CN103551926B - The device of the ultrasonic or fine rotary ultrasonic polishing micropore of a kind of electrophoresis assist and processing method - Google Patents
The device of the ultrasonic or fine rotary ultrasonic polishing micropore of a kind of electrophoresis assist and processing method Download PDFInfo
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- CN103551926B CN103551926B CN201310556649.7A CN201310556649A CN103551926B CN 103551926 B CN103551926 B CN 103551926B CN 201310556649 A CN201310556649 A CN 201310556649A CN 103551926 B CN103551926 B CN 103551926B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/002—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to the polishing of metal or hard brittle materia micropore inner surface, is the ultrasonic or fine device of rotary ultrasonic polishing micropore of a kind of electrophoresis assist and the method for polishing micropore.Be combined with each other auxiliary for electrophoresis with fine Ultrasonic machining, the suction-operated of electrophoresis makes ultra micro abrasive particle be adsorbed on micro tool surface, micropore workpiece and micro tool are under the servo feed system of fine ultrasonic machine tool drives, through micropore workpiece, micro tool is dither vertically, drive the violent disturbance of working solution, thus make the inner surface of ultra micro abrasive particle swiping micropore workpiece, to reach the object of micropore workpiece being carried out to polishing; Implement the processing of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist; Thus realizing polishing diameter being less than or equal to 100 micrometer Millipore, the utilization rate improving ultra micro abrasive material also can reduce the roughness of micropore inner surface.
Description
Technical field
The present invention relates to the polishing of metal or hard brittle materia micropore inner surface, the ultrasonic or fine device of rotary ultrasonic polishing micropore of especially a kind of electrophoresis assist and the method for polishing micropore.
Background technology
Along with the development of science and technology, micro-structural, small parts and fine product increase day by day in the demand of the industrial circles such as electronics, optics, machinery, biotechnology, communication.For reduce part wearing and tearing, improve its quality of fit, improve the performance such as fatigue strength and corrosion resistance, people propose more and more higher requirement to the microcosmic geometric accuracy of piece surface and surface roughness, and these requirements serve impetus to the fast development of Finishing.Nowadays the design of product trends towards light, thin, little day by day, such as, for various complex structure and be difficult to the workpiece utilizing Traditional Man polishing mode, micro hole etc.Need the help of new polishing technology.
At present, micro hole machining extensively adopts the technology such as spark technology, laser technology, electric pulse, electron beam, drilling and electrochemistry.After processing, generally do not reach great surface quality, need to be reached by precise polishing method to remove burr, remelted layer, micro-crack, reduce surface roughness.At aerospace field, due to the burr remnants of part, the gesture stability having a strong impact on satellite normally works, require that the burr remnants of porous intersection is less than 0.005mm, more and more urgent to micro hole Ultra-precision Turning demand, and traditional abrasive Flow Machining technology is exactly arise at the historic moment in this context.
Abrasive flow machining utilizes abrasive particle to realize relative to the compressional movement of surface to be machined, abrasive particle must abrasive Flow medium carrying under pressured masterpiece continuous-flow, abrasive Flow Machining technology can be divided into dynamic pressure abrasive Flow Machining and static pressure abrasive Flow Machining technology, static pressure abrasive Flow Machining technology is that recent two decades grows up, its adopts the very high high-molecular organic material of viscosity as medium, the abrasive particle with shear action is suspended, wherein form viscoplasticity abrasive material, make abrasive material contact with surface to be machined under pressure, produce shear action and carry out skin processing.The shear action being boundary layer abrasive particle by being close to wall due to abrasive Flow Machining produces polishing effect, and in passage, abrasive Flow velocity flow profile radially directly has influence on boundary layer abrasive particle at the motion of wall and force-bearing situation, and then determines processing effect.
Applicant was on May 22nd, 2013, and submitted a application to, name is called a kind of electrophoresis assist ultrasonic machine tool and processing method, and application number is 201310192315.6.Mainly describe the structure and machining method of electrophoresis assist ultrasonic machine tool, and the application proposes when technical problem unmanageable in the face of micro hole.Because abrasive Flow is that abrasive particle realizes relative to the compressional movement of surface to be machined, Kong Yue little is more difficult to realize, and required extruding force is larger, higher to the requirement of hydraulic system and equipment.Abrasive material working solution compares dispersion between workpiece and instrument, and abrasive material utilization rate is not high, affects polishing efficiency, especially adopts abrasive Flow to be difficult to realize for minimum micropore.
Summary of the invention
The object of the invention is to consider the problems referred to above and device that the ultrasonic or fine rotary ultrasonic polishing micropore of a kind of electrophoresis assist is provided; Meanwhile, present invention also offers the method adopting described device to carry out polishing micropore, and effectively can solve the polishing of abrasive particle utilization rate and micro hole.
For achieving the above object, the technical scheme that the present invention takes is: the device of the ultrasonic or fine rotary ultrasonic polishing micropore of a kind of electrophoresis assist, comprises fine ultrasonic machine tool, electrophoresis dc source, micro tool, working solution, ultra micro abrasive particle, micropore workpiece, electrophoresis assist circular electrode; Described fine ultrasonic machine tool comprises axis system, enters electric system, the fine ultrasonic longitudinal vibration system of main shaft; Enter electric system described in described electrophoresis dc source passes through, its positive pole is connected with micro tool, and its negative pole and electrophoresis assist circular Electrode connection; Described ultra micro abrasive particle is distributed in working solution, and the average grain diameter of ultra micro abrasive particle is less than 1 micron; Described micropore workpiece, its micro-pore diameter is less than or equal to 100 microns.
The preferred embodiment of the device of or fine rotary ultrasonic polishing micropore ultrasonic as electrophoresis assist of the present invention, the axis system of described fine ultrasonic machine tool is rotatable.
The preferred embodiment of the device of or fine rotary ultrasonic polishing micropore ultrasonic as electrophoresis assist of the present invention, described micro tool is completed by on-line machining.
The preferred embodiment of the device of or fine rotary ultrasonic polishing micropore ultrasonic as electrophoresis assist of the present invention, its on-line machining of described micro tool is fine electric spark block backcopy process or minuteness electrochemical method or the combination both it.
The preferred embodiment of the device of or fine rotary ultrasonic polishing micropore ultrasonic as electrophoresis assist of the present invention, the diameter of described micro tool is less than the aperture of described micropore workpiece.
In addition, present invention also offers a kind of processing method using the ultrasonic or fine rotary ultrasonic polishing micropore of the enforcement electrophoresis assist of the device of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist, the method comprises the following steps:
(1) micropore workpiece is fixedly mounted on the workbench in work tank;
(2) positive pole of electrophoresis dc source is connected with micro tool, and the negative pole of electrophoresis dc source and electrophoresis assist circular Electrode connection;
(3) micro tool is arranged in the fine ultrasonic longitudinal vibration system of main shaft by micro tool chuck, micro tool dither vertically under the driving of ultrasonic-frequency power supply;
(4) electrophoresis assists circular electrode to assist the installation of circular electrode holder to be soaked in working solution by electrophoresis, due to the suction-operated of electrophoresis, makes the ultra micro abrasive particle in working solution be adsorbed onto micro tool surface under the driving of electric field force;
(5) micropore workpiece and micro tool are under the servo feed system of fine ultrasonic machine tool drives, through micropore workpiece, micro tool is dither vertically, drive the violent disturbance of working solution, thus make the inner surface of ultra micro abrasive particle swiping micropore workpiece, to reach the object of micropore workpiece being carried out to polishing; Implement the processing of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist.
The preferred embodiment of the processing method of the ultrasonic or fine rotary ultrasonic polishing micropore of the enforcement electrophoresis assist of the device of or fine rotary ultrasonic polishing micropore ultrasonic as use electrophoresis assist of the present invention, the axis system of described fine ultrasonic machine tool is rotatable.
The preferred embodiment of the processing method of the ultrasonic or fine rotary ultrasonic polishing micropore of the enforcement electrophoresis assist of the device of or fine rotary ultrasonic polishing micropore ultrasonic as use electrophoresis assist of the present invention, described micro tool is completed by on-line machining.
The preferred embodiment of the processing method of the ultrasonic or fine rotary ultrasonic polishing micropore of the enforcement electrophoresis assist of the device of or fine rotary ultrasonic polishing micropore ultrasonic as use electrophoresis assist of the present invention, its on-line machining of described micro tool is fine electric spark block backcopy process or minuteness electrochemical method or the combination both it.
The preferred embodiment of the processing method of the ultrasonic or fine rotary ultrasonic polishing micropore of the enforcement electrophoresis assist of the device of or fine rotary ultrasonic polishing micropore ultrasonic as use electrophoresis assist of the present invention, the diameter of described micro tool is less than the aperture of described micropore workpiece.
The present invention, due to the micro tool made online is directly used in electrophoresis assist Ultrasonic machining, just realizes different processing technologys by changing work tank from processing work liquid, fully can ensure machining accuracy and machine tool structure is compact.Like this, electrode is by completing online, and the resetting error avoiding electrode to produce because of secondary clamping, reduces tool-electrode positional precision to greatest extent to micro-machined adverse effect.The making of electrode is undertaken processing by traditional block backcopy process or minuteness electrochemical or the combination both it, be combined with each other auxiliary for electrophoresis with fine Ultrasonic machining, the suction-operated of electrophoresis makes fine abrasive grains be adsorbed on micro tool surface, micropore workpiece and micro tool are under the servo feed system of fine ultrasonic machine tool drives, through micropore workpiece, micro tool is dither vertically, drive the violent disturbance of working solution, thus make the inner surface of ultra micro abrasive particle swiping micropore workpiece, to reach the object of micropore workpiece being carried out to polishing; Implement the processing of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist; Thus realizing polishing diameter being less than or equal to 100 micrometer Millipore, the utilization rate improving abrasive material also can reduce the roughness of micropore inner surface.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of electrophoresis assist ultrasonic polishing micropore of the present invention.
Fig. 2 is the schematic diagram of electrophoresis assist rotary ultrasonic polishing micropore of the present invention.
In figure, 1 be work tank, 2 be electrophoresis dc source, 3 be micro tool, 4 be working solution, 5 be ultra micro abrasive particle, 6 be micropore workpiece, 7 assist circular electrode for electrophoresis.
Detailed description of the invention
For better the object, technical solutions and advantages of the present invention being described, below in conjunction with the drawings and specific embodiments, the invention will be further described.
Embodiment 1
As shown in Figure 1, a kind of device of electrophoresis assist ultrasonic polishing micropore, comprise fine ultrasonic machine tool, work tank 1, electrophoresis dc source 2, micro tool 3, working solution 4, ultra micro abrasive particle 5, micropore workpiece 6, electrophoresis assist circular electrode 7; Described fine ultrasonic machine tool comprises axis system, enters electric system, the fine ultrasonic longitudinal vibration system of main shaft; Enter electric system described in described electrophoresis dc source 2 passes through, its positive pole is connected with micro tool 3, and its negative pole and electrophoresis assist circular electrode 7 to be connected; Described ultra micro abrasive particle 5 is distributed in working solution 4, and working solution 4 is placed in work tank 1, and wherein, the average grain diameter of ultra micro abrasive particle 5 is less than 1 micron; Described micropore workpiece 6, its micro-pore diameter is less than or equal to 100 microns.
The diameter of the micro tool 3 shown in Fig. 1 must be less than the diameter of the polished micropore of micropore workpiece 6, otherwise micro tool 3 cannot run through micropore enforcement electrophoresis assist ultrasonic polishing.Micro tool 3 adopts the mode of on-line machining to be worked into required fine sizes, and a kind of is directly adopt fine electric spark block inverse beating processing method to process micro tool 3 to required fine sizes; Another kind first adopts fine electric spark block inverse beating processing method to process micro tool 3, and to reduce or eliminate the setting-up eccentricity of micro tool 3, and then the processing method machining tool adopting micro-electrochemical machining to corrode is to required fine sizes.Relative to the former, rear a kind of working (machining) efficiency of processing micro tool 3 is higher.
Micro tool 3 shown in Fig. 1 be clamping on the main shaft of fine ultrasonic vibration, main shaft is installed on vertical slipway.By the driving of ultrasonic-frequency power supply, make micro tool 3 dither vertically.
It is completed by Online Video microscopic system that micro tool 3 shown in Fig. 1 runs through micropore process, and vertical slipway drives the motion of main shaft of fine ultrasonic vibration to realize coarse positioning, then, then drives the motion of micro-three-dimensional movement platform to realize accurately location.
Ultra micro abrasive particle 5 shown in Fig. 1 is suspended in working solution 4, and average grain diameter is less than 1 micron.Electrophoresis assist is ultrasonic is utilize ultra micro abrasive particle 5 electrophoretic characteristic in the solution, and ultra micro abrasive particle 5 itself is uncharged.Because the surface energy of ultra micro abrasive particle 5 is very large, can negative electrical charge in adsorbent solution, make whole abrasive particle be negative electricity.Ultra micro abrasive particle 5 average grain diameter is less, and the electrophoretic characteristic of ultra micro abrasive particle 5 is more obvious.
Workpiece 6 shown in Fig. 1 is installed in work tank 1, is immersed in abrasive material working solution.The unlapped celled portion of solution cannot implement electrophoresis assist ultrasonic polishing.Work tank 1 is installed in micro-three-dimensional movement platform, and the minimum resolution of micro-three-dimensional movement platform x-axis, y-axis and z-axis is all 0.1 micron.
In addition, the processing method of electrophoresis assist ultrasonic polishing micropore is implemented.Micropore workpiece 6 is fixedly mounted on the workbench in work tank; The positive pole of electrophoresis dc source 2 is connected with micro tool 3, and negative pole and the electrophoresis of electrophoresis dc source 2 assist circular electrode 7 to be connected; Micro tool 3 is arranged in the fine ultrasonic longitudinal vibration system of main shaft by micro tool chuck, and wherein, the diameter of micro tool 3 is less than the aperture size of micropore workpiece 6, micro tool 3 dither vertically under the driving of ultrasonic-frequency power supply; Electrophoresis is assisted circular electrode 7 to assist circular electrode holder to install by electrophoresis and is soaked in working solution 4, due to the suction-operated of electrophoresis, makes the ultra micro abrasive particle 5 in working solution under the driving of electric field force, be adsorbed onto micro tool 3 surface; Micropore workpiece 6 and micro tool 3 are under the servo feed system of fine ultrasonic machine tool drives, through micropore workpiece 6, micro tool 3 dither vertically, drive the violent disturbance of working solution 4, thus make the inner surface of ultra micro abrasive particle 5 swiping micropore workpiece, to reach the object of micropore workpiece 6 being carried out to polishing; Implement the processing of electrophoresis assist ultrasonic polishing micropore.
Implement the method for micro tool on-line machining.Micro tool 3 adopts the mode of on-line machining to be worked into required fine sizes, and a kind of is directly adopt fine electric spark block inverse beating processing method to process micro tool 3 to required fine sizes; Another kind first adopts fine electric spark block inverse beating processing method to process micro tool 3, and to reduce or eliminate the setting-up eccentricity of micro tool 3, and then the processing method machining tool adopting micro-electrochemical machining to corrode is to required fine sizes.Relative to the former, rear a kind of working (machining) efficiency of processing micro tool 3 is higher.
Embodiment 2
As shown in Figure 2, a kind of device of electrophoresis assist rotary ultrasonic polishing micropore, comprise fine ultrasonic machine tool, work tank 1, electrophoresis dc source 2, micro tool 3, working solution 4, ultra micro abrasive particle 5, micropore workpiece 6, electrophoresis assist circular electrode 7; Described fine ultrasonic machine tool comprises axis system, enters electric system, the fine ultrasonic longitudinal vibration system of main shaft; Enter electric system described in described electrophoresis dc source 2 passes through, its positive pole is connected with micro tool 3, and its negative pole and electrophoresis assist circular electrode 7 to be connected; Described ultra micro abrasive particle 5 is distributed in working solution 4, and working solution 4 is placed in work tank 1, and wherein, the average grain diameter of ultra micro abrasive particle 5 is less than 1 micron; Described micropore workpiece 6, its micro-pore diameter is less than or equal to 100 microns.
The diameter of the micro tool 3 shown in Fig. 2 must be less than the diameter of the polished micropore of micropore workpiece 6, otherwise micro tool 3 cannot run through the polishing of micropore enforcement electrophoresis assist rotary ultrasonic.Micro tool 3 adopts the mode of on-line machining to be worked into required fine sizes, and a kind of is directly adopt fine electric spark block inverse beating processing method to process micro tool 3 to required fine sizes; Another kind first adopts fine electric spark block inverse beating processing method to process micro tool 3, and to reduce or eliminate the setting-up eccentricity of micro tool 3, and then the processing method machining tool adopting micro-electrochemical machining to corrode is to required fine sizes.Relative to the former, rear a kind of working (machining) efficiency of processing micro tool 3 is higher.
Micro tool 3 shown in Fig. 2 be clamping on the main shaft of fine ultrasonic vibration, main shaft is installed on vertical slipway, and micro tool 3 rotates with main shaft, while by the driving dither vertically of ultrasonic-frequency power supply.
It is completed by Online Video microscopic system that micro tool 3 shown in Fig. 2 runs through micropore process, and vertical slipway drives the motion of main shaft of fine ultrasonic vibration to realize coarse positioning, then, then drives the motion of micro-three-dimensional movement platform to realize accurately location.
Ultra micro abrasive particle 5 shown in Fig. 2 is suspended in working solution 4, and average grain diameter is less than 1 micron.Electrophoresis assist rotary ultrasonic utilizes ultra micro abrasive particle 5 electrophoretic characteristic in the solution, and ultra micro abrasive particle 5 itself is uncharged.Because the surface energy of ultra micro abrasive particle 5 is very large, can negative electrical charge in adsorbent solution, make whole abrasive particle be negative electricity.Ultra micro abrasive particle 5 average grain diameter is less, and the electrophoretic characteristic of ultra micro abrasive particle 5 is more obvious.
Workpiece 6 shown in Fig. 2 is installed in work tank 1, is immersed in abrasive material working solution.The unlapped celled portion of solution cannot implement the polishing of electrophoresis assist rotary ultrasonic.Work tank 1 is installed in micro-three-dimensional movement platform, and the minimum resolution of micro-three-dimensional movement platform x-axis, y-axis and z-axis is all 0.1 micron.
In addition, the processing method of electrophoresis assist rotary ultrasonic polishing micropore is implemented.Micropore workpiece 6 is fixedly mounted on the workbench in work tank; The positive pole of electrophoresis dc source 2 is connected with micro tool 3, and negative pole and the electrophoresis of electrophoresis dc source 2 assist circular electrode 7 to be connected; Micro tool 3 is arranged in the fine ultrasonic longitudinal vibration system of main shaft by micro tool chuck, wherein, the diameter of micro tool 3 is less than the aperture size of micropore workpiece 6, and micro tool 3 rotates with main shaft, while under the driving of ultrasonic-frequency power supply dither vertically; Electrophoresis is assisted circular electrode 7 to assist circular electrode holder to install by electrophoresis and is soaked in working solution 4, due to the suction-operated of electrophoresis, makes the ultra micro abrasive particle 5 in working solution under the driving of electric field force, be adsorbed onto micro tool 3 surface; Micropore workpiece 6 and micro tool 3 are under the servo feed system of fine ultrasonic machine tool drives, through micropore workpiece 6, micro tool 3 dither vertically, drive the violent disturbance of working solution 4, thus make the inner surface of ultra micro abrasive particle 5 swiping micropore workpiece, to reach the object of micropore workpiece 6 being carried out to polishing; Implement the processing of electrophoresis assist rotary ultrasonic polishing micropore.
Implement the method for micro tool on-line machining.Micro tool 3 adopts the mode of on-line machining to be worked into required fine sizes, and a kind of is directly adopt fine electric spark block inverse beating processing method to process micro tool 3 to required fine sizes; Another kind first adopts fine electric spark block inverse beating processing method to process micro tool 3, and to reduce or eliminate the setting-up eccentricity of micro tool 3, and then the processing method machining tool adopting micro-electrochemical machining to corrode is to required fine sizes.Relative to the former, rear a kind of working (machining) efficiency of processing micro tool 3 is higher.
Electrophoresis assist rotary ultrasonic polishing micropore is on the basis of electrophoresis assist ultrasonic polishing micropore, rotary motion is applied to micro tool, the compound of rotary motion and dither can strengthen the disturbance of working solution effectively, improves abrasive particle to the polishing efficiency of micropore.
The present invention, due to the micro tool made online is directly used in electrophoresis assist Ultrasonic machining, just realizes different processing technologys by changing work tank from processing work liquid, fully can ensure machining accuracy and machine tool structure is compact.Like this, electrode is by completing online, and the resetting error avoiding electrode to produce because of secondary clamping, reduces tool-electrode positional precision to greatest extent to micro-machined adverse effect.The making of electrode is undertaken processing by traditional block backcopy process or minuteness electrochemical or the combination both it, be combined with each other auxiliary for electrophoresis with fine Ultrasonic machining, the suction-operated of electrophoresis makes fine abrasive grains be adsorbed on micro tool surface, micropore workpiece and micro tool are under the servo feed system of fine ultrasonic machine tool drives, through the micro tool dither vertically of micropore workpiece, drive the violent disturbance of working solution, thus make the inner surface of ultra micro abrasive particle swiping micropore workpiece, to reach the object of micropore workpiece being carried out to polishing; Implement the processing of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist; Thus realizing polishing diameter being less than or equal to 100 micrometer Millipore, the utilization rate improving abrasive material also can reduce the roughness of micropore inner surface.
Finally to should be noted that; above embodiment is only in order to illustrate technical scheme of the present invention but not limiting the scope of the invention; although be explained in detail the present invention with reference to preferred embodiment; those of ordinary skill in the art is to be understood that; can modify to technical scheme of the present invention or equivalent replacement, and not depart from essence and the scope of technical solution of the present invention.
Claims (10)
1. a device for the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist, comprises fine ultrasonic machine tool, it is characterized in that, also comprises electrophoresis dc source, micro tool, working solution, ultra micro abrasive particle, micropore workpiece, electrophoresis assist circular electrode;
Described fine ultrasonic machine tool comprises axis system, enters electric system, the fine ultrasonic longitudinal vibration system of main shaft;
Enter electric system described in described electrophoresis dc source passes through, its positive pole is connected with micro tool, and its negative pole and electrophoresis assist circular Electrode connection;
Described ultra micro abrasive particle is distributed in working solution, and the average grain diameter of ultra micro abrasive particle is less than 1 micron;
Described micropore workpiece, its micro-pore diameter is less than or equal to 100 microns.
2. the device of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 1, it is characterized in that, the axis system of described fine ultrasonic machine tool is rotatable.
3. the device of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 1, it is characterized in that, described micro tool is completed by on-line machining.
4. the device of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 1, is characterized in that, its on-line machining of described micro tool is fine electric spark block backcopy process or minuteness electrochemical method or the combination both it.
5. the device of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 1, it is characterized in that, the diameter of described micro tool is less than the aperture of described micropore workpiece.
6. use device as claimed in claim 1 to implement a processing method for the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist, it is characterized in that, comprise the following steps:
(1) micropore workpiece is fixedly mounted on the workbench in work tank;
(2) positive pole of electrophoresis dc source is connected with micro tool, and the negative pole of electrophoresis dc source and electrophoresis assist circular Electrode connection;
(3) micro tool is arranged in the fine ultrasonic longitudinal vibration system of main shaft by micro tool chuck, micro tool dither vertically under the driving of ultrasonic-frequency power supply;
(4) electrophoresis assists circular electrode to assist the installation of circular electrode holder to be soaked in working solution by electrophoresis, due to the suction-operated of electrophoresis, makes the ultra micro abrasive particle in working solution be adsorbed onto micro tool surface under the driving of electric field force;
(5) micropore workpiece and micro tool are under the servo feed system of fine ultrasonic machine tool drives, micro tool is through micropore workpiece, micro tool is dither vertically, drive the violent disturbance of working solution, thus make the inner surface of ultra micro abrasive particle swiping micropore workpiece, to reach the object of micropore workpiece being carried out to polishing; Implement the processing of the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist.
7. a kind of method implementing the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 6, it is characterized in that, the axis system of described fine ultrasonic machine tool is rotatable.
8. a kind of method implementing the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 7, it is characterized in that, described micro tool is completed by on-line machining.
9. a kind of method implementing the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 8, is characterized in that, its on-line machining of described micro tool is fine electric spark block backcopy process or minuteness electrochemical method or the combination both it.
10. a kind of method implementing the ultrasonic or fine rotary ultrasonic polishing micropore of electrophoresis assist as claimed in claim 9, it is characterized in that, the diameter of described micro tool is less than the aperture of described micropore workpiece.
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| CN111390658A (en) * | 2020-04-30 | 2020-07-10 | 岭南师范学院 | Micro-channel electrophoresis auxiliary micro-ultrasonic processing device and method |
| CN115464511B (en) * | 2022-09-19 | 2023-08-01 | 厦门大学 | Device integrating multi-channel aperture detection and nanopore preparation and application method thereof |
| CN115383599B (en) * | 2022-09-22 | 2023-08-15 | 广东技术师范大学 | Electrophoresis-assisted self-feeding type ultra-precise micro-polishing method and device |
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| JPH03149131A (en) * | 1989-11-01 | 1991-06-25 | Aiseru Kk | Polishing method and device for executing this method |
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| CN203611073U (en) * | 2013-11-11 | 2014-05-28 | 广东工业大学 | Device for polishing micro holes in electrophoresis-assisted ultrafine ultrasonic or ultrafine ultrasonic rotation manner |
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| CN103551926A (en) | 2014-02-05 |
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