CN103357894A - Long-strake three degree-of-freedom linear type quick cutter servo device - Google Patents
Long-strake three degree-of-freedom linear type quick cutter servo device Download PDFInfo
- Publication number
- CN103357894A CN103357894A CN2013102782297A CN201310278229A CN103357894A CN 103357894 A CN103357894 A CN 103357894A CN 2013102782297 A CN2013102782297 A CN 2013102782297A CN 201310278229 A CN201310278229 A CN 201310278229A CN 103357894 A CN103357894 A CN 103357894A
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- arm
- flexible hinge
- degree
- voice coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Manipulator (AREA)
Abstract
The invention relates to a long-strake three degree-of-freedom linear type quick cutter servo device which belongs to the technical field of ultra-precision turning, optic precision part turning and processing, and the like and is suitable for free-form surface generative processing with great curvature radius changes. According to the invention, three voice coil motor-driven main flexible hinge devices are adopted for achieving high-frequency reciprocating rectilinear motions of a diamond cutter in the axis X direction, the axis Y direction and the axis Z direction. The decoupling device provided by the invention can achieve that the coupling displacements of the long-strake three degree-of-freedom linear type quick cutter servo device, produced in all free degree directions, are controlled to be at nanoscale, to achieve precision decoupling. The long-strake three degree-of-freedom linear type quick cutter servo device provided by the invention has the advantages of simple structure, low cost, high efficiency and the like, and can achieve multiple degree-of-freedom, high-frequency and long-strake reciprocating rectilinear motion.
Description
Technical field
The present invention relates to a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo.Be applicable to the technical fields such as ultra-precise cutting and optical precision component turning processing.
Technical background
Freeform optics surface has the remarkable advantages such as the optical property of improvement, implementation structure lightweight, this is so that the freeform optics part not only has important application at many industrial circles such as space flight, aviation, national defence, and at other industrial circle that satisfies the needs of consumers (for example automobile, digital camera, mobile phone, image are processed, optical-fibre communications) extremely widely application demand is arranged also.
Be applied to comprise the industrial every field that satisfies the needs of consumers, can its key also be and thickly create into freeform optics surface by high-efficiency precision freeform optics part success.Diamond turning based on FTS is generally believed it is that the most rising a kind of freeform optics surface is created into method by international academic community and industrial quarters
Existing most of FTS mainly also is confined to FTS and the two-freedom FTS of single-degree-of-freedom, the FTS that for example moves back and forth along Z axis, around the FTS of Y-axis reciprocally swinging with along the FTS that moves back and forth of X, Z axis both direction, and existing FTS stroke mostly is greatly micron order, this is so that existing FTS can not realize the large travel synchronization reciprocating motion of X-axis, Y-axis and Z axis, can't create accepted way of doing sth processing to the free form surface that radius of curvature changes greatly, thereby be difficult to realize independently being controlled to be with surface topography the cutter path planing method of target.
Summary of the invention
The invention provides a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo, be mainly used in the technical fields such as ultra-precise cutting and optical precision component turning processing, realized large stroke, high frequency, the linear reciprocating motion of diamond cutter in X-direction, Y direction and Z-direction.
The present invention takes following technical scheme to carry out the function realization: left supported plate, right supported plate, rear carrier plate are fixedly connected with pedestal, upper cover plate respectively; Back side panel is fixedly connected with base; Epipleural is fixedly connected with upper cover plate, upper supporting plate respectively; Main flexible hinge is fixedly connected with pedestal, upper cover plate.
The stationary part of X-direction voice coil motor is fixedly connected with back side panel, and the mover part of X-direction voice coil motor is fixedly connected with the X-direction decoupling device, and the X-direction decoupling device is fixed on the rear carrier plate, is fixedly connected with main flexible hinge by X-direction decoupling zero arm; The stationary part of Y-direction voice coil motor is fixedly connected with left supported plate, and the mover part of Y-direction voice coil motor is fixedly connected with main flexible hinge; The stationary part of Z-direction voice coil motor is fixedly connected with upper supporting plate, and the mover part of Z-direction voice coil motor is fixedly connected with the Z-direction decoupling device, and the Z-direction decoupling device is fixed on the upper cover plate, is fixedly connected with main flexible hinge by Z-direction decoupling zero arm; Diamond cutter is fixed on the guide table of main flexible hinge.
Described Three Degree Of Freedom master flexible hinge is the overall structure of a structure height symmetry, X-direction guiding mechanism, Y-direction guiding mechanism, Z-direction guiding mechanism consist of a train, X-direction guiding mechanism and Z-direction guiding mechanism are nested on the Y-direction guiding mechanism motion platform, and the X-direction guiding mechanism is nested on the Z-direction guiding mechanism motion platform; It is hinged that Y-direction part is undertaken by outer hinge set and main flexible hinge body, and eight groups of leading arms of Y-direction carry out hingedly with outer hinge set and inner hinge group respectively, and two motion support arms of Y-direction carry out hinged with interior flexible hinge group respectively; It is hinged that Z direction part is undertaken by outer hinge set and Y-direction motion support arm, and eight groups of leading arms of Z-direction carry out hingedly with outer hinge set and inner hinge group respectively, and two motion support arms of Z-direction carry out hinged with interior flexible hinge group respectively; It is hinged that directions X part is undertaken by outer hinge set and Z direction motion support arm, and eight groups of leading arms of X-direction carry out hingedly with outer hinge set and inner hinge group respectively, and X-direction guide table and interior flexible hinge group are carried out hinged.
Described directions X decoupling device can carry out the high accuracy decoupling zero to the coupled motions that produce from Y-direction, Z direction guiding mechanism, four flexible arms of directions X decoupling device are fixedly connected with rear carrier plate respectively, the front decoupling zero arm of directions X decoupling device is made of two groups of flexible hinge group vertical distribution, the directions X decoupler is fixedly connected with the X-direction guide table of main flexible hinge arrangements by decoupling zero arm front end, and rear motion guide arm is connected with directions X voice coil motor mover partial fixing.
Described Z direction decoupling device can carry out the high accuracy decoupling zero to the coupled motions that produce from the Y-direction guiding mechanism, four flexible arms of Z direction decoupling device are fixedly connected with upper cover plate respectively, the front decoupling zero arm of Z direction decoupling device is made of one group of right angle incision type flexible hinge group, Z direction decoupling device is fixedly connected with the Z-direction motion support arm of main flexible hinge arrangements by decoupling zero arm front end, and rear motion guide arm is connected with Z direction voice coil loudspeaker voice coil mover partial fixing.
Advantage of the present invention: the present invention can realize that the FTS device all can obtain millimetre-sized large stroke motion in X-direction, Y direction and Z-direction, mainly is applicable to have the free form surface diamond turning that changes than larger radius of curvature and creates into; The decoupling device that the present invention relates to can be realized described a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo is controlled at nanoscale in the coupling displacement that each free degree direction produces, and realizes accurate decoupling zero; That the present invention has is simple in structure, cost is low, the efficient advantages of higher; A kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo that the present invention relates to can be realized multiple degrees of freedom, high frequency, large stroke linear reciprocating motion.
Description of drawings
Fig. 1 is a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo axonometric drawing;
Fig. 2 is a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo side view;
Fig. 3 is a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo front view;
Fig. 4 is main flexible hinge tomograph in a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo;
Fig. 5 is directions X decoupling device tomograph in a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo;
Fig. 6 is Z direction decoupling device tomograph in a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo;
The specific embodiment
Below in conjunction with the accompanying drawing example illustrated content of the present invention and operation principle are further specified.
Left supported plate 3a, right supported plate 3b, rear carrier plate 2b are fixedly connected with pedestal 1, upper cover plate 4 respectively; Back side panel 2a is fixedly connected with base 1; Epipleural 5a1,5a2 are fixedly connected with upper cover plate 4, upper supporting plate 5b respectively; Main flexible hinge 6 is fixedly connected with pedestal 1, upper cover plate 4.
The stationary part of X-direction voice coil motor 8 is fixedly connected with back side panel 2a, and the mover part of X-direction voice coil motor 8 is fixedly connected with X-direction decoupling device 7, and X-direction decoupling device 7 is fixed on the rear carrier plate 2b, is fixedly connected with main flexible hinge 6 by X-direction decoupling zero arm; The stationary part of Y-direction voice coil motor 10 is fixedly connected with left supported plate 3a, and the mover part of Y-direction voice coil motor 10 is fixedly connected with main flexible hinge 6; The stationary part of Z-direction voice coil motor 11 is fixedly connected with upper supporting plate 5b, and the mover part of Z-direction voice coil motor 11 is fixedly connected with Z-direction decoupling device 12, and Z-direction decoupling device 12 is fixed on the upper cover plate 4, is fixedly connected with main flexible hinge 6 by Z-direction decoupling zero arm; Diamond cutter 9 is fixed on the guide table of main flexible hinge 6.
Described Three Degree Of Freedom master flexible hinge 6 is overall structures of a structure height symmetry, X-direction guiding mechanism, Y-direction guiding mechanism, Z-direction guiding mechanism consist of a train, X-direction guiding mechanism and Z-direction guiding mechanism are nested on the Y-direction guiding mechanism motion platform, and the X-direction guiding mechanism is nested on the Z-direction guiding mechanism motion platform; It is hinged that Y-direction part is undertaken by outer hinge set 6a1 and main flexible hinge body 6d, and eight groups of leading arm 6a3 of Y-direction carry out hingedly with outer hinge set 6a1 and inner hinge group 6a2 respectively, and two motion support arms of Y-direction 6a4 carries out hinged with interior flexible hinge group 6a2 respectively; It is hinged that Z direction part is undertaken by outer hinge set 6b1 and Y-direction motion support arm 6a4, and eight groups of leading arm 6b3 of Z-direction carry out hingedly with outer hinge set 6b1 and inner hinge group 6b2 respectively, and two motion support arms of Z-direction 6b4 carries out hinged with interior flexible hinge group 6b3 respectively; Directions X part is undertaken hinged by outer hinge 6c1 group and Z direction motion support arm 6b4, eight groups of leading arm 6c3 of X-direction carry out hingedly with outer hinge set 6c1 and inner hinge group 6c2 respectively, and X-direction guide table 6c4 and interior flexible hinge group 6c2 carry out hinged.
Described directions X decoupling device 7 can carry out the high accuracy decoupling zero to the coupled motions that produce from Y-direction, Z direction guiding mechanism, four flexible arm 7b1,7b2 of directions X decoupling device, 7b3,7b4 are fixedly connected with described rear carrier plate 2b respectively, the front decoupling zero arm of directions X decoupling device 7 is made of two groups of flexible hinge group 7a1,7a2 vertical distribution, the directions X decoupler is fixedly connected with the X-direction guide table 6c4 of described main flexible hinge arrangements 6 by decoupling zero arm front end 7c, and rear motion guide arm 7d is connected with described directions X voice coil loudspeaker voice coil 8 electric mover partial fixings.
Described Z direction decoupling device 12 can carry out the high accuracy decoupling zero to the coupled motions that produce from the Y-direction guiding mechanism, four flexible arm 12b1,12b2 of Z direction decoupling device 12,12b3,12b4 are fixedly connected with described upper cover plate 4 respectively, the front decoupling zero arm of Z direction decoupling device 12 is made of one group of right angle incision type flexible hinge group 12a, Z direction decoupling device is fixedly connected with the Z-direction motion support arm 6b4 of described main flexible hinge arrangements 6 by decoupling zero arm front end 12c, and rear motion guide arm 12d is connected with described Z direction voice coil loudspeaker voice coil 11 mover partial fixings.
Claims (5)
1. large stroke Three Degree Of Freedom orthoscopic fast tool servo, it is characterized in that: left supported plate 3a, right supported plate 3b, rear carrier plate 2b are fixedly connected with pedestal 1, upper cover plate 4 respectively; Back side panel 2a is fixedly connected with base 1; Epipleural 5a1,5a2 are fixedly connected with upper cover plate 4, upper supporting plate 5b respectively; Main flexible hinge 6 is fixedly connected with pedestal 1, upper cover plate 4.
2. a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo according to claim 1, it is characterized in that: the stationary part of X-direction voice coil motor 8 is fixedly connected with back side panel 2a, the mover part of X-direction voice coil motor 8 is fixedly connected with X-direction decoupling device 7, X-direction decoupling device 7 is fixed on the rear carrier plate 2b, is fixedly connected with main flexible hinge 6 by X-direction decoupling zero arm; The stationary part of Y-direction voice coil motor 10 is fixedly connected with left supported plate 3a, and the mover part of Y-direction voice coil motor 10 is fixedly connected with main flexible hinge 6; The stationary part of Z-direction voice coil motor 11 is fixedly connected with upper supporting plate 5b, and the mover part of Z-direction voice coil motor 11 is fixedly connected with Z-direction decoupling device 12, and Z-direction decoupling device 12 is fixed on the upper cover plate 4, is fixedly connected with main flexible hinge 6 by Z-direction decoupling zero arm; Diamond cutter 9 is fixed on the guide table of main flexible hinge 6.
According to claim 1 with a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo claimed in claim 2, it is characterized in that: described Three Degree Of Freedom master flexible hinge 6 is overall structures of a structure height symmetry, X-direction guiding mechanism, Y-direction guiding mechanism, Z-direction guiding mechanism consist of a train, X-direction guiding mechanism and Z-direction guiding mechanism are nested on the Y-direction guiding mechanism motion platform, and the X-direction guiding mechanism is nested on the Z-direction guiding mechanism motion platform; It is hinged that Y-direction part is undertaken by outer hinge set 6a1 and main flexible hinge body 6d, and eight groups of leading arm 6a3 of Y-direction carry out hingedly with outer hinge set 6a1 and inner hinge group 6a2 respectively, and two motion support arms of Y-direction 6a4 carries out hinged with interior flexible hinge group 6a2 respectively; It is hinged that Z direction part is undertaken by outer hinge set 6b1 and Y-direction motion support arm 6a4, and eight groups of leading arm 6b3 of Z-direction carry out hingedly with outer hinge set 6b1 and inner hinge group 6b2 respectively, and two motion support arms of Z-direction 6b4 carries out hinged with interior flexible hinge group 6b3 respectively; Directions X part is undertaken hinged by outer hinge 6c1 group and Z direction motion support arm 6b4, eight groups of leading arm 6c3 of X-direction carry out hingedly with outer hinge set 6c1 and inner hinge group 6c2 respectively, and X-direction guide table 6c4 and interior flexible hinge group 6c2 carry out hinged.
4. according to claim 1, claim 2 and a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo claimed in claim 3, it is characterized in that: described directions X decoupling device 7 can be to from Y-direction, the high accuracy decoupling zero is carried out in the coupled motions that Z direction guiding mechanism produces, four flexible arm 7b1 of directions X decoupling device, 7b2,7b3,7b4 is fixedly connected with described rear carrier plate 2b respectively, the front decoupling zero arm of directions X decoupling device 7 is by two groups of flexible hinge group 7a1, the 7a2 vertical distribution consists of, the directions X decoupler is fixedly connected with the X-direction guide table 6c4 of described main flexible hinge arrangements 6 by decoupling zero arm front end 7c, and rear motion guide arm 7d is connected with described directions X voice coil loudspeaker voice coil 8 electric mover partial fixings.
5. according to claim 1, claim 2 and a kind of large stroke Three Degree Of Freedom orthoscopic fast tool servo claimed in claim 3, it is characterized in that: described Z direction decoupling device 12 can carry out the high accuracy decoupling zero to the coupled motions that produce from the Y-direction guiding mechanism, four flexible arm 12b1 of Z direction decoupling device 12,12b2,12b3,12b4 is fixedly connected with described upper cover plate 4 respectively, the front decoupling zero arm of Z direction decoupling device 12 is made of one group of right angle incision type flexible hinge group 12a, Z direction decoupling device is fixedly connected with the Z-direction motion support arm 6b4 of described main flexible hinge arrangements 6 by decoupling zero arm front end 12c, and rear motion guide arm 12d is connected with described Z direction voice coil loudspeaker voice coil 11 mover partial fixings.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2013102782297A CN103357894A (en) | 2013-06-26 | 2013-06-26 | Long-strake three degree-of-freedom linear type quick cutter servo device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2013102782297A CN103357894A (en) | 2013-06-26 | 2013-06-26 | Long-strake three degree-of-freedom linear type quick cutter servo device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN103357894A true CN103357894A (en) | 2013-10-23 |
Family
ID=49360628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2013102782297A Pending CN103357894A (en) | 2013-06-26 | 2013-06-26 | Long-strake three degree-of-freedom linear type quick cutter servo device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103357894A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104084829A (en) * | 2014-07-17 | 2014-10-08 | 吉林大学 | Quick cutter servo device with two decoupled shafts |
CN107282948A (en) * | 2016-04-12 | 2017-10-24 | 浙江科技学院 | A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting |
CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
CN114029998A (en) * | 2021-11-23 | 2022-02-11 | 安徽大学绿色产业创新研究院 | Flexible underactuated manipulator for precision assembly of special-shaped parts |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040163450A1 (en) * | 2003-02-21 | 2004-08-26 | Korea Advanced Institute Of Science And Technology | 3-Axis straight-line motion stage and sample test device using the same |
CN101441319A (en) * | 2008-12-19 | 2009-05-27 | 中国矿业大学 | Large-range plane three-freedom degree precision fine motion device and control method thereof |
CN101733754A (en) * | 2009-12-04 | 2010-06-16 | 山东理工大学 | Three-dimensionally moved decoupling micro-manipulating robot |
CN101924450A (en) * | 2010-07-22 | 2010-12-22 | 华中科技大学 | A kind of fixed voice coil motor direct drive type X-Y micro-vibration platform |
CN102069201A (en) * | 2010-12-19 | 2011-05-25 | 吉林大学 | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning |
CN102446563A (en) * | 2011-09-26 | 2012-05-09 | 江苏大学 | Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location |
CN102615542A (en) * | 2012-04-10 | 2012-08-01 | 吉林大学 | Long-travel two-axis linear fast tool servo device |
CN102708930A (en) * | 2012-05-29 | 2012-10-03 | 合肥工业大学 | Three-dimensional decoupled micro-displacement stage with floating driver |
-
2013
- 2013-06-26 CN CN2013102782297A patent/CN103357894A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040163450A1 (en) * | 2003-02-21 | 2004-08-26 | Korea Advanced Institute Of Science And Technology | 3-Axis straight-line motion stage and sample test device using the same |
CN101441319A (en) * | 2008-12-19 | 2009-05-27 | 中国矿业大学 | Large-range plane three-freedom degree precision fine motion device and control method thereof |
CN101733754A (en) * | 2009-12-04 | 2010-06-16 | 山东理工大学 | Three-dimensionally moved decoupling micro-manipulating robot |
CN101924450A (en) * | 2010-07-22 | 2010-12-22 | 华中科技大学 | A kind of fixed voice coil motor direct drive type X-Y micro-vibration platform |
CN102069201A (en) * | 2010-12-19 | 2011-05-25 | 吉林大学 | Two-degree-of-freedom dynamic error counteracting device for free-form surface ultra-precision turning |
CN102446563A (en) * | 2011-09-26 | 2012-05-09 | 江苏大学 | Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location |
CN102615542A (en) * | 2012-04-10 | 2012-08-01 | 吉林大学 | Long-travel two-axis linear fast tool servo device |
CN102708930A (en) * | 2012-05-29 | 2012-10-03 | 合肥工业大学 | Three-dimensional decoupled micro-displacement stage with floating driver |
Non-Patent Citations (1)
Title |
---|
段宁华: "一种新型两自由度快速刀具伺服装置的研制", 《中国优秀硕士学位论文全文数据库 工程科技I辑》 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104084829A (en) * | 2014-07-17 | 2014-10-08 | 吉林大学 | Quick cutter servo device with two decoupled shafts |
CN104084829B (en) * | 2014-07-17 | 2016-08-31 | 吉林大学 | A kind of fast tool servo of two decoupler shafts |
CN107282948A (en) * | 2016-04-12 | 2017-10-24 | 浙江科技学院 | A kind of Three Degree Of Freedom device processed applied to ultra-precise cutting |
CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
JP2023503704A (en) * | 2020-05-22 | 2023-01-31 | 浙江大学 | Electromagnetic driven high-speed tool servo system with flexible hinge combination mechanism |
JP7319741B2 (en) | 2020-05-22 | 2023-08-02 | 浙江大学 | Electromagnetic driven high-speed tool servo system with flexible hinge combination mechanism |
CN114029998A (en) * | 2021-11-23 | 2022-02-11 | 安徽大学绿色产业创新研究院 | Flexible underactuated manipulator for precision assembly of special-shaped parts |
CN114029998B (en) * | 2021-11-23 | 2022-07-01 | 安徽大学绿色产业创新研究院 | Flexible underactuated manipulator for precision assembly of special-shaped parts |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN202539814U (en) | Three-dimensional laser cutting machine tool | |
CN103357894A (en) | Long-strake three degree-of-freedom linear type quick cutter servo device | |
CN205291608U (en) | A triaxial telecontrol equipment for 3D prints | |
CN103273356B (en) | A kind of multi-axes synchronous hybrid device based on four-freedom parallel mechanism | |
CN102794664B (en) | Bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform | |
CN103252673A (en) | Horizontal type six-shaft parallel-serial computer numerical control milling machine | |
CN104551714A (en) | Parallel mechanism with spatial two rotation and one translation freedom degrees | |
CN101085492A (en) | Laser light path transmission structure | |
CN105643604A (en) | Four-freedom-degree micro motion soft system | |
CN110052723A (en) | A kind of double galvanometer picosecond laser galvanometer equipment of same light source | |
CN101745921A (en) | Human eye and human neck simulating vision device | |
CN101813156A (en) | Flexible high-precision spacial vibration damping platform | |
CN105690165A (en) | Large-altitude-angle 2R1T three-degree-of-freedom spatial parallel mechanism | |
CN102632336B (en) | Switching macro micro laser high-speed cutting machine tool | |
CN204229843U (en) | A kind of high precision plane positioning system | |
CN203578779U (en) | Servo device used for large-stroke three-freedom-degree linear quick cutter | |
CN102059576B (en) | Biaxial linear moving micro driving device | |
CN103394808A (en) | Multi-station laser engraving machine | |
CN103350351A (en) | Desktop three-axis gantry type micro machining machine tool | |
CN104959755A (en) | Three-dimensional laser cutting machine | |
CN207953316U (en) | A kind of large stroke and high precision two-freedom fast tool servo | |
CN210588449U (en) | Ion source five-axis tracking mechanism for ion beam polishing machine and optical part machining equipment | |
CN202769193U (en) | Plane three-degree of freedom parallel precision positioning platform of partial decoupling | |
CN2917912Y (en) | Two freedom degree laser light path transmission structure | |
CN202639966U (en) | High-frequency ultraprecise processing lathe tool rest driving platform based on bridge-type flexible hinge |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20131023 |