CN110890850B - Nanometer precision piezoelectric driving linear displacement table - Google Patents
Nanometer precision piezoelectric driving linear displacement table Download PDFInfo
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- CN110890850B CN110890850B CN201911235755.9A CN201911235755A CN110890850B CN 110890850 B CN110890850 B CN 110890850B CN 201911235755 A CN201911235755 A CN 201911235755A CN 110890850 B CN110890850 B CN 110890850B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 24
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a nanoscale precision piezoelectric driving linear displacement table which comprises a base body, a sliding rail, a driving seat, a flexible mass block, a piezoelectric driving unit, a position sensor unit and a stick-slip friction assembly. The flexible mass block is matched with the piezoelectric driving unit through the spherical contact and the spherical concave surface, so that the self-positioning function is realized, the stress point is effectively ensured not to deviate, the requirements on processing precision and assembly precision are reduced, the contact area is increased compared with the traditional point contact or plane contact mode, and the service life is prolonged; the flat bridge part on the flexible mass block has an elastic function, can receive certain deformation, and effectively eliminates the influence of installation errors on plane contact. In addition, the invention has simple and compact integral structure and small volume, adopts a stick-slip mode to drive the sliding rail, has no up-down friction, only has single friction in stick-slip movement, effectively reduces the power loss and the requirements on other parts, has good working stability and wide application range.
Description
Technical Field
The invention relates to the technical field of nanoscale precision displacement tables, in particular to a nanoscale precision piezoelectric driving linear displacement table.
Background
Along with the continuous development and updating of technology, the precision operation requirement on microscopic dimensions is growing increasingly, so that the nano micro-driving technology based on the piezoelectric principle is greatly developed, and is widely applied to various high-precision fields such as medicine, scientific research, aerospace, production and manufacture and the like, and powerful technical support is provided for experimental research and product manufacture of human beings in the microscopic fields.
The piezoelectric ceramic drive is used as a basic drive mode in the field of micromanipulation, and utilizes the inverse piezoelectric effect of the piezoelectric ceramic, and the piezoelectric ceramic is applied with an electric field to generate a tiny expansion under the action of the electric field, and the expansion scale can reach a sub-nanometer scale by precisely controlling the electric field, so that the expansion force is large and the response is quick. Compared with other trans-scale motion driving modes, the viscous-sliding driving has the advantages of simple driving control and principle, convenience, high resolution, large stroke, simple structure, accurate positioning, large load, easy miniaturization and the like.
At present, the existing stick-slip driving structure mode has larger volume, relatively complex partial structure and great improvement space in the aspect of miniaturization; in addition, the pretightening adjustment modes are quite different, and the pretightening adjustment modes generally have vertical friction, the pretightening contact surface and the friction piece generally have relative sliding during working, the wear resistance of parts is required, and the additional power loss is generated for the stick-slip movement; in addition, good adhesion cannot be ensured in the assembly process, point contact is easy to form, so that abrasion or pits can occur on a friction surface in the long-time use process, and the use precision and the service life are affected.
Disclosure of Invention
Aiming at the defects, the invention aims to provide the nanoscale precision piezoelectric driving linear displacement table which is ingenious and reasonable in structural design, good in matching effect, high in working precision and long in service life.
In order to achieve the above purpose, the technical scheme provided by the invention is as follows: the utility model provides a nanoscale precision piezoelectricity drive linear displacement platform, its includes the base member, through slide assembly activity setting slide rail, drive seat, flexible quality piece, piezoelectricity drive unit, position sensor unit and the stick-slip friction subassembly on this base member, the drive seat sets up in the base member, be equipped with the assembly chamber on the drive seat, flexible quality piece and piezoelectricity drive unit arrange in proper order and set up in the assembly intracavity, this flexible quality piece is equipped with spherical concave on the side towards piezoelectricity drive unit to be equipped with the sphere contact that can push on this sphere concave on the piezoelectricity drive unit, through this sphere contact and spherical concave cooperation, relatively traditional point contact or plane contact mode has increased area of contact greatly, under piezoelectricity drive unit long-time work for flexible quality piece is difficult to be produced tiny pit by sphere contact under high frequency variable effort or tiny impact, influences microcosmic displacement's stability, and simultaneously, sphere laminating contact has self-positioning function, can effectually guarantee that the stress point of flexible hinge does not deviate, promotes work precision. The flexible mass block is provided with a square slot which is perpendicular to the driving direction of the piezoelectric driving unit, and one side of the square slot, which is close to the spherical concave surface, is provided with a square bulge so as to form two flat flexible hinges; the square slotting is used for forming two flat flexible hinges, and the flat flexible hinges have guiding and elastic functions and form key parts for stick-slip movement. The square bulges are used for enhancing the structural strength of the rear side wall and controlling the length of the flat flexible hinge on the rear side wall. The flexible mass block is provided with a through groove which is consistent with the driving direction of the piezoelectric driving unit at the upper position corresponding to the square groove, so that a flat bridge part is formed at the top of the flexible mass block, the flat bridge part has an elastic function and can accept certain deformation, the flat bridge part is connected with the sliding rail through a stick-slip friction assembly, and the position sensor unit is arranged at the position between the base body and the sliding rail.
As an improvement of the invention, the spherical contact is fixed on the driving surface of the piezoelectric driving unit facing the flexible mass block through epoxy resin, so that rigid connection is realized, and the connection effect is good.
As an improvement of the invention, an insulating ceramic plate is arranged between the other driving surface of the piezoelectric driving unit and the inner wall of the assembly cavity. The piezoelectric driving unit is specifically piezoelectric ceramics. The insulating ceramic plate has the insulating function, is high in hardness and good in rigidity, and simultaneously has the gasket function and the insulating function, so that the possibility of piezoelectric ceramic leakage short circuit caused by uninsulated metal surfaces or insufficient thickness of insulating surface layers on a metal-made driving seat is effectively reduced, and the service life and reliability of the piezoelectric ceramic are improved.
As an improvement of the invention, the driving seat is provided with a pre-pressing screw which is propped against the flexible mass block to enable the spherical concave surface to be in close contact with the spherical contact. By properly screwing the pre-pressing screw, the spherical concave surface of the flexible mass block can be tightly attached to the spherical contact during installation, and an anti-loosening pre-tightening force is generated, so that the matching effect is good.
As an improvement of the invention, the outer side wall of the driving seat is provided with a glue filling groove, the inner side position corresponding to the glue filling groove is provided with a guide through groove which penetrates the driving seat, and a guide hinge which can only move up and down in a single degree of freedom is formed through the guide through groove. The base body is provided with the driving cavity for installing the driving seat, the driving seat is positioned in the driving cavity, then glue filling is carried out through the glue filling groove, the matched compactness is improved, and the front-back moving position of the driving seat is effectively limited.
As an improvement of the invention, the stick-slip friction assembly comprises an upper wear plate and a lower wear plate, wherein the upper wear plate is fixed on the bottom surface of the sliding rail, and the lower wear plate is fixed on the flat bridge part. The upper wear-resisting piece and the lower wear-resisting piece are matched, so that the wear-resisting effect is good, and the service life is prolonged.
As an improvement of the invention, the upper surface of the flat bridge part is provided with the limit groove which is matched with the outline of the lower wear pad, so that the lower wear pad is convenient and quick to install, the assembly work is convenient, and a sufficient space is reserved for the self-adaptive adjustment position of the lower wear pad through clearance fit.
As an improvement of the invention, the position sensor unit comprises an encoder and a linear scale, wherein the linear scale is arranged on the bottom surface of the sliding rail, and the encoder is arranged on the base body corresponding to the position of the linear scale. The moving position of the linear scale is sensed by the encoder and then an accurate position signal is output.
As an improvement of the invention, a pre-tightening screw capable of being propped against the bottom surface of the driving seat is arranged at the bottom of the base body corresponding to the flexible mass block. When the pre-tightening screw is screwed, the driving seat can be pushed to move upwards, the flat plate bridge part on the flexible mass block is influenced by displacement, larger deformation is generated, the positive pressure of the upper wear-resisting piece and the lower wear-resisting piece is increased, and the range adjustment of friction force between friction pieces is realized.
As an improvement of the present invention, the sliding assembly includes a roller holder and cylindrical rollers disposed on the roller holder in a crossing arrangement with each other. Can bear the load in all directions and realize high-precision and stable linear motion.
The beneficial effects of the invention are as follows: the flexible mass block and the piezoelectric driving unit are matched through the spherical contact and the spherical concave surface, so that the flexible mass block has a self-positioning function, stress points can be effectively prevented from deviating, the working precision is improved, the requirements on the machining precision and the assembly precision are reduced, the contact area is greatly increased compared with the traditional point contact or plane contact mode, the flexible mass block is not easy to generate a micro pit under high-frequency variable acting force or micro impact by the spherical contact, the stability of microscopic displacement is prevented from being influenced, and the working stability is ensured; the flat bridge part on the flexible mass block has an elastic function, can receive certain deformation, enables the upper wear-resisting piece and the lower wear-resisting piece to realize better plane contact, eliminates the influence of installation errors on plane contact, can reduce the influence of contact position drift and positive pressure jump change caused by flatness errors generated by the machining precision of the upper wear-resisting piece and the lower wear-resisting piece, and has certain self-adaptability. In addition, the invention has simple and compact integral structure and small volume, adopts a stick-slip mode to drive the sliding rail, has no up-down friction, only has single friction in stick-slip movement, effectively reduces power loss and requirements on other parts, is easy to realize, has good working stability and long service life, and is favorable for wide popularization and application.
The invention will be further described with reference to the drawings and examples.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic cross-sectional view of the present invention.
Fig. 3 is a schematic view of an exploded structure of the present invention.
Fig. 4 is a schematic structural view of a driving seat in the present invention.
Fig. 5 is a schematic perspective view of a flexible mass according to the present invention.
Fig. 6 is a schematic cross-sectional view of a flexible mass of the present invention.
Detailed Description
Referring to fig. 1 to 6, the present embodiment provides a nanoscale precision piezoelectric driving linear displacement platform, which includes a base 1, a sliding rail 3 movably disposed on the base 1 through a sliding component 2, a driving seat 4, a flexible mass 5, a piezoelectric driving unit 6, a position sensor unit 7, and a stick-slip friction component 8. The stick-slip friction assembly 8 includes an upper wear pad 81 and a lower wear pad 82.
The driving seat 4 is disposed in the base 1, specifically, a driving cavity 101 for mounting the driving seat 4 is disposed on the base 1, the driving seat 4 is disposed in the driving cavity 101, a glue filling groove 41 is disposed on an outer side wall of the driving seat 4, a guiding through groove 42 penetrating the driving seat 4 is disposed at an inner side position corresponding to the glue filling groove 41, and a guiding hinge capable of moving up and down only in a single degree of freedom is formed through the guiding through groove 42. The glue filling groove 41 is filled with glue, the tightness of the inner wall fit of the driving seat 4 and the inner wall of the driving cavity 101 is improved, the whole back and forth movement of the driving seat 4 is effectively limited, and the up and down micro-displacement of the driving seat is supported. The bottom of the base body 1 is provided with a pre-tightening screw 11 which can be propped against the bottom surface of the driving seat 4 at a position corresponding to the flexible mass block 5. The driving seat 4 can be pushed to move upwards by screwing the rotation angle of the pre-tightening screw 11, the flat plate bridge part 52 on the flexible mass block 5 is influenced by displacement to generate larger deformation, the positive pressure of the upper wear-resisting plate 81 and the lower wear-resisting plate 82 is increased, and the range adjustment of friction force between friction pieces is realized.
The driving seat 4 is provided with an assembly cavity 43, the flexible mass block 5 and the piezoelectric driving unit 6 are sequentially arranged in the assembly cavity 43, and the bottom surface of the flexible mass block 5 is a plane and is rigidly connected with the driving seat 4 through epoxy resin.
The side of the flexible mass block 5 facing the piezoelectric driving unit 6 is provided with a spherical concave surface 51, the piezoelectric driving unit 6 is provided with a spherical contact 9 capable of being pressed on the spherical concave surface 51, and the spherical contact 9 is fixed on the driving surface of the piezoelectric driving unit 6 facing the flexible mass block 5 through epoxy resin, so that rigid connection is realized, and the connection effect is good. During operation, through this spherical contact 9 and spherical concave 51 cooperatees, has increased area of contact greatly than traditional point contact or plane contact mode, under piezoelectric drive unit 6 long-time work for gentle quality piece 5 is difficult to by spherical contact 9 under high frequency change effort or little striking produce little pit, influences microcosmic displacement's stability, simultaneously, the sphere laminating contact has self-positioning function, can effectually guarantee that the stress point of flexible hinge does not deviate, promotes work precision.
Preferably, a pre-pressing screw 10 is arranged on the driving seat 4, and is propped against the flexible mass block 5 to enable the spherical concave surface 51 to be in close contact with the spherical contact 9. Specifically, the front side of the driving seat 4 protrudes upwards to form a front blocking part, the front blocking part is provided with a threaded hole 44 matched with the pre-pressing screw 10, the pre-pressing screw 10 is screwed into the threaded hole 44 and is propped against the front side wall of the flexible mass block 5, and the spherical concave surface 51 of the flexible mass block 5 and the spherical contact 9 are tightly attached to each other during installation by properly screwing the pre-pressing screw 10, so that anti-loosening pre-tightening force is generated, and the matching effect is good.
An insulating ceramic plate 12 is arranged between the other driving surface of the piezoelectric driving unit 6 and the inner wall of the assembly cavity 43. The piezoelectric driving unit 6 is specifically a piezoelectric ceramic. The insulating ceramic sheet 12 has an insulating function, is high in hardness and good in rigidity, plays a role of a gasket and an insulating function, effectively reduces the possibility of short circuit of the piezoelectric ceramic caused by uninsulated metal surface or insufficient thickness of an insulating surface layer on the driving seat 4 made of metal, and improves the service life and reliability of the piezoelectric ceramic.
The flexible mass block 5 is provided with a square slot 53 perpendicular to the driving direction of the piezoelectric driving unit 6, so as to form two flat flexible hinges, and the flat flexible hinges have guiding and elastic functions and form key parts for stick-slip movement. Square protrusions 54 are arranged on one side of the square grooves 53, which is close to the spherical concave surface 51, so that the structural strength of the rear side wall can be enhanced, and the length of the flat flexible hinge on the rear side wall can be controlled. The flexible mass block 5 is provided with a through groove 55 corresponding to the driving direction of the piezoelectric driving unit 6 at the upper position of the square groove 53, so that the top of the flexible mass block 5 forms the flat bridge 52, the flat bridge 52 has an elastic function and can accept certain deformation, and the flat bridge 52 is connected with the sliding rail 3 through the stick-slip friction assembly 8. Specifically, the stick-slip friction assembly 8 includes an upper wear plate 81 and a lower wear plate 82, the upper wear plate 81 is rigidly fixed to the bottom surface of the sliding rail 3 by epoxy resin, and the lower wear plate 82 is fixed to the flat bridge portion 52. In this embodiment, the upper wear-resistant plate 81 is preferably a sapphire wafer; the lower wear pad 82 is preferably a sapphire square; sapphire is selected for use, so that the wear-resisting effect is good and the service life is long. In other embodiments, other materials and shapes of the wear pads can be used for the upper wear pad 81 and the lower wear pad 82. The upper surface of the plate bridge 52 is provided with a limit groove 56 adapted to the outline of the lower wear-resisting plate 82, the lower wear-resisting plate 82 and the limit groove 56 are preferably in clearance fit, that is, the size of the inner cavity of the limit groove 56 is slightly larger than the outline of the lower wear-resisting plate 82, enough space is reserved for self-adapting position adjustment of the lower wear-resisting plate 82, the lower wear-resisting plate 82 is loosely installed in the limit groove 56, and then the lower wear-resisting plate 82 is rigidly fixed through epoxy resin.
The position sensor unit 7 is disposed at a position between the base body 1 and the slide rail 3. Specifically, the position sensor unit 7 includes an encoder 71 and a linear scale 72, the linear scale 72 is disposed on the bottom surface of the slide rail 3, and the encoder 71 is disposed on the base 1 corresponding to the position of the linear scale 72. The moving position of the linear scale 72 is sensed by the encoder 71 and then an accurate position signal is outputted.
In this embodiment, the sliding assembly 2 is preferably a crossed roller assembly, which can bear loads in all directions, and realize high-precision and stable linear motion. Specifically, the crossed roller assembly includes a roller cage and cylindrical rollers disposed on the roller cage in a crossed arrangement with each other. The cross roller assembly and the sliding rail 3 are assembled to form a cross roller guide rail, which can be directly purchased in the market.
When the device works, the sliding rail 3 is driven in a stick-slip mode, no vertical friction exists, only single friction exists in stick-slip movement, the power loss and the requirements on other parts are effectively reduced, the working stability is good, and the service life is long. Moreover, the flexible mass block 5 and the piezoelectric driving unit 6 are matched through the spherical contact 9 and the spherical concave surface 51, so that the self-positioning function is realized, the stress point is effectively ensured not to deviate, the working precision is improved, meanwhile, the requirements on the machining precision and the assembly precision are reduced, the contact area is greatly increased compared with the traditional point contact or plane contact mode, the flexible mass block 5 is not easy to generate a tiny pit under the action force of high frequency change or tiny impact by the spherical contact 9, the stability of microscopic displacement is avoided to be influenced, and the working stability is ensured. In addition, the flat bridge 52 on the flexible mass 5 has an elastic function and can receive certain deformation, so that the upper wear-resisting plate 81 and the lower wear-resisting plate 82 realize better plane contact, and the influence of installation errors on plane contact is eliminated; meanwhile, the contact position of the upper wear-resistant plate 81 and the lower wear-resistant plate 82 drifts when in motion due to flatness errors generated by machining precision, so that large jump occurs in positive pressure, the influence of the positive pressure can be reduced through micro deformation of the flat bridge part 52, and certain self-adaptability is achieved. The nanoscale precision piezoelectric driving linear displacement table can perform micro-nano operation under vacuum, has small current, small heating and no electromagnetic field compared with motor driving, has great advantages in the field with extremely high operation requirements, and can be applied to various high-precision fields such as scientific research, semiconductors, biological medicines, advanced manufacturing, optics/communication, aerospace and the like.
Variations and modifications to the above would be obvious to persons skilled in the art to which the invention pertains from the foregoing description and teachings. Therefore, the invention is not limited to the specific embodiments disclosed and described above, but some modifications and changes of the invention should be also included in the scope of the claims of the invention. In addition, although specific terms are used in the present specification, these terms are for convenience of description only and do not limit the present invention in any way. As described in the above embodiments of the present invention, other displacement stages obtained by adopting the same or similar structures are all within the scope of the present invention.
Claims (7)
1. The utility model provides a nanoscale precision piezoelectrically driven linear displacement platform, its includes base member and sets up the slide rail on this base member through slip subassembly activity, its characterized in that: the flexible mass block and the piezoelectric driving unit are sequentially arranged in the assembling cavity, a spherical concave surface is arranged on the side surface, facing the piezoelectric driving unit, of the flexible mass block, a spherical contact capable of being pressed on the spherical concave surface is arranged on the piezoelectric driving unit, a square slot perpendicular to the driving direction of the piezoelectric driving unit is formed in the flexible mass block, a square bulge is arranged on one side, close to the spherical concave surface, of the square slot, a through slot consistent with the driving direction of the piezoelectric driving unit is formed above the flexible mass block, so that a flat bridge part is formed at the top of the flexible mass block, the flat bridge part is connected with the sliding rail through the adhesive sliding friction assembly, and the position sensor unit is arranged between the base and the sliding rail;
The spherical contact is fixed on a driving surface of the piezoelectric driving unit facing the flexible mass block through epoxy resin;
The stick-slip friction assembly comprises an upper wear pad and a lower wear pad, wherein the upper wear pad is fixed on the bottom surface of the sliding rail, and the lower wear pad is fixed on the flat bridge part;
And a limiting groove matched with the outline of the lower wear-resisting plate is formed in the upper surface of the flat bridge part, and the size of the inner cavity of the limiting groove is slightly larger than that of the lower wear-resisting plate.
2. The nanoscale precision piezoelectric-driven linear displacement stage according to claim 1, wherein an insulating ceramic sheet is disposed between the other driving surface of the piezoelectric driving unit and the inner wall of the assembly cavity.
3. The nanoscale precision piezoelectric-driven linear displacement platform according to claim 1, wherein the driving seat is provided with a pre-pressing screw which is propped against the flexible mass block to enable the spherical concave surface to be in close contact with the spherical contact.
4. The nanoscale precision piezoelectric driving linear displacement platform according to claim 1, wherein the outer side wall of the driving seat is provided with a glue filling groove, and a guide through groove penetrating the driving seat is formed at the inner side position corresponding to the glue filling groove.
5. The nanoscale precision piezoelectric-driven linear displacement stage according to claim 1, wherein the position sensor unit comprises an encoder and a linear scale, the linear scale is disposed on the bottom surface of the slide rail, and the encoder is disposed on the substrate corresponding to the position of the linear scale.
6. The nanoscale precision piezoelectric driving linear displacement platform according to claim 1, wherein a pre-tightening screw capable of being pressed against the bottom surface of the driving seat is arranged at the bottom of the base body corresponding to the flexible mass block.
7. The nanoscale precision piezoelectric-driven linear displacement stage of claim 1, wherein the sliding assembly comprises a roller cage and cylindrical rollers disposed on the roller cage in an interdigitated arrangement.
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| CN113219649B (en) * | 2021-04-30 | 2022-11-22 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
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