CN108262629A - A kind of large stroke and high precision two-freedom fast tool servo - Google Patents
A kind of large stroke and high precision two-freedom fast tool servo Download PDFInfo
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- CN108262629A CN108262629A CN201810237930.7A CN201810237930A CN108262629A CN 108262629 A CN108262629 A CN 108262629A CN 201810237930 A CN201810237930 A CN 201810237930A CN 108262629 A CN108262629 A CN 108262629A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/36—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission in which a servomotor forms an essential element
Abstract
The invention belongs to a kind of large stroke and high precision two-freedom fast tool servos, belong to ultra-precise cutting and optical element Ultraprecision Machining field.Left drive module, right drive module are respectively placed in the left and right sides of hinge module and are fixedly connected with the hinge mount left and right ends in hinge module, cutter module is fixedly connected with the front end of hinge module internal hinge frame, sensor group position is made of three straight-line displacement sensings, it is fixedly connected on inside hinge module, left drive module, right drive module and hinge module are respectively fixedly connected on device pedestal.The present invention meets in the process of freeform optics surface to many performance requirements of FTS devices, has wide practical use for processing the optical element with high-precision complex free curved surface.
Description
Technical field
The invention belongs to ultra-precise cuttings and optical element Ultraprecision Machining field, and in particular to a kind of big stroke is high
Precision two-freedom fast tool servo.
Background technology
Non-rotational symmetric curved surface refers to the curved surface of no any symmetry axis, and the optical element with this kind of curved surface has more
Excellent optical property, such as correction difference, the operating distance that expands, the image quality that improves, expansion visual field etc., can make corresponding optics
System structure is simplified, lightweight, and greatly improves its optical property.This causes freeform optics element in IT and number, vapour
The fields such as vehicle, communication, military weapon, aerospace are in an increasingly wide range of applications.
The method of processing non-turning symmetroid has at present：Processing and forming, computer numerical control grinding and polishing, fly-cutting add
Work, at a slow speed live axle cutting, slide plate servo techniques and fast tool servo technology.FTS technologies refer to diamond cutter in high frequency
It moves back and forth under the drive of driver and then processing non-turning symmetroid；Repeatable processing has complex surface shape
Optical element, while higher dimensional accuracy, form accuracy and relatively low rough surface can be reached by time processing
Degree.This processing method has significant economic benefit in the processing of non-rotational symmetric optical element, and application is the most
Extensively.
The main direction of development of FTS is multiple degrees of freedom, high-precision, big distance high frequency move etc..But current majority FTS devices
All it is uniaxial single-degree-of-freedom formula or the low precision formula of multiaxis, is unable to reach higher optical surface processing effect.Its main cause
It is：Single-degree-of-freedom formula FTS cannot realize that the high-frequency reciprocating along multiaxis direction moves simultaneously in process, in order to ensure
Cutting force is steady in process, and cutter is needed to be carried out at the same time high-frequency reciprocating movement in X-axis and Y-axis both direction, so single
The application of degree of freedom FTS has limitation very much；For multiaxis straight line FTS devices, main problem is that movement travel and
Precision is to be improved, although many multiaxis straight line FTS devices can realize cutter in the reciprocal of X-axis and Y-axis both direction at present
Movement, however, to ensure that higher movement bandwidth, most movement travels is smaller, reduces processing efficiency.For some strokes
Larger FTS devices, since its motion inertia mass is excessive so that the kinematic accuracy and positioning accuracy of cutter are relatively low, drop
The low motion frequency and tracking accuracy of cutter.Such as《A kind of mixed straight line gyration quick cutter servo device》(patent publication No.：
CN101386141A) although realizing large stroke reciprocating, it uses direct current generator to connect motion, there is transmission and misses
The problem of precision problem caused by difference and larger complicated device；For another example《A kind of high-accuracy big three axis fast tool of stroke
Servomechanism installation》(patent publication No.：CN102069411A), voice coil motor and piezoelectric ceramics are used as linear actuator, though
The high-frequency reciprocating movement of X-axis, three Y-axis, Z axis directions is so realized, but since the design of its linkage makes its stability
It is not high, and movement travel of the cutter in X-axis, Z-direction is influenced, while motion parts inertia mass is larger so that cutter is transported
Dynamic precision cannot reach perfect condition；For another example《A kind of fast tool servo of two decoupler shafts》(patent publication No.：
CN104084829A) and《A kind of fast tool servo for processing micro structure surface》(patent publication No.：
CN102248427A) using Piezoelectric Driving, movement travel is limited；Multiaxis FTS devices also different just like mechanism《It is a kind of big
The linear fast tool servo of stroke Three Degree Of Freedom》(patent publication No.:CN103357894A),《A kind of two axis of big stroke
Linear fast tool servo》(patent publication No.:102615542A), structure drives parallel flexible using voice coil motor
The mode of mechanism, although larger stroke can be obtained, the design of pivot formula is so that stability, the service life of hinge
It all decreases, and its structure design so that the inertia mass of motion parts is larger, kinematic accuracy reduces, while designed hinge
Chain structure is complex, is not easy to assemble and debug；For another example《Long-stroke high-frequency-respoquick quick cutter servo device》(patent discloses
Number：CN102554633A) using air-float guide rail as guiding mechanism, complicated, air floating rails working environment is poor, fits
For processing larger freeform optics surface, for processing middle-size and small-size freeform optics surface, cost is higher, has limitation.
In view of problem above, is badly in need of a kind of being used for processing middle-size and small-size freeform optics surface at present and can realize multiple degrees of freedom, larger row
The FTS devices of journey, high-frequency high-precision.
Invention content
The present invention provides a kind of large stroke and high precision two-freedom fast tool servo, has high-precision for processing
The optical element of complex free curved surface meets in the process of freeform optics surface to many performance requirements of FTS devices,
Have wide practical use.
The technical solution adopted by the present invention is that：Including left drive module, right drive module, hinge module, cutter module, biography
Sensor group, pedestal, wherein left drive module, right drive module are respectively placed in the left and right sides and hinge module of hinge module
Hinge mount left and right ends are fixedly connected, and cutter module is fixedly connected with the front end of hinge module internal hinge frame, sensor group position
It is made of, is fixedly connected on inside hinge module, left drive module, right drive module and hinge module three straight-line displacement sensings
It is respectively fixedly connected on device pedestal；
The right drive module is identical with left drive module structure, and the two is positioned opposite, wherein：Left drive module includes sound
Motor one, left support plate, upper top bracing plate| one, lower plate one, front apron one, rear baffle one, flexible hinge guiding mechanism one are enclosed,
Middle left support plate is one fixed plate of voice coil motor, is fixedly connected with the stator one of voice coil motor one, left drive module right side is
Flexible hinge guiding mechanism one is fixedly connected with the mover one of voice coil motor one and realizes X-axis guiding role, upper plate one, bottom
Plate one, front apron one and rear baffle one are mutually permanently connected respectively with motor fixing plate one and flexible hinge guiding mechanism one,
Rectangular parallelepiped space is formed, and in voice coil motor one is wrapped in, the lower plate of left drive module is fixedly connected with device pedestal；
Wherein：Right drive module include voice coil motor two, right support plate, upper top bracing plate| two, lower plate two, front apron two,
Rear baffle two, flexible hinge guiding mechanism two, wherein right support plate be two fixed plate of voice coil motor, the stator with voice coil motor two
Two are fixedly connected, and right drive module right side is flexible hinge guiding mechanism two, is fixedly connected with the mover two of voice coil motor two
Realize X-axis guiding role, upper plate two, lower plate two, front apron two and rear baffle two respectively with motor fixing plate two and soft
Property hinge guiding mechanism two be mutually permanently connected, form rectangular parallelepiped space, and in voice coil motor two is wrapped in, right drive module
Lower plate two be fixedly connected with device pedestal；
The flexible hinge guiding mechanism one, flexible hinge guiding mechanism two use carbon fibre material；
The voice coil motor one, voice coil motor two have nano level positioning accuracy and millimetre-sized movement travel；
The hinge module is by hinge mount and gripper shoe groups into hinge mount is located at the inside of support plate composition；
The support plate includes upper plate, lower plate, front apron, rear baffle, and wherein lower plate is fixed with device pedestal and connected
Connect, front apron, rear baffle are respectively placed in hinge module front and back ends and are fixedly connected with lower plate, upper plate and front apron and after
Baffle is fixedly connected；
The hinge mount is made of two diamond shape flexible hinges and four vertical connecting rods, two diamond shape flexible hinges respectively on
Under horizontal positioned and vertical projection overlap, four vertical connecting rods are fixedly connected respectively with two diamond shape hinge front, rear, left and right end faces,
Diamond shape flexible hinge long-diagonal opposite ends are hinge mount front and back ends, and short diagonal opposite ends are left and right for hinge mount
End；The vertical connecting rod of left end is fixedly connected with the flexible hinge guiding mechanism one of left drive module, right end vertical connecting rod and right driving
The flexible hinge guiding mechanism two of module 2 is fixedly connected；
The sensor group is by top X-direction displacement sensor one, X-direction displacement sensor two and the Y of lower part one
Axis direction displacement sensor forms, and top X-direction displacement sensor one, X-direction displacement sensor two are respectively fixedly connected with
In the lower surface of the upper backup pad of hinge module, Y direction displacement sensor is fixedly connected on the lower plate upper table of hinge module
Face；
Top X-direction displacement sensor one, X-direction displacement sensor two and the Y of lower part one of the sensor group
Grating displacement sensor is respectively adopted in axis direction displacement sensor.
The cutter module is made of diamond cutter and the base of tool, and diamond cutter is fixedly connected on the base of tool, knife
Tool seat is fixedly connected in the middle part of the vertical connecting rod in front end of hinge mount.
Compared with the prior art, the invention has the advantages that：
1. realize the millimetre-sized big stroke motion in X-axis and Y-axis；
2. oppose squash type driving, the elastic deformation of application flexibility mechanism generates the amount of feeding, for other modes
Motion parts quality eliminates electric mover quality, only flexure hinge mechanism quality.Using carbon fibre material significantly simultaneously
The inertia mass of motion parts is reduced, improves largest motion frequency and kinematic accuracy；
3. the design of diamond shape hinge mount structure is so that movement of the cutter in X/Y plane is more stablized, and to long-diagonal side
There is amplification to (in Y direction) linear motion, motor flexible hinge guiding mechanism has higher overturn-preventing ability, improves
Guide effect；
4. it for swing type moves back and forth, opposition squash type of the invention movement will not produce in the Z-axis direction
Raw additional displacement, omits displacement compensating mechanism, simplified control system.
The present invention is mainly suitable for middle-size and small-size freeform optics element processing and can realize multiple degrees of freedom, big row
Journey, the function of high-frequency high-precision.
Description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is the structure diagram of the left drive module of the present invention；
Fig. 3 is the left drive module Structure explosion diagram of the present invention；
Fig. 4 is the right drive module Structure explosion diagram of the present invention；
Fig. 5 is the structure diagram of hinge module of the present invention；
Fig. 6 is hinge module Structure explosion diagram of the present invention；
Fig. 7 is the position view of inventive sensor group, removes the part gear of left and right driving and hinge module in figure
Plate；
Fig. 8 is cutter module sterogram of the present invention；
Fig. 9 is operation principle schematic diagram of the present invention.
Specific embodiment
As shown in Figure 1, including left drive module 1, right drive module 2, hinge module 3, cutter module 4, sensor group 5,
Pedestal 6, wherein left drive module 1, right drive module 2 are respectively placed in the hinge in the left and right sides of hinge module 3 and hinge module 3
Chain frame 3-1 left and right ends are fixedly connected, and are driven and are squeezed to the left and right ends to hinge mount 3-1, cutter module 4 and hinge
The front end of 3 internal hinge frame 3-1 of chain module is fixedly connected, and to cut free form surface, sensor group 5 is by three straight-line displacements
Sensing composition, is fixedly connected on inside hinge module 3, to measure hinge mount 3-1 left and right ends institute under the driving of driver
The straight-line displacement of the X-direction of generation and hinge mount 3-1 because X-direction is squeezed and in position caused by Y direction
It moves, and then forms closed loop feedback, left drive module 1, right drive module 2 and hinge module 3 are respectively fixedly connected in device pedestal 6
On；
As shown in Figure 2,3, 4, right 2 structure of drive module is identical with left drive module 1, and the two is positioned opposite, each to drive
Module all by a voice coil motor, flexible hinge guiding mechanism and five pieces of gripper shoe groups into, form the rectangular body mechanism in a space,
Wherein：Left drive module 1 includes one 1-1 of voice coil motor, left support plate 1-2, one 1-3 of upper top bracing plate|, lower plate one
1-4, one 1-5 of front apron, one 1-6 of rear baffle, one 1-7 of flexible hinge guiding mechanism, wherein left support plate 1-2 are voice coil motor one
Fixed plate is fixedly connected with one 1-1-1 of stator of one 1-1 of voice coil motor, and left 1 right side of drive module is flexible hinge Guiding machine
One 1-7 of structure is fixedly connected with one 1-1-2 of mover of one 1-1 of voice coil motor and realizes X-axis guiding role, flexible hinge guiding mechanism
One 1-7 uses carbon fibre material, lighter weight while making it have higher-strength and guiding role, one 1-3 of upper plate, bottom
One 1-4 of plate, one 1-5 of front apron and one 1-6 of rear baffle respectively with one 1- of one 1-2 of motor fixing plate and flexible hinge guiding mechanism
7 are mutually permanently connected, and form rectangular parallelepiped space, and one 1-1 of voice coil motor is wrapped in interior, the lower plate 1-4 of left drive module 1
It is fixedly connected with device pedestal 6；
Wherein：Right drive module 2 includes two 2-1 of voice coil motor, right support plate 2-2, two 2-3 of upper top bracing plate|, lower plate two
2-4, two 2-5 of front apron, two 2-6 of rear baffle, two 2-7 of flexible hinge guiding mechanism, wherein right support plate 2-2 are voice coil motor two
Fixed plate is fixedly connected with two 2-1-1 of stator of two 2-1 of voice coil motor, and right 1 right side of drive module is flexible hinge Guiding machine
Two 2-7 of structure is fixedly connected with two 2-1-2 of mover of two 2-1 of voice coil motor and realizes X-axis guiding role, flexible hinge guiding mechanism
Two 2-7 use carbon fibre material, lighter weight while making it have higher-strength and guiding role, two 2-3 of upper plate, bottom
Two 2-4 of plate, two 2-5 of front apron and two 2-6 of rear baffle respectively with two 2- of two 2-2 of motor fixing plate and flexible hinge guiding mechanism
7 are mutually permanently connected, and form rectangular parallelepiped space, and two 2-1 of voice coil motor is wrapped in interior, the lower plate two of right drive module 2
2-4 is fixedly connected with device pedestal 6；
As shown in figure 5, hinge module 3 is made of hinge mount 3-1 and support plate 3-2, hinge mount 3-1 is located at support plate 3-2
The inside of composition；
As shown in fig. 6, support plate 3-2 includes upper plate 3-2-1, lower plate 3-2-2, front apron 3-2-3, rear baffle 3-2-
4, lower plate 3-2-2 is fixedly connected with device pedestal 6, front apron 3-2-3, rear baffle 3-2-4 be respectively placed in hinge module 3 before,
It rear end and is fixedly connected with lower plate 3-2-2, upper plate 3-2-1 is fixedly connected with front apron 3-2-3 and rear baffle 3-2-4；
As shown in fig. 6, hinge mount 3-1 is made of two diamond shape flexible hinge 3-1-1 and four vertical connecting rod 3-1-2, two
Horizontal positioned up and down and vertical projection overlaps respectively by a diamond shape flexible hinge 3-1-1, four vertical connecting rod 3-1-2 respectively with two water chestnuts
Shape hinge 3-1-1 front, rear, left and right end face is fixedly connected, diamond shape flexible hinge 3-1-1 long-diagonals (Y direction) opposite ends
For hinge mount 3-1 front and back ends, short diagonal (X-direction) opposite ends are the left and right end of hinge mount 3-1；The vertical connecting rod of left end
It is fixedly connected with one 1-7 of flexible hinge guiding mechanism of left drive module 1, right end vertical connecting rod and the flexibility of right drive module 2
Two 2-7 of hinge guiding mechanism is fixedly connected, and left drive module 1 and right drive module 2 can be directly to the left and right two of hinge mount 3-1
End is driven, and the hinge mount 3-1 mechanisms are carbon fibre material structure, significantly reduce the inertia matter of motion
Amount.
It further illustrates, being provided with rectangular through holes in the middle part of the front apron 3-2-3 and rear baffle 3-2-4 of hinge module 3 is convenient for
The internal vertical connecting rod 3-1-2 in front end is connect with cutter module 4, and front apron 3-2-3 and rear baffle 3-2-4 are provided with round threading hole
Convenient for the installation of sensor group 5 and the export of data line.
As shown in fig. 7, sensor group 5 is by one 5-1 of top X-direction displacement sensor, two 5- of X-direction displacement sensor
The 2 and Y direction displacement sensor 5-3 of lower part one is formed, and one 5-1 of top X-direction displacement sensor, X-direction displacement pass
Two 5-2 of sensor is respectively fixedly connected in the lower surface of the upper backup pad 3-2-1 of hinge module 3, for detecting hinge mount 3-1 or so
In the straight-line displacement of X-direction, Y direction displacement sensor 5-3 is fixedly connected on the lower plate 3-2-2 of hinge module 3 at both ends
Upper surface, for detecting straight-line displacement of the hinge mount 3-1 leading portions in Y direction；
As shown in figure 8, cutter module 4 is made of diamond cutter 4-1 and base of tool 4-2, diamond cutter 4-1, which is fixed, to be connected
It is connected on base of tool 4-2, base of tool 4-2 is fixedly connected in the middle part of the vertical connecting rod in front end of hinge mount 3-1.
It further illustrates, two high performance one 1-1 of voice coil motor, two 2-1 of voice coil motor have nano level positioning accurate
Degree and millimetre-sized movement travel；
The 5 top X-direction displacement sensor one of sensor group, X-direction displacement sensor two and the Y-axis of lower part one
Grating displacement sensor is respectively adopted in direction displacement sensor, can reach precision more than 10 nanoscales, therefore in X-axis and Y
The movement of axis can reach the precision of submicron order while all can reach millimetre-sized big stroke.
9 pairs of operation principles of the present invention are further described below in conjunction with the accompanying drawings：
Hinge mount 3-1 is considered as entirety, one 1-1 of control voice coil motor, sound by the realization of the high-frequency reciprocating movement of X-direction
It encloses two 2-1 of motor and hinge mount 3-1 left and right ends is applied with certain power F1 and F2, by the size of the difference and the side that control F1 and F2
To (ignore be oriented to hinge one 1-7, be oriented to two 2-7 of hinge slight resistance), to control the motion state of hinge mount 3-1 entirety,
That is the motion state of the X-direction of cutter, one 5-1 of X-direction displacement sensor, X-direction displacement in combination with X-direction
The feedback of two 5-2 of sensor, to realize the High-precision high-frequency linear reciprocating motions of cutter 4-1 in the X-axis direction；
The realization of the high-frequency reciprocating movement of Y direction, one 1-1 of voice coil motor, two 2-1 of voice coil motor driving diamond shape flexible hinge
While chain frame 3-1 makes it carry out high-frequency reciprocating linear motion in the X-axis direction so that diamond shape hinge frame 3-1 or so two
Corresponding extruding force is born in the X-axis direction in end so that diamond shape linkage 3-1-1 is deformed, i.e., short diagonal (X-direction) becomes
Short, long-diagonal (Y direction) is elongated, and then diamond shape hinge frame 3-1 is made to generate displacement in the Y-axis direction, passes through system control
The minimum value F (F=min { F1, F2 }) of one 1-1 of voice coil motor processed, voice coil motor two 2-1 power outputs F1 and F2, and then control water chestnut
Shape hinge frame 3-1 suffered extruding forces in the X-axis direction, material character, shape with reference to the carbon fiber diamond shape hinge mount 3-1
Shape and corresponding deformation formula, obtain the relationship of extruding force suffered by X-direction and corresponding deformation x, and then extrapolate diamond shape hinge
The deformation quantity y of frame 3-1 in the Y-axis direction and one 1-1 of voice coil motor, two 2-1 power outputs F of voice coil motor (F=min { F1, F2 })
Relationship；So can by control the power output F (F=min { F1, F2 }) of one 1-1 of voice coil motor, two 2-1 of voice coil motor come
Controlling hinge mount 3-1 front ends, the closed loop with reference to the linear displacement transducer 5-3 of Y direction is anti-in the motion state of Y direction
High-precision high-frequency linear reciprocating motions of the cutter 4-1 in Y direction is realized in feedback；
In conclusion by controlling one 1-1 of voice coil motor of two correlations arrangement, output F1, F2 of two 2-1 of voice coil motor
Difference come realize cutter 4-1 in the X-axis direction high-frequency reciprocating movement, pass through control two correlations arrange voice coil motor one
1-1, two 2-1 of voice coil motor output F1, F2 minimum value F come realize cutter 4-1 in the Y-axis direction high-frequency reciprocating movement,
And then realize that the two-freedom High-precision high-frequency of cutter 4-1 moves back and forth.
Claims (8)
1. a kind of large stroke and high precision two-freedom fast tool servo, it is characterised in that：Including left drive module, right drive
Dynamic model block, hinge module, cutter module, sensor group, pedestal, wherein left drive module, right drive module are respectively placed in hinge
The left and right sides of module is fixedly connected with the hinge mount left and right ends in hinge module, cutter module and hinge module internal hinge
The front end of frame is fixedly connected, and sensor group position is made of three straight-line displacement sensings, is fixedly connected on inside hinge module, left drive
Dynamic model block, right drive module and hinge module are respectively fixedly connected on device pedestal.
2. a kind of large stroke and high precision two-freedom fast tool servo according to claim 1, it is characterised in that：
The right drive module is identical with left drive module structure, and the two is positioned opposite, wherein：
The left drive module includes voice coil motor one, left support plate, upper top bracing plate| one, lower plate one, front apron one, rear baffle
First, flexible hinge guiding mechanism one, wherein left support plate are one fixed plate of voice coil motor, are fixed with the stator one of voice coil motor one
Connection, left drive module right side are flexible hinge guiding mechanism one, and realization X-axis is fixedly connected with the mover one of voice coil motor one
Guiding role, upper plate one, lower plate one, front apron one and rear baffle one are led respectively with motor fixing plate one and flexible hinge
It is mutually permanently connected to mechanism one, forms rectangular parallelepiped space, and voice coil motor one is wrapped in interior, the lower plate of left drive module
It is fixedly connected with device pedestal；
The right drive module includes voice coil motor two, right support plate, upper top bracing plate| two, lower plate two, front apron two, rear baffle
2nd, flexible hinge guiding mechanism two, wherein right support plate are two fixed plate of voice coil motor, are fixed with the stator two of voice coil motor two
Connection, right drive module right side are flexible hinge guiding mechanism two, and realization X-axis is fixedly connected with the mover two of voice coil motor two
Guiding role, upper plate two, lower plate two, front apron two and rear baffle two are led respectively with motor fixing plate two and flexible hinge
It is mutually permanently connected to mechanism two, forms rectangular parallelepiped space, and voice coil motor two is wrapped in interior, the lower plate of right drive module
Two are fixedly connected with device pedestal.
3. a kind of large stroke and high precision two-freedom fast tool servo according to claim 2, it is characterised in that：
The flexible hinge guiding mechanism one, flexible hinge guiding mechanism two use carbon fibre material.
4. a kind of large stroke and high precision two-freedom fast tool servo according to claim 2, it is characterised in that：
The voice coil motor one, voice coil motor two have nano level positioning accuracy and millimetre-sized movement travel.
5. a kind of large stroke and high precision two-freedom fast tool servo according to claim 1, it is characterised in that：
The hinge module is by hinge mount and gripper shoe groups into hinge mount is located at the inside of support plate composition；
The support plate includes upper plate, lower plate, front apron, rear baffle, and wherein lower plate is fixedly connected with device pedestal, preceding
Baffle, rear baffle are respectively placed in hinge module front and back ends and are fixedly connected with lower plate, and upper plate is consolidated with front apron and rear baffle
Fixed connection；
The hinge mount is made of two diamond shape flexible hinges and four vertical connecting rods, water above and below two diamond shape flexible hinges difference
Placing flat and vertical projection overlap, and four vertical connecting rods are fixedly connected respectively with two diamond shape hinge front, rear, left and right end faces, diamond shape
Flexible hinge long-diagonal opposite ends are hinge mount front and back ends, and short diagonal opposite ends are the left and right end of hinge mount；It is left
Vertical connecting rod is held to be fixedly connected with the flexible hinge guiding mechanism one of left drive module, right end vertical connecting rod and right drive module 2
Flexible hinge guiding mechanism two be fixedly connected.
6. a kind of large stroke and high precision two-freedom fast tool servo according to claim 1, it is characterised in that：
The sensor group is by top X-direction displacement sensor one, X-direction displacement sensor two and the Y direction position of lower part one
Displacement sensor forms, and top X-direction displacement sensor one, X-direction displacement sensor two are respectively fixedly connected in hinge mould
The lower surface of the upper backup pad of block, Y direction displacement sensor are fixedly connected on the lower plate upper surface of hinge module.
7. a kind of large stroke and high precision two-freedom fast tool servo according to claim 6, it is characterised in that：
Top X-direction displacement sensor one, X-direction displacement sensor two and the Y direction position of lower part one of the sensor group
Grating displacement sensor is respectively adopted in displacement sensor.
8. a kind of large stroke and high precision two-freedom fast tool servo according to claim 1, it is characterised in that：
The cutter module is made of diamond cutter and the base of tool, and diamond cutter is fixedly connected on the base of tool, and the base of tool is fixed
It is connected in the middle part of the vertical connecting rod in front end of hinge mount.
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