CN2707431Y - Super smooth surface polishing apparatus by means of two-dimensional fluid vibration - Google Patents
Super smooth surface polishing apparatus by means of two-dimensional fluid vibration Download PDFInfo
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- CN2707431Y CN2707431Y CN 200320118185 CN200320118185U CN2707431Y CN 2707431 Y CN2707431 Y CN 2707431Y CN 200320118185 CN200320118185 CN 200320118185 CN 200320118185 U CN200320118185 U CN 200320118185U CN 2707431 Y CN2707431 Y CN 2707431Y
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- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The utility model discloses a super smooth surface polishing apparatus by means of two-dimensional fluid vibration, comprising a rotary driving mechanism, an angle regulating mechanism, a planet wheel mechanism, an ultrasonic wave generating device, a horizontal direction vibration generator, a polishing groove, a workpiece clamping mechanism, and a polishing fluid circulating device. The polishing groove can vibrate back and forth in the horizontal direction under the function of the horizontal direction vibration generator. The polishing apparatus uses fluid as the polishing tool. The fluid is made to generate vertical ultrasonic vibration by the ultrasonic wave generating device, and the vertical ultrasonic vibration and the horizontal vibration generated by the horizontal direction vibration generator constitute two-dimensional fluid vibration. The utility model can realize super smooth surface polishing with low cost.
Description
Technical field
The utility model relates to two dimensional fluid vibration Super-smooth Surface Polishing equipment.
Background technology
Present Super-smooth Surface Polishing equipment mostly has been abrasive polishing, adopt solid or viscoelastic body as polishing disk or abrasive material carrier, because the degree of refinement of abrasive material is limited, be difficult to make polishing stable accuracy ground to reach more than the dust level, and when adopting these methods to polish, in order to improve machining accuracy, often directly do not contact between workpiece and polishing disk, and require polishing disk to have very high precision, therefore improved the control difficulty of polishing process, percent defective and processing cost are increased.The utility model can be divided into the two-stage polishing in polishing process.When one-level is polished, can suitably add refined abrasive and chemical substance in the polishing fluid, to improve polishing efficiency, when carrying out the secondary polishing, then adopt pure fluid as polishing fluid, the removal of finishing material jointly by the impact and the tribochemistry effect of fluid molecule, because the fluid molecule diameter is about the dust level, therefore can make the polishing precision reach dust level even atom level.
Summary of the invention
The utility model will provide a kind of Super-smooth Surface Polishing equipment, make polishing stable accuracy ground reach dust level even atom level, and will cut down finished cost significantly.
Whole device of the present utility model is made up of rotary drive mechanism, angle-adjusting mechanism, planetary wheeling mechanism, ultrasonic generator, horizontal direction vibration machine, polishing trough, clamping workpiece mechanism, polishing fluid EGR;
Above-mentioned angle-adjusting mechanism is made up of elevating mechanism and support plate, and above-mentioned rotary drive mechanism is connected with planetary wheeling mechanism by power transmission shaft, and power transmission shaft also connects the support plate in whole planetary wheeling mechanism and the angle-adjusting mechanism;
The above line star-wheel mechanism is made up of tie-rod, planetary gear, fast pulley, planet wheel spindle, and fast pulley is by the spoke of gear ring one side and the support plate rigid connection in the angle-adjusting mechanism, and planetary gear, tie-rod are coupled to parts by planet wheel spindle; Clamping workpiece mechanism is equipped with in planetary gear bottom in the above line star-wheel mechanism,
Above-mentioned horizontal direction vibration machine connects by connecting rod and polishing trough, above-mentioned ultrasonic generator is made of ultrasonic-frequency power supply and immersion ultrasonic transducer, the immersion ultrasonic transducer is installed on the polishing trough internal backplane, polishing trough is connected with the polishing fluid EGR by pipeline, and is installed on the pedestal.
Above-mentioned elevating mechanism can adopt spiral lifting, hydraulic lifting, Pneumatic elevation.
Above-mentioned rotary drive mechanism is by the motor-driven decelerator, and decelerator drives power transmission shaft by belt and planetary wheeling mechanism rotates.
Can support with stage clip or roller between above-mentioned polishing trough and the pedestal.
An airtight container is installed, the sealing entire equipment on said base.
Work piece holder in the above-mentioned clamping workpiece mechanism can adopt vacuum cup or mechanical clamping.
The utility model adopts fluid as polishing tool, and additional two-dimentional dither is to apply polishing action power.The utility model can be divided into the two-stage polishing in polishing process.When one-level is polished, can suitably add refined abrasive and chemical substance in the polishing fluid, abrasive material can be selected nano-diamond powder, SiO
2Nano powder, Al
2O
3Nano powder, TiO
2Nano powder, SiC nano powder, Si
3O
4Some refined abrasives such as nano powder, ferric oxide nano powder; Chemical substance can be added materials such as hydroxide, complex compound, surfactant, acid, alkali.And throw to improve polishing efficiency carrying out secondary, when carrying out the secondary polishing, then adopt pure fluid, the removal of finishing material jointly by the impact and the tribochemistry effect of fluid molecule as polishing fluid.Because the fluid molecule diameter is about the dust level, therefore can make the polishing precision reach dust level even atom level.Simultaneously,, therefore can keep even contact completely with workpiece all the time, greatly reduce the control difficulty because fluid does not have fixed shape.The two dimension dither can form the stable field that shakes in polishing fluid, make fluid molecule or abrasive material provide polishing action power with certain velocity shock surface of the work.Simultaneously, this vibration also can reduce the atomic binding energy of workpiece surface atom, makes the easier removal of material.Dither also can clean surface of the work in addition, avoids surface of the work to pollute, and the even mixing of abrasive material in polishing fluid when helping the one-level polishing.When polishing, form a small inclination (angle is by the elevating mechanism adjustment) between workpiece planarization and horizontal vibration direction, can produce certain dynamic pressure, improve polishing efficiency.
The utility model beneficial effect is to realize the ultra-smooth polishing on plane at low cost.
Description of drawings
Fig. 1 is the profile of the utility model device.
1, ultrasonic-frequency power supply 2, horizontal vibration generator 3, closed container 4, elevating mechanism 5, support plate 6, motor 7, decelerator 8, tie-rod 9, power transmission shaft 10, planetary gear 11, fast pulley 12, polishing fluid EGR 13, pedestal 14, workpiece 15, roller 16, polishing fluid 17, work piece holder 18 immersion ultrasonic transducers 19, polishing trough
The specific embodiment
Below in conjunction with accompanying drawing the utility model is described in further detail.
In the polishing process, workpiece peace 14 is contained on the work piece holder 17, work piece holder can adopt vacuum cup or mechanical installation way, after motor 6 slows down by decelerator 7, driving power transmission shaft 9 by the band kind of drive, gear transmission mode, the chain kind of drive or the turbine and worm kind of drive rotates, power transmission shaft drives planetary gear 10 by tie-rod 8 and rotates around fast pulley 11, planetary gear 10 also has rotation in revolution, can adopt gears engaged mode or friction pulley engagement system to realize at this planetary wheeling mechanism.Workpiece 14 will rotate (the also rotation of both having revolved round the sun) together along with planetary gear, to guarantee the uniformity of polishing.By elevating mechanism 4, can regulate the angle of support plate 5 and horizontal direction, thereby can change the angle of workpiece and horizontal direction.Elevating mechanism can adopt spiral lifting, hydraulic pressure, pneumatic mode.Horizontal direction vibration machine 2 drives polishing trough 19 and makes double vibrations in the horizontal direction, and the vibration that vibration machine produces can be produced by mechanical, pneumatic or electric and magnetic oscillation mode, vibration frequency 2-4000 hertz, and amplitude is adjustable to several millimeters for the hundreds of micron.Immersion ultrasonic transducer 18 produces the ultrasonic vibration of vertical direction, and vibration frequency is the 20000-1000000 hertz, and amplitude is that tens nanometers to tens are micron adjustable.Polishing fluid also can carry out the interpolation and the replacing of polishing fluid by polishing fluid EGR 12.Whole polishing process is finished in closed container 3, applies certain pressure (1-10 atmospheric pressure is adjustable) in the container, and this pressure to surface of the work, can increase the rubbing action of liquid to workpiece by liquid transfer.
Claims (6)
1, a kind of two dimensional fluid vibration Super-smooth Surface Polishing equipment, it is characterized in that: this equipment is made up of rotary drive mechanism, angle-adjusting mechanism, planetary wheeling mechanism, ultrasonic generator, horizontal direction vibration machine, polishing trough, clamping workpiece mechanism, polishing fluid EGR;
Above-mentioned angle-adjusting mechanism is made up of elevating mechanism and support plate, and above-mentioned rotary drive mechanism is connected with planetary wheeling mechanism by power transmission shaft, and power transmission shaft also connects the support plate in whole planetary wheeling mechanism and the angle-adjusting mechanism;
The above line star-wheel mechanism is made up of tie-rod, planetary gear, fast pulley, planet wheel spindle, and fast pulley is by the spoke of gear ring one side and the support plate rigid connection in the angle-adjusting mechanism, and planetary gear, tie-rod are coupled to parts by planet wheel spindle; Clamping workpiece mechanism is equipped with in planetary gear bottom in the above line star-wheel mechanism,
Above-mentioned horizontal direction vibration machine connects by connecting rod and polishing trough, above-mentioned ultrasonic generator is made of ultrasonic-frequency power supply and immersion ultrasonic transducer, the immersion ultrasonic transducer is installed on the polishing trough internal backplane, polishing trough is connected with the polishing fluid EGR by pipeline, and is installed on the pedestal.
2. according to the vibration of the two dimensional fluid described in the claim 1 Super-smooth Surface Polishing equipment, it is characterized in that: above-mentioned elevating mechanism can adopt spiral lifting, hydraulic lifting, Pneumatic elevation.
3. according to the vibration of the two dimensional fluid described in the claim 1 Super-smooth Surface Polishing equipment, it is characterized in that: above-mentioned rotary drive mechanism is by the motor-driven decelerator, and decelerator drives power transmission shaft by belt and planetary wheeling mechanism rotates.
4. according to the vibration of the two dimensional fluid described in the claim 1 Super-smooth Surface Polishing equipment, it is characterized in that: can support with stage clip or roller between above-mentioned polishing trough and the pedestal.
5. according to the vibration of the two dimensional fluid described in the claim 1 Super-smooth Surface Polishing equipment, it is characterized in that: an airtight container is installed, the sealing entire equipment on said base.
6. according to the two dimensional fluid described in the claim 1 vibration Super-smooth Surface Polishing equipment, it is characterized in that: the work piece holder in the above-mentioned clamping workpiece mechanism can adopt vacuum cup or mechanical clamping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320118185 CN2707431Y (en) | 2003-11-18 | 2003-11-18 | Super smooth surface polishing apparatus by means of two-dimensional fluid vibration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320118185 CN2707431Y (en) | 2003-11-18 | 2003-11-18 | Super smooth surface polishing apparatus by means of two-dimensional fluid vibration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2707431Y true CN2707431Y (en) | 2005-07-06 |
Family
ID=34845318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200320118185 Expired - Lifetime CN2707431Y (en) | 2003-11-18 | 2003-11-18 | Super smooth surface polishing apparatus by means of two-dimensional fluid vibration |
Country Status (1)
| Country | Link |
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| CN (1) | CN2707431Y (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100484709C (en) * | 2003-11-18 | 2009-05-06 | 广东工业大学 | Bidimensional fluid vibration ultra smooth surface polishing equipment and its polishing method |
| CN102233536A (en) * | 2011-05-10 | 2011-11-09 | 淄博隆嘉工贸有限公司 | Automatic polishing machine for ceramic moveable mould |
| CN103551926A (en) * | 2013-11-11 | 2014-02-05 | 广东工业大学 | Device for polishing micropores through electrophoresis auxiliary micro-ultrasonic or micro-rotating ultrasonic and processing method |
| CN103692035A (en) * | 2013-12-19 | 2014-04-02 | 华南理工大学 | Device for conducting electrical discharge machining on thread-like metal material |
| CN105773318A (en) * | 2015-11-12 | 2016-07-20 | 中国石油大学(华东) | Immersed type ultrasonic surface treatment method for polymer 3D printed product |
| CN106181596A (en) * | 2016-09-14 | 2016-12-07 | 青岛理工大学 | Multi-angle two-dimensional ultrasonic vibration aided nano fluid micro lubrication grinding attachment |
| CN106239274A (en) * | 2016-08-22 | 2016-12-21 | 天津理工大学 | A kind of multidimensional variable element vibrating machine burnishing device and fuzzy PID control method thereof |
| CN108015663A (en) * | 2017-10-30 | 2018-05-11 | 湘潭大学 | A kind of device that chamfering is polished to sapphire wafer edge |
| CN109605139A (en) * | 2018-12-29 | 2019-04-12 | 苏州殷绿勒精密机械科技有限公司 | A kind of ultrasonic activation workbench |
| CN111185816A (en) * | 2020-01-10 | 2020-05-22 | 中国工程物理研究院激光聚变研究中心 | Two-dimensional random vibration polishing machine tool and polishing method thereof |
| CN111376167A (en) * | 2020-05-06 | 2020-07-07 | 杭州励博家居有限公司 | Machining and grinding device for machining household furniture rapidly on large scale |
| CN111993258A (en) * | 2020-08-19 | 2020-11-27 | 广东长盈精密技术有限公司 | Polishing jig, polishing device and polishing method of mobile phone middle frame |
-
2003
- 2003-11-18 CN CN 200320118185 patent/CN2707431Y/en not_active Expired - Lifetime
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100484709C (en) * | 2003-11-18 | 2009-05-06 | 广东工业大学 | Bidimensional fluid vibration ultra smooth surface polishing equipment and its polishing method |
| CN102233536A (en) * | 2011-05-10 | 2011-11-09 | 淄博隆嘉工贸有限公司 | Automatic polishing machine for ceramic moveable mould |
| CN103551926A (en) * | 2013-11-11 | 2014-02-05 | 广东工业大学 | Device for polishing micropores through electrophoresis auxiliary micro-ultrasonic or micro-rotating ultrasonic and processing method |
| CN103551926B (en) * | 2013-11-11 | 2016-03-02 | 广东工业大学 | The device of the ultrasonic or fine rotary ultrasonic polishing micropore of a kind of electrophoresis assist and processing method |
| CN103692035A (en) * | 2013-12-19 | 2014-04-02 | 华南理工大学 | Device for conducting electrical discharge machining on thread-like metal material |
| CN105773318A (en) * | 2015-11-12 | 2016-07-20 | 中国石油大学(华东) | Immersed type ultrasonic surface treatment method for polymer 3D printed product |
| CN106239274A (en) * | 2016-08-22 | 2016-12-21 | 天津理工大学 | A kind of multidimensional variable element vibrating machine burnishing device and fuzzy PID control method thereof |
| CN106181596A (en) * | 2016-09-14 | 2016-12-07 | 青岛理工大学 | Multi-angle two-dimensional ultrasonic vibration aided nano fluid micro lubrication grinding attachment |
| CN108015663A (en) * | 2017-10-30 | 2018-05-11 | 湘潭大学 | A kind of device that chamfering is polished to sapphire wafer edge |
| CN109605139A (en) * | 2018-12-29 | 2019-04-12 | 苏州殷绿勒精密机械科技有限公司 | A kind of ultrasonic activation workbench |
| CN111185816A (en) * | 2020-01-10 | 2020-05-22 | 中国工程物理研究院激光聚变研究中心 | Two-dimensional random vibration polishing machine tool and polishing method thereof |
| CN111376167A (en) * | 2020-05-06 | 2020-07-07 | 杭州励博家居有限公司 | Machining and grinding device for machining household furniture rapidly on large scale |
| CN111993258A (en) * | 2020-08-19 | 2020-11-27 | 广东长盈精密技术有限公司 | Polishing jig, polishing device and polishing method of mobile phone middle frame |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20090506 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |