TW200936294A - Slide stage, and slide stage movable in x- and y-directions - Google Patents

Slide stage, and slide stage movable in x- and y-directions Download PDF

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Publication number
TW200936294A
TW200936294A TW97141654A TW97141654A TW200936294A TW 200936294 A TW200936294 A TW 200936294A TW 97141654 A TW97141654 A TW 97141654A TW 97141654 A TW97141654 A TW 97141654A TW 200936294 A TW200936294 A TW 200936294A
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Taiwan
Prior art keywords
slider
linear motor
slide table
air
fixed
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Application number
TW97141654A
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Chinese (zh)
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TWI460047B (en
Inventor
Haruhiko Koike
Yasuhiko Kaku
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Yaskawa Denki Seisakusho Kk
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Publication of TW200936294A publication Critical patent/TW200936294A/en
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Publication of TWI460047B publication Critical patent/TWI460047B/en

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0472—Active magnetic bearings for linear movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/06—Magnetic cores, or permanent magnets characterised by their skew
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/26—Means for adjusting casings relative to their supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

A slide stage can be made low and compact, can transfer smoothly at a high speed and in high precision, and can be manufactured at a low price. A surface table (1) and a slider (4) are dug, and the slider (4) for injecting air downward to the face of the surface table (1) and linear motors (7 and 8) having an electromagnetic suction force are combined. The vertical guides are restrained by the repulsion between the air and the electromagnetic suction force, and the transverse directions are retrained only by the repulsion of the air. A locating device (9) having a guide reference face and a driving-thrust generating face made coextensive and considering an Abbe's error is disposed over the central portion of the slide stage.

Description

200936294 九、發明說明 【發明所屬之技術領域】 本發明是有關於印刷基板、半導體、液晶、太陽能電 池面板、生物相關（bio-related)領域的空氣軸承與線性 ' 馬達（linear motor )、使用位置檢測裝置（直線比例尺 x )之精密定位用的滑動台及XY方向可動滑動台。 【先前技術】 ❹ 組合空氣軸承與線性馬達的滑動台，從完全非接觸， 且不會發生因移動的摩擦熱和空氣軸承的平均化效果來看 ，姿態精度非常穩定，必須以測微計 (micrometer )單位 來加工具有能達成精密定位（超微米）之優點的反面、形 成爲軸承的零件，且具有材料亦受限於高價位者的缺點。 使用習知之空氣軸承的滑動台，是如第47的重量平 衡型者。第47圖是習知重量平衡型滑動台的剖面圖，在 ^ 第47圖中，1’爲定盤’2’爲導軌，3爲空氣墊（air pad) ❿ ，4’是滑塊，5爲無鐵心線性馬達 (coreless Linear Motor )。來自上面的重量與往下的空氣噴出利用空氣壓力取得 ' 平衡’橫向因空氣壓力彼此的反彈而被中央約束，搭載未 受磁力（magnetic force )影響的無鐵心線性馬達5，取得 重量平衡。 可是，如第47圖的習知之重量平衡型滑動台，由於 構造簡單因此具有能廉價製作的優點，但由於上下方向未 被約束，因此上下方向的移動精度（垂直真直度、俯仰（ -4- 200936294 pitching )等）變差。 又，由於軸承部發生因加速、減速時之姿態變動的接 觸等，因此具有無法縮短加速、減速時間且移動接觸延長 的問題。實際使用的事例中，採用不易發生此種問題且大 型平面而重心低、重量重的滑塊，引導部因泛用的空氣墊 ‘被約束在橫向。 此方式尤其是被使用在液晶製造裝置等，但小型化的 ^ 實用化很難，具有變重無法動作的問題，還有無法急加速 〇 、減速的問題。 由於縱向的滑動高度與運送驅動高度產生距離，因此 在加速、減速時產生扭力，影響俯仰方向，也會發生重複 精度和無效運動（lost motion)變得愈來愈差，或者縱向 側的空氣墊干擾定盤等的事故。 設計上由空氣軸承使磁性的吸引力受到不良影響的觀 點來看’必須使用無電磁吸引力的雙面磁石且高價的無鐵 φ 心線性馬達，位置檢測裝置（直線比例尺）的設置場所亦 ^ 在軌道和滑塊的外側和下側等，易引起阿貝誤差（Abbe error )(檢測位置和精度需要位置之不同的誤差）的影響 ，具有定位精度、重複精度變差的問題。 又’於第47圖（b)以放大圖表示第47圖（a)的空 氣墊附近’由於空氣墊3利用有頭螺釘4p與滑塊4’結合 ，因此有頭螺釘4p的球面的頭4q是推壓空氣墊3的部分 ’空氣墊3具有齒隙和剛性下降等的問題，希望爲不使用 空氣墊3的方式。 -5- 200936294 又，對於使用習知的空氣軸承的滑動台’如第48圖 〜第50圖的空氣約束（air restraint)型者亦爲公知。第 48圖〜第50圖是習知裝置的各種空氣約束（air restraint )型滑動台的各個剖面圖，在第48圖〜第50圖中’ 1’爲 定盤，2,爲導軌，4’滑塊’ 5爲無鐵心線性馬達，6爲空 氣噴出部。反正就是不使用空氣墊，在滑塊4’開設形成 空氣通路的孔，從滑塊直接往引導面噴出空氣。又’上下 A 橫向因空氣壓力彼此的反彈而中央被約束，搭載不受磁力 〇 影響的無鐵心線性馬達，產生空氣約束。 如第48圖〜第50的習知空氣約束（air restraint) 型滑動台，由於上下及橫向被約束因此幾乎不會發生移動 時以及加速、減速時的姿態變動，移動精度也變良好，移 動節奏也可縮短，也能小型化（1 〇〇mm平方左右）。但 是，因爲需要以微米單位（數微米）來管理空氣隙，所以 有利用微米單位來組合加工導軌部與滑動部之尺寸關係精 φ 度的必要性（4方向的組合精度需要以數微米單位），零 _ 件單價變昂貴，有無法同時大量生產同類物品的問題。 又，由於在第48圖的滑動台中，縱向的滑動高度與 ♦ 運送驅動高度產生距離，因此在加速、減速時發生扭力， 影響俯仰方向，也會發生重複精度和無效運動（lost motioii )變得愈來愈差，或者縱向側的滑動干擾縱向側之 導軌等的事故。 又，由於在第49圖及第50圖的滑動台中，橫向的滑 動位置與運送驅動位置產生距離，因此在加速、減速時發 -6- 200936294 生扭力，影響偏向方向，也會發生重複精度和無效運動（ lost motion)變得愈來愈差，或者橫向側的滑動幹擾橫向 側之導軌等的事故。設計上由空氣軸承使磁性的吸引力受 到不良影響的觀點來看，必須使用無電磁吸引力的雙面磁 石且高價的無鐵心線性馬達，位置檢測裝置（直線比例尺 )的設置場所亦在外側和下側等，易引起阿貝誤差（Abbe200936294 IX. Description of the Invention [Technical Fields of the Invention] The present invention relates to printed substrates, semiconductors, liquid crystals, solar cell panels, bio-related air bearings and linear 'motors, use positions A sliding table for precise positioning of the detecting device (linear scale x) and a movable sliding table for XY direction. [Prior Art] 滑动 The combination of the air bearing and the linear motor slide table is completely non-contact, and the frictional heat and the average effect of the air bearing do not occur. The attitude accuracy is very stable and must be measured by a micrometer. The micrometer is a unit that has a reverse surface that can achieve the advantages of precision positioning (super micron), is formed as a part of the bearing, and has the disadvantage that the material is also limited by the high price. A sliding table using a conventional air bearing is a weight balance type as in the 47th. Figure 47 is a cross-sectional view of a conventional weight-balanced sliding table. In Figure 47, 1' is the fixed plate '2' as the guide rail, 3 is the air pad ❿, 4' is the slider, 5 It is a coreless linear motor. The air from the above and the downward air are taken out by the air pressure to obtain a 'balance'. The horizontal direction is restrained by the rebound of the air pressure, and the iron-free linear motor 5 which is not affected by the magnetic force is mounted to obtain a weight balance. However, the conventional weight-balanced slide table of Fig. 47 has the advantage of being inexpensive to manufacture because of its simple structure, but the vertical direction is not constrained, so the vertical movement accuracy (vertical straightness, pitch (-4- 200936294 pitching ) etc.) is worse. Further, since the bearing portion is in contact with the posture due to acceleration or deceleration, there is a problem that the acceleration and deceleration time cannot be shortened and the moving contact is prolonged. In the case of actual use, a slider having a large flat surface and a low center of gravity and a heavy weight is used, and the guide portion is restrained in the lateral direction by the general air cushion. In particular, this method is used in a liquid crystal manufacturing apparatus or the like, but it is difficult to use it in a small size, and it has a problem that it cannot be operated with a heavy weight, and there is a problem that it cannot be accelerated and decelerated. Since the longitudinal sliding height is at a distance from the transport driving height, the torque is generated during acceleration and deceleration, affecting the pitch direction, and the repeating precision and the lost motion become worse or worse, or the air cushion on the longitudinal side. Interfere with accidents such as fixing. In the design, the air bearing is used to adversely affect the magnetic attraction. 'There must be a double-sided magnet with no electromagnetic attraction and a high-priced iron-free φ-heart linear motor. The position detection device (linear scale) is also installed. On the outer side and the lower side of the track and the slider, it is easy to cause an Abbe error (error in which the position and accuracy require different positions), and the positioning accuracy and the repeat accuracy are deteriorated. Further, in Fig. 47(b), the vicinity of the air cushion of Fig. 47(a) is shown in an enlarged view. Since the air cushion 3 is coupled with the slider 4' by the cap screw 4p, the spherical head 4q of the head screw 4p is provided. It is a part that pushes the air cushion 3 'the air cushion 3 has a problem of a backlash, a decrease in rigidity, etc., and it is desirable that the air cushion 3 is not used. -5- 200936294 Further, it is also known to use an air bearing type of a conventional air bearing such as the air restraint type of Figs. 48 to 50. 48 to 50 are various cross-sectional views of various air restraint type slide tables of the conventional device. In Figs. 48 to 50, '1' is a fixed plate, 2 is a guide rail, and 4' is a guide plate. The slider '5 is a coreless linear motor and 6 is an air ejection section. In any case, the air cushion is not used, and a hole for forming an air passage is formed in the slider 4', and air is directly discharged from the slider toward the guide surface. Further, the upper and lower A transverse directions are restrained by the rebound of the air pressure, and the iron-free linear motor that is not affected by the magnetic force is mounted, and air restraint is generated. According to the conventional air restraint type slide table of Figs. 48 to 50, since the vertical and horizontal directions are constrained, the posture change during the movement and acceleration and deceleration hardly occurs, and the movement accuracy is also improved, and the movement rhythm is improved. It can also be shortened or miniaturized (about 1 〇〇mm square). However, since it is necessary to manage the air gap in micrometer units (several micrometers), there is a need to combine the dimensional relationship between the rail portion and the sliding portion by using micrometer units (the combination accuracy of the four directions needs to be in a few micrometer units) The price of the zero _ piece becomes expensive, and there is a problem that it is impossible to mass produce similar items at the same time. Further, in the sliding table of Fig. 48, the longitudinal sliding height is spaced from the y transport driving height, so that the torsion force occurs during acceleration and deceleration, and the pitch direction is affected, and the repeating precision and the invalid motion (lost motioii) become. Increasingly worse, or the sliding on the longitudinal side interferes with the accident of the guide rail on the longitudinal side. Further, in the sliding table of Figs. 49 and 50, the lateral sliding position is at a distance from the transport driving position, so that when the acceleration and deceleration are generated, the torque is generated, affecting the deflection direction, and the repeating accuracy is also caused. The lost motion becomes worse and worse, or the sliding on the lateral side interferes with an accident such as a guide rail on the lateral side. In terms of design, the attraction of the magnetic bearing is adversely affected by the air bearing, it is necessary to use a double-sided magnet without electromagnetic attraction and a high-priced ironless linear motor, and the position detecting device (linear scale) is also placed on the outside and The lower side, etc., easily cause Abbe error (Abbe

error)(檢測位置和精度需要位置之不同的誤差）的影響 ，具有定位精度、重複精度變差的問題。 又，習知混合型滑動台，如第51圖者爲公知（參照 曰本專利文獻1 )。第51圖是習知混合型滑動台的俯視 圖，於第51圖中，1’爲定盤，2’爲導軌，4爲滑塊，6爲 空氣噴出部，7爲線性馬達磁石部（固定部），8爲線性 馬達線圈部（可動部）。上下方向是利用作用於馬達線圈 部的馬達鐵芯（圖未示）與馬達磁石之間的電磁引力與空 氣壓力的平衡來約束，橫向是因空氣壓力彼此的反彈被中 央約束。 〔專利文獻1〕曰本實開平7-44457號公報 如第50圖的混合滑動台型，雖然能稍微解決上述兩 類方式的問題，但用於約束橫向滑軌以及縱向的滑軌爲一 體，需要精度加工，尤其由於橫向的滑軌兩側面的平行度 需要以5/zm以下來加工，因此滑軌的製作費用愈來愈貴 ，或者對應較長的行程（lm以上）、較長的寬度（ 500mm以上）等很困難。 雖然能以單軸降低高度，但並非普通單體加以使用 200936294 必須固定在定盤等。此情形下，那部分高度變高，在組裝 於XY的情形下，單純需要2倍的高度，實務上沒有優點Error) (detecting position and accuracy requires different errors in position), and has the problem of poor positioning accuracy and repeatability. Further, a conventional hybrid type slide table is known as shown in Fig. 51 (refer to Patent Document 1). Figure 51 is a plan view of a conventional hybrid type slide table. In Fig. 51, 1' is a fixed plate, 2' is a guide rail, 4 is a slider, 6 is an air ejection portion, and 7 is a linear motor magnet portion (fixed portion). ), 8 is a linear motor coil portion (movable portion). The up-and-down direction is constrained by the balance between the electromagnetic attraction force and the air pressure between the motor core (not shown) acting on the motor coil portion and the motor magnet, and the lateral direction is confined centrally due to the rebound of the air pressure. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 7-44457. The hybrid slide table type as shown in Fig. 50 can solve the problems of the above two types of methods slightly, but is used to restrain the lateral slide rails and the longitudinal slide rails as one body. Accurate machining is required, especially since the parallelism of the lateral sides of the slide rails needs to be processed at 5/zm or less, so the production cost of the slide rails becomes more and more expensive, or corresponds to a longer stroke (more than lm) and a long width. (500mm or more) is very difficult. Although it can be lowered in a single axis, it is not used as a normal unit. 200936294 Must be fixed in the fixing plate, etc. In this case, the height of the part becomes high, and in the case of assembly with XY, it is only required to have a height of 2 times, and there is no advantage in practice.

❹ 第52圖是通過第51的滑塊4’之中央的寬度方向的 線之E-E箭頭標示剖面圖。於圖中，1 ’爲定盤，2’爲導軌 ，4’爲滑塊，6爲空氣管，6u爲下麵空氣噴出部，6s爲橫 面空氣噴出部，7爲線性馬達磁石部（固定部），7a爲磁 鐵（magnet ) ，8爲線性馬達線圏部（附可動部核心或附 鐵軛），9爲直線比例尺（9 Η爲頭部、9 S爲比例尺）。 滑塊4’是由上部平坦部4f與腳部4k的兩部件所成，兩者 利用螺釘4 c結合。 該滑動台係讓電磁吸引力（在第52圖箭頭方向）作 用在磁鐵7a與線性馬達線圈部8之間。然後，在滑塊4 ’ 係各自從上部平坦部4f對下面噴出空氣的下麵空氣噴出 部6u與從腳部4k向著導軌2’噴出橫面空氣的橫面空氣 噴出部6s噴出空氣。利用來自下面空氣噴出部6u的空氣 噴出舉起滑塊4’的浮力（flotage )起作用，在該浮力與 施加於滑塊4’的重力以及電磁吸引力之和產生均衡的垂 直方向的位置浮起來。又，由於各自利用來自滑塊4’之 腳部4k的兩空氣噴出部6s的空氣噴出，讓力朝離開導軌 2’的方向起作用，因此會讓滑塊4’位於其兩個力產生均衡 的水平方向的位置。 如此一來，該電磁吸引力係朝箭頭F3的方向施加在 第53圖之滑塊4’的上部平端部的中央。又，因爲各自利 -8- 200936294 用滑塊4’的兩空氣噴出部6s的空氣噴出，讓力朝 軌2’的方向起作用，所以該力會朝箭頭F1、F2的 加。 【發明內容】 〔發明欲解決的課題〕 可是，檢討如第52圖的滑動台時，注意具有 〈問題1 &gt; 雖然滑塊4 ’是利用加工性佳、強韌的花崗石 所製成，但花崗石和陶瓷具有壓縮強而彎曲方向弱 。因而，在腳部4k，係一方利用螺釘固定，力F2 另一方，所以具有彎曲力作用於腳部4k，第53圖 X部（接合部與螺合部）B斷裂之虞。又，由於利 φ 吸引力與空氣反彈的平衡進行上下方向的約束，因 53圖的變形及應力，經常使滑塊受到負擔，損失 再現性，還有滑動台本身被破壞的危險性。 於是，爲了不讓此種狀態發生，有必要提高強 麼做的話，與其朝實行小型化的方向反其道而行， 讓滑動台本身變大。 〈問題2〉 在寬度方向剖面爲U字形的導軌2’’因爲以 離開導 方向施 以下的 和陶瓷 的缺點 作用於 所示之 用電磁 此如第 精度的 度’這 倒不如 U字形 -9- 200936294 腳部的上面爲上下方向的滑動面，所以必須同時高精度地 加工該腳部上面與U字形底面（安裝面）的平行度與腳 部上面的平面度。又，因爲以U字形腳部的側面爲橫向 的滑動面，所以縱使是U字形導件之腳部間的平行度也 需要高精度地加工。做成u字形的導軌2’是利用花崗石 和陶瓷所製成，爲了提高其加工精度（加工至誤差 左右），具有以誤差5#m左右來加工較長的長條物（lm 以上的物體），需要時間與成本的缺點。 〈問題3〉 急速的加速、減速時，會發生縱向側的滑塊幹擾、接 觸到縱向側之導軌等的事故。因而爲了不引起幹擾、接觸 事故，不做急速的加速、減速控制，就會有成爲無法急速 的加速、減速控制之滑塊的缺點。 又，具有檢測位置檢測裝置（直線比例尺）之訊號的 定位精度、重複精度差的問題。 〈問題5〉 因爲從兩側之滑塊的腳部4k的橫面空氣噴出部6s噴 出的空氣之壓力，作用成將做成U字形之導軌的腳部朝 內側彎曲，所以具有U字形的腳部朝內側變形的問題。 腳部變形的話，導件之橫面間的平行度惡化，滑塊的腳部 -10- 200936294 與導軌的腳部接觸，具有引導面受損的情形。 〔用以解決課題之手段〕 爲了解決上述問題，本發明爲如下所構成。 申請專利範圍第1項記載的滑動台的發明，爲對應第 = 1圖者，係具備·定盤、和舖設在前述定盤上的線性馬達 磁石部、和在前述定盤之上隔著前述線性馬達磁石部互相 I 平行固定的兩根導軌、和設置在前述線性馬達磁石部之上 Ο 方與前述兩根導軌之間的空間，對行進方向以直角的斷面 形成U字形的滑塊、和在前述滑塊之U字形的開口內與 前述線性馬達磁石部隔著空隙面對配置的線性馬達線圈部 的滑動台，其特徵爲··在前述側壁設有從構成前述滑塊之 前述U字形的側壁向著下面的前述定盤直接噴出空氣以 及向著橫面噴出空氣的空氣噴出部，利用從前述空氣噴出 部向著下面噴出之空氣的浮上力和前述線性馬達磁石部以 Φ 及前述線性馬達線圈間的電磁吸引力及重力產生平衡而浮 . 起，且形成藉由前述馬達磁石部及前述線性馬達線圈間的 驅動力被驅動。 申請專利範圍第2項記載的發明，爲對應第3圖者’ 針對申請專利範圍第1項記載的滑動台’其中’具備：挖 掘有長溝的定盤、和舖設在前述長溝內的線性馬達磁石部 、和在前述定盤之上隔著前述長溝互相平行固定的兩根導 軌、和設置在前述長溝之上方與前述兩根導軌之間的空間 ，對行進方向以直角的斷面形成U字形的滑塊、和在前 -11 - 200936294 述滑塊之U字形的開口內與前述線性馬達磁石部隔著空 隙面對配置的線性馬達線圈部；在前述側壁設有從構成前 述滑塊之前述U字形的側壁向著下面的前述定盤直接噴 出空氣以及向著橫面噴出空氣的空氣噴出部，利用從前述 空氣噴出部向著下面噴出之空氣的浮上力和前述線性馬達 _ 磁石部以及前述線性馬達線圈間的電磁吸引力及重力產生 平衡而浮起，且形成藉由前述馬達磁石部及前述線性馬達 I 線圈間的驅動力被驅動。 ❹ 申請專利範圍第3項記載的發明，爲對應第3圖者， 針對申請專利範圍第1項記載的滑動台，其中，具備：挖 掘有長溝的定盤、和舖設在前述長溝內的線性馬達磁石部 、和在前述定盤之上隔著前述長溝互相平行固定的兩根導 軌、和設置在前述長溝之上方與前述兩根導軌之間的空間 ，對行進方向以直角的斷面形成U字形的滑塊、和在前 述滑塊之U字形的開口內與前述線性馬達磁石部隔著空 Q 隙面對配置的線性馬達線圈部；在前述側壁設有從構成前 ^ 述滑塊之前述U字形的側壁向著下面的前述定盤直接噴 出空氣以及向著橫面噴出空氣的空氣噴出部，形成使得利 用從前述空氣噴出部向著下面噴出之空氣的浮上力和前述 線性馬達磁石部以及前述線性馬達線圈間的電磁吸引力及 重力產生平衡的浮上面與藉由前述馬達磁石部及前述線性 馬達線圈間的驅動力的驅動面一致。 申請專利範圍第4項記載的發明爲對應第4圖者，針 對申請專利範圍第1項記載的滑動台，其中，在前述滑塊 -12- 200936294 的行進方向前端側及後端側，連結構成前述U字形的側 壁間。 申請專利範圍第5項記載的發明爲對應第2圖者，針 對申請專利範圍第1項記載的滑動台，其中，在構成前述 U字形之側壁的前述滑塊的行進方向於複數處設置前述空 ’氣噴出部。 申請專利範圍第6項記載的發明爲對應第6圖者，針 赢 對申請專利範圍第1項記載的滑動台，其中，在前述滑塊 ❹ 的角部的外側及內側形成圓角。 申請專利範圍第7項記載的發明爲對應第7圖者，針 對申請專利範圍第1項記載的滑動台，其中，在與構成前 述U字形之側壁的前述滑塊的行進方向呈直角的方向於 複數處設置前述空氣噴出部。 申請專利範圍第8項記載的發明爲對應第8圖及第9 圖者，針對申請專利範圍第2項記載的滑動台，其中，在 φ 前述定盤互相平行地挖掘複數排前述長溝，分別在前述各 _ 長溝內舖設前述線性馬達磁石部，且將分別與前述各線性 馬達磁石部隔著間隔面對配置的各線性馬達線圈部保持在 滑塊的前述U字形開口內，且將前述下面的空氣噴出部 設置在前述滑塊的各線性馬達線圈部間。 申請專利範圍第9項記載的發明爲對應第9圖者，針 對申請專利範圍第8項記載的滑動台，其中，前述長溝的 複數排爲兩排或三排。 申請專利範圍第1 0項記載的發明爲對應第1 〇圖者， -13- 200936294 針對申請專利範圍第1項記載的滑動台，其中，代替 滑塊，使用由：在下方安裝前述線性馬達線圈部與構 述滑塊的前述U字形的側壁部的金屬板所成的滑塊。 申請專利範圍第1 1項記載的發明爲對應第1 0圖 針對申請專利範圍第1 0項記載的滑動台，其中，在 ‘ 金屬板具備冷卻媒體用孔。 申請專利範圍第12項記載的XY方向可動滑動 I 發明爲對應第13圖者，其特徵爲：使用申請專利範 〇 8項記載的第1滑動台、和申請專利範圍第10項記 第2滑動台，以前述第1滑動台的滑塊作爲前述第2 台的定盤，且以前述第1滑動台的滑塊之移動方向與 第2滑動台的滑塊之移動方向爲直交的方式，在前述 滑動台之上載置前述第2滑動台。 申請專利範圍第1 3項記載的發明爲對應第1 4圖 針對申請專利範圍第12項記載的滑動台，其中，雙 ^ 前述第2滑動台。 申請專利範圍第1 4項記載的發明爲對應第1 5圖 針對申請專利範圍第1項記載的滑動台，其中，離開 滑塊來固定設置在前述滑塊之上的上基板，在前述上 與前述滑塊之間的空間內，且在前述滑塊之上的前述 馬達線圈之正上部位設置直線比例尺頭，另一方面， 述上基板與前述滑塊之間的空間內，將直線比例尺刻 自前述直線比例尺頭及其他的移動的構件浮上而固定 申請專利範圍第1 4項記載的發明爲對應第1 5圖 前述 成前 者， 前述 台的 圍第 載的 滑動 前述 第1 者， 驅動 者’ 前述 基板 線性 在前 度部 〇 者， -14- 200936294 針對申請專利範圍第14項記載的滑動台，其中，將限制 開關安裝在前述上基板與前述滑塊之間的空間內。 申請專利範圍第1 6項記載的發明爲對應第1 7圖者， 針對申請專利範圍第14項記載的滑動台，其中，在寬度 方向斷面呈U字形來形成安裝前述直線比例尺的刻度部 的安裝基板。 申請專利範圍第17項記載的發明爲對應第18圖者， 0 針對申請專利範圍第13項記載的XY方向可動滑動台， 其中’在前述第2滑動台的定盤控掘延伸於前述第2滑動 台之滑塊的移動方向的長孔，在前述長孔內收納平面二次 元直線比例尺頭，將前述平面二次元直線比例頭的端部固 定在前述滑塊，在前述第1滑動台的定盤配置平面二次元 直線比例尺。 申請專利範圍第18項記載的發明爲對應第20圖者， 針對申請專利範圍第17項記載的XY方向可動滑動台， φ 其中，將前述平面二次元直線比例尺頭配置在兩個正方形 _ 的對角位置，且將前述平面二次元直線比例尺，複數片平 面狀地配置在前述第1滑動台的定盤。 申請專利範圍第1 9項記載的發明爲對應第21圖者， 針對申請專利範圍第1項記載的滑動台，其中，在前述滑 塊與前述兩列的導軌之間以及前述滑塊與前述定盤之間， 分別將低摩擦係數且堅固材料的物品張貼在前述前滑動側 、前述導軌側和前述定盤側，前述低摩擦係數之材質物品 就能彼此接觸。 -15- 200936294 申請專利範圍第20項記載的發明爲對應第21圖者， 針對申請專利範圍第1 9項記載的滑動台，其中，前述低 摩擦係數之材質物品爲碳纖維、陶瓷、石英、瑪瑙之任一 種。 申請專利範圍第21項記載的發明爲對應第22圖者， A 針對申請專利範圍第1項記載的滑動台，其中，以一體形 成前述定盤與前述兩根導軌，且分別在前述定盤之下面配 ❹ 置位準調整螺栓，在前述定盤之側面配置位置限制螺栓》 申請專利範圍第22項記載的滑動台的發明爲對應第 25圖者，其特徵爲：將申請專利範圍第21項記載的滑動 台’以複數台平行地排列在製罐架台上，在前述滑動台的 上部設置工件吸附基板，利用前述位準調整螺栓就能進行 位準調整。 申請專利範圍第23項記載的高架型的χγ方向可動 滑動台的發明爲對應第2 8圖者，其特徵爲：將申請專利 φ 範圍第21項記載的滑動台，2式互相平行地排列在製罐 , 架台上的兩端，在上部橫向設置前述滑動台。 申請專利範圍第24項記載的發明爲對應第3 1圖者， 針對申請專利範圍第1項記載的滑動台，其中，前述導軌 對行進方向以直角的斷面觀看形成羅馬字的「I」字形， 在前述導軌的上面中央具有設置前述線性馬達磁石部的溝 ，在該溝的兩上面’前述滑塊是自前述下面空氣噴出部噴 出空氣，且利用前述線性馬達磁石部與前述線性馬達線圈 部的電磁吸引的平衡來移行，以圍繞前述導軌上側兩側面 -16- 200936294 的方式’前述滑塊自前述橫面空氣噴出部邊噴出空氣邊移 行。 申請專利範圍第25項記載的發明爲對應第42圖者， 針對申請專利範圍第24項記載的滑動台，其中，在前述 導軌的端部下端的凸緣部固定著母螺紋套筒，前述位準調 整螺栓是以螺合在該母螺紋套筒的螺检固定式位準調整螺 栓、和通過形成在該螺栓固定式位準調整栓的中心軸，穿 通到貫通的貫通孔的固定螺栓所構成。 〔發明效果〕 藉由申請專利範圍第1項記載的發明，直接將目前僅 進行載置構件的載置台（工作台）之作用的定盤的上面， 作爲滑動面做有效利用爲本發明的出發點。因此，導軌並 非如習知之第52圖的導軌2’的U字形的複雜形狀，因爲 只要固定長條的棒即可，所以當製作時只是僅正確地做出 φ 定盤與滑塊相對之面的直角度的加工即可。對此，因爲第 52圖的導軌2’，是以U字形腳部的上面作爲滑動面，所 以除了該滑動面的平面度外，縱使有關U字形腳部間的 平行度也要求表面精度。因而，雖然導軌2’只能儘量製 作維持表面精度之lm等級長度的長條物’但因爲本發明 的導軌是很簡單的形狀，所以能得到整個長度6m〜7m且 高精度的長條物，所以可適用於大型的液晶面板的製造裝 置。 又’由於能省略第52圖之導軌2’的厚度量D’因此 -17- 200936294 能降低長度。 藉由申請專利範圍第2項的發明，除 第1項記載的效果外，進而能更進一步地 石部的高度量。 藉由申請專利範圍第3項記載的發明 動面與滑塊的浮上（滑動）面略一致，所 ，就能防止滑動台的滑塊與下部滑動面接 速、減速依然沒有滑動台與滑動面摩擦之 速、減速的滑動台。 又，因爲只能降低導軌2’之U字形 度份長度，所以有助於小型化。 進而，導軌2只要固定長棒即可，因 只要正確做出面對定盤1與滑塊4之面的 略做出第52圖之導軌2’的U字形之精度 工變容易。 又，因爲挖溝構造，電磁吸引力的應 到滑塊4，所以滑塊本體並未變形，精度 性也很良好。 藉由申請專利範圍第4項記載的發明 跨置在導軌之上，所以滑塊只要在中央部 馬達線圈的直方體部分即可，由於能設置 行進方向之前端的左右兩腳部彼此連結的 一行進方向之後端的左右兩腳部彼此連結 此滑塊之兩側腳部不會變形。 了申請專利範圍 降低線性馬達磁 ，因爲馬達的驅 以沒有偏位距離 觸，縱使增大加 虞，完成耐高加 的上下方向之厚 而每當製作時， 直角度，就能省 的加工，所以加 力不會直接影響 的穩定性和再現 ，因爲滑塊不必 挖出僅收納線性 連繫兩腳部且將 連結部分、將同 的連結部分，因 -18- 200936294 又，安裝相同大小的線性馬達線圈’因爲未跨置在導 軌所以變小型，因而材料也少，因爲將其餘之材料的一部 分^充當增加滑塊之上部的厚度，縱使力作爲於滑塊的上部 ，厚度依然很充分，所以並沒有朝下側大爲凹陷的情形。 藉由申請請專利範圍第5項記載的發明’就能得到安 裝的浮力。 像這樣在角部的內側與外側施行圓角，應力不會集中 在角部，所以應力增強，滑塊的角部變得難以破裂。 藉由申請利範圍第7項的發明，簡單地就能實現寬度 廣、大面積的滑動台。 藉由申請利範圍第8項的發明， 藉由申請專利範圍第9項記載的發明，不會因兩線性 馬達驅動引起偏向，而且在不正常停止的情形下，只對中 央的線性馬達施以不正常停止的話，因爲施加煞車的是中 央部，所以滑塊不會朝左右震動地停止。 藉由申請專利範圍第1 0項記載的發明，如此一來， 因爲金屬板彎曲強，所以縱使金屬板僅中央部彎曲變形依 然沒有破裂，而且由於電磁吸引力的影響只作用於上面的 連結基板，因此只對滑塊（石製）施加壓縮方向的力，因 爲石材壓縮強，所以石材未變形，精度的穩定性和再現性 也很良好。 採用金屬板’不僅達到精度提昇，滑動台高度也沒有 滑塊上部厚壁部位的部份，就能變得更低。 藉由申請專利範圍第11項記載的發明，因爲就能夠 -19- 200936294 在所連結的金屬基板簡單地形成冷卻媒體用孔，所以水和 空氣在此流動，就能阻斷線性馬達線圈部的發熱。 藉由申請專利範圍第1 2項記載的發明，如此一來’ 就可得到能將長度降至比重疊的高度還低的XY滑動台。 11 藉由申請專利範圍第1 3項記載的發明，如此一來’ 高度減低，且因爲使得有關X軸及Y軸同時雙驅動，所 以在兩側提高移動精度，就能讓橫向的移動精度（偏向、 ^ 水平真直度）變佳，因此X軸及Y軸能同時高精度的移 ❹ 動。 藉由申請專利範圍第14項記載的發明，因爲在將檢 測頭相對於測定物的滑塊4配置在未偏移的同一軸線上， 所以縱使滑塊4引起偏向，由於中央部依然未受到偏向的 影響，因此測定精度提昇。 藉由申請專利範圍第1 5項記載的發明，因爲能將用 來防止越程（over travel )等的限制開關，有效利用滑塊 φ 與上基板之間的空間而安裝於此，所以未突出於裝置的外 _ 部，就沒有破損等之虞。 藉由申請專利範圍第1 6項記載的發明，雖然因爲直 線比例尺安裝基板係細長的長條狀且向下方安裝，所以受 到重力的影響而容易變形，但因爲形成斷面U字形，所 以對變形而言變強。 藉由申請專利範圍第17項記載的發明，使X軸滑塊 於X方向移動的話，二次元直線比例尺頭會在挖空內移 動，於X方向讀取平面二次元直線比例尺，而且使Y軸 -20- 200936294❹ Fig. 52 is a cross-sectional view taken along line E-E of the line in the width direction of the center of the slider 4' of the 51st. In the figure, 1 ' is the fixed plate, 2' is the guide rail, 4' is the slider, 6 is the air tube, 6u is the lower air ejection part, 6s is the horizontal air ejection part, and 7 is the linear motor magnet part (fixed part) 7a is a magnet, 8 is a linear motor wire crotch (with a movable part core or an iron yoke), and 9 is a linear scale (9 Η is the head and 9 S is the scale). The slider 4' is formed by two members of the upper flat portion 4f and the leg portion 4k, and the two are coupled by a screw 4c. This slide table allows electromagnetic attraction (in the direction of the arrow in Fig. 52) to be used between the magnet 7a and the linear motor coil portion 8. Then, the slider 4' is configured to eject air from the lower air ejecting portion 6u that ejects air from the upper flat portion 4f to the lower surface and the lateral air ejecting portion 6s that ejects the lateral air from the leg portion 4k toward the guide rail 2'. The buoyancy of the lifting slider 4' is ejected by the air from the lower air ejecting portion 6u, and the floating force is floated in a position perpendicular to the sum of the gravity applied to the slider 4' and the electromagnetic attraction force. stand up. Further, since the air is ejected by the two air ejecting portions 6s from the leg portions 4k of the slider 4', the force acts in a direction away from the guide rail 2', so that the slider 4' is placed at the balance of the two forces. The position of the horizontal direction. As a result, the electromagnetic attraction force is applied to the center of the upper flat end portion of the slider 4' of Fig. 53 in the direction of the arrow F3. Further, since the respective air is ejected by the air from the two air ejecting portions 6s of the slider 4', and the force acts in the direction of the rail 2', the force is applied to the arrows F1 and F2. [Problem to be Solved by the Invention] However, when reviewing the slide table according to Fig. 52, it is noted that the problem is <Question 1 &gt; Although the slider 4' is made of granite having good workability and toughness. However, granite and ceramics have strong compression and weak bending directions. Therefore, in the leg portion 4k, one of the legs 4k is fixed by the screw, and the other force F2 is applied. Therefore, the bending force acts on the leg portion 4k, and the X portion (the joint portion and the screwing portion) B in Fig. 53 is broken. Further, since the balance between the attractive force of φ and the rebound of the air is restricted in the vertical direction, the deformation and stress of Fig. 53 often cause the slider to be burdened, the loss reproducibility, and the risk of the sliding table itself being destroyed. Therefore, in order to prevent this from happening, it is necessary to improve the strength, and instead of implementing the miniaturization, the sliding table itself becomes larger. <Problem 2> The guide rail 2'' having a U-shaped cross section in the width direction is applied to the electromagnetic force as shown in the first step because of the disadvantage of the following ceramics leaving the conduction direction. This is not as good as the U-shaped -9- 200936294 The upper surface of the foot is a sliding surface in the up and down direction. Therefore, the parallelism between the upper surface of the foot and the U-shaped bottom surface (mounting surface) and the flatness of the upper surface of the foot must be processed with high precision. Further, since the side surface of the U-shaped leg portion is a sliding surface in the lateral direction, the parallelism between the leg portions of the U-shaped guide member needs to be processed with high precision. The U-shaped guide rail 2' is made of granite and ceramics. In order to improve the machining accuracy (processing to the error), it is possible to process long strips with an error of about 5 #m (objects above lm) ), the shortcomings of time and cost are required. <Problem 3> In the case of rapid acceleration or deceleration, accidents such as interference on the vertical side and contact with the guide rail on the longitudinal side occur. Therefore, in order not to cause disturbance or contact accident, and without rapid acceleration and deceleration control, there is a disadvantage that it becomes a slider that cannot be rapidly accelerated and decelerated. Further, there is a problem that the positioning accuracy and the repeatability of the signal of the position detecting device (linear scale) are poor. <Problem 5> Since the pressure of the air ejected from the lateral air ejecting portion 6s of the leg portion 4k of the sliders on both sides acts to bend the leg portion of the U-shaped guide rail inward, the U-shaped leg is provided. The problem of deformation of the part toward the inside. When the foot is deformed, the parallelism between the lateral faces of the guide is deteriorated, and the leg portion -10-200936294 of the slider comes into contact with the leg portion of the guide rail, and the guide surface is damaged. [Means for Solving the Problem] In order to solve the above problems, the present invention is configured as follows. According to the invention of the slide table according to the first aspect of the invention, in the first aspect of the invention, there is provided a fixed disk, a linear motor magnet portion laid on the fixed plate, and the aforementioned Two guide rails in which the linear motor magnet portions are fixed in parallel with each other, and a space provided between the two sides of the linear motor magnet portion and the two guide rails, and a U-shaped slider is formed at a right angle to the traveling direction. And a slide table of a linear motor coil portion that is disposed to face the linear motor magnet portion with a gap therebetween in the U-shaped opening of the slider, wherein the U-shaped portion constituting the slider is provided on the side wall The side wall of the glyph directly ejects air toward the lower fixed plate and the air ejecting portion that ejects air toward the lateral surface, and the floating force of the air ejected from the air ejecting portion toward the lower surface and the linear motor magnet portion are Φ and the linear motor coil The electromagnetic attraction force and the gravity are balanced and floated, and the driving force is driven by the driving force between the motor magnet portion and the linear motor coil. In the invention described in the second aspect of the invention, the sliding table described in the first aspect of the invention is provided with a fixed disk having a long groove and a linear motor magnet laid in the long groove. a portion, and two rails fixed in parallel with each other across the long groove, and a space provided between the long groove and the two rails, forming a U-shaped cross section at right angles to the traveling direction a slider and a linear motor coil portion that is disposed to face the linear motor magnet portion with a gap therebetween in a U-shaped opening of the slider of the first -11 - 200936294; and the U-shaped portion constituting the slider is provided on the side wall The side wall of the glyph directly ejects air toward the lower fixed plate and the air ejecting portion that ejects air toward the lateral surface, and the floating force of the air ejected from the air ejecting portion toward the lower surface and the linear motor_magnet portion and the linear motor coil The electromagnetic attraction force and the gravity are balanced and floated, and the driving between the motor magnet portion and the aforementioned linear motor I coil is formed. driven. The invention according to claim 3, wherein the sliding table according to the first aspect of the invention is characterized in that: the sliding table excavated with a long groove and a linear motor laid in the long groove; a magnet portion and two rails fixed in parallel with each other across the long groove via the long groove, and a space provided between the long groove and the two rails, forming a U-shaped cross section at a right angle to the traveling direction a slider, and a linear motor coil portion disposed in a U-shaped opening of the slider and facing the linear motor magnet portion with an empty Q gap; and the U-shaped portion of the slider constituting the slider The side wall of the glyph directly ejects air toward the lower fixed plate and the air ejecting portion that ejects air toward the lateral surface, and forms a floating force that uses the air ejected from the air ejecting portion toward the lower surface, the linear motor magnet portion, and the linear motor coil. The electromagnetic attraction between the electromagnetic attraction and the gravity generates a balanced floating surface and the driving force between the motor magnet portion and the aforementioned linear motor coil Moving the same plane. The invention described in the fourth aspect of the invention is the slide table according to the first aspect of the invention, wherein the slide table is connected to the front end side and the rear end side in the traveling direction of the slider-12-200936294. Between the side walls of the aforementioned U-shape. In the sliding table according to the first aspect of the invention, the sliding table according to the first aspect of the invention, wherein the traveling direction of the slider constituting the side wall of the U-shaped portion is provided at a plurality of places 'Air ejector. The invention described in the sixth aspect of the invention is the sliding table according to the first aspect of the invention, wherein the sliding table is formed on the outer side and the inner side of the corner portion of the slider 。. The invention described in the seventh aspect of the invention is directed to the sliding table according to the first aspect of the invention, wherein the sliding table is oriented at a right angle to the traveling direction of the slider constituting the side wall of the U-shape. The air ejection portion is provided at a plurality of places. The invention described in the eighth aspect of the invention is directed to the sliding table according to the second aspect of the invention, wherein the plurality of rows of the long grooves are excavated in parallel with each other in the φ. The linear motor magnet portion is placed in each of the long grooves, and each linear motor coil portion disposed to face each of the linear motor magnet portions is held in the U-shaped opening of the slider, and the lower surface is The air ejecting portion is provided between the respective linear motor coil portions of the slider. The invention described in claim 9 is the slide table according to the eighth aspect of the invention, wherein the plurality of rows of the long grooves are two or three rows. The invention described in the first aspect of the invention is the sliding table according to the first aspect of the invention, in which the linear motor coil is mounted on the lower side instead of the slider. And a slider formed by a metal plate of the U-shaped side wall portion of the slider. The invention described in the first aspect of the invention is the slide table according to the tenth aspect of the patent application, wherein the metal plate is provided with a hole for a cooling medium. The invention of the XY-direction movable sliding I described in the twelfth aspect of the patent application is the first sliding table described in the eighth paragraph of the patent application, and the second sliding of the patent application range No. 10 In the table, the slider of the first slide table is used as the fixed plate of the second stage, and the moving direction of the slider of the first slide table is orthogonal to the moving direction of the slider of the second slide table. The second slide table is placed on the slide table. The invention described in claim 13 is a slide table according to claim 12, wherein the second slide table is double ^. The invention according to claim 1 is the slide table according to the first aspect of the invention, wherein the slider is fixed to the upper substrate provided on the slider, and the a linear scale head is disposed in a space between the sliders and a front portion of the motor coil above the slider, and a linear scale is engraved in a space between the upper substrate and the slider. The invention described in the first aspect of the invention is the first aspect of the invention described above in the first aspect of the present invention, the driver of the above-mentioned linear scale head and other moving members are fixed. The slide table according to claim 14, wherein the limit switch is mounted in a space between the upper substrate and the slider. The invention according to the first aspect of the invention, wherein the sliding table according to claim 14 is a U-shaped cross section in the width direction to form a scale portion on which the linear scale is attached. Install the substrate. The invention described in claim 17 is in accordance with the eighteenth aspect, and the XY-direction movable sliding table according to the thirteenth aspect of the patent application, wherein the fixed-discharge control of the second sliding stage extends to the second a long hole in a moving direction of the slider of the slide table, a planar quadratic linear scale head is accommodated in the long hole, and an end portion of the planar quadratic linear scale head is fixed to the slider, and the first slide table is fixed The disc is configured with a planar quadratic linear scale. The invention described in claim 18 is the XY-direction movable slide table according to the seventeenth aspect of the patent application, and φ, wherein the planar quadratic linear scale head is disposed in two squares _ In the angular position, the planar quadratic linear scale is arranged in a planar manner on the fixed plate of the first slide table. The invention according to claim 1 is the slide table according to the first aspect of the invention, wherein the slider and the guide rails of the two rows and the slider and the predetermined Between the disks, articles having a low friction coefficient and a strong material are respectively attached to the front sliding side, the rail side, and the fixed plate side, and the low friction coefficient material articles can be in contact with each other. -15-200936294 The invention described in claim 20 is the sliding table according to the nineteenth aspect of the invention, wherein the low friction coefficient material is carbon fiber, ceramic, quartz or agate. Any of them. The invention described in claim 21 is the slide table according to the first aspect of the invention, wherein the fixed plate and the two guide rails are integrally formed, and are respectively in the fixed plate. In the following, the position adjustment bolt is placed and the position limiting bolt is placed on the side of the fixed plate. The invention of the sliding table described in claim 22 is the corresponding figure 25, and the feature is: The slide table described in the above is arranged in parallel on the can rack stand, and a workpiece suction substrate is provided on the upper portion of the slide table, and the level adjustment can be performed by using the level adjustment bolt. In the invention of the χγ-direction movable sliding table according to the twenty-third aspect of the invention, the invention is characterized in that the sliding table described in the twenty-first aspect of the patent application φ is arranged in parallel with each other. The cans, the two ends of the gantry, are disposed laterally in the upper portion. The invention described in claim 24 is the slide table according to the first aspect of the invention, wherein the guide rail forms a "I" shape of a Roman character in a cross section at a right angle to the traveling direction. a groove provided with the linear motor magnet portion at a center of the upper surface of the guide rail, and the slider on the upper surface of the groove is configured to eject air from the lower air ejection portion, and the linear motor coil portion and the linear motor coil portion are used The electromagnetic attraction is balanced to move, and the slider is moved from the side air ejection portion while the air is ejected around the upper side of the guide rail in the manner of the upper side of the guide rail-16-200936294. The invention described in claim 25 is the slide table according to claim 24, wherein the flange portion of the lower end of the end portion of the guide rail is fixed with a female thread sleeve, the level The adjusting bolt is configured by a screw-fixed fixed level adjusting bolt screwed to the female threaded sleeve, and a fixing bolt formed through the central shaft of the bolt-fixed level adjusting bolt and penetrating through the through hole. [Effect of the Invention] According to the invention of the first aspect of the invention, the upper surface of the fixed plate which is currently only the action of the mounting table (stage) on which the mounting member is placed is effectively used as the sliding surface as the starting point of the present invention. . Therefore, the guide rail is not a U-shaped complicated shape of the guide rail 2' as in the conventional 52nd drawing, since it is only necessary to fix the long rod, so that only the opposite side of the φ plate and the slider is made when the production is made. The straight angle can be processed. On the other hand, since the guide rail 2' of Fig. 52 has the upper surface of the U-shaped leg as the sliding surface, in addition to the flatness of the sliding surface, the surface accuracy is required even for the parallelism between the U-shaped leg portions. Therefore, although the guide rail 2' can only produce a long piece of the lm-level length that maintains the surface precision as much as possible, the guide rail of the present invention has a very simple shape, so that a long length of 6 m to 7 m and a high precision can be obtained. Therefore, it can be applied to a manufacturing apparatus of a large liquid crystal panel. Further, since the thickness D' of the guide rail 2' of Fig. 52 can be omitted, the length can be lowered by -17-200936294. According to the invention of claim 2, in addition to the effects described in the first item, the height of the stone portion can be further increased. By slightly matching the floating surface of the slider according to the third aspect of the patent application, the slider of the slide table can be prevented from being connected to the lower sliding surface, and the sliding surface can be prevented from colliding with the sliding surface. Speed and deceleration slide table. Further, since the length of the U-shaped portion of the guide rail 2' can be reduced, it contributes to downsizing. Further, the guide rail 2 only needs to be fixed to the long rod, and it is easy to accurately form the U-shape of the guide rail 2' which is slightly opposite to the surface of the fixed plate 1 and the slider 4, as shown in Fig. 52. Further, since the electromagnetic attraction force is applied to the slider 4 due to the trenching structure, the slider body is not deformed and the accuracy is also good. According to the invention of the fourth aspect of the invention, the slider is placed on the guide rail. Therefore, the slider can be placed in the rectangular portion of the central motor coil, and the left and right legs of the front end in the traveling direction can be connected to each other. The left and right legs of the rear end of the direction are coupled to each other, and the legs on both sides of the slider are not deformed. The patent application scope reduces the linear motor magnetism, because the motor is driven without the offset distance, even if the twist is increased, the upper and lower direction of the high-resistance is completed, and the straight angle can be saved when the production is performed. Therefore, the afterburner does not directly affect the stability and reproduction, because the slider does not have to be dug out to accommodate only the linear connection of the two legs and the joint portion, the same joint portion, because of -18-200936294, the same size linearity is installed. The motor coil 'becomes smaller because it is not placed on the guide rail, so the material is also small, because a part of the remaining material acts as a thickness for increasing the upper portion of the slider, and the force is still sufficient as the upper portion of the slider, so the thickness is still sufficient. There is no such thing as a large depression on the lower side. The buoyancy of the installation can be obtained by applying for the invention described in the fifth paragraph of the patent. In this way, the inner side and the outer side of the corner portion are rounded, and the stress is not concentrated on the corner portion, so the stress is enhanced and the corner portion of the slider becomes difficult to be broken. By applying the invention of the seventh item, it is possible to easily realize a wide and large-area sliding table. By applying the invention of the eighth item, the invention described in claim 9 is not biased by the driving of the two linear motors, and in the case of abnormal stopping, only the central linear motor is applied. If the vehicle is not stopped normally, since the center portion is applied to the brake, the slider does not stop moving to the left and right. According to the invention described in claim 10, since the metal plate is strongly bent, even if only the central portion is bent and deformed, the metal plate is not broken, and the electromagnetic attraction force acts only on the upper connecting substrate. Therefore, only the force of the compression direction is applied to the slider (stone), because the stone is strongly compressed, the stone is not deformed, and the stability and reproducibility of the precision are also good. The use of a metal plate not only achieves an improvement in accuracy, but also the height of the sliding table is not as high as that of the upper portion of the upper portion of the slider. According to the invention of the eleventh aspect of the invention, the hole for the cooling medium can be easily formed on the metal substrate to be connected by -19-200936294, so that water and air flow therethrough, and the coil portion of the linear motor can be blocked. heat. By applying the invention described in the fifteenth aspect of the patent, in this way, an XY slide table capable of reducing the length to a height lower than the overlap can be obtained. 11 By applying the invention described in the third paragraph of the patent scope, the height is reduced, and since the X-axis and the Y-axis are simultaneously driven in both directions, the movement accuracy can be improved on both sides, and the lateral movement accuracy can be improved ( The deviation, ^ horizontal straightness) is better, so the X-axis and Y-axis can move at the same time with high precision. According to the invention of the fourteenth aspect of the invention, since the slider 4 of the detecting head with respect to the measuring object is disposed on the same axis that is not offset, the slider 4 is deflected slightly, and the center portion is still not biased. The impact of the measurement is therefore improved. According to the invention of the fifteenth aspect of the invention, since the restriction switch for preventing over travel or the like can be effectively installed by the space between the slider φ and the upper substrate, it is not protruded. In the outer part of the device, there is no damage or the like. According to the invention of the first aspect of the invention, the linear scale mounting substrate is elongated and elongated, and is attached downward. Therefore, it is easily deformed by the influence of gravity. However, since the U-shaped cross section is formed, the deformation is performed. It is getting stronger. According to the invention described in claim 17, when the X-axis slider is moved in the X direction, the quadratic linear scale head moves in the hollowing, the plane quadratic linear scale is read in the X direction, and the Y-axis is made. -20- 200936294

滑塊移動的話，因爲X軸滑塊也會移動，所以被安裝在X 軸滑塊之下方的二次元直線比例尺頭會移動，藉此就能於 Y方向讀取平面二次元直線比例尺，此結果，變成二次元 直線比例尺頭可於χγ方向讀取平面二次元直線比例尺。 〇 1 藉由申請專利範圍第18項記載的發明，兩個二次元 直線比例尺頭之中必定有一個頭會讀出二次元直線比例尺 ’縱使在X方向及γ方向設置任意長度的二次元直線比 ❹ 例尺，二次元直線比例尺頭依然能確實地讀出比例尺。。 藉由申請專利範圍第19項記載的發明，因爲滑塊能 在定盤的表面以間隙大致爲零來移動，所以能進行精密的 控制。 藉由申請專利範圍第20項記載的發明，因爲可得到 低摩擦係數且堅固的材質者，所以耐久性良好，而且因爲 滑塊能在定盤的表面以間隙大致爲零來移動，所以能進行 φ 精密的控制。 _ 藉由申請專利範圍第21項記載的發明，因爲是一體 化組合定盤與導軌的構造，在定盤軌的下面配置位準調整 螺栓與在側面配置位置限制螺栓，所以對因定盤軌的自重 及負荷荷重引起的縱向之彎曲等，來調整設置在下面的位 準調整螺栓，藉此，縱使下面不是呈現平面度的石定盤等 、未呈現精度的製罐架台等的情形下，依然能設置，移行 的真直度也能調整到3〜10ym左右，同樣地橫向的精度 也利用位置限制螺栓來調整定盤軌，移行的真直度也能調 -21 - 200936294 整到3〜10//m左右。 藉由申請專利範圍第22項記載的發明，因爲將滑動 台複數台于行地排列在定盤上，在上部設置工件（work ) 吸附基板’所以能進行大型平面面板顯示器（FPD )工件 的運送。 1 藉由申請專利範圍第23項記載的發明，因爲將滑動 台2式平行排列在製罐架台上的兩端，進行位準調整，所 以在上部橫向設置同一本實施例的滑動台，藉此就能構成 ❹ 對應大型FPD工件之高架（gantry )構造的滑動台。 藉由申請專利範圍第24項記載的發明，由於是定盤 與導軌做成一體型的羅馬字的「I」字形形狀的導軌，因 此本體的剛性也很強，由在下部配置螺栓固定式位準調整 螺栓，因此對因定盤軌的自重及負荷荷重引起的縱向之彎 曲等，來調整設置在下面的位準調整螺栓，藉此，縱使下 面不是呈現平面度的石定盤等、未呈現精度的製罐架台等 0 的情形下，依然能設置，移行的真直度也能調整到3〜1 〇 • # m左右，同樣地橫向的精度也利用位置限制螺栓來調整 定盤軌，移行的真直度也能調整到3〜ΙΟ/zm左右。 藉由申請專利範圍第25項記載的發明，因爲利用接 著固定在定盤軌的母螺紋套筒來推拉調整設置在公螺紋的 螺栓固定式位準調整螺栓，在決定高度的時候，利用固定 螺栓固定至機材，藉此，縱使下面不是呈現平面度的石定 盤等、未呈現精度的製罐架台等的情形下，依然能設置滑 動台，移行的真直度也可調整到3ym〜10/zm左右。因 -22- 200936294 而，縱使成爲基準的下部’製罐架台等之精度不佳的情形 下，10m以上的長度者依然能進行高精度的運送定位。 又，如果與習知裝置比對來討論，做成上述構造，就 會產生如下的效果。 對以往之重量平衡型的課題，由於上下方向受到約束 ，因此上下方向的移動精度（垂直真空度、俯仰等）變佳 〇 因爲加速、減速時之姿態變動少所以不會發生軸承部 的接觸等，可縮短加速、減速時間，且能提高移動接觸。 因爲小型化所以能實用化，縱使變重依然能動作，而 且也能急加速、減速。 由於縱向的滑動高度與運送驅動高度未產生距離，因 此在加速、減速時不會產生扭力，俯仰方向未受影響，重 複精度和無效運動（lost motion)變佳，且縱向側的滑動 台不會干擾定盤。 不必使用兩面磁石且高價的無鐵心線性馬達，因爲使 用單面磁石的線性馬達所以很便宜。 位置檢測裝置（直線比例尺）的設置場所不是在外側 和下側等，是設置在如後述的第14圖、第17圖的位置， 藉此，就沒有阿貝誤差（檢測位置和精度需要位置不同的 誤差）的影響，定位精度、重複精度變佳。 對習知的空氣約束型的課題，因爲不需要以微米單位 來管理空氣隙，所以並無利用微米單位來組合加工導軌部 與滑動部之尺寸關係精度的必要性，零件單價變便宜，能 -23- 200936294 同時大量生產同類物品。 由於縱向的滑動高度與運送驅動高度未產生距離，因 此在加速、減速時不會產生扭力，俯仰方向未受影響，重 複精度和無效運動（lost motion)變佳，且縱向側的滑動 台不會干擾縱向側的導軌。 由於橫向的滑動位置與運送驅動位置未產生距離，因 此在加速、減速時不會產生扭力，偏向方向未受影響，重 I 複精度和無效運動（lost motion)變佳，且橫向側的滑動 台不會干擾橫向側的導軌。 不必使用兩面磁石且高價的無鐵心線性馬達，因爲使 用單面磁石的線性馬達所以很便宜。 又’如果與日本實開平第7-4457號公報記載的「滑 動裝置」比對的話，對混合型的課題，由於下面使用定盤 那樣的物品，因此不需要特性的加工，用來約束橫向的導 軌爲一體者，沒有精度加工的必要，且不必以5 // m以下 q 來加工所對應的兩側面的平行度，因爲只要呈現平面度即 . 可，所以導軌的製作費用愈來愈便宜，或者能對應較長的 行程（3 m以上）、較長的寬度（2m以上）等。 更能以單軸來降低高度，由於使用定盤上面，因此變 更低。 又’組裝於XY的情形下，不單是兩倍的高度，組合 的高度可更低，具有實務上的優點。 由於縱向的滑動高度與運送驅動高度未產生距離，因 此在加速、減速時不會產生扭力，俯仰方向未受影響，重 -24 - 200936294 複精度和無效運動（lost motion)變佳，且縱向側的滑動 台不會干擾縱向側的導軌。 又，雖爲利用電磁吸引力與空氣反彈的平衡進行上下 方向的約束，但變形及應力不會使滑塊受到負擔，即沒有 損失精度的再現性，或滑動台本身被破壞的危險性。 又，由於未發生此種的狀態，就沒有必要進行強度提 昇，因此能小型化。 【實施方式】 〔用以實施發明的最佳形態〕 以下，針對本發明的實施形態參照圖做說明。 〔實施例1〕 第1圖是有關本發明之實施例的滑動台之縱剖面圖。When the slider moves, since the X-axis slider also moves, the quadratic linear scale head mounted under the X-axis slider moves, thereby reading the planar quadratic linear scale in the Y direction. It becomes a quadratic linear scale head and can read the plane quadratic linear scale in the χγ direction. 〇1 By applying the invention described in claim 18, there must be one head in the two quadratic linear scale heads to read the quadratic linear scale' even if an arbitrary length of the second element is set in the X direction and the γ direction.例 Example ruler, the secondary element linear scale head can still read the scale accurately. . According to the invention of claim 19, since the slider can be moved to a substantially zero gap on the surface of the fixed plate, precise control can be performed. According to the invention of claim 20, since a material having a low friction coefficient and a strong material can be obtained, the durability is good, and since the slider can move at a substantially zero gap on the surface of the fixed plate, it can be performed. φ Precision control. _ With the invention described in claim 21, since it is an integrated combination of the fixed plate and the guide rail, the position adjustment bolt is disposed under the fixed rail and the position limiting bolt is disposed on the side, so The self-weight and the longitudinal bending caused by the load, etc., to adjust the level adjustment bolts provided below, so that the lower surface is not a flat plate, such as a stone plate, or the like, which does not exhibit precision, etc. It can still be set, and the straightness of the movement can be adjusted to about 3~10ym. Similarly, the lateral accuracy is also adjusted by the position limiting bolt. The straightness of the movement can also be adjusted - 21 - 200936294 to 3~10/ /m or so. According to the invention of claim 22, since a plurality of slide table units are arranged on the fixed plate in a row, and a workpiece is attached to the upper portion to adsorb the substrate, the large flat panel display (FPD) workpiece can be transported. . 1 . According to the invention of claim 23, since the slide table 2 is arranged in parallel on both ends of the can holder stand to perform level adjustment, the slide table of the same embodiment is disposed in the upper direction. It is possible to form a sliding table for the gantry structure of a large FPD workpiece. According to the invention described in claim 24, since the fixing plate and the guide rail are integrally formed with a Roman-shaped "I"-shaped guide rail, the rigidity of the main body is also strong, and the bolt-fixed position is disposed at the lower portion. The bolt is adjusted, so that the position adjustment bolt provided below is adjusted for the vertical bending caused by the weight of the fixed rail and the load, so that the lower surface is not a flat plate, etc. In the case of a precision can making stand, etc., it can still be set, and the straightness of the transition can be adjusted to 3~1 〇• #m, and the lateral accuracy is also adjusted by the position limiting bolt to adjust the fixed track. The straightness can also be adjusted to about 3~ΙΟ/zm. According to the invention described in claim 25, since the bolt-type adjustment bolt provided on the male thread is pushed and pulled by the female thread sleeve which is fixed to the fixed rail, the fixing bolt is used when determining the height. It is fixed to the machine, so that even if the following is not a flat plate, such as a stone plate, or a can-making stand that does not exhibit accuracy, the slide table can be set, and the straightness of the movement can be adjusted to 3 y to 10/zm. about. -22-200936294, even if the accuracy of the lower part of the can-making stand, etc., is not good, the length of 10m or more can still be accurately positioned. Further, if it is discussed in comparison with the conventional device, the above configuration is obtained, and the following effects are produced. In the conventional problem of the weight balance type, since the vertical direction is restrained, the movement accuracy in the vertical direction (vertical vacuum, pitch, etc.) is improved. Since the attitude change during acceleration and deceleration is small, the contact of the bearing portion does not occur. It can shorten the acceleration and deceleration time and improve the moving contact. Because it is miniaturized, it can be put into practical use, and even if it is heavy, it can still operate, and it can also accelerate and decelerate. Since the longitudinal sliding height does not generate a distance from the transport driving height, no torque is generated during acceleration and deceleration, the pitch direction is not affected, the repeating precision and the lost motion are improved, and the sliding table on the longitudinal side does not Interfere with the fixing. It is not necessary to use a double-sided magnet and a high-priced, non-core linear motor, which is cheap because it uses a linear motor with a single-sided magnet. The installation position of the position detecting device (linear scale) is not at the outer side and the lower side, and is provided at positions 14 and 17 which will be described later, whereby there is no Abbe error (the position and the accuracy need to be different in position) The influence of the error) is better in positioning accuracy and repeatability. As a matter of the conventional air-constrained type, since it is not necessary to manage the air gap in units of micrometers, there is no need to combine the precision of the dimensional relationship between the processed rail portion and the sliding portion by using micrometer units, and the unit price of the parts becomes cheap, and can be - 23- 200936294 At the same time mass production of similar items. Since the longitudinal sliding height does not generate a distance from the transport driving height, no torque is generated during acceleration and deceleration, the pitch direction is not affected, the repeating precision and the lost motion are improved, and the sliding table on the longitudinal side does not Interfere with the guide rail on the longitudinal side. Since the lateral sliding position does not generate a distance from the transport driving position, no torque is generated during acceleration and deceleration, the deflection direction is not affected, the weight I repeat precision and the lost motion are better, and the lateral side slide table It does not interfere with the rails on the lateral side. It is not necessary to use a double-sided magnet and a high-priced, non-core linear motor, which is cheap because it uses a linear motor with a single-sided magnet. In addition, when it is compared with the "sliding device" described in the Japanese Patent Publication No. 7-4457, the problem of the hybrid type is that the article such as the fixed plate is used below, so that the processing of the characteristic is not required, and the horizontal direction is restricted. The guide rail is integrated, there is no need for precision machining, and it is not necessary to process the parallelism of the two sides corresponding to 5 // m or less q, because the flatness is only required, so the manufacturing cost of the guide rail is getting cheaper and cheaper. Or it can correspond to a long stroke (3 m or more), a long width (2m or more), etc. It is better to reduce the height with a single axis, which is lower due to the use of the upper plate. In addition, when assembled in XY, not only is it twice the height, but the height of the combination can be lower, which has practical advantages. Since the longitudinal sliding height does not have a distance from the transport driving height, no torque is generated during acceleration and deceleration, and the pitch direction is not affected. The weight -24 - 200936294 is better and the lost motion is better, and the longitudinal side is The sliding table does not interfere with the guide rails on the longitudinal side. Further, although the upper and lower directions are restrained by the balance between the electromagnetic attraction force and the air rebound, the deformation and the stress do not burden the slider, that is, there is no risk of loss of accuracy reproducibility, or the sliding table itself is broken. Further, since such a state does not occur, it is not necessary to increase the strength, so that the size can be reduced. [Embodiment] [Best Mode for Carrying Out the Invention] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. [Embodiment 1] Fig. 1 is a longitudinal sectional view showing a slide table according to an embodiment of the present invention.

於第1圖中，1爲定盤，2爲導軌，4爲滑塊，6爲空 氣噴出部，7爲線性馬達磁石部（固定部），7a (第1圖 )爲磁鐵，8爲線性馬達線圈部（附可動部核心或附鐵軛 )，9 (第1圖）爲直線比例尺部（9H爲直線比例尺頭部 、9S爲直線比例尺（刻度部））。 比較實施例1 (第1圖）的導軌2與公知例（第52 圖）的導軌2’的話，由於公知例（第52圖）的導軌2’是 很複雜的形狀，因此對照欲做出平坦度之較高的精 度，就只能盡量製作出1 m等級長的長條物（因而限制了 半導體製造裝置的用途），因爲實施例1的導軌2是很簡 -25- 200936294 單的形狀，所以能涉及6 m〜7 m長的物品，得到高精度的 長條物（因而，可適用於大型的液晶面板之製造裝置）。 是一種只要將兩根由長棒製成的導軌2、2以互相平行的 方式利用螺釘31固定在定盤1之上的簡單構造。 因爲定盤1的面原本就進行拋光加工所以成爲平滑面 ，因形成與導軌2’之U字形的腳部上面同一程度的平面 度（平滑面），所以使用定盤1的面沒有問題。 定盤1之上方與兩列導軌2、2之間的空間設置有滑 塊4。該滑塊4對行進方向以直角的剖面觀看形成上下相 反的U字形，在該倒U字形的開口內配備線性馬達線圈 部8。線性馬達磁石部7與線性馬達線圈部8係互相隔著 空隙面對面配置，利用線性馬達線圏部8之內部（圖未示 )的鐵心（core )在線性馬達磁石部7與線性馬達線圏部 8之間產生電磁吸引力。 在構成滑塊4之倒U字形的兩側壁4s、4s，係設有 向下麵噴出空氣的下麵空氣噴出部6u、和向著橫向的外 側對滑塊4的外側噴出空氣的橫面空氣噴出部6s的空氣 管6。 從下麵空氣噴出部6u向下麵噴出的空氣碰觸到定盤 1 ’藉此在滑塊4產生浮上力。滑塊4係利用線性馬達磁 石部7與線性馬達線圈8間的電磁吸引力以及重力和前述 浮上力，在取得平衡的位置浮起來。在實施例i中，自定 盤面起5/zm〜1〇數的距離成爲浮上面。 又’從橫面空氣噴出部6s朝橫面之外側噴出的空氣 -26- 200936294 碰觸到兩側的導軌2，其結果會在中央保持平衡。 又，利用從側壁朝橫向外周噴出的空氣的壓力，作用 從導軌2朝內側推壓側壁的力。與第5 3圖所說明之情形 同樣地利用電磁吸引力而產生讓滑塊的側壁打開到外側的 力，但如上述，由於從橫面空氣噴出部被噴出的空氣的壓 力，會造成讓側壁返回內側的力，因此調整壓力具有減低 側壁變形的效果。 赢 在不調整空氣壓力的情形下，如後述的第4圖（a) ❸ 所示，只要在滑塊4的U字形的開口部的側壁附加補強 肋的部分即可。 又，如後述的第4圖（b )，在滑塊4的側壁保留補 強肋6r的部分，來加工開口部6k的話，縱使增加了因電 磁吸引力而朝外打開側壁的力，依然具有因補強肋6r而 抑制側壁變形（如第5 3圖的變形）的效果。 又，在線性馬達磁石部7及線性馬達線圈部8間產生 φ 驅動力，利用該驅動力讓滑塊4在移行方向驅動。線性馬 _ 達線圈部8的下端形成驅動面。 又，因爲只能降低導軌2’（第52圖）之U字形的上 下方向的厚度量D長度，所以有助於小型化。 進而，實施例1的導軌2只要固定長棒即可，因而每 當製作時，只要正確做出面對定盤1與滑塊4之面的直角 度，就能省略做出第52圖之導軌2’的U字形之精度的加 工，所以加工變容易。 又’擴大設計實施例1的導軌2之寬度的話，由於能 -27- 200936294 利用從滑塊側壁之橫面空氣噴出部噴出的空氣之壓力減少 導件變形的量，因此能解決習知技術（第52圖）的問題 點5。 因而，形成導軌2能涉及6m〜7m物體長度’獲得高 精度的長狀物，就能適用於大型的液晶面板的製造裝置。 因爲利用導軌來約束滑塊之橫向的位置’且利用定盤 來約束滑塊之縱向的位置，所以具有能單獨調整橫向移行 的精度與縱向移行的精度之效果。 〇 〔實施例2〕 第2圖及第3圖是說明有關本發明之實施例2的滑動 台之圖，第2圖係於第3圖之B-B剖面箭頭方向觀看滑動 台的橫剖面的圖，第3圖係於第2圖之A-A剖面箭頭方 向觀看滑動台的縱剖面的圖。 於第2圖及第3圖中，有關與第1圖相同的符號省略 ❹說明。 在實施例2的定盤1挖設長溝la (第3圖），在該 長溝la內舖設上在上部具備磁鐵7a的線性馬達磁石部7 。此時，磁鐵7a的上面形成與定盤1之表面大致同一平 面。因爲定盤1的面原本就進行拋光加工所以爲平滑面， 因形成與導軌2’之U字形的腳部上面同一程度的平面度 (平滑面），所以使用定盤1的面沒有問題。 又，兩根導軌2、2是固定成互相隔著長溝la而平行 -28- 200936294 又’擴大設計導軌2之寬度的話，由於能利用從滑塊 側壁之橫面空氣噴出部噴出的空氣之壓力減少導件變形的 量，因此能解決習知技術（第52圖）的問題點5。 定盤1之上方與兩列導軌2、2之間的空間設置有滑 塊4。該滑塊4對行進方向以直角的剖面觀看形成上下相 : 反的U字形，在該倒U字形的開口內配備線性馬達線圈 部8。線性馬達磁石部7與線性馬達線圈部8係互相隔著 ^ 空隙面對面配置，利用線性馬達線圏部8之內部（圖未示 ❹ )的鐵心（core )在線性馬達磁石部7與線性馬達線圈部 8之間產生電磁吸引力。 又，在滑塊4與實施例1相同在側壁保留補強肋6r 的部分，來加工開口部6k的話，縱使增加了因電磁吸引 力而朝外打開側壁的力，依然可獲得因補強肋6r而抑制 側壁變形（如第5 3圖的變形）的效果。 如此一來，在實施例2，因爲線性馬達的驅動面（線 φ 性馬達線圈8的下端）與滑動台的浮上（滑動）面（自定 盤面起數10ym上）略爲一致’所以沒有偏位距離’不 會在第52圖的滑動台所發生的滑塊4’與導軌2’的接觸。 •T. 在此，有關偏位距離不變的話，滑塊與導軌就不接觸 的理由，依據本申請人瞭解的理由做說明。 回到公知例的第52圖。在第52圖以距離t所示的是 滑塊4,的驅動面之L1與滑塊4,的滑動面之L2之間的偏 位距離。由於該距離t越增加，在加速、減速時以滑塊4’ 的上部支撐的狀態（浮上）下，在滑塊4,的下部往前加 -29- 200936294 速（或減速）的扭力越增加，因此滑塊4’的行進方向前 端與後端於上下方向大幅擺動（俯仰（pitching))，其 結果發生滑塊4’的行進方向前@與後端接觸到導軌2’上 部等之虞。可是，因此該距離t爲零（第3圖）的話，滑 塊4的驅動面與浮上（滑動）面一致，所以在加上滑塊4 的加速（或減速）的力的面內浮上、滑動、移動，滑塊4 的行進方向前端與後端就不會在上下方向擺動，其結果就 ^ 沒有滑塊4的行進方向前端和後端與定盤1接觸等之虞。 如此一來，由於具有在第52圖所示的偏位距離t，在 縱向的滑動高度與運送驅動高度會有距離，因此在加速、 減速時產生扭力，俯仰方向受影響，處於重複精度和無效 運動變差的情況，或者在急速的加速、減速時也會發生縱 向側的滑塊幹擾、接觸到縱向側之導軌等的事故。因而相 反的，爲了不引起幹擾、接觸事故，就不能急速的加速、 減速控制，雖具有形成不能急速的加速、減速控制的滑動 φ 台之缺點，但該些缺點能經由實施例2解決。因而藉由實 . 施例2的話，縱使增大加速、減速依然沒有滑動塊與滑動 面摩擦之虞，完成耐高加速、減速的滑動台。 又，因爲挖溝構造，電磁吸引力的應力不會直接影響 到滑塊4，所以滑塊本體並未變形，精度的穩定性和再現 性也很良好。 〔實施例3〕 第4圖是說明有關本發明之實施例3的滑塊的圖，第 -30- 200936294 4圖（a)是其槪念立體圖，（b)是上下慢慢返回滑塊的 立體圖。第5圖是第4圖（a)的滑塊圖之C-C箭頭剖面 圖。 由於習知的滑塊4’是應用於第52圖之滑動台的滑塊 ’爲跨置在導軌2’之上前進的型式，因此構造上滑塊4’ 之兩腳部4’、4’的行進方向的前端以及後端彼此無法閉合 ’形成開口。因而利用空氣噴出的反彈力FI、F2朝箭頭 0 方向作用於滑塊4’的話，如第53圖，產生使滑塊4’之兩 側的腳部4k、4k朝外側打開的力，張開來。防止這個需 要增加壁厚，反而與小型化、低成本化、輕量化的需求背 道而馳。 又，如第5 3圖，電磁吸引力朝箭頭方向F3作用的話 ’滑塊4’之上部的厚度不足的話，如第53圖變成朝下側 凹陷。防止這個同樣需要增加壁厚，與小型化、低成本化 、輕量化的需求背道而馳。 φ 對此’由於第4圖（a)的滑塊4，係利用第2圖及 • 第3圖的滑塊，進入到兩根導軌2之間的型式，因此滑塊 4不必跨置在導軌2之上，因而滑塊4只要在中央部挖出 僅收納線性馬達線圈部8的直方體部分即可，就能如以斜 線4X所示地設置連繫兩腳部且將行進方向之前端的左右 兩腳部彼此連結的連結部分、將同一行進方向之後端的左 右兩腳部彼此連結的連結部分，藉此，因此縱使箭頭方向 的電磁吸引力作用於滑塊4，依然能藉由行進方向之前端 的連結部分及後端的連結部分，阻止兩側的腳部張開，所 -31 - 200936294 以如第5圖滑塊4之兩側的腳部不會彎曲。 第4圖（b)是上下慢慢返回滑塊的圖。圖中’爲朝 上取出線性馬達的線圈部8的狀態’在側壁保持補強肋 6r的部分，來加工開口部6k。縱使加上利用電磁吸引力 將側壁往外張開的力，依然具有抑制側壁變形（如第5 3 圖的變形）的效果。 又，安裝相同大小的線性馬達線圈8，由於第52圖 之滑塊4’跨置在導軌2之上因此變大型，雖然因此也需 要較多材料，但因爲第2圖的滑塊4並未跨置在導軌所以 變小型，因此材料也少，因爲將其餘之材料的一部分充當 增加滑塊4之上部的厚度，縱使電磁吸引力朝箭頭方向 F3作用，滑塊4之上部的厚度依然很充分，所以如第5 圖所示，並沒有大量朝下側凹陷的情形。 〔實施例4〕 第6圖是有關實施例4的滑動台之剖面圖。 第6圖與實施例2(第3圖）不同的是滑塊的形狀。 雖然第6圖的滑塊41是與第3圖的滑塊4相同做倒u字 形’但不同的是對第3圖之滑塊4的倒u字形的角係內 側或外側都是直角而言’第6圖的滑塊41的u字形的角 係內側或外側都是避免應力的圓角（R)形狀。像這樣在 角部的內側與外側施行圓角，應力不會集中在角部，所以 應力增強，滑塊41的角部更難破裂。 -32- 200936294 〔實施例5〕 第7圖是有關實施例5的滑動台之剖面圖。 由於有關實施例2(第3圖）的滑勢台，係爲僅將長 棒的導軌2以兩根螺釘固定在定盤1之上的兩側之構造， 雖然簡單地就能對應寬幅、大面積的需求，但實施例5也 能對應大面積之滑動的需求。第7圖的滑動台是配合此需 求，在中央設置線性馬達（線性馬達磁石部7與線性馬達 線圈部8)，在兩側設置導軌2、2，爲了增加浮上力，將 複數個空氣噴出口 61、62設置在滑塊42的U字形兩端 下面，簡單地就能實現寬幅、大面積的滑動台。 因爲與第3圖相同的符號爲相同機能的構件，所以說 明省說明。 〔實施例6〕 第8圖是有關實施例6的滑動台之剖面圖。 藉由實施例5(第7圖）的話，雖然能簡單地製作幅 度寬、深度也長的滑動台，但驅動力比實施例5之滑動台 倍增的是有關實施例6的滑動台。有關實施例6的滑動台 ，如第8圖，設置複數個線性馬達5 1、52，就能製作任 意之驅動力的滑動台。 於第8圖中，將兩個線性馬達51、52設置在滑塊43 與定盤1的兩側，藉此驅動力就能增加兩倍。 進而，在如實施例5 (第7圖）的中央利用一台線性 馬達之驅動的話，雖然對行進方向而言易於朝左右廻旋（ -33- 200936294 偏向）’但由於互相隔著間隔設置兩台線性馬達，且兩側 的直線比例尺’例如安裝在導軌2、2的側面部或上面’ 就能兩側驅動’所以對偏向方向增強，進行利用兩側的線 性馬達、直線比例尺的同步控制’就能更加提昇偏向、水 平真直度的精度’通常3秒、3//m的就能達到1秒以下 、1 // m以下。 〔實施例7〕 ❹ 第9圖是有關實施例7的滑動台之剖面圖。 討論到第9圖之滑動台的話’組合第3圖的滑動台與 第8圖的滑動台，就能得到增強驅動力的滑動台。而且效 果不僅於此’可得到預期的效果。亦即，依據實施例7, 就能克服第3圖的滑動台與第8圖的滑動台之各自具有的 弱點。 雖然第3圖的滑動台具有的弱點是偏向，但如第8圖 0 利用兩線性馬達驅動就能解決弱點。 • 又，雖然第8圖的兩線性馬達驅動具有的弱點是不正 常止的情形下’對兩線性馬達施以制動，但因爲兩線性馬 達的制動之效能實際上難以完全相同，所以兩線性馬達的 制動之效能不同的情形下，滑塊會左右震動。雖然其理由 是因爲不正常停止馬達的情形下’通常施以動力煞車（ dynamic brake )’但因動力煞車只是讓馬達繞線產生阻力 、短路’所以引起每個馬達之阻力的誤差，在停止馬達的 時間出現誤差。 -34- 200936294 可是，在第9圖的滑動台增加不正常停止的情形下， 兩側的線性馬達成爲空轉（Free run )(因馬達移轉時的 摩擦阻力的自然停止）狀態’只對中央的線性馬達施以動 力煞車的話，因爲施加煞車的是中央部，所以滑塊44會 不朝左右震動的停止。 : 又，也能設置超過三個的線性馬達，藉此就能產生必 要的大推力。 〔實施例8〕 第10圖〜第12圖是說明有關實施例8的滑動台的圖 ，第10圖是滑動台的剖面圖，第11圖是有關實施例8之 滑塊的槪念立體圖，第12圖是第11圖之滑塊的B-B剖面 端視圖。 於第10圖〜第12圖中，雖然有關實施例8的滑塊 45，原理上是與實施例2(第3圖）之滑動台的滑塊4同 φ 樣的構造，但是完全去掉放入第3圖的滑塊4的線性馬達 _ 線圈部8之部分的上部的厚壁部位，只保留收納空氣噴出 部6之兩腳部的構造是有關實施例8之滑塊45的特徵。 而且，在左右的兩滑塊45、45的上部設置以金屬板（鋼 、不鏽鋼等）製成的連結基板10，且於此設置線性馬達 線圏部8。 進而，因爲保有連結基板10爲金屬板的優勢’能將 冷卻媒體用孔1 1簡單地形成在連結基板1 0的內部’所以 由於藉此能利用冷卻媒體用孔1 1除去來自線圈的熱能’ -35- 200936294 因此能完全阻斷對上部的熱影響。 如此一來，因爲縱使第12圖所示的電磁吸引力作用 於金屬板10，金屬板1〇彎曲依然很強’所以縱贫金屬板 10如圖般僅中央部彎曲變形依然沒有破裂（對此’第5 圖之石製滑塊4的中央部彎曲梢微減弱，因此稍微增厚， : 如已述）。又，由於電磁吸引力的影響只作用於上面的連 結基板，因此只對滑塊45(石製）施加壓縮方向的力， 因爲石材壓縮強，所以石材未變形，精度的穩定性和再現 Ό 性也很良好。 如此一來，採用以金屬板製成的連結基板1 0，不僅 達到精度提昇，滑動台高度也沒有第3圖之滑塊4上部厚 壁部位的部份，就能變得更低。亦即，因爲連結基板10 爲金屬板’所以並不需要在第5圖所需要之石製滑塊4的 厚度，能更加降低滑動台的高度，在本實施例中，自定盤 起的高度爲50mm。亦即，第3圖的滑動台，自定盤起的 φ 高度爲70mm。對此，習知例的第52圖的滑動台也達到 1 00mm 〇 又’對連結基板10的冷卻媒體用孔11流入水或空氣 ，來冷卻線性馬達線圈部8的發熱，就能同時阻斷對其他 部分的熱傳導。 〔實施例9〕 第13圖是有關實施例9的滑動台之3面圖。 有關實施例9的滑動台的構造，係在有關實施例6的 -36- 200936294 雙驅動的滑動台（第8圖）之上放置實施例8(第10圖 )的金屬板滑動台，構成可於X-Y方向移動的XY滑動台 0 於圖中’ 1爲定盤，6爲空氣噴出部，10爲連結基板 ’ 12爲Y軸導軌’ 13爲Y軸滑塊，14爲Y軸線性馬達 磁石部（固定部），15爲Y軸線性馬達線圈部，16爲Y 軸直線比例尺’ 17爲X軸導軌，18爲X軸滑塊，19爲X 軸線性馬達磁石部（固定部），20爲X軸線性馬達線圈 部，21爲X軸直線比例尺，31爲固定螺釘。 在該實施例9，不單是在實施例6的滑動台之上重疊 實施例8的滑動台，還共用實施例6的滑動台的滑塊43 (第8圖）與實施例8的滑動台的定盤1(第1〇圖）， 並在實施例6的滑動台的滑塊43之上部挖掘溝而重疊的 爲特徵，如此一來，就可得到能將長度降至比重疊的高度 還低的XY滑動台。 再者’在第13圖中，X軸或Y軸的導軌，如第46圖 (後述）般安裝使用固定螺釘的位置限制螺栓37a，就能 減低導件的應變，提高X軸或Y軸的移行精度。 Y軸滑塊1 3與實施例1相同在側壁保留補強肋6r的 部分，來加工開口部6k的話，縱使增加了因電磁吸引力 而朝外打開側壁的力，依然可獲得因補強肋6r而抑制側 壁變形（如第53圖的變形）的效果。 X軸滑塊18也是使用能實現實施例1者，其情形與 實施例1相同，在側壁保留補強肋6r之部分的話，就會 -37- 200936294 抑制側壁變形。 〔實施例1 〇〕 第14圖是有關實施例10的滑動台之3面圖。 有關實施例10的滑動台的構造，係在有關實施例6 的雙驅動的滑動台（第8圖）之上放置實施例8(第1〇 圖）的金屬板滑動台，再加上實施例6之雙驅動之特徵的 發明。 如此一來，與實施例9相同，高度減低，且因爲使得 有關X軸及Y軸同時雙驅動，所以在兩側提高移動精度 ’就能讓橫向的移動精度（偏向、水平真直度）變佳，因 此X軸及Y軸目旨同時闻精度的移動。 再者’在第14圖中，X軸或Y軸的導軌，如第46圖 (後述）般安裝使用固定螺釘的位置限制螺栓3 7a，就能 減低導件的應變，提高X軸或Y軸的移行精度。 〔實施例1 1〕 第15圖是有關實施例11的滑動台之縱剖面圖。 於圖中’ 1爲定盤，40爲導軌，4爲滑塊，6爲空噴 出部’ 8爲線性馬達線圏部，9爲直線比例尺部，9 B爲安 裝基板，9H爲直線比例尺頭，9S爲直線比例尺（刻度部 )。22爲用來安裝玻璃製直線比例尺的安裝基板，23爲 空間基板，24爲上基板，25爲限制感測器，26爲電纜支 架，3 1爲固定螺釘。 -38- 200936294 驅動部分基本上是與實施例2(第3圖）同樣的構造 ，不同的是位置檢測裝置（直線比例尺）的配置位置。於 實施例2中，當滑塊4朝行進方向左右震動（偏向的）時&gt; ，雖然在位置檢測裝置（直線比例尺）的輸出產生誤差， 但其原因是將直線比例尺9安裝在滑塊4之一側面。亦即 ，因爲當滑塊4朝行進方向左右震動（偏向的）時，由於 位置檢測裝置與滑塊的位置不一致，因此產生檢測誤差， 所以在實施例1 1，將位置檢測裝置（直線比例尺）9配置 在滑塊4的中央，藉此解決該誤差。具體的配置構造，爲 了確保將直線比例尺9配置在滑塊4之中央的空間，在滑 塊4之上將兩根空間基板23、23固定在自中央部互相分 開的位置，在此上面安裝上基板24。 又，直線比例尺安裝基板22，係在能成爲滑塊4與 兩根空間基板23和上基板24之間的中央空間內配置直線 比例尺。 第16圖是實施例11之直線比例尺部9附近的部分剖 面立體圖。 如第16圖所示，用來安裝直線比例尺（刻度部）9S 的直線比例尺安裝基板22，係具有長及滑塊4之移動範 圍的行進方向之兩端部的長度的長條狀的棒狀體，該直線 比例尺安裝基板22，係貫通可在滑塊4與兩根空間基板 23和上基板24之間的中央空間內，固定於立設在行進方 向之兩端部的安裝構件22H之上。而且，直線比例尺（ 刻度部）9S是利用雙面膠帶或接著劑、螺釘等固定在直 -39- 200936294 線比例尺安裝基板22的下面。如此一來，縱使滑塊4在 移動範圍縱橫地移動，直線比例尺（刻度部）9S依然以 非接觸滑塊4狀態不動。 一方面，爲了讀出該直線比例尺9S的刻度，直線比 例尺頭9H在頭安裝基板9B的正上方，靠近直線比例尺 : 9S的下方利用螺釘固定。如此一來，滑塊4在移動範圍 縱橫地移動的話，因爲直線比例尺頭9H也與滑塊4 一起 叙 移動，所以直線比例尺頭9H就能讀出不動的直線比例尺 〇 9 S的刻度。像這樣，因爲在將檢測頭9H相對於測定物的 滑塊4配置在未偏移的同一軸線上，所以縱使滑塊4引起 偏向，由於中央部依然未受到偏向的影響，因此測定精度 提昇（阿貝原理）。藉由實施例1 1的話，因爲完成考慮 到阿貝原理的位置檢測裝置，所以因滑動台之姿勢誤差的 定位精度及重複定位精度最優。又，因爲由於直線比例尺 9H至上基板24的距離很近，因此俯仰方向的誤差也少， Q 所以測定精度也會提昇。 .再者，雖然用來防止越程（over travel )等的限制開 關25，以往是突出設置在裝置的橫側，但在實施例1 1中 ，因爲能有效利用結果上所產生的滑塊4與空間基板23 之外側與上基板24之間的空間而安裝於此，所以未突出 於裝置的外部，就沒有破損等之虞。 如此一來，縱使滑塊4在移動範圍縱橫地移動，直線 比例尺（刻度部）9S依然以非接觸滑塊4狀態不動。 進而，因爲直線比例尺（刻度部）9 S被固定在直線 -40- 200936294 比例尺安裝基板22的下面，所以直線比例尺安裝基板22 作爲蓋體之功能的緣故，從上降落到直線比例尺（刻度部 )9S的灰、塵埃、垃圾等變得難以附著。 〔實施例1 2〕 第17圖是有關實施例12的滑動台之縱剖面圖。 於圖中’ 22’是供安裝玻璃製直線比例尺的安裝基板 赢 ’其他的與第15圖相同。有關實施例12的滑動台與有關 ❹ 實施例11的滑動台不同的爲一點，是供安裝玻璃製直線 比例尺的安裝基板22’的形狀。因爲直線比例尺安裝基板 22 (第15圖）係細長的長條狀且向下方安裝，所以將受 到重力的影響而容易變形的，利用直線比例尺安裝基板 22，從寬幅方向兩端朝下方形成突出部，形成斷面u字 形，所以對變形而言變強。 又，雖然基本上是與上述實施例12同樣的構造，但 φ 定盤1縮小成爲小型，整合成模組。 .進而，因爲直線比例尺（刻度部）9S係用直線比例 尺安裝基板22’覆蓋，所以從上降落的灰、塵埃、垃圾等 更難以附著在直線比例尺（刻度部）9S。又，因爲比例尺 頭9H亦在直線比例尺安裝基板22’之下移行，所以灰、 塵埃、垃圾等也難以附著在比例尺頭9H。 〔實施例1 3〕 第18圖是有關實施例13的滑動台之3面圖。該滑動 -41 - 200936294 台，係有關滑塊部分是與第14圖的實施例10相同，不 點在於將平面二次直線比例尺27配置在下部之點。如 18圖，雙驅動因爲擴大幅度，加長深度，完成XY滑動 構造，所以可在中央之空白的空間設置平面二次元直線 例尺27。於是，實施例5的XY滑動台的構造，在中央 : 白的空間（定盤1的面）配置可在平面XY方向檢測的 面二次元直線比例尺27，一方面，在Y軸滑塊13設置 ^ 陷1 3 Η，並以在該凹陷1 3 Η內插入平面二次元直線比例 頭29的狀態，安裝在X軸滑塊18的下方。 第1 9圖是應用於實施例1 3的平面ΧΥ直線比例尺 俯視圖。於圖中，27爲平面二次元直線比例尺，28是 持平面二次元直線比例尺27的平面二次元直線比例尺 璃，29是讀取平面二次元直線比例尺27的平面二次元 線比例尺頭。 於是，使X軸滑塊18於X方向移動的話，平面二 φ 元直線比例尺頭29會在控空13Η內移動，於X方向讀 平面二次元直線比例尺2 7。又，使Υ軸滑塊1 3在圖面 上下方向移動的話，因爲X軸滑塊18也會移動，所以 安裝在X軸滑塊18之下方的平面二次元直線比例尺頭 也於上下方向移動，藉此於 Υ方向讀取平面二次元直 比例尺27。此結果，變成平面二次元直線比例尺頭29 於ΧΥ方向讀取平面二次元直線比例尺27。 〔實施例1 4〕 同 第 台 比 空 平 凹 尺 的 担 玻 直 次 取 於 被 28 線 可 -42- 200936294 第20圖是有關實施例14的平面XY直線比例尺的俯 視圖。市售的平面ΧΥ直線比尺的有效行程（stroke )， 如第19圖所示，由於爲68mm平方’因此欲檢測更寬範 圍的情形，如實施例14(第20圖）般，平面二次元直線 比例尺27爲複數片（圖爲四片），於上下左右方向互相 隔著預定間隔t配置。 一方面，爲了讀出隔著間隔t平面排列的複數片平面 A 二次元直線比例尺2 7，在正方形的對角線方向傾斜排列 ❹ 兩個平面二次元直線比例尺頭29，配置形成可切換該兩 者進行位置檢測而成的平面二次元直線比例尺頭29的比 例尺頭3 0。該平面二次元直線比例尺2 9的比例尺頭3 0， 可在第20圖中以正方形30R所示的範圍內移動。而且， 預定間隔t，係形成稍微比鄰接的平面二次元直線比例尺 27、27的端部彼此傾斜地兩個排列在前述對角線方向的 平面二次元直線比例尺頭29、29間之X方向、Y方向的 φ 間隔還短，當平面二次元直線比例尺頭29、29由平面二 .次元直線比例尺27往相鄰的平面二次元直線比例尺27移 動時，平面二次元直線比例尺頭29、29必定會重疊（ overlap ) 〇 藉由像這樣，平面二次元直線比例尺頭29的比例尺 頭30在正方形30R內移動的話，兩個平面二次元直線比 例尺頭29、29之中必定有一個頭會讀出平面二次元直線 比例尺28’於是只要正常切換到正常讀出平面二次元直 線比例尺2 8的比例尺頭這方即可。正常切換到兩個平面 -43- 200936294 二次元直線比例尺頭2 9、2 9之中進行正常檢測的比例尺 頭’將利用一次元方向配置的兩個直線比例尺頭的公知切 換技術，各自應用於X方向、Y方向就能簡單地實現。再 者’因爲公知的切換技術例如記載於日本特開2005-3 08592號公報，所以使用此技術即可。 〔實施例1 5〕 ❹ 第21圖是有關實施例15的滑動台之剖面圖。 於圖中，在下部爲定盤1，將導軌2兩根共同螺固在 兩側，其間有滑塊4。在定盤1的上面及兩側的導軌2之 內面，藉由實施例15貼合著接觸導軌32，在其相對之面 的滑動面，同樣藉由實施例15設置著接觸滑塊33。因爲 其他的構造與實施例4(第6圖）相同，所以說明省略。 因爲應用於實施例2〜13的滑塊4是石材或陶瓷製， 所以與導軌2接觸的話，有產生粉塵之虞。於是爲了不產 φ 生粉塵，在實施例2〜13，互相自定盤1的上面及兩側的 胃導軌2起離開5/zm左右。 然而，滑塊4從上面浮上的話，會在上下方向及移動 方向產生微振動。 在第48圖〜第50圖的習知裝置中，通常空氣軸承是 利用往上方向的氣壓與往下方向的氣壓產生平衡而浮上， 並且雖然在第52圖之習知裝置及本發明之滑動台，利用 電磁吸引力與氣壓產生平衡而浮上，但實際上會因氣壓的 脈動產生約〜0·3μιη左右的上下振動。因此，滑 -44 - 200936294 動台本體也會不小心地在上下方向振動。 可是，可藉由實施例15現實浮上量零（因爲以顯微 鏡觀看的話，表面產生凹凸，所以凸與凸接觸，除此之外 的部分係以空氣浮上的狀態），微妙地接觸，藉此變成不 會上下微振動。 又，縱使有關移動方向發生接觸，依然具有抑制以往 20〜30 nm之振動的效果。 接觸導軌32是張貼碳纖維等之低摩擦係數且堅固的 材質物品，接觸滑塊33是張貼薄的石英、瑪瑙等之相同 的低摩擦係數且堅固的材質物品，使其「微妙地接觸」是 假設碳纖維的表面爲絨毛狀，且在瑪瑙接觸或不接觸包含 在該絨毛間之空氣層的狀態下，接觸滑塊33沿著接觸導 軌32移動。 以上，藉由本發明的話，就能確實以簡單的構造完全 解決公知之滑動台具有的4個問題。 (1) 滑塊易變形，具有損害精度的再現性，又有破 壞滑動台本身的危險性。 (2) 幅度方向剖面爲U字形的導軌由於提高加工精 度（加工至誤差5&quot;m左右），因此需要時間和成本。 (3) 在急速的加速、減速時，會發生滑塊干擾、接 觸到導軌等的事故。因而爲了不引起干擾、接觸事故，形 成不會急速的加速、減速控制的滑動台。 (4 )檢測位置檢測裝置（直線比例尺）之訊號的定 位精度、重複精度差。 -45- 200936294 〔實施例1 6〕 第22圖是有關本發明之實施例16的滑動台的縱剖面 圖，第23圖是有關本發明之實施例16的滑動台的變形例 的縱剖面圖，第24圖是第22圖之滑動台的3面圖，（a : )爲俯視圖，（b )爲側視圖，（c )爲前視圖。 於第22圖及第24圖中，35爲製罐架台，36爲位準 ^ 調整螺栓，37爲位置限制螺栓，34爲定盤軌，4爲滑塊 〇 ，6s爲橫面空氣噴出部，6u爲下面空氣噴出部，7爲線 性馬達磁石部（固定部），8爲線性馬達線圈部（可動部 )，9爲直線比例尺部，24爲上基板，26爲電纜支架。 定盤軌34的材料，是尺寸變化少、接觸時不會發生返回 的黑花崗石或陶瓷材、碳纖維等，一般驅動部及導件的構 造與實施例1同樣。 又’在滑塊4與實施例1相同在側壁保留補強肋6r Q 的部分’來加工開口部6k的話，縱使增加了因電磁吸引 .力而朝外打開側壁的力，依然可獲得因補強肋6r而抑制 側壁變形（如第5 3圖的變形）的效果。 在定盤軌上方的導件部分的外側的缺口部分，安裝直 線比例尺部9，且將直線比例尺的頭部利用滑塊4的側面 與頭安裝台9k結合（第22圖）。因此，具有將直線比例 尺收納到定盤軌34的橫幅內的效果。 又’在定盤軌34之導件部分的上面，可在與上基板 24的下面之間的空間，安裝帶式的直線比例尺9aS (第 -46- 200936294 23圖）。在定盤軌34的導件部分的上面安裝直線比例尺 部的帶式比例尺9aS (第23圖），在上基板的下面利用 頭安裝零件9k，安裝直線比例尺的頭9aH (第23圖）。 由於直線比例尺部的頭9aH與滑塊4之上面的高度比 直線比例尺9的情形短，因此具有俯仰方向的測定精度提 : 高（阿貝的原理）的效果。 實施例16(第22圖、第24圖）的定盤軌34，係一 ^ 體化組合實施例1的定盤1與導軌2的構造，在定盤34 ❹ 的下面配置位準調整螺栓3 6與在側面配置位置限制螺栓 3 7，變得特別長，比較實施例16與公知例（第5 2圖）的 話，因爲只在公知例（第52圖）之呈U字形的導軌部的 構造之情形下，將此設置在裝置等的情形下導軌就那樣使 用加工精度，所以只能儘量製作到lm等線的長度，其設 置場所也只能使用設置在上面平面度爲l〇//m以下的石 定盤等之上（固定在平面度不佳的面的話，本體彎曲成爲 0 不能使用物品的狀態。因而，與液晶用途相比，限定小行 程之半導體製造裝置的用途）。 對此，在將實施例16的定盤與導軌一體成型的定盤 軌34的下面配置位準調整螺栓36與在側面配置位置限制 螺栓37的本發明，由於將定盤與導軌一體化，因此與公 知例（第52圖）相比，導件的變形少。又，對因自重及 負荷荷重引起的縱向之彎曲等，來調整設置在下面的位準 調整螺栓36，藉此，縱使下面不是呈現平面度的石定盤 等、未呈現精度的製罐架台35等的情形下，依然能設置 -47- 200936294 滑動台，移行的真直度也能調整到3〜10/zm左右，同樣 地橫向的精度也利用位置限制螺栓3 7來調整定盤軌3 4， 移行的真直度也能調整到3〜10//m左右。 此爲藉由定盤與導軌一體化的效果。因爲形成一體， 所以利用螺栓來微調整定盤的話，導件部分也會變化。 '又，可在線性馬達線圈部的上面部分（與磁石面相反 方向）隔著冷卻板81安裝在滑塊（第23圖）。在冷卻板 ^ 81開孔，水冷或空冷也就很容易實現。 ❹ 藉由以上，縱使成爲基準的下部，製罐架台等之精度 不佳的情形下，1 〇m以上的長度者依然能進行高精度的運 送定位。 而且，實施例16(第22圖），相對於在公知例（第 52圖）爲驅動動力發生位置的線性馬達磁石部7與線性 馬達線圈部8之間和滑塊4的移行引導面產生偏移距離， 而使驅動動力發生位置的線性馬達磁石部7與線性馬達線 φ 圈部8之間和滑塊4的移行引導面一致，因爲偏移距離幾 .乎爲零，所以不會發明俯仰方向扭力，加減速時的俯仰誤 差變少，就能更快進行加減速，藉此就能高精度、高速運 送。 又，實施例1 6，由於也能進行如下的應用，因此能 充分應用於進行大型化之FPD (平面顯示器）用或太陽能 電池面板用的製造、檢查裝置，進行滑動台的標準化，也 可達成降低成本。 (1)如第25圖，將本實施例16的滑動台複數台平 -48- 200936294 行地排列在定盤1上，在上部設置工件（work )吸附基板 38，藉此就能進行大型FPD工件和太陽能電池面板的運 送。 (2)如第26圖，將本實施例16的滑動台複數台平 行地排列在製罐架台35上，進行位準調整的同時，在上 部設置工件吸附基板3 8，藉此就能進行大型FPD工件和 太陽能電池面板的運送。此種的構造在公知例（第52圖 ^ )無法實現。 ❹ 在公知例中，形成長行程的話，由於呈U字形的導 件在應變的狀態下被固定在製罐架台，因此滑塊的移行精 度依然很差，以複數個滑塊來結合驅動工件吸附基板。各 滑塊之移行的誤差，是通過工件吸附基板，在各線性馬達 間相互作用，馬達動作產生異常。 在本發明中，因爲能利用位置限制螺栓與位準調整螺 栓來修正定盤軌的應變，提昇滑塊的移行精度，所以能減 φ 低滑塊間之移行的誤差，讓各線性馬達正常動作。 . (3)如第27圖，將本實施例16的滑動台，2式平 行地排列在定盤1上的兩端，在上部橫向或向下（第44 圖）設置同一本實施例16的滑動台，藉此就能構成對應 大型FPD工件之高架（gantry)構造的滑動台。 在本發明中，因爲空氣浮上力與產生平衡的馬達之電 磁吸引力比滑塊的荷重還要十分（例如10倍）的大，所 以縱使將滑動台向下安裝，依然不會有滑動掉落等的缺點 -49- 200936294 (4) 如第28圖，將本實施例16的滑動台，2式平 行地排列在製罐架台35上的兩端，進行位準調整，在上 部橫向或向下（第44圖）設置同一本實施例16的滑動台 ’藉此就能構成對應大型FPD工件和太陽能電池面板之 高架（gantry )構造的滑動台。此種的構造在公知例（第 52圖）無法實現。 (5) 依第29圖，於第28圖，設置複數個對應橫向 φ 設置同一本實施例16的滑動台的大型FPD工件和太陽能 電池面板的高架構造之可移動滑動台的滑塊4，就能同時 進行多項工作。 (6) 按照第30圖，因上部的荷重和發生推力的關係 產生不足的情形等，對上部的運送物施加平均的荷重時， 在行進方向之同一導軌2上，具有複數個線性馬達圈線部 (可動子）8以及滑塊4、上基板24，進行同步運轉，因 荷重和發生推力的關係產生不足的情形，就能進行欲對上 Q 部的運送物施加平均的荷重時之對應。此種的構造在公知 . 例（第52圖）無法實現。 再者，第24圖、第27圖、第28圖、第29圖、第 30圖的線性馬達線圈部（可動子）8和上基板24，實際 在圖面上隱藏，但表現本發明之特徵的關係上圖示。 〔實施例1 7〕 第3 1圖是有關本發明之實施例1 7的滑動台之縱剖面 圖。第32圖是有關本發明之實施例17的滑動台之3面圖 -50- 200936294 於第31圖及第32圖中，35爲製罐架台，4〇爲螺栓 固定式位準調整螺栓’ 39爲定盤軌，4爲滑塊，6s爲橫 面空氣噴出部，6u爲下面空氣噴出部，7爲線性馬達磁石 部（固定部），8爲線性馬達線圏部（可動部），9爲直 線比例尺部，26爲電纜支架。定盤軌39的材料，是尺寸 變化少、接觸時不會發生返回的黑花崗石或陶瓷材、碳纖 維等，一般驅動部的構造與實施例1同樣。 實施例17(第31圖 '第32圖）的定盤軌39,係在 定盤之上方的兩側面分別一體化組合實施例1 (第1圖） 所示的導軌的構造，定盤軌之上方的兩側面成爲引導面。 定盤軌39是對行進方向以直角的斷面觀看形成羅馬字的 「I」字形之形狀，由於增加兩側面的寬度方向與上下方 向的厚度’因此縱使是1 〇 m等級的長條物依然能將兩側 面之引導面間的平行度以5以m左右的精度進行硏磨加工 〇 而且與實施例1(第1圖）同樣地，在定盤軌39的 上面中央部分安裝線性馬達磁石部7(第33圖）。或者 ’與實施例2(第2圖、第3圖）同樣地，在定盤軌39 的上面中央部分具有設置線性馬達磁石部7的溝槽，可安 裝線性馬達磁石部7 (第3 4圖）。 滑塊4與實施例1(第1圖）和實施例2(第2圖、 第3圖）同樣地’對行進方向而言，以直角的斷面觀看形 成倒U字形’在該倒U字形的開口內具備線性馬達線圈 -51 - 200936294 部8 (第33圖、第34圖）。 又，在滑塊4與實施例1相同在側壁保留補強肋6r 的部分，來加工開口部6k的話，縱使增加了因電磁吸引 力而朝外打開側壁的力，依然可獲得因補強肋6r而抑制 側壁變形（如第53圖的變形）的效果。 滑塊4的橫幅比定盤軌3 9之引導部的橫幅寬，將橫 滑塊4a以螺栓分別螺固在兩側面的下部，緊密配置在定 盤軌39的上方。針對第31圖的滑塊4與橫滑塊一體，在 第33圖與第34圖中，以另一體來構成安裝橫滑塊4a。 滑塊4係利用從下面空氣噴出部6u (第31圖、第32 圖、第34圖）噴出空氣，與線性馬達磁石部7和線性馬 達線圈部8的電磁吸引的平衡而移行，以圍繞定盤軌3 9 之上側兩側面的形式，從橫滑塊4a的橫面空氣噴出部6s (第31圖、第32圖、第34圖）邊噴出空氣邊移行的構 造。 又，藉由從橫滑塊4a之橫面空氣噴出部6s噴出的空 氣，使力施加於將定盤軌3 9的上側兩側面從兩側往內側 壓線的方向。由圖（第31圖、第33圖、第34圖）即可 明白，定盤軌具有足夠的厚度，由於花崗石等對壓縮力而 言變形少，因此上側兩側面的引導面具有幾乎不變形的效 果。 此如上述成爲可將約束滑塊之橫向運動的導件構成在 定盤的上側兩側面。在第5 2的習知技術中，與本發明同 樣地，雖然往內側噴出橫出空氣，但由於U字形的導軌 -52- 200936294 具有朝內側變形的問題（問題5) ’因此想法本質上與本 發明相異。 — 實施例39(第22圖、第24圖）的定盤軌39，係— 體化組合實施例1的定盤1與導軌2的構造，在定盤34 的下面配置位準調整螺栓40與在側面配置位置限制螺栓 37，變得特別長，比較實施例17與公知例（第52圖）的 話，因爲公知例（第52圖）之呈U字形的導軌部的構造 ©之情形，將此設置在裝置等的情形下導軌就那樣使用加工 精度，所以只能儘量製作到1 m等線的長度，其設置場所 也只能使用設置在上面平面度爲以下的石定盤等 之上（固定在平面度不佳的面的話，本體彎曲成爲不能使 用物品的狀態。因而，與液晶用途相比，限定在小行程之 半導體製造裝置的用途）。 對此，因爲本發明如詳細圖的第43圖，實施例1 7的 定盤與導軌形成一體型，對行進方向以直角的斷面觀看形 φ 成^ I」字形的構造的定盤軌3 9，所以本體的剛性也很強 ，由於在下部配置螺栓固定式位準調整螺栓40與位準調 整螺栓36、在側面使用固定螺釘的位置限制螺栓37a，因 此對因自重及負荷荷重的縱向的彎曲等而言，爲高剛性。 進而，利用接著固定在定盤軌39的母螺紋套筒43 (第42 圖）來推拉調整設置在下部的公螺紋的螺栓固定式位準調 整螺栓40，在決定高度的時候，利用固定螺栓42 (第42 圖）固定至機材，藉此，縱使下面不是呈現平面度的石定 盤等、未呈現精度之製罐架台35等的情形下，依然能設 -53- 200936294 置滑動台，移行的真直度也可調整到3/zm〜10/zm左右 〇 同樣地，橫向的精度也以定盤軌39之下部的位置限 制螺栓37a來調整，可將移動的精度調整到3;/ιη〜10/zm 左右。 ·' 又，與第23圖所說明的同樣地，可在第31圖至第 34圖的線性馬達線圈部的上面部分（與磁石面相反方向 A )隔著冷卻板安裝在滑塊。在冷卻板開孔，水冷或空冷也 ❹ 就很容易實現。 藉由以上，縱使成爲基準的下部，製罐架台等之精度 不佳的情形下，1 以上的長度者依然能進行高精度的運 送定位。 再者，承載在滑塊4的負荷荷重太大，只用螺栓固定 式調整螺栓40 (第31圖），無法支撐的情形下，在製罐 架台35安裝位準調整螺栓36(第33圖、第34圖），將 φ 定盤軌的下部向上推，就能分擔施加於螺栓固定式位準調 . 整螺栓40的荷重，還能增加負荷荷重。 而且，實施例1 7 (第31圖），相對於在公知例（第 5 2圖）爲驅動動力發生位置的線性馬達磁石部7與線性 馬達線圈部8之間和滑塊4的移行引導面產生偏移距離， 而使驅動動力發生位置的線性馬達磁石部7與線性馬達線 圈部8之間和滑塊4的移行引導面一致，因爲偏移距離幾 乎爲零（第31圖、第33圖、第34圖），所以不會發明 俯仰方向扭力，加減速時的俯仰誤差變少，就能更快進行 -54- 200936294 加減速，藉此就能高精度、高速運送。 在橫滑塊4a (第33圖、第34圖）的上方，在面向 定盤軌39(第35圖）之面導面的橫滑塊4a的部位，製 造缺口空間，就能安裝帶式的直線比例尺9a。 ❹ ❿ 在此如側面圖的第3 5圖所示，在定盤軌3 9的引導面 上面安裝直線比例尺部的帶式比例尺9aS，在滑塊4a之 側面中央部的缺口部，以頭安裝零件來安裝直線比例尺的 頭 9aH。 由於直線比例尺部的頭9aH與滑塊4a之上面的高度 比直線比例尺9的情形短，因此具有俯仰方向的測定精度 提高（阿貝的原理）的效果（第33圖、第34圖）。 又，實施例17，由於也能進行如下的應用，因此能 充分應用於進行大型化之FPD用或太陽能電池面板用的 製造、檢査裝置，進行滑動台的標準化，也可達成降低成 本。 (1) 如第36圖，將本實施例17的滑動台複數台平 行地排列在定盤1上，在上部設置工件吸附基板3 8，藉 此就能進行大型FPD工件的運送。 (2) 如第37圖，將本實施例17的滑動台複數台平 行地排列在製罐架台3 5上，進行位準調整，藉此在上部 設置工件吸附基板3 8，藉此就能進行大型FPD工件和太 陽能電池面板的運送。此種的構造在公知例（第5 2圖） 無法實現。 在本發明中，因爲能利用位置限制螺栓與位準調整螺 -55- 200936294 栓來修正定盤軌的應變，提昇滑塊的移行精度，所以能減 低滑塊間之移行的誤差，讓各線性馬達正常動作。 (3) 如第38圖，將本實施例16的滑動台，2式平 行地排列在定盤1上的兩端，在上部橫向或向下（第44 圖）設置前實施例16的滑動台，藉此就能構成對應大型 FPD工件之高架（gantry )構造的滑動台。 Ο ❹ (4) 如第39圖，將本實施例17的滑動台，2式平 行地排列在製罐架台35上的兩端，在上部橫向或向下（ 第44圖）設置前實施例16的滑動台，藉此就能構成對應 大型FPD工件之高架（gantry)構造的滑動台。此種的構 造在公知例（第52圖）無法實現。 (5) 依第40圖，在上記（4)的第39圖的上部，設 置複數個對應橫向或向下（第44圖）設置同一本實施例 26的滑動台的大型FPD工件的高架構造的滑塊之可動的 滑塊4(在第40圖中，表示上基板24)，就能同時進行 多項工作。 (6) 如第41圖’本實施例17的滑動台的定盤軌39 爲橫向，其中央以支柱41來支撐，滑塊4爲橫向，設置 在兩側，哪一個滑塊4都能獨立動作，縱使是一根定盤軌 39也能兩面使用。又，在如上述（5)的複數個滑塊之情 形下，可配置其兩倍數的滑塊4。 (7) 與上述實施例16之（6)同樣地，按照第30圖 ，因上部的荷重和發生推力的關係產生不足的情形等，對 上部的運送物施加平均的荷重時，在行進方向之同一導軌 -56- 200936294 2上，具有複數個線性馬達圈線部（可動子）8以及滑塊 4、上基板24，進行同步運轉，因荷重和發生推力的關係 產生不足的情形，就能進行欲對上部的運送物施加平均的 荷重時之對應。此種的構造在公知例（第5 2圖）無法實 現。 _ 再者，第32圖、第38圖、第39圖、第40圖的線性 馬達線圈部（可動子）8，實際在圖面上隱藏，但表現本 I 發明之特徵的關係上圖示。 〇 〈定盤軌的上下方向調整機構〉 第42圖是有關形成能於上下方向調整定盤軌的本發 明之實施例17的滑動台之第31圖的A部的放大詳細圖 ’ （a)是表示使滑塊上昇的中途，（b)是表示使其上昇 到最大的狀態，（c )是表示使其固定的狀態。 於圖中’ 35是製罐架台，39是定盤軌，40是螺栓固 Q 定式位準調整螺栓，42是固定螺栓，43是連接固定在定 盤軌39的母螺紋套筒，44是螺孔。在定盤軌39的端部 下端的凸緣部連接固定著母螺紋套筒43。又，在製罐架 台35之上設置定盤軌39之情形的母螺紋套筒43之位置 在製罐架台35上的部分，形成有螺孔44。於是，以讓螺 栓固定式位準調整螺栓40螺合於母螺紋套筒43的狀態， 將定盤軌39設置在製罐架台之上，使固定螺栓42貫 通至螺栓固定式位準調整螺栓40之中，與製罐架台35的 螺孔44定位之後，使固定螺栓42立設於螺孔44。 -57- 200936294 〈定盤軌的上下方向調整操作〉 其次，g關調整此種狀態之定盤軌39的上下方向的 高度之操作’使用第42圖做說明。在定盤軌39的端部下 端的凸緣部連接固定著母螺紋套筒43。 首先’在尙未調整定盤軌39之高度的狀態的圖（a) 中’使螺栓固定式位準調整螺栓40利用扳手正轉或反轉 ’將定盤軌39的高度調整到所希望的高度。圖（b)是表 示將定盤軌39調整到最高的情形。調整到預定高度的話 ’將固定螺栓42埋入到螺栓固定式位準調整螺栓40及螺 孔44’固定螺栓42是螺固螺栓固定式位準調整螺栓40, 讓螺栓固定式位準調整螺栓40固定。 藉此完成定盤軌39的高度調整操作。 〈定盤軌的橫向調整機構與負載分享（load-share) 機構〉 第43圖係除了第42圖說明的上下方向調整機構（40 、42)之外，具備形成亦可於橫向（在圖的左右）調整定 盤軌的橫向調整機構。橫向調整機構具體上是在導軌安裝 使用固定螺釘的位置限制螺栓37a，利用位置限制螺栓 3 7a來推壓導軌矯正導件的應變（參照第46圖）。 除此之外，只用螺栓固定式位準調整螺栓40來負擔 定盤軌的荷重，將第22圖所用的位準調整螺栓36應用於 製罐架台35，也讓位準調整螺栓36分擔定盤軌的荷重（ -58- 200936294 第 33 、 34 、 43 圖）。 第45圖是作爲能筆直地強制利用本發明之縱向的真 直度之說明用所^示的側面圖，將定盤軌39之彎曲的狀態 (圖a)，利用螺栓固定式位準調整螺栓40 (40C、40S) ，在圖中，調整中央的螺栓固定式位準調整螺栓40C使定 盤軌39上昇，調整兩端的螺栓固定式位準調整螺栓40 S 使定盤軌3 9下降，最後就能筆直地（圖b)強制縱向的 ©繼° 又，第4 6圖是作爲能筆直地強制利用本發明之橫向 的真直度之說明用所示的上面圖，將定盤軌39之彎曲的 狀態（圖a )，利用位置限制螺栓3 7 a，如圖地進行調整 ，使定盤軌3 9移位，最後就能筆直地（圖b)強制橫向 的真直度。 【圖式簡單說明】 第1圖是有關本發明之實施例1的滑動台之縱剖面圖 〇 第2圖是於第3圖之B-B剖面端視方向觀看有關實施 例2之滑動台的橫剖面的圖。 第3圖是於第2圖之A-A剖面端視方向觀看有關實 施例2之滑動台的縱剖面的圖。 第4圖是說明有關本發明之實施例3的滑塊的圖，第 4圖（a)是其槪念立體圖，（b)是爲了說明滑塊之補強 肋，將滑塊上下顛倒的立體圖。 -59- 200936294 第5圖是第4圖（a)的滑塊圖之C-C端視剖面圖。 第6圖是有關實施例4的滑動台之剖面圖。 第7圖是有關，施例5的滑動台之剖面圖。 第8圖是有關實施例6的滑動台之剖面圖。 第9圖是有關實施例7的滑動台之剖面圖。 第1〇圖是說明有關實施例8的滑動台的圖，爲滑動 台的剖面圖。 φ 第Η圖是有關實施例8的滑塊之槪念立體圖。 第12圖是第11圖滑塊之Β-Β剖面端視圖。 第13圖是有關實施例9的滑動台之3面圖。 第14圖是有關實施例10的滑動台之3面圖。 第丨5圖是有關實施例11的滑動台之縱剖面圖。 第1 6圖是實施例1 1之直線比例尺9附近的部分剖面 立體圖。 第17圖是有關實施例12的滑動台之縱剖面圖。 Q 第18圖是有關實施例13的滑動台之3面圖。 第19圖是應用於實施例13的平面XY直線比例尺的 俯視圖。 第20圖是有關實施例14的平面XY直線比例尺的俯 視圖。 第21圖是有關實施例15的滑動台之剖面圖。 第22圖是有關本發明之實施例16的滑動台之縱剖面 圖。 第2 3圖是有關本發明之實施例1 6的滑動台之變形例 -60- 200936294 (附冷卻板）的縱剖面圖。 第24圖是有關本發明之實施例16的滑動台之3面圖 〇 第25圖是有關本發明之實施例16的滑動台應用例（ 1 )之縱剖面圖。 第26圖是有關本發明之實施例16的滑動台應用例（ 2 )之縱剖面圖。 第27圖是有關本發明之實施例16的滑動台應用例（ 3 )之縱剖面圖。 第28圖是有關本發明之實施例16的滑動台應用例（ 4 )之縱剖面圖。 第29圖是有關本發明之實施例16的滑動台應用例（ 5 )之縱剖面圖。 第3 0圖是有關本發明之實施例1 6的滑動台應用例（ 6 )之俯視圖。 第31圖是有關本發明之實施例17的滑動台之縱剖面 圖。 第32圖是有關本發明之實施例17的滑動台之3面圖 〇 第33圖是在定盤軌之上面中央部分安裝直線馬達磁 石部的實施例。 第34圖是與實施例2(第2圖、第3圖）同樣地， 在定盤軌的上面中央部具有設置直線馬達磁石部之溝的實 施例。 -61 - 200936294 第35圖是在定盤軌的引導面上面安裝直線比例尺部 的帶式比例尺之實施例的側視圖。 第36圖是有關本發明之實施例17的滑動台應用例（ 1 )之縱剖面圖。 第37圖是有關本發明之實施例17的滑動台應用例（ 2 )之縱剖面圖。 第3 8圖是有關本發明之實施例1 7的滑動台應用例（ 3 )之縱剖面圖。 〇 第39圖是有關本發明之實施例17的滑動台應用例（ 4 )之縱剖面圖。 第40圖是有關本發明之實施例17的滑動台應用例（ 5 )之縱剖面圖。 第41圖是有關本發明之實施例17的滑動台應用例（ 6 )之縱剖面圖。 第42圖是有關本發明之實施例17的滑動台之第31 ^ 圖的A部的放大詳細圖，（a)是表示使·滑塊上昇的中途 0 ，（：b)是表示使其上昇到最大的狀態，（C)是表示使其 固定的狀態。 第43圖是進一步在第42圖的上下方向調整機構追加 定盤軌的橫向調整機構與負載分享（load-share )機構的 剖面圖。 第44圖是向下設置本實施例16的滑動台，藉此構成 對應大型FPD工件的高架構造的滑動台的實施例。 第45圖是能將定盤軌之彎曲的狀態’利用螺栓固定 -62- 200936294 式位準調整螺栓，筆直地強制縱向之真直度的說明用的側 面圖。 第46圖是能將定盤軌之彎曲的狀態，利用螺栓固定 式位準調整螺栓，筆直地強制縱向之真直度的說明用的俯 視圖。 第47圖是習知的重量平衡型滑動台的剖面圖，（a) 是整體圖，（b)是空氣墊附近的放大圖。 第48圖是習知的空氣約束型滑動台1的剖面圖。 第49圖是習知的空氣約束型滑動台2的剖面圖。 第50圖是習知的空氣約束型滑動台3的剖面圖。 第5 1圖是習知的混合型滑動台的俯視圖。 第52圖是習知的混合型滑動台的剖面圖。 第53圖是習知的混合型滑動台的滑塊變形圖。 【主要元件符號說明】 ❹ 1 :定盤 1 a :長溝 2 :導軌 3 :空氣墊 4 :滑塊 4s :滑塊側壁 5 .無鐵心線性馬達（coreless Linear Motor) 6 :空氣管 6k :開口部 -63- 200936294 6r :補強肋 6 s :橫面空氣噴出部 6u:下面空氣噴出部 7 :線性馬達磁石部（固定部） 7a :磁鐵（magnet ) 8 :線性馬達線圏部（可動部） 9 :直線比例尺部 9B :安裝基板 9H :直線比例尺頭部 9S :直線比例尺（刻度部） 10 :連結基板 1 1 :冷卻媒體用孔（水冷或空冷） 12 : Y軸導軌 1 3 : Y軸滑塊 1 4 : Y軸線性馬達磁石部（固定部） 1 5 : Y軸線性馬達線圈部（可動部） 1 6 : Y軸直線比例尺 17 : X軸導軌 1 8 : X軸滑塊 1 9 : X軸線性馬達磁石部（固定部） 20 : X軸線性馬達線圈部（可動部） 2 1 : X軸直線比例尺 22 :玻璃製直線比例尺的安裝基板 22H :安裝基板安裝構件 64 - 200936294 23 :空間基板 24 :上基板 25 :限制感測器 26 :電纜支架 27 :平面二次直線比例尺 2 8 :平面二次元直線比例尺玻璃 29 :平面二次元直線比例尺頭 3 0 :平面二次元直線比例尺29的比例尺頭 3 1 :固定螺釘 32 :接觸導軌 3 3 :接觸滑塊 3 4 :定盤軌 3 5 :製罐架台 3 6 :位準調整螺栓 37、37a :位置限制螺栓 0 3 8 :工件吸附基板 3 9 :定盤軌 40:螺栓固定式位準調整螺栓 41 :支柱 4 2 :固定螺栓 43:母螺紋套筒（接著固定在39) 44 :螺孔 8 1 :冷卻板 -65-In Fig. 1, 1 is a fixed plate, 2 is a guide rail, 4 is a slider, 6 is an air ejection portion, 7 is a linear motor magnet portion (fixed portion), 7a (Fig. 1) is a magnet, and 8 is a linear motor. The coil portion (with the movable part core or the iron yoke attached), 9 (Fig. 1) is a linear scale portion (9H is a linear scale head and 9S is a linear scale (scale)). When the guide rail 2 of the first embodiment (Fig. 1) and the guide rail 2' of the known example (Fig. 52) are used, since the guide rail 2' of the known example (Fig. 52) has a complicated shape, it is flat to be compared. With a higher degree of precision, it is only possible to produce a long strip of 1 m length (thus limiting the use of the semiconductor manufacturing apparatus), since the guide rail 2 of the embodiment 1 is a simple--25-200936294 single shape. Therefore, it is possible to obtain articles having a length of 6 m to 7 m, and to obtain a long-length article with high precision (and thus, it is applicable to a manufacturing apparatus of a large-sized liquid crystal panel). It is a simple configuration in which two guide rails 2, 2 made of long rods are fixed to the fixed plate 1 by screws 31 in parallel with each other. Since the surface of the fixed plate 1 is originally polished, it is a smooth surface, and since the flatness (smooth surface) of the U-shaped upper surface of the guide rail 2' is formed to the same extent, there is no problem in using the surface of the fixed plate 1. A slider 4 is provided above the fixed disk 1 and between the two rows of guide rails 2, 2. The slider 4 is formed in a U-shape which is vertically opposed to the traveling direction at a right angle, and a linear motor coil portion 8 is provided in the inverted U-shaped opening. The linear motor magnet portion 7 and the linear motor coil portion 8 are disposed to face each other with a gap therebetween, and the core of the inside of the linear motor coil portion 8 (not shown) is in the linear motor magnet portion 7 and the linear motor coil portion. An electromagnetic attraction is generated between 8. The lower side air walls 4s and 4s constituting the inverted U-shape of the slider 4 are provided with a lower air ejecting portion 6u that ejects air to the lower surface, and a horizontal air ejecting portion 6s that ejects air toward the outside of the slider 4 toward the outer side in the lateral direction. Air tube 6. The air ejected downward from the lower air ejecting portion 6u hits the fixed plate 1', thereby generating a floating force on the slider 4. The slider 4 is floated at a position where the balance is obtained by the electromagnetic attraction force between the linear motor magnet portion 7 and the linear motor coil 8 and the gravity and the above-described floating force. In the embodiment i, the distance from the fixed disk surface of 5/zm to 1 turns becomes the upper surface. Further, the air -26-200936294 ejected from the lateral air ejecting portion 6s toward the outer side of the lateral surface touches the guide rails 2 on both sides, and as a result, the balance is maintained at the center. Further, the force of the air sucked from the guide rail 2 toward the inside is exerted by the pressure of the air ejected from the side wall toward the lateral outer periphery. Similarly to the case described in FIG. 5, the electromagnetic attraction force is used to generate a force for opening the side wall of the slider to the outside. However, as described above, the pressure of the air ejected from the lateral air ejection portion causes the side wall to be caused. The force on the inside is returned, so adjusting the pressure has the effect of reducing the deformation of the side wall. In the case where the air pressure is not adjusted, as shown in Fig. 4 (a) of the following description, the reinforcing rib may be added to the side wall of the U-shaped opening of the slider 4. Further, as shown in Fig. 4(b) to be described later, when the opening portion 6k is formed by the portion where the reinforcing rib 6r is left on the side wall of the slider 4, the force for opening the side wall outward due to the electromagnetic attraction force is increased, and the cause is still caused. The reinforcing rib 6r suppresses the effect of the side wall deformation (such as the deformation of Fig. 5). Further, a φ driving force is generated between the linear motor magnet portion 7 and the linear motor coil portion 8, and the slider 4 is driven in the traveling direction by the driving force. The linear end of the linear coil portion 8 forms a driving surface. Further, since the thickness D length of the U-shape in the upper and lower directions of the guide rail 2' (Fig. 52) can be reduced, it contributes to downsizing. Further, the guide rail 2 of the first embodiment only needs to be fixed with a long rod, so that the guide rail of the 52nd drawing can be omitted as long as the straight angle facing the surface of the fixed disc 1 and the slider 4 is correctly made at the time of production. 2' U-shaped precision processing, so processing becomes easy. Further, when the width of the guide rail 2 of the design example 1 is enlarged, the amount of deformation of the guide member can be reduced by the pressure of the air ejected from the air ejection portion of the lateral surface of the slider side wall, so that the conventional technique can be solved ( Figure 52) Problem point 5. Therefore, the formation of the guide rail 2 can be carried out in a large liquid crystal panel manufacturing apparatus by being able to obtain a long object with a high precision of 6 m to 7 m. Since the guide rail is used to constrain the lateral position of the slider and the position of the slider is constrained by the fixed plate, there is an effect that the accuracy of the lateral movement and the accuracy of the longitudinal movement can be individually adjusted.实施 [Embodiment 2] Figs. 2 and 3 are views for explaining a slide table according to a second embodiment of the present invention, and Fig. 2 is a view showing a cross section of the slide table in the direction of arrows in the BB section of Fig. 3, Fig. 3 is a view showing a longitudinal section of the slide table in the direction of the arrow AA of Fig. 2; In the second and third figures, the same reference numerals as in the first embodiment are omitted. In the fixed disk 1 of the second embodiment, a long groove la (Fig. 3) is dug, and a linear motor magnet portion 7 having a magnet 7a on the upper portion is laid in the long groove la. At this time, the upper surface of the magnet 7a is formed to be substantially flush with the surface of the fixed plate 1. Since the surface of the fixed plate 1 is originally polished, it is a smooth surface, and since the flatness (smooth surface) of the U-shaped upper surface of the guide rail 2' is formed to the same extent, there is no problem in using the surface of the fixed plate 1. Further, when the two guide rails 2, 2 are fixed so as to be parallel to each other with the long groove la and parallel to -28-200936294 and the width of the design guide rail 2 is enlarged, the pressure of the air ejected from the air ejection portion on the lateral side of the slider side wall can be utilized. The amount of deformation of the guide member is reduced, so that the problem point 5 of the prior art (Fig. 52) can be solved. A slider 4 is provided above the fixed disk 1 and between the two rows of guide rails 2, 2. The slider 4 forms an upper and lower phase in a right-angled cross section in the direction of travel: a reverse U-shape, and a linear motor coil portion 8 is provided in the inverted U-shaped opening. The linear motor magnet portion 7 and the linear motor coil portion 8 are disposed facing each other with a gap therebetween, and the core of the linear motor coil portion 8 (not shown) is used in the linear motor magnet portion 7 and the linear motor coil. An electromagnetic attraction is generated between the portions 8. Further, in the same manner as in the first embodiment, the slider 4 is formed by retaining the portion of the reinforcing rib 6r on the side wall, and the opening portion 6k is processed. Even if the force for opening the side wall outward due to the electromagnetic attraction force is increased, the reinforcing rib 6r can be obtained. The effect of suppressing the deformation of the side wall (such as the deformation of Fig. 5). As a result, in the second embodiment, since the driving surface of the linear motor (the lower end of the linear φ motor coil 8) and the floating (sliding) surface of the sliding table (the number of the self-defining surface are 10 ym) are slightly identical, there is no bias. The bit distance ' does not come into contact with the guide rail 2' of the slider 4' which occurs on the slide table of Fig. 52. • T.  Here, if the offset distance is constant, the reason why the slider does not contact the guide rail is explained in accordance with the reasons known to the applicant. Return to Figure 52 of the known example. In Fig. 52, the distance t is the offset distance between the L1 of the driving surface of the slider 4 and the sliding surface L2 of the slider 4. As the distance t increases, in the state of being supported by the upper portion of the slider 4' during acceleration and deceleration (floating), the torque of the -29-200936294 speed (or deceleration) is increased in the lower portion of the slider 4. Therefore, the front end and the rear end of the slider 4' in the traveling direction are largely swung (pitched) in the vertical direction, and as a result, the front end of the slider 4' is brought into contact with the rear end of the guide rail 2'. However, if the distance t is zero (Fig. 3), the driving surface of the slider 4 coincides with the floating (sliding) surface, so that the surface of the slider 4 is accelerated (or decelerated) to float and slide. When moving, the front end and the rear end of the slider 4 in the traveling direction do not swing in the up and down direction, and as a result, there is no difference between the front end and the rear end of the slider 4 in the traveling direction and the fixed plate 1. In this way, since the offset distance t shown in FIG. 52 has a distance between the sliding height in the longitudinal direction and the transport driving height, the torsion force is generated during acceleration and deceleration, the pitch direction is affected, and the repeatability is invalid and invalid. In the case where the motion is deteriorated, or in the case of rapid acceleration or deceleration, an accident such as interference of the slider on the longitudinal side and contact with the guide rail on the longitudinal side may occur. Therefore, in order to prevent the disturbance or the contact accident, the rapid acceleration and deceleration control are not possible, and there is a disadvantage that the sliding φ stage which cannot be rapidly accelerated and decelerated is controlled. However, these disadvantages can be solved by the second embodiment. So by real .  In the case of the second embodiment, even if the acceleration and the deceleration are increased, there is no friction between the sliding block and the sliding surface, and the sliding table which is resistant to high acceleration and deceleration is completed. Further, since the stress of the electromagnetic attraction does not directly affect the slider 4 due to the trenching structure, the slider body is not deformed, and the stability and reproducibility of accuracy are also good. [Embodiment 3] Fig. 4 is a view for explaining a slider relating to Embodiment 3 of the present invention, and Fig. -30-200936294 4(a) is a perspective view thereof, and (b) is a slow returning slider to the slider. Stereo picture. Fig. 5 is a cross-sectional view taken along the line C-C of the slider diagram of Fig. 4(a). Since the conventional slider 4' is a type of slider ' applied to the slide table of Fig. 52 for advancing across the guide rail 2', the two legs 4', 4' of the slider 4' are constructed. The front end and the rear end of the traveling direction cannot be closed to each other 'forming an opening. Therefore, when the repulsive forces FI and F2 ejected by the air are applied to the slider 4' in the direction of the arrow 0, as shown in Fig. 53, the force for opening the leg portions 4k and 4k on both sides of the slider 4' is opened, and the force is opened. Preventing this need to increase the wall thickness runs counter to the need for miniaturization, cost reduction, and light weight. Further, as shown in Fig. 5, when the electromagnetic attraction force acts in the arrow direction F3, the thickness of the upper portion of the slider 4' is insufficient, and as shown in Fig. 53, it is recessed toward the lower side. Preventing this also requires an increase in wall thickness, which runs counter to the need for miniaturization, cost reduction, and weight reduction. φ This is because the slider 4 of Fig. 4(a) enters the pattern between the two rails 2 by using the sliders of Fig. 2 and Fig. 3, so that the slider 4 does not have to straddle the rail 2, the slider 4 is only required to dig a rectangular portion in which the linear motor coil portion 8 is housed in the center portion, and the left and right legs can be provided as shown by the oblique line 4X and the front end of the traveling direction can be left and right. The connecting portion connecting the leg portions to each other and the connecting portion connecting the left and right leg portions at the rear end in the same traveling direction, whereby the electromagnetic attraction force in the direction of the arrow acts on the slider 4, and the front end in the traveling direction can still be used. The connecting portion and the connecting portion at the rear end prevent the feet on both sides from opening, and the legs on both sides of the slider 4 as shown in Fig. 5 are not bent. Fig. 4(b) is a diagram in which the slider is slowly returned to the top and bottom. In the figure, 'the state in which the coil portion 8 of the linear motor is taken up' is held in the portion where the reinforcing rib 6r is held by the side wall, and the opening portion 6k is processed. Even if the force of opening the side wall outward by the electromagnetic attraction is added, the effect of suppressing the deformation of the side wall (such as the deformation of Fig. 5) is still obtained. Further, the linear motor coil 8 of the same size is mounted, and since the slider 4' of Fig. 52 is placed on the guide rail 2, it becomes large, although more material is required, because the slider 4 of Fig. 2 does not It is smaller in size and therefore less material, because a part of the rest of the material acts as a thickness to increase the upper portion of the slider 4, and the thickness of the upper portion of the slider 4 is still sufficient even if the electromagnetic attraction force acts in the direction of the arrow F3. Therefore, as shown in Fig. 5, there is not a large amount of depression on the lower side. [Embodiment 4] Fig. 6 is a cross-sectional view showing a slide table according to Embodiment 4. The sixth figure differs from the second embodiment (Fig. 3) in the shape of the slider. Although the slider 41 of Fig. 6 is the same as the slider 4 of Fig. 3, it is inverted u-shaped, but the difference is that the inner or outer side of the inverted u-shaped horn of the slider 4 of Fig. 3 is a right angle. The inside or outside of the u-shape of the slider 41 of Fig. 6 is a rounded (R) shape for avoiding stress. In this way, the inner side and the outer side of the corner portion are rounded, and the stress is not concentrated on the corner portion, so that the stress is enhanced and the corner portion of the slider 41 is more difficult to be broken. -32-200936294 [Embodiment 5] Fig. 7 is a cross-sectional view showing a slide table according to Embodiment 5. Since the sliding platform relating to the second embodiment (Fig. 3) is a structure in which only the rails 2 of the long rods are fixed to both sides of the fixed plate 1 by two screws, it is simple to correspond to the wide width, A large area of demand, but Embodiment 5 can also correspond to the need for large area sliding. The sliding table of Fig. 7 is equipped with a linear motor (linear motor magnet portion 7 and linear motor coil portion 8) in the center, and guide rails 2, 2 are provided on both sides, and a plurality of air ejection ports are provided to increase the floating force. 61, 62 are disposed under the U-shaped ends of the slider 42, and a wide-width, large-area sliding table can be realized simply. Since the same symbols as those in Fig. 3 are members of the same function, the explanation is explained. [Embodiment 6] Fig. 8 is a cross-sectional view showing a slide table according to Embodiment 6. According to the fifth embodiment (Fig. 7), the sliding table having a wide width and a long depth can be easily produced, but the sliding force of the sixth embodiment is multiplied by the sliding table of the fifth embodiment. Regarding the slide table of the sixth embodiment, as shown in Fig. 8, a plurality of linear motors 51 and 52 are provided to produce a slide table of any driving force. In Fig. 8, two linear motors 51, 52 are disposed on both sides of the slider 43 and the fixed plate 1, whereby the driving force can be doubled. Further, when driving by a linear motor in the center of the fifth embodiment (Fig. 7), it is easy to turn left and right in the direction of travel (-33-200936294 is biased), but two sets are placed at intervals from each other. Linear motor, and the linear scales on both sides are mounted on the side or upper side of the guide rails 2, 2, for example, so that they can be driven on both sides, so the direction of the deflection is enhanced, and the linear motor and the linear scale are used for synchronous control. It can improve the accuracy of the deflection and the horizontal straightness. Usually, it can reach 1 second or less and 1 // m or less in 3 seconds and 3/m. [Embodiment 7] Fig. 9 is a cross-sectional view showing a slide table according to Embodiment 7. When the sliding table of Fig. 9 is discussed, the sliding table of Fig. 3 and the sliding table of Fig. 8 are combined to obtain a sliding table with enhanced driving force. And the effect is not only this, but the desired effect can be obtained. That is, according to the seventh embodiment, it is possible to overcome the respective weaknesses of the slide table of Fig. 3 and the slide table of Fig. 8. Although the sliding table of Fig. 3 has a weak point, the weak point can be solved by driving with two linear motors as shown in Fig. 8. • Also, although the two linear motor drives in Fig. 8 have the weakness that they are not normally stopped, 'the two linear motors are braked, but because the braking performance of the two linear motors is actually hardly the same, the two linear motors In the case where the braking performance is different, the slider will vibrate left and right. Although the reason is because the motor is not normally stopped, 'the dynamic brake is usually applied, but the power brake only causes the motor to generate resistance and short circuit, so the error of the resistance of each motor is caused. Stop the motor. There is an error in the time. -34- 200936294 However, in the case where the sliding table of Fig. 9 is increased abnormally, the linear motors on both sides become free run (the natural stop of the frictional resistance due to the motor shifting). If the linear motor is powered by a brake, since the center of the brake is applied, the slider 44 will not stop moving to the left and right. : Also, more than three linear motors can be set, so that the necessary large thrust can be generated. [Embodiment 8] Figs. 10 to 12 are views for explaining a slide table according to Embodiment 8, Fig. 10 is a cross-sectional view of the slide table, and Fig. 11 is a perspective view of the slider of Embodiment 8. Fig. 12 is a BB sectional end view of the slider of Fig. 11. In the tenth to twelfthth drawings, the slider 45 of the eighth embodiment is basically the same as the slider 4 of the slide table of the second embodiment (Fig. 3), but is completely removed. In the thick motor portion of the portion of the linear motor_coil portion 8 of the slider 4 of Fig. 3, only the structure for accommodating the two leg portions of the air ejecting portion 6 is a feature of the slider 45 of the eighth embodiment. Further, a connecting substrate 10 made of a metal plate (steel, stainless steel, or the like) is provided on the upper portions of the left and right sliders 45, 45, and a linear motor coil portion 8 is provided. Further, since the connection substrate 10 is a metal plate, the cooling medium hole 1 1 can be easily formed inside the connection substrate 10, so that the heat energy from the coil can be removed by the cooling medium hole 1 1 -35- 200936294 Therefore, the thermal influence on the upper part can be completely blocked. In this way, since the electromagnetic attraction force shown in Fig. 12 acts on the metal plate 10, the bending of the metal plate 1 is still strong, so that the longitudinally lean metal plate 10 has only the central portion bent and deformed as shown in the figure. The bending portion at the center of the stone slider 4 of the fifth drawing is slightly weakened, so it is slightly thickened, as described above. Further, since the influence of the electromagnetic attractive force acts only on the above-mentioned connecting substrate, only the force in the compressing direction is applied to the slider 45 (stone), since the stone is strongly compressed, the stone is not deformed, and the stability and the reproduction stability are excellent. Also very good. As a result, the use of the connecting substrate 10 made of a metal plate not only achieves an improvement in accuracy, but also the height of the sliding table does not have a portion of the upper thick portion of the slider 4 of Fig. 3, which can be made lower. That is, since the connection substrate 10 is a metal plate', the thickness of the stone slider 4 required in Fig. 5 is not required, and the height of the slide table can be further reduced. In the present embodiment, the height from the fixed plate is increased. It is 50mm. That is, in the slide table of Fig. 3, the height of φ from the fixed plate is 70 mm. On the other hand, in the slide table of Fig. 52 of the conventional example, the water is blown into the cooling medium hole 11 of the connection substrate 10 to cool the heat generated by the linear motor coil portion 8, and the block can be simultaneously blocked. Heat transfer to other parts. [Embodiment 9] Figure 13 is a three-side view of a slide table according to Embodiment 9. Regarding the configuration of the slide table of the ninth embodiment, the metal plate slide table of the embodiment 8 (Fig. 10) is placed on the slide table (Fig. 8) of the -36-200936294 double drive of the sixth embodiment. In the figure, the XY slide table 0 moves in the XY direction. In the figure, '1 is the fixed plate, 6 is the air discharge portion, 10 is the connection substrate. 12 is the Y-axis guide rail. 13 is the Y-axis slide block, and 14 is the Y-axis linear motor magnet portion. (fixed portion), 15 is a Y-axis linear motor coil portion, 16 is a Y-axis linear scale '17 is an X-axis guide rail, 18 is an X-axis slider, 19 is an X-axis linear motor magnet portion (fixed portion), and 20 is X The linear motor coil portion, 21 is an X-axis linear scale, and 31 is a fixing screw. In the ninth embodiment, the slide table of the eighth embodiment is superimposed not only on the slide table of the sixth embodiment but also the slider 43 (Fig. 8) of the slide table of the sixth embodiment and the slide table of the eighth embodiment. The fixing plate 1 (Fig. 1) is characterized in that the groove is dug in the upper portion of the slider 43 of the sliding table of the sixth embodiment, so that the length can be reduced to be lower than the overlapping height. XY slide table. Furthermore, in the Fig. 13, the X-axis or the Y-axis guide rail, as shown in Fig. 46 (described later), the position fixing bolt 37a using the fixing screw can reduce the strain of the guide member and improve the X-axis or the Y-axis. Migration accuracy. Similarly to the first embodiment, the Y-axis slider 13 has a portion where the reinforcing rib 6r is retained on the side wall to process the opening portion 6k, and even if the force for opening the side wall outward due to electromagnetic attraction is increased, the reinforcing rib 6r can be obtained. The effect of suppressing sidewall deformation (such as the deformation of Fig. 53) is suppressed. The X-axis slider 18 is also used to realize Embodiment 1, and the case is the same as that of Embodiment 1, and if the portion of the reinforcing rib 6r is left on the side wall, the side wall deformation is suppressed from -37 to 200936294. [Embodiment 1] Fig. 14 is a three-side view of a slide table according to Embodiment 10. Regarding the configuration of the slide table of the tenth embodiment, the metal plate slide table of the eighth embodiment (the first drawing) was placed on the double-drive slide table (Fig. 8) of the sixth embodiment, and the embodiment was added. The invention of the characteristics of the double drive of 6. In this way, as in the case of the ninth embodiment, the height is reduced, and since the X-axis and the Y-axis are simultaneously driven in both directions, the movement accuracy is improved on both sides, so that the lateral movement accuracy (bias, horizontal straightness) is improved. Therefore, the X-axis and the Y-axis aim to simultaneously move the precision. Furthermore, in Fig. 14, the X-axis or Y-axis guide rails are mounted with the position fixing bolts 37a of the fixing screws as shown in Fig. 46 (described later), so that the strain of the guides can be reduced, and the X-axis or the Y-axis can be improved. The accuracy of the migration. [Embodiment 1 1] Fig. 15 is a longitudinal sectional view showing a slide table according to Embodiment 11. In the figure, '1 is the fixed plate, 40 is the guide rail, 4 is the slider, 6 is the empty discharge part' 8 is the linear motor line , part, 9 is the linear scale part, 9 B is the mounting substrate, 9H is the linear scale head, 9S is a linear scale (scale). 22 is a mounting substrate for mounting a glass linear scale, 23 is a space substrate, 24 is an upper substrate, 25 is a limit sensor, 26 is a cable holder, and 31 is a fixing screw. -38- 200936294 The drive portion basically has the same configuration as that of the second embodiment (Fig. 3), and differs in the arrangement position of the position detecting device (linear scale). In the second embodiment, when the slider 4 is vibrated to the left and right in the traveling direction (biased), although an error occurs in the output of the position detecting device (linear scale), the reason is that the linear scale 9 is mounted on the slider 4. One side. That is, since the detection error occurs when the slider 4 is vibrated to the left and right in the traveling direction (biased), since the position detecting device does not coincide with the position of the slider, the position detecting device (linear scale) is used in the first embodiment. 9 is disposed in the center of the slider 4, thereby solving the error. In order to ensure a space in which the linear scale 9 is disposed in the center of the slider 4, the two space substrates 23 and 23 are fixed to the position separated from the center portion on the slider 4, and the upper surface is mounted thereon. Substrate 24. Further, the linear scale mounting substrate 22 is provided with a linear scale in a central space between the slider 4 and the two space substrates 23 and the upper substrate 24. Fig. 16 is a partially cutaway perspective view showing the vicinity of the linear scale portion 9 of the eleventh embodiment. As shown in Fig. 16, the linear scale mounting substrate 22 for mounting the linear scale (scale portion) 9S is a long rod-like rod having a length that is longer than both ends of the traveling direction of the slider 4 in the traveling direction. The linear scale mounting substrate 22 is inserted into the central space between the slider 4 and the two space substrates 23 and the upper substrate 24, and is fixed to the mounting member 22H which is erected at both end portions in the traveling direction. . Further, the linear scale (scale portion) 9S is fixed to the lower surface of the straight- 39-200936294 line scale mounting substrate 22 by a double-sided tape, an adhesive, a screw or the like. As a result, even if the slider 4 moves vertically and horizontally in the moving range, the linear scale (scale portion) 9S remains in the state of the non-contact slider 4. On the other hand, in order to read the scale of the linear scale 9S, the linear scale head 9H is directly above the head mounting substrate 9B, and is fixed by screws below the linear scale: 9S. As a result, when the slider 4 moves vertically and horizontally in the moving range, since the linear scale head 9H also moves together with the slider 4, the linear scale head 9H can read the scale of the fixed linear scale 〇 9 S. In this way, since the slider 4 of the detecting head 9H with respect to the measuring object is disposed on the same axis that is not offset, even if the slider 4 is deflected, since the center portion is still not affected by the bias, the measurement accuracy is improved ( Abbe principle). According to the first embodiment, since the position detecting device considering the Abbe principle is completed, the positioning accuracy and the repeating positioning accuracy of the posture error of the slide table are optimum. Further, since the distance from the linear scale 9H to the upper substrate 24 is short, the error in the pitch direction is small, and the measurement accuracy is also improved. . Further, although the limit switch 25 for preventing over travel or the like has been conventionally provided on the lateral side of the apparatus, in the first embodiment, the slider 4 generated as a result can be effectively utilized. Since the space between the outer side of the space substrate 23 and the upper substrate 24 is attached thereto, it does not protrude outside the device, and there is no damage or the like. As a result, even if the slider 4 moves vertically and horizontally in the moving range, the linear scale (scale portion) 9S remains in the state of the non-contact slider 4. Further, since the linear scale (scale portion) 9 S is fixed to the lower surface of the linear scale mounting substrate 22 of the straight line -40 to 200936294, the linear scale mounting substrate 22 functions as a cover body and descends from the upper portion to the linear scale (scale portion). 9S ash, dust, garbage, etc. become difficult to adhere. [Embodiment 1 2] Fig. 17 is a longitudinal sectional view showing a slide table according to Embodiment 12. In the figure, '22' is the mounting substrate for mounting the glass linear scale, and the other is the same as Fig. 15. The sliding table of the twelfth embodiment differs from the sliding table of the eleventh embodiment in that it is a shape for mounting the mounting substrate 22' of a glass linear scale. Since the linear scale mounting substrate 22 (Fig. 15) is elongated and attached downward, it is easily deformed by the influence of gravity, and the substrate 22 is mounted by a linear scale to form a projection from the both ends in the wide direction downward. The part is formed in a u-shaped cross section, so it is strong in deformation. Further, although basically the same structure as that of the above-described embodiment 12 is employed, the φ plate 1 is reduced in size and integrated into a module. . Further, since the linear scale (scale portion) 9S is covered with the linear scale mounting substrate 22', it is more difficult to adhere to the linear scale (scale portion) 9S from the ash, dust, garbage, and the like which have fallen from above. Further, since the scale head 9H also moves under the linear scale mounting substrate 22', it is difficult for the ash, dust, garbage, and the like to adhere to the scale head 9H. [Embodiment 1 3] Fig. 18 is a three-side view of a slide table relating to Example 13. The sliding -41 - 200936294 table is the same as that of the embodiment 10 of Fig. 14, except that the plane secondary linear scale 27 is disposed at the lower portion. As shown in Fig. 18, since the double drive expands the depth and lengthens the depth to complete the XY sliding structure, the planar quadratic straight line ruler 27 can be set in the blank space in the center. Then, in the configuration of the XY slide table of the fifth embodiment, the surface quadratic linear scale 27 which can be detected in the plane XY direction is disposed at the center: white space (the surface of the fixed plate 1), and on the other hand, the Y-axis slider 13 is disposed. ^ is trapped 1 3 Η and is mounted below the X-axis slider 18 in a state in which the planar quadratic linear scale head 29 is inserted into the recess 1 3 Η. Fig. 19 is a plan view of a plan ΧΥ linear scale applied to the embodiment 13. In the figure, 27 is a planar quadratic linear scale, 28 is a planar quadratic linear scale with a planar quadratic linear scale 27, and 29 is a planar secondary linear scale head for reading a planar quadratic linear scale 27. Then, when the X-axis slider 18 is moved in the X direction, the plane two φ element linear scale head 29 moves within the control space 13Η, and the plane quadratic linear scale scale 27 is read in the X direction. Further, when the x-axis slider 13 is moved in the downward direction on the drawing surface, since the X-axis slider 18 also moves, the planar quadratic linear scale head attached to the lower side of the X-axis slider 18 also moves in the vertical direction. Thereby, the plane quadratic scale 27 is read in the Υ direction. As a result, the plane quadratic linear scale head 29 is read in the ΧΥ direction to read the plane quadratic linear scale 27. [Embodiment 1 4] The glass of the same plane as the flat concave ruler is taken directly from the 28-line. -42-200936294 Fig. 20 is a plan view of the plane XY linear scale of the embodiment 14. The effective stroke of the commercially available plane ΧΥ straight line scale, as shown in Fig. 19, is a square quadrature as it is 68 mm square, so to detect a wider range, as in the case of Example 14 (Fig. 20) The linear scale 27 is a plurality of sheets (four sheets in the drawing), and is arranged at a predetermined interval t in the up, down, left, and right directions. On the one hand, in order to read a plurality of plane A quadratic linear scales 2 7 arranged in a plane interposed by the interval t, the two planar quadratic linear scale heads 29 are arranged obliquely in the diagonal direction of the square, and the configuration is formed to switch the two The position of the planar quadratic linear scale head 29 of the positional detection is 30. The scale head 30 of the plane quadratic linear scale 2 9 can be moved within the range indicated by the square 30R in Fig. 20. Further, the predetermined interval t is formed in the X direction and Y between the plane quadratic linear scale heads 29 and 29 which are arranged slightly in the diagonal direction from the end portions of the adjacent planar quadratic linear scales 27 and 27 which are inclined to each other. The φ interval of the direction is also short, when the planar quadratic linear scale heads 29, 29 are from plane two. When the dimensionary linear scale 27 moves toward the adjacent planar quadratic linear scale 27, the planar quadratic linear scale heads 29, 29 must overlap (by overlap). By this, the scale head 30 of the planar quadratic linear scale head 29 is If the square 30R moves, the two plane quadratic linear scale heads 29, 29 must have a head to read the plane quadratic linear scale 28', so as long as the normal readout plane is normalized to the secondary element linear scale 2 8 scale The head can do this. Switching to two planes normally -43- 200936294 The scale head of the secondary element linear scale head 2 9 and 2 9 for normal detection will use the well-known switching technique of two linear scale heads arranged in the primary direction, each applied to X The direction and the Y direction can be easily realized. Further, since a known switching technique is described in, for example, Japanese Laid-Open Patent Publication No. 2005-3 08592, this technique can be used. [Embodiment 1 5] Fig. 21 is a cross-sectional view showing a slide table according to Embodiment 15. In the figure, in the lower part of the fixed plate 1, two rails 2 are screwed together on both sides with a slider 4 therebetween. On the upper surface of the fixed plate 1 and on the inner surfaces of the guide rails 2 on both sides, the contact rails 32 are bonded to each other by the fifteenth embodiment, and the contact sliders 33 are also provided in the same manner as in the sliding surface of the opposite surface. Since the other structure is the same as that of the fourth embodiment (Fig. 6), the description is omitted. Since the slider 4 applied to the embodiments 2 to 13 is made of stone or ceramic, if it comes into contact with the guide rail 2, dust is generated. Then, in order to prevent the generation of φ dust, in the second to thirteenth embodiments, the stomach rails 2 on the upper surface and the both sides of the disc 1 were separated from each other by about 5/zm. However, if the slider 4 floats from above, micro-vibration is generated in the up and down direction and the moving direction. In the conventional devices of Figs. 48 to 50, in general, the air bearing is floated by the balance between the air pressure in the upward direction and the air pressure in the downward direction, and although the conventional device in Fig. 52 and the sliding of the present invention The table is floated by the balance between the electromagnetic attraction force and the air pressure, but actually the upper and lower vibrations of about ～0.3 μm are generated due to the pulsation of the air pressure. Therefore, the sliding body of the slide -44 - 200936294 will also inadvertently vibrate in the up and down direction. However, the actual floating amount of zero can be achieved by the embodiment 15 (because the surface is uneven when the microscope is viewed, the convex and convex contacts are in contact with each other, and the other portions are in a state in which the air floats), and the contact is subtly changed. Do not vibrate up and down. Moreover, even if the contact is made in the moving direction, the effect of suppressing the vibration of 20 to 30 nm in the past is still obtained. The contact rail 32 is a material having a low coefficient of friction and a strong material such as carbon fiber. The contact slider 33 is a material material having a low coefficient of friction and a strong material such as a thin quartz or agate, and the "subtle contact" is assumed. The surface of the carbon fiber is fluffy, and the contact slider 33 moves along the contact rail 32 in a state where the agate contacts or does not contact the air layer contained between the piles. As described above, according to the present invention, it is possible to completely solve the four problems of the known slide table with a simple configuration. (1) The slider is easily deformed, has reproducibility of impaired accuracy, and has the risk of damaging the slide table itself. (2) Rails with a U-shaped cross section in the amplitude direction require time and cost due to improved machining accuracy (machining to an error of 5&quot;m). (3) In the case of rapid acceleration or deceleration, accidents such as slider interference and contact with the guide rail may occur. Therefore, in order to prevent interference or contact accidents, a slide table that does not have rapid acceleration and deceleration control is formed. (4) The position detection accuracy and repeatability of the signal of the position detecting device (linear scale) are poor. -45-200936294 [Embodiment 16] Fig. 22 is a longitudinal sectional view of a slide table according to a sixteenth embodiment of the present invention, and Fig. 23 is a longitudinal sectional view showing a modification of the slide table according to the sixteenth embodiment of the present invention. Fig. 24 is a three-side view of the slide table of Fig. 22, (a: ) is a plan view, (b) is a side view, and (c) is a front view. In Fig. 22 and Fig. 24, 35 is a can holder stand, 36 is a leveling adjustment bolt, 37 is a position limiting bolt, 34 is a fixed plate rail, 4 is a slider 〇, and 6s is a horizontal air ejection portion. 6u is a lower air ejection portion, 7 is a linear motor magnet portion (fixed portion), 8 is a linear motor coil portion (movable portion), 9 is a linear scale portion, 24 is an upper substrate, and 26 is a cable holder. The material of the fixed rail 34 is a black granite, a ceramic material, a carbon fiber or the like which has little dimensional change and does not return during contact. The general driving portion and the guide are constructed in the same manner as in the first embodiment. Further, in the case where the slider 4 is the same as in the first embodiment, the portion ′ of the reinforcing rib 6r Q is left on the side wall to process the opening portion 6k, even if electromagnetic attraction is increased. The force of opening the side wall outward by the force can still obtain the effect of suppressing the deformation of the side wall (such as the deformation of Fig. 5) by the reinforcing rib 6r. The straight scale portion 9 is attached to the notch portion on the outer side of the guide portion above the fixed rail, and the head of the linear scale is joined to the head mounting table 9k by the side surface of the slider 4 (Fig. 22). Therefore, there is an effect of accommodating the linear scale into the banner of the fixed rail 34. Further, on the upper surface of the guide portion of the fixed rail 34, a belt-shaped linear scale 9aS (Fig. -46-20093629423) can be mounted in a space between the lower surface of the upper substrate 24. A belt scale 9aS (Fig. 23) of a linear scale is attached to the upper surface of the guide portion of the fixed rail 34, and a head 9a is attached to the lower surface of the upper substrate by a head mounting member 9k (Fig. 23). Since the height of the head 9aH of the linear scale portion and the upper surface of the slider 4 is shorter than that of the linear scale 9, the measurement accuracy of the pitch direction is improved (the principle of Abbe). The fixing rail 34 of the embodiment 16 (Fig. 22, Fig. 24) is a structure in which the fixing plate 1 and the guide rail 2 of the combined embodiment 1 are combined, and the level adjusting bolt 3 is disposed under the fixing plate 34? 6 and the position regulating bolts 3 7 are disposed on the side surface, and the position of the rail portion 3 is particularly long. In the case of the comparative example 16 and the known example (Fig. 5), the structure of the U-shaped rail portion is only known in the known example (Fig. 52). In this case, when the device is installed in the case of a device or the like, the machining accuracy is used as it is. Therefore, the length of the line of lm can be made as much as possible, and the installation place can only be used with the flatness of l〇//m. In the following stone fixing plate or the like (when it is fixed to a surface having a poor flatness, the main body is bent to a state where the article cannot be used. Therefore, the use of a semiconductor manufacturing device that limits the stroke is smaller than the liquid crystal use). On the other hand, in the present invention in which the level adjusting bolt 36 is disposed on the lower surface of the fixed rail 34 in which the fixing plate of the embodiment 16 and the guide rail are integrally formed, and the position regulating bolt 37 is disposed on the side surface, since the fixing plate and the guide rail are integrated, The deformation of the guide is less than that of the known example (Fig. 52). Further, the position adjustment bolt 36 provided below is adjusted for the longitudinal bending due to the own weight and the load, and the like, and the lower portion is not a flat plate having a flatness, and the like. In the case of the case, it is still possible to set the sliding table of -47-200936294, and the straightness of the moving can be adjusted to about 3~10/zm. Similarly, the lateral accuracy is also adjusted by the position limiting bolt 3 7 to fix the fixed rail 3 4 . The straightness of the migration can also be adjusted to about 3~10//m. This is the effect of integration of the fixed plate and the guide rail. Since the integral is formed, the guide portion is also changed by using the bolt to finely adjust the fixed plate. Further, the slider (Fig. 23) can be attached to the upper portion of the linear motor coil portion (opposite to the magnet surface) via the cooling plate 81. Opening holes in the cooling plate ^ 81, water cooling or air cooling is also easy to achieve.藉 With the above, even if the lower part of the standard is used, the accuracy of the can holder stand is not good, and the length of 1 〇m or more can still perform high-precision transport positioning. Further, the embodiment 16 (Fig. 22) is biased with respect to the travel guide surface between the linear motor magnet portion 7 and the linear motor coil portion 8 which is the driving power generation position in the known example (Fig. 52) and the slider 4. The distance is shifted, and the linear motor magnet portion 7 of the driving power generation position and the linear motor line φ ring portion 8 are aligned with the transition guiding surface of the slider 4 because of the offset distance. Since it is zero, the pitching torque is not invented, and the pitch error during acceleration and deceleration is reduced, so that acceleration and deceleration can be performed more quickly, thereby enabling high-precision and high-speed transportation. Further, in the first embodiment, since the following applications can be applied, it is possible to sufficiently apply to the production and inspection apparatus for FPD (flat display) or solar cell panel, which is increased in size, and to standardize the slide table. cut costs. (1) As shown in Fig. 25, the plurality of stages of the slide table of the embodiment 16 are arranged in a row on the fixed plate 1, and a workpiece adsorption substrate 38 is provided on the upper portion, whereby a large FPD can be performed. Delivery of workpieces and solar panels. (2) As shown in Fig. 26, the plurality of slide table units of the sixteenth embodiment are arranged in parallel on the can holder stand 35, and the level of the workpiece is adsorbed to the upper portion, and the workpiece suction substrate 3 is provided on the upper portion. Delivery of FPD workpieces and solar panel panels. Such a structure cannot be realized in the known example (Fig. 52). ❹ In the known example, if a long stroke is formed, since the U-shaped guide is fixed to the can-making frame in a strained state, the displacement accuracy of the slider is still poor, and a plurality of sliders are combined to drive the workpiece to be adsorbed. Substrate. The error of the movement of each slider is that the substrate is adsorbed by the workpiece, and interaction occurs between the linear motors, and the motor operation is abnormal. In the present invention, since the position limiting bolt and the level adjusting bolt can be used to correct the strain of the fixed rail and improve the shifting accuracy of the slider, the error of the shift between the sliders can be reduced, and the linear motors can be normally operated. . .  (3) As shown in Fig. 27, the sliding table of the present embodiment 16 is arranged in parallel on both ends of the fixed plate 1, and the sliding of the same embodiment 16 is set in the upper lateral direction or downward (Fig. 44). The table can thereby form a sliding table corresponding to the gantry structure of the large FPD workpiece. In the present invention, since the air-lifting force and the electromagnetic attraction force of the balanced motor are much larger than the load of the slider (for example, 10 times), even if the sliding table is mounted downward, there is still no sliding drop. Disadvantages of -49-200936294 (4) As shown in Fig. 28, the sliding table of the present embodiment 16 is arranged in parallel on both ends of the can holder stand 35 for level adjustment, and laterally or downwardly at the upper portion. (Fig. 44) The slide table of the same embodiment 16 is provided, whereby a slide table corresponding to a gantry structure of a large FPD workpiece and a solar cell panel can be constructed. Such a structure cannot be realized in the known example (Fig. 52). (5) According to Fig. 29, in Fig. 28, a plurality of sliders 4 of the movable slide table of the overhead structure in which the large-sized FPD workpiece of the slide table of the same embodiment 16 and the solar cell panel are disposed corresponding to the lateral direction φ are provided. Can do multiple tasks at the same time. (6) According to Fig. 30, when an average load is applied to the upper conveyance due to an insufficient load due to the relationship between the upper load and the generated thrust, a plurality of linear motor coils are provided on the same guide rail 2 in the traveling direction. The portion (movable member) 8, the slider 4, and the upper substrate 24 are synchronized, and the relationship between the load and the generated thrust is insufficient, and the load can be applied to the load of the upper Q portion. Such a construction is well known.  The example (Fig. 52) cannot be implemented. Further, the linear motor coil portion (movable member) 8 and the upper substrate 24 of Figs. 24, 27, 28, 29, and 30 are actually hidden on the drawing, but exhibit the features of the present invention. The relationship is illustrated. [Embodiment 1 7] Fig. 3 is a longitudinal sectional view showing a slide table according to Embodiment 17 of the present invention. Figure 32 is a three-side view of a slide table according to Embodiment 17 of the present invention. -50-200936294 In Figures 31 and 32, 35 is a can-making frame, and 4 is a bolt-on level adjustment bolt '39 For the fixed track, 4 is the slider, 6s is the horizontal air ejection part, 6u is the lower air ejection part, 7 is the linear motor magnet part (fixed part), 8 is the linear motor line crotch part (movable part), 9 is Straight scale, 26 is the cable bracket. The material of the fixed rail 39 is a black granite, a ceramic material, a carbon fiber or the like which has little dimensional change and does not return during contact, and the structure of the general drive portion is the same as that of the first embodiment. The fixed rail 39 of the embodiment 17 (Fig. 31 '32') is integrally combined with the side rails above the fixed disc, and the structure of the guide rail shown in the first embodiment (Fig. 1) is integrated. The upper two sides become the guiding faces. The fixed rail 39 is in the shape of an "I" shaped to form a Roman character in a right-angled cross section in the traveling direction, and the length of the width direction and the vertical direction of the both side surfaces is increased, so that the long strip of the 1 〇m grade is still The parallelism between the guide faces of the both side faces can be honed with an accuracy of about 5 m. In the same manner as in the first embodiment (Fig. 1), the linear motor magnet portion is attached to the upper center portion of the fixed plate rail 39. 7 (Fig. 33). Alternatively, in the same manner as in the second embodiment (Fig. 2 and Fig. 3), a groove in which the linear motor magnet portion 7 is provided is provided at the center portion of the upper surface of the fixed plate rail 39, and the linear motor magnet portion 7 can be attached (Fig. 4) ). Similarly to the first embodiment (the first drawing) and the second embodiment (the second drawing and the third drawing), the slider 4 has an inverted U-shape in the direction of the traveling direction, which is viewed in a right-angled cross section. The opening has a linear motor coil -51 - 200936294 part 8 (Fig. 33, Fig. 34). Further, in the same manner as in the first embodiment, the slider 4 is formed by retaining the portion of the reinforcing rib 6r on the side wall, and the opening portion 6k is processed. Even if the force for opening the side wall outward due to the electromagnetic attraction force is increased, the reinforcing rib 6r can be obtained. The effect of suppressing sidewall deformation (such as the deformation of Fig. 53) is suppressed. The banner of the slider 4 is wider than the banner of the guide portion of the fixed rail 39, and the horizontal slider 4a is screwed to the lower portion of the both side faces by bolts, and is disposed tightly above the fixed rail 39. The slider 4 of Fig. 31 is integrated with the horizontal slider, and in the 33rd and 34th drawings, the mounting horizontal slider 4a is configured by another body. The slider 4 is ejected from the lower air ejecting portion 6u (Fig. 31, Fig. 32, Fig. 34), and moves in balance with the electromagnetic attraction of the linear motor magnet portion 7 and the linear motor coil portion 8, to surround In the form of the upper side surfaces of the disk rails 3 9 , a structure in which the air is ejected from the lateral air ejecting portions 6 s (the 31st, 32nd, and 34th views) of the horizontal slider 4a is ejected. Further, by the air ejected from the lateral air ejecting portion 6s of the horizontal slider 4a, a force is applied to the direction in which the upper side surfaces of the fixed rail 39 are pressed from the both sides to the inner side. As can be understood from the drawings (Fig. 31, Fig. 33, Fig. 34), the fixed rail has a sufficient thickness, and since the deformation of the compressive force by the granite or the like is small, the guide faces on the upper side are almost neither. The effect of deformation. As described above, the guide member that can move the lateral movement of the restraining slider is formed on both sides of the upper side of the fixed plate. In the conventional technique of the fifth aspect, as in the present invention, although the air is ejected toward the inner side, since the U-shaped guide rails -52 to 200936294 have a problem of being deformed inward (question 5), the idea is essentially The invention is different. - the fixed rail 39 of the embodiment 39 (Fig. 22, Fig. 24), the configuration of the fixed disc 1 and the guide rail 2 of the combined embodiment 1, and the position adjusting bolt 40 is disposed under the fixed disc 34 When the position regulating bolt 37 is disposed on the side surface, it is particularly long. When the comparative example 17 and the known example (Fig. 52) are compared, the configuration of the U-shaped rail portion of the known example (Fig. 52) is used. When the guide is installed in the case of a device or the like, the machining accuracy is used as it is. Therefore, it is only possible to make the length of the line of 1 m as much as possible, and the installation place can only be used on a stone plate or the like having the flatness of the lower surface (fixed). In the case of a surface having a poor flatness, the body is bent so that the article cannot be used. Therefore, it is limited to the use of a semiconductor manufacturing apparatus having a small stroke as compared with liquid crystal use. On the other hand, in the present invention, as shown in Fig. 43 of the detailed view, the fixing plate of the embodiment 17 is formed integrally with the guide rail, and the fixed rail 3 having a configuration in which the shape is viewed at right angles to the traveling direction is formed in a shape of a shape of "I". 9. Therefore, the rigidity of the main body is also strong. Since the bolt-fixed level adjusting bolt 40 and the level adjusting bolt 36 are disposed at the lower portion, and the bolt 37a is fixed at the side using the fixing screw, the longitudinal direction due to the self-weight and the load is applied. For bending and the like, it is high in rigidity. Further, the bolt-type adjustment bolt 40 for adjusting the male screw provided at the lower portion is pushed and pulled by the female screw sleeve 43 (FIG. 42) fixed to the fixed rail 39, and the fixing bolt 42 is used when determining the height. (Fig. 42) is fixed to the machine, so that even if the following is not a flat plate, such as a stone plate, or the like, which does not present the accuracy of the can stand 35, etc., it is still possible to set the slide table to be moved to -53-200936294. The straightness can also be adjusted to about 3/zm~10/zm. Similarly, the lateral accuracy is also adjusted by the position limiting bolt 37a at the lower portion of the fixed rail 39, and the accuracy of the movement can be adjusted to 3; /ιη~10 /zm or so. Further, similarly to the description of Fig. 23, the upper portion of the linear motor coil portion of Fig. 31 to Fig. 34 (the direction opposite to the magnet surface A) can be attached to the slider via a cooling plate. Opening the cooling plate, water cooling or air cooling is also easy. In the case where the accuracy of the can making stand or the like is not good even in the lower part which is the reference, the high-precision transport positioning can be performed for a length of one or more. Furthermore, the load load carried on the slider 4 is too large, and only the bolt-type adjustment bolt 40 (Fig. 31) is used. In the case where the support cannot be supported, the level adjustment bolt 36 is attached to the can holder base 35 (Fig. 33, Figure 34), pushing up the lower part of the φ fixed disk rail, can share the fixed level adjustment applied to the bolt.  The load of the entire bolt 40 can also increase the load. Further, the embodiment 17 (31) is a transition guide surface between the linear motor magnet portion 7 and the linear motor coil portion 8 and the linear motor coil portion 8 in the known example (Fig. 5). The offset distance is generated, and the linear motor magnet portion 7 and the linear motor coil portion 8 of the driving power generation position coincide with the travel guiding surface of the slider 4 because the offset distance is almost zero (Fig. 31, Fig. 33) (Fig. 34), so the pitching torque in the pitch direction will not be invented, and the pitching error during acceleration and deceleration will be reduced, so that the acceleration and deceleration can be performed more quickly -54-200936294, thereby enabling high-precision, high-speed transportation. Above the horizontal slider 4a (Fig. 33 and Fig. 34), a notch space is formed in a portion of the horizontal slider 4a facing the surface guide surface of the fixed rail 39 (Fig. 35), and the belt type can be mounted. Straight scale 9a. ❹ ❿ As shown in Fig. 3 of the side view, the belt scale 9aS of the linear scale is attached to the guide surface of the fixed rail 39, and the notch at the center of the side surface of the slider 4a is mounted by the head. The part is to be mounted with the head 9aH of the linear scale. Since the height of the head 9aH of the linear scale portion and the upper surface of the slider 4a is shorter than that of the linear scale 9, the measurement accuracy of the pitch direction is improved (the principle of Abbe) (Fig. 33, Fig. 34). Further, in the embodiment 17, the application can be applied to an FPD or solar cell panel manufacturing and inspection apparatus which is increased in size, and the sliding table can be standardized, and the cost can be reduced. (1) As shown in Fig. 36, the plurality of stages of the slide table of the seventeenth embodiment are arranged in parallel on the fixed plate 1, and the workpiece suction substrate 3 is provided on the upper portion, whereby the transport of the large FPD workpiece can be performed. (2) As shown in Fig. 37, the plurality of stages of the slide table of the present embodiment 17 are arranged in parallel on the can holder stand 35, and the level adjustment is performed, whereby the workpiece suction substrate 3 8 is provided on the upper portion. Delivery of large FPD workpieces and solar panel panels. Such a structure cannot be realized in the known example (Fig. 5). In the present invention, since the position limiting bolt and the level adjusting screw-55-200936294 bolt can be used to correct the strain of the fixed rail and improve the shifting precision of the slider, the error of the transition between the sliders can be reduced, and the linearity can be made. The motor operates normally. (3) As shown in Fig. 38, the slide table of the present embodiment 16 is arranged in parallel on both ends of the fixed plate 1, and the slide table of the first embodiment 16 is disposed laterally or downwardly (Fig. 44). Thereby, a sliding table corresponding to a gantry structure of a large FPD workpiece can be constructed. Ο ❹ (4) As shown in Fig. 39, the slide table of the present embodiment 17 is arranged in parallel on both ends of the can holder stand 35, and is disposed in the upper lateral direction or downward (Fig. 44) before the embodiment 16 The slide table can thereby form a slide table corresponding to the gantry structure of the large FPD workpiece. Such a configuration cannot be realized in the known example (Fig. 52). (5) According to Fig. 40, in the upper part of Fig. 39 of the above (4), a plurality of elevated structures of large FPD workpieces which are provided with the slide table of the same embodiment 26 in the lateral direction or the downward direction (Fig. 44) are provided. The movable slider 4 of the slider (in the 40th diagram, the upper substrate 24) can perform a plurality of operations at the same time. (6) As shown in Fig. 41, the fixed rail 39 of the slide table of the present embodiment 17 is lateral, the center thereof is supported by the support 41, and the slider 4 is laterally disposed on both sides, and which slider 4 can be independent. The action, even if it is a fixed rail 39, can also be used on both sides. Further, in the case of the plurality of sliders of the above (5), the slider 4 of twice the number can be arranged. (7) In the same manner as (6) of the above-described embodiment 16, in the case where the relationship between the upper load and the generated thrust is insufficient due to the relationship between the upper load and the thrust, when the average load is applied to the upper conveyed object, the traveling direction is On the same guide rail-56-200936294 2, a plurality of linear motor coil line portions (movables) 8 and the slider 4 and the upper substrate 24 are synchronously operated, and the relationship between the load and the thrust is insufficient, and the operation can be performed. Correspondence when an average load is applied to the upper transport. Such a construction is not realized in the known example (Fig. 52). Further, the linear motor coil portion (movable member) 8 of Figs. 32, 38, 39, and 40 is actually hidden on the drawing, but the relationship of the features of the present invention is shown. 〇 <Upper and Down Direction Adjustment Mechanism of Fixed Plate Rails> Fig. 42 is an enlarged detailed view of a portion A of Fig. 31 showing the slide table of the seventeenth embodiment of the present invention in which the fixed orbit can be adjusted in the vertical direction (a) This is a middle state in which the slider is raised, (b) is a state in which it is raised to the maximum, and (c) is a state in which it is fixed. In the figure, '35 is a can-making frame, 39 is a fixed-disc rail, 40 is a bolt-fixed Q-level adjustment bolt, 42 is a fixing bolt, 43 is a female threaded sleeve connected and fixed to the fixed-disc rail 39, 44 is a screw hole. A female screw sleeve 43 is connected and fixed to the flange portion at the lower end of the end portion of the fixed rail 39. Further, the position of the female threaded sleeve 43 in the case where the fixed rail 39 is provided on the can making stand 35 is formed with a screw hole 44 in a portion of the can making stand 35. Then, in a state in which the bolt-fixing level adjusting bolt 40 is screwed to the female threaded sleeve 43, the fixed rail 39 is placed on the can-making frame, and the fixing bolt 42 is passed through to the bolt-fixed level adjusting bolt 40. After the screw holes 44 of the can rack stand 35 are positioned, the fixing bolts 42 are erected on the screw holes 44. -57- 200936294 <Upper and downward direction adjustment operation of the fixed orbital track> Next, the operation of adjusting the height of the fixed orbital track 39 in the up and down direction of this state is described using Fig. 42. A female threaded sleeve 43 is attached and fixed to the flange portion at the lower end of the end portion of the fixed rail 39. First, 'in the figure (a) of the state in which the height of the fixed rail 39 is not adjusted, 'the bolt-fixed level adjusting bolt 40 is rotated forward or reverse by the wrench' to adjust the height of the fixed rail 39 to the desired position. height. Figure (b) shows the situation in which the fixed rail 39 is adjusted to the highest. If the height is adjusted to a predetermined height, the fixing bolt 42 is embedded in the bolt-fixing level adjusting bolt 40 and the screw hole 44'. The fixing bolt 42 is a screw-fixing type fixing level adjusting bolt 40, and the bolt-fixing level adjusting bolt 40 is provided. fixed. Thereby, the height adjustment operation of the fixed rail 39 is completed. <Horizontal adjustment mechanism and load-share mechanism of the fixed-disc track> Fig. 43 is a view similar to the up-and-down direction adjustment mechanism (40, 42) illustrated in Fig. 42, and can be formed in the lateral direction (in the figure) Left and right) Adjust the horizontal adjustment mechanism of the fixed track. Specifically, the lateral adjustment mechanism is a position restricting bolt 37a to which a fixing screw is attached to the guide rail, and the position regulating bolt 37 7a is used to press the strain of the guide rail correcting guide (refer to Fig. 46). In addition, only the bolt-fixed level adjusting bolt 40 is used to bear the load of the fixed rail, and the level adjusting bolt 36 used in Fig. 22 is applied to the can-making frame 35, and the level adjusting bolt 36 is also divided. Load on the track ( -58- 200936294 Figures 33, 34, 43). Fig. 45 is a side view showing the straightness of the straightness of the longitudinal direction of the present invention, and the state in which the fixed rail 39 is bent (Fig. a), using the bolt-fixed level adjusting bolt 40 (40C, 40S), in the figure, adjust the center bolt-type level adjusting bolt 40C to raise the fixed-plate rail 39, and adjust the bolt-fixed level adjusting bolts 40 S at both ends to lower the fixed-plate rail 39, and finally It is possible to straighten (Fig. b) forcing the longitudinal direction of the continuation, and Fig. 46 is for the purpose of straightening the lateral straightness of the present invention. The state (Fig. a) is adjusted by the position limiting bolts 3 7 a as shown in the figure to shift the fixed rails 39, and finally the lateral straightness can be forced straight (Fig. b). BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a longitudinal sectional view of a slide table according to Embodiment 1 of the present invention. FIG. 2 is a cross-sectional view of the slide table according to Embodiment 2 viewed from a side view of the BB section of FIG. Figure. Fig. 3 is a view showing a longitudinal section of the slide table of the second embodiment taken along the line A-A in the end view of Fig. 2; Fig. 4 is a view for explaining a slider according to a third embodiment of the present invention, wherein Fig. 4(a) is a perspective view thereof, and Fig. 4(b) is a perspective view showing the slider ribs upside down to explain the reinforcing ribs of the slider. -59- 200936294 Fig. 5 is a cross-sectional view taken along line C-C of the slider diagram of Fig. 4(a). Fig. 6 is a cross-sectional view showing the slide table of the fourth embodiment. Fig. 7 is a cross-sectional view showing the slide table of the fifth embodiment. Fig. 8 is a cross-sectional view showing the slide table of the sixth embodiment. Fig. 9 is a cross-sectional view showing the slide table of the seventh embodiment. Fig. 1 is a view for explaining a slide table according to a eighth embodiment, which is a cross-sectional view of the slide table. φ The figure is a perspective view of the slider of the eighth embodiment. Figure 12 is a cross-sectional view of the Β-Β section of the slider of Figure 11. Figure 13 is a three-side view of the slide table relating to the ninth embodiment. Fig. 14 is a three-side view of the slide table relating to the tenth embodiment. Fig. 5 is a longitudinal sectional view showing the slide table of the eleventh embodiment. Fig. 16 is a partial cross-sectional perspective view of the vicinity of the linear scale 9 of the embodiment 11. Figure 17 is a longitudinal sectional view showing a slide table of Embodiment 12. Q Fig. 18 is a three-side view of the slide table relating to the thirteenth embodiment. Fig. 19 is a plan view showing a plan XY linear scale applied to the thirteenth embodiment. Fig. 20 is a plan view showing the plane XY linear scale of the fourteenth embodiment. Figure 21 is a cross-sectional view showing the slide table of the fifteenth embodiment. Fig. 22 is a longitudinal sectional view showing a slide table according to Embodiment 16 of the present invention. Fig. 2 is a longitudinal sectional view showing a modification of the slide table of the embodiment 16 of the present invention -60-200936294 (with a cooling plate). Fig. 24 is a plan view showing a sliding table according to a sixteenth embodiment of the present invention. Fig. 25 is a longitudinal sectional view showing an application example (1) of the sliding table according to the sixteenth embodiment of the present invention. Figure 26 is a longitudinal sectional view showing an application example (2) of a slide table according to Embodiment 16 of the present invention. Figure 27 is a longitudinal sectional view showing an application example (3) of a slide table according to Embodiment 16 of the present invention. Figure 28 is a longitudinal sectional view showing an application example (4) of a slide table according to Embodiment 16 of the present invention. Figure 29 is a longitudinal sectional view showing an application example (5) of a slide table according to Embodiment 16 of the present invention. Fig. 30 is a plan view showing a sliding table application example (6) of the embodiment 16 of the present invention. Figure 31 is a longitudinal sectional view showing a slide table according to Embodiment 17 of the present invention. Fig. 32 is a three-side view of a slide table according to Embodiment 17 of the present invention. Fig. 33 is an embodiment in which a linear motor magnet portion is attached to a central portion of the upper portion of the fixed plate rail. Fig. 34 is a view showing an embodiment in which a groove for providing a linear motor magnet portion is provided at the center portion of the upper surface of the fixed plate rail in the same manner as in the second embodiment (Fig. 2 and Fig. 3). -61 - 200936294 Figure 35 is a side view of an embodiment of a belt scale with a linear scale on the guide surface of the fixed rail. Figure 36 is a longitudinal sectional view showing an application example (1) of a slide table according to Embodiment 17 of the present invention. Figure 37 is a longitudinal sectional view showing an application example (2) of a slide table according to Embodiment 17 of the present invention. Fig. 3 is a longitudinal sectional view showing an application example (3) of the slide table according to the embodiment 17 of the present invention. Fig. 39 is a longitudinal sectional view showing an application example (4) of the slide table according to the seventeenth embodiment of the present invention. Figure 40 is a longitudinal sectional view showing an application example (5) of a slide table according to Embodiment 17 of the present invention. Figure 41 is a longitudinal sectional view showing an application example (6) of a slide table according to Embodiment 17 of the present invention. Fig. 42 is an enlarged detailed view of a portion A of Fig. 31 of the slide table according to the seventeenth embodiment of the present invention, wherein (a) is a middle of the rise of the slider, and (b) indicates that it is raised. In the maximum state, (C) is a state in which it is fixed. Fig. 43 is a cross-sectional view showing the lateral adjustment mechanism and the load-share mechanism for adding the fixed rail in the vertical direction adjusting mechanism of Fig. 42. Fig. 44 is a view showing an embodiment in which the slide table of the embodiment 16 is disposed downward, thereby constituting a slide table of an overhead structure corresponding to a large FPD workpiece. Fig. 45 is a side view for explaining the straightness of the vertical direction by bolt-fixing the -62-200936294 type level adjusting bolt in a state in which the fixing rail can be bent. Fig. 46 is a plan view for explaining the straightness of the longitudinal direction by the bolt-fixed level adjusting bolt in a state in which the fixed rail can be bent. Figure 47 is a cross-sectional view of a conventional weight-balanced slide table, (a) is an overall view, and (b) is an enlarged view of the vicinity of the air cushion. Figure 48 is a cross-sectional view of a conventional air-constrained slide table 1. Figure 49 is a cross-sectional view of a conventional air-constrained slide table 2. Fig. 50 is a cross-sectional view showing a conventional air-constrained slide table 3. Fig. 5 is a plan view of a conventional hybrid type slide table. Figure 52 is a cross-sectional view of a conventional hybrid slide table. Fig. 53 is a view showing the deformation of the slider of the conventional hybrid type slide table. [Main component symbol description] ❹ 1 : Fixing plate 1 a : Long groove 2 : Guide rail 3 : Air cushion 4 : Slider 4s : Slider side wall 5 . Coreless Linear Motor 6 : Air tube 6k : Opening portion -63 - 200936294 6r : Reinforcing rib 6 s : Lateral air ejection portion 6u: Lower air ejection portion 7 : Linear motor magnet portion (fixed portion) 7a : Magnet (magnet) 8 : Linear motor wire 圏 (movable part) 9 : Linear scale part 9B : Mounting board 9H : Linear scale head 9S : Linear scale (scale part) 10 : Connection board 1 1 : Cooling medium hole (Water-cooled or air-cooled) 12 : Y-axis guide 1 3 : Y-axis slide 1 4 : Y-axis motor magnet part (fixed part) 1 5 : Y-axis linear motor coil part (movable part) 1 6 : Y-axis linear scale 17 : X-axis guide 1 8 : X-axis slide 1 9 : X-axis motor magnet part (fixed part) 20 : X-axis linear motor coil part (movable part) 2 1 : X-axis linear scale 22 : Glass linear scale Mounting substrate 22H: mounting substrate mounting member 64 - 200936294 23 : Space substrate 24 : Upper substrate 25 : Limiting sensor 26 : Cable bracket 27 : Planar secondary linear scale 2 8 : Planar quadratic linear scale glass 29 : Plane 2 Dimensional linear scale head 3 0 : Scale head of surface quadratic linear scale 29 3 1 : fixing screw 32 : contact rail 3 3 : contact slider 3 4 : fixed rail 3 5 : can holder table 3 6 : level adjustment bolt 37, 37a : position limiting bolt 0 3 8 : Workpiece adsorption substrate 3 9 : Fixed plate rail 40: Bolt-mounted level adjustment bolt 41 : Post 4 2 : Fixing bolt 43 : Female threaded sleeve (adjusted to 39) 44 : Screw hole 8 1 : Cooling Board-65-

Claims (1)

200936294 十、申請專利範圍 ι·~種滑動台，係具備：定盤、和舖設在前述定盤上 的線性馬達磁石部、和在前述定盤之上隔著前述線性馬達 磁石部互相平行固定的兩根導軌、和設置在前述線性馬達 磁石部之上方與前述兩根導軌之間的空間，對行進方向以 直角的斷面形成u字形的滑塊、和在前述滑塊之u字形 的開口內與前述線性馬達磁石部隔著空隙面對配置的線性 ^ 馬達線圈部的滑動台，其特徵爲： 在前述側壁設有從構成前述滑塊之前述U字形的側 壁向著下面的前述定盤直接噴出空氣以及向著橫面噴出空 氣的空氣噴出部，利用從前述空氣噴出部向著下面噴出之 空氣的浮上力和前述線性馬達磁石部以及前述線性馬達線 圈間的電磁吸引力及重力產生平衡而浮起，且形成藉由前 述馬達磁石部及前述線性馬達線圈間的驅動力被驅動。 2.如申請專利範圍第1項所記載的滑動台，其中，具 Q 備：挖掘有長溝的定盤、和舖設在前述長溝內的線性馬達 磁石部、和在前述定盤之上隔著前述長溝互相平行固定的 兩根導軌、和設置在前述長溝之上方與前述兩根導軌之間 的空間，對行進方向以直角的斷面形成U字形的滑塊、 和在前述滑塊之U字形的開□內與前述線性馬達磁石部 隔著空隙面對配置的線性馬達線圈部； 在前述側壁設有從構成前述滑塊之前述U字形的側 壁向著下面的前述定盤直接噴出空氣以及向著橫面噴出空 氣的空氣噴出部，利用從前述空氣噴出部向著下面噴出之 -66- 200936294 空氣的浮上力和前述線性馬達磁石部以及前述線性馬達線 圈間的電磁吸引力及重力產生平衡而浮起，且形成藉由前 述馬達磁石部及前述線性馬達線圈間印驅動力被驅動。 3 ·如申請專利範圍第1項所記載的滑動台，其中，具 備：挖掘有長溝的定盤、和舖設在前述長溝內的線性馬達 磁石部、和在前述定盤之上隔著前述長溝互相平行固定的 兩根導軌、和設置在前述長溝之上方與前述兩根導軌之間 的空間，對行進方向以直角的斷面形成U字形的滑塊、 和在前述滑塊之U字形的開口內與前述線性馬達磁石部 隔著空隙面對配置的線性馬達線圈部； 在前述側壁設有從構成前述滑塊之前述U字形的側 壁向著下面的前述定盤直接噴出空氣以及向著橫面噴出空 氣的空氣噴出部’形成使得利用從前述空氣噴出部向著下 面噴出之空氣的浮上力和前述線性馬達磁石部以及前述線 性馬達線圈間的電磁吸引力及重力產生平衡之浮上面與藉 由前述馬達磁石部及前述線性馬達線圈間的驅動力的驅動 面一致。 4.如申請專利範圍第1項所記載的滑動台，其中， 在前述滑塊的行進方向前端側及後端側，連結構成前 述U字形的側壁間。 5 ·如申請專利範圍第1項所記載的滑動台，其中， 在構成前述U字形之側壁的前述滑塊的行進方向於 複數處設置前述空氣噴出部。 6 ·如申請專利範圍第1項所記載的滑動台，其中， -67- 200936294 在前述滑塊的角部的外側及內側形成圓角。 7 ·如申請專利範圍第1項所記載的滑動台，其中， 在與構成前述U字形之側壁的前述滑塊的行進方向 呈直角的方向於複數處設置前述空氣噴出部。 8 .如申請專利範圍第2項所記載的滑動台，其中， 在前述定盤互相平行地挖掘複數排前述長溝，分別在 前述各長溝內舖設前述線性馬達磁石部，且將分別與前述 0 各線性馬達磁石部隔著間隔面對配置的各線性馬達線圏部 保持在滑塊的前述u字形開口內，且將前述下面的空氣 噴出部設置在前述滑塊的各線性馬達線圈部間。 9 ·如申請專利範圍第8項所記載的滑動台，其中， 前述長溝的複數排爲兩排或三排。 1 〇 ·如申請專利範圍第丨項所記載的滑動台，其中， 取代前述滑塊’使用由：在下方安裝前述線性馬達線 圈部與構成前述滑塊的前述U字形的側壁部的金屬板所 ❿ 成的滑塊。 11.如申請專利範圍第10項所記載的滑動台，其中， 在則述金屬板具備冷卻媒體用孔。 12· —種χγ方向可動滑動台，其特徵爲·· 使用申請專利範圍第8項記載的第1滑動台、和申請 專利範圍第1 〇項記載的第2滑動台，以前述第1滑動台 的滑塊作爲前述第2滑動台的定盤，且以前述H 1滑動台 的滑塊之移動方向與前述第2滑動台的滑塊之移動方向爲 直父的方式’在前述第1滑動台之上載置前述第2滑動台 -68 - 200936294 13·如申請專利範圍第12項所記載的χγ方向可動滑 動台，其中， 雙驅動前述第2滑動台。 1 4 ·如申請專利範圍第丨項所記載的滑動台，其中， 離開前述滑塊來固定設置在前述滑塊之上的上基板， 在前述上基板與前述滑塊之間的空間內，且在前述滑塊之 上的前述線性馬達線圈之正上部位設置直線比例尺頭，另 〇 一方面，在前述上基板與前述滑塊之間的空間內，將直線 比例尺刻度部自前述直線比例尺頭及其他的移動的構件浮 上而固定。 15.如申請專利範圍第14項所記載的滑動台，其中， 將限制開關安裝在前述上基板與前述滑塊之間的空間 內。 1 6、如申請專利範圍第1 4項所記載的滑動台，其中 ❹ 在寬度方向斷面呈U字形來形成安裝前述直線比例 尺的刻度部的安裝基板。 1 7 .如申請專利範圍第1 3項所記載的XY方向可動滑 動台，其中， 在前述第2滑動台的定盤挖掘延伸於前述第2滑動台 之滑塊的移動方向的長孔，在前述長孔內收納平面二次元 直線比例尺頭，將前述平面二次元直線比例頭的端部固定 在前述滑塊，在前述第1滑動台的定盤配置平面二次元直 -69- 200936294 線比例尺。 18.如申請專利範圍第17項所記載的XY方向可動滑 動台，其中， 將前述平面二次元直線比例尺頭配置在兩個正方形的 對角位置’且將前述平面二次元直線比例尺，複數片平面 狀地配置在前述第1滑動台的定盤。 1 9.如申請專利範圍第1項所記載的滑動台，其中， 在前述滑塊與前述兩列的導軌之間以及前述滑塊與前 述定盤之間’分別將低摩擦係數且堅固材料的物品張貼在 前述前滑動側、前述導軌側和前述定盤側，前述低摩擦係 數之材質物品就能彼此接觸。 2 0.如申請專利範圍第19項所記載的滑動台，其中， 前述低摩擦係數之材質物品爲碳纖維、陶瓷、石英、 瑪堪之任一種。 21. 如申請專利範圍第1項所記載的滑動台，其中， 以一體形成前述定盤與前述兩根導軌，且分別在前述 定盤之下面配置位準調整螺栓，在前述定盤之側面配置位 置限制螺栓。 22. —種滑動台，其特徵爲： 將以一體形成定盤與兩根導軌，且分別在前述定盤之 下面配置位準調整螺栓，在前述定盤之側面配置位置限制 螺栓的滑動台，以複數台平行地排列在製罐架台上，在前 述滑動台的上部設置工件吸附基板，利用前述位準調整螺 栓就能進行位準調整。 -70- 200936294 23·—種高架型的χγ方向可動滑動台，其特徵爲： 將申請專利範圍第21項記載的滑動台，2式互相平 行地排列在製罐架台上的兩端，在上部橫向設置剪述滑動 台。 24·如申請專利範圍第1項所記載的滑動台，其中， 前述導軌對行進方向以直角的斷面觀看形成羅馬字的 「I」字形，在前述導軌的上面中央具有設置前述線性馬 ❹ 達磁石部的溝，在該溝的兩上面，前述滑塊是自前述下面 空氣噴出部噴出空氣，且利用前述線性馬達磁石部與前述 線性馬達線圈部的電磁吸引的平衡來移行，以圍繞前述導 軌上側兩側面的方式，前述滑塊自前述橫面空氣噴出部邊 噴出空氣邊移行。 2 5.如申請專利範圍第24項所記載的滑動台，其中， 在前述導軌的端部下端的凸緣部固定著母螺紋套筒， 前述位準調整螺栓是以螺合在該母螺紋套筒的螺栓固定式 0 位準調整螺栓、和通過形成在該螺栓固定式位準調整栓的 中心軸，穿通到貫通的貫通孔的固定螺栓所構成。 -71 -200936294 X. Patent application range ι·~ kinds of sliding table, which is provided with: a fixed disk, and a linear motor magnet portion laid on the above-mentioned fixed plate, and parallel fixed to each other on the aforementioned fixed plate via the aforementioned linear motor magnet portion Two guide rails, and a space provided between the magnet shaft portion of the linear motor and the two guide rails, forming a U-shaped slider at a right angle to the traveling direction, and a U-shaped opening in the slider a slide table of a linear motor coil portion disposed to face the linear motor magnet portion with a gap therebetween, wherein the side wall is provided with a direct discharge from the side wall of the U-shaped side wall constituting the slider toward the lower surface The air and the air ejecting portion that ejects the air toward the lateral surface float up by the floating force of the air ejected from the air ejecting portion toward the lower surface, and the electromagnetic attraction force and the gravity between the linear motor magnet portion and the linear motor coil. And formed by the driving force between the motor magnet portion and the linear motor coil. 2. The sliding table according to the first aspect of the invention, wherein the slab includes: a fixed plate having a long groove, a linear motor magnet portion laid in the long groove, and a front surface of the fixed plate Two guide rails fixed in parallel with each other, and a space provided between the long groove and the two guide rails, a U-shaped slider formed at a right angle to the traveling direction, and a U-shaped portion of the slider a linear motor coil portion disposed to face the linear motor magnet portion with a gap therebetween; and the side wall is provided with a direct discharge air from the side wall of the U-shaped portion constituting the slider toward the lower surface and toward the lateral surface The air ejecting portion that ejects air floats with a floating force of -66-200936294 air ejected downward from the air ejecting portion, and an electromagnetic attraction force and gravity between the linear motor magnet portion and the linear motor coil, and floats, and The formation is driven by the printing driving force between the motor magnet portion and the linear motor coil. The sliding table according to the first aspect of the invention, comprising: a fixed plate in which a long groove is excavated; a linear motor magnet portion laid in the long groove; and a mutual groove on the fixed plate Two rails fixed in parallel, and a space provided between the long groove and the two rails, forming a U-shaped slider at a right angle to the traveling direction, and a U-shaped opening in the slider a linear motor coil portion disposed to face the linear motor magnet portion with a gap therebetween; and the side wall is provided with a direct discharge air from the side wall forming the U-shaped side wall of the slider toward the lower surface and discharging air toward the lateral surface The air ejecting portion ′ is formed such that a floating force that uses the air ejected from the air ejecting portion toward the lower surface and an electromagnetic attraction force and gravity between the linear motor magnet portion and the linear motor coil balance the floating surface and the motor magnet portion The driving surfaces of the driving forces between the linear motor coils are identical. 4. The slide table according to the first aspect of the invention, wherein the front end side and the rear end side of the slider in the traveling direction are connected to each other between the side walls constituting the U-shape. The sliding table according to the first aspect of the invention, wherein the air ejecting portion is provided at a plurality of points in a traveling direction of the slider constituting the side wall of the U-shape. The sliding table according to the first aspect of the invention, wherein -67-200936294 is rounded on the outer side and the inner side of the corner portion of the slider. The sliding table according to the first aspect of the invention, wherein the air ejecting portion is provided at a plurality of points in a direction perpendicular to a traveling direction of the slider constituting the side wall of the U-shape. The sliding table according to claim 2, wherein the plurality of rows of the long grooves are excavated in parallel with each other, and the linear motor magnet portions are laid in the respective long grooves, respectively, and each of the zero lines is The linear motor coil portions that face each other across the space are held in the U-shaped opening of the slider, and the lower air ejection portion is disposed between the linear motor coil portions of the slider. 9. The sliding table according to claim 8, wherein the plurality of rows of the long grooves are two or three rows. The slide table according to the invention of claim 1, wherein the linear slider coil portion and the metal plate portion constituting the U-shaped side wall portion of the slider are used instead of the slider. ❿ into a slider. 11. The slide table according to claim 10, wherein the metal plate is provided with a hole for cooling medium. 12: a χ γ-direction movable sliding table, characterized in that: the first sliding table described in the eighth aspect of the patent application and the second sliding table described in the first aspect of the patent application, the first sliding table The slider is the fixed plate of the second slide table, and the moving direction of the slider of the H 1 slide table and the moving direction of the slider of the second slide table are straight fathers. In the χγ-direction movable slide table described in claim 12, the second slide table is double-driven. The slide table according to the invention of claim 2, wherein the slider is disposed to fix an upper substrate disposed on the slider, in a space between the upper substrate and the slider, and a linear scale head is disposed on an upper portion of the linear motor coil above the slider, and a linear scale scale portion is provided from the linear scale scale in a space between the upper substrate and the slider Other moving components float and are fixed. The slide table according to claim 14, wherein the limit switch is mounted in a space between the upper substrate and the slider. The sliding table according to the invention of claim 1, wherein the ❹ has a U-shaped cross section in the width direction to form a mounting substrate on which the scale portion of the linear scale is mounted. The XY-direction movable slide table according to the first aspect of the invention, wherein the fixed hole of the second slide table excavates a long hole extending in a moving direction of the slider of the second slide table, The planar second-order linear scale ruler is accommodated in the long hole, and an end portion of the planar quadratic linear proportional head is fixed to the slider, and a plane of the first slide table is a secondary element straight-69-200936294 line scale. 18. The XY-direction movable sliding table according to claim 17, wherein the planar quadratic linear scale head is disposed at a diagonal position of two squares and the planar quadratic linear scale, the plurality of planes The disk is placed on the fixed plate of the first slide table. The sliding table according to claim 1, wherein a low friction coefficient and a strong material are respectively formed between the slider and the guide rails of the two rows and between the slider and the fixed plate. The article is attached to the front sliding side, the rail side, and the fixed side, and the low friction coefficient material articles can be in contact with each other. The sliding table according to the invention of claim 19, wherein the material having the low friction coefficient is any one of carbon fiber, ceramic, quartz, and makan. The sliding table according to claim 1, wherein the fixed plate and the two guide rails are integrally formed, and a level adjusting bolt is disposed on a lower surface of the fixed plate, and is disposed on a side surface of the fixed plate Position limiting bolts. 22. A slide table, characterized in that: a fixed plate and two guide rails are integrally formed, and a level adjusting bolt is disposed under the fixed plate, and a sliding table of a position limiting bolt is disposed on a side of the fixed plate, The plurality of stages are arranged in parallel on the can holder stand, and a workpiece adsorption substrate is provided on the upper portion of the slide table, and the level adjustment can be performed by using the level adjustment bolt. -70- 200936294 23--A type of χγ-direction movable sliding table of the elevated type, characterized in that: the sliding table described in claim 21 of the patent application is arranged in parallel with each other on both ends of the can making stand, at the upper part The horizontal setting cuts the slide table. The slide table according to the first aspect of the invention, wherein the guide rail forms a "I" shape of a Roman character in a right-angled cross section, and the linear horse is disposed at a center of the upper surface of the guide rail. The groove of the magnet portion is disposed on the upper surface of the groove, and the slider ejects air from the lower air blowing portion, and is moved by a balance between the linear motor magnet portion and the electromagnetic attraction of the linear motor coil portion to surround the guide rail. In the manner of the upper side surfaces, the slider moves while ejecting air from the lateral air ejection portion. [2] The sliding table according to claim 24, wherein a flange portion of the lower end of the end portion of the guide rail is fixed with a female threaded sleeve, and the position adjusting bolt is screwed to the female threaded sleeve. The bolt-fixed zero-position adjusting bolt is formed by a fixing bolt that is formed in the through-hole of the through hole formed in the center shaft of the bolt-fixed level adjusting bolt. -71 -
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KR101478393B1 (en) 2014-12-31
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