CN102501224B - A kind of planar maglev linear-motion platform - Google Patents

A kind of planar maglev linear-motion platform Download PDF

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Publication number
CN102501224B
CN102501224B CN201110291618.4A CN201110291618A CN102501224B CN 102501224 B CN102501224 B CN 102501224B CN 201110291618 A CN201110291618 A CN 201110291618A CN 102501224 B CN102501224 B CN 102501224B
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China
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magnetic
linear
bearing
workbench
electromagnet
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Expired - Fee Related
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CN201110291618.4A
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Chinese (zh)
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CN102501224A (en
Inventor
李群明
韩雷
邓华
张世伟
胥晓
陈启会
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Central South University
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Central South University
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Abstract

The invention discloses a kind of planar maglev linear-motion platform device with bidimensional larger row journey.Each electromagnetic bearing of this device is made up of two differential type DMs, and in control coil, electric current can make the magnetic of maglev linear-motion platform float workbench stable suspersion under electromagnetic force, contacts with mechanical between bearing and linear drive system; Magnetic floats workbench and linear electric motors driver element is separate, and on two horizontal planes, orthogonal linear electric motors rely on to be directed laterally to accordingly and float workbench with the non-contact electromagnetic power effect promotion magnetic of electromagnetic bearing and make plane bidimensional rectilinear motion.Wherein magnetic float two horizontal direction straight-line guidances of workbench and driving mechanism structure identical, each mechanism is by two electromagnetic bearings and two mechanical rolling bearings compositions.Two guiding mechanisms are without coupled relation.When platform High acceleration motion, the auxiliary guiding of rigidity rolling bearing and protection electromagnetic bearing, and in stable state and when needing smaller driving force, electromagnetic bearing can float workbench and keeps magnetic to float contactless guiding by Direct driver magnetic.

Description

A kind of planar maglev linear-motion platform
Technical field
The present invention relates to the accurate magnetic suspension linear kinetic control system in micro-electronic manufacturing equipment, particularly relate to a kind of Long Distances two-dimensional plane sports type maglev linear-motion platform.
Technical background
Manufacture and biological manufacture field at some microelectronic chips, as high-speed lead bonder etc., manufacturing equipment requires to have high speed, high accuracy, high-cleanness, high kinematic system.But the kinematic system of current chip manufacturing equipment all adopts line slideway or air-bearing supporting, by the impact of mechanical friction or air-flow, positioning precision and dynamic property limited, be difficult to adapt to high-speed high-precision and environment friendly requirement.Adopting the magnetic over draft of mechanical contact to hold linear motion system is a kind of selection newly.In the design of traditional multidimensional magnetic transportation by driving moving platform, linear electric motors and electromagnetic bearing integrate, and the kinematic system on each free degree direction is coupled strongly each other, and plane motion stroke is limited.Magnetic with workload is floated workbench portion and keeps balancing by the electromagnetic force and load that control electromagnet generation on vertical gravity direction by the present invention, keeps magnetic to float workbench stable suspersion; Magnetic float two side direction straight-line guidances of workbench and driving mechanism structure identical, each guiding mechanism is by two guiding electromagnetic bearings and two mechanical rolling bearings compositions.By the driving force that linear electric motors provide, the guiding electromagnetic bearing driving magnetic to float workbench or flexibility by the rigidity rolling bearing of driver element drives magnetic to float workbench, make the magnetic supported by vertical supporting electromagnetic bearing float workbench can in horizontal plane rapid movement and planar there is larger stroke range, realize magnetic and float guiding and integrated between driving.Each party's stroke upwards only depends on linear electric motors stroke, can infinitely increase in theory.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of large-range plane type maglev linear-motion platform realizing mechanical contact, effectively can improve the working space of kinematic system, kinematic accuracy and dynamic response performance, for microelectronic chip manufacturing equipment provides the bidimensional maglev linear-motion platform of a kind of cleaning, high speed and super precision
In order to solve the problems of the technologies described above, planar maglev linear-motion platform provided by the invention, mainly comprise: base, electromagnet bearing, the magnetic realizing plane motion floats workbench, the vertical current vortex sensor of four covers, magnetic floats the workload on workbench, four supporting electromagnetic bearings of four pairs of vertical Differential Driving electromagnet compositions, for detecting two cover linear grating chis of displacement motor, location-plate, driving arm, vertical placement is respectively along X, two linear electric motors of Y direction motion, the two pair closed slides consistent with the linear electric motors direction of motion, spacing detection optoelectronic switch, limited block, every one dimension linear movement direction there are two rolling bearings, the guiding electromagnetic bearing that each linear movement guide direction is respectively made up of the horizontally-guided electromagnet of two pairs of Differential Driving.
The technical characteristic that a kind of planar maglev linear-motion platform of the present invention solves Long Distances problem comprises: 1, the four supporting electromagnetic bearings vertical Differential Driving electromagnet being formed to four differential type ACTIVE CONTROL, by detecting the positional information of the current vortex sensor installed near often pair of electromagnet as feedback control signal, electric current in control coil is to control the electromagnetic force supporting electromagnetic bearing generation, magnetic can be made to float workbench be stably suspended in above electromagnet bearing, contact with mechanical between vertical bearing when ensureing that magnetic floats workbench work, electromagnet bearing is non-magnet material, it is high-permeability material that electromagnet and magnetic float workbench, the magnetic of maglev linear-motion platform floats the square bathtub construction that workbench is hollow, and adjacent both sides are mutually vertical, wherein have two adjacent vertical edges to play the railway effect of X, Y-direction rectilinear motion respectively, the stator of two linear electric motors is installed on base, the driving arm connecting each linear electric motors is provided with two guiding and the rolling bearings driven and two by Differential Driving guiding electromagnet to the guiding electromagnetic bearing formed, the guide rail limit that magnetic floats workbench is placed between the right space of magnet, under the driving effect of two linear electric motors, magnetic floats workbench and load can be moved along orthogonal two-dimensional plane direction, by the guide effect of two pairs of horizontal direction guiding electromagnetic bearings, mechanical coupling between two-dimensional motion, thus magnetic can be made to float workbench realize large-scale plane motion.2, each driving arm be connected with linear electric motors motion parts is non-magnet material, two flexible guiding electromagnetic bearings support comprising respectively two rigidity rolling bearings and be made up of two pairs of Differential Driving electromagnet; Guiding electromagnetic bearing carries out position servo feedback by current vortex sensor, and controlled making is used in magnetic and floats electromagnetic force on workbench guide edge and the guide rail gap position relative to electromagnet; Rolling bearing external diameter floats the guide rail surface of workbench minimum distance from magnetic than electromagnet outer surface from it apart from little; guiding electromagnetic bearing can be protected; under height acceleration, high thrust driving effect; the electromagnetic force of guiding electromagnetic bearing is not enough and size of gaps is difficult to keep constant time; can directly promote magnetic rigidly by rolling bearing and float working table movement, two rolling bearings and two horizontally-guided electromagnetic bearings jointly complete the guiding on every one dimension direction and drive function.4, the rolling bearing of rigidity with the integrated mode of operation of flexible guiding electromagnetic bearing is: when maglev linear-motion platform needs larger acceleration, rolling bearing Direct driver magnetic floats workbench, and the electromagnetic bearing that wherein leads plays and cushions and avoid the effect of rigid collision; When maglev linear-motion platform needs smaller acceleration, guiding electromagnetic bearing can float workbench by Direct driver magnetic, realize magnetic float guiding and linear drives between integrated; 5, linear electric motors are servomotor, high accuracy feedback element and linear grating chi detection system are housed respectively, can realize its precise flange, and optoelectronic switch and limited block carry out the automatically controlled and two position-limiting action of mechanical system to its extreme position.
Compared with background technology, the invention has the beneficial effects as follows:
1, float with the magnetic of the maglev linear-motion platform of workload electromagnetic force that workbench produced by the vertical supporting electromagnetic bearing of control four and load keeps balancing, make magnetic float workbench in vertical direction stable suspersion in operating position; By the driving force that linear electric motors provide, magnetic is driven to float workbench by the rigidity rolling bearing of driver element or the guiding magnetic bearing of flexibility, make magnetic float workbench in horizontal plane, produce rapid movement and there is larger plane stroke range, realize vertical supporting, being separated between linear movement guide with linear drives that magnetic floats workbench;
2, when magnetic float workbench need stable suspersion time, four guiding electromagnetic bearings of the electromagnet composition of four four the supporting electromagnetic bearings formed vertical electromagnet and four pairs of horizontal rectilinear motion guiding all make it be suspended in settling position by the position feedback control of current vortex sensor.Namely, during steady operation, magnetic floats workbench and contacts with mechanical between bearing and linear motor motion system, avoid because of mechanical friction bring creep, lubricant pollution, the problem such as wearing and tearing, there is higher dynamic response performance and kinematic accuracy.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention, and Fig. 1 (a) is front view, and 1 (b) is top view.In Fig. 1: base (1), electromagnet bearing (2), magnetic floats workbench (3), the four vertical current vortex sensor of covers (4), workload (5), four pairs of vertical Differential Driving " U " shape electromagnet (6), for detecting two covers linear grating chi (7) of displacement motor, location-plate (8), driving arm (9), respectively along X on horizontal plane, two linear electric motors (10) of Y direction motion, the two pair closed slides (11) consistent with motor movement direction, optoelectronic switch (12), limited block (13), two rolling bearings (14) on every motion in one dimension direction, each guide direction respectively there are two pairs of horizontally-guided electromagnet (15).
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the invention will be further described.
See Fig. 1, planar maglev linear-motion platform of the present invention, critical piece comprises: a base (1), an electromagnet stent (2) (for fixed bearing four to vertical electromagnet), magnetic in platform floats workbench (3), the four vertical current vortex sensor of covers (4), workload (5), four pairs of vertical Differential Driving electromagnet (6), for detecting two covers linear grating chi (7) of displacement motor, location-plate (8), driving arm (9), horizontal plane is vertically placed respectively along X, two linear electric motors (10) of Y-direction rectilinear motion, the two pair closed slides (11) consistent with the linear electric motors direction of motion, optoelectronic switch (12), limited block (13), two rolling bearings (14) of auxiliary guiding on every motion in one dimension direction, each guide direction respectively there is the horizontally-guided electromagnet (15) of two pairs of Differential Driving.Two linear electric motors can be identical, also can be different, determines according to particular row range request.Two linear electric motors actings in conjunction are floated on workbench in the magnetic of maglev linear-motion platform, magnetic floats the floating guiding of magnetic of workbench electromagnet on driving arm with under push-and-pull action, relative to self guide groove moving linearly, two-dimensional direction motion is separate, mechanical and electrical couplings, make platform can produce plane motion on a large scale.
The present invention has four four the supporting electromagnetic bearings formed " U " type electromagnet (6) on the gravity direction of maglev linear-motion platform perpendicular to ground, " U " shape electromagnet core around each supporting electromagnetic bearing is wrapped with water conservancy diversion coil, often pair of electromagnet opening surface is just right, middle float the platen surface of workbench for magnetic, and the gap that maintenance is determined.When being energized in coil, relative power-on and power-off magnet produces electromagnetic attraction, utilize the position feedback information of current vortex sensor to carry out position servo control, in the electromagnet of supporting electromagnetic bearing electromagnetic force supporting role under magnetic can be made to float workbench keep stable suspersion and not contacting with iron core.Electric current in the coil of four vertical supporting electromagnetic bearings is in plug-type Differential Control mode, the electromagnetic force each electromagnetic bearing being produced determine is with balancing gravity and external disturbance power, magnetic can be made to float workbench be stably suspended in above electromagnet bearing, contact with mechanical between vertical support when ensureing that magnetic floats workbench work.
For improving the magnetic conduction efficiency of supporting and guiding electromagnetic bearing, reduce magnetic interference and leak and grow, avoid magnet short-cut path, support adopts non-magnet material, and it is high-permeability material that electromagnet and magnetic float workbench.Magnetic floats the square bathtub construction that workbench is hollow, and adjacent both sides are mutually vertical, wherein have two adjacent vertical edges to play guide rail and bear the effect of linear electric motors driving force; Two linear electric motors are arranged on base, the connection driving arm of each linear electric motors motion parts is provided with two guiding and driving rolling bearing and two guiding electromagnetic bearings, the guide rail limit that magnetic floats workbench is placed between the right space of magnet, under the driving effect of two linear electric motors, magnetic floats workbench and can move along orthogonal two-dimensional plane direction, by the guide effect of two pairs of horizontal direction guiding electromagnets, two-dimensional motion mechanical is coupled, thus magnetic can be made to float workbench realize large-scale plane motion.
Each driving arm be connected with electric mover also adopts non-magnet material, support comprises respectively the rolling bearing of two rigidity drivings and the differential type guiding electromagnetic bearing of two pairs of soft drive.The guide edge that magnetic floats workbench is placed between the air gap of two electromagnet that each guiding electromagnetic bearing is relative, carry out position servo feedback by current vortex sensor, controlled making is used in magnetic and floats electromagnetic force on workbench guide edge and the guide rail size of gaps relative to electromagnet.Rolling bearing external diameter from the minimum distance of mover guide rail surface than electromagnet outer surface from it apart from little; guiding electromagnetic bearing can be protected; under height acceleration, high thrust driving effect; the electromagnetic force of guiding electromagnetic bearing is not enough and size of gaps is difficult to keep constant time, can directly promote magnetic by rolling bearing and float working table movement.And when magnetic floats workbench steady operation, magnetic floats between table vertical direction two guide edge and driving arm and also keep contactless suspended state under the effect of electromagnetic force, now rolling bearing is inoperative.Two rolling bearings and two horizontally-guided electromagnetic bearings jointly complete the guiding on every one dimension direction and drive function.
The rolling bearing of rigidity with the cooperative work mode of flexible guiding electromagnetic bearing is: before rectilinear motion, first keeps magnetic to float workbench and is in stable suspersion state.In linear drives process, when magnetic float workbench need larger acceleration time, due to the limited and temporary instability of electromagnetic force, rigidity rolling bearing first can contact guide rail Direct driver magnetic and float working table movement, and the electromagnetic bearing that wherein leads plays and cushions and avoid the effect of rigid collision; When magnetic float workbench need smaller driving force time, guiding electromagnetic bearing the magnetic of Direct driver platform can float workbench, now magnetic floats workbench and linear drive system is in contactless suspension duty, achieves vertical supporting, being separated between linear movement guide with linear drives that magnetic floats workbench.Wherein rolling bearing plays process auxiliary drive effect.
The linear electric motors that linear drives adopts are servomotor, high precision displacement feedback element (linear grating chi) is housed respectively, can realizes its precise flange.The forward and reverse direction of motion of every one dimension is all provided with optoelectronic switch and limited block, the automatically controlled and two spacing control of mechanical system is carried out to its extreme position.Optoelectronic switch first detects extreme position and is sent to bit switch signal, and control system takes spacing action according to the signal detected.
The workload that magnetic floats on workbench is target job system, and the typical apply example of shown in figure places a set of lead bonding joint, and the bonding motion controlling the motion fit key syncephalon of maglev linear-motion platform can carry out high-speed lead bonding to chip.
When platform normally works, magnetic with workload floats electromagnetic force that first workbench make the supporting electromagnetic bearing of vertical direction produce by control system and load gravity keeps balancing, the balancing work position making magnetic float workbench stable suspersion on vertical to determine; The guiding electromagnetic bearing also first steady operation of horizontal direction, makes platform guide edge be in air gap centre position, thus make whole magnetic float workbench be in mechanical contact suspension duty completely.
When carrying out the operation of acceleration, deceleration rectilinear motion, by the driving force that linear electric motors provide, by driver element rigidity rolling bearing or guiding electromagnetic bearing drive magnetic float workbench, make magnetic float workbench in horizontal plane, produce rapid movement and there is larger plane stroke range, realize magnetic float guiding and drive between integrated;
During maglev linear-motion platform steady operation, magnetic floats between operating system with linear drive system and is separated, magnetic floats workbench and contacts with mechanical between pedestal and linear drive system, avoid in linear motion because of mechanical friction bring creep, lubricant pollution, the problem such as wearing and tearing, there is higher dynamic response performance and kinematic accuracy, there is better cleaning ambient.

Claims (4)

1. a planar maglev linear-motion platform, critical piece comprises: base (1), electromagnet bearing (2), magnetic floats workbench (3), the four vertical current vortex sensor of covers (4), workload (5), four pairs of vertical Differential Driving electromagnet (6), for two covers linear grating chi (7) of detection of straight lines displacement motor, location-plate (8), driving arm (9), vertical placement is respectively along X, two linear electric motors (10) of Y direction motion, the two pair closed slides (11) consistent with the linear electric motors direction of motion, optoelectronic switch (12), limited block (13), two rolling bearings (14) on every one dimension linear movement direction, each straight-line guidance direction respectively there are two pairs of horizontally-guided electromagnet (15), the supporting electromagnetic bearing of four pairs of vertical Differential Driving electromagnet (6) compositions, four ACTIVE CONTROL, the guiding electromagnetic bearing of two pairs of horizontally-guided electromagnet (15) compositions, two soft drive in each guide direction, the magnetic detected by the current vortex sensor installed near often pair of electromagnet floats operating position information as feedback control signal, the electromagnetic force that electric current in control coil produces to control each electromagnetic bearing respectively, the balancing work position that magnetic can be made with floating workbench and upper load stabilization thereof to be suspended in electromagnet bearing determine above, contact with vertical electromagnet bearing and with mechanical between the linear electric motors of horizontal direction when ensureing that magnetic floats workbench work, realize the vertical supporting that magnetic floats workbench, being separated between linear movement guide with linear drives, electromagnet bearing is non-magnet material, it is high-permeability material that electromagnet and magnetic float workbench, magnetic floats the square bathtub construction that workbench is hollow, adjacent both sides are mutually vertical, two adjacent vertical edges are wherein had to play railway effect, two linear electric motors are arranged on base, the driving arm of each motor is provided with two horizontally-guided electromagnetic bearings of two guiding and driving rolling bearing and two pairs of electromagnet compositions, the guide rail limit that magnetic floats workbench is placed between the right space of the often pair of electromagnet, under the horizontal drive effect of two linear electric motors, magnetic floats workbench and can move along orthogonal two-dimensional plane direction in the horizontal direction, by the guide effect of two pairs of horizontally-guided electromagnet, mechanical coupling between bidimensional rectilinear motion, thus maglev linear-motion platform can be made to realize large-scale plane motion.
2. a kind of planar maglev linear-motion platform according to claim 1, it is characterized in that: each driving arm be connected with each linear motor rotor is non-magnet material, support comprises respectively the guiding electromagnetic bearing of the rolling bearing of two rigidity drivings and two soft drive of two pairs of horizontally-guided electromagnet compositions, each guiding electromagnetic bearing carries out position servo feedback by adjacent current vortex sensor, controlled making be used in magnetic float electromagnetic push on workbench guide edge guide rail and guide rail relative to each electromagnetic bearing electromagnet pair between gap position; Rolling bearing external diameter floats table slide surface minimum distance from magnetic than electromagnet outer surface from it apart from little; guiding electromagnetic bearing can be protected; under height acceleration, high thrust driving effect; the electromagnetic push of guiding electromagnetic bearing is not enough and size of gaps is difficult to keep constant time; can directly promote magnetic by rolling bearing and float working table movement, two rolling bearings and two horizontally-guided electromagnetic bearings jointly complete the guiding on every one dimension direction and drive function.
3. a kind of planar maglev linear-motion platform according to claim 1, it is characterized in that: rolling bearing with the integrated mode of operation of horizontally-guided electromagnetic bearing is: when the acceleration that maglev linear-motion platform needs are larger, rolling bearing Direct driver magnetic floats working table movement, and the electromagnetic bearing that wherein leads plays and cushions and avoid the effect of rigid collision; When maglev linear-motion platform needs smaller driving force, guiding electromagnetic bearing can float working table movement by Direct driver magnetic, be mechanical contact soft drive, realize guiding the contactless guiding of electromagnetic bearing and drive between integrated.
4. a kind of planar maglev linear-motion platform according to claim 1, it is characterized in that: linear electric motors are servomotor, high accuracy feedback element linear grating chi is housed respectively, can realize its Precision Linear Moving to control, optoelectronic switch and limited block carry out the automatically controlled and two position-limiting action of mechanical system to its extreme position.
CN201110291618.4A 2011-09-30 2011-09-30 A kind of planar maglev linear-motion platform Expired - Fee Related CN102501224B (en)

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CN104533887A (en) * 2014-12-10 2015-04-22 马继刚 Method of utilizing hydraulic servo principle for conducting hydraulic suspension on shaft parts
CN105890913A (en) * 2016-05-30 2016-08-24 清华大学苏州汽车研究院(相城) Stroke-variable trolley return photoelectric detection mechanism and collision simulation trolley device
CN109099898A (en) * 2018-08-17 2018-12-28 北京理工大学 A kind of mobile service system based on self-stabilization platform

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