CN207629745U - A kind of cluster dynamic pressure Magnetorheological Polishing equipment - Google Patents
A kind of cluster dynamic pressure Magnetorheological Polishing equipment Download PDFInfo
- Publication number
- CN207629745U CN207629745U CN201721889260.4U CN201721889260U CN207629745U CN 207629745 U CN207629745 U CN 207629745U CN 201721889260 U CN201721889260 U CN 201721889260U CN 207629745 U CN207629745 U CN 207629745U
- Authority
- CN
- China
- Prior art keywords
- magnetic
- polishing
- dynamic pressure
- wheel
- magnetorheological
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are equipped with magnetic polishing wheel, and the magnetic polishing wheel is with actuating unit by being driven band connection；The transmission belt coats the polishing portion of the magnetic polishing wheel along the thickness direction of the magnetic polishing wheel.Transmission belt and magnetic polishing wheel are combined by the utility model, when being polished using the dynamic pressure Magnetorheological Polishing equipment, when magnetorheological fluid is by transmission belt and magnetic polishing wheel envelope position, wedge effect dynamic pressure can be formed, magnetorheological fluid is improved in polishing process to the material removing rate of workpiece, to which removal rate is high, improve work efficiency.
Description
Technical field
The utility model is related to precision processing technology field, more particularly to a kind of cluster dynamic pressure Magnetorheological Polishing equipment.
Background technology
With the social development of information computerization, semi-conducting material is more wide as high-performance microelectronics component application
It is general, such as monocrystalline silicon, aluminium oxide, the demand of strontium titanates and monocrystalline silicon carbide electron ceramic material be increasing.General semiconductor
Chip manufacture will pass through the processes such as slice, grinding, polishing, reach good performance, surface accuracy needs to reach super
Smooth degree (roughness Ra reaches 1nm or less), surface precision also have higher requirements (surface precision reaches 0.5 μm or less), with
For LED extension Sapphire Substrates, generally require total thickness deviation be less than 10 μm, total surface flatness be less than 10 μm, surface it is thick
Rugosity is less than 0.05 μm.Therefore the manufacture of semi-conducting material is increasingly dependent on grinding and polishing technology to meet its production requirement.
Existing is mainly both at home and abroad high-efficient grinding, Ultraprecise polished, chemical machinery throwing to the processing method of semiconductor wafer
Light, Magnetorheological Polishing and the polishing processing based on face grinding machine, Magnetorheological Polishing become polishing and are used as a kind of typical semiconductor substrate
Planarization processing technology, this method using magnetic current and liquid flow variation characteristic formed polishing pad to finished surface carry out point by point scanning
Processing, but processing efficiency is relatively low, meanwhile, the magnetic rheology effect polishing pad that the static magnetic field that permanent magnet is formed is formed lacks certainly
I modifies and abrasive material update is from sharp mechanism, and viscoelasticity of the magnetorheological fluid under magnetic fields makes the polishing pad that magnetostatic field is formed
Stress distorts after being processed to workpiece surface, it is difficult to which the performance stabilization for keeping workpiece after processing constrains further answering for the technique
With and development.Currently, Magnetorheological Polishing is using the polishing method of QED Technologies companies of the U.S. as mainstream technology, this method
Due to that can form the hydrodynamic pressure of wedge effect, thus material removing rate is higher, but the machine of the technology is at high price, and
Belong to single spot contact, needs to ensure that the athleticism of spot realizes the polishing of workpiece by high precision numerical control system.Science and techniques of defence
The small-bore magnetorheological finishing device of university uses structure for 200mm and 20mm magnetic polishing wheels, and internal magnetic field generating means is
Permanent magnet causes its material removing rate smaller because structure limits its magnetic field intensity in 0.15T or so.What Hunan University developed
The inclined shaft magnetorheological finishing device of small-bore aspherical mirror machining uses outside to polish rotary body, and inside is fixed excitation device
Inclined shaft magnetorheological finishing device, the device can to it is small-bore it is aspherical carry out it is Ultraprecise polished, in the monocrystalline silicon buffing of 6mm
Surface roughness drops to 3.2nm from 10.2nm, and surface roughness is higher, and the removal rate of the device is relatively low, process time compared with
It is long, it is only suitable for the processing of small workpiece.
Therefore, how to provide a kind of efficient, polish uniform Magnetorheological Polishing equipment, be those skilled in the art urgently
The technical issues of solution.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of cluster dynamic pressure Magnetorheological Polishing equipment, enable to
Magnetorheological Polishing is efficient, and polishing is uniform.Its concrete scheme is as follows：
The utility model provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are equipped with magnetic
Polishing wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；The transmission belt is along the thickness side of the magnetic polishing wheel
To the polishing portion for coating the magnetic polishing wheel.
Preferably, further include：Tensioning wheel, the tensioning wheel are contacted with the transmission belt；The tensioning wheel is by having lock
The first gearshift for determining function is connect with the apparatus body.
Preferably, institute's displacement apparatus can be moved up and down in the apparatus body, and be locked.
Preferably, the default magnet that quantity is adjustable, is in series is equipped in the magnetic polishing wheel.
Preferably, the default magnet is one or more in circular magnet, semicircle magnet, U-shaped magnet.
Preferably, the outer surface of the transmission belt is abrasive band.
Preferably, the quantity of the magnetic polishing wheel is N, and N number of magnetic polishing wheel is sequentially connected by the transmission belt.
Preferably, further include：Magnetic polishing wheel of different sizes for replacement.
Preferably, the magnetic polishing wheel is connected by the second displacement device with lock function with the polissoir ontology
It connects.
The utility model provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are equipped with magnetic
Polishing wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；The transmission belt is along the thickness side of the magnetic polishing wheel
To the polishing portion for coating the magnetic polishing wheel.Transmission belt and magnetic polishing wheel are combined by the utility model, are using the dynamic pressure magnetic
When rheology polissoir is polished, when magnetorheological fluid is by transmission belt and magnetic polishing wheel envelope position, wedge effect can be formed
Dynamic pressure improves magnetorheological fluid in polishing process to the material removing rate of workpiece, to which removal rate is high, improves work effect
Rate.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also
Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of front view for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides；
Fig. 2 is a kind of A-A views for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides；
Fig. 3 is a kind of A-A views part for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Enlarged drawing；
Fig. 4 is a kind of B-B views for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides；
Fig. 5 is a kind of left view for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides；
Fig. 6 is a kind of circular ring magnet end for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Face figure；
Fig. 7 is a kind of U magnet end face for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Figure；
Fig. 8 is a kind of semi-circular shape magnet for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
End view drawing；
Fig. 9 is a kind of magnet both ends of the surface circle for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Angle schematic diagram；
Figure 10 is in a kind of magnet axial plane for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Concave arc schematic diagram；
Figure 11 is a kind of magnet both ends of the surface for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Reinforce magnetic field schematic diagram；
Figure 12 is a kind of magnet both ends of the surface for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Chamfering schematic diagram；
Figure 13 is outside a kind of magnet axial plane for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Dome arc schematic diagram；
Figure 14 is the front view for another the dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides；
Figure 15 is the work signal for another the dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Figure；
Figure 16 is a kind of flow chart for dynamic pressure magnetic rheological polishing method that specific embodiment of the present invention provides.
Wherein：1. permanent magnet, 2. spacers, 3. shaft sleeves, 4. sealing rings, 5. taper roll bearings, 6. axis, 7. fastening spiral shells
Nail, 8. gaskets, 9. spring shims, 10. hex head screws, 11. pins, 12. hubcaps, 13. side plates, 14. spring shims, 15.
Gasket, 16. fastening bolts, 17. apparatus bodies, 18. nuts, 19. ring flanges, 20. belt wheels, 21. trip bolts, 22. fastening spiral shells
Nail, 23. bearing spacers, 24. motors, 25. taper roll bearings, 26. sealing rings, 27. bearing (ball) covers, 28. trip bolts, 29.
Taper roll bearing, 30. sealing rings, 31. bearing (ball) covers, 32. sealing rings, 33. deep groove ball bearings, 34. magnetic polishing wheels, 35. skins
Band, 36.37.38.39.40.41. tensioning wheels, 42. magnetorheological collectors, 43. workpiece, 44. magnetorheological fluids, the spray of 45. magnetorheological fluids
Head, 46. force (forcing) pumps, 47. recovery pumps, 48. workpiece binders.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
It is that a kind of dynamic pressure Magnetorheological Polishing that specific embodiment of the present invention provides is set to please refer to Fig.1 to Fig. 5, Fig. 1
Standby front view；Fig. 2 is a kind of A-A views for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides；
Fig. 3 is a kind of A-A view partial enlarged views for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides；Figure
A kind of B-B views of the 4 dynamic pressure Magnetorheological Polishing equipment provided for specific embodiment of the present invention；Fig. 5 is that this practicality is new
A kind of left view for dynamic pressure Magnetorheological Polishing equipment that type specific implementation mode provides.
In a kind of specific implementation mode of the utility model, specific embodiment of the present invention provides a kind of dynamic pressure magnetic
Rheology polissoir, including：Apparatus body, the apparatus body are equipped with magnetic polishing wheel, and the magnetic polishing wheel is logical with actuating unit
Cross transmission band connection；The transmission belt coats the polishing portion of the magnetic polishing wheel along the thickness direction of the magnetic polishing wheel.
Specifically, specific embodiment of the present invention provides a kind of dynamic pressure Magnetorheological Polishing equipment comprising has equipment
Ontology, transmission belt and magnetic polishing wheel；
The apparatus body by side plate (13), fastening bolt (16), nut (18), ring flange (19) form, wherein described
Side plate (13) is connected to holder (17) by fastening bolt (16), nut (18), and side plate (13) and holder (17) right side are mutual
Parallel, the ring flange (19) is connected by screw right over holder (17)；
The magnetic polishing wheel is by permanent magnet (1), spacer (2), shaft sleeve (3), taper roll bearing (5), axis (6), fastening
Screw (7), gasket (8), spring shim (9), hex head screw (10), pin (11), hubcap (12), side plate (13), holder
(17), taper roll bearing (29), bearing (ball) cover (31), magnetic polishing wheel (34) and belt (35) composition；At least one permanent magnet
(1) fixed on axis (6) by spacer (2), axis (6) is installed in side plate (13) hole, and passes through taper roller axis
It holds (33) to be installed in permanent magnetism polishing wheel (34), hubcap (12) passes through trip bolt (10) and pin (11) connecting shaft (6), axis
End cap (12) is installed in side plate (13) by trip bolt (7), and the sleeve (3) is installed in axis by taper roll bearing (5)
(6), permanent magnetism polishing wheel (34) is installed in shaft sleeve (3) by screw thread, and is installed in holder by taper roll bearing (29)
(17) on, the taper roll bearing (29) is pre-tightened by bearing (ball) cover (31), and bearing (ball) cover (31) passes through trip bolt (28)
It is installed in holder (17), belt (35) tight magnetic polishing wheel (34) lower surface.
Actuating unit is by being driven band connection magnetic polishing wheel, and specifically, the actuating unit is rolled by shaft sleeve (3), circular cone
Sub- bearing (5), axis (6), trip bolt (7), gasket (8), spring shim (9), hex head screw (10), pin (11), shaft end
Cover (12), side plate (13), holder (17), belt wheel (20), motor (24), taper roll bearing (25), bearing (ball) cover (27), circular cone
Roller bearing (29), bearing (ball) cover (31), magnetic polishing wheel (34), belt (35) and tensioning wheel (36,37,38,39,40,41) group
At.
Belt wheel (20) is fixed on by 3 taper roll bearings (25) between side plate (13) and holder (17), two, right side
Bearing spacer is installed between taper roll bearing (25), the bearing of both sides is installed with bearing (ball) cover (27) preload, two side bearings
End cap (27) is connected to side plate (13) and holder (17) by trip bolt (21)；The left end of axis (6) is covered tightly by shaft end
Gu screw (7), gasket (8), spring shim (9), hex head screw (10) and hubcap (12) are fixed on side plate (13), and are led to
Cross the circumferencial direction of pin (11) control shaft (6)；Shaft sleeve (3) external screw thread is linked with magnetic polishing wheel (34) left end screw-internal thread fit
As an entirety, one or more magnetic polishing wheels (34) are arranged side by side by a pair of of taper roll bearing (5) and bearing (ball) cover (31)
It is arranged on side plate (13) and holder (17)；Magnetic polishing wheel (34) most upper left side, most upper right side and magnetic polishing wheel (34) are thrown with magnetic
Top is equipped with the tensioning wheel (36,37,39,40,41) that can be adjusted up and down between halo (34), and driving pulley (20) is located at tensioning
It takes turns above (36,41), belt (35), which detours, passes through belt (35), tensioning wheel (36,37,39,40,41) and each magnetic polishing wheel
(34) outside cylinder, can the tensioning wheel (38) of up and down adjustment compress belt (35), motor (24) is installed in by trip bolt (22)
Holder (17) right side, and drive one or more magnetic polishing wheels (34) to synchronize reliable turn by key directly drives belt wheel (20)
It is dynamic.
It is worth noting that the transmission belt in specific embodiment of the present invention can be belt (35), can also adopt
With abrasive band, other transmission belts are waited, as long as the polishing portion of magnetic polishing wheel can be coated.Here polishing portion, refers to
Magnetic polishing wheel at work, is in contact with magnetorheological fluid, and the position of processing is polished to workpiece.
In order to adjust the tensile force between transmission belt and magnetic polishing wheel, tensioning wheel, institute can also be set on apparatus body
Tensioning wheel is stated to contact with the transmission belt；The tensioning wheel passes through the first gearshift with lock function and the equipment sheet
Body connects.Preferably, institute's displacement apparatus can be moved up and down in the apparatus body, and be locked.Specifically, a kind of specific
In embodiment, 6 regulating wheels of above-mentioned tensioning wheel (36,37,38,39,40,41), which move up and down, can adjust of belt (35)
Inclination angle between clamp force and adjusting belt (35) and magnetic polishing wheel (34).
In the present embodiment, above-mentioned burnishing device can have to be thrown including at least one equal gaps, with the magnetic that height parallel connection is distributed
Halo (34), the wall thickness of magnetic polishing wheel (34) is 3 between 10mm, and magnetic polishes wheel diameter 50 between 300mm, magnetic polishing wheel
(34) diamagnetic material is used, such as：Stainless steel, duralumin, hard alumin ium alloy, copper alloy, ceramics etc., it is of course also possible to use other materials
Matter.
In the present embodiment, above-mentioned permanent magnet (1) is the radial magnetizing field circular ring shape that magnetic field intensity is 1000Gs to 6000Gs
Permanent magnet, adjacent same magnetic pole or adjacent anti-magnetic pole are coaxially installed in magnetic polishing wheel (34) hole, each permanent magnet (1) lower face
With magnetic polishing wheel (34) endoporus there are gap and gap it is equal, naturally it is also possible to just according to the concrete condition of processing object, take
The magnet of other shapes.
Preferably, the quantity of the magnetic polishing wheel is N, and N number of magnetic polishing wheel is sequentially connected by the transmission belt.Institute
Magnetic polishing wheel is stated to connect with the polissoir ontology by the second displacement device with lock function.
Fig. 6 to Figure 13 is please referred to, Fig. 6 is that a kind of dynamic pressure Magnetorheological Polishing that specific embodiment of the present invention provides is set
Standby circular ring magnet end view drawing；Fig. 7 is a kind of dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
U magnet end view drawing；Fig. 8 is a kind of semicircle for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Annular magnet end view drawing；Fig. 9 is a kind of magnet for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Both ends of the surface fillet schematic diagram；Figure 10 is a kind of magnetic for dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Concave arc schematic diagram in iron axial plane；Figure 11 is a kind of dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Magnet both ends of the surface reinforce magnetic field schematic diagram；Figure 12 is the magnetorheological throwing of a kind of dynamic pressure that specific embodiment of the present invention provides
The magnet both ends surface chamfer schematic diagram of light device；Figure 13 is that a kind of dynamic pressure that specific embodiment of the present invention provides is magnetorheological
The magnet axial plane evagination circular arc schematic diagram of polissoir；
On the basis of above-mentioned specific implementation mode, present embodiment, be equipped in the magnetic polishing wheel quantity it is adjustable,
The default magnet being in series, the default magnet are one or more in circular magnet, semicircle magnet, U-shaped magnet.This reality
It applies in example, serial number of the above-mentioned permanent magnet (1) on axis can increase or reduce, and adapt it to different in width workpiece (43)
Polishing, the shape of permanent magnet (1) may be the shapes such as round, semicircle, U-shaped, reach the surface of workpiece of different shapes
Magnetic field intensity is uniformly distributed.
In order to be processed by shot blasting to various sizes of processing object, can also pre-set it is of different sizes for replacement
Magnetic polishing wheel.In the present embodiment, above-mentioned magnetic polishing wheel (34) can be replaced with the magnetic polishing wheel of different-diameter, adapt to not similar shape
The polishing of shape, big small workpiece (43), when processing flat work pieces or column-shape curved surface workpiece, magnetic polishing wheel is in holder (17) parallel connection
Quantity can also increase or reduce according to work pieces process efficiency requirements, and single magnetic polishing wheel (34) can be to non-free curved surface
It is polished.
In the present embodiment, the position of above-mentioned taper roll bearing and axis installing, around all sealing ring is used to seal, prevent
Magnetorheological fluid enters the normal use of internal influence bearing.
When dynamic pressure Magnetorheological Polishing equipment in the above-mentioned specific implementation mode of concrete application, magnetorheological fluid (44) passes through pump
(46) pressure sprays into machining area from magnetorheological fluid nozzle (45), and last magnetorheological fluid is received curette (42) collection and returned by pumping (47)
It receives, magnetorheological fluid is recycled, magnetic can form the hydrodynamic pressure of wedge effect when polishing buff polishing.
The utility model provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are equipped with magnetic
Polishing wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；The transmission belt is along the thickness side of the magnetic polishing wheel
To the polishing portion for coating the magnetic polishing wheel.Transmission belt and magnetic polishing wheel are combined by the utility model, are using the dynamic pressure magnetic
When rheology polissoir is polished, when magnetorheological fluid is by transmission belt and magnetic polishing wheel envelope position, wedge effect can be formed
Dynamic pressure improves magnetorheological fluid in polishing process to the material removing rate of workpiece, to which removal rate is high, improves work effect
Rate.
4, Figure 15 is please referred to Fig.1, Figure 14 is the magnetorheological throwing of another dynamic pressure that specific embodiment of the present invention provides
The front view of light device；Figure 15 is the work for another the dynamic pressure Magnetorheological Polishing equipment that specific embodiment of the present invention provides
Make schematic diagram.
In a kind of specific implementation mode of the utility model, the number of magnetic polishing wheel limit, this is specific
Dynamic pressure Magnetorheological Polishing equipment in embodiment can only include a magnetic polishing wheel.Rest part can refer to above-mentioned specific
Embodiment and the prior art.
It is a kind of dynamic pressure magnetic rheological polishing method that specific embodiment of the present invention provides to please refer to Fig.1 6, Figure 16
Flow chart.This method includes：
S11：Obtain processing object；
S12：The burnishing surface of the processing object is fixed at the pre-determined distance of the magnetic polishing wheel；
S13：Magnetorheological fluid is supplied to the magnetic polishing wheel, starts the dynamic structure, to be carried out to the processing object
Polishing treatment.
Specifically, in a specific embodiment, it is set using the dynamic pressure Magnetorheological Polishing in above-mentioned specific implementation mode
It is standby, process Si pieces.Include the following steps：
1) according to the structure of milling machine, more magnetic pole cluster dynamic pressure magnetorheological finishing device structures of adaptation are designed.Magnetic polishing wheel
(34) a diameter of 100mm；
2) according to 10 inches of Si pieces the characteristics of selects to be connected on the number of permanent magnet (1) on axis (6) to be 5, and in parallel
Magnetic polishing wheel (34) number be 4, select magnetic field intensity for 5000Gs the adjacent same magnetic pole of permanent magnet (1) or it is adjacent instead
Magnetic pole is installed in more magnetic pole cluster dynamic pressure magnetorheological finishing devices so that cylindrical permanent magnet iron (1) center of circle leads in sustained height
More magnetic pole cluster dynamic pressure magnetorheological finishing devices are installed on the main shaft of milling machine by attachment screw by ring flange (19)；
3) workpiece (33) is inhaled by vacuum or pastes the modes clampings such as wax on workpiece binder (48), and filled in polishing
It sets within the scope of the correspondence of polishing；
4) it by the way that a concentration of 5% micron-sized SiC abrasive materials are added in deionized water, and is added in deionized water dense
The micron order carbonyl iron dust that degree is 30%, and a concentration of 5% dispersant, a concentration of 5% stabilizer is added, it is stirred using magnetic force
Device stirring is mixed after five minutes by vibration of ultrasonic wave 30 minutes, forms magnetorheological fluid (44)；
5) tensile force of belt (35), Yi Jipi are adjusted by 6 tensioning wheels of tensioning wheel (36,37,38,39,40,41)
Inclination angle between band (35) package magnetic polishing wheel (34)；
6) start the upper and lower displacement motor of machine tool chief axis, the upper and lower position of adjustment magnetic polishing wheel (34) makes belt (35) most
The processing gap on low side face to workpiece (43) surface is 1mm, starts the motor (24) of burnishing device, realize magnetic polishing wheel (34) with
600rpm rotating speeds rotate, and start pump (46,47) and magnetorheological fluid (44) is sprayed onto belt surface by magnetorheological fluid nozzle (45),
Magnetorheological Polishing pad flexible, under the turning effort of magnetic polishing wheel (34), Magnetorheological Polishing pad are formed under the action of permanent magnet
The abrasive grain of middle clamping can be polished workpiece (43), in order to realize that the uniform polish on workpiece (43) surface, burnishing device carry out
Scan tool track polishing；To realize that the surface of workpiece (43) uniformly removes, the form accuracy of workpiece (43) ensure that.Finally
Magnetorheological fluid can finally be recycled with the transmitting effect of belt by pump (47), realize the recycling of magnetorheological fluid (44)；
7) in order to realize that the uniformity that workpiece (43) surfacing is gone out is removed with constant pressure, according to the theoretical modeling of removal rate
The survey calculation of analysis and actual experiment obtains the occurrence of material removing rate, to determine magnetic according to the size of material removing rate
The amount of feeding of Z-direction of the polishing wheel (34) under machining state, to ensure to throw processing of the belt (35) to workpiece (43) surface
Gap remains unchanged, and realizes the constant pressure polishing of magnetorheological fluid polishing pad；Or detector is installed on burnishing device, add in polishing
Under work state, the data in the processing gap between the syringe needle timing probe belt (35) and workpiece (43) of detector, detection are passed through
The feedback processing of digital control system, according to processing gap variation come carry out magnetic polishing wheel (34) Z-direction the amount of feeding, to protect
The processing gap on card belt (35) to workpiece (43) surface remains unchanged, and realizes workpiece (43) surfacing in Magnetorheological Polishing pad
Constant pressure shear action realize polishing removal, obtain the workpiece surface of smooth no sub-surface damage；
8) stop above-mentioned all motors, discharge and take out workpiece.
It is magnetorheological using the dynamic pressure in above-mentioned specific implementation mode in another specific implementation mode of the utility model
Polissoir, processing mobile phone shell.Include the following steps：
1) according to the structure of 3D curved surface magnetorheological polishing machines, single magnetic pole cluster dynamic pressure magnetorheological finishing device of adaptation is designed
Structure.A diameter of 100mm of magnetic polishing wheel (34)；
2) according to mobile phone shell the characteristics of selects to be connected on the number of permanent magnet (1) on axis (6) to be 2, and magnetic in parallel
The number of polishing wheel (34) is 1, selects magnetic field intensity for the adjacent same magnetic pole of permanent magnet (1) of 5000Gs or adjacent anti-magnetic pole
It is installed in more magnetic pole cluster dynamic pressure magnetorheological finishing devices so that lead to and connect in sustained height in cylindrical permanent magnet iron (1) center of circle
More magnetic pole cluster dynamic pressure magnetorheological finishing devices are installed on the main shaft of milling machine by screw by ring flange (19)；
3) workpiece (33) is inhaled by vacuum or pastes the modes clampings such as wax on workpiece binder (48), and filled in polishing
It sets within the scope of the correspondence of polishing；
4) it by the way that a concentration of 5% micron-sized SiC abrasive materials are added in deionized water, and is added in deionized water dense
The micron order carbonyl iron dust that degree is 25%, and a concentration of 5% dispersant, a concentration of 5% stabilizer is added, it is stirred using magnetic force
Device stirring is mixed after five minutes by vibration of ultrasonic wave 30 minutes, forms magnetorheological fluid (44)；
5) tensile force of belt (35), Yi Jipi are adjusted by 6 tensioning wheels of tensioning wheel (36,37,38,39,40,41)
Inclination angle between band (35) package magnetic polishing wheel (34)；
6) start the upper and lower displacement motor of machine tool chief axis, the upper and lower position of adjustment magnetic polishing wheel (34) makes belt (35) most
The processing gap on low side face to workpiece (43) surface is 0.8mm, starts the motor (24) of burnishing device, realizes magnetic polishing wheel (34)
It is rotated with 600rpm rotating speeds, starts pump (46,47) and magnetorheological fluid (44) is sprayed onto belt surface by magnetorheological fluid nozzle (45),
Magnetorheological Polishing pad flexible, under the turning effort of magnetic polishing wheel (34), Magnetorheological Polishing are formed under the action of permanent magnet
The abrasive grain being clamped in pad can be polished workpiece (43), in order to realize the uniform polish on workpiece (43) surface, burnishing device into
Row scanning tool track polishing；To realize that the surface of workpiece (43) uniformly removes, the form accuracy of workpiece (43) ensure that.Most
Magnetorheological fluid can finally be recycled with the transmitting effect of belt by pump (47) afterwards, realize the recycling of magnetorheological fluid (44)；
7) when polishing curved surface, more magnetic pole cluster dynamic pressure magnetorheological finishing devices of single rubbing head can be installed in
In digital control system, digital control system carries out X, Y, Z axis feeding and the rotation of respective shaft according to the Curvature varying of curved surface, to realize
The high-precision of curved surface is polished without sub-surface damage；
8) in order to realize that the uniformity that workpiece (43) surfacing is gone out is removed with constant pressure, according to the theoretical modeling of removal rate
The survey calculation of analysis and actual experiment obtains the occurrence of material removing rate, to determine magnetic according to the size of material removing rate
The amount of feeding of Z-direction of the polishing wheel (34) under machining state, to ensure to throw processing of the belt (35) to workpiece (43) surface
Gap remains unchanged, and realizes the constant pressure polishing of magnetorheological fluid polishing pad；Or detector is installed on burnishing device, add in polishing
Under work state, the data in the processing gap between the syringe needle timing probe belt (35) and workpiece (43) of detector, detection are passed through
The feedback processing of digital control system, according to processing gap variation come carry out magnetic polishing wheel (34) Z-direction the amount of feeding, to protect
The processing gap on card belt (35) to workpiece (43) surface remains unchanged, and realizes workpiece (43) surfacing in Magnetorheological Polishing pad
Constant pressure shear action realize polishing removal, obtain the workpiece surface of smooth no sub-surface damage；
9) stop above-mentioned all motors, discharge and take out workpiece.
It is magnetorheological using the dynamic pressure in above-mentioned specific implementation mode in another specific implementation mode of the utility model
Polissoir processes cylindrical mirror.Include the following steps：
1) according to the structure of 3D curved surface magnetorheological polishing machines, single magnetic pole cluster dynamic pressure magnetorheological finishing device of adaptation is designed
Structure.A diameter of 100mm of magnetic polishing wheel (34)；
2) according to cylindrical mirror the characteristics of selects to be connected on the number of permanent magnet (1) on axis (6) to be 1, and magnetic in parallel
The number of polishing wheel (34) is 1, selects magnetic field intensity for the adjacent same magnetic pole of permanent magnet (1) of 5000Gs or adjacent anti-magnetic pole
It is installed in more magnetic pole cluster dynamic pressure magnetorheological finishing devices so that lead to and connect in sustained height in cylindrical permanent magnet iron (1) center of circle
More magnetic pole cluster dynamic pressure magnetorheological finishing devices are installed on the main shaft of engraving machine by screw by ring flange (19)；
3) workpiece (33) is inhaled by vacuum or pastes the modes clampings such as wax on workpiece binder (48), and filled in polishing
It sets within the scope of the correspondence of polishing；
4) by the way that a concentration of 15% micron-sized magnetic abrasive is added in deionized water, magnetic abrasive is with certain ratio
The iron powder of example sinters bulk under the high temperature conditions with abrasive material, and block-like magnetic abrasive is crushed, certain particle size range is filtered out
Particle as Magnetorheological Polishing particle.In addition a concentration of 5% dispersant, a concentration of 5% stabilization are added in magnetorheological fluid
Agent forms magnetorheological fluid (44) using magnetic stirrer after five minutes by vibration of ultrasonic wave 30 minutes；
5) tensile force of belt (35), Yi Jipi are adjusted by 6 tensioning wheels of tensioning wheel (36,37,38,39,40,41)
Inclination angle between band (35) package magnetic polishing wheel (34)；
6) start the upper and lower displacement motor of machine tool chief axis, the upper and lower position of adjustment magnetic polishing wheel (34) makes belt (35) most
The processing gap on low side face to workpiece (43) surface is 0.8mm, starts the motor (24) of burnishing device, realizes magnetic polishing wheel (34)
It is rotated with 600rpm rotating speeds, starts pump (46,47) and magnetorheological fluid (44) is sprayed onto belt surface by magnetorheological fluid nozzle (45),
Magnetic abrasive grain can be assembled in magnetic line of force direction and arrange under the action of permanent magnet, viscoelastic Magnetorheological Polishing pad be formed, in magnetic
Under the turning effort of polishing wheel (34), magnetic abrasive grain can be polished workpiece (43) in Magnetorheological Polishing pad, in order to realize work
The uniform polish on part (43) surface, burnishing device are scanned tool track polishing；Surface to realize workpiece (43) is uniform
Removal, ensure that the form accuracy of workpiece (43).Last magnetorheological fluid can finally be returned with the transmitting effect of belt by pump (47)
It receives, realizes the recycling of magnetorheological fluid (44)；
7) when polishing curved surface, more magnetic pole cluster dynamic pressure magnetorheological finishing devices of single rubbing head can be installed in
In digital control system, digital control system carries out X, Y, Z axis feeding and the rotation of respective shaft according to the Curvature varying of curved surface, to realize
The high-precision of curved surface is polished without sub-surface damage；
8) in order to realize that the uniformity that workpiece (43) surfacing is gone out is removed with constant pressure, according to the theoretical modeling of removal rate
The survey calculation of analysis and actual experiment obtains the occurrence of material removing rate, to determine magnetic according to the size of material removing rate
The amount of feeding of Z-direction of the polishing wheel (34) under machining state, to ensure to throw processing of the belt (35) to workpiece (43) surface
Gap remains unchanged, and realizes the constant pressure polishing of magnetorheological fluid polishing pad；Or detector is installed on burnishing device, add in polishing
Under work state, the data in the processing gap between the syringe needle timing probe belt (35) and workpiece (43) of detector, detection are passed through
The feedback processing of digital control system, according to processing gap variation come carry out magnetic polishing wheel (34) Z-direction the amount of feeding, to protect
The processing gap on card belt (35) to workpiece (43) surface remains unchanged, and realizes workpiece (43) surfacing in Magnetorheological Polishing pad
Constant pressure shear action realize polishing removal, obtain the workpiece surface of smooth no sub-surface damage；
9) stop above-mentioned all motors, discharge and take out workpiece.
It can be seen that more magnetic pole cluster dynamic pressure magnetorheological finishing devices of the utility model, the dress from above-mentioned case study on implementation
It is that sbrasive belt grinding and Technique of Magnetorheological Finishing are combined to set, and abrasive band is common band, and cylindrical magnetic is inlaid with inside magnetic polishing wheel
Pole can form wedge effect dynamic pressure when such magnetorheological fluid is by flat rubber belting and belt wheel envelope position, improve magnetorheological fluid and throwing
To the material removing rate of workpiece in photoreduction process；The apparatus structure is simple, and the concatenated mode of more magnetic poles may be used and increase magnetic
Rheology polishing area can also be such that multiple magnetic polishing wheel parallel combinations polish, the polishing of multiple stations is carried out to a workpiece, real
The high efficiency polishing of existing workpiece；The device drives multiple magnetic arranged side by side to polish under the input condition of a motor, by belt
High-speed rotation is taken turns, magnetorheological fluid carries out many places constant pressure polishing to workpiece under the influence of a magnetic field, improves the polishing efficiency of workpiece；
Obtained by the above-mentioned advantageous effect, acquisition workpiece that can be rapidly and efficiently using a kind of dynamic pressure Magnetorheological Polishing equipment of the utility model
The good and high quality workpiece without surface and sub-surface damage of surface conformance, and it is at low cost, it is very suitable for photoelectron, microelectronics
The plane of substrate and optical element, the processing of curved surface high efficiency ultra-smooth uniform polish.
Above disclosures are merely preferred embodiments of the utility model, with this utility model cannot be limited certainly
Interest field, therefore equivalent variations made according to the claim of the utility model still fall within the scope of the utility model.
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by
One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant meaning
Covering non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only that
A little elements, but also include other elements that are not explicitly listed, or further include for this process, method, article or
The intrinsic element of equipment.In the absence of more restrictions, the element limited by sentence "including a ...", is not arranged
Except there is also other identical elements in the process, method, article or apparatus that includes the element.
A kind of cluster dynamic pressure Magnetorheological Polishing equipment provided by the utility model is described in detail above, herein
In apply specific case the principles of the present invention and embodiment be expounded, the explanation of above example is only used
Understand the method and its core concept of the utility model in help；Meanwhile for those of ordinary skill in the art, according to this reality
With novel thought, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification is not
It is interpreted as limitations of the present invention.
Claims (9)
1. a kind of dynamic pressure Magnetorheological Polishing equipment, which is characterized in that including：Apparatus body, the apparatus body are polished equipped with magnetic
Wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；Thickness direction packet of the transmission belt along the magnetic polishing wheel
Cover the polishing portion of the magnetic polishing wheel.
2. dynamic pressure Magnetorheological Polishing equipment according to claim 1, which is characterized in that further include：Tensioning wheel, the tensioning
Wheel is contacted with the transmission belt；The tensioning wheel is connected by the first gearshift with lock function with the apparatus body
It connects.
3. dynamic pressure Magnetorheological Polishing equipment according to claim 2, which is characterized in that institute's displacement apparatus can be described
Apparatus body moves up and down, and locks.
4. dynamic pressure Magnetorheological Polishing equipment according to claim 1, which is characterized in that be equipped with quantity in the magnetic polishing wheel
Default magnet that is adjustable, being in series.
5. dynamic pressure Magnetorheological Polishing equipment according to claim 4, which is characterized in that the default magnet is round magnetic
It is one or more in iron, semicircle magnet, U-shaped magnet.
6. dynamic pressure Magnetorheological Polishing equipment according to claim 1, which is characterized in that the outer surface of the transmission belt is sand
Band.
7. dynamic pressure Magnetorheological Polishing equipment according to any one of claims 1 to 6, which is characterized in that the magnetic polishing wheel
Quantity be N, N number of magnetic polishing wheel is sequentially connected by the transmission belt.
8. dynamic pressure Magnetorheological Polishing equipment according to any one of claims 1 to 6, which is characterized in that further include：Size is not
With the magnetic polishing wheel for replacement.
9. dynamic pressure Magnetorheological Polishing equipment according to any one of claims 1 to 6, which is characterized in that the magnetic polishing wheel
It is connect with the polissoir ontology by the second displacement device with lock function.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721889260.4U CN207629745U (en) | 2017-12-27 | 2017-12-27 | A kind of cluster dynamic pressure Magnetorheological Polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721889260.4U CN207629745U (en) | 2017-12-27 | 2017-12-27 | A kind of cluster dynamic pressure Magnetorheological Polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207629745U true CN207629745U (en) | 2018-07-20 |
Family
ID=62851624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721889260.4U Expired - Fee Related CN207629745U (en) | 2017-12-27 | 2017-12-27 | A kind of cluster dynamic pressure Magnetorheological Polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207629745U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107900792A (en) * | 2017-12-27 | 2018-04-13 | 广东工业大学 | A kind of cluster dynamic pressure Magnetorheological Polishing device and method |
| CN111805427A (en) * | 2020-07-21 | 2020-10-23 | 中国科学院长春光学精密机械与物理研究所 | Precision calibration device and method of magnetorheological polishing equipment |
| CN111922815A (en) * | 2020-06-10 | 2020-11-13 | 南通宝得利机械制造有限公司 | Low-dust efficient metal plate polishing device |
| CN112059848A (en) * | 2020-09-17 | 2020-12-11 | 许昌学院 | Traffic apparatus grinding device with adjustable size |
-
2017
- 2017-12-27 CN CN201721889260.4U patent/CN207629745U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107900792A (en) * | 2017-12-27 | 2018-04-13 | 广东工业大学 | A kind of cluster dynamic pressure Magnetorheological Polishing device and method |
| CN111922815A (en) * | 2020-06-10 | 2020-11-13 | 南通宝得利机械制造有限公司 | Low-dust efficient metal plate polishing device |
| CN111805427A (en) * | 2020-07-21 | 2020-10-23 | 中国科学院长春光学精密机械与物理研究所 | Precision calibration device and method of magnetorheological polishing equipment |
| CN111805427B (en) * | 2020-07-21 | 2022-05-24 | 中国科学院长春光学精密机械与物理研究所 | Precision calibration device and method of magnetorheological polishing equipment |
| CN112059848A (en) * | 2020-09-17 | 2020-12-11 | 许昌学院 | Traffic apparatus grinding device with adjustable size |
| CN112059848B (en) * | 2020-09-17 | 2021-08-06 | 许昌学院 | Traffic apparatus grinding device with adjustable size |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207629745U (en) | A kind of cluster dynamic pressure Magnetorheological Polishing equipment | |
| CN106826411B (en) | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method | |
| CN201026588Y (en) | Magnetorheological apparatus for grinding and polishing curved surface | |
| CN105328516A (en) | Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device | |
| WO2016095667A1 (en) | Double-disc straight groove cylindrical-component surface grinding disc | |
| EP2351630A1 (en) | Apparatus for polishing spherical body, method for polishing spherical body and method for manufacturing spherical member | |
| CN100467223C (en) | Sphericity part fixed abrasive lapping method | |
| CN100999061A (en) | Grinding polishing method based on magnetic rheology effect and its polishing device | |
| CN107617933B (en) | Dynamic magnetic field magnetorheological polishing device | |
| CN107052987A (en) | Applied to it is synchronous slightly grind, lappingout, the processing unit (plant) for polishing spheroid | |
| CN205111610U (en) | End -face grinding mill is assisted to radial supersound of jumbo size | |
| CN105538174A (en) | Grinding wheel block, preparation method thereof and polishing grinding wheel | |
| CN107900792A (en) | A kind of cluster dynamic pressure Magnetorheological Polishing device and method | |
| CN205111466U (en) | End -face grinding mill is assisted to jumbo size axial supersound | |
| CN102152193B (en) | Method for grinding superhard mini-hemispheric coupling parts | |
| CN207464836U (en) | A kind of dynamic magnetic field magnetorheological finishing device | |
| CN108032148A (en) | A kind of magnetic rheological polishing method and equipment | |
| CN110394698B (en) | Inner hole polishing and grinding tool and method for slender precise thin-wall aluminum alloy pipe | |
| Lee et al. | Development of Cylindrical Grinding Technology with Electrolytic In-Process Dressing Method | |
| Wu et al. | Nano-precision polishing of CVD SiC using MCF (magnetic compound fluid) slurry | |
| CN208841052U (en) | A kind of Magnetorheological Polishing equipment | |
| JP2838314B2 (en) | Electrolytic interval dressing grinding method | |
| CN110757258B (en) | Method for machining inner spiral raceway of lead screw nut | |
| CN105150033A (en) | Large-size axial ultrasound-assisted end face grinding abrasive disk | |
| CN106272027B (en) | A kind of lappingout processing method of bearing ring angled end-face |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180720 Termination date: 20211227 |