CN106826411A - A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method - Google Patents
A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method Download PDFInfo
- Publication number
- CN106826411A CN106826411A CN201710094137.1A CN201710094137A CN106826411A CN 106826411 A CN106826411 A CN 106826411A CN 201710094137 A CN201710094137 A CN 201710094137A CN 106826411 A CN106826411 A CN 106826411A
- Authority
- CN
- China
- Prior art keywords
- polishing
- polishing disk
- workpiece
- main shaft
- cams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
Abstract
The invention discloses a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method, including polishing disk rotating mechanism, cam drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid, the polishing disk rotating mechanism includes the first main shaft, shaft-cup, polishing disk in pallet and polishing disk, the upper surface of the polishing disk is along the circumferential direction provided with multiple wedge structures, and the cam drive mechanism includes that setting polishes the clutch shaft bearing in disk in pallet, cam disc, magnet group, spring and the second main shaft, second bearing and the axle sleeve that are arranged in the first main shaft；The workpiece grip mechanism includes workpiece plate and is fixed on the workpiece of workpiece tray bottom；The present invention realizes the real-time reparation of flexible polishing pad by cams drive magnet along polishing disk radial motion, the hydrodynamic pressure produced with reference to the wedge structure of polishing card realizes the high efficiency ultra-smooth uniformity polishing to polished part, and grinding homogeneity, efficiency high, effect are good.
Description
Technical field
It is used for photoelectron/semiconductor microelectronics substrate the present invention relates to Ultraprecision Machining field, more particularly to one kind
And the actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method of the plane planarization processing of optical element.
Background technology
With the social development of information computerization, semi-conducting material is more wide as high-performance microelectronics component application
General, the demand of such as monocrystalline silicon, aluminum oxide, strontium titanates and monocrystalline silicon carbide electron ceramic material is increasing.General semiconductor
Chip manufacture will will reach good performance by operations such as section, grinding, polishings, and its surface accuracy needs to reach super
Smooth degree, surface precision also has higher requirements, and by taking LED extension Sapphire Substrates as an example, typically requires that total thickness deviation is less than
10 μm, total surface flatness less than 10 μm, surface roughness Ra be less than 0.05 μm.Therefore semi-conducting material manufacture increasingly according to
Grinding and polishing technology is relied to meet its production requirement.
Technique of Magnetorheological Finishing (Magnetorheological finishing, MRF) be the nineties in 20th century by
KORDONSKI and its partner electromagnetism, hydrodynamics, analytical chemistry, process technology etc. are combined and proposed one
Kind new optical surface processing method, with polishing effect it is good, do not produce subsurface to damage, be adapted to complex surface processing etc. and pass
The advantage united not available for polishing, has evolved into a kind of revolutionary optical surface processing method, is particularly suitable for axial symmetry aspheric
The Ultra-precision Turning in face, is widely used in the last of massive optics, semiconductor wafer, LED-baseplate, liquid crystal display panel etc.
Manufacturing procedure.Technique of Magnetorheological Finishing is that the property that rheological behavior is similar solid occurs using Magnetorheologicai polishing liquid in gradient fields
Matter and the flexibility " small abrasive nose " with glutinous modeling behavior that is formed, when having quick relative motion between workpiece, workpiece table
Face is subject to very big shearing force, so that workpiece surface material is removed.But MRF belongs to Flexible Manufacture, material removal
Rate is low, and machining accuracy is difficult to ensure that.
In order to improve magnetorheological polishing efficiency, patent CN200610132495.9 is based on MRF principle and cluster
The mechanism of action proposes a kind of abrasive polishing method and its burnishing device based on magnetic rheology effect, and has carried out substantial amounts of experiment
Research, it has been found that the continuous updating and projection for being difficult to " micro- bistrique " using polishing fluid endless form make work pieces process uniformity
Problem is difficult to solve.
For the problem of processing uniformity, patent CN201510801886.4 proposes a kind of dynamic magnetic field from sharp magnetic current
Become flexible polishing pad generating means and its polishing method, fully realize magnetic rheologic flexible polishing pad in process to work
The constant pressure processing of part, and can make abrasive material in process real-time update from sharp, but due to apparatus structure in the patent
Limitation, cause magnetic rheology effect produce " micro- bistrique " spacing it is larger, workpiece idle stroke is more long in process, have impact on
Processing efficiency and processing characteristics, and need to dismantle polishing disk and carry out permanent magnet replacing when changing magnetic field intensity, step compares
It is cumbersome.
The present invention proposes a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure polishing on the basis of above-mentioned further investigation
Device and its polishing method, optimize structure, and drive magnet group realizes the change of the scope in magnetic field in the form of actuated by cams, makes mill
Material realizes real-time update in process, coordinates hydrodynamic principle, improves magnetic rheologic flexible polishing pad processing characteristics, carries
Magnetorheological polishing efficiency high, realizes the uniform processing of workpiece.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art, there is provided a kind of simple structure, good processability, efficiency
The good actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device of high, processing uniformity.
Another object of the present invention is to overcome the deficiencies in the prior art, there is provided a kind of polishing based on above-mentioned burnishing device
Method.
The purpose of the present invention is achieved through the following technical solutions：
A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, mainly includes polishing disk rotating mechanism, cam
Drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid, the polishing disk rotating mechanism include the first main shaft, shaft-cup, polishing
Disk in pallet and polishing disk；The cam drive mechanism include set polishing disk in pallet in clutch shaft bearing, cam disc, magnet group,
Spring and the second main shaft, second bearing and the axle sleeve that are arranged in the first main shaft；The workpiece grip mechanism includes workpiece plate
With the workpiece for being fixed on workpiece tray bottom；The Magnetorheologicai polishing liquid is placed between polishing card and workpiece, Magnetorheologicai polishing liquid
Flexible polishing pad is formed in the presence of magnet group.
Specifically, the polishing disk is arranged on polishing disk in pallet, it is provided with for pacifying between polishing disk and polishing disk in pallet
The space of magnet group is filled, the polishing disk in pallet is arranged on the first main shaft.
Specifically, second main shaft is coaxially mounted in the first main shaft, the second bearing is mainly acted on by radial load,
And axle sleeve is arranged between the first main shaft and the second main shaft, the shaft-cup is fixed on the first main shaft bottom, realizes second bearing
Location and installation, the clutch shaft bearing is fixed in polishing disk in pallet, and mainly by responsive to axial force, the cam disc is fixed on first
On bearing, cam tray bottom is fixedly connected with the second main shaft, and the magnet group is arranged in straight-line groove, and one end is outer with cam disc
Contoured surface is abutted, and the other end is abutted by spring with the inwall of polishing disk in pallet, and during work, magnet group is under the promotion of cam disc
Move out, and inwardly resetted under the elastic force of spring, so as to realize the linear reciprocating motion of magnet group.
Preferably, in order that the driving-chain of cam disc and polishing disk is separated, differential motion, the first master of the present invention are realized
Axle and the second main shaft are driven respectively by two motors.
Used as preferred scheme of the invention, in order to obtain more preferable polishing effect, magnet group of the present invention is by several
Permanent magnet homopolarity or heteropole arranged adjacent are constituted, the permanent magnet near polishing disk inner surface end face distance for 0.5mm extremely
2mm, and permanent magnet end face magnetic field intensity is more than 2000Gs.So design is advantageous in that and produced using heteropole arranged adjacent mode
Magnetic field intensity it is big, " micro- bistrique " pliability of generation is good, polishes strength foot.
Further, in order to improve polishing polishing efficiency, the uniformity coefficient of polishing, the table of polishing disk of the present invention are improved
Face is along the circumferential direction provided with several wedge structures, and the wedge structure is highly 1mm to 3mm.When polishing fluid from workpiece with
Between wedge structure the larger place in gap flow to gap it is less local when, formed hydrodynamic film, in dynamic flexible polishing
Under the double action of pad and hydrodynamic film, burnishing device can uniformly and rapidly remove the material of polishing workpiece surface, real
Existing efficient fast polishing.
As preferred scheme of the invention, in order to improve polishing effect, polishing disk of the present invention, polishing disk in pallet, bullet
Spring and cam disc are made by diamagnetic material, and the diamagnetic material is stainless steel or magnadure.So design is advantageous in that
As far as possible component materials can be avoided from magnetizing, influence kinematic accuracy.
Another object of the present invention is achieved through the following technical solutions：
A kind of polishing method of described actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, polishing method tool
Body comprises the following steps：
Step S1:Workpiece is installed on workpiece plate, workpiece lower surface is parallel with polishing disk upper surface, adjusts workpiece following table
Gap between face and polishing disk is between 0.5mm to 5mm；
Step S2:According to processing workpiece the characteristics of and processing request, in deionized water add concentration be 2%~15%
Abrasive material, concentration are 3%~15% micron order carbonyl iron dust, and add concentration be 3%~15% dispersant and concentration be 1%
~6% antirust agent, vibration of ultrasonic wave is passed through 5 to 30 minutes after being sufficiently stirred for, and forms magnetic flow liquid；
Step S3:Magnetic flow liquid is added on polishing disk, motor is respectively started, makes the first main shaft drive polishing disk to turn
Dynamic, the second main shaft rotarily drives the rotation of cam disc differential, and the rotation of cam disc makes magnet group realize the round straight line of certain frequency
Motion, realizes that static magnetic field changes to dynamic magnetic field, and magnetic flow liquid forms dynamic real-time in the presence of dynamic magnetic field
The polishing pad of renewal；
Step S4:Starting workpiece coil motor makes tool heads rotation and low speed oscillations at a high speed, realizes efficient polishing.
Working process and principle of the invention are：The present invention provides the motion point that two power sources make polishing disk and magnet
It is used to driving polishing disc spins from, motor, another motor makes to be located at polishing disk in pallet by driving the rotation of cam disc
Interior magnet group moves along a straight line repeatedly under the driving of cam disc, realizes that magnet group changes from static magnetic field to dynamic magnetic field, compels
Make the magnetic flow liquid on polishing disk formed in the presence of dynamic magnetic field dynamically, the flexible polishing pad of real-time update；In addition,
Polishing disk is provided with the wedge structure for circumferentially arranging, and stream is formed when magnetic flow liquid flows from the low spot of wedge structure to high point
Body dynamic pressure film, under the double action of dynamic flexible polishing pad and hydrodynamic film, workpiece is uniformly quickly polished, and obtains preferable
Polishing effect.Simple structure of the invention is easily realized, grinding homogeneity is good, efficiency high, polishing effect are good.
Compared with prior art, the present invention has further the advantage that：
(1) actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device provided by the present invention uses two driving-chains,
Polishing disk rotation is realized to be separated with magnet movement.
(2) actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device provided by the present invention is driven convex using motor
Wheel, makes magnet group do straight reciprocating motion in polishing pad pallet, for repairing flexible polishing pad in real time, to obtain more preferably
Polishing effect.
(3) polishing disk of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device provided by the present invention is provided with height
The wedge structure of low fluctuating, makes magnetic flow liquid that hydrodynamic film is formed when wedge structure is flowed through, in flexible polishing pad and dynamic pressure
Under the double action of film, workpiece is polished evenly, efficiency is more preferable, effect is more preferable.
Brief description of the drawings
Fig. 1 is actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device schematic diagram provided by the present invention.
Fig. 2 is the top view of polishing disk in pallet provided by the present invention.
Fig. 3 is the stereogram of polishing disk provided by the present invention.
Label declaration in above-mentioned accompanying drawing：
1- polishing disks, 2- cam discs, the main shafts of 3- second, 4- clutch shaft bearings, 5- group of magnets, 6- springs, 7- polishing disk in pallet,
The main shafts of 8- first, 9- second bearings, 10- axle sleeves, 11- shaft-cups, 12- flexible polishings pad, 13- workpiece, 14- workpiece plates.
Specific embodiment
To make the objects, technical solutions and advantages of the present invention clearer, clear and definite, develop simultaneously embodiment pair referring to the drawings
The present invention is described further.
Embodiment 1：
As shown in Figure 1, Figure 2 and Figure 3, filled the invention discloses a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure polishing
Put, the device mainly includes polishing disk rotating mechanism, cam drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid, described
Polishing disk rotating mechanism includes the first main shaft 8, shaft-cup 11, polishing disk in pallet 7 and polishing disk 1；The cam drive mechanism includes
Clutch shaft bearing 4 in polishing disk in pallet 7, cam disc 2, magnet group 5, spring 6 and be arranged in the first main shaft 8 second are set
Main shaft 3, second bearing 9 and axle sleeve 10；The workpiece grip mechanism includes workpiece plate 14 and is fixed on the workpiece of workpiece tray bottom
13；The Magnetorheologicai polishing liquid is placed between polishing disk 1 and workpiece 13, and Magnetorheologicai polishing liquid forms soft in the presence of magnet group
Property polishing pad 12.
Wherein, the polishing disk 1 is arranged on polishing disk in pallet 7, and polishing disk in pallet 7 is arranged on the first main shaft 8.It is described
Second main shaft 3 is coaxially mounted in the first main shaft 8, and the second bearing 9 and axle sleeve 10 are arranged on the first main shaft 8 and the second main shaft
Between 3, shaft-cup 11 is fixed on the first main shaft bottom, realizes the location and installation of second bearing 9 and axle sleeve 10, the clutch shaft bearing 4
It is fixed in polishing disk in pallet 7, the cam disc 2 is fixed on clutch shaft bearing 4, the bottom of cam disc 2 is fixed with the second main shaft 3 and connected
Connect, cam disc 2 is used for driving magnet group 5, realizes the linear motion of magnet group 5, and the magnet group 5 is by several permanent magnet homopolarities
Or heteropole arranged adjacent composition, permanent magnet is 0.5mm to 2mm, the permanent magnetism body end near the inner surface end face distance of polishing disk
Face magnetic field intensity is more than 2000Gs, and the outside of magnet group 5 connects the inner side of polishing disk in pallet 7 by spring 6, installed in polishing disk in pallet
In 7 straight-line groove.The upper surface of the polishing disk 1 is along the circumferential direction provided with multiple wedge structures, and the wedge structure is highly
For 1mm to 3mm.The group of magnets is evenly distributed on polishing disk wedge structure lower section.
The present invention also provides a kind of polishing method of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, including with
Lower step：
1) sapphire substrate 13 is installed on workpiece plate 14, the lower surface of workpiece 13 is parallel with the upper surface of polishing disk 1, is adjusted
Gap between the lower surface of workpiece 13 and polishing disk 1 is 0.5mm；
2) according to processing workpiece 13 the characteristics of and processing request, in deionized water add 15% diamond micron order mill
Material, the submicron order carbonyl iron dust that concentration is 20% and the antirust agent that addition concentration is 15% dispersant and concentration is 2%, fill
Pass through vibration of ultrasonic wave 5~30 minutes after dividing stirring, form magnetic flow liquid；
3) magnetic flow liquid is added on polishing disk 1, is respectively started motor, make the first main shaft 8 drive polishing disk 1 to rotate,
Second main shaft 3 rotarily drives cam disc 2 and rotates, and the rotation of cam disc 2 makes magnet group 5 realize that the round straight line of certain frequency is transported
It is dynamic, realize that static magnetic field changes to dynamic magnetic field, magnetic flow liquid is formed in the presence of dynamic magnetic field dynamically it is real-time more
New polishing pad 12；
4) starting workpiece coil motor makes workpiece plate 30 rotation and low speed oscillations at a high speed, realizes efficient polishing.
During polishing, Magnetorheologicai polishing liquid is filled in the wedge shape knot of the upper surface of polishing disk 1 to the polishing method
On structure, flexible MRF pad 12 is formed, realized in the motion of 2 drive magnet group of polishing process convexity wheel disc 5 flexible magnetorheological
The real-time reparation of polishing pad 12, when polishing fluid, to flow to gap from the larger place in gap between workpiece 13 and wedge structure less
Hydrodynamic film is formed when square, uniform quick removal is thrown under the double action of dynamic flexible polishing pad 12 and hydrodynamic film
Light workpiece surface material, substantially increases the uniformity and efficiency of polishing, realizes fast polishing and lifts polishing effect
Purpose.
Above-described embodiment is the present invention preferably implementation method, but embodiments of the present invention are not by above-described embodiment
Limitation, it is other it is any without departing from Spirit Essence of the invention and the change, modification, replacement made under principle, combine, simplification,
Equivalent substitute mode is should be, is included within protection scope of the present invention.
Claims (7)
1. a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, it is characterised in that including polishing disk rotating mechanism,
Cam drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid, the polishing disk rotating mechanism include the first main shaft, shaft-cup,
Polishing disk in pallet and polishing disk；The cam drive mechanism includes setting clutch shaft bearing, cam disc, the magnetic thrown in optical disc tray
Body group, spring and the second main shaft, second bearing and the axle sleeve that are arranged in the first main shaft；The workpiece grip mechanism includes work
Part disk and the workpiece for being fixed on workpiece tray bottom；The Magnetorheologicai polishing liquid is placed between polishing card and workpiece, magnetorheological throwing
Light liquid forms flexible polishing pad in the presence of magnet group；
The polishing disk is arranged on polishing disk in pallet, and the polishing disk in pallet is arranged on the first main shaft, solid with the first main shaft
Fixed connection；The clutch shaft bearing be fixed on polishing disk in pallet in, the cam disc be arranged on clutch shaft bearing on, and with the second main shaft
It is fixedly connected, second main shaft is coaxially mounted in the first main shaft, the second bearing and axle sleeve location and installation are in the first master
Between axle and the second main shaft, the shaft-cup is fixed on the first main shaft bottom；It is additionally provided with for guiding magnet group on polishing disk in pallet
The straight-line groove for moving along a straight line is done, the magnet group is arranged in straight-line groove, and one end of magnet group is supported with the outer surface of cam disc
Connect, the other end is abutted by spring with the inwall of polishing disk in pallet, magnet group linear reciprocating motion under the driving of cam disc.
2. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
Magnet group is made up of several permanent magnet homopolarities or heteropole arranged adjacent.
3. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 2, it is characterised in that described
Permanent magnet is 0.5mm to 2mm with the distance of polishing disk inner surface end face, and the face magnetic field intensity of the permanent magnetism body end is more than
2000Gs。
4. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
The surface of polishing disk is along the circumferential direction provided with several wedge structures, and the wedge structure is highly 1mm to 3mm.
5. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
Polishing disk, polishing disk in pallet, spring and cam disc are made by diamagnetic material, and the diamagnetic material is that stainless steel or magnalium are closed
Gold.
6. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
First main shaft and the second main shaft are driven respectively by two motors.
7. a kind of polishing method of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device as claimed in claim 1, its
It is characterised by, comprises the following steps：
Step S1:Workpiece is installed on workpiece plate, workpiece lower surface is parallel with polishing disk upper surface, regulation workpiece lower surface with
Gap between polishing disk is between 0.5mm to 5mm；
Step S2:According to processing workpiece the characteristics of and processing request, in deionized water add concentration be 2%~15% mill
Material, the micron order carbonyl iron dust that concentration is 3%~15%, and add concentration be 3%~15% dispersant and concentration be 1%~
6% antirust agent, vibration of ultrasonic wave is passed through 5 to 30 minutes after being sufficiently stirred for, and forms magnetic flow liquid；
Step S3:Magnetic flow liquid is added on polishing disk, motor is respectively started, makes the first main shaft drive polishing disk to rotate, the
Two main shafts rotarily drive the rotation of cam disc differential, and the rotation of cam disc makes magnet group realize the round linear motion of certain frequency,
Realize that static magnetic field changes to dynamic magnetic field, magnetic flow liquid forms dynamic real-time update in the presence of dynamic magnetic field
Polishing pad；
Step S4:Starting workpiece coil motor makes tool heads rotation and low speed oscillations at a high speed, realizes efficient polishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710094137.1A CN106826411B (en) | 2017-02-21 | 2017-02-21 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710094137.1A CN106826411B (en) | 2017-02-21 | 2017-02-21 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106826411A true CN106826411A (en) | 2017-06-13 |
| CN106826411B CN106826411B (en) | 2019-06-14 |
Family
ID=59133338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710094137.1A Active CN106826411B (en) | 2017-02-21 | 2017-02-21 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106826411B (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107253101A (en) * | 2017-08-04 | 2017-10-17 | 南京理工大学 | Water-base magnetic rheology closed type flexible rubbing head based on normal force |
| CN108312050A (en) * | 2018-01-11 | 2018-07-24 | 辽宁科技大学 | The double magnetic pole disk Magnetic Force Mills and magnetic grinding method of adjustable processing spacing |
| CN108466165A (en) * | 2018-05-21 | 2018-08-31 | 浙江工业大学 | A kind of liquid metal burnishing device using eccentric wheel control blade rotation |
| CN109079588A (en) * | 2018-08-13 | 2018-12-25 | 兰州理工大学 | A kind of processing method of dynamic magnetic field assisted magnetic compound fluid super-smooth surface |
| CN110000621A (en) * | 2019-03-15 | 2019-07-12 | 辽宁科技大学 | A kind of magnetic grinder and magnetic grinding method for big plane polishing |
| CN110480427A (en) * | 2019-08-28 | 2019-11-22 | 绍兴金辉久研科技有限公司 | A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary |
| CN110640622A (en) * | 2018-06-27 | 2020-01-03 | 株式会社Pdt | Object polishing apparatus and object polishing method |
| CN110948293A (en) * | 2019-12-23 | 2020-04-03 | 广东工业大学 | Acousto-optic-magnetic composite polishing device and polishing method for semiconductor substrate |
| CN111413235A (en) * | 2020-04-13 | 2020-07-14 | 吉林博承传动系统科技有限公司 | Pin-disc type synergistic friction and wear testing device and testing method thereof |
| CN112222956A (en) * | 2020-10-15 | 2021-01-15 | 长春工业大学 | Polishing device, polishing method and application based on dynamic magnetic field |
| CN113561035A (en) * | 2021-07-30 | 2021-10-29 | 西安工业大学 | Point cloud alternating magnetorheological polishing device and method |
| CN114340845A (en) * | 2019-09-04 | 2022-04-12 | Qed技术国际股份有限公司 | Magnetorheological finishing head with high removal rate |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB789418A (en) * | 1956-01-03 | 1958-01-22 | Reflectone Corp | Improvements in or relating to polishing apparatus |
| JPH0679596A (en) * | 1992-09-01 | 1994-03-22 | Matsushita Electric Ind Co Ltd | Duplex head grinding machine |
| CN104308671A (en) * | 2014-10-09 | 2015-01-28 | 东北大学 | Magnetorheological polishing device and method |
| CN105328516A (en) * | 2015-11-18 | 2016-02-17 | 广东工业大学 | Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device |
| CN105458840A (en) * | 2015-12-29 | 2016-04-06 | 广东工业大学 | Magnetostatic moving field magnetorheological polishing mechanism test device and processing method thereof |
| CN205237716U (en) * | 2015-11-18 | 2016-05-18 | 广东工业大学 | Dynamic magnetic field that magnetic current becomes flexible polishing pad is from sharp burnishing device |
| CN105922125A (en) * | 2016-05-24 | 2016-09-07 | 广东工业大学 | Magneto-rheological fluid dynamic pressure composite polishing device and method |
| CN206567926U (en) * | 2017-02-21 | 2017-10-20 | 广东工业大学 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device |
-
2017
- 2017-02-21 CN CN201710094137.1A patent/CN106826411B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB789418A (en) * | 1956-01-03 | 1958-01-22 | Reflectone Corp | Improvements in or relating to polishing apparatus |
| JPH0679596A (en) * | 1992-09-01 | 1994-03-22 | Matsushita Electric Ind Co Ltd | Duplex head grinding machine |
| CN104308671A (en) * | 2014-10-09 | 2015-01-28 | 东北大学 | Magnetorheological polishing device and method |
| CN105328516A (en) * | 2015-11-18 | 2016-02-17 | 广东工业大学 | Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device |
| CN205237716U (en) * | 2015-11-18 | 2016-05-18 | 广东工业大学 | Dynamic magnetic field that magnetic current becomes flexible polishing pad is from sharp burnishing device |
| CN105458840A (en) * | 2015-12-29 | 2016-04-06 | 广东工业大学 | Magnetostatic moving field magnetorheological polishing mechanism test device and processing method thereof |
| CN105922125A (en) * | 2016-05-24 | 2016-09-07 | 广东工业大学 | Magneto-rheological fluid dynamic pressure composite polishing device and method |
| CN206567926U (en) * | 2017-02-21 | 2017-10-20 | 广东工业大学 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107253101A (en) * | 2017-08-04 | 2017-10-17 | 南京理工大学 | Water-base magnetic rheology closed type flexible rubbing head based on normal force |
| CN108312050A (en) * | 2018-01-11 | 2018-07-24 | 辽宁科技大学 | The double magnetic pole disk Magnetic Force Mills and magnetic grinding method of adjustable processing spacing |
| CN108466165A (en) * | 2018-05-21 | 2018-08-31 | 浙江工业大学 | A kind of liquid metal burnishing device using eccentric wheel control blade rotation |
| CN110640622A (en) * | 2018-06-27 | 2020-01-03 | 株式会社Pdt | Object polishing apparatus and object polishing method |
| CN109079588A (en) * | 2018-08-13 | 2018-12-25 | 兰州理工大学 | A kind of processing method of dynamic magnetic field assisted magnetic compound fluid super-smooth surface |
| CN110000621A (en) * | 2019-03-15 | 2019-07-12 | 辽宁科技大学 | A kind of magnetic grinder and magnetic grinding method for big plane polishing |
| CN110000621B (en) * | 2019-03-15 | 2024-02-09 | 辽宁科技大学 | Magnetic grinding device and magnetic grinding method for large-plane polishing |
| CN110480427A (en) * | 2019-08-28 | 2019-11-22 | 绍兴金辉久研科技有限公司 | A kind of magnetorheological Ultraprecise polished device of ultrasonic activation auxiliary |
| CN114340845A (en) * | 2019-09-04 | 2022-04-12 | Qed技术国际股份有限公司 | Magnetorheological finishing head with high removal rate |
| CN110948293A (en) * | 2019-12-23 | 2020-04-03 | 广东工业大学 | Acousto-optic-magnetic composite polishing device and polishing method for semiconductor substrate |
| CN110948293B (en) * | 2019-12-23 | 2024-03-22 | 广东工业大学 | Acousto-optic-magnetic composite polishing device and polishing method for semiconductor substrate |
| CN111413235A (en) * | 2020-04-13 | 2020-07-14 | 吉林博承传动系统科技有限公司 | Pin-disc type synergistic friction and wear testing device and testing method thereof |
| CN111413235B (en) * | 2020-04-13 | 2023-06-20 | 吉林博承传动系统科技有限公司 | Pin-disc type synergistic friction and wear testing device and testing method thereof |
| CN112222956A (en) * | 2020-10-15 | 2021-01-15 | 长春工业大学 | Polishing device, polishing method and application based on dynamic magnetic field |
| CN113561035B (en) * | 2021-07-30 | 2023-04-11 | 西安工业大学 | Point cloud alternating magnetorheological polishing device and method |
| CN113561035A (en) * | 2021-07-30 | 2021-10-29 | 西安工业大学 | Point cloud alternating magnetorheological polishing device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106826411B (en) | 2019-06-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106826411B (en) | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method | |
| CN105328516B (en) | The dynamic magnetic field of magnetic rheologic flexible polishing pad is from sharp burnishing device and its polishing method | |
| CN105904333B (en) | A kind of double-sided polisher and method of cluster dynamic magnetic field control polishing pad rigidity | |
| CN205237716U (en) | Dynamic magnetic field that magnetic current becomes flexible polishing pad is from sharp burnishing device | |
| CN201026588Y (en) | Magnetorheological apparatus for grinding and polishing curved surface | |
| CN106312796B (en) | Two-sided planarization system of processing | |
| CN106938407A (en) | The dynamic magnetorheological finishing device and its polishing method of a kind of controllable moving field | |
| CN201026589Y (en) | Magnetorheological device for grinding and polishing plane surface | |
| CN105458840B (en) | A kind of magnetostatic dynamic field MRF mechanism experimental rig and its processing method | |
| CN206567926U (en) | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device | |
| CN104209862A (en) | Ultra-smooth plane grinding polishing device and method for online trimming flexible polishing pad | |
| CN107617933B (en) | Dynamic magnetic field magnetorheological polishing device | |
| CN205201209U (en) | Magnetostatic moves a magnetic current and becomes polishing mechanism test device | |
| CN105922125B (en) | A kind of magneto-rheological fluid dynamic pressure composite polishing device and its polishing method | |
| Cao et al. | A novel surface polishing method and its fundamental performance in ultra-fine polishing of wafer | |
| Zhang et al. | An integrated tool for five-axis electrorheological fluid-assisted polishing | |
| CN111251078B (en) | Semi-fixed abrasive particle polishing disc for ultra-precision polishing of cylindrical surface of GCr15 bearing steel cylindrical roller | |
| CN114393513A (en) | Central liquid supply semiconductor material surface processing device and use method thereof | |
| Lyu et al. | Experimental study on shear thickening polishing method for curved surface | |
| CN206578639U (en) | A kind of dynamic magnetorheological finishing device of controllable moving field | |
| Zhao et al. | An experimental investigation of flat polishing with dielectrophoretic (DEP) effect of slurry | |
| CN207464836U (en) | A kind of dynamic magnetic field magnetorheological finishing device | |
| CN207155395U (en) | A kind of magnetic flow liquid burnishing device | |
| Wu et al. | Nano-precision polishing of CVD SiC using MCF (magnetic compound fluid) slurry | |
| CN107900792B (en) | Cluster dynamic pressure magnetorheological polishing equipment and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |