CN207464836U - A kind of dynamic magnetic field magnetorheological finishing device - Google Patents
A kind of dynamic magnetic field magnetorheological finishing device Download PDFInfo
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- CN207464836U CN207464836U CN201721474381.2U CN201721474381U CN207464836U CN 207464836 U CN207464836 U CN 207464836U CN 201721474381 U CN201721474381 U CN 201721474381U CN 207464836 U CN207464836 U CN 207464836U
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Abstract
The utility model discloses a kind of dynamic magnetic field magnetorheological finishing device, including：Shell, is internally provided with internal gear, and middle part is equipped with centre bearing sleeve；Power input mechanism, including input shaft, input shaft is connected to by clutch shaft bearing on centre bearing sleeve lining, and the outer wall of input shaft is equipped with central gear；Rotating mechanism, including axis, shaft sleeve, planetary gear and bearing sleeve retainer and axis retainer, axis lower end is equipped with cylindrical permanent magnet iron, and shaft sleeve lower end is equipped with polishing disk, and the lower surface of polishing disk is equipped with groove.Wherein under the action of dynamic magnetic field, the newer magnetorheological fluid polishing pad of no abrasive material can be forced to be transformed into the polishing pad from sharp and shape real-time recovery for having abrasive material.The uniformity and efficiency of polishing are again improved, the revolution and rotation of polishing disk, the multiple work(of formation of dynamic magnetic field and hydrodynamic pressure are realized in the case where a power inputs, without in addition adding motor driving magnetic pole rotation, apparatus structure is compact.
Description
Technical field
The utility model is related to burnishing device technical field, more particularly to a kind of dynamic magnetic field magnetorheological finishing device.
Background technology
With the social development of information computerization, semi-conducting material is more wide as high-performance microelectronics component application
It is general, such as monocrystalline silicon, aluminium oxide, the demand of strontium titanates and monocrystalline silicon carbide electron ceramic material be increasing.General semiconductor
Chip manufacture will pass through the processes such as slice, grinding, polishing, reach good performance, surface accuracy needs to reach super
Smooth degree (roughness Ra reaches below 1nm), surface precision also have higher requirements (surface precision reaches less than 0.5 micron),
By taking LED extension Sapphire Substrates as an example, total thickness deviation is generally required to be less than 10 μm, surface less than 10 μm, total surface flatness
Roughness is less than 0.05 μm.Therefore the manufacture of semi-conducting material is increasingly dependent on grinding and polishing technology to meet its production requirement.
Existing is mainly high-efficient grinding, Ultraprecise polished, chemical machinery throwing to the processing unit (plant) of semiconductor wafer both at home and abroad
Light, Magnetorheological Polishing and the polishing processing based on face grinding machine, Magnetorheological Polishing become polishing and are used as a kind of typical semiconductor substrate
Planarization processing technology, the device using magnetic current and liquid flow variation characteristic formed polishing pad to finished surface carry out point by point scanning
Processing, but processing efficiency is than relatively low, meanwhile, the magnetic rheology effect polishing pad that static magnetic field is formed lacks selfrepair and abrasive material
From sharp mechanism, viscoelasticity of the magnetorheological fluid under magnetic fields causes the polishing pad that magnetostatic field is formed to add workpiece surface for update
Stress distorts after work, it is difficult to keep the performance stabilization of workpiece after processing, constrain the further application and development of the technique.Example
Such as, the cluster magnetorheological finishing device that patent 200610132495.9 is mentioned can well be polished monocrystalline silicon carbide, and
Nano level smooth surface is obtained, but due to the rheological behavior that magnetorheological working solution is controlled using externally-applied magnetic field power, it is difficult to
The distributing homogeneity of flexible small abrasive nose that polishing process is formed is controlled, so that the semiconductor chip thickness through Magnetorheological Polishing is inclined
Difference, surface smoothness and surface quality are difficult to control.
Therefore, a kind of dynamic magnetic field magnetorheological finishing device how is provided, to improve workpiece surface processing quality and processing
Efficiency is the technical issues of those skilled in the art are badly in need of solving.
Utility model content
The purpose of this utility model is to provide a kind of dynamic magnetic field magnetorheological finishing device, can effectively solve existing magnetic current
Become polishing and there is the problems such as polishing is uneven.
In order to solve the above technical problems, the utility model provides following technical solution：
A kind of dynamic magnetic field magnetorheological finishing device, including：
Shell, is internally provided with internal gear, and middle part is equipped with centre bearing sleeve；
Power input mechanism, including input shaft, the input shaft is connected to by clutch shaft bearing described in the shell
On centre bearing sleeve lining, the outer wall of the input shaft is equipped with central gear；
Rotating mechanism, including axis, shaft sleeve and the planet engaged respectively with the internal gear and the central gear
Gear, the planetary gear are set in outside the shaft sleeve, and the axis is connected to by second bearing inside the shaft sleeve,
The axis lower end is equipped with cylindrical permanent magnet iron, and the shaft sleeve lower end is equipped with polishing disk, the polishing disk and axis lower end structure
Into the chamber for accommodating the cylindrical permanent magnet iron, the lower surface of the polishing disk is equipped with groove, further includes and is total to the input shaft
The bearing sleeve retainer of axis setting, the lateral wall of the bearing sleeve retainer are connected to the shell by 3rd bearing
On inner wall, the bearing sleeve retainer is equipped with through-hole, and the shaft sleeve is connected to the bearing sleeve by fourth bearing
On the inner wall of the through-hole of retainer, the bottom end of the polishing disk protrudes from the bottom end of the bearing sleeve retainer, also wraps
Axis retainer is included, the axis retainer is set in by 5th bearing on the centre bearing sleeve outer wall, passes through 6th bearing
It is connected on the outer casing inner wall, the upper end of the axis is fixed on the axis retainer.
Preferably, the rotating mechanism include the more axis and with the axis shaft sleeve, institute correspondingly
Planetary gear, the cylindrical permanent magnet iron and the polishing disk are stated, the upper end of each axis is each attached on the axis retainer,
Each planetary gear is arranged on one by one on each axle sleeve drum outer wall, and each axis is arranged on the shaft sleeve one by one
Interior, each shaft sleeve is arranged on one by one on the bearing sleeve retainer, each cylindrical permanent magnet iron and each throwing
CD is arranged on the lower end of the axis one by one.
Preferably, the first sealing ring, the bearing sleeve are equipped between the polishing disk and the bearing sleeve retainer
The second sealing ring is equipped between retainer and the shell.
Preferably, the polishing disk is detachably connected on the shaft sleeve.
Preferably, the axis retainer is equipped with polygonal hole, and the axis is equipped with what is be adapted with the polygonal hole
Polygon connecting pin.
Preferably, the groove is set along the radial direction of the polishing disk, and the lower surface of the polishing disk is equipped with rounded old
The a plurality of groove of column distribution.
Preferably, the lower surface of the polishing disk is equipped with a plurality of groove of rectangular display distribution.
Preferably, described its axial direction of axis upper edge is equipped with multiple second bearings.
Preferably, the bottom end of the axis is equipped with counterbore, and the cylindrical permanent magnet iron is arranged in the counterbore.
Preferably, the shell includes the head cover, middle shell and the bottom case that pass sequentially through end connection, the centre bearing sleeve
Be arranged in the middle part of the head cover, the internal gear is arranged on the middle shell madial wall, the 3rd bearing be arranged on it is described in
On the inner wall of shell, and positioned at the bottom of the internal gear, second sealing ring is arranged on the bottom case and the bearing sleeve
Between retainer.
Compared with prior art, above-mentioned technical proposal has the following advantages：
A kind of dynamic magnetic field magnetorheological finishing device provided by the utility model, can be under the action of dynamic magnetic field
The newer magnetorheological fluid polishing pad of no abrasive material is forced to be transformed into the polishing pad from sharp and shape real-time recovery for having abrasive material, is solved
Under static magnetic field polishing action due under the stickiness of magnetorheological fluid and magnetic action deformation can not restore to lose to workpiece
Tonnage key problem, secondly the appearance end effect in Magnetorheological Polishing should, can realize the excellent of fine grain abrasive and workpiece
It first contacts, avoids scuffing of the big particle abrasive material to workpiece.In addition, magnetorheological fluid is covered in polishing panel surface, in polishing process
Middle polishing disk and workpiece when relative motion occurs, magnetorheological fluid from the workpiece place larger with polishing dish gap flow to gap compared with
Small place and form hydrodynamic film, the uniform quick removal workpiece surface material under the double action of abrasive material and hydrodynamic film
Material substantially increases the uniformity and efficiency of polishing, realizes fast polishing and promotes the purpose of polishing effect.Important
Being that the utility model is realized realizes polishing disk revolution and rotation, the formation of dynamic magnetic field in the case where a power inputs
With the multiple work(of formation of hydrodynamic pressure, shaft sleeve is revolved with respect to the structure of cylindrical permanent magnet iron rotation compared to cylindrical permanent magnet iron
The structure turned is simple, and without in addition adding motor driving magnetic pole rotation, apparatus structure is compact.
Description of the drawings
It, below will be to embodiment or existing in order to illustrate more clearly of the utility model or technical solution of the prior art
Attached drawing is briefly described needed in technology description, it should be apparent that, the accompanying drawings in the following description is that this practicality is new
Some embodiments of type, for those of ordinary skill in the art, without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
The master of a kind of dynamic magnetic field magnetorheological finishing device that Fig. 1 is provided by a kind of specific embodiment of the utility model
Depending on schematic cross-sectional view；
Fig. 2 is the A-A sectional views in Fig. 1；
Fig. 3 is the B-B sectional views in Fig. 1；
Fig. 4 is faced upward by a kind of dynamic magnetic field magnetorheological finishing device that a kind of specific embodiment of the utility model provides
Depending on structure diagram；
The throwing of a kind of dynamic magnetic field magnetorheological finishing device that Fig. 5 is provided by a kind of specific embodiment of the utility model
Groove circular array distributed architecture schematic diagram on CD；
The throwing of a kind of dynamic magnetic field magnetorheological finishing device that Fig. 6 is provided by a kind of specific embodiment of the utility model
Groove rectangular array distributed architecture schematic diagram on CD；
A kind of dynamic magnetic field magnetorheological finishing device application that Fig. 7 is provided by a kind of specific embodiment of the utility model
Structure diagram on milling machine；
A kind of dynamic magnetic field magnetorheological finishing device application that Fig. 8 is provided by a kind of specific embodiment of the utility model
Structure diagram on stent；
A kind of dynamic magnetic field magnetorheological finishing device application that Fig. 9 is provided by a kind of specific embodiment of the utility model
Structure diagram in cluster polishing；
Figure 10 should by a kind of dynamic magnetic field magnetorheological finishing device that a kind of specific embodiment of the utility model provides
With the structure diagram on curved surface polishing.
Reference numeral is as follows：
1 is polishing disk, and 2 be cylindrical permanent magnet iron, and 3 be the first sealing ring, and 4 be bottom case, and 5 be shaft sleeve, and 6 be the 4th fastening
Screw, 7 be 3rd bearing, and 8 be bearing sleeve retainer, and 9 be planetary gear, and 10 be internal gear, and 11 be 6th bearing, and 12 be the
Three trip bolts, 13 be head cover, and 14 be axis retainer, and bearing sleeve centered on 15,16 be the first trip bolt, and 17 be first axle
It holds, 18 be the first clamp nut, and 19 be the first connection screw thread, gear centered on 20, and 21 be 5th bearing, and 22 fasten spiral shell for third
Mother, 23 be axis, and 24 be the second trip bolt, and 25 be retainer ring, and 26 be the second clamp nut, and 27 be key, and 28 be fourth bearing, 29
It is ring flange for second bearing, 30,31 be groove, and 32 be magnetorheological fluid, and 33 be workpiece, and 34 be polishing pad, and 35 be the first workpiece
Main shaft, 36 be processing gap, and 37 be nozzle, and 38 be fixed disk, and 39 be second workpiece main shaft, and 40 be the second connection screw thread, and 41 are
Motor, 42 be spill spin block, and 43 be fixed frame, and 44 be workpiece binder, and 45 be mobile platform, and 46 be the 5th trip bolt, and 47 be branch
Frame, 48 be the second sealing ring.
Specific embodiment
It is understandable in order to which the above-mentioned purpose of the utility model, feature and advantage is enable to become apparent, it is right below in conjunction with the accompanying drawings
Specific embodiment of the present utility model is described in detail.
Detail is elaborated in the following description in order to fully understand the utility model.But the utility model can
Implemented with a variety of different from other manner described here, those skilled in the art can be without prejudice to the utility model connotation
In the case of do similar popularization.Therefore the utility model is not limited by following public specific embodiment.
Please refer to Fig.1-Figure 10.
A kind of specific embodiment of the utility model provides a kind of dynamic magnetic field magnetorheological finishing device, including：Outside
Shell is internally provided with internal gear 10, and middle part is equipped with centre bearing sleeve 15, which can pass through the first fastening
Screw 16 is fixed in the middle part of shell；Power input mechanism, including input shaft, input shaft is connected to shell by clutch shaft bearing 17
15 inner wall of centre bearing sleeve on, the first clamp nut 18 can wherein be set to limit the axial direction of clutch shaft bearing 17 on input shaft
Mobile, the outer wall of input shaft is equipped with central gear 20；Rotating mechanism, including axis 23, shaft sleeve 5 and respectively with internal gear
10 and central gear 20 engage planetary gear 9, planetary gear 9 is set in outside shaft sleeve 5, wherein can lead to planetary gear 9
It crosses key 27 to be connected on shaft sleeve 5, secondly planetary gear 9 moves axially on shaft sleeve 5 in order to prevent, can be on shaft sleeve 5
One retainer ring 25 is set, which can be fixed on the end of shaft sleeve 5 by the second trip bolt 24, and axis 23 passes through second
Bearing 29 is connected to inside shaft sleeve 5, wherein the second clamp nut 26 can be set to limit the axis of second bearing 29 on axis 23
To movement, 23 lower end of axis is equipped with cylindrical permanent magnet iron 2, and 5 lower end of shaft sleeve is equipped with polishing disk 1, and polishing disk 1 and 23 lower end of axis are formed
The chamber of cylindrical permanent magnet iron 2 is accommodated, the lower surface of polishing disk 1 is equipped with groove, further includes the bearing with the coaxial setting of input shaft
Sleeve retainer 8, the lateral wall of bearing sleeve retainer 8 are connected to by 3rd bearing 7 on the inner wall of shell, and bearing sleeve is protected
Frame 8 is held equipped with through-hole, shaft sleeve 5 is connected to by fourth bearing 28 on the inner wall of the through-hole of bearing sleeve retainer 8, is polished
The bottom end of disk 1 protrudes from the bottom end of bearing sleeve retainer 8, further includes axis retainer 14, and axis retainer 14 passes through 5th bearing
21 are set on 15 outer wall of centre bearing sleeve, are connected on outer casing inner wall by 6th bearing 11, wherein in addition to second bearing
29 preferred deep groove ball bearings, the preferred taper roll bearing of other bearings, the upper end of axis 23 are fixed on axis retainer 14, wherein
Can be by axis 23 through axis retainer 14, in the upper end of axis 23, axis 23 is fixed on axis retainer 14 by setting third clamp nut 22
On.
During using dynamic magnetic field magnetorheological finishing device provided in this embodiment, input shaft is connected to the main shaft of lathe
On, shell is fixed on the lathe bed of lathe, then workpiece 33 by vacuum is inhaled or pastes the modes clampings such as wax in groove 31
It is interior, and workpiece 33 is located in the range of the polishing of burnishing device, magnetorheological fluid 32 is finally added in groove 31, in centre tooth
Under the collective effect of the internal gear 10 of wheel 20 and setting inside the shell, central gear 20 is rotated by input shaft and is rotated, into
And cause 9 rotation of planetary gear engaged with central gear 20 and revolution, so as to fulfill the shaft sleeve 5 being connect with planetary gear 9
Rotation and revolution, under the action of the revolution of shaft sleeve 5, can drive bearing sleeve retainer 8 to revolve round the sun, secondly because the upper end of axis 23
It is fixed on axis retainer 14, therefore can realize shaft sleeve 5 and be arranged on the polishing disk 1 of 5 lower end of shaft sleeve relative to setting
2 rotation of cylindrical permanent magnet iron in 23 lower end of axis, 1 magnetic fidle of end real-time change of polishing disk so that magnetic field forms dynamic magnetic field, magnetic
Rheology liquid 32 forms Magnetorheological Polishing pad 34 under the magnetic rheology effect of cylindrical permanent magnet iron 2, you can realizes that workpiece 33 is magnetorheological
Polishing removal.
Wherein under the action of dynamic magnetic field, newer 32 polishing pad 34 of magnetorheological fluid of no abrasive material can be forced, which to be transformed into, to be had
The polishing pad 34 from sharp and shape real-time recovery of abrasive material, solves under static magnetic field polishing action due to magnetorheological fluid 32
Stickiness can not restore the key problem so as to lose the tonnage to workpiece 33, secondly magnetorheological throwing with deformation under magnetic action
Appearance end effect in light is answered, and can be realized the preferential contact of fine grain abrasive and workpiece 33, be avoided big particle abrasive material to workpiece 33
Scuffing.
In addition, magnetorheological fluid 32 is covered in 1 surface of polishing disk, with workpiece 33 phase is occurring for polishing disk 1 in polishing process
During to movement, magnetorheological fluid 32 flows to the smaller place in gap from workpiece 33 and the larger place in 1 gap of polishing disk and is formed and flowed
Body dynamic pressure film, it is uniformly quick under the double action of abrasive material and hydrodynamic film to remove 33 surfacing of workpiece, it substantially increases
The uniformity and efficiency of polishing realize fast polishing and promote the purpose of polishing effect.
Importantly, the utility model realize realized in the case where power inputs the revolution of polishing disk 1 and rotation,
The formation of dynamic magnetic field and the multiple work(of the formation of hydrodynamic pressure, shaft sleeve 5 are compared with respect to the structure of 2 rotation of cylindrical permanent magnet iron
Simple in the structure that cylindrical permanent magnet iron 2 rotates, without in addition adding motor driving magnetic pole rotation, apparatus structure is compact.
Further, rotating mechanism include more axis 23 and with 23 one-to-one shaft sleeve 5 of axis, planetary gear 9, circle
Cylinder permanent magnet 2 and polishing disk 1, the upper end of each axis 23 are each attached on axis retainer 14, and each planetary gear 9 is arranged on one by one
On each 5 outer wall of shaft sleeve, each axis 23 is arranged in shaft sleeve 5 one by one, and each shaft sleeve 5 is arranged on bearing sleeve holding one by one
On frame 8, each cylindrical permanent magnet iron 2 and each polishing disk 1 are arranged on the lower end of axis 23 one by one.Wherein preferably four along axis retainer
14 circumferential equally distributed axis 23, specifically according to actual conditions can select the axis 23 of other radicals, the present embodiment to this not
It limits.
Magnetorheological fluid 32 enters in burnishing device in order to prevent, and first is equipped between polishing disk 1 and bearing sleeve retainer 8
Sealing ring 3 is equipped with the second sealing ring 48 between bearing sleeve retainer 8 and shell.
Further, polishing disk 1 is detachably connected on shaft sleeve 5.Wherein polishing disk 1 can be threadedly attached in axis
On sleeve 5, therefore polishing disk 1 can be replaced according to the workpiece 33 of dissimilar material properties, and then improve the use scope of burnishing device,
Secondly polishing disk 1 can be made by diamagnetic materials such as stainless steel, hard alloy, ceramics.
The rotation of axis in order to prevent, axis retainer 14 are equipped with polygonal hole, and axis 23 is equipped with and polygonal hole is adapted
Polygon connecting pin.Wherein polygonal hole can be square, pentagon, hexagon etc..
Specifically, groove is set along the radial direction of polishing disk 1, and the lower surface of polishing disk 1 is equipped with the more of rounded display distribution
Groove.
In addition, the lower surface of polishing disk 1 is equipped with a plurality of groove of rectangular display distribution.
It should be noted that above-mentioned circular array distribution and rectangular array distribution are preferred distribution mode, it is also optional
Selecting other arrangement modes specifically can be depending on actual conditions, and the present embodiment does not limit this.
In order to improve the stability of the rotation of shaft sleeve 5, its axial direction of 23 upper edge of axis is equipped with multiple second bearings 29.
Further, the bottom end of axis 23 is equipped with counterbore, and cylindrical permanent magnet iron 2 is arranged in counterbore.In specific assembling, circle
2 lower part of cylinder permanent magnet is 0.5mm to any value between 5mm close to the end face spacing of the end face of polishing disk 1 and polishing disk 1,
Wherein 2 preferred magnetic field intensity of cylindrical permanent magnet iron is the cylindrical permanent magnet iron 2 of 2000Gs to 6000Gs.
For the ease of the assembling of each parts, shell includes the head cover 13, middle shell and the bottom case 4 that pass sequentially through end connection,
Centre bearing sleeve 15 is arranged on 13 middle part of head cover, and internal gear 10 is arranged on middle shell madial wall, and 3rd bearing 7 is arranged on middle shell
Inner wall on, and positioned at the bottom of internal gear 10, the second sealing ring is arranged between bottom case 4 and bearing sleeve retainer 8.Wherein
Head cover 13 and middle shell can be attached by third trip bolt 12, and middle shell and bottom case 4 can be connected by the 4th trip bolt 6
It connects.
In the concrete application of the dynamic magnetic field magnetorheological finishing device provided in above-described embodiment, such as answering on milling machine
With the adjacent same magnetic pole of the cylindrical permanent magnet iron 2 of suitable magnetic field intensity or adjacent anti-magnetic pole being selected to be installed on throwing according to workpiece 33
In electro-optical device, the distance that adjustment axis causes 2 lower face of cylindrical permanent magnet iron to 1 end face of polishing disk is consistent, passes through the first connection spiral shell
Burnishing device is installed on the main shaft of plain mille by line 19, and the lathe bed of plain mille is installed in by ring flange 30
On, then by 33 clamping of workpiece in groove 31, by add in deionized water a concentration of 4% micron-sized abrasive material and
The micron order carbonyl iron dust for adding in a concentration of 35% in deionized water and the dispersant for adding in a concentration of 10%, a concentration of 5%
Stabilizer, using magnetic stirrer after five minutes by vibration of ultrasonic wave 20 minutes, form magnetorheological fluid；It then should
Magnetorheological fluid is added to by nozzle 37 in groove 31；Start the upper and lower displacement motor of milling machine spindle so that polishing disk 1 arrives workpiece
The processing gap 36 on 33 surfaces is 1mm, then starts the electric rotating machine of machine tool chief axis, burnishing device can be in the rotation of input shaft
Under work, while 33 main shaft of the first workpiece drive workpiece 33 rotated with certain speed, pass through the rotation and revolution of polishing disk 1
And the rotation of workpiece 33, you can realize the removal of 33 Magnetorheological Polishing of workpiece；Such as the application on stent 47, connect by first
It connects screw thread 19 burnishing device is installed on the motor 41 of stent 47, motor 41 is fixed on branch vertically by the 5th trip bolt 46
It on frame 47, and is installed on stent 47 by ring flange 30, specific polishing process can refer to the above-mentioned application on milling machine；
Such as the application in cluster polishing, multiple burnishing devices are uniformly connected to the electricity of fixed disk 38 by the first connection screw thread 19
On machine 41, fixed disk 38 is fixed on the lathe bed of plain mille, and plain mille main shaft is connected to the by the second connection screw thread 40
On two work spindles 39；Such as the application on curved surface polishing, burnishing device is installed in by motor by the first connection screw thread 19
On, burnishing device is installed on spill spin block 42 by ring flange 30, spill spin block 42 is installed on fixed frame 43, in the drive of motor
Dynamic lower spill spin block 42 can realize the rotation in shown by arrow direction, and fixed frame 43 is installed on workpiece binder 44, workpiece binder 44
Rotation of the workpiece 33 in shown by arrow direction can be realized under motor driving, workpiece binder 44 is installed on mobile platform 45,
By the movement of mobile platform 45, it can be achieved that the movement of workpiece 33 planar, phone housing can be realized by the curved surface polishing
The polishing on 33 surface of workpiece.
The tool that material removing rate is obtained with the survey calculation of actual experiment can be wherein analyzed according to the theoretical modeling of removal rate
Body value, so as to determine the amount of feeding of axial direction of the central gear 20 under machining state according to the size of material removing rate, from
And the processing gap for ensureing polishing disk 1 to 33 surface of workpiece remains unchanged, and realizes the constant pressure polishing of polishing pad 34；Or it is polishing
Detector is installed on device, under polishing state, adding between the syringe needle timing probe polishing disk 1 and workpiece 33 of detector
Break gap, the feedback processing of the data of detection Jing Guo digital control system exist according to the variation in processing gap to carry out central gear 20
The amount of feeding of axial direction so as to which the processing gap for ensureing polishing disk 1 to 33 surface of workpiece remains unchanged, realizes 33 surface of workpiece
Material realizes polishing removal under the constant pressure shear action of Magnetorheological Polishing pad 34 and workpiece 33 rotation of itself, obtains smooth nothing
33 surface of workpiece of sub-surface damage.
Secondly in the flat work pieces 33 of polishing different shapes and sizes, according to workpiece 33 and burnishing device size ratio
Compared with, it, can be under the control of digital control system when workpiece 33 is larger, burnishing device carries out tool track polishing, according to workpiece 33
The track walked of shape burnishing device can be straight line, circular arc, scanning etc..Surface so as to fulfill workpiece 33 uniformly removes,
It ensure that the form accuracy of workpiece 33.When workpiece 33 is smaller, polishing can be pinpointed by burnishing device high speed rotation or is thrown
Electro-optical device high speed rotation is simultaneously polished, such as during 2 inches of Si wafer workpieces 33 of polishing in the beat of X, Y, can be in milling machine
Control under burnishing device carry out fixed point high speed polishing.
In addition during polishing curve surface work pieces 33, a kind of dynamic magnetic field magnetorheological finishing device can be installed in numerical control system
On system, digital control system carries out X, Y, Z axis feeding and the rotation of respective shaft according to the Curvature varying of curved surface, so as to fulfill curved surface
High-precision is polished without sub-surface damage.
In conclusion work can be obtained using a kind of cluster type dynamic magnetic field magnetorheological finishing device provided by the utility model
Part surface conformance is good and high quality workpiece without surface and sub-surface damage, and at low cost, is very suitable for photoelectron, micro- electricity
The plane of subbase piece and optical element, the processing of curved surface high efficiency ultra-smooth uniform polish.It meanwhile can be with during present apparatus use
It realizes static magnetic field and dynamic magnetic field processing, a little and multiple spot is processed, is suitable for studying the Material Removal Mechanism of optical material
With sub-surface damage detection etc. experiments.
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with other
The difference of embodiment, just to refer each other for identical similar portion between each embodiment.
Dynamic magnetic field magnetorheological finishing device provided by the utility model is described in detail above.Herein should
The principle and embodiment of the utility model is expounded with specific case, the explanation of above example is only intended to sides
Assistant solves the device and its core concept of the utility model.It should be pointed out that for those skilled in the art,
Under the premise of the utility model principle is not departed from, can also to the utility model, some improvement and modification can also be carried out, these improvement
It is also fallen into the protection domain of the utility model claims with modification.The foregoing description of the disclosed embodiments makes ability
Domain professional technician can realize or using the utility model.To a variety of modifications of these embodiments to the professional skill of this field
Will be apparent for art personnel, the general principles defined herein can in the spirit for not departing from the utility model or
In the case of range, realize in other embodiments.Therefore, the utility model is not intended to be limited to these realities shown in this article
Example is applied, and is to fit to the most wide range consistent with the principles and novel features disclosed herein.
Claims (10)
1. a kind of dynamic magnetic field magnetorheological finishing device, which is characterized in that including：
Shell, is internally provided with internal gear, and middle part is equipped with centre bearing sleeve；
Power input mechanism, including input shaft, the input shaft is connected to the center of the shell by clutch shaft bearing
On bearing sleeve inner wall, the outer wall of the input shaft is equipped with central gear；
Rotating mechanism, including axis, shaft sleeve and the planetary gear engaged respectively with the internal gear and the central gear,
The planetary gear is set in outside the shaft sleeve, and the axis is connected to by second bearing inside the shaft sleeve, described
Axis lower end is equipped with cylindrical permanent magnet iron, and the shaft sleeve lower end is equipped with polishing disk, and the polishing disk and the axis lower end, which are formed, to hold
Receive the chamber of the cylindrical permanent magnet iron, the lower surface of the polishing disk is equipped with groove, further includes and the input shaft is coaxial sets
The bearing sleeve retainer put, the lateral wall of the bearing sleeve retainer are connected to the inner wall of the shell by 3rd bearing
On, the bearing sleeve retainer is equipped with through-hole, and the shaft sleeve is connected to the bearing sleeve by fourth bearing and keeps
On the inner wall of the through-hole of frame, the bottom end of the polishing disk protrudes from the bottom end of the bearing sleeve retainer, further includes axis
Retainer, the axis retainer are set on the centre bearing sleeve outer wall by 5th bearing, are connected by 6th bearing
On the outer casing inner wall, the upper end of the axis is fixed on the axis retainer.
2. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that the rotating mechanism includes more
Axis described in root and with the axis shaft sleeve, the planetary gear, the cylindrical permanent magnet iron and described correspondingly
Polishing disk, the upper end of each axis are each attached on the axis retainer, and each planetary gear is arranged on each described one by one
On axle sleeve drum outer wall, each axis is arranged in the shaft sleeve one by one, and each shaft sleeve is arranged on the axis one by one
On bearing sleeve cylinder retainer, each cylindrical permanent magnet iron and each polishing disk are arranged on the lower end of the axis one by one.
3. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that the polishing disk and the axis
The first sealing ring is equipped between bearing sleeve cylinder retainer, the second sealing is equipped between the bearing sleeve retainer and the shell
Circle.
4. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that the polishing disk detachably connects
It is connected on the shaft sleeve.
5. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that the axis retainer is equipped with
Polygonal hole, the polygon connecting pin that the axis is equipped with and the polygonal hole is adapted.
6. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that the groove is along the polishing
The radial direction setting of disk, the lower surface of the polishing disk are equipped with a plurality of groove of rounded display distribution.
7. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that the lower surface of the polishing disk
The a plurality of groove equipped with rectangular display distribution.
8. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that described its axial direction side of axis upper edge
To equipped with multiple second bearings.
9. dynamic magnetic field magnetorheological finishing device according to claim 1, which is characterized in that the bottom end of the axis is equipped with heavy
Hole, the cylindrical permanent magnet iron are arranged in the counterbore.
10. dynamic magnetic field magnetorheological finishing device according to claim 3, which is characterized in that the shell is included successively
Head cover, middle shell and the bottom case connected by end, the centre bearing sleeve are arranged in the middle part of the head cover, and the internal gear is set
It puts on the middle shell madial wall, the 3rd bearing is arranged on the inner wall of the middle shell, and positioned at the bottom of the internal gear
Portion, second sealing ring are arranged between the bottom case and the bearing sleeve retainer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721474381.2U CN207464836U (en) | 2017-11-06 | 2017-11-06 | A kind of dynamic magnetic field magnetorheological finishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721474381.2U CN207464836U (en) | 2017-11-06 | 2017-11-06 | A kind of dynamic magnetic field magnetorheological finishing device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654376A (en) * | 2022-03-13 | 2022-06-24 | 浙江师范大学 | Magnetorheological polishing device with self-repairing grinding head |
| CN115415856A (en) * | 2022-08-31 | 2022-12-02 | 广东工业大学 | Focused ultrasound magnetorheological composite polishing method and device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654376A (en) * | 2022-03-13 | 2022-06-24 | 浙江师范大学 | Magnetorheological polishing device with self-repairing grinding head |
| CN115415856A (en) * | 2022-08-31 | 2022-12-02 | 广东工业大学 | Focused ultrasound magnetorheological composite polishing method and device |
| CN115415856B (en) * | 2022-08-31 | 2024-01-23 | 广东工业大学 | Focusing ultrasonic magneto-rheological composite polishing method and device |
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