CN105729250A - Self-adjustment magnetorheological flexible polishing abrasive wheel and polishing method thereof - Google Patents
Self-adjustment magnetorheological flexible polishing abrasive wheel and polishing method thereof Download PDFInfo
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- CN105729250A CN105729250A CN201511025600.4A CN201511025600A CN105729250A CN 105729250 A CN105729250 A CN 105729250A CN 201511025600 A CN201511025600 A CN 201511025600A CN 105729250 A CN105729250 A CN 105729250A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention relates to a self-adjustment magnetorheological flexible polishing abrasive wheel and a polishing method thereof. The self-adjustment magnetorheological flexible polishing abrasive wheel comprises a fixing ring, an inner gear, an abrasive wheel ring, a gear shaft, a synchronous rotation gear, a planetary gear, a rotary shaft and a cylinder permanent magnet. The rotary shaft is arranged in the abrasive wheel ring. The cylinder permanent magnet is arranged in a through hole formed in the lower end of the rotary shaft. The inner gear is arranged on the upper portion of the abrasive wheel ring. The fixing ring is arranged at the top of the inner gear and fixed to a machine tool. An abrasive wheel connector is arranged at the top of the abrasive wheel ring and the top of the fixing ring. The abrasive wheel connector is connected with the abrasive wheel ring. An outer gear is arranged on the abrasive wheel connector. The gear shaft is arranged on the abrasive wheel connector. The planetary gear is arranged on the gear shaft. The synchronous rotation gear is arranged at the upper end of the rotary shaft. The planetary gear is engaged with the outer gear arranged on the abrasive wheel connector. The synchronous rotation gear and the planetary gear are engaged with the inner gear. According to the self-adjustment magnetorheological flexible polishing abrasive wheel and the polishing method thereof, replacing and self-sharpening of abrasive materials and real-time recovery of the shape of an abrasive wheel block are achieved, and the self-adjustment magnetorheological flexible polishing abrasive wheel and the polishing method thereof are suitable for efficient, super-smooth and uniform grinding and polishing of planes of photoelectronic/microelectronic substrates and optical elements.
Description
Technical field
The present invention relates to a kind of self-training magnetic rheologic flexible buffing wheel and grinding and polishing method thereof, be particularly suitable for the ultraprecise polishing processing of photoelectron/semiconductor microelectronics substrate and optical element, belong to Ultraprecision Machining field.
Background technology
At LED field, monocrystal silicon (Si), monocrystalline germanium (Ge), GaAs (GaAs), monocrystalline silicon carbide (SiC) and sapphire (Al2O3) etc. as semiconductor substrate materials, also require that having super smooth and ultra-smooth surface (roughness Ra reaches below 0.3nm) could meet the requirement of epitaxial film growth, and require zero defect, not damaged.And optical element is as one of the core parts of optics, will reach good optical property, its surface accuracy needs to reach ultra-smooth degree (roughness Ra reaches below 1nm), and surface figure accuracy also has higher requirement (form accuracy reaches less than 0.5 micron).Can be seen that no matter be optical flat element or semiconductor chip, all need to carry out planarization processing, its traditional handicraft is mainly high-efficient grinding, Ultraprecise polished, chemically mechanical polishing, MRF and the polishing processing based on face grinding machine, and its crudy and precision directly determine the performance of optics and semiconductor device.
After MastulS. since Japan in 1984 et al. proposes workpiece spinning method for grinding, the ultra-precision grinding machine of spinning Principle of Grinding and Cutting has become the process equipment that semiconductor wafer particularly major diameter wafer manufactures and thinning back side is commonly used.In workpiece spinning grinding, except the precision of ultra-precision grinding machine and main axis stiffness being proposed very except requirement for height, the end grinding wheel of supporting employing also there is high requirement, wherein the highest to have polishing performance emery wheel (Poligrind) requirement, adopt this emery wheel can obtain, either directly through grinding method, the surface quality that machine glazed finish is equal, substantially increase working (machining) efficiency.But it is few that the high-performance of Poligrind causes the manufacturer that can produce this type of emery wheel, hold at high price, import price is about 30,000 RMB, and the tooth depth of such emery wheel only has 5～7mm high, the abrasion of course of processing medium plain emery wheel is very fast, thus it being only used for the grinding of a small amount of workpiece, grinding cost is high.Thus the present invention proposes a kind of self-training magnetic rheologic flexible buffing wheel and grinding and polishing method thereof, adopt dynamic magnetic field to be formed and review one's lessons by oneself rectification change flexible polishing emery wheel block, realize the constant pressure Flexible Manufacture to workpiece, and can make abrasive material in the course of processing real-time update from sharp, and this emery wheel is never wornout, it is possible to realize the effect of Poligrind with cheap price.
Summary of the invention
The order of the present invention is that problem high for Poligrind cost, quick abrasion proposes a kind of self-training magnetic rheologic flexible buffing wheel.Course of processing medium plain emery wheel block of the present invention can realize abrasive material and automatically update the real-time recovery block-shaped with emery wheel, emery wheel block is never wornout, working (machining) efficiency is high, cost is low, the workpiece without surface and sub-surface damage can be obtained, be suitable for the plane high efficiency ultra-smooth Even Grinding polishing of photoelectron/microelectronic substrates and optical element.
Another object of the present invention is to provide a kind of grinding and polishing method of self-training magnetic rheologic flexible buffing wheel, the present invention adopts dynamic magnetic field to realize the renewal of magnetic flow liquid and the renewal of abrasive material from sharp, need not adopt circulating device that magnetic flow liquid is updated and the course of processing need not be changed magnetic flow liquid, review one's lessons by oneself rectification become the abrasive material in flexible polishing emery wheel block there is appearance end effect should, tiny abrasive material and workpiece preferential contact can be realized, avoid the damage to workpiece of the coarse granule abrasive material, it is absent from the tradition wear problem of emery wheel block and abrasive grain and the unequal key issue of gas cell distribution.
The technical scheme is that self-training magnetic rheologic flexible buffing wheel of the present invention, include retainer ring, internal gear, emery wheel ring, gear shaft, synchronous rotary gear, planetary gear, rotating shaft and cylindrical permanent magnet ferrum, wherein rotating shaft is installed in emery wheel ring, cylindrical permanent magnet ferrum is installed in the through hole set by rotating shaft lower end, internal gear is installed in the top of emery wheel ring, retainer ring is installed in the top of internal gear, and retainer ring is fixed on lathe, emery wheel interface is installed in the top of emery wheel ring and retainer ring, emery wheel interface is connected with emery wheel ring, emery wheel interface is provided with external gear, gear shaft is installed on emery wheel interface, planetary gear is installed on gear shaft, synchronous rotary gear is installed in the upper end of rotating shaft, planetary gear engages with the external gear set by emery wheel interface, synchronous rotary gear and planetary gear engage with internal gear.
The grinding and polishing method of self-training magnetic rheologic flexible buffing wheel of the present invention, comprises the steps:
1) structure according to lathe, the self-training magnetic rheologic flexible buffing wheel structure that design is adaptive；
2) feature according to processing object, the adjacent same magnetic pole of cylindrical permanent magnet ferrum or the adjacent anti-magnetic pole of the magnetic field intensity selected are installed in self-training magnetic rheologic flexible buffing wheel, adjusting rotating shaft makes cylindrical permanent magnet ferrum lower surface consistent to the distance of abrasive wheel end face, and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；
3) self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine main shaft by emery wheel interface and attachment screw, retainer ring is fixed on face grinding machine lathe bed by the positioning cylinder in retainer ring and the fixing ring that connects；
4) workpiece is inhaled by vacuum or other modes are clamped on work spindle, make the workpiece center of circle near the locus circle that the cylindrical permanent magnet ferrum center of circle is formed, adjust face grinding machine main shaft and make abrasive wheel end face be 0.5～5mm to the processing gap of workpiece surface；
5) by adding at least one abrasive material in following three kinds of abrasive materials in deionized water, three kinds of abrasive materials are concentration respectively be 2%～15% micron order abrasive material, concentration be 2%～15% submicron order abrasive material, concentration be the nano-size abrasive materials of 2%～15%, and deionized water adds the sub-micro level carbonyl iron dust that concentration is 2%～20% and the micron order carbonyl iron dust that concentration is 3%～15%, and the antirust agent that the dispersant that addition concentration is 3%～15%, concentration are 1%～6% and concentration are the stabilizer of 2%～10%, pass through vibration of ultrasonic wave 5～30 minutes after being sufficiently stirred for, form magnetic flow liquid；
5) pouring in cannelure by magnetic flow liquid, magnetic flow liquid is formed without repairing magnetorheological emery wheel block under the magnetic rheology effect of cylindrical permanent magnet ferrum；
6) end face grinding machine spindle and work spindle are started, face grinding machine main shaft drives self-training magnetic rheologic flexible buffing wheel to rotate with 50rpm～5000rpm speed, internal gear is driven to rotate under the planetary gear effect with the external gear of emery wheel interface, internal gear is rotated by synchronous rotary gear driven rotating shaft and cylindrical permanent magnet ferrum, the cylindrical permanent magnet ferrum of synchronous axial system makes magnetic fidle of end real-time change, making to be formed without the magnetorheological emery wheel block of finishing to review one's lessons by oneself rectification change flexible polishing emery wheel block, work spindle drives workpiece to rotate with 0rpm～500rpm speed；
7) surface of the work material realizes grinding and polishing removal under the rotation of the constant voltage shear action and workpiece self of reviewing one's lessons by oneself rectification change flexible polishing emery wheel block, it is thus achieved that ultra-smooth is without sub-surface damage surface.
The self-training magnetic rheologic flexible buffing wheel of the present invention, the method that magnetic pole rotates is adopted to make adjacent magnetic poles line of force generation real-time change, thus static magnetic field is changed into dynamic magnetic field, can force without repair magnetorheological emery wheel block be changed into review one's lessons by oneself that rectification becomes flexible polishing emery wheel block and realize abrasive material update from the block-shaped real-time recovery of sharp and emery wheel, thoroughly solve without in the finishing positive weighlock gap course of processing of magnetorheological emery wheel block due under the stickiness of magnetic flow liquid and magnetic action deformation and cannot recover thus losing the key problem of the tonnage to workpiece.The present invention adopts the rotary motion of emery wheel directly to drive the internal gear in planetary gears to rotate dexterously, and the rotation by internal gear drives each magnetic pole synchronous axial system, and utilize labyrinth structure and trapezium structure to realize mechanical seal and relative sliding, thus obtain the compact structure suitable with tradition emery wheel.Another advantage of the present invention adopts dynamic magnetic field to realize the renewal of magnetic flow liquid and the renewal of abrasive material from sharp, need not adopt circulating device that magnetic flow liquid is updated and the course of processing need not be changed magnetic flow liquid, review one's lessons by oneself rectification become the abrasive material in flexible polishing emery wheel block there is appearance end effect should, tiny abrasive material and workpiece preferential contact can be realized, avoid the damage to workpiece of the coarse granule abrasive material, and review one's lessons by oneself rectification and become the shape energy real-time recovery of flexible polishing emery wheel block, be absent from the tradition wear problem of emery wheel block and abrasive grain and the unequal key issue of gas cell distribution.Thus adopt the obtainable surface of the work concordance of self-training magnetic rheologic flexible buffing wheel of the present invention good and high-quality workpiece without surface and sub-surface damage, and cost is low, it is especially suitable for the plane high efficiency ultra-smooth Even Grinding polishing of photoelectron/microelectronic substrates and optical element.Meanwhile, the lossless region of endless belt type when workpiece does not rotate in the use procedure of this device, can be processed, be suitable for the experimental studies such as the research Material Removal Mechanism of optical flat material and sub-surface damage detection.
Accompanying drawing explanation
Fig. 1 is self-training magnetic rheologic flexible buffing wheel complete section front view of the present invention.
Fig. 2 is the partial enlarged view of self-training magnetic rheologic flexible buffing wheel of the present invention.
Fig. 3 is self-training magnetic rheologic flexible buffing wheel A-A sectional view of the present invention.
Fig. 4 is self-training magnetic rheologic flexible buffing wheel top view of the present invention.
Fig. 5 is self-training magnetic rheologic flexible buffing wheel upward view of the present invention.
Fig. 6 is the self-training magnetic rheologic flexible buffing wheel of the present invention scheme of installation at face grinding machine.
Fig. 7 is that self-training magnetic rheologic flexible buffing wheel of the present invention is arranged on face grinding machine and forms the schematic diagram of stream change flexible polishing emery wheel block.
Fig. 8 is the polishing processing schematic diagram of self-training magnetic rheologic flexible buffing wheel of the present invention.
Fig. 9 is the B-B schematic diagram of Fig. 8.
Figure 10 is the magnetorheological emery wheel schematic diagram not possessing self-training function of the present invention.
nullIn figure: 1. retainer ring，2. trapezoidal seam，3. internal gear，4. outer nut，5. inner nut，6. bearing spacer，7. taper roll bearing，8. emery wheel ring，9. positioning cylinder，10. labyrinth seam，11. gear shaft，12. installation screwed hole，13. emery wheel interface，14. installation seam，15. cooperation seam，16. trip bolt，17. synchronous rotary gear，18. planetary gear，19. circlip for hole，20. deep groove ball bearing，21. circlip for shaft，22. flat key，23. trapezoidal sliding surface，24. boss，25. rotating shaft，26. cylindrical permanent magnet ferrum，27. abrasive wheel end face，28. face grinding machine main shaft，29. face grinding machine lathe bed，30. attachment screw，Ring is connected 31. fixing，32. review one's lessons by oneself rectification to become flexible polishing emery wheel block，33. cannelure，34. magnetic flow liquid，35. work spindle，36. workpiece，37. processing gap，38. without repairing magnetorheological emery wheel block.
Detailed description of the invention
Below in conjunction with drawings and Examples, the invention will be further described, but actual attainable technique is not limited to these embodiments:
Embodiment 1:
nullAs shown in Fig. 1～Fig. 5，A kind of self-training magnetic rheologic flexible buffing wheel of the present invention，Include retainer ring 1、Internal gear 3、Emery wheel ring 8、Gear shaft 11、Synchronous rotary gear 17、Planetary gear 18、Rotating shaft 25 and cylindrical permanent magnet ferrum 26，Wherein rotating shaft 25 is installed in emery wheel ring 8，Cylindrical permanent magnet ferrum 26 is installed in the through hole set by rotating shaft 25 lower end，Internal gear 3 is installed in the top of emery wheel ring 8，Retainer ring 1 is installed in the top of internal gear 3，And retainer ring 1 is fixed on lathe，Emery wheel interface 13 is installed in emery wheel ring 8 and the top of retainer ring 1，Emery wheel interface 13 is connected with emery wheel ring 8，Emery wheel interface 13 is provided with external gear，Gear shaft 11 is installed on emery wheel interface 13，Planetary gear 18 is installed on gear shaft 11，Synchronous rotary gear 17 is installed in the upper end of rotating shaft 25，Planetary gear 18 engages with the external gear set by emery wheel interface 13，Synchronous rotary gear 17 and planetary gear 18 engage with internal gear 3.Because fixing because of fixed ring 1, therefore the axis of planetary gear 18 is fixing, time emery wheel interface 13 rotates, emery wheel ring 8 and then rotates, and drive planetary gear 18 to rotate by the external gear set by emery wheel interface 13, the rotation of planetary gear 18 can drive internal gear 3 to rotate, and rotation and then the drive synchronous rotary gear 17 of internal gear 3 rotate.The external gear that above-mentioned emery wheel interface 13 is provided with and emery wheel interface 13 are integrally made, or external gear is individually made, more fixing with emery wheel interface 13 are connected.
In the present embodiment, above-mentioned emery wheel interface 13 is connected by trip bolt 16 with emery wheel ring 8.
In the present embodiment, above-mentioned rotating shaft 25 is bearing in emery wheel ring 8 by two pairs of taper roll bearings 7；Above-mentioned rotating shaft 25 is set with bearing spacer 6 between two pairs of taper roll bearings 7.Above-mentioned rotating shaft 25 is equiped with outer nut 4 and inner nut 5 in the end of taper roll bearing 7.
In the present embodiment, synchronous rotary gear 17 is installed by flat key 22 in the upper end of above-mentioned rotating shaft 25；Above-mentioned planetary gear 18 is bearing on gear shaft 11 by deep groove ball bearing 20.
In the present embodiment, above-mentioned emery wheel interface 13 lower end has installation seam 14, and emery wheel ring 8 upper end is installed seam 14 with emery wheel interface 13 lower end patch merga pass and realized location；Above-mentioned internal gear 3 coordinates installation with emery wheel ring 8 by the trapezoidal sliding surface 23 of internal gear 3 lower surface, retainer ring 1 coordinates installation with internal gear 3 by the trapezoidal seam 2 of internal gear 3 upper surface, in retainer ring 1, the bulge loop of upside is nested in emery wheel interface 13 lower-left end, gear shaft 11 upper end is threaded connection to be fixed in retainer ring 1, and the end of planetary gear 18 is fixed on gear shaft 11 by circlip for hole 19 and circlip for shaft 21.
In the present embodiment, above-mentioned retainer ring 1 upper end has multiple positioning cylinder 9, retainer ring 1 can rotate by emery wheel interface 13 relatively, waterproof construction labyrinth seam 10 is there is between retainer ring 1 and emery wheel interface 13, internal gear 3 can be relatively fixed ring 1 and emery wheel ring 8 rotates, the trapezoidal seam 2 of internal gear 3 upper surface and the trapezoidal sliding surface 23 of internal gear 3 lower surface have scratch-resistant material coating, it is achieved the mechanical seal of self-training magnetic rheologic flexible buffing wheel and sliding friction.
In the present embodiment, the magnetic fidle of end intensity of above-mentioned cylindrical permanent magnet ferrum 26 is more than 1000Gs, adjacent same magnetic pole or adjacent anti-magnetic pole are installed in the orthogonal array hole of emery wheel ring 8, it is equal that cylindrical permanent magnet ferrum 26 lower surface also exists gap and gap with the orthogonal array hole of emery wheel ring 8, the orthogonal array hole of emery wheel ring 8 and rotating shaft 25 matched in clearance, cylindrical permanent magnet ferrum 26 uniform close circle distribution.
In the present embodiment, above-mentioned emery wheel ring 8 lower end has boss 24, and boss surface is plane or cross groove face, and the distance of boss surface distance cylindrical permanent magnet ferrum 26 lower surface is 0.5mm～5mm.
In the present embodiment, above-mentioned emery wheel ring 8 and rotating shaft 25 adopt the diamagnetic materials such as rustless steel, duralumin, hard alumin ium alloy, copper alloy, pottery to make.
As shown in Figure 6, the grinding and polishing method of the self-training magnetic rheologic flexible buffing wheel of the present invention, comprise the steps:
1) structure according to the DMG-6011V single spindle ultraprecise precision face grinding machine lathe of LapmasterSFTCorp., designs self-training magnetic rheologic flexible buffing wheel structure as adaptive in Fig. 1～Fig. 5；
2) feature according to 4 inches of single crystal SiC substrate, the adjacent same magnetic pole of cylindrical permanent magnet ferrum 26 that magnetic field intensity is 5200Gs selected is installed in self-training magnetic rheologic flexible buffing wheel, adjusting rotating shaft (25) makes cylindrical permanent magnet ferrum 26 lower surface consistent to the distance of abrasive wheel end face 27, and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；
3) self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine main shaft 28 by emery wheel interface 13 and attachment screw 30, retainer ring 1 is fixed on face grinding machine lathe bed 29 by the positioning cylinder 9 in retainer ring 1 and the fixing ring 31 that connects；
4) workpiece 36 is clamped on work spindle 35 by vacuum suction, makes the workpiece center of circle near the locus circle that cylindrical permanent magnet ferrum 26 center of circle is formed, adjust face grinding machine main shaft 28 and make abrasive wheel end face 27 be 0.8mm to the processing gap 37 of workpiece surface；
5) by deionized water add concentration be 5% the diamond abrasive that particle diameter is 5 microns, concentration be 3% the diamond abrasive abrasive material that particle diameter is 0.5 micron, and deionized water adds the carbonyl iron dust that particle diameter is 0.5 micron that concentration is 3% and the carbonyl iron dust that particle diameter is 3.5 microns that concentration is 10%, and the antirust agent that the dispersant that addition concentration is 5%, concentration are 3% and concentration are the stabilizer of 3%, pass through vibration of ultrasonic wave 10 minutes after being sufficiently stirred for, form magnetic flow liquid 34；
5) as shown in Fig. 7～Fig. 9, being poured into by magnetic flow liquid 34 in cannelure 33, magnetic flow liquid is formed without repairing magnetorheological emery wheel block 38 under the magnetic rheology effect of cylindrical permanent magnet ferrum 26；
6) end face grinding machine spindle 28 and work spindle 35 are started, face grinding machine main shaft 28 drives self-training magnetic rheologic flexible buffing wheel to rotate with 1000rpm speed, internal gear 3 is driven to rotate under the effect of external gear set on planetary gear 18 with emery wheel interface 13, internal gear 3 axle 25 is rotated by synchronous rotary gear 17 and cylindrical permanent magnet ferrum 26 rotates, the cylindrical permanent magnet ferrum 26 of synchronous axial system makes magnetic fidle of end real-time change, make to be formed without the magnetorheological emery wheel block 38 of finishing to review one's lessons by oneself rectification change flexible polishing emery wheel block 32, work spindle 35 drives workpiece 36 to rotate with 200rpm speed；
7) workpiece 36 surfacing realizes grinding and polishing removal under the rotation of the constant voltage shear action and workpiece 36 self of reviewing one's lessons by oneself rectification change flexible polishing emery wheel block 32, through 25 minutes polishing processings, it is thus achieved that the ultra-smooth of Ra0.2nm is without sub-surface damage surface.
Embodiment 2:
As shown in Fig. 1～Fig. 5, a kind of self-training magnetic rheologic flexible buffing wheel of the present invention is identical with embodiment 1.
As shown in Figure 6, the grinding and polishing method of the self-training magnetic rheologic flexible buffing wheel of the present invention, comprise the steps:
1) structure of the VG401MKII grinding machine produced according to Okamoto company, designs self-training magnetic rheologic flexible buffing wheel structure as adaptive in Fig. 1～Fig. 5；
2) feature according to 6 inches of single crystalline Si substrates, the adjacent same magnetic pole of cylindrical permanent magnet ferrum 26 that magnetic field intensity is 3800Gs selected is installed in self-training magnetic rheologic flexible buffing wheel, adjusting rotating shaft 25 makes cylindrical permanent magnet ferrum 26 lower surface consistent to the distance of abrasive wheel end face 27, and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；
3) self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine main shaft 28 by emery wheel interface 13 and attachment screw 30, retainer ring 1 is fixed on face grinding machine lathe bed 29 by the positioning cylinder 9 in retainer ring 1 and the fixing ring 31 that connects；
4) workpiece 36 is clamped on work spindle 35 by vacuum suction, makes the workpiece center of circle near the locus circle that cylindrical permanent magnet ferrum 26 center of circle is formed, adjust face grinding machine main shaft 28 and make abrasive wheel end face 27 be 1mm to the processing gap 37 of workpiece surface；
5) by adding the alumina abrasive that particle diameter is 5 microns that concentration is 6% in deionized water, concentration is the cerium oxide abrasives abrasive material that particle diameter is 0.5 micron of 3% and the alumina abrasive abrasive material that particle diameter is 2 microns that concentration is 1%, and deionized water adds the carbonyl iron dust that particle diameter is 0.3 micron that concentration is 5% and the carbonyl iron dust that particle diameter is 3.5 microns that concentration is 10%, and the antirust agent that the dispersant that addition concentration is 4%, concentration are 3% and concentration are the stabilizer of 4%, pass through vibration of ultrasonic wave 15 minutes after being sufficiently stirred for, form magnetic flow liquid 34；
5) as shown in Fig. 7～Fig. 9, being poured into by magnetic flow liquid 34 in cannelure 33, magnetic flow liquid is formed without repairing magnetorheological emery wheel block 38 under the magnetic rheology effect of cylindrical permanent magnet ferrum 26；
6) end face grinding machine spindle 28 and work spindle 35 are started, face grinding machine main shaft 28 drives self-training magnetic rheologic flexible buffing wheel to rotate with 1500rpm speed, internal gear 3 is driven to rotate under planetary gear 18 with the effect of the external gear of emery wheel interface 13, internal gear 3 axle 25 is rotated by synchronous rotary gear 17 and cylindrical permanent magnet ferrum 26 rotates, the cylindrical permanent magnet ferrum 26 of synchronous axial system makes magnetic fidle of end real-time change, making to be formed without the magnetorheological emery wheel block 38 of finishing to review one's lessons by oneself rectification change flexible polishing emery wheel block 32, work spindle 35 drives workpiece 36 to rotate with 250rpm speed；
7) workpiece 36 surfacing realizes grinding and polishing removal under the rotation of the constant voltage shear action and workpiece 36 self of reviewing one's lessons by oneself rectification change flexible polishing emery wheel block 32, through 20 minutes polishing processings, it is thus achieved that the ultra-smooth of Ra0.28nm is without sub-surface damage surface.
Embodiment 3:
As shown in Fig. 1～Fig. 5, a kind of self-training magnetic rheologic flexible buffing wheel of the present invention is identical with embodiment 1.
As shown in Figure 6, the grinding and polishing method of the self-training magnetic rheologic flexible buffing wheel of the present invention, comprise the steps:
1) structure according to the DMG-6011V single spindle ultraprecise precision face grinding machine lathe of LapmasterSFTCorp., designs self-training magnetic rheologic flexible buffing wheel structure as adaptive in Fig. 1～Fig. 5；
2) feature according to 4 inches of monocrystalline sapphire substrates, the adjacent same magnetic pole of cylindrical permanent magnet ferrum 26 that magnetic field intensity is 4500Gs selected is installed in self-training magnetic rheologic flexible buffing wheel, adjusting rotating shaft 25 makes cylindrical permanent magnet ferrum 26 lower surface consistent to the distance of abrasive wheel end face 27, and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；
3) self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine main shaft 28 by emery wheel interface 13 and attachment screw 30, retainer ring 1 is fixed on face grinding machine lathe bed 29 by the positioning cylinder 9 in retainer ring 1 and the fixing ring 31 that connects；
4) workpiece 36 is clamped on work spindle 35 by vacuum suction, makes the workpiece center of circle near the locus circle that cylindrical permanent magnet ferrum 26 center of circle is formed, adjust face grinding machine main shaft 28 and make abrasive wheel end face 27 be 0.8mm to the processing gap 37 of workpiece surface；
5) by adding the diamond abrasive that particle diameter is 5 microns that concentration is 5% in deionized water, concentration is the diamond abrasive abrasive material that particle diameter is 0.5 micron of 3% and the diamond abrasive abrasive material that particle diameter is 3 microns that concentration is 1%, and deionized water adds the carbonyl iron dust that particle diameter is 0.3 micron that concentration is 5% and the carbonyl iron dust that particle diameter is 5 microns that concentration is 12%, and the antirust agent that the dispersant that addition concentration is 3%, concentration are 3% and concentration are the stabilizer of 4%, pass through vibration of ultrasonic wave 10 minutes after being sufficiently stirred for, form magnetic flow liquid 34；
5) as shown in Fig. 7～Fig. 9, being poured into by magnetic flow liquid 34 in cannelure 33, magnetic flow liquid is formed without repairing magnetorheological emery wheel block 38 under the magnetic rheology effect of cylindrical permanent magnet ferrum 26；
6) end face grinding machine spindle 28 and work spindle 35 are started, face grinding machine main shaft 28 drives self-training magnetic rheologic flexible buffing wheel to rotate with 1500rpm speed, internal gear 3 is driven to rotate under planetary gear 18 with the effect of the external gear of emery wheel interface 13, internal gear 3 axle 25 is rotated by synchronous rotary gear 17 and cylindrical permanent magnet ferrum 26 rotates, the cylindrical permanent magnet ferrum 26 of synchronous axial system makes magnetic fidle of end real-time change, making to be formed without the magnetorheological emery wheel block 38 of finishing to review one's lessons by oneself rectification change flexible polishing emery wheel block 32, work spindle 35 drives workpiece 36 to rotate with 0rpm speed；
7) workpiece 36 surfacing realizes grinding and polishing removal under the rotation of the constant voltage shear action and workpiece 36 self of reviewing one's lessons by oneself rectification change flexible polishing emery wheel block 32, through 40 minutes polishing processings, obtain the ultra-smooth of Ra0.2nm without sub-surface damage arc band-like surface, the band formed after polishing is carried out optical microscope detection and material removing rate detection, sets up the removal model of monocrystalline sapphire material.
Can be seen that from the above, a kind of self-training magnetic rheologic flexible buffing wheel of the present invention, the method that magnetic pole rotates is adopted to make adjacent magnetic poles line of force generation real-time change, thus static magnetic field is changed into dynamic magnetic field, can force without repair magnetorheological emery wheel block be changed into review one's lessons by oneself that rectification becomes flexible polishing emery wheel block and realize abrasive material update from the block-shaped real-time recovery of sharp and emery wheel, thoroughly solve and cannot recover thus losing the key problem (shown in Figure 10) of the tonnage to workpiece owing to deforming under the stickiness of magnetic flow liquid and magnetic action without in the finishing positive weighlock gap course of processing of magnetorheological emery wheel block.The present invention adopts the rotary motion of emery wheel directly to drive the internal gear in planetary gears to rotate dexterously, and the rotation by internal gear drives each magnetic pole synchronous axial system, and utilize labyrinth structure and trapezium structure to realize mechanical seal and relative sliding, thus obtain the compact structure suitable with tradition emery wheel.Another advantage of the present invention adopts dynamic magnetic field to realize the renewal of magnetic flow liquid and the renewal of abrasive material from sharp, need not adopt circulating device that magnetic flow liquid is updated and the course of processing need not be changed magnetic flow liquid, review one's lessons by oneself rectification become the abrasive material in flexible polishing emery wheel block there is appearance end effect should, tiny abrasive material and workpiece preferential contact can be realized, avoid the damage to workpiece of the coarse granule abrasive material, and review one's lessons by oneself rectification and become the shape energy real-time recovery of flexible polishing emery wheel block, be absent from the tradition wear problem of emery wheel block and abrasive grain and the unequal key issue of gas cell distribution.Thus adopt the obtainable surface of the work concordance of self-training magnetic rheologic flexible buffing wheel of the present invention good and high-quality workpiece without surface and sub-surface damage, and cost is low, it is especially suitable for the plane high efficiency ultra-smooth Even Grinding polishing of photoelectron/microelectronic substrates and optical element.Meanwhile, the lossless region of endless belt type when workpiece does not rotate in the use procedure of this device, can be processed, be suitable for the experimental studies such as the research Material Removal Mechanism of optical flat material and sub-surface damage detection.Visible, present inventive concept is ingenious, easy to use, working (machining) efficiency is high, and processing effect is good, and this emery wheel is never wornout, the effect of Poligrind can be realized with cheap price, be that one has the revolutionary efficient ultraprecise processing method of semiconductor chip/optical element.
Iting is noted that above-mentioned detailed description of the invention is described in detail just for the present invention, it should not be limitation of the present invention.To those skilled in the art, in the objective not necessarily departing from claim and scope, it is possible to have the change of various ways and details.
Claims (10)
- null1. a self-training magnetic rheologic flexible buffing wheel，It is characterized in that including retainer ring (1)、Internal gear (3)、Emery wheel ring (8)、Gear shaft (11)、Synchronous rotary gear (17)、Planetary gear (18)、Rotating shaft (25) and cylindrical permanent magnet ferrum (26)，Wherein rotating shaft (25) is installed in emery wheel ring (8)，Cylindrical permanent magnet ferrum (26) is installed in the through hole set by rotating shaft (25) lower end，Internal gear (3) is installed in the top of emery wheel ring (8)，Retainer ring (1) is installed in the top of internal gear (3)，And retainer ring (1) is fixed on lathe，Emery wheel interface (13) is installed in emery wheel ring (8) and the top of retainer ring (1)，Emery wheel interface (13) is connected with emery wheel ring (8)，Emery wheel interface (13) is provided with external gear，Gear shaft (11) is installed on emery wheel interface (13)，Planetary gear (18) is installed on gear shaft (11)，Synchronous rotary gear (17) is installed in the upper end of rotating shaft (25)，Planetary gear (18) engages with the external gear set by emery wheel interface (13)，Synchronous rotary gear (17) and planetary gear (18) engage with internal gear (3).
- 2. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that above-mentioned emery wheel interface (13) is connected by trip bolt (16) with emery wheel ring (8).
- 3. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that above-mentioned rotating shaft (25) is bearing in emery wheel ring (8) by two pairs of taper roll bearings (7)；Above-mentioned rotating shaft (25) is set with bearing spacer (6) between two pairs of taper roll bearings (7), and above-mentioned rotating shaft (25) is equiped with outer nut (4) and inner nut (5) in the end of taper roll bearing (7).
- 4. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that synchronous rotary gear (17) is installed by flat key (22) in the upper end of above-mentioned rotating shaft (25)；Above-mentioned planetary gear (18) is bearing on gear shaft (11) by deep groove ball bearing (20).
- 5. self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterized in that above-mentioned emery wheel interface (13) lower end has installation seam (14), emery wheel ring (8) upper end is installed seam (14) with emery wheel interface (13) lower end patch merga pass and is realized location；Above-mentioned internal gear (3) coordinates installation with emery wheel ring (8) by the trapezoidal sliding surface (23) of internal gear (3) lower surface, retainer ring (1) coordinates installation with internal gear (3) by the trapezoidal seam (2) of internal gear (3) upper surface, in retainer ring (1), the bulge loop of upside is nested in emery wheel interface (13) lower-left end, gear shaft (11) upper end is threaded connection to be fixed in retainer ring (1), and the end of planetary gear (18) is fixed on gear shaft (11) by circlip for hole (19) and circlip for shaft (21).
- 6. the self-training magnetic rheologic flexible buffing wheel according to any one of claim 1 to 5, it is characterized in that above-mentioned retainer ring (1) upper end has multiple positioning cylinder (9), retainer ring (1) can rotate by emery wheel interface (13) relatively, waterproof construction labyrinth seam (10) is there is between retainer ring (1) and emery wheel interface (13), internal gear (3) can be relatively fixed ring (1) and emery wheel ring (8) rotates, the trapezoidal seam (2) of internal gear (3) upper surface and the trapezoidal sliding surface (23) of internal gear (3) lower surface have scratch-resistant material coating, realize mechanical seal and the sliding friction of self-training magnetic rheologic flexible buffing wheel.
- 7. self-training magnetic rheologic flexible buffing wheel according to claim 6, it is characterized in that the magnetic fidle of end intensity of above-mentioned cylindrical permanent magnet ferrum (26) is more than 1000Gs, adjacent same magnetic pole or adjacent anti-magnetic pole are installed in the orthogonal array hole of emery wheel ring (8), it is equal that cylindrical permanent magnet ferrum (26) lower surface also exists gap and gap with the orthogonal array hole of emery wheel ring (8), the orthogonal array hole of emery wheel ring (8) and rotating shaft (25) matched in clearance, cylindrical permanent magnet ferrum (26) uniform circular is distributed.
- 8. self-training magnetic rheologic flexible buffing wheel according to claim 6, it is characterized in that above-mentioned emery wheel ring (8) lower end has boss (24), boss surface is plane or cross groove face, and the distance of boss surface distance cylindrical permanent magnet ferrum (26) lower surface is 0.5mm～5mm.
- 9. self-training magnetic rheologic flexible buffing wheel according to claim 6, it is characterised in that above-mentioned emery wheel ring (8) and rotating shaft (25) adopt rustless steel, duralumin, hard alumin ium alloy, copper alloy, ceramic making.
- 10. the grinding and polishing method of a self-training magnetic rheologic flexible buffing wheel according to claim 1, it is characterised in that comprise the steps:1) structure according to lathe, the self-training magnetic rheologic flexible buffing wheel structure that design is adaptive；2) feature according to processing object, the adjacent same magnetic pole of cylindrical permanent magnet ferrum (26) or the adjacent anti-magnetic pole of the magnetic field intensity selected are installed in self-training magnetic rheologic flexible buffing wheel, adjusting rotating shaft (25) makes cylindrical permanent magnet ferrum (26) lower surface consistent to the distance of abrasive wheel end face (27), and completes the integral installation of self-training magnetic rheologic flexible buffing wheel；3) self-training magnetic rheologic flexible buffing wheel is installed on face grinding machine main shaft (28) by emery wheel interface (13) and attachment screw (30), retainer ring (1) is fixed on face grinding machine lathe bed (29) by the positioning cylinder (9) in retainer ring (1) and the fixing ring (31) that connects；4) workpiece (36) is inhaled by vacuum or other modes are clamped on work spindle (35), make the workpiece center of circle near the locus circle that cylindrical permanent magnet ferrum (26) center of circle is formed, adjust face grinding machine main shaft (28) and make abrasive wheel end face (27) be 0.5～5mm to the processing gap (37) of workpiece surface；5) by adding at least one abrasive material in following three kinds of abrasive materials in deionized water, three kinds of abrasive materials are concentration respectively be 2%～15% micron order abrasive material, concentration is the submicron order abrasive material of 2%～15%, concentration is the nano-size abrasive materials of 2%～15%, and deionized water adds the sub-micro level carbonyl iron dust that concentration is 2%～20% and the micron order carbonyl iron dust that concentration is 3%～15%, and addition concentration is the dispersant of 3%～15%, concentration be 1%～6% antirust agent and concentration be the stabilizer of 2%～10%, vibration of ultrasonic wave is passed through 5～30 minutes after being sufficiently stirred for, form magnetic flow liquid (34)；5) pouring in cannelure (33) by magnetic flow liquid (34), magnetic flow liquid is formed without repairing magnetorheological emery wheel block (38) under the magnetic rheology effect of cylindrical permanent magnet ferrum (26)；6) end face grinding machine spindle (28) and work spindle (35) are started, face grinding machine main shaft (28) drives self-training magnetic rheologic flexible buffing wheel to rotate with 50rpm～5000rpm speed, internal gear (3) is driven to rotate under the planetary gear (18) effect with the external gear of emery wheel interface (13), internal gear (3) axle (25) is rotated by synchronous rotary gear (17) and cylindrical permanent magnet ferrum (26) rotates, the cylindrical permanent magnet ferrum (26) of synchronous axial system makes magnetic fidle of end real-time change, make to be formed without the magnetorheological emery wheel block (38) of finishing to review one's lessons by oneself rectification change flexible polishing emery wheel block (32), work spindle (35) drives workpiece (36) to rotate with 0rpm～500rpm speed；7) workpiece (36) surfacing realizes grinding and polishing removal under the rotation of the constant voltage shear action and workpiece (36) self of reviewing one's lessons by oneself rectification change flexible polishing emery wheel block (32), it is thus achieved that ultra-smooth is without sub-surface damage surface.
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