CN208841052U - A kind of Magnetorheological Polishing equipment - Google Patents
A kind of Magnetorheological Polishing equipment Download PDFInfo
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- CN208841052U CN208841052U CN201721927239.9U CN201721927239U CN208841052U CN 208841052 U CN208841052 U CN 208841052U CN 201721927239 U CN201721927239 U CN 201721927239U CN 208841052 U CN208841052 U CN 208841052U
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Abstract
The utility model provides a kind of Magnetorheological Polishing equipment, comprising: magnetic polishing wheel, the magnetic polishing wheel are equipped with magnet；The magnet includes N number of sub- magnet, and wherein N is positive integer.Magnetorheological Polishing equipment provided by the utility model can be according to the shape of different processing objects, magnet is modified, so as to be polished to processing object of different shapes, to realize the efficient Ultra-smooth machining of the different shapes workpiece surface such as big flat work pieces and non-free curved surface, curved surface can be processed, adapt to the change in shape of processing object.
Description
Technical field
The utility model relates to precision processing technology field, in particular to a kind of Magnetorheological Polishing equipment.
Background technique
With the development of information industry and opto-electronics and the fusion of photoelectric technology, the application of optical element is more and more wider
General, higher and higher to the requirement on machining accuracy of optical component, surface accuracy needs to reach ultra-smooth degree, and (roughness Ra reaches
To 1nm or less), surface figure accuracy also has higher requirement (form accuracy reaches 0.5 micron or less).Therefore optical element surface
Design becomes a new challenge of Ultraprecision Machining.
To solve the problems, such as that optical element surface high-efficiency and precision polishes, beginning of the nineties in last century KORDONSKI and its partner
Electromagnetism, fluid dynamics, analytical chemistry etc. are combined and propose a kind of novel optical surface processing method-magnetorheological throwing
Light technology (MRF).This method has the tradition polishings such as polishing effect is good, does not generate pressure surface damage, is suitble to complex surface processing
Not available advantage has evolved into a kind of final processing method of revolutionary optical surface, is particularly suitable for axisymmetric aspheric surface
Ultra-precision Turning.When being processed at present using magnetic rheological polishing method to flat work pieces, mainly with the development of QED company, the U.S.
The magnetorheological lathe of various models based on, principle is that workpieces processing is placed in the surface of magnetic polishing wheel, workpiece surface and magnetic
A spill gap is formed between polishing wheel, and in one magnetic pole of magnetic polishing wheel arranged beneath, being allowed to can in spill gap location
High-intensitive gradient magnetic is formed, when the gap that magnetorheological fluid is formed by workpiece and magnetic polishing wheel, Magnetorheologicai polishing liquid can be
" polishing ribbon " is formed under high-intensitive gradient magnetic, and workpiece is processed by numerical control program control " polishing ribbon ".Hunan
The inclined shaft Technique of Magnetorheological Finishing for the small-bore aspherical mirror machining that university develops uses outside to polish rotary body, and inside is solid
The inclined shaft Magnetorheological Polishing head for determining excitation unit, realizes the Ultraprecise polished of small-bore non-spherical surface.The National University of Defense technology
Use structure for 200mm and 20mm magnetic polishing wheel, internal magnetic field generating device is permanent magnet, because to limit its magnetic field strong for structure
Degree is in 0.15T or so.Above-mentioned patent belongs to single rubbing head and contacts with workpiece surface part " spot ", to plane and curved surface zero
Part can only carry out point by point scanning processing to workpiece by numerical control program when being processed, and scanning need to consume the plenty of time, this just makes
It is not easy to guarantee at low efficiency, machining shape precision, while the volume of electromagnetic field generator is very big, and is inconvenient to add cooling fill
It sets, it is difficult to realize more magnetic pole simultaneous processings.Patent CN200610132495.9 constructs flat by using the more array of magnetic dipoles of permanent magnet
The mode of face polishing pad realizes the face domain contact processing to flat work pieces, improves plane machining efficiency, but can not be to curved surface
High efficiency processing is carried out, does not adapt to the change in shape of workpiece.
Therefore, when how to be polished in application magnetic converting technique to processing object, curved surface can be processed, is fitted
The change in shape for answering processing object is those skilled in the art's technical problem urgently to be resolved.
Utility model content
In view of this, applying magnetic converting technique the purpose of this utility model is to provide a kind of Magnetorheological Polishing equipment
In when being polished to processing object, curved surface can be processed, adapt to the change in shape of processing object.Its concrete scheme is such as
Under:
A kind of Magnetorheological Polishing equipment, comprising: magnetic polishing wheel, the magnetic polishing wheel are equipped with magnet；The magnet includes N number of
Sub- magnet, wherein N is positive integer.
Preferably, N number of sub- magnet is arranged in array.
Preferably, N number of sub- magnet is cylindrical-shaped structure.
Preferably, N number of sub- magnet is circular ring structure or semicircle ring structure.
Preferably, N number of sub- magnet arrangement is that end face edge reinforces permanent magnet, indent arcuation correction of the flank shape permanent magnet, end face
Circular arc correction of the flank shape permanent magnet, end chamfer permanent magnet or external convex arc shape correction of the flank shape permanent magnet.
Preferably, the adjustable gasket of quantity is equipped between the sub- magnet.
The utility model provides a kind of Magnetorheological Polishing equipment, comprising: magnetic polishing wheel, the magnetic polishing wheel are equipped with magnet；
The magnet includes N number of sub- magnet, and wherein N is positive integer.Magnetorheological Polishing equipment provided by the utility model can be according to not
The shape of same processing object, modifies magnet, so as to polish to processing object of different shapes, to realize
The efficient Ultra-smooth machining of the big different shapes workpiece surface such as flat work pieces and non-free curved surface, can process curved surface,
Adapt to the change in shape of processing object.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also
Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of complete section main view for Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides；
Fig. 2 is a kind of semi-circular permanent magnet for Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides
A-A cross-sectional view；
Fig. 3 is a kind of U-shaped permanent magnet for Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides
A-A cross-sectional view；
Fig. 4 is a kind of circular ring shape permanent magnet for Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides
Scheme of installation；
Fig. 5 is the sectional view that end face edge reinforces permanent magnet；
Fig. 6 is the sectional view of end face circular arc correction of the flank shape permanent magnet；
Fig. 7 is the sectional view of indent arcuation correction of the flank shape permanent magnet；
Fig. 8 is the sectional view of end chamfer permanent magnet；
Fig. 9 is the sectional view of external convex arc shape correction of the flank shape permanent magnet；
Figure 10 is that a kind of magnetic polishing wheel for Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides is repaired
Shape figure；
Figure 11 is a kind of schematic diagram of the Magnetorheologicai polishing liquid supply mode I of Magnetorheological Polishing equipment of the utility model；
Figure 12 is a kind of schematic diagram of the Magnetorheologicai polishing liquid supply mode II of Magnetorheological Polishing equipment of the utility model；
Figure 13 is a kind of gear drive schematic diagram of Magnetorheological Polishing equipment of the utility model；
Figure 14 is a kind of belt drive schematic diagram of Magnetorheological Polishing equipment of the utility model；
Figure 15 is a kind of plane machining schematic diagram of Magnetorheological Polishing equipment of the utility model；
Figure 16 is a kind of Machining of Curved Surface schematic diagram of Magnetorheological Polishing equipment of the utility model；
Figure 17 is a kind of surface the 2.5D machining sketch chart of Magnetorheological Polishing equipment of the utility model.
In figure: 1. semi-circular permanent magnets, 2. gaskets, 3. end face seal lids, 4. labyrinth type sealing rings, 5. angular contact ball axis
It holds, 6. magnet fixing axles, hexagonal fastening screw I in 7., 8. flat washer I, 9. spring washer I, 10. roller screws, 11. cylinders
Pin, 12. baffles, 13. left mounting plates, 14. spring washer II, 15. flat washer II, 16. bolts, 17. right mounting plates, 18. spiral shells
Mother, 19. motors, 20. flat keys, 21. hexagon socket head cap screws, 22. angular contact ball bearings, 23, sleeve, hexagonal fastening screw II in 24.,
25. gasket, 26. bearing (ball) covers, 27. felt-ring seal circles, 28. driving gears I, 29. driving wheel gear locking nuts, 30. output shafts,
31. driven gear, 32. driven gear locking nuts, 33. labyrinth type sealing rings, hexagonal fastening screw III in 34., 35. bearing ends
Lid, 36. labyrinth type sealing rings, 37. magnetic polishing wheel shaft, 38. deep groove ball bearings, 39. magnet locking nuts, 40.U type permanent magnet,
41. circular ring shape permanent magnet, 42. nozzle Is, 43. carrier fluid casees, 44. Magnetorheologicai polishing liquids, 45. workpiece, 46. nozzle IIs, 47. recycling
Device, 48. eccentric magnet fixing axles, 49. end face edges reinforce permanent magnet, 50. indent arcuation correction of the flank shape permanent magnets, 51. synchronous belts
Wheel II, 52. synchronous pulleys III, 53. synchronous pulleys IV, 54. synchronous belts, 55. permanent magnets, 56. end face circular arc correction of the flank shape permanent magnets,
57. axial plane correction of the flank shape magnetic polishing wheel, 58. end chamfer permanent magnets, 59. external convex arc shape correction of the flank shape permanent magnets, 60. driving gears II, 61.
Synchromesh gear, 62. driving wheels, 63. tensioning wheels, 64. synchronous pulley I, 65. angles adjustment wheel I, 66. angles adjustment wheel II.
Specific embodiment
The utility model embodiment provides a kind of Magnetorheological Polishing equipment, by magnet correction of the flank shape and/or magnetic polishing wheel
Correction of the flank shape polishes workpiece of different shapes by the way of the series connection of more magnetic poles and the combination of multiple rubbing heads, improves magnetic
Rheology polishing efficiency realizes the efficient Ultra-smooth machining of the different shapes workpiece surface such as big flat work pieces and non-free curved surface, is
A kind of magnetorheological efficient polissoir towards workpiece shapes.
It, below will knot to enable the purpose of utility model, feature, advantage of the utility model more obvious and understandable
The attached drawing in the utility model embodiment is closed, the technical scheme in the utility model embodiment is clearly and completely described,
Obviously, the embodiments described below are only the utility model a part of the embodiment, and not all embodiment.Based on this reality
It is obtained by those of ordinary skill in the art without making creative efforts all other with the embodiment in novel
Embodiment is fallen within the protection scope of the utility model.
Please refer to figs. 1 to 4, and Fig. 1 is that a kind of Magnetorheological Polishing that a kind of specific embodiment of the utility model provides is set
Standby complete section main view；Fig. 2 is a kind of semi-ring for Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides
Shape permanent magnet A-A cross-sectional view；Fig. 3 is a kind of U for Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides
The A-A cross-sectional view of type permanent magnet；Fig. 4 is a kind of Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides
The scheme of installation of circular ring shape permanent magnet.
In a kind of specific embodiment of the utility model, the utility model embodiment provides a kind of Magnetorheological Polishing and sets
It is standby, comprising: magnetic polishing wheel 37, the magnetic polishing wheel are equipped with magnet；The magnet includes N number of sub- magnet, and wherein N is positive integer.
Magnetorheological Polishing equipment provided by the utility model can carry out the position of sub- magnet according to the shape of different processing objects
Adjustment, to simulate the shape of different processing objects, and then can polish processing object of different shapes, with reality
The now efficient Ultra-smooth machining of the different shapes workpiece surface such as big flat work pieces and non-free curved surface, can add curved surface
Work adapts to the change in shape of processing object.
Specifically, a kind of Magnetorheological Polishing equipment of the utility model, magnetic polishing wheel 37, the magnetic polishing wheel are equipped with magnetic
Iron further includes magnetic polishing wheel rotating device and power synchronous transfer device as field generator for magnetic；
The field generator for magnetic include left mounting plate 13, interior hexagonal fastening screw I7, roller screw 10, straight pin 11,
Baffle 12, gasket 2, magnetic polishing wheel 37, semi-circular permanent magnet 1 and magnet locking nut 39；
Magnet fixing axle 6 is located inside magnetic polishing wheel 37, and 6 one end of magnet fixing axle passes through centrally located roller screw
10, the straight pin 11 of arranged off-centre, baffle 12 and uniform circular positioned at end face are distributed in the fastening spiral shell of the interior hexagonal on baffle 12
Nail I7 is fixed on left mounting plate 13, and the other end is connect by deep groove ball bearing 38 with 37 inner hole of magnetic polishing wheel, according to workpiece shape
At least one semi-circular permanent magnet 1 of shape and width and determination is fixed on magnet and is fixed by gasket 2 and magnet locking nut 39
On axis 6；
The magnetic polishing wheel rotating device includes left mounting plate 13, right mounting plate 17, magnet fixing axle 6, a pair of of angular contact
Ball bearing 5, end face seal lid 3, magnetic polishing wheel 37, deep groove ball bearing 38 and bearing (ball) cover 35.
Further, it is preferable to which ground, can also be adjusted the shape of the polishing portion of the magnetic polishing wheel, so that the magnetic
The polishing portion shape of polishing wheel and the processing object are adapted.
Specifically, left mounting plate 13 and the arrangement parallel to each other of right mounting plate 17, end face seal lid 3 and 37 end face of magnetic polishing wheel
It is connected through a screw thread to form an entirety, and by a pair of of angular contact ball bearing 5 and bearing (ball) cover 35 and is uniformly distributed in bearing
Fastening screw III 34 on end cap 35 is fixed on left mounting plate 13 and right mounting plate 17, and 37 outer circle axial plane of magnetic polishing wheel is according to work
Part shape and width and carry out correction of the flank shape.
Further, the quantity of the magnetic polishing wheel can be adjusted.
Specifically, the magnetic polishing wheel rotating device and field generator for magnetic form a complete magnetorheological dynamic pressure polishing
Head, field generator for magnetic is stationary when magnetic polishing wheel rotating device high speed rotation, three cloth arranged side by side of magnetorheological dynamic pressure rubbing head
It sets, to adapt to workpiece shapes and length；
In the present embodiment, the power synchronous transfer device includes motor 19, output shaft 30, driving gear II 60, driving
29, three driven gears 31 of wheel gear locking nut, synchromesh gear 61, a pair of of angular contact ball bearing 22, bearing (ball) cover 26 with it is synchronous
Gear 61, the hexagon socket head cap screw 21 that wherein motor 19 is distributed on bearing (ball) cover 26 by uniform circular are fixed on right mounting plate 17
On, output shaft 30 is connected with the axis of motor 19 by flat key 20 and is fixed on right 17 inner hole of mounting plate by angular contact ball bearing 22
On, driving gear II 60 is mounted on the end face of output shaft 30, three driven gears 31 by key and driving wheel gear locking nut 29
Be mounted on the extension end of magnetic polishing wheel 37 by key and with driven gear locking nut 32, and with driving gear II 60, synchronous gear
61 intermeshing of wheel, three magnetic polishing wheel rotating devices being arranged in juxtaposition are realized by a synchromesh gear 61 and are rotated synchronously.
In the present embodiment, labyrinth type sealing ring 4, magnetic polishing wheel are equipped between the end face seal lid 3 and magnet fixing axle 6
It is equipped with labyrinth type sealing ring 36,33 between 37 and right mounting plate 17 and bearing (ball) cover, is set between bearing (ball) cover 26 and output shaft 30
There is felt-ring seal 27.
In the present embodiment, the magnet fixing axle 6, magnetic polishing wheel 37 use hard alloy diamagnetic material.
There are many forms for the magnet shape, can be semi-circular permanent magnet 1, U-shaped permanent magnet 40, circular ring shape permanent magnet
41, wherein semi-circular permanent magnet 1 and U-shaped permanent magnet 40 are mounted in the magnet fixing axle 6, and circular ring shape permanent magnet 41 is then installed
In eccentric magnet fixing axle 48, in the present embodiment, the magnet uses semi-circular permanent magnet 1, magnetic field strength 3200Gs.
The equipment that specific embodiment of the present invention provides can according to the shape of different processing objects, to magnet into
Row finishing, so as to be polished to processing object of different shapes, to realize big flat work pieces and non-free curved surface etc. no
The efficient Ultra-smooth machining of similar shape workpiece surface, can process curved surface, adapt to the shape of processing object.
Fig. 5 to Fig. 9 is please referred to, Fig. 5 is the sectional view that end face edge reinforces permanent magnet；Fig. 6 is end face circular arc correction of the flank shape permanent magnetism
The sectional view of iron；Fig. 7 is the sectional view of indent arcuation correction of the flank shape permanent magnet；Fig. 8 is the sectional view of end chamfer permanent magnet；Fig. 9 is
The sectional view of external convex arc shape correction of the flank shape permanent magnet.
In above-mentioned specific embodiment, the quantity and size of the permanent magnet can pass through according to the size of workpieces processing
The number of gasket 2 is adjusted to realize change；The permanent magnet 55 according to the shape of processed object can correction of the flank shape add at end face edge
Strong permanent magnetic iron 49, indent arcuation correction of the flank shape permanent magnet 50, end face circular arc correction of the flank shape permanent magnet 56, end chamfer permanent magnet 58, outer convex arc
The different shapes such as shape correction of the flank shape permanent magnet 59, to reach being uniformly distributed for workpiece surface magnetic field strength.According to the processing object
The quantity of magnet in the magnetic polishing wheel is arranged in size.According to the size of the processing object, increase and decrease in Xiang Suoshu magnetic polishing wheel
The quantity of non magnetic gasket and the quantity of magnet, so that the size phase of effective polishing portion of magnetic polishing wheel and the processing object
Symbol.
Referring to FIG. 10, Figure 10 is a kind of Magnetorheological Polishing equipment that a kind of specific embodiment of the utility model provides
Magnetic polishing wheel correction of the flank shape figure.
In this embodiment, 37 outer circle axial plane of magnetic polishing wheel can carry out correction of the flank shape according to workpiece shapes and width, such as
Axial plane correction of the flank shape magnetic polishing wheel 57, in the present embodiment, using the magnetic polishing wheel 37 of non-correction of the flank shape.
Figure 11 is please referred to, Figure 12, Figure 11 are that a kind of Magnetorheologicai polishing liquid of Magnetorheological Polishing equipment of the utility model supplies
The schematic diagram of mode I；Figure 12 is a kind of showing for Magnetorheologicai polishing liquid supply mode II of Magnetorheological Polishing equipment of the utility model
It is intended to.
The Magnetorheologicai polishing liquid 44 as shown in Figure 11, Figure 12 can have 2 kinds of presentation modes, first is that Magnetorheologicai polishing liquid 44 by
Nozzle II 46 sprays, and the Magnetorheologicai polishing liquid 44 of ejection throws workpiece into polishing area with the magnetic polishing wheel 37 of rotation
Light, when Magnetorheologicai polishing liquid 44 leaves polishing area with the magnetic polishing wheel 37 of rotation, recyclable device 47 recycles it；Two
It is to spray into Magnetorheologicai polishing liquid 44 in carrier fluid case 43 by nozzle I 42 before being polished, the magnetic polishing wheel 37 of rotation is immersed in
It does not need that Magnetorheologicai polishing liquid 44 is recycled and updated in Magnetorheologicai polishing liquid 44, in polishing process；In the present embodiment, adopt
The Magnetorheologicai polishing liquid supply mode shown in Figure 12.
On the basis of above-mentioned specific embodiment, the utility model also provides a kind of Magnetorheological Polishing equipment, comprising: magnetic
Polishing wheel, the magnetic polishing wheel are equipped with magnet；The magnet includes N number of sub- magnet, and wherein N is positive integer.
After getting processing object, the position of adjustable N number of sub- magnet makes the shape and processing of magnet entirety
The shape of object is about the same, and using the thought of calculus, the shape of the processing object needed out is piled up using sub- magnet.It can be with
Subsequent any magnetic rheological polishing method is realized using the Magnetorheological Polishing equipment that present embodiment provides.Preferably, N number of
The sub- magnet is cylindrical-shaped structure.N number of sub- magnet is cylindrical-shaped structure, it is of course also possible to for circular ring structure or half
Circular ring structure.
Preferably, N number of sub- magnet can be arranged in array.In some embodiments, N number of sub- magnet
End face edge can be arranged into and reinforce permanent magnet, indent arcuation correction of the flank shape permanent magnet, end face circular arc correction of the flank shape permanent magnet, end chamfer forever
Magnet or external convex arc shape correction of the flank shape permanent magnet, naturally it is also possible to be other shapes.
Figure 15 is please referred to, Figure 15 is a kind of plane machining schematic diagram of Magnetorheological Polishing equipment of the utility model.
As shown in figure 15, use any of the above-described kind of Magnetorheological Polishing equipment flat for the monocrystalline 6H-SiC of Φ 100mm to diameter
The step of face substrate 45 is processed are as follows:
Step 1: selecting three 37 parallel combinations of magnetic polishing wheel together according to the size and shape of workpiece 45, and every
A magnetic polishing wheel installs the identical semi-circular permanent magnet 1 of three sizes and forms field generator for magnetic, the magnetic field of semi-circular permanent magnet 1
Intensity is 3200Gs；
Step 2: by workpieces processing 45 vacuum inhale by way of clamping on carrier fluid case 43, and be placed in rubbing head throwing
Within the scope of the correspondence of light, adjusting 37 lower surface of magnetic polishing wheel is 1mm at a distance from 45 upper surface of workpiece；
Step 3: the alumina abrasive for being 3 microns by the partial size that addition concentration is 6% in deionized water, and going
The carbonyl iron dust that the partial size that addition concentration is 36% in ionized water is 0.8 micron, and dispersing agent and concentration that concentration is 4% is added
Magnetorheologicai polishing liquid 44 is formed by vibration of ultrasonic wave 20 minutes after being sufficiently stirred for 2% antirust agent；
Step 4: Magnetorheologicai polishing liquid 44 is poured into carrier fluid case 43 by nozzle I 42, make magnetorheological in carrier fluid case 43
Polishing fluid 44 covers 45 upper surface 5mm of workpiece, and flexible polishing pad is formed under the action of permanent magnet；
Step 5: starting motor 19, under the drive of power synchronous transfer device, three magnetic polishing wheels 37 are same around own axes
Step rotation, the rotary motion of magnetic polishing wheel 37 is separated, make magnet fixing axle by angular contact ball bearing 5 and deep groove ball bearing 38
6 remain stationary, so that field generator for magnetic is stationary when magnetic polishing wheel rotating device high speed rotation, so that permanent magnet end face
The static-magnetic line of force is changed into the dynamic magnetic line of force；
Step 6: in process, workpiece 45 with carrier fluid case 43 be X, Y-direction plane motion when, magnetorheological throwing
The flexible polishing pad that light liquid 44 is formed can carry out shear removal to workpiece surface material, realize monocrystalline 6H-SiC planar substrate surface
The efficient ultra-smooth uniform polish of material；
Step 7: stopping the motor 19, adjusting workpiece 45 is 400mm at a distance from 37 lower end surface of magnetic polishing wheel, is taken out
Workpiece clears up disk.
Figure 14 is please referred to, Figure 14 is a kind of belt drive schematic diagram of Magnetorheological Polishing equipment of the utility model.
On the basis of above-mentioned specific embodiment, the Magnetorheological Polishing equipment in present embodiment can use band
The formula kind of drive, specifically, in the present embodiment, the power synchronous transfer device includes motor 19, output shaft 30, synchronous pulley
II 51, synchronous pulley III 52, synchronous pulley IV 53, synchronous belt 54, driving wheel 62, tensioning wheel 63, synchronous pulley I 64, angle tune
Whole wheel I 65, angle adjustment wheel II 66, wherein motor 19 is distributed in the hexagon socket head cap screw 21 on bearing (ball) cover 26 by uniform circular
It is fixed on right mounting plate 17, output shaft 30 is connected with the axis of motor 19 by flat key 20 and is fixed by angular contact ball bearing 22
On right 17 inner hole of mounting plate, driving wheel 62 is mounted on the end face of output shaft 30, synchronous pulley II 51, synchronous pulley III by key
52, synchronous pulley IV 53 is separately mounted to the extension end of three polishing wheels 37, angle adjustment wheel I 65 by key and locking nut 32
And angle adjustment wheel II 66 is mounted on top between two polishing wheels 37, (63 or so arrange, together for synchronous pulley 64 I and driving wheel
Step band 54 engage with each synchronous pulley and angle adjustment wheel simultaneously, and is realized and be tensioned by tensioning wheel 63, and three are arranged in juxtaposition
Polishing wheel rotating device is realized under synchronous belt effect and is rotated synchronously.
In another specific embodiment of the utility model, using any magnetic current in above-mentioned specific embodiment
Become the step of polissoir processes diameter into the monocrystalline 6H-SiC planar substrates 45 of Φ 100mm are as follows:
Step 1: selecting three 37 parallel combinations of magnetic polishing wheel together according to the size and shape of workpiece 45, and every
A magnetic polishing wheel installs the identical semi-circular permanent magnet 1 of three sizes and forms field generator for magnetic, the magnetic field of semi-circular permanent magnet 1
Intensity is 3000Gs；
Step 2: by workpieces processing 45 by way of pasting wax clamping on carrier fluid case 43, and be placed in rubbing head polishing
Correspondence within the scope of, adjust 37 lower surface of magnetic polishing wheel with 45 upper surface of workpiece at a distance from be 0.8mm；
Step 3: the alumina abrasive for being 3 microns by the partial size that addition concentration is 6% in deionized water, and going
The carbonyl iron dust that the partial size that addition concentration is 36% in ionized water is 0.8 micron, and dispersing agent and concentration that concentration is 4% is added
Magnetorheologicai polishing liquid 44 is formed by vibration of ultrasonic wave 20 minutes after being sufficiently stirred for 2% antirust agent；
Step 4: Magnetorheologicai polishing liquid 44 is poured into carrier fluid case 43 by nozzle I 42, make magnetorheological in carrier fluid case 43
Polishing fluid 44 covers 45 upper surface 5mm of workpiece, and flexible polishing pad is formed under the action of semi-circular permanent magnet 1；
Step 5: starting motor 19, under the drive of power synchronous transfer device, three magnetic polishing wheels 37 are same around own axes
Step rotation, the rotary motion of magnetic polishing wheel 37 is separated, make magnet fixing axle by angular contact ball bearing 5 and deep groove ball bearing 38
6 remain stationary, so that field generator for magnetic is stationary when magnetic polishing wheel rotating device high speed rotation, so that permanent magnet end face
The static-magnetic line of force is changed into the dynamic magnetic line of force；
Step 6: in process, workpiece 45 with carrier fluid case 43 be X, Y-direction plane motion when, magnetorheological throwing
The flexible polishing pad that light liquid 44 is formed can carry out shear removal to workpiece surface material, realize monocrystalline 6H-SiC planar substrate surface
The efficient ultra-smooth uniform polish of material；
Step 7: stopping the motor 19, adjusting workpiece 45 is 400mm at a distance from 37 lower end surface of magnetic polishing wheel, is taken out
Workpiece clears up disk.
Figure 16 is please referred to, Figure 16 is a kind of Machining of Curved Surface schematic diagram of Magnetorheological Polishing equipment of the utility model.
In a kind of specific embodiment of the utility model, using any magnetorheological in above-mentioned specific embodiment
The step of polissoir processes curve surface work pieces 45 are as follows:
Step 1: installing a magnetic polishing wheel 37, and use and curved surface work according to the size and shape of curve surface work pieces 45
The indent arcuation correction of the flank shape permanent magnet 50 that 45 shape of part matches is magnetic pole, magnetic field strength 4000Gs；
Step 2: by workpieces processing 45 vacuum inhale by way of clamping on carrier fluid case 43, and be placed in rubbing head throwing
Within the scope of the correspondence of light, adjusting 37 lower surface of magnetic polishing wheel is 0.8mm at a distance from 45 upper surface of workpiece；
Step 3: the cerium oxide abrasives for being 1.5 microns by the partial size that addition concentration is 4% in deionized water, and
The carbonyl iron dust that partial size that concentration is 36% is 0.8 micron is added in deionized water, and it is 4% dispersing agent and dense that concentration, which is added,
The antirust agent that degree is 2% forms Magnetorheologicai polishing liquid 44 by vibration of ultrasonic wave 10 minutes after being sufficiently stirred；
Step 4: Magnetorheologicai polishing liquid 44 is poured into carrier fluid case 43 by nozzle I 42, make magnetorheological in carrier fluid case 43
Polishing fluid 44 covers 45 upper surface 8mm of workpiece, and flexible polishing pad is formed under the action of interior concave arc shape correction of the flank shape permanent magnet 50；
Step 5: starting motor 19, under the drive of power synchronous transfer device, magnetic polishing wheel 37 is rotated around own axes,
The rotary motion of magnetic polishing wheel 37 is separated by angular contact ball bearing 5 and deep groove ball bearing 38, magnet fixing axle 6 is made to keep quiet
Only, so that field generator for magnetic is stationary when magnetic polishing wheel rotating device high speed rotation, so that the static-magnetic of permanent magnet end face
The line of force is changed into the dynamic magnetic line of force；
Step 6: in process, when workpiece 45 does the motion in one dimension of Y-direction with carrier fluid case 43, Magnetorheological Polishing
The flexible polishing pad that liquid 44 is formed can carry out shear removal to workpiece surface material, realize that the efficient ultra-smooth of curve surface work pieces 45 is thrown
Light；
Step 7: stopping the motor 19, adjusting workpiece 45 is 400mm at a distance from 37 lower end surface of magnetic polishing wheel, is taken out
Workpiece clears up disk.
Figure 17 is please referred to, Figure 17 is a kind of surface the 2.5D machining sketch chart of Magnetorheological Polishing equipment of the utility model.
In a kind of specific embodiment of the utility model, using any magnetorheological in above-mentioned specific embodiment
The step of polissoir processes 2.5D surface piece 45 are as follows:
Step 1: according to the size and shape of 2.5D surface piece 45, a magnetic polishing wheel 37 is installed, and using with
It is magnetic pole, magnetic field strength 4000Gs that the end face edge that 45 shape of 2.5D surface piece matches, which reinforces permanent magnet 49,；
Step 2: by workpieces processing 45 vacuum inhale by way of clamping on carrier fluid case 43, and be placed in rubbing head throwing
Within the scope of the correspondence of light, adjusting 37 lower surface of magnetic polishing wheel is 1.5mm at a distance from 45 upper surface of workpiece；
Step 3: the cerium oxide abrasives for being 0.5 micron by the partial size that addition concentration is 6% in deionized water, and
The carbonyl iron dust that partial size that concentration is 36% is 0.8 micron is added in deionized water, and it is 4% dispersing agent and dense that concentration, which is added,
The antirust agent that degree is 2% forms Magnetorheologicai polishing liquid 44 by vibration of ultrasonic wave 20 minutes after being sufficiently stirred；
Step 4: Magnetorheologicai polishing liquid 44 is poured into carrier fluid case 43 by nozzle I 42, make magnetorheological in carrier fluid case 43
Polishing fluid 44 covers 45 upper surface 8mm of workpiece, and flexible polishing pad is formed under the action of end face edge reinforces permanent magnet 49；
Step 5: starting motor 19, under the drive of power synchronous transfer device, magnetic polishing wheel 37 is rotated around own axes,
The rotary motion of magnetic polishing wheel 37 is separated by angular contact ball bearing 5 and deep groove ball bearing 38, magnet fixing axle 6 is made to keep quiet
Only, so that field generator for magnetic is stationary when magnetic polishing wheel rotating device high speed rotation, so that the static-magnetic of permanent magnet end face
The line of force is changed into the dynamic magnetic line of force；
Step 6: in process, when workpiece 45 does the motion in one dimension of Y-direction with carrier fluid case 43, Magnetorheological Polishing
The flexible polishing pad that liquid 44 is formed can carry out shear removal to workpiece surface material, realize that the efficient ultra-smooth of curve surface work pieces 45 is thrown
Light；
Step 7: stopping the motor 19, adjusting workpiece 45 is 400mm at a distance from 37 lower end surface of magnetic polishing wheel, is taken out
Workpiece clears up disk.
From above-described embodiment as can be seen that a kind of Magnetorheological Polishing equipment of the utility model, passes through selection different-diameter
With the magnetic pole of quantity, different magnet shapes and correction of the flank shape is carried out to magnet, curved surface polishing may be implemented, the polishing of face domain, plane are thrown
Light etc. is a kind of magnetorheological efficient polissoir towards workpiece shapes, is suitable for studying the Material Removal Mechanism of optical element
With the experimental studies such as sub-surface damage detection, meet scientific research and industrial practical application needs.Meanwhile it is this towards workpiece shapes
Magnetorheological Polishing equipment and its polishing method dexterously use permanent magnet stationary, the rotation of magnetic polishing wheel, more magnetic pole series connection, more
The mode of a rubbing head combination polishing forms the fine and close polishing pad of flexibility of large area, realizes that the plane of major diameter optical element is thrown
Light processing, substantially increases polishing efficiency.And the utility model processing cost is low, device is simple, easy to use, processing efficiency
It is high.
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by
One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant meaning
Covering non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes that
A little elements, but also including other elements that are not explicitly listed, or further include for this process, method, article or
The intrinsic element of equipment.In the absence of more restrictions, the element limited by sentence "including a ...", is not arranged
Except there is also other identical elements in the process, method, article or apparatus that includes the element.
A kind of Magnetorheological Polishing equipment provided by the utility model is described in detail above, it is used herein
Specific case is expounded the principles of the present invention and embodiment, and the explanation of above example is only intended to help to manage
Solve the method and its core concept of the utility model；At the same time, for those skilled in the art, according to the utility model
Thought, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification should not be construed as
Limitations of the present invention.
Claims (5)
1. a kind of Magnetorheological Polishing equipment characterized by comprising magnetic polishing wheel, the magnetic polishing wheel are equipped with magnet；The magnetic
Iron includes N number of sub- magnet, and wherein N is positive integer；
N number of sub- magnet is arranged in array.
2. Magnetorheological Polishing equipment according to claim 1, which is characterized in that N number of sub- magnet is cylindrical-shaped structure.
3. Magnetorheological Polishing equipment according to claim 1, which is characterized in that N number of sub- magnet be circular ring structure or
Person's semicircle ring structure.
4. Magnetorheological Polishing equipment according to claim 1, which is characterized in that N number of sub- magnet arrangement is end surface side
Edge is reinforced permanent magnet, indent arcuation correction of the flank shape permanent magnet, end face circular arc correction of the flank shape permanent magnet, end chamfer permanent magnet or external convex arc shape and is repaired
Shape permanent magnet.
5. Magnetorheological Polishing equipment according to any one of claims 1 to 4, which is characterized in that be equipped between the sub- magnet
The adjustable gasket of quantity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721927239.9U CN208841052U (en) | 2017-12-29 | 2017-12-29 | A kind of Magnetorheological Polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721927239.9U CN208841052U (en) | 2017-12-29 | 2017-12-29 | A kind of Magnetorheological Polishing equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108032148A (en) * | 2017-12-29 | 2018-05-15 | 广东工业大学 | A kind of magnetic rheological polishing method and equipment |
| CN110202457A (en) * | 2019-07-11 | 2019-09-06 | 辽宁科技大学 | The device of the long straight tube inner surface of needle magnetic grinding |
-
2017
- 2017-12-29 CN CN201721927239.9U patent/CN208841052U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108032148A (en) * | 2017-12-29 | 2018-05-15 | 广东工业大学 | A kind of magnetic rheological polishing method and equipment |
| CN110202457A (en) * | 2019-07-11 | 2019-09-06 | 辽宁科技大学 | The device of the long straight tube inner surface of needle magnetic grinding |
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Granted publication date: 20190510 Termination date: 20211229 |