CN107834896A - Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance - Google Patents
Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance Download PDFInfo
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- CN107834896A CN107834896A CN201711417199.8A CN201711417199A CN107834896A CN 107834896 A CN107834896 A CN 107834896A CN 201711417199 A CN201711417199 A CN 201711417199A CN 107834896 A CN107834896 A CN 107834896A
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- 230000003071 parasitic effect Effects 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 20
- 230000033001 locomotion Effects 0.000 claims abstract description 25
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 25
- 230000008859 change Effects 0.000 claims abstract description 14
- 230000033228 biological regulation Effects 0.000 claims abstract description 12
- 230000000694 effects Effects 0.000 claims abstract description 11
- 230000008569 process Effects 0.000 claims abstract description 9
- 239000011888 foil Substances 0.000 claims description 26
- 230000001105 regulatory effect Effects 0.000 claims description 20
- 108091000080 Phosphotransferase Proteins 0.000 claims description 18
- 102000020233 phosphotransferase Human genes 0.000 claims description 18
- 210000000078 claw Anatomy 0.000 claims description 4
- 230000002708 enhancing effect Effects 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000010276 construction Methods 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 2
- 230000001629 suppression Effects 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 241000256247 Spodoptera exigua Species 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
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- 238000005265 energy consumption Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
Abstract
The present invention relates to the apparatus and method that a kind of pre- frictional force regulates and controls parasitic principle piezoelectric actuator output performance, belong to precision optical machinery field.Device includes pedestal, driver element, pre- frictional force regulation and control unit, and driver element is connected by gripper cushion block with pedestal, and pre- frictional force regulation and control unit is connected by friction pad with pedestal.By adjusting pre-loading screw, change frictional force when mover moves, so as to regulate and control to parasitic principle piezoelectric actuator output performance, realize the double effectses for improving self-locking performance of the piezoelectric actuator when driving voltage is zero and the rollback phenomenon in suppression motion process.Advantage is:It is simple in construction, control it is convenient, self-locking performance of the piezoelectric actuator when driving voltage is zero can both have been strengthened by pre- frictional force, the rollback phenomenon in motion process can effectively be suppressed again, so as to lift the output performance of piezoelectric actuator, strengthen its application in fields such as Ultra-precision Turning, assembling, Technology of Precision Measurement, precision optics, biomedical engineerings.
Description
Technical field
The present invention relates to precision optical machinery field, more particularly to a kind of pre- frictional force regulates and controls parasitic principle piezoelectric actuator output
The apparatus and method of performance.To in precision positioning, Precision Machining, accurate clamping, micro- behaviour by way of applying pre- frictional force
The output performance for the piezoelectric actuator that the fields such as work are widely used carries out Effective Regulation, reduces or even eliminates its rollback and moves simultaneously
Strengthen its self-locking performance, to extend its application field and applicable situation.
Background technology
Piezoelectric actuator is due to advantages such as positioning precision high, frequency response is fast, energy consumption is low, in light weight, small volumes, in precision
Machinery plays an increasingly important role with fields such as nanometer technologies, is widely used in Ultra-precision Turning, assembling, accurate measurement skill
Among many front line science fields such as art, precision optics, biomedical engineering.
At present, several typical driving principles such as the bionical driving of looper, stick-slip driving, inertial drive, hunt effect driving
It is applied to develop the piezoelectric actuator with big stroke fan-out capability.Wherein, stick-slip, inertia, parasitic principle piezoelectric actuator
For Inchworm type piezoelectric actuator, have it is simple in construction, process and assemble is easy, control system is simple, stepping rate is fast
Etc. advantage, therefore there is boundless application prospect, but its displacement curve of output often has phenomena such as non-linear, to retract
And self-locking performance of driving voltage when being zero it is poor the problems such as, have impact on its output performance and applicable situation, and fixed for its precision
Position and control bring difficulty.Such as document《Stick-slip formula inertial piezoelectric precision driver design analysis and experimental study》Propose one
Kind of stick-slip inertia-type piezoelectric actuator new construction, devises closed-loop control system, and confirms that the driver can be with by experiment
The positioning of degree of precision is completed, but more serious return can be produced from displacement curve figure it can be found that during driving
Motion is moved back, and the driver does not have particular design in terms of self-locking performance, it is difficult to ensure that by external force during driving
When kinetic stability, these two aspects can to such high-precision driver use and control has a negative impact.Document
《Modeling of piezoelectric-driven stick–slip actuators》One kind is devised based on stick-slip principle
Linear actuator, the design more can be accurately driven, but be designed in terms of being short of self-locking, and also may be used from experimental result
To find out the motion of the rollback of stick-slip formula piezoelectric actuator also clearly.Document《A novel driving principle by
means of the parasitic motion of the microgripper and its preliminary
application in the design of the linear actuator》Give a kind of novel parasitic motion principle
Piezoelectric actuator, higher positioning resolution is realized, but can also find out parasitic motion principle from its displacement curve of output
There is also more significantly rollback and non-linear phenomena, and self-locking performance is poor for piezoelectric actuator.It in summary it can be seen, stick-slip, be used to
Although the type of drive such as property, hunt effect have many advantages, such as compared to Inchworm type, problem in terms of self-locking performance be present, and
And rollback on displacement curve of output and non-linear phenomena are prevalent in the piezoelectric actuator of various principles.Therefore, how
Reduce, even eliminate rollback phenomenon in piezoelectric actuator motion process, improve piezoelectric actuator when driving voltage is zero
Self-locking performance, it is still a difficult point, and urgent need to solve the problem.
The content of the invention
It is an object of the invention to provide the device that a kind of pre- frictional force regulates and controls parasitic principle piezoelectric actuator output performance
With method, solves above mentioned problem existing for prior art, to adding in precision positioning, precision by way of applying pre- frictional force
The output performance for the piezoelectric actuator that the fields such as work, accurate clamping, micromanipulation are widely used carries out Effective Regulation, reduces very
To eliminating its rollback motion and strengthening its self-locking performance, to expand the application of piezoelectric actuator and field.
The above-mentioned purpose of the present invention is achieved through the following technical solutions:
Pre- frictional force regulates and controls the device of parasitic principle piezoelectric actuator output performance, including pedestal, driver element, pre- frictional force are adjusted
Unit is controlled, the driver element is connected by gripper cushion block 9 and screw with pedestal 1, and pre- frictional force regulation and control unit passes through friction pad
Block 2 is connected with pedestal 1.
Described driver element includes flexible hinge gripper 7, piezoelectric stack 8, gripper cushion block 9, guide rail 10, sliding block 11, dynamic
Son 12, the flexible hinge gripper 7 is connected by gripper cushion block 9 with pedestal 1, and gripper cushion block 9 is arranged on pedestal 1 by screw
On, piezoelectric stack 8 is arranged on using tight fit mode in the groove of flexible hinge gripper 7, and guide rail 10 is connected by sunk screw
On pedestal 1, mover 12 is connected by screw in the upper end of sliding block 11, is done by sliding block 11 on guide rail 10xThe shifting of direction of principal axis
It is dynamic.
Described pre- frictional force regulation and control unit is divided into left and right two parts composition, and two parts composition is identical, including friction
Cushion block 2, flexible hinge depression bar 3, locating rod 4, pre-loading screw 5, foil gauge group 6, left foil gauge Signal-regulated kinase 13, right strain
Piece Signal-regulated kinase 14, data collecting card 15, industrial computer and display 16, the flexible hinge depression bar 3, locating rod 4 pass through
Screw is arranged in friction pad 2 and is connected with pedestal 1, and flexible hinge depression bar 3 and the gap of locating rod 4 are 3mm;Pre-loading screw
5 are arranged in locating rod 4, and afterbody is in contact with flexible hinge depression bar 3, change flexible hinge depression bar 3 by twisting pre-loading screw 5
To the pressure of the mover 12 of driver element, and then change frictional force when mover 12 moves;Foil gauge group 6 is pasted onto flexible hinge
At the front end groove weak link of depression bar 3, data collecting card 15 and left foil gauge Signal-regulated kinase 13 and right foil gauge signal
Conditioning module 14 is connected by wire, and the analog signal output it is converted into digital signal acquiring to industrial computer and display
16。
Another object of the present invention is to provide a kind of pre- frictional force to regulate and control parasitic principle piezoelectric actuator output performance
Method, comprise the following steps:
a)Piezoelectric stack 8 is arranged in the groove of flexible hinge gripper 7 using tight fit mode, flexible hinge gripper 7 with
After the chuck of mover 12 is worked good, flexible hinge gripper 7 is arranged on to the upper end of gripper cushion block 9 by screw, by data acquisition
Card 15 passes through with left foil gauge Signal-regulated kinase 13 and right foil gauge Signal-regulated kinase 14 and industrial computer and display 16
Wire connects;
b)Pre-loading screw 5 is adjusted, observes the registration of industrial computer and display 16, makes the flexible hinge depression bar 3 of the left and right sides to dynamic
The application pressure of son 12, so as to which when flexible hinge gripper 7 pulls mover 12 to move, the flexible hinge depression bar 3 of the left and right sides is with moving
The frictional force for hindering mover 12 to move can be produced between son 12;
c)Piezoelectric stack 8 is given to apply driving voltage, due to inverse piezoelectric effect, now piezoelectric stack 8 is extended, and driving flexible hinge is grabbed
Pawl 7 is deformed so that the claw of flexible hinge gripper 7 contacts with the chuck of mover 12, under parasitic motion principle, pulls mover
12 move along guide rail 10;In drawing process, due to the presence of frictional force, mover 12 is set to drive electricity in piezoelectric stack 8
Self-locking performance when pressure is zero has great enhancing, and the rollback motion intrinsic to parasitic principle piezoelectric actuator produces significantly
The suppression of degree, the self-locking performance of parasitic principle piezoelectric actuator and the double effectses of kinematic accuracy are improved so as to realize;
d)By adjusting pre-loading screw 5, change the pressure that the flexible hinge depression bar 3 of the left and right sides applies to mover 12, that is, change
Frictional force when mover moves, so as to be regulated and controled by frictional force to parasitic principle piezoelectric actuator output performance.
The beneficial effects of the present invention are:It is simple in construction, control is convenient, loaded by pre- frictional force provided by the invention,
Regulation device and method, self-locking performance of the piezoelectric actuator when driving voltage is zero can be strengthened, and greatly reduced even
The intrinsic rollback motion of parasitic principle piezoelectric actuator is eliminated, realizes and improves the dual of piezoelectric actuator self-locking performance and kinematic accuracy
Effect, and then it is extended in many forward positions such as Ultra-precision Turning, assembling, Technology of Precision Measurement, precision optics, biomedical engineering
Application in scientific domain.The expansible piezoelectric actuator for being applied to other principles of apparatus and method provided by the invention, it is applicable
Scope is wide, practical.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, forms the part of the application, this hair
Bright illustrative example and its illustrate to be used to explain the present invention, do not form inappropriate limitation of the present invention.
Fig. 1 is that the pre- frictional force of the present invention regulates and controls the apparatus structure schematic diagram of parasitic principle piezoelectric actuator output performance;
Fig. 2 is the flexible hinge gripper schematic top plan view of the present invention;
Fig. 3 is the flexible hinge gripper deformation principle figure of the present invention;
Fig. 4 is that the pre- frictional force of the present invention regulates and controls the fundamental diagram of unit;
Fig. 5 is the data sampling and processing and display schematic diagram of the present invention.
In figure:1st, pedestal;2nd, friction pad;3rd, flexible hinge depression bar;4th, locating rod;5th, pre-loading screw;6th, foil gauge group;
7th, flexible hinge gripper;8th, piezoelectric stack;9th, gripper cushion block;10th, guide rail;11st, sliding block;12nd, mover;13rd, left foil gauge signal
Conditioning module;14th, right foil gauge Signal-regulated kinase;15th, data collecting card;16th, industrial computer and display.
Embodiment
The detailed content and its embodiment of the present invention is further illustrated below in conjunction with the accompanying drawings.
Referring to shown in Fig. 1 to Fig. 5, pre- frictional force of the invention regulates and controls the device of parasitic principle piezoelectric actuator output performance
And method, solve the problems, such as parasitic principle piezoelectric actuator by pre- frictional force in terms of retracting with self-locking performance, to improve it
Output performance, extend its application and field.It is simple in construction, control it is convenient, can both have been strengthened by pre- frictional force piezoelectricity drive
Dynamic self-locking performance of the device when driving voltage is zero, can effectively suppress the rollback phenomenon in motion process, so as to lift piezoelectricity again
The output performance of driver, strengthen it in Ultra-precision Turning, assembling, Technology of Precision Measurement, precision optics, biomedical engineering etc.
The application in field.The pre- frictional force regulates and controls the device of parasitic principle piezoelectric actuator output performance, including pedestal, driving list
First, pre- frictional force regulates and controls unit, and the driver element is connected by gripper cushion block 9 and screw with pedestal 1, and pre- frictional force regulation and control are single
Member is connected by friction pad 2 with pedestal 1.
Described driver element mainly includes flexible hinge gripper 7, piezoelectric stack 8, gripper cushion block 9, guide rail 10, sliding block
11st, mover 12, the flexible hinge gripper 7 are connected by gripper cushion block 9 with pedestal 1, and gripper cushion block 9 is arranged on by screw
On pedestal 1, piezoelectric stack 8 is arranged on using tight fit mode in the groove of flexible hinge gripper 7, and guide rail 10 passes through sunk screw
It is connected on pedestal 1, mover 12 is connected by screw in the upper end of sliding block 11, can be done by sliding block 11 on guide rail 10xAxle side
To movement.
Described pre- frictional force regulation and control unit is divided into left and right two parts composition, and two parts composition is identical, mainly includes
Friction pad 2, flexible hinge depression bar 3, locating rod 4, pre-loading screw 5, foil gauge group 6, left foil gauge Signal-regulated kinase 13, the right side
Foil gauge Signal-regulated kinase 14, data collecting card 15, industrial computer and display 16, the flexible hinge depression bar 3, locating rod 4
It is arranged in friction pad 2 by screw and is connected with pedestal 1, flexible hinge depression bar 3 and the gap of locating rod 4 is 3mm, pretension
Screw 5 is arranged in locating rod 4, and afterbody is in contact with flexible hinge depression bar 3, so as to be changed by twisting pre-loading screw 5
Become pressure of the flexible hinge depression bar 3 to mover 12, and then change frictional force when mover 12 moves, foil gauge group 6 passes through 502 glue
It is pasted onto at the front end groove weak link of flexible hinge depression bar 3, data collecting card 15 and left foil gauge Signal-regulated kinase 13
Connected with right foil gauge Signal-regulated kinase 14 by wire, the analog signal output it is converted into digital signal acquiring to work
Control machine and display 16.
Referring to shown in Fig. 3 to Fig. 5, pre- frictional force of the invention regulates and controls parasitic principle piezoelectric actuator output performance
Method, by adjusting pre-loading screw, change the pressure that left and right flexible hinge depression bar applies to mover, that is, change when mover moves
Frictional force, so as to be regulated and controled by frictional force to parasitic principle piezoelectric actuator output performance, realize and improve Piezoelectric Driving
Self-locking performance of the device when driving voltage is zero and the double effectses for suppressing the rollback phenomenon in motion process.Comprise the following steps that:
a)Piezoelectric stack 8 is arranged in the groove of flexible hinge gripper 7 using tight fit mode, flexible hinge gripper 7 with
After the chuck of mover 12 is worked good, flexible hinge gripper 7 is arranged on to the upper end of gripper cushion block 9 by screw, by data acquisition
Card 15 passes through with left foil gauge Signal-regulated kinase 13 and right foil gauge Signal-regulated kinase 14 and industrial computer and display 16
Wire connects;
b)Pre-loading screw 5 is adjusted, the flexible hinge depression bar 3 of the left and right sides is under pressure FLD, observe industrial computer and display 16
Registration, make the left and right sides flexible hinge depression bar 3 apply appropriate pressure F to mover 12N(Such as 2N), so as in flexible hinge
When gripper 7 pulls the motion of mover 12, it can be produced between the flexible hinge depression bar 3 and mover 12 of the left and right sides and hinder mover 12 to move
Frictional forcef N;
c)Apply driving voltage to piezoelectric stack 8, due to inverse piezoelectric effect, the now elongation of piezoelectric stack 8 produces displacementx pzt, drive
Dynamic flexible hinge gripper 7 is deformed, and amplifies by two-layer configuration and the claw A of flexible hinge gripper 7 is producedxDirection displacementx a
WithyDirection displacementy a, so that the claw of flexible hinge gripper 7 contacts with the chuck of mover 12, under parasitic motion principle, pull
Mover 12 moves along guide rail 10.In drawing process, due to the presence of frictional force, mover 12 is set to be driven in piezoelectric stack 8
Self-locking performance when dynamic voltage is zero has great enhancing, and the intrinsic rollback of parasitic principle piezoelectric actuator is moved and produced
Significantly suppress, the self-locking performance of parasitic principle piezoelectric actuator and the double effectses of kinematic accuracy are improved so as to realize.
d)By adjusting pre-loading screw 5, change the pressure that the flexible hinge depression bar 3 of the left and right sides applies to mover 12, i.e.,
Change frictional force during mover motion, so as to regulate and control by frictional force to parasitic principle piezoelectric actuator output performance.
The preferred embodiment of the present invention is the foregoing is only, is not intended to limit the invention, for the technology of this area
For personnel, the present invention can have various modifications and variations.All any modification, equivalent substitution and improvements made for the present invention etc.,
It should be included in the scope of the protection.
Claims (4)
1. a kind of pre- frictional force regulates and controls the device of parasitic principle piezoelectric actuator output performance, it is characterised in that:Including pedestal, drive
Moving cell, pre- frictional force regulation and control unit, the driver element pass through gripper cushion block(9)And screw and pedestal(1)Connection, pre- friction
Power regulation and control unit passes through friction pad(2)With pedestal(1)Connection.
2. pre- frictional force according to claim 1 regulates and controls the device of parasitic principle piezoelectric actuator output performance, its feature
It is:Described driver element includes flexible hinge gripper(7), piezoelectric stack(8), gripper cushion block(9), guide rail(10), sliding block
(11), mover(12), the flexible hinge gripper(7)Pass through gripper cushion block(9)With pedestal(1)It is connected, gripper cushion block(9)It is logical
Cross screw and be arranged on pedestal(1)On, piezoelectric stack(8)Flexible hinge gripper is arranged on using tight fit mode(7)Groove in,
Guide rail(10)Pedestal is connected to by sunk screw(1)On, mover(12)It is connected by screw in sliding block(11)Upper end, pass through
Sliding block(11)In guide rail(10)On doxThe movement of direction of principal axis.
3. pre- frictional force according to claim 1 regulates and controls the device of parasitic principle piezoelectric actuator output performance, its feature
It is:Described pre- frictional force regulation and control unit is divided into left and right two parts composition, and two parts composition is identical, including friction pad
Block(2), flexible hinge depression bar(3), locating rod(4), pre-loading screw(5), foil gauge group(6), left foil gauge Signal-regulated kinase
(13), right foil gauge Signal-regulated kinase(14), data collecting card(15), industrial computer and display(16), the flexible hinge
Depression bar(3), locating rod(4)Friction pad is arranged on by screw(2)Upper and and pedestal(1)It is connected, flexible hinge depression bar(3)
With locating rod(4)Gap is 3mm;Pre-loading screw(5)Installed in locating rod(4)On, afterbody and flexible hinge depression bar(3)Connect
Touch, by twisting pre-loading screw(5)Change flexible hinge depression bar(3)To the mover of driver element(12)Pressure, and then change
Mover(12)Frictional force during motion;Foil gauge group(6)It is pasted onto flexible hinge depression bar(3)Front end groove weak link at,
Data collecting card(15)With left foil gauge Signal-regulated kinase(13)With right foil gauge Signal-regulated kinase(14)Connected by wire
Connect, the analog signal output it is converted into digital signal acquiring to industrial computer and display(16).
4. a kind of method that pre- frictional force regulates and controls parasitic principle piezoelectric actuator output performance, it is characterised in that:Including following step
Suddenly:
a)By piezoelectric stack(8)Flexible hinge gripper is arranged on using tight fit mode(7)Groove in, in flexible hinge gripper
(7)With mover(12)After chuck is worked good, by flexible hinge gripper(7)Gripper cushion block is arranged on by screw(9)Upper end,
By data collecting card(15)With left foil gauge Signal-regulated kinase(13)With right foil gauge Signal-regulated kinase(14)And industry control
Machine and display(16)Connected by wire;
b)Adjust pre-loading screw(5), observe industrial computer and display(16)Registration, make the left and right sides flexible hinge depression bar
(3)To mover(12)Apply pressure, so as in flexible hinge gripper(7)Pull mover(12)During motion, the flexibility of the left and right sides
Hinge depression bar(3)With mover(12)Between can produce obstruction mover(12)The frictional force of motion;
c)To piezoelectric stack(8)Apply driving voltage, due to inverse piezoelectric effect, now piezoelectric stack(8)Elongation, drive flexible hinge
Chain gripper(7)It is deformed so that flexible hinge gripper(7)Claw and mover(12)Chuck contact, in parasitic motion principle
Under, pull mover(12)Along guide rail(10)Move;In drawing process, due to the presence of frictional force, make mover(12)
In piezoelectric stack(8)Self-locking performance when driving voltage is zero has great enhancing, and parasitic principle piezoelectric actuator is consolidated
Some rollback motions, which produce, significantly to be suppressed, so as to realize the self-locking performance and kinematic accuracy that improve parasitic principle piezoelectric actuator
Double effectses;
d)By adjusting pre-loading screw(5), change the left and right sides flexible hinge depression bar(3)To mover(12)The pressure of application,
Change frictional force during mover motion, so as to be adjusted by frictional force to parasitic principle piezoelectric actuator output performance
Control.
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CN108418465B (en) * | 2018-05-14 | 2024-02-27 | 西安科技大学 | Submicron-level precise flexible micro-motion system |
CN109217717A (en) * | 2018-09-26 | 2019-01-15 | 吉林大学 | Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement |
CN109217717B (en) * | 2018-09-26 | 2023-08-29 | 吉林大学 | Device and method for restraining rollback movement of parasitic piezoelectric driver by arc-shaped structure hinge |
CN111614284A (en) * | 2020-06-19 | 2020-09-01 | 吉林大学 | Force control device and method for inhibiting rollback motion of stick-slip piezoelectric actuator |
CN111614284B (en) * | 2020-06-19 | 2024-04-02 | 吉林大学 | Force control device and method for inhibiting rollback movement of stick-slip piezoelectric driver |
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