CN106670896A - Magneto-rheological two-side polishing device - Google Patents
Magneto-rheological two-side polishing device Download PDFInfo
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- CN106670896A CN106670896A CN201610991703.4A CN201610991703A CN106670896A CN 106670896 A CN106670896 A CN 106670896A CN 201610991703 A CN201610991703 A CN 201610991703A CN 106670896 A CN106670896 A CN 106670896A
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- magnetic
- flow liquid
- double
- magneto
- sided polisher
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/102—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using an alternating magnetic field
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Abstract
The invention provides a magneto-rheological two-side polishing device. According to the magneto-rheological two-side polishing device, magneto-rheology which uses a shearing manner as a main material removing manner is used for performing two-side polishing, so that the damage to a surface and a subsurface of a polished surface is eliminated, and the roughness and the smooth finish of the polished surface are enhanced. According to the magneto-rheological two-side polishing device disclosed by the invention, the polishing efficiency can be significantly improved by raising the conveying speed of magneto-rheological fluid, namely by raising the flow of the magneto-rheological fluid and the rotating speed of a driving wheel; the polishing efficiency can be improved by shortening the distance between a conveying belt and the polished surface; and the polishing efficiency can be significantly improved by increasing the number of nozzles. The magneto-rheological two-side polishing device disclosed by the invention can be adapted to two-side polishing of planar elements with different calibers or curved-surface elements with different calibers by changing the size and the shape of a region affected by a magnetic field, the size of the magneto-rheological fluid conveying belt, the conveying speed of the magneto-rheological fluid and the like, and is particularly suitable for the two-side polishing of elements with large calibers. The magneto-rheological two-side polishing devices disclosed by the invention can be connected in parallel, so that high-efficiency large scale production can be realized.
Description
Technical field
The invention belongs to optical polishing techniques field, and in particular to a kind of double-sided polisher based on magnetorheological.
Background technology
Twin polishing has a wide range of applications in all many-sides such as semiconductor wafer and sapphire material optics.Typically
For, these applications require that the element after twin polishing has higher roughness, fineness, less or even without surface and Asia
Surface damage, while double-sided polisher will have high polishing efficiency, low production cost is adapted to streamline large-scale production, right
Environmental nonpollution etc..The increase of element bore also proposes requirements at the higher level to twin polishing, such as semiconductor wafers have been wanted
Diameter is asked to reach 450mm.In addition, not only plane needs twin polishing, many curved-surface materials to be equally also required to twin polishing.
Twin polishing at present focuses primarily upon the finishing method based on normal pressure polishing mechanism.These method fixed abrasive materials
Or loose abrasive, certain normal pressure is imposed on to element by mill of polished leather etc., and then mechanically or chemically machine is carried out to element
Tool is polished.Due to the presence of normal pressure, often there is more serious surface and sub-surface damage after polishing, roughness and bright and clean
Degree etc. cannot meet requirement, and polishing efficiency is relatively low.In addition, current twin polishing is also concentrated mainly in plane component polishing,
Abrasive material often cannot efficient recovery, the removed material of element surface can not clear up effectively, thus result in the polishing suitability not
By force, cost is of a relatively high, there are problems that to environment.The twin polishing of heavy-calibre element is also that existing method faces
Individual huge challenge.
The content of the invention
In view of this, it is an object of the invention to provide a kind of magnetorheological double-sided polisher, i.e., with shearing force to go substantially
Except the magnetorheological double-sided polisher and method of mechanism, for eliminating surface and the Asia that twin polishing previous stage-grinding is produced
Surface damage, improves element surface roughness and fineness, lifts polishing efficiency, and the environment for reducing production cost and its generation is dirty
Dye, is suitable for different-thickness the plane component even batch production of curved surface elements.
A kind of magnetorheological double-sided polisher, including magnetic flow liquid supply recovering mechanism and two magnetorheological polishing machines
Structure, each MRF mechanism includes fixed plate, drivewheel, conveyer belt and magnetic holder；The drivewheel is arranged on to be fixed
One end of plate, magnetic holder is fixedly mounted on the other end of fixed plate；Conveyer belt is sleeved on the outline of two drivewheels and magnetic holder
On；Magnetic holder in Liang Ge MRFs mechanism is arranged close to, and polished element is placed between two magnetic holders；Magnetic flow liquid is supplied
Recovering mechanism includes nozzle, recycling box, jet pump and recovery pump；Each conveyer belt at least configures a nozzle and one
Recycling box, nozzle is arranged on the end position of magnetic holder, and one end of the prime direction positioned at belts movement；Recycling box is arranged on
Drivewheel outside；Jet pump to nozzle provides magnetic flow liquid, and recovery pump reclaims magnetic flow liquid by recycling box；Set in the magnetic holder
Work Magnet is put, for producing the magnetic field that magnetic flow liquid produces rheology.
Further, also including support, described two MRF mechanisms are fixed on support, and support controls two magnetic
The relative position of rheology polishing mechanism.
Further, the MRF mechanism also includes auxiliary magnet, is arranged near conveyer belt, for controlling magnetic
Rheology liquid Stable distritation on conveyer belt.
Further, also including replacer, for fixed polished element and the polished member motion of control.
Preferably, the quantity of the work Magnet is, more than or equal to two, to be evenly arranged in magnetic holder, two neighboring work
Make the polarity of Magnet mirror image relationship each other.
Preferably, the magnetic holder is towards the contour structures of polished element side and the contour structures one of polished element
Cause；The work distribution of magnets shape arranged in magnetic holder is consistent with the contour structures of magnetic holder.
Further, when the polished element is curved surface, magnetic holder is towards the contour structures of polished element side
The curved surface consistent with the contour structures of polished element.
Further, also including magnetic flow liquid control system, magnetic flow liquid control system further includes magnetic flow liquid
Agitator, water cooling plant, temperature sensor, pressure transducer, viscosity sensor and electromagnetic flowmeter.
Preferably, the nozzle and recycling box are located at the side that recovering mechanism is supplied near magnetic flow liquid.
Preferably, the active wheel surface is matte surface.
Further, at least two magnetorheological double-sided polisher parallel connections form twin polishing system, polished
Element between two conveyer belts of all of double-sided polisher from sequentially passing through.
The present invention has the advantages that：
The invention provides a kind of magnetorheological double-sided polisher, using with shear pattern as main material removing method
It is magnetorheological to carry out twin polishing, surface and the sub-surface damage on polished surface are eliminated, improve the coarse of polished surface
Degree and fineness.The present invention can pass through the travelling speed for improving magnetic flow liquid, the i.e. flow by raising magnetic flow liquid and master
The rotating speed of driving wheel, significantly improves polishing efficiency；Can improve and throw by reducing the distance between conveyer belt and polished surface
Light efficiency；Polishing efficiency can be significantly improved by increasing nozzle quantity.The present invention by change the action of a magnetic field area size with
Shape, magnetic flow liquid conveyer belt size and magnetic flow liquid travelling speed etc. are adapted to the double of different bore planes or curved surface elements
Mirror polish, is especially suitable for heavy-calibre element twin polishing.The device of the present invention can realize that high efficiency is given birth on a large scale with parallel combination
Produce.In the present invention magnetic flow liquid is reclaimed and recycled, reduced production cost, environmentally safe.Present invention design
Definite conception, Engineering operation is simple and feasible, low cost, is suitable for large-scale mass production.
Description of the drawings
Fig. 1 is the schematic diagram of magnetorheological double-sided polisher of the invention；
Fig. 2 is the generalized section along C-C in Fig. 1 of magnetorheological double-sided polisher of the invention；
Fig. 3 is the left view schematic diagram of magnetorheological double-sided polisher of the invention；
Fig. 4 is the right view schematic diagram of magnetorheological double-sided polisher of the invention；
Fig. 5 (a), Fig. 5 (b), Fig. 5 (c) and Fig. 5 (d) are magnetorheological double-sided polisher processing plane of the invention and curved surface
Magnetic box and Magnet schematic shapes；
Fig. 6 is that parallel combination of the present invention carries out batch production schematic diagram.
Wherein, the polished elements of 1-, 2- replacers, 3- conveyer belts, 4- magnetic holders, 5- drivewheels, 6- nozzles, 7- liquid bands,
8- fixed plates, 9- auxiliary magnets, 10- recycling boxes, 11- supports, 12- subtubes, 13- jet pumps, 14- main pipelines, 15- controls system
System, 16- reclaims main pipeline, 17- recovery pumps, and 18- reclaims main pipeline, 19- work Magnet.
Specific embodiment
Develop simultaneously below in conjunction with the accompanying drawings embodiment, describes the present invention.
A kind of magnetorheological double-sided polisher, including：The nozzle 6 and related peristaltic pump of the supply magnetic flow liquid.It is described
Reclaim the recycling box 10 and related peristaltic pump of magnetic flow liquid.It is described magnetic flow liquid to be stored and the Properties Control such as temperature-viscosity
Magnetic flow liquid cyclic control system, the magnetic holder 4 of the permanent-magnet type Magnet and fixed work Magnet 19, the transmission transport magnetic current
Become the conveyer belt 3 in liquid to magnetic field, drive the drivewheel 5 and motor of the motion of conveyer belt 3, the fixed plate of the double-sided polisher
8, the position motion structure of the double-sided polisher and motor, the replacer 2 of shown polishing element.
Each MRF mechanism includes fixed plate 8, drivewheel 5, conveyer belt 3 and magnetic holder 4；The drivewheel 5
Installed in one end of fixed plate 8, magnetic holder 4 is fixedly mounted on the other end of fixed plate 8；Conveyer belt 3 be sleeved on two drivewheels 5 with
And on the outline of magnetic holder 4；Magnetic holder 4 in Liang Ge MRFs mechanism is arranged close to, and polished element 1 is placed in two magnetic holders
Between 4；Magnetic flow liquid supply recovering mechanism includes nozzle 6, recycling box 10, jet pump 13 and recovery pump 17；Each conveyer belt 3
A nozzle 6 and a recycling box 10 are at least configured, nozzle 6 is arranged on the end position of magnetic holder 4, and positioned at conveyer belt 3
One end of the prime direction of motion；Recycling box 10 is arranged on the outside of drivewheel 5；Jet pump 13 to nozzle 6 provides magnetic flow liquid, returns
Receive pump 17 and magnetic flow liquid is reclaimed by recycling box 10；Work Magnet 19 is set in the magnetic holder 4, is produced for producing magnetic flow liquid
The magnetic field of rheology.
The drivewheel 5 drives the conveyer belt 3 to carry out high-speed motion, and the process such as frosted, increase wheel are done in the surface of drivewheel 5
With the frictional force between magnetic flow liquid conveyer belt 3.The magnetic flow liquid band that the magnetic flow liquid conveyer belt 3 sprays at the nozzle 6
In entering magnetic field, flexible bistrique is formed, the polished element 1 is polished, the recycling box 10 pairs is transmitted through conveyer belt 3
Magnetic flow liquid reclaimed, the magnetic flow liquid of recovery is again introduced into the magnetic flow liquid cyclic control system 15, the magnetic current
Become total each sensor of liquid cyclic control system 15 to be monitored magnetic flow liquid.The double-sided polisher is an approximate mirror
As structure, two parts of A and B can be divided into, wherein the part B being below, needs more auxiliary magnets 9 to help magnetorheological
Liquid is attached on the conveyer belt 3 of motion, is finally reclaimed.Polished element 1 is located in the middle of the burnishing device, described two-sided
Burnishing device motion can adjust the distance on the conveyer belt 3 and Magnet distancing element surface, and can individually adjust
The distance between the A or part B and polishing element surface.The polished element 1 of movement can be realized unified to polishing element
Polishing, adjusting the movement velocity of the drivewheel 5 can adjust polishing efficiency, adjust between the conveyer belt 3 and element surface
Distance can adjust polishing efficiency.
The element of polishing can also be curved surface based on plane component.During surface polishing, magnetic holder 4 connects with conveyer belt 3
Tactile face is designed to plane, and Magnet typically also makees at any time corresponding curved design, it is ensured that Distribution of Magnetic Field meets plane twin polishing
Demand；During polishing curved surface, the face that magnetic holder 4 is contacted with conveyer belt 3 is designed to corresponding curved surface, and Magnet is typically also made therewith corresponding
Curved design, it is ensured that Distribution of Magnetic Field meets curved surface twin polishing demand, the liquid band 7 that magnetic flow liquid is formed in the action of a magnetic field region with
Curved surface profile has certain identical property.
Distribution of the nozzle 6 in two regions of double-sided polisher A and B can be one, each region, i.e., in twin polishing
Only have a pair of nozzles 6, or multipair nozzle 6 in device, the use of multipair nozzle 6 can significantly improve twin polishing effect
Rate.During using multipair nozzle 6, the quantity of recycling box 10 also does corresponding increase, it is also possible to simply use a pair larger recycling boxes 10,
When ensureing multipair nozzle 6, magnetic flow liquid being capable of efficient recovery.During using multipair nozzle 6, Magnet quantity also does corresponding increasing
Plus, the adnexa such as magnetic flow liquid recovery and ejection passage also does corresponding increase.
High speed polishing production line can be set up using the magnetorheological double-sided polisher.Magnetorheological double-sided polisher enters
Row parallel combination, forms a set of twin polishing system, and processed element completes double by passing sequentially through each double-sided polisher
Mirror polish.
The present invention is to provide a kind of magnetorheological double-sided polisher, magnetorheological double-sided polisher as shown in Figure 1
Structural representation, the magnetorheological double-sided polisher polishing efficiency is high, element without surface and sub-surface damage, roughness and bright and clean
Spend, while can realize carrying out twin polishing, low production cost, environmentally safe to plane and curved surface.
Magnetorheological double-sided polisher in Fig. 1, including replacer 2, replacer 2 is connected with horicontal motion mechanism
(not shown), magnetic flow liquid conveyer belt 3, the magnetic holder 4 equipped with work Magnet 19, the operating fields area that the Magnet 19 that works is formed
There is polished workpiece 1 to pass through in domain, drive the drivewheel 5 of the magnetorheological motion of conveyer belt 3, magnetic flow liquid nozzle 6, magnetic flow liquid spray
The liquid band 7 formed after going out, magnetic flow liquid recycling box 10, support 11 and position travel mechanism, it is upper and lower two including burnishing device is made
Shaft movement mechanism and its motor (not shown) that part moves up and down；Magnetic flow liquid is circulated and Properties Control system 15 includes
(the figure such as the agitator of magnetic flow liquid, water cooling plant, temperature sensor, pressure transducer, viscosity sensor and electromagnetic flowmeter
In do not show), the magnetic flow liquid that is connected with nozzle 6 sprays subtube 12, and jet pump 13, magnetic flow liquid sprays main pipeline 14, with
The connected recovery main pipeline 16 of recycling box 10, recovery pump 17 reclaims main pipeline 18.The fixed plate 8 of polishing mechanism and the phase of support 11
Even.Multiple auxiliary magnets 9 of auxiliary magnetic flow liquid Stable distritation on conveyer belt 3.
When magnetorheological twin polishing is carried out for polished element 1, agitator in being first turned on 15, water cooling plant, each
The devices such as sensor, open recovery pump 17 and jet pump 13, and nozzle 6 sprays magnetic flow liquid.Drivewheel 5 presses the direction of ω in Fig. 1
Rotate, drive magnetic flow liquid conveyer belt 3, magnetic flow liquid to be brought in magnetic holder 4 into the magnetic of the Magnet generation that works by magnetic flow liquid conveyer belt 3
In the effectively working region of field, under the action of a magnetic field there is rheology in magnetic flow liquid, form a flexible bistrique.By polished element 1
Position in figure is placed in after being installed by replacer 2, the horicontal motion mechanism being connected with replacer 2 moves can element 1, magnetic
The flexible bistrique that rheology liquid is formed carries out the twin polishing based on cut mode to element.Magnetic flow liquid is transported again 3 bands of band
Go out field region, be attached on conveyer belt 3 with the help of auxiliary magnet 9, be recovered box 10 and put away and enter 15, recycling box 10 with
Nozzle 6 is all located at the left side of burnishing device in Fig. 1.Magnetic flow liquid is constantly circulated in the entire system, will not be remained in polished
On element 1, any pollution is not formed.
The distance between magnetic holder 4 and element surface 1 can be adjusted by position travel mechanism 11, be also to adjust magnetic flow liquid
The distance between conveyer belt 3 and element surface 1, the nearlyer polishing efficiency of distance is higher.Furthermore it is possible to pass through to adjust drivewheel 5
Ejection flow of rotating speed (travelling speed of magnetic flow liquid) and nozzle 6 etc. adjusts polishing efficiency, and the speed of drivewheel 5 is faster, spray
The flow of mouth 6 is bigger, and polishing efficiency is higher, and other specification should be matching, such as the rotating speed of recovery pump 17.
Fig. 2 is generalized section of the magnetorheological double-sided polisher of the invention along C-C in Fig. 1,7 be attached to it is magnetorheological
The liquid band 7 that magnetic flow liquid on liquid conveyer belt 3 is formed, in effective working region that work Magnet is formed, the viscosity of liquid band 7 and hardness
It is very big, form bistrique；In auxiliary magnetic field, the viscosity of liquid band 7 is less with hardness but stably can be attached on conveyer belt 3.Work magnetic
The N-S magnetic poles of ferrum 19 are staggered.
Fig. 3 is the left view schematic diagram of magnetorheological double-sided polisher of the invention, and 3 nozzles 6 are used together in example, right
3 recycling boxes 10 are answered, 3 magnetic flow liquid bands 7 are formed on conveyer belt 3, other quantity nozzle 6 can be carried out and be applied in combination, returned
Receiving box 10 can also only be designed to a larger recycling box 10, it is ensured that the magnetic flow liquid that each nozzle 6 sprays can be reclaimed i.e.
Can.
Fig. 4 is the right view schematic diagram of magnetorheological double-sided polisher of the invention, the liquid band 7 that magnetic flow liquid is formed, auxiliary
Magnetic assist ferrum 9 is attached on magnetic flow liquid conveyer belt 3 under helping, and is moved with conveyer belt 3.
Fig. 5 is the magnetic holder 4 and Magnet schematic shapes of magnetorheological double-sided polisher processing plane of the invention and curved surface, is given
Figure (a) (b) (c) (d) four kinds of common elements are gone out.The change of magnetic holder 4 and work Magnet shape so that magnetic flow liquid conveyer belt 3
Geometric profile also changes therewith, and the viscosity formed in the working region of magnetic field and hardness become big magnetic flow liquid 7 profiles of band and also sends out
Raw to change (liquid band 7 is not drawn into), the profile of liquid band 7 matches with processed plane or curved surface elements profile.Therefore, it can to flat
Panel, curved sheets, concave-concave curved surface, biconvex curved surface, plano-convex curved surface and plano-concave curved surface etc. carry out effective twin polishing.
Fig. 6 is that parallel combination of the present invention carries out batch production schematic diagram, 20 and 21,22 and 23,24 and 25, it is respectively this
The magnetorheological double-sided polisher of bright offer, if equipment for drying carries out parallel combination, forms a set of total system, is processed flat element
Part passes sequentially through each double-sided polisher.Combined for producing in batches by this, can further improve efficiency and reduce
Cost.But the twin polishing of plane or curved surface is realized in combination that can be by other means.
In addition, the magnetorheological double-sided polisher invented herein, it is also possible to by increasing the action of a magnetic field region, increase magnetic current
Become the area of liquid conveyer belt 3 and adapt to the twin polishing of heavy-calibre element using structure of multiinjector 6 etc..
In sum, presently preferred embodiments of the present invention is these are only, is not intended to limit protection scope of the present invention.
All any modification, equivalent substitution and improvements within the spirit and principles in the present invention, made etc., should be included in the present invention's
Within protection domain.
Claims (11)
1. a kind of magnetorheological double-sided polisher, it is characterised in that supply recovering mechanism and two magnetic currents including magnetic flow liquid
Become polishing mechanism, each MRF mechanism includes fixed plate, drivewheel, conveyer belt and magnetic holder；The drivewheel peace
One end of fixed plate is mounted in, magnetic holder is fixedly mounted on the other end of fixed plate；Conveyer belt is sleeved on two drivewheels and magnetic holder
Outline on；Magnetic holder in Liang Ge MRFs mechanism is arranged close to, and polished element is placed between two magnetic holders；Magnetic current
Becoming liquid supply recovering mechanism includes nozzle, recycling box, jet pump and recovery pump；Each conveyer belt at least configures a spray
Mouth and a recycling box, nozzle is arranged on the end position of magnetic holder, and one end of the prime direction positioned at belts movement；Reclaim
Box is arranged on drivewheel outside；Jet pump to nozzle provides magnetic flow liquid, and recovery pump reclaims magnetic flow liquid by recycling box；It is described
Work Magnet is set in magnetic holder, for producing the magnetic field that magnetic flow liquid produces rheology.
2. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that described two also including support
MRF mechanism is fixed on support, the relative position of support control Liang Ge MRFs mechanism.
3. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the MRF mechanism is also
Including auxiliary magnet, it is arranged near conveyer belt, for controlling magnetic flow liquid Stable distritation on conveyer belt.
4. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that also including replacer, be used for
Fixed polished element and the polished member motion of control.
5. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the quantity of work Magnet be more than
Or equal to two, be evenly arranged in magnetic holder, the polarity of two neighboring work Magnet mirror image relationship each other.
6. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the magnetic holder is towards polished unit
The contour structures of part side are consistent with the contour structures of polished element；The work distribution of magnets shape arranged in magnetic holder and magnetic holder
Contour structures it is consistent.
7. a kind of magnetorheological double-sided polisher as claimed in claim 6, it is characterised in that when the polished element is song
During face, magnetic holder is the curved surface consistent with the contour structures of polished element towards the contour structures of polished element side.
8. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that be also including magnetic flow liquid control
System, magnetic flow liquid control system further include the agitator of magnetic flow liquid, water cooling plant, temperature sensor, pressure transducer,
Viscosity sensor and electromagnetic flowmeter.
9. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the nozzle and recycling box are located at
The side of recovering mechanism is supplied near magnetic flow liquid.
10. a kind of magnetorheological double-sided polisher as claimed in claim 1, it is characterised in that the active wheel surface is mill
Sand surface.
A kind of 11. magnetorheological double-sided polishers as claimed in claim 1, it is characterised in that at least two magnetic currents
Become double-sided polisher formation twin polishing system in parallel, two conveyer belts of the polished element from all of double-sided polisher
Between sequentially pass through.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610991703.4A CN106670896A (en) | 2016-11-10 | 2016-11-10 | Magneto-rheological two-side polishing device |
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| CN201610991703.4A CN106670896A (en) | 2016-11-10 | 2016-11-10 | Magneto-rheological two-side polishing device |
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| CN117226704A (en) * | 2023-11-14 | 2023-12-15 | 四川禾牧机械制造有限公司 | Monocrystalline silicon piece grinding chamfering device and method |
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| CN110962043A (en) * | 2020-01-07 | 2020-04-07 | 蒋利国 | Self-compensating polishing equipment |
| CN117226704A (en) * | 2023-11-14 | 2023-12-15 | 四川禾牧机械制造有限公司 | Monocrystalline silicon piece grinding chamfering device and method |
| CN117226704B (en) * | 2023-11-14 | 2024-02-09 | 四川禾牧机械制造有限公司 | Monocrystalline silicon piece grinding chamfering device and method |
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Application publication date: 20170517 |