CN110421532B - Piezoelectric ceramic driven micro-nano servo platform - Google Patents
Piezoelectric ceramic driven micro-nano servo platform Download PDFInfo
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- CN110421532B CN110421532B CN201910753731.6A CN201910753731A CN110421532B CN 110421532 B CN110421532 B CN 110421532B CN 201910753731 A CN201910753731 A CN 201910753731A CN 110421532 B CN110421532 B CN 110421532B
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 57
- 230000003321 amplification Effects 0.000 claims abstract description 29
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 29
- 239000003990 capacitor Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000005461 lubrication Methods 0.000 abstract 1
- 230000033001 locomotion Effects 0.000 description 29
- 230000003071 parasitic effect Effects 0.000 description 10
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- 230000005540 biological transmission Effects 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention provides a piezoelectric ceramic driven micro-nano servo platform, which comprises a base and displacement amplification mechanisms, wherein a cross-shaped groove is formed in the base, two adjacent grooves of the groove extend outwards to form a long groove opening, a micro-motion platform is of a cross-shaped structure with four guide rods and is arranged at the center of the groove opening, and the two displacement amplification mechanisms are respectively arranged in the long groove opening and are used for respectively realizing displacement driving in the X-axis direction and the Y-axis direction; each displacement amplification mechanism is correspondingly provided with a main guide mechanism, an auxiliary guide mechanism and a displacement sensor; the main guide mechanism is positioned between the micro-motion platform and the displacement amplification mechanism, the main guide mechanism is connected with the displacement amplification mechanism through a flexible hinge, and a guide rod of the micro-motion platform is connected with the main guide mechanism and the auxiliary guide mechanism through the flexible hinge. The servo platform has the advantages of compact structure, high displacement amplification factor, no friction and wear, no need of lubrication, high utilization rate of base materials and quick response.
Description
Technical Field
The invention mainly relates to the technical field related to micro-nano machining, in particular to a micro-nano servo platform driven by piezoelectric ceramics.
Background
In the nanometer technology, multiple branch technologies such as manufacturing, inspection, control, measurement and the like all depend on the ultra-precise motion of nanometer equipment. The commonly used nano driving equipment is mostly driven by piezoelectric ceramics, but has the defects of small movement scale and large influence of parasitic movement. The current piezoelectric ceramic actuator with the maximum output displacement can only output the displacement of about 0.1 percent of the length of the actuator; meanwhile, the output of the piezoelectric ceramic actuator is often accompanied by harmful parasitic displacement under the influence of factors such as flexible deformation of the piezoelectric material, manufacturing and mounting errors and the like. The existing micro-nano servo platform mostly adopts a material reducing processing means on a square base block, and the defects of low utilization rate of base materials and material waste often exist in the process, which is mainly caused by the fact that the micro-nano servo platform is not compact in mechanism design and the proportion of the slotting area to the total area of the base is small. Therefore, the compact nano servo platform which has high amplification factor and can eliminate harmful parasitic displacement is designed aiming at the problems, so that the compact nano servo platform has important practical engineering significance and can provide a reliable experimental platform for the development of the nano theory in the future.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a piezoelectric ceramic driven micro-nano servo platform which is combined with the prior art and starts from practical application.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a micro-nano servo platform driven by piezoelectric ceramics comprises a base and a displacement amplification mechanism,
the base is provided with a cross-shaped slot, two adjacent slots of the slot extend outwards to form a long slot, the micro-motion platform is of a cross-shaped structure with four guide rods, the micro-motion platform is installed at the center of the slot, and the two displacement amplification mechanisms are respectively installed in the long slot and used for respectively realizing displacement driving in the X-axis direction and the Y-axis direction;
each displacement amplification mechanism is correspondingly provided with a main guide mechanism, an auxiliary guide mechanism and a displacement sensor;
the main guide mechanism and the auxiliary guide mechanism are arranged in the groove and are arranged on two opposite sides of the micro-motion platform, the main guide mechanism is positioned between the micro-motion platform and the displacement amplification mechanism and is connected with the displacement amplification mechanism through a flexible hinge, and a guide rod of the micro-motion platform is connected with the main guide mechanism and the auxiliary guide mechanism through flexible hinges;
the displacement sensor is installed on the base and corresponds to the position of the auxiliary guide mechanism.
Furthermore, the displacement amplification mechanism adopts a central symmetry layout and comprises piezoelectric ceramics, a crank rod, a side link and a sliding block, wherein the sliding block is symmetrically installed by taking the piezoelectric ceramics as a center, the piezoelectric ceramics are fixedly connected with the crank rod, and the crank rod is connected with the side link, the side link is connected with the sliding block, and the sliding block is connected with the main guide mechanism through flexible hinges.
Furthermore, the piezoelectric ceramics and the corresponding micro-motion platform guide rods are vertically arranged, the number of the crank rods is two, the crank rods are respectively and vertically and fixedly connected to two ends of the piezoelectric ceramics, the side link rods are vertically arranged at the inner ends of the crank rods, the number of the side link rods is four, the side link rods are arranged on two sides of the piezoelectric ceramics in a pairwise manner, the sliders are arranged between the two side link rods positioned on the same side of the piezoelectric ceramics, the side link rods are of a rectangular structure, the inner diagonal ends of the side link rods are connected with the crank rods, the outer diagonal ends of the side link rods are connected with the sliders through flexible hinges, and the sliders positioned on the inner side of the piezoelectric ceramics are connected with the main guide mechanism through flexible hinges.
Furthermore, main guiding mechanism includes main guide body, main horizontal direction connecting rod, main vertical direction connecting rod, main horizontal direction connecting rod and piezoceramics are perpendicular and set up in main guide body side, main vertical direction connecting rod is parallel with piezoceramics and sets up in main guide body inboard, all through flexible hinged joint between main guide body and the main horizontal direction connecting rod, between main guide body and the main vertical direction connecting rod, between main horizontal direction connecting rod and the slider, main vertical direction connecting rod and the guide bar of fine motion platform between.
Furthermore, the main guide body is of a concave structure with an inward opening, the number of the main transverse guide connecting rods is four, the four main transverse guide connecting rods are arranged on the outer side face of the main guide body in parallel, the two main transverse guide connecting rods on the outer side are connected with the base through flexible hinges, the two main transverse guide connecting rods on the inner side are connected with the sliding block, the number of the main longitudinal guide connecting rods is four, and every two main longitudinal guide connecting rods are arranged on two sides inside the opening of the main guide body.
Furthermore, vice guiding mechanism includes vice guide body, vice horizontal direction connecting rod, vice vertical direction connecting rod, vice horizontal direction connecting rod is perpendicular with piezoceramics and sets up in vice guide body side, vice vertical direction connecting rod is parallel with piezoceramics and sets up in vice guide body inboard, between vice guide body and the vice horizontal direction connecting rod, between vice guide body and the vice vertical direction connecting rod, between vice horizontal direction connecting rod and the base, all through flexible hinged joint between vice vertical direction connecting rod and the guide bar of fine motion platform.
Furthermore, the auxiliary guide body is of a concave structure with an inward opening, the number of the auxiliary transverse guide connecting rods is two, the auxiliary transverse guide connecting rods are arranged on the outer side face of the auxiliary guide body in parallel, the number of the auxiliary longitudinal guide connecting rods is four, and every two auxiliary longitudinal guide connecting rods are arranged on two sides of the inside of the opening of the auxiliary guide body.
Furthermore, the displacement sensor is a capacitive displacement sensor and comprises a sensor main body, a first capacitor plate and a second capacitor plate, the first capacitor plate is attached to the sensor main body, the second capacitor plate is attached to the outer side of the auxiliary guide mechanism, and the first capacitor plate and the second capacitor plate are installed just opposite to each other.
Furthermore, the base is square, mounting hole positions are processed on four corners of the base, and circuit board mounting holes are processed on the side face of the groove of the base.
Furthermore, a workpiece mounting hole is machined in the inner side of the guide rod of the micro-motion platform, and a circular groove is machined in the middle of the guide rod of the micro-motion platform.
The invention has the beneficial effects that:
1. the invention has compact and reasonable overall structure design layout, large base slotting space occupation ratio, high material utilization efficiency and more compact and reasonable structure compared with a common nano servo platform; the displacement amplification mechanism provided by the invention adopts a centrosymmetric design mode, can effectively eliminate internal transverse and longitudinal coupling motion while amplifying micro telescopic motion of piezoelectric ceramics, balances the influence of internal stress, and has the advantage of low processing difficulty
2. The guide mechanism provided by the invention adopts a design mode that the guide connecting rods form virtual constraint of a mechanical system, and forms a repeated translational motion pair through a plurality of groups of components, thereby achieving the purpose of eliminating parasitic motion; meanwhile, because the parasitic motion is eliminated in a purely mechanical mode, an additional monitoring and feedback control system is not required to be applied.
Drawings
FIG. 1 is a three-dimensional diagram view of a micro-nano servo platform;
FIG. 2 is a schematic top view of a micro-nano servo platform;
FIG. 3 is a schematic view of a base;
FIG. 4 is a schematic view of a shift-up mechanism;
FIG. 5 is a schematic view of a primary guiding mechanism;
FIG. 6 is a schematic view of a secondary guide mechanism;
FIG. 7 is a schematic view of a micro motion platform;
fig. 8 is a schematic view of a displacement sensor.
Reference numerals shown in the drawings:
1. the device comprises a base, 101, a cross slot, 102, a positioning mounting hole, 103 and a circuit board mounting hole; 104. a long slot opening;
2. a displacement amplification mechanism 201, piezoelectric ceramics 202, a crank rod 203, a side link 204 and a slide block;
3. a main guide mechanism 301, a main guide body 302, a main transverse guide connecting rod 303 and a main longitudinal guide connecting rod;
4. the auxiliary guide mechanism 401, the auxiliary guide body 402, the auxiliary transverse guide connecting rod 403 and the auxiliary longitudinal guide connecting rod;
5. a micro-motion platform 501 and a workpiece mounting hole; 502. a guide bar;
6. displacement sensor 601, sensor body, 602, first capacitance plate, 603, second capacitance plate.
Detailed Description
The invention is further described with reference to the accompanying drawings and specific embodiments. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and these equivalents also fall within the scope of the present application.
As shown in fig. 1 to 8, the micro-nano servo platform structure driven by piezoceramics provided by the present invention includes a base 1 and a displacement amplification mechanism 2, wherein a cross slot 101 is arranged on the base 1, two adjacent slots of the slot 101 extend outward to form a long slot 104, and the slot 101 on the base 1 is integrally in an eccentric cross slot structure through the arrangement of the long slot 104. The micro-motion platform 5 is a cross structure with four guide rods 502, the middle of the micro-motion platform is in a diamond shape, the four guide rods 502 are respectively arranged at four corners, the micro-motion platform 5 is arranged at the center of the slot 101, two displacement amplification mechanisms are respectively arranged in the long notch 104 and are used for respectively realizing displacement driving in the X-axis direction and the Y-axis direction, and the installation schematic diagrams are shown in fig. 1 and 2.
Each displacement amplification mechanism 2 is correspondingly provided with a group of main guide mechanisms 3, auxiliary guide mechanisms 4 and displacement sensors 6, the main guide mechanisms 3 and the auxiliary guide mechanisms 4 are arranged in the grooves 101, the displacement sensors 6 are arranged on the base 1, the main guide mechanisms 3 are connected with the displacement amplification mechanisms 2 and the micro-motion platforms 5, the auxiliary guide mechanisms are only connected with the micro-motion platforms 5, and the mutual connection is realized by adopting flexible hinges. The specific arrangement mode thereof refers to fig. 1 and 2. The two displacement sensors 6 are used for displacement monitoring in the X-axis direction and the Y-axis direction, respectively.
The displacement amplification mechanism 2 of the present invention has the following specific structure:
the displacement amplification mechanism 2 adopts a centrosymmetric layout and comprises piezoelectric ceramics 201, a crank rod 202, a side link 203 and a sliding block 204, wherein the sliding block 204 is symmetrically installed by taking the piezoelectric ceramics 201 as a center, the piezoelectric ceramics 201 is fixedly connected with the crank rod 202, and the crank rod 202 is connected with the side link 203, the side link 203 is connected with the sliding block 204, and the sliding block 204 is connected with the main guide mechanism 3 through flexible hinges. Specifically, piezoelectric ceramic 201 is perpendicular to its relative fine motion platform guide bar 502, crank rod 202 is two, perpendicular fixed connection is at piezoelectric ceramic 201 both ends respectively, side link 203 sets up perpendicularly at crank rod 202 inner, side link 203 is four, two liang set up in piezoelectric ceramic 201 both sides, slider 204 sets up between two side link 202 that lie in piezoelectric ceramic 201 with one side, side link 203 is the rectangle structure, wherein, side link 203 is between its inside diagonal end and crank rod 202, through flexible hinge connection between its outside diagonal end and slider 204, lie in piezoelectric ceramic 201 inboard slider 204 and lead and construct 3 between through flexible hinge connection.
When the micro-motion platform works, the base 1 is kept still, the piezoelectric ceramic 201 performs telescopic motion, the telescopic motion is amplified by the displacement amplifying mechanism 2 (when the piezoelectric ceramic 201 is telescopic, the crank rod 202 moves along the length direction of the piezoelectric ceramic 201, the connecting rod 203 rotates around a connecting point with the crank rod 202 and performs translational motion at the same time, and finally the slider 204 is driven to perform motion vertical to the length direction of the piezoelectric ceramic 201), parasitic motion is inhibited and eliminated by the guide mechanism to ensure that output is accurate linear motion, and the linear motion acts on the micro-motion platform 5 and finally realizes the feeding motion of a processed workpiece through the micro-motion platform 5.
In the present invention, in order to realize the elimination of the parasitic motion by cooperating with the displacement amplification mechanism 2, the main guide mechanism 3 adopts the following structure:
the micro-motion platform comprises a main guide body 301, a main transverse guide connecting rod 302 and a main longitudinal guide connecting rod 303, wherein the main transverse guide connecting rod 302 is perpendicular to piezoelectric ceramics 201 and is arranged on the side surface of the main guide body 301, the main longitudinal guide connecting rod 303 is parallel to the piezoelectric ceramics 201 and is arranged on the inner side of the main guide body 301, and the main guide body 301 is connected with the main transverse guide connecting rod 302, the main guide body 301 is connected with the main longitudinal guide connecting rod 303, the main transverse guide connecting rod 302 is connected with a sliding block 204, and the main longitudinal guide connecting rod 303 is connected with a guide rod 502 of the micro-motion platform 5 through flexible hinges. Specifically, the main guide body 301 is a recessed structure with an inward opening, four main transverse guide links 302 are arranged on the outer side surface of the main guide body 301 in parallel, wherein the two main transverse guide links 302 on the outer side are connected with the base 1 through flexible hinges, the two main transverse guide links 302 on the inner side are connected with the slider 204, the number of the main longitudinal guide links 303 is four, and every two main longitudinal guide links are arranged on two sides inside the opening of the main guide body 301.
The main guide mechanism 3 of above-mentioned structure is connected with fine motion platform 5, when the lateral motion is come in the transmission of displacement mechanism 2 of amplification, 4 main horizontal direction connecting rods 302 constitute virtual restraint mechanism, two sets of components form two sets of horizontal direction translation motion pairs, make the motion guide way coincidence that the transmission of displacement mechanism 2 comes, can only move along the horizontal direction, thereby eliminate parasitic motion, and in the same way, when the transmission of displacement mechanism 2 comes longitudinal motion, constitute virtual restraint mechanism through main vertical direction connecting rod 303, realize the elimination of parasitic motion.
In the present invention, the sub-guide mechanism 4 for cooperating with the main guide mechanism 3 has the following structure:
the micro-motion platform comprises an auxiliary guide body 401, an auxiliary transverse guide connecting rod 402 and an auxiliary longitudinal guide connecting rod 403, wherein the auxiliary transverse guide connecting rod 402 is perpendicular to the piezoelectric ceramic 201 and is arranged on the side surface of the auxiliary guide body 401, the auxiliary longitudinal guide connecting rod 403 is parallel to the piezoelectric ceramic 201 and is arranged on the inner side of the auxiliary guide body 401, and the auxiliary guide body 401 is connected with the auxiliary transverse guide connecting rod 402, the auxiliary guide body 401 is connected with the auxiliary longitudinal guide connecting rod 403, the auxiliary transverse guide connecting rod 401 is connected with the base 1, and the auxiliary longitudinal guide connecting rod 403 is connected with a guide rod 502 of the micro-motion platform 5 through flexible hinges. Specifically, the auxiliary guide body 401 is a concave structure with an inward opening, two auxiliary transverse guide links 402 are arranged on the outer side surface of the auxiliary guide body 401 in parallel, and four auxiliary longitudinal guide links 403 are arranged on two sides of the inside of the opening of the auxiliary guide body 401. The secondary guide mechanism 4 is matched with the main guide mechanism 3 to realize elimination of parasitic movement together, and the principle of the secondary guide mechanism is as that of the main guide mechanism 3.
The displacement sensor 6 is a capacitive displacement sensor and comprises a sensor main body 601, a first capacitor plate 602 and a second capacitor plate 603, wherein the first capacitor plate 602 is attached to the sensor main body 601, the second capacitor plate 603 is attached to the outer side of the concave-shaped auxiliary guide body 401, and the first capacitor plate 602 and the second capacitor plate 603 are installed in a right-facing mode. A certain gap exists between the two capacitor plates, when the guide mechanism moves, the size of the gap changes, so that capacitance change is caused, and the capacitance change can be converted into corresponding displacement output after being calculated by the sensor main body 601.
Preferably, the base 1 of the present invention is square, and the four corners of the base are provided with positioning mounting holes 102 for fixing the platform on a table, and the side of the slot 101 of the base 1 is provided with circuit board mounting holes 103 for mounting electrical devices.
Claims (8)
1. A piezoelectric ceramic driven micro-nano servo platform comprises a base and a displacement amplification mechanism, and is characterized in that:
the base is provided with a cross-shaped slot, two adjacent slots of the slot extend outwards to form a long slot, the micro-motion platform is of a cross-shaped structure with four guide rods, the micro-motion platform is installed at the center of the slot, and the two displacement amplification mechanisms are respectively installed in the long slot and used for respectively realizing displacement driving in the X-axis direction and the Y-axis direction;
each displacement amplification mechanism is correspondingly provided with a main guide mechanism, an auxiliary guide mechanism and a displacement sensor;
the main guide mechanism and the auxiliary guide mechanism are arranged in the groove and are arranged on two opposite sides of the micro-motion platform, the main guide mechanism is positioned between the micro-motion platform and the displacement amplification mechanism and is connected with the displacement amplification mechanism through a flexible hinge, and a guide rod of the micro-motion platform is connected with the main guide mechanism and the auxiliary guide mechanism through flexible hinges;
the displacement sensor is arranged on the base and corresponds to the position of the auxiliary guide mechanism;
the displacement amplification mechanism adopts a centrosymmetric layout and comprises piezoelectric ceramics, a crank rod, a connecting frame rod and a sliding block, wherein the sliding block is symmetrically installed by taking the piezoelectric ceramics as a center, the piezoelectric ceramics are fixedly connected with the crank rod, and the crank rod is connected with the connecting frame rod, the connecting frame rod is connected with the sliding block, and the sliding block is connected with the main guide mechanism through flexible hinges;
the piezoelectric ceramics are perpendicular to the corresponding micro-motion platform guide rods, the number of the crank rods is two, the crank rods are respectively perpendicular and fixedly connected to two ends of the piezoelectric ceramics, the side link rods are perpendicular to the inner ends of the crank rods, the number of the side link rods is four, the four side link rods are arranged on two sides of the piezoelectric ceramics in a pairwise mode, the sliding blocks are arranged between the two side link rods located on the same side of the piezoelectric ceramics, the side link rods are of a rectangular structure, the inner diagonal ends of the side link rods are connected with the crank rods, the outer diagonal ends of the side link rods are connected with the sliding blocks through flexible hinges, and the sliding blocks located on the inner sides of the piezoelectric ceramics are connected with the main guide mechanism through flexible hinges.
2. A piezoceramic-driven micro-nano servo platform according to claim 1, wherein the micro-nano servo platform comprises: the main guide mechanism comprises a main guide body, a main transverse guide connecting rod and a main longitudinal guide connecting rod, the main transverse guide connecting rod is perpendicular to the piezoelectric ceramics and is arranged on the side face of the main guide body, the main longitudinal guide connecting rod is parallel to the piezoelectric ceramics and is arranged on the inner side of the main guide body, and the main guide body is connected with the main transverse guide connecting rod through a flexible hinge, the main transverse guide connecting rod is connected with a sliding block, and the main longitudinal guide connecting rod is connected with a guide rod of the micro-motion platform through a flexible hinge.
3. A piezoceramic-driven micro-nano servo platform according to claim 2, wherein the micro-nano servo platform comprises: the main guide body is of a concave structure with an inward opening, the number of the main transverse guide connecting rods is four, the four main transverse guide connecting rods are arranged on the outer side face of the main guide body in parallel, the two main transverse guide connecting rods on the outer side are connected with the base through flexible hinges, the two main transverse guide connecting rods on the inner side are connected with the sliding block, the number of the main longitudinal guide connecting rods is four, and every two main longitudinal guide connecting rods are arranged on two sides inside the opening of the main guide body.
4. A piezoceramic-driven micro-nano servo platform according to claim 2, wherein the micro-nano servo platform comprises: the auxiliary guide mechanism comprises an auxiliary guide body, an auxiliary transverse guide connecting rod and an auxiliary longitudinal guide connecting rod, the auxiliary transverse guide connecting rod is perpendicular to the piezoelectric ceramics and is arranged on the side face of the auxiliary guide body, the auxiliary longitudinal guide connecting rod is parallel to the piezoelectric ceramics and is arranged on the inner side of the auxiliary guide body, the auxiliary guide body is connected with the auxiliary transverse guide connecting rod through a flexible hinge, the auxiliary transverse guide connecting rod is connected with the base, and the auxiliary longitudinal guide connecting rod is connected with the guide rod of the micro-motion platform through a flexible hinge.
5. A piezoceramic driven micro-nano servo platform according to claim 4, wherein the micro-nano servo platform comprises: the auxiliary guide body is of a concave structure with an inward opening, the number of the auxiliary transverse guide connecting rods is two, the auxiliary transverse guide connecting rods are arranged on the outer side face of the auxiliary guide body in parallel, the number of the auxiliary longitudinal guide connecting rods is four, and every two auxiliary longitudinal guide connecting rods are arranged on two sides of the inside of the opening of the auxiliary guide body.
6. A piezoceramic driven micro-nano servo platform according to any one of claims 1 to 5, characterized in that: the displacement sensor is a capacitive displacement sensor and comprises a sensor main body, a first capacitor pole plate and a second capacitor pole plate, wherein the first capacitor pole plate is attached to the sensor main body, the second capacitor pole plate is attached to the outer side of the auxiliary guide mechanism, and the first capacitor pole plate and the second capacitor pole plate are installed right opposite to each other.
7. A piezoceramic driven micro-nano servo platform according to any one of claims 1 to 5, characterized in that: the base is square, mounting hole positions are processed on four corners of the base, and circuit board mounting holes are processed on the side faces of the groove of the base.
8. A piezoceramic driven micro-nano servo platform according to any one of claims 1 to 5, characterized in that: the inner side of the guide rod of the micro-motion platform is provided with a workpiece mounting hole, and the middle of the guide rod is provided with a circular groove.
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| CN201910753731.6A CN110421532B (en) | 2019-08-15 | 2019-08-15 | Piezoelectric ceramic driven micro-nano servo platform |
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| CN201910753731.6A CN110421532B (en) | 2019-08-15 | 2019-08-15 | Piezoelectric ceramic driven micro-nano servo platform |
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| CN110806222A (en) * | 2019-11-12 | 2020-02-18 | 山东大学 | Fine-adjustment mounting equipment for bipolar plate capacitive sensor |
| CN111342697A (en) * | 2020-03-23 | 2020-06-26 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Bridge type piezoelectric driving linear actuator and control method |
| CN112683645B (en) * | 2020-12-07 | 2021-12-17 | 山东大学 | Small probe abrasion test platform, test method and evaluation method |
| CN113459053B (en) * | 2021-06-25 | 2022-08-09 | 西安交通大学 | Motion platform device based on piezoelectric drive |
| CN114629375B (en) * | 2022-03-14 | 2024-03-29 | 松山湖材料实验室 | Micro force applying device |
| CN115046636B (en) * | 2022-04-27 | 2024-10-01 | 中国科学院西安光学精密机械研究所 | Compact high-stability phase-shifting scanning device based on piezoelectric ceramic driving |
| CN115042010B (en) * | 2022-06-10 | 2023-07-25 | 长春工业大学 | Four-piezoelectric-driven quasi-intermittent vibration auxiliary deflection turning device |
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| KR100979539B1 (en) * | 2010-01-29 | 2010-09-02 | 아주대학교산학협력단 | In-plane 3 degree-of-freedom positioning stage |
| CN103225728B (en) * | 2013-04-24 | 2014-12-24 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| US10184607B2 (en) * | 2016-05-18 | 2019-01-22 | Aerotech, Inc. | Open frame, parallel, two axis flexure stage with yaw compensation |
| CN106685262B (en) * | 2017-01-12 | 2017-11-28 | 广东工业大学 | A kind of Grazing condition micro displacement magnifying mechanism |
| CN108461109A (en) * | 2018-03-29 | 2018-08-28 | 天津大学 | Three parallel guide type flexibility of one kind decoupling precision positioning structure |
| CN109060575A (en) * | 2018-08-23 | 2018-12-21 | 吉林大学 | Driving type piezoelectric actuator low-temperature in-site high-frequency reciprocating micro-moving frictional wear test platform |
| CN109093571B (en) * | 2018-11-08 | 2020-05-19 | 杭州电子科技大学 | Compact two-dimensional nanometer servo platform |
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