CN106737129A - The flat grinding device of adjustable rotating ratio - Google Patents
The flat grinding device of adjustable rotating ratio Download PDFInfo
- Publication number
- CN106737129A CN106737129A CN201611169134.1A CN201611169134A CN106737129A CN 106737129 A CN106737129 A CN 106737129A CN 201611169134 A CN201611169134 A CN 201611169134A CN 106737129 A CN106737129 A CN 106737129A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- interior
- disk
- abrasive disk
- haftplatte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
Abstract
The present invention relates to a kind of flat grinding device of adjustable rotating ratio, including：Outer grinding disk, interior abrasive disk, outer driving shaft, interior drive shaft, workpiece haftplatte, rocking arm and finishing ring, the interior abrasive disk is connected with the interior drive shaft, the outer grinding disk is arranged concentrically with the interior abrasive disk, the outer grinding disk is connected with the outer driving shaft, position between the lower section of the workpiece haftplatte and the outer grinding disk and the interior abrasive disk is used to place workpiece, the workpiece haftplatte is positioned in the finishing ring, and the finishing ring is in contact with the rocking arm.The flat grinding device of the adjustable rotating ratio that the present invention is provided can significantly improve processing efficiency and workpiece surface quality.
Description
Technical field
The present invention relates to precise finiss field, more particularly to a kind of flat grinding device of adjustable rotating ratio.
Background technology
In high precision, the surface quality of low damage is the important directions of abrasive machining field development, and plane lapping processing is to obtain
One of important means of high-precision surface such as optical element, Sapphire Substrate, monocrystalline substrate are taken, in electronics, communication, is calculated
The technical fields such as machine, laser, Aero-Space have a wide range of applications.Current existing plane lapping equipment is divided into two major classes, one
Class is one side milling apparatus, and another kind of is twin grinding equipment, and wherein one side milling apparatus can be divided into surely inclined again by type of drive
It is core type, Uncertain Eccentricity formula, linear and swing.The distribution for grinding the track of abrasive particle has important shadow to the crudy of workpiece
Ring, it is uneven that grain motion trajectory skewness causes workpiece material to remove, influence the flatness and table of workpiece machining surface
Surface roughness.Existing plane lapping equipment control model is single, and use is all monoblock abrasive disk, adjustable part
The rotating speed of monoblock abrasive disk, lapping liquid supply flow rate etc. are only limitted to, when the larger workpiece of grinding size needs the size of abrasive disk
Also larger, the flatness of abrasive disk is difficult to improve the flatness that also limit processed workpiece and is difficult to improve.
The content of the invention
Present invention seek to address that flat grinding device grain motion trajectory pattern is single in the prior art, skewness its
A kind of problem uncontrollable and that plane lapping processing efficiency is low, workpiece surface quality is poor, there is provided grain motion trajectory mould
Formula, distributing homogeneity are controllable, using split type single control abrasive disk, and can significantly improve processing efficiency and workpiece surface quality
Flat grinding device.
The invention provides a kind of flat grinding device of adjustable rotating ratio, including：Outer grinding disk, interior abrasive disk, outer drive
Moving axis, interior drive shaft, workpiece haftplatte, rocking arm and finishing ring, the interior abrasive disk are connected with the interior drive shaft, the outer grinding
Disk is arranged concentrically with the interior abrasive disk, and the outer grinding disk is connected with the outer driving shaft, the lower section of the workpiece haftplatte with
Position between the outer grinding disk and the interior abrasive disk is used to place workpiece, and the workpiece haftplatte is positioned over the finishing ring
Interior, the finishing ring is in contact with the rocking arm.The workpiece haftplatte is arranged on the outer grinding disk and the interior abrasive disk,
Workpiece is bonded in the lower section of the workpiece haftplatte.In certain embodiments, the interior abrasive disk and the outer grinding disk lead to respectively
Cross pin to be connected with the interior drive shaft and the outer driving shaft, easily change abrasive disk or polishing disk, so as to realize grinding
Completed on same platform with two operations of polishing.
In certain embodiments, workpiece is bonded by paraffin with the workpiece haftplatte.It is further preferred that workpiece passes through stone
Wax is adhered to workpiece haftplatte lower section and is positioned over finishing ring center.
In certain embodiments, the finishing ring is annular, and the finishing ring is arranged on the periphery of the workpiece haftplatte,
And the bottom of the finishing ring is in contact with the interior abrasive disk and the outer grinding disk.The finishing ring can be carried out to abrasive disk
Finishing, it is ensured that the flatness of abrasive disk, and then ensure to process the flatness of workpiece surface.
In certain embodiments, set on the surface that the finishing ring is in contact with the interior abrasive disk and the outer grinding disk
It is equipped with groove.It is further preferred that the groove number is two or more, and the groove is uniformly distributed, it is ensured that is supplied to and grinds
Lapping liquid on mill is uniformly dispersed, so as to ensure that processed workpiece can be removed equably.
In certain embodiments, the rocking arm includes two rollers, external cylindrical surface and the rocking arm of the finishing ring
Roller is in contact, and the rocking arm is connected with motor output shaft, band during the interior abrasive disk and the outer grinding disc spins
The dynamic finishing ring is in contact with rocker-arm roller, and the rocking arm swing and drives and described repair ring swing under the drive of motor.
It is further preferred that for ensure finishing ring contact with the rocker-arm roller moment outer driving shaft turn to fix, workpiece palpus and meanwhile with it is inside and outside
Abrasive disk is contacted.
In certain embodiments, the interior abrasive disk and outer grinding disk are cast iron plate, it is further preferred that the interior grinding
Disk and outer grinding disk are cerium oxide, copper dish, composition metal disk.In certain embodiments, the workpiece haftplatte is selected from ceramics, casting
One kind in iron, permanent magnetic chuck, handle is provided with the workpiece haftplatte.
In certain embodiments, the interior grinding shaft is vertically made up of the first cylinder and the second cylinder, the interior grinding shaft
Cross section be T fonts, the diameter of the diameter of first cylinder and the interior abrasive disk is consistent.
Compared with prior art, beneficial effect is the technical scheme of invention：The adjustable rotating ratio that the present invention is provided it is flat
Face lapping device can easily adjust the steering of the rotating ratio, interior abrasive disk and outer grinding disk of interior abrasive disk and outer grinding disk with
And the angle and speed that rocking arm swings, so as to improve the uniformity of grain motion trajectory in process of lapping, can significantly improve
Processing efficiency and quality.
Brief description of the drawings
Fig. 1 is the isometric drawing of the flat grinding device of the adjustable rotating ratio of one embodiment of the invention；
Fig. 2 represents the sectional view of the flat grinding device of the adjustable rotating ratio of one embodiment of the invention；
Fig. 3 represents the top view of the flat grinding device of the adjustable rotating ratio of one embodiment of the invention.
In figure, 100, the flat grinding device of adjustable rotating ratio, 1, outer driving shaft, 2, outer grinding disk, 3, rocking arm, 4, workpiece
Haftplatte, 5, finishing ring, 6, interior abrasive disk, 7, interior drive shaft, 8, workpiece.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing and specific implementation
Example, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only used to explain this hair
It is bright, without being construed as limiting the invention.
As shown in figure 1, the flat grinding device 100 of a kind of adjustable rotating ratio provided for one embodiment of the present of invention.
The flat grinding device 100 of the adjustable rotating ratio includes：Outer grinding disk 2, interior abrasive disk 6, outer driving shaft 1, interior drive shaft 7,
Workpiece haftplatte 4, rocking arm 3 and finishing ring 5, the interior abrasive disk 6 is connected with the interior drive shaft 7, the outer grinding disk 2 with it is described
Interior abrasive disk 6 is arranged concentrically, and the outer grinding disk 2 is connected with the outer driving shaft 1, and the workpiece haftplatte 4 is arranged on described outer
On abrasive disk 2 and the interior abrasive disk 6, workpiece (not shown in figure 1) is bonded in the lower section of the workpiece haftplatte 4, and workpiece (figure
Not shown in 1) it is in contact with the outer grinding disk 2 and the interior abrasive disk 6.The finishing ring 5 is arranged on the workpiece haftplatte 4
Periphery and be in contact with the interior abrasive disk 6 and the outer grinding disk 2.The finishing ring 5 can internal outer grinding disk (2 and 6)
Repaired, it is ensured that the flatness of inside and outside abrasive disk (2 and 6), and then ensure to process the flatness of workpiece surface.It is further excellent
Selection of land, the rocking arm 3 also includes roller, and the rocking arm 3 is connected with motor output shaft, the interior abrasive disk 6 and described grinds outward
The finishing ring 5 is driven to be in contact with the roller of rocking arm 3 in the rotary course of mill 2, the swing under the drive of motor of the rocking arm 3
And drive the finishing swing of ring 5.
In the particular embodiment, the interior abrasive disk 6 can also be fluted.
With reference to Fig. 2 and Fig. 3, in this embodiment, the interior abrasive disk 6 and the outer grinding disk 2 respectively by pin with
The interior drive shaft 7 and the outer driving shaft 1 are connected, and can easily change abrasive disk or polishing disk, thus realize grinding,
Two operations of polishing are completed on same platform.
Further, workpiece 8 described in the present embodiment is bonded by paraffin with the workpiece haftplatte 4.It is further preferred that
Workpiece 8 is adhered to workpiece haftplatte lower section and is positioned over finishing ring center by paraffin.
Further, repair what ring 5 was in contact with the interior abrasive disk 6 and the outer grinding disk 2 described in the present embodiment
Surface is provided with groove.It is further preferred that the surface that finishing ring 5 is contacted with inside and outside abrasive disk (2 and 6) is evenly distributed with necessarily
The groove of quantity, it is ensured that the lapping liquid being supplied on abrasive disk is uniformly dispersed, so as to ensure that processed workpiece can be obtained uniformly
Ground removal.
It is further preferred that turning to fixation, workpiece palpus to ensure that finishing ring 5 contacts outer driving shaft 1 with the roller moment of rocking arm 3
Contacted with inside and outside abrasive disk simultaneously.
In the particular embodiment, the interior abrasive disk 6 and outer grinding disk 2 are cast iron plate.
In the particular embodiment, the workpiece haftplatte 4 is selected from the one kind in ceramics, cast iron, permanent magnetic chuck, the workpiece
Handle is provided with haftplatte.
In the particular embodiment, the interior grinding shaft 7 is vertically made up of the first cylinder and the second cylinder, the interior grinding
The cross section of axle 7 is T fonts, and the diameter of the diameter of first cylinder and the interior abrasive disk is consistent.
In the particular embodiment, the groove number is two or more, and the groove is uniformly distributed.
Beneficial effects of the present invention include：The flat grinding device of the adjustable rotating ratio that the present invention is provided can be adjusted easily
Angle and speed that the rotating ratio of whole interior abrasive disk and outer grinding disk, the steering of interior abrasive disk and outer grinding disk and rocking arm swing
Degree, so as to improve the uniformity of grain motion trajectory in process of lapping, can significantly improve processing efficiency and quality.
In the description of the invention, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or
Position relationship, is for only for ease of the description present invention and simplifies description, must rather than the device or element for indicating or imply meaning
With specific orientation, with specific azimuth configuration and operation, therefore must be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include at least one this feature.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or integrally；Can be that machinery connects
Connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be in two elements
The connection in portion or two interaction relationships of element, unless otherwise clearly restriction.For one of ordinary skill in the art
For, can as the case may be understand above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be with
It is the first and second feature directly contacts, or the first and second features are by intermediary mediate contact.And, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or spy that the embodiment or example are described
Point is contained at least one embodiment of the invention or example.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be with office
Combined in an appropriate manner in one or more embodiments or example.Additionally, in the case of not conflicting, the skill of this area
Art personnel can be tied the feature of the different embodiments or example described in this specification and different embodiments or example
Close and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
Merely illustrating the principles of the invention described in above-described embodiment and specification and most preferred embodiment, are not departing from this
On the premise of spirit and scope, various changes and modifications of the present invention are possible, and these changes and improvements both fall within requirement and protect
In the scope of the invention of shield.
Claims (10)
1. a kind of flat grinding device of adjustable rotating ratio, including：Outer grinding disk, interior abrasive disk, outer driving shaft, interior drive shaft,
Workpiece haftplatte, rocking arm and finishing ring, the interior abrasive disk is connected with the interior drive shaft, the outer grinding disk and the interior grinding
Disk is arranged concentrically, and the outer grinding disk is connected with the outer driving shaft, the lower section of the workpiece haftplatte and the outer grinding disk and
Position between the interior abrasive disk is used to place workpiece, and the workpiece haftplatte is positioned in the finishing ring, the finishing ring
It is in contact with the rocking arm.
2. lapping device according to claim 1, it is characterised in that the interior abrasive disk and the outer grinding disk lead to respectively
Pin is crossed to be connected with the interior drive shaft and the outer driving shaft.
3. lapping device according to claim 1, it is characterised in that workpiece is bonded by paraffin with the workpiece haftplatte.
4. lapping device according to claim 1, it is characterised in that the finishing ring is annular, the finishing ring sets
Put in the periphery of the workpiece haftplatte, and the bottom of the finishing ring is in contact with the interior abrasive disk and the outer grinding disk.
5. lapping device according to claim 1, it is characterised in that the finishing ring and the interior abrasive disk and described outer
The surface that abrasive disk is in contact is provided with groove.
6. lapping device according to claim 5, it is characterised in that the groove number is two or more, and the ditch
Groove is centrosymmetric distribution.
7. lapping device according to claim 1, it is characterised in that the rocking arm includes two rollers, the finishing ring
External cylindrical surface be in contact with the roller of the rocking arm.
8. lapping device according to claim 1, it is characterised in that the interior abrasive disk and outer grinding disk are cast iron plate.
9. lapping device according to claim 1, it is characterised in that the workpiece haftplatte is selected from ceramics, cast iron, permanent magnetism suction
One kind in disk, handle is provided with the workpiece haftplatte.
10. lapping device according to claim 1, it is characterised in that the interior grinding shaft is justified by the first cylinder and second
Post is vertically constituted, and the cross section of the interior grinding shaft is the diameter of T fonts, the diameter of first cylinder and the interior abrasive disk
It is consistent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611169134.1A CN106737129A (en) | 2016-12-16 | 2016-12-16 | The flat grinding device of adjustable rotating ratio |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611169134.1A CN106737129A (en) | 2016-12-16 | 2016-12-16 | The flat grinding device of adjustable rotating ratio |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106737129A true CN106737129A (en) | 2017-05-31 |
Family
ID=58893335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611169134.1A Pending CN106737129A (en) | 2016-12-16 | 2016-12-16 | The flat grinding device of adjustable rotating ratio |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106737129A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107650009A (en) * | 2017-11-20 | 2018-02-02 | 山东省科学院新材料研究所 | A kind of novel wafer polisher lapper |
| CN108466131A (en) * | 2018-05-30 | 2018-08-31 | 四川欧瑞特光电科技有限公司 | A kind of optical element process equipment |
| CN108608274A (en) * | 2018-06-12 | 2018-10-02 | 常州市润昌光电科技有限公司 | A kind of ultra-precision continuous polishing machine |
| CN109015356A (en) * | 2018-10-23 | 2018-12-18 | 昆山福步工业设备有限公司 | A kind of scroll wheel preventing vibration |
| CN109551359A (en) * | 2018-12-27 | 2019-04-02 | 齐齐哈尔二机床(集团)有限责任公司 | A kind of general set class end-face grinder |
| CN109623612A (en) * | 2018-12-29 | 2019-04-16 | 瑞盛环境股份有限公司 | Magnetic-coagulation High-rate sedimentation purification device and its treatment process |
| CN109986412A (en) * | 2017-12-29 | 2019-07-09 | 山东浪潮华光光电子股份有限公司 | A kind of surface treatment method for improving LED wafer grinding and scratching |
| CN112192348A (en) * | 2020-09-19 | 2021-01-08 | 金华中烨超硬材料有限公司 | Diamond composite sheet fine polishing machine and fine polishing process |
| CN116572150A (en) * | 2023-06-07 | 2023-08-11 | 上海致领研磨科技有限公司 | Grinder with rough grinding and fine grinding functions |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6152806A (en) * | 1998-12-14 | 2000-11-28 | Applied Materials, Inc. | Concentric platens |
| JP2005153141A (en) * | 2005-01-24 | 2005-06-16 | Yamaha Corp | Grinder |
| CN1981990A (en) * | 2005-12-13 | 2007-06-20 | 上海华虹Nec电子有限公司 | Chemical-mechanical polishing grinding pad |
| CN102975120A (en) * | 2011-09-07 | 2013-03-20 | 台湾积体电路制造股份有限公司 | Method of and apparatus for cmp pad conditioning |
| CN205520898U (en) * | 2016-01-22 | 2016-08-31 | 天通吉成机器技术有限公司 | Single -face grinding device |
-
2016
- 2016-12-16 CN CN201611169134.1A patent/CN106737129A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6152806A (en) * | 1998-12-14 | 2000-11-28 | Applied Materials, Inc. | Concentric platens |
| JP2005153141A (en) * | 2005-01-24 | 2005-06-16 | Yamaha Corp | Grinder |
| CN1981990A (en) * | 2005-12-13 | 2007-06-20 | 上海华虹Nec电子有限公司 | Chemical-mechanical polishing grinding pad |
| CN102975120A (en) * | 2011-09-07 | 2013-03-20 | 台湾积体电路制造股份有限公司 | Method of and apparatus for cmp pad conditioning |
| CN205520898U (en) * | 2016-01-22 | 2016-08-31 | 天通吉成机器技术有限公司 | Single -face grinding device |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107650009A (en) * | 2017-11-20 | 2018-02-02 | 山东省科学院新材料研究所 | A kind of novel wafer polisher lapper |
| CN107650009B (en) * | 2017-11-20 | 2023-08-25 | 山东省科学院新材料研究所 | Novel wafer grinding and polishing machine |
| CN109986412A (en) * | 2017-12-29 | 2019-07-09 | 山东浪潮华光光电子股份有限公司 | A kind of surface treatment method for improving LED wafer grinding and scratching |
| CN108466131A (en) * | 2018-05-30 | 2018-08-31 | 四川欧瑞特光电科技有限公司 | A kind of optical element process equipment |
| CN108608274A (en) * | 2018-06-12 | 2018-10-02 | 常州市润昌光电科技有限公司 | A kind of ultra-precision continuous polishing machine |
| CN109015356A (en) * | 2018-10-23 | 2018-12-18 | 昆山福步工业设备有限公司 | A kind of scroll wheel preventing vibration |
| CN109551359A (en) * | 2018-12-27 | 2019-04-02 | 齐齐哈尔二机床(集团)有限责任公司 | A kind of general set class end-face grinder |
| CN109623612A (en) * | 2018-12-29 | 2019-04-16 | 瑞盛环境股份有限公司 | Magnetic-coagulation High-rate sedimentation purification device and its treatment process |
| CN112192348A (en) * | 2020-09-19 | 2021-01-08 | 金华中烨超硬材料有限公司 | Diamond composite sheet fine polishing machine and fine polishing process |
| CN116572150A (en) * | 2023-06-07 | 2023-08-11 | 上海致领研磨科技有限公司 | Grinder with rough grinding and fine grinding functions |
| CN116572150B (en) * | 2023-06-07 | 2024-01-30 | 上海致领研磨科技有限公司 | Grinder with rough grinding and fine grinding functions |
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Application publication date: 20170531 |