CN101947779B - Structure of combination drive type micro robot - Google Patents
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- CN101947779B CN101947779B CN2010102715871A CN201010271587A CN101947779B CN 101947779 B CN101947779 B CN 101947779B CN 2010102715871 A CN2010102715871 A CN 2010102715871A CN 201010271587 A CN201010271587 A CN 201010271587A CN 101947779 B CN101947779 B CN 101947779B
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Abstract
The invention relates to a structure of a combination drive type micro robot, belonging to the technical field of micro robots. The integral structure of the micro robot comprises a plane walk module and a longitudinal light-movable module. The micro robot totally has four degrees of freedom, wherein the plane walk module realizes two move degrees of move freedom and a degree of rotary freedom on the plane, and the longitudinal light-movable module realizes a degree of movement on the vertical direction. The longitudinal light-movable module is carried on the plane walk module through a supporter platform, the plane walk module is driven by laminated piezoelectric ceramics and an electromagnet in combination, and the longitudinal light-movable module is driven by a linear voice coil motor. The invention effectively solves the nonlinear problems of the existing micro robot in drive manner such as high frequency vibrate and poor repeatability precision easily occurring at the direction of gravity, and the problems that the plane motion range is too small and the distinguishability and the travelling range are contradictory. The micro robot can replace human in a micro space or a narrow space for precise operation and detection, and also can be assembled into a micro robot group and complete micro operations under coordination control, thereby laying the foundation of automatic micro manipulation.
Description
Technical field
The present invention relates to be used for the micro-robot motion driving mechanism of microoperation, belong to the micro robot field.
Background technology
In recent years, along with the fast development of micro-nano technology, research object is constantly to miniaturization development, to micro parts process, adjustment and cost inspection, the work such as assembling work of MEMS (MEMS) all need the participation of micro-manipulating robot.At adaptive optics, fiber alignment, medical science, biology; Particularly animal-plant gene engineering, agricultural product are improved fields such as breeding; Need to accomplish accurate operations such as injecting Fusion of Cells, fine operation; All be unable to do without high-precision micro-manipulating robot system, micro-manipulating robot is that people explore the indispensable important tool of microcosmos.
Traditional micro-robot type of drive mainly contains micro machine driving, Piezoelectric Ceramic, Electromagnetic Drive, marmem driving etc.Micro machine drives has advantages such as stroke is big, power output is big, but needs to adopt motion transfering device (bearing, guide rail, leading screw etc.), and positive and negative return difference is big, and repeatable accuracy is relatively poor, adopts high-accuracy transmission price very expensive.Piezoelectric Ceramic has that compact conformation, resolution ratio are high, response is fast, power output is big, does not have mechanical loss, no magnetic field, advantage such as pollution-free; Shortcoming be output displacement range little, exist non-linear and hysteresis effect; High-accuracy Piezoelectric Ceramic apparatus cost is very high, and when gravity (Z) direction drives, is easy to generate high-frequency vibration.Marmem drives and to utilize the SME of special material to be principle, have that volume is little, in light weight, precision is high, action flexible good, be not subject to advantage such as surrounding environment influence, shortcoming is that response speed is slow.In order to overcome the shortcoming of the simple Drive Structure of above-mentioned Micro-Robot; Harbin Institute of Technology has developed the micro robot towards microoperation; This robot basic machine is made up of mobile position platform and the 3DOF ball base micromanipulator based on grand/little compound driving; Grand moving part is driven by micro machine, and the fine motion part cooperates realization by piezoelectric ceramics and electromagnet; Shanghai University has developed and has moved microrobot in the power-actuated stepped pipe of electromagnetism, the microrobot of the inertia impact principle that drives based on two piezoelectric films, the spiral small machine machine driven people who does not need flexible axle to drive; Shanghai Communications University has developed the millimeter level miniature mobile robot based on the 2mm micro motor.But that the drive system of above-mentioned micro-robot all exists is expensive, resolution ratio and travel range matching problem, is difficult to practical application.
This paper proposes the structure based on linear voice coil motor (VCM), lamination type piezoelectric ceramics (PZT) and electromagnet (EM) hybrid-driven micro-robot, comprises plane walking module and vertical fine motion module.Wherein the plane walking module adopts lamination type piezoelectric ceramics (PZT) and electromagnet (EM) to unite driving, realizes plane X, Y, θ direction three degrees of freedom of movement; Vertically the fine motion module adopts the linear voice coil motor (VCM) of no guide rail bearing to drive, and realizes the motion of Z direction one degree of freedom.About using the structure of linear voice coil motor (VCM) drive-type micro-robot, domestic and foreign literature is all not on the books.VCM has low cost, high acceleration, and fast response, premium properties such as level and smooth force characteristic through to its structure optimization design, can overcome when being applied in gravity direction by friction, and the nonlinearity erron that magnetic hysteresis produces is realized high repeatable accuracy, and is high linear; Solved the contradiction of technological intermediate-resolution of existing voice coil motor (VCM) and travel range.The present invention is with linear voice coil motor (VCM), lamination type piezoelectric ceramics (PZT) and electromagnet (EM) the combination drive type of drive as micro-robot; Simple in structure, size is little; Solved in the current driving mode high-frequency vibration problem that gravity direction (Z direction) is easy to generate effectively; Nonlinear problems such as repeatable accuracy difference; Range of movement is too small, the contradictory problems of resolution ratio and travel range, the accurate location of having realized micro-robot plane and gravity direction.
Combination drive micro-robot of the present invention can replace human accomplish accurate operation, detection between microvoid or in the narrow space; Also can form the micro-robot crowd, coordinate control and accomplish fine operation, for the realization of micromanipulation automation lays the foundation.
Summary of the invention
The objective of the invention is to overcome the above-mentioned deficiency that prior art exists, a kind of structure of hybrid-driven micro-robot is provided, the object of the invention is realized through following technical scheme:
A kind of structure of hybrid-driven micro-robot; Comprise plane walking module and vertical fine motion module; Micro-robot has four frees degree altogether, and wherein the plane walking module realizes two one-movement-freedom-degrees and the rotary freedom on the plane, and vertically the fine motion module realizes an one-movement-freedom-degree of vertical direction; The plane walking module directly is positioned on the metal platform, and vertically the fine motion module is then carried on the walking module of plane through rack platform; The plane walking module is united driving by lamination type piezoelectric ceramics (PZT) and electromagnet (EM), and vertically the fine motion module is driven by linear voice coil motor (VCM); Said plane walking module need not adopt traditional motion transfering device (guide rail, leading screw etc.) with vertical fine motion module.
In the structure of above-mentioned a kind of hybrid-driven micro-robot, said plane walking module comprises two U type electromagnet and four lamination type piezo ceramic elements, and the square crossing of said two U type electromagnet is " ten " font; Said four lamination type piezo ceramic elements are square arrangement; And lay respectively in four zones that said " ten " font is divided into; The two ends of each lamination type piezo ceramic element are connected with two U type electromagnet respectively, and whole plane walking module is supported by said two U type electromagnet.
In the structure of above-mentioned a kind of hybrid-driven micro-robot, said U type electromagnet constitutes by U type conducting magnet core with around the coil of U type conducting magnet core two vertical end, and the stage casing part of U type conducting magnet core is fluted.
In the structure of above-mentioned a kind of hybrid-driven micro-robot, said vertical fine motion module comprises coil, two permanent magnets, two reeds, front support stand and rear support stands; Said two permanent magnets are installed on the front support stand, and two permanent magnet in the vertical directions separate, and coil is installed on the rear support stand, and coil is between two permanent magnets, and front support stand and rear support stand link together through reed.
In the structure of above-mentioned a kind of hybrid-driven micro-robot, said rear support stand is fixedly mounted on the rack platform, and the two ends up and down of front support stand are connected at two ends up and down with rear support stand through reed, and front support stand can be along the upper and lower freely-movable of vertical direction.
In the structure of above-mentioned a kind of hybrid-driven micro-robot, said reed is a bending type, and the bending place is at the middle part of reed, and the ratio of total length was 1: 4～1: 6 when the distance of bending place line to the reed two ends was stretched with reed.
In the structure of above-mentioned a kind of hybrid-driven micro-robot, said rear support stand is provided with and is used to inlay the semi-circular groove that said coil is installed, and the radius of semi-circular groove equates with coil radius.
In the structure of above-mentioned a kind of hybrid-driven micro-robot; Said front support stand has two branches up and down; Each branch is provided with and is used to inlay the through hole that said permanent magnet is installed, and the radius of through hole equates that with the permanent magnet radius degree of depth of through hole equates with the height of permanent magnet.
In the structure of above-mentioned a kind of hybrid-driven micro-robot; Said two permanent magnets are symmetrical up and down about the center of coil; And the central axis of the central axis of coil and two permanent magnets is on same vertical curve, so that coil and permanent magnet magnetic force line are evenly distributed.
The operation principle 1 of above-mentioned plane walking module is: the inverse piezoelectric effect principle of piezoelectric ceramics, and promptly the polarised direction at piezoelectric ceramics applies voltage, and piezoelectric ceramics can produce mechanically deform; When adding forward voltage, piezoelectric ceramics can produce anamorphic stretching; When adding backward voltage, piezoelectric ceramics can produce distortion to be shortened; After removing applied voltage, the distortion of piezoelectric ceramics disappears thereupon.
The operation principle 2 of above-mentioned plane walking module is: after the electromagnet energising, have magnetic, can be adsorbed on the metal platform; After the outage, magnetic disappears thereupon.
The operation principle of above-mentioned vertical fine motion module is, gives the solenoid coil galvanization, is in the effect that coil in the magnetic field will receive power (Lorentz force), and its direction all keeps vertical (direction is only) with the sense of current and magnetic direction; Behind the galvanization, the solenoid coil two ends can form N, two magnetic poles of S, attract each other with permanent magnet or repel.
The amount of vertically moving of above-mentioned vertical fine motion module is approximate linear within the specific limits with the size of drive current, through regulating the size and Orientation of the current signal of importing, can control the displacement and the direction of vertical fine motion module.
Compared with prior art, the present invention has following advantage and effect:
The present invention uses linear voice coil motor (VCM), lamination type piezoelectric ceramics (PZT) and electromagnet (EM) combination drive micro-robot, and wherein lamination type piezoelectric ceramics (PZT) and electromagnet (EM) are united the motion that drives three directions in plane (X, Y, θ direction); Adopt linear voice coil motor (VCM) Linear Driving to realize the motion of Z direction.The present invention is with linear voice coil motor (VCM), lamination type piezoelectric ceramics (PZT) and electromagnet (EM) the combination drive type of drive as micro-robot, the high-frequency vibration that is produced at vertical direction (Z direction) that has overcome effectively that single use Piezoelectric Ceramic caused.The linear voice coil motor of the crooked reed of the use that the present invention proposes; The reciprocating motion zerofriction force exists, and has overcome traditional voice coil motor under loading condition, because the existence of sliding bearing; Frictional force is different during reciprocating motion, and there are the nonlinear problem that lags behind and produced in displacement that causes and input current; Through the design of reed flexibility, solved the contradiction of technological intermediate-resolution of existing voice coil motor (VCM) and travel range.The mechanism of lamination type piezoelectric ceramics, electromagnet and voice coil motor hybrid drive-type micro-robot that the present invention proposes; Compare with existing micro-robot; Have simple in structure, cost is low, advantages such as high repeatable accuracy realize the micromotion of high-resolution four frees degree (X, Y, Z, θ).The micro-robot structure that the present invention proposes, volume is little, can form the micro-robot crowd, through coordinating control, accomplishes complicated goal task.
Description of drawings
Fig. 1 is the structural representation of a kind of hybrid-driven micro-robot in the embodiment.
Fig. 2 is an embodiment midplane walking module structural representation.
Fig. 3 is the structural representation of a U type electromagnet in the embodiment.
Fig. 4 is the structural representation of another U type electromagnet in the embodiment.
Fig. 5 is vertical fine motion modular structure sketch map in the embodiment.
The specific embodiment
Each Module Design in this embodiment: the vertical fine motion module that comprises the plane walking module of 3 frees degree, 1 free degree.The plane walking module is made up of two U type electromagnet, four lamination type piezo ceramic elements.Vertically the fine motion module is made up of coil, two permanent magnets, two reeds, front support stand and rear support stands.Vertically the fine motion module is carried on the walking module of plane through rack platform.
Fig. 1 is the structural representation of a kind of hybrid-driven micro-robot of the present invention.As shown in Figure 1, a kind of agent structure of hybrid-driven micro-robot comprises plane walking module 1, vertically fine motion module 2.Plane walking module 1 has two one-movement-freedom-degrees in plane (X, Y direction) and a rotary freedom (θ direction), and vertically fine motion module 2 has one-movement-freedom-degree of vertical direction (Z direction).Pressing two parts of micro-robot particularly narrates as follows:
1. plane walking module 1 is made up of two U type electromagnet (4,5) and four lamination type piezo ceramic elements (6,7,8 and 9).Be illustrated in figure 2 as the structural representation of plane walking module 1; Two U type electromagnet (4,5) square crossing; Be " ten " font, four lamination type piezo ceramic elements (6,7,8 and 9) are square arrangement, and lay respectively in four zones that said " ten " font is divided into; The two ends of each lamination type piezo ceramic element (6,7,8 and 9) are connected with two U type electromagnet (4,5) respectively, and whole plane walking module 1 is supported by two U type electromagnet (4,5).
Above-mentioned U type electromagnet (4,5) constitutes by U type conducting magnet core with around the coil of U type conducting magnet core two vertical end, and the stage casing part of U type conducting magnet core is fluted.The groove of one of them U type electromagnet 4 upwards, and is as shown in Figure 3; The groove of another U type electromagnet 5 is downward, as shown in Figure 4.
The flow process that plane walking module 1 is moved along the plane X direction is: U type electromagnet 4 energising, and U type electromagnet 5 no powers, it is fixing that inhale mutually on the pin of the U type electromagnet 4 of energising and metal platform surface, and the pin of cold U type electromagnet 5 can move freely or rotate; Add positive voltage for then lamination type piezo ceramic element 6; Lamination type piezo ceramic element 8 adds negative voltage; Then lamination type piezo ceramic element 6 produces anamorphic stretching, and lamination type piezo ceramic element 8 produces distortion to be shortened, and the U type electromagnet 5 that promotes to can move freely or rotate moves a small step along directions X.With 4 outages of U type electromagnet, U type electromagnet 5 is switched on then, and the U type electromagnet 4 of outage can move freely or rotate this moment, and the pin of the U type electromagnet 5 of energising is inhaled fixing with the metal platform surface mutually; Lamination type piezo ceramic element (6,8) two ends are making alive no longer, and then lamination type piezo ceramic element (6,8) becomes former length, and the U type electromagnet 4 that pulling can move freely or rotates moves a small step along directions X.Constantly repeat said process, then micro-robot can be done rectilinear motion along the plane X direction.
The flow process that plane walking module 1 is done plane rotation (θ direction) motion is: 4 energisings of U type electromagnet; U type electromagnet 5 no powers; Pin and the metal platform surface of the U type electromagnet 4 of energising inhaled fixing mutually, and the pin of cold U type electromagnet 5 can move freely or rotate; Add positive voltage for then lamination type piezo ceramic element (6,8); Lamination type piezo ceramic element (7,9) adds negative voltage; Then lamination type piezo ceramic element (6,8) produces anamorphic stretching; Lamination type piezo ceramic element (7,9) produces distortion to be shortened, the U type electromagnet 5 that promotes to can move freely or the rotate certain angle that turns clockwise.With 4 outages of U type electromagnet, U type electromagnet 5 is switched on then, and the U type electromagnet 4 of outage can move freely or rotate this moment, and the pin of the U type electromagnet 5 of energising is inhaled fixing with the metal platform surface mutually; Four lamination type piezo ceramic elements (6,7,8 and 9) two ends making alive no longer simultaneously, then lamination type piezo ceramic element (6,7,8 and 9) becomes former length, drags the U type electromagnet that can move freely or rotate 4 and rotates to an angle along the θ direction.Constantly repeat said process, then micro-robot can be done plane rotation (θ direction) motion.
2. vertically fine motion module 2 is made up of coil 10, two permanent magnets (11,12), two reeds (13,14), front support stand 15 and rear support stands 16.Be illustrated in figure 5 as the structural representation of vertical fine motion module; Two permanent magnets (11,12) are installed on the front support stand (15); And two permanent magnets (11,12) in the vertical direction separates; Coil (10) is installed on the rear support stand (16), and coil (10) is positioned between two permanent magnets (11,12), and front support stand (15) and rear support stand (16) link together through reed.
Vertically in the fine motion module 2, said rear support stand 16 is provided with and is used to inlay the semi-circular groove that coil 10 is installed, and the radius of semi-circular groove equates with coil 10 radiuses.Said front support stand 15 has two branches up and down, and each branch is provided with the through hole that is used to inlay mounting permanent magnet (11,12), and the radius of through hole equates that with permanent magnet (11,12) radius the degree of depth of through hole equates with the height of permanent magnet (11,12).Two permanent magnets (11,12) are symmetrical up and down about the center of coil 10, and the central axis of the central axis of coil 10 and two permanent magnets (11,12) is on same vertical curve, so that the magnetic line of force of coil 10 and permanent magnet (11,12) is evenly distributed.
Vertically in the fine motion module 2; Said rear support stand 16 is fixedly mounted on the rack platform 3; The upper and lower side of front support stand 15 is connected at two ends about in the of 16 with rear support stand through reed; Make that the front support stand 15 be inlaid with permanent magnet (11,12) can upper and lower freely-movable, in the time of can effectively overcoming traditional voice coil motor (VCM) moving coil part, the gravity of winding wire, tractive force are to the influence of precision.Vertically in the fine motion module 2, transmit motion by reed (13,14), the positive and negative return difference that can effectively avoid traditional voice coil motor (VCM) to adopt guide rail bearing transmission campaign to be caused is big, and repeatable accuracy is poor, the nonlinear problem that hysteresis etc. cause.Through with reed (13,14) bending; Make the middle part of bending place at reed; The ratio of total length was 1: 4～1: 6 when the distance of bending place line to the reed two ends was stretched with reed, can effectively solve the contradiction of technological intermediate-resolution of existing voice coil motor (VCM) and travel range.
Vertically in the fine motion module 2, the magnetic pole of two permanent magnets (11,12) distributes as shown in Figure 5.Give coil 10 energisings, coil 10 forms upper and lower two magnetic poles; When coil 10 upper and lower magnetic poles were respectively N, S, the permanent magnet 11 and the coil 10 of coil 10 tops repelled each other, and the permanent magnet 12 of below attracts each other with coil 10, thereby made front support stand 15 move straight up; With current reversal, the upper and lower magnetic pole of coil is changed into S, N respectively, and this moment, the permanent magnet 11 of top attracted each other with coil 10, and the permanent magnet 11 of below repels with coil 10 each other, thereby makes front support stand 15 move straight down.When magnetic force between coil 10 and the permanent magnet (11,12) and front support stand 15 overcame power that the reed distortion produces and equate, front support rod 15 kept displacement at this moment constant.Through regulating the size and Orientation of input current, can control coil 10 with permanent magnet (11,12) between the size and Orientation of magnetic force, thereby control the linear displacement amount and the direction of front support stand 15 upper and lower motions.
The hybrid drive-type micro-robot that the present invention proposes; Through lamination type piezoelectric ceramics (PZT), electromagnet (EM) and linear voice coil motor (VCM) combination drive; Wherein lamination type piezoelectric ceramics (PZT) and electromagnet (EM) are united driving plane walking block motion; Linear voice coil motor (VCM) drives vertical fine motion block motion, accomplishes the four-degree-of-freedom motion of micro-robot X, Y, Z, θ direction.The present invention is simple in structure, size is small, can replace human accomplish accurate operation, detection between microvoid or in the narrow space.
From the above; The structure of the hybrid-driven micro-robot that the present invention proposes; Use lamination type piezoelectric ceramics (PZT), electromagnet (EM) and linear voice coil motor (VCM) combination drive micro-robot; Wherein lamination type piezoelectric ceramics (PZT) and electromagnet (EM) are united the motion of driving (X, Y, θ) direction, and linear voice coil motor (VCM) drives the motion of Z direction.The mode that adopts piezoelectric ceramics and electromagnet to cooperatively interact drives the plane walking module, has overcome the traditional approach piezoelectric element and has driven the little shortcoming of stroke, realizes omnibearing motion in the micro-robot plane.Vertically the linear voice coil motor (VCM) of fine motion module, high acceleration low by cost, response fast drives, and uses reed, coil to constitute the linear voice coil motor; It moves back and forth the zerofriction force existence, has overcome traditional voice coil motor under loading condition, because the existence of sliding bearing, frictional force is different during reciprocating motion, and there are the phenomenon that lags behind in displacement that causes and input current; Through the design of reed flexibility, solved the contradiction of technological intermediate-resolution of existing voice coil motor (VCM) and travel range.The present invention is with lamination type piezoelectric ceramics (PZT), electromagnet (EM) and linear voice coil motor (VCM) the combination drive type of drive as micro-robot; Simple in structure, size is little; Solved in the current driving mode effectively; The high-frequency vibration that gravity direction (Z direction) is easy to generate, nonlinear problems such as repeatable accuracy difference; The plane motion scope is too small, the contradictory problems of resolution ratio and travel range, the accurate location of having realized micro-robot plane and gravity direction.The piezoelectric ceramics that the present invention proposes and the mechanism of voice coil motor hybrid drive-type micro-robot; Compare with existing micro-robot; Have simple in structure, advantages such as cost is low, high repeatable accuracy, realize the micromotion of high-resolution four frees degree (X, Y, Z, θ).Micro-robot of the present invention can replace human accomplish accurate operation, detection between microvoid or in the narrow space; Also can form the micro-robot crowd, coordinate control and accomplish fine operation, for the realization of micromanipulation automation lays the foundation.
Claims (7)
1. the structure of a hybrid-driven micro-robot comprises plane walking module (1) and vertical fine motion module (2); Micro-robot has four frees degree altogether, and wherein plane walking module (1) realizes two one-movement-freedom-degrees and the rotary freedom on the plane, and vertically fine motion module (2) realizes an one-movement-freedom-degree of vertical direction; Vertically fine motion module (2) is carried on plane walking module (1) through rack platform (3); Plane walking module (1) is united driving by lamination type piezoelectric ceramics and electromagnet, and vertically fine motion module (2) is driven by the linear voice coil motor; Said vertical fine motion module (2) comprises coil (10), two permanent magnets (11,12), two reeds (13,14), front support stand (15) and rear support stand (16); Said two permanent magnets (11,12) are installed on the front support stand (15); And two permanent magnets (11,12) in the vertical direction separates; Coil (10) is installed on the rear support stand (16); And coil (10) is positioned between two permanent magnets (11,12), and front support stand (15) and rear support stand (16) link together through reed; Said rear support stand (16) is fixedly mounted on the rack platform (3), and the two ends up and down of front support stand (15) are connected with rear support stand (16) through reed.
2. the structure of a kind of hybrid-driven micro-robot according to claim 1; It is characterized in that said plane walking module comprises two U type electromagnet and four lamination type piezo ceramic elements; The square crossing of said two U type electromagnet is " ten " font; Said four lamination type piezo ceramic elements are square arrangement; And lay respectively in four zones that said " ten " font is divided into; The two ends of each lamination type piezo ceramic element are connected with two U type electromagnet respectively, and whole plane walking module is supported by said two U type electromagnet.
3. the structure of a kind of hybrid-driven micro-robot according to claim 2 is characterized in that said U type electromagnet constitutes by U type conducting magnet core with around the coil of U type conducting magnet core two vertical end, and the stage casing part of U type conducting magnet core is fluted.
4. the structure of a kind of hybrid-driven micro-robot according to claim 1; It is characterized in that said reed is a bending type; The bending place is at the middle part of reed, and the ratio of total length was 1: 4～1: 6 when the distance of bending place line to the reed two ends was stretched with reed.
5. the structure of a kind of hybrid-driven micro-robot according to claim 1 is characterized in that said rear support stand is provided with the semi-circular groove that is used to inlay the said coil of installation, and the radius of semi-circular groove equates with coil radius.
6. the structure of a kind of hybrid-driven micro-robot according to claim 1; It is characterized in that said front support stand has two branches up and down; Each branch is provided with and is used to inlay the through hole that said permanent magnet is installed; The radius of through hole equates that with the permanent magnet radius degree of depth of through hole equates with the height of permanent magnet.
7. according to the structure of each described a kind of hybrid-driven micro-robot of claim 2～6; It is characterized in that said two permanent magnets are symmetrical up and down about the center of coil, and the central axis of the central axis of coil and two permanent magnets is on same vertical curve.
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| CN112290826B (en) * | 2020-10-09 | 2024-02-09 | 中国科学技术大学 | X-electrode split cross multidimensional piezoelectric motor and scanning probe microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1235405A (en) * | 1999-05-28 | 1999-11-17 | 清华大学 | Miniature monoblock precisive plane moving mechanism and device thereof |
| CN1586828A (en) * | 2004-07-15 | 2005-03-02 | 清华大学 | Plane movement mechanism and its device for micro robot |
| CN1305644C (en) * | 2004-07-30 | 2007-03-21 | 哈尔滨工业大学 | Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform |
| CN201808062U (en) * | 2010-09-01 | 2011-04-27 | 华南理工大学 | Structure of mixed driving type tiny robot |
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| WO2007137372A2 (en) * | 2006-05-25 | 2007-12-06 | Katholieke Universiteit Leuven | Positioning motor and apparatus |
| JP5376780B2 (en) * | 2007-08-08 | 2013-12-25 | 株式会社東芝 | Piezoelectric motor and camera device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1235405A (en) * | 1999-05-28 | 1999-11-17 | 清华大学 | Miniature monoblock precisive plane moving mechanism and device thereof |
| CN1586828A (en) * | 2004-07-15 | 2005-03-02 | 清华大学 | Plane movement mechanism and its device for micro robot |
| CN1305644C (en) * | 2004-07-30 | 2007-03-21 | 哈尔滨工业大学 | Microdriving fully decoupled macrol/micre bidriving minitype robot moving locating platform |
| CN201808062U (en) * | 2010-09-01 | 2011-04-27 | 华南理工大学 | Structure of mixed driving type tiny robot |
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