CN105729250B - A kind of self-training magnetic rheologic flexible buffing wheel and its grinding and polishing method - Google Patents
A kind of self-training magnetic rheologic flexible buffing wheel and its grinding and polishing method Download PDFInfo
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- CN105729250B CN105729250B CN201511025600.4A CN201511025600A CN105729250B CN 105729250 B CN105729250 B CN 105729250B CN 201511025600 A CN201511025600 A CN 201511025600A CN 105729250 B CN105729250 B CN 105729250B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to a kind of self-training magnetic rheologic flexible buffing wheel and its grinding and polishing method, including retainer ring, internal gear, emery wheel ring, gear shaft, synchronous rotary gear, planetary gear, rotary shaft and cylindrical permanent magnet iron, rotary shaft is installed in emery wheel ring, cylindrical permanent magnet iron is installed in the through hole set by rotary shaft lower end, internal gear is installed in the top of emery wheel ring, retainer ring is installed in the top of internal gear, retainer ring is fixed on lathe, emery wheel interface is installed in the top of emery wheel ring and retainer ring, emery wheel interface is connected with emery wheel ring, emery wheel interface is provided with external gear, gear shaft is installed on emery wheel interface, planetary gear is installed on gear shaft, synchronous rotary gear is installed in rotary shaft upper end, planetary gear engages with the external gear set by emery wheel interface, synchronous rotary gear and planetary gear engage with internal gear.The present invention realizes abrasive material renewal from the sharp and block-shaped real-time recovery of emery wheel, the efficient ultra-smooth Even Grinding polishing of plane of suitable photoelectron/microelectronic substrates and optical element.
Description
Technical field
The present invention relates to a kind of self-training magnetic rheologic flexible buffing wheel and its grinding and polishing method, particularly suitable for photoelectron/
The ultraprecise polishing processing of semiconductor microelectronics substrate and optical element, belongs to Ultraprecision Machining field.
Background technology
In LED fields, monocrystalline silicon (Si), monocrystalline germanium (Ge), GaAs (GaAs), monocrystalline silicon carbide（SiC）And sapphire
（Al2O3）Deng being used as semiconductor substrate materials, also require that with the super flat and surface of ultra-smooth（Roughness Ra reaches
Below 0.3nm）The requirement of epitaxial film growth could be met, and require zero defect, not damaged.And optical element is as optics
One of core parts of device, to reach good optical property, its surface accuracy needs to reach ultra-smooth degree（Roughness Ra
Reach below 1nm）, surface figure accuracy also has higher requirement（Form accuracy reaches less than 0.5 micron）.It can be seen that either light
Plane component or semiconductor chip are learned, is required to carry out planarization processing, its traditional handicraft is mainly high-efficient grinding, ultraprecise
Polishing, chemically mechanical polishing, MRF and the polishing processing based on face grinding machine, its crudy and precision directly determine
The performance of optics and semiconductor devices.
After Japanese Mastul S. in 1984 et al. propose workpiece spinning method for grinding, spinning grinding is former
The ultra-precision grinding machine of reason has turned into the semiconductor wafer processing that particularly manufacture of major diameter chip and thinning back side generally use and set
It is standby.In workpiece spinning grinding, in addition to proposing very requirement for height to the precision of ultra-precision grinding machine and main axis stiffness, to
The end grinding wheel that set uses also has high requirement, wherein with polishing performance emery wheel（Poligrind）It is required that highest, is used
The emery wheel can directly be obtained by grinding method and mechanically polish equal surface quality, substantially increase processing efficiency.But
Poligrind high-performance cause can produce such emery wheel manufacturer it is few, hold at high price, import price is in 30,000 people
People's coin or so, and the high only 5~7mm of tooth of such emery wheel is high, and the abrasion of process medium plain emery wheel is very fast, thus is only used for
The grinding of a small amount of workpiece, grinding cost are high.Thus the present invention proposes a kind of self-training magnetic rheologic flexible buffing wheel and its mill
Throwing method, self-training rheology flexible polishing emery wheel block is formed using dynamic magnetic field, realizes the constant pressure Flexible Manufacture to workpiece, and
And abrasive material can be made real-time update is from sharp in process, and the emery wheel is never wornout, can be realized with cheap price
Poligrind effect.
The content of the invention
The mesh of the present invention is to propose a kind of self-training magnetic rheologic flexible for the problem of Poligrind costs height, quick abrasion
Buffing wheel.Process medium plain emery wheel block of the present invention can realize that abrasive material automatically updates the real-time recovery block-shaped with emery wheel, emery wheel
Block is never wornout, high in machining efficiency, and cost is low, can obtain the workpiece without surface and sub-surface damage, is adapted to photoelectron/microelectronics
The plane high efficiency ultra-smooth Even Grinding polishing of substrate and optical element.
Another object of the present invention is to provide a kind of grinding and polishing method of self-training magnetic rheologic flexible buffing wheel, the present invention
Realize the renewal of magnetic flow liquid and the renewal of abrasive material from sharp using dynamic magnetic field, it is not necessary to enter using EGR to magnetic flow liquid
Row updates and magnetic flow liquid need not be changed in process, and the abrasive material in self-training rheology flexible polishing emery wheel block, which has, holds end
Effect, tiny abrasive material and workpiece preferential contact can be realized, damage of the coarse granule abrasive material to workpiece be avoided, in the absence of traditional emery wheel
Key issues of wear problem and abrasive grain and gas cell distribution inequality of block.
The technical scheme is that：Self-training magnetic rheologic flexible buffing wheel of the present invention, includes retainer ring, internal tooth
Wheel, emery wheel ring, gear shaft, synchronous rotary gear, planetary gear, rotary shaft and cylindrical permanent magnet iron, wherein rotary shaft are installed in
In emery wheel ring, cylindrical permanent magnet iron is installed in the through hole set by rotary shaft lower end, and internal gear is installed in the top of emery wheel ring, Gu
Determine the top that ring is installed in internal gear, and retainer ring is fixed on lathe, emery wheel interface is installed in the top of emery wheel ring and retainer ring
Portion, emery wheel interface are connected with emery wheel ring, and emery wheel interface is provided with external gear, and gear shaft is installed on emery wheel interface, planetary gear
It is installed on gear shaft, synchronous rotary gear is installed in the upper end of rotary shaft, planetary gear and the external gear set by emery wheel interface
Engagement, synchronous rotary gear and planetary gear engage with internal gear.
The grinding and polishing method of self-training magnetic rheologic flexible buffing wheel of the present invention, comprises the following steps：
1）According to the structure of lathe, the self-training magnetic rheologic flexible buffing wheel structure of adaptation is designed；
2）According to the characteristics of processing object, the cylindrical permanent magnet iron phase neighbour of the magnetic field intensity of selection is the same as magnetic pole or adjacent anti-
Magnetic pole is installed in self-training magnetic rheologic flexible buffing wheel, and adjustment rotary shaft makes cylindrical permanent magnet iron lower surface to abrasive wheel end face
Distance it is consistent, and complete the integral installation of self-training magnetic rheologic flexible buffing wheel；
3）Self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine main shaft by emery wheel interface and attachment screw
On, retainer ring is fixed on face grinding machine lathe bed by the positioning cylinder in retainer ring with ring is fixedly connected with；
4）Workpiece is inhaled by vacuum or other modes are clamped on work spindle, makes the workpiece center of circle in cylindrical permanent magnet
The iron center of circle formed locus circle near, adjustment end face grinding machine spindle make abrasive wheel end face to the processing gap of workpiece surface be 0.5
~5mm；
5）By adding at least one of following three kinds of abrasive materials abrasive material in deionized water, three kinds of abrasive materials are concentration respectively
The nano-size abrasive materials that the submicron order abrasive material for being 2%~15% for 2%~15% micron order abrasive material, concentration, concentration are 2%~15%,
And the sub-micro level carbonyl iron dust that concentration is 2%~20% and the micron order carbonyl iron dust that concentration is 3%~15% are added in deionized water,
And add concentration be 3%~15% dispersant, concentration be 1%~6% antirust agent and concentration be 2%~10% stabilizer, fully
By vibration of ultrasonic wave 5~30 minutes after stirring, magnetic flow liquid is formed；
5）Magnetic flow liquid is poured into annular groove, magnetic flow liquid forms nothing under the magnetic rheology effect of cylindrical permanent magnet iron and repaiied
Whole magnetorheological emery wheel block；
6）Start end face grinding machine spindle and work spindle, face grinding machine main shaft drives self-training magnetic rheologic flexible buffing wheel
Rotated with 50rpm~5000rpm speed, drive internal gear to rotate in the presence of the external gear of planetary gear and emery wheel interface,
Internal gear drives rotary shaft and cylindrical permanent magnet iron to rotate by synchronous rotary gear, and the cylindrical permanent magnet iron of synchronous axial system makes end
Face magnetic field real-time change, make without magnetorheological emery wheel block formation self-training rheology flexible polishing emery wheel block is repaired, work spindle drives
Workpiece is rotated with 0rpm~500rpm speed；
7）Workpiece surface material is in the constant pressure shear action of self-training rheology flexible polishing emery wheel block and turning for workpiece itself
Realize that grinding and polishing removes under dynamic, obtain ultra-smooth without sub-surface damage surface.
The self-training magnetic rheologic flexible buffing wheel of the present invention, the method rotated using magnetic pole make the adjacent magnetic pole magnetic line of force
Generation real-time change, so as to which static magnetic field is changed into dynamic magnetic field, it can force and be changed into certainly without the magnetorheological emery wheel block of finishing
The renewal repaired rheology flexible polishing emery wheel block and realize abrasive material thoroughly solves nothing from the sharp and block-shaped real-time recovery of emery wheel
Repairing can not be extensive due to being deformed under the stickiness of magnetic flow liquid and magnetic action in the positive weighlock gap process of magnetorheological emery wheel block
Answer so as to lose the key problem to the tonnage of workpiece.The present invention is dexterously using the rotary motion direct drive row of emery wheel
Internal gear rotation in star gear mechanism, and by each magnetic pole synchronous axial system of rotation driving of internal gear, and utilize labyrinth structure
Mechanical seal and relative slip are realized with trapezium structure, so as to obtain the compact structure suitable with traditional emery wheel.The present invention's
Another advantage realizes the renewal of magnetic flow liquid and the renewal of abrasive material from sharp using dynamic magnetic field, it is not necessary to using EGR to magnetic
Rheology liquid is updated and magnetic flow liquid need not be changed in process, the abrasive material in self-training rheology flexible polishing emery wheel block
Answered with end effect is held, tiny abrasive material and workpiece preferential contact can be realized, avoid damage of the coarse granule abrasive material to workpiece, and certainly
Repair the shape energy real-time recovery of rheology flexible polishing emery wheel block, wear problem and abrasive grain in the absence of traditional emery wheel block and
Key issues of gas cell distribution inequality.Thus using the obtainable workpiece table of self-training magnetic rheologic flexible buffing wheel of the present invention
Face uniformity is good and high quality workpiece without surface and sub-surface damage, and cost is low, is especially suitable for photoelectron/microelectronics base
The plane high efficiency ultra-smooth Even Grinding polishing of piece and optical element.Meanwhile workpiece does not revolve during present apparatus use
Annulus type lossless region can be processed when turning, is suitable for studying Material Removal Mechanism and the sub-surface damage inspection of optical flat material
The experimental studies such as survey.
Brief description of the drawings
Fig. 1 is self-training magnetic rheologic flexible buffing wheel complete section front view of the present invention.
Fig. 2 is the partial enlarged view of self-training magnetic rheologic flexible buffing wheel of the present invention.
Fig. 3 is self-training magnetic rheologic flexible buffing wheel A-A sectional views of the present invention.
Fig. 4 is self-training magnetic rheologic flexible buffing wheel top view of the present invention.
Fig. 5 is self-training magnetic rheologic flexible buffing wheel upward view of the present invention.
Fig. 6 is scheme of installation of the self-training magnetic rheologic flexible buffing wheel of the present invention in face grinding machine.
Fig. 7 is that self-training magnetic rheologic flexible buffing wheel of the present invention is arranged on face grinding machine and forms rheology flexible polishing sand
Take turns the schematic diagram of block.
Fig. 8 is the polishing processing schematic diagram of self-training magnetic rheologic flexible buffing wheel of the present invention.
Fig. 9 is Fig. 8 B-B schematic diagrames.
Figure 10 is the magnetorheological emery wheel schematic diagram for not possessing self-training function of the present invention.
In figure：1. retainer ring, 2. trapezoidal seams, 3. internal gears, 4. outer nuts, 5. inner nuts, 6. bearing spacers, 7. circular cones
Roller bearing, 8. emery wheel rings, 9. positioning cylinders, 10. labyrinth seams, 11. gear shafts, 12. installation screwed holes, 13. emery wheels connect
Mouthful, 14. installation seams, 15. coordinate seam, 16. trip bolts, 17. synchronous rotary gears, 18. planetary gears, 19. hole bullets
Property back-up ring, 20. deep groove ball bearings, 21. circlips for shaft, 22. flat keys, 23. trapezoidal sliding surfaces, 24. boss, 25. rotary shafts,
26. cylindrical permanent magnet iron, 27. abrasive wheel end faces, 28. face grinding machine main shafts, 29. face grinding machine lathe beds, 30. attachment screws, 31. is solid
Determine connection ring, 32. self-training rheology flexible polishing emery wheel blocks, 33. annular grooves, 34. magnetic flow liquids, 35. work spindles, 36. works
Part, 37. processing gaps, 38. without the magnetorheological emery wheel block of finishing.
Embodiment
Below in conjunction with the accompanying drawings and embodiment the invention will be further described, but actual achievable technique is not limited to these
Embodiment：
Embodiment 1：
As shown in Fig. 1~Fig. 5, a kind of self-training magnetic rheologic flexible buffing wheel of the invention, include retainer ring 1, interior
Gear 3, emery wheel ring 8, gear shaft 11, synchronous rotary gear 17, planetary gear 18, rotary shaft 25 and cylindrical permanent magnet iron 26, its
Middle rotary shaft 25 is installed in emery wheel ring 8, and cylindrical permanent magnet iron 26 is installed in the through hole set by the lower end of rotary shaft 25, internal gear
3 are installed in the top of emery wheel ring 8, and retainer ring 1 is installed in the top of internal gear 3, and retainer ring 1 is fixed on lathe, and emery wheel connects
Mouth 13 is installed in the top of emery wheel ring 8 and retainer ring 1, and emery wheel interface 13 is connected with emery wheel ring 8, and emery wheel interface 13 is provided with external tooth
Wheel, gear shaft 11 are installed on emery wheel interface 13, and planetary gear 18 is installed on gear shaft 11, and synchronous rotary gear 17 is installed in
The upper end of rotary shaft 25, planetary gear 18 engage with the external gear set by emery wheel interface 13, synchronous rotary gear 17 and planet tooth
Wheel 18 engages with internal gear 3.Fix because determine ring 1, thus the axis of planetary gear 18 be it is fixed, the rotation of emery wheel interface 13 when
Wait, emery wheel ring 8 and then rotates, and drives planetary gear 18 to rotate by the external gear set by emery wheel interface 13, planetary gear 18
Rotation internal gear 3 can be driven to rotate, the rotation of internal gear 3 and then drive synchronous rotary gear 17 to rotate.Above-mentioned emery wheel interface
13 external gears being provided with integrally are made with emery wheel interface 13, or external gear is individually made, then are fixedly connected with emery wheel interface 13.
In the present embodiment, above-mentioned emery wheel interface 13 is connected with emery wheel ring 8 by trip bolt 16.
In the present embodiment, above-mentioned rotary shaft 25 is supported on emery wheel ring 8 by two pairs of taper roll bearings 7；Above-mentioned rotary shaft
25 are set with bearing spacer 6 between two pairs of taper roll bearings 7.Above-mentioned rotary shaft 25 fills in the end of taper roll bearing 7
Provided with outer nut 4 and inner nut 5.
In the present embodiment, synchronous rotary gear 17 is installed in the upper end of above-mentioned rotary shaft 25 by flat key 22；Above-mentioned planet tooth
Wheel 18 is supported on gear shaft 11 by deep groove ball bearing 20.
In the present embodiment, the above-mentioned upper end of emery wheel interface 13 has installation seam 14, coordinates seam 15 to be arranged on emery wheel interface
13 lower ends, the upper end of emery wheel ring 8 coordinate seam 15 to realize positioning with the lower end of emery wheel interface 13 patch merga pass；Above-mentioned internal gear 3 with
Emery wheel ring 8 coordinates installation by the trapezoidal sliding surface 23 of the lower surface of internal gear 3, and retainer ring 1 passes through on internal gear 3 with internal gear 3
The trapezoidal seam 2 of end face coordinates installation, and the bulge loop of the interior upside of retainer ring 1 is nested on emery wheel interface 13, and the upper end of gear shaft 11 leads to
Cross threaded connection to be fixed in retainer ring 1, the end of planetary gear 18 passes through circlip for hole 19 and circlip for shaft 21
It is fixed on gear shaft 11.
In the present embodiment, the above-mentioned upper end of retainer ring 1 has multiple positioning cylinders 9, and retainer ring 1 can be with respect to emery wheel interface 13
Rotate, waterproof construction labyrinth seam 10 between retainer ring 1 and emery wheel interface 13 be present, internal gear 3 can be relatively fixed ring 1
Rotated with emery wheel ring 8, the trapezoidal seam 2 of the upper surface of internal gear 3 and the trapezoidal sliding surface 23 of the lower surface of internal gear 3 are with resistance to
Abrasives coating, realize the mechanical seal and sliding friction of self-training magnetic rheologic flexible buffing wheel.
In the present embodiment, the magnetic fidle of end intensity of above-mentioned cylindrical permanent magnet iron 26 is more than 1000Gs, adjacent same magnetic pole or
The cylindrical permanent magnet iron 26 of adjacent anti-magnetic pole is installed in the orthogonal array hole of emery wheel ring 8, the lower surface of cylindrical permanent magnet iron 26 with
The orthogonal array hole of emery wheel ring 8 there is gap and gap it is equal, orthogonal array hole and the gap of rotary shaft 25 of emery wheel ring 8 are matched somebody with somebody
Close, the uniform close circle distribution of cylindrical permanent magnet iron 26.
In the present embodiment, the above-mentioned lower end of emery wheel ring 8 has a boss 24, and boss surface is plane or cross groove face, boss
The distance of the lower surface of surface distance cylindrical permanent magnet iron 26 is 0.5mm~5mm.
In the present embodiment, above-mentioned emery wheel ring 8 and rotary shaft 25 use stainless steel or duralumin, hard alumin ium alloy or copper alloy or ceramics etc.
Diamagnetic material makes.
As shown in fig. 6, the grinding and polishing method of the self-training magnetic rheologic flexible buffing wheel of the present invention, comprises the following steps：
1）According to the structure of Lapmaster SFT Corp. DMG-6011V single spindle ultraprecise face grinding machine lathes,
The self-training magnetic rheologic flexible buffing wheel structure of design such as Fig. 1~Fig. 5 adaptations；
2）According to the characteristics of 4 inches of single crystal SiC substrates, the magnetic field intensity of selection for 5200Gs the phase of cylindrical permanent magnet iron 26
Neighbour is installed in self-training magnetic rheologic flexible buffing wheel with magnetic pole, and adjustment rotary shaft 25 arrives the lower surface of cylindrical permanent magnet iron 26
The distance of abrasive wheel end face 27 is consistent, and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；
3）Self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine by emery wheel interface 13 and attachment screw 30
On main shaft 28, retainer ring 1 is fixed on face grinding machine lathe bed 29 by the positioning cylinder 9 in retainer ring 1 with ring 31 is fixedly connected with
On；
4）Workpiece 36 is inhaled by vacuum and is clamped on work spindle 35, makes the workpiece center of circle in the center of circle of cylindrical permanent magnet iron 26
Near the locus circle of formation, adjustment end face grinding machine spindle 28 makes the processing gap 37 of abrasive wheel end face 27 to workpiece surface be
0.8mm；
5）By adding the grain that diamond abrasive, concentration that the particle diameter that concentration is 5% is 5 microns are 3% in deionized water
Footpath is 0.5 micron of diamond abrasive abrasive material, and the carbonyl iron dust that the particle diameter that addition concentration is 3% in deionized water is 0.5 micron
And concentration be 10% particle diameter be 3.5 microns carbonyl iron dust, and add concentration be 5% dispersant, concentration be 3% antirust agent
With the stabilizer that concentration is 3%, by vibration of ultrasonic wave 10 minutes after being sufficiently stirred, magnetic flow liquid 34 is formed；
5）As shown in Fig. 7~Fig. 9, magnetic flow liquid 34 is poured into annular groove 33, magnetic flow liquid is in cylindrical permanent magnet iron 26
Magnetic rheology effect under formed without repairing magnetorheological emery wheel block 38；
6）Start end face grinding machine spindle 28 and work spindle 35, face grinding machine main shaft 28 drives self-training magnetic rheologic flexible to throw
Light emery wheel is rotated with 1000rpm speed, on planetary gear 18 and emery wheel interface 13 in the presence of set external gear in driving
Gear 3 rotates, and internal gear 3 drives rotary shaft 25 and cylindrical permanent magnet iron 26 to rotate by synchronous rotary gear 17, synchronous axial system
Cylindrical permanent magnet iron 26 make magnetic fidle of end real-time change, make to form that self-training rheology is flexible to throw without repairing magnetorheological emery wheel block 38
Light emery wheel block 32, work spindle 35 drive workpiece 36 to be rotated with 200rpm speed；
7）The surfacing of workpiece 36 self-training rheology flexible polishing emery wheel block 32 constant pressure shear action and workpiece 36 from
Realize that grinding and polishing removes under the rotation of body, by 25 minutes polishing processings, obtain Ra0.2nm ultra-smooth without sub-surface damage table
Face.
Embodiment 2：
As shown in Fig. 1~Fig. 5, a kind of self-training magnetic rheologic flexible buffing wheel of the invention is same as Example 1.
As shown in fig. 6, the grinding and polishing method of the self-training magnetic rheologic flexible buffing wheel of the present invention, comprises the following steps：
1）The structure of the VG401 MKII grinding machines produced according to Okamoto companies, design such as Fig. 1~Fig. 5 adaptations are reviewed one's lessons by oneself
Whole magnetic rheologic flexible buffing wheel structure；
2）According to the characteristics of 6 inches of single crystalline Si substrates, the magnetic field intensity of selection for 3800Gs the phase of cylindrical permanent magnet iron 26
Neighbour is installed in self-training magnetic rheologic flexible buffing wheel with magnetic pole, and adjustment rotary shaft 25 arrives the lower surface of cylindrical permanent magnet iron 26
The distance of abrasive wheel end face 27 is consistent, and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；
3）Self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine by emery wheel interface 13 and attachment screw 30
On main shaft 28, retainer ring 1 is fixed on face grinding machine lathe bed 29 by the positioning cylinder 9 in retainer ring 1 with ring 31 is fixedly connected with
On；
4）Workpiece 36 is inhaled by vacuum and is clamped on work spindle 35, makes the workpiece center of circle in the center of circle of cylindrical permanent magnet iron 26
Near the locus circle of formation, adjustment end face grinding machine spindle 28 makes the processing gap 37 of abrasive wheel end face 27 to workpiece surface be 1mm；
5）By adding the grain that alumina abrasive, concentration that the particle diameter that concentration is 6% is 5 microns are 3% in deionized water
The alumina abrasive abrasive material that the particle diameter that the cerium oxide abrasives abrasive material and concentration that footpath is 0.5 micron are 1% is 2 microns, and deionized water
The carbonyl iron dust that the particle diameter that the particle diameter that middle addition concentration is 5% is 0.3 micron of carbonyl iron dust and concentration is 10% is 3.5 microns,
And add concentration be 4% dispersant, concentration be 3% antirust agent and concentration be 4% stabilizer, pass through ultrasound after being sufficiently stirred
Ripple shakes 15 minutes, forms magnetic flow liquid 34；
5）As shown in Fig. 7~Fig. 9, magnetic flow liquid 34 is poured into annular groove 33, magnetic flow liquid is in cylindrical permanent magnet iron 26
Magnetic rheology effect under formed without repairing magnetorheological emery wheel block 38；
6）Start end face grinding machine spindle 28 and work spindle 35, face grinding machine main shaft 28 drives self-training magnetic rheologic flexible to throw
Light emery wheel is rotated with 1500rpm speed, and 3 turns of internal gear is driven in the presence of planetary gear 18 with the external gear of emery wheel interface 13
Dynamic, internal gear 3 drives rotary shaft 25 and cylindrical permanent magnet iron 26 to rotate by synchronous rotary gear 17, the cylinder of synchronous axial system
Permanent magnet 26 makes magnetic fidle of end real-time change, makes to form self-training rheology flexible polishing emery wheel block without the magnetorheological emery wheel block 38 of finishing
32, work spindle 35 drives workpiece 36 to be rotated with 250rpm speed；
7）The surfacing of workpiece 36 self-training rheology flexible polishing emery wheel block 32 constant pressure shear action and workpiece 36 from
Realize that grinding and polishing removes under the rotation of body, by 20 minutes polishing processings, obtain Ra0.28nm ultra-smooth without sub-surface damage table
Face.
Embodiment 3：
As shown in Fig. 1~Fig. 5, a kind of self-training magnetic rheologic flexible buffing wheel of the invention is same as Example 1.
As shown in fig. 6, the grinding and polishing method of the self-training magnetic rheologic flexible buffing wheel of the present invention, comprises the following steps：
1）According to Lapmaster SFT Corp. DMG-6011V single spindle ultraprecise precision face grinding machine lathes
Structure, the self-training magnetic rheologic flexible buffing wheel structure of design such as Fig. 1~Fig. 5 adaptations；
2）According to the characteristics of 4 inches of monocrystalline sapphire substrates, the magnetic field intensity of selection for 4500Gs cylindrical permanent magnet iron
26 adjacent same magnetic poles are installed in self-training magnetic rheologic flexible buffing wheel, and adjustment rotary shaft 25 makes the lower end of cylindrical permanent magnet iron 26
The distance of face to abrasive wheel end face 27 is consistent, and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；
3）Self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine by emery wheel interface 13 and attachment screw 30
On main shaft 28, retainer ring 1 is fixed on face grinding machine lathe bed 29 by the positioning cylinder 9 in retainer ring 1 with ring 31 is fixedly connected with
On；
4）Workpiece 36 is inhaled by vacuum and is clamped on work spindle 35, makes the workpiece center of circle in the center of circle of cylindrical permanent magnet iron 26
Near the locus circle of formation, adjustment end face grinding machine spindle 28 makes the processing gap 37 of abrasive wheel end face 27 to workpiece surface be
0.8mm；
5）By adding the grain that diamond abrasive, concentration that the particle diameter that concentration is 5% is 5 microns are 3% in deionized water
The diamond abrasive abrasive material that the particle diameter that the diamond abrasive abrasive material and concentration that footpath is 0.5 micron are 1% is 3 microns, and deionized water
The carbonyl iron dust that the particle diameter that the particle diameter that middle addition concentration is 5% is 0.3 micron of carbonyl iron dust and concentration is 12% is 5 microns, and
Add concentration be 3% dispersant, concentration be 3% antirust agent and concentration be 4% stabilizer, pass through ultrasonic wave after being sufficiently stirred
Vibrations 10 minutes, form magnetic flow liquid 34；
5）As shown in Fig. 7~Fig. 9, magnetic flow liquid 34 is poured into annular groove 33, magnetic flow liquid is in cylindrical permanent magnet iron 26
Magnetic rheology effect under formed without repairing magnetorheological emery wheel block 38；
6）Start end face grinding machine spindle 28 and work spindle 35, face grinding machine main shaft 28 drives self-training magnetic rheologic flexible to throw
Light emery wheel is rotated with 1500rpm speed, and 3 turns of internal gear is driven in the presence of planetary gear 18 with the external gear of emery wheel interface 13
Dynamic, internal gear 3 drives rotary shaft 25 and cylindrical permanent magnet iron 26 to rotate by synchronous rotary gear 17, the cylinder of synchronous axial system
Permanent magnet 26 makes magnetic fidle of end real-time change, makes to form self-training rheology flexible polishing emery wheel block without the magnetorheological emery wheel block 38 of finishing
32, work spindle 35 drives workpiece 36 to be rotated with 0rpm speed；
7）The surfacing of workpiece 36 self-training rheology flexible polishing emery wheel block 32 constant pressure shear action and workpiece 36 from
Realize that grinding and polishing removes under the rotation of body, by 40 minutes polishing processings, obtain Ra0.2nm ultra-smooth without sub-surface damage arc
Band-like surface, light microscope detection is carried out to the band formed after polishing and material removing rate detects, establishes monocrystalline sapphire
The removal model of material.
From above-described embodiment as can be seen that a kind of self-training magnetic rheologic flexible buffing wheel of the present invention, is revolved using magnetic pole
The method turned makes the adjacent magnetic pole magnetic line of force that real-time change occur, and so as to which static magnetic field is changed into dynamic magnetic field, can force
It is changed into self-training rheology flexible polishing emery wheel block without magnetorheological emery wheel block is repaired and realizes the renewal of abrasive material from sharp and emery wheel block
The real-time recovery of shape, thoroughly solve without sticking due to magnetic flow liquid in the magnetorheological positive weighlock gap process of emery wheel block of finishing
Deform and can not recover so as to lose the key problem to the tonnage of workpiece under property and magnetic action（Shown in Figure 10）.This hair
It is bright dexterously to be rotated using the internal gear in the rotary motion direct drive planetary gears of emery wheel, and by the rotation of internal gear
Turn each magnetic pole synchronous axial system of driving, and mechanical seal and relative slip are realized using labyrinth structure and trapezium structure, so as to obtain
The compact structure suitable with traditional emery wheel.Another advantage of the present invention realizes renewal and the mill of magnetic flow liquid using dynamic magnetic field
The renewal of material is from sharp, it is not necessary to magnetic flow liquid is updated using EGR and need not be changed in process magnetorheological
Liquid, the abrasive material in self-training rheology flexible polishing emery wheel block have hold end effect should, can realize that tiny abrasive material preferentially connects with workpiece
Touch, avoid damage of the coarse granule abrasive material to workpiece, and the shape energy real-time recovery of self-training rheology flexible polishing emery wheel block, no
Key issues of wear problem and abrasive grain and gas cell distribution inequality in the presence of traditional emery wheel block.Thus use oneself of the present invention
Repair that the obtainable workpiece surface uniformity of magnetic rheologic flexible buffing wheel is good and high quality work without surface and sub-surface damage
Part, and cost is low, and the plane high efficiency ultra-smooth Even Grinding for being especially suitable for photoelectron/microelectronic substrates and optical element is thrown
Light is processed.Meanwhile annulus type lossless region can be processed when workpiece does not rotate during present apparatus use, it is suitable for studying optics
The experimental studies such as Material Removal Mechanism and the sub-surface damage detection of planar materials.It can be seen that present inventive concept is ingenious, user
Just, high in machining efficiency, processing effect is good, and the emery wheel is never wornout, and Poligrind effect can be realized with cheap price
Fruit, it is that one kind has the revolutionary efficient ultraprecise processing method of semiconductor chip/optical element.
It is noted that above-mentioned embodiment is described in detail just for the present invention, it should not be to this
The limitation of invention.To those skilled in the art, in the objective and scope without departing from claim, Ke Yiyou
The change of diversified forms and details.
Claims (10)
1. a kind of self-training magnetic rheologic flexible buffing wheel, it is characterised in that include retainer ring（1）, internal gear（3）, emery wheel ring
（8）, gear shaft（11）, synchronous rotary gear（17）, planetary gear（18）, rotary shaft（25）With cylindrical permanent magnet iron（26）, its
Middle rotary shaft（25）It is installed in emery wheel ring（8）It is interior, cylindrical permanent magnet iron（26）It is installed in rotary shaft（25）Through hole set by lower end
It is interior, internal gear（3）It is installed in emery wheel ring（8）Top, retainer ring（1）It is installed in internal gear（3）Top, and retainer ring（1）
It is fixed on lathe, emery wheel interface（13）It is installed in emery wheel ring（8）And retainer ring（1）Top, emery wheel interface（13）With emery wheel
Ring（8）Connection, emery wheel interface（13）It is provided with external gear, gear shaft（11）It is installed in retainer ring（1）On, planetary gear（18）Dress
It is located at gear shaft（11）On, synchronous rotary gear（17）It is installed in rotary shaft（25）Upper end, planetary gear（18）Connect with emery wheel
Mouthful（13）Set external gear engagement, synchronous rotary gear（17）And planetary gear（18）With internal gear（3）Engagement.
2. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that above-mentioned emery wheel interface（13）
With emery wheel ring（8）Pass through trip bolt（16）Connection.
3. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that above-mentioned rotary shaft（25）It is logical
Cross two pairs of taper roll bearings（7）It is supported on emery wheel ring（8）；Above-mentioned rotary shaft（25）In two pairs of taper roll bearings（7）Between
It is set with bearing spacer（6）, above-mentioned rotary shaft（25）In taper roll bearing（7）End be equiped with outer nut（4）And interior spiral shell
It is female（5）.
4. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that above-mentioned rotary shaft（25）'s
Upper end passes through flat key（22）Synchronous rotary gear is installed（17）；Above-mentioned planetary gear（18）Pass through deep groove ball bearing（20）It is supported on
Gear shaft（11）On.
5. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that above-mentioned emery wheel interface（13）
Upper end has installation seam（14）, coordinate seam（15）It is arranged on emery wheel interface（13）Lower end, emery wheel ring（8）Upper end connects with emery wheel
Mouthful（13）Lower end patch merga pass coordinates seam（15）Realize positioning；Above-mentioned internal gear（3）With emery wheel ring（8）Pass through internal gear
（3）The trapezoidal sliding surface of lower surface（23）Coordinate installation, retainer ring（1）With internal gear（3）Pass through internal gear（3）The ladder of upper surface
Shape seam（2）Coordinate installation, retainer ring（1）The bulge loop of interior upside is nested in emery wheel interface（13）On, gear shaft（11）Upper end leads to
Cross threaded connection and be fixed on retainer ring（1）On, planetary gear（18）End pass through circlip for hole（19）With axle elasticity
Back-up ring（21）It is fixed on gear shaft（11）On.
6. the self-training magnetic rheologic flexible buffing wheel according to any one of claim 1 to 5, it is characterised in that above-mentioned fixation
Ring（1）Upper end has multiple positioning cylinders（9）, retainer ring（1）Can relative emery wheel interface（13）Rotate, retainer ring（1）With
Emery wheel interface（13）Between waterproof construction labyrinth seam be present（10）, internal gear（3）Ring can be relatively fixed（1）With emery wheel ring（8）
Rotate, internal gear（3）The trapezoidal seam of upper surface（2）And internal gear（3）The trapezoidal sliding surface of lower surface（23）With resistance to
Abrasives coating, realize the mechanical seal and sliding friction of self-training magnetic rheologic flexible buffing wheel.
7. self-training magnetic rheologic flexible buffing wheel according to claim 6, it is characterised in that cylindrical permanent magnet iron（26）
Magnetic fidle of end intensity be more than 1000Gs, adjacent same magnetic pole or adjacent anti-magnetic pole cylindrical permanent magnet iron（26）It is installed on emery wheel
Ring（8）Orthogonal array hole in, cylindrical permanent magnet iron（26）Lower surface and emery wheel ring（8）Orthogonal array hole there is gap and
Gap is equal, emery wheel ring（8）Orthogonal array hole and rotary shaft（25）Gap coordinates, cylindrical permanent magnet iron（26）Uniform circular point
Cloth.
8. self-training magnetic rheologic flexible buffing wheel according to claim 6, it is characterised in that above-mentioned emery wheel ring（8）Lower end
With boss（24）, boss surface is plane or cross groove face, and boss surface is apart from cylindrical permanent magnet iron（26）Lower surface
Distance is 0.5mm~5mm.
9. self-training magnetic rheologic flexible buffing wheel according to claim 6, it is characterised in that above-mentioned emery wheel ring（8）And rotation
Rotating shaft（25）Using stainless steel or duralumin, hard alumin ium alloy or copper alloy or ceramic making.
A kind of 10. grinding and polishing method of self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that bag
Include following steps：
1）According to the structure of lathe, the self-training magnetic rheologic flexible buffing wheel structure of adaptation is designed；
2）According to the characteristics of processing object, the magnetic fidle of end intensity of adjacent same magnetic pole or adjacent anti-magnetic pole is selected to be more than 1000Gs
Cylindrical permanent magnet iron（26）It is installed on emery wheel ring（8）It is interior, adjust rotary shaft（25）Make cylindrical permanent magnet iron（26）Lower surface is arrived
Abrasive wheel end face（27）Distance it is consistent, and complete the integral installation of self-training magnetic rheologic flexible buffing wheel；
3）Self-training magnetic rheologic flexible buffing wheel is passed through into emery wheel interface（13）And attachment screw（30）It is installed on face grinding machine
Main shaft（28）On, by retainer ring（1）Pass through retainer ring（1）On positioning cylinder（9）Be fixedly connected with ring（31）It is fixed on end face
Grinder bed（29）On；
4）By workpiece（36）Inhaled by vacuum and be clamped in work spindle（35）On, make the workpiece center of circle in cylindrical permanent magnet iron（26）Circle
Near the locus circle being formed centrally, end face grinding machine spindle is adjusted（28）Make abrasive wheel end face（27）To the processing gap of workpiece surface
（37）For 0.5~5mm；
5）By adding at least one of following three kinds of abrasive materials abrasive material in deionized water, three kinds of abrasive materials are that concentration is 2% respectively
The nano-size abrasive materials that submicron order abrasive material that~15% micron order abrasive material, concentration are 2%~15%, concentration are 2%~15%, and go
The sub-micro level carbonyl iron dust that concentration is 2%~20% and the micron order carbonyl iron dust that concentration is 3%~15% are added in ionized water, and is added
Enter the antirust agent that dispersant, concentration that concentration is 3%~15% are 1%~6% and the stabilizer that concentration is 2%~10%, be sufficiently stirred
Afterwards by vibration of ultrasonic wave 5~30 minutes, magnetic flow liquid is formed（34）；
5）By magnetic flow liquid（34）Pour into annular groove（33）Interior, magnetic flow liquid is in cylindrical permanent magnet iron（26）Magnetic rheology effect under
Formed without the magnetorheological emery wheel block of finishing（38）；
6）Start end face grinding machine spindle（28）And work spindle（35）, face grinding machine main shaft（28）Drive self-training magnetic rheologic flexible
Buffing wheel is rotated with 50rpm~5000rpm speed, in planetary gear（18）With emery wheel interface（13）External gear in the presence of
Drive internal gear（3）Rotate, internal gear（3）Pass through synchronous rotary gear（17）Drive rotary shaft（25）With cylindrical permanent magnet iron
（26）Rotate, the cylindrical permanent magnet iron of synchronous axial system（26）Make magnetic fidle of end real-time change, make without the magnetorheological emery wheel block of finishing
（38）Form self-training rheology flexible polishing emery wheel block（32）, work spindle（35）Drive workpiece（36）With 0rpm~500rpm speed
Degree rotates；
7）Workpiece（36）Surfacing is in self-training rheology flexible polishing emery wheel block（32）Constant pressure shear action and workpiece（36）
Realize that grinding and polishing removes under the rotation of itself, obtain ultra-smooth without sub-surface damage surface.
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| CN201511025600.4A CN105729250B (en) | 2015-12-29 | 2015-12-29 | A kind of self-training magnetic rheologic flexible buffing wheel and its grinding and polishing method |
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| CN107617933B (en) * | 2017-11-06 | 2023-05-05 | 广东工业大学 | Dynamic magnetic field magnetorheological polishing device |
| CN111644982B (en) * | 2020-06-02 | 2021-12-03 | 江苏奕达研磨材料有限公司 | Polishing abrasive paper swing drawing type iron and acne removing device for ironwork |
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| SE464565B (en) * | 1987-02-09 | 1991-05-13 | Jgc Corp | PROCEDURES FOR GRINDING USING A MAGNETIC FLUID AND DEVICE THEREOF |
| US7635290B2 (en) * | 2007-08-15 | 2009-12-22 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Interpenetrating network for chemical mechanical polishing |
| CN201086241Y (en) * | 2007-09-13 | 2008-07-16 | 赵福军 | Metallic phase polisher milling and polishing disc |
| WO2013172785A1 (en) * | 2012-05-15 | 2013-11-21 | Agency For Science, Technology And Research | Surface Polishing Apparatus |
| CN203557222U (en) * | 2013-11-25 | 2014-04-23 | 四川大学 | Magnetorheological fluid rotating inner surface polishing system |
| CN103612162A (en) * | 2013-11-25 | 2014-03-05 | 四川大学 | Magnetorheological fluid curved surface polishing system |
| CN205438026U (en) * | 2015-12-29 | 2016-08-10 | 广东工业大学 | Self -training magnetic current becomes flexible finishing wheel |
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