CN110480427A - A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary - Google Patents

A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary Download PDF

Info

Publication number
CN110480427A
CN110480427A CN201910801145.4A CN201910801145A CN110480427A CN 110480427 A CN110480427 A CN 110480427A CN 201910801145 A CN201910801145 A CN 201910801145A CN 110480427 A CN110480427 A CN 110480427A
Authority
CN
China
Prior art keywords
polishing
magnetorheological
wheel
conveyer belt
assists
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910801145.4A
Other languages
Chinese (zh)
Inventor
吴金忠
尹韶辉
李少卿
王雷雷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shaoxing Jinhui Jiuyan Technology Co Ltd
Original Assignee
Shaoxing Jinhui Jiuyan Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shaoxing Jinhui Jiuyan Technology Co Ltd filed Critical Shaoxing Jinhui Jiuyan Technology Co Ltd
Priority to CN201910801145.4A priority Critical patent/CN110480427A/en
Publication of CN110480427A publication Critical patent/CN110480427A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The present invention relates to Ultraprecision Machining fields, specifically disclose a kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary, including lathe, compound vibrating device, polishing system, polishing fluid circulation and the control system being separately connected with above-mentioned each component, conveyer belt is provided in polishing system above polishing wheel, polishing fluid is sent to polishing on conveyer belt by polishing fluid circulation, make the influence that centrifugal force is got rid of when Magnetorheological Polishing liquid movement, the inflection point problem generated when overcoming traditional Magnetorheological Polishing using polishing buff polishing, pass through two stages formula complex vibration Magnetorheological Polishing, high efficiency and high-precision combination can be achieved.

Description

A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary
Technical field
The present invention relates to Ultraprecision Machining fields, and in particular to a kind of magnetorheological ultraprecise of ultrasonic activation auxiliary is thrown Electro-optical device is suitable for processing various hard brittle materials, such as glass, ceramics, synthetic cut stone, quartz, germanium, silicon, graphite etc. nonmetallic Material.
Background technique
It is more and more accurate with the rapid development of the new high-tech industries such as optics, electronics, space flight and aviation, semiconductor Components propose tightened up requirement to processing quality, machining accuracy and processing efficiency.Magnetorheological Polishing method is a kind of advanced Ultraprecise Finishing.Technique of Magnetorheological Finishing is with principles such as hydrodynamics, magnetomechanics, surface chemistry, tribochemistries Based on, it is effectively applied in the practice of ultraprecise skin processing.The basic principle of Magnetorheological Polishing is using containing abrasive material The rheological effect that magnetorheological fluid generates under magnetic fields makes its moment generate a flexibility " bistrique " in machining area, passes through Apply relative motion between " bistrique " and workpiece surface, realizes the material removal of workpiece surface.Magnetorheological Polishing is mainly gone It is minimum to workpiece sub-surface damage except the buckle layer and crackle layer after fine grinding, it is considered a kind of high quality, undamaged Advanced finishing process.However, always existing the low problem of polishing efficiency in magnetorheological process.How to improve Polishing efficiency, there are mainly two types of methods.One is the speed of related movement increased between workpiece and magnetorheological fluid, are cut by increasing Shear force improves efficiency.Second is to improve magnetic force by increasing magnetic field to improve efficiency.However, excessive relative motion speed Degree will lead to magnetorheological fluid and generate splashing in process, and excessive magnetic field will increase processing danger coefficient, in addition, current nothing By permanent magnet or electromagnet is used, acquired magnetic force is in 2T or less.Therefore, how to guarantee real under the premise of great surface quality Existing high efficiency polishing is the critical issue that current Technique of Magnetorheological Finishing intends to solve.
In addition, ultrasonic vibration machining is also a kind of one of non-traditional Ultraprecision Machining.Ultrasonic vibration system by The part such as supersonic generator, energy converter, amplitude transformer forms.Its principle is that ultrasonic polishing is that certain ultrasonic vibration power is attached It is added on polishing workpiece, it is made to make high-frequency vibration with certain frequency and amplitude, to realize that high efficiency polishes.
Summary of the invention
The object of the present invention is to provide a kind of ultrasonic activations for integrating complex vibration processing and Magnetorheological Polishing Assist magnetorheological Ultraprecise polished device, it is applied widely and can guarantee high efficiency and high-precision.
To reach above-mentioned purpose, the invention provides the following technical scheme: a kind of ultrasonic activation assists magnetorheological ultraprecise Burnishing device, including bed piece are respectively arranged with compound vibrating device, polishing system, polishing fluid on the bed piece and follow Loop system and the control system being separately connected with above-mentioned each component;The compound vibrating device is set to the upper of polishing system Side, the compound vibrating device drive workpiece rotation and workpiece are driven to vibrate in the horizontal and vertical directions;The polishing fluid follows Loop system includes the collector for passing sequentially through pipeline connection, polishing liquid container, pump and nozzle, and the polishing liquid container is to polishing fluid It is stirred, constant temperature and permanent viscosity control;The polishing system is set on the workbench being fixed on bed piece, the throwing Photosystem includes polishing wheel and conveyer mechanism, and the polishing wheel is passed through by polishing wheel motor driven, the polishing turbin generator Lifter plate is arranged on the table, and the two sides of the polishing wheel are respectively equipped with several excitation units, the excitation dress of polishing wheel two sides It is opposite to set pole orientation;The conveyer mechanism includes four rolling and the conveyer belt for sequentially passing through four rolling, and described four Idler wheel is square distribution, and the top of the conveyer belt is located at the top of polishing wheel, and one of idler wheel passes through biography in four rolling Belt conveying motor driving;One end of the nozzle face conveyer belt top of the polishing fluid circulation, the collector are set to biography Send the other end with top.
It is further provided in, the bed piece is equipped with lathe bed vertical axis, and the side of the lathe bed vertical axis is set There is guide rail, sliding block can be provided with to vertical sliding on the guide rail, the side of the sliding block is connected with swinging disc, the compound vibration Dynamic device is fixed on the side of swinging disc;The centre of gyration and horizontal direction parallel of the swinging disc.It can be real by control lathe Existing compound vibrating device vertical movement and the shaft coupling movement swung.
It is further provided in, the compound vibrating device includes bottom plate, upper head plate, vibrating motor and rotary ultrasonic Wave apparatus, the bottom plate are fixed on swinging disc, and the upper head plate and bottom plate are arranged in parallel, and level is set on the bottom plate There is a cross bar, the upper head plate is movably set on cross bar, and spring is equipped between the upper head plate and bottom plate;The vibrating motor Main shaft eccentric wheel is connected with by shaft coupling, the eccentric wheel nestles up the side of upper head plate;It is set on the outside of the upper head plate There is fixing sleeve, the rotary ultrasonic wave apparatus is fixedly installed in fixing sleeve;The rotary ultrasonic wave apparatus includes sleeve, ultrasound Wave producer, rotating electric machine and work piece holder, the supersonic generator are set in sleeve, and the supersonic generator connects It connects on the output shaft of rotating electric machine, the work piece holder is set to the bottom of supersonic generator.Compound vibrating device passes through Rotating electric machine drives workpiece to rotate, while driving workpiece to make horizontally and vertically by vibrating motor and supersonic generator Complex vibration on direction.
It is further provided in, the supersonic generator is connected separately with carbon brush, energy converter, amplitude transformer, the carbon Brush provides supersonic frequency electric energy for supersonic generator, and ultrasonic electric signals are converted to supersonic frequency mechanical oscillation by the energy converter, The amplitude transformer amplifies the vibration amplitude of energy converter;The work piece holder is fixedly installed on the bottom of amplitude transformer.
It is further provided in, the vibration frequency of the supersonic generator is 12 kilo hertzs or more, the rotating electric machine Rotation speed be 10000 revs/min or less.
It is further provided in, the polishing wheel is that two sides are symmetrical, middle radius is big, the gradually smaller spinning of both ends radius Cone cell, the every side in the two sides of polishing wheel are respectively set there are four excitation unit, and four excitation units are evenly distributed on the one of polishing wheel On skew back face, the excitation unit internal magnetic field lines are parallel with the inclined-plane of polishing wheel, and the excitation unit magnetic of polishing wheel two sides Extreme direction is on the contrary, form the mutual corresponding state that the pole S and the pole N are at an angle of along two sides inclined-plane;The polishing at the polishing wheel center Fluting forms fluting burnishing surface on face.
It is further provided in, the magnetic induction intensity of the excitation unit is 1200 Gausses or more.
It is further provided in, the workbench is equipped with pedestal, and the pedestal is equipped with support plate, the support plate It is equipped with bottom plate, the transmission translator is set on bottom plate;The bottom plate is equipped with bracket, and the four rolling is respectively set On the inside of bracket, one of idler wheel in four rolling on the lower is driving wheel, the driving wheel and transmission translator it is defeated Axis connection out.
It is further provided in, the side of the conveyer belt is equipped with contact roller, and the contact roller is connected with compression control Nut, to adjust the elastic of conveyer belt.
It is further provided in, the bottom of the lifter plate is equipped with lifter plate adjusting nut, to adjust polishing wheel Highly.
The present invention compares with the prior art, the beneficial effect is that:
1. the present invention introduces conveyer belt between the nozzle and collector of polishing fluid circulation, make Magnetorheologicai polishing liquid The influence that centrifugal force is got rid of when movement, the inflection point problem generated when overcoming traditional Magnetorheological Polishing using polishing buff polishing.
2. polishing wheel provides staggeredly alternate magnetic field in the present invention, is become more complicated to process lines, be conducive to disappear Except convolution error, waveform error is effectively reduced, the surface accuracy after improving processing, opposite opposite pole at an angle to each other can generate Magnetic field that is stronger, more concentrating;The fluting of the groove face of permanent magnetic wheels forms the small abrasive nose of multiple homogenizing due to the presence of magnetic field peak angle, Raising processing quality is more advantageous to after polishing.
3. complex vibration is processed and combined with Magnetorheological Polishing by the present invention, removal rate and the processing of Magnetorheological Polishing are improved Precision.The presence of the ultrasonic activation of vertical direction, abrasive grain reinforces the shock of workpiece, so that semisolid flexibility bistrique and workpiece Pressure become larger, removal rate increase;And the presence of the vibration in vertical magnetic field direction has so that the pressure of workpiece surface equalizes Conducive to improvement surface quality.
Detailed description of the invention
Fig. 1 is arrangement structural schematic diagram of the invention.
Fig. 2 is the structural schematic diagram of compound vibrating device in the present invention.
Fig. 3 is the structural schematic diagram of rotary ultrasonic wave apparatus in the present invention.
Fig. 4 is the structural schematic diagram of polishing system and polishing fluid circulation in the present invention.
Fig. 5 is the structural schematic diagram of contact roller in the present invention.
Fig. 6 is the structural schematic diagram of polishing wheel in the present invention.
Fig. 7 is the pendulum motion schematic diagram of swinging disc in the present invention.
In figure: 1, compound vibrating device;2, polishing system;3, workbench;4, guide rail;5, sliding block;6, swinging disc;7, lathe bed Vertical axis;8, bed piece;9, workpiece;
101, vibrating motor;102, shaft coupling;103, eccentric wheel;104, spring;105, bottom plate;106, rotary ultrasonic wave Device;107, cross bar;108, fixing sleeve;109, upper head plate;
10601, rotating electric machine;10602, rotating electric machine output shaft;10603, sleeve;10604, carbon brush;10605, luffing Bar;10606, work piece holder;10607, energy converter;
201, turbin generator is polished;202, lifter plate;203, collector;204, pedestal;205, control nut is compressed;206, it throws Light liquid container;207, support plate;208, pipeline;209, contact roller;210, polishing wheel;211, idler wheel;212, nozzle;213, it transmits Band;214, bracket;215, bottom plate;216, it pumps;217, lift adjustment nut;218, driving wheel;219, transmission translator;220, it passes Belt conveying motor output shaft;
21001, fluting burnishing surface;21002, excitation unit;21003, polishing wheel motor output shaft;21004, the pole N; 21005, the pole S.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below by embodiment and in conjunction with attached Figure, is described in further detail the present invention.
Embodiment: a kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary, as shown in Figure 1, including bed piece 8, compound vibrating device 1, polishing system 2, polishing fluid circulation and the control system being separately connected with above-mentioned each component.
Lathe bed vertical axis 7 and workbench 3 are respectively equipped on bed piece 8;The side of lathe bed vertical axis 7 is equipped with guide rail 4, leads Sliding block 5 can be provided with to vertical sliding on rail 4, the side of sliding block 5 is equipped with swinging disc 6, and compound vibrating device 1 is fixed on swinging disc 6 outside, the swaying direction of swinging disc 6 is as shown in fig. 7, its centre of gyration and horizontal direction parallel for swinging, and sliding block 5 is in guide rail It is vertically sliding on 4, the shaft coupling that 1 vertical motion of compound vibrating device and swing can be realized by controlling lathe moves.Polishing System 2 and polishing fluid follow bad system and are arranged on workbench 3, and compound vibrating device 1 is made to be located at the top of polishing system 2.
Referring to Fig. 2 and Fig. 3, compound vibrating device 1 includes that bottom plate 105, upper head plate 109, vibrating motor 101 and rotation are super Acoustic wave device 106, bottom plate 105 are fixed on swinging disc 6, and upper head plate 109 and bottom plate 105 are arranged in parallel, on bottom plate 105 Level is fixed with a cross bar 107, and upper head plate 109 is movably set on cross bar 107, is equipped between upper head plate 109 and bottom plate 105 Spring 104.
The main shaft of vibrating motor 101 is connected with eccentric wheel 103 by shaft coupling 102, and the eccentric wheel 103 nestles up upper end The side of plate 109 can drive compound vibrating device 1 in the horizontal direction when vibrating motor 101 is rotated with movable eccentric wheel 103 Upper vibration.
The outside of upper head plate 109 is equipped with fixing sleeve 108, and rotary ultrasonic wave apparatus 106 is fixedly installed in fixing sleeve 108, Rotary ultrasonic wave apparatus 106 includes sleeve 10603, supersonic generator, carbon brush 10604, energy converter 10607, amplitude transformer 10605, rotating electric machine 10601 and work piece holder 10606, wherein supersonic generator, carbon brush 10604, energy converter 10607, Amplitude transformer 10605 is encapsulated with sleeve 10603, and is connected on the output shaft 10602 of rotating electric machine, in rotating electric machine Rotary motion is realized under 10601 drive, carbon brush 10604 provides supersonic frequency electric energy to supersonic generator, and energy converter 10607 will Ultrasonic electric signals are converted to supersonic frequency mechanical oscillation, and amplitude transformer 10605 amplifies the vibration amplitude of energy converter, and will surpass Acoustic vibration passes to workpiece 9 by the way that the work piece holder 10606 of 10605 bottom of amplitude transformer is arranged in, and drives workpiece 9 in Vertical Square It is vibrated, is worked in conjunction with vibrating motor and rotating electric machine upwards, realize the rotation of workpiece 9 and the resultant motion of complex vibration.
In the present embodiment, the vibration frequency of supersonic generator is 12 kilo hertzs or more, the rotation speed of rotating electric machine 10601 It is 10000 revs/min or less.
Referring to Fig. 4, polishing fluid follows bad system and polishing system 2 by pedestal 204 on workbench 3 in the present embodiment, throws Light fluid circulation includes the collector 203 for passing sequentially through the connection of pipeline 208, polishing liquid container 206, pumps 216 and nozzle 212, Wherein polishing liquid container 206 can be stirred polishing fluid, constant temperature and permanent viscosity control.
Polishing system 2 includes polishing wheel 210 and conveyer mechanism, the output shaft company of polishing wheel 210 and polishing turbin generator 201 It connects, polishing turbin generator 201 is arranged on base 204 by lifter plate 202, and the bottom of lifter plate 202 is equipped with lifter plate and adjusts spiral shell Mother 217, it is strong and weak so as to adjust the magnetic field of polishing area for adjusting the height of polishing wheel 210;Polishing wheel 210 uses two sides pair Claim, the shape that middle radius is big, radius gradually smaller similar spinning in both ends is bored, as shown in fig. 6, the every side in its two sides is respectively arranged with Four excitation units 21002, are distributed on the side inclined-plane of polishing wheel 210 in succession in 90 ° of angles, in excitation unit 21002 Portion's magnetic line of force is parallel with inclined-plane, and on the other side inclined-plane of polishing wheel 210, also there are four excitation unit 21002, magnetic for corresponding distribution Extreme direction and the other side are on the contrary, form the pole S 21005, the mutual corresponding state that 21004 two sides inclined-plane of the pole N is at an angle of;And it is throwing It slots on the burnishing surface at 210 center of halo, forms fluting burnishing surface 21001;In the present embodiment, the magnetic strength of excitation unit 21002 Answering intensity is 1200 Gausses or more.
Pedestal 204 is equipped with support plate 207, and support plate 207 is equipped with bottom plate 215, and bottom plate 215 is equipped with bracket 214;It passes Tape-feed includes four rolling 211 and the conveyer belt 213 that is connected on four rolling 211, and four rolling 211 is respectively arranged at 214 inside of bracket, be square distribution, and the conveyer belt 213 for sequentially passing through four rolling 211 is also square therewith;It is underlying In two idler wheels, one of idler wheel is driving wheel 218, is connect with the output shaft 220 of transmission translator 219, transmission translator 219 are set on bottom plate 215;The top of conveyer belt 213 is located at the top of polishing wheel 210, and conveyer belt 213 is in transmission translator It under 219 drive, is moved along four rolling 211, and with the direction of motion identical with polishing wheel 210 by polishing wheel 210 Top;One end of 212 face conveyer belt of nozzle, 213 top of fluid circulation is polished, collector 203 is set on conveyer belt 213 The other end on side.
In above-mentioned polishing system 2 and polishing fluid circulation, polishing wheel is adjusted by adjusting lifter plate adjusting nut 217 At a distance from 210 conveyer belt 213 right above it, the magnetic field for changing polishing area is strong and weak;Magnetorheologicai polishing liquid holds in polishing fluid In device 206, after agitated, constant temperature and permanent viscosity control, by the pressure-driven of pump 216, sent by nozzle 212 to biography through pipeline 208 It send on band 213, by the surface of the underface of workpiece 9 and polishing wheel 210 under the drive of conveyer belt 213, is being passed after polishing It send and is recycled in polishing liquid container 206 under the drive of band 213 by collector 203, then by 216 extraction of pump, so recycle.To avoid Conveyer belt 213 skids, and is equipped with contact roller 209 in the side of conveyer belt 213, as shown in figure 5, contact roller 209 is connected with compression control Nut 205 processed, for adjusting the elastic of conveyer belt 213.
The present embodiment is broadly divided into two stages progress when being embodied Ultraprecise polished, and wherein the first stage is to pursue Efficiency is target, the specific steps are as follows:
1. adjusting lifter plate adjusting nut 217, reduce polishing wheel 210 at a distance from conveyer belt 213, polishing area obtains larger Magnetic field starts and polishes turbin generator 201, and after 210 stabilizations of speed of polished wheel, polishing area generation above it is staggeredly alternate to be had The stabilizing magnetic field of rule;
2. starting transmission translator 219, the speed of service of conveyer belt 213 is tuned up by control transmission translator 219;
3. starting pump 216, the Magnetorheologicai polishing liquid polished in liquid container 206 is sent from nozzle 212 to transmission through pipeline 208 On band 213, and Magnetorheologicai polishing liquid is sent to the underface of workpiece 9 by conveyer belt 213, Magnetorheologicai polishing liquid enters conveyer belt When the magnetic field that 213 underface polishing wheels 210 generate, Magnetorheologicai polishing liquid generates rheological effect, and viscosity is fast within the Millisecond time Speed increases, and forms the polishing tool of semi-solid on 213 surface of conveyer belt, drives the effect in hydrodynamic by conveyer belt 213 Lower realization polishing;
4. starting rotary ultrasonic wave apparatus 106 and vibrating motor 101, horizontal direction mechanical oscillation, vertical direction ultrasound Wave vibration, the workpiece 9 of rotary motion and the flexible polishing tool contact of 9 lower end of workpiece, realize high efficiency and high-precision magnetic current Become polishing;
5. the ganged movement by lathe controls, the machining locus of requirement is formed, high-precision finished surface is finally obtained;
6. the Magnetorheologicai polishing liquid after polishing is sent under the drive of conveyer belt 213 to collector 203 is received, flows into polishing fluid and hold In device 206, then by 216 extraction of pump, repeatedly, to realize recycling for Magnetorheologicai polishing liquid, and remain stable Polishing performance.
Second stage is to pursue precision as target, the specific steps are as follows:
1. adjusting lifter plate adjusting nut 217, at a distance from conveyer belt 213, polishing area obtains the appropriate polishing wheel 210 that increases Lesser magnetic field starts and polishes turbin generator 201, and after 210 stabilizations of speed of polished wheel, polishing area above it generates phase of interlocking Between regular stabilizing magnetic field;
2. starting transmission translator 219, the speed of service of conveyer belt 213 is suitably adjusted by control transmission translator 219 Slowly;
3. starting pump 216, the Magnetorheologicai polishing liquid polished in liquid container 206 is sent from nozzle 212 to transmission through pipeline 208 On band 213, and Magnetorheologicai polishing liquid is sent to the underface of workpiece 9 by conveyer belt 213, Magnetorheologicai polishing liquid enters conveyer belt When the magnetic field that 213 underface polishing wheels 210 generate, Magnetorheologicai polishing liquid generates rheological effect, and viscosity is fast within the Millisecond time Speed increases, and forms the polishing tool of semi-solid on 213 surface of conveyer belt, drives the effect in hydrodynamic by conveyer belt 213 Lower realization polishing;
4. starting vibrating motor 101 and rotating electric machine 10601, horizontal direction mechanical oscillation, rotary motion workpiece 9 with The flexible polishing tool contact of 9 lower end of workpiece, realizes the Magnetorheological Polishing of higher precision;
5. the ganged movement by lathe controls, the machining locus of requirement is formed, high-precision finished surface is finally obtained;
6. the Magnetorheologicai polishing liquid after polishing is sent under the drive of conveyer belt 213 to collector 203 is received, flows into polishing fluid and hold In device 206, then by 216 extraction of pump, repeatedly, to realize recycling for Magnetorheologicai polishing liquid, and remain stable Polishing performance.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art Scholar cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention.It is all according to the present invention Equivalent change or modification made by Spirit Essence, should be covered by the protection scope of the present invention.

Claims (10)

1. a kind of ultrasonic activation assists magnetorheological Ultraprecise polished device, including bed piece, distinguish on the bed piece It is provided with compound vibrating device, polishing system, polishing fluid circulation and the control system being separately connected with above-mentioned each component;
The compound vibrating device is set to the top of polishing system, and the compound vibrating device drives workpiece rotation and band is started building Part vibrates in the horizontal and vertical directions;
The polishing fluid circulation includes the collector for passing sequentially through pipeline connection, polishing liquid container, pump and nozzle, the throwing Light liquid container is stirred polishing fluid, constant temperature and permanent viscosity control;
It is characterized by: the polishing system is set on the workbench being fixed on bed piece, the polishing system includes Polishing wheel and conveyer mechanism, the polishing wheel are arranged by polishing wheel motor driven, the polishing turbin generator by lifter plate On the table, the two sides of the polishing wheel are respectively equipped with several excitation units, the excitation unit pole orientation of polishing wheel two sides On the contrary;The conveyer mechanism includes four rolling and the conveyer belt for sequentially passing through four rolling, and the four rolling is square Distribution, the top of the conveyer belt are located at the top of polishing wheel, and one of idler wheel is driven by transmission translator in four rolling It is dynamic;One end of the nozzle face conveyer belt top of the polishing fluid circulation, the collector are set to conveyer belt top The other end.
2. a kind of ultrasonic activation according to claim 1 assists magnetorheological Ultraprecise polished device, it is characterised in that: institute Bed piece is stated equipped with lathe bed vertical axis, the side of the lathe bed vertical axis is equipped with guide rail, can vertical sliding on the guide rail Ground is provided with sliding block, and the side of the sliding block is connected with swinging disc, and the compound vibrating device is fixed on the side of swinging disc;Institute State the centre of gyration and horizontal direction parallel of swinging disc.
3. a kind of ultrasonic activation according to claim 2 assists magnetorheological Ultraprecise polished device, it is characterised in that: institute Stating compound vibrating device includes bottom plate, upper head plate, vibrating motor and rotary ultrasonic wave apparatus, and the bottom plate is fixed on swing On disk, the upper head plate and bottom plate are arranged in parallel, and horizontal on the bottom plate to be equipped with a cross bar, the upper head plate is slidingly connected In on cross bar, spring is equipped between the upper head plate and bottom plate;
The main shaft of the vibrating motor is connected with eccentric wheel by shaft coupling, and the eccentric wheel nestles up the side of upper head plate;
The outside of the upper head plate is equipped with fixing sleeve, and the rotary ultrasonic wave apparatus is fixedly installed in fixing sleeve;The rotation Ultrasonic unit includes sleeve, supersonic generator, rotating electric machine and work piece holder, and the supersonic generator is set to set In cylinder, the supersonic generator is connected on the output shaft of rotating electric machine, and the work piece holder is set to supersonic generator Bottom.
4. a kind of ultrasonic activation according to claim 3 assists magnetorheological Ultraprecise polished device, it is characterised in that: institute It states supersonic generator and is connected separately with carbon brush, energy converter, amplitude transformer, the carbon brush provides supersonic frequency electricity for supersonic generator Can, ultrasonic electric signals are converted to supersonic frequency mechanical oscillation by the energy converter, and the amplitude transformer is by the vibration amplitude of energy converter It amplifies;The work piece holder is fixedly installed on the bottom of amplitude transformer.
5. a kind of ultrasonic activation according to any one of claims 1-4 assists magnetorheological Ultraprecise polished device, Be characterized in that: the vibration frequency of the supersonic generator is 12 kilo hertzs or more, and the rotation speed of the rotating electric machine is 10000 Rev/min or less.
6. a kind of ultrasonic activation according to claim 1 assists magnetorheological Ultraprecise polished device, it is characterised in that: institute Stating polishing wheel is that two sides are symmetrical, middle radius is big, the gradually smaller spinning cone cell of both ends radius, and the every side in the two sides of polishing wheel is set respectively It sets there are four excitation unit, four excitation units are evenly distributed on the side inclined-plane of polishing wheel, the excitation unit inner magnet The line of force is parallel with the inclined-plane of polishing wheel;Fluting forms fluting burnishing surface on the burnishing surface at the polishing wheel center.
7. a kind of ultrasonic activation according to claim 6 assists magnetorheological Ultraprecise polished device, it is characterised in that: institute The magnetic induction intensity for stating excitation unit is 1200 Gausses or more.
8. a kind of ultrasonic activation according to claim 1 assists magnetorheological Ultraprecise polished device, it is characterised in that: institute Workbench is stated equipped with pedestal, the pedestal is equipped with support plate, and the support plate is equipped with bottom plate, and the transmission translator is set It is placed on bottom plate;The bottom plate is equipped with bracket, and the four rolling is separately positioned on the inside of bracket, in four rolling on the lower One of idler wheel be driving wheel, the output axis connection of the driving wheel and transmission translator.
9. a kind of ultrasonic activation according to claim 1 or 8 assists magnetorheological Ultraprecise polished device, feature exists In: the side of the conveyer belt is equipped with contact roller, and the contact roller is connected with compression control nut, to adjust the pine of conveyer belt Tightly.
10. a kind of ultrasonic activation according to claim 1 assists magnetorheological Ultraprecise polished device, it is characterised in that: The bottom of the lifter plate is equipped with lifter plate adjusting nut.
CN201910801145.4A 2019-08-28 2019-08-28 A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary Pending CN110480427A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910801145.4A CN110480427A (en) 2019-08-28 2019-08-28 A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910801145.4A CN110480427A (en) 2019-08-28 2019-08-28 A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary

Publications (1)

Publication Number Publication Date
CN110480427A true CN110480427A (en) 2019-11-22

Family

ID=68554760

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910801145.4A Pending CN110480427A (en) 2019-08-28 2019-08-28 A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary

Country Status (1)

Country Link
CN (1) CN110480427A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112476125A (en) * 2020-12-10 2021-03-12 天津市聚兴鑫新能源科技有限公司 Online deburring device of photovoltaic support
CN112658958A (en) * 2020-12-22 2021-04-16 广东工业大学 Cluster magnetorheological ultrasonic composite polishing device and method
CN114029850A (en) * 2021-11-23 2022-02-11 大连理工大学 Multi-magnetic-field complex curved surface chemical mechanical polishing equipment
CN114055257A (en) * 2021-11-23 2022-02-18 大连理工大学 Controlled magnetic field complex curved surface chemical mechanical polishing device
US20220097194A1 (en) * 2020-09-25 2022-03-31 Shandong University Of Technology Magnetic field-assisted vibratory finishing device for minute structure and finishing method
CN116721844A (en) * 2023-08-11 2023-09-08 成都双星变压器有限公司 Copper conductive auxiliary connection structure of traction transformer and installation method thereof
CN117681105A (en) * 2024-02-04 2024-03-12 靖江市富源船舶配件有限公司 Boats and ships platemaking end cap burnishing device

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201150040Y (en) * 2007-07-10 2008-11-12 曾祥雄 Magnetic energy machine
CN101323097A (en) * 2008-07-28 2008-12-17 中国人民解放军国防科学技术大学 Magnetorheological finishing device for super large caliber aspheric surface optical part
CN101585159A (en) * 2009-06-10 2009-11-25 中国人民解放军国防科学技术大学 Device of inhibiting high frequency error in magnetic rheology based on principle of entropy increase
CN102172852A (en) * 2011-03-08 2011-09-07 湖南大学 Compound vibration and magnetorheological ultraprecise polishing method
CN202684651U (en) * 2012-08-24 2013-01-23 广东工业大学 Cluster magneto-rheological - chemo mechanical composite polishing device
CN103921176A (en) * 2014-03-27 2014-07-16 中国科学院长春光学精密机械与物理研究所 Magnetorheological finishing device applicable to ultra-large-diameter optical processing
CN106826411A (en) * 2017-02-21 2017-06-13 广东工业大学 A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method
WO2018032659A1 (en) * 2016-08-19 2018-02-22 江苏天一超细金属粉末有限公司 Method and device for magnetorheological finishing
CN207155394U (en) * 2017-07-23 2018-03-30 张广 A kind of workpiece partial high-precision burnishing device based on magnetic rheology effect
CN107900792A (en) * 2017-12-27 2018-04-13 广东工业大学 A kind of cluster dynamic pressure Magnetorheological Polishing device and method
CN207309570U (en) * 2017-07-23 2018-05-04 张广 A kind of big plane polishing device of concentrating type based on magnetic rheology effect
CN108032148A (en) * 2017-12-29 2018-05-15 广东工业大学 A kind of magnetic rheological polishing method and equipment
CN210615995U (en) * 2019-08-28 2020-05-26 绍兴金辉久研科技有限公司 Ultrasonic vibration assisted magnetorheological ultra-precise polishing device

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201150040Y (en) * 2007-07-10 2008-11-12 曾祥雄 Magnetic energy machine
CN101323097A (en) * 2008-07-28 2008-12-17 中国人民解放军国防科学技术大学 Magnetorheological finishing device for super large caliber aspheric surface optical part
CN101585159A (en) * 2009-06-10 2009-11-25 中国人民解放军国防科学技术大学 Device of inhibiting high frequency error in magnetic rheology based on principle of entropy increase
CN102172852A (en) * 2011-03-08 2011-09-07 湖南大学 Compound vibration and magnetorheological ultraprecise polishing method
CN202684651U (en) * 2012-08-24 2013-01-23 广东工业大学 Cluster magneto-rheological - chemo mechanical composite polishing device
CN103921176A (en) * 2014-03-27 2014-07-16 中国科学院长春光学精密机械与物理研究所 Magnetorheological finishing device applicable to ultra-large-diameter optical processing
WO2018032659A1 (en) * 2016-08-19 2018-02-22 江苏天一超细金属粉末有限公司 Method and device for magnetorheological finishing
CN106826411A (en) * 2017-02-21 2017-06-13 广东工业大学 A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method
CN207155394U (en) * 2017-07-23 2018-03-30 张广 A kind of workpiece partial high-precision burnishing device based on magnetic rheology effect
CN207309570U (en) * 2017-07-23 2018-05-04 张广 A kind of big plane polishing device of concentrating type based on magnetic rheology effect
CN107900792A (en) * 2017-12-27 2018-04-13 广东工业大学 A kind of cluster dynamic pressure Magnetorheological Polishing device and method
CN108032148A (en) * 2017-12-29 2018-05-15 广东工业大学 A kind of magnetic rheological polishing method and equipment
CN210615995U (en) * 2019-08-28 2020-05-26 绍兴金辉久研科技有限公司 Ultrasonic vibration assisted magnetorheological ultra-precise polishing device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
程灏波, 王英伟, 冯之敬, 王飞: "电磁抛光装置的结构设计及特性研究", 航空精密制造技术, no. 05 *
肖晓兰;阎秋生;潘继生;于鹏;梁华卓;陈润;: "超精密磁流变复合抛光技术研究进展", 广东工业大学学报, no. 06 *

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220097194A1 (en) * 2020-09-25 2022-03-31 Shandong University Of Technology Magnetic field-assisted vibratory finishing device for minute structure and finishing method
US12083645B2 (en) * 2020-09-25 2024-09-10 Shandong University Of Technology Magnetic field-assisted vibratory finishing device for minute structure and finishing method
CN112476125A (en) * 2020-12-10 2021-03-12 天津市聚兴鑫新能源科技有限公司 Online deburring device of photovoltaic support
CN112658958A (en) * 2020-12-22 2021-04-16 广东工业大学 Cluster magnetorheological ultrasonic composite polishing device and method
CN114029850A (en) * 2021-11-23 2022-02-11 大连理工大学 Multi-magnetic-field complex curved surface chemical mechanical polishing equipment
CN114055257A (en) * 2021-11-23 2022-02-18 大连理工大学 Controlled magnetic field complex curved surface chemical mechanical polishing device
CN114055257B (en) * 2021-11-23 2022-11-18 大连理工大学 Controlled magnetic field complex curved surface chemical mechanical polishing device
CN116721844A (en) * 2023-08-11 2023-09-08 成都双星变压器有限公司 Copper conductive auxiliary connection structure of traction transformer and installation method thereof
CN116721844B (en) * 2023-08-11 2023-10-13 成都双星变压器有限公司 Copper conductive auxiliary connection structure of traction transformer and installation method thereof
CN117681105A (en) * 2024-02-04 2024-03-12 靖江市富源船舶配件有限公司 Boats and ships platemaking end cap burnishing device
CN117681105B (en) * 2024-02-04 2024-04-12 靖江市富源船舶配件有限公司 Boats and ships platemaking end cap burnishing device

Similar Documents

Publication Publication Date Title
CN110480427A (en) A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary
CN102672554B (en) Method and device for polishing small-bore optical element
CN102172852A (en) Compound vibration and magnetorheological ultraprecise polishing method
CN108972302B (en) Non-resonant vibration auxiliary polishing device and method
CN106584218B (en) A kind of fine structure surface finishing method, medium and device
CN101966685B (en) Device and method for finishing and processing surface of viscoelastic and magnetic abrasive tool
CN104551900A (en) Silicon carbide wafer bevel grinding, milling and polishing machine and operation method thereof
CN208289551U (en) A kind of quartz glass pipe internal surface ultrasound magnetic force multiple grinding device
CN210615995U (en) Ultrasonic vibration assisted magnetorheological ultra-precise polishing device
CN110695775A (en) Device and process for ultrasonically grinding double-panel parts
CN110238712A (en) A kind of vibration auxiliary roll-type magnetorheological finishing device and method
CN109514358A (en) A kind of type face constraint ultrasonic vibration auxiliary rotation abrasive flows finishing processing device
CN201432228Y (en) Silicon block chamfering processing device
CN201848760U (en) Polishing machine of inner wall of hollow shaft
CN205734381U (en) A kind of cartridge type permanent magnetic vibration grinder
CN208584325U (en) A kind of optical element process equipment
CN108381304A (en) A kind of focus ultrasonic fluid oscillation polishing method based on spherical shell PZT (piezoelectric transducer)
CN109129038A (en) The forming machine tool and control method of composite wheel roughing and ultrasonic wave added finishing
CN205342684U (en) Vibration burnishing device
CN102873592B (en) Based on the surface finishing device of transducing head
CN209078390U (en) A kind of focus ultrasonic fluid oscillation polishing system based on acoustic lens
CN108857689B (en) A kind of device of the bevelling inverted arc processing of accurate quartz-crystal resonator
CN208866889U (en) The forming machine tool of composite wheel roughing and ultrasonic wave added finishing
CN106426587B (en) A kind of adjustable nonmetallic inorganic capillary centre bore fillet grinder
CN112658817B (en) Alternating magnetic field-based complex curved surface magnetic field auxiliary finishing device and method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination