CN107900792A - A kind of cluster dynamic pressure Magnetorheological Polishing device and method - Google Patents
A kind of cluster dynamic pressure Magnetorheological Polishing device and method Download PDFInfo
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- CN107900792A CN107900792A CN201711448619.9A CN201711448619A CN107900792A CN 107900792 A CN107900792 A CN 107900792A CN 201711448619 A CN201711448619 A CN 201711448619A CN 107900792 A CN107900792 A CN 107900792A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are equipped with magnetic polishing wheel, and the magnetic polishing wheel is with actuating unit by being driven band connection；The thickness direction of the transmission belt along the magnetic polishing wheel coats the polishing portion of the magnetic polishing wheel.Transmission belt and magnetic polishing wheel are combined by the present invention, when being polished using the dynamic pressure Magnetorheological Polishing equipment, when magnetic flow liquid is by transmission belt and magnetic polishing wheel envelope position, wedge effect dynamic pressure can be formed, magnetic flow liquid is improved in polishing process to the material removing rate of workpiece, so as to which removal rate is high, improve work efficiency.The present invention also provides a kind of dynamic pressure magnetic rheological polishing method, applied to above-mentioned dynamic pressure Magnetorheological Polishing equipment, it may have identical beneficial effect, details are not described herein.
Description
Technical field
The present invention relates to precision processing technology field, more particularly to a kind of cluster dynamic pressure Magnetorheological Polishing device and method.
Background technology
With the social development of information computerization, semi-conducting material is more wide as the application of high-performance microelectronics component
General, the demand of such as monocrystalline silicon, aluminium oxide, strontium titanates and monocrystalline silicon carbide electron ceramic material is increasing.General semiconductor
Chip manufacture will pass through the processes such as section, grinding, polishing, reach good performance, its surface accuracy needs to reach super
Smooth degree (roughness Ra reaches below 1nm), surface precision also have higher requirements (surface precision reaches less than 0.5 μm), with
Exemplified by LED extension Sapphire Substrates, generally require total thickness deviation be less than 10 μm, total surface flatness be less than 10 μm, surface it is thick
Rugosity is less than 0.05 μm.Therefore the manufacture of semi-conducting material becomes increasingly dependent on grinding and polishing technology to meet its production requirement.
The existing processing method both at home and abroad to semiconductor wafer is mainly high-efficient grinding, Ultraprecise polished, chemical machinery throwing
Light, Magnetorheological Polishing and the polishing processing based on face grinding machine, Magnetorheological Polishing become polishing and are used as a kind of typical semiconductor substrate
Planarization processing technology, this method using magnetic current and liquid flow variation characteristic formed polishing pad to finished surface carry out point by point scanning
Processing, but processing efficiency is than relatively low, meanwhile, the magnetic rheology effect polishing pad that the static magnetic field that permanent magnet is formed is formed lack from
I repairs and abrasive material renewal is from sharp mechanism, and viscoelasticity of the magnetic flow liquid under magnetic fields causes the polishing pad that magnetostatic field is formed
Stress distorts after being processed to workpiece surface, it is difficult to keeps the performance stabilization of workpiece after processing, constrains further should for the technique
With and development.At present, Magnetorheological Polishing is using the polishing method of QED Technologies companies of the U.S. as mainstream technology, this method
Due to that can form the hydrodynamic pressure of wedge effect, thus material removing rate is higher, but the machine price of the technology is high, and
Belong to single spot contact, it is necessary to ensure that the athleticism of spot realizes the polishing of workpiece by high precision numerical control system.Science and techniques of defence
The small-bore magnetorheological finishing device of university uses structure, and for 200mm and 20mm magnetic polishing wheels, its internal magnetic field generating means is
Permanent magnet, because structure limits its magnetic field intensity in 0.15T or so, causes its material removing rate smaller.What Hunan University developed
The inclined shaft magnetorheological finishing device of small-bore aspherical mirror machining, using outside, inside is fixed excitation device to polish rotary body
Inclined shaft magnetorheological finishing device, the device can to it is small-bore it is aspherical carry out it is Ultraprecise polished, in the monocrystalline silicon buffing of 6mm
Surface roughness drops to 3.2nm from 10.2nm, and surface roughness is higher, and the removal rate of the device is relatively low, process time compared with
It is long, it is only suitable for the processing of small workpiece.
Therefore, how to provide a kind of efficient, polish uniform Magnetorheological Polishing equipment, be those skilled in the art urgently
The technical problem of solution.
The content of the invention
In view of this, it is an object of the invention to provide a kind of cluster dynamic pressure Magnetorheological Polishing device and method, can make
It is efficient to obtain Magnetorheological Polishing, polishing is uniform.Its concrete scheme is as follows：
On the one hand, the present invention provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are set
There is magnetic polishing wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；Thickness of the transmission belt along the magnetic polishing wheel
Spend the polishing portion that direction coats the magnetic polishing wheel.
Preferably, further include：Tensioning wheel, the tensioning wheel are contacted with the transmission belt；The tensioning wheel passes through with lock
The first gearshift for determining function is connected with the apparatus body.
Preferably, institute's displacement apparatus can be moved up and down in the apparatus body, and be locked.
Preferably, the default magnet that quantity is adjustable, is in series is equipped with the magnetic polishing wheel.
Preferably, the default magnet is the one or more in circular magnet, semicircle magnet, U-shaped magnet.
Preferably, the outer surface of the transmission belt is abrasive band.
Preferably, the quantity of the magnetic polishing wheel is N, and N number of magnetic polishing wheel is sequentially connected by the transmission belt.
Preferably, further include：The magnetic polishing wheel of different sizes for being used to replace.
Preferably, the magnetic polishing wheel is connected by the second displacement device with lock function and the polissoir body
Connect.
On the other hand, the present invention also provides a kind of dynamic pressure magnetic rheological polishing method, applied to the above-mentioned magnetorheological throwing of dynamic pressure
Light device, including：
Obtain processing object；
The burnishing surface of the processing object is fixed at the pre-determined distance of the magnetic polishing wheel；
Magnetic flow liquid is supplied to the magnetic polishing wheel, starts the dynamic structure, to be polished to the processing object
Processing.
The present invention provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are polished equipped with magnetic
Wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；Thickness direction bag of the transmission belt along the magnetic polishing wheel
Cover the polishing portion of the magnetic polishing wheel.Transmission belt and magnetic polishing wheel are combined by the present invention, are using the dynamic pressure Magnetorheological Polishing
When equipment is polished, when magnetic flow liquid is by transmission belt and magnetic polishing wheel envelope position, wedge effect dynamic pressure can be formed, is carried
High magnetic flow liquid, to the material removing rate of workpiece, so that removal rate is high, improves work efficiency in polishing process.
The present invention also provides a kind of dynamic pressure magnetic rheological polishing method, applied to above-mentioned dynamic pressure Magnetorheological Polishing equipment,
With identical beneficial effect, details are not described herein.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of front view for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Fig. 2 is a kind of A-A views for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Fig. 3 is a kind of A-A view partial enlargements for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Figure；
Fig. 4 is a kind of B-B views for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Fig. 5 is a kind of left view for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Fig. 6 is a kind of circular ring magnet end face for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Figure；
Fig. 7 is a kind of U magnet end view drawing for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Fig. 8 is a kind of semi-circular shape magnet end face for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Figure；
Fig. 9 is that a kind of magnet both ends of the surface fillet for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides shows
It is intended to；
Figure 10 is a kind of magnet axial plane indent circle for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Arc schematic diagram；
Figure 11 is that a kind of magnet both ends of the surface for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides are strengthened
Magnetic field schematic diagram；
Figure 12 is a kind of magnet both ends surface chamfer for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Schematic diagram；
Figure 13 is a kind of magnet axial plane evagination circle for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Arc schematic diagram；
Figure 14 is the front view for another the dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Figure 15 is the operating diagram for another the dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Figure 16 is a kind of flow chart for dynamic pressure magnetic rheological polishing method that the specific embodiment of the invention provides.
Wherein：1. permanent magnet, 2. spacers, 3. shaft sleeves, 4. sealing rings, 5. taper roll bearings, 6. axis, 7. fastening spiral shells
Nail, 8. gaskets, 9. spring shims, 10. hex head screws, 11. pins, 12. hubcaps, 13. side plates, 14. spring shims, 15.
Gasket, 16. fastening bolts, 17. apparatus bodies, 18. nuts, 19. ring flanges, 20. belt wheels, 21. trip bolts, 22. fastening spiral shells
Nail, 23. bearing spacers, 24. motors, 25. taper roll bearings, 26. sealing rings, 27. bearing (ball) covers, 28. trip bolts, 29.
Taper roll bearing, 30. sealing rings, 31. bearing (ball) covers, 32. sealing rings, 33. deep groove ball bearings, 34. magnetic polishing wheels, 35. skins
Band, 36.37.38.39.40.41. tensioning wheels, 42. magnetorheological collectors, 43. workpiece, 44. magnetic flow liquids, the spray of 45. magnetic flow liquids
Head, 46. force (forcing) pumps, 47. recovery pumps, 48. workpiece binders.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment, belongs to the scope of protection of the invention.
Please refer to Fig.1 to Fig. 5, Fig. 1 is a kind of dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Front view；Fig. 2 is a kind of A-A views for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；Fig. 3 is this hair
A kind of A-A view partial enlarged views for dynamic pressure Magnetorheological Polishing equipment that bright embodiment provides；Fig. 4 is specific for the present invention
A kind of B-B views for dynamic pressure Magnetorheological Polishing equipment that embodiment provides；Fig. 5 is one that the specific embodiment of the invention provides
The left view of kind dynamic pressure Magnetorheological Polishing equipment.
In a kind of embodiment of the present invention, the specific embodiment of the invention provides a kind of dynamic pressure Magnetorheological Polishing
Equipment, including：Apparatus body, the apparatus body are equipped with magnetic polishing wheel, and the magnetic polishing wheel passes through transmission belt with actuating unit
Connection；The thickness direction of the transmission belt along the magnetic polishing wheel coats the polishing portion of the magnetic polishing wheel.
Specifically, the specific embodiment of the invention provides a kind of dynamic pressure Magnetorheological Polishing equipment, its include apparatus body,
Transmission belt and magnetic polishing wheel；
The apparatus body by side plate (13), fastening bolt (16), nut (18), ring flange (19) form, wherein described
Side plate (13) is connected to stent (17) by fastening bolt (16), nut (18), and side plate (13) and stent (17) right flank are mutual
Parallel, the ring flange (19) is connected by screw directly over stent (17)；
The magnetic polishing wheel is by permanent magnet (1), spacer (2), shaft sleeve (3), taper roll bearing (5), axis (6), fastening
Screw (7), gasket (8), spring shim (9), hex head screw (10), pin (11), hubcap (12), side plate (13), stent
(17), taper roll bearing (29), bearing (ball) cover (31), magnetic polishing wheel (34) and belt (35) composition；At least one permanent magnet
(1) by spacer (2) be installed on axis (6) on it is fixed, axis (6) is installed in side plate (13) hole, and passes through taper roller axis
Hold (33) to be installed in permanent magnetism polishing wheel (34), hubcap (12) passes through trip bolt (10) and pin (11) connecting shaft (6), axis
End cap (12) is installed in side plate (13) by trip bolt (7), and the sleeve (3) is installed in axis by taper roll bearing (5)
(6), permanent magnetism polishing wheel (34) is installed in shaft sleeve (3) by screw thread, and is installed in stent by taper roll bearing (29)
(17) on, the taper roll bearing (29) passes through trip bolt (28) by bearing (ball) cover (31) pretension, bearing (ball) cover (31)
It is installed in stent (17), belt (35) tight magnetic polishing wheel (34) lower surface.
Actuating unit is by being driven band connection magnetic polishing wheel, and specifically, the actuating unit is rolled by shaft sleeve (3), circular cone
Sub- bearing (5), axis (6), trip bolt (7), gasket (8), spring shim (9), hex head screw (10), pin (11), shaft end
Cover (12), side plate (13), stent (17), belt wheel (20), motor (24), taper roll bearing (25), bearing (ball) cover (27), circular cone
Roller bearing (29), bearing (ball) cover (31), magnetic polishing wheel (34), belt (35) and tensioning wheel (36,37,38,39,40,41) group
Into.
Belt wheel (20) is fixed between side plate (13) and stent (17) by 3 taper roll bearings (25), two, right side
Bearing spacer is equiped between taper roll bearing (25), the bearing of both sides is equiped with bearing (ball) cover (27) pretension, two side bearings
End cap (27) is connected to side plate (13) and stent (17) by trip bolt (21)；The left end of axis (6) is covered tightly by shaft end
Gu screw (7), gasket (8), spring shim (9), hex head screw (10) and hubcap (12) are fixed on side plate (13), and are led to
Cross the circumferencial direction of pin (11) control shaft (6)；Shaft sleeve (3) external screw thread is linked with magnetic polishing wheel (34) left end screw-internal thread fit
As an entirety, one or more magnetic polishing wheels (34) are arranged side by side by a pair of of taper roll bearing (5) and bearing (ball) cover (31)
It is arranged on side plate (13) and stent (17)；Magnetic polishing wheel (34) most upper left side, most upper right side and magnetic polishing wheel (34) are thrown with magnetic
Top is provided with the tensioning wheel (36,37,39,40,41) that can be adjusted up and down between halo (34), and driving pulley (20) is positioned at tensioning
Take turns above (36,41), belt (35) detours by belt (35), tensioning wheel (36,37,39,40,41) and each magnetic polishing wheel
(34) outside cylinder, can the tensioning wheel (38) of up and down adjustment compress belt (35), motor (24) is installed in by trip bolt (22)
Stent (17) right side, and belt wheel (20) is directly driven to drive one or more magnetic polishing wheels (34) reliable turn synchronous by key
It is dynamic.
It is worth noting that the transmission belt in the specific embodiment of the invention can be belt (35), sand can also be used
Band, waits other transmission belts, as long as the polishing portion of magnetic polishing wheel can be coated.Here polishing portion, refers to that magnetic is thrown
Halo at work, is in contact with magnetic flow liquid, and the position of processing is polished to workpiece.
In order to adjust the tensile force between transmission belt and magnetic polishing wheel, tensioning wheel, institute can also be set on apparatus body
Tensioning wheel is stated to contact with the transmission belt；The tensioning wheel passes through the first gearshift with lock function and the equipment sheet
Body connects.Preferably, institute's displacement apparatus can be moved up and down in the apparatus body, and be locked.Specifically, a kind of specific
In embodiment, above-mentioned 6 regulating wheels of tensioning wheel (36,37,38,39,40,41) move up and down and can adjust of belt (35)
Inclination angle between clamp force and adjusting belt (35) and magnetic polishing wheel (34).
In the present embodiment, above-mentioned burnishing device can have including the gap such as at least one, with the magnetic throwing of height distribution in parallel
Halo (34), the wall thickness of magnetic polishing wheel (34) is 3 between 10mm, and magnetic polishes wheel diameter 50 between 300mm, magnetic polishing wheel
(34) diamagnetic material is used, such as：Stainless steel, duralumin, hard alumin ium alloy, copper alloy, ceramics etc., it is of course also possible to use other materials
Matter.
In the present embodiment, above-mentioned permanent magnet (1) is the radial magnetizing field circular ring shape that magnetic field intensity is 1000Gs to 6000Gs
Permanent magnet, adjacent same magnetic pole or adjacent anti-magnetic pole are coaxially installed in magnetic polishing wheel (34) hole, each permanent magnet (1) lower face
With magnetic polishing wheel (34) endoporus there are gap and gap it is equal, naturally it is also possible to just according to the concrete condition of processing object, take
The magnet of other shapes.
Preferably, the quantity of the magnetic polishing wheel is N, and N number of magnetic polishing wheel is sequentially connected by the transmission belt.Institute
Magnetic polishing wheel is stated to be connected with the polissoir body by the second displacement device with lock function.
Fig. 6 to Figure 13 is refer to, Fig. 6 is a kind of dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Circular ring magnet end view drawing；Fig. 7 is a kind of U magnet for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
End view drawing；Fig. 8 is a kind of semi-circular shape magnet end face for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Figure；Fig. 9 is a kind of magnet both ends of the surface fillet schematic diagram for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Figure 10 is a kind of magnet axial plane indent circular arc schematic diagram for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides；
Figure 11 is that a kind of magnet both ends of the surface for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides strengthen magnetic field signal
Figure；Figure 12 is a kind of magnet both ends surface chamfer signal for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Figure；Figure 13 is a kind of magnet axial plane evagination circular arc signal for dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Figure；
On the basis of above-mentioned embodiment, present embodiment, be equipped with the magnetic polishing wheel quantity it is adjustable,
The default magnet being in series, the default magnet is circular magnet, the one or more in semicircle magnet, U-shaped magnet.This reality
Apply in example, serial number of the above-mentioned permanent magnet (1) on axis can increase or reduce, and adapt it to different in width workpiece (43)
Polishing, the shape of permanent magnet (1) can also be the shape such as circular, semicircle, U-shaped, reach the surface of workpiece of different shapes
Magnetic field intensity is uniformly distributed.
In order to be processed by shot blasting to various sizes of processing object, can also pre-set it is of different sizes be used for replace
Magnetic polishing wheel.In the present embodiment, above-mentioned magnetic polishing wheel (34) can be replaced with the magnetic polishing wheel of different-diameter, adapt to not similar shape
The polishing of shape, big small workpiece (43), when processing flat work pieces or column-shape curved surface workpiece, magnetic polishing wheel is in stent (17) parallel connection
Quantity can also increase or reduce according to work pieces process efficiency requirements, and single magnetic polishing wheel (34) can be to non-free curved surface
It is polished.
In the present embodiment, the position of above-mentioned taper roll bearing and axis installing, is all sealed around it using sealing ring, prevented
Magnetic flow liquid enters the normal use of internal influence bearing.
During dynamic pressure Magnetorheological Polishing equipment in the above-mentioned embodiment of concrete application, magnetic flow liquid (44) passes through pump
(46) pressure sprays into machining area from magnetic flow liquid nozzle (45), and last magnetic flow liquid is received curette (42) collection and returned by pumping (47)
Receive, magnetic flow liquid is recycled, magnetic can form the hydrodynamic pressure of wedge effect when polishing buff polishing.
The present invention provides a kind of dynamic pressure Magnetorheological Polishing equipment, including：Apparatus body, the apparatus body are polished equipped with magnetic
Wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；Thickness direction bag of the transmission belt along the magnetic polishing wheel
Cover the polishing portion of the magnetic polishing wheel.Transmission belt and magnetic polishing wheel are combined by the present invention, are using the dynamic pressure Magnetorheological Polishing
When equipment is polished, when magnetic flow liquid is by transmission belt and magnetic polishing wheel envelope position, wedge effect dynamic pressure can be formed, is carried
High magnetic flow liquid, to the material removing rate of workpiece, so that removal rate is high, improves work efficiency in polishing process.
4, Figure 15 is please referred to Fig.1, Figure 14 is that another dynamic pressure Magnetorheological Polishing that the specific embodiment of the invention provides is set
Standby front view；Figure 15 is the work signal for another the dynamic pressure Magnetorheological Polishing equipment that the specific embodiment of the invention provides
Figure.
In a kind of embodiment of the present invention, restriction of knowing clearly, this specific implementation are carried out to the number of magnetic polishing wheel
Dynamic pressure Magnetorheological Polishing equipment in mode can only include a magnetic polishing wheel.Remainder may be referred to above-mentioned specific implementation
Mode and the prior art.
Please refer to Fig.1 the flow that 6, Figure 16 is a kind of dynamic pressure magnetic rheological polishing method that the specific embodiment of the invention provides
Figure.This method includes：
S11：Obtain processing object；
S12：The burnishing surface of the processing object is fixed at the pre-determined distance of the magnetic polishing wheel；
S13：Magnetic flow liquid is supplied to the magnetic polishing wheel, starts the dynamic structure, to be carried out to the processing object
Polishing treatment.
Specifically, in a kind of embodiment, set using the dynamic pressure Magnetorheological Polishing in above-mentioned embodiment
It is standby, process Si pieces.Include the following steps：
1) according to the structure of milling machine, more magnetic pole cluster dynamic pressure magnetorheological finishing device structures of adaptation are designed.Magnetic polishing wheel
(34) a diameter of 100mm；
2) according to the characteristics of 10 inches of Si pieces, the number that selection is connected on permanent magnet (1) on axis (6) is 5, and in parallel
Magnetic polishing wheel (34) number be 4, select magnetic field intensity be 5000Gs the adjacent same magnetic pole of permanent magnet (1) or it is adjacent instead
Magnetic pole is installed in more magnetic pole cluster dynamic pressure magnetorheological finishing devices so that cylindrical permanent magnet iron (1) center of circle leads in sustained height
More magnetic pole cluster dynamic pressure magnetorheological finishing devices are installed on the main shaft of milling machine by attachment screw by ring flange (19)；
3) workpiece (33) is inhaled by vacuum or pastes the mode clampings such as wax on workpiece binder (48), and filled in polishing
Put within the scope of the correspondence of polishing；
4) it is 5% micron-sized SiC abrasive materials by adding concentration in deionized water, and adds in deionized water dense
Spend the micron order carbonyl iron dust for 30%, and add the stabilizer that dispersant, concentration that concentration is 5% are 5%, stirred using magnetic force
Device stirring is mixed after five minutes by vibration of ultrasonic wave 30 minutes, forms magnetic flow liquid (44)；
5) tensile force of belt (35), Yi Jipi are adjusted by 6 tensioning wheels of tensioning wheel (36,37,38,39,40,41)
Inclination angle between band (35) parcel magnetic polishing wheel (34)；
6) the upper and lower displacement motor of machine tool chief axis is started, the upper-lower position of adjustment magnetic polishing wheel (34), makes belt (35) most
The processing gap on low side face to workpiece (43) surface is 1mm, starts the motor (24) of burnishing device, realize magnetic polishing wheel (34) with
600rpm rotating speeds rotate, and start pump (46,47) and magnetic flow liquid (44) is sprayed onto belt surface by magnetic flow liquid nozzle (45),
The Magnetorheological Polishing pad of flexibility, under the turning effort of magnetic polishing wheel (34), Magnetorheological Polishing pad are formed under the action of permanent magnet
The abrasive particle of middle clamping can be polished workpiece (43), and in order to realize the uniform polish on workpiece (43) surface, burnishing device carries out
Scan tool track polishing；Surface so as to fulfill workpiece (43) uniformly removes, and ensure that the form accuracy of workpiece (43).Finally
Magnetic flow liquid can finally be pumped (47) recycling, realize the recycling of magnetic flow liquid (44) with the transmitting effect of belt；
7) in order to realize that the uniformity that workpiece (43) surfacing is gone out is removed with constant pressure, according to the theoretical modeling of removal rate
Analysis and the survey calculation of actual experiment draw the occurrence of material removing rate, so as to determine magnetic according to the size of material removing rate
The amount of feeding of Z-direction of the polishing wheel (34) under machining state, so as to ensure to throw the processing that belt (35) arrives workpiece (43) surface
Gap remains unchanged, and realizes the constant pressure polishing of magnetic flow liquid polishing pad；Or detector is installed on burnishing device, add in polishing
Under work state, the processing gap between the syringe needle timing probe belt (35) and workpiece (43) of detector, the data of detection are passed through
The feedback processing of digital control system, carries out the amount of feeding of the magnetic polishing wheel (34) in Z-direction, so as to protect according to the change in processing gap
The processing gap on card belt (35) to workpiece (43) surface remains unchanged, and realizes workpiece (43) surfacing in Magnetorheological Polishing pad
Constant pressure shear action realize that polishing removes, obtain the workpiece surface of smooth no sub-surface damage；
8) stop above-mentioned all motors, discharge and take out workpiece.
In another embodiment of the present invention, the dynamic pressure Magnetorheological Polishing in above-mentioned embodiment is used
Equipment, processing mobile phone shell.Include the following steps：
1) according to the structure of 3D curved surface magnetorheological polishing machines, single magnetic pole cluster dynamic pressure magnetorheological finishing device of adaptation is designed
Structure.A diameter of 100mm of magnetic polishing wheel (34)；
2) according to the characteristics of mobile phone shell, the number that selection is connected on permanent magnet (1) on axis (6) is 2, and magnetic in parallel
The number of polishing wheel (34) is 1, and it is the adjacent same magnetic pole of permanent magnet (1) of 5000Gs or adjacent anti-magnetic pole to select magnetic field intensity
It is installed in more magnetic pole cluster dynamic pressure magnetorheological finishing devices so that lead to and connect in sustained height in cylindrical permanent magnet iron (1) center of circle
More magnetic pole cluster dynamic pressure magnetorheological finishing devices are installed on the main shaft of milling machine by screw by ring flange (19)；
3) workpiece (33) is inhaled by vacuum or pastes the mode clampings such as wax on workpiece binder (48), and filled in polishing
Put within the scope of the correspondence of polishing；
4) it is 5% micron-sized SiC abrasive materials by adding concentration in deionized water, and adds in deionized water dense
Spend the micron order carbonyl iron dust for 25%, and add the stabilizer that dispersant, concentration that concentration is 5% are 5%, stirred using magnetic force
Device stirring is mixed after five minutes by vibration of ultrasonic wave 30 minutes, forms magnetic flow liquid (44)；
5) tensile force of belt (35), Yi Jipi are adjusted by 6 tensioning wheels of tensioning wheel (36,37,38,39,40,41)
Inclination angle between band (35) parcel magnetic polishing wheel (34)；
6) the upper and lower displacement motor of machine tool chief axis is started, the upper-lower position of adjustment magnetic polishing wheel (34), makes belt (35) most
The processing gap on low side face to workpiece (43) surface is 0.8mm, starts the motor (24) of burnishing device, realizes magnetic polishing wheel (34)
Rotated with 600rpm rotating speeds, start pump (46,47) and magnetic flow liquid (44) is sprayed onto belt surface by magnetic flow liquid nozzle (45),
The Magnetorheological Polishing pad of flexibility, under the turning effort of magnetic polishing wheel (34), Magnetorheological Polishing are formed under the action of permanent magnet
The abrasive particle clamped in pad can be polished workpiece (43), in order to realize the uniform polish on workpiece (43) surface, burnishing device into
Row scanning tool track polishing；Surface so as to fulfill workpiece (43) uniformly removes, and ensure that the form accuracy of workpiece (43).Most
Magnetic flow liquid can finally be pumped (47) recycling, realize the recycling of magnetic flow liquid (44) with the transmitting effect of belt afterwards；
7) during polishing curved surface, more magnetic pole cluster dynamic pressure magnetorheological finishing devices of single rubbing head can be installed in
In digital control system, digital control system carries out X, Y, Z axis feeding and the rotation of respective shaft according to the Curvature varying of curved surface, so as to fulfill
The high accuracy of curved surface is polished without sub-surface damage；
8) in order to realize that the uniformity that workpiece (43) surfacing is gone out is removed with constant pressure, according to the theoretical modeling of removal rate
Analysis and the survey calculation of actual experiment draw the occurrence of material removing rate, so as to determine magnetic according to the size of material removing rate
The amount of feeding of Z-direction of the polishing wheel (34) under machining state, so as to ensure to throw the processing that belt (35) arrives workpiece (43) surface
Gap remains unchanged, and realizes the constant pressure polishing of magnetic flow liquid polishing pad；Or detector is installed on burnishing device, add in polishing
Under work state, the processing gap between the syringe needle timing probe belt (35) and workpiece (43) of detector, the data of detection are passed through
The feedback processing of digital control system, carries out the amount of feeding of the magnetic polishing wheel (34) in Z-direction, so as to protect according to the change in processing gap
The processing gap on card belt (35) to workpiece (43) surface remains unchanged, and realizes workpiece (43) surfacing in Magnetorheological Polishing pad
Constant pressure shear action realize that polishing removes, obtain the workpiece surface of smooth no sub-surface damage；
9) stop above-mentioned all motors, discharge and take out workpiece.
In another embodiment of the present invention, the dynamic pressure Magnetorheological Polishing in above-mentioned embodiment is used
Equipment, processes cylindrical mirror.Comprise the following steps：
1) according to the structure of 3D curved surface magnetorheological polishing machines, single magnetic pole cluster dynamic pressure magnetorheological finishing device of adaptation is designed
Structure.A diameter of 100mm of magnetic polishing wheel (34)；
2) according to the characteristics of cylindrical mirror, the number that selection is connected on permanent magnet (1) on axis (6) is 1, and magnetic in parallel
The number of polishing wheel (34) is 1, and it is the adjacent same magnetic pole of permanent magnet (1) of 5000Gs or adjacent anti-magnetic pole to select magnetic field intensity
It is installed in more magnetic pole cluster dynamic pressure magnetorheological finishing devices so that lead to and connect in sustained height in cylindrical permanent magnet iron (1) center of circle
More magnetic pole cluster dynamic pressure magnetorheological finishing devices are installed on the main shaft of engraving machine by screw by ring flange (19)；
3) workpiece (33) is inhaled by vacuum or pastes the mode clampings such as wax on workpiece binder (48), and filled in polishing
Put within the scope of the correspondence of polishing；
4) by adding the micron-sized magnetic abrasive that concentration is 15% in deionized water, magnetic abrasive is with certain ratio
The iron powder of example sinters bulk under the high temperature conditions with abrasive material, and block magnetic abrasive is crushed, filters out certain particle size range
Particle as Magnetorheological Polishing particle.In addition in magnetic flow liquid add concentration be 5% dispersant, concentration be 5% stabilization
Agent, using magnetic stirrer after five minutes by vibration of ultrasonic wave 30 minutes, forms magnetic flow liquid (44)；
5) tensile force of belt (35), Yi Jipi are adjusted by 6 tensioning wheels of tensioning wheel (36,37,38,39,40,41)
Inclination angle between band (35) parcel magnetic polishing wheel (34)；
6) the upper and lower displacement motor of machine tool chief axis is started, the upper-lower position of adjustment magnetic polishing wheel (34), makes belt (35) most
The processing gap on low side face to workpiece (43) surface is 0.8mm, starts the motor (24) of burnishing device, realizes magnetic polishing wheel (34)
Rotated with 600rpm rotating speeds, start pump (46,47) and magnetic flow liquid (44) is sprayed onto belt surface by magnetic flow liquid nozzle (45),
Magnetic abrasive grain can be assembled in magnetic line of force direction and arrange under the action of permanent magnet, viscoelastic Magnetorheological Polishing pad be formed, in magnetic
Under the turning effort of polishing wheel (34), magnetic abrasive grain can be polished workpiece (43) in Magnetorheological Polishing pad, in order to realize work
The uniform polish on part (43) surface, burnishing device are scanned tool track polishing；Surface so as to fulfill workpiece (43) is uniform
Remove, ensure that the form accuracy of workpiece (43).Last magnetic flow liquid can finally be pumped (47) and returned with the transmitting effect of belt
Receive, realize the recycling of magnetic flow liquid (44)；
7) during polishing curved surface, more magnetic pole cluster dynamic pressure magnetorheological finishing devices of single rubbing head can be installed in
In digital control system, digital control system carries out X, Y, Z axis feeding and the rotation of respective shaft according to the Curvature varying of curved surface, so as to fulfill
The high accuracy of curved surface is polished without sub-surface damage；
8) in order to realize that the uniformity that workpiece (43) surfacing is gone out is removed with constant pressure, according to the theoretical modeling of removal rate
Analysis and the survey calculation of actual experiment draw the occurrence of material removing rate, so as to determine magnetic according to the size of material removing rate
The amount of feeding of Z-direction of the polishing wheel (34) under machining state, so as to ensure to throw the processing that belt (35) arrives workpiece (43) surface
Gap remains unchanged, and realizes the constant pressure polishing of magnetic flow liquid polishing pad；Or detector is installed on burnishing device, add in polishing
Under work state, the processing gap between the syringe needle timing probe belt (35) and workpiece (43) of detector, the data of detection are passed through
The feedback processing of digital control system, carries out the amount of feeding of the magnetic polishing wheel (34) in Z-direction, so as to protect according to the change in processing gap
The processing gap on card belt (35) to workpiece (43) surface remains unchanged, and realizes workpiece (43) surfacing in Magnetorheological Polishing pad
Constant pressure shear action realize that polishing removes, obtain the workpiece surface of smooth no sub-surface damage；
9) stop above-mentioned all motors, discharge and take out workpiece.
It can be seen that more magnetic pole cluster dynamic pressure magnetorheological finishing devices of the present invention from above-mentioned case study on implementation, which is
Sbrasive belt grinding and Technique of Magnetorheological Finishing are combined, abrasive band is common band, and cylinder-shaped magnetic pole is inlaid with inside magnetic polishing wheel, this
When sample magnetic flow liquid is by flat rubber belting and belt wheel envelope position, wedge effect dynamic pressure can be formed, improves magnetic flow liquid polished
To the material removing rate of workpiece in journey；The apparatus structure is simple, and can be increased by the way of the series connection of more magnetic poles magnetorheological
Polishing area, can also polish multiple magnetic polishing wheel parallel combinations, and the polishing of multiple stations is carried out to a workpiece, realizes work
The high efficiency polishing of part；The device drives multiple magnetic polishing wheels arranged side by side high under the input condition of a motor, by belt
Speed rotates, and magnetic flow liquid carries out many places constant pressure polishing to workpiece under the influence of a magnetic field, improves the polishing efficiency of workpiece；From upper
State obtained by beneficial effect, the acquisition workpiece surface that a kind of dynamic pressure Magnetorheological Polishing equipment using the present invention can be rapidly and efficiently is consistent
Property the good and high quality workpiece without surface and sub-surface damage, and cost is low, is very suitable for photoelectron, microelectronic substrates and light
Learn plane, the processing of curved surface high efficiency ultra-smooth uniform polish of element.
The above disclosure is only the preferred embodiments of the present invention, cannot limit the right model of the present invention with this certainly
Enclose, therefore equivalent variations made according to the claims of the present invention, it is still within the scope of the present invention.
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by
One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation
Between there are any actual relationship or order.Moreover, term " comprising ", "comprising" or its any other variant meaning
Covering non-exclusive inclusion, so that process, method, article or equipment including a series of elements not only include that
A little key elements, but also including other elements that are not explicitly listed, or further include for this process, method, article or
The intrinsic key element of equipment.In the absence of more restrictions, the key element limited by sentence "including a ...", is not arranged
Except also there are other identical element in the process, method, article or apparatus that includes the element.
A kind of cluster dynamic pressure Magnetorheological Polishing device and method provided by the present invention are described in detail above, this
Specific case is applied in text to be set forth the principle of the present invention and embodiment, the explanation of above example is only intended to
Help to understand method and its core concept of the invention；Meanwhile for those of ordinary skill in the art, the think of according to the present invention
Think, in specific embodiments and applications there will be changes, in conclusion this specification content should not be construed as pair
The limitation of the present invention.
Claims (10)
- A kind of 1. dynamic pressure Magnetorheological Polishing equipment, it is characterised in that including：Apparatus body, the apparatus body are polished equipped with magnetic Wheel, the magnetic polishing wheel is with actuating unit by being driven band connection；Thickness direction bag of the transmission belt along the magnetic polishing wheel Cover the polishing portion of the magnetic polishing wheel.
- 2. dynamic pressure Magnetorheological Polishing equipment according to claim 1, it is characterised in that further include：Tensioning wheel, the tensioning Wheel is contacted with the transmission belt；The tensioning wheel is connected by the first gearshift with lock function and the apparatus body Connect.
- 3. dynamic pressure Magnetorheological Polishing equipment according to claim 2, it is characterised in that institute's displacement apparatus can be described Apparatus body moves up and down, and locks.
- 4. dynamic pressure Magnetorheological Polishing equipment according to claim 1, it is characterised in that be equipped with quantity in the magnetic polishing wheel Default magnet that is adjustable, being in series.
- 5. dynamic pressure Magnetorheological Polishing equipment according to claim 4, it is characterised in that the default magnet is circular magnetic One or more in iron, semicircle magnet, U-shaped magnet.
- 6. dynamic pressure Magnetorheological Polishing equipment according to claim 1, it is characterised in that the outer surface of the transmission belt is sand Band.
- 7. dynamic pressure Magnetorheological Polishing equipment according to any one of claims 1 to 6, it is characterised in that the magnetic polishing wheel Quantity be N, N number of magnetic polishing wheel is sequentially connected by the transmission belt.
- 8. dynamic pressure Magnetorheological Polishing equipment according to any one of claims 1 to 6, it is characterised in that further include：Size is not With the magnetic polishing wheel for being used to replace.
- 9. dynamic pressure Magnetorheological Polishing equipment according to any one of claims 1 to 6, it is characterised in that the magnetic polishing wheel It is connected by the second displacement device with lock function with the polissoir body.
- A kind of 10. dynamic pressure magnetic rheological polishing method, applied to such as claim 1 to 9 any one of them dynamic pressure Magnetorheological Polishing Equipment, it is characterised in that including：Obtain processing object；The burnishing surface of the processing object is fixed at the pre-determined distance of the magnetic polishing wheel；Magnetic flow liquid is supplied to the magnetic polishing wheel, starts the dynamic structure, to be processed by shot blasting to the processing object.
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| CN110480427A (en) * | 2019-08-28 | 2019-11-22 | 绍兴金辉久研科技有限公司 | A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary |
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