CN219869554U - Displacement platform and optical measurement device - Google Patents

Abstract

The utility model relates to a displacement platform and optical measurement equipment. The guide rail is fixed on the base plate and extends along a first direction, and the sliding block is slidably arranged on the guide rail; the piezoelectric ceramic is fixed on the base plate and fixedly connected with the sliding block. The guide rail can limit and guide the sliding block, so that the sliding direction of the sliding block is limited in a first direction. After the piezoelectric ceramic is loaded with the electric signal, the piezoelectric ceramic can expand or contract to drive the sliding block to slide along the guide rail, so that the electric signal is converted into the action of the sliding block in the first direction. Because the sliding direction can be limited to the first direction by the cooperation of the guide rail and the sliding block, even if the piezoelectric ceramic has smaller deflection in the installation process, the sliding block can be ensured to move accurately along the first direction. Therefore, the displacement platform and the optical measurement device have higher displacement precision.

Description

Displacement platform and optical measurement device

Technical Field

The utility model relates to the technical field of precise instruments, in particular to a displacement platform and optical measurement equipment.

Background

The nano-scale displacement platform is a core element in a precise measuring instrument generally, and the precise measuring instrument comprising the displacement platform is widely applied to the fields of integrated circuit manufacturing process, advanced packaging, material surface engineering, novel display technology, high-efficiency solar cell technology, novel microfluidic technology, high-end communication industry, aerospace, ultra-precise machining and the like.

The nano-scale displacement platform is generally based on piezoelectric ceramic materials, and the piezoelectric ceramic materials expand after being electrified, so that an electric signal is converted into mechanical action. Since the deformation amount of the piezoelectric ceramic after being energized is extremely small, the displacement accuracy is remarkably reduced due to the fine deviation of the piezoelectric ceramic during installation. The existing displacement platform is complex to assemble, and deviation is very easy to occur in the piezoelectric ceramic installation process, so that the displacement precision and stability of the existing displacement platform are relatively low.

Disclosure of Invention

In view of the above, it is necessary to provide a displacement platform and an optical measurement device capable of improving displacement accuracy and stability.

A displacement platform comprises a base plate, a guide rail, a sliding block and piezoelectric ceramics; the guide rail is fixed on the base plate and extends along a first direction, and the sliding block is slidably arranged on the guide rail; the piezoelectric ceramic is fixed on the base plate and fixedly connected with the sliding block; the piezoelectric ceramic can drive the sliding block to slide along the first direction under the action of an electric signal.

In one embodiment, the sliding block is provided with a guide hole extending along the first direction, a bearing sleeve is installed in the guide hole, and the guide rail is arranged in the bearing sleeve in a penetrating manner, so that the sliding block can slide along the guide rail.

In one embodiment, at least two guide rails are arranged, the at least two guide rails are arranged at intervals along a second direction perpendicular to the first direction, guide holes corresponding to the at least two guide rails one by one are formed in the sliding block, and the bearing sleeve is arranged in each guide hole.

In one embodiment, the piezoelectric ceramic slider further comprises a pre-tightening assembly, wherein the pre-tightening assembly provides a pre-tightening force for the slider so that the slider is abutted against the piezoelectric ceramic along the first direction.

In one embodiment, two ends of the guide rail are respectively and fixedly connected with a first fixing block and a second fixing block, and the first fixing block and the second fixing block are fixedly installed on the substrate.

In one embodiment, the pre-tightening assembly comprises a pre-tightening spring, the pre-tightening spring is sleeved on the guide rail, and two ends of the pre-tightening spring are respectively abutted with the first fixed block and the sliding block.

In one embodiment, a receiving groove is formed on one side of the second fixing block facing the substrate, and the piezoelectric ceramic is detachably installed in the receiving groove.

In one embodiment, the substrate is provided with a first mounting structure, the slider is provided with a second mounting structure, and the first mounting structure and the second mounting structure are both used for connecting an external element.

In one embodiment, the piezoelectric ceramic is strip-shaped and extends along the first direction; alternatively, the piezoelectric ceramic is in a block shape.

An optical measurement device comprising a displacement platform as claimed in any one of the preceding preferred embodiments.

Above-mentioned displacement platform and optical measurement equipment, the guide rail can realize spacing and guide to the slider to limit the slip direction of slider in first direction. After the piezoelectric ceramic is loaded with the electric signal, the piezoelectric ceramic can expand or contract to drive the sliding block to slide along the guide rail, so that the electric signal is converted into the action of the sliding block in the first direction. Because the sliding direction can be limited to the first direction by the cooperation of the guide rail and the sliding block, even if the piezoelectric ceramic has smaller deflection in the installation process, the sliding block can be ensured to move accurately along the first direction. Therefore, the displacement platform and the optical measurement device have higher displacement precision and stability.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of an optical measurement device according to a preferred embodiment of the present utility model;

FIG. 2 is a schematic view of a displacement platform of the optical measurement device of FIG. 1;

FIG. 3 is an exploded view of the displacement platform of FIG. 2;

fig. 4 is an exploded view of a displacement platform according to another embodiment of the present utility model.

Reference numerals:

10. an optical measurement device; 100. a displacement platform; 110. a substrate; 111. a first mounting structure; 120. a guide rail; 121. a first fixed block; 122. a second fixed block; 130. a slide block; 131. a guide hole; 132. a bearing sleeve; 133. a second mounting structure; 140. piezoelectric ceramics; 150. a pretension assembly; 200. an optical interference module; 300. a Z-axis focusing module; 400. and (5) a base.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Referring to fig. 1, an optical measurement device 10 and a displacement platform 100 are provided. Wherein the optical measurement device 10 comprises a displacement platform 100.

The optical measurement device 10 may be a device that needs to achieve high-precision displacement during operation of an interferometer, etc., and the displacement platform 100 is capable of achieving high-precision displacement on the order of micrometers or nanometers. Specifically, the optical measurement device 10 in the present embodiment is an interferometer. Further, the optical measurement device 10 as an interferometer further includes an optical interference module 200, a Z-axis focusing module 300, a camera and a base 400, and an objective table for holding an object to be measured is disposed on the base 400, and is located below the optical interference module 200.

The Z-axis focusing module 300 is mounted on the base 400, the displacement platform 100 is mounted at the moving end of the Z-axis focusing module 300, the optical interference module 200 and the displacement platform 100 are independently arranged and mounted at the moving end of the displacement platform 100, the camera is mounted on the optical interference module 200, the optical interference module 200 can make the measuring light from the surface of the object to be measured interfere with the reference light to form an interference light beam, and the camera receives the interference light beam to form an interference image carrying the surface profile information of the object to be measured. The Z-axis focusing module 300 can drive the optical interference module 200 and the displacement platform 100 to move, so that the optical interference module 200 focuses on the object to be measured, and the displacement platform 100 can drive the optical interference module 200 to integrally realize high-precision displacement. In addition, the displacement platform 100 may be integrated in the optical interference module 200, and drives the objective lens in the optical interference module 200 to realize high-precision displacement.

Referring to fig. 2 and 3, the displacement platform 100 according to the preferred embodiment of the utility model includes a substrate 110, a guide rail 120, a slider 130 and a piezoelectric ceramic 140.

The substrate 110 may be a plate-shaped structure formed by metal materials, and the shape of the substrate may be set according to the actual application scenario of the displacement platform 100, and is usually substantially rectangular. In the present embodiment, the first mounting structure 111 is provided on the substrate 110. The first mounting structure 111 may be a structure such as a threaded mounting hole, a support column, etc. that can provide a mounting site for an external element, and is convenient for dismounting the external element. Specifically, the displacement platform 100 is mounted to the moving end of the Z-axis focusing module 300 through the first mounting structure 111.

The guide rail 120 is fixed to the base plate 110 and extends in the first direction, and the slider 130 is slidably mounted to the guide rail 120. Specifically, the first direction refers to the vertical direction shown in fig. 1. The guide rail 120 can limit and guide the slider 130, thereby limiting the sliding direction of the slider 130 in the first direction. The moving end of the displacement platform 100 is disposed on the slider 130. In the present embodiment, the slider 130 is provided with a second mounting structure 133. Likewise, the second mounting structure 133 may also be a structure that can provide a mounting site for an external element, such as a threaded mounting hole and a support column, so as to facilitate disassembly and assembly of the external element. Specifically, the optical interference module 200 is mounted on the moving end of the displacement platform 100, i.e. the slider 130, through the second mounting structure 133.

Because the first mounting structure 111 and the second mounting structure 133 can be threaded mounting holes, the displacement platform 100 can be assembled with other devices or parts by simply fixing the two mounting structures with screws, which is convenient and quick.

In the present embodiment, the two ends of the guide rail 120 are fixedly connected to the first fixing block 121 and the second fixing block 122, respectively, and the first fixing block 121 and the second fixing block 122 are fixedly mounted on the substrate 110. The first fixing block 121 and the second fixing block 122 are generally metal blocks, the two ends of the guide rail 120 can be connected to the first fixing block 121 and the second fixing block 122 by fastening and clamping, and the first fixing block 121 and the second fixing block 122 can be fixed on the substrate 110 by fastening and clamping.

The first fixing block 121 and the second fixing block 122 are arranged to facilitate the disassembly and assembly of the guide rail 120. Further, since the first and second fixing blocks 121 and 122 are supported from both ends, a gap is formed between the guide rail 120 and the base plate 110, thereby facilitating the installation of the slider 130 and the sliding along the guide rail 120.

The piezoelectric ceramic 140 is fixed to the substrate 110 and fixedly connected to the slider 130. Wherein, the piezoelectric ceramic 140 can drive the slider 130 to slide along the first direction under the action of the electric signal. The piezoelectric ceramic 140 expands after being loaded with the electrical signal, and the piezoelectric ceramic 140 pushes the slider 130 to slide along the guide rail 120 during the expansion process, so that the electrical signal is converted into the motion of the slider 130 in the first direction. After the electrical signal is disconnected, the piezoelectric ceramic 140 contracts to drive the slider 130 to move reversely along the first direction.

Since the guide rail 120 and the slider 130 cooperate to limit the sliding direction to the first direction, even if the piezoelectric ceramic 140 is slightly shifted during the mounting process, it is ensured that the slider 130 can be precisely moved in the first direction. In this way, the slider 130 can be displaced with high accuracy in the first direction.

Moreover, because the mounting accuracy of the piezoelectric ceramic 140 is low, the machining accuracy of each component in the displacement platform 100 can be reduced appropriately compared to the prior art scheme in which the piezoelectric ceramic is directly driven. Therefore, the difficulty in processing the displacement platform 100 can be reduced. Furthermore, the number of parts included in the displacement platform 100 is small, and the parts can be detachably mounted by threaded fasteners, so that the assembly process is simple and controllable, the fault tolerance is high, and the displacement platform 100 is easy to mount and maintain.

In this embodiment, a receiving groove (not shown) is formed on a side of the second fixing block 122 facing the substrate 110, and the piezoceramic 140 is detachably mounted in the receiving groove. The piezoelectric ceramics 140 may be fixedly connected to the second fixing block 122 by a screw fastener, and fixed to the substrate 110 by the second fixing block 122. In this way, the space inside the second fixing block 122 can be fully utilized, so that the displacement platform 100 is compact and has smaller volume.

The piezoelectric ceramics 140 may have various shapes such as a bar shape, a block shape, and the like. In particular, in the present embodiment, the piezoelectric ceramics 140 are stripe-shaped and extend along the first direction. Specifically, the slider 130 may be provided with a mounting hole (not shown) extending along the first direction, and the strip-shaped piezoceramic element 140 extends into the mounting hole and is locked by a headless screw (not shown) at the top end of the slider 130. The piezoelectric ceramics 140 are arranged to be strip-shaped, and through matching with the mounting holes, the mounting direction of the piezoelectric ceramics 140 can be accurately limited, so that larger deflection of the piezoelectric ceramics 140 during assembly is avoided.

In addition, referring to fig. 4, in another embodiment, the piezoelectric ceramic 140 has a block shape. The piezoelectric ceramic 140 in the form of a block has a top sphere (not shown) fixedly connected to the slider 130 and capable of expanding in a first direction upon application of an electrical signal to the piezoelectric ceramic 140.

Since the piezoelectric ceramic 140 is in direct contact with the slider 130, expansion or contraction thereof can be directly transmitted to the slider 130, so that the slider 130 moves more stably and has a relatively higher linearity. The piezoelectric ceramics 140 is detachably connected with the second fixing block 122. Moreover, by adjusting the structures of the second fixing block 122 and the sliding block 130 correspondingly, the piezoelectric ceramics 140 with different shapes or lengths such as cylindrical shape, square shape, etc. can be adapted, so that the piezoelectric ceramics 140 can be replaced according to the actual application scenario, so that the adaptation degree of the displacement platform 100 is higher.

Referring to fig. 2 and 3 again, in the present embodiment, the slider 130 is provided with a guide hole 131 extending along the first direction, a bearing sleeve 132 is installed in the guide hole 131, and the guide rail 120 is disposed in the bearing sleeve 132 in a penetrating manner, so that the slider 130 can slide along the guide rail 120.

The guide hole 131 is a generally cylindrical hole, so the guide rail 120 is also cylindrical. The bearing sleeve 132 can be tightly matched with the guide rail 120, so that disturbance generated in the sliding process of the sliding block 130 along the first direction is avoided. Moreover, the bearing housing 132 cooperates with the guide rail 120 to enable the slider 130 to slide more smoothly, to enable the slider 130 to obtain a better motion response when performing a high-precision displacement, and to eliminate stagnation and damping as much as possible.

Further, in the present embodiment, at least two guide rails 120 are provided, the at least two guide rails 120 are arranged at intervals along a second direction perpendicular to the first direction, the sliding blocks 130 are provided with guide holes 131 corresponding to the at least two guide rails 120 one by one, and each guide hole 131 is internally provided with a bearing sleeve 132. At least two guide rails 120 cooperate with the guide holes 131, and the limit precision of the sliding direction of the sliding block 130 is higher, so that the displacement precision of the sliding block 130 along the first direction can be further improved.

In this embodiment, the displacement platform 100 further includes a pre-tightening assembly 150, where the pre-tightening assembly 150 provides a pre-tightening force to the slider 130, so that the slider 130 abuts against the piezoelectric ceramic 140 along the first direction. Under the action of the pre-tightening force provided by the pre-tightening assembly 150, the close contact between the sliding block 130 and the piezoelectric ceramic 140 can be ensured, so that action hysteresis cannot be generated between the sliding block 130 and the piezoelectric ceramic 140 due to the existence of a gap, and high synchronism is maintained between the sliding block 130 and the piezoelectric ceramic 140.

Further, in this embodiment, the pre-tightening assembly 150 includes a pre-tightening spring, the pre-tightening spring is sleeved on the guide rail 120, and two ends of the pre-tightening spring respectively abut against the first fixing block and the slider 130. The pre-tightening spring can be a high-precision spring, and the pre-tightening force generated by compression of the pre-tightening spring can tightly press the sliding block 130 against the piezoelectric ceramics 140. Moreover, the use of a preload spring to provide the preload force may provide a simple and reliable construction of the preload assembly 150.

It should be noted that in other embodiments, the pretension assembly 150 may also provide pretension through a plurality of compressed resilient shims.

The displacement platform 100 and the optical measurement device 10 described above, the guide rail 120 can limit and guide the slider 130, so as to limit the sliding direction of the slider 130 in the first direction. After the piezoelectric ceramic 140 is loaded with the electrical signal, the piezoelectric ceramic 140 may expand or contract to drive the slider 130 to slide along the guide rail 120, thereby converting the electrical signal into an action of the slider 130 in the first direction. Since the guide rail 120 and the slider 130 cooperate to limit the sliding direction to the first direction, even if the piezoelectric ceramic 140 is slightly shifted during the mounting process, the slider 130 can be ensured to move precisely in the first direction. Therefore, the displacement platform 100 and the optical measurement device 10 have high displacement accuracy.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (10)

1. The displacement platform is characterized by comprising a substrate, a guide rail, a sliding block and piezoelectric ceramics; the guide rail is fixed on the base plate and extends along a first direction, and the sliding block is slidably arranged on the guide rail; the piezoelectric ceramic is fixed on the base plate and fixedly connected with the sliding block; the piezoelectric ceramic can drive the sliding block to slide along the first direction under the action of an electric signal.

2. The displacement platform of claim 1, wherein the slider is provided with a guide hole extending along the first direction, a bearing sleeve is installed in the guide hole, and the guide rail is arranged in the bearing sleeve in a penetrating manner so that the slider can slide along the guide rail.

3. The displacement platform of claim 2, wherein at least two guide rails are provided, the at least two guide rails are arranged at intervals along a second direction perpendicular to the first direction, the sliding blocks are provided with guide holes corresponding to the at least two guide rails one by one, and each guide hole is internally provided with the bearing sleeve.

4. The displacement platform of claim 1, further comprising a pre-tightening assembly that provides a pre-tightening force to the slider to urge the slider against the piezoelectric ceramic in the first direction.

5. The displacement platform of claim 4, wherein the two ends of the guide rail are respectively fixedly connected with a first fixing block and a second fixing block, and the first fixing block and the second fixing block are fixedly mounted on the substrate.

6. The displacement platform of claim 5, wherein the pre-tightening assembly comprises a pre-tightening spring, the pre-tightening spring is sleeved on the guide rail, and two ends of the pre-tightening spring are respectively abutted with the first fixing block and the sliding block.

7. The displacement platform of claim 5, wherein a receiving groove is formed in a side of the second fixing block facing the base plate, and the piezoelectric ceramic is detachably mounted in the receiving groove.

8. The displacement platform of claim 1, wherein the base plate is provided with a first mounting structure, the slider is provided with a second mounting structure, and the first mounting structure and the second mounting structure are both used for connecting an external element.

9. The displacement platform of any one of claims 1 to 8, wherein the piezoelectric ceramic is strip-shaped and extends along the first direction; alternatively, the piezoelectric ceramic is in a block shape.

10. An optical measurement device comprising a displacement platform according to any one of claims 1 to 9.