JP3156283B2 - Linear motor device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor device, and more particularly, to a linear motor device for preventing a gap between a slider and a guide block from being disturbed by thermal expansion of a slider due to heat generation of a coil portion. The present invention relates to a structure of a motor device.

[0002]

2. Description of the Related Art In a wire bonding means for connecting a semiconductor electrode and a substrate electrode with wires, an air bearing linear motor device is frequently used as means for sliding a wire bonder at high speed in XY directions.

FIG. 3 shows a conventional linear motor device. In the drawing, reference numeral 100 denotes a guide block having a coil portion 101. 102 is the guide block 1
The slider 103 is slidably mounted on the slider 100, and a magnet 103 is mounted at a position facing the coil unit 101. Note that the center line NA1 of the coil unit 101 and the center line NA2 of the magnet 103 match. Due to the air pressure of the air blown out from the air blowing portion 104 perforated in the slider 102, the joining surfaces 100a and 100b of the guide block 100 and the joining surface 102 of the slider 102
Reference numerals a and 102b maintain the state in which they are close to each other with a slight gap G, and when the coil portion 101 is energized, the slider 102 slides on the guide block 100 by the magnetic force.

[0004]

However, the coil portion 1
While the coil 101 is energized, the coil portion 101 gradually generates heat, and the heat causes the slider 102 to thermally expand and expand. As a result, the size of the gap G changes, so that only the magnetic force is disturbed. No, and in some cases joint surface 10
0b and the joint surface 102b are in sliding contact with each other, so that the slider 102 cannot slide smoothly.

Accordingly, an object of the present invention is to provide a linear motor device which can solve the above-mentioned problems caused by heat generation of the coil portion.

[0006]

For this purpose, the present invention provides a guide block, a slider slidably mounted on the guide block, a coil portion provided at the center of the guide block, and A magnet provided at a central portion of the slider facing the coil portion, an upright wall is erected only on one side of the guide block, and a joining surface of the slider facing the upright wall and both
An air outlet is provided on the lower surface of the end to form an air bearing.
A free end which can freely extend the other side of the slider.
During no, also the magnet and the coil unit and, said slider so as to generate a thrust force to adsorb to the air bearing side, and the above magnet, and the coil portion is relatively displaced constitute a linear motor device.

[0007]

According to the above construction, when the coil section is energized and air is blown out from the air blowing section, the slider is moved in the opposite direction to the air bearing due to the reaction force of the air blown out from the air bearing on the joint surface of the slider. However, the reaction force is canceled by the thrust force generated between the coil portion and the magnet, and an appropriate gap is maintained between the joining surfaces of the upright wall and the slider. Although the slider thermally expands due to the heat generated by the coil portion, the slider can freely extend to the side opposite to the air bearing, so that the gap is appropriately maintained.

[0008]

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view of a linear motor device, and FIG. 2 is a sectional view. Reference numeral 1 denotes a guide block, and a coil portion 2 is provided at the center thereof. The guide block 1 has a horizontal L-shaped cross section, and an upright wall 1a is provided upright only on one side thereof, and an inner surface of the upright wall 1a is a joint surface 1a 'for sliding.

Reference numeral 3 denotes a plate-shaped slider, which is slidably mounted on the guide block 1.
In FIG. 2, reference numeral 4 denotes a magnet, which is attached to the slider 3 so as to face the coil portion 2. The center line NA1 of the coil portion 2 is displaced from the center line NA2 of the magnet 4 by the width t in the direction of the vertical wall 1a. Thus, by displacing the magnet 4 and the coil portion 2 relatively, a thrust force for attracting the slider 3 to the standing wall 1a is generated. Further, one side thereof is a bonding surface 3a for bonding with a slight gap G to the bonding surface 1a ', and the other side can be freely extended.
Free end . The slider 3 has perforations 5 (5a, 5b, 5c) forming an air bearing on the joint surface 3a side and the lower surface side of both ends, and the air blown out from these air vents 5 is formed. The slider 3 slightly floats on the guide block 1 due to the reaction force.

In FIG. 1, reference numeral 11 denotes a wire bonder, which comprises a driving unit 12, a horn 13 extending from the driving unit 12, and a capillary tool 14 held at the tip of the horn 13, and a slider. 3 is installed. When the coil portion 2 is energized, the slider 3 moves the guide block 1 by a magnetic force generated between the coil portion 2 and the magnet 4.
The wire bonding is performed by the wire 15 which is slid in the longitudinal direction and inserted into the capillary tool 14.

The present apparatus has the above-described configuration, and the operation will be described next. As shown in FIG. 1, when the coil section 2 is energized and air is blown out from each air blowing section 5, the slider 3 slightly floats on the guide block 1 and slides on the guide block 1 due to the air pressure. Here, in FIG. 2, the slider 3 tends to be pushed rightward by the reaction force of the air pressure blown from the air blowing portion 5 a, but the coil portions 2 which are arranged to be displaced from each other as described above.
Since the thrust force generated between the slider 3 and the magnet 4 acts to the left, the above-mentioned reaction force and this thrust force cancel each other out, so that the slider 3 is not pushed rightward. Joining surfaces 1a ', 3a
The gap is maintained at an appropriate gap G, and the slider 3 can slide smoothly.

During operation for a long time, the coil portion 2 gradually generates heat, and the heat causes the slider 3 to thermally expand and expand. However, the slider 3 is located on the opposite side (right side in FIG. 2) of the upright wall 1a of the guide block 1. Since there is no obstacle wall, the slider 3 can freely extend to the right, and the gap G is properly maintained. Thus, the joining surface 1 as occurs in conventional means
Unnecessary friction between the a 'and the joining surface 3a is eliminated, and the sliding can be smoothly performed at a high speed even with a small magnetic force.

The present invention is not limited to the above embodiment. For example, an XY table in which the wire bonder 11 and the like are slid in the XY directions can be formed by, for example, combining two of the present devices orthogonally.

[0015]

As described above, the present invention provides a guide block, a slider slidably mounted on the guide block, a coil portion provided at the center of the guide block, and a coil portion. And a magnet provided at the center of the slider facing the slider, and the guide block is provided with an upright wall only on one side thereof, and is provided below the joining surface and both ends of the slider facing the upright wall.
An air bearing is provided on the surface to form an air bearing.
A free end that can freely extend the other side of the slider ,
The magnet and the coil are relatively displaced between the magnet and the coil to generate a thrust force for attracting the slider to the air bearing, so that the slider is opposite to the air bearing. be pushed out in the direction is not the name. The other side of the slider extends freely.
The free end can be extended so that the heat generated by the coil
Ri even if the slider is thermal expansion, thermal expansion, the slider other
It is absorbed by extending to the side (free end),
Accordingly, an appropriate gap is maintained between the joining surfaces of the standing wall and the slider, and unnecessary friction between the joining surfaces, which occurs in the conventional means, is eliminated, and the slider can slide smoothly.

[Brief description of the drawings]

FIG. 1 is a perspective view of a linear motor device according to the present invention.

FIG. 2 is a sectional view of a linear motor device according to the present invention.

FIG. 3 is a sectional view of a linear motor device according to a conventional means.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Guide block 1a Standing wall 2 Coil part 3 Slider 3a Joining surface 4 Magnet 5 Air blowing part

Claims (1)

(57) [Claims] 1. A guide block, a slider slidably mounted on the guide block, a coil provided at a center of the guide block, and a slider provided at a center of the slider opposed to the coil. The guide block is provided with an upright wall only on one side, and an air blowout portion is provided on the lower surface of the joint surface and both end portions of the slider facing the upright wall to provide an air bearing. And extend the other side of the slider freely.
Wherein the free end and without that can also between the magnet and the coil portion, the slider so as to generate a thrust force to adsorb to the air bearing side, and the magnet, that is relatively displaced coil unit Linear motor device.