CN1562729A - Running fix platform for macro/micro dual driven miniature type robot - Google Patents
Running fix platform for macro/micro dual driven miniature type robot Download PDFInfo
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- CN1562729A CN1562729A CN 200410013686 CN200410013686A CN1562729A CN 1562729 A CN1562729 A CN 1562729A CN 200410013686 CN200410013686 CN 200410013686 CN 200410013686 A CN200410013686 A CN 200410013686A CN 1562729 A CN1562729 A CN 1562729A
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Abstract
A moving location platform for the microdriver/macrodriven miniature robot features that the first drive wheel is fixed to output shaft of the first motor, the first driven wheel is fixed to external moving location platform, the second drive wheel is fixed to the output shaft of the second motor, the second drive wheel is fixed to the external moving location platform, an internal microlocation platform is arranged in the center on the surface of external moving location platform, and three bipolar piezoelectric ceramics are respectively connected to said external moving location platform.
Description
Technical field:
The present invention relates to the improvement of micro robot mobile position platform structure.
Background technology:
Along with the continuous development of MEMS technology, small-sized, microrobot has obtained increasingly extensive research and application in the microoperation field.It is more complete that traditional small scale robot has function, can realize the motion of multiple complexity, motion is rapid, and working range is big, many with the interface of other system, characteristics such as the function expansion is easy, but its complex structure, volume is bigger, precision is not high, be difficult to be widely used in the narrow space relatively, and design its function according to special requirement often, cost is higher.Microrobot is simple in structure, volume is little, can move freely in small space, environmental suitability is strong, can reach micron, nano level homework precision, can finish carrying, operation and the assembling of MEMS device, to the tasks such as operation of biological cell, but its function singleness, and finishing a simple task often needs many robot coordinating operations, and as things go, research to microrobot also is in the starting stage, and technology is also not overripened, also has a very long segment distance from industrialization.In the process that microoperation drives, only adopt grand moving, speed is fast, but precision is low; Only adopt fine motion, the precision height, but speed is slow, adopts a certain type of drive singlely, can't efficiently finish the microoperation task in high quality.
Summary of the invention:
The purpose of this invention is to provide the micro robot mobile position platform that a kind of macro/micro drives, it has simple in structure, volume is little, macro/micro drives, promptly can on a large scale, realize fast moving, can realize the adjustment of high-precision position among a small circle, the characteristics that repetitive positioning accuracy is high again.The present invention is by a motor 1, a bipolarity piezoelectric ceramics 2, a motor location end cap 3, a driving wheel 4, outer mobile position platform 5, No. two bipolarity piezoelectric ceramics 6, the outer electromagnet 7 in a left side, left side outer spring sheet 8, No. two driven pulleys 9, No. two motors 10, interior micro-positioning platform 11, No. two driving wheels 12, No. three bipolarity piezoelectric ceramics 13, interior electromagnet 14, a driven pulley 15, No. two motor location end caps 16, inner spring sheet 17, right outer electromagnet 7 ', right outer spring sheet 8 ' form; No. one motor 1 is fixed on the side of outer mobile position platform 5 by a motor location end cap 3, No. one driving wheel 4 is fixed on the output shaft of a motor 1, No. one driven pulley 15 is fixed on the outer mobile position platform 5 of motor 1 the same side, No. two motor 10 is fixed on the opposite side of outer mobile position platform 5 by No. two motor location end caps 16, No. two driving wheel 12 is fixed on the output shaft of No. two motors 10, No. two driven pulley 9 is fixed on the outer mobile position platform 5 of No. two motor 10 the same sides, micro-positioning platform 11 in the middle part of mobile position platform 5 upper surfaces is provided with outside, a bipolarity piezoelectric ceramics 2, one end of No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 is connected with outer mobile position platform 5 respectively, a bipolarity piezoelectric ceramics 2, the other end of No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 is connected with interior micro-positioning platform 11 respectively, the middle part of micro-positioning platform 11 in inner spring sheet 17 is fixed on, interior electromagnet 14 is fixed in the through hole 20 of the following of inner spring sheet 17 and interior micro-positioning platform 11, in left side outer spring sheet 8 is fixed on the surface of the outer mobile position platform 5 in micro-positioning platform 11 left sides, the outer electromagnet 7 in a left side is fixed in the following through hole 21 that reaches on the outer mobile position platform 5 of left outer spring sheet 8, on the surface of the outer mobile position platform 5 on micro-positioning platform 11 right sides of right outer spring sheet 8 ' in being fixed on, the right outer spring sheet 8 of right outer electromagnet 7 ' be fixed on ' following No. two through holes 22 that reach on the outer mobile position platform 5 in.Micro-positioning platform 11 is equilateral triangles in described.The diagonal angle setting on the mobile position platform 5 outside of a described driving wheel 4 and No. two driving wheels 12.Be connected by B flexible hinge 18 between a described bipolarity piezoelectric ceramics 2, No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 and the outer mobile position platform 5; Be connected by C flexible hinge 19 between bipolarity piezoelectric ceramics 2, No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 and the interior micro-positioning platform 11.Described inner spring sheet 17, left outer spring sheet 8 and right outer spring sheet 8 ' be " Y " shape, interior electromagnet 14, the outer electromagnet 7 of the outer electromagnet 7 in a left side and the right side ' be separately fixed at inner spring sheet 17, left outer spring sheet 8 and right outer spring sheet 8 ' the center.The present invention integrates grand/little driving, two micromachine diagonal angles of grand moving employing drive principle, motor shaft directly is connected with driving wheel; Three bipolarity Piezoelectric Ceramic are adopted in fine motion, and under the cooperation of electromagnet and spring leaf, according to the motion of looper Creeping Principle, the fine motion adjustment of realization robot locating platform.The switching of grand/micromotion makes spring leaf produce strain by electromagnet energising and workbench adhesive and realizes.The present invention has the following advantages: 1, simple in structure, volume is little.2, have macro/micro and drive, both can on a large scale, realize fast moving, can among a small circle, realize the adjustment of high-precision position again.3, grand maximum speed of motion can reach 60mm/s, and resolution ratio can reach 0.2mm, and repetitive positioning accuracy can reach 0.5mm.4, the micromotion maximum movement speed can reach 0.5mm/s, and resolution ratio can reach 100nm, and repetitive positioning accuracy can reach 0.5um.5, based on the grand type of drive of bi-motor diagonal angle drive pattern, reduced the radius of turn of locating platform effectively, make locating platform reduced greatly by the limited degree of working space size, can in narrow space, work.6, grand/little driving all can realize the no-radius circular motion, turns to flexibly.7, can be used as a kind of general mobile positioning mechanism, carry multiple micromanipulator, finish different microoperation tasks.
Description of drawings:
Fig. 1 is an overall structure schematic diagram of the present invention, and Fig. 2 is that the A of Fig. 1 is to view.
The specific embodiment:
(referring to Fig. 1) present embodiment is by a motor 1, a bipolarity piezoelectric ceramics 2, a motor location end cap 3, a driving wheel 4, outer mobile position platform 5, No. two bipolarity piezoelectric ceramics 6, the outer electromagnet 7 in a left side, left side outer spring sheet 8, No. two driven pulleys 9, No. two motors 10, interior micro-positioning platform 11, No. two driving wheels 12, No. three bipolarity piezoelectric ceramics 13, interior electromagnet 14, a driven pulley 15, No. two motor location end caps 16, inner spring sheet 17, right outer electromagnet 7 ', right outer spring sheet 8 ' form; No. one motor 1 is fixed on the side of outer mobile position platform 5 by a motor location end cap 3, No. one driving wheel 4 is fixed on the output shaft of a motor 1, No. one driven pulley 15 is fixed on the outer mobile position platform 5 of motor 1 the same side, No. two motor 10 is fixed on the opposite side of outer mobile position platform 5 by No. two motor location end caps 16, No. two driving wheel 12 is fixed on the output shaft of No. two motors 10, No. two driven pulley 9 is fixed on the outer mobile position platform 5 of No. two motor 10 the same sides, micro-positioning platform 11 in the middle part of mobile position platform 5 upper surfaces is provided with outside, a bipolarity piezoelectric ceramics 2, one end of No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 is connected with outer mobile position platform 5 respectively, a bipolarity piezoelectric ceramics 2, the other end of No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 is connected with interior micro-positioning platform 11 respectively, the middle part of micro-positioning platform 11 in inner spring sheet 17 is fixed on, interior electromagnet 14 is fixed in the through hole 20 of the following of inner spring sheet 17 and interior micro-positioning platform 11, in left side outer spring sheet 8 is fixed on the surface of the outer mobile position platform 5 in micro-positioning platform 11 left sides, the outer electromagnet 7 in a left side is fixed in the following through hole 21 that reaches on the outer mobile position platform 5 of left outer spring sheet 8, on the surface of the outer mobile position platform 5 on micro-positioning platform 11 right sides of right outer spring sheet 8 ' in being fixed on, the right outer spring sheet 8 of right outer electromagnet 7 ' be fixed on ' following No. two through holes 22 that reach on the outer mobile position platform 5 in.Micro-positioning platform 11 is equilateral triangles in described.The diagonal angle setting on the mobile position platform 5 outside of a described driving wheel 4 and No. two driving wheels 12.Be connected by B flexible hinge 18 between a described bipolarity piezoelectric ceramics 2, No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 and the outer mobile position platform 5; Be connected by C flexible hinge 19 between bipolarity piezoelectric ceramics 2, No. two bipolarity piezoelectric ceramics 6 and No. three bipolarity piezoelectric ceramics 13 and the interior micro-positioning platform 11.Described inner spring sheet 17, left outer spring sheet 8 and right outer spring sheet 8 ' be " Y " shape, interior electromagnet 14, the outer electromagnet 7 of the outer electromagnet 7 in a left side and the right side ' be separately fixed at inner spring sheet 17, left outer spring sheet 8 and right outer spring sheet 8 ' the center.
Motor pattern:
1, the grand motion on a large scale, motion mode has following several:
A, straight ahead: motor 1, No. two motors 10 keep identical rotating speed to rotate forward simultaneously;
B, straight line retreat: motor 1, No. two motors 10 keep identical rotating speed to rotate backward simultaneously;
C, forward direction turn left: motor 1, No. two motors 10 rotate forward simultaneously, keep the rotating speed of the rotating speed of No. two motors 10 greater than a motor 1;
D, preceding bending to right: motor 1, No. two motors 10 rotate forward simultaneously, keep the rotating speed of the rotating speed of No. two motors 10 less than a motor 1;
E, after turn left: motor 1, No. two motors 10 rotate backward simultaneously, keep the rotating speed of the rotating speed of No. two motors 10 greater than a motor 1;
F, after bend to right: motor 1, No. two motors 10 rotate backward simultaneously, keep the rotating speed of the rotating speed of No. two motors 10 less than a motor 1;
G, no-radius circular motion: motor 1, No. two motors 10 keep identical rotating speed, and opposite direction is rotated simultaneously.
Under the direction of motion of definition, it is identical with the control mode of turning to the left and right after the control to turn about the control forward direction, removes identical two kinds, and on control method, this micro robot mobile position platform has 5 kinds of motion modes.
2, the micromotion among a small circle, the bipolarity piezoelectric ceramics cooperates with electromagnet, according to the looper Creeping Principle, carries out the fine motion adjustment, the high-accuracy location of realization robot locating platform.Its motion mode is as follows:
A, bipolarity piezoelectric ceramics 2, No. two bipolarity piezoelectric ceramics 6, No. three flexible simultaneously identical length of bipolarity piezoelectric ceramics 13, the robot locating platform rotates the θ angle.
It is flexible that b, bipolarity piezoelectric ceramics 2, No. two bipolarity piezoelectric ceramics 6, No. three bipolarity piezoelectric ceramics 13 are pressed different proportion, and the robot locating platform rotates the β angle.
C, No. two bipolarity piezoelectric ceramics 6 energisings are shunk, No. three bipolarity piezoelectric ceramics 13 energising elongations, and flexible compensation, robot locating platform straight ahead are carried out in bipolarity piezoelectric ceramics 2 energisings.
D, bipolarity piezoelectric ceramics 2 energisings are shunk, No. three bipolarity piezoelectric ceramics 13 energising elongations, and flexible compensation is carried out in No. two bipolarity piezoelectric ceramics 6 energisings, and robot locating platform straight line moves right.
E, bipolarity piezoelectric ceramics 2 energising elongations, No. two bipolarity piezoelectric ceramics 6 energisings are shunk, and flexible compensation is carried out in No. three bipolarity piezoelectric ceramics 13 energisings, and robot locating platform straight line is to left movement.
F, No. three bipolarity piezoelectric ceramics 13 energisings are shunk, No. two bipolarity piezoelectric ceramics 6 energising elongations, and flexible compensation is carried out in bipolarity piezoelectric ceramics 2 energisings, and robot locating platform straight line retreats.
During robot locating platform fine motion, can realize x, the rectilinear motion of y direction and around the rotation of z axle has three degree of freedom.
3, grand/micromotion switches
When the robot locating platform moved near the target location, motion mode switched to the micromotion pattern by quick grand motion, realizes the precision positioning of locating platform.At first motor stops operating, outer (or interior) electromagnet energising and workbench adhesive, and spring leaf produces distortion, finishes grand/micromotion and switches.
Claims (5)
1, the micro robot mobile position platform that macro/micro drives, it is by a motor (1), a bipolarity piezoelectric ceramics (2), a motor location end cap (3), a driving wheel (4), outer mobile position platform (5), No. two bipolarity piezoelectric ceramics (6), a left side outer electromagnet (7), left side outer spring sheet (8), No. two driven pulleys (9), No. two motors (10), interior micro-positioning platform (11), No. two driving wheels (12), No. three bipolarity piezoelectric ceramics (13), interior electromagnet (14), a driven pulley (15), No. two motor location end caps (16), inner spring sheet (17), right outer electromagnet (7 '), right outer spring sheet (8 ') is formed; It is characterized in that a motor is fixed on the side of outer mobile position platform (5) by a motor location end cap (3), a driving wheel (4) is fixed on the output shaft of a motor (1), a driven pulley (15) is fixed on the outer mobile position platform (5) an of motor (1) the same side, No. two motors (10) are fixed on the opposite side of outer mobile position platform (5) by No. two motor location end caps (16), No. two driving wheels (12) are fixed on the output shaft of No. two motors (10), No. two driven pulleys (9) are fixed on the outer mobile position platform (5) of No. two motors (10) the same side, the middle part of mobile position platform (5) upper surface is provided with interior micro-positioning platform (11) outside, a bipolarity piezoelectric ceramics (2), one end of No. two bipolarity piezoelectric ceramics (6) and No. three bipolarity piezoelectric ceramics (13) is connected with outer mobile position platform (5) respectively, a bipolarity piezoelectric ceramics (2), the other end of No. two bipolarity piezoelectric ceramics (6) and No. three bipolarity piezoelectric ceramics (13) is connected with interior micro-positioning platform (11) respectively, inner spring sheet (17) is fixed on the middle part of interior micro-positioning platform (11), interior electromagnet (14) is fixed in the through hole (20) of the following of inner spring sheet (17) and interior micro-positioning platform (11), left side outer spring sheet (8) is fixed on the surface of the outer mobile position platform (5) on the left of the interior micro-positioning platform (11), the outer electromagnet in a left side (7) is fixed in the following through hole (21) that reaches on the outer mobile position platform (5) of left outer spring sheet (8), right outer spring sheet (8 ') is fixed on the surface of outer mobile position platform (5) on interior micro-positioning platform (11) right side, and right outer electromagnet (7 ') is fixed in following No. two through holes (22) that reach on the outer mobile position platform (5) of right outer spring sheet (8 ').
2, the micro robot mobile position platform of macro/micro driving according to claim 1 is characterized in that described interior micro-positioning platform (11) is an equilateral triangle.
3, the micro robot mobile position platform of macro/micro driving according to claim 1 is characterized in that a described driving wheel (4) and No. two driving wheels (12) upward diagonal angle setting of mobile position platform (5) outside.
4, the micro robot mobile position platform that drives of macro/micro according to claim 1 is characterized in that being connected by B flexible hinge (18) between a described bipolarity piezoelectric ceramics (2), No. two bipolarity piezoelectric ceramics (6) and No. three bipolarity piezoelectric ceramics (13) and the outer mobile position platform (5); Be connected by C flexible hinge (19) between a bipolarity piezoelectric ceramics (2), No. two bipolarity piezoelectric ceramics (6) and No. three bipolarity piezoelectric ceramics (13) and the interior micro-positioning platform (11).
5, the micro robot mobile position platform of macro/micro driving according to claim 1, it is characterized in that described inner spring sheet (17), left outer spring sheet (8) and right outer spring sheet (8 ') are " Y " shape, interior electromagnet (14), a left side outer electromagnet (7) and right outer electromagnet (7 ') are separately fixed at the center of inner spring sheet (17), left outer spring sheet (8) and right outer spring sheet (8 ').
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410013686 CN1261346C (en) | 2004-04-14 | 2004-04-14 | Running fix platform for macro/micro dual driven miniature type robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410013686 CN1261346C (en) | 2004-04-14 | 2004-04-14 | Running fix platform for macro/micro dual driven miniature type robot |
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| Publication Number | Publication Date |
|---|---|
| CN1562729A true CN1562729A (en) | 2005-01-12 |
| CN1261346C CN1261346C (en) | 2006-06-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410013686 Expired - Fee Related CN1261346C (en) | 2004-04-14 | 2004-04-14 | Running fix platform for macro/micro dual driven miniature type robot |
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| CN (1) | CN1261346C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100339194C (en) * | 2005-11-14 | 2007-09-26 | 哈尔滨工业大学 | Microminiature mobile robot system oriented to precise operation of micro electromechanical system |
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
| CN113029235A (en) * | 2021-02-25 | 2021-06-25 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
-
2004
- 2004-04-14 CN CN 200410013686 patent/CN1261346C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100339194C (en) * | 2005-11-14 | 2007-09-26 | 哈尔滨工业大学 | Microminiature mobile robot system oriented to precise operation of micro electromechanical system |
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
| CN103557412B (en) * | 2013-11-06 | 2015-12-02 | 山东大学 | Bipolar two-dimensional Grazing condition high-precision servo platform |
| CN113029235A (en) * | 2021-02-25 | 2021-06-25 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
| CN113029235B (en) * | 2021-02-25 | 2021-09-10 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
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| Publication number | Publication date |
|---|---|
| CN1261346C (en) | 2006-06-28 |
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Granted publication date: 20060628 Termination date: 20110414 |