CN203632576U - Up and down pretightening stick-slip driving cross-scale precise movement platform - Google Patents
Up and down pretightening stick-slip driving cross-scale precise movement platform Download PDFInfo
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- CN203632576U CN203632576U CN201320765184.1U CN201320765184U CN203632576U CN 203632576 U CN203632576 U CN 203632576U CN 201320765184 U CN201320765184 U CN 201320765184U CN 203632576 U CN203632576 U CN 203632576U
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Abstract
The utility model discloses an up and down pretightening stick-slip driving cross-scale precise movement platform. The up and down pretightening stick-slip driving cross-scale precise movement platform comprises a classis, a pedestal, a friction oscillator, an oscillator driving source and a sliding block. A pretightening force adjusting mechanism for providing a pretightening force is arranged between the sliding block and the chassis, and comprises an adjusting screw for providing the pretightening force, and the adjusting screw penetrates the sliding block and the pedestal to be connected with the chassis. By adjusting the threaded joint length of the adjusting screw and the chassis, the pretightening force can be adjusted. The up and down pretightening stick-slip driving cross-scale precise movement platform of the utility model enables the mode for adjusting the pretightening force of the movement platform to be simplified greatly, is convenient to process and assemble, and further enables the output performance of the stick-slip driving cross-scale precise movement platform to be improved effectively. The up and down pretightening stick-slip driving cross-scale precise movement platform can guarantee the movement precision and consistency of the stick-slip driving cross-scale precise movement platform simply and effectively, and is suitable for batch production.
Description
Technical field
The utility model belongs to precise motion technical field, has been specifically related to a kind of bottom prefastening stick-slip and has driven across yardstick precision movement platform.
Background technology
Have nanoscale Motion Resolution rate, what have again grade movement travel is the key technology in current micro-driving field across yardstick precise motion technology.Due to stick-slip drive simple, convenient across the drive principle of yardstick motion type of drive with respect to other classes, control simple, and have that range of movement is large, resolution is high, simple in structure, easy microminiaturization and the accurate advantage such as location, therefore stick-slip drive be occur at present across applying more a kind of mode in yardstick driving.The operation principle that stick-slip drives is mainly using frictional force as drive source, utilize stick-slip effect to realize the minute movement of driven member, particularly, the difference between the sound frictional force that the asymmetric vibration of driven member dependence saw-tooth voltage excitation piezoelectric vibrator forms finally realizes across yardstick precise motion.And in stick-slip drives, the pretension adjustment of frictional force is the key link particularly wherein.
At present according to the difference of the pre-pressing structure of frictional force and the mode of adjustment, stick-slip drives and mainly contains permanent magnetism prefastening stick-slip across yardstick precision movement platform and drive across yardstick precision movement platform, mechanical tolerance formula stick-slip and drive and drive across yardstick precision movement platform across yardstick precision movement platform and upper and lower spring pre-tightening type stick-slip etc.Wherein, permanent magnetism prefastening stick-slip drives across yardstick precision movement platform, it is WO2004077584A1 that relevant public technology has publication number, the patents such as US2005284817A1, its operation principle is mainly to utilize three piezoelectric crystal driving legs to carry out the support of motion platform, rely on bicylindrical body mode arranged side by side to lead, the adjustment of the pretightning force that wherein rubs mainly relies on permanent magnet is installed on pedestal, and movement output platform adopts magnet material equally, by the magnetic attraction between magnet, the motion of piezoelectric crystal driving leg is passed to motion platform, thereby realizing stick-slip drives across yardstick precise motion.Wherein, mechanical tolerance formula stick-slip drives across yardstick precision movement platform, it is WO2008/052785A1 that relevant public technology has publication number, WO2007/022764A1, the patents such as DE102006052175A1, its operation principle is mainly the pretension that utilizes friction vibrator and coordinated to realize frictional force by the mechanical tolerance between driving platform, conventionally do not have extra frictional force adjusting mechanism in friction vibrator and between by driving platform, its mating surface had both been realized the transmission of friction, also realize guiding, the realization of its frictional force is mainly to rely on the adjustment of rubbing surface medium and the adjustment of mechanical fit tolerance, realize the motion of friction vibrator is passed to motion platform.And upper and lower spring pre-tightening type stick-slip drives across yardstick precision movement platform, it is WO2009043421A1 that relevant public technology has publication number or the patent No., US6940210B2, US7579752B2, the patents such as US20080148589A1, its operation principle is mainly that motion platform is divided into upper and lower two parts, realize the adjustment of frictional force between top and the bottom and friction vibrator by tension spring, tension spring carries out the adjustment of pretightning force by helicitic texture, guiding is to rely on rhombus rubbing surface to realize, the adjusting range of its friction pretightning force is less, the fine difference of more difficult adaptation frictional interface.
Although it is different in the pre-pressing structure of frictional force and adjustment mode that above-mentioned three kinds of stick-slips drive across yardstick precision movement platform, but the pre-pressing structure that its common ground is frictional force and adjustment mode are all crossed as complicated with arranging, all can cause the frictional force of contact interface between stick-slip friction vibrator and motion platform to adjust limited, frictional force adjusting range is less, requirement on machining accuracy to frictional interface is higher, and then cause stick-slip to drive processing and the assembly precision of platform to have relatively high expectations, final impact is across kinematic accuracy and the consistency of yardstick precision movement platform, therefore in the consistency of these prior aries in the time guaranteeing across the mass production of yardstick precision movement platform, there is complex manufacturing technology and a manufacturing cost high-technology difficult problem.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of bottom prefastening stick-slip to drive across yardstick precision movement platform, greatly simplify the adjustment mode of motion platform pretightning force, be convenient to processing and assembling, and then effectively improve stick-slip and driven the output performance across yardstick precision movement platform, can simply effectively guarantee that stick-slip drives kinematic accuracy and the consistency across yardstick precision movement platform, is applicable to batch productionization.
To achieve these goals, the technical scheme that the utility model provides is as follows:
A kind of upper and lower prefastening stick-slip drives across yardstick precision movement platform, comprises,
Chassis;
Pedestal, described pedestal is arranged at top, described chassis;
Friction vibrator, described friction vibrator is arranged on described pedestal;
Oscillator drive source, between the friction vibrator described in described oscillator drive source is arranged on and described pedestal, provides actuating force to friction vibrator;
Slide block, is arranged at described friction vibrator top, and is in contact with one another generation frictional force with friction vibrator;
Between described slide block and described chassis, be provided with and provide the pretightning force of pretightning force to adjust structure, described pretightning force adjustment structure comprises provides the adjustment of described pretightning force screw, described adjustment screw runs through described slide block and is connected with described pedestal and with described chassis, by regulating the length that is threadedly engaged with on described adjustment screw and described chassis, can regulate described pretightning force size.
Preferably, the quantity of described adjustment screw is two, and centered by described friction vibrator, is arranged at respectively the both sides of described motion platform.
Preferably, described chassis is S type flexible chassis, the cross section of described S type flexible chassis is spill, the two ends of described S type flexible chassis project upwards formation flank, on described flank, be respectively arranged with screwed hole, platform between described two flanks forms the contact-making surface contacting with described pedestal, between described platform and described two flanks, is respectively arranged with S type flexible hinge.
Preferably, described friction vibrator is flexible hinge structure.
Preferably, described flexible hinge structure comprises the parallel-plate flexible hinge being fixedly mounted on described pedestal, between described parallel-plate flexible hinge, has crossbeam portion.
Preferably, described oscillator drive source comprises and stacks type piezoelectric ceramic and driving power, described in stack type piezoelectric ceramic and be electrically connected with driving power by wire.
Preferably, described in stack type piezoelectric ceramic one end and be fixedly mounted on described pedestal by pre-load nut, the other end contacts with described friction vibrator.
Preferably, the cross section of described slide block is ∏ shape, and the both sides of described slide block are protruded downwards and formed two guiding flanks, and described guiding flank is provided with the through hole of adjusting screw for installing.
The utility model proposes to arrange between slider bottom and pedestal provides the pretightning force of pretightning force to adjust structure, slide block and friction vibrator produce frictional force simultaneously, this pretightning force is adjusted structure by slide block being applied to adjustable pretightning force at slider bottom, can realize the adjustment to frictional force between slide block and friction vibrator, make to produce stick-slip effect between slide block and friction vibrator, make the friction vibrator actuating force that is sawtooth waveforms shape with the relation curve time that be subject to pass to slide block by the change in friction force after adjusting, finally realizing slide block does across yardstick precise motion, therefore the utility model has greatly been simplified the adjustment mode of motion platform pretightning force, and adjusting range is large, can not be restricted, and then effectively improved stick-slip drive comprise the output performance as kinematic accuracy across yardstick precision movement platform, can effectively guarantee that stick-slip drives kinematic accuracy and the consistency across yardstick precision movement platform, be applicable to batch productionization,
On the basis of the above, the utility model further optimally, pretightning force of the present utility model is adjusted structure and is adopted adjustment screw to adjust pretightning force size, and then the adjustment of realization to frictional force size between slide block and friction vibrator, make motion platform can not change the variation that causes frictional force owing to being subject to loading slider, further optimally, coordinate S type flexible chassis, not only simple in structure, be convenient to processing and assembling, and, the variation that can avoid on the one hand producing friction with supplemental support and cause frictional force in the direction of motion, in the direction of motion, adopt on the other hand rigidity to coordinate and avoid hysterisis error, further optimally, the utility model proposes the friction vibrator being formed by parallel-plate flexible hinge and crossbeam portion, wherein parallel-plate flexible hinge can play guiding and the auxiliary effect of replying to crossbeam portion, and under the protection of flexible hinge, motion platform only completes along moving on stick-slip driving direction, and has avoided any motion perpendicular to the direction of motion, and the destruction of external force, thereby can effectively improve the dynamic performance of whole platform, improve the dynamic response characteristic of platform,
Comprehensive above said content, the stick-slip of prefastening up and down that the utility model provides drives across yardstick precision movement platform, greatly simplify the adjustment mode of motion platform pretightning force, be convenient to processing and assembling, and then effectively improve stick-slip and driven the output performance across yardstick precision movement platform, can simply effectively guarantee that stick-slip drives kinematic accuracy and the consistency across yardstick precision movement platform, be applicable to batch productionization, be highly suitable for as micro-nano operation, micro robot, biological microoperation, digital product and accurate drive system etc. have structure mini, in the every field of positioning requirements, apply with a wide range of precise.
Brief description of the drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, the accompanying drawing the following describes is only some embodiment that record in the utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is that in the utility model embodiment, upper and lower prefastening stick-slip drives the cutaway view across yardstick precision movement platform;
Fig. 2 is A-A cutaway view in Fig. 1;
Fig. 3 is that in the utility model embodiment, upper and lower prefastening stick-slip drives the perspective view across the pedestal of yardstick precision movement platform;
Fig. 4 is that in the utility model embodiment, upper and lower prefastening stick-slip drives the cutaway view across the slide block of yardstick precision movement platform;
Fig. 5 is that in the utility model embodiment, upper and lower prefastening stick-slip drives the stereochemical structure signal across the chassis of yardstick precision movement platform.
Embodiment
The utility model embodiment discloses a kind of upper and lower prefastening stick-slip and has driven across yardstick precision movement platform, comprises,
Chassis;
Pedestal, described pedestal is arranged at top, described chassis;
Friction vibrator, described friction vibrator is arranged on described pedestal;
Oscillator drive source, between the friction vibrator described in described oscillator drive source is arranged on and described pedestal, provides actuating force to friction vibrator;
Slide block, is arranged at described friction vibrator top, and is in contact with one another generation frictional force with friction vibrator;
Between described slide block and described chassis, be provided with and provide the pretightning force of pretightning force to adjust structure, described pretightning force adjustment structure comprises provides the adjustment of described pretightning force screw, described adjustment screw runs through described slide block and is connected with described pedestal and with described chassis, by regulating the length that is threadedly engaged with on described adjustment screw and described chassis, can regulate described pretightning force size.
Preferably, the quantity of described adjustment screw is two, and centered by described friction vibrator, is arranged at respectively the both sides of described motion platform.
Preferably, described chassis is S type flexible chassis, the cross section of described S type flexible chassis is spill, the two ends of described S type flexible chassis project upwards formation flank, on described flank, be respectively arranged with screwed hole, platform between described two flanks forms the contact-making surface contacting with described pedestal, between described platform and described two flanks, is respectively arranged with S type flexible hinge.
Preferably, described friction vibrator is flexible hinge structure.
Preferably, described flexible hinge structure comprises the parallel-plate flexible hinge being fixedly mounted on described pedestal, between described parallel-plate flexible hinge, has crossbeam portion.
Preferably, described oscillator drive source comprises and stacks type piezoelectric ceramic and driving power, described in stack type piezoelectric ceramic and be electrically connected with driving power by wire.
Preferably, described in stack type piezoelectric ceramic one end and be fixedly mounted on described pedestal by pre-load nut, the other end contacts with described friction vibrator.
Preferably, the cross section of described slide block is ∏ shape, and the both sides of described slide block are protruded downwards and formed two guiding flanks, and described guiding flank is provided with the through hole of adjusting screw for installing.
The utility model proposes to arrange between slider bottom and pedestal provides the pretightning force of pretightning force to adjust structure, slide block and friction vibrator produce frictional force simultaneously, this pretightning force is adjusted structure by slide block being applied to adjustable pretightning force at slider bottom, can realize the adjustment to frictional force between slide block and friction vibrator, make to produce stick-slip effect between slide block and friction vibrator, make the friction vibrator actuating force that is sawtooth waveforms shape with the relation curve time that be subject to pass to slide block by the change in friction force after adjusting, finally realizing slide block does across yardstick precise motion, therefore the utility model has greatly been simplified the adjustment mode of motion platform pretightning force, and adjusting range is large, can not be restricted, and then effectively improved stick-slip drive comprise the output performance as kinematic accuracy across yardstick precision movement platform, can effectively guarantee that stick-slip drives kinematic accuracy and the consistency across yardstick precision movement platform, be applicable to batch productionization,
On the basis of the above, the utility model further optimally, pretightning force of the present utility model is adjusted structure and is adopted adjustment screw to adjust pretightning force size, and then the adjustment of realization to frictional force size between slide block and friction vibrator, make motion platform can not change the variation that causes frictional force owing to being subject to loading slider, further optimally, coordinate S type flexible chassis, not only simple in structure, be convenient to processing and assembling, and, the variation that can avoid on the one hand producing friction with supplemental support and cause frictional force in the direction of motion, in the direction of motion, adopt on the other hand rigidity to coordinate and avoid hysterisis error, further optimally, the utility model proposes the friction vibrator being formed by parallel-plate flexible hinge and crossbeam portion, wherein parallel-plate flexible hinge can play guiding and the auxiliary effect of replying to crossbeam portion, and under the protection of flexible hinge, motion platform only completes along moving on stick-slip driving direction, and has avoided any motion perpendicular to the direction of motion, and the destruction of external force, thereby can effectively improve the dynamic performance of whole platform, improve the dynamic response characteristic of platform,
Comprehensive above said content, the stick-slip of prefastening up and down that the utility model provides drives across yardstick precision movement platform, greatly simplify the adjustment mode of motion platform pretightning force, be convenient to processing and assembling, and then effectively improve stick-slip and driven the output performance across yardstick precision movement platform, can simply effectively guarantee that stick-slip drives kinematic accuracy and the consistency across yardstick precision movement platform, be applicable to batch productionization, be highly suitable for as micro-nano operation, micro robot, biological microoperation, digital product and accurate drive system etc. have structure mini, in the every field of positioning requirements, apply with a wide range of precise.
In order to make those skilled in the art person understand better the technical scheme in the utility model, below in conjunction with the accompanying drawing in the utility model embodiment, technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtaining under creative work prerequisite, all should belong to the scope of the utility model protection.
Refer to Fig. 1, the utility model embodiment discloses a kind of upper and lower prefastening stick-slip and has driven across yardstick precision movement platform, comprising:
Chassis 5; Pedestal 4, pedestal 4 is arranged at 5 tops, chassis, installs and transmission of power for the ease of structure, and preferably, in the present embodiment, pedestal 4 is set to frame-shaped construction;
Friction vibrator, is flexible hinge structure, specifically comprises parallel-plate flexible hinge 41a, the 41b of the inside casing face that is fixedly mounted on the pedestal 4 that is frame-shaped construction, between parallel-plate flexible hinge 41a, 41b, has crossbeam portion 43, please refer to Fig. 3;
Oscillator drive source, it is arranged between crossbeam portion 43 and pedestal 4, provides actuating force to crossbeam portion 43, and the relation curve of this actuating force and time is sawtooth waveforms shape; Particularly, in the present embodiment, as shown in Figure 2, oscillator drive source comprises and stacks type piezoelectric ceramic 6 and driving power (scheming not shown), stacking type piezoelectric ceramic 6 is electrically connected with driving power by wire (scheming not shown), stack type piezoelectric ceramic 6 one end and be fixedly mounted on pedestal 4 by pre-load nut 7, the other end contacts with crossbeam portion 43.Install and transmission of power for the ease of structure, an end of crossbeam portion 43 can arrange groove, stacks type piezoelectric ceramic 6 and is positioned at this groove.
Slide block 1, be arranged at the top of crossbeam portion 43, and be in contact with one another generation frictional force with crossbeam portion 43, wherein between slide block 1 and chassis 5, be provided with and provide the pretightning force of pretightning force to adjust structure, be used for adjusting frictional force size, between slide block 1 and crossbeam portion 43, produce stick-slip effect, slide block 1 does across yardstick precise motion.
Preferably, refer to Fig. 1, pretightning force adjustment structure comprises provides the adjustment of pretightning force screw 2, and adjustment screw 2 runs through slide block 1 and is connected with pedestal 4 and with chassis 5, adjusts the length that is threadedly engaged with on screw 2 and chassis 5 by adjusting, can regulate pretightning force size.
In the utility model preferred embodiment, the quantity of adjusting screw 2 is two, and these two adjustment screws 2 are arranged at respectively the both sides of motion platform centered by friction vibrator, so that the suffered frictional force in slide block 1 both sides is balanced.
As shown in Figure 5, chassis 5 is S type flexible chassis, the cross section of S type flexible chassis is spill, the two ends of S type flexible chassis project upwards and form flank 51, on flank 51, be respectively arranged with screwed hole 53, platform 52 between two flanks 51 forms the contact-making surface contacting with pedestal 4, between platform 52 and two flanks 51, is respectively arranged with S type flexible hinge 54.When installation, flank 51 and crossbeam portion 43 both sides matched in clearance realize the guiding of slide block 1 direction of motion; Platform 52 contacts with the lower surface of crossbeam portion 43, transmits the variation of frictional force.
As shown in Figure 4, the cross section of slide block 1 is ∏ shape, and the both sides of slide block 1 are protruded downwards and formed two guiding flanks 12, and guiding flank 12 is provided with for installing between 14, two guiding flanks 12 of through hole of adjusting screw 2 and forms platform 13.When installation, the end face of slide block 1 connects load and is driven sample, and guiding flank 12 and crossbeam portion 43 both sides matched in clearance realize the guiding of slide block 1 direction of motion, and platform 13 contacts with the upper surface of crossbeam portion 43, transmits the variation of frictional force; Through hole 14 is adjusted screw 2 for holding, and realizes matched in clearance with the polished rod part of adjusting screw 2, adopts this rigidity to coordinate the hysterisis error of effectively having avoided stick-slip.In addition, can preloading spring packing ring 3 be set in slide block 1 and the cooperation place of adjusting screw 2.
Preferably, in the present embodiment mode, pedestal 4 and slide block 1 adopt light density metal material to make, concrete as aluminium alloy or titanium alloy material; Stack type piezoelectric ceramic 6 and can adopt known standard part, specifically preferably, can select the hard piezoceramic material as types such as PZT5; The preferably heavy density metal material of pretension screw 7, as stainless steel, copper etc.; Adjust screw 2 and preloading spring packing ring 3 and can adopt known standard part.
The stick-slip of prefastening up and down that the utility model discloses drives across yardstick precision movement platform, stack type piezoelectric ceramic 6 under driving power effect, produce the actuating force that is sawtooth waveforms shape with the relation curve of time, the sawtooth waveforms that utilization stacks type piezoelectric ceramic 6 drives and encourages across the crossbeam portion 43 in yardstick precision movement platform pedestal 4 stick-slip, crossbeam portion 43 is subject to after this actuating force effect and stacks type piezoelectric ceramic 6 and synchronize and do the displacement movement that is sawtooth waveforms shape with the relation curve of time, in this displacement movement process, between crossbeam portion 43 and slide block 1, produce frictional force, pretightning force between slide block 1 and chassis 5 adjustment structure is adjusted at this frictional force in suitable scope simultaneously, particularly, by adjusting screwed hole 53 and the length that is threadedly engaged with of adjusting screw 2, realize the deflection of adjusting S type flexible hinge 54, the final slide block 1 that changes, frictional force between chassis 5 and crossbeam portion 43, make to produce stick-slip effect between slide block 1 and crossbeam portion 43, be that the actuating force that crossbeam portion 43 is subject to being sawtooth waveforms shape with the relation curve of time passes to slide block 1 by the change in friction force after adjusting, slide block 1 does the displacement movement that is sawtooth waveforms shape with the relation curve of time, realized slide block 1 across yardstick precise motion.
To those skilled in the art, obviously the utility model is not limited to the details of above-mentioned example embodiment, and in the situation that not deviating from spirit of the present utility model or essential characteristic, can realize the utility model with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present utility model is limited by claims instead of above-mentioned explanation, is therefore intended to all changes that drop in the implication and the scope that are equal to important document of claim to include in the utility model.Any Reference numeral in claim should be considered as limiting related claim.
In addition, be to be understood that, although this specification is described according to execution mode, but be not that each execution mode only comprises an independently technical scheme, this narrating mode of specification is only for clarity sake, those skilled in the art should make specification as a whole, and the technical scheme in each embodiment also can, through appropriately combined, form other execution modes that it will be appreciated by those skilled in the art that.
Claims (8)
1. upper and lower prefastening stick-slip drives across a yardstick precision movement platform, comprise,
Chassis;
Pedestal, described pedestal is arranged at top, described chassis;
Friction vibrator, described friction vibrator is arranged on described pedestal;
Oscillator drive source, between the friction vibrator described in described oscillator drive source is arranged on and described pedestal, provides actuating force to friction vibrator;
Slide block, is arranged at described friction vibrator top, and is in contact with one another generation frictional force with friction vibrator;
It is characterized in that:
Between described slide block and described chassis, be provided with and provide the pretightning force of pretightning force to adjust structure, described pretightning force adjustment structure comprises provides the adjustment of described pretightning force screw, described adjustment screw runs through described slide block and is connected with described pedestal and with described chassis, by regulating the length that is threadedly engaged with on described adjustment screw and described chassis, can regulate described pretightning force size.
2. upper and lower prefastening stick-slip as claimed in claim 1 drives across yardstick precision movement platform, it is characterized in that: the quantity of described adjustment screw is two, and centered by described friction vibrator, is arranged at respectively the both sides of described motion platform.
3. upper and lower prefastening stick-slip as claimed in claim 1 drives across yardstick precision movement platform, it is characterized in that: described chassis is S type flexible chassis, the cross section of described S type flexible chassis is spill, the two ends of described S type flexible chassis project upwards formation flank, on described flank, be respectively arranged with screwed hole, platform between described two flanks forms the contact-making surface contacting with described pedestal, between described platform and described two flanks, is respectively arranged with S type flexible hinge.
4. upper and lower prefastening stick-slip as claimed in claim 1 drives across yardstick precision movement platform, it is characterized in that: described friction vibrator is flexible hinge structure.
5. upper and lower prefastening stick-slip as claimed in claim 4 drives across yardstick precision movement platform, it is characterized in that: described flexible hinge structure comprises the parallel-plate flexible hinge being fixedly mounted on described pedestal, between described parallel-plate flexible hinge, there is crossbeam portion.
6. upper and lower prefastening stick-slip as claimed in claim 1 drives across yardstick precision movement platform, it is characterized in that: described oscillator drive source comprises and stack type piezoelectric ceramic and driving power, described in stack type piezoelectric ceramic and be electrically connected with driving power by wire.
7. upper and lower prefastening stick-slip as claimed in claim 6 drives across yardstick precision movement platform, it is characterized in that: described in stack type piezoelectric ceramic one end and be fixedly mounted on described pedestal by pre-load nut, the other end contacts with described friction vibrator.
8. upper and lower prefastening stick-slip as claimed in claim 1 drives across yardstick precision movement platform, it is characterized in that: the cross section of described slide block is ∏ shape, the both sides of described slide block are protruded downwards and are formed two guiding flanks, and described guiding flank is provided with the through hole of adjusting screw for installing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320765184.1U CN203632576U (en) | 2013-11-27 | 2013-11-27 | Up and down pretightening stick-slip driving cross-scale precise movement platform |
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| CN201320765184.1U CN203632576U (en) | 2013-11-27 | 2013-11-27 | Up and down pretightening stick-slip driving cross-scale precise movement platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103618473A (en) * | 2013-11-27 | 2014-03-05 | 苏州大学 | Vertical pre-tightening type stick-slip drive cross-scale precise motion platform |
| CN107834896A (en) * | 2017-12-25 | 2018-03-23 | 吉林大学 | Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance |
| CN110890850A (en) * | 2019-12-05 | 2020-03-17 | 松山湖材料实验室 | Nano-precision piezoelectric drive linear displacement platform |
-
2013
- 2013-11-27 CN CN201320765184.1U patent/CN203632576U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103618473A (en) * | 2013-11-27 | 2014-03-05 | 苏州大学 | Vertical pre-tightening type stick-slip drive cross-scale precise motion platform |
| CN103618473B (en) * | 2013-11-27 | 2016-08-17 | 苏州大学 | A kind of prefastening stick-slip up and down drives across yardstick precision movement platform |
| CN107834896A (en) * | 2017-12-25 | 2018-03-23 | 吉林大学 | Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance |
| CN110890850A (en) * | 2019-12-05 | 2020-03-17 | 松山湖材料实验室 | Nano-precision piezoelectric drive linear displacement platform |
| CN110890850B (en) * | 2019-12-05 | 2024-04-19 | 松山湖材料实验室 | Nanometer precision piezoelectric driving linear displacement table |
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