CN102647107A - Big stroke micro nanoscale linear actuator based on parasitic motion principle - Google Patents
Big stroke micro nanoscale linear actuator based on parasitic motion principle Download PDFInfo
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- CN102647107A CN102647107A CN2012101146139A CN201210114613A CN102647107A CN 102647107 A CN102647107 A CN 102647107A CN 2012101146139 A CN2012101146139 A CN 2012101146139A CN 201210114613 A CN201210114613 A CN 201210114613A CN 102647107 A CN102647107 A CN 102647107A
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Abstract
The invention relates to a big stroke micro nanoscale linear actuator based on the parasitic motion principle, which can be used for realizing big stroke micro nanoscale high-precision linear positioning in the areas of precise and ultra-precise processing, micro gripping operations and scanning and imaging. The big stroke micro nanoscale linear actuator mainly comprises a forward driving unit, a rotor unit and a backward driving unit. The forward driving unit and the backward driving unit are symmetrically installed on a pedestal and the rotor unit is installed in a groove on the pedestal. The foliated structures at two sides of the rotor of the rotor unit are connected with the output ends of the forward driving unit and the backward driving unit through clearance fit. The actuator is compact in structure and convenient and fast to control. Based on the parasitic motion principle, the big stroke micro nanoscale linear actuator can realize the millimeter-sized big stroke and micro nanoscale high-precision linear positioning function. The big stroke micro nanoscale linear actuator has a good application prospect in the areas of precise and ultra-precise processing, micro gripping operations and scanning and imaging which require big strokes and high-precision positioning.
Description
Technical field
The present invention relates to a kind of big stroke micro/nano level linear actuator, can be used for fields such as precision and ultraprecise processing, little clamping operation, scanning imagery and realize big stroke micro/nano level high accuracy straight line location based on the hunt effect principle.
Background technology
The micro/nano level positioner is in scientific circles and industrial quarters is with a wide range of applications and demand.Typical a kind of as in the micro/nano level positioner of piezoelectric actuator bringing into play more and more important effect in fields such as accurate and ultraprecise processing, AFM, scanning electron microscopy, micro nanometer mechanics test, little clampings.Utilize piezoelectric drive element based on different drive principle at present; The researcher has developed form and the different driver of function, and piezoelectric stack direct-drive type driver, compliant mechanism driver, looper type driver, inertia starter and sticking gliding style driver etc. are more typically arranged.Simple in structure, advantages such as response is rapid, high-resolution that piezoelectric stack direct-drive type driver has, but receive the restriction that piezoelectric stack is exported displacement stroke, and the type driver output displacement is very limited.The compliant mechanism driver can be realized multifreedom motion easily, but structure is complicated with control, and stroke is less, and rigidity is lower.Looper type driver has big stroke and the advantage that responds fast, but its structure is complicated with control, and is high for processing and matching requirements in addition.Inertia starter often has simple structure and can realize that big stroke responds with quick, but the low drawbacks limit of its bearing capacity its use.Sticking gliding style driving implement has theoretical unlimited stroke, but its movement velocity is limited, and bearing capacity is also lower.In sum, development has big stroke, high accuracy, driver high-speed, high bearing capacity still is a difficult point at present.
Summary of the invention
The object of the present invention is to provide a kind of big stroke micro/nano level linear actuator, solved the problems referred to above that prior art exists based on the hunt effect principle.The present invention is based on a kind of big stroke micro/nano level linear actuator of hunt effect principle design, a kind of available solutions is provided for realizing the large stroke and high precision location.Can realize big stroke of millimeter level and micro/nano level hi-Fix based on hunt effect principle the type driver.By drive principle provided by the invention, can the different large stroke and high precision piezoelectric actuator of design form, satisfy the different demands in accurate and fields such as ultraprecise processing, little clamping operation, scanning imagery.
Above-mentioned purpose of the present invention realizes by the following technical programs:
Big stroke micro/nano level linear actuator based on the hunt effect principle comprises forward drive unit, mover unit and negative sense driver element, and described forward drive unit, mover unit and negative sense driver element are connected with pedestal 1 through screw respectively.
Described forward drive unit is made up of positive movement piezoelectric stack 3 and positive movement flexible hinge 4; Said positive movement flexible hinge 4 is connected with pedestal 1 through screw, and said positive movement piezoelectric stack 3 adopts the tight fit mode to be installed in the groove of positive movement flexible hinge 4.
Described negative sense driver element is made up of negative movement piezoelectric stack 7 and negative movement flexible hinge 6; Said negative movement flexible hinge 6 is connected with pedestal 1 through screw, and said negative movement piezoelectric stack 7 adopts the tight fit mode to be installed in the groove of negative movement flexible hinge 6.
Described mover unit is made up of guide rail slide block assembly 2 and mover 5, and the mover unit is connected with pedestal 1 through the installing hole on the guide rail of guide rail slide block assembly 2, and mover 5 is connected with the slide block of guide rail slide block assembly 2 through screw.
Matched in clearance is realized with the groove of forward drive unit and negative sense driver element output respectively through the flaky texture of mover 5 both sides in described mover unit.
The present invention is based on the hunt effect principle, the type driver can be realized big stroke of millimeter level and micro/nano level hi-Fix.
Beneficial effect of the present invention is: simple in structure, compact; It is convenient to control; For fields such as accurate and ultraprecise processing, little clamping operation, scanning imageries a kind of big stroke micro/nano level targeting scheme is provided based on the hunt effect principle; Utilize the piezoelectric actuator of this alternatives formulation to have the displacement stroke of theory unlimited; Actuating speed reaches 40 little meter per seconds when 100 volts driving voltages and 5 hertz of driving frequencies, changes the motion output that driving voltage and driving frequency can obtain different driving speed and resolution easily.Can be used for fields such as precision and ultraprecise processing, little clamping operation, scanning imagery and realize big stroke micro/nano level high accuracy straight line location.Applied widely, practical.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present invention, constitutes the application's a part, and illustrative example of the present invention and explanation thereof are used to explain the present invention, do not constitute improper qualification of the present invention.
Fig. 1 is the perspective view of the big stroke micro/nano level linear actuator based on the hunt effect principle of the present invention;
Fig. 2 is the sketch map that elastomer distortion of the present invention produces hunt effect;
Fig. 3 the present invention is based on the schematic diagram that the hunt effect principle realizes linear drives;
Fig. 4 the present invention is based on the SECO figure that the hunt effect principle realizes linear drives;
Fig. 5 the present invention is based on the process sketch map that the hunt effect principle realizes linear drives;
Fig. 6 is the schematic top plan view that the present invention is based on the big stroke micro/nano level linear actuator of hunt effect principle;
Fig. 7 is that the master who the present invention is based on the big stroke micro/nano level linear actuator of hunt effect principle looks sketch map;
Fig. 8 is that driver of the present invention is 3 hertz in driving frequency, the actual motion curve of output that records under the different driving voltage magnitude;
Fig. 9 is that driver of the present invention is 100 volts in driving voltage amplitude, the actual motion curve of output that records under the different driving electric voltage frequency.
Among the figure: 1, pedestal; 2, guide rail slide block assembly; 3, positive movement piezoelectric stack; 4, positive movement flexible hinge; 5, mover; 6, negative movement flexible hinge; 7, negative movement piezoelectric stack.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1, Fig. 6 and shown in Figure 7; Big stroke micro/nano level linear actuator based on the hunt effect principle of the present invention; Comprise forward drive unit, mover unit and negative sense driver element, described forward drive unit, mover unit and negative sense driver element are connected with pedestal 1 through screw respectively.
Described forward drive unit is made up of positive movement piezoelectric stack 3 and positive movement flexible hinge 4; Said positive movement flexible hinge 4 is connected with pedestal 1 through screw, and said positive movement piezoelectric stack 3 adopts the tight fit mode to be installed in the groove of positive movement flexible hinge 4.
Described negative sense driver element is made up of negative movement piezoelectric stack 7 and negative movement flexible hinge 6; Said negative movement flexible hinge 6 is connected with pedestal 1 through screw, and said negative movement piezoelectric stack 7 adopts the tight fit mode to be installed in the groove of negative movement flexible hinge 6.
Described mover unit is made up of guide rail slide block assembly 2 and mover 5, and the mover unit is connected with pedestal 1 through the installing hole on the guide rail of guide rail slide block assembly 2, and mover 5 is connected with the slide block of guide rail slide block assembly 2 through screw.
Matched in clearance is realized with the groove of forward drive unit and negative sense driver element output respectively through the flaky texture of mover 5 both sides in described mover unit.
The present invention is based on the hunt effect principle, the type driver can be realized big stroke of millimeter level and micro/nano level hi-Fix.
Referring to Fig. 2, be the sketch map that the elastomer distortion produces hunt effect.Elastomer A does the time spent and can produce strain receiving external load F, causes output B to produce small movements, comprise along
xTo the motion Δ
xWith along
yTo the motion Δ
yUtilize
xTo the motion Δ
x, this kind structure has a wide range of applications in little clamping field.
xTo the motion Δ
xBe used to realize clamping to held object, and
yTo the motion Δ
yThen be because the additional movement that elastomer A distortion causes.Because Δ
yBe to follow Δ
xProduce, so
yTo the motion Δ
yBe referred to as hunt effect.This kind hunt effect is used for little clamping and is harmful to, and it can cause held object to produce slip, is unfavorable for clamping stability.Yet the present invention but utilizes this hunt effect to realize linear drives.
Referring to Fig. 3, be based on the schematic diagram that the hunt effect principle realizes linear drives.When the elastomer distortion produces the clamping movement Δ
xWith the hunt effect Δ
yThe time, the elastomer output at first produces normal pressure N to mover, and along with the increase of hunt effect, mover and elastomer output have relative motion trend, frictional force
f NProduce thereupon.Because hunt effect Δ
yAnd frictional force
f NExistence, make mover along
yTo producing rectilinear motion.
Referring to Fig. 4 and Fig. 5, explain based on the hunt effect principle and realize the linear drives detailed process.Shown in accompanying drawing 5, a complete motion process mainly comprises 6 steps: (a) from 0 to
t 1Constantly, there is certain clearance between mover and the output
δ, the clamping movement Δ
xBe mainly used in compensate for clearance, this section is in the period, and mover does not contact with the elastomer output; (b) exist
t 1Constantly, mover initially contacts with the elastomer output; (c) exist
t 1Extremely
t 2Constantly, along with elastomer further is out of shape, the clamping movement Δ
xWith the hunt effect Δ
yIncrease.According to accompanying drawing 3, mover is at the hunt effect Δ
yAnd frictional force
f NEffect under along
yTo realizing small rectilinear motion; (d) exist
t 2Constantly, elastomer reaches maximum distortion, and mover also reaches the single step maximum displacement
S(e) exist
t 2Extremely
TConstantly, elastomer progressively restPoses, but its output still contacts with mover, cause mover along
yTo certain negative movement is arranged, be designated as
S 0(f) exist
TConstantly, elastomer restPoses, for next motion cycle is prepared.In a motion cycle, the displacement of single step effective exercise
S eFor
S e=
S-
S 0Repeat above 6 steps, can realize the continuous rectilinear motion of mover.Can obtain different actuating speeds and displacement resolution through changing the driving voltage frequency with amplitude.
Referring to Fig. 6 and Fig. 7; When the driving voltage with certain amplitude and frequency affacts forward piezoelectric stack 3; Forward piezoelectric stack 3 will extend under the effect of piezoelectric effect; Finally drive positive movement flexible hinge 4 through the compliant mechanism transmission and produce clamping movement and hunt effects, thus drive mover 5 realize along
yTo rectilinear motion.Through the left-right symmetric structural design, this linear actuator can realize along
yTo forward and negative movement.Apply driving voltage to piezoelectric stack continuously with certain amplitude and frequency, mover 5 can along
yTo continuous, big stroke motion.
Referring to Fig. 8, be that the present invention is 3 hertz in driving frequency, the actual motion curve of output that records under the different driving voltage magnitude.Accompanying drawing 9 is that the present invention is 100 volts in driving voltage amplitude, the actual motion curve of output that records under the different driving electric voltage frequency.When 5 hertz of 100 volts of driving voltages, frequency, actuating speed surpasses 40 little meter per seconds.
The above is merely preferred embodiment of the present invention, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1. big stroke micro/nano level linear actuator based on the hunt effect principle; It is characterized in that: comprise forward drive unit, mover unit and negative sense driver element, described forward drive unit, mover unit and negative sense driver element are connected with pedestal (1) through screw respectively.
2. the big stroke micro/nano level linear actuator based on the hunt effect principle according to claim 1; It is characterized in that: described forward drive unit is made up of positive movement piezoelectric stack (3) and positive movement flexible hinge (4); Said positive movement flexible hinge (4) is connected with pedestal (1) through screw, and said positive movement piezoelectric stack (3) adopts the tight fit mode to be installed in the groove of positive movement flexible hinge (4).
3. the big stroke micro/nano level linear actuator based on the hunt effect principle according to claim 1; It is characterized in that: described negative sense driver element is made up of negative movement piezoelectric stack (7) and negative movement flexible hinge (6); Said negative movement flexible hinge (6) is connected with pedestal (1) through screw, and said negative movement piezoelectric stack (7) adopts the tight fit mode to be installed in the groove of negative movement flexible hinge (6).
4. the big stroke micro/nano level linear actuator based on the hunt effect principle according to claim 1; It is characterized in that: described mover unit is made up of guide rail slide block assembly (2) and mover (5); The mover unit is connected with pedestal (1) through the installing hole on the guide rail of guide rail slide block assembly (2), and mover (5) is connected with the slide block of guide rail slide block assembly (2) through screw.
5. according to claim 1 or 4 described big stroke micro/nano level linear actuators based on the hunt effect principle, it is characterized in that: matched in clearance is realized with the groove of forward drive unit and negative sense driver element output respectively through the flaky texture of mover (5) both sides in described mover unit.
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928306A (en) * | 2012-10-26 | 2013-02-13 | 吉林大学 | In-situ micro-nanometer mechanics testing and scoring machining integrated machine |
| CN103159166B (en) * | 2013-03-22 | 2015-08-05 | 吉林大学 | Based on the efficient microarray processing unit (plant) of parasitic motion principle |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN107834896A (en) * | 2017-12-25 | 2018-03-23 | 吉林大学 | Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance |
| CN108111052A (en) * | 2018-03-09 | 2018-06-01 | 吉林大学 | Couple the bionical piezoelectricity locating platform and control method with parasitic motion principle of looper |
| CN108923682A (en) * | 2018-08-08 | 2018-11-30 | 苏州大学 | A kind of driving of stick-slip is across the big stroke motion platform of scale |
| CN108923683A (en) * | 2018-08-13 | 2018-11-30 | 苏州大学 | A kind of across the scale precision movement platform of miniature stick-slip driving |
| CN109818526A (en) * | 2019-04-02 | 2019-05-28 | 苏州大学 | The motion control method and device of stick-slip formula inertial piezoelectric driver |
| CN109995268A (en) * | 2019-03-29 | 2019-07-09 | 广东工业大学 | The shared piezoelectricity stick-slip Drive And Its Driving Method for driving sufficient formula of dual drive |
| CN110707962A (en) * | 2019-09-12 | 2020-01-17 | 广东工业大学 | Piezoelectric inertia and piezoelectric worm and worm hybrid rotary driver |
| CN111130379A (en) * | 2020-01-16 | 2020-05-08 | 南京理工大学 | Cross-scale piezoelectric driving method and device |
| CN111203852A (en) * | 2020-01-16 | 2020-05-29 | 南京理工大学 | Positive stress electromagnetic drive micro-gripper |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928306A (en) * | 2012-10-26 | 2013-02-13 | 吉林大学 | In-situ micro-nanometer mechanics testing and scoring machining integrated machine |
| CN103159166B (en) * | 2013-03-22 | 2015-08-05 | 吉林大学 | Based on the efficient microarray processing unit (plant) of parasitic motion principle |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN107834896A (en) * | 2017-12-25 | 2018-03-23 | 吉林大学 | Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance |
| CN108111052A (en) * | 2018-03-09 | 2018-06-01 | 吉林大学 | Couple the bionical piezoelectricity locating platform and control method with parasitic motion principle of looper |
| CN108111052B (en) * | 2018-03-09 | 2024-03-05 | 吉林大学 | Piezoelectric positioning platform for coupling inchworm bionic and parasitic motion principle and control method |
| CN108923682B (en) * | 2018-08-08 | 2019-09-27 | 苏州大学 | A kind of driving of stick-slip is across the big stroke motion platform of scale |
| CN108923682A (en) * | 2018-08-08 | 2018-11-30 | 苏州大学 | A kind of driving of stick-slip is across the big stroke motion platform of scale |
| CN108923683A (en) * | 2018-08-13 | 2018-11-30 | 苏州大学 | A kind of across the scale precision movement platform of miniature stick-slip driving |
| CN108923683B (en) * | 2018-08-13 | 2019-09-27 | 苏州大学 | A kind of across the scale precision movement platform of miniature stick-slip driving |
| CN109995268A (en) * | 2019-03-29 | 2019-07-09 | 广东工业大学 | The shared piezoelectricity stick-slip Drive And Its Driving Method for driving sufficient formula of dual drive |
| CN109818526A (en) * | 2019-04-02 | 2019-05-28 | 苏州大学 | The motion control method and device of stick-slip formula inertial piezoelectric driver |
| CN110707962A (en) * | 2019-09-12 | 2020-01-17 | 广东工业大学 | Piezoelectric inertia and piezoelectric worm and worm hybrid rotary driver |
| CN111130379A (en) * | 2020-01-16 | 2020-05-08 | 南京理工大学 | Cross-scale piezoelectric driving method and device |
| CN111203852A (en) * | 2020-01-16 | 2020-05-29 | 南京理工大学 | Positive stress electromagnetic drive micro-gripper |
| CN111130379B (en) * | 2020-01-16 | 2021-04-16 | 南京理工大学 | Cross-scale piezoelectric driving method and device |
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