CN215639504U - Piezoelectric actuator and nano displacement table - Google Patents

Abstract

The utility model relates to a piezoelectric driver and a nano displacement platform, wherein the piezoelectric driver comprises a flexible inertial body and piezoelectric ceramics, and the flexible inertial body comprises a base, a longitudinal beam, a mounting seat, a flexible block, a cross beam and a bridge plate; the longitudinal beam is arranged on the base, the mounting seat is connected with the longitudinal beam, and the mounting seat can swing relative to the base; the mounting seat is provided with an assembly cavity, the flexible block and the piezoelectric ceramics are arranged in the assembly cavity, and the flexible block is connected with the piezoelectric ceramics; the crossbeam sets up on the top of flexible piece, and the bridge plate is connected with the crossbeam, and the bridge plate can be relatively the flexible piece swing. The bridge plate is used for connecting the first friction plate, the second friction plate in friction contact with the first friction plate is used for connecting the sliding table, the longitudinal beam is arranged between the mounting seat and the base, and the cross beam is arranged between the bridge plate and the flexible block, so that the first friction plate and the second friction plate are adaptive to fit, and the size processing and mounting errors of the first friction plate and the second friction plate are effectively compensated.

Description

Piezoelectric actuator and nano displacement table

Technical Field

The utility model relates to the technical field of precision motion, in particular to a piezoelectric driver and a nanometer displacement platform.

Background

With the scientific progress and the development of human cognition, the human science and technology is mainly developed in two major directions, one is exploration on an astronomical scale, such as space technology, interplanetary exploration, black hole discovery and the like; the other is the study of the microscopic scale, such as the composition of the substance, the quantum mechanics theory, even the chip technology, and the like. The nano micro-driving technology based on the stick-slip driving meets the requirement of precise operation on the micro-scale, is greatly developed, is widely applied to various fields such as medicine, scientific research, aerospace, production and manufacture and the like at present, and provides powerful technical support for the experimental research of human beings on the micro-field and the product manufacture.

The stick-slip driving has the working principle of inverse piezoelectric effect of piezoelectric ceramic, and the piezoelectric ceramic is applied with an electric field to generate a tiny expansion under the action of the electric field, so that the expansion scale can reach sub-nanometer scale by accurately controlling the electric field, and the stick-slip driving has large expansion force and quick response. Compared with other cross-scale motion driving modes, the stick-slip driving device has the advantages of simple and convenient driving control and principle, high resolution, large stroke, simple structure, accurate positioning, large load, easiness in miniaturization and the like.

The traditional stick-slip driving structure cannot be adjusted in a self-adaptive manner, and the overall stability is greatly influenced by external factors such as the processing precision and the assembly precision of each part, so that the requirements on the processing precision and the assembly precision of each part are high.

SUMMERY OF THE UTILITY MODEL

In view of the above, it is necessary to provide a piezoelectric actuator and a nano-displacement stage for solving the conventional technical problems.

A piezoelectric driver comprises a flexible inertial body and piezoelectric ceramics, wherein the flexible inertial body comprises a base, a longitudinal beam, a mounting seat, a flexible block, a cross beam and a bridge plate; the longitudinal beam is arranged on the base, the mounting seat is connected with the longitudinal beam, and the mounting seat can swing relative to the base; an assembly cavity is formed in the mounting seat, the flexible block and the piezoelectric ceramics are arranged in the assembly cavity, and the flexible block is connected with the piezoelectric ceramics; the crossbeam sets up on the top of flexible piece, the bridge plate with the crossbeam is connected, just the bridge plate can be relative the flexible piece swing.

The bridge plate of the piezoelectric driver is used for connecting a first friction plate, the second friction plate in friction contact with the first friction plate is used for connecting a sliding table, a longitudinal beam is arranged between the mounting seat and the base, the mounting seat is allowed to swing slightly in a deflection angle relative to the base, a cross beam is arranged between the bridge plate and the flexible block, the bridge plate is allowed to swing slightly in a deflection angle relative to the flexible block, self-adaption fitting of the first friction plate and the second friction plate is achieved, good plane contact is achieved between the first friction plate and the second friction plate, and size processing and installation errors of the first friction plate and the second friction plate are effectively compensated.

In one embodiment, the longitudinal extension direction of the longitudinal beam is perpendicular to the longitudinal extension direction of the cross beam.

In one embodiment, one end of the bottom of the mounting seat is connected with the longitudinal beam, and the flexible block is located at one end of the mounting seat far away from the longitudinal beam.

In one embodiment, the cross beam is arranged on the middle position of the bridge plate and the flexible block.

In one embodiment, the piezoelectric ceramic is provided with a mounting seat, and the flexible block is provided with a mounting hole for mounting the piezoelectric ceramic.

In one embodiment, the flexible block is provided with an accommodating cavity, an elastic part is arranged in the accommodating cavity, one end of the elastic part is connected with the top wall of the accommodating cavity, and the elastic part generates elastic deformation to output preset pretightening force to the bridge plate.

In one embodiment, the elastic part comprises a mounting seat and a preload piece arranged on the mounting seat, wherein the preload piece is pressed against the bottom of the elastic part to enable the elastic part to be elastically deformed.

In one embodiment, the elastic member is a bow spring, a hollow elastomer or a solid elastomer.

A nanometer displacement table comprises a base body, a sliding table, a friction assembly and the piezoelectric actuator; the piezoelectric actuator is arranged on the base body, the sliding table is movably arranged on the base body, the friction assembly comprises a first friction plate and a second friction plate, the first friction plate is arranged on the bridge plate, the second friction plate is arranged on the sliding table, and the second friction plate is in friction contact with the first friction plate.

In one embodiment, the sliding table further comprises two first guide rails and two second guide rails, the first guide rails are arranged on the base body, the second guide rails are arranged on the sliding table, the two first guide rails are located between the two second guide rails, and the two second guide rails are in one-to-one corresponding sliding contact with the two first guide rails respectively

Drawings

FIG. 1 is a schematic structural diagram of a nano-displacement stage according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view taken along the line A-A of the nano-displacement stage shown in FIG. 1;

FIG. 3 is a cross-sectional view of the nano-displacement stage shown in FIG. 1 taken along the line B-B;

FIG. 4 is a schematic structural diagram of a substrate of the nano-displacement stage shown in FIG. 1;

FIG. 5 is a bottom view of the substrate of the nano-displacement table of FIG. 4;

FIG. 6 is a schematic structural diagram of a sliding table of the nano-displacement table shown in FIG. 1;

fig. 7 is a schematic structural diagram of a piezoelectric actuator of the nano-displacement stage shown in fig. 2.

The meaning of the reference symbols in the drawings is:

the base body 10, the positioning groove 11, the accommodating groove 12, the fixing plate 13, the through opening 130, the U-shaped groove 131, the boss 132, the relief groove 14, the partition plate 15, the through hole 151, the mounting groove 16, the sliding table 20, the face plate 21, the strip-shaped groove 210, the guide plate 22, the mounting hole 220, the first guide rail 23, the second guide rail 24, the friction member 30, the first friction plate 31, the second friction plate 32, the position sensor 40, the encoder 41, the linear scale 42, the piezoelectric actuator 50, the flexible inertial body 60, the base 61, the first step surface 610, the longitudinal beam 62, the mounting seat 63, the assembly cavity 630, the threaded hole 631, the flexible block 64, the accommodating cavity 640, the elastic member 641, the first through hole 642, the first flat plate hinge 643, the second flat plate hinge 644, the reinforcing part 645, the flat plate part 646, the groove 647, the cross beam 65, the bridge plate 66, the limiting groove 660, the pressure seat 67, the second step surface 670, the second through hole 671, the guide sleeve, the piezoelectric ceramic 70, preload member 80, preload member 90.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Please refer to fig. 1 to 7, which illustrate a nano-displacement stage according to an embodiment of the present invention. Referring to fig. 1 and 2, the nano-displacement stage includes a base 10, a sliding table 20, a friction element 30, a position sensor 40, and a piezoelectric driver 50. The piezoelectric actuator 50 is disposed on the base body 10. The sliding table 20 is movably arranged on the base body 10. The friction member 30 is connected between the piezoelectric actuator 50 and the slide table 20. The piezoelectric actuator 50 drives the sliding table 20 to generate nanometer-scale displacement through the friction assembly 30. A position sensor 40 is located between the base body 10 and the slide table 20, and the position sensor 40 is used to detect the moving position of the slide table 20.

Referring to fig. 4 and 5, in the present embodiment, the substrate 10 is a square plate. The base 10 is provided with a positioning groove 11 and an accommodating groove 12, and the positioning groove 11 and the accommodating groove 12 are respectively arranged at two opposite sides of the base 10. Specifically, the positioning groove 11 is disposed on one side of the base 10 away from the sliding table 20, and the accommodating groove 12 is disposed on one side of the base 10 facing the sliding table 20. The positioning slot 11 corresponds to the accommodating slot 12, and both the positioning slot 11 and the accommodating slot 12 are used for accommodating the piezoelectric driver 50. Further, a fixing plate 13 is disposed between the positioning groove 11 and the accommodating groove 12, and the fixing plate 13 is used for fixing the piezoelectric driver 50. The fixing plate 13 is provided with a through hole 130 communicating the positioning groove 11 and the accommodating groove 12, and the through hole 130 is used for the piezoelectric driver 50 to penetrate. One side of the fixing plate 13 facing the positioning groove 11 is provided with a U-shaped groove 131, and the U-shaped groove 131 is arranged at one end of the fixing plate 13. A projection 132 is provided on the side of the fastening plate 13 facing away from the U-shaped groove 131.

In some embodiments, the base 10 is further provided with an avoiding groove 14, the avoiding groove 14 and the accommodating groove 12 are located on the same side of the base 10, a partition plate 15 is disposed between the avoiding groove 14 and the accommodating groove 12, the partition plate 15 and the boss 132 are respectively located at two opposite ends of the accommodating groove 12, and the partition plate 15 is provided with a via hole 151 communicating the avoiding groove 14 and the accommodating groove 12.

In some embodiments, the base body 10 is further provided with a mounting groove 16, the mounting groove 16 is located on the same side of the base body 10 as the accommodating groove 12, and the mounting groove 16 is used for mounting the position sensor 40.

Referring to fig. 6, the sliding table 20 includes a panel 21 and two guide plates 22, a strip-shaped groove 210 is disposed on a side of the panel 21 facing the base 10, and the strip-shaped groove 210 is used for positioning the friction element 30. The guide plates 22 are provided on the side of the panel 21 facing the base body 10, and the two guide plates 22 are oppositely disposed at a spacing.

Referring to fig. 1 and 2, the nano-displacement stage further includes two first guide rails 23 and two second guide rails 24, the two first guide rails 23 are disposed on the substrate 10 at intervals, and in the present embodiment, the first guide rails 23 are connected to the substrate 10 through screws. The two first guide rails 23 are respectively disposed on two opposite sides of the accommodating groove 12. Two second guide rails 24 are oppositely arranged on the sliding table 20 at intervals, and in the embodiment, the second guide rails 24 are connected with the panel 21 through screws. Further, two second guide rails 24 are located between the two guide plates 22, two first guide rails 23 are located between the two second guide rails 24, and the two second guide rails 24 are in one-to-one corresponding sliding contact with the two first guide rails 23 respectively. It will be understood that the second guide rail 24 slides along the first guide rail 23 when the slide table 20 is moved relative to the base body 10. By providing the two first guide rails 23 and the two second guide rails 24, stability of the sliding table 20 in moving relative to the base body 10 can be advantageously ensured.

Further, the first guide rail 23 and the two second guide rails 24 are both cross roller guide rails, and a retainer and balls are provided between the corresponding first guide rail 23 and the corresponding second guide rail 24.

Referring to fig. 6, in some embodiments, the guide plate 22 is provided with a mounting hole 220, and one end of a screw passes through the mounting hole 220 and abuts against the second guide rail 24, so as to effectively ensure the stability of the sliding contact between the second guide rail 24 and the first guide rail 23.

Referring to fig. 2 and 3, the friction assembly 30 includes a first friction plate 31 and a second friction plate 32, the first friction plate 31 and the second friction plate 32 are in friction contact, and the first friction plate 31 and the second friction plate 32 are in line-surface contact or surface-surface contact. In a preferred embodiment of the present invention, the first friction plate 31 is a block, one surface of the first friction plate 31 contacting the second friction plate 32 is an arc surface, the second friction plate 32 is a strip shape, and one surface of the second friction plate 32 contacting the first friction plate 31 is a plane surface, so that the first friction plate 31 contacts the second friction plate 32 in a linear surface contact manner, which is convenient for adjusting and controlling the friction force between the first friction plate 31 and the second friction plate 32. Of course, in other embodiments, the surface of the first friction plate 31 contacting the second friction plate 32 may be a flat surface, and the surface of the second friction plate 32 contacting the first friction plate 31 may be an arc surface, so that the first friction plate 31 and the second friction plate 32 may contact each other linearly and planarly. In other embodiments, the surface of the first friction plate 31 contacting the second friction plate 32 is a flat surface, and the surface of the second friction plate 32 contacting the first friction plate 31 is also a flat surface, so that the first friction plate 31 contacts the second friction plate 32 in a surface-to-surface contact manner. The first friction plate 31 is arranged on the piezoelectric driver 50, the second friction plate 32 is arranged on the sliding table 20, and the piezoelectric driver 50 drives the second friction plate 32 to move, so that friction motion is generated between the second friction plate 32 and the first friction plate 31, and the sliding table 20 is further displaced.

Further, the second friction plate 32 is accommodated in the strip-shaped groove 210 of the panel 21, and the second friction plate 32 is limited by the strip-shaped groove 210, so that the installation accuracy of the second friction plate 32 is effectively improved. In addition, in the present embodiment, the second friction plate 32 and the face plate 21 are rigidly connected by epoxy resin.

Referring to fig. 2, the position sensor 40 includes an encoder 41 and a linear scale 42, the encoder 41 is disposed on the substrate 10, specifically, the encoder 41 is accommodated in the installation groove 16, preferably, the encoder 41 and the substrate 10 are rigidly connected through epoxy resin, in other embodiments, the epoxy resin may be replaced by other high polymer, and here, the connection material between the encoder 41 and the substrate 10 is not limited. The linear scale 42 is disposed on the bottom of one of the second rails 24, and specifically, the linear scale 42 is rigidly connected to the one of the second rails 24 by epoxy. The linear scale 42 is provided corresponding to the encoder 41, senses the moving position of the linear scale 42 by the encoder 41, and then outputs a position signal to accurately detect the moving position of the slide table 20.

Referring to fig. 3 and 7, the piezoelectric driver 50 includes a flexible inertial body 60 and a piezoelectric ceramic 70, where the flexible inertial body 60 includes a base 61, a longitudinal beam 62, a mounting seat 63, a flexible block 64, a cross beam 65, and a bridge plate 66. The base 61 is provided on the base 10. The longitudinal beams 62 are provided on the base 61. The bottom of the mount 63 is connected to the longitudinal beam 62, and the mount 63 can swing about the longitudinal beam 62 with respect to the base 61. The mounting base 63 is provided with an assembly cavity 630, the flexible block 64 and the piezoelectric ceramic 70 are arranged in the assembly cavity 630, and the flexible block 64 is connected with the piezoelectric ceramic 70. A cross member 65 is provided on top of the flexible block 64, the bottom of a bridge plate 66 is connected to the cross member 65, and the bridge plate 66 is able to swing relative to the flexible block 64 about the cross member 65, the bridge plate 66 being connected to the friction assembly 30, in particular, the bridge plate 66 being connected to the first friction plate 31.

The bridge plate 66 of the piezoelectric driver 50 is used for connecting the first friction plate 31, the second friction plate 32 in frictional contact with the first friction plate 31 is used for connecting the sliding table 20, the longitudinal beam 62 is arranged between the mounting seat 63 and the base 61, the mounting seat 63 is allowed to swing slightly relative to the base 61, the deflection angle error of the first friction plate 31 and the second friction plate 32 in the direction perpendicular to the longitudinal beam 62 is compensated, the cross beam 65 is arranged between the bridge plate 66 and the flexible block 64, the bridge plate 66 is allowed to swing slightly relative to the flexible block 64, the deflection angle error of the first friction plate 31 and the second friction plate 32 in the direction perpendicular to the cross beam 65 is compensated, the self-adaptive fitting of the first friction plate 31 and the second friction plate 32 in each direction is realized, the first friction plate 31 and the second friction plate 32 have better plane contact, and the size processing and mounting errors of the first friction plate 31 and the second friction plate 32 are effectively compensated, namely, the size error caused by the machining process of the first friction plate 31 and the second friction plate 32 and the assembly accumulated error caused by the installation process are greatly reduced or even eliminated.

In the present embodiment, the base 61, the longitudinal beams 62, the mounting seats 63, the flexible blocks 64, the cross beams 65 and the bridge plates 66 are integrally formed.

Further, the base 61 is accommodated in the positioning groove 11, the base 61 is tightly attached to the fixing plate 13, and the base 61 is fixedly connected with the fixing plate 13 through screws, so that the position of the flexible inertial body 6040 is not deviated and does not shake under the action of external force, and the mounting stability is improved.

In some embodiments, the flexible inertial body 60 further includes a pressure seat 67, the pressure seat 67 is accommodated in the positioning groove 11, the pressure seat 67 is tightly attached to the fixing plate 13, and the pressure seat 67 is fixedly connected to the fixing plate 13 through screws. The pressure seat 67 is arranged in parallel with the base 61, and one end of the pressure seat 67 is fastened to one end of the base 61. Specifically, one end of the base 61 close to the pressure seat 67 is provided with a first step surface 610, one end of the pressure seat 67 close to the base 61 is provided with a second step surface 670, and the second step surface 670 and the first step surface 610 are in fit and lock joint. Therefore, understandably, when the base 61 is installed, after the base 61 is locked on the fixing plate 13 through screws, the first step surface 610 of the base 61 is matched and buckled with the second step surface 670 of the pressure seat 67, so that secondary fixation of the base 61 is realized, the overall installation stability of the flexible inertial body 60 is effectively improved, and the flexible inertial body 60 can better guarantee the accurate motion output of the sliding table 20 on the nanoscale.

The stringers 62 are located within the through openings 130. The longitudinal beams 62 are strip-shaped, the cross beams 65 are also strip-shaped, and the longitudinal extension direction of the longitudinal beams 62 is perpendicular to the longitudinal extension direction of the cross beams 65. Specifically, in the present embodiment, as shown in fig. 7, the transverse direction of the base 61 is taken as the X direction, the longitudinal direction of the base 61 is taken as the Y direction, the longitudinal beam 62 extends along the Y direction, and the transverse beam 65 extends along the X direction, so that the front, back, left and right directions of the friction assembly 30 are adaptively adjusted.

The mounting base 63 is U-shaped, and the mounting base 63 extends from the through opening 130 to the receiving cavity 12. One end of the bottom of the mounting base 63 is connected to the longitudinal beam 62, and a gap is formed between the bottom of the mounting base 63 and the top of the base 61, so that the mounting base 63 can swing around the longitudinal beam 62 relative to the base 61 at a small angle.

A flexible block 64 is located at the end of the mounting base 63 remote from the stringer 62. The flexible block 64 is provided with an accommodating cavity 640, the accommodating cavity 640 is internally provided with an elastic member 641, one end of the elastic member 641 is connected with the top wall of the accommodating cavity 640, and the elastic member 641 generates elastic deformation to output preset pretightening force to the bridge plate 66 so as to adjust positive pressure of the friction assembly 30, namely, adjust friction force between the first friction plate 31 and the second friction plate 32.

In the preferred embodiment of the present invention, the elastic element 641 is a bow spring, and it can be understood that the elastic element 641 is in a serpentine shape, so that the elastic element 641 can generate a large deformation under the action of an external force, and the adjustment range is large, thereby ensuring the stability of the output pretightening force. Further, the material of the elastic element 641 is the same as that of the flexible block 64, and the elastic element 641 and the flexible block 64 are integrally formed. In other embodiments, the elastic member 641 may be a hollow elastomer or a solid elastomer, which may be rigidly connected to the flexible block 64.

In some embodiments, the piezoelectric driver 50 further includes a preload element 80 on the mounting base 63, and the preload element 80 presses against the bottom of the elastic element 641 to achieve a predetermined preload to the bridge plate 66 by elastically deforming the elastic element 641. The bottom of the mounting seat 63 is provided with a first through hole 642 communicating with the mounting cavity 630640, and one end of the preload member 80 extends into the accommodating cavity 640 through the first through hole 642 and presses against the bottom of the elastic member 641. Further, the pressure seat 67 is provided with a second through hole 671, and the second through hole 671 is correspondingly communicated with the first through hole 642, so that one end of the preload member 80 sequentially passes through the second through hole 671 and the first through hole 642 to extend into the accommodating cavity 640 to press against the bottom of the elastic member 641.

As can be understood, in the assembly process, the flexible inertial body 60 is firstly installed on the base 10, the first friction plate 31 is installed on the flexible inertial body 60, the second friction plate 32 is installed on the sliding table 20, the sliding table 20 is assembled on the base 10, the second friction plate 32 is in frictional contact with the first friction plate 31, the first friction plate 31 is adaptively adjusted to the contact surface between the first friction plate 31 and the second friction plate 32 through the longitudinal beam 62 and the transverse beam 65, one end of the preload member 80 sequentially passes through the second through hole 671 and the first through hole 642 to extend into the accommodating cavity 640 and press the elastic member 641, so that the elastic member 641 generates compression deformation, and when the elastic member 641 generates compression deformation, the top of the flexible block 64, the transverse beam 65 and the bridge plate 66 are sequentially pushed to move upwards, so as to increase the positive pressure between the first friction plate 31 and the second friction plate 32, and to achieve the range adjustment of the frictional force between the first friction plate 31 and the second friction plate 32.

Further, a groove 647 is disposed on a bottom of the elastic member 641, and one end of the preload member 80 is disposed in the groove 647, so that the elastic member 641 is prevented from slipping due to force during the preload adjustment process to affect the preload output.

In some embodiments, the preload member 80 is a screw. Specifically, a guide sleeve 672 is arranged on one side of the pressure seat 67 facing the mounting seat 63, the guide sleeve 672 is correspondingly communicated with the second through hole 671, the guide sleeve 672 extends into the first through hole 642, one end of the preload member 80 penetrates through the guide sleeve 672 and presses against the groove 647 of the elastic member 641, the preload member 80 is in threaded connection with the guide sleeve 672 through the arrangement of the guide sleeve 672, and the preload member 80 is adjusted by rotating the preload member 80 to adjust the preload of the preload member 80 on the elastic member 641.

In some embodiments, the flexible block 64 includes a first plate hinge 643, a second plate hinge 644, a reinforcement portion 645, and a plate portion 646, wherein the first plate hinge 643 and the second plate hinge 644 are connected to the bottom of the assembly chamber 630, and the first plate hinge 643 and the second plate hinge 644 are spaced apart from each other. The first plate hinge 643 is higher than the second plate hinge 644, the bottom of the reinforcement portion 645 is connected to the top of the second plate hinge 644, one side of the reinforcement portion 645 is connected to the piezoelectric ceramic 70, and the plate portion 646 connects the top of the first plate hinge 643 and the top of the reinforcement portion 645.

The thickness of the first flat hinge 643 is consistent with the thickness of the second flat hinge 644, so that the deformation degree of the first flat hinge 643 is consistent with that of the second flat hinge 644, and therefore, the same elastic deformation of the first flat hinge 643 and the second flat hinge 644 is ensured when the piezoelectric ceramic 70 expands. And a side surface of the reinforcing portion 645 connected to the piezoelectric ceramic 70 and a side surface of the second plate hinge 644 facing the piezoelectric ceramic 70 are on the same plane, the reinforcing portion 645 protrudes out of a side surface of the accommodating cavity 640 from a side surface of the second plate hinge 644 facing the accommodating cavity 640, that is, the thickness of the reinforcing portion 645 is greater than that of the second plate hinge 644, so that under the expansion action of the piezoelectric ceramic 70, the second plate hinge 644 is caused to generate obvious elastic deformation, while the elastic deformation generated by the reinforcing portion 645 is not obvious or does not generate elastic deformation, so that the reinforcing portion 645 has better guidance for the piezoelectric ceramic 70, and the piezoelectric ceramic 70 is prevented from deflecting along with the flexible block 64 in the expansion process.

In some embodiments, a pre-pressing member 90 is further included, which is disposed on the mounting seat 63, and the pre-pressing member 90 presses against a side of the flexible block 64 facing away from the piezoelectric ceramic 70, so that the pre-pressing member 90 can assist the flexible block 64 to be quickly reset during the contraction of the piezoelectric ceramic 70.

Further, the pre-pressing member 90 is a screw, a threaded hole 631 is formed in a side wall of the mounting seat 63, one end of the pre-pressing member 90 penetrates through the threaded hole 631 and presses against the first flat hinge 643 of the flexible block 64, and the pre-pressing member 90 is in threaded connection with the threaded hole 631, so that the pre-pressing force of the pre-pressing member 90 on the flexible block 64 is adjusted by rotating the pre-pressing member 90.

The cross beam 65 is disposed at the middle position of the bridge plate 66 and the flexible block 64, specifically, the cross beam 65 is disposed at the middle position of the flat plate portion 646, the bridge plate 66 is a rectangular plate, the middle position of the bottom of the bridge plate 66 is connected to the cross beam 65, the top of the bridge plate 66 is provided with a limiting groove 660, the first friction plate 31 is accommodated in the limiting groove 660, and the first friction plate 31 and the bridge plate 66 are rigidly connected through epoxy resin.

According to the nano displacement table, the longitudinal beam 62 is arranged between the mounting seat 63 and the base 61, so that the mounting seat 63 is allowed to slightly swing at an angle relative to the base 61, the cross beam 65 is arranged between the bridge plate 66 and the flexible block 64, so that the bridge plate 66 is allowed to slightly swing relative to the flexible block 64, after the friction assembly 30 is mounted, the contact surface between the first friction plate 31 and the second friction plate 32 can be adjusted in a self-adaptive mode, the influence of external factors such as the processing precision and the assembling precision of the friction assembly 30 on the stability of the nano displacement table is effectively reduced, the stability of motion output of the nano displacement table is effectively improved, and the service life of the nano displacement table is prolonged. By arranging the elastic member 641 and the pre-tightening member 80, the pre-tightening pressure between the first friction plate 31 and the second friction plate 32 can be adjusted in a large range, and can be adjusted according to different loads and speed requirements, so that the optimal motion output can be achieved under different working requirements. The nanometer displacement table is compact in structure, can be applied to a small installation and operation space, can realize a large-range operation stroke in a small space, is free of vertical friction in a stick-slip mode, only has single friction in stick-slip motion, and reduces power loss and requirements for other parts.

In addition, the nano displacement table can be applied to various high-precision fields such as scientific research, semiconductors, biomedicine, advanced manufacturing, optics, communication, aerospace and the like, and provides powerful technical support for human experimental research and product manufacturing in the micro field. The nano displacement platform can be subjected to micro-nano operation in vacuum, and compared with motor driving, the nano displacement platform is small in current, small in heat generation, free of electromagnetic field generation, and has great advantages in fields with extremely high operation requirements, and has a non-negligible effect on the continuous research and development of human beings in the micro field.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. A piezoelectric driver is characterized by comprising a flexible inertial body and piezoelectric ceramics, wherein the flexible inertial body comprises a base, a longitudinal beam, a mounting seat, a flexible block, a cross beam and a bridge plate; the longitudinal beam is arranged on the base, the mounting seat is connected with the longitudinal beam, and the mounting seat can swing relative to the base; an assembly cavity is formed in the mounting seat, the flexible block and the piezoelectric ceramics are arranged in the assembly cavity, and the flexible block is connected with the piezoelectric ceramics; the crossbeam sets up on the top of flexible piece, the bridge plate with the crossbeam is connected, just the bridge plate can be relative the flexible piece swing.

2. The piezoelectric actuator according to claim 1, wherein a length extension direction of the longitudinal beam is perpendicular to a length extension direction of the cross beam.

3. The piezoelectric actuator of claim 1, wherein an end of the bottom of the mounting base is connected to the longitudinal beam, and the flexure is located at an end of the mounting base remote from the longitudinal beam.

4. The piezoelectric actuator of claim 1, wherein the beam is disposed intermediate the bridge plate and the compliant mass.

5. The piezoelectric actuator according to claim 1, further comprising a pre-press provided on the mount, the pre-press pressing against a side of the flexible block facing away from the piezoelectric ceramic.

6. The piezoelectric driver according to claim 1, wherein the flexible block is provided with an accommodating cavity, an elastic member is disposed in the accommodating cavity, one end of the elastic member is connected to a top wall of the accommodating cavity, and the elastic member is elastically deformed to output a preset pre-tightening force to the bridge plate.

7. The piezoelectric actuator according to claim 6, further comprising a preload member provided on the mount, the preload member pressing against a bottom portion of the elastic member to elastically deform the elastic member.

8. The piezoelectric actuator of claim 6, wherein the resilient member is a bow spring, a hollow elastomer, or a solid elastomer.

9. A nano-displacement stage comprising a base, a stage, a friction assembly and a piezoelectric actuator as claimed in any one of claims 1 to 8; the piezoelectric actuator is arranged on the base body, the sliding table is movably arranged on the base body, the friction assembly comprises a first friction plate and a second friction plate, the first friction plate is arranged on the bridge plate, the second friction plate is arranged on the sliding table, and the second friction plate is in friction contact with the first friction plate.

10. The nanometer displacement table of claim 9, further comprising two first guide rails and two second guide rails, wherein the first guide rails are arranged on the base body, the second guide rails are arranged on the sliding table, the two first guide rails are arranged between the two second guide rails, and the two second guide rails are in one-to-one sliding contact with the two first guide rails respectively.

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