CN115711601A

CN115711601A - Contact type surface topography measuring instrument and mounting method thereof

Info

Publication number: CN115711601A
Application number: CN202211314173.1A
Authority: CN
Inventors: 吴森; 肖莎莎; 刘佶睿
Original assignee: Suzhou Zhirui Technology Co ltd
Current assignee: Suzhou Zhirui Technology Co ltd
Priority date: 2022-10-24
Filing date: 2022-10-25
Publication date: 2023-02-24

Abstract

The application relates to the field of high-precision surface morphology measuring instruments, in particular to a contact type surface morphology measuring instrument and an installation method thereof. In some embodiments of the application, the measuring head connecting piece connected with the fixing piece is arranged on a gravity line of the fixing piece, so that the relative Z-direction vibration between the measuring head and the fixing piece is reduced, the relative Z-direction vibration between the probe tip and the surface of the sample is further reduced or eliminated, and the accuracy of the Z-direction height of the surface of the sample measured by the contact type surface topography measuring instrument is improved. In some embodiments of the present application, when the probe connector is located on the gravity center line of the fixing member, the gravity center of the probe connector and the fixing member as a whole is lowered and is closer to the gravity center of the contact surface topography measuring instrument, so that the Z-direction relative vibration between the probe and the contact surface topography measuring instrument is reduced or eliminated, and the accuracy of the measured Z-direction height is improved.

Description

Contact type surface topography measuring instrument and mounting method thereof

Technical Field

The application relates to the field of high-precision surface morphology measuring instruments, in particular to a contact type surface morphology measuring instrument and an installation method thereof.

Background

The contact surface topography measuring instrument such as an atomic force microscope, a step profiler, a three-coordinate measuring machine and the like generally comprises three groups of rough positioning mechanisms in the X direction, the Y direction and the Z direction, after rough positioning is finished, a probe scans and moves along the surface of a sample, and the motion track of a needle tip relative to the sample reflects the outline of the surface of the sample.

The contact surface topography measuring instrument is very sensitive to mechanical vibration, and the installation mode of the instrument, particularly the fixing mode of the measuring head, has direct influence on the mechanical stability. Fig. 1 is a schematic top view of a fixing member and a probe connecting member in a contact surface topography measuring instrument according to a design. As shown in fig. 1, the displacement member is attached to the front side surface of the gantry frame in the middle of the cross beam, and the probe is hung on the front side surface of the displacement member, that is, the probe is suspended forward from the cross beam of the gantry frame. When the gantry frame vibrates in a pitching mode or in an up-and-down mode due to environmental factors, the measuring head can vibrate along the Z direction. And because the measuring head extends forwards to form a cantilever structure, the probe at the bottom of the measuring head can amplify the vibration, so that larger Z-direction relative motion is generated between the probe tip and the sample, and further the noise of Z-direction height measurement is increased.

Disclosure of Invention

In view of this, the present application provides a Z-direction coarse positioning assembly and a contact surface topography measuring instrument, so as to solve one or more technical problems in the prior art, and the present application is implemented as follows:

in a first aspect, an embodiment of the present application provides a Z-direction coarse positioning assembly of a contact surface topography measuring instrument, where the Z-direction coarse positioning assembly includes:

the bottom end of the fixing piece is used for being connected with a base of the contact type surface topography measuring instrument;

the displacement piece is connected with the fixing piece to be fixed by the fixing piece, and the displacement piece is connected with the Z-direction actuating piece to be driven by the Z-direction actuating piece to move in the Z direction;

the measuring head connecting piece is connected with the displacement piece and is used for connecting the measuring head;

when the displacement piece is driven by the Z-direction actuating piece, the displacement piece drives the measuring head connecting piece to move in the Z direction; the measuring head connecting piece is positioned on the gravity center line of the fixing piece so as to reduce or eliminate the relative Z-direction vibration between the probe tip of the measuring head and the surface of the measured sample.

In some embodiments, a center of gravity line of the probe connector coincides with the center of gravity line of the fixing member to reduce or eliminate relative Z-direction vibration between a probe tip of the probe and a surface of a sample to be measured.

In some embodiments, the fixture includes:

the first fixing piece and the second fixing piece are separated from each other;

the first fixing piece and the second fixing piece are symmetrically arranged in the Y direction, and the measuring head connecting piece is arranged between the first fixing piece and the second fixing piece.

In some embodiments, the displacement member comprises:

the first displacement piece and the second displacement piece are separated from each other;

the first displacement piece and the second displacement piece are symmetrically arranged in the Y direction, the first displacement piece is connected with the first fixing piece to be fixed by the first fixing piece, and the second displacement piece is connected with the second fixing piece to be fixed by the second fixing piece.

In some embodiments, the first displacement member is connected to the Z-direction actuator, and when the first displacement member is driven by the Z-direction actuator, the first displacement member drives the probe connecting member to move in the Z direction; or

The second displacement piece is connected with the Z-direction actuator, and when the second displacement piece is driven by the Z-direction actuator, the second displacement piece drives the measuring head connecting piece to move in the Z direction; or

The first displacement piece and the second displacement piece are both connected with the Z-direction actuating piece, and when the first displacement piece and the second displacement piece are driven by the Z-direction actuating piece, the first displacement piece and the second displacement piece drive the measuring head connecting piece to move in the Z direction.

In some embodiments, the displacement member comprises a slide rail and a slide platform, the slide rail is connected with the fixing member to be fixed by the fixing member, and the slide rail is connected with the Z-directional actuating member to be driven by the Z-directional actuating member;

the sliding platform is respectively connected with the sliding rail and the measuring head connecting piece;

when the slide rail is driven by the Z-direction actuator, the slide rail drives the sliding platform and the measuring head connecting piece connected with the sliding platform to move in the Z direction.

In some embodiments, the first displacement member includes a first slide rail and a first slide platform, the first slide rail is connected with the first fixing member to be fixed by the first fixing member, and the first slide rail is connected with the Z-directional actuator to be driven by the Z-directional actuator;

the second displacement piece comprises a second slide rail and a second sliding platform, and the second slide rail is connected with the second fixing piece so as to be fixed by the second fixing piece;

the first sliding platform is connected with the first sliding rail and the measuring head connecting piece respectively, and the second sliding platform is connected with the second sliding rail and the measuring head connecting piece respectively;

the first sliding rail is connected with the Z-direction actuating piece so as to be driven by the Z-direction actuating piece; when the first slide rail is driven by the Z-direction actuator, the first slide rail drives the first sliding platform and the measuring head connecting piece connected with the first sliding platform to move in the Z direction.

In some embodiments, the slide platform includes a first slide platform and a second slide platform symmetrically arranged in the Y direction, and the first slide platform and the second slide platform are connected to two opposite side surfaces of the stylus connecting piece in the Y direction, respectively, so as to limit the movement direction of the stylus connecting piece in the Z direction.

In some embodiments, a groove extending along the X direction is formed in the bottom end of the probe connecting member, an X-direction moving block is arranged at the top of the probe, and the X-direction moving block is embedded in the groove to provide the displacement of the probe in the X direction.

In a second aspect, embodiments of the present application provide a contact surface topography measurement apparatus including the Z-direction coarse positioning component according to any implementation manner of the first aspect.

In some embodiments, a contact surface topography instrument, comprising:

a base;

a Z-direction coarse positioning assembly, the Z-direction coarse positioning assembly comprising:

the displacement piece is connected with the fixed piece so as to be fixed by the fixed piece, and the displacement piece is connected with the Z-direction actuating piece so as to be driven by the Z-direction actuating piece to move in the Z direction;

the measuring head connecting piece is connected with the displacement piece, and the bottom end of the measuring head connecting piece is used for being connected with a measuring head;

the Z-direction coarse positioning assembly is positioned on a gravity center line of the base so as to reduce Z-direction relative vibration of the Z-direction coarse positioning assembly and the base;

In some embodiments, a groove extending along the X direction is formed in the bottom end of the gauge head connecting member, an X-direction moving block is arranged at the top of the gauge head, and the X-direction moving block is embedded in the groove to provide the displacement of the gauge head in the X direction.

In some embodiments, the fixture includes:

the first fixing part and the second fixing part are symmetrically arranged in the Y direction, and the measuring head connecting piece is arranged between the first fixing part and the second fixing part.

In some embodiments, the displacement member comprises:

The second displacement piece is connected with the Z-direction actuating piece, and when the second displacement piece is driven by the Z-direction actuating piece, the second displacement piece drives the measuring head connecting piece to move in the Z direction; or

The first displacement piece and the second displacement piece are both connected with the Z-direction actuator, and when the first displacement piece and the second displacement piece are driven by the Z-direction actuator, the first displacement piece and the second displacement piece drive the measuring head connecting piece to move in the Z direction.

In some embodiments, the displacement member includes a slide rail and a slide platform, the slide rail is connected to the fixing member to be fixed by the fixing member, and the slide rail is connected to the Z-directional actuator to be driven by the Z-directional actuator;

the second displacement piece comprises a second slide rail and a second slide platform, and the second slide rail is connected with the second fixing piece to be fixed by the second fixing piece;

In some embodiments, the slide platforms include a first slide platform and a second slide platform symmetrically arranged in the Y direction, and the first slide platform and the second slide platform are connected to two opposite side surfaces of the stylus connecting member in the Y direction, respectively, so as to limit the movement direction of the stylus connecting member in the Z direction.

In some embodiments, the probe connecting part is symmetrically arranged in the Y direction, and the left side surface and the right side surface of the probe connecting part in the Y direction are respectively connected with the first displacement part and the second displacement part, so as to reduce the relative Z-direction vibration between the probe connecting part and the surface of the sample to be measured.

In a third aspect, an embodiment of the third aspect of the present application further provides a method for mounting the contact surface topography measuring instrument according to any of the second aspects. In some embodiments, a method of mounting a contact surface topography tool comprises:

the base is placed in the middle of the vibration isolation table;

a gantry frame consisting of a first gantry frame and a second gantry frame which are separated from each other is arranged in the middle of the base;

the measuring head connecting piece is placed in the middle position between the first gantry frame and the second gantry frame.

The beneficial effects brought by some embodiments of the application are: this application sets up the gauge head connecting piece of being connected with the mounting on the line of gravity of mounting, has reduced the Z between gauge head and the mounting and to relative vibration, and then has reduced or eliminated the Z that exists between probe needle point and the sample surface and to relative vibration, has improved the accuracy of the Z on the sample surface to the height that contact surface topography measuring apparatu measured.

In some embodiments of the present application, when the probe connector is located on the gravity line of the fixing member, the gravity center of the probe connector and the fixing member as a whole is lowered and is closer to the gravity center of the contact type surface texture measuring instrument, so that the Z-direction relative vibration between the probe and the contact type surface texture measuring instrument is reduced or eliminated, the Z-direction relative vibration between the probe tip and the sample surface is reduced or eliminated, and the accuracy of the Z-direction height of the sample surface measured by the contact type surface texture measuring instrument is improved. The gravity center of the measuring head connecting piece and the fixing piece is reduced as a whole, and the measuring head connecting piece and the fixing piece have better stability.

It should be understood that the statements in this section are not intended to identify key or critical features of the embodiments of the present application, nor are they intended to limit the scope of the present application. Other features of the present application will become apparent from the following description. The above and other objects, advantages and features of the present application will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, as illustrated in the accompanying drawings.

Drawings

Some specific embodiments of the present application will be described in detail hereinafter, by way of example and not by way of limitation, with reference to the accompanying drawings, which are included to provide a better understanding of the present application and are not to be construed as limiting the present application. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:

fig. 1 is a schematic top view of a fixing member and a probe connecting member in a contact surface topography measuring apparatus according to a design;

FIG. 2 is a schematic top view of a mounting member and a probe connector according to some embodiments of the present disclosure;

FIG. 3 is a schematic view of the center-of-gravity distance between the probe and the fixing member when the fixing member and the probe connecting member are in different positional relationships;

FIG. 4 is a schematic top view of a base, a mounting member and a probe connector according to some embodiments of the present disclosure;

FIG. 5 is a schematic view of the positioning relationship of the fixing element, the displacement element and the probe connecting element according to some embodiments of the present disclosure;

FIG. 6 is a schematic view of a positioning relationship between a fixing member and a probe connecting member according to some embodiments of the present disclosure;

FIG. 7 is a schematic diagram of a contact surface topography measurement instrument of one design in comparison to contact surface topography measurement instruments of some embodiments of the present application;

FIG. 8 is a side view of FIG. 7;

FIG. 9 is a schematic top view of a contact surface topography measurement apparatus according to some embodiments of the present application;

FIG. 10 is a schematic view of a connection relationship between a fixing member, a displacement member, a probe connecting member and a probe according to some embodiments of the present disclosure;

FIG. 11 is a schematic view of the Z-direction actuating member, the first fixing member and the first displacing member according to some embodiments of the present application;

FIG. 12 is a schematic view of the Z-direction actuator, the second fixed member, and the second displacement member according to some embodiments of the present application;

FIG. 13 is a schematic view of a probe connector according to some embodiments of the present application;

fig. 14 is a schematic structural view of a probe according to some embodiments of the present application;

FIG. 15 is a schematic view of a probe connector and a probe according to some embodiments of the present disclosure;

FIG. 16 is a schematic diagram showing a comparison of simulation of a contact surface topography measurement apparatus of one design with a contact surface topography measurement apparatus of some embodiments of the present application;

FIG. 17 is a flow chart illustrating a method of mounting a contact surface topography tool according to some embodiments of the present application.

Description of the main element symbols:

1-contact surface topography measuring instrument;

a 10-Z coarse positioning component;

100-fastener, 110-first fastener, 120-second fastener;

200-displacement member, 210-first displacement member, 210 a-first slide rail, 210 b-first sliding platform, 220-second displacement member, 220 a-second slide rail, 220 b-second sliding platform;

300-measuring head connecting piece, 310-groove;

400-measuring head, 410-probe, 420-X direction moving block;

20-a base;

a 30-Z directional actuator;

TS-sample surface, G-fixture center of gravity,

s1, the distance between the probe tip and the gravity center of the fixing piece when the measuring head connecting piece is positioned on the gravity center line of the fixing piece;

s2, the distance between the probe tip and the gravity center of the fixing piece when the measuring head connecting piece is positioned on the front side surface of the fixing piece.

Detailed Description

In the following, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the drawings in the embodiments of the present application, wherein many details of the embodiments of the present application are included to facilitate understanding, and the described embodiments are only possible technical implementations of the present application, and should be considered as merely exemplary and not all possible implementations. Also, descriptions of well-known functions and constructions are omitted in the following description for clarity and conciseness.

The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances and that the terms "first," "second," and the like are used generically and do not limit the number of objects, e.g., a first object can be one or more than one. In the present application, "or/and", "and/or" means that the object is at least one of them, "or" means that the object is one of them. The term "plurality" shall mean two as well as more than two.

In this application, the center line of gravity is a vertical line drawn through the center point of gravity. This application is described with reference to orientations in common usage within the industry, with X directions being the directions of the front and rear sides, Y directions being the directions of the left and right sides, and Z directions being the directions of the upper and lower sides, and the description of orientations herein is primarily intended to better describe the application and its embodiments, and is not intended to limit the device, element or component being referred to as having a particular orientation or being constructed and operated in a particular orientation. Unless otherwise specified, the sample surface TS is disposed on the center of gravity line of the fixing member 100, or/and the center of gravity line of the Z-direction coarse positioning assembly 10, or/and the center of gravity line of the base 20, and can be distinguished according to the specific description involved. In the present description, the fixing member 100 may be a gantry frame, but the fixing member 100 may also be other suitable structures for supporting the displacement member 200.

The measuring head connecting piece 300 of the contact type surface topography measuring instrument 1 is connected with a measuring head 400, the measuring head 400 comprises a cantilever and a probe 410, one end of the cantilever is fixed while the contact type surface topography measuring instrument 1 works, the probe 410 is installed at the other end of the cantilever, and the probe 410 is used for scanning a sample. Fig. 1 is a schematic top-view positional relationship diagram of a fixing member 100 and a probe connecting member 300 according to a design, as shown in fig. 1, a displacement member 200 is installed on a front side surface in the middle of a cross beam of a gantry frame, and a probe 400 is hung on the front side surface of the displacement member 200, that is, the probe 400 is hung forward relative to the cross beam of the gantry frame. The inventor finds that when the gantry frame vibrates in a pitching mode or in a vertical mode, the measuring head 400 vibrates in the Z direction along with the gantry frame. And because the tail end of the probe 410 is fixed with the cantilever, the probe tip is a free end, so that the vibration at the probe tip is amplified, and the Z-direction relative vibration is generated between the probe tip and the sample surface TS. Although the vibration of the cantilever caused by external reasons can be effectively reduced by arranging the vibration isolation platform, the inventor finds that the vibration isolation platform has poor attenuation effect on low-frequency vibration, and cannot achieve the effect of reducing the relative vibration of the probe tip and the sample surface TS in the Z direction. In this case, the TS acting force on the sample surface and the Z-direction vibration are superimposed to form the displacement of the probe 410, so that the Z-direction height of the sample measured by the contact surface topography measuring apparatus 1 has an error.

In view of the above, the present application provides a redesigned Z-coarse positioning assembly 10 for a contact surface topography machine 1, comprising:

and a fixing member 100, wherein the bottom end of the fixing member 100 is used for connecting with the base 20 of the contact surface topography 1.

A displacement member 200, the displacement member 200 is connected with the fixing member 100 to be fixed by the fixing member 100, and the displacement member 200 is connected with the Z-direction actuator 30 to be driven by the Z-direction actuator 30 to move in the Z direction. For example, the Z-direction driving member is a Z-direction motor, and the displacement member 200 is driven by the Z-direction motor to move in the Z-direction. The Z-direction driving member may also be a lead screw, and the displacement member 200 is driven by the lead screw to move in the Z-direction.

And a probe connector 300 connected to the displacement member 200, wherein the probe connector 300 is used for connecting to the probe 400.

When the displacement member 200 is driven by the Z-direction actuator 30, the displacement member 200 drives the probe connector 300 to move in the Z-direction. Fig. 2 is a schematic top view of the fixing member 100 and the probe connector 300 according to some embodiments of the present invention, and as shown in fig. 2, the probe connector 300 is located on a gravity center line of the fixing member 100 to reduce or eliminate Z-direction relative vibration between the probe tip of the probe 400 and the sample surface TS to be measured.

Fig. 3 is a schematic diagram illustrating the distance between the center of gravity of the probe 410 and the fixture 100 when the fixture 100 and the probe connector 300 are in different positions. When the surface TS of the same sample is measured, the distance S1 between the probe tip and the gravity center of the fixing piece when the measuring head connecting piece is positioned on the gravity center line of the fixing piece is smaller than the distance S2 between the probe tip and the gravity center of the fixing piece when the measuring head connecting piece is positioned on the front side surface of the fixing piece. The vibration of an unconstrained device or system is minimal near the center of gravity of the device or system and becomes progressively greater as one moves away from the center of gravity. According to the invention, the measuring head connecting piece 300 connected with the fixing piece 100 is arranged on the gravity center line of the fixing piece 100, so that the Z-direction relative vibration between the measuring head 400 and the fixing piece 100 is reduced or eliminated, the increase of the Z-direction vibration of the probe tip is inhibited, the Z-direction relative vibration between the probe tip and the sample surface TS can be reduced or eliminated, and the accuracy of the Z-direction height of the sample surface TS measured by the contact type surface topography measuring instrument 1 is improved. It should be noted that fig. 3 is only a schematic comparison, when the probe connector 300 is located on the gravity center line of the fixing member 100, the gravity center of the probe connector 300 and the fixing member 100 as a whole is lowered and is closer to the gravity center of the contact type surface texture measuring instrument 1, so that the Z-direction relative vibration between the probe and the contact type surface texture measuring instrument is reduced or eliminated, the Z-direction relative vibration between the probe tip and the sample surface TS is reduced or eliminated, and the accuracy of the Z-direction height of the sample surface TS measured by the contact type surface texture measuring instrument 1 is improved. The center of gravity of the probe connector 300 and the fixing member 100 as a whole is lowered, and stability is improved.

Fig. 4 is a schematic top view of the base 20, the fixing member 100 and the probe connector 300 according to some embodiments of the present application, which is used to illustrate that a center line of gravity of the probe connector 300 coincides with a center line of gravity of the fixing member 100, so as to reduce or eliminate Z-directional relative vibration between the probe tip of the probe 400 and the sample surface TS to be measured. The Z-coarse positioning assembly 10 is also shown positioned on the center of gravity line of the base 20. After the probe connector 300 is located on the gravity center line of the fixing member 100, the gravity center of the part connected with the fixing member 100 as a whole is lower and located on the gravity center line of the base 20, so that the stability is better, the relative Z-direction vibration between the probe tip and the sample surface TS is reduced or eliminated, and the accuracy of the Z-direction height of the sample surface TS measured by the contact type surface topography measuring instrument 1 is improved.

Fig. 5 is a schematic diagram illustrating a positional relationship among the fixing member 100, the displacement member 200, and the probe connecting member 300 according to some embodiments of the present disclosure. Unlike fig. 2 and 4, in the embodiment shown in fig. 5, the fixing member 100 includes a first fixing member 110 and a second fixing member 120 separated from each other; the first fixing member 110 and the second fixing member 120 are symmetrically disposed in the Y direction, and the probe connector 300 is disposed between the first fixing member 110 and the second fixing member 120. On one hand, the first fixing member 110 and the second fixing member 120 which are separately arranged are convenient to process and manufacture, and the distance between the first fixing member 110 and the second fixing member 120 can be adjusted as required so as to facilitate installation of the measuring head connecting member 300. On the other hand, the first fixing element 110 and the second fixing element 120 are symmetrically arranged in the Y direction, and the center of gravity of the fixing element 100 composed of the first fixing element 110 and the second fixing element 120 can be found by visual inspection. The positions of the first fixing member 110 and the second fixing member 120 on the base 20 can be adjusted conveniently, and the gravity center line of the fixing member 100 can be coincided with the gravity center line of the base 20 conveniently.

Fig. 6 is a schematic diagram illustrating a position relationship between the fixing member 100 and the probe connecting member 300 according to some embodiments of the present application, in which the fixing member 100 includes a first fixing member 110 and a second fixing member 120 that are separated from each other, and the displacement member 200 includes a first displacement member 210 and a second displacement member 220 that are separated from each other. As shown in fig. 6, the first displacement element 210 and the second displacement element 220 are symmetrically disposed in the Y direction, the first displacement element 210 is connected to the first fixing element 110 to be fixed by the first fixing element 110, and the second displacement element 220 is connected to the second fixing element 120 to be fixed by the second fixing element 120. Likewise, in one aspect, the first displacement member 210 and the second displacement member 220 are separately provided to facilitate manufacturing, and the distance between the first displacement member 210 and the second displacement member 220 can be adjusted as required to facilitate connection of the probe connector 300. On the other hand, the first displacement element 210 and the second displacement element 220 are symmetrically arranged in the Y direction, and the gravity center line of the displacement element 200 composed of the first displacement element 210 and the second displacement element 220 can be found by visual inspection. The positions of the first displacement member 210 and the second displacement member 220 connected to the fixed member 100 can be adjusted conveniently, and the center of gravity of the displacement member 200 can be coincided with the center of gravity of the fixed member 100 conveniently. The relationship between each of the first and

second displacement members

210, 220 and the Z-actuator 30 may be: the first displacement member 210 is connected to the Z-direction actuator 30, and when the first displacement member 210 is driven by the Z-direction actuator 30, the first displacement member 210 drives the probe connector 300 to move in the Z-direction. Or, the second displacement member 220 is connected to the Z-directional actuator 30, and when the second displacement member 220 is driven by the Z-directional actuator 30, the second displacement member 220 drives the probe connector 300 to move in the Z-direction. Or, the first displacement member 210 and the second displacement member 220 are both connected to the Z-direction actuator 30, and when the first displacement member 210 and the second displacement member 220 are driven by the Z-direction actuator 30, the first displacement member 210 and the second displacement member 220 drive the probe connector 300 to move in the Z-direction. When the first displacement member 210 is connected to the Z-directional actuator 30, the second displacement member 220 is driven, specifically, the first displacement member 210 drives the probe connector 300 to move in the Z-direction, and the probe connector 300 drives the second displacement member 220 to move in the Z-direction. When the second displacement member 220 is connected to the Z-directional actuator 30, the first displacement member 210 is driven, specifically, the second displacement member 220 drives the probe connector 300 to move in the Z-direction, and the probe connector 300 drives the first displacement member 210 to move in the Z-direction.

Fig. 6 also shows that in some embodiments of the present application, the stylus attachment 300 is symmetrically arranged in the Y-direction. The three-dimensional structure of the sample surface TS is measured by the probe tip, the measurement precision between the probe tip and the sample surface TS is sub-nanometer grade, and the micro vibration transmitted to the base 20 can influence the measurement precision. In this application, the gauge head connecting piece 300 is connected with the first displacement piece 210 and the second displacement piece 220 respectively at the left side and the right side in the Y direction, and the gauge head connecting piece 300 is fixed and has no free end in the Y direction, so that the vibration increase caused by the free end is prevented, namely, the relative vibration of the gauge head connecting piece 300 in the X direction, the Y direction and the Z direction is reduced, and further, the relative vibration of the gauge head 400 connected with the gauge head connecting piece 300 in the X direction, the Y direction and the Z direction is also reduced.

In some embodiments shown in fig. 7, 8, and 9, the Z actuator 30 can be a Z motor. In some embodiments of the present application shown in the drawings, the Z-motor is disposed on the first displacement member 210, the first displacement member 210 is connected to the first fixed member 110, and the first fixed member 110 includes a transverse beam and a longitudinal beam, which may be a combined structure or an integrated structure. When the Z-direction motor is disposed on the first displacement member 210, the second displacement member 220 may be disposed with the equal weight of the Z-direction motor, and the balance of the Z-direction motor, the equal weight, the first displacement member 210, and the second displacement member 220 is maintained by such a counterweight adjustment method, so that the center line of gravity can be conveniently found. The weight can be, for example, another Z-direction motor.

Fig. 10 is a schematic view illustrating a connection relationship between the fixing member 100, the displacement member 200, the probe connecting member 300, and the probe 400 according to some embodiments of the present disclosure. The displacement member 200 comprises a slide rail and a sliding platform, the slide rail is connected with the fixing member 100 to be fixed by the fixing member 100, and the slide rail is connected with the Z-directional actuator 30 to be driven by the Z-directional actuator 30; the sliding platform is respectively connected with the slide rail and the measuring head connecting piece 300; when the slide rail is driven by the Z-direction actuator 30, the slide rail drives the slide platform and the probe connector 300 connected to the slide platform to move in the Z-direction. Specifically, the displacement member 200 includes a first displacement member 210 and a second displacement member 220, the first displacement member 210 includes a first slide rail 210a and a first slide platform 210b, the second displacement member 220 includes a second slide rail 220a and a second slide platform 220b, the first slide rail 210a is connected to the first fixing member 110 to be fixed by the first fixing member 110, the first slide rail 210a is connected to the Z-direction actuator 30 to be driven by the Z-direction actuator 30, and the first slide platform 210b is respectively connected to the first slide rail 210a and the gauge head connecting member 300. The second sliding platform 220b is connected to the second slide rail 220a and the measuring head connecting member 300, and the first sliding platform 210b and the second sliding platform 220b are connected to two opposite side surfaces of the measuring head connecting member 300, i.e., a left side surface and a right side surface in fig. 10. The first slide rail 210a is connected to the Z-direction actuator 30 to be driven by the Z-direction actuator 30; when the first slide rail 210a is driven by the Z-direction actuator 30, the first slide rail 210a drives the first slide platform 210b and the gauge head connecting member 300 connected to the first slide platform 210b to move in the Z direction.

FIG. 11 is a schematic view of the connection of the Z-direction actuator 30, the first fixing member 110 and the first displacement member 210 according to some embodiments of the present disclosure; fig. 12 is a schematic view of the connection relationship of the Z-directional actuating member 30, the second fixing member 120 and the second displacement member 220 according to some embodiments of the present application. Referring to fig. 10, 11 and 12, the first sliding platform 210b and the second sliding platform 220b are symmetrically disposed in the Y direction, and the first sliding platform 210b and the second sliding platform 220b are respectively connected to two opposite side surfaces, i.e., a left side surface and a right side surface in fig. 10, of the stylus connecting member 300 to limit the movement direction of the stylus connecting member 300 to the Z direction.

Fig. 13 is a schematic view of a probe connector 300 according to some embodiments of the present application; fig. 14 is a schematic diagram of a probe 400 according to some embodiments of the present application; fig. 15 is a schematic view of a connection relationship between the stylus coupler 300 and the stylus 400 according to some embodiments of the present disclosure. As shown in fig. 13, 14 and 15, the bottom end of the stylus connecting member 300 is provided with a groove 310 extending along the X direction, the top of the stylus 400 is provided with an X-direction moving block 420, and the X-direction moving block 420 is embedded into the groove 310 to provide the displacement of the stylus 400 in the X direction, which can be specifically used for coarse adjustment in the X direction and for facilitating the placement of the stylus 400 into the groove 310 or the extraction of the stylus 400 from the groove 310. The probe connector 300 is a hollow structure, and related elements can be arranged inside the probe connector to be suitable for other types of microscopes such as a white light interference microscope.

Based on the same concept, embodiments of the second aspect of the present application further provide a contact surface topography measuring instrument 1 including the Z-direction coarse positioning assembly 10 according to any of the first aspects. The contact surface topography measuring instrument 1 also has the technical effect of the flexible track transition piece according to any one of the technical solutions of the first aspect, and details are not described here.

Fig. 7 is a schematic diagram showing a structural comparison between the contact surface topography measuring apparatus 1 according to the embodiment of the present application and the contact surface topography measuring apparatus 1 according to the embodiment of the present application, and fig. 8 is a side view of fig. 7. Fig. 9 is a schematic top view of a contact surface topography 1 according to some embodiments of the present application. In fig. 7, 8 and 9, the fixing member 100 is a gantry frame, and is directly manufactured into two inverted L-shaped piers in actual processing, and then is spliced with the middle measuring head connecting member 300. The displacement piece 200 and the sliding platform are respectively arranged on two sections of the gantry frame, the displacement piece 200 and the sliding platform on two sides are in rigid connection through the measuring head connecting piece 300, and the measuring head 400 is hung at the bottom of the measuring head connecting piece 300. The probe connector 300 is fixed to the sliding platform by screws, and drives the probe 400 to move up and down under the driving of the displacement member 200. Since the measuring head 400 is not hung outwards, the pitching vibration and the vertical vibration of the gantry frame cannot be amplified. Meanwhile, the center of gravity of the whole frame is lower and is positioned in the center of the table top in the novel scheme, and the novel frame has better stability.

Fig. 16 is a schematic diagram showing a comparison between simulation of the contact surface topography apparatus 1 of one design and the contact surface topography apparatus 1 according to some embodiments of the present application. For comparison, when the span of the gantry frame, the width and the thickness of the beam are set to be the same, and Z-direction vibration excitation with the amplitude of 1 μm and the frequency of 20Hz is applied to the bottom surface, the probe 400 in the design scheme can generate Z-direction vibration of 1.81nm relative to the sample placing table, and the Z-direction vibration amplitude of the probe 400 relative to the sample placing table of the present application is 1.44nm, so that the technical effect of reducing the Z-direction relative vibration between the probe tip of the probe 400 and the sample surface TS to be measured is achieved.

It should be noted that, in the present application, the embodiments and features in the embodiments may be combined with each other without conflict, and the present application schematically shows the combined embodiments to illustrate possible combinations:

and the bottom end of the gantry frame is used for being connected with a base 20 of the contact type surface topography measuring instrument 1.

And the displacement piece 200, the displacement piece 200 is connected with the gantry frame to be fixed by the gantry frame, and the displacement piece 200 is connected with the Z-direction motor to be driven by the Z-direction motor to move in the Z direction.

The measuring head connecting piece 300 in the shape of a Chinese character 'hui' is connected with the displacement piece 200, and the measuring head connecting piece 300 is used for being connected with the measuring head 400;

when the displacement piece 200 is driven by the Z-direction motor, the displacement piece 200 drives the measuring head connecting piece 300 to move in the Z direction; the stylus connection 300 is located on the center of gravity line of the gantry frame to reduce or eliminate Z-direction relative vibration between the probe tip of the stylus 400 and the sample surface TS being measured.

The gravity line of the measuring head connecting piece 300 is overlapped with the gravity line of the gantry frame so as to reduce or eliminate the relative Z-direction vibration between the probe tip of the measuring head 400 and the surface TS of the sample to be measured.

Specifically, the gantry frame includes a first gantry frame and a second gantry frame separated from each other, that is, the gantry frame on the left side and the gantry frame on the right side in fig. 7, the first gantry frame and the second gantry frame are symmetrically arranged in the Y direction, and the probe connector 300 is arranged between the first gantry frame and the second gantry frame.

Specifically, the displacement member 200 includes a first displacement member 210 and a second displacement member 220 separated from each other; the first displacement member 210 and the second displacement member 220 are symmetrically arranged in the Y direction, the first displacement member 210 is connected with the first gantry frame to be fixed by the first gantry frame, and the second displacement member 220 is connected with the second gantry frame to be fixed by the second gantry frame. The first displacement member 210 is connected to the Z-direction motor, and when the first displacement member 210 is driven by the Z-direction motor, the first displacement member 210 drives the probe connector 300 to move in the Z-direction. The displacement member 200 comprises a slide rail and a sliding platform, the slide rail is connected with the gantry frame to be fixed by the gantry frame, the slide rail is connected with the Z-direction motor to be driven by the Z-direction motor, the sliding platform is respectively connected with the slide rail and the measuring head connecting member 300, and when the slide rail is driven by the Z-direction motor, the slide rail drives the sliding platform and the measuring head connecting member 300 connected with the sliding platform to move in the Z direction. Specifically, the first displacement element 210 includes a first slide rail 210a and a first sliding platform 210b, the first slide rail 210a is connected to the first gantry frame to be fixed by the first gantry frame, and the first slide rail 210a is connected to the Z-direction motor to be driven by the Z-direction motor; the second displacement member 220 comprises a second slide rail 220a and a second sliding platform 220b, and the second slide rail 220a is connected with the second gantry frame to be fixed by the second gantry frame; the first sliding platform 210b is connected with the first slide rail 210a and the measuring head connecting piece 300 respectively, and the second sliding platform 220b is connected with the second slide rail 220a and the measuring head connecting piece 300 respectively; the first slide rail 210a is connected to a Z-direction motor to be driven by the Z-direction motor; when the first slide rail 210a is driven by the Z-direction motor, the first slide rail 210a drives the first sliding platform 210b and the measuring head connector 300 connected with the first sliding platform 210b to move in the Z-direction.

Specifically, the sliding platforms include a first sliding platform 210b and a second sliding platform 220b symmetrically arranged in the Y direction, and the first sliding platform 210b and the second sliding platform 220b are connected to two opposite side surfaces of the stylus connecting member 300 in the Y direction, respectively, so as to limit the movement direction of the stylus connecting member 300 in the Z direction.

Specifically, the bottom end of the stylus connecting member 300 is provided with a groove 310 extending along the X direction, the top of the stylus 400 is provided with an X-direction moving block 420, and the X-direction moving block 420 is embedded in the groove 310 to provide the displacement of the stylus 400 in the X direction.

The present embodiment has the following effects: in this embodiment, the probe connector 300 is disposed on the gravity center line of the fixing member 100, so that the Z-direction relative vibration between the probe 400 and the fixing member 100 is reduced, and thus the increase of the Z-direction vibration of the probe tip is suppressed, and when the sample surface TS is also disposed on the gravity center line of the fixing member 100, the Z-direction relative vibration between the probe tip and the sample surface TS can be reduced or eliminated, thereby improving the accuracy of the Z-direction height of the sample surface TS measured by the contact type surface topography measuring instrument 1.

In this embodiment, the gantry frame, the displacement member 200, and the probe connector 300 are symmetrically arranged in the Y direction, and the gravity line of the device composed of the gantry frame, the displacement member 200, and the probe connector 300 can be found by visual observation, so that the position of the gravity line of the device composed of the gantry frame, the displacement member 200, and the probe connector 300 on the base 20 can be conveniently adjusted, and the gravity line of the device composed of the gantry frame, the displacement member 200, and the probe connector 300 can be conveniently overlapped with the gravity line of the base 20, thereby reducing or eliminating the Z-direction relative vibration existing between the probe tip and the sample surface TS, and improving the Z-direction height accuracy of the sample surface TS measured by the contact surface topography measuring instrument 1.

Based on the same concept, the embodiment of the second aspect of the present application further provides a contact surface topography measuring apparatus 1, where the contact surface topography measuring apparatus 1 includes a base 20 and a Z-direction coarse positioning assembly 10. Here, the contact surface topography measuring instrument 1 may be a step gauge, a three-coordinate measuring machine, an atomic force microscope, or the like. Wherein the Z-coarse positioning assembly 10 comprises:

a fixing member 100, a bottom end of the fixing member 100 being used for connecting with the base 20 of the contact surface topography measuring instrument 1;

a displacement member 200, wherein the displacement member 200 is connected with the fixing member 100 to be fixed by the fixing member 100, and the displacement member 200 is connected with the Z-direction actuator 30 to be driven by the Z-direction actuator 30 to move in the Z direction;

the measuring head connecting piece 300 is connected with the displacement piece 200, and the bottom end of the measuring head connecting piece 300 is used for being connected with the measuring head 400;

the Z-direction coarse positioning module 10 is located on the gravity center line of the base 20 to reduce the Z-direction relative vibration between the Z-direction coarse positioning module 10 and the base 20, and when the sample surface TS is also located on the gravity center line of the base 20, the Z-direction relative vibration between the probe tip of the probe 400 and the sample surface TS to be measured can be reduced or eliminated.

When the displacement member 200 is driven by the Z-direction actuator 30, the displacement member 200 drives the probe connector 300 to move in the Z-direction; the stylus connecting member 300 is located on the center of gravity line of the fixing member 100 to reduce or eliminate the Z-directional relative vibration between the probe tip of the stylus 400 and the sample surface TS to be measured.

Embodiments of the second aspect of the present application further provide a contact surface topography measuring instrument 1 combining the Z-direction coarse positioning component 10 of any one of the first aspect with the above embodiments. The contact surface topography measuring instrument 1 also has the technical effect of the flexible track transition piece according to any one of the technical solutions of the first aspect, and details are not described here.

For example, in some embodiments of the present application, the stylus connecting unit 300 is symmetrically disposed in the Y direction, and the stylus connecting unit 300 is connected to the first displacement unit 210 and the second displacement unit 220 on the left side and the right side of the Y direction, respectively, so as to reduce the Z-direction relative vibration between the stylus connecting unit 300 and the sample surface TS to be measured.

Based on the same concept, an embodiment of the third aspect of the present application further provides a method for mounting the contact surface topography measuring apparatus 1 according to any of the second aspects. Fig. 17 is a schematic flow chart of an installation method of the contact surface topography measuring apparatus 1 according to some embodiments of the present application, and the installation method of the contact surface topography measuring apparatus 1 shown in fig. 17 includes:

s101, the base 20 is placed at the middle position of the vibration isolation table. In this step, when the base 20 is placed at the middle position of the vibration isolation table, the center line of gravity of the base 20 coincides with the center line of gravity of the vibration isolation table.

S102, a gantry frame formed by a first gantry frame and a second gantry frame which are separated from each other is placed in the middle of the base 20. At this time, the center of gravity of the gantry frame coincides with the center of gravity of the base 20. As a preferred embodiment, the first slide rail 210a is connected with the first gantry frame to be fixed by the first gantry frame, and the second slide rail 220a is connected with the second gantry frame to be fixed by the second gantry frame; the first sliding platform 210b is connected to the first slide rail 210a and the stylus connecting member 300, and the second sliding platform 220b is connected to the second slide rail 220a and the stylus connecting member 300. The first sliding plate 210b and the second sliding plate 220b are connected to two opposite side surfaces of the stylus connecting unit 300 in the Y direction, respectively. Thus, the gravity center line of the device consisting of the gantry frame, the displacement piece 200 and the measuring head connecting piece 300 is superposed with the gravity center line of the base 20.

S103, placing the measuring head connecting piece 300 in the middle position between the first gantry frame and the second gantry frame. In this step, the stylus connecting member 300 is connected to the displacement member 200, the displacement member 200 is connected to the fixing member 100 to be fixed by the fixing member 100, and the displacement member 200 is connected to the Z-directional actuator 30 to be driven by the Z-directional actuator 30 to move in the Z-direction.

Through the arrangement, the gravity center lines of the base 20, the sample placing platform, the gantry frame, the displacement piece 200 and the measuring head connecting piece 300 of the contact type surface topography measuring instrument 1 are coincided through a position adjusting method, so that the contact type surface topography measuring instrument 1 has better stability, the Z-direction relative vibration between the probe tip and the sample surface TS is reduced or eliminated, and the accuracy of the Z-direction height of the sample surface TS measured by the contact type surface topography measuring instrument 1 is improved.

So far, the embodiments of the present application have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. The shapes and dimensions of the components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of embodiments of the present application. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. Unless otherwise indicated, the positional parameters in this specification and the appended claims are approximations that can vary depending upon the desired properties sought to be obtained by the teachings of the present application.

The above description is only a few embodiments of the present application and is intended to be illustrative of the principles of the technology employed and not limiting of the present application in any way. It will be appreciated by those skilled in the art that the scope of the disclosure herein is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of the above features or their equivalents without departing from the spirit of the disclosure. For example, the technical solutions formed by mutually replacing the above features with (but not limited to) technical features disclosed in the present application and having similar functions are also within the protection scope of the present application.

Claims

1. A contact surface topography measuring instrument (1), characterized in that, comprises

A base (20);

a Z-coarse positioning assembly (10), the Z-coarse positioning assembly (10) comprising:

the bottom end of the fixing piece (100) is used for being connected with a base (20) of the contact type surface topography measuring instrument (1);

the displacement piece (200) is connected with the fixing piece (100) to be fixed by the fixing piece (100), and the displacement piece (200) is connected with the Z-direction actuator (30) to be driven by the Z-direction actuator (30) to move in the Z direction;

the measuring head connecting piece (300) is connected with the displacement piece (200), and the bottom end of the measuring head connecting piece (300) is used for being connected with the measuring head (400);

the Z-direction coarse positioning component (10) is positioned on the gravity center line of the base (20) so as to reduce the Z-direction relative vibration between the Z-direction coarse positioning component (10) and the base (20);

when the displacement piece (200) is driven by the Z-direction actuator (30), the displacement piece (200) drives the measuring head connecting piece (300) to move in the Z direction; the measuring head connecting piece (300) is positioned on the gravity center line of the fixing piece (100) so as to reduce or eliminate the relative Z-direction vibration between the probe tip of the measuring head (400) and the measured sample surface (TS).

2. Contact surface topography tool (1) according to claim 1,

the measuring head connecting piece (300) is characterized in that a groove (310) extending along the X direction is formed in the bottom end of the measuring head connecting piece (300), an X-direction moving block (420) is arranged on the top of the measuring head (400), and the X-direction moving block (420) is embedded into the groove (310) to provide displacement of the measuring head (400) in the X direction.

3. Contact surface topography measuring instrument (1) according to claim 1, characterized in that the fixture (100) comprises

A first fixing member (110) and a second fixing member (120) which are separated from each other;

the first fixing part (110) and the second fixing part (120) are symmetrically arranged in the Y direction, and the measuring head connecting piece (300) is arranged between the first fixing part (110) and the second fixing part (120).

4. Contact surface topography measuring instrument (1) according to claim 3, characterized in that said displacement member (200) comprises

A first displacement member (210) and a second displacement member (220) which are separated from each other;

the first displacement piece (210) and the second displacement piece (220) are symmetrically arranged in the Y direction, the first displacement piece (210) is connected with the first fixing piece (110) to be fixed by the first fixing piece (110), and the second displacement piece (220) is connected with the second fixing piece (120) to be fixed by the second fixing piece (120).

5. Contact surface topography tool (1) according to claim 4,

the first displacement piece (210) is connected with the Z-direction actuator (30), and when the first displacement piece (210) is driven by the Z-direction actuator (30), the first displacement piece (210) drives the measuring head connecting piece (300) to move in the Z direction; or

The second displacement piece (220) is connected with the Z-direction actuator (30), and when the second displacement piece (220) is driven by the Z-direction actuator (30), the second displacement piece (220) drives the measuring head connecting piece (300) to move in the Z direction; or

The first displacement piece (210) and the second displacement piece (220) are both connected with the Z-direction actuator (30), and when the first displacement piece (210) and the second displacement piece (220) are driven by the Z-direction actuator (30), the first displacement piece (210) and the second displacement piece (220) drive the measuring head connecting piece (300) to move in the Z direction.

6. Contact surface topography tool (1) according to claim 3,

the displacement piece (200) comprises a slide rail and a slide platform, the slide rail is connected with the fixing piece (100) to be fixed by the fixing piece (100), and the slide rail is connected with the Z-direction actuating piece (30) to be driven by the Z-direction actuating piece (30);

the sliding platform is respectively connected with the sliding rail and the measuring head connecting piece (300);

when the slide rail is driven by the Z-direction actuator (30), the slide rail drives the sliding platform and the measuring head connecting piece (300) connected with the sliding platform to move in the Z direction.

7. Contact surface topography measuring instrument (1) according to claim 4,

the first displacement piece (210) comprises a first slide rail (210 a) and a first sliding platform (210 b), the first slide rail (210 a) is connected with the first fixing piece (110) to be fixed by the first fixing piece (110), and the first slide rail (210 a) is connected with the Z-direction actuating piece (30) to be driven by the Z-direction actuating piece (30);

the second displacement member (220) comprises a second sliding rail (220 a) and a second sliding platform (220 b), and the second sliding rail (220 a) is connected with the second fixing member (120) to be fixed by the second fixing member (120);

the first sliding platform (210 b) is connected with the first slide rail (210 a) and the measuring head connecting piece (300) respectively, and the second sliding platform (220 b) is connected with the second slide rail (220 a) and the measuring head connecting piece (300) respectively;

the first sliding rail (210 a) is connected with the Z-direction actuator (30) so as to be driven by the Z-direction actuator (30); when the first slide rail (210 a) is driven by the Z-direction actuator (30), the first slide rail (210 a) drives the first sliding platform (210 b) and the measuring head connecting piece (300) connected with the first sliding platform (210 b) to move in the Z direction.

8. Contact surface topography tool (1) according to claim 7,

the sliding platform comprises a first sliding platform (210 b) and a second sliding platform (220 b) which are symmetrically arranged in the Y direction, and the first sliding platform (210 b) and the second sliding platform (220 b) are connected with two opposite side surfaces of the measuring head connecting piece (300) in the Y direction respectively so as to limit the movement direction of the measuring head connecting piece (300) in the Z direction.

9. Contact surface topography measuring instrument (1) according to claim 4,

the measuring head connecting piece (300) is symmetrically arranged in the Y direction, and the left side surface and the right side surface of the measuring head connecting piece (300) in the Y direction are respectively connected with the first displacement piece (210) and the second displacement piece (220) so as to reduce the relative Z-direction vibration between the measuring head connecting piece and the surface of a sample to be measured.

10. A method for mounting a contact surface topography measuring instrument (1) is characterized by comprising

The base (20) is placed in the middle of the vibration isolation table;

a gantry frame consisting of a first gantry frame and a second gantry frame which are separated from each other is placed in the middle of the base (20);

the measuring head connecting piece (300) is placed in the middle position between the first gantry frame and the second gantry frame.