CN108972302A - A kind of disresonance type vibration auxiliary polishing device and method - Google Patents
A kind of disresonance type vibration auxiliary polishing device and method Download PDFInfo
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- CN108972302A CN108972302A CN201811171292.XA CN201811171292A CN108972302A CN 108972302 A CN108972302 A CN 108972302A CN 201811171292 A CN201811171292 A CN 201811171292A CN 108972302 A CN108972302 A CN 108972302A
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- 238000005498 polishing Methods 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 title claims abstract description 17
- 230000033001 locomotion Effects 0.000 claims abstract description 60
- 239000004579 marble Substances 0.000 claims abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims description 78
- 239000000919 ceramic Substances 0.000 claims description 54
- 230000007246 mechanism Effects 0.000 claims description 42
- 238000005188 flotation Methods 0.000 claims description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 239000006061 abrasive grain Substances 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000007517 polishing process Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 2
- 241000237858 Gastropoda Species 0.000 claims 1
- 239000010440 gypsum Substances 0.000 claims 1
- 229910052602 gypsum Inorganic materials 0.000 claims 1
- 238000010295 mobile communication Methods 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
- 238000007514 turning Methods 0.000 abstract description 4
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000006703 hydration reaction Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000036571 hydration Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007516 diamond turning Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention relates to a kind of disresonance type vibration auxiliary polishing device and methods, belong to Ultra-precision Turning field.Y-axis linear guide is mounted on marble frame, X-axis linear guide is mounted on marble frame, Z axis linear guide is connect by screw with X-axis linear guide, polishing tool motion platform is connect with Z axis linear guide, accurate oscillating table is connect by screw with Y-axis linear guide, and whirling vibration platform is connect by screw with accurate oscillating table.Advantage is: polishing efficiency is high, and the frequency and amplitude of vibration are adjustable, and controllability is good, and applicability is improved；Some hard crisp ceramic material workpiece with simple surface structure can be polished, and have fast polishing speed, polishing precision height and controllability good, improve the practicability of device.
Description
Technical field
The present invention relates to Ultra-precision Turning field, espespecially a kind of disresonance type vibration auxiliary polishing device and method.
Background technique
The development of Precision and Ultra-precision Machining technology directly influences the hair of national a sophisticated technology and national defense industry
Exhibition, therefore this is all extremely paid attention in countries in the world, investment very great is researched and developed, while carrying out technical know-how, is controlled
Key technology of processing and equipment export.Late 1950s U.S.'s initiative developments Ultraprecision Machining, develops Buddha's warrior attendant
Stone cutter ultra-precise cutting --- Single point diamond turning o, for processing laser fusion reflecting mirror, manned spaceship spherical surface zero
Part and large-scale aspheric surface part etc., in the 1980s, the workpiece size precision after Ultra-precision Turning can achieve and receive
Meter level, the surface roughness of workpiece is up to nanoscale or Subnano-class.In Ultra-precision Turning, polishing is last procedure
It is a most important procedure, usually the uneven surface of workpiece is finely cut using the abrasive grain of high rigidity, purpose
It is the surface roughness for reducing workpiece.
Carrying out Ultraprecise polished processing method mainly to workpiece at present has ion beam polishing, hydration polishing, chemical machinery
Polishing etc., ion beam polishing be remove workpiece surface in a non-contact manner plasma jet to workpiece surface, but its
Material removal rate is low；Hydration polishing is the polishing method using hydration reaction, but its polishing process complexity is unfavorable on a large scale
Production；Chemically mechanical polishing is that chemical attack effect and mechanical removal act on the polishing process combined, is chemically-mechanicapolish polished
Journey is complicated and influence factor is more.Utsunomiya university of Japan's the 1960s proposes " vibrocutting " method, attached on cutter
Add a controllable vibration, process is made to become interruption, moment and reciprocal microcosmic interrupted cut process, by vibration and machinery
Processing combines, the hot research topic that this method is developing progressively as mechanical processing industry.Vibrocutting adds applied to superfinishing
The fields such as work, microfabrication, hard crisp ceramics and difficult-to-machine material.In recent years, scholar proposes vibration auxiliary polishing technology, with biography
System polishing is compared, and under identical processing conditions, material removing rate is big, and cutting output is big, and cutting force is small when processing, and surface residual is answered
Power is small, and surface roughness is low and by workpiece surface good mechanical property.The principle of vibration auxiliary polishing is to produce free abrasive material
Raw vibration is particularly suitable for the processing of hard brittle material to which workpieces processing surface is to achieve the purpose that polishing.
It vibrates auxiliary polishing and is divided into mode of resonance and the anharmonic vibration shape, it is auxiliary that mode of resonance vibration auxiliary polishes the ultrasonic vibration that is otherwise known as
Polishing is helped, the vibration auxiliary polishing of the overwhelming majority at present is mode of resonance, the vibration frequency of mode of resonance vibration auxiliary polishing, vibration
Width, motion profile can not adjust, poor controllability, and traditional anharmonic vibration shape vibration auxiliary polishing is because of the intrinsic frequency of vibration device
Rate is low, so polishing efficiency is lower, the design that the anharmonic vibration shape vibrates auxiliary polishing device is still an important research direction.
Summary of the invention
The present invention provides a kind of disresonance type vibration auxiliary polishing device and method, can to improve conventional vibration auxiliary polishing
The problems such as control property difference and low polishing efficiency.
The technical solution adopted by the present invention is that: a kind of disresonance type vibration auxiliary polishing device, including Z axis linear guide, Y
Axis linear guide, X-axis linear guide, polishing tool motion platform, accurate oscillating table, whirling vibration platform and marble frame, Y
Axis linear guide is mounted on marble frame, and X-axis linear guide is mounted on marble frame, and Z axis linear guide passes through spiral shell
Nail is connect with X-axis linear guide, and polishing tool motion platform is connect with Z axis linear guide, and accurate oscillating table passes through screw and Y-axis
Linear guide connection, whirling vibration platform are connect by screw with accurate oscillating table.
Polishing tool motion platform of the present invention includes: air-flotation electric spindle, polishing tool and counterweight balance cylinder, air bearing
Electro spindle is mounted in Z axis linear guide, and polishing tool is loaded on air-flotation electric spindle, and it is straight that counterweight balance cylinder is mounted on Z axis
On line guide rail, air-flotation electric spindle drives polishing tool to turn about the Z axis, and polishing tool is matched for polishing to workpiece to be machined
Weight balance cylinder is used to balance the gravity of Z axis, reduces the load of air-flotation electric spindle.
Precision oscillating table of the present invention includes: direct current brushless servo motor, retarder, shaft coupling, bearing, arcuate bottom
Seat, arcuate movement are set a table, arc-shaped rack and worm screw, arc-shaped base are installed in Y-axis linear guide by screw, and arcuate movement is set a table
It is rigidly connected with arc-shaped rack, arcuate movement is set a table to be mounted on arc-shaped base with arc-shaped rack, and direct current brushless servo motor is logical
Cross retarder and shaft coupling connecting worm.
Whirling vibration platform of the present invention includes: vibrating base, vibration generating arrangement, and whirling vibration stage+module is in arc
On shape movement is set a table, vibration generating arrangement is connect by screw with vibrating base.
Vibration generating arrangement of the present invention include vibration device one, vibration device two, vibration device three, workbench and
Sensing system, vibration device one include guiding mechanism one, lever amplifying mechanism one, piezoelectric ceramics one and pre-loading screw one, vibration
Dynamic device two includes guiding mechanism two, lever amplifying mechanism two, piezoelectric ceramics two and pre-loading screw two, and vibration device three includes leading
To mechanism three, lever amplifying mechanism three, piezoelectric ceramics three and pre-loading screw three, the vibration device one, two and of vibration device
Three structure of vibration device is identical, and wherein one structure of vibration device is, piezoelectric ceramics one is fixed on Guiding machine by pre-loading screw one
On structure one, the displacement that piezoelectric ceramics one generates passes to lever amplifying mechanism one by guiding mechanism one, in guiding mechanism one
Straight beam type hinge is used for the direction of transfer of constrained displacement, and lever amplifying mechanism one is used to amplify the displacement of the generation of piezoelectric ceramics one,
Sensing system includes sensor one, sensor two and sensor three, and sensor one includes displacement sensor one, displacement sensor
Bracket one and movable body one, sensor two include displacement sensor two, displacement sensor bracket two and movable body two, sensor three
Including displacement sensor three, displacement sensor bracket three and movable body three, the sensor one, sensor two and sensor three
Structure is identical, and wherein the displacement sensor bracket one of sensor one is fixed by screws on vibration device, and movable body one passes through
Screw is fixed on workbench, and displacement sensor one is fixed in displacement sensor bracket one.
Marble frame of the present invention includes: pedestal, crossbeam, support frame one and support frame two, support frame one and support
Frame two is rigidly connected on pedestal, and crossbeam is rigidly attached on support frame one and support frame two, and marble frame is for entirely filling
The installation and fixation set.
A kind of method of disresonance type vibration auxiliary polishing, including the following steps:
(1), it is polished workpiece to be fixed on the workbench of whirling vibration platform, Y-axis linear guide drives accurate swing
It platform, whirling vibration platform and is polished workpiece and moves to designated position along Y-direction, Z axis linear guide and X-axis linear guide drive
Polishing tool motion platform moves to designated position along the face ZX, and the air-flotation electric spindle in polishing tool motion platform drives polishing blade
Tool rotates about the z axis；
(2), the piezoelectric ceramics one into whirling vibration platform, piezoelectric ceramics two and piezoelectric ceramics three be passed through it is identical just
String electric signal, the sinusoidal electric signals can use formula X=AX× sin (2 π × f × t) indicates that wherein X expression is passed through piezoelectric ceramics
Voltage, AXIndicate that the amplitude of sinusoidal electric signals, f indicate the frequency of sinusoidal electric signals, t indicates the time, by adjusting sine letter
Number amplitude AX, the parameters such as frequency f, the rotation angle and vibration frequency that control workbench 60204 vibrates about the z axis；
(3), workbench drive is polished workpiece and turns about the Z axis in certain angular range, which makes abrasive grain exist
It is polished on workpiece and is uniformly distributed, and the rotation and the rotation about the z axis of polishing tool form relative motion, which increases
Polishing tool and the speed of related movement being polished between workpiece make abrasive grain incision be polished the depth in workpiece surface ductility domain
Increase, before penetraction depth reaches critical cutting-in, polishing tool carries out ductile removal to the surface for being polished workpiece, to reach
The purpose of polishing, when needing to polish curved surface, the direct current brushless servo motor in accurate oscillating table passes through scroll bar and arc
Shape movement set a table on arc-shaped rack so that arcuate movement is set a table arcuately base motions, arcuate movement, which is set a table, drives whirling vibration flat
Platform and workpiece motion s are polished, the surface for being polished workpiece is made to keep point contact with polishing tool always, to realize to curved surface
Polishing；
(4), it is completed until whole surfaces to be machined polish, polishing process terminates.
The invention has the advantages that
(1) the whirling vibration platform in the present apparatus has higher intrinsic frequency compared to other shaking platforms, inherently
The raising of frequency is improved the working frequency of burnishing device, increases the flexibility and controllability of device, therefore compared to
Traditional anharmonic vibration shape vibrates auxiliary polishing device, and the present apparatus has the advantages that polishing efficiency is high；
(2) a kind of disresonance type vibration auxiliary polishing method is proposed, is polished relative to traditional mode of resonance vibration auxiliary,
The frequency and amplitude of this burnishing device vibration are adjustable, and controllability is good, and applicability is improved；
(3) sophisticated sensor system is added in the present apparatus, and the movement letter of whirling vibration driving platform can be fed back with real-time online
Number, according to the signal of feedback, adjusting is passed through the parameters such as amplitude and the frequency of whirling vibration platform electric signal, in time to whirling vibration
The working condition of platform is adjusted；
(4) accurate oscillating table is added, enables a device to some hard crisp ceramic material works with simple surface structure
Part is polished, and has many advantages, such as that polishing speed is fast, polishing precision is high and controllability is good, improves the practicability of device.
Detailed description of the invention
Fig. 1 is the device of the invention structural schematic diagram；
Fig. 2 is polishing tool motion platform figure of the invention；
Fig. 3 is accurate oscillating table figure of the invention；
Fig. 4 is the cross-sectional view of accurate oscillating table of the invention；
Fig. 5 is whirling vibration platform figure of the invention；
Fig. 6 is that vibration device one, vibration device two, vibration device three and the work in vibration generating arrangement of the invention are put down
Platform figure；
Fig. 7 is one figure of guiding mechanism in vibration device one of the invention
Fig. 8 is the sensing system figure in vibration generating arrangement of the invention；
Fig. 9 is the working state schematic representation of whirling vibration platform of the invention；
Figure 10 is marble frame diagram of the invention；
Figure 11 is angle-position relation schematic diagram of whirling vibration platform of the invention；
Figure 12 is the displacement vector schematic diagram of whirling vibration platform of the invention；
Description of symbols: Z axis linear guide 1, Y-axis linear guide 2, X-axis linear guide 3, polishing tool motion platform
4, accurate oscillating table 5, whirling vibration platform 6, marble frame 7 is polished workpiece 8, air-flotation electric spindle 401, polishing tool
402, counterweight balance cylinder 403, direct current brushless servo motor 501, retarder 502, shaft coupling 503, bearing 504, arc-shaped base
505, arcuate movement sets a table 506, arc-shaped rack 507, worm screw 508, shaking platform pedestal 601, vibration generating arrangement 602, vibration
Device 60201, vibration device 60202, vibration device 60203, workbench 60204, guiding mechanism 1, straight beam type
Hinge 602010101, lever amplifying mechanism 1, piezoelectric ceramics 1, pre-loading screw 1, guiding
Mechanism 2 6020201, lever amplifying mechanism 2 6020202, piezoelectric ceramics 2 6020203, pre-loading screw 2 6020204, guiding
Mechanism 3 6020301, lever amplifying mechanism 3 6020302, piezoelectric ceramics 3 6020303, pre-loading screw 3 6020304, sensing
Device system 60205, sensor 1, sensor 2 6020502, sensor 3 6020503, displacement sensor one
602050101, displacement sensor bracket 1 and movable body 1, displacement sensor 2 602050201,
Displacement sensor bracket 2 602050202 and movable body 2 602050203, displacement sensor 3 602050301, displacement sensor
Bracket 3 602050302 and movable body 3 602050303, pedestal 701, crossbeam 702, support frame 1 and support frame 2 704.
Specific embodiment
As shown in Figure 1, a kind of disresonance type vibration auxiliary polishing device includes Z axis linear guide 1, Y-axis linear guide 2, X
Axis linear guide 3, polishing tool motion platform 4, accurate oscillating table 5, whirling vibration platform 6, marble frame 7 and it is polished work
Part 8, Y-axis linear guide 2 are mounted on marble frame 7, and X-axis linear guide 3 is mounted on marble frame 7, and Z axis straight line is led
Rail 1 is connect by screw with X-axis linear guide 3, and polishing tool motion platform 4 is connect with Z axis linear guide 1, accurate oscillating table 5
It is connect by screw with Y-axis linear guide 2, whirling vibration platform 6 is connect by screw with accurate oscillating table 5, and workpiece 8 is polished
It is fixed on whirling vibration platform 6, is polished workpiece 8 and is fixed on the workbench 60204 of whirling vibration platform 6.
Y-axis linear guide 2, which drives accurate oscillating table 5, whirling vibration platform 6 and is polished workpiece 8, moves to finger along Y-direction
Positioning is set, and Z axis linear guide 1 and X-axis linear guide 3 drive polishing tool motion platform 4 to move to designated position along the face ZX, is thrown
Air-flotation electric spindle 401 in light-knife tool motion platform 4 drives polishing tool 402 to rotate about the z axis, and accurate oscillating table 5 drives rotation
Shaking platform 6 is moved along arc-shaped base 505, and whirling vibration platform 6 drives workpiece to be machined 8 within the scope of certain angle around Z
Axis rotation, in order to guarantee the controllability of polishing, device is using the Z axis of polishing tool 402, X-axis translation and turns about the Z axis, and
The Y-axis translation of whirling vibration platform 6 is swung and rotary motion 6 freedom degrees about the z axis totally around Y-axis.
Polishing tool motion platform 4 as shown in Figure 2 includes air-flotation electric spindle 401, polishing tool 402 and counterweight Balance Air
Cylinder 403, air-flotation electric spindle 401 are mounted in Z axis linear guide 1, and polishing tool 402 is loaded on air-flotation electric spindle 401, counterweight
Balance cylinder 403 is mounted in Z axis linear guide 1, and air-flotation electric spindle 401 drives polishing tool 402 to turn about the Z axis, polishing blade
For tool 402 for polishing to workpiece to be machined 8, counterweight balance cylinder 403 is used to balance the gravity of Z axis, reduces air-flotation electric master
The load of axis 401.
Accurate oscillating table 5 as shown in Figure 3 and Figure 4 includes direct current brushless servo motor 501, retarder 502, shaft coupling
503, bearing 504, arc-shaped base 505, arcuate movement are set a table 506, arc-shaped rack 507 and worm screw 508, and arc-shaped base 505 passes through
Screw is installed in Y-axis linear guide 2, arcuate movement set a table 506 and arc-shaped rack 507 be rigidly connected, arcuate movement is set a table 506 Hes
Arc-shaped rack 507 is mounted on arc-shaped base 505, and direct current brushless servo motor 501 is connected by retarder 502 and shaft coupling 503
It connects worm screw 508, completes the rotation of worm screw 508, worm screw 508 drives arcuate movement to set a table the arc-shaped rack 507 on 506, arc-shaped gear
Item 507 drive arcuate movement set a table 506 arcuately pedestal 505 move.
If Fig. 5, Fig. 6, Fig. 7, Fig. 8 and whirling vibration platform 6 shown in Fig. 9 include vibrating base 601, vibration generating arrangement
602, whirling vibration platform 6 is mounted on arcuate movement and sets a table on 506, and vibration generating arrangement 602 passes through screw and vibrating base 601
Connection.
Vibration generating arrangement 602 includes vibration device 1, vibration device 2 60202, vibration device 3 60203, work
Make platform 60204 and sensing system 60205, vibration device 1 includes guiding mechanism 1, lever amplification machine
Structure 1, piezoelectric ceramics 1 and pre-loading screw 1, vibration device 2 60202 include guiding mechanism
2 6020201, lever amplifying mechanism 2 6020202, piezoelectric ceramics 2 6020203 and pre-loading screw 2 6020204, vibration device
3 60203 include guiding mechanism 3 6020301, lever amplifying mechanism 3 6020302, piezoelectric ceramics 3 6020303 and preload spiral shell
3 6020304 are followed closely, the vibration device 1, vibration device 2 60202 are identical with 3 60203 structure of vibration device, with
For vibration device 60201, piezoelectric ceramics 1 is fixed on guiding mechanism one by pre-loading screw 1
On 6020101, the displacement that piezoelectric ceramics 1 generates passes to lever amplifying mechanism by guiding mechanism 1
One 6020102, the straight beam type hinge 602010101 in guiding mechanism 1 is used for the direction of transfer of constrained displacement, lever
Enlarger 1 is used to amplify the displacement of the generation of piezoelectric ceramics 1, piezoelectric ceramics 1, piezoelectricity pottery
Porcelain 2 6020203 and piezoelectric ceramics 3 6020303 are passed through the ac signal of same phase, make piezoelectric ceramics 1, pressure
Electroceramics 2 6020203 and piezoelectric ceramics 3 6020303 generate displacement, and vector closes after which passes to workbench 60204
As swing offset about the z axis, which swing workbench 60204 about the z axis in certain angular range, sensor
System 60205 includes sensor 1, sensor 2 6020502 and sensor 3 6020503, sensor 1
Including displacement sensor 1, displacement sensor bracket 1 and movable body 1, sensor
2 6020502 include displacement sensor 2 602050201, displacement sensor bracket 2 602050202 and movable body two
602050203, sensor 3 6020503 includes displacement sensor 3 602050301, displacement sensor bracket 3 602050302
With movable body 3 602050303,3 6020503 knot of the sensor 1, sensor 2 6020502 and sensor
Structure is identical, and by taking sensor 1 as an example, displacement sensor bracket 1 is fixed by screws in vibration device
On 60201, movable body 1 is fixed by screws on workbench 60204, displacement sensor 1
It is fixed in displacement sensor bracket 1, sensing system 60205 is for that can feed back whirling vibration with real-time online
The motor message for driving platform 6, according to the signal of feedback, adjusting is passed through amplitude and frequency of 6 electric signal of whirling vibration platform etc.
Parameter is in time adjusted the working condition of whirling vibration platform 6.
Marble frame 7 as shown in Figure 10 includes pedestal 701, crossbeam 702, support frame 1 and support frame 2 704, branch
Support 1 and support frame 2 704 are rigidly connected on pedestal 701, and crossbeam 702 is rigidly attached to support frame 1 and support
On frame 2 704, marble frame 7 is used for the installation and fixation of whole device.
A kind of method of disresonance type vibration auxiliary polishing, including the following steps:
(1), it is polished workpiece 8 to be fixed on the workbench 60204 of whirling vibration platform 6, Y-axis linear guide 2 drives
It accurate oscillating table 5, whirling vibration platform 6 and is polished workpiece 8 and moves to designated position, Z axis linear guide 1 and X-axis along Y-direction
Linear guide 3 drives polishing tool motion platform 4 to move to designated position along the face ZX, the air bearing in polishing tool motion platform 4
Electro spindle 401 drives polishing tool 402 to rotate about the z axis；
(2), the piezoelectric ceramics 1 into whirling vibration platform 6, piezoelectric ceramics 2 6020203 and piezoelectric ceramics
3 6020303 are passed through identical sinusoidal electric signals, which can use formula X=AX× sin (2 π × f × t) expression,
Middle X indicates the voltage for being passed through piezoelectric ceramics, AXIndicate that the amplitude of sinusoidal electric signals, f indicate the frequency of sinusoidal electric signals, t is indicated
Time, by the amplitude A for adjusting the sinusoidal signalX, the parameters such as frequency f, the rotation that control workbench 60204 vibrates about the z axis
Angle and vibration frequency；
(3), the drive of workbench 60204 is polished workpiece 8 and turns about the Z axis in certain angular range, which makes
Abrasive grain is uniformly distributed on being polished workpiece 8, and the rotation and the rotation about the z axis of polishing tool 402 form relative motion, the phase
To the speed of related movement that movement increases polishing tool 402 and is polished between workpiece 8, abrasive grain incision is made to be polished workpiece 8
The depth in surface ductility domain increases, and before penetraction depth reaches critical cutting-in, polishing tool 402 is to the surface for being polished workpiece 8
Carry out ductile removal, to achieve the purpose that polishing, when needing to polish curved surface, direct current in accurate oscillating table 5 without
Brush servo motor 501 makes arcuate movement set a table 506 along arc by scroll bar 508 and the arcuate movement arc-shaped rack 507 on 506 of setting a table
Shape pedestal 505 moves, and arcuate movement, which is set a table, 506 drive whirling vibration platforms 6 and is polished the movement of workpiece 8, makes to be polished workpiece 8
Surface keep point contact with polishing tool 402 always, to realize polishing to curved surface；
(4), it is completed until whole surfaces to be machined polish, polishing process terminates.
The principle of the invention and effect are further illustrated by the analysis to vibration generating arrangement 602 below.
The displacement vector figure of whirling vibration platform as shown in figure 11, c1, c2 and c3 are the position of vibration generating arrangement in figure
Input point is moved, L1, L2 and L3 are input displacement, and S1, S2 and S3 are amplified input displacement, piezoelectric ceramics 1
Apply input power F1, F2 and F3 in displacement input point c1, power F1 makes input point c1 generate displacement L1, lever displacement amplifying mechanism one
6020102 couples of displacement L1 are amplified, and amplified displacement is S1, and piezoelectric ceramics 2 6020203 is applied in displacement input point c2
Add input power F2, power F2 that input point c2 is made to generate displacement L2,2 6020202 couples of displacement L2 of lever displacement amplifying mechanism are put
Greatly, amplified displacement is S2, and piezoelectric ceramics 3 6020303 applies input power F3 in displacement input point c3, and power F3 makes to input
Point c3 generates displacement L3, and 3 6020302 couples of displacement L3 of lever displacement amplifying mechanism are amplified, and amplified displacement is S3,
S1, S2 and S3 are displacement θ in 60204 Vector modulation of workbench.
In traditional polishing process, scallop-height, the remnants high can be generated between the adjacent polishing locus of the surface to be machined of workpiece
Degree can seriously reduce the surface figure accuracy of polishing, and the vibration generating arrangement 6 in the present invention can drive workpiece to be machined 8 to generate minute yardstick
Whirling vibration, improve scallop-height, improve the surface figure accuracy of polishing, in order to guarantee the accuracy of surface figure accuracy, validity,
Controllability, the rotation angle and vibration frequency of 60204 whirling vibration of workbench must carry out strict control, and the present invention is by building
Angle-bit model of vertical vibration generating arrangement 602, accurately controls the rotation angle that workbench 60204 vibrates about the z axis,
And the working frequency that workbench 60204 vibrates about the z axis is identical as the frequency for the sinusoidal electric signals for being passed through piezoelectric ceramics, therefore not
The theoretical model for the vibration frequency that workbench 60204 vibrates about the z axis must be established.
Establish angle-bit model of vibration generating arrangement 602
Shape as shown in figure 12 is the workbench 60204 of equilateral triangle, is established at the center of workbench 60204
Fixed coordinate system O, O point is the displacement output point of workbench, and coordinate is (0,0,0), due to ideally, being passed through piezoelectricity
Ceramics 1, piezoelectric ceramics 2 6020203 are identical with the sinusoidal electric signals of piezoelectric ceramics 3 6020303, piezoelectricity pottery
The power output that porcelain 1, piezoelectric ceramics 2 6020203 and piezoelectric ceramics 3 6020303 generate is identical, vibration device
One 60201, vibration device 2 60202 is identical with the motion state of vibration device 3 60203, therefore by model simplification, only
Establish the function of the sinusoidal electric signals for being passed through piezoelectric ceramics 1 and workbench 60204 between O point rotation angle, θ
Model.
C1 is the displacement input point of vibration device 1, and L1 is the input displacement of vibration device 1, and g1 is work
Make the displacement input point of platform 60204, S1 is through the amplified input displacement of lever amplifying mechanism 1, and R is flat for work
The radius of turn of platform 60204, α are angle formed by line segment O-g1 and the negative semiaxis of X-axis, and α=π/6, θ are workbench 60204 around O
The rotation angle of point.
Establish the power output of the sinusoidal electric signals for being passed through piezoelectric ceramics 1 and the generation of piezoelectric ceramics 1
Between function model；
The power output that piezoelectric ceramics 1 generates can be indicated with following formula:
F1=n × X (1)
Wherein, F1 indicates the power output that piezoelectric ceramics 1 generates, and n indicates piezoelectric constant, and X expression is passed through piezoelectricity
The voltage of ceramics 1.
The power output that piezoelectric ceramics 1 generates is equal to the input power that vibration device 1 is subject to
Establish the function model of the input displacement of input power and vibration device 1 that vibration device 1 is subject to；
The input displacement of vibration device 1 can be indicated with following formula:
L1=F1 ÷ k (2)
Wherein, L1 indicates the input displacement of vibration device one, and k indicates the input rigidity of vibration device one.
Establish the function model of the input displacement and workbench of vibration device one between the rotation angle, θ of O point；
Workbench 60204 is in initial position, position coordinates O of the g1 point in fixed coordinate system Og1It is described as:
Wherein, g1XRepresent position coordinates of the g1 point along X-axis, g1YRepresent position coordinates of the g1 point along Y-axis, g1ZRepresent g1 point
Along the position coordinates of Z axis.
For workbench 60204 at operating position, g1 point moves to g1' point, position of the g1' point in fixed coordinate system O
Coordinate Og1'It is described as:
Wherein, g1'XRepresent position coordinates of the g1' point along X-axis, g1'YRepresent position coordinates of the g1' point along Y-axis, g1'ZGeneration
Position coordinates of the table point g1' along Z axis.
It can be pushed away by (3) formula and (4) formula, workbench 60204g1 point moves to g1' point along the straight-line displacement Y1 of Y-axis:
Y1=g1'Y-g1Y=R × sin (π/6)-R × sin (π/6- θ) (5)
G1' point is moved to along the straight-line displacement of Y-axis since amplified input displacement S1 is equal to workbench 60204g1 point
Y1:
S1=Y1=R × sin (π/6)-R × sin (π/6- θ) (6)
Again because the displacement equations ratio of lever amplifying mechanism 1 is Rma, amplified input displacement S1:
S1=L1 × Rma=L1 × A (7)
It can be pushed away by (6) formula and (7) formula, the input displacement L1 of vibration device 1 and the rotation angle of workbench 60204
Spend the functional relation between θ are as follows:
L1 × A=R × sin (π/6)-R × sin (π/6- θ) (8)
After (8) formula is collated:
θ=π/6-arcsin (1/2-L1/R × A) (9)
Rma=A, Rma are the displacement equations ratio of lever amplifying mechanism 1.
Claims (7)
1. a kind of disresonance type vibrates auxiliary polishing device, it is characterised in that: including Z axis linear guide, Y-axis linear guide, X-axis
Linear guide, polishing tool motion platform, accurate oscillating table, whirling vibration platform and marble frame, the installation of Y-axis linear guide
On marble frame, X-axis linear guide is mounted on marble frame, and Z axis linear guide passes through screw and X-axis linear guide
Connection, polishing tool motion platform are connect with Z axis linear guide, and accurate oscillating table is connect by screw with Y-axis linear guide, are revolved
Rotational oscillation moving platform is connect by screw with accurate oscillating table.
2. a kind of disresonance type according to claim 1 vibrates auxiliary polishing device, it is characterised in that: the polishing tool
Motion platform includes: air-flotation electric spindle, polishing tool and counterweight balance cylinder, and air-flotation electric spindle is mounted in Z axis linear guide,
Polishing tool is loaded on air-flotation electric spindle, and counterweight balance cylinder is mounted in Z axis linear guide, and air-flotation electric spindle drives polishing
Cutter turns about the Z axis, and for polishing tool for polishing to workpiece to be machined, counterweight balance cylinder is used to balance the gravity of Z axis,
Reduce the load of air-flotation electric spindle.
3. a kind of disresonance type according to claim 1 vibrates auxiliary polishing device, it is characterised in that: the accurate swing
Platform include: direct current brushless servo motor, retarder, shaft coupling, bearing, arc-shaped base, arcuate movement set a table, arc-shaped rack and snail
Bar, arc-shaped base are installed in Y-axis linear guide by screw, and arcuate movement is set a table to be rigidly connected with arc-shaped rack, arcuate movement
It sets a table and is mounted on arc-shaped base with arc-shaped rack, direct current brushless servo motor passes through retarder and shaft coupling connecting worm.
4. a kind of disresonance type according to claim 1 vibrates auxiliary polishing device, it is characterised in that: the whirling vibration
Platform includes: vibrating base, vibration generating arrangement, and whirling vibration stage+module is on arcuate movement is set a table, vibration generating arrangement
It is connect by screw with vibrating base.
5. a kind of disresonance type according to claim 4 vibrates auxiliary polishing device, it is characterised in that: the vibration occurs
Device includes vibration device one, vibration device two, vibration device three, workbench and sensing system, and vibration device one includes
Guiding mechanism one, lever amplifying mechanism one, piezoelectric ceramics one and pre-loading screw one, vibration device two include guiding mechanism two, thick stick
Bar enlarger two, piezoelectric ceramics two and pre-loading screw two, vibration device three include guiding mechanism three, lever amplifying mechanism three,
Piezoelectric ceramics three and pre-loading screw three, the vibration device one, vibration device two are identical with three structure of vibration device, wherein shaking
Dynamic one structure of device is that piezoelectric ceramics one is fixed on guiding mechanism one by pre-loading screw one, the position that piezoelectric ceramics one generates
Mobile Communication crosses guiding mechanism one and passes to lever amplifying mechanism one, and the straight beam type hinge in guiding mechanism one is used for the biography of constrained displacement
Direction is passed, lever amplifying mechanism one is used to amplify the displacement of the generation of piezoelectric ceramics one, and sensing system includes sensor one, sensing
Device two and sensor three, sensor one include displacement sensor one, displacement sensor bracket one and movable body one, and sensor two wraps
Displacement sensor two, displacement sensor bracket two and movable body two are included, sensor three includes displacement sensor three, displacement sensor
Bracket three and movable body three, the sensor one, sensor two are identical with three structure of sensor, the wherein displacement of sensor one
Sensor stand one is fixed by screws on vibration device, and movable body one is fixed by screws on workbench, and displacement passes
Sensor one is fixed in displacement sensor bracket one.
6. a kind of disresonance type according to claim 1 vibrates auxiliary polishing device, it is characterised in that: of the present invention big
Fibrous gypsum frame includes: pedestal, crossbeam, support frame one and support frame two, and support frame one and support frame two are rigidly connected on pedestal,
Crossbeam is rigidly attached on support frame one and support frame two, and marble frame is used for the installation and fixation of whole device.
7. a kind of method of disresonance type vibration auxiliary polishing, characterized in that it comprises the following steps:
(1), workpiece is polished to be fixed on the workbench of whirling vibration platform, the accurate oscillating table of Y-axis linear guide drive,
It whirling vibration platform and is polished workpiece and moves to designated position along Y-direction, Z axis linear guide and X-axis linear guide drive and throw
Light-knife has motion platform and moves to designated position along the face ZX, and the air-flotation electric spindle in polishing tool motion platform drives polishing tool
It rotates about the z axis；
(2), the piezoelectric ceramics one into whirling vibration platform, piezoelectric ceramics two and piezoelectric ceramics three are passed through identical sinusoidal electricity
Signal, the sinusoidal electric signals can use formula X=AX× sin (2 π × f × t) indicates that wherein X indicates the electricity for being passed through piezoelectric ceramics
Pressure, AXIndicate that the amplitude of sinusoidal electric signals, f indicate the frequency of sinusoidal electric signals, t indicates the time, by adjusting the sinusoidal signal
Amplitude AX, the parameters such as frequency f, the rotation angle and vibration frequency that control workbench 60204 vibrates about the z axis；
(3), workbench drive is polished workpiece and turns about the Z axis in certain angular range, which throwing abrasive grain
It is uniformly distributed on light workpiece, and the rotation and the rotation about the z axis of polishing tool form relative motion, which increases throwing
The speed of related movement that light-knife has and is polished between workpiece, the depth for making abrasive grain incision be polished workpiece surface ductility domain increase
Add, before penetraction depth reaches critical cutting-in, polishing tool carries out ductile removal to the surface for being polished workpiece, to reach throwing
The purpose of light, when needing to polish curved surface, the direct current brushless servo motor in accurate oscillating table passes through scroll bar and arc
Movement set a table on arc-shaped rack so that arcuate movement is set a table arcuately base motions, arcuate movement, which is set a table, drives whirling vibration platform
Be polished workpiece motion s, the surface for making to be polished workpiece keeps point contact with polishing tool always, to realize to curved surface
Polishing；
(4), it is completed until whole surfaces to be machined polish, polishing process terminates.
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| CN110394738A (en) * | 2019-07-29 | 2019-11-01 | 哈尔滨理工大学 | A kind of special grinding apparatus and its manufacture craft suitable for ceramic material revolving parts grinding |
| CN110667232A (en) * | 2019-09-18 | 2020-01-10 | 固高科技(深圳)有限公司 | Electric carving needle assembly and electric carving needle system |
| CN111761359A (en) * | 2020-08-07 | 2020-10-13 | 山东理工大学 | Indexable three-degree-of-freedom high-bandwidth vibration auxiliary cutting device |
| CN112476065A (en) * | 2019-09-11 | 2021-03-12 | 长春工业大学 | Non-resonant vibration-assisted magnetorheological polishing device and method for processing optical element |
| CN113218307A (en) * | 2021-04-29 | 2021-08-06 | 无锡地心科技有限公司 | High-precision optical fiber six-axis positioning platform |
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| CN114393513A (en) * | 2022-01-24 | 2022-04-26 | 天津大学 | Central liquid supply semiconductor material surface processing device and use method thereof |
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