CN202695554U - Direct drive type nanoscale precise positioning platform - Google Patents
Direct drive type nanoscale precise positioning platform Download PDFInfo
- Publication number
- CN202695554U CN202695554U CN 201220411967 CN201220411967U CN202695554U CN 202695554 U CN202695554 U CN 202695554U CN 201220411967 CN201220411967 CN 201220411967 CN 201220411967 U CN201220411967 U CN 201220411967U CN 202695554 U CN202695554 U CN 202695554U
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- China
- Prior art keywords
- piezoelectric ceramic
- flexible hinge
- type piezoelectric
- jacking block
- direct drive
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- Expired - Fee Related
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Abstract
Provided by the utility model is a direct drive type nanoscale precise positioning platform. To be specific, the utility model relates to the micro-nano positioning field, more particularly to a direct drive type nanoscale precise positioning platform, so that a problem that a damage probability of the piezoelectric ceramics is increased due to direction connection of the piezoelectric ceramics and a driving structure device in the current micro-nano positioning field can be solved. The direct drive type nanoscale precise positioning platform comprises a platform body, a jackscrew, a jacking block, an encapsulation type piezoelectric ceramic, a bolt, a flexible hinge, and a moving plate. A groove is arranged in the platform body and the encapsulation type piezoelectric ceramic is installed inside the groove; the base portion of the encapsulation type piezoelectric ceramic is fixed with the platform body by the bolt. The jacking block is sleeved outside the moving terminal of the encapsulation type piezoelectric ceramic; the moving terminal of the encapsulation type piezoelectric ceramic and one end of the jacking block are pressed against the flexible hinge; and the jackscrew passes through the jacking block and then is pressed against the moving terminal of the encapsulation type piezoelectric ceramic. A rectangle is formed by the flexible hinge and the rectangular flexible hinge is embedded in the platform body; and the moving plate is arranged on the flexible hinge and the two components are manufactured into one. According to the utility model, the direct drive type nanoscale precise positioning platform can be applied to the micro/nanometer level precise motion and control field.
Description
Technical field
The utility model relates to a kind of micro-nano positioning field, is specifically related to a kind of direct-drive type nanoscale precisely locating platform.
Background technology
Current micro-nano positioning field adopts the direct syndeton device of piezoelectric ceramic to move more.Because that piezoelectric ceramic is not easy to install is fixing, contact area is little, and piezoelectric ceramic itself cannot bear torsion and shearing force, damages probability when causing installing fixedly and increases, thereby cause the cost increase.
The utility model content
The purpose of this utility model provides a kind of direct-drive type nanoscale precisely locating platform, directly connects the problem that the Drive Structure device increases the damage probability of piezoelectric ceramic to solve present micro-nano positioning field piezoelectric ceramic.
The utility model is to solve the problems of the technologies described above the technical scheme of taking to be: described micropositioner comprises stage body, jackscrew, jacking block, the packaged type piezoelectric ceramic, screw, flexible hinge and movable plate, have groove in the stage body, the packaged type piezoelectric ceramic is contained in the groove, the base portion of packaged type piezoelectric ceramic is fixed by screw and stage body, the mobile terminal of packaged type piezoelectric ceramic outside suit jacking block, one end of the mobile terminal of packaged type piezoelectric ceramic and jacking block leans on flexible hinge, jackscrew passes jacking block and leans on the mobile terminal of packaged type piezoelectric ceramic, flexible hinge surrounds as rectangle is embedded in the stage body, and movable plate is located on the flexible hinge and the two makes one.
The utlity model has following beneficial effect: the utility model adopts stage body design, flexible hinge to do transmission, there is not frictional force in pottery when driving the flexible hinge motion, damaging probability when installing fixedly reduces, cost reduces, thereby move so that pottery directly drives hinge, be convenient to the connection of Circumscribed structure spare.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
Embodiment one: the described micropositioner of present embodiment comprises stage body 1, jackscrew 2, jacking block 3, packaged type piezoelectric ceramic 4, screw 5, flexible hinge 6 and movable plate 7, it is characterized in that having in the stage body 1 groove 1-1, packaged type piezoelectric ceramic 4 is contained in the groove 1-1, the base portion of packaged type piezoelectric ceramic 4 is fixing with stage body 1 by screw 5, the mobile terminal of packaged type piezoelectric ceramic 4 outside suit jacking block 3, one end of the mobile terminal of packaged type piezoelectric ceramic 4 and jacking block 3 leans on flexible hinge 6, jackscrew 2 passes jacking block 3 and leans on the mobile terminal of packaged type piezoelectric ceramic 4, flexible hinge 6 surrounds as rectangle is embedded in the stage body 1, and movable plate 7 is located on the flexible hinge 6 and the two makes one.
Embodiment two: the movable plate 7 of present embodiment is provided with a plurality of installing hole 7-1, is provided with the connector that is connected for other structures in the installing hole 7-1, this structure and other structure stable connections.Other execution mode is identical with embodiment one.
Operation principle: packaged type piezoelectric ceramic 4 elongations when voltage rises, it is the mobile terminal elongation of packaged type piezoelectric ceramic 4, so travel forward because flexible hinge 6 just can be pullled in the position of flexible hinge 6 in the mobile terminal of packaged type piezoelectric ceramic 4 like this, since flexible hinge 6 with interior be an integral body entirely, movable plate 7 can be followed flexible hinge 6 and be travelled forward, and movable plate separates with stage body by flexible hinge.
Claims (2)
1. direct-drive type nanoscale precisely locating platform, described micropositioner comprises stage body (1), jackscrew (2), jacking block (3), packaged type piezoelectric ceramic (4), screw (5), flexible hinge (6) and movable plate (7), it is characterized in that having in the stage body (1) groove (1-1), packaged type piezoelectric ceramic (4) is contained in the groove (1-1), the base portion of packaged type piezoelectric ceramic (4) is fixing by screw (5) and stage body (1), the mobile terminal of packaged type piezoelectric ceramic (4) outside suit jacking block (3), one end of the mobile terminal of packaged type piezoelectric ceramic (4) and jacking block (3) leans on flexible hinge (6), jackscrew (2) passes jacking block (3) and leans on the mobile terminal of packaged type piezoelectric ceramic (4), flexible hinge (6) surrounds as rectangle is embedded in the stage body (1), and movable plate (7) is located at flexible hinge (6) upward and the two makes one.
2. direct-drive type nanoscale precisely locating platform according to claim 1 is characterized in that described movable plate (7) is provided with a plurality of installing holes (7-1), is provided with the connector that is connected for other structures in the installing hole (7-1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220411967 CN202695554U (en) | 2012-08-20 | 2012-08-20 | Direct drive type nanoscale precise positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220411967 CN202695554U (en) | 2012-08-20 | 2012-08-20 | Direct drive type nanoscale precise positioning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202695554U true CN202695554U (en) | 2013-01-23 |
Family
ID=47551123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220411967 Expired - Fee Related CN202695554U (en) | 2012-08-20 | 2012-08-20 | Direct drive type nanoscale precise positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202695554U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103963033A (en) * | 2014-05-20 | 2014-08-06 | 广东工业大学 | One-dimensional micro-positioning platform with adjustable rigidity frequency based on stress rigidization principle |
| CN113028972A (en) * | 2021-02-26 | 2021-06-25 | 哈尔滨芯明天科技有限公司 | Closed-loop control nanometer three-dimensional precision positioning table |
| CN113219649A (en) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
-
2012
- 2012-08-20 CN CN 201220411967 patent/CN202695554U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103963033A (en) * | 2014-05-20 | 2014-08-06 | 广东工业大学 | One-dimensional micro-positioning platform with adjustable rigidity frequency based on stress rigidization principle |
| CN103963033B (en) * | 2014-05-20 | 2016-06-29 | 广东工业大学 | The one-dimensional micromotion platform of rigidity frequency-adjustable based on Stress stiffening principle |
| CN113028972A (en) * | 2021-02-26 | 2021-06-25 | 哈尔滨芯明天科技有限公司 | Closed-loop control nanometer three-dimensional precision positioning table |
| CN113028972B (en) * | 2021-02-26 | 2022-11-01 | 哈尔滨芯明天科技有限公司 | Closed-loop control nanometer three-dimensional precision positioning table |
| CN113219649A (en) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130123 Termination date: 20200820 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |