CN204481717U - A kind of inertia stick-slip formula realizing bidirectional-movement is across yardstick precision movement platform - Google Patents

A kind of inertia stick-slip formula realizing bidirectional-movement is across yardstick precision movement platform Download PDF

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Publication number
CN204481717U
CN204481717U CN201420744493.5U CN201420744493U CN204481717U CN 204481717 U CN204481717 U CN 204481717U CN 201420744493 U CN201420744493 U CN 201420744493U CN 204481717 U CN204481717 U CN 204481717U
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China
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block
balancing weight
platform
movement platform
piezoelectric actuator
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钟博文
金子祺
陈林森
王振华
钱哲
李宗伟
孙立宁
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Suzhou University
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Suzhou University
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Abstract

The utility model discloses a kind of inertia stick-slip formula realizing bidirectional-movement across yardstick precision movement platform, two motion module that described platform comprises base plate, the supporting module be positioned on base plate, symmetry are installed on supporting module both sides, each described motion module comprises balancing weight, piezoelectric actuator and parenchyma gauge block, described piezoelectric actuator comprises positive pole and negative pole, piezoelectric actuator positive pole and negative pole are used for being connected with drive singal, described drive singal is the combination of linear voltage and non-linear voltage, and wherein the rate of change of non-linear voltage increases gradually.The precision positioning that inertia stick-slip formula of the present utility model is simple across yardstick precision movement platform structure, can realize quick Long Distances, easily realize multiple degrees of freedom and drive and do not need special position holding device.

Description

A kind of inertia stick-slip formula realizing bidirectional-movement is across yardstick precision movement platform
Technical field
The utility model relates to precise motion technical field, particularly relates to a kind of inertia stick-slip formula realizing bidirectional-movement across yardstick precision movement platform.
Background technology
Along with the fast development of micro-/ nano technology, in the research of the technical fields such as optical engineering, micro-electronic manufacturing, aeronautical and space technology, ultraprecise machine-building, Micro-Robot operation, biomedical and genetic engineering all in the urgent need to the Ultraprecise drive mechanism of Asia/micron order, micro/nano level.
Have nanometer-scale motions resolution, what have again grade movement travel is key technology in current micro-move device field across yardstick precise motion technology.Due to inertia stick-slip drive simple, convenient across the drive principle of yardstick motion type of drive relative to other classes, control simple, and have that range of movement is large, resolution is high, structure is simple, easily microminiaturization and the accurate advantage such as location, therefore inertia stick-slip drive be occur at present apply more a kind of mode across in yardstick driving.The operation principle that inertia stick-slip drives is mainly using frictional force as drive source, stick-slip effect is utilized to realize the minute movement of driven member, particularly, driven member relies on the difference between the sound frictional force that formed of asymmetric vibration of saw-tooth voltage excitation piezoelectric vibrator finally to realize across yardstick precise motion.
The utility model adopts piezoelectric actuator as the drive unit of precise positioning work table, piezoelectric actuator is the novel micrometric displacement device grown up in recent years, and it is little using volume, actuating force is large, resolution is high, be easy to the advantages such as control is widely used in the middle of precision optical machinery as driving element.Piezoelectric ceramic utilizes the inverse piezoelectric effect of piezoelectric to carry out work, only relies on the size of extra electric field just can realize driving.Piezoelectric ceramic overcomes the deficiencies such as the actuator inertia such as mechanical type, fluid pressure type, pneumatic type, electromagnetic type is in the past large, low-response, complex structure, poor reliability, have that volume is little, compact conformation, mechanical friction, gapless, resolution is high, response is fast, without heating, by magnetic interference, can at low temperature, the advantage such as to use under vacuum environment, be widely used in microposition technology, this controlled precision micro-displacement actuator will play effect difficult to the appraisal in many technical fields from now on.Although it has the advantage that high-accuracy displacement exports, but its output displacement is quite small simultaneously, can not meet and have larger micrometric displacement to export the application scenario required, usually need the output displacement of piezoelectric actuator to add up in actual applications, to meet the needs of Long Distances high precision location.Therefore this patent adopts inertia stick-slip formula principle to solve the less problem of piezoelectric actuator output displacement.Mainly can be divided into according to their working method according to the precise driving device of piezoelectric ceramic structure at present: direct drive, lever amplification formula, oval amplifying type and rhombus amplifying type and Inchworm type precisely locating platform.
If the patent No. is the Chinese patent of CN202695554U, direct drive precisely locating platform mainly adopts the two parallel-plate compliant mechanism of piezoelectric ceramic Direct driver, use this mechanism can eliminate coupling displacement and displacement resolution is very high in principle, but piezoelectrics distortion is very little, make the movement travel of detent mechanism very limited, practical application is greatly limited.
As the patent No. be the Chinese patent of CN2587600, CN103111990A, the patent No. is the European patent of EP0624912A1, the patent No. is the Deutsche Bundespatent of DE4315238A1, the main purpose of lever amplification formula precisely locating platform is amplified by the range of movement of piezoelectric ceramic, pass through lever amplification principle, and the flexure hinge mechanism with revolute realizes the rotation along fulcrum, amplified by leverage, its multiplication factor can reach 2-3 doubly.Make effectively to be improved by the range of movement of the precisely locating platform of Piezoelectric Ceramic, but while range of movement amplifies, also there is small angle change because lever amplifies, therefore can bring small angular error to the final displacement enlargement realized.
If the patent No. is the Chinese patent of CN2628237 and CN2726829, oval amplifying type and rhombus amplifying type precisely locating platform adopt strut buckling principle to realize motion amplification, and motion amplification mechanism forms based on the strut buckling principle design in the mechanics of materials.When piezoelectric ceramic extends, mechanism two ends are subject to thrust from inside to outside, and the curvature of circular arc thin wall changes, and its cambered surface peak moves down, and downward displacement is more much bigger than the elongation displacement of pottery self, and namely displacement is exaggerated.But this type of mechanism's circular arc place stress is comparatively large, easily produces stress and concentrate.
As the Chinese patent application that application number number is CN201110245339.4, CN201310202368.1, CN201210475674.8 and CN201310491303.3, Inchworm type precisely locating platform is gained the name because copying living nature reptile motion principle.It is the accurate displacement driving mechanism that the microvibration displacement of piezoelectrics can be formed after certain mode is changed continuous print or stepping.Be the use by clamp device with the difference of Direct Action Type mechanism, make mechanism can realize the accurate displacement of Long Distances.Fig. 1 is the structure diagram of Inchworm type precisely locating platform, and wherein 1,3 is can the piezoelectricity cylinder of radial expansion, and leaves small gap between straight-bar, and 2 can the pipe of axial stretching.When control drive circuit, make 1 contraction be pressed on straight-bar, simultaneously 3 open and 2 extend, and 3 have moved right a step, and then 3 shrink and step up, and 1 opens, and 2 shorten, then 1 to have moved right a step.Like this by 1,2, namely the moving member entirety of 3 one-tenth moved right a step, so move in circles, namely define continuous print accurate displacement.
Although above-mentioned four kinds of precisely locating platforms are all the drivings utilizing piezoelectric ceramic, realize nano high-precision location.Although first three kind is different on one dimension implementation structure and displacement equations mode, within the displacement of this type of platform is all limited in hundreds of micron, the precision positioning across yardstick can not be realized.And Inchworm type precisely locating platform is by looper principle, small displacement is carried out the cumulative precisely locating platform realizing nano-precision, grade stroke.But because structure is comparatively complicated, and then it is higher to cause the processing of this platform and assembly precision to require, final impact is across the kinematic accuracy of yardstick precision movement platform and consistency, and therefore these prior aries are guaranteeing to there is complex manufacturing technology and a manufacturing cost high-technology difficult problem across in the consistency during mass production of yardstick precision movement platform.
Therefore, for above-mentioned technical problem, be necessary to provide a kind of inertia stick-slip formula realizing bidirectional-movement across yardstick precision movement platform.
Utility model content
In view of this, in order to solve described the problems of the prior art, the utility model provides a kind of inertia stick-slip formula realizing bidirectional-movement across yardstick precision movement platform, consistent to realize grade stroke, nano grade positioning precision and forward and reverse movement velocity.Adopt inertia stick-slip formula drive principle, be beneficial to inertial impact force and form a kind of new paragon that driving is tectonic movement mechanism, and inertial impact force is in most cases obtained by mechanical impact, controls relative difficult and easily causes damage to mechanism.Due to piezoelectric actuator there is fast response time, energy conversion efficiency is high, structure is simple, be easy to the advantages such as microminaturization, therefore piezoelectric element is structure inertia stick-slip formula across one of desirable dynamical element of yardstick precision movement platform.
To achieve these goals, the technical scheme that provides of the utility model embodiment is as follows:
A kind of inertia stick-slip formula realizing bidirectional-movement is across yardstick precision movement platform, two motion module that described platform comprises base plate, the supporting module be positioned on base plate, symmetry are installed on supporting module both sides, each described motion module comprises balancing weight, piezoelectric actuator and parenchyma gauge block, described piezoelectric actuator comprises positive pole and negative pole, piezoelectric actuator positive pole and negative pole are used for being connected with drive singal, described drive singal is the combination of linear voltage and non-linear voltage, and wherein the rate of change of non-linear voltage increases gradually.
As further improvement of the utility model, described balancing weight at least comprises the first balancing weight and the second balancing weight, and described first balancing weight and the second balancing weight are different materials and thickness.
As further improvement of the utility model, inertia contiguous block is installed between described balancing weight and piezoelectric actuator, between described parenchyma gauge block and piezoelectric actuator, the first nut is installed.
As further improvement of the utility model, the hold down gag that described supporting module comprises the lower lock block be fixedly installed on base plate, is positioned at the upper holder block above lower lock block and is positioned at above upper holder block, on described upper holder block and lower lock block, correspondence is provided with groove.
As further improvement of the utility model, described hold down gag comprises and is arranged at the spring bearer plate above upper holder block, the Compress Spring between spring bearer plate and upper holder block and compressor arm and the second nut for be fixed and clamped bar and spring bearer plate.
As further improvement of the utility model, be connected between described motion module by optical axis, described optical axis cross section be circle, and optical axis is installed in the groove between upper holder block and lower lock block, and described optical axis and upper holder block and lower lock block are linear contact lay.
As further improvement of the utility model, in described motion module, the arranged outside of parenchyma gauge block has the 3rd nut, and described motion module is fixedly mounted by the 3rd nut and optical axis.
As further improvement of the utility model, the two ends correspondence of described upper holder block is provided with pretension jackscrew.
As further improvement of the utility model, described non-linear voltage successively decreases with parabola.
The utility model has following beneficial effect:
The precision positioning that inertia stick-slip formula of the present utility model is simple across yardstick precision movement platform structure, can realize quick Long Distances, easily realize multiple degrees of freedom and drive and do not need special position holding device.The utility model in the field such as MEMS (micro electro mechanical system), INVENTIONModern cell biology engineering, Ultra-precision Turning, STM and AFM microscope scanning platform, micro-nano operation, micro robot and biological microoperation because of its compact conformation, have wide practical use without electromagnetic interference and gathering around across the accurate location of yardstick.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, the accompanying drawing that the following describes is only some embodiments recorded in the utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of Inchworm type precisely locating platform in prior art;
Fig. 2 is the structural representation of the utility model inertia stick-slip formula across motion module in yardstick precision movement platform;
Fig. 3 is the structural representation of inertia stick-slip formula across motion module in yardstick precision movement platform that the utility model realizes bidirectional-movement;
Fig. 4 is drive singal schematic diagram in the utility model one embodiment;
Fig. 5 be in the utility model one embodiment inertia stick-slip formula across the perspective view of yardstick precision movement platform;
Fig. 6 be in the utility model one embodiment inertia stick-slip formula across the perspective view of motion module in yardstick precision movement platform;
Fig. 7 be in the utility model one embodiment inertia stick-slip formula across the structural representation of upper holder block and lower lock block in yardstick precision movement platform.
Embodiment
Below with reference to embodiment shown in the drawings, the utility model is described in detail.But these execution modes do not limit the utility model, the structure that those of ordinary skill in the art makes according to these execution modes, method or conversion functionally are all included in protection range of the present utility model.
The utility model discloses a kind of inertia stick-slip formula realizing bidirectional-movement across yardstick precision movement platform, two motion module that this platform comprises base plate, the supporting module be positioned on base plate, symmetry are installed on supporting module both sides, each motion module comprises balancing weight, piezoelectric actuator and parenchyma gauge block, described piezoelectric actuator comprises positive pole and negative pole, piezoelectric actuator positive pole and negative pole are used for being connected with drive singal, drive singal is the combination of linear voltage and non-linear voltage, and wherein the rate of change of non-linear voltage increases gradually.
This type of mechanism is made up of parenchyma gauge block, balancing weight and piezoelectric ceramic three.When applying the signal of telecommunication of sudden change to it, the impulsive force be made up of piezoelectric element and inertial mass can produce reverse inertial impact force to mechanism body, and when this reverse impact power is greater than the frictional force of mechanism itself, mechanism just can produce motion.
As shown in Figure 2, the motion module in the utility model connects parenchyma gauge block by laminated piezoelectric ceramic actuator two ends and balancing weight formed.Between the both positive and negative polarity of piezoelectric ceramic, apply voltage forward or backwards, make it do small elongating or shortening at length direction.
First apply a linear voltage increased fast from a to b as shown in Figure 4, piezoelectric ceramic extends rapidly, and balancing weight moves right fast, and parenchyma gauge block does tiny movement left simultaneously.Then, from b to c, make control voltage successively decrease with parabola, piezoelectric ceramic shrinks gradually, makes balancing weight move to the left and constantly be accelerated.Be zero at c point voltage, piezoelectric ceramic shrinks and pauses suddenly.According to the law of conservation of momentum, most of momentum of balancing weight will be transferred on parenchyma gauge block in impulsive force mode, make the latter be moved to the left certain distance.Along with this cyclic variation of voltage, parenchyma gauge block moves rapidly to the left with fine step-length, thus reaches the accurate mobile object with locating.Obviously, as long as frequency, waveform and the amplitude by controlling driving voltage, the continuous motion of different step-length can be realized.
Consistent in order to realize forward and reverse speed, be made up of a main body, two symmetrically arranged piezoelectric ceramic and two balancing weights as shown in Figure 3 under the prerequisite of above-mentioned operation principle.
When needs realization moves right, drive singal as shown in Figure 4 connected by piezoelectric ceramic 1.First apply a linear voltage increased fast from a to b, piezoelectric ceramic 1 extends rapidly, and balancing weight 1 is fast to left movement, and parenchyma gauge block does tiny movement to the right simultaneously.Then, from b to c, make control voltage successively decrease with parabola, piezoelectric ceramic 1 shrinks gradually, makes balancing weight move to the right and constantly be accelerated.Be zero at c point voltage, piezoelectric ceramic shrinks and pauses suddenly.According to the law of conservation of momentum, most of momentum of balancing weight will be transferred on parenchyma gauge block in impulsive force mode, and the latter is moved right certain distance.Along with this cyclic variation of voltage, parenchyma gauge block moves rapidly to the right with fine step-length, thus reaches the accurate mobile object with locating.
When needs realize to left movement, drive singal as shown in Figure 4 connected by piezoelectric ceramic 2.Drive principle makes parenchyma gauge block move to the left rapidly with fine step-length as mentioned above, thus reaches the accurate mobile object with locating.Due to this module left and move right respectively by two Piezoelectric Ceramic, during driving, two piezoelectric ceramic are all slowly to shrink after first rapid elongation therefore can to realize forward and reverse speed consistent.Compared with other type of drive, piezo-electric type inertia stick-slip formula driving mechanism has that structure is simple, the precision positioning that can realize quick Long Distances, easily realize multiple degrees of freedom and drive and do not need the advantages such as special position holding device.
Shown in Fig. 5, Fig. 6 and Fig. 7, in the utility model one embodiment, inertia stick-slip formula comprises across yardstick precision movement platform:
Base plate 4-1, base plate needs grinding machine to refine, roughness grade should ensure at Ra0.4 and machine direction on same straight line, base plate will need stamp vertical two row's installing holes mutually, be arranged on the minimum direction of backplate surface roughness to facilitate in agent structure;
Balancing weight 4-2, in present embodiment, balancing weight comprises the first balancing weight (Cu) and the second balancing weight (Al), two balancing weights are different materials (brass and aluminium alloy), different thickness, the difference of inertia force when regulating balancing weight quality to realize driving to be reached through;
Inertia contiguous block 4-3, inertia contiguous block can be threaded connection with balancing weight;
Front end nut 4-5 (the first nut), front end nut can be connected with motion parts by screw thread;
Piezoelectric actuator 4-4, piezoelectric actuator is connected by epoxide-resin glue and inertia contiguous block and front end nut, and the rear cure under pressure that needs that bondd is to reach optimum switching performance;
Parenchyma gauge block 4-6, parenchyma gauge block is clamped mutually by M3 nut (the 3rd nut) and front end nut (the first nut), it can up-down adjustment prevent in motion process stuck, and can play a supporting role and prevent motion platform from motion process, causing " tumbling " phenomenon due to crank;
M3 nut 4-7 (the 3rd nut), the effect that M3 nut plays fixing parenchyma gauge block and facilitates parenchyma gauge block to regulate;
Compressor arm 4-8 and Compress Spring 4-9, compressor arm and Compress Spring carry out the frictional force of governor motion in motion process by adjustment normal pressure;
Optical axis 4-10, optical axis is connected with front end nut, to contact with each other generation frictional force with upper holder block and lower lock block;
Pretension jackscrew 4-11, pretension jackscrew has two plaies that can prevent upper holder block and lower lock block from existing due to mechanical clearance in motion process to play locked object;
Upper holder block and lower lock block 4-12, upper holder block and lower lock block are integrated and process last incision, centre be square structure as shown in Figure 6, be linear contact lay with optical axis, can prevent in motion process because the too much and stuck another aspect of contact-making surface can improve the consistency of contact portion dynamic friction factor on the one hand;
M4 nut 4-13 (the second nut) and spring bearer plate 4-14, makes spring bearer plate compress Compress Spring by two M4 nuts.
In present embodiment, balancing weight 4-2, inertia contiguous block 4-3, piezoelectric actuator 4-4, front end nut 4-5, parenchyma gauge block 4-6, M3 nut 4-7 and optical axis 4-10 together constitute symmetrical motion module, wherein each balancing weight is made up of two different the first balancing weights and the second balancing weight, in other embodiments, the quantity of balancing weight also can be set to other quantity; Compressor arm 4-8, Compress Spring 4-9, pretension jackscrew 4-11, upper holder block and lower lock block 4-12, M4 nut 4-13 together constitute bracing or strutting arrangement, also can adopt other structures in other embodiments.
Utility model works principle as shown in Figure 3, is made up of parenchyma gauge block (being equivalent to 2 parenchyma gauge blocks of two motion module in present embodiment and the combination of optical axis), 2 piezoelectric actuators and 2 balancing weight three parts.
When needs realization moves right, drive singal as shown in Figure 4 connected by piezoelectric ceramic 1.First apply a linear voltage increased fast from a to b, piezoelectric ceramic 1 extends rapidly, and balancing weight 1 is fast to left movement, and parenchyma gauge block does tiny movement to the right simultaneously.Then, from b to c, make control voltage successively decrease with parabola, piezoelectric ceramic 1 shrinks gradually, makes balancing weight move to the right and constantly be accelerated.Be zero at c point voltage, piezoelectric ceramic shrinks and pauses suddenly.According to the law of conservation of momentum, most of momentum of balancing weight will be transferred on parenchyma gauge block in impulsive force mode, and the latter is moved right certain distance.Along with this cyclic variation of voltage, parenchyma gauge block moves rapidly to the right with fine step-length, thus reaches the accurate mobile object with locating.
When needs realize to left movement, drive singal as shown in Figure 4 connected by piezoelectric ceramic 2.Drive principle makes parenchyma gauge block move to the left rapidly with fine step-length as mentioned above, thus reaches the accurate mobile object with locating.Due to this mechanism left and move right respectively by two Piezoelectric Ceramic, during driving, two piezoelectric ceramic are all slowly shrink after first rapid elongation.Therefore the positive movement speed that the difference of mechanical response time when can overcome difference when rising and decline of the step signal that produces due to driving power and piezoelectric actuator rapid elongation and rapid desufflation in motion process causes is greater than movement velocity in the other direction.Because the stroke of piezoelectric ceramic is very little, therefore the most I of inertia stick-slip platform obtains the step-length of a few nanometer, and step-length is with driving voltage continuously adjustabe.
Further, shown in ginseng Fig. 4, the drive singal in present embodiment is linear voltage from a to b, be non-linear voltage, and non-linear voltage successively decreases with parabola from b to c.In other embodiments, non-linear voltage not necessarily parabolically type, the curve that can increase gradually for other rates of change, as successively decreased with circular arc.
As can be seen from the above technical solutions, the inertia stick-slip formula that the utility model provides has following beneficial effect across yardstick precision movement platform:
Due to piezoelectric ceramic, to have response characteristic good, without electromagnetic interference, control precision is high, and forward and reverse movement velocity is equal feature mutually, designs the driving mechanism utilizing the rapid deformation of piezoelectric element to produce inertial impact force, by the design of Circuits System, export Asymmetric Electric signal, make piezoelectric element can produce rapid elongation, slowly retract, or slowly extend, the forms of motion of fast retractile, under the effect of alternating electric signal, driving mechanism produces bidirectional-movement macroscopically.Under the prerequisite of this motion principle, have devised Mass adjust-ment mechanism, normal pressure adjusting mechanism and piezoelectric ceramic can be changed easily, carry out regulating parameter with this and realize inertia stick-slip formula and export across the optimization of yardstick precision movement platform;
Platform of the present utility model is convenient to processing and assembling, and then effectively improve the output performance of stick-slip driving across yardstick precision movement platform, simply effectively can guarantee that stick-slip drives across the kinematic accuracy of yardstick precision movement platform and consistency, be applicable to batch productionization, be highly suitable for and apply as micro-nano operation, micro robot, biological microoperation, digital product and precision actuation system etc. have in every field that is structure formed, positioning requirements with a wide range of precise.
To those skilled in the art, obvious the utility model is not limited to the details of above-mentioned one exemplary embodiment, and when not deviating from spirit of the present utility model or essential characteristic, can realize the utility model in other specific forms.Therefore, no matter from which point, all should embodiment be regarded as exemplary, and be nonrestrictive, scope of the present utility model is limited by claims instead of above-mentioned explanation, and all changes be therefore intended in the implication of the equivalency by dropping on claim and scope are included in the utility model.Any Reference numeral in claim should be considered as the claim involved by limiting.
In addition, be to be understood that, although this specification is described according to execution mode, but not each execution mode only comprises an independently technical scheme, this narrating mode of specification is only for clarity sake, those skilled in the art should by specification integrally, and the technical scheme in each embodiment also through appropriately combined, can form other execution modes that it will be appreciated by those skilled in the art that.

Claims (8)

1. the inertia stick-slip formula realizing bidirectional-movement is across yardstick precision movement platform, it is characterized in that, two motion module that described platform comprises base plate, the supporting module be positioned on base plate, symmetry are installed on supporting module both sides, each described motion module comprises balancing weight, piezoelectric actuator and parenchyma gauge block, described piezoelectric actuator comprises positive pole and negative pole, piezoelectric actuator positive pole and negative pole are used for being connected with drive singal, described drive singal is the combination of linear voltage and non-linear voltage, and wherein the rate of change of non-linear voltage increases gradually.
2. according to claim 1ly it is characterized in that across yardstick precision movement platform, described balancing weight at least comprises the first balancing weight and the second balancing weight, and described first balancing weight and the second balancing weight are different materials and thickness.
3. according to claim 1ly to it is characterized in that across yardstick precision movement platform, inertia contiguous block is installed between described balancing weight and piezoelectric actuator, between described parenchyma gauge block and piezoelectric actuator, the first nut is installed.
4. according to claim 1 across yardstick precision movement platform, it is characterized in that, the hold down gag that described supporting module comprises the lower lock block be fixedly installed on base plate, is positioned at the upper holder block above lower lock block and is positioned at above upper holder block, on described upper holder block and lower lock block, correspondence is provided with groove.
5. according to claim 4 across yardstick precision movement platform, it is characterized in that, described hold down gag comprises and is arranged at the spring bearer plate above upper holder block, the Compress Spring between spring bearer plate and upper holder block and compressor arm and the second nut for be fixed and clamped bar and spring bearer plate.
6. according to claim 4 across yardstick precision movement platform, it is characterized in that, be connected between described motion module by optical axis, described optical axis cross section is circular, optical axis is installed in the groove between upper holder block and lower lock block, and described optical axis and upper holder block and lower lock block are linear contact lay.
7. according to claim 6ly it is characterized in that across yardstick precision movement platform, in described motion module, the arranged outside of parenchyma gauge block has the 3rd nut, and described motion module is fixedly mounted by the 3rd nut and optical axis.
8. according to claim 4ly it is characterized in that across yardstick precision movement platform, the two ends correspondence of described upper holder block is provided with pretension jackscrew.
CN201420744493.5U 2014-12-01 2014-12-01 A kind of inertia stick-slip formula realizing bidirectional-movement is across yardstick precision movement platform Expired - Fee Related CN204481717U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104362890A (en) * 2014-12-01 2015-02-18 苏州大学 Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement
CN105867299A (en) * 2016-03-25 2016-08-17 江苏科技大学 Pneumatic-type two-dimensional micro-displacement platform

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104362890A (en) * 2014-12-01 2015-02-18 苏州大学 Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement
CN104362890B (en) * 2014-12-01 2017-01-18 苏州大学 Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement
CN105867299A (en) * 2016-03-25 2016-08-17 江苏科技大学 Pneumatic-type two-dimensional micro-displacement platform

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