CN203804647U - Adjustable rigidity and frequency two-dimensional micro-motion platform based on the principle of stress stiffening - Google Patents
Adjustable rigidity and frequency two-dimensional micro-motion platform based on the principle of stress stiffening Download PDFInfo
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- CN203804647U CN203804647U CN201420259896.0U CN201420259896U CN203804647U CN 203804647 U CN203804647 U CN 203804647U CN 201420259896 U CN201420259896 U CN 201420259896U CN 203804647 U CN203804647 U CN 203804647U
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Abstract
The utility model relates to precision two-dimensional motions and relates to precision displacement compensation applied to universal X-Y motion platforms, in particular to an adjustable rigidity and frequency two-dimensional micro-motion platform based on the principle of stress stiffening. The adjustable rigidity and frequency two-dimensional micro-motion platform comprises an X-directional motion sub-platform and a Y-directional motion sub-platform, corresponding drivers, and a micro-motion workbench; vibration frequency of the two-dimensional micro-motion platform is independently adjusted by using film sets as flexible hinges, and the tension of the film sets is adjusted screws. The adjustable rigidity and frequency two-dimensional micro-motion platform with the structure has the advantages that the frequency can be adjusted based on pre-stressed films, inherent frequency of the platform can be adjusted before or during operating according to different conditions and drive frequencies, two feeding motion directions are orthogonal, and the micro-motion workbench is prevented from coupling during two-dimensional motion.
Description
Technical field
The utility model relates to precision movement platform, can be used for accurate operation and grand micro-composite high speed fine compensation, and the utility model is specifically related to the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle.
Background technology
In order to realize two-dimentional precise motion, it is particularly important that accurate, stable feed mechanism seems, because the quality of it and product is closely related.In addition, complicated freeform optics surface is because volume is little, and high accuracy has proposed strict requirement to micro-feed mechanism especially.Micro-feed system is the basis of this series products of processing, and it is widely used in sharp knife servo feed system, in micro displacement workbench and grand micro-compound platform etc.Traditional two-dimentional micro-feeding device adopts fixed frequency design conventionally; material behavior and foozle have been proposed to high requirement; especially when processing different product; its driving frequency can change conventionally; make the motion platform displacement amplification factor of fixed frequency inconsistent, thereby make displacement magnification distortion.In addition, the existing two-dimensional micromotion stage sports coupling based on flexible hinge, motion control is complicated, is difficult to meet high speed and precision motion requirement.
Utility model content
The purpose of this utility model is to propose the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle, and based on prestress membrane, frequency is adjustable, and the driving direction of two feed arrangements is mutually vertical, avoids micro displacement workbench to be coupled when two dimensional motion.
For reaching this object, the utility model by the following technical solutions:
Rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle, includes X-direction film group (201), Y-direction film group (202), X-direction motion sub-platform (203), Y-direction motion sub-platform (204), outside framework (205), X-direction driving, Y-direction driving, X-direction displacement transducer (8), Y-direction displacement transducer (10), frame (1) and workbench (5);
Described outside framework (205) is fixed on described frame (1); Have the both sides that flexible described X-direction film group (201) is arranged at described X-direction motion sub-platform (203), its one end is connected in described outside framework (205) madial wall, and the other end is connected in described X-direction motion sub-platform (203); There are the both sides that flexible described Y-direction film group (202) is arranged at described Y-direction motion sub-platform (204), its one end is connected in the madial wall of described X-direction motion sub-platform (203), and the other end is connected in described Y-direction motion sub-platform (204); Described X-direction film group (201) is mutually vertical with Y-direction film group (202); Described workbench (5) is rigidly connected in described Y-direction motion sub-platform (204);
In described X-direction film group (201) and Y-direction film group (202), film is separately and is arranged in parallel, and the length direction of film is respectively perpendicular to the direction of feed of X-direction motion sub-platform (203) and Y-direction motion sub-platform (204);
Described X-direction drives and includes X-direction driving stator (301) and X-direction driving mover (302); Described Y-direction drives and includes Y-direction driving stator (401) and Y-direction driving mover (402).Wherein said X-direction drives stator (301) and Y-direction to drive stator (401) to be all fixed in frame (1); Described X-direction drives mover (302) upper by being fixed on X-direction motion sub-platform (203), and described Y-direction drives mover (402) by being fixed on Y-direction motion sub-platform (204);
Described outside framework (205) is provided with groove (2) in the connection of itself and X-direction film group (201), make the inner side of described outside framework (205) form thinner deformable X-direction motion sub-platform elastic component (6), described outside framework (205) is provided with the X-direction frequency adjustment mechanism (11) that regulates X-direction motion sub-platform elastic component (6) degree of deformation; It is deformable Y-direction motion sub-platform elastic component (9) that described Y-direction motion sub-platform (204) is provided with the junction regulating with described Y-direction film group (202), and described Y-direction motion sub-platform (204) is provided with the Y-direction frequency adjustment mechanism (7) that regulates Y-direction motion sub-platform elastic component (9).
End in the direction of feed of described X-direction motion sub-platform (203) and described Y-direction motion sub-platform (204) is respectively arranged with X-direction displacement transducer (8) and Y-direction displacement transducer (10).
Described X-direction displacement transducer (8) and Y-direction displacement transducer (10) are condenser type or inductance type transducer
Non-working surface at described X-direction displacement transducer (8) and Y-direction displacement transducer (10) is provided with insulating barrier.
Described X-direction film group (201), Y-direction film group (202), X-direction motion sub-platform (203), Y-direction motion sub-platform (204) and outside framework (205) are integral type structure.
Described Y-direction motion sub-platform (204) within it side corner is provided with the embedded hole slot of circular arc (206).
The magnetic stator of described X-direction voice coil motor (301) and coil mover (302) leave movement clearance in diagram Y-direction, and the magnetic stator of described Y-direction voice coil motor (401) and coil mover (402) leave movement clearance in diagram X-direction.By described mode, driving mechanism is realized XY to mobile decoupling.
Described X-direction driver (401) and described Y-direction driver (402) are voice coil motor.
Described X-direction frequency adjustment mechanism (11) is the bolt through described groove (2), and its two ends are connected to the both sides of described groove (2); Described Y-direction frequency adjustment mechanism (7) is for through described Y-direction motion sub-platform (204) and be connected in the bolt of described workbench (5).
Described X-direction frequency adjustment mechanism (11) is the piezoelectric ceramic actuator through described groove (2), and its two ends are connected to the both sides of described groove (2); Described Y-direction frequency adjustment mechanism (7) is for through described Y-direction motion sub-platform (204) and be connected in the piezoelectric ceramic actuator of described workbench (5).
The know-why of the micromotion platform frequency adjustment that the utility model proposes is: the intrinsic frequency of the compliant mechanism that prestress membrane forms is relevant to the tension force of prestress membrane, the intrinsic frequency of carrying out governor motion by the tensile force in adjusting prestress membrane, meets the requirement of different operating modes.
Owing to adopting technique scheme, the frequency adjustment two-dimensional micromotion stage the utility model proposes has the following advantages:
1. adopted based on regulate prestress membrane tensile force change mechanism's intrinsic frequency design, can be manual or the kinetic characteristic of dynamic guiding mechanism, improve and improve the performance of micromotion platform.
2. in the two-dimensional micromotion stage that the utility model proposes, the stator of the large quality of driver is all fixed in frame, has reduced the motional inertia of two-dimensional micromotion stage, is conducive to improve the response speed of micromotion platform.
3. the two-dimensional micromotion stage that the utility model proposes adopts integral type compliant mechanism to realize two-dimension displacement in XY plane, between X-direction motion platform and Y-direction motion platform, there is no pair clearance, can adapt to the high working environment of carrying out frequency.
4. the X-direction direction of motion of the two-dimensional micromotion stage that the utility model proposes is mutually vertical with the Y-direction direction of motion, and motion control is simple.
Accompanying drawing explanation
Fig. 1 is that the axis of no-feathering of a kind of example of the utility model measures intention
Fig. 2 is the front view of a kind of example of the present utility model
Fig. 3 is the integral structure schematic diagram of film group, motion sub-platform and the outside framework of one dimension micromotion platform of the present utility model
Fig. 4 is that the axis of no-feathering of another kind of example of the present utility model measures intention
Fig. 5 is the front view of another kind of example of the present utility model.
Wherein: frame 1, groove 2, X-direction film group 201, Y-direction film group 202, X-direction motion sub-platform 203, Y-direction motion sub-platform 204, outside framework 205, embedded hole slot 206, X-direction drives stator 301, and X-direction drives mover 302, and Y-direction drives stator 401, Y-direction drives mover 402, workbench 5, X-direction motion sub-platform elastic component 6, Y-direction frequency adjustment mechanism 7, X-direction displacement transducer 8, Y-direction motion sub-platform elastic component 9, Y-direction displacement transducer 10, X-direction frequency adjustment mechanism 11, Y-direction piezoelectric ceramic piece 12, X-direction piezoelectric ceramic piece 13.
The specific embodiment
Below in conjunction with accompanying drawing and by the specific embodiment, further illustrate the technical solution of the utility model.
The rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle as shown in Figure 1 to Figure 3, includes X-direction film group 201, Y-direction film group 202, X-direction motion sub-platform 203, Y-direction motion sub-platform 204, outside framework 205, X-direction driving, Y-direction driving, X-direction displacement transducer 8, Y-direction displacement transducer 10, frame 1 and workbench 5;
Described outside framework 205 is fixed on described frame 1; Have the both sides that flexible described X-direction film group 201 is arranged at described X-direction motion sub-platform 203, its one end is connected in described outside framework 205 madial walls, and the other end is connected in described X-direction motion sub-platform 203; Have the both sides that flexible described Y-direction film group 202 is arranged at described Y-direction motion sub-platform 204, its one end is connected in the madial wall of described X-direction motion sub-platform 203, and the other end is connected in described Y-direction motion sub-platform 204; Described X-direction film group 201 is mutually vertical with Y-direction film group 202; Described workbench 5 is rigidly connected in described Y-direction motion sub-platform 204;
In described X-direction film group 201 and Y-direction film group 202, film is separately and is arranged in parallel, and the length direction of film is respectively perpendicular to the direction of feed of X-direction motion sub-platform 203 and Y-direction motion sub-platform 204;
Described X-direction drives and includes X-direction driving stator 301 and X-direction driving mover 302; Described Y-direction drives and includes Y-direction driving stator 401 and Y-direction driving mover 402.Wherein said X-direction drives stator 301 and Y-direction to drive stator 401 to be all fixed in frame 1; Described X-direction drives mover 302 by being fixed on X-direction motion sub-platform 203, and described Y-direction drives mover 402 by being fixed on Y-direction motion sub-platform 204; Described X-direction drives the X-direction motion that is used for driving X-direction motion sub-platform 203, and described Y-direction drives the Y-direction motion that is used for driving Y-direction motion sub-platform 204;
As shown in Figure 3, described outside framework 205 is provided with groove 2 in the connection of itself and X-direction film group 201, make the inner side of described outside framework 205 form thinner deformable X-direction motion sub-platform elastic component 6, described outside framework 205 is provided with the X-direction frequency adjustment mechanism 11 that regulates X-direction motion sub-platform elastic component 6 degree of deformations; It is deformable Y-direction motion sub-platform elastic component 9 that described Y-direction motion sub-platform 204 is provided with the junction regulating with described Y-direction film group 202, and described Y-direction motion sub-platform 204 is provided with the Y-direction frequency adjustment mechanism 7 that regulates Y-direction motion sub-platform elastic component 9.
Described in described X-direction driver drives, X-direction motion sub-platform 203 and connected Y-direction motion sub-platform 204 and workbench 5 produce the feeding of X-direction micrometric displacement.Under the restraining function of described X-direction film group 201, described X-direction motion sub-platform 203 is suppressed in the motion of non-X direction of feed.
Described Y-direction drives described Y-direction motion sub-platform 204 and connected workbench 5 to produce the feeding of Y-direction micrometric displacement.Under the restraining function of described Y-direction film group 202, described Y-direction motion sub-platform 204 is suppressed in the motion of non-Y direction of feed.
Described workbench is provided with the functional units such as cutter, under described X-direction driver and the effect of described Y-direction driver, produces two-dimension displacement, completes corresponding technological action.
By changing the tightness of described X-direction frequency adjustment mechanism 11 and Y-direction frequency adjustment mechanism 7, can change the intrinsic frequency of said mechanism, thereby change described workbench 5 kinetic characteristics.
Described X-direction drives stator 301 and Y-direction to drive stator 401 to be all fixed on frame 1, and quality is light, and vibration kinetic energy is little, and frequency is fast.
As shown in Figure 1, in the end of the direction of feed of described X-direction motion sub-platform 203 and described Y-direction motion sub-platform 204, be respectively arranged with X-direction displacement transducer 8 and Y-direction displacement transducer 10, for the micrometric displacement of X-direction and the Y-direction of detection operations platform 5.
Described X-direction displacement transducer 8 and Y-direction displacement transducer 10 are condenser type or inductance type transducer
Non-working surface at described X-direction displacement transducer 8 and Y-direction displacement transducer 10 is provided with insulating barrier, for preventing that displacement transducer from being disturbed by other metal materials, affects certainty of measurement.
Described X-direction film group 201, Y-direction film group 202, X-direction motion sub-platform 203, Y-direction motion sub-platform 204 and outside framework 205 are integral type structure, by whole block material, through modes such as milling, spark machined, obtained, avoid the rigging error of part, can improve platform kinematic accuracy.
As shown in Figure 3, described Y-direction motion sub-platform 204 is provided with the embedded hole slot 206 of circular arc in side corner within it.Above-mentioned hole slot 206 arranges object and is to guarantee that frequency regulation arrangement in the utility model can regulate the film tensile force of X-direction film group 201 and Y-direction film group 202 preferably.
The magnetic stator 301 of described X-direction voice coil motor and coil mover 302 leave movement clearance in diagram Y-direction, and the magnetic stator 401 of described Y-direction voice coil motor and coil mover 402 leave movement clearance in diagram X-direction.By described mode, driving mechanism is realized XY to mobile decoupling.
Described X-direction driver 401 and described Y-direction driver 402 are voice coil motor.
Described X-direction frequency adjustment mechanism 11 is the bolt through described groove 2, and its two ends are connected to the both sides of described groove 2; Described Y-direction frequency adjustment mechanism 7 is for through described Y-direction motion sub-platform 204 and be connected in the bolt of described workbench 5.
As shown in Figure 1 to Figure 3, described X-direction frequency adjustment mechanism 11 and Y-direction frequency adjustment mechanism 7 are bolt, described bolt can produce displacement by manual adjustments length direction, can change respectively the elasticity of described X-direction motion sub-platform elastic component 6 and Y-direction motion sub-platform elastic component 9, and then change respectively the film tensile force of described X-direction film group 201 and Y-direction film group 202, realize the dynamic adjustment to the structural natural frequencies of platform.
Described X-direction frequency adjustment mechanism 11 is the piezoelectric ceramic actuator through described groove 2, and its two ends are connected to the both sides of described groove 2; Described Y-direction frequency adjustment mechanism 7 is for through described Y-direction motion sub-platform 204 and be connected in the piezoelectric ceramic actuator of described workbench 5.
As shown in Figures 3 to 5, described X-direction frequency adjustment mechanism 11 comprises bolt and X-direction piezoelectric ceramic piece 13, and described Y-direction frequency adjustment mechanism 7 comprises bolt and Y-direction piezoelectric ceramic piece 12.The length direction that described X-direction piezoelectric ceramic piece 13 and described Y-direction piezoelectric ceramic piece 12 can be controlled bolt under applied voltage effect produces displacement, can change respectively the elasticity of described X-direction motion sub-platform elastic component 6 and Y-direction motion sub-platform elastic component 9, and then change respectively the film tensile force of described X-direction film group 201 and Y-direction film group 202, realize the dynamic adjustment to the structural natural frequencies of platform.
Know-why of the present utility model has below been described in conjunction with specific embodiments.These are described is in order to explain principle of the present utility model, and can not be interpreted as by any way the restriction to the utility model protection domain.Explanation based on herein, those skilled in the art does not need to pay performing creative labour can associate other specific embodiment of the present utility model, within these modes all will fall into protection domain of the present utility model.
Claims (10)
1. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle, is characterized in that: include X-direction film group (201), Y-direction film group (202), X-direction motion sub-platform (203), Y-direction motion sub-platform (204), outside framework (205), X-direction driving, Y-direction driving, X-direction displacement transducer (8), Y-direction displacement transducer (10), frame (1) and workbench (5);
Described outside framework (205) is fixed on described frame (1); Have the both sides that flexible described X-direction film group (201) is arranged at described X-direction motion sub-platform (203), its one end is connected in described outside framework (205) madial wall, and the other end is connected in described X-direction motion sub-platform (203); There are the both sides that flexible described Y-direction film group (202) is arranged at described Y-direction motion sub-platform (204), its one end is connected in the madial wall of described X-direction motion sub-platform (203), and the other end is connected in described Y-direction motion sub-platform (204); Described X-direction film group (201) is mutually vertical with Y-direction film group (202); Described workbench (5) is rigidly connected in described Y-direction motion sub-platform (204);
In described X-direction film group (201) and Y-direction film group (202), film is separately and is arranged in parallel, and the length direction of film is respectively perpendicular to the direction of feed of X-direction motion sub-platform (203) and Y-direction motion sub-platform (204);
Described X-direction drives and includes X-direction driving stator (301) and X-direction driving mover (302); Described Y-direction drives and includes Y-direction driving stator (401) and Y-direction driving mover (402), and wherein said X-direction drives stator (301) and Y-direction to drive stator (401) to be all fixed in frame (1); Described X-direction drives mover (302) upper by being fixed on X-direction motion sub-platform (203), and described Y-direction drives mover (402) by being fixed on Y-direction motion sub-platform (204);
Described outside framework (205) is provided with groove (2) in the connection of itself and X-direction film group (201), make the inner side of described outside framework (205) form thinner deformable X-direction motion sub-platform elastic component (6), described outside framework (205) is provided with the X-direction frequency adjustment mechanism (11) that regulates X-direction motion sub-platform elastic component (6) degree of deformation; It is deformable Y-direction motion sub-platform elastic component (9) that described Y-direction motion sub-platform (204) is provided with the junction regulating with described Y-direction film group (202), and described Y-direction motion sub-platform (204) is provided with the Y-direction frequency adjustment mechanism (7) that regulates Y-direction motion sub-platform elastic component (9).
2. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 1, is characterized in that: the end in the direction of feed of described X-direction motion sub-platform (203) and described Y-direction motion sub-platform (204) is respectively arranged with X-direction displacement transducer (8) and Y-direction displacement transducer (10).
3. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 2, is characterized in that: described X-direction displacement transducer (8) and Y-direction displacement transducer (10) are condenser type or inductance type transducer.
4. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 2, is characterized in that: the non-working surface at described X-direction displacement transducer (8) and Y-direction displacement transducer (10) is provided with insulating barrier.
5. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 1, is characterized in that: described X-direction film group (201), Y-direction film group (202), X-direction motion sub-platform (203), Y-direction motion sub-platform (204) and outside framework (205) are integral type structure.
6. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 1, is characterized in that: described Y-direction motion sub-platform (204) within it side corner is provided with the embedded hole slot of circular arc (206).
7. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 1, it is characterized in that: the magnetic stator of described X-direction voice coil motor (301) and coil mover (302) leave movement clearance in diagram Y-direction, the magnetic stator of described Y-direction voice coil motor (401) and coil mover (402) leave movement clearance in diagram X-direction, by described mode, driving mechanism is realized XY to mobile decoupling.
8. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 1, is characterized in that: described X-direction driver (401) and described Y-direction driver (402) are voice coil motor.
9. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 1, it is characterized in that: described X-direction frequency adjustment mechanism (11) is the bolt through described groove (2), and its two ends are connected to the both sides of described groove (2); Described Y-direction frequency adjustment mechanism (7) is for through described Y-direction motion sub-platform (204) and be connected in the bolt of described workbench (5).
10. the rigidity frequency adjustable two dimension micromotion platform based on Stress stiffening principle according to claim 1, it is characterized in that: described X-direction frequency adjustment mechanism (11) is the piezoelectric ceramic actuator through described groove (2), and its two ends are connected to the both sides of described groove (2); Described Y-direction frequency adjustment mechanism (7) is for through described Y-direction motion sub-platform (204) and be connected in the piezoelectric ceramic actuator of described workbench (5).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420259896.0U CN203804647U (en) | 2014-05-20 | 2014-05-20 | Adjustable rigidity and frequency two-dimensional micro-motion platform based on the principle of stress stiffening |
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| CN201420259896.0U CN203804647U (en) | 2014-05-20 | 2014-05-20 | Adjustable rigidity and frequency two-dimensional micro-motion platform based on the principle of stress stiffening |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN105666503A (en) * | 2016-04-15 | 2016-06-15 | 京东方科技集团股份有限公司 | Carrying tray for conveying robot and conveying robot |
-
2014
- 2014-05-20 CN CN201420259896.0U patent/CN203804647U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| WO2015176444A1 (en) * | 2014-05-20 | 2015-11-26 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro motion platform based on the stress stiffening principle |
| CN103990998B (en) * | 2014-05-20 | 2017-01-25 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| US10239167B2 (en) | 2014-05-20 | 2019-03-26 | Guangdong University Of Technology | Stiffness-frequency adjustable XY micromotion stage based on stress stiffening |
| CN105666503A (en) * | 2016-04-15 | 2016-06-15 | 京东方科技集团股份有限公司 | Carrying tray for conveying robot and conveying robot |
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