CN1305644C - Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform - Google Patents

Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform Download PDF

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Publication number
CN1305644C
CN1305644C CNB2004100437594A CN200410043759A CN1305644C CN 1305644 C CN1305644 C CN 1305644C CN B2004100437594 A CNB2004100437594 A CN B2004100437594A CN 200410043759 A CN200410043759 A CN 200410043759A CN 1305644 C CN1305644 C CN 1305644C
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China
Prior art keywords
piezoelectric ceramics
platform
transition
electromagnet
transition platform
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Expired - Fee Related
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CNB2004100437594A
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Chinese (zh)
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CN1597268A (en
Inventor
孙立宁
李满天
陈海初
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The present invention relates to a micro drive or a macro and micro dual drive full decoupling miniature robot movable positioning platform which comprises a macro moving mechanism. The present invention also comprises an outer positioning platform (1), an inner positioning platform (2), a transition platform (3), an outer electromagnet (4), an inner electromagnet (5), No. one piezoelectric ceramics (6), No. two piezoelectric ceramics (7), No. three piezoelectric ceramics (8), No. four piezoelectric ceramics (9), No. five piezoelectric ceramics (10) and No. six piezoelectric ceramics (11), wherein a hinge slot (12) with a flexible outer ring is arranged between the outer positioning platform (1) and the transition platform (3); a hinge slot (13) with a flexible inner ring is arranged between the transition platform (3) and the inner positioning platform (2); the outer electromagnet (4) is arranged on the outer positioning platform (1); the inner electromagnet (5) is arranged in the middle of the inner positioning platform (2); the No. one piezoelectric ceramics (6), the No. two piezoelectric ceramics (7), the No. three piezoelectric ceramics (8) and the No. four piezoelectric ceramics (9) are arranged between the outer positioning platform (1) and the transition platform (3); the No. five piezoelectric ceramics (10) and the No. six piezoelectric ceramics (11) are arranged between the transition platform (3) and the inner positioning platform (2). When the present invention moves slightly, the longitudinal movement, the transverse movement and the rotation of the present invention can independently realize own exact coordinate movement respectively. The micromovement, the longitudinal movement and the transverse movement are completely decoupled.

Description

Grand little two micro robot mobile position platforms that drive of little driving full decoupling
Technical field:
The present invention relates to a kind of mobile position platform of micro robot.
Background technology:
Along with the continuous development of MEMS technology and precision engineering, market is little to having volume, can finish multiple microoperation task, can realize that interior micro robot quick, high-accuracy running fix has produced urgent demand on a large scale.Aspect the running fix driving, often adopt following dual mode: 1, adopt motor-driven grand motion mode; 2, the micromotion mode that adopts functional material to drive.Adopt grand type of drive, speed is fast singlely, but precision is low, can't satisfy the hi-Fix requirement; Adopt little type of drive singlely, the positioning accuracy height, but speed is slow.This shows, adopt a certain driving locate mode singlely, all can't efficiently finish the microoperation task in high quality.There are some micro-manipulating robots also to adopt the double drive mode of motor and functional material, and the fast precise running fix in realizing on a large scale, but there is the motion coupling in little driving in the vertical and horizontal direction, mobile decoupling on the vertical and horizontal will lean on control algolithm to realize, has increased the complexity of control system.
Summary of the invention:
In order to overcome the defective that there is the motion coupling when little drive in existing grand little dual-driving-mode, provide a kind of robot mobile position platform of little driving full decoupling.Technical scheme of the present invention is as follows: a kind of grand little two micro robot mobile position platforms that drive of little driving full decoupling, it comprises grand motion, it also comprises outside fix platform 1, interior locating platform 2, transition platform 3, outer electromagnet 4, interior electromagnet 5, I piezoelectric ceramics 6, II piezoelectric ceramics 7, III piezoelectric ceramics 8, IV piezoelectric ceramics 9, V piezoelectric ceramics 10 and VI piezoelectric ceramics 11, have outer ring flexible hinge groove 12 between outside fix platform 1 and the transition platform 3, have inner ring flexible hinge groove 13 between transition platform 3 and the interior locating platform 2, outer electromagnet 4 is arranged on the outside fix platform 1, place in the middle of in interior electromagnet 5 is arranged on the locating platform 2, I piezoelectric ceramics 6, II piezoelectric ceramics 7, III piezoelectric ceramics 8 and IV piezoelectric ceramics 9 are arranged between outside fix platform 1 and the transition platform 3, I piezoelectric ceramics 6 and III piezoelectric ceramics 8 have the longitudinal tensile strain direction and lateral symmetry is arranged on transition platform 3 both sides, II piezoelectric ceramics 7 and IV piezoelectric ceramics 9 have the transverse extension direction and vertically are symmetricly set on transition platform 3 both sides, V piezoelectric ceramics 10 and VI piezoelectric ceramics 11 are arranged between transition platform 3 and the interior locating platform 2, the prolonging direction of V piezoelectric ceramics 10 and VI piezoelectric ceramics 11 parallel to each other and be symmetrical in electromagnet 5.In on a large scale, robot adopts quick grand motion to approach target, and when the robot motion arrived near the target location, motion mode switched to the micromotion pattern by quick grand motion, realizes the precision positioning of robot.At first motor stops operating, outer (or interior) electromagnet energising and the adhesive of ferromagnetism workbench, and rubber tyre produces distortion, finishes macro/micromotion and switches.Piezoelectric ceramics cooperates with electromagnet, according to the looper Creeping Principle, robot is carried out interior among a small circle fine motion adjustment, can realize the high-accuracy location to the robot mobile position platform.The motion control of micromotion as shown in Figure 1, its motion mode is as follows: a) II piezoelectric ceramics 7 extends identical length simultaneously with IV piezoelectric ceramics 9, the robot locating platform is along laterally moving one section micrometric displacement; B) I piezoelectric ceramics 6 extends identical length simultaneously with III piezoelectric ceramics 8, the robot locating platform one section micrometric displacement that is along the longitudinal movement; C) V piezoelectric ceramics 10 extends identical length simultaneously with VI piezoelectric ceramics 11, and the robot locating platform serves as that axle rotates an angle with its center; During robot locating platform fine motion, can realize the rectilinear motion and the rotation of longitudinal and transverse direction, have three degree of freedom, travel direction is decided by the power-up sequence of inside and outside electromagnet.Because mobile position platform of the present invention its lengthwise movement when fine motion, transverse movement and rotation can both realize its axis coordinate motion accurately separately independently, micromotion is full decoupled on vertical and transverse direction, has simplified theoretical model and control circuit.The present invention both can realize fast moving on a large scale, can realize the adjustment of high-precision position again among a small circle, had bigger promotional value.
Description of drawings:
Fig. 1 is a structural representation of the present invention, and Fig. 2-Fig. 4 is the order block diagram of fine motion of the present invention control, Fig. 5 be the A of Fig. 1 to view, Fig. 6 is the structural representation of embodiment of the present invention four.
The specific embodiment:
The specific embodiment one: specify present embodiment below in conjunction with Fig. 1 and Fig. 5.It is by grand motion, outside fix platform 1, interior locating platform 2, transition platform 3, outer electromagnet 4, interior electromagnet 5, I piezoelectric ceramics 6, II piezoelectric ceramics 7, III piezoelectric ceramics 8, IV piezoelectric ceramics 9, V piezoelectric ceramics 10, VI piezoelectric ceramics 11 is formed, have outer ring flexible hinge groove 12 between outside fix platform 1 and the transition platform 3, have inner ring flexible hinge groove 13 between transition platform 3 and the interior locating platform 2, outer electromagnet 4 is arranged on the outside fix platform 1, place in the middle of in interior electromagnet 5 is arranged on the locating platform 2, I piezoelectric ceramics 6, II piezoelectric ceramics 7, III piezoelectric ceramics 8 and IV piezoelectric ceramics 9 are arranged between outside fix platform 1 and the transition platform 3, I piezoelectric ceramics 6 and III piezoelectric ceramics 8 have the longitudinal tensile strain direction and lateral symmetry is arranged on transition platform 3 both sides, II piezoelectric ceramics 7 and IV piezoelectric ceramics 9 have the transverse extension direction and vertically are symmetricly set on transition platform 3 both sides, V piezoelectric ceramics 10 and VI piezoelectric ceramics 11 are arranged between transition platform 3 and the interior locating platform 2, the prolonging direction of V piezoelectric ceramics 10 and VI piezoelectric ceramics 11 parallel to each other and be symmetrical in electromagnet 5.Fig. 2 to Fig. 4 has provided the implementation of micromotion and the order of work, and wherein the X positive direction is represented a direction of transverse movement, and-directions X is represented another direction of transverse movement, and lengthwise movement is identical with the principle of transverse movement.
The specific embodiment two: specify present embodiment below in conjunction with Fig. 1 and Fig. 5.The difference of present embodiment and embodiment one is, grand motion is made up of two driving wheels 23, two driven pulleys 14, motor 15-1 and motor 15-2, two driving wheels 23 are separately positioned on the place, one group of diagonal angle of outside fix platform 1, two driven pulleys 14 are separately positioned on another group place, diagonal angle of outside fix platform 1, and motor 15-1 and motor 15-2 provide rotary power for driving wheel 23.The rim outer surface of two driving wheels 23 and two driven pulleys 14 all is the rubber material.So be provided with, when electromagnet gets electric back when attracting mutually with the ferromagnetism workbench, rubber deformation makes not shift position of outside fix platform 1 or interior locating platform 2.This micro robot mobile position platform has following 4 kinds of grand motion modes: a) straight ahead with retreat: motor 15-1, motor 15-2 keep identical rotating speed forward/backward rotation simultaneously; B) turn about forward direction: keep motor 15-1, motor 15-2 to rotate forward simultaneously with different rotating speeds; C) turn to the left and right after: keep motor 15-1, motor 15-2 to rotate backward simultaneously with different rotating speeds; D) no-radius circular motion: motor 15-1, motor 15-2 keep identical rotating speed, and opposite direction is rotated simultaneously.Other composition is identical with embodiment one with annexation.
The specific embodiment three: specify present embodiment below in conjunction with Fig. 1.The difference of present embodiment and embodiment one is, it also comprises four bar shaped flexible hinge grooves 16, and bar shaped flexible hinge groove 16 is opened respectively on four edges of transition platform 3 and along the length direction setting of edge.So be provided with, the distortion locomotivity in the time of improving platform fine motion of the present invention improves flexible.Other composition is identical with embodiment one with annexation.
The specific embodiment four: specify present embodiment below in conjunction with Fig. 1 and Fig. 6.The difference of present embodiment and embodiment one is, have crescent moon breach 17 on the transition platform 3 at the place, two sides of V piezoelectric ceramics 10 or VI piezoelectric ceramics 11, flexural spring 18 is set in the crescent moon breach 17, and the two ends of flexural spring 18 are connected on the transition platform 3.So be provided with, the rotational deformation ability that has rotatablely moved when having improved fine motion, and also flexural spring 18 makes the elastic recoil between interior locating platform 2 and the transition platform 3 accurate, quick.Other composition is identical with embodiment one with annexation.

Claims (4)

1, a kind of grand little two micro robot mobile position platforms that drive of little driving full decoupling, it comprises grand motion, it is characterized in that it also comprises outside fix platform (1), interior locating platform (2), transition platform (3), outer electromagnet (4), interior electromagnet (5), I piezoelectric ceramics (6), II piezoelectric ceramics (7), III piezoelectric ceramics (8), IV piezoelectric ceramics (9), V piezoelectric ceramics (10) and VI piezoelectric ceramics (11), have outer ring flexible hinge groove (12) between outside fix platform (1) and the transition platform (3), have inner ring flexible hinge groove (13) between transition platform (3) and the interior locating platform (2), outer electromagnet (4) is arranged on the outside fix platform (1), interior electromagnet (5) is arranged on the middle place on the interior locating platform (2), I piezoelectric ceramics (6), II piezoelectric ceramics (7), III piezoelectric ceramics (8) and IV piezoelectric ceramics (9) are arranged between outside fix platform (1) and the transition platform (3), I piezoelectric ceramics (6) and III piezoelectric ceramics (8) have the longitudinal tensile strain direction and lateral symmetry is arranged on transition platform (3) both sides, II piezoelectric ceramics (7) and IV piezoelectric ceramics (9) have the transverse extension direction and vertically are symmetricly set on transition platform (3) both sides, V piezoelectric ceramics (10) and VI piezoelectric ceramics (11) are arranged between transition platform (3) and the interior locating platform (2), and the prolonging direction of V piezoelectric ceramics (10) and VI piezoelectric ceramics (11) is parallel to each other and be symmetrical in interior electromagnet (5).
2, grand little two micro robot mobile position platforms that drive of little driving full decoupling according to claim 1, it is characterized in that grand motion is by two driving wheels (23), two driven pulleys (14), motor (15-1) and motor (15-2) are formed, two driving wheels (23) are separately positioned on the place, one group of diagonal angle of outside fix platform (1), two driven pulleys (14) are separately positioned on another group place, diagonal angle of outside fix platform (1), motor (15-1) and motor (15-2) provide rotary power for driving wheel (23), and the rim outer surface of two driving wheels (23) and two driven pulleys (14) all is the rubber material.
3, grand little two micro robot mobile position platforms that drive of little driving full decoupling according to claim 1, it is characterized in that it also comprises four bar shaped flexible hinge grooves (16), bar shaped flexible hinge groove (16) is opened respectively on four edges of transition platform (3) and along the length direction setting of edge
4, grand little two micro robot mobile position platforms that drive of little driving full decoupling according to claim 1, it is characterized in that having crescent moon breach (17) on the transition platform (3) at two sides places of V piezoelectric ceramics (10) or VI piezoelectric ceramics (11), flexural spring (18) is set in the crescent moon breach (17), and the two ends of flexural spring (18) are connected on the transition platform (3).
CNB2004100437594A 2004-07-30 2004-07-30 Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform Expired - Fee Related CN1305644C (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101947779A (en) * 2010-09-01 2011-01-19 华南理工大学 Structure of combination drive type micro robot

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CN100357069C (en) * 2005-11-10 2007-12-26 上海大学 2D shifting unit
CN100339194C (en) * 2005-11-14 2007-09-26 哈尔滨工业大学 Microminiature mobile robot system oriented to precise operation of micro electromechanical system
CN102543217B (en) * 2012-01-20 2013-10-23 澳门大学 Macro-micro driven bidimensional integrated micro positioning platform
CN103557412B (en) * 2013-11-06 2015-12-02 山东大学 Bipolar two-dimensional Grazing condition high-precision servo platform
CN105643592B (en) * 2016-03-15 2017-06-06 河北工业大学 A kind of symmetrical decoupling single-freedom and flexible operating mechanism
CN109093598B (en) * 2018-08-30 2021-10-12 上海大学 Three-degree-of-freedom parallel micro-motion platform
CN113548352B (en) * 2021-06-04 2022-11-04 哈尔滨工业大学 Library stores and withdraws integrative robot of book

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CN1235405A (en) * 1999-05-28 1999-11-17 清华大学 Miniature monoblock precisive plane moving mechanism and device thereof
CN1258589A (en) * 1999-09-30 2000-07-05 燕山大学 Six-freedom parallel decoupling-structure jogging robot
CN1421302A (en) * 2002-12-30 2003-06-04 上海交通大学 Miniature creeping vehicle based on shape memory alloy driving
CN2576434Y (en) * 2002-11-18 2003-10-01 哈尔滨工业大学博实精密测控有限责任公司 Six-freedom precision paralleled robot

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Publication number Priority date Publication date Assignee Title
US5594330A (en) * 1991-12-31 1997-01-14 Sarcos Group Movement actuator/sensor systems
CN1235405A (en) * 1999-05-28 1999-11-17 清华大学 Miniature monoblock precisive plane moving mechanism and device thereof
CN1258589A (en) * 1999-09-30 2000-07-05 燕山大学 Six-freedom parallel decoupling-structure jogging robot
CN2576434Y (en) * 2002-11-18 2003-10-01 哈尔滨工业大学博实精密测控有限责任公司 Six-freedom precision paralleled robot
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Publication number Priority date Publication date Assignee Title
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CN101947779B (en) * 2010-09-01 2012-08-08 华南理工大学 Structure of combination drive type micro robot

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