CN106584218A - Micro-fine structuralization surface finish machining method, medium and device - Google Patents
Micro-fine structuralization surface finish machining method, medium and device Download PDFInfo
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- CN106584218A CN106584218A CN201710002212.7A CN201710002212A CN106584218A CN 106584218 A CN106584218 A CN 106584218A CN 201710002212 A CN201710002212 A CN 201710002212A CN 106584218 A CN106584218 A CN 106584218A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/102—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using an alternating magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/0231—Magnetic circuits with PM for power or force generation
- H01F7/0242—Magnetic drives, magnetic coupling devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
In order to solve key technical problems that during micro-fine structuralization surface (the feature size is smaller than 500 microns) finishing, a micro-fine feature structure is easy to destroy, the finishing uniformity is difficult to guarantee, and the material removal rate is low, a novel micro-fine structure surface intelligent an controllable finishing method and device of magnetic force and speed driving purposely-made magnetic shear thickening finishing medium are invented. Alternating magnetic fields are effectively controlled through a magnetic field control unit, a motion control unit and an auxiliary coil control unit of the device, main shaft rotating speed adjustment is used in cooperation, intelligent control over finishing action force and the motion manner and the action scope of the purposely-made magnetic shear thickening finishing medium are achieved, and therefore micro-fine feature structure surface efficient and flexible finish machining is achieved. Tissue elements and a manufacturing process method of the purposely-made magnetic shear thickening finishing medium are provided. By means of the invention, operation space limitation and manufacturing difficulty generated during part/component structuralization micro-fine feature finishing through a traditional finishing process can be avoided, and therefore high-efficiency, high-accuracy and high-quality flexible finish machining is achieved.
Description
Technical field
The present invention relates to a kind of controllable polishing processing method in fine structure surface, special finishing medium and light are self-contained
Put, belong to the high-efficiency and precision Finishing field of difficult-to-machine material parts/member in critical minutiae body structure surface.
Background technology
The surface finishing technology of component of machine/component is that surface of the work integrity is further after mechanical Precision Machining
The continuity of raising, by not cutting off or only cutting off very thin material list surface layer, to realize removing the micro- flaw in surface, micro-crack, drawing
Stretch residual stress layer, reduce workpiece surface roughness or strengthen compressive residual stress with strengthening surface intensity, improve parts/
Component service life etc..At present, conventional surface finishing process mainly includes mechanical grinding and polishing, chemical polishing, electricity
Solution finishing, chemically mechanical polishing, ultrasonic assistant grinding and polishing, crush and grind, fluid finishing, MRF, magnetic grinding etc..Machine
Tool is ground with polishing as classical contact light adjusting method, using abrasive material, grinding tool or polishing pad under mutual moving-state
With the direct Mechanical Contact of surface of the work, the surface of workpiece to be machined is smoothed.Chemical polishing is similar to the principle of electrobrightening, leads to
Cross the outfit of polishing fluid, it is not necessary to complicated plant equipment, you can realize complex-shaped surface of the work polishing, but, polishing
Surface roughness it is higher, typically in ten to some tens of pm magnitude.Chemically mechanical polishing is using chemistry and mechanical Compound Machining
Principle, in semi-conductor silicon chip and the polishing of photoelectric crystal substrate, realize Subnano-class Super-smooth Surface Polishing, but be machined to
This is very expensive, and is typically only used for plane finishing.By the ultrasonic polishing method of supersonic oscillations abrasive suspension, processing
Macroforce is little, and workpiece will not be caused to deform, and with reference to chemistry and the compound action of electrochemistry, can effectively improve working (machining) efficiency.By
Swiftly flowing liquid and its abrasive particle of carrying wash away the finishing method of surface of the work, the inner surface finishing to complicated bend blind hole
With significant processed edge.By field drives, using magnetic abrasive medium or magnetorheological finishing medium to surface of the work
Carry out the process of finishing, with high in machining efficiency, processing conditionss it is easily controllable, burnishes integrity is good the features such as,
It is widely used in the surface finishing of difficult-to-machine material.However, existing surface finishing method adds mainly for macro surface finishing
Work, for fine structure surface, particularly complicated micro- texture surface, it is easy to destroy minutiae, it is difficult to ensure that material is removed
Homogeneity, and there is the low technology barrier of material removing rate, it is more difficult to directly apply.As current precision die is designed and manufacture
The fast development of technology, to high accuracy, miniaturization development, the micro-features size of mould is for the structured topography of mould
Surmount 500 below m, or even to nanoscale development.Therefore, new efficient, high accuracy, high-quality fine structure are developed
Change（Characteristic size is less than 500 m）Surface finishing method and technology have important theory significance and actual application value.
The present invention is directed to fine structure surface（Characteristic size is less than 500 m）Minutiae structure is easy to brokenly in finishing
Bad, finishing homogeneity is difficult to ensure, the low Key Scientific And Technical difficult problem of material removing rate, has invented a kind of special magnetic of magnetically-actuated and has cut
The new finishing method and apparatus of thickening finishing medium is cut, by the Untouched control of operating physical force, it is to avoid conventional tool is to zero
Machining interference during the structured features finishing of part/component, so as to realize high-effect high-quality finishing.
The content of the invention
The present invention provides a kind of controllable polishing processing method in fine structure surface, medium and device.Using alternation coil
The Based Intelligent Control of special magnetic shear thickening finishing medium is realized in the effect for producing magnetic field, solves the dynamic of surface finishing active force
Control problem, improves finishing quality and efficiency；Meanwhile, the coupled vibrations of special finishing medium is produced by applying drive signal,
Further improve finishing efficiency.
The present invention a kind of fine structure surface finishing method, special magnetic shear thickening medium and its light it is self-contained
Put provided technical scheme as follows：
1. described device：Including magnetic field control unit, motion control unit, ancillary coil control unit.Magnetic field control unit master
To include high-speed main spindle, main shaft connecting plate, magnetic conductor, solenoid, coil base；Main shaft connecting plate one end connection is at a high speed
Main shaft, other end connection solenoid base；The solenoid is wound on solenoid base.Motion control unit is main
Including three-axis accurate electricity driving displacement platform, there is provided the Three Degree Of Freedom movement of process component/component；Ancillary coil control unit master
To include main ancillary coil, connecting plate, described connecting plate one end connects ancillary coil, and it is electronic that the other end is connected to three-axis accurate
On displacement platform, and it is placed on the lower section for treating finishing parts/component surface；Described device also include parts/component fixture,
Clamp connecting plate；Described clamp connecting plate one end jockey, other end connection three-axis accurate electricity driving displacement platform；The fixture
It is upper that there is vac sorb air inlet, it is capable of achieving the absorption clamping of fine structure parts/component, it is to avoid mechanical point contact is right
The easily damaged parts of thin-walled/component produces stress concentration；
2. light adjusting method described in, is realized by following steps：
(1) solenoid is wound in coil base；
(2) treat that skin processing parts/component is adjusted to the action of a magnetic field region by three-axis accurate electricity driving displacement platform；
(3) magnetic field force formed after two pairs of solenoids of vertical distribution are powered puts on special magnetic shear thickening finishing medium
On；
(4) three-axis accurate electricity driving displacement platform control treats the fine surface texture of parts/component of finishing to the action of a magnetic field area, according to
The precision positioning of workpiece is realized by its Stroke Control；
(5) drive signal and adjustment main axis speed of solenoid are put on by control, is changed special magnetic shearing and is increased
Active force and sphere of action between thick finishing medium and fine structure surface, and then realize the intelligence control to finishing medium
System；
(6) axial direction that the radial vibration magnetic field force and ancillary coil of high-frequency signal generation are produced is applied by increasing solenoid
Vibration magnetic field force, further improves the skin processing efficiency of fine surface texture；
3. the composition of special magnetic shear thickening finishing medium is as follows with manufacturing process described in：
(1) special magnetic shear thickening finishing medium ingredients are by abrasive material, magnetic medium, dispersion phase, disperse medium, oxidant, work
Agent, PH regulators composition；Abrasive material is from conventional abrasive material or super hard abrasives such as metal oxide abrasive, carborundum, garnets
（Cubic oxide boron and diamond）, granularity is 1-200 μm；Magnetic medium selects iron carbonyl, and granularity is 1-50 μm；Dispersion phase is selected
With Calcium Carbonate, silicon dioxide, polystyrene or polymethyl methacrylate（PMMA）, particle diameter is less than 1 μm；Disperse medium is selected
Water, saline solution, Organic substance（Ethylene glycol（EG）, Propylene Glycol（PG）, butanediol（BG）Or Polyethylene Glycol（PEG）Deng）Or mineral
Oil etc.；Oxidant and activator are from sodium peroxide, sodium hypochlorite, potassium permanganate or calper calcium peroxide etc.；PH regulators are selected
Strong acid weak base salt or strong base-weak acid salt, such as sodium carbonate, potassium carbonate or sodium bicarbonate；
(2) special magnetic shear thickening finishing media fabrication process is as follows：Using oil bath paddling process or ball-milling method in ultrasonic wave added
It is lower to mix dispersion phase with disperse medium, dispersion is made, solid masses content is 10%-80%.When the particle diameter of dispersion phase is 1
Nm-100 nm, make the dispersion, in 70-90 DEG C of oil from mode of the oil bath paddling process in combination with ultrasonic dispersion
Under bath temperature, quantitative dispersion phase is slowly added in disperse medium, and mechanical agitation 1-2 h is carried out under ultrasonic wave added, controlled
Velocity interval 200-350 r/min processed, until dispersion phase is abundant and is evenly dispersed in disperse medium, makes dispersion；
When the particle diameter of dispersion phase is 100 nm-1 μm, the mode combined with ultrasonic dispersion from ball-milling method makes the dispersion
System, with the quantitative dispersion phase 0.5-1 h of abrading-ball dry grinding, be subsequently added quantitative disperse medium carries out ball milling under ultrasonic wave added
3-5 h, make the dispersion；Will the quantitative dispersion and quantitative abrasive material, magnetic medium, oxidant, activator, PH
Regulator, carries out ball milling 1-2 h under ultrasonic wave added, makes abrasive dispersion system, is placed into 24 h in vacuum drying oven, control
Temperature range 20-27 DEG C, removes the bubble in the abrasive dispersion system, is manufactured into special finishing medium.
The invention has the beneficial effects as follows：1st, a kind of fine structure surface finishing method of the present invention, passes through
The regulation of alternating magnetic field, is easy to control magnetic force, it is easy to the digital intelligent control of skin processing；2nd, it is of the present invention
A kind of fine structure surface finishing method, by the relative position for adjusting two pairs of solenoid magnetic conductors, produces different
The magnetic line of force distribution of distribution.The lower inside magnetic confining field for producing of remote configuration, the magnetic shear thickening finishing in overlay region is situated between
Matter be in steady statue, can under the drive of high-speed main spindle high-speed motion；Closely configure the lower magnetic field that can produce and assemble projection
Magnetic shear thickening finishing medium can be used as flexible finishing " small-sized aggregation grinding tool ", it is to avoid rigid machining tool is to micro-structural
The restriction in Surface Machining space；3rd, the solenoid of a kind of fine structure surface finishing device of the present invention and auxiliary
Index contour circle, by apply drive signal can in fine structure surface finishing process coupled vibrations, improve skin processing efficiency.
Description of the drawings
Fig. 1 is that a kind of magnetic field of the fine structure surface finishing method described in specific embodiment one, two is formed
Schematic diagram.
Fig. 2 is that a kind of overall structure of the fine structure surface finishing device described in specific embodiment three is illustrated
Figure.
Fig. 3 is a kind of coil configuration structure of the fine structure surface finishing device described in specific embodiment three
Schematic diagram.
Fig. 4 is process component/structure in a kind of fine structure surface finishing device described in specific embodiment
The patterned surface schematic diagram of part.
Specific embodiment
Specific embodiment one：With reference to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, illustrate concrete methods described mainly by following basic
Step is realized：
(1) solenoid（3-2）It is wound in coil base（3-3）；
(2) parts/component to be processed（2-4）By three-axis accurate electricity driving displacement platform（2-6）Adjust to the action of a magnetic field region；
(3) two pairs of solenoids of vertical distribution（3-2）The magnetic field force formed after energization puts on special magnetic shear thickening light
Whole medium（4-2）On；
(4) three-axis accurate electricity driving displacement platform（2-6）Fine structure parts/the component of finishing is treated in control（2-4）To magnetic field
Active region, by its Stroke Control the precision positioning of workpiece is realized；
(5) solenoid is put on by control（3-2）Field drives signal and adjustment main shaft（2-1）Velocity of rotation, changes
Special magnetic shear thickening finishing medium（4-2）With parts/component（2-4）Between active force and model of action, and then realize
The digital intelligent of finishing medium is controlled；
(6) by increasing solenoid（3-2）Apply radial vibration magnetic field force and ancillary coil that high-frequency signal is produced（2-
10）The axial vibration magnetic field force of generation, improves surface finishing efficiency.
By adjusting two pairs of solenoid magnetic conductors（1-1）Relative position, produce the different distributions magnetic line of force（1-2）.When
Under remote configuration condition, internal magnetic confining field is produced, in overlay region（1-3）It is interior, magnetic shear thickening finishing medium（4-2）Place
In steady statue, in high-speed main spindle（2-1）Drive under high-speed motion, realize the high-efficiency soft finishing of fine structure surface；When
Closely under configuration condition, the raised magnetic shear thickening finishing medium of magnetic field aggregation is produced（4-2）Can be " little as flexible finishing
Type assembles grinding tool "（1-4）,）, realize the high-efficiency soft finishing of fine structure surface.
Specific embodiment two：Include magnetic field control unit with reference to Fig. 2 and Fig. 3 explanation present embodiment described devices（2-
3）, motion control unit, ancillary coil（2-10）Control unit.Magnetic field control unit（2-3）Mainly include high-speed main spindle（2-
1）, main shaft connecting plate（2-2）, magnetic conductor（3-1）, solenoid（3-2）, coil base（3-3）, the main shaft connecting plate（2-
2）One end connects high-speed main spindle（2-1）, other end connection solenoid base（3-3）, the solenoid（3-2）It is wound on electricity
Magnetic coil base（3-3）On；Motion control unit mainly includes three-axis accurate electricity driving displacement platform（2-6）, there is provided processing zero
Part/component（2-4）Three Degree Of Freedom movement；Ancillary coil（2-10）Control unit mainly includes main ancillary coil（2-10）、
Connecting plate（2-11）, described connecting plate one end connects ancillary coil（2-10）, it is flat that the other end is connected to three-axis accurate electricity driving displacement
Platform（2-6）On, and be placed on and treat finishing parts/component（2-4）Lower section.
Specific embodiment three：Include parts/component with reference to Fig. 2 explanation present embodiment described devices（2-4）Fixture
（2-5）, clamp connecting plate（2-9）；The clamp connecting plate（2-9）One end jockey（2-5）, other end connection three-axis accurate
Electricity driving displacement platform（2-6）, other are constituted and annexation is identical with specific embodiment two.
Specific embodiment four：The fixture with reference to described in Fig. 2 explanation present embodiments（2-5）Upper processing vac sorb air inlet
（2-8）, it is capable of achieving the absorption clamping of fine structure parts/component, it is to avoid mechanical point contact is produced to thin-wall member should
Power is concentrated, and other compositions and annexation are identical with specific embodiment two or three.
Specific embodiment five：Solenoid with reference to described in Fig. 2 and Fig. 4 explanation present embodiments（3-2）, ancillary coil
（2-10）Controller can be passed through（2-7）Apply drive signal, produce alternating magnetic field, adjust control signal and be capable of achieving finishing medium
（4-2）To parts/component（2-4）Groove side wall（4-1）And groove floor（4-3）Skin processing, formed digitized add
Industry control system, other are constituted and annexation is identical with specific embodiment two, three or four.
Specific embodiment six：The solenoid with reference to described in Fig. 2 and Fig. 3 explanation present embodiments（3-2）And ancillary coil
（2-10）The radial and axial complex vibration for applying to be produced after drive signal is favorably improved groove side wall（4-1）And groove-bottom
Face（4-3）Skin processing efficiency, other are constituted and annexation is identical with specific embodiment two, three or four.
Based on a kind of fine structure surface finishing method described in specific embodiment one to six, medium and dress
Put, using minute groove surface as test sample, carry out the surface finishing with micrometer-class form workpiece, can pass through
The control signal of solenoid and adjustment main axis speed formed to magnetic shear thickening finishing medium（4-2）Finishing is acted on
Intensity is controlled with the digital intelligent of scope.
Claims (8)
1. a kind of composition of the special magnetic shear thickening finishing medium in fine structure surface is as follows with manufacturing process：
（1）Special magnetic shear thickening finishing medium ingredients are by abrasive material, magnetic medium, dispersion phase, disperse medium, oxidant, work
Agent, PH regulators composition；Abrasive material is from conventional abrasive material or super hard abrasives such as metal oxide abrasive, carborundum, garnets
（Cubic oxide boron and diamond）, granularity is 1-200 μm；Magnetic medium selects iron carbonyl, and granularity is 1-50 μm；Dispersion phase is selected
With Calcium Carbonate, silicon dioxide, polystyrene or polymethyl methacrylate（PMMA）, particle diameter is less than 1 μm；Disperse medium is selected
Water, saline solution, Organic substance（Ethylene glycol（EG）, Propylene Glycol（PG）, butanediol（BG）Or Polyethylene Glycol（PEG）Deng）Or mineral
Oil etc.；Oxidant and activator are from sodium peroxide, sodium hypochlorite, potassium permanganate or calper calcium peroxide etc.；PH regulators are selected
Strong acid weak base salt or strong base-weak acid salt, such as sodium carbonate, potassium carbonate or sodium bicarbonate；
Special magnetic shear thickening finishing media fabrication process is as follows：Will under ultrasonic wave added using oil bath paddling process or ball-milling method
Dispersion phase mixes with disperse medium, makes dispersion, and solid masses content is 10%-80%；
（2）When the particle diameter of dispersion phase is 1 nm-100 nm, made from mode of the oil bath paddling process in combination with ultrasonic dispersion
The dispersion, under 70-90 DEG C of oil bath temperature, quantitative dispersion phase is slowly added in disperse medium, and auxiliary in ultrasound
Helping down carries out mechanical agitation 1-2 h, controls velocity interval 200-350 r/min, until dispersion phase is abundant and is evenly dispersed into
In disperse medium, dispersion is made；When the particle diameter of dispersion phase is 100 nm-1 μm, from ball-milling method and ultrasonic dispersion
With reference to mode make the dispersion, dry grind quantitative dispersion phase 0.5-1 h with abrading-ball, be subsequently added quantitative dispersion
Medium carries out ball milling 3-5 h under ultrasonic wave added, makes the dispersion；Will the quantitative dispersion and quantitative abrasive material,
Magnetic medium, oxidant, activator, the mixing of PH regulators, carry out ball milling 1-2 h under ultrasonic wave added, make abrasive dispersion
System, is placed into 24 h in vacuum drying oven, controls temperature range 20-27 DEG C, removes the bubble in the abrasive dispersion system, system
Cause special magnetic shear thickening finishing medium.
2. a kind of fine structure surface finishing method, is mainly realized by following basic step：
（1）Solenoid（3-2）It is wound in coil base（3-3）；
（2）Parts/component to be processed（2-4）By three-axis accurate electricity driving displacement platform（2-6）Adjust to the action of a magnetic field region；
（3）Two pairs of solenoids of vertical distribution（3-2）The magnetic field force formed after energization puts on special magnetic shear thickening light
Whole medium（4-2）On；
（4）Three-axis accurate electricity driving displacement platform（2-6）Fine structure parts/the component of finishing is treated in control（2-4）To magnetic field
Active region, by its Stroke Control the precision positioning of workpiece is realized；
（5）Solenoid is put on by control（3-2）Field drives signal and adjustment main shaft（2-1）Velocity of rotation, can be with
Change special magnetic shear thickening finishing medium（4-2）With parts/component（2-4）Between active force and model of action, and then
Realize to special magnetic shear thickening finishing medium（4-2）Digital intelligent control；
（6）Solenoid（3-2）Apply radial vibration magnetic field force and ancillary coil that high-frequency signal is produced（2-10）Produce
Axial vibration magnetic field force, further improves surface finishing efficiency.
3. a kind of fine structure surface finishing method according to claim 2, it is characterised in that：By adjustment two
To solenoid magnetic conductor（1-1）Relative position, produce the different distributions magnetic line of force（1-2）；When under remote configuration condition, produce
Raw internal magnetic confining field, in overlay region（1-3）It is interior, magnetic shear thickening finishing medium（4-2）It is main in high speed in steady statue
Axle（2-1）Drive under high speed relative motion, realize the high-efficiency soft finishing of fine structure surface；When closely configuration condition
Under, produce the raised magnetic shear thickening finishing medium of magnetic field aggregation（4-2）Can be used as flexible finishing " small-sized aggregation grinding tool "（1-
4）, realize the high-efficiency soft finishing of fine structure surface.
4. a kind of operation device of the fine structure surface finishing method according to claim 2,3, its feature exists
In：Described device includes magnetic field control unit（2-3）, motion control unit, ancillary coil（2-10）Control unit；Magnetic field controls
Unit（2-3）Mainly include high-speed main spindle（2-1）, main shaft connecting plate（2-2）, magnetic conductor（3-1）, solenoid（3-2）, coil
Base（3-3）；The main shaft connecting plate（2-2）One end connects high-speed main spindle（2-1）, other end connection solenoid base（3-
3）；The solenoid（3-2）It is wound on solenoid base（3-3）On；Motion control unit mainly includes three-axis accurate electricity
Dynamic displacement platform（2-6）, there is provided process component/component（2-4）Three Degree Of Freedom movement；Ancillary coil（2-10）Control unit
Mainly include main ancillary coil（2-10）, connecting plate（2-11）, described connecting plate one end connects ancillary coil（2-10）, it is another
End is connected to three-axis accurate electricity driving displacement platform（2-6）On, and be placed on and treat finishing parts/component（2-4）Lower section.
5. a kind of operation device of the fine structure surface finishing method according to claim 2,3, its feature exists
In：Described device includes parts/component（2-4）Fixture（2-5）, clamp connecting plate（2-9）；The clamp connecting plate（2-9）
One end jockey（2-5）, other end connection three-axis accurate electricity driving displacement platform（2-6）, other are constituted and annexation and power
Profit requires that 4 is identical.
6. a kind of operation device of the fine structure surface finishing method according to claim 4,5, its feature exists
In：The fixture（2-5）Upper processing vac sorb air inlet（2-8）, it is capable of achieving the absorption folder of fine structure parts/component
Hold, it is to avoid mechanical point contact produces stress concentration to thin-wall member, and other are constituted and annexation and the phase of claim 4 or 5
Together.
7. the operation device of a kind of fine structure surface finishing method according to claim 4,5 or 6, its feature
It is：Described solenoid（3-2）, ancillary coil（2-10）Controller can be passed through（2-7）Apply drive signal, produce alternation
Magnetic field, adjusts control signal and is capable of achieving finishing medium（4-2）To parts/component（2-4）Groove side wall（4-1）And bottom surface
（4-3）Skin processing, formed Digital manufacturing control, other composition and annexation it is identical with claim 4,5 or 6.
8. according to a kind of operation device of fine structure surface finishing method in claim 3,4 or 5, it is characterised in that：
The solenoid（3-2）And ancillary coil（2-10）The radial and axial complex vibration for applying to be produced after drive signal contributes to
Surface finishing efficiency is improved, other compositions and annexation are identical with claim 4,5 or 6.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108527016A (en) * | 2018-06-15 | 2018-09-14 | 辽宁科技大学 | It is a kind of to utilize low frequency alternating magnetic field ultraprecise magnetic grinder and method |
| CN108687573A (en) * | 2018-05-23 | 2018-10-23 | 山东理工大学 | A kind of whole processing unit (plant) of automation magnetic field fill-in light and method |
| CN110039380A (en) * | 2019-04-11 | 2019-07-23 | 上海理工大学 | A kind of magnetic coupling fluid polishing device for the polishing of periodical very low power structure |
| CN110640614A (en) * | 2019-10-16 | 2020-01-03 | 浙江工业大学 | Negative pressure polishing device and method for polishing blind hole of conductive workpiece |
| CN111515874A (en) * | 2020-03-12 | 2020-08-11 | 浙江工业大学 | Efficient ultra-precision polishing method based on shear expansion effect |
| CN111716158A (en) * | 2020-06-03 | 2020-09-29 | 大连理工大学 | Method and device for polishing inner surface |
| CN112658817A (en) * | 2021-01-26 | 2021-04-16 | 山东理工大学 | Alternating magnetic field-based complex curved surface magnetic field auxiliary finishing device and method |
| CN112658962A (en) * | 2021-01-26 | 2021-04-16 | 山东理工大学 | Vibration finishing device and method |
| CN112692716A (en) * | 2021-01-26 | 2021-04-23 | 山东理工大学 | Inner surface magnetic field auxiliary finishing device and method based on controllable magnetic field |
| CN113714863A (en) * | 2021-09-10 | 2021-11-30 | 山东理工大学 | Bidirectional cooperative vibration polishing device and method based on magnetic field coupling |
| CN113999616A (en) * | 2021-11-12 | 2022-02-01 | 山东理工大学 | Magnetic shear thickening polishing medium and preparation method thereof |
| CN116117677A (en) * | 2023-04-04 | 2023-05-16 | 山东理工大学 | Magnetic guiding fixed threshold release magnetic shear thickening chemical polishing method |
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