KR20100101603A - Slide stage, and slide stage movable in x- and y-directions - Google Patents

Abstract

The slide stage can be made low and compact, and conveyance is also smooth, high speed and high precision can be obtained, and the slide stage which can be manufactured at low cost is provided.
Digging the surface plate 1 and the slider 4, combining the slider 4 which blows air to the surface of the surface plate 1 in the downward direction, and the linear motors 7 and 8 with electromagnetic attraction force, Is constrained by the repulsion of electron attraction force, and the transverse direction is constrained by the repulsion of air only, the guide reference plane and the driving thrust generating plane coincide, and the position detection device 9 is placed above the center of the slide stage in consideration of the Abbe error. Installed.

Description

SLIDE STAGE, AND SLIDE STAGE MOVABLE IN X- AND Y-DIRECTIONS}

TECHNICAL FIELD The present invention relates to an air bearing, a linear motor, a slide stage for precise positioning using a position detection device (linear scale), and an XY direction movable slide stage in a printed circuit board, a semiconductor, a liquid crystal, a solar panel, and a bio-related field. will be.

The slide stage that combines the air bearing and the linear motor is completely non-contact, and does not generate frictional heat due to movement and the posture accuracy is very stable from the averaging effect of the air bearing, and precise positioning (submicron) can be achieved. On the other hand, there is a merit that the bearing parts must be processed in microns, and the materials are limited to expensive ones.

On the stage using the conventional air bearing, there existed a weight balance type like FIG. Fig. 47 is a cross-sectional view of a conventional weight balance stage, in which Fig. 47 is a surface plate, 2 is a guide rail, 3 is an air pad, 4 is a slider, and 5 is a coreless linear motor. The weight from the top and the air blow down are balanced by air pressure, and the lateral direction is centrally constrained by repulsion between the air pressures, and is equipped with a coreless linear motor 5 which is not affected by magnetic force. I am balancing.

By the way, the conventional weight balance stage as shown in Fig. 47 has a merit that it can be manufactured at low cost because of its simple structure, but since it is not constrained in the small stroke downward direction, the movement precision in the small stroke downward direction (vertical straightness, Pitching, etc.) is worse.

In addition, since contact or the like of the bearing portion occurs due to the attitude change during acceleration and deceleration, there is a problem that the moving tact is elongated without shortening the acceleration / deceleration time. In the case of actual use, a slider with a low center of gravity and a heavy weight is used in a large plane where such a problem is unlikely to occur, and the guide part was constrained laterally with a general purpose air pad.

Although this system was used especially in a liquid crystal manufacturing apparatus, etc., it was difficult to put into practical use, and there existed a problem that it could not operate in variable speed, and there existed a problem that rapid acceleration and deceleration could not be performed.

Since the distance between the longitudinal slide height and the conveying drive height is increased, a moment force is generated during acceleration and deceleration, the pitching direction is affected, the repeat accuracy and lost motion are worsened, and the air pads on the longitudinal side are supported. There was also an accident, such as interference.

Layout Since a small stroke and air bearing are adversely affected by magnetic attraction force, an expensive coreless linear motor must be used in a double-sided magnet without electromagnetic attraction force, and the position of the position detection device (linear scale) should be installed on the outside of the rail or slider. On the side and the lower side, the influence of Abbe error (a difference error between the position of detection and the position of precision required) tends to occur, and there has been a problem that the positioning accuracy and the repeating accuracy deteriorate.

In addition, as shown in the enlarged view of the vicinity of the air pad of FIG. 47 (a) in FIG. 47 (b), since the air pad 3 is engaged with the slider 4 'with the push screw 4p, the push screw 4p The spherical head 4q of) has a problem such as rattling and stiffness deterioration at the portion where the air pad 3 is pressed, and a method of not using the air pad 3 has been demanded.

Moreover, the thing of the air restraint type | mold like FIG. 48-50 is well known to the stage using the conventional air bearing. 48 to 50 are cross-sectional views of various air-constrained stages of the conventional apparatus. In Figs. 48 to 50, 1 'is a surface plate, 2' is a guide rail, 4 'is a slider, 5 is a coreless linear motor, 6 is an air blowing part. In all cases, a hole serving as an air passage is drilled through the slider 4 'without using an air pad, and the air is blown directly to the guide surface from the slider. In addition, the air is restrained by mounting a coreless linear motor which is centrally constrained by repulsion between air pressures under a small stroke, and which is not affected by magnetic force.

In the conventional air constrained stage as shown in Figs. 48 to 50, since the constrained in the vertical direction and the horizontal direction, the posture fluctuation hardly occurs during the movement and the acceleration / deceleration, the movement accuracy is improved, and the movement tact can be shortened. It was possible to miniaturize (about 100 mm square). However, since the air gap needs to be managed in microns (several microns), it is necessary to combine and process the dimensional relation precision of the guide rail and the slider in micron units (combination accuracy in four directions is necessary in several microns). There was a problem that the unit cost became high, and the same thing could not be produced in large quantities at the same time.

In addition, in the stage of FIG. 48, since the distance is generated between the slider height in the longitudinal direction and the conveyance drive height, a moment force is generated during acceleration and deceleration, the pitching direction is affected, and the repeat accuracy and lost motion are not only poor. In addition, an accident such as the slider on the longitudinal side interferes with the guide rail on the longitudinal side.

Moreover, in the stages of FIGS. 49 and 50, since a distance is generated between the slider position in the lateral direction and the conveyance drive position, a moment force is generated during acceleration and deceleration, and the yawing direction is affected. In addition to worsening, accidents such as the slider on the lateral side interfere with the guide rail on the lateral side. In terms of layout, air bearings are adversely affected by magnetic attraction force. Therefore, an expensive coreless linear motor must be used in a double-sided magnet without electromagnetic attraction force, and the location of the position detection device (linear scale) can be installed from the outside or the bottom side. The influence of an error (a difference error between a detection position and a precision required position) tends to occur, and there has been a problem that positioning accuracy and repetition accuracy deteriorate.

In addition, it is well-known that the conventional hybrid stage is similar to FIG. 51 (refer patent document 1). Fig. 51 is a top view of a conventional hybrid stage. In Fig. 51, 1 'is a surface plate, 2' is a guide rail, 4 'is a slider, 6 is an air blowing part, and 7 is a linear motor magnet part (fixed part). And 8 are linear motor coil parts (moving parts). The up-down direction is constrained by the balance of the electron attraction force and air pressure acting between the motor core (not shown) of the motor coil part and the motor magnet, and the horizontal direction is center-constrained by the repulsion of the air pressures.

(Patent Document 1: Japanese Utility Model Publication No. 7-44457)

The hybrid stage type as shown in Fig. 51 can somewhat solve the problems of the two types of methods described above, but it is necessary to precisely process the slide rail and the longitudinal slide rail for integrally restraining in the transverse direction. Since the parallelism of both sides of the slide rail in the direction needs to be processed to 5 µm or less, the manufacturing cost of the slide rail becomes expensive, and it is difficult to cope with long strokes (1 m or more), long widths (500 mm or more), and the like. .

Although it is possible to reduce the height in one axis, it is not normally used as a single body and must be fixed to a surface plate or the like. In that case, when the height is increased by that much, or when it is comprised by XY, the height is simply doubled, and there was no merit practically.

FIG. 52 is a cross-sectional view taken along the E-E direction in the width direction passing through the center of the slider 4 ′ in FIG. 51. In the figure, 1 'is the surface plate, 2' is the guide rail, 4 'is the slider, 6 is the air pipe, 6u is the bottom air ejection part, 6s is the transverse air ejection part, 7 is the linear motor magnet part (fixed part), 7a is a magnet, 8 is a linear motor coil part (with a movable part core or a yoke), 9 is a linear scale (9H is a head, 9S is a scale). The slider 4 'consists of two members, the upper flat part 4f and the leg part 4k, and couples together with the screw 4c.

In this slide stage, an electromagnetic attraction force (arrow direction in FIG. 52) acts between the magnet 7a and the linear motor coil portion 8. And in the slider 4 ', the horizontal surface which ejects air from the upper flat part 4f to the lower surface from the lower surface air ejection part 6u and the leg part 4k toward the guide rail 2', Air is blown out from the air blowing part 6s, respectively. The floating force which lifts the slider 4 'by the air blowing from the air blowing part 6u acts on the lower surface, and it is located in the vertical position where the sum of the gravity and the electron suction force applied to this float and the slider 4' is balanced. Is injured. In addition, since the force acts in the direction away from the guide rail 2 'by the air blowing from both air blowing portions 6s of the leg 4k of the slider 4', respectively, the two forces are balanced. The slider 4 'is positioned at this captured horizontal position.

Thus, this electron attraction force is applied to the center of the upper flat end of the slider 4 'of FIG. 53 in the direction of arrow F3. Moreover, since the force acts in the direction away from the guide rail 2 'by the air blowing from both air blowing parts 6s of the slider 4', respectively, this force is the leg of the slider 4 'of FIG. It is applied to the portion 4k in the directions of arrows F1 and F2.

By the way, when the slide stage shown in FIG. 52 was examined, it realized that there existed the following problems 1-5.

<Problem 1>

Although the slider 4 is made of granite or ceramic having good workability, granite and ceramic are strong in compression, but have weak defects in the bending direction. Therefore, one end is fixed to the leg 4k with a screw, and the force F2 is applied to the other, so that a bending force acts on the leg 4k, and the part (joint and screw fixing part) shown in FIG. 53 (B) is shown. ) Was likely to break. In addition, the restraint in the vertical direction is performed by the balance between the electron attraction force and the air repulsion, so that deformation and stress as shown in Fig. 53 always impose a burden on the slider, and damage the reproducibility of precision or the stage itself is destroyed. there was.

Therefore, in order to prevent such a state from occurring, it is necessary to carry out strength up, and in such a case, the stage itself is reversed in the direction of miniaturization, and the stage itself becomes large.

<Problem 2>

In the guide rail (2 ＇) having a U-shaped cross section in the width direction, the upper surface of the U-shaped leg portion was an active surface in the up-down direction, so the parallelism between the upper surface of the leg portion and the U-shaped bottom surface (attachment surface) and the upper surface of the leg portion It is necessary to finish all the top views of high precision. Moreover, since the side surface of the U-shaped leg part was made into the active surface of the lateral direction, it was necessary to finish with high precision also about the parallelism between the leg parts of a U-shaped guide.

The U-shaped guide rail (2 화강암) is made of granite or ceramic, and the processing precision is increased (finished 5 µm in error). Therefore, it is time to finish long long objects (1 m or more) at 5 µm in error. There was a drawback to the cost and cost.

<Problem 3>

In the case of rapid acceleration and deceleration, an accident such that the slider on the longitudinal side interferes with and contacts the guide rail on the longitudinal side. Therefore, in order not to cause interference and contact accidents, there is a drawback that a rapid acceleration / deceleration control should not be performed, and a slide stage cannot be subjected to rapid acceleration / deceleration control.

<Problem 4>

Moreover, there existed a problem that the positioning accuracy and repeatability of the signal which the position detection apparatus (linear scale) detected were bad.

<Problem 5>

Since the pressure of the air blown out from the lateral air blowing part 6s of the leg part 4k of the slider on both sides acts to bend the leg part of the U-shaped guide rail inward, the U-shaped leg part deforms inward. There is. When the leg is deformed, the parallelism between the transverse planes of the guide is deteriorated, the leg of the slider and the leg of the guide rail are in contact, and the guide surface may be damaged.

In order to solve the said subject, this invention is comprised as follows.

The invention of the slide stage according to claim 1 corresponds to FIG. 1, wherein two slides fixed in parallel to each other with a surface plate, a linear motor magnet portion placed on the surface plate, and the linear motor magnet portion on the surface plate are sandwiched therebetween. Guide rails, a slider having a U-shape in a cross section perpendicular to the traveling direction and placed in a space between the linear motor magnet portion and the two guide rails, and the linear motor magnet in a U-shaped opening of the slider. A slide stage having a linear motor coil portion disposed to face each other via a gap between a portion and a space, wherein the air is blown directly from the side wall constituting the U-shape of the slider toward the surface plate on the lower surface thereof, and the air is blown toward the transverse surface. An air ejecting portion is provided on the side wall and ejects from the air ejecting portion toward the lower surface. The one to be driven by the driving force between the levitation force and the linear motor magnet part and the linear motor coil electron attractive force and to balance out portion by gravity, and the motor magnet part and the linear motor coil between by and characterized.

Invention of Claim 2 corresponds to FIG. 3, Comprising: The slide stage of Claim 1 WHEREIN: The groove with a long groove, the linear motor magnet part provided in the said long groove, and the said long groove on the said surface plate Two guide rails fixed in parallel with each other, the U-shaped slider placed in a space between the upper groove and the two guide rails and perpendicular to the traveling direction, and the U of the slider A slide stage having a linear motor coil portion disposed opposite to each other via a space between the linear motor magnet portion in a magnetic opening, wherein air is blown directly from the side wall constituting the U-shape of the slider toward the surface plate on the lower surface thereof. Moreover, the air blowing part which blows air toward a horizontal surface is provided in the said side wall, and it goes toward the lower surface from the said air blowing part. The floating force is balanced by the air floating force, the electromagnetic attraction force between the linear motor magnet portion and the linear motor coil, and gravity to rise, and is driven by the driving force between the motor magnet portion and the linear motor coil. Doing.

Invention of Claim 3 corresponds to FIG. 3, Comprising: The slide stage of Claim 1 WHEREIN: The plate with a long groove, the linear motor magnet part provided in the said long groove, and the said long groove on the said surface plate Two guide rails fixed in parallel with each other, the U-shaped slider placed in a space between the upper groove and the two guide rails and perpendicular to the traveling direction, and the U of the slider A slide stage having a linear motor coil portion disposed opposite to each other via a space between the linear motor magnet portion in a magnetic opening, wherein air is blown directly from the side wall constituting the U-shape of the slider toward the surface plate on the lower surface thereof. Moreover, the air blowing part which blows air toward a horizontal surface is provided in the said side wall, and it goes toward the lower surface from the said air blowing part. The flotation force caused by the air to be discharged and the floating surface balanced by the electromagnetic attraction force and gravity between the linear motor magnet portion and the linear motor coil and the driving surface by the driving force between the motor magnet portion and the linear motor coil are matched. It is characterized by that.

Invention of Claim 4 corresponds to FIG. 4, Comprising: In the slide stage of Claim 1, between the side walls which comprise the said U-shape is connected in the front end side and the rear end side of the said moving direction.

Invention of Claim 5 corresponds to FIG. 2, The slide stage of Claim 1 WHEREIN: The said air blowing part was provided in multiple places in the advancing direction of the said slider of the side wall which comprises the said U-shape. It is characterized by the above-mentioned.

The invention according to claim 6 corresponds to FIG. 6, wherein in the slide stage according to claim 1, the outer side and the inner side of the edge of the slider are rounded.

Invention of Claim 7 corresponds to FIG. 7, The slide stage of Claim 1 WHEREIN: The said air blowing part was provided in multiple places in the direction orthogonal to the advancing direction of the said slider of the side wall which comprises the said U-shape. I am doing it.

The invention according to claim 8 corresponds to FIGS. 8 and 9, wherein in the slide stage according to claim 2, a plurality of rows of the long grooves are dug in parallel to each other on the surface plate, and the linear motor magnets are formed in the respective long grooves. Each linear motor coil is arranged in the U-shaped opening of the slider, and the air blowing portion of the lower surface is interposed between the linear motor coils of the slider. It is installed.

Invention of Claim 9 corresponds to FIG. 9, In the slide stage of Claim 8, multiple rows of the said long groove are two rows or three rows, It is characterized by the above-mentioned.

Invention of Claim 10 corresponds to FIG. 10. In the slide stage of Claim 1, it replaces the said slider and is a metal plate which attached the linear motor coil part and the side wall part which comprises the said U-shape of the slider below. It is characterized by using the slider made.

Invention of Claim 11 corresponds to FIG. 10, The slider stage of Claim 10 was equipped with the hole for a cooling medium in the said metal plate, It is characterized by the above-mentioned.

The invention of the XY direction movable slide stage of Claim 12 corresponds to FIG. 13, The slider of the said 1st slide stage is made to use the 1st slide stage of Claim 8, and the 2nd slide stage of Claim 10, Placing the second slide stage on the first slide stage such that the second slide stage is the surface plate and the moving direction of the slider of the first slide stage and the moving direction of the slider of the second slide stage are perpendicular to each other. It features.

Invention of Claim 13 corresponds to FIG. 14, The slide stage of Claim 12 WHEREIN: The said 2nd slide stage was characterized by twin drive.

Invention of Claim 14 corresponds to FIG. 15, In the slide stage of Claim 1, the top base provided on the said slider is spaced apart from the said slider, and is fixed in the space between the said top base and the said slider. Further provided with a linear scale head at a portion directly above the linear motor coil on the slider, while floating a linear scale scale from the linear scale head and other moving members in the space between the top base and the slider. It features.

Invention of Claim 15 corresponds to FIG. 15, The slider stage of Claim 14 WHEREIN: The limit switch was attached in the space between the said top base and the said slider.

Invention of Claim 16 corresponds to FIG. 17, The slider stage of Claim 14 WHEREIN: The attachment base which attaches the graduation part of the said linear scale was formed in U shape in the cross section of the width direction.

Invention of Claim 17 corresponds to FIG. 18. In the XY direction movable slide stage of Claim 13, the long hole extended in the moving direction of the slider of a said 2nd slide stage is dug in the surface plate of the said 2nd slide stage. And storing a planar two-dimensional linear scale head in the elongated hole to fix an end of the planar two-dimensional linear scale head to the slider, and to arrange a planar two-dimensional linear scale on the surface of the first slide stage. have.

Invention of Claim 18 corresponds to FIG. 20. In the XY direction movable slide stage of Claim 17, the said planar two-dimensional linear scale head is arrange | positioned at two square diagonal positions, and the said planar two-dimensional linear scale is carried out. A plurality of pieces are arranged in a planar shape on the surface plate of the first slide stage.

The invention described in claim 19 corresponds to FIG. 21, wherein in the slide stage according to claim 1, between the slider and the second row of guide rails and between the slider and the surface plate, respectively, a low friction coefficient and a hard material Is attached to the slider side, the guide rail side, and the surface plate side, so that materials of the low friction coefficient material are in contact with each other.

The invention according to claim 20 corresponds to FIG. 21, and in the slider stage according to claim 19, the material having the low friction coefficient is any one of carbon fiber, ceramic, quartz and agate.

Invention of Claim 21 corresponds to FIG. 22, The slide stage of Claim 1 WHEREIN: The said surface plate and the said two guide rails are integrally formed, and the level adjustment bolt is provided in the lower surface of the said surface plate of the said surface plate. Positioning bolts are disposed on the side surfaces, respectively.

Invention of the slide stage of Claim 22 corresponds to FIG. 25, The plurality of slide stages of Claim 21 are arranged in parallel on a can manufacturing stand, A workpiece | work adsorption base is provided in the upper part of the said slide stage, and the said level The level adjustment is possible with the adjustment bolt.

The invention of the gantry type XY direction movable slide stage of Claim 23 corresponds to FIG. 28, and arranges the slide stage of Claim 21 in parallel with each other on both ends on a can manufacturing stand, and places the said slide stage on the upper part. It is characterized by being installed in the horizontal direction.

The invention according to claim 24 corresponds to FIG. 31, wherein in the slide stage according to claim 1, the "I" shape of a Roman letter is formed when the guide rail is viewed from a cross section perpendicular to the traveling direction, A groove is provided at the center of the upper surface, and air is ejected from the air ejecting portion when the slider is above the upper surface of the groove, and the electromagnetic suction of the linear motor magnet portion and the linear motor coil portion It travels in balance, and the said slider runs while blowing air from the said lateral air blowing part so that the said guide rail upper side both sides may be enclosed.

Invention of Claim 25 corresponds to FIG. 42. In the slide stage of Claim 24, a female thread bush is fixed to the flange part of the lower end part of the said guide rail, and the said level adjustment bolt is screwed to the female thread bush. And a fixed bolt passed through a through hole penetrating through a central axis formed in the bolt fixed level adjusting bolt.

According to the invention described in claim 1, the starting point of the present invention is to effectively use the upper surface of the surface plate, which has previously served only as a mounting table (table) on which members are placed, directly as an active surface. For this reason, the guide rail does not have a complicated shape such as the U-shape of the conventional guide rail (2 ') of FIG. 52, and only needs to fix a simple long rod. It is only necessary to finish the process of drawing only the drawing. On the other hand, since the guide rail 2 'of FIG. 52 made the upper surface of the U-shaped leg part an active surface, surface precision was calculated | required also about the parallelism between U-shaped leg parts other than the top view of this active surface. Therefore, the guide rail (2mm) could only be made of long ones of about 1m in order to maintain the surface accuracy, but since the guide rail of the present invention is a simple shape, it is possible to produce high precision longs over a length of 6m to 7m. Since it can be obtained, it can apply to the manufacturing apparatus of a large liquid crystal panel.

Moreover, since thickness D of the guide rail 2 'of FIG. 52 can be abbreviate | omitted, height can be made low.

According to the invention described in claim 2, in addition to the effect described in claim 1, the height of the linear motor magnet portion can be further lowered.

According to the invention of claim 3, since the driving surface of the motor and the floating (sliding) surface of the stage are substantially coincident, the offset distance is eliminated, and the slider of the slide stage can be prevented from coming into contact with the lower sliding surface. Even if the deceleration is increased, there is no fear of rubbing the stage and the sliding surface, and a slide stage capable of withstanding high acceleration and deceleration is produced.

Moreover, since height can be made low by the thickness of the U-shaped up-down direction of guide rail 2 ', it contributes to miniaturization.

In addition, the guide rail 2 only needs to fix a simple long rod, Therefore, in manufacture, what is necessary is just to process only the perpendicularity of the surface which opposes the surface plate 1 and the slider 4, and the guide rail of FIG. Since the machining of the U-shaped precision of (2 ms) can be omitted, the machining becomes easy.

In addition, since the stress of the electron attraction force does not directly affect the slider 4 because of the intaglio structure, there is no deformation of the slider body, and stability of stability and reproducibility are also good.

According to the invention as set forth in claim 4, the slider does not need to pass over the guide rail, so the slider only needs to cut out a rectangular parallelepiped portion that only accommodates the linear motor coil in the center, and the left and right sides of the tip in the advancing direction connecting both legs are provided. Since the connection part which connects both leg parts and the connection part which connects the left and right leg parts of the rear end of the same advancing direction can be provided, the both side leg parts of a slider are not deformed.

In addition, a linear motor coil of the same size is attached, and since it does not exceed the guide rail, it becomes compact, so that the material is also reduced, and a force acts on the upper part of the slider by covering a part of the remaining material to increase the thickness of the upper part of the slider. Even if the thickness is sufficient, the lower side does not become largely concave.

According to invention of Claim 5, the stable buoyancy can be obtained.

According to the invention of claim 6, since the inner and outer edges of the corner portions are rounded in this way, the stress does not concentrate on the edges, so that the stresses become stronger and the edge portions of the slider are less likely to break.

According to the invention as set forth in claim 7, a large slide area of a large area can be easily realized.

According to the invention as set forth in claim 8, by providing a plurality of linear motors, it is possible to produce a slide stage with an arbitrary driving force, and furthermore, since two linear motors can be driven at a distance from each other, they can be driven on both sides. It becomes stronger with respect to the direction, and the accuracy of yawing and lateral straightness can be further improved by performing synchronous control by the linear motor and the linear scale on both sides.

According to the invention as set forth in claim 9, yawing does not occur by driving both linear motors, and in the case of an emergency stop, when the emergency stop is applied only to the linear motor in the center, the brake is applied to the center part, so that the slider does not shake from side to side. You can stop.

According to the invention of claim 10, since the metal plate is strong in bending by doing in this way, even if only the center portion of the metal plate is bent and deformed, the metal plate is not broken, and since the influence of the electron attraction force acts only on the connecting base on the upper surface, the slider (stone ) Takes only the force in the compression direction, and because the stone is strong in compression, the stone does not deform and the stability and accuracy of the reproducibility are also improved.

By using the metal plate, not only the accuracy can be improved, but also the stage height can be made lower as the thickness of the slider upper part disappears.

According to invention of Claim 11, since the hole for a cooling medium can be easily formed in the metal base to be connected, heat_generation | fever of a linear motor coil can be interrupted | blocked by making water or air flow here.

According to invention of Claim 12, by doing in this way, the XY stage which can make height lower than the stacked height can be obtained.

According to the invention as set forth in claim 13, the height can be reduced by doing in this way, and the twin drive is performed for both the X and Y axes, so that the movement accuracy in the lateral direction is increased by increasing the movement accuracy at both sides (yawing, Since the lateral straightness can be improved, high-precision movement is possible for both the X-axis and the Y-axis.

According to the invention as set forth in claim 14, since the detection head is arranged on the same axis without offset with respect to the slider as the measurement object, the centering portion is not affected by the yawing even if the slider causes yawing, so that the measurement accuracy is improved.

According to the invention as set forth in claim 15, since a limit switch for preventing over travel and the like can be effectively attached to the space between the slider and the top base, it does not protrude to the outside of the apparatus, There is no concern.

According to the invention of Claim 16, since the linear scale base is attached to the elongate shape and downwards, it was easy to deform | transform under the influence of gravity, but since it was made into the cross-section U-shape, it became strong against deformation.

According to the invention of claim 17, if the X-axis slider is moved in the X direction, the two-dimensional linear scale head moves in the intaglio to read the planar two-dimensional linear scale in the X direction, and if the Y-axis slider is moved, the X-axis Since the slider also moves, the two-dimensional linear scale head attached to the lower side of the X-axis slider is moved, so that the planar two-dimensional linear scale can be read in the Y direction, and as a result, the two-dimensional linear scale head is flat two. The dimensional linear scale can be read in the XY direction.

According to the invention described in claim 18, any one of the two two-dimensional linear scale heads reads the two-dimensional linear scale, and even if a two-dimensional linear scale of any length is provided in the X and Y directions, It becomes possible for the two-dimensional linear scale head to read the scale.

According to the invention as set forth in claim 19, the slider can move the surface of the surface plate to almost zero clearance, thereby enabling precise control.

According to the invention as set forth in claim 20, since a material having a low friction coefficient and a hard material can be obtained, durability is improved, and the slider can move the surface of the surface plate to almost zero clearance, thereby enabling precise control.

According to the invention according to claim 21, the structure is a combination of the surface plate and the guide rail, and the position adjusting bolt is disposed on the lower surface of the surface rail and the position adjusting bolt is disposed in the longitudinal direction due to the weight and load load of the surface rail. By adjusting the level adjustment bolt installed on the lower surface for the warp of the can, it can be installed even in the case of can manufacturing stand where the precision is not shown, not the stone slab which the bottom is flat, etc., and the straightness of the running is 3-10, too. Similarly, it is possible to adjust to about 占 퐉, and in the same manner, the precision in the lateral direction can be adjusted by the position regulating bolt, and the straightness of travel can be adjusted to about 3 to 10 占 퐉.

According to the invention described in claim 22, since the slide stages are arranged in parallel on the surface plate and the workpiece adsorption base is provided on the upper portion, the large flat panel display (FPD) workpiece can be conveyed.

According to the invention according to claim 23, since the slide stages are arranged in parallel at both ends on the can manufacturing stand, and the level adjustment can be performed, the slide stages of the same embodiment of the present embodiment are arranged on the upper side in a large FPD work. It is possible to configure the stage of the corresponding gantry structure.

According to invention of Claim 24, since it is a guide rail of the "I" shape of the Roman letter which integrated the surface plate and the guide rail, since the rigidity of the main body is strong and the bolt fixed level adjustment bolt is arrange | positioned in the lower part, a guide rail By adjusting the level adjustment bolt installed on the lower surface for the self-weight and the longitudinal warping due to the load load, it can be installed even in the case of can manufacturing stand where precision is not shown, but not in a stone platform with a flat view below. The straightness of the running can also be adjusted to about 3 to 10 µm. Similarly, the accuracy in the lateral direction can also be adjusted with the positioning rail with the position regulating bolt, and the straightness of the traveling can also be adjusted to about 3 to 10 µm.

According to the invention as claimed in claim 25, the installed male threaded bolt level adjustment bolt is pushed and pulled by a female thread bushing adhesively fixed to the guide rail, and fixed to the substrate with a fixing bolt at a height determined, where It can be installed also in the case of a can manufacturing stand etc. which are not a precision, not a stone slab, etc., and the straightness of a run can also be adjusted to about 3-10 micrometers. Therefore, even when the lower part used as a reference | standard has poor precision, such as a can manufacturing stand, it becomes possible to carry a high-precision conveying position of 10m or more long objects.

In addition, in contrast with the conventional apparatus, the following effects are obtained by the above configuration.

Since it is restrained in the up-down direction with respect to the problem of the conventional weight balance type | mold, the moving precision (longitudinal straightness, pitching etc.) of an up-down direction improves.

Since the posture variation during acceleration and deceleration is small, the contact of the bearing part does not occur, the acceleration and deceleration time can be shortened, and a moving tact up occurs.

It is possible to realize practical use in miniaturization, to operate in variable speed, and to enable rapid acceleration and deceleration.

Since there is no distance between the slide height in the longitudinal direction and the conveying drive height, no moment force is generated during acceleration and deceleration, there is no influence in the pitching direction, the repeat accuracy and lost motion are improved, and the slider on the longitudinal side is placed on the surface plate. Do not interfere with

It is not necessary to use an expensive coreless linear motor in the double-sided magnet, and it can be inexpensive because a linear motor of a single-sided magnet is used.

By installing the installation position of the position detection device (linear scale) at the position as described later with reference to Figs. 14 and 17 instead of the outer side or the lower side, the influence of the Abbe error (the difference error between the detection position and the precision required position) is eliminated, Positioning accuracy and repeatability are improved.

Since the air gap does not need to be managed in microns for the conventional air-constrained problem, there is no need to combine the dimensional relationship precision of the guide rail and the slider in microns, and the unit cost is low. Can produce large quantities at the same time.

Since there is no distance between the longitudinal slider height and the conveying drive height, no moment force is generated during acceleration and deceleration, the pitching direction is not affected, the repeating accuracy and lost motion are improved, and the longitudinal slider is vertical. It does not interfere with the guide rail on the directional side.

Since there is no distance between the horizontal slider position and the conveyance drive position, no moment force is generated during acceleration and deceleration, the yawing direction is not affected, the repeat accuracy and lost motion are improved, and the horizontal slider is horizontal. It does not interfere with the guide rail on the directional side.

It is not necessary to use an expensive coreless linear motor in a double-sided magnet, and it can be made cheap by using a linear motor of a single-sided magnet.

In addition, compared to the "slide device" described in Japanese Utility Model Publication No. 7-44457, since the lower surface uses the surface plate itself for the hybrid type problem, no special processing is necessary, and constrained laterally. The guide rails do not need to be precision-machined in one piece, and the parallelism of the corresponding both sides need not be processed to 5 μm or less, and only the top view is required, making the guide rails inexpensive and producing long strokes (3 m or more). ), Long width (2 m or more), and the like.

It is more possible to lower the height in one axis, and to lower it because the surface plate is used.

Moreover, when comprised by XY, it does not become a double height simply, but can make it lower as a combined height, and there exists a practical merit.

Since there is no distance between the longitudinal slider height and the conveying drive height, no moment force is generated during acceleration and deceleration, the pitching direction is not affected, the repeating accuracy and lost motion are improved, and the longitudinal slider is vertical. It does not interfere with the guide rail on the directional side.

Although the up-and-down direction is restrained by the balance of magnetic attraction and air repulsion, there is no risk that deformation and stress do not burden the slider, impair the accuracy of reproducibility, or destroy the stage itself.

In addition, since such a state does not occur, it is not necessary to perform the strength up, so that the size can be reduced.

1 is a longitudinal sectional view of a slide stage according to Embodiment 1 of the present invention.
FIG. 2 is a cross-sectional view of the slide stage according to the second embodiment as viewed in the BB cross-sectional direction of FIG. 3.
FIG. 3 is a view in which the longitudinal section of the slide stage according to the second embodiment is viewed from the AA section direction of FIG. 2.
Fig. 4 is a view for explaining the slider according to the third embodiment of the present invention. Fig. 4 (a) is a conceptual perspective view thereof, and (b) is a perspective view of the slider being turned upside down to explain the ribs of the slider.
5 is a cross-sectional view in the CC direction of the slider diagram of FIG. 4A.
6 is a sectional view of a slide stage according to the fourth embodiment.
7 is a sectional view of a slide stage according to the fifth embodiment.
8 is a sectional view of a slide stage according to the sixth embodiment.
9 is a sectional view of a slide stage according to the seventh embodiment.
10 is a view for explaining the slide stage according to the eighth embodiment, and a sectional view of the slide stage.
11 is a conceptual perspective view of the slider according to the eighth embodiment.
FIG. 12 is a view from the BB cross-sectional direction of the slider of FIG. 11.
13 is a three side view of the slide stage according to the ninth embodiment.
14 is a three side view of the slide stage according to the tenth embodiment.
15 is a longitudinal sectional view of a slide stage according to the eleventh embodiment.
16 is a partial cross-sectional perspective view of the vicinity of the linear scale 9 of the eleventh embodiment.
17 is a longitudinal sectional view of a slide stage according to the twelfth embodiment.
18 is a three side view of the slide stage according to the thirteenth embodiment.
19 is a top view of the planar XY linear scale used in Example 13. FIG.
20 is a top view of the plane XY linear scale according to the fourteenth embodiment.
21 is a sectional view of a slide stage according to the fifteenth embodiment.
Fig. 22 is a longitudinal sectional view of the slide stage according to the sixteenth embodiment of the present invention.
It is a longitudinal cross-sectional view of the modification (with a cooling plate) of the slide stage concerning Example 16 of this invention.
24 is a three side view of the slide stage according to the sixteenth embodiment of the present invention.
25 is a longitudinal sectional view of a slide stage application example 1 according to the sixteenth embodiment of the present invention.
Fig. 26 is a longitudinal sectional view of a slide stage application example 2 according to the sixteenth embodiment of the present invention.
Fig. 27 is a longitudinal sectional view of a slide stage application example 3 according to the sixteenth embodiment of the present invention.
28 is a longitudinal sectional view of a slide stage application example 4 according to the sixteenth embodiment of the present invention.
29 is a longitudinal sectional view of a slide stage application example 5 according to the sixteenth embodiment of the present invention.
30 is a top view of a slide stage application example 6 according to Embodiment 16 of the present invention.
31 is a longitudinal sectional view of the slide stage according to the seventeenth embodiment of the present invention.
32 is a three side view of the slide stage according to the seventeenth embodiment of the present invention.
Fig. 33 shows an example in which a linear motor magnet portion is attached to the upper center portion of the surface rail.
34 is an example in which there is a groove provided with a linear motor magnet part in the upper center part of the surface rail like Example 2 (FIGS. 2 and 3).
It is a side view of the Example which attached the tape scale of a linear scale part to the guide surface upper surface of the surface rail.
36 is a longitudinal sectional view of the slide stage application example 1 according to the seventeenth embodiment of the present invention.
37 is a longitudinal sectional view of the slide stage application example 2 according to the seventeenth embodiment of the present invention.
Fig. 38 is a longitudinal sectional view of a slide stage application example 3 according to the seventeenth embodiment of the present invention.
39 is a longitudinal cross-sectional view of a slide stage application example 4 according to the seventeenth embodiment of the present invention.
40 is a longitudinal sectional view of a slide stage application example 5 according to the seventeenth embodiment of the present invention.
Fig. 41 is a longitudinal sectional view of a slide stage application example 6 according to the seventeenth embodiment of the present invention.
Fig. 42 is an enlarged detail view of the portion A of Fig. 31 of the slide stage according to the seventeenth embodiment of the present invention, (a) is a state in which the stage is raised, (b) is raised to the maximum, and (c) is fixed. The state which was made up is shown.
It is sectional drawing which further added the horizontal direction adjustment mechanism and the load sharing mechanism of the surface rail to the up-down direction adjustment mechanism of FIG.
FIG. 44 shows an example in which a stage of a gantry structure corresponding to a large-scale FPD work is configured by installing the slide stage of the sixteenth embodiment downward.
It is a side view for explanatory description which can force the straightness of a longitudinal direction to the straight state by the bolt fixed level adjustment bolt in the curved state of a surface rail.
It is a top view for explanatory view which can force the straightness of a transverse direction to the straight state of the plate rail by the position control bolt.
Fig. 47 is a sectional view of a conventional weight balance stage, in which (a) is an overall view and (b) is an enlarged view of the vicinity of the air pad.
48 is a sectional view of a conventional air constrained stage 1.
49 is a cross-sectional view of a conventional air constrained stage 2.
50 is a cross-sectional view of the conventional air constrained stage 3.
51 is a top view of a conventional hybrid stage.
52 is a cross-sectional view of a conventional hybrid stage.
53 is a diagram of a slider deformation of the conventional hybrid stage.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings.

(Example 1)

1 is a longitudinal sectional view of a slide stage according to the first embodiment of the present invention.

In Fig. 1, 1 is a surface plate, 2 is a guide rail, 4 is a slider, 6 is an air blowing part, 7 is a linear motor magnet part (fixed part), 7a (Fig. 1) is a magnet, 8 is a linear motor coil part ( 9 (FIG. 1) are linear scale parts (9H is a linear scale head, 9S is a linear scale (scale part)).

When comparing the guide rail 2 of Example 1 (FIG. 1) and the guide rail 2 'of the well-known example (FIG. 52), since the guide rail 2' of the well-known example (FIG. 52) is a complicated shape, it is flat. The guide rail 2 of Example 1 has a simple shape in that a long object having a length of only about 1 m can be made (and thus limited to the use of a semiconductor manufacturing apparatus) in order to achieve the same height precision as that of FIG. 5 μm. Therefore, a high-precision long object can be obtained over the length of 6m-7m (thus, it is applicable to the manufacturing apparatus of a large liquid crystal panel.). It is a simple structure which only fixed the guide rails 2 and 2 which consist of two long rods on the surface plate 1 so that they may become parallel with each other.

Since the surface of the surface plate 1 is basically a lapping finish, the surface of the surface plate 1 is a flat surface, and the surface of the surface plate 1 is approximately the same as the top view (smooth surface) of the upper surface of the U-shaped leg of the guide rail (2). There is no problem with using.

The slider 4 is placed in the space which arises between the upper side of the surface plate 1, and the guide rails 2 and 2 of 2 rows. The slider 4 has a U-shape inverted up and down in a cross section perpendicular to the traveling direction, and includes a linear motor coil portion 8 in the inverted U-shaped opening. The linear motor magnet portion 7 and the linear motor coil portion 8 are disposed to face each other with a gap therebetween, and the linear motor magnet portion (by the core (iron core) inside the linear motor coil portion 8 (not shown)) ( Electromagnetic attraction is generated between 7) and the linear motor coil section 8.

On both side walls 4s and 4s constituting the inverted U-shape of the slider 4, air is blown out toward the lower surface of the slider 4 and the outside of the slider 4 toward the outside in the lateral direction. The air pipe 6 which has the horizontal air blowing part 6s which blows out is provided.

The air ejected from the lower surface air ejecting portion 6u toward the lower surface touches the surface plate 1, causing the floating force on the slider 4. The slider 4 floats at a position balanced by the electromagnetic attraction force and gravity between the linear motor magnet portion 7 and the linear motor coil 8 and the floating force. In Example 1, the distance of 5 micrometers-10 several micrometers from a surface plate becomes a floating surface.

In addition, the air ejected from the transverse air ejection section 6s to the outside of the transverse plane touches the guide rails 2 on both sides, and as a result, the balance is maintained at the center.

Moreover, the force which pushes a side wall from the guide rail 2 inward by the pressure of the air which ejected from the side wall to the lateral outer periphery acts. As described above with reference to Fig. 53, the force that opens the sidewall of the slider to the outside by the electromagnetic attraction force acts, but as described above, the pressure of the air blown out from the lateral air blowing portion becomes the force to return the sidewall to the inside, so that the pressure is adjusted. This has the effect of reducing deformation of the sidewall.

When air pressure is not adjusted, as shown to FIG. 4 (a) mentioned later, what is necessary is just to attach the part used as a rib to the side wall of the U-shaped opening part of the slider 4.

In addition, as shown in Fig. 4 (b) to be described later, when the opening 6k is processed by leaving the portion of the slider 4 that becomes the rib 6r, the rib 6r is applied even if a force for opening the sidewall out by the electron attraction force is applied. Thereby, there is an effect that the deformation of the side wall (deformation as shown in Fig. 53) is suppressed.

Further, a driving force is generated between the linear motor magnet portion 7 and the linear motor coil portion 8, and the driving force drives the slider 4 in the travel direction. The lower end of the linear motor coil 8 part becomes a driving surface.

Moreover, since height can be made low by the thickness part D of the U-shaped up-down direction of the guide rail 2 '(FIG. 52), it contributes to miniaturization.

In addition, the guide rail 2 of Example 1 only needs to fix a simple long rod, Therefore, in manufacture, it is only necessary to process only the right angle of the surface which opposes the surface plate 1 and the slider 4 exactly, Since the machining which gives the U-shaped precision of the guide rail 2 'of FIG. 52 can be abbreviate | omitted, it becomes easy to process.

Moreover, when the width of the guide rail 2 of Example 1 is designed wide, since the guide deformation | transformation is reduced by the pressure of the air blown out from the lateral air blower of the slider side wall, prior art (FIG. 52) Problem 5 can be solved.

Therefore, the guide rail 2 can obtain a high precision long object over the length of 6m-7m, and can be applied to the manufacturing apparatus of a large liquid crystal panel.

Since the guide rail restrains the position of the slider in the lateral direction and the surface plate restrains the position of the slider in the longitudinal direction, there is an effect that the running accuracy in the lateral direction and the running precision in the longitudinal direction can be adjusted independently.

(Example 2)

2 and 3 are views illustrating a slide stage according to the second embodiment of the present invention, FIG. 2 is a cross sectional view of the slide stage as seen from the BB cross-sectional view of FIG. 3, and FIG. 3 is a longitudinal section of the slide stage. It is the figure seen from the AA cross section direction of FIG.

In FIG.2 and FIG.3, the code | symbol same as FIG.1 is abbreviate | omitted.

In the surface plate 1 of Example 2, the long groove 1a (FIG. 3) is dug, and the linear motor magnet part 7 provided with the magnet 7a in the upper part in the long groove 1a is provided. At this time, the upper surface of the magnet 7a is located on the substantially same plane as the surface of the surface plate 1. Since the surface of the surface plate 1 is basically a lapping finish, the surface of the surface plate 1 is a flat surface, and the surface of the surface plate 1 is approximately the same as the top view (smooth surface) of the upper surface of the U-shaped leg of the guide rail (2). There is no problem with using.

In addition, the two guide rails 2 and 2 are fixed to be parallel to each other with the long groove 1a interposed therebetween.

When the width of the guide rail 2 is designed to be wide, the amount of deformation of the guide can be reduced by the pressure of the air blown out from the lateral air blower of the slider side wall, thereby solving problem 5 of the prior art (FIG. 52). have.

The slider 4 is placed in a space generated above the elongated groove 1a and between the two rows of guide rails 2 and 2. The slider 4 has an inverted U shape when viewed in a cross section perpendicular to the traveling direction, and includes a linear motor coil portion 8 in the inverted U shape opening. The linear motor magnet portion 7 and the linear motor coil portion 8 are disposed to face each other with a gap therebetween, and the linear motor magnet portion (by the core (iron core) inside the linear motor coil portion 8 (not shown)) ( Electromagnetic attraction is generated between 7) and the linear motor coil section 8.

In addition, when the opening portion 6k is processed with the slider 4 leaving the portion of the rib 6r on the sidewall as in the first embodiment, the sidewall is deformed by the rib 6r even if a force to open the sidewall out by the electron attraction force is applied. The effect of suppressing (deformation as in Fig. 53) can be obtained.

Thus, in Example 2, since the drive surface (lower end of the linear motor coil 8) of the linear motor and the floating (sliding) surface of the stage (decimal about 10 micrometers from the surface 1) roughly coincide, the offset distance And the contact between the slider 4 'and the guide rail 2' generated in the slide stage of FIG. 52 disappears.

Here, the reason why the slider and the guide rail do not come into contact when the offset distance disappears will be described based on the reason explained by the present applicant.

It returns to FIG. 52 which is a well-known example. The distance t in FIG. 52 is an offset distance between L1 which is the drive surface of the slider 4 'and the sliding surface L2 of the slider 4'. As the distance t increases, the moment force of acceleration (or deceleration) is forwarded from the lower portion of the slider 4 'in the state of being supported (injured) at the upper portion of the slider 4' during acceleration and deceleration. Since the front end and the rear end of the slider 4 'are moved (pitching) greatly in the up and down direction, as a result, the front end and the rear end of the slider 4' are extended to the upper part of the guide rail 2 '. There is a fear of contact. However, if this distance t is zero (FIG. 3), since the driving surface of the slider 4 and the floating (sliding) surface coincide, the surface of the surface to which the acceleration (or deceleration) force of the slider 4 is applied is floating and sliding. Since it moves, the front end and the rear end of the advancing direction of the slider 4 do not rock up and down, and as a result, there is no fear that the front end and the rear end of the advancing direction of the slider 4 come into contact with the surface plate 1.

Thus, since there is an offset distance t shown in FIG. 52, and there is a distance between the slider height in the longitudinal direction and the conveyance drive height, moment forces are generated during acceleration and deceleration, and the pitching direction is affected. In addition to the worsening, rapid acceleration and deceleration also occurred when the slider on the longitudinal side interferes with and contacts the guide rail on the longitudinal side. On the contrary, in order to prevent interference and contact accidents, there was a drawback that the rapid acceleration / deceleration control cannot be performed and the slide stage cannot perform the rapid acceleration / deceleration control. However, these defects can be solved by the second embodiment. there was. Therefore, according to the second embodiment, even if the acceleration / deceleration is increased, there is no fear that the stage and the sliding surface will rub, and a slide stage capable of withstanding high acceleration / deceleration is produced.

In addition, since the stress of the electron attraction force does not directly affect the slider 4 because of the intaglio structure, there is no deformation of the slider body, and stability of stability and reproducibility are also good.

(Example 3)

Fig. 4 is a view for explaining the slider according to the third embodiment of the present invention. Fig. 4 (a) is a conceptual perspective view thereof, and (b) is a perspective view of the slider being turned upside down. 5 is a cross-sectional view taken along the C-C direction of the slider view of FIG.

The conventional slider 4 'is a slider used for the slide stage of Fig. 52, and is a type that proceeds over the guide rail 2', so that the two leg portions 4k, 4k of the slider 4 'are structurally inclined. The front ends and the rear ends of the advancing direction were not closed but were opened. Therefore, when the reaction force F1, F2 by air blowing in the arrow direction acts on the slider 4 ', the leg parts 4k, 4k on both sides of the slider 4' will open outward as shown in FIG. Power to work, and has opened. In order to prevent this, it is necessary to increase the thickness, contrary to the demand for miniaturization, low cost, and light weight.

When the electron attraction force acts in the arrow direction F3 as shown in FIG. 53, if the thickness of the upper part of the slider 4 'is not enough, it will dent in the lower side as shown in FIG. In order to prevent this, it is necessary to increase the thickness in a similar manner, and it has countered the demand for miniaturization, low cost, and light weight.

On the other hand, since the slider 4 of FIG. 4A is the type of the slider which advances between two guide rails 2 with the slider of FIG. 2 and FIG. There is no need to pass the slider 4, therefore, the slider 4 only needs to cut out the rectangular parallelepiped portion which only accommodates the linear motor coil part 8 in the center part, and the connection part which connects the left and right leg parts of the front-end | tip of the advancing direction which connects both leg parts, Similarly, the connection part which connects the left and right leg parts of the rear end of the advancing direction can be provided so that it may show by hatching (4x), For this reason, even if the electromagnetic attraction force F1, F2 of an arrow direction acts on the slider 4, Since the leg part of both sides tries to open by the connection part of the front end of the advancing direction, and the rear part connection part, the leg parts of both sides of the slider 4 do not bend like FIG.

4B is a diagram in which the slider is upside down. In the figure, the coil part 8 of the linear motor is detached from above, and the opening part 6k is processed leaving the part which becomes the rib 6r in the side wall. Even if the force of opening the sidewall out by the electron attraction force is applied, the rib 6r has the effect of suppressing the deformation of the sidewall (deformation as shown in Fig. 53).

Moreover, although the linear motor coil 8 of the same size is attached, since the slider 4 'of FIG. 52 passes over the guide rail 2, it becomes large and therefore requires a lot of material, but the slide of FIG. 4) becomes small because it does not cross the guide rail, and thus the material is also reduced. Even if the electron attraction force acts on the arrow direction F3 by applying a portion of the remaining material to increase the thickness of the upper part of the slider 4, Since the thickness of the upper part of (4) is enough, as shown in FIG. 5, a lower side does not become largely concave.

(Example 4)

6 is a sectional view of a slide stage according to the fourth embodiment.

6 differs from Embodiment 2 (FIG. 3) in the shape of a slider. Although the slider 41 in FIG. 6 has an inverted U shape like the slider 4 in FIG. 3, the inverted U shape edges of the slider 4 in FIG. The U-shaped edge of the slider 41 of FIG. 6 differs in that the inner side and the outer side are in the shape of the egg R which misses a stress. As the inner and outer sides of the legs are rounded in this manner, the stress is not concentrated on the edges, so that the stress becomes stronger and the legs of the slider 41 are more difficult to break.

(Example 5)

7 is a sectional view of a slide stage according to the fifth embodiment.

Since the slide stage according to the second embodiment (Fig. 3) is a structure in which only two guide rails 2 of long rods are screwed on both sides on the surface plate 1, a simple and wide area slider is required. Although it was possible to cope with the above, the fifth embodiment can also cope with the demand of the large slider. The slide stage of FIG. 7 meets this requirement, and a linear motor (linear motor magnet portion 7 and linear motor coil portion 8) is provided in the center, and guide rails 2 and 2 are provided on both sides. In order to increase the flotation force, a plurality of air blowing holes 61 and 62 are provided on the lower surfaces of the U-shaped ends of the slider 42, so that a wide and large slide stage can be easily realized.

Since the same code | symbol as FIG. 3 is a member of the same function, description is abbreviate | omitted.

(Example 6)

8 is a sectional view of a slide stage according to the sixth embodiment.

According to Example 5 (FIG. 7), although the slide stage which was wide and deep also was easy to manufacture, the slide stage which concerns on Example 6 which doubled the driving force more than the slide stage of Example 5 to be. In the slide stage according to the sixth embodiment, as shown in FIG. 8, a plurality of linear motors 51 and 52 can be provided to produce a slide stage having an arbitrary driving force.

In FIG. 8, two linear motors 51 and 52 are provided on both sides of the slider 43 and the surface plate 1, whereby the driving force can be doubled.

In addition, if it is driven by one linear motor in the same center as Example 5 (FIG. 7), it will become easy to turn (yaw) from side to side with respect to the advancing direction, but the two linear motors 51 and 52 may be spaced apart from each other. In addition, since the linear scales on both sides can be driven on both sides by, for example, being attached to the side portions or the upper surfaces of the guide rails 2 and 2, the linear scales on both sides of the yaw direction become stronger, By performing the synchronous control by the linear scale, it becomes possible to further improve the accuracy of yawing and lateral straightness, and it is possible to set it to 1 second or less and 1 micrometer or less for what is normally 3 seconds and 3 micrometers.

(Example 7)

9 is a sectional view of a slide stage according to the seventh embodiment.

The slide stage of FIG. 9 combines the so-called slide stage of FIG. 3 and the slide stage of FIG. 8, and the slide stage which increased driving force was obtained. But the effect was not only that, but unexpected effects were obtained. That is, the seventh embodiment can overcome the weaknesses of each of the slide stage of FIG. 3 and the slide stage of FIG. 8.

Although the weak point of the slide stage of FIG. 3 was yawing, it can be solved by driving both linear motors as shown in FIG.

In addition, the weak point of both linear motor driving in FIG. 8 is that in case of emergency stop, both linear motors are braked. However, it is difficult to make the same method of braking both linear motors completely. If the method of braking the motors is different, the slider will rock from side to side. The reason for this is that in case of emergency stop of the motor, the dynamic brake is normally applied. However, since the dynamic brake only shorts the motor windings with a resistance, a deviation occurs in the time when the motor stops due to the variation of the resistance of each motor. Because.

By the way, when emergency stop is performed in the slide stage shown in Fig. 9, the linear motors on both sides are left in a free run state (natural stop due to frictional resistance during motor movement), and when the dynamic brake is applied only to the central linear motor, the brake is applied. Since the caught portion is the center portion, the slider 44 can stop without shaking from side to side.

In addition, it is possible to install more than three linear motors, which can generate the required large thrust force.

(Example 8)

10 to 12 are views illustrating a slide stage according to the eighth embodiment, Fig. 10 is a sectional view of the slide stage, Fig. 11 is a conceptual perspective view of the slider according to the eighth embodiment, and Fig. 12 is a view of the slider of Fig. 11. It is the figure seen from the BB cross-sectional direction.

10-12, although the slider 45 which concerns on Example 8 is a structure similar to the slider 4 of the slide stage of Example 2 (FIG. 3) in principle, the slider 4 of FIG. The slider 45 according to the eighth embodiment of the present invention has a structure in which the thick portion of the upper portion of the portion where the linear motor coil portion 8 enters is completely removed and leaves only the two leg portions for storing the air blowing portion 6. ) Features. And the connection base 10 which consists of metal plates (steel, stainless steel, etc.) is provided in the upper left and right sliders 45 and 45, and the linear motor coil part 8 is provided there.

In addition, since the connection base 10 can take advantage of the metal plate, the cooling medium hole 11 can be easily formed in the connection base 10, so that the cooling medium hole 11 is removed from the coil. Since the heat can be removed, the heat effect on the top is completely blocked.

By doing in this way, even if the electron attraction force shown in FIG. 12 acts on the metal plate 10, since the metal plate 10 is strong in bending, even if the metal plate 10 bends and deforms only a center part like a figure, it does not fracture (FIG. The center part of the stone slider 4 of 5 is slightly weak in bending, and thus is slightly thickened as described). In addition, since the influence of the electron attraction force acts only on the connecting base 10 of the upper surface, the slider 45 (stone) takes only the force in the compression direction, and since the stone is strong in compression, the stone does not deform and is accurate. Stability and reproducibility are also good.

Thus, by using the connection base 10 which consists of a metal plate, not only can a precision be improved, but also the stage height can be made lower so that the thick part of the upper part of the slider 4 of FIG. 3 disappears. That is, since the connection base 10 is a metal plate, the thickness of the stone slider 4 required in FIG. 5 becomes unnecessary, and the height of the slide stage can be made lower, and in this embodiment, the height from the surface plate is 50 mm. Became. In addition, the height from the surface plate of the slide stage of FIG. 3 was 70 mm. On the other hand, the slide stage of FIG. 52 of the prior art reached 100 mm.

In addition, by allowing water or air to flow through the cooling medium hole 11 of the connection base 10, the heat generation of the linear motor coil portion 8 can be cooled, and at the same time, the heat conduction to the other portion can be interrupted.

(Example 9)

13 is a three side view of the slide stage according to the ninth embodiment.

The structure of the slide stage which concerns on Example 9 puts the metal plate slide stage of Example 8 (FIG. 10) on the twin drive slide stage (FIG. 8) which concerns on Example 6, and can move to XY direction It constitutes a stage.

In the drawings, 1 is a surface plate, 6 is an air blower, 10 is a connection base, 12 is a Y-axis guide rail, 13 is a Y-axis slider, 14 is a Y-axis linear motor magnet part (fixed part), and 15 is a Y-axis linear. Motor coil part, 16 is Y axis linear scale, 17 is X axis guide rail, 18 is X axis slider, 19 is X axis linear motor magnet part (fixed), 20 is X axis linear motor coil part, 21 is X axis Linear scale 31 is a set screw.

In the ninth embodiment, the slide stage of the eighth embodiment is not merely stacked on the slide stage of the sixth embodiment, but the slider 43 (FIG. 8) of the slide stage of the sixth embodiment and the slide stage of the eighth embodiment. The plate 1 (FIG. 10) is shared, and a groove is dug in the upper part of the slider 43 of the slide stage of the sixth embodiment. Thus, an XY stage capable of lowering the height above the stacked height is obtained. It becomes possible.

In addition, in FIG. 13, the distortion of the guide can be reduced by attaching the position adjusting bolt 37a using the push screw to the guide rail of the X-axis or Y-axis, as shown in FIG. Can improve.

If the Y-axis slider 13 processes the opening 6k while leaving the part to be the rib 6r on the side wall as in the first embodiment, the deformation of the side wall is caused by the rib 6r even if a force to open the side wall out by the electron attraction force is applied. The effect of suppressing (deformation as in Fig. 53) can be obtained.

The X-axis slider 18 can also be realized using the first embodiment, and in that case, deformation of the sidewall is suppressed when leaving the portion to be the rib 6r on the sidewall as in the first embodiment.

(Example 10)

14 is a three side view of the slide stage according to the tenth embodiment.

The structure of the slide stage which concerns on Example 10 puts the metal plate slide stage of Example 8 (FIG. 10) on the twin drive slide stage (FIG. 8) which concerns on Example 6, and of the twin drive of Example 6 It is an invention which added a characteristic.

By doing in this way, height can be made low like Example 9, and since twin drive is performed with respect to both an X-axis and a Y-axis, the movement precision of a horizontal direction (yaw, lateral straightness) is raised by raising a movement precision on both sides. Since it can be improved, high-precision movement is possible for both the X-axis and the Y-axis.

In addition, in FIG. 14, the distortion of the guide can be reduced by attaching the position adjusting bolt 37a using the push screw to the guide rail of the X axis or the Y axis, as shown in FIG. 46 (to be described later), and the running accuracy of the X axis or the Y axis. Can improve.

(Example 11)

15 is a longitudinal sectional view of a slide stage according to the eleventh embodiment.

In the figure, 1 is a surface plate, 40 is a guide rail, 4 is a slider, 6 is an air blowing part, 8 is a linear motor coil part, 9 is a linear scale part, 9B is an attachment base, 9H is a linear scale head, and 9S is Linear scale (scale). 22 is an attachment base for attaching a glass linear scale, 23 is a space base, 24 is a top base, 25 is a limit sensor, 26 is a cable bare, and 31 is a fixing screw.

The drive portion is basically the same configuration as that of the second embodiment (Fig. 3), and the other is the arrangement position of the position detection device (linear scale). In Example 2, although the detection error occurred in the output of the position detection apparatus (linear scale) when the slider 4 rocked to the left and right in the advancing direction (yawing), the reason was that the linear scale 9 was moved to the slider ( The cause was found to be attached to one side of 4). That is, since the detection error occurred because the position detection device and the slider position did not coincide when the slider 4 was shaken from the left and right in the direction of travel (yawing), in the eleventh embodiment, the position detection device (linear scale) 9 ) Is placed in the center of the slider 4 to eliminate the error. As a specific arrangement structure, in order to secure the space for arranging the linear scale 9 in the center of the slider 4, the two space bases 23 and 23 are fixed on the slider 4 at a position separated from each other from the center part. The top base 24 is attached on this.

Moreover, the linear scale base 22 arrange | positions the linear scale in the center space which arises between the slider 4, two space bases 23, and the top base 24. As shown in FIG.

16 is a partial cross-sectional perspective view of the vicinity of the linear scale portion 9 of the eleventh embodiment.

As shown in FIG. 16, the linear scale attachment base 22 for attaching the linear scale (scale part) 9S has an elongate rod shape having lengths applied to both ends in the advancing direction, which is the moving range of the slider 4. The linear scale attachment base 22 penetrates inside the central space generated between the slider 4, the two space bases 23, and the top base 24, and is mounted on both ends in the advancing direction. It is fixed on the member 22H. And the linear scale (scale part) 9S is being fixed to the lower surface of the base 22 with a linear scale with a double-sided tape, an adhesive agent, a screw, etc. By doing in this way, even if the slider 4 moves a movement range vertically and horizontally, the linear scale (scale part) 9S will float in the non-contact state with the slider 4.

On the other hand, in order to read the scale of this linear scale 9S, the linear scale head 9H is screwed close to the lower side of the linear scale 9S directly above the head attachment base 9B. In this way, when the slider 4 moves the movement range vertically and horizontally, the linear scale head 9H can also move with the slider 4, so that the linear scale head 9H adjusts the scale of the floating linear scale 9S. You can read it. Thus, since the detection head 9H is arrange | positioned on the same axis line without offset with respect to the slider 4 which is a measurement object, even if the slider 4 raises yawing, the center part is not influenced by yawing, and the measurement precision improves ( Abe's principle). According to the eleventh embodiment, since a position detection device in consideration of the principle of ABE is produced, the positioning accuracy and the repetitive positioning accuracy due to the attitude error of the stage are the most excellent. In addition, since the distance from the linear scale head 9H to the top base 24 is close, the error in the pitching direction also becomes small, so that the measurement accuracy is also improved.

In addition, although the limit switch 25 for preventing over travel etc. was conventionally provided protruding to the horizontal side of the apparatus, in Example 11, the outer side and the top base of the resultant slider 4 and the space base 23 were carried out. Since the space between (24) can be used effectively and attached to it, it does not protrude to the exterior of an apparatus, and there exists no possibility of damage, etc.

By doing in this way, even if the slider 4 moves a movement range vertically and horizontally, the linear scale (scale part) 9S will float in the non-contact state with the slider 4.

Since the linear scale 9R is fixed to the lower surface of the base 22 with linear scale, since the base 22 with linear scale serves as a cover, the linear scale 9S is provided. Dust, dust, etc. coming down from above become difficult to attach.

(Example 12)

17 is a longitudinal sectional view of a slide stage according to the twelfth embodiment.

In the figure, 22 microseconds is an attachment base for attaching a glass linear scale, and others are the same as FIG. The slide stage according to the twelfth embodiment is different from the slide stage according to the eleventh embodiment in the shape of an attachment base 22 'for attaching a glass linear scale. Since the linear scale base 22 (FIG. 15) is elongated and attached downward, the base scale 22 (FIG. 15) was easily deformed under the influence of gravity. Since the elongate part was formed and it was made into the cross-sectional U shape, it became strong against deformation.

In addition, it is basically the same structure as the twelfth embodiment, but the surface plate 1 is made compact and compact, and can be arranged as a module.

Moreover, since 9S of linear scales (scale parts) are covered with the base (22 micrometers) with a linear scale, the dust and dust etc. which come down from the top become difficult to attach to 9S of linear scales (scale parts) further. In addition, since the scale head 9H also runs under the linear scale base 22 ', dirt, dust, and the like become difficult to adhere to the scale head 9H.

(Example 13)

18 is a three side view of the slide stage according to the thirteenth embodiment. This slide stage is similar to the tenth embodiment of FIG. 14 with respect to the stage portion, except that the planar two-dimensional linear scale 27 is disposed below. As shown in Fig. 18, by twin driving, the width can be increased, the depth can be increased, and the XY stage configuration is possible, so that the planar two-dimensional linear scale 27 can be provided in the empty space at the center. Thus, in the configuration of the XY stage of the fifth embodiment, a planar two-dimensional linear scale 27 that can be detected in the plane XY direction is disposed in the empty space (the surface of the surface plate 1) in the center, and the Y-axis slider ( 13H is provided in 13, and is attached below X-axis slider 18 in the state which inserted the planar two-dimensional linear scale head 29 in this intaglio 13H.

19 is a top view of the planar XY linear scale used in Example 13. FIG. In the figure, 27 is a planar two-dimensional linear scale, 28 is a planar two-dimensional linear scale glass carrying a planar two-dimensional linear scale 27, and 29 is a planar two-dimensional linear scale from which the planar two-dimensional linear scale 27 is read. Scale head.

Thus, when the X-axis slider 18 is moved in the X direction, the planar two-dimensional linear scale head 29 moves in the intaglio 13H to read the plane two-dimensional linear scale 27 in the X direction. In addition, when the Y-axis slider 13 is moved up and down in the drawing, the X-axis slider 18 also moves, so that the planar two-dimensional linear scale head 28 attached below the X-axis slider 18 also moves in the up-down direction. And the planar two-dimensional linear scale 27 is read in the Y direction. As a result, the planar two-dimensional linear scale head 29 can read the planar two-dimensional linear scale 27 in the XY direction.

(Example 14)

20 is a top view of the plane XY linear scale according to the fourteenth embodiment. Since the effective stroke of the commercially available planar XY linear scale is 68 mm square as shown in FIG. 19, when it is desired to detect a wider range, the planar two-dimensional linear scale 27 is obtained as in Example 14 (FIG. 20). A plurality of sheets (four in the drawing) are arranged at a predetermined interval t from each other in the up, down, left, and right directions.

On the other hand, in order to read out the plurality of planar two-dimensional linear scales 27 arranged in a plane at intervals t, two planar two-dimensional linear scale heads 29 are arranged in an inclined diagonal direction in a square, and the two are changed. Planar two-dimensional linear scale head two heads 30 are formed so that position detection is possible. This planar two-dimensional linear scale head 2 head 30 can move within the range shown by square 30R in FIG. The predetermined interval t is the X direction and the Y direction between the planar two-dimensional linear scale heads 29 and 29 in which two ends of adjacent planar two-dimensional linear scales 27 and 27 are inclined in the diagonal direction. Slightly shorter than the spacing, when the planar two-dimensional linear scale heads 29, 29 move from the planar two-dimensional linear scale 27 to the adjacent planar two-dimensional linear scale 27, the planar two-dimensional linear scale heads 29, 29 ) Must be overlapped.

In this way, when the two-dimensional planar two-dimensional linear scale head 30 moves in the square 30R, either one of the two planar two-dimensional linear scale heads 29 and 29 must be the planar two-dimensional linear scale. (28) is read out, so that the planar two-dimensional linear scale 28 is always changed to the head which reads normally. To always change to the head that normally detects among the two two-dimensional linear scale heads 29 and 29, by applying a known switching technique in two linear scale heads arranged in one-dimensional direction in the X direction and the Y direction, respectively It can be realized simply. In addition, as a well-known switching technique, it is described in Unexamined-Japanese-Patent No. 2005-308592, for example.

(Example 15)

21 is a sectional view of a slide stage according to the fifteenth embodiment.

In the figure, both the surface plate 1 and the guide rails 2 are screwed to both sides at the lower part, and there is a slider 4 therebetween. The contact guide rails 32 are attached to the upper surface of the surface plate 1 and the inner surfaces of the guide rails 2 on both sides in accordance with the fifteenth embodiment, and the contact sliders in the fifteenth embodiment are similarly applied to the slider surfaces of the opposing surfaces. 33 is provided. Since the other structure is the same as that of Example 4 (FIG. 6), description is abbreviate | omitted.

Since the sliders 4 used in Examples 2 to 13 were made of stone or ceramic, there was a fear that dust would be generated when they were in contact with the guide rails 2. Thus, in order to prevent dust from occurring, in Examples 2 to 13, they were separated from each other by about 5 µm from the upper surface of the surface plate 1 and the guide rails 2 on both sides.

However, when the slider 4 was lifted from the upper surface, fine vibration occurred in the vertical direction and the moving direction.

In the conventional apparatus of Figs. 48 to 50, the air bearings are usually floated in balance with the air pressure in the upward direction and the air pressure in the downward direction, and in the conventional apparatus of Fig. 52 and the slide stage of the present invention, Although it floats in balance by electromagnetic attraction force and air pressure, in fact, the up-and-down vibration of about 0.1 micrometer-0.3 micrometer has generate | occur | produced by the pulsation of air pressure. Therefore, the stage main body also vibrates unstable in the vertical direction.

By the way, in Example 15, the floating amount zero (the surface is uneven when viewed in micro, the contact between the convex portion and the convex portion, and the state floating in the air elsewhere) can be realized, and by delicately contacting The vibration is gone.

Moreover, also in the movement direction, there exists an effect which suppresses the conventional 20-30 nm vibration.

The contact guide rail 32 is made of low friction coefficient and hard material such as carbon fiber, and the contact slider 33 is made of low friction coefficient and hard material such as thin quartz or agate, and is "subtlely contacted". The surface of the column carbon fibers is in the shape of fluff, and it is assumed that the contact slider 33 moves along the contact guide rail 32 in a state that agate is likely to touch the air layer contained between the fluff.

As described above, according to the present invention, all four problems of the known slide stage can be solved in a simple configuration.

(1) There was a risk that the slider was easily deformed, impaired the reproducibility of precision, or the stage itself was destroyed.

(2) The guide rail, which had a U-shaped cross section in the width direction, required time and cost in order to increase processing accuracy (finished to an error of about 5 µm).

(3) During rapid acceleration and deceleration, an accident such as an interference or contact with the guide rail occurred. Therefore, in order not to cause interference and contact accidents, it has become a slide stage which cannot perform rapid acceleration / deceleration control.

(4) The positioning accuracy and repeatability of the signal detected by the position detection device (linear scale) were poor.

(Example 16)

FIG. 22 is a longitudinal sectional view of a slide stage according to Embodiment 16 of the present invention, FIG. 23 is a longitudinal sectional view of a modification of the slide stage according to Embodiment 16 of the present invention, and FIG. 24 is a three sectional view of the slide stage shown in FIG. (a) is a top view, (b) is a side view, (c) is a front view.

22 and 24, 35 is a can manufacturing stand, 36 is a level adjustment bolt, 37 is a position adjustment bolt, 34 is a surface rail, 4 is a slider, 6s is a lateral air blower, 6u is a bottom air blower, 7 9 is a linear motor magnet part (fixed part), 8 is a linear motor coil part (movable part), 9 is a linear scale part, 24 is a top base, and 26 is a cable bare. As the member of the surface rail 34, a black granite, ceramic material, carbon fiber, etc. which have little dimensional change and which do not generate warping at the time of contact are common, and the structure of a drive part and a guide is the same as that of Example 1. As shown in FIG.

In addition, when the opening portion 6k is processed with the slider 4 leaving the portion of the rib 6r on the sidewall as in the first embodiment, the sidewall is deformed by the rib 6r even if a force to open the sidewall out by the electron attraction force is applied. The effect of suppressing (deformation as in Fig. 53) can be obtained.

The linear scale part 9 is attached to the cutout part of the outer side of the guide part above the surface rail, and the head part of the linear scale is joined by the side surface of the slider 4 and the head attachment lug 9k (FIG. 22). Therefore, there is an effect that the linear scale can be stored within the width of the surface rail 34.

In addition, a tape type linear scale 9aS (FIG. 23) can be attached to the space between the upper surface of the guide portion of the surface rail 34 and the lower surface of the top base 24. The tape scale 9aS (FIG. 23) of the linear scale part is attached to the upper surface of the guide part of the surface rail 34, and the head 9aH of the linear scale is attached to the lower surface of the top base with the head attachment lug 9k ( Figure 23).

Since the height to the top surface of the head 9aH of the linear scale part and the slider 4 becomes shorter than the case of the linear scale 9, there exists an effect which the measurement precision of a pitching direction improves (the principle of Abe) (FIG. 22).

The surface rail 34 of Example 16 (FIGS. 22, 24) is the structure which integrated the surface plate 1 and the guide rail 2 in Example 1 in combination, and has a level in the lower surface of the surface rail 34. The position adjustment bolt 37 is arrange | positioned at the adjustment bolt 36 and the side surface, Comparing Example 16 with the well-known example (FIG. 52), the U-shaped guide of the well-known example (FIG. 52) was carried out. In the case of the rail structure only, the guide rail uses the processing accuracy as it is when it is installed in an equipment, etc., so that the guide rail can only be made up to a length of about 1 m. It could be used only to install on the surface (when fixed to the bad surface, the main body twisted and could not be used. Therefore, it was limited to the use of the semiconductor manufacturing apparatus which is a small stroke compared with a liquid crystal use).

In contrast, the present invention in which the level adjusting bolts 36 and the position regulating bolts 37 are disposed on the lower surface of the surface rail 34 in which the surface plate and the guide rail of the sixteenth embodiment are integrated is the surface plate and the guide rail. Since it is integrated, the deformation of the guide is small compared with the known example (FIG. 52). Also, by adjusting the level adjustment bolts 36 provided on the lower surface with respect to the warp in the longitudinal direction due to the weight and load load, the can manufacturing stand 35 having no precision, which is not a stone plate or the like having a planar view below. Also in the case of the above, it is possible to provide a slide stage, the straightness of the running can also be adjusted to about 3 ~ 10㎛, and similarly in the lateral direction by adjusting the surface rail 34 with the positioning bolt 37, The straightness of running can also be adjusted to about 3-10 micrometers.

This is an effect by integrating a surface plate and a guide rail. Since it is integrated, the guide part can also be changed by fine-tuning the surface plate with bolts.

In addition, the cooling plate 81 can be attached to the slider on the upper surface portion (the direction opposite to the magnetic surface) of the linear motor coil portion (FIG. 23). It is also possible to easily realize a hole in the cooling plate 81 and water or air cooling.

By the above, even if the lower part used as a reference | standard has poor precision, such as a can manufacturing stand, it becomes possible to perform highly accurate conveyance positioning with the long object of 10 m or more.

In addition, Example 16 (FIG. 22) is provided between the linear motor magnet part 7 and the linear motor coil part 8 which are well-known examples (FIG. 52) of a drive power generation position, and the running guide surface of the slider 4. In FIG. While the offset distance is generated, the travel guide surface of the slider 4 coincides between the linear motor magnet portion 7 and the linear motor coil portion 8, which are driving power generating positions, and the offset distance is almost zero. Since the moment force in the pitching direction does not occur, the pitching error at the time of acceleration and deceleration is reduced, acceleration and deceleration can be performed faster, and high precision and high speed conveyance are possible.

In addition, since Example 16 can also be applied to the following applications, it can be sufficiently used for manufacturing and inspection apparatuses for FPD (flat panel display) or solar cell panel in which the enlargement is progressing, and standardization of the slide stage can be achieved. The cost can be reduced.

(1) As shown in Fig. 25, the slide stages of the sixteenth embodiment are arranged in parallel on the surface plate 1, and the workpiece adsorption base 38 is provided on the upper side, thereby conveying the large-scale FPD work or the solar cell panel. Can be done.

(2) As shown in Fig. 26, the slide stages of the sixteenth embodiment are arranged in parallel on the can manufacturing stand 35, the level is adjusted, and the work suction base 38 is provided on the upper side. A large FPD work or a solar cell panel can be conveyed. Such a configuration cannot be realized in the known example (Fig. 52).

In the well-known example, when the long stroke is used, the U-shaped guide is fixed to the can manufacturing stand in a distorted state, so that the work suction base is coupled and driven by a plurality of sliders with poor running accuracy of the slider. The running error of each slider interacts with each linear motor through the work suction base, resulting in abnormal motor operation.

In the present invention, since the distortion of the platen rail can be corrected with the position adjusting bolt and the level adjusting bolt, and the running accuracy of the slider can be improved, the running error between the sliders can be reduced, and each linear motor can operate normally.

(3) As shown in Fig. 27, the slide stages of the sixteenth embodiment are arranged in parallel at both ends on the surface plate 1, and the slide stages of the sixteenth embodiment are placed horizontally or downward on the upper side (Fig. 44). By providing it, the stage of a gantry structure corresponding to a large FPD work can be comprised.

In the present invention, since the electromagnetic attraction force of the motor balanced with the air flotation force is sufficiently larger (for example, about 10 times) than the load of the slider, there is no defect such as dropping of the slider even when the slide stage is attached downward.

(4) As shown in Fig. 28, the slide stages of the sixteenth embodiment are arranged in parallel at both ends on the can manufacturing stand 35, the level is adjusted, and the slide stages of the sixteenth embodiment are transversely arranged at the top. Alternatively, by installing downward (FIG. 44), the stage of a gantry structure corresponding to a large sized FPD workpiece | work or a solar cell panel can be comprised. Such a configuration cannot be realized in the known example (Fig. 52).

(5) As shown in Fig. 29, in Fig. 28, a plurality of sliders 4 on which a large FPD work or a gantry-structured stage corresponding to a solar cell panel are installed are provided with the slide stage of the sixteenth embodiment in the horizontal direction. In addition, it is possible to perform a plurality of things at the same time.

(6) As shown in Fig. 30, a plurality of linear motor noses on the same guide rail 2 in the traveling direction when a shortage occurs in the relationship between the upper load and the generated thrust, or when the average load is to be applied to the upper conveyed object. It has a part (operator) 8, the slider 4, and the top base 24, and by performing synchronous operation, when the deficiency arises in the relationship of a load and a thrust generate | occur | produces, or puts an average load on the conveyance of the upper part Correspondence can be performed when desired. Such a configuration cannot be realized in the known example (Fig. 52).

In addition, although the linear motor coil part (operator) 8 and the top base 24 in FIG. 24, FIG. 27, FIG. 28, FIG. 29, and FIG. 30 are actually hiding in drawing, the characteristic of this invention is not shown. It is shown in the relation shown.

(Example 17)

31 is a longitudinal sectional view of the slide stage according to the seventeenth embodiment of the present invention. 32 is a three side view of the slide stage according to the seventeenth embodiment of the present invention.

31 and 32, 35 is a can manufacturing stand, 40 is a bolt fixed level adjustment bolt, 39 is a surface rail, 4 is a slider, 6s is a lateral air jet, 6u is a bottom air jet, and 7 is a linear motor magnet. A part (fixed part), 8 is a linear motor coil part (moving part), 9 is a linear scale part, 26 is a cable bare. As the material of the surface rail 39, black granite, ceramic material, carbon fiber, etc., which have little dimensional change and do not cause warping at the time of contact, are generally the same as those of the first embodiment.

The surface rail 39 of Example 17 (FIG. 31, FIG. 32) is a structure which integrated and combined the guide rail shown in Example 1 (FIG. 1) in the both sides of the upper surface of a surface plate, respectively, and the upper surfaces of the surface rail. This guide surface becomes. The platen rail 39 is shaped like a Roman "I" (eye) when viewed from a cross section perpendicular to the traveling direction, and increases the thickness in both the width direction and the vertical direction on both sides, so that the length of about 10m is long. Even if it is water, the parallelism between the guide surfaces of both sides can be lapping with the accuracy of about 5 micrometers.

In addition, as in the first embodiment (FIG. 1), the linear motor magnet portion 7 is attached to the upper surface center portion of the surface rail 39 (FIG. 33). Alternatively, as in the second embodiment (Figs. 2 and 3), there is a groove in which the linear motor magnet portion 7 is provided in the center of the upper surface of the surface rail 39, and the linear motor magnet portion 7 is attached (Fig. 34).

The slider 4 has an inverted U shape when viewed in a cross section perpendicular to the traveling direction, as in the first embodiment (FIG. 1) or the second embodiment (FIGS. 2 and 3), and the inverted U shape opening. The linear motor coil part 8 is provided in the inside (FIGS. 33 and 34).

In addition, when the opening portion 6k is processed with the slider 4 leaving the portion of the rib 6r on the sidewall as in the first embodiment, the sidewall is deformed by the rib 6r even if a force to open the sidewall out by the electron attraction force is applied. The effect of suppressing (deformation as in Fig. 53) can be obtained.

The width of the slider 4 is made wider than the width of the guide portion of the platen rail 39, and the horizontal sliders 4a are fastened to the lower portions of both sides by bolts, respectively, and placed in close contact with the platen rail 39. While the slider 4 of FIG. 31 is integrated with the horizontal slider, the horizontal slider 4a is formed separately and attached in FIGS. 33 and 34.

The slider 4 ejects air from the lower surface air ejection part 6u (FIGS. 31, 32, 34), and balances the electromagnetic suction of the linear motor magnet part 7 and the linear motor coil part 8. It travels and runs while blowing air from the lateral air blowing part 6s (FIG. 31, 32, 34) of the horizontal slider 4a in the form which encloses the upper both sides of the surface rail 39. FIG. .

Moreover, the force blown in the direction which compresses the upper both side surfaces of the surface rail 39 from both sides inward by the air blown out from the lateral air jet part 6s of the horizontal slider 4a. As is clear from the drawings (Figs. 31, 33, 34), the surface rail has a sufficient thickness, and granite and the like have little deformation with respect to the compressive force, so that the guide surfaces on both upper sides are hardly deformed.

This was made possible by configuring the guides for restraining the lateral movement of the slider on the upper side surfaces of the surface plate as described above. In the prior art of FIG. 52, although the lateral air is blown inward like the present invention, since the U-shaped guide rail deforms inward (problem 5), the idea is fundamentally different from the present invention.

Since the surface rail 39 has an I-shaped shape, the main body has a low rigidity and high rigidity structure, and the bolt fixed level adjustment bolt 40 is disposed below the surface rail 39. When comparing Example 17 with the known example (FIG. 52), when only the structure of the U-shaped guide rail part of the well-known example (FIG. 52) is installed in an apparatus etc., the guide rail will use machining precision as it is. In addition, it was only possible to make it to a length of about 1m, and the installation place could only be used to install on a stone surface with a top planar view of 10 µm or less (when fixing to a bad surface, the main body could not be used by twisting it). Therefore, it was limited to the use of the semiconductor manufacturing apparatus which is a small stroke compared with a liquid crystal use).

On the other hand, in the present invention, as shown in Fig. 43, which is a detailed view, the platen rail having the structure of "I" (eye) shape when viewed from a cross section perpendicular to the traveling direction with the platen of the seventeenth embodiment and the guide rail as an integral type ( 39), the rigidity of the main body is also strong, and since the bolt-fixed level adjusting bolt 40, the level adjusting bolt 36, and the position adjusting bolt 37a using the push screw are disposed on the lower side, It is highly rigid against distortion in the longitudinal direction due to load. Further, the male threaded bolt fixed level adjustment bolt 40 installed at the lower portion is pushed and adjusted by the female threaded bush 43 (FIG. 42) adhesively fixed to the surface rail 39, and the fixed bolt 42 is set at a height. (FIG. 42), the slide stage can be installed even in the case of the can manufacturing stand 35 which does not have the precision, but not the stone slab etc. which the bottom side came out, etc. It can adjust to about -10 micrometers.

Similarly, the horizontal direction precision can also be adjusted with the position control bolt 37a of the lower part of the surface rail 39, and the precision of a run can be adjusted to about 3 micrometers-about 10 micrometers (FIG. 43).

In addition, as described with reference to FIG. 23, the cooling plate can be inserted into the upper surface portion (opposite to the magnetic surface) of the linear motor coil portion from FIGS. 31 to 34 and attached to the slider. A hole in the cooling plate and water or air cooling can also be easily realized.

By the above, even if the lower part used as a reference | standard has a bad precision, such as a can manufacturing stand, it becomes possible to perform highly accurate conveyance positioning with the long object 10m or more.

In addition, when the load load on the slider 4 is large and cannot be fully supported only by the bolt-fixed level adjusting bolt 40 (FIG. 31), the level adjusting bolt 36 (FIG. 33) is placed on the can manufacturing stand 35. 34), the load applied to the bolt-fixed level adjustment bolt 40 can be shared by pushing up the lower part of the surface rail, and the load load can be increased.

In addition, Example 17 (FIG. 31) shows the known example (FIG. 52) between the linear motor magnet part 7 and the linear motor coil part 8 which are driving power generation positions, and the running guide surface of the slider 4. In FIG. While the offset distance is generated, the travel guide surface of the slider 4 coincides between the linear motor magnet portion 7 and the linear motor coil portion 8, which are driving power generating positions, and the offset distance is almost zero. 31, 33, and 34, the moment force in the pitching direction is not generated, the pitching error at the time of acceleration / deceleration is reduced, and acceleration / deceleration can be performed faster, and high precision and high speed conveyance are possible.

A notch space is made in the site | part of the horizontal slider 4a upper side of the horizontal slider 4a (FIG. 33, FIG. 34) and facing the guide surface of the surface rail 39 (FIG. 35), and the tape-type linear scale 9a. ) Can be attached. Here, as shown in FIG. 35 which is a side view, the tape scale 9aS of a linear scale part is affixed on the upper surface of the guide surface of the surface rail 39, and it is linear with a head attachment lug in the notch part of the side surface part of the slider 4a. The head 9aH of the scale is attached.

Since the heights up to the upper surface of the head 9aH and the slider 4a of the linear scale portion become shorter than those of the linear scale 9, there is an effect of improving the measurement accuracy in the pitching direction (the principle of Abe) (Fig. 33, 34).

Moreover, since Example 17 can also be applied, it can fully utilize for the manufacture and inspection apparatus for FPD or solar cell panels which are advanced in size, and can standardize a slide stage. Cost down is also planned.

(1) As shown in FIG. 36, the large-sized FPD workpiece can be conveyed by arranging a plurality of slide stages of the seventeenth embodiment on the surface plate 1 in parallel and providing the workpiece adsorption base 38 thereon. .

(2) As shown in FIG. 37, a plurality of slide stages of the seventeenth embodiment are arranged in parallel on the can manufacturing stand 35, and level adjustment is performed to provide a workpiece adsorption base 38 on the upper side. FPD work and a solar cell panel can be conveyed. Such a configuration cannot be realized in the known example (Fig. 52).

In the present invention, since the distortion of the platen rail can be corrected with the position adjusting bolt or the bolt fixed level adjustment bolt, and the running accuracy of the slider can be improved, the error of running between the sliders can be reduced, and each linear motor can be operated normally. Can be.

(3) As shown in Fig. 38, the slide stages of the seventeenth embodiment are arranged in parallel on both ends on the surface plate 1, and the slide stages of the sixteenth embodiment are installed on the upper side in the horizontal direction or in the downward direction (Fig. 44). By this, the stage of a gantry structure corresponding to a large FPD work can be comprised.

(4) As shown in Fig. 39, the slide stages of the seventeenth embodiment are arranged in parallel at both ends on the can manufacturing stand 35, the level is adjusted, and the slide stages of the sixteenth embodiment are placed in the horizontal direction or on the top. By installing it downward (FIG. 44), the stage of a gantry structure corresponding to a large FPD work can be comprised. Such a configuration cannot be realized in the known example (Fig. 52).

(5) As shown in FIG. 40, in the upper part of FIG. 39 of said (4), the stage of the gantry structure corresponding to the large FPD work which installed the slide stage of this Embodiment 26 in the horizontal direction or downward (FIG. 44) is A plurality of movable sliders 4 (the top base 24 is shown in FIG. 40) can be provided so that a large number of things can be performed simultaneously.

(6) As shown in Fig. 41, the surface rail 39 of the slide stage of the seventeenth embodiment is placed in the transverse direction, the center thereof is supported by the support 41, and the sliders 4 are installed on both sides in the horizontal direction. Both sliders 4 can operate independently, and even if only one platen rail 39 is used, both surfaces can be used. In addition, in the case of a plurality of sliders as described above (5), the slider 4 of twice the number can be arranged.

(7) Similarly to (6) of the sixteenth embodiment, as shown in FIG. 30, when the shortage occurs in the relationship between the upper load and the generated thrust, or when the average load is to be applied to the upper conveyed material, the same guide is in the traveling direction. When the linear motor coil part (operator) 8, the slider 4, and the top base 24 are provided on the rail 2, and a synchronous operation is performed, the shortage arises in the relationship of a load and a generated thrust. In addition, the response can be performed when an average load is to be applied to the upper conveyed material. Such a configuration cannot be realized in the known example (Fig. 52).

In addition, although the linear motor coil part (operator) 8 in FIG.32, FIG.38, FIG.39, FIG.40 is what is actually hiding in drawing, it shows in view of showing the characteristic of this invention.

<Up and down direction adjustment mechanism of the surface rail>

Fig. 42 is an enlarged detailed view of the portion A of Fig. 31 of the slide stage according to the seventeenth embodiment of the present invention, which enables the platen rail to be adjusted in the up and down direction, (a) while raising the stage, (b) The state raised to the maximum and (c) has shown the fixed state.

In the drawing, 35 is a can manufacturing stand, 39 is a plate rail, 40 is a bolt fixed level adjustment bolt, 42 is a fixing bolt, 43 is a female thread bush adhesively fixed to the plate rail 39, and 44 is a screw hole. The female thread bush 43 is adhesively fixed to the flange portion of the lower end of the surface rail 39. Moreover, the screw hole 44 is formed in the site | part on the can manufacturing stand 35 in which the female thread bush 43 in the case of placing the surface rail 39 on the can manufacturing stand 35 is formed. The plate rail 39 is placed on the can manufacturing stand 35 in a state where the bolt fixed level adjustment bolt 40 is screwed to the female threaded bush 43, and the fixing bolt 42 is fixed to the bolt fixed level adjustment bolt. (40) After aligning with the screw hole 44 of the can manufacturing stand 35, the fixing bolt 42 is mounted on the screw hole 44 to be installed.

<Up and down direction adjustment operation of surface rail>

Next, the operation of adjusting the height in the vertical direction of the surface rail 39 in such a state will be described with reference to FIG. 42. The female thread bush 43 is adhesively fixed to the flange portion of the lower end of the surface rail 39.

First, in the state (a) in which the height adjustment of the surface rail 39 is not yet made, the height of the surface plate rail 39 is rotated forward or reverse by a spanner or the like. To the desired height. (B) has shown the case where the surface rail 39 was adjusted highest. When it is adjusted to a predetermined height, the fixing bolt 42 is embedded in the bolt fixed level adjusting bolt 40 and the screw hole 44, and the fixing bolt 42 is bolted level adjusting bolt 40. Is tightened to secure the bolted level adjustment bolt 40.

This completes the height adjustment operation of the surface rail 39.

<Lateral adjustment mechanism and load sharing mechanism of surface rail>

In addition to the up-down direction adjustment mechanisms 40 and 42 demonstrated in FIG. 42, FIG. 43 is equipped with the horizontal direction adjustment mechanism which can adjust the surface rail also in the horizontal (left-right direction) figure. Specifically, the horizontal adjustment mechanism corrects the distortion of the guide by attaching the position regulating bolt 37a to the guide rail using a push screw and pressing the guide rail with the position regulating bolt 37a (see FIG. 46). .

In addition, the level adjustment bolt 36 used in FIG. 22 is used for the can manufacturing stand 35 without loading the load of the surface rail only with the bolt fixed level adjustment bolt 40, and also the level adjustment bolt 36. The load of the rail is shared (FIGS. 33, 34, 43).

Fig. 45 is a side view showing for the purpose of directly forcing the straightness in the longitudinal direction according to the present invention. The bent state (Fig. A) of the surface rail 39 is fixed to the bolt-type level adjustment bolts 40 (40c). 40s), in the drawing, the center bolt fixed level adjustment bolt 40c is adjusted to raise the surface rail 39, and the bolt fixed level adjustment bolt 40s at both ends is adjusted to lower the surface rail 39. Finally, the straightness in the longitudinal direction can be forced straight (FIG. 2B).

46 is a top view illustrating the straightness of the transverse direction according to the present invention for explanatory purposes. The curved state of the surface rail 39 (FIG. A) is shown by the position regulating bolt 37a. By adjusting as shown in the figure, the surface rail 39 can be displaced to finally force straightness in the transverse direction (Fig. B).

1: plate 1a: long groove
2: guide rail 3: air pad
4: slider 4s: slider sidewall
5: Coreless Linear Motor 6: Air Pipe
6k: Opening 6r: Rib
6s: cross-section air blowing section 6u: bottom air blowing section
7: Linear motor magnet part (fixed part)
7a: Magnet 8: Linear motor coil part (movable part)
9: Linear scale part 9B: Mounting base
9H: Linear scale head 9S: Linear scale (scale)
10: Connection base 11: Hole for cooling medium (water or air cooling)
12: Y-axis guide rail 13: Y-axis slider
14: Y-axis linear motor magnet part (fixed part)
15: Y axis linear motor coil part (moving part)
16: Y axis linear scale 17: X axis guide rail
18: X-axis slider 19: X-axis linear motor magnet part (fixed part)
20: X axis linear motor coil part (moving part)
21: X-axis linear scale 22: Base with glass linear scale
22H: Mounting base attachment member
23: space base 24: top base
25: limit sensor 26: cable bare
27: Planar two-dimensional linear scale
28: Planar two-dimensional linear scale glass
29: Planar two-dimensional linear scale head
30: Planar two-dimensional linear scale head two heads
31: set screw 32: contact guide rail
33: slide slide 34: surface rail
35: Can manufacturing stand 36: Level adjustment bolt
37, 37a: Position regulating bolt 38: Work suction base
39: plate rail 40: bolt fixed level adjustment bolt
41: Holding 42: Fixing bolt
43: Female thread bush (adhered to 39)
44: screw hole 81: cooling plate

Claims (25)

A platen, a linear motor magnet portion placed on the platen, two guide rails fixed in parallel to each other with the linear motor magnet portion on the platen, upper portions of the linear motor magnet portion and the two guide rails A slide having a U-shaped slider placed in a space therebetween and perpendicular to the direction of travel, and a linear motor coil portion disposed opposite to each other via a space between the linear motor magnet portion in a U-shaped opening of the slider. As a stage,
Air which blows air directly from the side wall which comprises the said U-shape of the said slider toward the surface plate of a lower surface, and blows air toward a horizontal surface, is provided in the said side wall, The air which blows toward a lower surface from the said air blowing part is provided. And the floating force by the balance between the magnetic attraction force and the gravity between the linear motor magnet portion and the linear motor coil, and float, and is driven by the driving force between the motor magnet portion and the linear motor coil. . The method according to claim 1,
A plate with a long groove, a linear motor magnet portion installed in the long groove, two guide rails fixed in parallel with each other with the long groove therebetween on the surface plate, the upper side of the long groove and the two A slider having a U-shape in a cross section perpendicular to the traveling direction and placed in the space between the guide rails, and a linear motor coil portion disposed opposite to the linear motor magnet via a gap in the U-shaped opening of the slider. As a slide stage,
Air which blows air directly from the side wall which comprises the said U-shape of the said slider toward the surface plate of a lower surface, and blows air toward a horizontal surface, is provided in the said side wall, The air which blows toward a lower surface from the said air blowing part is provided. And the floating force by the balance between the magnetic attraction force and the gravity between the linear motor magnet portion and the linear motor coil, and float, and is driven by the driving force between the motor magnet portion and the linear motor coil. . The method according to claim 1,
A plate with a long groove, a linear motor magnet portion installed in the long groove, two guide rails fixed in parallel with each other with the long groove therebetween on the surface plate, the upper side of the long groove and the two A slider having a U-shape in a cross section perpendicular to the traveling direction and placed in the space between the guide rails, and a linear motor coil portion disposed opposite to the linear motor magnet via a gap in the U-shaped opening of the slider. As a slide stage,
Air which blows air directly from the side wall which comprises the said U-shape of the said slider toward the surface plate of a lower surface, and blows air toward a horizontal surface, is provided in the said side wall, The air which blows toward a lower surface from the said air blowing part is provided. And the floating surface balanced by the electromagnetic attraction force and gravity between the linear motor magnet portion and the linear motor coil, and the driving surface caused by the driving force between the motor magnet portion and the linear motor coil. A slide stage characterized by the above-mentioned. The method according to claim 1,
And a side wall constituting the U-shape at a leading end side and a rear end side of the slider in the advancing direction. The method according to claim 1,
The slide stage provided with the said air blowing part in multiple places in the advancing direction of the said slider of the side wall which comprises the said U-shape. It is characterized by the above-mentioned. The method according to claim 1,
A slide stage characterized by rounding the outer and inner sides of the corner portion of the slider. The method according to claim 1,
The slide stage provided with the said air blowing part in multiple places in the direction orthogonal to the advancing direction of the said slider of the side wall which comprises the said U-shape. It is characterized by the above-mentioned. The method according to claim 2,
A plurality of linear grooves are dug in parallel to each other on the surface plate, and the linear motor magnet portions are respectively provided in the respective long grooves, and the linear motor coil portions disposed at opposite intervals to the linear motor magnet portions, respectively, A slide stage, which is held in the U-shaped opening and provided with an air blowing portion of the lower surface between each linear motor coil portion of the slider. The method according to claim 8,
And a plurality of rows of the long grooves are two rows or three rows. The method according to claim 1,
And a slider made of a metal plate attached to the linear motor coil portion and a side wall portion constituting the U-shape of the slider below the slider instead of the slider. The method according to claim 10,
And a hole for cooling medium in the metal plate. The slider of the said 1st slide stage is made into the surface plate of the said 2nd slide stage using the 1st slide stage of Claim 8, and the 2nd slide stage of Claim 10, and the movement of the slider of a said 1st slide stage is carried out. And the second slide stage is mounted on the first slide stage such that a direction and a moving direction of the slider of the second slide stage are orthogonal to each other. The method of claim 12,
An XY direction movable slide stage, wherein the second slide stage is twin driven. The method according to claim 1,
The top base provided on the slider is fixed apart from the slider, and a linear scale head is provided in the space between the top base and the slider and directly in the portion of the linear motor coil on the slider, And a linear scale graduated portion is fixed from the linear scale head and the other moving member in a space between the top base and the slider. The method according to claim 14,
A limit switch is attached in a space between the top base and the slider. The method according to claim 14,
And an attaching base for attaching the scale portion of the linear scale to a U shape in a cross section in the width direction. The method according to claim 13,
Digging an elongated hole extending in the moving direction of the slider of the second slide stage in the surface plate of the second slide stage, and storing the planar two-dimensional linear scale head in the elongated hole to close the end of the planar two-dimensional linear scale head. A XY direction movable slide stage, which is fixed to a slider and a planar two-dimensional linear scale is arranged on the surface of the first slide stage. 18. The method of claim 17,
The planar two-dimensional linear scale head is disposed at two square diagonal positions, and a plurality of the planar two-dimensional linear scales are arranged in a planar shape on the surface of the first slide stage. stage. The method according to claim 1,
A material of low friction coefficient is attached between the slider and the guide rails in the two rows and between the slider and the surface plate, respectively, of a low friction coefficient and hard material on the slider side, the guide rail side, and the surface plate side. Slides were made to be in contact with each other. The method of claim 19,
The material of the low friction coefficient material is any one of carbon fiber, ceramic, quartz, agate. The method according to claim 1,
A slide stage, wherein the surface plate and the two guide rails are integrally formed, and a level adjustment bolt is disposed on a lower surface of the surface plate, and a position adjustment bolt is disposed on a side surface of the surface plate, respectively. A plurality of slide stages in which a surface plate and two guide rails are integrally formed, and a level adjustment bolt on the lower surface of the surface plate and a position adjusting bolt on the side surface of the surface plate, are arranged in parallel on a can manufacturing stand, A work suction base is provided on the top of the slide stage, and the level adjustment bolt enables level adjustment. The XY-direction movable slide stage of the gantry type of which the slide stage of Claim 21 was arrange | positioned in parallel with each other on both ends on a can manufacturing stand, and the said slide stage was installed in the horizontal direction on the upper part. The method according to claim 1,
When the guide rail is viewed from a cross section perpendicular to the traveling direction, there is a groove having a Roman letter “I” shape, and the linear motor magnet part is provided at the center of the upper surface of the guide rail, and both upper surfaces of the groove are the sliders. The air is ejected from the lower surface air ejecting portion, and the slider moves from the lateral air ejecting portion so as to run in a balance between the electromagnetic suction of the linear motor magnet portion and the linear motor coil portion, and surround both side surfaces of the upper side of the guide rail. A slide stage, which runs while blowing air. The method of claim 24,
The female thread bush is fixed to the flange portion of the lower end of the guide rail,
And said level adjusting bolt comprises a bolt fixed level adjusting bolt screwed to said female threaded bush and a fixed bolt passed through a through hole penetrating through a central axis formed in said bolt fixed level adjusting bolt.

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