CN113523435B - Hard and brittle complex structure spindle-free multipole servo polishing device and polishing method - Google Patents

Hard and brittle complex structure spindle-free multipole servo polishing device and polishing method Download PDF

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Publication number
CN113523435B
CN113523435B CN202110653061.8A CN202110653061A CN113523435B CN 113523435 B CN113523435 B CN 113523435B CN 202110653061 A CN202110653061 A CN 202110653061A CN 113523435 B CN113523435 B CN 113523435B
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piezoelectric ceramic
workpiece
translational motion
axis
piezoelectric ceramics
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CN113523435A (en
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朱吴乐
韩放
居冰峰
孙安玉
陈诚
武璐
龚金禄
刘钧
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Suzhou Chaolai Precision Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00Methods, machines, or devices not covered elsewhere, for working metal by removal of material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/14Control or regulation of the orientation of the tool with respect to the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/02Driving main working members
    • B23Q5/04Driving main working members rotary shafts, e.g. working-spindles
    • B23Q5/10Driving main working members rotary shafts, e.g. working-spindles driven essentially by electrical means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a main-shaft-free multipole servo polishing device with a hard and brittle complex structure and a polishing method, wherein the micro-motion of piezoelectric ceramics C can accurately control the position of a cutter and realize micro-nano morphology tracking of a complex surface-shaped workpiece by matching an X-axis translational motion table, a Z-axis translational motion table, a C-axis workpiece turntable and the piezoelectric ceramics C; through the cooperation of piezoceramics A, B, the cutter can realize replacing the main shaft function, forms no main shaft circumference rotation track to can avoid brittle fracture in ductile zone processing work piece, improve the surface shape quality.

Description

Hard and brittle complex structure spindle-free multipole servo polishing device and polishing method
Technical Field
The invention belongs to the field of ultra-precise polishing, and particularly relates to a hard and brittle complex structure spindle-free multipole servo polishing device and a polishing method.
Background
Hard and brittle materials are favored for their unique properties, but because of the great difficulty in processing hard and brittle materials and the development of fields such as optics, microelectronics, etc., the need for complex surface micro-nano structures of hard and brittle materials is increasingly increased, and how to process micro-nano structured hard and brittle materials is an urgent task in the processing industry;
scholars have proposed a series of improved methods for processing hard and brittle materials, for example Peng et al employ 21.9kHz ultrasonic vibration to assist in processing, elliptical vibration between the die and workpiece eliminates peaks on the processed surface, reducing surface roughness; wang et al propose a rotational ultrasonic processing method and verify that the introduction of vibrations can improve the processing quality; however, the methods all need a main shaft which rotates rapidly, the main shaft can increase the complexity and load of a mechanism and the overall control difficulty is improved, so that the development of a system which does not use a high-speed main shaft is quite significant;
therefore, a hard, brittle and complex structure main shaft-free multistage servo polishing method is provided: the planar spiral processing track is realized through the coordination of the X-axis translational motion platform, the Z-axis translational motion platform, the C-axis workpiece turntable and the piezoelectric ceramic C, the micro-motion of the piezoelectric ceramic C can accurately control the position of a cutter, and the micro-nano morphology tracking of a complex surface-shaped workpiece is realized; through the cooperation of the piezoelectric ceramics A, B, the cutter can realize the function of replacing a main shaft, form a circumferential rotation track without the main shaft, process a workpiece in a ductile domain, avoid brittle fracture and improve the surface shape quality;
disclosure of Invention
Aiming at the defects of the prior art, the invention provides a hard, brittle and complex structure spindle-free multipole servo polishing device and a polishing method.
The planar spiral processing track is realized through the coordination of the X-axis translational motion table, the Z-axis translational motion table, the C-axis workpiece turntable and the piezoelectric ceramic C, the micro-motion of the piezoelectric ceramic C precisely controls the position of a cutter, and the micro-nano morphology tracking of the complex surface-shaped workpiece is realized; through the cooperation of the piezoelectric ceramics A, B, the cutter can realize the function of replacing a main shaft, form a circumferential rotation track without the main shaft, process a workpiece in a ductile domain, avoid brittle fracture and improve the surface shape quality;
in order to achieve the above purpose, the technical scheme of the invention is as follows:
a hard and crisp complex structure spindle-free multipole servo polishing device comprises a spindle-free cutter mechanism, a vacuum adsorption disc, a workpiece turntable, an X-axis translational motion table, a frame, a Z-axis translational motion table, a bottom adapter, a height regulator, an adapter plate and a height fine tuning piece;
the spindle-free cutter mechanism is arranged on the height fine tuning piece, the height fine tuning piece is arranged on the adapter plate, the adapter plate is arranged on the height adjuster, the height adjuster is arranged on the bottom adapter, the bottom adapter is arranged on the Z-axis translational motion table, and the Z-axis translational motion table is arranged on the frame; the vacuum adsorption disc is arranged on the workpiece turntable, the workpiece turntable is arranged on the X-axis motion platform through a bracket, and the X-axis motion platform is arranged on the frame;
the main shaft-free cutter mechanism comprises a cutter head, a cutter head fixing frame, piezoelectric ceramics A, piezoelectric ceramics B, a gasket, a cutter rest, a flexible hinge, an end effector, piezoelectric ceramics C, an inner shaft, an end cover and a displacement sensor;
the tool bit is arranged on a tool bit fixing frame, the tool bit fixing frame is fixedly arranged on piezoelectric ceramic A, the piezoelectric ceramic A is fixedly arranged on piezoelectric ceramic B, the piezoelectric ceramic B is fixedly arranged on a gasket, the gasket is fixedly arranged on a tool rest, the tool rest is fixedly connected with an end effector, and the end effector is formed by integrally processing solid steel blocks, and comprises fixing frames on the left side and the right side, a flexible hinge and an execution block; the end effector is connected with the fixing frame through a flexible hinge, the piezoelectric ceramic C is a hollow cylinder, a hollow inner shaft is arranged in the piezoelectric ceramic C, the outer diameter of the inner shaft is equal to the inner diameter of the piezoelectric ceramic C, a displacement sensor is arranged between one end of the inner shaft and the end effector, an end cover is arranged at the other end of the inner shaft, and the end cover is fixedly arranged on the fixing frame.
A polishing method of a hard and brittle complex structure spindle-free multipole servo polishing device comprises the following steps:
the first-stage servo control is realized by an X-axis translational motion table, a Z-axis translational motion table, a workpiece turntable and piezoelectric ceramics C; the workpiece is fixed on a vacuum adsorption disc of a workpiece turntable, the workpiece turntable drives the vacuum adsorption disc to rotate, and the workpiece turntable is matched with an X-axis translational motion table to form a planar spiral processing track, so that a cutter can process the workpiece at any position in an XY plane; the Z-axis translational motion platform controls the feeding of the cutter to form the basic low-frequency contour of the workpiece; the rotation signal of the vacuum adsorption disc is subdivided by an encoder, and the pulse signal triggers the piezoelectric ceramic C to generate micro-motion, so that the complex outline of the processed workpiece is formed, and the micro-nano morphology tracking of the workpiece is realized;
the second-stage servo control is realized by piezoelectric ceramics A and B; the phase difference of the driving voltages of the piezoelectric ceramic A and the piezoelectric ceramic B is controlled to be pi/2, so that the cutter head does not perform circumferential rotation motion of a main shaft in an XY plane, and the function of replacing the main shaft is realized; meanwhile, the tool is enabled to process a workpiece in a ductile domain without overlapping of circular rotation motion tracks of the main shaft, the depth of polished removed materials is smaller than the critical depth, the materials are firstly subjected to plastic deformation, brittle fracture is avoided, polishing acting force of the tool is reduced, service life of the tool is prolonged, and surface shape quality of a processed surface is improved.
Preferably, the overall rigidity of the spindle-free cutter mechanism is 10N/mu m-200N/mu m, so that resonance of the device in the working process is avoided; the travel of the X translational motion stage is 100cm, and the travel of the Z-axis translational motion stage is 30cm; the piezoelectric ceramic C vibrates at low frequency, the frequency is 0-200Hz, the piezoelectric ceramic C moves slightly along the Z-axis direction, and the stroke is 0-1000 mu m;
preferably, the piezoelectric ceramics A, B vibrate at a high frequency of 1kHz-100kHz, the piezoelectric ceramics A realize shearing micro-movement along the X-axis direction under voltage excitation, the piezoelectric ceramics B micro-move along the Y-axis direction under voltage excitation, the vibration amplitude of the two piezoelectric ceramics is 5-50 mu m, and the equivalent rotating speed is adjustable in the range of 0-3000 rpm.
Preferably, the flexible hinge is a straight circular flexible hinge.
Preferably, the tool bit fixing frame, the piezoelectric ceramic A and the piezoelectric ceramic B are fixed through glue.
The beneficial effects of the invention are as follows:
compared with the existing vibration auxiliary processing device, the invention has the following greatest distinguishing advantages: firstly, the traditional method for processing the hard and brittle materials generally needs a high-speed main shaft to maintain the rotation of the cutter, which greatly increases the volume and design complexity of the cutter, and the method ensures that the driving voltage is different by pi/2 phase differences through the cooperation of the piezoelectric ceramics A, B, realizes the function of replacing the main shaft, ensures that the cutter forms a circumferential rotation track without the main shaft, and can process a workpiece in a ductile domain to avoid brittle fracture; secondly, the micro-motion of the piezoelectric ceramic C can accurately control the position of the cutter, and trace the micro-nano structure of the surface of a workpiece when the workpiece with a complex surface shape is processed.
Drawings
FIG. 1 is a schematic diagram of a hard, brittle, complex structure spindle-free multi-stage servo polishing apparatus;
FIG. 2 is an exploded view of the non-spindle cutter mechanism;
FIG. 3 is a schematic view of a shaftless cutter mechanism;
fig. 4 is a schematic diagram of the circumferential rotation path of a spindle-less tool.
Detailed Description
The invention will be further described in detail with reference to the drawings and examples.
As shown in fig. 1, the device comprises a spindle-free cutter mechanism 101, a workpiece 102, a vacuum adsorption disc 103, a workpiece turntable 104, a tripod 105, an X-axis translational motion table 106, a stand 107, a Z-axis translational motion table 108, a bottom adapter 109, a height adjuster 110, an adapter plate 111 and a height fine adjustment member 112;
the spindle-free cutter mechanism is arranged on the height fine tuning piece, the height fine tuning piece is arranged on the adapter plate, the adapter plate is arranged on the height adjuster, the height adjuster is arranged on the bottom adapter, the bottom adapter is arranged on the Z-axis translational motion table, and the Z-axis translational motion table is arranged on the frame; the workpiece is fixed through a vacuum adsorption disc, the vacuum adsorption disc is arranged on a workpiece turntable, the workpiece turntable is arranged on a triangular bracket, the triangular bracket is arranged on an X-axis motion platform, and the X-axis motion platform is arranged on a frame;
as shown in fig. 2 and 3, the spindle-free cutter mechanism is composed of a cutter head 201, a cutter head fixing frame 202, a piezoelectric ceramic a203, a piezoelectric ceramic B204, a gasket 205, a cutter holder 206, a flexible hinge 207, an end effector 208, a piezoelectric ceramic C209, an inner shaft 210, an end cover 211 and a displacement sensor 212;
the tool bit is arranged on a tool bit fixing frame, the tool bit fixing frame is fixedly arranged on piezoelectric ceramic A, the piezoelectric ceramic A is fixedly arranged on piezoelectric ceramic B, the piezoelectric ceramic B is fixedly arranged on a gasket, the gasket is fixedly arranged on a tool rest, the tool rest is fixedly connected with an end effector, and the end effector is formed by integrally processing solid steel blocks, and comprises fixing frames on the left side and the right side, a flexible hinge and an execution block; the end effector is connected with the fixing frame through a flexible hinge, the piezoelectric ceramic C is a hollow cylinder, a hollow inner shaft is arranged in the piezoelectric ceramic C, the outer diameter of the inner shaft is equal to the inner diameter of the piezoelectric ceramic C, a displacement sensor is arranged between one end of the inner shaft and the end effector, an end cover is arranged at the other end of the inner shaft, and the end cover is fixedly arranged on the fixing frame; the whole mechanism is fixed through bolt connection, and the whole design is compact.
The first-stage servo control is realized through an X-axis translational motion table, a Z-axis translational motion table, a C-axis workpiece turntable and piezoelectric ceramics C; the workpiece is fixed on a workpiece turntable, the workpiece turntable rotates around a C axis and is matched with an X axis translational motion table to form a plane spiral processing track, and the cutter can process the workpiece at any position in an XY plane; the Z-axis translational motion platform controls the feeding of the cutter to form the basic low-frequency contour of the workpiece; furthermore, the workpiece turntable rotates around the C axis to be subdivided by the encoder, the pulse signal triggers the piezoelectric ceramic C to generate micro motion, the complex outline of the processed workpiece is formed, and the micro-nano morphology tracking of the workpiece is realized.
The second-stage servo control is realized by piezoelectric ceramics A and B; the method for realizing the circumferential rotation track of the spindle-free tool mechanism without the spindle is described as follows: as shown in fig. 4, piezoelectric ceramic a is displaced in the X-axis direction by an excitation voltage, and piezoelectric ceramic B is displaced in the Y-axis direction by an excitation voltage; starting from the initial position, when the displacement of the piezoelectric ceramic A in the X-axis direction reaches half of the maximum range delta X, the piezoelectric ceramic B does not move, and is shown as 4.1 at the moment; when the displacement of the piezoelectric ceramic A in the X-axis direction reaches the maximum range 2 delta X, the displacement of the piezoelectric ceramic B in the Y-axis direction reaches half delta Y of the maximum range, and the displacement is shown as 4.2; when the displacement of the piezoelectric ceramic A in the X-axis direction returns to half of the maximum range delta X, the displacement of the piezoelectric ceramic B in the Y-axis direction reaches the maximum range 2 delta Y, and the displacement is shown as 4.3; when the piezoelectric ceramic A returns to the initial position in the X-axis direction, namely, displacement does not occur, and the displacement of the piezoelectric ceramic B in the Y-axis direction returns to half of the maximum range delta Y, the displacement is shown as 4.4; the process is repeated subsequently, so that the cutter realizes the circumferential rotation track without the main shaft through the cooperative matching of two piezoelectric ceramics under the condition of no main shaft; that is to say, the exciting voltage of the piezoelectric ceramic B is different by pi/2 in phase difference under the form of a motion equation relative to the exciting voltage of the piezoelectric ceramic A;
the invention is not a matter of the known technology.
The above embodiments are provided to illustrate the technical concept and features of the present invention and are intended to enable those skilled in the art to understand the content of the present invention and implement the same, and are not intended to limit the scope of the present invention. All equivalent changes or modifications made in accordance with the spirit of the present invention should be construed to be included in the scope of the present invention.

Claims (8)

1. A hard and crisp complex structure does not have multi-polar servo grinding and polishing device of main shaft, its characterized in that: the device comprises a spindle-free cutter mechanism (101), a vacuum adsorption disc (103), a workpiece turntable (104), an X-axis translational motion table (106), a frame (107), a Z-axis translational motion table (108), a bottom adapter (109), a height adjuster (110), an adapter plate (111) and a height fine adjustment piece (112);
the spindle-free cutter mechanism (101) is arranged on a height fine adjustment piece (112), the height fine adjustment piece (112) is arranged on an adapter plate (111), the adapter plate is arranged on a height adjuster (110), the height adjuster (110) is arranged on a bottom adapter (109), the bottom adapter (109) is arranged on a Z-axis translational motion table (108), and the Z-axis translational motion table is arranged on a frame; the vacuum adsorption disc is arranged on the workpiece turntable, the workpiece turntable is arranged on the X-axis motion platform through a bracket, and the X-axis motion platform is arranged on the frame;
the spindle-free cutter mechanism comprises a cutter head (201), a cutter head fixing frame (202), piezoelectric ceramics A (203), piezoelectric ceramics B (204), a gasket (205), a cutter rest (206), a flexible hinge (207), an end effector (208), piezoelectric ceramics C (209), an inner shaft (210), an end cover (211) and a displacement sensor (212);
the tool bit (201) is arranged on a tool bit fixing frame (202), the tool bit fixing frame is fixedly arranged on a piezoelectric ceramic A (203), the piezoelectric ceramic A is fixedly arranged on a piezoelectric ceramic B (204), the piezoelectric ceramic B is fixedly arranged on a gasket (205), the gasket is fixedly arranged on a tool rest (206), the tool rest is fixedly connected with an end effector (208), and the end effector (208) is formed by integrally processing solid steel blocks, and comprises fixing frames on the left side and the right side, a flexible hinge (207) and an execution block; the end effector (208) is connected with the fixing frame through a flexible hinge (207), the piezoelectric ceramic C (209) is a hollow cylinder, a hollow inner shaft (210) is arranged in the piezoelectric ceramic C (209), the outer diameter of the inner shaft is equal to the inner diameter of the piezoelectric ceramic C, a displacement sensor (212) is arranged between one end of the inner shaft and the end effector (208), an end cover is arranged at the other end of the inner shaft, and the end cover is fixedly arranged on the fixing frame.
2. The hard, brittle and complex structure spindle-free multi-pole servo polishing device as claimed in claim 1, wherein: the flexible hinge is a straight round flexible hinge.
3. The hard, brittle and complex structure spindle-free multi-pole servo polishing device as claimed in claim 1, wherein: the tool bit fixing frame (202), the piezoelectric ceramic A (203) and the piezoelectric ceramic B (204) are fixed through glue.
4. The hard, brittle and complex structure spindle-free multi-pole servo polishing device as claimed in claim 1, wherein:
the integral rigidity of the main shaft-free cutter mechanism is 10N/mu m-200N/mu m, so that resonance of the device in the working process is avoided; the travel of the X translational motion stage is 100cm, and the travel of the Z-axis translational motion stage is 30cm; the piezoelectric ceramic C vibrates at low frequency, the frequency is 0-200Hz, the piezoelectric ceramic C moves slightly along the Z-axis direction, and the stroke is 0-1000 mu m.
5. The hard, brittle and complex structure spindle-free multi-pole servo polishing device as claimed in claim 1, wherein:
the piezoelectric ceramics A, B vibrate at high frequency with the frequency of 1kHz-100kHz, the piezoelectric ceramics A realize shearing micro-motion along the X-axis direction under voltage excitation, the piezoelectric ceramics B micro-motion along the Y-axis direction under voltage excitation, the vibration amplitude of the two piezoelectric ceramics is 5-50 mu m, and the equivalent rotating speed is adjustable in the range of 0-3000 rpm.
6. The polishing method of the hard, brittle and complex structure spindle-free multi-polar servo polishing device according to claim 1, which is characterized in that:
the first-stage servo control is realized by an X-axis translational motion table, a Z-axis translational motion table, a workpiece turntable and piezoelectric ceramics C; the workpiece is fixed on a vacuum adsorption disc of a workpiece turntable, the workpiece turntable drives the vacuum adsorption disc to rotate, and the workpiece turntable is matched with an X-axis translational motion table to form a planar spiral processing track, so that a cutter can process the workpiece at any position in an XY plane; the Z-axis translational motion platform controls the feeding of the cutter to form the basic low-frequency contour of the workpiece; the rotation signal of the vacuum adsorption disc is subdivided by an encoder, and the pulse signal triggers the piezoelectric ceramic C to generate micro-motion, so that the complex outline of the processed workpiece is formed, and the micro-nano morphology tracking of the workpiece is realized;
the second-stage servo control is realized by piezoelectric ceramics A and B; the phase difference of the driving voltages of the piezoelectric ceramic A and the piezoelectric ceramic B is controlled to be pi/2, so that the cutter head does not perform circumferential rotation motion of a main shaft in an XY plane, and the function of replacing the main shaft is realized; meanwhile, the tool is enabled to process a workpiece in a ductile domain without overlapping of the circular rotation motion tracks of the main shaft, and the depth of the polished removed material is smaller than the critical depth.
7. The polishing method of the hard, brittle and complex structure spindle-free multi-polar servo polishing device according to claim 6, which is characterized in that: the integral rigidity of the main shaft-free cutter mechanism is 10N/mu m-200N/mu m, so that resonance of the device in the working process is avoided; the travel of the X translational motion stage is 100cm, and the travel of the Z-axis translational motion stage is 30cm; the piezoelectric ceramic C vibrates at low frequency, the frequency is 0-200Hz, the piezoelectric ceramic C moves slightly along the Z-axis direction, and the stroke is 0-1000 mu m.
8. The polishing method of the hard, brittle and complex structure spindle-free multi-polar servo polishing device according to claim 6, which is characterized in that: the piezoelectric ceramics A, B vibrate at high frequency with the frequency of 1kHz-100kHz, the piezoelectric ceramics A realize shearing micro-motion along the X-axis direction under voltage excitation, the piezoelectric ceramics B micro-motion along the Y-axis direction under voltage excitation, the vibration amplitude of the two piezoelectric ceramics is 5-50 mu m, and the equivalent rotating speed is adjustable in the range of 0-3000 rpm.
CN202110653061.8A 2021-06-11 2021-06-11 Hard and brittle complex structure spindle-free multipole servo polishing device and polishing method Active CN113523435B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4012290A1 (en) * 1990-04-17 1991-06-13 Rainer Dipl Ing Daumann NC multispindle automatic machine - has fixed position spindles and end working turret tools on equal coaxial pitch circles
KR20040061751A (en) * 2002-12-31 2004-07-07 대우종합기계 주식회사 A Spindle Tool Existence or Nonexistence Sensing Unit of CNC and Method Thereof
US9101991B1 (en) * 2014-07-17 2015-08-11 Tennine Corp. Method and apparatus for non-spindle multi-axis machining
CN106881618A (en) * 2017-04-05 2017-06-23 广州铁路职业技术学院 A kind of fast tool servo device of two-axle interlocking
CN106903560A (en) * 2017-02-27 2017-06-30 南通大学 Micro- pendulum grinding and polishing device of Machining Arc blade diamond tool nose circular arc
CN108972302A (en) * 2018-10-01 2018-12-11 长春工业大学 A kind of disresonance type vibration auxiliary polishing device and method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4012290A1 (en) * 1990-04-17 1991-06-13 Rainer Dipl Ing Daumann NC multispindle automatic machine - has fixed position spindles and end working turret tools on equal coaxial pitch circles
KR20040061751A (en) * 2002-12-31 2004-07-07 대우종합기계 주식회사 A Spindle Tool Existence or Nonexistence Sensing Unit of CNC and Method Thereof
US9101991B1 (en) * 2014-07-17 2015-08-11 Tennine Corp. Method and apparatus for non-spindle multi-axis machining
CN106903560A (en) * 2017-02-27 2017-06-30 南通大学 Micro- pendulum grinding and polishing device of Machining Arc blade diamond tool nose circular arc
CN106881618A (en) * 2017-04-05 2017-06-23 广州铁路职业技术学院 A kind of fast tool servo device of two-axle interlocking
CN108972302A (en) * 2018-10-01 2018-12-11 长春工业大学 A kind of disresonance type vibration auxiliary polishing device and method

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