CN104864230B - Driving unit modularization stick-slip driving positioning platform - Google Patents
Driving unit modularization stick-slip driving positioning platform Download PDFInfo
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- CN104864230B CN104864230B CN201510304936.8A CN201510304936A CN104864230B CN 104864230 B CN104864230 B CN 104864230B CN 201510304936 A CN201510304936 A CN 201510304936A CN 104864230 B CN104864230 B CN 104864230B
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Abstract
The invention discloses a driving unit modularization stick-slip driving positioning platform which comprises a movement output micro-positioning platform, a platform base and a driving unit module arranged inside the platform base. The driving unit module comprises a module frame, a driving source and a guiding driving element, wherein the driving source is arranged inside the module frame, and the guiding driving element is connected with the driving source and is a flexible hinge. The guiding driving element is perpendicular to the movement output micro-positioning platform. The top of the guiding driving element makes direct contact with the movement output micro-positioning platform. The stick-slip effect is generated between the guiding driving element and the movement output micro-positioning platform, displacement is directly output, the precision is high, and the response speed is high; due to the modularized design, the platform base and the friction adjusting mechanism are greatly simplified, and the machining and manufacturing requirement of the whole positioning platform is lowered.
Description
Technical field
The present invention relates to micro drive accurate field of locating technology, is specifically related to a kind of driver element modularity stick-slip and drives
Locating platform.
Background technology
With the development of nano science, new nano material, nanostructured are gradually explored and are found by people, and shown
Boundless application prospect.Nanotechnology is that the mankind recognize one of basic means transformed and utilize to Exploring Substructure of Matter,
Wherein, nano-manipulation is the important content of nanotechnology.And one of key technology as microscopic fields, micro- location technology send out
Exhibition level directly influences the level of development of microscopic fields technology, and its importance is self-evident.At present, in such as biological engineering, poly-
Compound operation, micro-wound surgical operation, scanning probe microscopy (SPM), atomic force microscope (AFM), scanning electron microscope
(SEM), the field such as microfabrication, the precision positioning of quasiconductor plate-making, micro-nano operation requires locating platform in limited operation
In space, while realizing hi-Fix and operation, can also possess bigger opereating specification.Micro- location technology, i.e., with reference to new
The motion principle and driving structure of type, drives the technology for realizing hi-Fix and motion using micro-displacement actuator.
Flexible hinge relies on the advantages of its mechanical friction, gapless, motion smoothing, high sensitivity, various now micro-
Widely use in alignment system.Mini positioning platform based on stick-slip principle is with flexible hinge to be oriented to actuated element, being made pottery with piezoelectricity
Porcelain actuator be driving source, they have high-resolution, high position precision, size it is little, without the need for lubrication, it is simple and reliable for structure, firm
The advantages of degree is big, energy consumption is low, response is fast, is gradually extensively applied.
However, stick-slip more typical at present adopts flat flexible hinge integrated with platform base in driving locating platform more
Manufacture, needs with the larger complicated enlarger of size, in the presence of driving force, and flexible hinge is put down in parallel with base
Move on face, after amplifying transmission via enlarger, make platform precise motion.
As existing stick-slip drives locating platform using base, flexible hinge, enlarger integration manufacture, which is caused
Size is than larger, but the applied environment of microscopic fields, often has certain restriction to the size of locating platform, and large scale can be limited
The range of application of mini positioning platform, from from the point of view of industrialization, large-sized integration manufacture can also increase production cost；Structure
The complicated enlarger of height, size is removed in complicated, manufacture, increases the size of mini positioning platform, and the pretightning force for producing friction is adjusted
Section is inconvenient, improves assembly difficulty, while reducing the precision and corresponding speed of system；Stick-slip driving principle is rubbed using sound
The difference for wiping power carrys out powered motion, and the platform of output campaign is needed by suitable frictional force, due to the presence of foozle, one
Bodyization manufacture cannot ensure that the frictional force is precisely suitable size, it is therefore desirable to which increasing other mechanism, to carry out regulating friction force big
It is little.But the complexity of system structure is which again increases, assembly difficulty is improve, the precision of system is affected.
The content of the invention
In view of this, it is an object of the invention to provide a kind of size is small, stick-slip of high precision drives locating platform, make
Which possesses broader practice space, more excellent performance, lower production requirement and cost.
A kind of driver element modularity stick-slip that purpose of the invention is proposed drives locating platform, including movement output
Micromotion platform, platform base and the driver element module being arranged inside platform base, the driver element module include module
Frame, the driving source for being oriented to actuated element and being connected with guiding actuated element upper end being arranged in module rack, the guiding transmission
Element is flexible hinge, is contacted with movement output micromotion platform at the top of the upper end of the guiding actuated element, the guiding actuated element
Lower end be fixed in module rack；
Can deform upon when the voltage that applying one in the driving source varies, and the speed that deformation occurs is with institute
State the increase of voltage changing rate and increase, the deformation of the driving source promotes the upper end for being oriented to actuated element to send out in the horizontal direction
Raw movement, when the voltage for being applied is slowly to rise or slowly declining, the upper end for being oriented to actuated element is delayed in the horizontal direction
Slow mobile, the movement output micromotion platform obtains horizontal displacement under frictional force effect, when the voltage of institute's time is on rapid
When rising or declining rapidly, the upper end for being oriented to actuated element is moved rapidly in the horizontal direction, and the movement output micromotion platform exists
Under effect of inertia, counter mould frame is static.
Preferably, the flexible hinge is vertical flexible hinge or circular arc flexible hinge.
Preferably, the bottom of the bottom connection mode block frame of the vertical flexible hinge, top and movement output micromotion platform
Contact, is provided with space, effect of the vertical flexible hinge in driving source between the side wall and guiding actuated element of the module rack
Lower generation elastic deformation, produces stick-slip effect between the vertical flexible hinge and movement output micromotion platform.
Preferably, the vertical flexible hinge deforms upon the plane at place perpendicular to movement output micromotion platform.
Preferably, movement output micromotion platform both sides are respectively arranged with first straight line guide rail and second straight line guide rail, described
First straight line guide rail and second straight line adopt crossed roller guide rail.
Preferably, first straight line guide rail and second straight line guide rail are installed on platform bottom by least one guide rail fixing screws
On seat.
Preferably, the driving source is stacked piezoelectric actuator.
Preferably, groove, and opening upwards are provided with the platform base, driver element module is arranged in groove.
Preferably, the driver element module also includes providing pretension for the assembling to being oriented to actuated element and driving source
The driving source preloader of power, the driving source preloader are arranged on the outside of driving source.
Preferably, being provided between the driving source and driving source preloader prevents from protecting the driving source not pre- by driving source
The broken protection pad in tight device top.
Preferably, the platform base bottom is provided with some drives for adjusting driver element module vertical direction position
Dynamic model block adjusting screw.
Preferably, the side of the platform base is provided with the tightening screw for fixed drive unit module.
Compared with prior art, the present invention has following progressive part：
It is characteristic of the invention that proposing that simple and compact for structure, size is small, solves size and asks using vertical flexible hinge
Topic, expands application space；A module is assembled into stacked piezoelectric ceramics, assembling is simple, it is easy to adjust；Vertical flexible hinge
Chain and output campaign platform directly contact, without the need for enlarger, high precision, response are fast；Modular design, makes regulating friction force
Mechanism and its simple, and drive module is integrally finely tuned, does not enter any link of motion transmission, precision and corresponding speed
It is unaffected.Modular design, also so that the structure of platform base has significantly simplifies, the overall processing of locating platform
Manufacture requirements are reduced.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is stick-slip driving principle schematic diagram.
Fig. 2 is the structural representation that the driver element modularity stick-slip under the embodiment of the present invention drives locating platform.
Fig. 3 is the dimensional structure diagram that the driver element modularity stick-slip under the embodiment of the present invention drives locating platform.
Fig. 4 is the structural representation of the driver element module under the embodiment of the present invention.
Fig. 5 is the top view that the driver element modularity stick-slip under the embodiment of the present invention drives locating platform.
Fig. 6 is A-A sectional views in Fig. 5.
Specific embodiment
As described in the background art, the mini positioning platform based on stick-slip principle with flexible hinge as be oriented to actuated element,
With piezoelectric actuator as driving source, with high-resolution, high position precision, size is little, need not lubricate, simple structure can
By, rigidity is big, energy consumption is low, respond it is fast the advantages of, gradually extensively applied.
The invention discloses a kind of driver element modularity stick-slip driving locating platform, including movement output micromotion platform,
Platform base and the driver element module being arranged inside platform base, the driver element module include module rack, are arranged at
The driving source for being oriented to actuated element and being connected with guiding actuated element upper end in module rack, the guiding actuated element are flexibility
Hinge, is contacted with movement output micromotion platform at the top of the upper end of the guiding actuated element, and the lower end of the guiding actuated element is fixed
In module rack；
Can deform upon when the voltage that applying one in the driving source varies, and the speed that deformation occurs is with institute
State the increase of voltage changing rate and increase, the deformation of the driving source promotes the upper end for being oriented to actuated element to send out in the horizontal direction
Raw movement, when the voltage for being applied is slowly to rise or slowly declining, the upper end for being oriented to actuated element is delayed in the horizontal direction
Slow mobile, the movement output micromotion platform obtains horizontal displacement under frictional force effect, when the voltage of institute's time is on rapid
When rising or declining rapidly, the upper end for being oriented to actuated element is moved rapidly in the horizontal direction, and the movement output micromotion platform exists
Under effect of inertia, counter mould frame is static.
Technical scheme will be clearly and completely described by specific embodiment below.Obvious, institute
The embodiment of description a part of embodiment only of the invention, rather than the embodiment of whole.Based on the enforcement in the present invention
Example, the every other embodiment obtained on the premise of creative work is not made by those of ordinary skill in the art all belong to
In the scope of protection of the invention.
Referring first to Fig. 1, Fig. 1 is stick-slip driving principle schematic diagram.Stick-slip drive system is by driving source, guide transmission device
Constitute with movement output micromotion platform, in figure, left side is voltage drive signals, and right side is corresponding stick-slip system in drive signal
Under motion conditions.At the motion initial stage, driving voltage is slowly increased, and driving source extends to the right, promotes and is oriented to actuated element and fortune
It is dynamic to export the common sliding Δ X to the right of micromotion platform；After driving voltage is slowly increased reaches maximum, reduce from maximum rapidly
To 0, driving source be oriented to actuated element due to the rapid drawdown of voltage, be rapidly returned to original position, and movement output micromotion platform due to
Quality is big, accordingly produces larger inertial impact force, has exceeded movement output micromotion platform and has been oriented to rubbing between actuated element
Power is wiped, so as to movement output micromotion platform is stagnated due to inertia in original position, displacement is nearly free from.So, drive at one
In the dynamic cycle, the relatively primitive position of movement output micromotion platform there occurs the displacement of Δ X.This driving is continuously applied to driving source
Signal, just can realize the one-way movement of movement output micromotion platform.Here it is stick-slip driving principle.
Using the little driving source of the displacement of elongation generation during applied voltage, such as stacked piezoelectric actuator, its position
The high resolution of shifting, can reach nanoscale, therefore, nanometer even Subnano-class is obtained in that using stick-slip driving principle
Positioning precision.
Fig. 2 is refer to, a kind of driver element modularity stick-slip drives locating platform, including platform base 1, in order to overcome biography
The stick-slip of system drives locating platform integrally to set driving source and guiding actuated element with being placed in above platform base 1 with platform base
Count and cause stick-slip to drive the big shortcoming of locating platform size, driving source, guiding actuated element are integrated into into drive in the present embodiment
Moving cell module.
The driver element module 2 includes module rack 21, is provided with guiding actuated element and passes with being oriented to inside module rack 21
The driving source that dynamic element upper end is connected, guiding actuated element are flexible hinge.Vary when applying one in the driving source
Can deform upon during voltage, and the speed that deformation occurs increases, the driving with the increase of the voltage changing rate
The deformation in source promotes the upper end for being oriented to actuated element to be moved in the horizontal direction, when the voltage for being applied rises or slow for slow
During slow decline, the upper end for being oriented to actuated element is slowly moved in the horizontal direction, and the movement output micromotion platform is in frictional force
Effect is lower to obtain horizontal displacement, and when the voltage of institute's time is to rise or declining rapidly rapidly, the upper end for being oriented to actuated element exists
Moved in horizontal direction rapidly, movement output micromotion platform counter mould frame 21 under effect of inertia is static.
What the present invention was initiative arranges groove in platform base 1, forms hollow structure, and slot opening upwards, drives single
Element module 2 is placed in groove.Movement output micromotion platform 3 is provided with above driver element module 2.Driver element mould after assembling
Massing stick-slip drives locating platform as shown in Figure 3.
In the present embodiment, be oriented to actuated element use vertical flexible hinge 22, " vertical " it is emphasised that flexible hinge and
Position relationship between movement output platform is vertical, as long as meeting the plane at the deformation place of hinge and sticky-slip model occurring
Plane is vertical, and hinge Equivalent Axis are parallel with the plane that sticky-slip model occurs, therefore the present invention also can be flexible using circular arc
Hinge replaces vertical flexible hinge.Driving source uses stacked piezoelectric actuator 23.
Below technical scheme is further described：
Fig. 4 to Fig. 6 is refer to, Fig. 4 is the structural representation of driver element module.Driver element module 2 includes module rack
21st, vertical flexible hinge 22, stacked piezoelectric actuator 23, protection pad 24 and driving source preloader 7, it is vertical flexible
Hinge 22 and the stacked piezoelectric actuator 23 being connected with vertical flexible hinge 22 are may be contained within inside module rack 21, tool
Body ground, stacked piezoelectric actuator 23 are connected with the right side upper end of vertical flexible hinge 22.Vertical flexible hinge 22 and mould
Block frame 21 is integral type structure, it should be pointed out that after vertical flexible hinge 22 can be processing respectively with module rack 21
Assembled.21 bottom of module rack is horizontal structure, and module rack 21 has side wall, and the side wall includes the first side wall and the second side
Wall, is provided with space between vertical flexible hinge 22 and the first side wall, 22 upper end of the vertical flexible hinge connection movement output is micro-
Moving platform 3, lower end connection mode block frame 21, vertical flexible hinge 22 is perpendicular to platform base 1 and movement output micromotion platform 3.
During to 23 slow pressure of stacked piezoelectric actuator, stacked piezoelectric actuator 23 extends, and makes vertical flexible hinge
22 deform upon, and drive the movement of movement output micromotion platform 3, the space to be used to ensure that vertical flexible hinge 22 occurs elasticity
Space needed for deformation, vertical flexible hinge 22 and 3 directly contact of movement output micromotion platform, output displacement, vertical flexible hinge
Chain 22 is except directly as being oriented in addition to actuated element, also directly installing enlarger by stick-slip effect transmitting movement, smart
Degree is high, response is fast.
Fig. 5 is refer to, Fig. 5 is the vertical view that the driver element modularity stick-slip under the embodiment of the present invention drives locating platform
Figure.To make movement output micromotion platform 3 more smoothly slide, first is respectively provided with 3 both sides of movement output micromotion platform straight
Line guide rail 41 and second straight line guide rail 42, movement output micromotion platform 3 are pair with first straight line guide rail 41, second straight line guide rail 42
Collocation is installed.The first straight line guide rail 41 and second straight line guide rail 42 adopt crossed roller guide rail, crossed roller guide rail tool
Have the advantages that fast high precision, speed, stable movement and bearing capacity are strong, can guarantee that movement output micromotion platform 3 along first is straight
Line guide rail 41 and second straight line guide rail 42 do smoothly linear motion.On first straight line guide rail 41 and second straight line guide rail 42 respectively
At least one guide rail screw 5 is provided with, first straight line guide rail 41 and second straight line guide rail 42 are installed on platform by guide rail screw 5
The top of base 1.
Fig. 6 is refer to, and during assembling driver element module 2, driving source is provided with the outside of stacked piezoelectric actuator 23 pre-
Tight device 7, provides pretightning force for the assembling to vertical flexible hinge 22 and stacked piezoelectric actuator 23, in the present embodiment
In, protection pad 24 is provided between stacked piezoelectric actuator 23 and driving source preloader 7, is prevented in vertical flexible hinge
22 and stacked piezoelectric actuator 23 assembling pretension during, protect stacked piezoelectric actuator 23 not driven
Dynamic source preloader 7 pushes up broken.Driving source preloader 7 can select pre-loading screw or wedge.
After assembling driver element module 2, driver element module 2 is placed in the groove of platform base 1, platform base 1
Bottom is provided with some drive module adjusting screws 6 for adjusting 2 vertical direction position of driver element module, and debugging is to properly
Height, it is ensured that vertical cooperation between flexible hinge 22 and movement output micromotion platform 3 so that vertical flexible hinge 22 and fortune
The maximum static friction force and kinetic force of friction of modest size are obtained between dynamic output micromotion platform 3.
The side of platform base 1 is provided with the tightening screw 8 for fixed drive unit module, 21 the first side wall of module rack
Be provided with installing hole, tightening screw 8 little inwards to the first side wall, with fixed drive unit module 2 in suitable height.
The specific shape of each part, size, parameter drive the system of locating platform according to stick-slip and determine, to stacked pressure
The concrete voltage value of electroceramics actuator applying, buck/boost speed drive the system of locating platform according to stick-slip and determine.
Control driver element modularity stick-slip drives the method for locating platform as follows：
(1) control movement output micromotion platform to move right
A., in stacked piezoelectric actuator under without deformation state, fast is applied to stacked piezoelectric actuator
The voltage that speed rises so as to which rapid deformation extends, the vertical flexible hinge generation elastic deformation of promotion, quick bending to the left, according to
Stick-slip driving principle, as the quality of movement output micromotion platform is big, puts down to the movement output fine motion above vertical flexible hinge
Platform produces larger inertial impact force, due to inertia, now movement output micromotion platform transfixion；
B. until voltage rises to maximum, stacked piezoelectric actuator elongation maximum, then voltage is slowly reduced,
Stacked piezoelectric actuator is made slowly to deform shortening, vertical flexible hinge slowly recovers to the right in the presence of a tensile force, root
According to stick-slip driving principle, the maximum static friction force between vertical flexible hinge and movement output micromotion platform is more than kinetic force of friction,
Now movement output micromotion platform is moved right slowly together with vertical flexible hinge；
C. periodically repeat the process of a and b, just can control movement output micromotion platform continuous unidirectional mobile to the right.
(2) control movement output micromotion platform to be moved to the left
D. in stacked piezoelectric actuator in the state of elongation maximum, by stacked piezoelectric actuator
Suffered voltage is quickly reduced so as to which rapid deformation shortens, while vertical flexible hinge is in the presence of a tensile force, it is quickly extensive to the right
It is multiple, according to stick-slip driving principle, now movement output micromotion platform transfixion；
E. minimize when voltage, stacked piezoelectric actuator without during deformation, to stacked piezoelectric ceramic actuator
Device applies the slow voltage for rising so as to slow anamorphic stretching, promotes vertical flexible hinge that elastic deformation occurs, slowly curved to the left
Song, according to stick-slip driving principle, now movement output micromotion platform is moved to the left slowly together with vertical flexible hinge；
F. periodically repeat the process of d and e, just can control movement output micromotion platform continuous unidirectional mobile to the left.
In sum, the invention discloses a kind of driver element modularity stick-slip drives locating platform.In the present invention, drive
Moving cell modularized design, by module rack, these constitute to be oriented to actuated element, driving source, protection pad and driving source preloader
Component needed for driver element, is assembled into the independent module with driving function, by the position for adjusting driver element module
To change the frictional force needed for stick-slip drives.Using vertical flexible hinge, driver element can directly with movement output micromotion platform
Contact, output displacement.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or using the present invention.
Various modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized without departing from the spirit or scope of the present invention in other embodiments.Therefore, the present invention
Embodiment illustrated herein is not intended to be limited to, and is to fit to consistent with principles disclosed herein and features of novelty
Most wide scope.
Claims (7)
1. a kind of driver element modularity stick-slip drives locating platform, it is characterised in that：Including movement output micromotion platform, platform
Base and the driver element module being arranged inside platform base, the driver element module include module rack, are arranged at module
The driving source for being oriented to actuated element and being connected with guiding actuated element upper end in frame, the guiding actuated element is flexible hinge
Chain, is contacted with movement output micromotion platform at the top of the upper end of the guiding actuated element, and the lower end of the guiding actuated element is fixed on
In module rack；The flexible hinge is vertical flexible hinge or circular arc flexible hinge；The bottom connection of the vertical flexible hinge
The bottom of module rack, top are contacted with movement output micromotion platform, are set between the side wall and vertical flexible hinge of the module rack
Space is equipped with, between the vertical flexible hinge and movement output micromotion platform, stick-slip effect is produced；The vertical flexible hinge
Be moved place plane perpendicular to movement output micromotion platform；
Can deform upon when the voltage that applying one in the driving source varies, and the speed that deformation occurs is with the electricity
Press the increase of rate of change and increase, the deformation of the driving source promotes the upper end for being oriented to actuated element to occur in the horizontal direction to move
Dynamic, when the voltage for being applied is slowly to rise or slowly declining, the upper end for being oriented to actuated element is slowly moved in the horizontal direction
Dynamic, the movement output micromotion platform obtains horizontal displacement under frictional force effect, rise for rapid when the voltage for being applied or
During rapid decline, the upper end for being oriented to actuated element is moved rapidly in the horizontal direction, and the movement output micromotion platform is in inertia
The lower counter mould frame of effect is static.
2. driver element modularity stick-slip as claimed in claim 1 drives locating platform, it is characterised in that：The driving source is
Stacked piezoelectric actuator.
3. driver element modularity stick-slip as claimed in claim 1 drives locating platform, it is characterised in that：The platform base
In be provided with groove, upwards, driver element module is arranged in the groove slot opening.
4. driver element modularity stick-slip as claimed in claim 1 drives locating platform, it is characterised in that：Movement output fine motion
Platform both sides are respectively provided with first straight line guide rail and second straight line guide rail, and the first straight line guide rail and second straight line guide rail are adopted
Crossed roller guide rail, is installed on by least one guide rail screw on the first straight line guide rail and second straight line guide rail flat respectively
On platform base.
5. driver element modularity stick-slip as claimed in claim 4 drives locating platform, it is characterised in that：The driver element
Module also includes the driving source preloader that pretightning force is provided for the assembling to being oriented to actuated element and driving source, the driving source
Preloader is arranged on the outside of driving source, and being provided between the driving source and driving source preloader prevents the driving source by driving source
The broken protection pad in preloader top.
6. the driver element modularity stick-slip as described in any one of claim 1-5 drives locating platform, it is characterised in that：It is described
Platform base bottom is provided with some drive module adjusting screws for adjusting driver element module vertical direction position.
7. the driver element modular event driven locating platform as described in any one of claim 1-5, it is characterised in that：The platform
The side of base is provided with the tightening screw for fixed drive unit module.
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| CN107228757B (en) * | 2017-05-11 | 2019-05-31 | 清华大学 | Prismatic pair sticky-slip model characteristic dynamic test system based on flash spotting |
| CN110504861A (en) * | 2019-08-05 | 2019-11-26 | 包头稀土研究院 | Second level micro displacement magnifying mechanism and its amplification method |
| CN110890850B (en) * | 2019-12-05 | 2024-04-19 | 松山湖材料实验室 | Nanometer precision piezoelectric driving linear displacement table |
| CN111600505B (en) * | 2020-05-27 | 2021-11-12 | 东华大学 | Load-adjustable large-stepping-amplitude linear piezoelectric motor |
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| US20080149832A1 (en) * | 2006-12-20 | 2008-06-26 | Miguel Zorn | Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application |
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