CN205817564U - A kind of cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity - Google Patents

Abstract

This utility model embodiment discloses a kind of cluster dynamic magnetic field and controls the double-sided polisher of polishing pad rigidity, inconsistent and cause the uneven problem of work pieces process for solving in conventional processes relative velocity between workpiece diverse location and polishing pad.In this utility model embodiment, a kind of cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity, including: described stiffness variable cluster magnetic control polishing pad generating mechanism includes that symmetrically arranged first magnetic field occurs block and the second magnetic field that block occurs；Described first magnetic field occurs block and the second magnetic field to occur block all to include: housing, beat main shaft, eccentric cam shaft, Magnet mounting seat, permanent magnet and motor；Described workpiece quick clamping mechanism includes work nest, clamping plate, connecting rod, hinge plate, fixing hinge, square magnet, electrician's soft iron block, annular cast iron and bar permanent magnet；Described workpiece motion s drive mechanism includes a bracer, crossbeam, horizontal linear motor, vertical beam and vertical line motor.

Description

A kind of cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity

Technical field

This utility model relates to a kind of cluster dynamic magnetic field and controls the double-sided polisher of polishing pad rigidity, is particularly suitable for The plane planarization processing of photoelectron/semiconductor microelectronics substrate and optical element, belongs to Ultraprecision Machining field.

Background technology

With integrated circuit (IC) and opto-electronic device be fabricated to represent microelectronics and photoelectron manufacture be electronic information produce The core of industry, the Ye Shi world today is most hotly competitive, develop the most rapid industry.Monocrystal silicon (Si), monocrystalline germanium (Ge), GaAs (GaAs), monocrystalline silicon carbide (SiC) and sapphire (Al₂O₃) etc. as integrated power electronic device and the substrate of opto-electronic device Material, it is desirable to there is super smooth, ultra-smooth (roughness Ra reaches below 0.3nm), zero defect and not damaged surface, crudy Directly decide the height of its using value and the quality of device performance.Equally, at optical field, optical lens and reflecting mirror etc. One of core parts as optics, will reach good optical property, and its surface accuracy needs to reach ultra-smooth degree (roughness Ra reaches below 1nm), surface figure accuracy also has higher requirement (form accuracy reaches less than 0.5 micron).

At present, the planarization of optical flat element and semiconductor chip is processed, the most still use traditional grinding, end Face accurate grinding, Ultraprecise polished, chemically mechanical polishing and MRF etc..Wherein, Technique of Magnetorheological Finishing (Magnetorheological finishing, MRF) is the nineties in 20th century by KORDONSKI and partner thereof by electromagnetism A kind of novel optical surface processing method that, hydrodynamics, analytical chemistry, process technology etc. combine and propose, The advantage having that polishing effect is good, not producing subsurface damage, be suitable for complex surface processing etc. not available for tradition polishing, sends out Generated is a kind of revolutionary optical surface processing method, is particularly suitable for the Ultra-precision Turning of axisymmetric aspheric surface, is widely used in The last manufacturing procedure of massive optics, semiconductor wafer, LED-baseplate, display panels etc..But use magnetorheological at present When flat work pieces is processed by finishing method, the magnetorheological lathe of various models mainly developed with QED company of the U.S., its principle Being that workpiece is placed in above a circular arc polishing disk, the spill gap formed between surface of the work and polishing disk, below polishing disk Arrange that an adjustable electromagnet pole of magnetic induction or permanent magnet pole make spill gap location form high intensity gradient magnetic , flexible projection " the polishing satin that magnetic flow liquid is formed when moving near the space of workpiece and polishing disk formation with polishing disk Band ", remove surface of the work material by " polishing ribbon ".On this basis, foreign scholar have also developed the magnetorheological processing of bulb Technology (BEMRF, ball end magnetorheological finishing), magnetorheological abrasive flow machining (MRAFF, Magnetorheological abrasive flow finishing) and magnetic coupling fluid polishing (MCF, magnetic Compound fluid slurry polishing) etc. new technique, the Ultra-precision Turning of photoelectric crystal substrate is all achieved very Good processing effect.But said method all removes surface of the work material, " polishing ribbon " and surface of the work by " polishing ribbon " Belong to " speckle " localized contact, can only sweep along surface of the work track according to certain rules by controlling " speckle " when processing flat work pieces Retouching the processing that could realize whole surface, track scanning process needs the substantial amounts of time, cause that efficiency is low, machining shape precision not Easily ensure, and current MRF processing report is limited only to workpiece is carried out single-sided process.

Utility model content

This utility model embodiment provides a kind of cluster dynamic magnetic field and controls the double-sided polisher of polishing pad rigidity, logical Overregulate flexible polishing pad rigidity and realize the workpiece two-sided rough polishing overall process to finishing polish, can solve the problem that tradition is processed simultaneously In journey, the relative velocity between workpiece diverse location and polishing pad is inconsistent and cause the uneven problem of work pieces process.

A kind of cluster dynamic magnetic field that the embodiment of the present invention provides controls the double-sided polisher of polishing pad rigidity, including: Stiffness variable cluster magnetic control polishing pad generating mechanism, workpiece quick clamping mechanism and workpiece motion s drive mechanism；

Described stiffness variable cluster magnetic control polishing pad generating mechanism includes that symmetrically arranged first magnetic field occurs block and second There is block in magnetic field；Described first magnetic field occurs block and the second magnetic field to occur block all to include: housing, beat main shaft, eccentric cam shaft, Magnet mounting seat, permanent magnet and motor；

Even number permanent magnet one end is arranged in the Magnet mounting seat with even arrays hole, and the other end is installed on eccentric convex In the end face of wheel shaft；The big end of beat main shaft is connected with eccentric cam shaft, and the axle head of beat main shaft is fastened on housing；Electricity Machine is fixed on housing, drives described beat main axis by drive mechanism；

Described first magnetic field occur block and the second magnetic field to occur block under the described drive moving towards mechanism before and after the most in opposite directions Motion；

Described workpiece quick clamping mechanism includes that work nest, clamping plate, connecting rod, hinge plate, fixing hinge, square magnet, electrician are soft Iron block, annular cast iron and bar permanent magnet；

Described work nest is arranged at described first magnetic field and occurs block and the second magnetic field to occur between block, forms an appearance in the middle part of it Put the processing space of workpiece；The two ends of described work nest are equipped with clamping plate, and the lateral surface of described clamping plate is be arranged in parallel by two Connecting rod be flexibly connected with the inwall of described work nest；The described connecting rod that described work nest inwall, described clamping plate and two are corresponding Between form parallelogram；Clamp described in stretching into described processing space for circular ring between described clamping plate both ends of the surface Workpiece, described clamping plate one end is flexibly connected with one end of hinge plate, and the other end of described hinge plate is by hinges and fixing hinge One end connects；The other end of described fixing hinge is fixing with the square protective jacket being provided with described square magnet to be connected；Two pieces of electricians Soft iron block is arranged on the two ends of described work nest, mates setting with two described square magnets；Described electrician's soft iron block is by Huang Copper connects the cuboid in the middle of with cylindrical hole, is provided with described annular cast iron in cylindrical hole, and described bar permanent magnet is pacified It is loaded in described annular cast iron；

Described workpiece motion s drive mechanism includes a bracer, crossbeam, horizontal linear motor, vertical beam and vertical line electricity Machine；Prop up bracer to be symmetrically positioned in above the base of described double-sided polisher, be arranged above the horizontal linear motor two ends of crossbeam Being fixed on the top of a bracer, described crossbeam two ends are installed with vertical beam, and described vertical beam is provided with vertical line electricity Machine, described work nest left and right sides are fixed on described vertical line motor.

Alternatively, move towards mechanism described in include: translation linear electric motors, accurate the two-sided rack and two accurate single cogs Bar；

Described translation linear electric motors are arranged on above described base, and translation linear electric motors are provided with the precision of symmetrical structure The two-sided rack, accurate the two-sided rack both sides are engaged by gear and two accurate single-side racks respectively；Two described accurate one sides Tooth is installed on base by the line slideway of fore-and-aft direction, and is respectively arranged in the both sides of described accurate the two-sided rack；

Described first magnetic field occur block and the second magnetic field occur the housing of block respectively with described accurate the two-sided rack and two The connection of described accurate single-side rack.

Alternatively, described drive mechanism includes small pulley, big belt wheel, little flat key, big flat key and V-type band；

Described small pulley and big belt wheel are fixed on the motor shaft of described motor and described by little flat key and big flat key respectively On beat main shaft, connected by described V-type band between small pulley and big belt wheel.

Alternatively, the axle end bearing position of beat main shaft also exists spindle eccentricity away from, the little-end bearing position of eccentric cam shaft Putting and there is camshaft eccentric throw, described spindle eccentricity is away from equal with the numerical value of camshaft eccentric throw, and eccentric direction is contrary.

Alternatively, the magnetic field intensity of described permanent magnet is between 1000Gs～5500Gs, and the magnetic field intensity of square magnet exists Between 200Gs～1200Gs, the magnetic field intensity of bar permanent magnet, between 2000Gs～4000Gs, is installed on same described magnetic Between the cylindrical magnet ferrum of ferrum mounting seat is adjacent, heteropole distribution, is arranged on the cylindrical magnet ferrum of different described Magnet mounting seat The most in correspondence with each other, and incorgruous close to short magnetic pole.

Alternatively, described workpiece quick clamping mechanism also includes the circular retainer for placing workpiece, and is arranged on Intermeshing left gear, right gear, gear and lower gear around described retainer and with the arc-shaped edges of described retainer；

Described left gear, right gear, gear and lower gear are arranged in described work nest, wherein, described left gear and Described right gear is symmetrically installed, and described gear and described lower gear are symmetrically installed；

In described left gear, right gear, gear and lower gear, at least one is connected with motor.

A kind of cluster dynamic magnetic field that the embodiment of the present invention provides controls the twin polishing method of polishing pad rigidity, is applied to Above-mentioned cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity, including:

Step one, according to the size of workpiece and material property, choose the described permanent magnet of corresponding magnetic field intensity, and adjustment bar The position of shape permanent magnet makes the pole orientation of bar permanent magnet vertical with square magnet；

Step 2, workpiece is positioned over work nest in and make the edge of work remove between clamping plate, regulation bar permanent magnet Position makes the pole orientation of bar permanent magnet consistent with square magnet pole orientation, and electrician's soft iron block is under bar permanent magnet effect Rapidly magnetization produces suction and sucks square magnet, thus by hinge plate, clamping plate, fixing hinge, connecting rod interaction under pull folder Plate produces clamping force and clamps described workpiece；

Step 3, by adding at least two abrasive material in following three kinds of abrasive materials in deionized water, three kinds of abrasive materials are respectively Be concentration be 3%～8% micron order abrasive material, concentration be 3%～10% submicron order abrasive material, concentration be 2%～10% In nano-size abrasive materials, and deionized water add concentration be 5%～20% sub-micro level carbonyl iron dust and concentration be 5%～25% Micron order carbonyl iron dust, and add the dispersant that concentration is 3%～15% and the antirust agent that concentration is 1%～6%, it is sufficiently stirred for Afterwards by vibration of ultrasonic wave 5～30 minutes, then selectively adding can be 1%～10% with the concentration of workpiece generation chemical reaction Chemical liquid, selectively add the catalyst that can facilitate workpiece and chemical liquid response speed, then by vibration of ultrasonic wave 2～ 10 minutes, form magnetic flow liquid；

Step 4, pour described magnetic flow liquid into work nest in make magnetic flow liquid cover workpiece, moved towards by described Mechanism's regulating magnet mounting seat end face is 0.5mm～10mm to the distance of both sides before and after work nest, and magnetic flow liquid is forming array Described permanent magnet effect under be cured as rapidly flexible polishing pad, the magnetic pole symmetrical structure that interlocks realizes polishing pad to workpiece Pressure balance；

Step 5, startup motor, drive beat main shaft to compel away from eccentric swing, the eccentric swing of beat main shaft around spindle eccentricity Make each eccentric cam shaft synchronous axial system together with cylindrical magnet ferrum, make the static-magnetic line of force of cylindrical magnet ferrum end face be changed into The dynamic magnetic line of force；

Step 6, startup horizontal linear motor and vertical line driven by motor work nest and workpiece motion s, make workpiece and magnetic The flexible polishing pad that rheology liquid is formed forms the plane relative motion of desired guiding trajectory, and the flexible polishing pad that magnetic flow liquid is formed is to work The surfacing of part and corrosion layer carry out machinery removal；

Step 7, pass through in the course of processing described in move towards mechanism's regulating magnet mounting seat end face to before and after work nest The distance of both sides becomes larger, and the flexible polishing pad rigidity promoting magnetic flow liquid to be formed is gradually lowered further, and reduction puts on The active force of workpiece, completes workpiece roughing to polish overall process；

Step 8, stop described horizontal linear motor, vertical line motor and described motor, the position of regulation bar permanent magnet Put the pole orientation making bar permanent magnet contrary with square magnet pole orientation, discharge and take out workpiece.

Alternatively, described workpiece is that glass substrate, single crystal SiC substrate, single crystalline Si substrate, sapphire substrate, polycrystalline are partly led Body substrate, ceramic substrate or metal substrate.

As can be seen from the above technical solutions, this utility model embodiment has the advantage that

This utility model cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity, first passes through and applies dexterously The magnetization of soft magnetic material, fast characteristic of demagnetizing and bar permanent magnet neutral magnetic field is the most weak and characteristic that magnetic field, two ends is extremely strong, Achieve the quick-clamping that there is the weak magnetic pole parallelogram clamping mechanism as introduction to workpiece in confined space；

Secondly this utility model innovatively use move towards magnetic field, mechanism controls both sides occur between block and workpiece away from From equal, when magnetic flow liquid enters in work nest, form bilateral equalization of pressure and to abrasive particle behavior restraint and aggregation Viscoelasticity magnetic rheology effect polishing pad, it is ensured that workpiece twin polishing pad is stably carried out, and innovatively by eccentric cam structure Realize beat spindle swing, and the swing of eccentric main axis achieves numerous eccentric cam shaft with identical eccentric throw and rotates, from And the permanent magnet achieving the arrangement of numerous close-packed array makes the static-magnetic line of force of magnetic pole end face turn at synchronous axial system breakthroughly Becoming the mutual dynamic magnetic line of force, the dynamic magnetic line of force promotes flexible polishing pad DYNAMIC DISTRIBUTION that magnetic flow liquid formed to reduce flexibility The rigidity of polishing pad also promotes the recovery of flexible polishing pad performance；

By symmetry regulation stiffness variable cluster magnetic control polishing pad generating mechanism end face and surface of the work in the course of processing Distance, can realize time processing well and can complete the workpiece two-sided rough polishing overall process to finishing polish；Employing level is with vertical The mode of straight linear motor combination realizes the Comlex-locus of workpiece, it is to avoid in conventional processes workpiece diverse location with Relative velocity between polishing pad is inconsistent and causes the uneven major issue of work pieces process；

Meanwhile, the double-sided polisher of cluster dynamic magnetic field of the present utility model control polishing pad rigidity is applicable to common Magnetorheological twin polishing and magnetorheological chemical machinery twin polishing, required magnetic flow liquid only need to be filled into one minimum airtight In working region, it is greatly saved the cost of consumptive material.Visible, the surface of the work concordance using this utility model to be obtained is good, Working (machining) efficiency is high, and without surface and sub-surface damage, and low cost, the plane being especially suitable for major diameter optical element is efficient Rate ultra-smooth uniform polish is processed.

Accompanying drawing explanation

Fig. 1 is the double-sided polisher that in this utility model embodiment, a kind of cluster dynamic magnetic field controls polishing pad rigidity Front view；

Fig. 2 is the middle A-A cross-sectional view of Fig. 1 top view；

Fig. 3 is the middle B-B cross-sectional view of Fig. 1 top view；

Fig. 4 is the double-sided polisher that in this utility model embodiment, a kind of cluster dynamic magnetic field controls polishing pad rigidity Left view；

Fig. 5 is the pros of the double-sided polisher that a kind of cluster dynamic magnetic field controls polishing pad rigidity in the embodiment of the present invention Shape clamping workpiece schematic diagram；

Fig. 6 controls the circle of the double-sided polisher of polishing pad rigidity for a kind of cluster dynamic magnetic field in the embodiment of the present invention Shape clamping workpiece schematic diagram.

Detailed description of the invention

This utility model embodiment provides a kind of cluster dynamic magnetic field and controls the double-sided polisher of polishing pad rigidity, logical Overregulate flexible polishing pad rigidity and realize the workpiece two-sided rough polishing overall process to finishing polish, be used for solving in conventional processes Relative velocity between workpiece diverse location and polishing pad is inconsistent and causes the uneven problem of work pieces process.

For making utility model purpose of the present utility model, feature, the advantage can be the most obvious and understandable, below will knot Close the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment be clearly and completely described, Obviously, the embodiments described below are only a part of embodiment of this utility model, and not all embodiment.Based on this reality By the embodiment in novel, those of ordinary skill in the art obtained under not making creative work premise all other Embodiment, broadly falls into the scope of this utility model protection.

Embodiment 1:

As depicted in figs. 1 and 2, a kind of cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity, and its feature exists In including stiffness variable cluster magnetic control polishing pad generating mechanism, workpiece quick clamping mechanism and workpiece motion s drive mechanism, variable Rigidity cluster magnetic control polishing pad generating mechanism includes base (1), screw two (12), line slideway (14), screw three (15), essence Close single-side rack (16), gear (17), gear shaft (18), zanjon bearing (19), accurate the two-sided rack (21), connecting plate one (63), connecting plate two (64), grooved end cap (9), housing (11), screw four (28), spindle eccentricity are away from (29), rolling bearing (30), V-type band (31), small pulley (32), motor shaft (33), little flat key (34), bearing cover (35), bearing plate (36), spiral shell Nail five (37), screw six (38), Magnet mounting seat (46), cylindrical permanent magnet (47), screw seven (48), spacer (49), spiral shell Female (50), eccentric cam shaft (51), camshaft eccentric throw (52), big belt wheel (53), beat main shaft (54), big flat key (55), close Seal (56), bearing (ball) cover (57), radial-thrust bearing (58), motor (60), screw eight (61), protection cap (62), screw nine (65), deep groove ball bearing (66), wherein, as it is shown on figure 3, translation linear electric motors (20) are arranged on base by screw nine (65) (1), directly over, translation linear electric motors (20) are provided with the accurate the two-sided rack (21) of symmetrical structure, accurate the two-sided rack (21) Both sides are fixed on the gear (17) of gear shaft (18) with two by zanjon bearing (19) respectively and are engaged, and line slideway (14) is parallel It is symmetrically arranged in translation linear electric motors (20) both sides, and is fixed on base (1) top by screw three (15), be arranged in straight line and lead The accurate single-side rack (16) of rail (14) top just engages with gear (17), as in figure 2 it is shown, cylindrical magnet ferrum (47) one end It is installed in the end face cylindrical hole of eccentric cam shaft (51) by interference fit, there is the Magnet mounting seat (46) in even arrays hole Being fixed on bearing plate (36) by screw seven (48), eccentric cam shaft (51) passes through radial-thrust bearing (58), spacer (49), nut (50), bearing cover (35) and screw five (37) be fixed on bearing plate (36), beat main shaft (54) end greatly is logical Crossing deep groove ball bearing (66) to be connected with eccentric cam shaft (51), beat main shaft (54) axle head passes through rolling bearing (30) and housing (11) connecting and pass through screw four (28) and bearing (ball) cover (57) is fixed on housing (11), housing (11) passes through screw six (38) Being fixed on bearing plate (36), housing (11) lower section is entered with accurate single-side rack (16) top by connecting plate one (63) Row connects, and another housing (11) is linked with accurate the two-sided rack (21) top by connecting plate two (64), and motor (60) passes through spiral shell Nail eight (61) is fixed on housing (11) upper side, small pulley (32) and big belt wheel (53) respectively by little flat key (34) and big flat key (55) it is fixed on motor shaft (33) and beat main shaft (54), by V-type band (31) between small pulley (32) and big belt wheel (53) Connecting, protection cap (62) is fixed on housing (11) by screw two (12), and left gear (69) and right gear (70) are symmetrically installed In the internal left and right sides of work nest (10), gear (71) be arranged on the internal positive downside of grooved end cap (9) and motor (73) coupling, lower gear (72) is arranged on work nest (10) inner lower；Workpiece quick clamping mechanism include work nest (10), Square magnet (39), hinge plate (40), clamping plate (41), protective jacket (43), fixing hinge (44), connecting rod (45), electrician's soft iron block (23), Annular cast iron (24), bar permanent magnet (25), pyrite (26), rotating handles (8), wherein moveable hinge is passed through in connecting rod (45) one end Chain is fixed on work nest (10) inwall, and connecting rod (45) other end is linked with clamping plate (41) side by hinges, work nest (10) forming parallelogram between inwall, clamping plate (41) and two connecting rods (45), two set parallelogrames are respectively symmetrically layout In work nest (10) inwall both sides, clamping plate (41) one end is coupled with hinge plate (40) by hinges, the other end of hinge plate (40) Being linked with fixing hinge (44) by hinges, fixing hinge (44) other end welds together with square protective jacket (43), protection Being provided with square magnet (39) in set (43), two pieces of arches electrician's soft iron block (23) are by having circle in the middle of pyrite (26) connection one The cuboid of post holes, is provided with annular cast iron (24) in cylindrical hole, be provided with bar permanent magnet (25) peace of rotating handles (8) Being loaded in annular cast iron (24), the plane of electrician's soft iron block (23) is fixed on the upside of the two ends of work nest (10)；

As shown in Figure 1 and Figure 4, workpiece motion s drive mechanism includes base (1), bracer (2), horizontal linear motor (3), crossbeam (4), floor (5), screw one (6), vertical line motor (7), work nest (10), vertical beam (22), screw ten (67), wherein prop up bracer (2) and be symmetrically positioned in base (1) top, be arranged above horizontal linear motor (3) two ends of crossbeam (4) Being fixed on bracer (2) top by screw ten (67), crossbeam (4) two ends are by being welded with vertical beam by floor (5) (22), vertical beam (22) being provided with vertical line motor (7), work nest (10) left and right sides are fixed on vertical line motor (7) on.

Described cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity, it is characterised in that stiffness variable cluster The Magnet mounting seat (46) of magnetic control polishing pad generating mechanism is symmetrically arranged in both sides before and after work nest (10), by translation straight-line electric Machine (20) can be with the distance of both sides before and after adjusted in concert Magnet mounting seat (46) end face to work nest (10), it is ensured that two Magnet peaces Dress seat (46) keeps consistent to the distance of work nest (10).

Described cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity, it is characterised in that beat main shaft (54) Axle end bearing position there is spindle eccentricity away from (29), it is inclined that the little-end bearing position of eccentric cam shaft (51) also exists camshaft The heart is away from (52), and the spindle eccentricity numerical value away from (29) and camshaft eccentric throw (52) is equal, passes through small pulley during motor (60) work (32), big belt wheel (53) and V-type band (31) drive beat main shaft (54) around spindle eccentricity away from (29) eccentric swing, beat main shaft (54) eccentric swing forces each eccentric cam shaft (51) synchronous axial system together with cylindrical magnet ferrum (47), makes cylindrical magnet The static-magnetic line of force of ferrum (47) end face is changed into the dynamic magnetic line of force.

Described cluster dynamic magnetic field controls the double-sided polisher of polishing pad rigidity, it is characterised in that cylindrical magnet ferrum (47) magnetic field intensity between 1000Gs～5500Gs, the magnetic field intensity of square magnet (39) between 200Gs～1200Gs, The magnetic field intensity of bar permanent magnet (25), between 2000Gs～4000Gs, is installed on the cylinder of same Magnet mounting seat (46) Heteropole distribution between shape permanent magnet (47) is adjacent, the cylindrical magnet ferrum (47) being arranged on different Magnet mounting seat (46) is the most mutual Corresponding and incorgruous close to short magnetic pole.

The cluster dynamic magnetic field of the present embodiment controls in the double-sided polisher of polishing pad rigidity, this work nest (10), hinge Plate (40), clamping plate (41), fixing hinge (44), connecting rod (45), housing (11), bearing cover (35), bearing plate (36), Magnet peace Dress seat (46), spacer (49), nut (50), eccentric cam shaft (51), beat main shaft (54), grooved end cap (9) are rustless steel, magnesium The non-permeable material such as aluminium alloy and pottery, and work nest (10), hinge plate (40), clamping plate (41), fixing hinge (44), connecting rod (45) there is employing stainless steel material make with grooved end cap (9).

The cluster dynamic magnetic field of the present embodiment controls in the double-sided polisher of polishing pad rigidity, left gear (69), right tooth Wheel (70), gear (71), lower gear (72) parameter identical, and the distance between left gear (69) and right gear (70) is just The distance of gear (71) and lower gear (72) when installing equal to grooved end cap (9), left gear (69), right gear (70), on Gear (71), lower gear (72) can just be meshed with retainer (59).When motor (73) works, gear can be driven (71) rotating, gear (71) drives retainer (59) to rotate, and meanwhile, retainer (59) drives left gear (69), right tooth Wheel (70) and lower gear (72) rotate, thus drive workpiece (68) to rotate while retainer (59) rotates, it is achieved that workpiece Spinning campaign, it is thus possible to the part making clamping plate (41) block also can be machined into, it is achieved the impartial processing of workpiece (68).

The cluster dynamic magnetic field of the present embodiment controls in the double-sided polisher of polishing pad rigidity, and clamping plate (41) are for being Arc-shaped elongate configuration as shown in Figure 5 and Figure 6, owing to retainer (59) and workpiece (68) may stop clamping plate (41), because of And clamping plate (41) are designed to the elongate configuration of arc-shaped, it is ensured that clamping plate (41) use minimum area to ensure retainer (59) with effective clamping of workpiece (68), and the part outside making workpiece (68) be clamped is processed by magnetic flow liquid.

The cluster dynamic magnetic field of the present embodiment controls in the double-sided polisher of polishing pad rigidity, work nest (10) bottom surface Have bigger gradient to the right, the lower right corner has the tapped through hole coordinated with bolt (74).

Embodiment 2:

Cluster dynamic magnetic field described in employing controls the finishing method of the double-sided polisher of polishing pad rigidity to size Carrying out twin polishing pad step for the square TFT-LCD glass substrate of 100mm × 100mm is:

1) according to size and the material property of TFT-LCD glass substrate, design dynamic with the cluster that workpiece size matches Magnetic field controls the double-sided polisher of polishing pad rigidity, select a diameter of 10mm be highly 15mm, magnetic field intensity be 3800Gs's Cylindrical magnet ferrum (47) is installed in the double-sided polisher that cluster dynamic magnetic field controls polishing pad rigidity, rotates rotating handles (8) pole orientation making bar permanent magnet (25) is vertical with square magnet (39), and preparation and workpiece shapes and thickness adapt Circular retainer；

2) according to the shape of TFT-LCD glass substrate, acid-alkali-corrosive-resisting plastic production retainer (59), retainer are selected (59) thickness is about thickness of workpiece 2/3, and modulus is identical with left gear (69)；

3) as it is shown in figure 5, TFT-LCD glass substrate is fixed by retainer (59) and is positioned in the middle of circular retainer In the hole of coupling, and be positioned between the clamping plate (41) in work nest (10), make retainer (59) under gravity with left tooth Wheel (69), right gear (70) and lower gear (72) engage, rotate rotating handles (8) make bar permanent magnet (25) pole orientation and Square magnet (39) pole orientation is consistent, and arch electrician's soft iron block (23) magnetizes rapidly generation under bar permanent magnet (25) acts on Suction sucks square magnet (39), thus by hinge plate (40), clamping plate (41), fixing hinge (44), the interaction of connecting rod (45) Under pull clamping plate (41) to produce clamping force clamping TFT-LCD glass substrate and fixed retainer (59)；

4) micron order alumina abrasive and concentration by addition concentration in deionized water is 4% are the submicron of 3% Grade aluminum oxide abrasive material, adds the sub-micro level carbonyl iron dust that concentration is 8% and the micron order carbonyl iron that concentration is 5% in deionized water Powder, and add dispersant that concentration is 5% and concentration is the antirust agent of 2%, by vibration of ultrasonic wave 15 minutes after being sufficiently stirred for, It is subsequently adding and with the yellow fluid that concentration is 3% of TFT-LCD glass substrate generation chemical reaction, then vibration of ultrasonic wave 5 points can be passed through Clock, forms magnetic flow liquid (42)；

5) make magnetic flow liquid cover workpiece (68) in pouring magnetic flow liquid (42) into work nest (10), cover grooved end cap (9), startup translation linear electric motors (20) regulating magnet mounting seat (46) end face to the distance of work nest (10) both sides is front and back 2mm, magnetic flow liquid (42) is cured as rapidly flexible polishing pad under the effect of array cylindrical magnet ferrum (47), and magnetic pole interlocks right The structure claimed realizes the polishing pad pressure balance to workpiece (68)；

6) opening motor (73) drives gear (71) to rotate and drive fixed retainer (59) and workpiece (68) rotation Turn, simultaneously drive motor (60) work, under the effect of small pulley (32), big belt wheel (53) and V-type band (31), drive beat master Axle (54) is around spindle eccentricity away from (29) eccentric swing, and the eccentric swing of beat main shaft (54) forces each eccentric cam shaft (51) and circle Cylindricality permanent magnet (47) synchronous axial system together, makes the static-magnetic line of force of cylindrical magnet ferrum (47) end face be changed into dynamic magnetic force Line, the dynamic magnetic line of force promotes flexible polishing pad DYNAMIC DISTRIBUTION that magnetic flow liquid (42) formed to reduce the rigidity of flexible polishing pad also The recovery abrasive material promoting flexible polishing pad performance updates from sharp；

7) covering grooved end cap makes gear engage with circular retainer, starts motor and drives circular retainer and work Part rotates, and starts horizontal linear motor (3) and vertical line motor (7) drives work nest (10) and workpiece (68) to realize A Ji meter Moral plane motion, thus the flexible polishing pad that TFT-LCD glass substrate and magnetic flow liquid (42) are formed forms a complicated class Waterfall stream moves, and TFT-LCD glass baseplate surface material corrodes rapidly under yellow fluid effect, the flexibility that magnetic flow liquid (42) is formed Polishing pad realizes the machinery removal to corrosion layer and TFT-LCD glass baseplate surface material；

8) by starting translation linear electric motors (20) regulating magnet mounting seat (46) end face to work nest in the course of processing (10) before and after, the distance of both sides became larger 10mm from 2mm in 60 minutes, promoted the flexible throwing that magnetic flow liquid (42) is formed Light pad rigidity is gradually lowered, and reduces the active force putting on workpiece (68), completes TFT-LCD glass substrate roughing to polish Overall process；

9) stop horizontal linear motor (3) and vertical line motor (7), stop motor (60) and described motor, take Lower grooved end cap, rotates rotating handles (8) and makes pole orientation and square magnet (39) the pole orientation phase of bar permanent magnet (25) Instead, arch electrician soft iron block (23) magnetizes rapidly generation repulsive force promotion square magnet under bar permanent magnet (25) acts on (39), thus clamping plate (41) are promoted to beat by cutting with scissors under plate (40), clamping plate (41), the fixing interaction cutting with scissors (44), connecting rod (45) Open and discharge TFT-LCD glass substrate, take out the TFT-LCD glass substrate machined.

10) after completing processing, it is also possible to start translation linear electric motors (20) regulating magnet mounting seat (46) end face to work The distance making groove (10) both sides front and back is 10mm, unclamps bolt (74), and the magnetic flow liquid (42) that will complete processing discharges work Groove (10).

Embodiment 3:

The present embodiment with the difference of embodiment 2 is: the present embodiment is that the monocrystalline silicon substrate to a diameter of 100mm carries out two-sided Polishing, this utility model cluster dynamic magnetic field controls the finishing method of the double-sided polisher of polishing pad rigidity, including walking as follows Rapid:

1) according to size and the material property of monocrystalline silicon substrate, the cluster dynamic magnetic field control that design matches with workpiece size The double-sided polisher of polishing pad rigidity processed, selecting a diameter of 15mm is highly the cylinder of 4200Gs for 15mm, magnetic field intensity Permanent magnet (47) is installed in the double-sided polisher that cluster dynamic magnetic field controls polishing pad rigidity, rotates rotating handles (8) and makes The pole orientation of bar permanent magnet (25) is vertical with square magnet (39), prepares the circular guarantor adapted with workpiece shapes and thickness Hold frame；

2) according to the shape of monocrystalline silicon substrate, selecting acid-alkali-corrosive-resisting plastic production retainer (59), retainer (59) is thick Degree is about thickness of workpiece 2/3, and modulus is identical with left gear (69)；

3) as shown in Figure 6, monocrystalline silicon substrate fixed by retainer (59) and be positioned over circular retainer intermediate match Hole in, and be positioned between the clamping plate (41) in work nest (10), make retainer (59) under gravity with left gear (69), right gear (70) and lower gear (72) engagement, rotate rotating handles (8) and make pole orientation and the side of bar permanent magnet (25) Shape Magnet (39) pole orientation is consistent, and arch electrician's soft iron block (23) magnetizes rapidly to produce under bar permanent magnet (25) acts on inhales Power sucks square magnet (39), thus by under hinge plate (40), clamping plate (41), the fixing interaction cutting with scissors (44), connecting rod (45) Clamping plate (41) are pulled to produce clamping force clamping monocrystalline silicon substrate and fixed retainer (59)；

4) micron order cerium oxide abrasives and concentration by addition concentration in deionized water is 3% are the nanoscale of 2% Diamond abrasive, adds the sub-micro level carbonyl iron dust that concentration is 5% and the micron order carbonyl iron that concentration is 3% in deionized water Powder, and add dispersant that concentration is 4% and concentration is the antirust agent of 2%, by vibration of ultrasonic wave 10 minutes after being sufficiently stirred for, It is subsequently adding and with the acid solution that concentration is 2% of monocrystalline silicon substrate generation chemical reaction, then vibration of ultrasonic wave 5 points can be passed through Clock, forms magnetic flow liquid (42)；

5) make magnetic flow liquid cover workpiece (68) in pouring magnetic flow liquid (42) into work nest (10), cover grooved end cap (9), startup translation linear electric motors (20) regulating magnet mounting seat (46) end face to the distance of work nest (10) both sides is front and back 1mm, magnetic flow liquid (42) is cured as rapidly flexible polishing pad under the effect of array cylindrical magnet ferrum (47), and magnetic pole interlocks right The structure claimed realizes the polishing pad pressure balance to workpiece (68)；

6) opening motor (73) drives gear (71) to rotate and drive fixed retainer (59) and workpiece (68) rotation Turn, simultaneously drive motor (60) work, under the effect of small pulley (32), big belt wheel (53) and V-type band (31), drive beat master Axle (54) is around spindle eccentricity away from (29) eccentric swing, and the eccentric swing of beat main shaft (54) forces each eccentric cam shaft (51) and circle Cylindricality permanent magnet (47) synchronous axial system together, makes the static-magnetic line of force of cylindrical magnet ferrum (47) end face be changed into dynamic magnetic force Line, the dynamic magnetic line of force promotes flexible polishing pad DYNAMIC DISTRIBUTION that magnetic flow liquid (42) formed to reduce the rigidity of flexible polishing pad also The recovery and the abrasive material that promote flexible polishing pad performance update from sharp；

7) covering grooved end cap makes gear engage with circular retainer, starts motor and drives circular retainer and work Part rotates, and starts horizontal linear motor (3) and vertical line motor (7) drives work nest (10) and workpiece (68) to realize accurate spiral shell Rotation type plane motion, thus the flexible polishing pad that monocrystalline silicon substrate and magnetic flow liquid (42) are formed forms a complicated class waterfall Stream motion, monocrystalline silicon substrate surfacing corrodes rapidly under acid solution effect, the flexible polishing that magnetic flow liquid (42) is formed Pad the existing machinery removal to corrosion layer and monocrystalline silicon substrate surfacing；

8) by starting translation linear electric motors (20) regulating magnet mounting seat (46) end face to work nest in the course of processing (10) before and after, the distance of both sides became larger 5mm from 1mm in 30 minutes, promoted the flexible polishing that magnetic flow liquid (42) is formed Pad rigidity is gradually lowered, and reduces the active force putting on workpiece (68), completes monocrystalline silicon substrate roughing to polish overall process；

9) stop horizontal linear motor (3) and vertical line motor (7), stop motor (60) and described motor, take Lower grooved end cap, rotates rotating handles (8) and makes pole orientation and square magnet (39) the pole orientation phase of bar permanent magnet (25) Instead, arch electrician soft iron block (23) magnetizes rapidly generation repulsive force promotion square magnet under bar permanent magnet (25) acts on (39), thus clamping plate (41) are promoted to beat by cutting with scissors under plate (40), clamping plate (41), the fixing interaction cutting with scissors (44), connecting rod (45) Open and discharge monocrystalline silicon substrate, take out the monocrystalline silicon substrate machined.

10) after machining, it is also possible to start translation linear electric motors (20) regulating magnet mounting seat (46) end face to work The distance making groove (10) both sides front and back is 10mm, unclamps bolt (74), and the magnetic flow liquid (42) that will complete processing discharges work Groove (10).

Embodiment 4:

The present embodiment with the difference of embodiment 2 is: it is double that the present embodiment is that the single crystal SiC substrate to a diameter of 100mm is carried out Mirror polish, this utility model cluster dynamic magnetic field controls the finishing method of the double-sided polisher of polishing pad rigidity, including as follows Step:

1) according to size and the material property of single crystal SiC substrate, the cluster dynamic magnetic field that design matches with workpiece size Control the double-sided polisher of polishing pad rigidity, select a diameter of 15mm be highly 20mm, magnetic field intensity be the cylinder of 5200Gs Shape permanent magnet (47) is installed in the double-sided polisher that cluster dynamic magnetic field controls polishing pad rigidity, rotates rotating handles (8) The pole orientation making bar permanent magnet (25) is vertical with square magnet (39), the circle that preparation adapts with workpiece shapes and thickness Retainer；

2) according to the shape of single crystal SiC substrate, selecting acid-alkali-corrosive-resisting plastic production retainer (59), retainer (59) is thick Degree is about thickness of workpiece 2/3, and modulus is identical with left gear (69)；

3) as shown in Figure 6, single crystal SiC substrate fixed by retainer (59) and be positioned over circular retainer intermediate match Hole in, and be positioned between the clamping plate (41) in work nest (10), make retainer (59) under gravity with left gear (69), right gear (70) and lower gear (72) engagement, rotate rotating handles (8) and make pole orientation and the side of bar permanent magnet (25) Shape Magnet (39) pole orientation is consistent, and arch electrician's soft iron block (23) magnetizes rapidly to produce under bar permanent magnet (25) acts on inhales Power sucks square magnet (39), thus by under hinge plate (40), clamping plate (41), the fixing interaction cutting with scissors (44), connecting rod (45) Clamping plate (41) are pulled to produce clamping force clamping single crystal SiC substrate and fixed retainer (59)；

4) micron order diamond abrasive material and concentration by addition concentration in deionized water is 5% are the nanoscale of 3% Diamond abrasive, adds the sub-micro level carbonyl iron dust that concentration is 5% and the micron order carbonyl iron that concentration is 2% in deionized water Powder, and add dispersant that concentration is 3% and concentration is the antirust agent of 2%, by vibration of ultrasonic wave 10 minutes after being sufficiently stirred for, It is subsequently adding and with the ferric ion of single crystal SiC substrate generation Fenton's reaction, then vibration of ultrasonic wave can be passed through 2 minutes, form magnetic Rheology liquid (42)；

5) bolt on (74), in pouring magnetic flow liquid (42) into work nest (10), make magnetic flow liquid cover workpiece (68), Cover grooved end cap (9), start translation linear electric motors (20) regulating magnet mounting seat (46) end face to work nest (10) front and back two The distance of side is 0.5mm, and magnetic flow liquid (42) is cured as rapidly flexible polishing under the effect of array cylindrical magnet ferrum (47) Pad, the magnetic pole symmetrical structure that interlocks realizes the polishing pad pressure balance to workpiece (68)；

6) opening motor (73) drives gear (71) to rotate and drive fixed retainer (59) and workpiece (68) rotation Turn, simultaneously drive motor (60) work, under the effect of small pulley (32), big belt wheel (53) and V-type band (31), drive beat master Axle (54) is around spindle eccentricity away from (29) eccentric swing, and the eccentric swing of beat main shaft (54) forces each eccentric cam shaft (51) and circle Cylindricality permanent magnet (47) synchronous axial system together, makes the static-magnetic line of force of cylindrical magnet ferrum (47) end face be changed into dynamic magnetic force Line, the dynamic magnetic line of force promotes flexible polishing pad DYNAMIC DISTRIBUTION that magnetic flow liquid (42) formed to reduce the rigidity of flexible polishing pad also The recovery and the abrasive material that promote flexible polishing pad performance update from sharp；

7) covering grooved end cap makes gear engage with circular retainer, starts motor and drives circular retainer and work Part rotates, and starts horizontal linear motor (3) and vertical line motor (7) drives work nest (10) and workpiece (68) to realize presetting rail The plane relative motion of mark, thus the flexible polishing pad that formed of single crystal SiC substrate and magnetic flow liquid (42) formed one complicated Class waterfall stream moves, and single crystal SiC substrate surfacing corrodes rapidly under the Fenton effect of ferric ion, magnetic flow liquid (42) The flexible polishing formed pads the existing machinery removal to corrosion layer and single crystal SiC substrate surfacing；

8) by starting translation linear electric motors (20) regulating magnet mounting seat (46) end face to work nest in the course of processing (10) before and after, the distance of both sides became larger 5mm from 0.5mm in 60 minutes, promoted the flexible throwing that magnetic flow liquid (42) is formed Light pad rigidity is gradually lowered, and reduces the active force putting on workpiece (68), completes single crystal SiC substrate roughing to the full mistake of polish Journey；

9) stop horizontal linear motor (3) and vertical line motor (7), stop motor (60) and described motor, take Lower grooved end cap, rotates rotating handles (8) and makes pole orientation and square magnet (39) the pole orientation phase of bar permanent magnet (25) Instead, arch electrician soft iron block (23) magnetizes rapidly generation repulsive force promotion square magnet under bar permanent magnet (25) acts on (39), thus clamping plate (41) are promoted to beat by cutting with scissors under plate (40), clamping plate (41), the fixing interaction cutting with scissors (44), connecting rod (45) Open and discharge single crystal SiC substrate, take out the single crystal SiC substrate machined.

10) after machining, translation linear electric motors (20) regulating magnet mounting seat (46) end face is started to work nest (10) before and after, the distance of both sides is 10mm, unclamps bolt (74), and the magnetic flow liquid (42) completing processing is discharged work nest (10)。

Embodiment 5:

The present embodiment with the difference of embodiment 2 is: it is double that the present embodiment is that the electronic ceramic substrate to a diameter of 100mm is carried out Mirror polish, this cluster dynamic magnetic field controls the finishing method of the double-sided polisher of polishing pad rigidity, comprises the steps:

1) according to size and the material property of electronic ceramic substrate, the stiffness variable cluster that design matches with workpiece size Magnetic control waterfall stream double-sided polisher, select a diameter of 15mm highly for 15mm, magnetic field intensity be 4200Gs cylinder forever Magnet (47) is installed in stiffness variable cluster magnetic control waterfall stream double-sided polisher, rotates rotating handles (8) and makes bar shaped permanent magnetism The pole orientation of ferrum (25) is vertical with square magnet (39), the circular retainer that preparation adapts with workpiece shapes and thickness；

2) according to the shape of electronic ceramic substrate, selecting epoxy resin to make retainer (59), retainer (59) thickness is about For thickness of workpiece 2/3, and modulus is identical with left gear (69)；

3) as shown in Figure 6, electronic ceramic substrate fixed by retainer (59) and be positioned over middle of circular retainer In the hole joined, and be positioned between the clamping plate (41) in work nest (10), make retainer (59) under gravity with left gear (69), right gear (70) and lower gear (72) engagement, rotate rotating handles (8) and make pole orientation and the side of bar permanent magnet (25) Shape Magnet (39) pole orientation is consistent, and arch electrician's soft iron block (23) magnetizes rapidly to produce under bar permanent magnet (25) acts on inhales Power sucks square magnet (39), thus by under hinge plate (40), clamping plate (41), the fixing interaction cutting with scissors (44), connecting rod (45) Clamping plate (41) are pulled to produce clamping force clamping electronic ceramic substrate and fixed retainer (59)；

4) micrometer silicon carbide silicon abrasive material and concentration by addition concentration in deionized water is 3% are the nano-scale carbon of 2% SiClx abrasive material, adds the sub-micro level carbonyl iron dust that concentration is 5% and the micron order carbonyl iron dust that concentration is 3% in deionized water, And dispersant and the concentration that addition concentration is 4% is the antirust agent of 2%, pass through vibration of ultrasonic wave 10 minutes after being sufficiently stirred for, shape Become magnetic flow liquid (42)；

5) bolt on (74), in pouring magnetic flow liquid (42) into work nest (10), make magnetic flow liquid cover workpiece (68), Cover grooved end cap (9), start translation linear electric motors (20) regulating magnet mounting seat (46) end face to work nest (10) front and back two The distance of side is 1.2mm, and magnetic flow liquid (42) is cured as rapidly flexible polishing under the effect of array cylindrical magnet ferrum (47) Pad, the magnetic pole symmetrical structure that interlocks realizes the polishing pad pressure balance to workpiece (68)；

6) opening motor (73) drives gear (71) to rotate and drive fixed retainer (59) and workpiece (68) rotation Turn, simultaneously drive motor (60) work, under the effect of small pulley (32), big belt wheel (53) and V-type band (31), drive beat master Axle (54) is around spindle eccentricity away from (29) eccentric swing, and the eccentric swing of beat main shaft (54) forces each eccentric cam shaft (51) and circle Cylindricality permanent magnet (47) synchronous axial system together, makes the static-magnetic line of force of cylindrical magnet ferrum (47) end face be changed into dynamic magnetic force Line, the dynamic magnetic line of force promotes flexible polishing pad DYNAMIC DISTRIBUTION that magnetic flow liquid (42) formed to reduce the rigidity of flexible polishing pad also The performance recovery and the abrasive material that promote flexible polishing pad update from sharp；

7) covering grooved end cap makes gear engage with circular retainer, starts motor and drives circular retainer and work Part rotates, and starts horizontal linear motor (3) and vertical line motor (7) drives work nest (10) and workpiece (68) to realize accurate spiral shell Rotation type plane motion, thus the flexible polishing pad that electronic ceramic substrate and magnetic flow liquid (42) are formed forms a complicated class waterfall Cloth stream moves, and the flexible polishing that magnetic flow liquid (42) is formed pads the existing machinery removal to electronic ceramic substrate surfacing；

8) by starting translation linear electric motors (20) regulating magnet mounting seat (46) end face to work nest in the course of processing (10) before and after, the distance of both sides became larger 7mm from 1.2mm in 30 minutes, promoted the flexible throwing that magnetic flow liquid (42) is formed Light pad rigidity is gradually lowered, and reduces the active force putting on workpiece (68), completes electronic ceramic substrate roughing complete to polish Process；

9) stop horizontal linear motor (3) and vertical line motor (7), stop motor (60) and stop motor (73), open grooved end cap (9), rotate rotating handles (8) and make pole orientation and the square magnet of bar permanent magnet (25) (39) pole orientation is contrary, and arch electrician's soft iron block (23) magnetizes rapidly generation repulsion under bar permanent magnet (25) acts on and tries hard to recommend Dynamic square magnet (39), thus by promoting under hinge plate (40), clamping plate (41), the fixing interaction cutting with scissors (44), connecting rod (45) Clamping plate (41) are opened and are discharged electronic ceramic substrate, take out the electronic ceramic substrate machined.

10) start translation linear electric motors (20) regulating magnet mounting seat (46) end face to work nest (10) both sides front and back away from From for 10mm, unclamping bolt (74), the magnetic flow liquid (42) that will complete processing discharges work nest (10).

Cluster dynamic magnetic field of the present utility model controls the double-sided polisher of polishing pad rigidity, dexterously should first pass through By the magnetization of soft magnetic material, fast characteristic of demagnetizing with bar permanent magnet neutral magnetic field is the most weak and spy that magnetic field, two ends is extremely strong Property, it is achieved that there is the weak magnetic pole parallelogram clamping mechanism as the introduction quick-clamping to workpiece in confined space； Secondly this utility model innovatively uses the magnetic pole symmetrical structure that interlocks to realize the polishing pad pressure balance to workpiece, and passes through Eccentric cam structure realizes beat spindle swing, and the swing of eccentric main axis to achieve numerous bias with identical eccentric throw convex Wheel shaft rotates, thus the permanent magnet achieving the arrangement of numerous close-packed array makes the quiet of magnetic pole end face breakthroughly at synchronous axial system The state magnetic line of force is changed into the mutual dynamic magnetic line of force, and the dynamic magnetic line of force promotes the flexible polishing pad DYNAMIC DISTRIBUTION that magnetic flow liquid is formed And reduce the rigidity of flexible polishing pad and promote the recovery of flexible polishing pad performance；The course of processing is passed through symmetry regulation variable just Degree cluster magnetic control polishing pad generating mechanism end face and the distance of surface of the work, can realize time processing well and can complete workpiece Two-sided rough polishing is to the overall process of finishing polish；The mode using horizontal and vertical linear motor combination realizes the compound movement of workpiece Track, it is to avoid in conventional processes, the relative velocity between workpiece diverse location and polishing pad is inconsistent and cause workpiece to add The major issue that work is uneven；Meanwhile, cluster dynamic magnetic field of the present utility model controls the double-sided polisher of polishing pad rigidity Being applicable to common magnetorheological twin polishing and magnetorheological chemical machinery twin polishing, required magnetic flow liquid only need to be filled into one In individual minimum airtight working region, it is greatly saved the cost of consumptive material.Visible, use the workpiece table that this utility model is obtained Face concordance is good, and working (machining) efficiency is high, and without surface and sub-surface damage, and low cost, it is especially suitable for major diameter optics unit The plane high efficiency ultra-smooth uniform polish processing of part.

Above a kind of cluster dynamic magnetic field provided by the utility model is controlled the double-sided polisher of polishing pad rigidity It is described in detail with method, for one of ordinary skill in the art, according to the thought of this utility model embodiment, at tool All will change on body embodiment and range of application, in sum, this specification content should not be construed as this practicality Novel restriction.

Claims (6)

1. the double-sided polisher of a cluster dynamic magnetic field control polishing pad rigidity, it is characterised in that including: stiffness variable collection Group's magnetic control polishing pad generating mechanism, workpiece quick clamping mechanism and workpiece motion s drive mechanism；

Described stiffness variable cluster magnetic control polishing pad generating mechanism includes that symmetrically arranged first magnetic field occurs block and the second magnetic field There is block；Described first magnetic field occurs block and the second magnetic field to occur block all to include: housing, beat main shaft, eccentric cam shaft, Magnet Mounting seat, permanent magnet and motor；

Even number permanent magnet one end is arranged in the Magnet mounting seat with even arrays hole, and the other end is installed on eccentric cam shaft End face in；The big end of beat main shaft is connected with eccentric cam shaft, and the axle head of beat main shaft is fastened on housing；Motor is solid It is scheduled on housing, drives described beat main axis by drive mechanism；

Described first magnetic field occur block and the second magnetic field to occur block under the drive moving towards mechanism before and after move toward one another；

Described workpiece quick clamping mechanism include work nest, clamping plate, connecting rod, hinge plate, fixing hinge, square magnet, electrician's soft iron block, Annular cast iron and bar permanent magnet；

Described work nest is arranged at described first magnetic field and occurs block and the second magnetic field to occur between block, forms one and house work in the middle part of it The processing space of part；The two ends of described work nest are equipped with clamping plate, and the lateral surface of described clamping plate passes through two companies be arrangeding in parallel Bar is flexibly connected with the inwall of described work nest；Between the described connecting rod that described work nest inwall, described clamping plate and two are corresponding Composition parallelogram；Described work is clamped in stretching into described processing space for circular ring between described clamping plate both ends of the surface Part, described clamping plate one end is flexibly connected with one end of hinge plate, and the other end of described hinge plate is by hinges and the one of fixing hinge End connects；The other end of described fixing hinge is fixing with the square protective jacket being provided with described square magnet to be connected；Two pieces of electricians are soft Iron block is arranged on the two ends of described work nest, mates setting with two described square magnets；Described electrician's soft iron block passes through pyrite Connecting the cuboid in the middle of with cylindrical hole, be provided with described annular cast iron in cylindrical hole, described bar permanent magnet is installed In described annular cast iron；

Described workpiece motion s drive mechanism includes a bracer, crossbeam, horizontal linear motor, vertical beam and vertical line motor；? Bracer is symmetrically positioned in above the base of described double-sided polisher, and the horizontal linear motor two ends being arranged above crossbeam are fixed on Propping up the top of bracer, described crossbeam two ends are installed with vertical beam, and described vertical beam is provided with vertical line motor, described Work nest left and right sides are fixed on described vertical line motor.

Cluster dynamic magnetic field the most according to claim 1 controls the double-sided polisher of polishing pad rigidity, it is characterised in that The described mechanism that moves towards includes: translation linear electric motors, accurate the two-sided rack and two accurate single-side racks；

Described translation linear electric motors are arranged on above described base, and the precision that translation linear electric motors are provided with symmetrical structure is two-sided Tooth bar, accurate the two-sided rack both sides are engaged by gear and two accurate single-side racks respectively；Two described accurate single cogs lead to The line slideway crossing fore-and-aft direction is installed on base, and is respectively arranged in the both sides of described accurate the two-sided rack；

Described first magnetic field occur block and the second magnetic field occur the housing of block respectively with described in described accurate the two-sided rack and two Accurate single-side rack connects.

Cluster dynamic magnetic field the most according to claim 1 controls the double-sided polisher of polishing pad rigidity, it is characterised in that Described drive mechanism includes small pulley, big belt wheel, little flat key, big flat key and V-type band；

Described small pulley and big belt wheel are fixed on the motor shaft of described motor and described beat by little flat key and big flat key respectively On main shaft, connected by described V-type band between small pulley and big belt wheel.

Cluster dynamic magnetic field the most according to claim 1 controls the double-sided polisher of polishing pad rigidity, it is characterised in that The axle end bearing position of beat main shaft also exist spindle eccentricity away from, it is inclined that the little-end bearing position of eccentric cam shaft also exists camshaft The heart away from, described spindle eccentricity is away from equal with the numerical value of camshaft eccentric throw, and eccentric direction is contrary.

Cluster dynamic magnetic field the most according to claim 1 controls the double-sided polisher of polishing pad rigidity, it is characterised in that The magnetic field intensity of described permanent magnet between 1000Gs～5500Gs, the magnetic field intensity of square magnet 200Gs～1200Gs it Between, the magnetic field intensity of bar permanent magnet, between 2000Gs～4000Gs, is installed on the cylinder of same described Magnet mounting seat Between shape permanent magnet is adjacent, heteropole distribution, is arranged on the cylindrical magnet ferrum of different described Magnet mounting seat the most in correspondence with each other, And it is incorgruous close to short magnetic pole.

Cluster dynamic magnetic field the most according to claim 1 controls the double-sided polisher of polishing pad rigidity, it is characterised in that Described workpiece quick clamping mechanism also includes the circular retainer for placing workpiece, and is arranged on around described retainer also Intermeshing left gear, right gear, gear and lower gear with the arc-shaped edges of described retainer；

Described left gear, right gear, gear and lower gear are arranged in described work nest, wherein, and described left gear and described Right gear is symmetrically installed, and described gear and described lower gear are symmetrically installed；

In described left gear, right gear, gear and lower gear, at least one is connected with motor.