CN104864230A - Driving unit modularization stick-slip driving positioning platform - Google Patents
Driving unit modularization stick-slip driving positioning platform Download PDFInfo
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- CN104864230A CN104864230A CN201510304936.8A CN201510304936A CN104864230A CN 104864230 A CN104864230 A CN 104864230A CN 201510304936 A CN201510304936 A CN 201510304936A CN 104864230 A CN104864230 A CN 104864230A
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Abstract
The invention discloses a driving unit modularization stick-slip driving positioning platform which comprises a movement output micro-positioning platform, a platform base and a driving unit module arranged inside the platform base. The driving unit module comprises a module frame, a driving source and a guiding driving element, wherein the driving source is arranged inside the module frame, and the guiding driving element is connected with the driving source and is a flexible hinge. The guiding driving element is perpendicular to the movement output micro-positioning platform. The top of the guiding driving element makes direct contact with the movement output micro-positioning platform. The stick-slip effect is generated between the guiding driving element and the movement output micro-positioning platform, displacement is directly output, the precision is high, and the response speed is high; due to the modularized design, the platform base and the friction adjusting mechanism are greatly simplified, and the machining and manufacturing requirement of the whole positioning platform is lowered.
Description
Technical field
The present invention relates to micro drive accurate field of locating technology, specifically relate to a kind of driver element modularization stick-slip and drive locating platform.
Background technique
Along with the development of nano science, new nanometer material, nanostructured are explored by people gradually and are found, and demonstrate boundless application prospect.Nanometer technology is that the mankind are familiar with one of basic means of transformation and utilization to Exploring Substructure of Matter, and wherein, nano-manipulation is the important content of nanometer technology.And as one of the key technology of microscopic fields, the development level of microposition technology directly has influence on the development level of microscopic fields technology, and its significance is self-evident.At present, all require that locating platform is in limited operating space in the field such as precision positioning, micro-nano operation of such as bioengineering, Polymer process, micro-wound surgical operation, scanning type probe microscope (SPM), atom force microscope (AFM), scanning electron microscope (SEM), micro machining, semiconductor plate-making, while realizing hi-Fix and operation, also can have larger operating range.Microposition technology, namely in conjunction with novel motion principle and driving structure, utilizes micro-displacement actuator to drive the technology realizing hi-Fix and motion.
Flexible hinge relies on its mechanical friction, gapless, motion smoothing, sensitivity advantages of higher, widely uses in multiple micro-positioning now.Be guiding transmission component based on the mini positioning platform of stick-slip principle with flexible hinge, be driving source with piezoelectric actuator, they have high-resolution, high position precision, size is little, without the need to lubrication, simple and reliable for structure, rigidity is large, energy consumption is low, respond the advantages such as fast, is subject to extensive use gradually.
But, in stick-slip driving locating platform more common at present, many employing flat flexible hinges are integrated with platform base manufactures, need the enlarger with the larger complexity of size, under the effect of driving force, flexible hinge moves in the plane parallel with base, makes platform precise motion after amplifying transmission via enlarger.
Because existing stick-slip drives locating platform to use the integration of base, flexible hinge, enlarger to manufacture, cause its size larger, but the applied environment of microscopic fields, often there is certain restriction to the size of locating platform, large scale can limit the application area of mini positioning platform, from the angle of industrialization, large-sized integration manufacture also can increase cost of production; Complex structure, manufacture will remove the enlarger of height, size complexity, increase the size of mini positioning platform, and the pretightening force producing friction regulates inconvenient, improves assembling difficulty, reduces precision and the corresponding speed of system simultaneously; Stick-slip driving principle utilizes the difference of sound frictional force to carry out actuation movement, the platform of output movement, needs to be subject to suitable frictional force, due to the existence of foozle, integration manufacture cannot ensure that this frictional force is suitable size just, therefore needs to increase other mechanism and carrys out regulating friction force size.But which again increases the complexity of system architecture, improve assembling difficulty, the precision of influential system.
Summary of the invention
In view of this, the object of the present invention is to provide the stick-slip that a kind of size is small, precision is high to drive locating platform, make it have more wide application space, more outstanding performance, lower production requirement and cost.
A kind of driver element modularization stick-slip that object according to the present invention proposes drives locating platform, comprise movement output micromotion platform, platform base and be arranged at the driver element module of platform base inside, the driving source that described driver element module comprises module rack, is arranged at the guiding transmission component in module rack and is connected with guiding transmission component upper end, described guiding transmission component is flexible hinge, the top, upper end of this guiding transmission component contacts with movement output micromotion platform, and the lower end of this guiding transmission component is fixed in module rack;
Deformation can be there is when the voltage that applying one on described driving source varies, and the speed that deformation occurs increases along with the increase of described voltage changing rate, the upper end of the deformation promotion guiding transmission component of described driving source is moved in the horizontal direction, when applied voltage is for slow rising or when slowly declining, the upper end slowly movement in the horizontal direction of guiding transmission component, described movement output micromotion platform obtains Horizontal displacement under frictional force effect, when the voltage of institute's time is for rapid rising or when declining rapidly, the upper end movement rapidly in the horizontal direction of guiding transmission component, described movement output micromotion platform counter mould frame under effect of inertia is static.
Preferably, described flexible hinge is vertical flexible hinge or circular arc flexible hinge.
Preferably, the bottom of the bottom link block frame of described vertical flexible hinge, top contacts with movement output micromotion platform, space is provided with between the sidewall of described module rack and guiding transmission component, there is elastic strain in vertical flexible hinge, produce stick-slip effect between described vertical flexible hinge and movement output micromotion platform under the effect of driving source.
Preferably, the plane orthogonal at described vertical flexible hinge generation deformation place is in movement output micromotion platform.
Preferably, movement output micromotion platform both sides are respectively arranged with the first linear rail and the second linear rail, and described first linear rail and the second straight line all adopt crossed roller guide rail.
Preferably, the first linear rail and the second linear rail are installed on platform base by least one guide rail set screw.
Preferably, described driving source is stacked piezoelectric actuator.
Preferably, in described platform base, be provided with groove, and opening upwards, driver element module installation is in groove.
Preferably, described driver element module also comprises the driving source pretensioner for providing pretightening force to the assembling of guiding transmission component and driving source, and described driving source pretensioner is arranged at outside driving source.
Preferably, be provided with between described driving source and driving source pretensioner and prevent from protecting described driving source not by protection pad that driving source pretensioner top is broken.
Preferably, be provided with bottom described platform base some for regulating the driver module adjusting screw of driver element module Vertical direction position.
Preferably, the side of described platform base is provided with the tightening screw for fixed drive unit module.
Compared with prior art, the present invention has following progressive part:
Feature of the present invention proposes to adopt vertical flexible hinge, and simple and compact for structure, size is small, solves dimensional problem, expands application space; Be assembled into a module with stacked piezoelectric constant, assembling is simple, is easy to regulate; Vertical flexible hinge directly contacts with output movement platform, and without the need to enlarger, precision is high, response is fast; Modular design, makes the mechanism of regulating friction force and simple, and to the fine setting of driver module entirety, does not enter any link of Movement transmit, precision and corresponding speed unaffected.Modular design, also makes the structure of platform base have and simplifies significantly, and the manufacturing of locating platform entirety requires to reduce.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technological scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is stick-slip driving principle schematic diagram.
Fig. 2 is the structural representation of the driver element modularization stick-slip driving locating platform under the embodiment of the present invention.
Fig. 3 is the perspective view of the driver element modularization stick-slip driving locating platform under the embodiment of the present invention.
Fig. 4 is the structural representation of the driver element module under the embodiment of the present invention.
Fig. 5 is the plan view of the driver element modularization stick-slip driving locating platform under the embodiment of the present invention.
Fig. 6 is A-A sectional view in Fig. 5.
Embodiment
As described in the background art, be guiding transmission component based on the mini positioning platform of stick-slip principle with flexible hinge, be driving source with piezoelectric actuator, there is high-resolution, high position precision, size is little, without the need to lubrication, simple and reliable for structure, rigidity is large, energy consumption is low, respond the advantages such as fast, is subject to extensive use gradually.
The invention discloses a kind of driver element modularization stick-slip and drive locating platform, comprise movement output micromotion platform, platform base and be arranged at the driver element module of platform base inside, the driving source that described driver element module comprises module rack, is arranged at the guiding transmission component in module rack and is connected with guiding transmission component upper end, described guiding transmission component is flexible hinge, the top, upper end of this guiding transmission component contacts with movement output micromotion platform, and the lower end of this guiding transmission component is fixed in module rack;
Deformation can be there is when the voltage that applying one on described driving source varies, and the speed that deformation occurs increases along with the increase of described voltage changing rate, the upper end of the deformation promotion guiding transmission component of described driving source is moved in the horizontal direction, when applied voltage is for slow rising or when slowly declining, the upper end slowly movement in the horizontal direction of guiding transmission component, described movement output micromotion platform obtains Horizontal displacement under frictional force effect, when the voltage of institute's time is for rapid rising or when declining rapidly, the upper end movement rapidly in the horizontal direction of guiding transmission component, described movement output micromotion platform counter mould frame under effect of inertia is static.
To be clearly and completely described technological scheme of the present invention by embodiment below.Obvious, described embodiment is only a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite of not making creative work, belongs to the scope of protection of the invention.
First please stick-slip driving principle schematic diagram see Fig. 1, Fig. 1.Stick-slip drive system is made up of driving source, guide transmission device and movement output micromotion platform, and in figure, left side is voltage drive signals, and right side is the motion conditions of corresponding stick-slip system under drive singal.At the motion initial stage, driving voltage slowly increases, and driving source extends to the right, promotes guiding transmission component and the common slippage Δ X to the right of movement output micromotion platform; After driving voltage slowly increases and reaches maximum value, 0 is decreased to rapidly from maximum value, driving source and the rapid drawdown of guiding transmission component due to voltage, rapid return-to-home position, and movement output micromotion platform due to quality large, the inertial impact force that corresponding generation is larger, has exceeded the frictional force between movement output micromotion platform and guiding transmission component, thus movement output micromotion platform is stagnated due to inertia in original position, produces displacement hardly.Like this, in a drive cycle, the relative home position of movement output micromotion platform there occurs the displacement of Δ X.This drive singal is continuously applied to driving source, just can realizes the unidirectional movement of movement output micromotion platform.Stick-slip driving principle that Here it is.
Adopt the driving source that the displacement amount of elongation generation when applying voltage is little, as stacked piezoelectric actuator, the resolution of its displacement is high, can reach nanometer, therefore, utilizes stick-slip driving principle can obtain the positioning precision of nanometer or even Subnano-class.
Please refer to Fig. 2, a kind of driver element modularization stick-slip drives locating platform, comprise platform base 1, in order to overcome traditional stick-slip drive locating platform by driving source and guiding transmission component be placed in above platform base 1 with platform base Integral design and cause stick-slip to drive the shortcoming that locating platform size is large, in the present embodiment, driving source, the transmission component that leads are integrated into driver element module.
Described driver element module 2 comprises module rack 21, the driving source that module rack 21 inside is provided with guiding transmission component and is connected with guiding transmission component upper end, and guiding transmission component is flexible hinge.Deformation can be there is when the voltage that applying one on described driving source varies, and the speed that deformation occurs increases along with the increase of described voltage changing rate, the upper end of the deformation promotion guiding transmission component of described driving source is moved in the horizontal direction, when applied voltage is for slow rising or when slowly declining, the upper end slowly movement in the horizontal direction of guiding transmission component, described movement output micromotion platform obtains Horizontal displacement under frictional force effect, when the voltage of institute's time is for rapid rising or when declining rapidly, the upper end movement rapidly in the horizontal direction of guiding transmission component, described movement output micromotion platform counter mould frame 21 under effect of inertia is static.
Initiative of the present invention in platform base 1, groove is set, formed hollow structure, upwards, driver element module 2 is placed in groove to slot opening.Movement output micromotion platform 3 is provided with above driver element module 2.Driver element modularization stick-slip after assembling drives locating platform as shown in Figure 3.
In the present embodiment, guiding transmission component uses vertical flexible hinge 22, " vertically " is it is emphasised that the position relationship between flexible hinge with movement output platform is vertical, as long as meet the plane at the deformation place of hinge and the plane orthogonal that sticky-slip model occurs, hinge Equivalent Axis and the plane parallel that sticky-slip model occurs, therefore the present invention also can use circular arc flexible hinge to replace vertical flexible hinge.Driving source uses stacked piezoelectric actuator 23.
Below technological scheme is further described:
Please refer to Fig. 4 to Fig. 6, Fig. 4 is the structural representation of driver element module.Driver element module 2 comprises module rack 21, vertical flexible hinge 22, stacked piezoelectric actuator 23, protection pad 24 and driving source pretensioner 7; it is inner that vertical flexible hinge 22 and the stacked piezoelectric actuator 23 be connected with vertical flexible hinge 22 are all arranged at module rack 21; particularly, stacked piezoelectric actuator 23 is connected with the upper end, right side of vertical flexible hinge 22.Vertical flexible hinge 22 is integral type structure with module rack 21, it is pointed out that vertical flexible hinge 22 can be that the laggard luggage of processing is respectively joined with module rack 21.It is horizontal structure bottom module rack 21, module rack 21 has sidewall, described sidewall comprises the first side wall and the second sidewall, space is provided with between vertical flexible hinge 22 and the first side wall, described vertical flexible hinge 22 upper end connects movement output micromotion platform 3, lower end link block frame 21, vertical flexible hinge 22 is perpendicular to platform base 1 and movement output micromotion platform 3.When slowly exerting pressure to stacked piezoelectric actuator 23, stacked piezoelectric actuator 23 extends, make vertical flexible hinge 22 that deformation occur, brought into motion exports the movement of micromotion platform 3, described space is for ensureing that the space needed for elastic strain occurs vertical flexible hinge 22, vertical flexible hinge 22 directly contacts with movement output micromotion platform 3, output displacement, vertical flexible hinge 22 is except directly conduct guiding transmission component, also direct by stick-slip effect transmission campaign, without the need to installing enlarger, precision is high, response is fast.
Please refer to Fig. 5, Fig. 5 is the plan view of the driver element modularization stick-slip driving locating platform under the embodiment of the present invention.Slide more stably for making movement output micromotion platform 3, arrange the first linear rail 41 and the second linear rail 42 respectively in movement output micromotion platform 3 both sides, movement output micromotion platform 3 and the first linear rail 41, second linear rail 42 are that secondary collocation is installed.Described first linear rail 41 and the second linear rail 42 all adopt crossed roller guide rail, crossed roller guide rail has that precision is high, speed is fast, stable movement and the strong advantage of bearing capacity, can ensure that movement output micromotion platform 3 does stable straight line motion along the first linear rail 41 and the second linear rail 42.First linear rail 41 and the second linear rail 42 are respectively arranged with at least one guide rail screw 5, first linear rail 41 and the second linear rail 42 are installed on platform base 1 top by guide rail screw 5.
Please refer to Fig. 6; during assembling driver element module 2; driving source pretensioner 7 is provided with outside stacked piezoelectric actuator 23; for providing pretightening force to the assembling of vertical flexible hinge 22 and stacked piezoelectric actuator 23; in the present embodiment; be provided with between stacked piezoelectric actuator 23 and driving source pretensioner 7 and protect pad 24; prevent in the pretension process of the assembling of vertical flexible hinge 22 and stacked piezoelectric actuator 23, protection stacked piezoelectric actuator 23 is not pushed up broken by driving source pretensioner 7.Driving source pretensioner 7 can select pre-loading screw or wedge-shaped blocks.
After assembling driver element module 2, driver element module 2 is placed in the groove of platform base 1, be provided with some for regulating the driver module adjusting screw 6 of driver element module 2 Vertical direction position bottom platform base 1, debugging is to suitable height, ensure vertical flexible hinge 22 and coordinating between movement output micromotion platform 3, to make the maximum static friction force and the kinetic force of friction that obtain modest size between vertical flexible hinge 22 and movement output micromotion platform 3.
The side of platform base 1 is provided with the tightening screw 8 for fixed drive unit module, and module rack 21 the first side wall is provided with mounting hole, and tightening screw 8 stretches to inside the first side wall slightly, with fixed drive unit module 2 in suitable height.
The concrete shape of each parts, size, parameter drive the system of locating platform according to stick-slip and determine, the concrete voltage value applied stacked piezoelectric actuator, buck/boost speed drive the system of locating platform according to stick-slip and determines.
Controlling driver element modularization stick-slip drives the method for locating platform as follows:
(1) controlled motion output micromotion platform moves right
A. be in without under deformation state at stacked piezoelectric actuator, zooming voltage is applied to stacked piezoelectric actuator, its rapid deformation is extended, promote vertical flexible hinge generation elastic strain, bend left fast, according to stick-slip driving principle, because the quality of movement output micromotion platform is large, larger inertial impact force is produced to the movement output micromotion platform above vertical flexible hinge, due to inertia, now movement output micromotion platform transfixion;
When b. waiting until that voltage rise is extremely maximum, stacked piezoelectric actuator elongation is maximum, slowly reduce voltage again, stacked piezoelectric actuator is made slowly to be out of shape shortening, vertical flexible hinge slowly recovers to the right in the presence of a tensile force, according to stick-slip driving principle, maximum static friction force between vertical flexible hinge and movement output micromotion platform is greater than kinetic force of friction, and now movement output micromotion platform slowly moves right with vertical flexible hinge;
C. periodically repeat the process of a and b, just can export the continuous single-way moving to the right of micromotion platform by controlled motion.
(2) controlled motion output micromotion platform is moved to the left
D. under stacked piezoelectric actuator is in the maximum state of elongation, voltage suffered by stacked piezoelectric actuator is reduced fast, its rapid deformation is shortened, vertical flexible hinge in the presence of a tensile force simultaneously, recover to the right fast, according to stick-slip driving principle, now movement output micromotion platform transfixion;
When e. waiting until that voltage is down to minimum, stacked piezoelectric actuator without distortion, stacked piezoelectric actuator is applied to the voltage slowly risen, make its slow anamorphic stretching, promote vertical flexible hinge generation resiliently deformable, slowly bend left, according to stick-slip driving principle, now movement output micromotion platform is slowly moved to the left with vertical flexible hinge;
F. periodically repeat the process of d and e, just can export the continuous single-way moving left of micromotion platform by controlled motion.
In sum, the invention discloses a kind of driver element modularization stick-slip and drive locating platform.In the present invention; driver element modular design; by the assembly needed for module rack, these composition driver elements of guiding transmission component, driving source, protection pad and driving source pretensioner; be assembled into the module independently having and drive function, change the frictional force needed for stick-slip driving by the position of adjustment driver element module.Utilize vertical flexible hinge, driver element can directly contact with movement output micromotion platform, output displacement.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to embodiment illustrated herein, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. a driver element modularization stick-slip drives locating platform, it is characterized in that: comprise movement output micromotion platform, platform base and be arranged at the driver element module of platform base inside, the driving source that described driver element module comprises module rack, is arranged at the guiding transmission component in module rack and is connected with guiding transmission component upper end, described guiding transmission component is flexible hinge, the top, upper end of this guiding transmission component contacts with movement output micromotion platform, and the lower end of this guiding transmission component is fixed in module rack;
Deformation can be there is when the voltage that applying one on described driving source varies, and the speed that deformation occurs increases along with the increase of described voltage changing rate, the upper end of the deformation promotion guiding transmission component of described driving source is moved in the horizontal direction, when applied voltage is for slow rising or when slowly declining, the upper end slowly movement in the horizontal direction of guiding transmission component, described movement output micromotion platform obtains Horizontal displacement under frictional force effect, when the voltage of institute's time is for rapid rising or when declining rapidly, the upper end movement rapidly in the horizontal direction of guiding transmission component, described movement output micromotion platform counter mould frame under effect of inertia is static.
2. driver element modularization stick-slip as claimed in claim 1 drives locating platform, it is characterized in that: described flexible hinge is vertical flexible hinge or circular arc flexible hinge.
3. driver element modularization stick-slip as claimed in claim 2 drives locating platform, it is characterized in that: the bottom of the bottom link block frame of described vertical flexible hinge, top contacts with movement output micromotion platform, the sidewall of described module rack is provided with space with between vertical flexible hinge, produces stick-slip effect between described vertical flexible hinge and movement output micromotion platform.
4. driver element modularization stick-slip as claimed in claim 2 drives locating platform, it is characterized in that: described vertical flexible hinge is moved the plane orthogonal at place in movement output micromotion platform.
5. driver element modularization stick-slip as claimed in claim 1 drives locating platform, it is characterized in that: described driving source is stacked piezoelectric actuator.
6. driver element modularization stick-slip as claimed in claim 1 drives locating platform, and it is characterized in that: be provided with groove in described platform base, upwards, driver element module installation is in described groove for slot opening.
7. driver element modularization stick-slip as claimed in claim 1 drives locating platform, it is characterized in that: movement output micromotion platform both sides arrange the first linear rail and the second linear rail respectively, described first guide rail and the second guide rail adopt crossed roller guide rail, and described first guide rail and the second guide rail are installed on platform base respectively by least one guide rail screw.
8. driver element modularization stick-slip as claimed in claim 7 drives locating platform; it is characterized in that: described driver element module also comprises the driving source pretensioner for providing pretightening force to the assembling of guiding transmission component and driving source; described driving source pretensioner is arranged at outside driving source, is provided with and prevents from protecting described driving source not by protection pad that driving source pretensioner top is broken between described driving source and driving source pretensioner.
9. the driver element modularization stick-slip as described in any one of claim 1-8 drives locating platform, it is characterized in that: be provided with some for regulating the driver module adjusting screw of driver element module Vertical direction position bottom described platform base.
10. the driver element modular event driven locating platform as described in any one of claim 1-8, is characterized in that: the side of described platform base is provided with the tightening screw for fixed drive unit module.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107228757A (en) * | 2017-05-11 | 2017-10-03 | 清华大学 | Prismatic pair sticky-slip model characteristic dynamic test system based on flash spotting |
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| CN110504861A (en) * | 2019-08-05 | 2019-11-26 | 包头稀土研究院 | Second level micro displacement magnifying mechanism and its amplification method |
| CN110890850A (en) * | 2019-12-05 | 2020-03-17 | 松山湖材料实验室 | Nano-precision piezoelectric drive linear displacement platform |
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| CN111600505A (en) * | 2020-05-27 | 2020-08-28 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
| CN111600505B (en) * | 2020-05-27 | 2021-11-12 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
| CN114123856A (en) * | 2021-10-26 | 2022-03-01 | 松山湖材料实验室 | Robot and walking mechanism thereof |
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| Publication number | Publication date |
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| CN104864230B (en) | 2017-03-22 |
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