CN206567926U - A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device - Google Patents
A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device Download PDFInfo
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- CN206567926U CN206567926U CN201720156942.8U CN201720156942U CN206567926U CN 206567926 U CN206567926 U CN 206567926U CN 201720156942 U CN201720156942 U CN 201720156942U CN 206567926 U CN206567926 U CN 206567926U
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Abstract
The utility model discloses a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method, including polishing disk rotating mechanism, cam drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid, the polishing disk rotating mechanism includes the first main shaft, shaft-cup, polishing disk in pallet and polishing disk, the upper surface of the polishing disk is along the circumferential direction provided with multiple wedge structures, and the cam drive mechanism includes setting clutch shaft bearing, cam disc, magnet group, spring and the second main shaft, second bearing and the axle sleeve being arranged in the first main shaft in polishing disk in pallet；The workpiece grip mechanism includes workpiece plate and is fixed on the workpiece of workpiece tray bottom；The utility model realizes the real-time reparation of flexible polishing pad by cams drive magnet along polishing disk radial motion, the high efficiency ultra-smooth uniformity polishing to polished part is realized with reference to the hydrodynamic pressure that the wedge structure of polishing card is produced, grinding homogeneity, efficiency high, effect are good.
Description
Technical field
The utility model is related to Ultraprecision Machining field, more particularly to a kind of for photoelectron/semiconductor microelectronics
The actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device of the plane planarization processing of substrate and optical element.
Background technology
With the social development of information computerization, semi-conducting material is more wide as the application of high-performance microelectronics component
General, the demand of such as monocrystalline silicon, aluminum oxide, strontium titanates and monocrystalline silicon carbide electron ceramic material is increasing.General semiconductor
Chip manufacture will will reach good performance, its surface accuracy needs to reach super by processes such as section, grinding, polishings
Smooth degree, surface precision also has higher requirements, by taking LED extension Sapphire Substrates as an example, typically requires that total thickness deviation is less than
10 μm, total surface flatness be less than 10 μm, surface roughness Ra be less than 0.05 μm.Therefore semi-conducting material manufacture increasingly according to
Grinding and polishing technology is relied to meet its production requirement.
Technique of Magnetorheological Finishing (Magnetorheological finishing, MRF) be 1990s by
KORDONSKI and its partner electromagnetism, hydrodynamics, analytical chemistry, process technology etc. are combined and proposed one
Kind new optical surface processing method, with polishing effect it is good, do not produce subsurface damage, be adapted to complex surface processing etc. and pass
The advantage united not available for polishing, has evolved into a kind of revolutionary optical surface processing method, is particularly suitable for axial symmetry aspheric
The Ultra-precision Turning in face, is widely used in the last of massive optics, semiconductor wafer, LED-baseplate, liquid crystal display panel etc.
Manufacturing procedure.Technique of Magnetorheological Finishing is that the property that rheological behavior is similar solid occurs in gradient fields using Magnetorheologicai polishing liquid
There is the flexibility " small abrasive nose " of glutinous modeling behavior formed by matter, when having quick relative motion between workpiece, workpiece table
Face is by very big shearing force, so that workpiece surface material is removed.But MRF belongs to Flexible Manufacture, material is removed
Rate is low, and machining accuracy is difficult to ensure that.
In order to improve magnetorheological polishing efficiency, patent CN200610132495.9 is based on MRF principle and cluster
The mechanism of action proposes a kind of abrasive polishing method and its burnishing device based on magnetic rheology effect, and has carried out substantial amounts of experiment
Research, it has been found that the continuous updating and projection for being difficult to " micro- bistrique " using polishing fluid endless form make work pieces process uniformity
Problem is difficult to solve.
The problem of for processing uniformity, patent CN201510801886.4 proposes a kind of dynamic magnetic field from sharp magnetic current
Become flexible polishing pad generating means and its polishing method, fully realize magnetic rheologic flexible polishing pad in process to work
The constant pressure processing of part, and abrasive material can be made real-time update but is due to apparatus structure in the patent from sharp in process
Limitation, cause magnetic rheology effect produce " micro- bistrique " spacing it is larger, workpiece idle stroke is longer in process, have impact on
Processing efficiency and processing characteristics, and need to dismantle polishing disk progress permanent magnet replacing when changing magnetic field intensity, step compares
It is cumbersome.
The utility model proposes a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure on the basis of above-mentioned further investigation
Burnishing device and its polishing method, optimize structure, drive magnet group realizes the change of the scope in magnetic field in the form of actuated by cams,
Abrasive material is realized real-time update in process, coordinate hydrodynamic principle, improve magnetic rheologic flexible polishing pad processability
Can, magnetorheological polishing efficiency is improved, the uniform processing of workpiece is realized.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, and there is provided a kind of simple in construction, good processability, effect
The actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device that rate is high, processing uniformity is good.
The purpose of this utility model is achieved through the following technical solutions：
A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, mainly includes polishing disk rotating mechanism, cam
Drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid, the polishing disk rotating mechanism include the first main shaft, shaft-cup, polishing
Disk in pallet and polishing disk；The cam drive mechanism include set polishing disk in pallet in clutch shaft bearing, cam disc, magnet group,
Spring and the second main shaft, second bearing and the axle sleeve being arranged in the first main shaft；The workpiece grip mechanism includes workpiece plate
With the workpiece for being fixed on workpiece tray bottom；The Magnetorheologicai polishing liquid is placed between polishing card and workpiece, Magnetorheologicai polishing liquid
Flexible polishing pad is formed in the presence of magnet group.
Specifically, the polishing disk is arranged on polishing disk in pallet, being provided between polishing disk and polishing disk in pallet is used to pacify
The space of magnet group is filled, the polishing disk in pallet is arranged on the first main shaft.
Specifically, second main shaft is coaxially mounted in the first main shaft, the second bearing is mainly acted on by radial load,
And axle sleeve is arranged between the first main shaft and the second main shaft, the shaft-cup is fixed on the first main shaft bottom, realizes second bearing
Location and installation, the clutch shaft bearing is fixed in polishing disk in pallet, and mainly by responsive to axial force, the cam disc is fixed on first
On bearing, cam tray bottom is fixedly connected with the second main shaft, and the magnet group is arranged in straight-line groove, one end and cam disc it is outer
Contoured surface is abutted, and the other end is abutted by spring with polishing the inwall of disk in pallet, and during work, magnet group is under the promotion of cam disc
Move out, and inwardly resetted under the elastic force of spring, so as to realize the linear reciprocating motion of magnet group.
It is preferred that, in order that the driving-chain of cam disc and polishing disk is separated, realize differential motion, described in the utility model the
One main shaft and the second main shaft are driven respectively by two motors.
As preferred scheme of the present utility model, in order to obtain more preferable polishing effect, magnet group described in the utility model
It is made up of several permanent magnet homopolarities or heteropole arranged adjacent, the permanent magnet is close to the inner surface end face distance of polishing disk
0.5mm to 2mm, and permanent magnet end face magnetic field intensity is more than 2000Gs.So design and be advantageous in that using heteropole arranged adjacent
The magnetic field intensity that mode is produced is big, and " micro- bistrique " pliability of generation is good, polishing strength foot.
Further, in order to improve polishing polishing efficiency, the uniformity coefficient of polishing, polishing disk described in the utility model are improved
Surface along the circumferential direction be provided with several wedge structures, and the wedge structure highly be 1mm to 3mm.When polishing fluid is from work
Between part and wedge structure the larger place in gap flow to gap it is less local when, hydrodynamic film is formed, dynamic flexible
Under the double action of polishing pad and hydrodynamic film, burnishing device can uniformly and rapidly remove the material of polishing workpiece surface
Material, realizes efficient fast polishing.
As preferred scheme of the present utility model, in order to improve polishing effect, polishing disk described in the utility model, polishing disk
Pallet, spring and cam disc are made by diamagnetic material, and the diamagnetic material is stainless steel or magnesium alloy.That so designs is good
It is in that as far as possible component materials can be avoided to magnetize, influences kinematic accuracy.
Another object of the present utility model is achieved through the following technical solutions：
A kind of polishing method of described actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, polishing method tool
Body comprises the following steps：
Step S1:Workpiece is installed on workpiece plate, workpiece lower surface is parallel with polishing disk upper surface, adjusts workpiece following table
Gap between face and polishing disk is 0.5mm between 5mm；
Step S2:According to the characteristics of processing workpiece and processing request, it is 2%~15% that concentration is added in deionized water
Abrasive material, concentration be 3%~15% micron order carbonyl iron dust, and add concentration be 3%~15% dispersant and concentration be 1%
~6% antirust agent, by vibration of ultrasonic wave 5 to 30 minutes after being sufficiently stirred for, forms magnetic flow liquid；
Step S3:Magnetic flow liquid is added on polishing disk, motor is respectively started, makes the first main shaft drive polishing disk to turn
Dynamic, the second main shaft rotating band moving cam disk differential is rotated, and the rotation of cam disc makes magnet group realize the round straight line of certain frequency
Motion, realizes that static magnetic field changes to dynamic magnetic field, and magnetic flow liquid forms dynamic real-time in the presence of dynamic magnetic field
The polishing pad of renewal；
Step S4:Starting workpiece coil motor makes tool heads rotation and low speed oscillations at a high speed, realizes efficient polishing.
Working process and principle of the present utility model are：The utility model, which provides two power sources, makes polishing disk and magnet
Motion separation, motor is used to driving polishing disc spins, and another motor makes to be located at polishing by driving the rotation of cam disc
Magnet group in disk in pallet moves along a straight line repeatedly under the driving of cam disc, realizes that magnet group turns from static magnetic field to dynamic magnetic field
Become, force the magnetic flow liquid on polishing disk formed in the presence of dynamic magnetic field dynamically, the flexible polishing pad of real-time update；Separately
Outside, provided with the wedge structure circumferentially arranged on polishing disk, when magnetic flow liquid flows from the low spot of wedge structure to high point
Hydrodynamic film is formed, under the double action of dynamic flexible polishing pad and hydrodynamic film, workpiece is uniformly quickly polished, and is obtained
Obtain preferable polishing effect.Easy realization simple in construction of the present utility model, good grinding homogeneity, efficiency high, polishing effect are good.
Compared with prior art, the utility model has further the advantage that：
(1) actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device provided by the utility model is using two transmissions
Chain, realizes polishing disk rotation and the separation of magnet movement.
(2) actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device provided by the utility model is driven using motor
Cam, makes magnet group do straight reciprocating motion in polishing pad pallet, for repairing flexible polishing pad in real time, to obtain more preferably
Polishing effect.
(3) set on the polishing disk of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device provided by the utility model
Have height rise and fall wedge structure, magnetic flow liquid is formed hydrodynamic film when flowing through wedge structure, flexible polishing pad with
Under the double action of dynamic pressure film, workpiece is polished evenly, efficiency is more preferable, effect is more preferable.
Brief description of the drawings
Fig. 1 is actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device schematic diagram provided by the utility model.
Fig. 2 is the top view of polishing disk in pallet provided by the utility model.
Fig. 3 is the stereogram of polishing disk provided by the utility model.
Label declaration in above-mentioned accompanying drawing：
1- polishing disks, 2- cam discs, the main shafts of 3- second, 4- clutch shaft bearings, 5- group of magnets, 6- springs, 7- polishing disk in pallet,
The main shafts of 8- first, 9- second bearings, 10- axle sleeves, 11- shaft-cups, 12- flexible polishings pad, 13- workpiece, 14- workpiece plates.
Embodiment
To make the purpose of this utility model, technical scheme and advantage clearer, clear and definite, develop simultaneously implementation referring to the drawings
The utility model is described in further detail for example.
Embodiment 1：
As shown in Figure 1, Figure 2 and Figure 3, the utility model discloses a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure throwing
Electro-optical device, the device mainly includes polishing disk rotating mechanism, cam drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid,
The polishing disk rotating mechanism includes the first main shaft 8, shaft-cup 11, polishing disk in pallet 7 and polishing disk 1；The cam drive mechanism
Including setting the clutch shaft bearing 4 polished in disk in pallet 7, cam disc 2, magnet group 5, spring 6 and being arranged in the first main shaft 8
Second main shaft 3, second bearing 9 and axle sleeve 10；The workpiece grip mechanism includes workpiece plate 14 and is fixed on workpiece tray bottom
Workpiece 13；The Magnetorheologicai polishing liquid is placed between polishing disk 1 and workpiece 13, Magnetorheologicai polishing liquid shape in the presence of magnet group
Into flexible polishing pad 12.
Wherein, the polishing disk 1 is arranged on polishing disk in pallet 7, and polishing disk in pallet 7 is arranged on the first main shaft 8.It is described
Second main shaft 3 is coaxially mounted in the first main shaft 8, and the second bearing 9 and axle sleeve 10 are arranged on the first main shaft 8 and the second main shaft
Between 3, shaft-cup 11 is fixed on the first main shaft bottom, realizes the location and installation of second bearing 9 and axle sleeve 10, the clutch shaft bearing 4
It is fixed in polishing disk in pallet 7, the cam disc 2 is fixed on clutch shaft bearing 4, the bottom of cam disc 2 is fixed with the second main shaft 3 to be connected
Connect, cam disc 2 is used for driving magnet group 5, realizes the linear motion of magnet group 5, the magnet group 5 is by several permanent magnet homopolarities
Or heteropole arranged adjacent composition, permanent magnet close to polishing disk inner surface end face distance for 0.5mm to 2mm, the permanent magnetism body end
Face magnetic field intensity is more than 2000Gs, and the outside of magnet group 5 is by the inner side of the connection polishing of spring 6 disk in pallet 7, installed in polishing disk in pallet
In 7 straight-line groove.The upper surface of the polishing disk 1 is along the circumferential direction provided with multiple wedge structures, and wedge structure height
For 1mm to 3mm.The group of magnets is evenly distributed on below polishing disk wedge structure.
The utility model also provides a kind of polishing method of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, bag
Include following steps：
1) sapphire substrate 13 is installed on workpiece plate 14, the lower surface of workpiece 13 is parallel with the upper surface of polishing disk 1, adjusted
Gap between the lower surface of workpiece 13 and polishing disk 1 is 0.5mm；
2) according to processing workpiece 13 the characteristics of and processing request, in deionized water add 15% diamond micron order mill
Submicron order carbonyl iron dust and add the dispersant that concentration is 15% and the antirust agent that concentration is 2% that material, concentration are 20%, fill
By vibration of ultrasonic wave 5~30 minutes after point stirring, magnetic flow liquid is formed；
3) magnetic flow liquid is added on polishing disk 1, motor is respectively started, make the first main shaft 8 drive polishing disk 1 to rotate,
The rotating band moving cam disk 2 of second main shaft 3 is rotated, and the rotation of cam disc 2 makes magnet group 5 realize that the round straight line of certain frequency is transported
It is dynamic, realize that static magnetic field changes to dynamic magnetic field, magnetic flow liquid is formed in the presence of dynamic magnetic field dynamically it is real-time more
New polishing pad 12；
4) starting workpiece coil motor makes workpiece plate 30 rotate at a high speed and low speed oscillations, realizes efficient polishing.
The polishing method is during polishing, and Magnetorheologicai polishing liquid is filled in the wedge shape knot of the upper surface of polishing disk 1
On structure, flexible MRF pad 12 is formed, is realized in the motion of the drive magnet group 5 of polishing process convexity wheel disc 2 flexible magnetorheological
The real-time reparation of polishing pad 12, when polishing fluid, from the larger place in gap between workpiece 13 and wedge structure to flow to gap less
Hydrodynamic film is formed when square, uniform quick remove is thrown under the double action of dynamic flexible polishing pad 12 and hydrodynamic film
Light workpiece surface material, substantially increases the uniformity and efficiency of polishing, realizes fast polishing and lifts polishing effect
Purpose.
Above-described embodiment is the utility model preferably embodiment, but embodiment of the present utility model is not by above-mentioned
The limitation of embodiment, it is other it is any without departing from Spirit Essence of the present utility model with made under principle change, modify, replace
Generation, combination, simplification, should be equivalent substitute mode, are included within protection domain of the present utility model.
Claims (6)
1. a kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device, it is characterised in that including polishing disk rotating mechanism,
Cam drive mechanism, workpiece grip mechanism and Magnetorheologicai polishing liquid, the polishing disk rotating mechanism include the first main shaft, shaft-cup,
Polish disk in pallet and polishing disk；The cam drive mechanism includes the clutch shaft bearing, cam disc, magnetic being arranged in polishing disk in pallet
Body group, spring and the second main shaft, second bearing and the axle sleeve being arranged in the first main shaft；The workpiece grip mechanism includes work
Part disk and the workpiece for being fixed on workpiece tray bottom；The Magnetorheologicai polishing liquid is placed between polishing card and workpiece, magnetorheological to throw
Light liquid forms flexible polishing pad in the presence of magnet group；
The polishing disk is arranged on polishing disk in pallet, and the polishing disk in pallet is arranged on the first main shaft, solid with the first main shaft
Fixed connection；The clutch shaft bearing be fixed on polishing disk in pallet in, the cam disc be arranged on clutch shaft bearing on, and with the second main shaft
It is fixedly connected, second main shaft is coaxially mounted in the first main shaft, the second bearing and axle sleeve location and installation are in the first master
Between axle and the second main shaft, the shaft-cup is fixed on the first main shaft bottom；It is additionally provided with polishing disk in pallet for guiding magnet group
The straight-line groove moved along a straight line is done, the magnet group is arranged in straight-line groove, and one end of magnet group and the outer surface of cam disc are supported
Connect, the other end is abutted by spring with polishing the inwall of disk in pallet, magnet group linear reciprocating motion under the driving of cam disc.
2. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
Magnet group is made up of several permanent magnet homopolarities or heteropole arranged adjacent.
3. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 2, it is characterised in that described
The distance of permanent magnet and polishing disk inner surface end face is 0.5mm to 2mm, and the face magnetic field intensity of the permanent magnetism body end is more than
2000Gs。
4. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
The surface of polishing disk is along the circumferential direction provided with several wedge structures, and the wedge structure is highly 1mm to 3mm.
5. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
Polishing disk, polishing disk in pallet, spring and cam disc are made by diamagnetic material, and the diamagnetic material is that stainless steel or magnalium are closed
Gold.
6. actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device according to claim 1, it is characterised in that described
First main shaft and the second main shaft are driven respectively by two motors.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720156942.8U CN206567926U (en) | 2017-02-21 | 2017-02-21 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720156942.8U CN206567926U (en) | 2017-02-21 | 2017-02-21 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device |
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| CN206567926U true CN206567926U (en) | 2017-10-20 |
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| CN201720156942.8U Withdrawn - After Issue CN206567926U (en) | 2017-02-21 | 2017-02-21 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106826411A (en) * | 2017-02-21 | 2017-06-13 | 广东工业大学 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method |
| CN109848758A (en) * | 2018-12-05 | 2019-06-07 | 中国科学院长春光学精密机械与物理研究所 | Electromagnetic type semiconductor chip thining method and device based on linear motor platform |
| CN114789378A (en) * | 2022-05-31 | 2022-07-26 | 福建福晶科技股份有限公司 | Polishing device and method with ultrahigh damage threshold on surface |
-
2017
- 2017-02-21 CN CN201720156942.8U patent/CN206567926U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106826411A (en) * | 2017-02-21 | 2017-06-13 | 广东工业大学 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method |
| CN106826411B (en) * | 2017-02-21 | 2019-06-14 | 广东工业大学 | A kind of actuated by cams magnet type magneto-rheological fluid dynamic pressure burnishing device and polishing method |
| CN109848758A (en) * | 2018-12-05 | 2019-06-07 | 中国科学院长春光学精密机械与物理研究所 | Electromagnetic type semiconductor chip thining method and device based on linear motor platform |
| CN109848758B (en) * | 2018-12-05 | 2020-10-13 | 中国科学院长春光学精密机械与物理研究所 | Electromagnetic type semiconductor substrate thinning method and device based on linear motor platform |
| CN114789378A (en) * | 2022-05-31 | 2022-07-26 | 福建福晶科技股份有限公司 | Polishing device and method with ultrahigh damage threshold on surface |
| CN114789378B (en) * | 2022-05-31 | 2024-02-27 | 福建福晶科技股份有限公司 | Polishing device and method for ultrahigh damage threshold of surface |
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Granted publication date: 20171020 Effective date of abandoning: 20190614 |
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