CN209674881U - The adjustable micro-nano platform of initial angular errors - Google Patents

Abstract

The utility model discloses the adjustable micro-nano platforms of initial angular errors, the micro-nano platform includes: platform (1), piezoelectric ceramic actuator (2), link block (3), first fixing end (5), second fixing end (6), first amplification lever (7), second amplification lever (8), first connection leaf spring (9), second connection leaf spring (10), it is oriented to leaf spring (11), central platform (12), grating reading head (13), Grating glass ruler (14), first briquetting (15), second briquetting (16), bracket (17), preloading spring (18), pre-loading screw (19)；Existing defect can be compensated by the adjustable way of this micro-nano platform.

Description

The adjustable micro-nano platform of initial angular errors

Technical field

The utility model relates to a kind of micro-nano platforms, and in particular to a kind of initial angular errors based on two-way preload are adjustable The micro-nano platform of section belongs to precision engineering mini positioning platform field.

Background technique

As ultraprecise machine-building in recent years, microrobot operation, precision optics measuring instrument and biomedicine are micro- The development for seeing the fields such as operation, the design with the sub-micron even micro-nano operating platform of nanoscale resolving power have become limitation The key technology of above-mentioned equal fields development.In the 1980s, A.Midha and L.L.Howell propose the general of compliant mechanism It reads, has greatly facilitated the development of micro-nano operating platform design method, opened completely new design concept.In addition, piezoelectric ceramics The advantages that increasingly mature and itself high-frequency of this intelligent drives device responds, high rigidity, is also the property of micro-nano platform Effective way can be provided, Piezoelectric Ceramic type micro-nano platform is more and more extensive to attract attention.

Chinese patent CN102324253A proposes a kind of mini positioning platform in parallel based on piezoelectric ceramic actuator driving And mini positioning platform system and document CN102543217A propose macro and micro servo two dimension integral type mini positioning platform, it is above-mentioned Two kinds of design schemes are all made of Piezoelectric Ceramic and realize precise motion positioning, and micro-nano platform body is all made of wire cutting one Formula moulding process inevitably can cause overall structure due to factors such as mismachining tolerance and discontinuities of materials in above-mentioned process Asymmetry, therefore central task platform can generate offset error during driving, and the error be in above-mentioned platform can not Compensation.

Utility model content

It is proposed for inevitable defect present in current micro-nano platform process a kind of based on two-way preload The adjustable micro-nano platform of initial angular errors, existing defect is compensated by adjustable mode.

In view of the above-mentioned problems, the utility model provides a kind of adjustable micro-nano platform of initial angular errors, structure letter It is single, easy to operate.

The technical solution that the utility model is taken are as follows:

The adjustable micro-nano platform of initial angular errors based on two-way preload, including platform, piezoelectric ceramic actuator, company Connect block, wedge block, the first fixing end, the second fixing end, the first amplification lever, the second amplification lever, the first connection leaf spring, second Connect leaf spring, guiding leaf spring, central platform, grating reading head, Grating glass ruler, the first briquetting, the second briquetting, bracket, preload Spring, pre-loading screw, adjusting screw, air floating platform, grating adjusting screw；Platform is the rectangular agllutination that cross section is square Structure, the two neighboring side of platform be equipped with accommodate piezoelectric ceramic actuator hollow cavity, piezoelectric ceramic actuator both ends respectively and even Block contact is connect, the link block is T-shaped structure, and link block one end is equipped with the spherical groove contacted with piezoelectric ceramic actuator, even It connects and cooperates respectively with the first fixing end and the second fixing end on the outside of block, first fixing end and the second fixing end are rectangular knot Structure, the first fixing end and the second fixing end opposite side are equipped with the T-slot for accommodating link block, the first fixing end and the second fixing end Outside passes through hinge respectively and connect with the first amplification lever and the second amplification lever, the first amplification lever and the second amplification thick stick Bar is L-shaped structure, and the first amplification lever and the second amplification lever middle end face outside are connect by hinge with platform matrix, first Amplification lever and the second amplification lever other end connect leaf spring and second connection leaf spring one end connection with first respectively, and first connects Fishplate bar spring and the second connection leaf spring other end are connect with central platform center, and the central platform is square structure, in Heart platform corner location passes through guiding leaf spring respectively and connect with platform matrix, and platform is far from receiving piezoelectric ceramic actuator hollow cavity Adjacent both sides a grating reading head is respectively set, with opposite platform base on the outside of the first amplification lever and the second amplification lever Internal body portion be not equipped with accommodate preloading spring and pre-loading screw threaded hole, described preloading spring one end with first amplification lever or Second amplification lever outer end face contact, the other end are contacted with pre-loading screw inner end, and pre-loading screw contacts one end with preloading spring and sets There are cylindrical protrusions, using interference fit between the protrusion and preloading spring, using thin between pre-loading screw and platform matrix Pitch thread cooperation, preloading spring drift are greater than between pre-loading screw and the first amplification lever or the second amplification lever outer end face Maximum spacing.

It wherein, is that be designed as the effect of T-shaped structure be connection piezoelectric ceramics and fixing end, the connection of T shape by the link block Block detachably with installation, is easy to use.It is spherical piezoelectric ceramics outstanding that spherical groove, which can install one end, if one end is flat The piezoelectric ceramics in face can be changed to the T shape link block that end face is plane.

It wherein, is that square structure purpose is to provide for biggish inner space by the first fixing end and the second fixing end, It is simultaneously symmetrical structure, space can be provided for piezoelectric ceramics and T shape link block.

Wherein, the first fixing end and the second fixing end opposite side are equipped with the T-slot for accommodating link block, are designed as T-slot Purpose be that limitation piezoelectric ceramics and T shape link block deflect, while piezoelectric ceramics port being protected to contact with external platform.

Wherein, the first amplification lever and the second amplification lever are L-shaped structure, and L shape can be defeated by the transverse direction of piezoelectric ceramics Power output and displacement are transmitted on the central platform vertical with it, so that compact-sized.

Wherein, the principles of the present invention are as follows: piezoelectric ceramics output displacement by symmetrical L-type lever amplifying mechanism into Row displacement equations are transmitted to motion platform, act motion platform；It is set at the outside both ends of symmetrical L-type lever amplifying mechanism The pre-tightening mechanism set can be adjusted individually, realized and missed to the deflection in adjustable mechanism processing simultaneously that pre-tightens of piezoelectric ceramics Difference.

Preferably, the piezoelectric ceramic actuator both ends are equipped with hemispherical projections, the radius of the hemispherical projections and company It is equal to connect the spherical groove radius that block one end is equipped with.

Preferably, inclined-plane is equipped on the outside of the link block, the inclined-plane and wedge block cooperate, the wedge block horizontal cross-section In a rectangular trapezoid, the long bottom edge one side of wedge block cooperates with adjusting screw end, and two contact of incline plane can slide over each other, favorably Displacement between adjustment displacement and pretension bolt, the outer end adjustable gap Liang Ge.

Preferably, the T-slot side of second fixing end is equipped with the internal thread hole for accommodating adjusting screw, the thread gage Lattice and adjusting screw external screw thread specification cooperate.

Preferably, it is convex to be equipped with strip for side on the end face that first briquetting and the second briquetting cooperate with Grating glass ruler Rise, for the strip male cooperation in Grating glass ruler outer surface, strip protrusion is convenient for the installation and adjustment of glass ruler, the first briquetting and It is gap-matched between second briquetting and the square groove of central platform receiving Grating glass ruler.

Preferably, the square groove both ends of the surface center that the central platform accommodates Grating glass ruler is equipped with horizontal screw thread Hole, the horizontal threaded bore and grating adjusting screw, first briquetting and the second briquetting and grating adjusting screw cooperation one side Center be equipped with hemispherical groove, grating adjusting screw one end and the hemispherical groove face cooperate, groove cooperation output Power and displacement obtained on a line with the centre of sphere always, will not deflect.

Preferably, first briquetting and the second briquetting section are L-type structure, and L-type structure is convenient for and grating peace stylobate The connection of body, the first briquetting vertical direction are equipped with linear half and slot, and adjusting when half fluting is for grating installation is described half-open Slot upper end is non-open end, and lower end is open end.

Preferably, the guiding leaf spring is L-shaped structure, and guiding leaf spring is increased using the double-deck plate spring structure design, the double-deck leaf spring Add the rigidity of guiding mechanism, L-type structure realizes that the mobile decoupling in the direction XYf, the thickness of the bilayer plate spring structure are equal.

Preferably, the grating reading head is fixed by the bracket in platform upper surface, central platform and grating reading head phase Pair two face side and be provided with the square groove for accommodating Grating glass ruler, Grating glass ruler both ends respectively with the first briquetting and the The contact of two briquettings.

Preferably, the Grating glass ruler and grating reading head opposite side center are equipped with zero mark, zero point mark Note moves initial position convenient for finding.

One or more technical solution provided by the present application, has at least the following technical effects or advantages:

Since the utility model uses above-mentioned technical proposal, in the difference list of symmetrical L-type enlarger both ends setting The pre-tightening mechanism solely adjusted can realize that the position and attitude of L-type enlarger is adjusted by individually adjusting two pre-tightening mechanisms, thus The adjustment for realizing central platform original state may be implemented the adjustable of piezoelectric ceramic actuator both ends pretightning force, pass through setting Pretightning force difference realizes corner posture when central platform original state, and then realizes the tune of the initial angular errors of central platform Section, improves the precision in central platform motion process while effectively overcoming error component in operating process.

Detailed description of the invention

Attached drawing described herein is used to provide to further understand the utility model embodiment, constitutes the one of the application Part does not constitute the restriction to the utility model embodiment；

Fig. 1 is the three-dimensional structure diagram of the utility model；

Fig. 2 is the top view of the utility model；

Fig. 3 is the partial sectional view of the utility model；

Fig. 4 is that the output displacement laser interferometer of the utility model detects figure；

Fig. 5 is that the output displacement laser interferometer of the utility model detects top view；

Fig. 6 is the Grating glass ruler installation diagram of the utility model；

Fig. 7 is the first briquette structure figure of the utility model；

Fig. 8 is the principles of the present invention schematic diagram；

In figure: 1- platform, 2- piezoelectric ceramic actuator, 3- link block, 4- wedge block, the first fixing end of 5-, 6- second are solid Lever is amplified in fixed end, 7- first, 8- second amplifies lever, the connection of 9- first leaf spring, the connection of 10- second leaf spring, 11- guide plate Spring, 12- central platform, 13- grating reading head, 14- Grating glass ruler, the first briquetting of 15-, the second briquetting of 16-, 17- bracket, 18- preloading spring, 19- pre-loading screw, 20- adjusting screw, 21- air floating platform, 22- grating adjusting screw, the 23- plane of reflection Mirror, 24- laser interferometer, 25- support frame.

Specific embodiment

In order to be more clearly understood that the above objects, features, and advantages of the utility model, with reference to the accompanying drawing and have The utility model is further described in detail in body embodiment.It should be noted that in the case where not conflicting mutually, Feature in embodiments herein and embodiment can be combined with each other.

Many details are explained in the following description in order to fully understand the utility model, still, this is practical It is novel to be implemented using other different from the other modes being described herein in range, therefore, the protection of the utility model Range is not limited by the specific embodiments disclosed below.

Embodiment 1:

As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 6, Fig. 7, Fig. 8, the adjustable micro-nano of initial angular errors based on two-way preload Platform, including platform 1, piezoelectric ceramic actuator 2, link block 3, wedge block 4, the first fixing end 5, the second fixing end 6, first put Big lever 7, second amplifies lever 8, first and connects the connection of leaf spring 9, second leaf spring 10, guiding leaf spring 11, central platform 12, grating Reading head 13, Grating glass ruler 14, the first briquetting 15, the second briquetting 16, bracket 17, preloading spring 18, pre-loading screw 19, adjustment Screw 20, air floating platform 21, grating adjusting screw 22；Platform 1 is the rectangular block structure that section is square, platform 1 adjacent two A side is equipped with the hollow cavity for accommodating piezoelectric ceramic actuator 2, and 2 both ends of piezoelectric ceramic actuator are contacted with link block 3 respectively, institute Stating link block 3 is T-shaped structure, and 3 one end of link block is equipped with the spherical groove contacted with piezoelectric ceramic actuator 2,3 outside of link block Cooperating respectively with the first fixing end 5 and the second fixing end 6, first fixing end 5 and the second fixing end 6 are square structure, the One fixing end 5 and 6 opposite side of the second fixing end are equipped with the T-slot for accommodating link block 3, the first fixing end 5 and the second fixing end 6 Outside passes through hinge respectively and connect with the first amplification lever 7 and the second amplification 8 bar of thick stick, and the first amplification lever 7 and second is put Big lever 8 is L-shaped structure, and the first amplification lever 7 and the second amplification 8 middle part end face outside of lever pass through hinge and 1 matrix of platform Connection, the first amplification lever 7 and the second amplification 8 other end of lever connect leaf spring 9 and the second connection leaf spring 10 with first respectively One end connection, the first connection leaf spring 9 and second connection 10 other end of leaf spring are connect with 12 center of central platform, the center Platform 12 is square structure, and 12 corner location of central platform passes through guiding leaf spring 11 respectively and connect with 1 matrix of platform, platform 1 A grating reading head 13 is respectively set far from the adjacent both sides for accommodating 2 hollow cavity of piezoelectric ceramic actuator, with the first amplification thick stick Opposite 1 intrinsic silicon of platform of bar 7 and the second amplification lever 8 outside, which is respectively equipped with, accommodates preloading spring 18 and pre-loading screw 19 Threaded hole, described 18 one end of preloading spring and the first amplification lever 7 or the second amplification 8 outer end face contact of lever, the other end and pre- Tight 19 inner end of screw contact, pre-loading screw 19 contact one end with preloading spring 18 and are equipped with cylindrical protrusions, the protrusion and preload Using being interference fitted between spring 18, cooperated between 1 matrix of pre-loading screw 19 and platform using fine thread, preloading spring 18 is certainly Maximum spacing between pre-loading screw 19 and the first amplification lever 7 or the second amplification 8 outer end face of lever is greater than by length；The pressure 2 both ends of electroceramics driver are equipped with hemispherical projections, the spherical female that the radius of the hemispherical projections and 3 one end of link block are equipped with Groove radius is equal；Inclined-plane is equipped on the outside of the link block 3, the inclined-plane and wedge block 4 cooperate, 4 horizontal cross-section of wedge block In a rectangular trapezoid, the long bottom edge of wedge block 4 one side cooperates with 20 end of adjusting screw；The T-slot side of second fixing end 6 is set There is the internal thread hole for accommodating adjusting screw 20, the screw thread specification and 20 external screw thread specification of adjusting screw cooperate；First pressure Side is equipped with strip protrusion on the end face that block 15 and the second briquetting 16 cooperate with Grating glass ruler 14, and the strip male cooperation exists 14 outer surface of Grating glass ruler, the first briquetting 15 and the second briquetting 16 accommodate the square groove of Grating glass ruler 14 with central platform 12 Between be gap-matched；The square groove both ends of the surface center that the central platform 12 accommodates Grating glass ruler 14 is equipped with level Threaded hole, the horizontal threaded bore and grating adjusting screw 22, first briquetting 15 and the second briquetting 16 adjust spiral shell with grating The center of 22 cooperation one side of nail is equipped with hemispherical groove, and 22 one end of grating adjusting screw is matched with the hemispherical groove face It closes；First briquetting 15 and 16 section of the second briquetting are L-type structure, and 15 vertical direction of the first briquetting is equipped with linear half-open Slot, half fluting upper end is non-open end, and lower end is open end；The guiding leaf spring 11 is L-shaped structure, and guiding leaf spring 11 is adopted It is designed with the double-deck plate spring structure, the thickness of the bilayer plate spring structure is equal；The grating reading head 13 is solid by bracket 17 It is scheduled on 1 upper surface of platform, two opposite with grating reading head 13 of central platform 12, which face side and are provided with, accommodates Grating glass ruler 14 Square groove, 14 both ends of Grating glass ruler are contacted with the first briquetting 15 and the second briquetting 16 respectively；The Grating glass ruler Zero mark is equipped with grating reading head opposite side center.

Embodiment 2:

As shown in Figure 4 and Figure 5, the adjustable micro-nano platform of initial angular errors based on two-way preload, including platform 1, Piezoelectric ceramic actuator 2, link block 3, wedge block 4, the first fixing end 5, the second fixing end 6, first amplification lever 7, second are put Big lever 8, first connects leaf spring 9, second and connects leaf spring 10, guiding leaf spring 11, central platform 12, the first briquetting 15, second pressure Block 16, preloading spring 18, pre-loading screw 19, adjusting screw 20, air floating platform 21, plane of reflection mirror 23, laser interferometer 24, branch Support 25；Platform 1 is the rectangular block structure that section is square, and the two neighboring side of platform 1, which is equipped with, accommodates Piezoelectric Ceramic The hollow cavity of device 2,2 both ends of piezoelectric ceramic actuator are contacted with link block 3 respectively, and the link block 3 is T-shaped structure, link block 3 One end is equipped with the spherical groove contacted with piezoelectric ceramic actuator 2, and 3 outside of link block is solid with the first fixing end 5 and second respectively Fixed end 6 cooperates, and first fixing end 5 and the second fixing end 6 are square structure, and the first fixing end 5 and the second fixing end 6 are opposite Side is equipped with the T-slot for accommodating link block 3, and the first fixing end 5 and 6 outside of the second fixing end pass through hinge and the first amplification respectively Lever 7 is connected with the second amplification 8 bar of thick stick, and the first amplification lever 7 and the second amplification lever 8 are L-shaped structure, the first amplification thick stick Bar 7 and the second amplification 8 middle part end face outside of lever are connect by hinge with 1 matrix of platform, the first amplification lever 7 and the second amplification 8 other end of lever connect leaf spring 9 and second connection 10 one end of leaf spring connection, the first connection leaf spring 9 and second with first respectively Connection 10 other end of leaf spring is connect with 12 center of central platform, and the central platform 12 is square structure, central platform 12 corner locations pass through guiding leaf spring 11 respectively and connect with 1 matrix of platform, and platform 1 is mounted on above air floating platform 21, and center is flat Platform 12 is fixed by plane of reflection mirror 23 by the first briquetting 15 and the second briquetting 16, using support frame 25 that laser interferometer 24 is right It should be mounted on 21 upper surface of air floating platform, this embodiment may be implemented to carry out displacement measurement by laser interferometer 24.

Since the utility model uses above-mentioned technical proposal, 2 both ends pretightning force of piezoelectric ceramic actuator may be implemented It is artificial to adjust, corner posture when 12 original state of central platform is realized by setting pretightning force difference, and then realize that center is flat The adjusting of the initial angular errors of platform 12, improves central platform motion process while effectively overcoming error component in operating process In precision, the furthermore design can satisfy 24 two kinds of measurement methods of grating scale and laser interferometer, and flexibility is high.

Although the preferred embodiment of the utility model has been described, once a person skilled in the art knows basic Creative concept, then additional changes and modifications may be made to these embodiments.It is wrapped so the following claims are intended to be interpreted as It includes preferred embodiment and falls into all change and modification of the scope of the utility model.

Obviously, it is practical without departing from this can to carry out various modification and variations to the utility model by those skilled in the art Novel spirit and scope.If in this way, these modifications and variations of the present invention belong to the utility model claims and Within the scope of its equivalent technologies, then the utility model is also intended to include these modifications and variations.

Claims (10)

1. the initial adjustable micro-nano platform of angular errors, which is characterized in that the micro-nano platform includes:

Platform (1), piezoelectric ceramic actuator (2), link block (3), the first fixing end (5), the second fixing end (6), the first amplification Lever (7), the second amplification lever (8), the first connection leaf spring (9), the second connection leaf spring (10), guiding leaf spring (11), center are flat Platform (12), Grating glass ruler (14), the first briquetting (15), the second briquetting (16), bracket (17), pre-tightens grating reading head (13) Spring (18), pre-loading screw (19)；Platform (1) two neighboring side sets the first structure there are two cabinet, one of them first Structure are as follows: platform (1) side is equipped with the hollow cavity for accommodating piezoelectric ceramic actuator (2), piezoelectric ceramic actuator (2) both ends difference With 2 respective end thereof contacts of link block (3), 2 respective other ends of link block (3) respectively with the first fixing end (5) and The outside of two fixing ends (6) cooperation, the first fixing end (5) and the second fixing end (6) passes through hinge and the first amplification lever respectively (7) one end is connected with one end of second amplification lever (8) bar, the outside of the first amplification lever (7) and the second amplification lever (8) End face passes through hinge and connect with platform (1) matrix, and the other end of the first amplification lever (7) and the second amplification lever (8) are another End face connect one end of leaf spring (9) and one end connection of the second connection leaf spring (10) with first respectively, the first connection leaf spring (9) The other end and second connection leaf spring (10) other end connect with the center of central platform (12), central platform (12) it is every A end angle passes through guiding leaf spring (11) respectively and connect with the matrix of platform (1)；Platform (1) is far from receiving piezoelectric ceramic actuator (2) the adjacent both sides of hollow cavity are respectively arranged with the second structure, one of them second structure are as follows: platform (1) is far from receiving piezoelectricity The side of ceramic driver (2) hollow cavity is provided with a grating reading head (13), with the first amplification lever (7) and the second amplification Opposite platform (1) intrinsic silicon is respectively equipped with the screw thread for accommodating preloading spring (18) and pre-loading screw (19) on the outside of lever (8) Hole, described preloading spring (18) one end and the first amplification lever (7) or second amplification lever (8) outer end face contact, the preload The other end of spring (18) is contacted with pre-loading screw (19) inner end.

2. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that Piezoelectric Ceramic Device (2) both ends are equipped with hemispherical projections, the spherical groove radius that the radius of the hemispherical projections and link block (3) one end are equipped with It is equal.

3. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that the micro-nano platform Further including wedge block (4) and adjusting screw (20), inclined-plane is equipped on the outside of link block (3), the inclined-plane and wedge block (4) cooperate, Wedge block (4) horizontal cross-section is in a rectangular trapezoid, and the long bottom edge one side of wedge block (4) cooperates with adjusting screw (20) end.

4. the adjustable micro-nano platform of initial angular errors according to claim 3, which is characterized in that the second fixing end (6) T-slot side is equipped with the internal thread hole for accommodating adjusting screw (20), the screw thread specification and adjusting screw of the internal thread hole (20) external screw thread specification cooperates.

5. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that the first briquetting (15) It is equipped with strip protrusion with side on the end face of the second briquetting (16) and Grating glass ruler (14) cooperation, the strip male cooperation exists Grating glass ruler (14) outer surface, the first briquetting (15) and the second briquetting (16) and central platform (12) accommodate Grating glass ruler (14) it is gap-matched between square groove.

6. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that central platform (12) The square groove both ends of the surface center for accommodating Grating glass ruler (14) is equipped with horizontal threaded bore, the horizontal threaded bore and grating tune The center of whole screw (22), first briquetting (15) and the second briquetting (16) and grating adjusting screw (22) cooperation one side Equipped with hemispherical groove, grating adjusting screw (22) one end and the hemispherical groove face cooperate.

7. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that the first briquetting (15) It is L-type structure with the second briquetting (16) section, the first briquetting (15) vertical direction is equipped with linear half and slots, on half fluting End is non-open end, and lower end is open end.

8. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that guiding leaf spring (11) For L-shaped structure, leaf spring (11) are oriented to using the double-deck plate spring structure design, the thickness of the bilayer plate spring structure is equal.

9. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that grating reading head (13) platform (1) upper surface is fixed on by bracket (17), two opposite with grating reading head (13) of central platform (12) face While be provided with accommodate Grating glass ruler (14) square groove, Grating glass ruler (14) both ends respectively with the first briquetting (15) and Second briquetting (16) contact.

10. the adjustable micro-nano platform of initial angular errors according to claim 1, which is characterized in that Grating glass ruler (14) zero mark is equipped with grating reading head (13) opposite side center.