 synchronised effect Effects 0.000 claims description 8
- 238000003756 stirring Methods 0.000 claims description 4
- 230000002776 aggregation Effects 0.000 claims description 3
- 238000004220 aggregation Methods 0.000 claims 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 3
- 238000010586 diagram Methods 0.000 description 8
- 239000003921 oil Substances 0.000 description 5
- 239000003082 abrasive agent Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005054 agglomeration Methods 0.000 description 2
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- 230000003287 optical effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 238000011949 advanced processing technology Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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Abstract
Description
技术领域Technical field
本发明涉及一种研磨抛光装置及方法，尤其涉及一种利用低频交变磁场纳米级超精密磁力研磨装置及方法。The present invention relates to a grinding and polishing device and a method, in particular to a nano-level ultra-precision magnetic grinding device and method using a low-frequency alternating magnetic field.
背景技术Background technique
随着光学、电子、通讯、航空航天、生物工程等高新产业的快速发展，诸多复杂形状，难加工材料组成的元器件对超精密加工技术提出了更严格的要求。磁力研磨是一种先进的加工技术，它利用磁力线的透过作用，通过对磁力刷与工件间施加相对运动，从而实现材料去除，然而该技术很难实现工件表面的纳米级加工。其原因在于获得纳米级加工表面，通常使用数微米大小的磁性磨粒或超微米级的非磁性磨粒，然而，在加工过程中，磁性颗粒的凝聚，非磁性磨粒分布不均匀，磁力研磨刷与工件接触后的变形不仅阻碍了高质量表面的获得，也降低了加工效率，尤其是在加工沟槽和棱角时，磨料无法充分布满整个加工面，影响表面加工均匀性。而且磁力刷刷头部分磨料损耗严重，根部磨料无法被充分输送至磁力刷刷头，导致磨料利用率低。With the rapid development of high-tech industries such as optics, electronics, communications, aerospace, and bioengineering, components composed of many complex shapes and difficult-to-process materials have put forward more stringent requirements for ultra-precision processing technology. Magnetic grinding is an advanced processing technology that uses the penetration of magnetic lines of force to achieve material removal by exerting relative motion between the magnetic brush and the workpiece. However, this technology is difficult to achieve nanoscale processing of the workpiece surface. The reason is that to obtain a nanoscale processing surface, magnetic abrasive particles with a size of several microns or ultra-micron non-magnetic abrasive particles are usually used. However, during the processing process, the magnetic particles agglomerate and the non-magnetic abrasive particles are unevenly distributed, resulting in magnetic grinding. The deformation of the brush after contact with the workpiece not only hinders the acquisition of high-quality surfaces, but also reduces processing efficiency. Especially when processing grooves and edges, the abrasive cannot fully cover the entire processing surface, affecting the uniformity of surface processing. Moreover, the abrasive loss in the magnetic brush head is serious, and the root abrasive cannot be fully transported to the magnetic brush head, resulting in low abrasive utilization.
发明内容Contents of the invention
为解决上述问题本发明提供了一种利用低频交变磁场超精密磁力研磨装置及方法，通过利用低频交变磁场下产生的变动磁力，促使磁簇在加工区域内产生分散、收缩式循环变动，该变动不仅促进磁性颗粒和磨料的分散，也解决了磁簇与工件接触后产生的变形问题，充分实现磨料的循环和更新，保证了研磨工具的稳定性。In order to solve the above problems, the present invention provides an ultra-precision magnetic grinding device and method using a low-frequency alternating magnetic field. By utilizing the changing magnetic force generated under the low-frequency alternating magnetic field, the magnetic clusters are caused to disperse and shrink cyclically in the processing area. This change not only promotes the dispersion of magnetic particles and abrasives, but also solves the deformation problem caused by the contact between magnetic clusters and workpieces, fully realizes the circulation and renewal of abrasives, and ensures the stability of grinding tools.
为实现上述目的，本发明采用以下技术方案实现：In order to achieve the above objects, the present invention adopts the following technical solutions:
一种利用低频交变磁场超精密磁力研磨装置，包括机架、X轴进给装置、Y轴进给装置、Z轴进给夹具台架、交变磁场抛光装置，所述X轴进给装置安装在机架平台上，Y轴进给装置横向设置在X轴进给装置上，交变磁场抛光装置安装在Y轴进给装置上，所述Z轴进给夹具台架包括纵向设置的导轨、在导柱上上下滑动的夹具滑台，所述夹具滑台置于交变磁场抛光装置的上方；所述交变磁场抛光装置包括电机、线圈筒、线圈、主轴、研磨液托盘、开槽磁极，所述主轴设置在线圈筒的内部，所述线圈缠绕在线圈筒外部，所述电机与主轴传动连接，所述开槽磁极内部有螺纹孔安装在主轴的上端，所述研磨液托盘安装在开槽磁极的上端。An ultra-precision magnetic grinding device using a low-frequency alternating magnetic field, including a frame, an X-axis feeding device, a Y-axis feeding device, a Z-axis feeding fixture stand, and an alternating magnetic field polishing device. The X-axis feeding device Installed on the frame platform, the Y-axis feeding device is arranged transversely on the X-axis feeding device, the alternating magnetic field polishing device is installed on the Y-axis feeding device, and the Z-axis feeding fixture platform includes a longitudinally arranged guide rail , a clamp slide that slides up and down on the guide post. The clamp slide is placed above the alternating magnetic field polishing device; the alternating magnetic field polishing device includes a motor, a coil barrel, a coil, a spindle, a grinding fluid tray, and a slot. Magnetic pole, the spindle is arranged inside the coil barrel, the coil is wound around the outside of the coil barrel, the motor is drivingly connected to the spindle, there is a threaded hole inside the slotted magnetic pole and is installed on the upper end of the spindle, and the grinding fluid tray is installed at the upper end of the slotted magnetic pole.
所述X轴进给装置包括步进电机、直线滑轨、滑块、丝杠，所述步进电机驱动丝杠旋转，所述丝杠上螺接丝杠螺母，所述滑块在丝杠螺母的带动下在直线滑轨上滑动。The X-axis feeding device includes a stepper motor, a linear slide rail, a slide block, and a lead screw. The stepper motor drives the lead screw to rotate. A lead screw nut is threaded on the lead screw. The slide block is connected to the lead screw. Driven by the nut, it slides on the linear slide rail.
所述X轴进给装置包括步进电机、直线滑轨、滑块、丝杠，所述步进电机驱动丝杠旋转，所述丝杠上螺接丝杠螺母，所述滑块在丝杠螺母的带动下在直线滑轨上滑动。The X-axis feeding device includes a stepper motor, a linear slide rail, a slide block, and a lead screw. The stepper motor drives the lead screw to rotate. A lead screw nut is threaded on the lead screw. The slide block is connected to the lead screw. Driven by the nut, it slides on the linear slide rail.
一种采用磁力研磨装置进行超精密磁力研磨的方法，具体方法如下：A method of ultra-precision magnetic grinding using a magnetic grinding device. The specific method is as follows:
1)将由研磨液、磁性粒子及磨料颗粒构成的磁性磨粒浆装入研磨液托盘；1) Load the magnetic abrasive slurry composed of grinding fluid, magnetic particles and abrasive particles into the grinding fluid tray;
2)将工件固定在夹具滑台上，调整夹具滑台高度，使工件置于研磨液托盘上端；2) Fix the workpiece on the fixture slide, adjust the height of the fixture slide so that the workpiece is placed on the upper end of the grinding fluid tray;
3)向线圈通入低频交流电，低频交变磁场频率为1Hz-7Hz，磁性磨粒浆在研磨液托盘中形成周期性振动的磁性粒子簇，启动电机利用磁性粒子簇对工件进行研磨抛光；3) Pass low-frequency alternating current into the coil, the frequency of the low-frequency alternating magnetic field is 1Hz-7Hz, the magnetic abrasive slurry forms periodically vibrating magnetic particle clusters in the grinding fluid tray, and the motor is started to use the magnetic particle clusters to grind and polish the workpiece;
4)当磁场力向上时，磁性粒子簇在磁场力的作用下呈收缩状，磁性粒子将磨料颗粒浮托于上方对工件进行研磨；当磁场力向下时，磁性粒子簇在磁场力的作用下呈发散状，磁性粒子与磨料颗粒重新混合；持续的上下波动提高磨料自搅拌效率，提高磨料颗粒的利用率并防止磁性粒子簇发生凝聚。4) When the magnetic field force is upward, the magnetic particle clusters shrink under the action of the magnetic field force, and the magnetic particles float the abrasive particles above to grind the workpiece; when the magnetic field force is downward, the magnetic particle clusters shrink under the action of the magnetic field force. The magnetic particles and abrasive particles remix; the continuous upward and downward fluctuations improve the self-stirring efficiency of the abrasives, improve the utilization of abrasive particles and prevent the agglomeration of magnetic particle clusters.
所述磁性磨粒浆的配比为研磨液：磁性粒子：磨料颗粒＝1～3：12～18：3～8。The ratio of the magnetic abrasive slurry is grinding fluid: magnetic particles: abrasive particles = 1 to 3: 12 to 18: 3 to 8.
所述研磨液为油基研磨液油基碳化硅研磨液。The polishing fluid is oil-based polishing fluid and oil-based silicon carbide polishing fluid.
与现有的技术相比，本发明的有益效果是：Compared with existing technology, the beneficial effects of the present invention are:
1)本发明引入低频交变磁场(1Hz-7Hz)，促使研磨工具(磁性粒子簇)在低频交变磁力作用下产生周期性的上下波动。利用该波动不仅提高磨料搅拌效应，促进磨料充分进入到被加工表面，同时也阻止了磁性粒子簇与工件接触后产生的变形，保证研磨工具的稳定性。1) The present invention introduces a low-frequency alternating magnetic field (1Hz-7Hz) to cause the grinding tool (magnetic particle cluster) to produce periodic up and down fluctuations under the action of low-frequency alternating magnetic force. The use of this fluctuation not only improves the abrasive stirring effect and promotes the full penetration of the abrasive into the surface to be processed, but also prevents the deformation of the magnetic particle clusters after contact with the workpiece, ensuring the stability of the grinding tool.
2)本发明通过引入低频交变磁场产生的变动磁力，解决了传统磁力研磨工艺中磁力研磨刷变形，磨料利用率低等问题，不仅提高了加工效率，同时也实现磁力研磨均匀性、全方位纳米级加工。2) By introducing the variable magnetic force generated by a low-frequency alternating magnetic field, the present invention solves the problems of magnetic grinding brush deformation and low abrasive utilization in the traditional magnetic grinding process. It not only improves the processing efficiency, but also achieves uniformity and all-round magnetic grinding. Nanoscale processing.
3)本发明的X轴，Y轴，Z轴方向的进给可以手动操作，亦可通过编程实现工件全方位抛光。夹具滑台四周设有拓展螺纹孔，能够装卡异形工件，批量加工时也可以将特定夹具安装在拓展孔上，方便装卡，提高加工效率。3) The feeding in the X-axis, Y-axis, and Z-axis directions of the present invention can be operated manually, or the workpiece can be polished in all directions through programming. There are expansion threaded holes around the fixture slide table, which can accommodate special-shaped workpieces. During batch processing, specific fixtures can also be installed on the expansion holes to facilitate clamping and improve processing efficiency.
4)以往利用电磁线圈磁力研磨加工中，电磁线圈静止不动通过对工件施加旋转运动，来实现对工件加工，这种方法不适用于大尺寸工件加工。本发明将研磨工具、托盘、磁极和主轴连接为一体，可以实现研磨工具自旋转运动，不与外界干涉，可以有效的实现大尺寸工件的加工。4) In the past, in the magnetic grinding process using electromagnetic coils, the electromagnetic coil remained stationary and applied rotational motion to the workpiece to process the workpiece. This method is not suitable for processing large-sized workpieces. The invention connects the grinding tool, the tray, the magnetic pole and the spindle into one body, can realize the self-rotation movement of the grinding tool without interfering with the outside world, and can effectively realize the processing of large-sized workpieces.
5)本发明的磁极与主轴连接是通过螺纹连接，主轴前端加工成外螺纹，磁极内部具有螺纹孔，可以根据被加工工件形状选择不同种类磁头，提高加工效率，装卸方便。5) The magnetic pole of the present invention is connected to the spindle through a threaded connection. The front end of the spindle is processed into an external thread. There are threaded holes inside the magnetic pole. Different types of magnetic heads can be selected according to the shape of the workpiece to be processed, which improves processing efficiency and facilitates loading and unloading.
6)本发明利用低频交变磁场的磁力研磨法可以对带有微细沟槽面的工件进行沟槽边缘去毛刺加工、沟槽内表面精密抛光，研磨后工件表面粗糙度值可降至10纳米以下。6) The magnetic grinding method of the present invention using a low-frequency alternating magnetic field can deburr the groove edges and precision polish the inner surface of the grooves on workpieces with fine groove surfaces. After grinding, the surface roughness of the workpiece can be reduced to 10 nanometers. the following.
附图说明Description of the drawings
图1是本发明的整体结构示意图。Figure 1 is a schematic diagram of the overall structure of the present invention.
图2是X轴进给装置示意图。Figure 2 is a schematic diagram of the X-axis feeding device.
图3是Y轴进给装置示意图。Figure 3 is a schematic diagram of the Y-axis feeding device.
图4是Z轴进给装置示意图。Figure 4 is a schematic diagram of the Z-axis feeding device.
图5是交变磁场抛光装置示意图。Figure 5 is a schematic diagram of the alternating magnetic field polishing device.
图6是交变磁场抛光装置剖视图。Figure 6 is a cross-sectional view of the alternating magnetic field polishing device.
图7是磁性粒子簇示意图。Figure 7 is a schematic diagram of a magnetic particle cluster.
图8是不同磁场方向下磁性粒子簇形态图(一)。Figure 8 is a diagram of the morphology of magnetic particle clusters under different magnetic field directions (1).
图9是不同磁场方向下磁性粒子簇形态图(二)。Figure 9 is a diagram of the morphology of magnetic particle clusters under different magnetic field directions (2).
图10是开槽磁极端面图。Figure 10 is an end view of the slotted magnetic pole.
图11是图10的俯视图。FIG. 11 is a top view of FIG. 10 .
图中：1-Z轴进给夹具台架、2-交变磁场抛光装置、3-Y轴进给装置、4-X轴进给装置、5-机架、6-控制柜、7-操作面板、8-步进电机、9-联轴器、10-丝杠、11-丝杠螺母、12-丝杠螺母座、13-X轴滑动平台、14-直线滑轨、15-滑块、16-X轴滑台底座、17-Z轴进给装置、18-夹具台架、19-夹具滑台、20-电机、21-线圈筒、22-研磨液托盘、23-线圈、24-底座、25-开槽磁极、26-轴承、27-主轴、28-主轴外壳、29-同步带轮、30-同步带、31-研磨液、32-磁性粒子、33-磨料颗粒、34-磁力线、35-磁等位线、36-交变磁场、37-工件、38-Y轴滑动平台、39-Y轴滑台底座、40-槽孔。In the picture: 1-Z-axis feeding fixture stand, 2-alternating magnetic field polishing device, 3-Y-axis feeding device, 4-X-axis feeding device, 5-rack, 6-control cabinet, 7-operation Panel, 8-stepper motor, 9-coupling, 10-screw, 11-screw nut, 12-screw nut seat, 13-X-axis sliding platform, 14-linear slide rail, 15-sliding block, 16-X-axis slide base, 17-Z-axis feeding device, 18-fixture stand, 19-fixture slide, 20-motor, 21-coil barrel, 22-polishing fluid tray, 23-coil, 24-base , 25-slotted magnetic pole, 26-bearing, 27-spindle, 28-spindle housing, 29-synchronous pulley, 30-synchronous belt, 31-grinding fluid, 32-magnetic particles, 33-abrasive particles, 34-magnetic lines of force, 35-Magnetic equipotential line, 36-Alternating magnetic field, 37-Workpiece, 38-Y-axis sliding platform, 39-Y-axis sliding table base, 40-Slot hole.
具体实施方式Detailed ways
下面结合实施例对本发明做详细说明，但本发明的实施范围不仅仅限于下述的实施例。The present invention will be described in detail below with reference to the examples, but the implementation scope of the present invention is not limited to the following examples.
如图1-图6所示，一种利用低频交变磁场超精密磁力研磨装置，包括机架5、X轴进给装置4、Y轴进给装置3、Z轴进给夹具台架1、交变磁场抛光装置2，所述X轴进给装置4安装在机架5平台上，Y轴进给装置3横向设置在X轴进给装置4上，交变磁场抛光装置2安装在Y轴进给装置3上，所述Z轴进给夹具台架1包括纵向设置的导轨、在导柱上上下滑动的夹具滑台19，所述夹具滑台19置于交变磁场抛光装置2的上方；所述交变磁场抛光装置2包括电机20、线圈筒21、线圈23、主轴27、研磨液托盘22、开槽磁极25，所述主轴27设置在线圈筒21的内部，线圈筒与工件之间具有1mm间隙，所述线圈23缠绕在线圈筒21外部，所述电机20与主轴27传动连接，所述开槽磁极25安装在主轴27的上端，所述研磨液托盘22安装在开槽磁极25的上端。As shown in Figures 1 to 6, an ultra-precision magnetic grinding device using a low-frequency alternating magnetic field includes a frame 5, an X-axis feeding device 4, a Y-axis feeding device 3, a Z-axis feeding fixture stand 1, Alternating magnetic field polishing device 2, the X-axis feeding device 4 is installed on the platform of the frame 5, the Y-axis feeding device 3 is transversely arranged on the X-axis feeding device 4, the alternating magnetic field polishing device 2 is installed on the Y-axis On the feeding device 3, the Z-axis feeding fixture stand 1 includes a longitudinally arranged guide rail and a fixture slide 19 that slides up and down on the guide post. The fixture slide 19 is placed above the alternating magnetic field polishing device 2. ; The alternating magnetic field polishing device 2 includes a motor 20, a coil barrel 21, a coil 23, a spindle 27, a grinding fluid tray 22, and a slotted magnetic pole 25. The spindle 27 is arranged inside the coil barrel 21, between the coil barrel and the workpiece. There is a 1mm gap between them, the coil 23 is wound around the outside of the coil barrel 21, the motor 20 is drivingly connected to the main shaft 27, the slotted magnetic pole 25 is installed on the upper end of the main shaft 27, and the grinding fluid tray 22 is installed on the slotted magnetic pole. The upper end of 25.
见图10、图11，开槽磁极25的上端面设有若干个槽孔40，若干个横向槽孔40与若干个纵向槽孔40垂直相交，用来调节加工区域磁感应强度。开槽磁极25与主轴27通过螺纹连接，可根据加工需要更换不同形状的磁极。磁极形状端面通常为平面，平面磁极磁场强度分布为四周高中间低，磁场强度分布不均匀，利用开槽磁极可以改善加工区域内磁场强度分布均匀性，促进磁性粒子簇稳定振动，从而保证加工表面均匀性。As shown in Figures 10 and 11, the upper end surface of the slotted magnetic pole 25 is provided with a number of slots 40, and a number of transverse slots 40 perpendicularly intersect with a number of longitudinal slots 40 to adjust the magnetic induction intensity in the processing area. The slotted magnetic pole 25 is connected to the main shaft 27 through threads, and magnetic poles of different shapes can be replaced according to processing needs. The end face of the magnetic pole shape is usually flat. The magnetic field intensity distribution of the planar magnetic pole is high on the four sides and low in the middle. The magnetic field intensity distribution is uneven. The use of slotted magnetic poles can improve the uniformity of the magnetic field intensity distribution in the processing area and promote the stable vibration of the magnetic particle clusters, thus ensuring the processing surface. Uniformity.
如图2所示，所述X轴进给装置4包括步进电机8、直线滑轨14、滑块15、丝杠10，所述步进电机8驱动丝杠10旋转，所述丝杠10上螺接丝杠螺母11，所述滑块15在丝杠螺母11的带动下在直线滑轨14上滑动。As shown in Figure 2, the X-axis feeding device 4 includes a stepper motor 8, a linear slide rail 14, a slider 15, and a screw 10. The stepper motor 8 drives the screw 10 to rotate. The screw 10 The screw nut 11 is screwed on, and the slide block 15 is driven by the screw nut 11 to slide on the linear slide rail 14 .
步进电机8与丝杠10之间由联轴器9连接，安装在X轴滑台底座16上，X轴滑台底座16安装在机架5平台上。X轴滑台底座16边缘凸台安装直线滑轨14。丝杠螺母11通过丝杠螺母座12安装在X轴滑动平台13下部，滑块15安装在X轴滑动平台13下部边缘。丝杠螺母11与丝杠10相配合，X轴滑动平台13底部两侧各两个滑块15与一条直线滑轨14配合。通过控制步进电机8顺时针或逆时针转动带动丝杠10转动，丝杠螺母11带动X轴滑动平台13沿X轴向滑动。The stepper motor 8 and the lead screw 10 are connected by a coupling 9 and are installed on the X-axis slide base 16. The X-axis slide base 16 is installed on the platform of the frame 5. The linear slide rail 14 is installed on the edge boss of the X-axis slide base 16. The screw nut 11 is installed on the lower part of the X-axis sliding platform 13 through the screw nut seat 12, and the slider 15 is installed on the lower edge of the X-axis sliding platform 13. The screw nut 11 cooperates with the screw 10, and two slide blocks 15 on both sides of the bottom of the X-axis sliding platform 13 cooperate with a linear slide rail 14. By controlling the stepper motor 8 to rotate clockwise or counterclockwise, the lead screw 10 is driven to rotate, and the lead screw nut 11 drives the X-axis sliding platform 13 to slide along the X-axis direction.
如图3所示，所述Y轴进给装置3包括步进电机8、直线滑轨14、滑块15、丝杠10，所述步进电机8驱动丝杠10旋转，所述丝杠10上螺接丝杠螺母11，所述滑块15在丝杠螺母11的带动下在直线滑轨15上滑动。As shown in Figure 3, the Y-axis feeding device 3 includes a stepper motor 8, a linear slide rail 14, a slider 15, and a screw 10. The stepper motor 8 drives the screw 10 to rotate, and the screw 10 The screw nut 11 is screwed on, and the slide block 15 is driven by the screw nut 11 to slide on the linear slide rail 15 .
步进电机8与丝杠10之间由联轴器9连接，安装在Y轴滑台底座39上，Y轴滑台底座39边缘凸台安装直线滑轨14，Y轴滑台底座39通过螺栓紧固在X轴滑动平台13上。丝杠螺母11通过丝杠螺母座12安装在Y轴滑动平台38底部，滑块15安装在Y轴滑动平台38底部边缘。丝杠螺母11与丝杠10相配合，Y轴滑动平台38底部两侧各两个滑块15与一条直线滑轨14配合。通过控制步进电机8顺时针或逆时针转动带动丝杠10转动，丝杠螺母11带动Y轴滑动平台38沿Y轴向滑动。The stepper motor 8 and the lead screw 10 are connected by a coupling 9 and are installed on the Y-axis slide base 39. The linear slide rail 14 is installed on the edge boss of the Y-axis slide base 39. The Y-axis slide base 39 is bolted Fastened to the X-axis sliding platform 13. The screw nut 11 is installed on the bottom of the Y-axis sliding platform 38 through the screw nut seat 12, and the slider 15 is installed on the bottom edge of the Y-axis sliding platform 38. The screw nut 11 cooperates with the screw 10, and two slide blocks 15 on both sides of the bottom of the Y-axis sliding platform 38 cooperate with a linear slide rail 14. By controlling the stepper motor 8 to rotate clockwise or counterclockwise, the lead screw 10 is driven to rotate, and the lead screw nut 11 drives the Y-axis sliding platform 38 to slide along the Y-axis direction.
Y轴进给装置3安装在X轴滑动平台13上。Y轴滑动平台38用于搭载交变磁场抛光装置2，使得交变磁场抛光装置2可以实现X轴向，Y轴向的水平移动。The Y-axis feeding device 3 is installed on the X-axis sliding platform 13. The Y-axis sliding platform 38 is used to carry the alternating magnetic field polishing device 2 so that the alternating magnetic field polishing device 2 can realize horizontal movement in the X-axis and Y-axis directions.
见图4，Z轴进给夹具台架1包括夹具台架18、Z轴进给装置17、夹具滑台19，夹具台架18由四根光轴导轨固定在机架5平台上，夹具滑台19四角装有直线轴承与四根光轴导轨配合实现在Z轴方向的滑动。夹具滑台19Z轴方向滑动的动力源由安装在夹具台架18两侧的Z轴进给装置17提供。Z轴进给装置17为电机驱动丝杠旋转，安装在夹具台架18两侧且固定不动，夹具滑台19两侧装有丝杠螺母，并与Z轴进给装置17的丝杠相配合，实现夹具滑台19在Z轴方向的运动，夹具滑台19四周设有M10的螺纹孔，用于装卡工件37以及拓展异形工件夹具使用。As shown in Figure 4, the Z-axis feed fixture stand 1 includes a fixture stand 18, a Z-axis feed device 17, and a fixture slide 19. The fixture stand 18 is fixed on the platform of the frame 5 by four optical axis guide rails. The fixture slide The four corners of the stage 19 are equipped with linear bearings that cooperate with four optical axis guide rails to achieve sliding in the Z-axis direction. The power source for the Z-axis direction sliding of the fixture slide table 19 is provided by the Z-axis feeding devices 17 installed on both sides of the fixture stand 18 . The Z-axis feeding device 17 is a motor driven screw to rotate and is installed on both sides of the fixture stand 18 and is fixed. The screw nuts are installed on both sides of the fixture slide 19 and are connected to the screw of the Z-axis feeding device 17. Cooperate to realize the movement of the fixture slide table 19 in the Z-axis direction. M10 threaded holes are provided around the fixture slide table 19 for clamping the workpiece 37 and expanding the use of special-shaped workpiece fixtures.
机架5下方为控制柜6，机架5平台左侧安装操作面板7，机架5平台右侧安装X轴进给装置4以及夹具台架18。控制柜6内安装电控系统。Below the rack 5 is a control cabinet 6, an operation panel 7 is installed on the left side of the platform of the rack 5, and an X-axis feed device 4 and a fixture stand 18 are installed on the right side of the platform of the rack 5. An electronic control system is installed in the control cabinet 6.
见图5、图6，交变磁场抛光装置2包括电机20、同步带轮29、同步带30、主轴27、主轴外壳28、轴承26、底座24、开槽磁极25、研磨液托盘22、线圈23、线圈筒21；电机20与主轴外壳28安装在底座24上，主轴27安装在主轴外壳28内部，主轴27两端轴肩位置设有轴承26，电机20动力经由同步带轮29和同步带30输送至主轴27。主轴27输出端与开槽磁极25螺纹连接，研磨液托盘22与开槽磁极25通过机米螺丝紧固。线圈23缠绕在线圈筒21上，线圈23、线圈筒21安装在底座24上并与主轴27同心，线圈23通入交流电，产生变动磁场。交变磁场抛光装置2的底座24安装在Y轴滑动平台38上，可以进行平面X向和Y向的移动。See Figure 5 and Figure 6. The alternating magnetic field polishing device 2 includes a motor 20, a synchronous pulley 29, a synchronous belt 30, a spindle 27, a spindle housing 28, a bearing 26, a base 24, a slotted magnetic pole 25, a grinding fluid tray 22, and a coil. 23. Coil drum 21; the motor 20 and the spindle housing 28 are installed on the base 24. The main shaft 27 is installed inside the main shaft housing 28. Bearings 26 are provided at both ends of the main shaft 27. The power of the motor 20 passes through the synchronous pulley 29 and the synchronous belt. 30 is delivered to the spindle 27. The output end of the spindle 27 is threadedly connected to the slotted magnetic pole 25, and the grinding fluid tray 22 and the slotted magnetic pole 25 are fastened with machine screws. The coil 23 is wound around the coil barrel 21. The coil 23 and the coil barrel 21 are installed on the base 24 and are concentric with the main shaft 27. The coil 23 is supplied with alternating current to generate a changing magnetic field. The base 24 of the alternating magnetic field polishing device 2 is installed on the Y-axis sliding platform 38 and can move in the plane X direction and Y direction.
一种采用磁力研磨装置进行超精密磁力研磨的方法，具体方法如下：A method of ultra-precision magnetic grinding using a magnetic grinding device. The specific method is as follows:
1)见图7，将由研磨液31、磁性粒子32及磨料颗粒33构成的磁性磨粒浆装入研磨液托盘22；1) As shown in Figure 7, the magnetic abrasive slurry composed of polishing fluid 31, magnetic particles 32 and abrasive particles 33 is loaded into the polishing fluid tray 22;
2)将工件37固定在夹具滑台19上，调整夹具滑台19高度，使工件37置于研磨液托盘22上端；2) Fix the workpiece 37 on the fixture slide 19, adjust the height of the fixture slide 19 so that the workpiece 37 is placed on the upper end of the grinding fluid tray 22;
3)向线圈23通入低频交流电，低频交变磁场频率为1Hz-7Hz，磁性磨粒浆在研磨液托盘22中形成周期性振动的磁性粒子簇，启动电机20利用磁性粒子簇对工件37进行研磨抛光；3) Pass low-frequency alternating current into the coil 23. The frequency of the low-frequency alternating magnetic field is 1Hz-7Hz. The magnetic abrasive slurry forms periodically vibrating magnetic particle clusters in the grinding fluid tray 22. Start the motor 20 and use the magnetic particle clusters to polish the workpiece 37. grinding and polishing;
4)见图8，当磁场力向上时，磁性粒子簇在磁场力的作用下呈收缩状，磁性粒子32将磨料颗粒33浮托于上方对工件37进行研磨；见图9，当磁场力向下时，磁性粒子簇在磁场力的作用下呈发散状，磁性粒子32与磨料颗粒33重新混合；持续的上下波动提高磨料自搅拌效率，提高磨料颗粒的利用率并防止磁性粒子簇发生凝聚。4) See Figure 8, when the magnetic field force is upward, the magnetic particle clusters shrink under the action of the magnetic field force, and the magnetic particles 32 float the abrasive particles 33 above to grind the workpiece 37; See Figure 9, when the magnetic field force is upward When going down, the magnetic particle clusters diverge under the action of the magnetic field force, and the magnetic particles 32 and abrasive particles 33 are remixed; the continuous up and down fluctuations improve the self-stirring efficiency of the abrasives, improve the utilization of abrasive particles, and prevent the agglomeration of magnetic particle clusters.
利用磁性粒子簇在低频交变磁场下周期性振动的特征对带有微细沟槽的工件表面进行研磨，促使磨料充分进入被加工凹槽表面，阻止磁性粒子簇与工件接触后产生的变形，提高加工效率保证研磨工具的稳定性；能够有效的实现微细沟槽表面加工，研磨后工件表面粗糙度值可降至10纳米以下。本发明所研磨的工件37材质包括：SUS304不锈钢、C2680黄铜、赛钢板、光学玻璃。The characteristic of periodic vibration of magnetic particle clusters under a low-frequency alternating magnetic field is used to grind the surface of the workpiece with fine grooves, prompting the abrasive to fully enter the surface of the processed groove, preventing the deformation of the magnetic particle clusters after contact with the workpiece, and improving the The processing efficiency ensures the stability of the grinding tool; it can effectively realize micro-groove surface processing, and the surface roughness value of the workpiece after grinding can be reduced to less than 10 nanometers. The materials of the workpiece 37 ground by the present invention include: SUS304 stainless steel, C2680 brass, stainless steel plate, and optical glass.
所述磁性磨粒浆的配比为研磨液：磁性粒子：磨料颗粒＝1～3：12～18：3～8。The ratio of the magnetic abrasive slurry is grinding fluid: magnetic particles: abrasive particles = 1 to 3: 12 to 18: 3 to 8.
所述研磨液为油基研磨液(嘉实多油性切削液，型号为988)。The grinding fluid is an oil-based grinding fluid (Castrol oily cutting fluid, model 988).
本发明使用磁性粒子簇代替传统磁力刷，磁性粒子簇与磁力刷相比更加柔软，加工过程中不宜于造成工件表面划痕，磁性粒子簇是由磁性磨粒浆(研磨液31、磁性粒子32及磨料颗粒33)构成，在磁场作用下形成磁性粒子簇，在无磁场作用下呈现液态状。The present invention uses magnetic particle clusters to replace traditional magnetic brushes. Compared with magnetic brushes, magnetic particle clusters are softer and are not suitable for causing scratches on the surface of the workpiece during processing. The magnetic particle clusters are made of magnetic abrasive slurry (grinding fluid 31, magnetic particles 32 and abrasive particles 33), forming magnetic particle clusters under the action of a magnetic field, and appearing in a liquid state without the action of a magnetic field.
本法明选定油基研磨液作为磁性磨粒浆的研磨液31。当电磁线圈23通入低频交流电后，磁性粒子32在油基研磨液下振动最为活跃，磨料颗粒33利用率最高。This method selects oil-based polishing fluid as the polishing fluid 31 of the magnetic abrasive slurry. When the electromagnetic coil 23 is supplied with low-frequency alternating current, the magnetic particles 32 vibrate most actively under the oil-based grinding fluid, and the abrasive particles 33 have the highest utilization rate.
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