CN206305891U - A kind of magnetorheological double-sided polisher - Google Patents
A kind of magnetorheological double-sided polisher Download PDFInfo
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- CN206305891U CN206305891U CN201621214266.7U CN201621214266U CN206305891U CN 206305891 U CN206305891 U CN 206305891U CN 201621214266 U CN201621214266 U CN 201621214266U CN 206305891 U CN206305891 U CN 206305891U
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Abstract
The utility model provides a kind of magnetorheological double-sided polisher, and twin polishing is carried out using by the magnetorheological of main material removing method of shear pattern, eliminates the surface and sub-surface damage for being polished surface, improves the roughness and finish for being polished surface；The utility model, that is, by improving the flow of magnetic flow liquid and the rotating speed of driving wheel, can significantly improve polishing efficiency by improving the travelling speed of magnetic flow liquid；Polishing efficiency can be improved with the distance between surface is polished by reducing conveyer belt；Polishing efficiency can be significantly improved by increasing nozzle quantity.The utility model is adapted to the twin polishing of different bore planes or curved surface elements by changing magnetic fields area size and shape, magnetic flow liquid conveyer belt size and magnetic flow liquid travelling speed etc., is especially suitable for heavy-calibre element twin polishing.Device of the present utility model can realize that high efficiency is mass produced with parallel combination.
Description
Technical field
The utility model belongs to optical polishing techniques field, and in particular to a kind of twin polishing dress based on magnetorheological
Put.
Background technology
Twin polishing has a wide range of applications in all many-sides such as semiconductor wafer and sapphire material optics.Typically
For, these applications require that the element after twin polishing has roughness higher, finish, smaller or even without surface and Asia
Surface damage, while double-sided polisher will have polishing efficiency high, low production cost is adapted to streamline large-scale production, right
Environmental nonpollution etc..The increase of element bore also proposes requirements at the higher level to twin polishing, such as semiconductor wafers have been wanted
Diameter is asked to reach 450mm.In addition, not only plane needs twin polishing, many curved-surface materials are equally also required to twin polishing.
Current twin polishing focuses primarily upon the polishing method based on normal pressure polishing mechanism.These method fixed abrasive materials
Or loose abrasive, with polished leather etc. for mill imposes on certain normal pressure to element, and then mechanically or chemically machine is carried out to element
Tool is polished.Due to the presence of normal pressure, often there is more serious surface and sub-surface damage, roughness and bright and clean after polishing
Degree etc. cannot meet requirement, and polishing efficiency is relatively low.In addition, current twin polishing is also concentrated mainly in plane component polishing,
Abrasive material often cannot be reclaimed effectively, and the removed material of element surface can not be cleared up effectively, thus result in polishing applicability not
By force, cost is of a relatively high, there are problems that to environment.The twin polishing of heavy-calibre element is also that existing method faces
Individual huge challenge.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of magnetorheological double-sided polisher, i.e., with shearing force as base
The magnetorheological double-sided polisher and method of this cutting mechanisms, for eliminating the surface that twin polishing previous stage-grinding is produced
And sub-surface damage, element surface roughness and finish are improved, polishing efficiency is lifted, reduce the ring of production cost and its generation
Border is polluted, and is suitable for different-thickness the plane component even batch production of curved surface elements.
A kind of magnetorheological double-sided polisher, including magnetic flow liquid supply recovering mechanism and two magnetorheological polishing machines
Structure, each MRF mechanism includes fixed plate, driving wheel, conveyer belt and magnetic holder；The driving wheel is arranged on to be fixed
One end of plate, magnetic holder is fixedly mounted on the other end of fixed plate；Conveyer belt is sleeved on the outline of two driving wheels and magnetic holder
On；Magnetic holder in Liang Ge MRFs mechanism is arranged close to, and polished element is placed between two magnetic holders；Magnetic flow liquid is supplied
Recovering mechanism includes nozzle, recycling box, jet pump and recovery pump；Each conveyer belt at least configures a nozzle and one
Recycling box, nozzle is arranged on the end position of magnetic holder, and the prime direction positioned at belts movement one end；Recycling box is arranged on
Driving wheel outside；Jet pump provides magnetic flow liquid to nozzle, and recovery pump reclaims magnetic flow liquid by recycling box；Set in the magnetic holder
Work magnet is put, for producing magnetic flow liquid to produce the magnetic field of rheology.
Further, also including support, described two MRF mechanisms are fixed on support, and support controls two magnetic
The relative position of rheology polishing mechanism.
Further, the MRF mechanism also includes auxiliary magnet, is arranged near conveyer belt, for controlling magnetic
Rheology liquid Stable distritation on conveyer belt.
Further, also including replacer, for fixed polished element and the polished member motion of control.
Preferably, the quantity of the work magnet is, more than or equal to two, to be evenly arranged in magnetic holder, two neighboring work
Make the polarity of magnet mirror each other.
Preferably, the magnetic holder is towards the contour structures of polished element side and the contour structures one of polished element
Cause；The work distribution of magnets shape arranged in magnetic holder is consistent with the contour structures of magnetic holder.
Further, when the polished element is curved surface, magnetic holder is towards the contour structures of polished element side
The curved surface consistent with the contour structures of polished element.
Further, also including magnetic flow liquid control system, magnetic flow liquid control system further includes magnetic flow liquid
Agitator, water cooling plant, temperature sensor, pressure sensor, viscosity sensor and electromagnetic flowmeter.
Preferably, the nozzle and recycling box are located at the side that recovering mechanism is supplied near magnetic flow liquid.
Preferably, the active wheel surface is matte surface.
Further, at least two magnetorheological double-sided polisher formation twin polishing systems in parallel, polished
Element is sequentially passed through between two conveyer belts of all of double-sided polisher.
The utility model has the advantages that：
The utility model provides a kind of magnetorheological double-sided polisher, and it is main material removal side to utilize with shear pattern
The magnetorheological of formula carries out twin polishing, eliminates the surface and sub-surface damage for being polished surface, improves and is polished surface
Roughness and finish.The utility model can be by improving the travelling speed of magnetic flow liquid, i.e., by improving magnetic flow liquid
The rotating speed of flow and driving wheel, significantly improves polishing efficiency；Can be by reducing conveyer belt and being polished the distance between surface
And improve polishing efficiency；Polishing efficiency can be significantly improved by increasing nozzle quantity.The utility model is made by changing magnetic field
With area size and shape, magnetic flow liquid conveyer belt size and magnetic flow liquid travelling speed etc. be adapted to different bore planes or
The twin polishing of curved surface elements, is especially suitable for heavy-calibre element twin polishing.Device of the present utility model can be real with parallel combination
Existing high efficiency large-scale production.Magnetic flow liquid is reclaimed and recycled in the utility model, production cost is reduced, to ring
Border is pollution-free.Clearly, Engineering operation is simple and feasible, low cost, is suitable for large-scale mass production for the utility model design concept.
Brief description of the drawings
Fig. 1 is the schematic diagram of the magnetorheological double-sided polisher of the utility model；
Fig. 2 is the generalized section along C-C in Fig. 1 of the magnetorheological double-sided polisher of the utility model；
Fig. 3 is the left view schematic diagram of the magnetorheological double-sided polisher of the utility model；
Fig. 4 is the right view schematic diagram of the magnetorheological double-sided polisher of the utility model；
Fig. 5 (a), Fig. 5 (b), Fig. 5 (c) and Fig. 5 (d) be the magnetorheological double-sided polisher processing plane of the utility model and
The magnetic box of curved surface and magnet schematic shapes；
Fig. 6 is that the utility model parallel combination carries out batch production schematic diagram.
Wherein, the polished elements of 1-, 2- replacers, 3- conveyer belts, 4- magnetic holders, 5- driving wheels, 6- nozzles, 7- liquid bands,
8- fixed plates, 9- auxiliary magnets, 10- recycling boxes, 11- supports, 12- subtubes, 13- jet pumps, 14- main pipelines, 15- controls system
System, 16- reclaims main pipeline, 17- recovery pumps, and 18- reclaims main pipeline, 19- work magnet.
Specific embodiment
Developed simultaneously embodiment below in conjunction with the accompanying drawings, and the utility model is described in detail.
A kind of magnetorheological double-sided polisher, including：The nozzle 6 and related peristaltic pump of the supply magnetic flow liquid.It is described
Reclaim the recycling box 10 and related peristaltic pump of magnetic flow liquid.It is described magnetic flow liquid to be stored and the Properties Control such as temperature-viscosity
Magnetic flow liquid cyclic control system, the magnetic holder 4 of the permanent-magnet type magnet and fixed work magnet 19, the transmission transport magnetic current
Become the conveyer belt 3 in liquid to magnetic field, drive the driving wheel 5 and motor of the motion of conveyer belt 3, the fixed plate of the double-sided polisher
8, the position motion structure and motor of the double-sided polisher, the replacer 2 of shown polishing element.
Each MRF mechanism includes fixed plate 8, driving wheel 5, conveyer belt 3 and magnetic holder 4；The driving wheel 5
Installed in one end of fixed plate 8, magnetic holder 4 is fixedly mounted on the other end of fixed plate 8；Conveyer belt 3 be sleeved on two driving wheels 5 with
And on the outline of magnetic holder 4；Magnetic holder 4 in Liang Ge MRFs mechanism is arranged close to, and polished element 1 is placed in two magnetic holders
Between 4；Magnetic flow liquid supply recovering mechanism includes nozzle 6, recycling box 10, jet pump 13 and recovery pump 17；Each conveyer belt 3
A nozzle 6 and a recycling box 10 are at least configured, nozzle 6 is arranged on the end position of magnetic holder 4, and positioned at conveyer belt 3
One end of the prime direction of motion；Recycling box 10 is arranged on the outside of driving wheel 5；Jet pump 13 provides magnetic flow liquid to nozzle 6, returns
Receive pump 17 and magnetic flow liquid is reclaimed by recycling box 10；Work magnet 19 is set in the magnetic holder 4, for producing magnetic flow liquid to produce
The magnetic field of rheology.
The driving wheel 5 drives the conveyer belt 3 to carry out high-speed motion, and the treatment such as frosted, increase wheel are done in the surface of driving wheel 5
With the frictional force between magnetic flow liquid conveyer belt 3.The magnetic flow liquid band that the magnetic flow liquid conveyer belt 3 sprays the nozzle 6
Enter in magnetic field, form flexible bistrique, the polished element 1 is polished, the recycling box 10 pairs is transmitted by conveyer belt 3
Magnetic flow liquid reclaimed, the magnetic flow liquid of recovery is again introduced into the magnetic flow liquid cyclic control system 15, the magnetic current
Become total each sensor of liquid cyclic control system 15 to be monitored magnetic flow liquid.The double-sided polisher is an approximate mirror
As structure, two parts of A and B can be divided into, wherein the part B being below is, it is necessary to more auxiliary magnets 9 help magnetorheological
Liquid is attached on the conveyer belt 3 of motion, is finally reclaimed.Polished element 1 is located in the middle of the burnishing device, described two-sided
Burnishing device motion can adjust the distance on the conveyer belt 3 and magnet distancing element surface, and can individually adjust
The distance between the A or part B and polishing element surface.The polished element 1 of movement can be realized unified to polishing element
Polishing, adjusting the movement velocity of the driving wheel 5 can adjust polishing efficiency, adjust between the conveyer belt 3 and element surface
Distance can adjust polishing efficiency.
The element of polishing can also be curved surface based on plane component.During surface polishing, magnetic holder 4 connects with conveyer belt 3
Tactile face is designed to plane, and magnet typically also makees corresponding curved design at any time, it is ensured that Distribution of Magnetic Field meets plane twin polishing
Demand；During polishing curved surface, the face that magnetic holder 4 is contacted with conveyer belt 3 is designed to corresponding curved surface, and magnet is typically also made corresponding therewith
Curved design, it is ensured that Distribution of Magnetic Field meets curved surface twin polishing demand, the liquid band 7 that magnetic flow liquid is formed in magnetic fields region with
Curved surface profile has certain identical property.
Nozzle 6 can be one, each region in two distributions in region of double-sided polisher A and B, i.e., in twin polishing
Only have a pair of nozzles 6, or multipair nozzle 6 in device, the use of multipair nozzle 6 can significantly improve twin polishing effect
Rate.During using multipair nozzle 6, the quantity of recycling box 10 also does corresponding increase, it is also possible to simply use a pair larger recycling boxes 10,
When ensureing multipair nozzle 6, magnetic flow liquid can be reclaimed effectively.During using multipair nozzle 6, magnet quantity also does corresponding increasing
Plus, the annex such as magnetic flow liquid recovery and ejection passage also does corresponding increase.
High speed polishing production line can be set up using the magnetorheological double-sided polisher.Magnetorheological double-sided polisher enters
Row parallel combination, forms a set of twin polishing system, and processed element completes double by passing sequentially through each double-sided polisher
Mirror polish.
The utility model provides a kind of magnetorheological double-sided polisher, magnetorheological twin polishing dress as shown in Figure 1
The structural representation put, the magnetorheological double-sided polisher polishing efficiency is high, element without surface and sub-surface damage, roughness and
Finish is good, while can realize carrying out twin polishing to plane and curved surface, low production cost is environmentally safe.
Magnetorheological double-sided polisher in Fig. 1, including replacer 2, replacer 2 are connected with horicontal motion mechanism
(not shown), magnetic flow liquid conveyer belt 3, the magnetic holder 4 equipped with work magnet 19, the operating fields area that work magnet 19 is formed
Workpiece 1 is polished in domain to pass through, and drives the driving wheel 5 of the magnetorheological motion of conveyer belt 3, magnetic flow liquid nozzle 6, magnetic flow liquid spray
The liquid band 7 formed after going out, magnetic flow liquid recycling box 10, support 11 and position travel mechanism, including make upper and lower two of burnishing device
Shaft movement mechanism and its motor (not shown) that part moves up and down；Magnetic flow liquid is circulated and Properties Control system 15 includes
(the figure such as the agitator of magnetic flow liquid, water cooling plant, temperature sensor, pressure sensor, viscosity sensor and electromagnetic flowmeter
In do not show), the magnetic flow liquid that is connected with nozzle 6 sprays subtube 12, and jet pump 13, magnetic flow liquid sprays main pipeline 14, with
The connected recovery main pipeline 16 of recycling box 10, recovery pump 17 reclaims main pipeline 18.The fixed plate 8 of polishing mechanism and the phase of support 11
Even.Aid in multiple auxiliary magnets 9 of magnetic flow liquid Stable distritation on conveyer belt 3.
When carrying out magnetorheological twin polishing for polished element 1, agitator in being first turned on 15, water cooling plant, each
The devices such as sensor, open recovery pump 17 and jet pump 13, and nozzle 6 sprays magnetic flow liquid.Driving wheel 5 presses the direction of ω in Fig. 1
Rotate, drive magnetic flow liquid conveyer belt 3, magnetic flow liquid to bring in magnetic holder 4 magnetic of the magnet generation that works into by magnetic flow liquid conveyer belt 3
In the effectively working region of field, under magnetic fields there is rheology in magnetic flow liquid, form a flexible bistrique.By polished element 1
Position in figure is placed in after being installed by replacer 2, the horicontal motion mechanism being connected with replacer 2 can move element 1, magnetic
The flexible bistrique that rheology liquid is formed carries out the twin polishing based on cut mode to element.Magnetic flow liquid is transported 3 bands of band again
Go out field region, be attached to the help of auxiliary magnet 9 on conveyer belt 3, be recovered box 10 and put away and enter 15, recycling box 10 with
Nozzle 6 is all located at the left side of burnishing device in Fig. 1.Magnetic flow liquid is constantly circulated in the entire system, will not be remained in polished
On element 1, any pollution is not formed.
The distance between magnetic holder 4 and element surface 1 can be adjusted by position travel mechanism 11, be also regulation magnetic flow liquid
The distance between conveyer belt 3 and element surface 1, the nearlyer polishing efficiency of distance are higher.Furthermore it is possible to pass through to adjust driving wheel 5
Ejection flow of rotating speed (travelling speed of magnetic flow liquid) and nozzle 6 etc. adjusts polishing efficiency, and the speed of driving wheel 5 is faster, spray
The flow of mouth 6 is bigger, and polishing efficiency is higher, and other specification should be matching, such as the rotating speed of recovery pump 17.
Fig. 2 is generalized section of the magnetorheological double-sided polisher of the utility model along C-C in Fig. 1, and 7 are attached to magnetic
The liquid band 7 that magnetic flow liquid on rheology liquid conveyer belt 3 is formed, in effective working region that work magnet is formed, the viscosity of liquid band 7 with
Hardness is very big, forms bistrique；In auxiliary magnetic field, the viscosity of liquid band 7 is smaller with hardness but stably can be attached on conveyer belt 3.Work
The N-S magnetic poles for making magnet 19 are staggered.
Fig. 3 is the left view schematic diagram of the magnetorheological double-sided polisher of the utility model, and 3 nozzles 6 make together in example
With 3 recycling boxes 10 of correspondence form 3 magnetic flow liquid bands 7 on conveyer belt 3, and can carry out the combination of other quantity nozzle 6 makes
With recycling box 10 can also only be designed to a larger recycling box 10, it is ensured that the magnetic flow liquid that each nozzle 6 sprays can be returned
Receive.
Fig. 4 is the right view schematic diagram of the magnetorheological double-sided polisher of the utility model, the liquid band 7 that magnetic flow liquid is formed,
It is attached on magnetic flow liquid conveyer belt 3 under the help of auxiliary magnet 9, is moved with conveyer belt 3.
Fig. 5 is magnetic holder 4 and the signal of magnet shape of the magnetorheological double-sided polisher processing plane of the utility model and curved surface
Figure, gives figure (a) (b) (c) (d) four kinds of common elements.The change of magnetic holder 4 and work magnet shape so that magnetic flow liquid is transported
The geometric profile of defeated band 3 also changes therewith, and the viscosity and hardness formed in the working region of magnetic field become big magnetic flow liquid 7 profiles of band
Also change (liquid band 7 is not drawn into), and the profile of liquid band 7 matches with processed plane or curved surface elements profile.Therefore, it can
Effective twin polishing is carried out to surface plate, curved sheets, concave-concave curved surface, biconvex curved surface, plano-convex curved surface and plano-concave curved surface etc..
Fig. 6 is that the utility model parallel combination carries out batch production schematic diagram, 20 and 21,22 and 23,24 and 25, be respectively
The magnetorheological double-sided polisher that the utility model is provided, if equipment for drying carries out parallel combination, forms a set of total system, is added
Work plane component passes sequentially through each double-sided polisher.Combined for producing in batches by this, can further improve effect
Rate and reduces cost.But the twin polishing of plane or curved surface is realized in combination that can be by other means.
In addition, the magnetorheological double-sided polisher of this paper utility models, it is also possible to by increasing magnetic fields region, increase
The area of magnetic flow liquid conveyer belt 3 and the twin polishing using the adaptation heavy-calibre element such as structure of multiinjector 6.
In sum, preferred embodiment of the present utility model is these are only, is not intended to limit of the present utility model
Protection domain.It is all it is of the present utility model spirit and principle within, any modification, equivalent substitution and improvements made etc. all should be wrapped
It is contained within protection domain of the present utility model.
Claims (11)
1. a kind of magnetorheological double-sided polisher, it is characterised in that supply recovering mechanism and two magnetic currents including magnetic flow liquid
Become polishing mechanism, each MRF mechanism includes fixed plate, driving wheel, conveyer belt and magnetic holder；The driving wheel peace
Mounted in one end of fixed plate, magnetic holder is fixedly mounted on the other end of fixed plate；Conveyer belt is sleeved on two driving wheels and magnetic holder
Outline on；Magnetic holder in Liang Ge MRFs mechanism is arranged close to, and polished element is placed between two magnetic holders；Magnetic current
Becoming liquid supply recovering mechanism includes nozzle, recycling box, jet pump and recovery pump；Each conveyer belt at least configures a spray
Mouth and a recycling box, nozzle are arranged on the end position of magnetic holder, and the prime direction positioned at belts movement one end；Reclaim
Box is arranged on driving wheel outside；Jet pump provides magnetic flow liquid to nozzle, and recovery pump reclaims magnetic flow liquid by recycling box；It is described
Work magnet is set in magnetic holder, for producing magnetic flow liquid to produce the magnetic field of rheology.
2. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that described two also including support
MRF mechanism is fixed on support, the relative position of support control Liang Ge MRFs mechanism.
3. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the MRF mechanism is also
Including auxiliary magnet, it is arranged near conveyer belt, for controlling magnetic flow liquid Stable distritation on conveyer belt.
4. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that also including replacer, be used for
Fixed polished element and the polished member motion of control.
5. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the quantity of work magnet be more than
Or equal to two, be evenly arranged in magnetic holder, the polarity of two neighboring work magnet mirror each other.
6. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the magnetic holder is towards polished unit
The contour structures of part side are consistent with the contour structures of polished element；The work distribution of magnets shape and magnetic holder arranged in magnetic holder
Contour structures it is consistent.
7. a kind of magnetorheological double-sided polisher as claimed in claim 6, it is characterised in that when the polished element is song
During face, magnetic holder towards the contour structures of polished element side be the curved surface consistent with the contour structures of polished element.
8. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that also controlled including magnetic flow liquid be
System, magnetic flow liquid control system further include the agitator of magnetic flow liquid, water cooling plant, temperature sensor, pressure sensor,
Viscosity sensor and electromagnetic flowmeter.
9. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the nozzle and recycling box are located at
The side of recovering mechanism is supplied near magnetic flow liquid.
10. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the active wheel surface is mill
Sand surface.
A kind of 11. magnetorheological double-sided polishers as claimed in claim 1, it is characterised in that at least two magnetic currents
Become double-sided polisher formation twin polishing system in parallel, two conveyer belts of the polished element from all of double-sided polisher
Between sequentially pass through.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621214266.7U CN206305891U (en) | 2016-11-10 | 2016-11-10 | A kind of magnetorheological double-sided polisher |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621214266.7U CN206305891U (en) | 2016-11-10 | 2016-11-10 | A kind of magnetorheological double-sided polisher |
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| Publication Number | Publication Date |
|---|---|
| CN206305891U true CN206305891U (en) | 2017-07-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201621214266.7U Active CN206305891U (en) | 2016-11-10 | 2016-11-10 | A kind of magnetorheological double-sided polisher |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106670896A (en) * | 2016-11-10 | 2017-05-17 | 中国科学院长春光学精密机械与物理研究所 | Magneto-rheological two-side polishing device |
| CN107900792A (en) * | 2017-12-27 | 2018-04-13 | 广东工业大学 | A kind of cluster dynamic pressure Magnetorheological Polishing device and method |
-
2016
- 2016-11-10 CN CN201621214266.7U patent/CN206305891U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106670896A (en) * | 2016-11-10 | 2017-05-17 | 中国科学院长春光学精密机械与物理研究所 | Magneto-rheological two-side polishing device |
| CN107900792A (en) * | 2017-12-27 | 2018-04-13 | 广东工业大学 | A kind of cluster dynamic pressure Magnetorheological Polishing device and method |
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