JPH0549228A - Linear motor device - Google Patents

Linear motor device

Info

Publication number
JPH0549228A
JPH0549228A JP3201672A JP20167291A JPH0549228A JP H0549228 A JPH0549228 A JP H0549228A JP 3201672 A JP3201672 A JP 3201672A JP 20167291 A JP20167291 A JP 20167291A JP H0549228 A JPH0549228 A JP H0549228A
Authority
JP
Japan
Prior art keywords
slider
guide block
magnet
coil portion
coil unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3201672A
Other languages
Japanese (ja)
Other versions
JP3156283B2 (en
Inventor
Kazuo Arikado
一雄 有門
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20167291A priority Critical patent/JP3156283B2/en
Publication of JPH0549228A publication Critical patent/JPH0549228A/en
Application granted granted Critical
Publication of JP3156283B2 publication Critical patent/JP3156283B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01004—Beryllium [Be]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]

Abstract

PURPOSE:To prevent the generation of warp in a gap between a slider and a guide block due to the thermal expansion of the slider, which is canseel by the heat generation of a coil unit. CONSTITUTION:A linear motor device is provided with a guide block 1, a slider 3, put slidably on the guide block 1, a coil unit 2 provided at the central part of the guide block 1 and a magnet 4 provided at the central part of the slider 3 opposed to the coil unit 2. An upright wall 1a is established on one side of the guide block 1 and the slider 3, opposed to the upright wall 1a, is provided with air outlet units 5 on the contacting surface thereof to form air bearings while the magnet 4 is displaced relatively to the coil unit 2 so as to generate a thrust force, attracting the slider 3 to the side of the air bearings, between the magnet 4 and the coil unit 2.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明はリニアモータ装置に係
り、詳しくは、コイル部の発熱にともなうスライダの熱
膨張により、スライダとガイドブロックの間のギャップ
に狂いが生じるのを防止するようしたリニアモータ装置
の構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a linear motor device, and more particularly to a linear motor device for preventing a gap between a slider and a guide block from being deformed due to thermal expansion of the slider due to heat generation of a coil portion. The present invention relates to the structure of a motor device.

【０００２】[0002]

【従来の技術】半導体の電極と基板の電極をワイヤで接
続するワイヤボンディング手段において、ワイヤボンダ
を高速度でＸＹ方向にスライドさせる手段として、空気
軸受式リニアモータ装置が多用されている。2. Description of the Related Art In a wire bonding means for connecting a semiconductor electrode and a substrate electrode with a wire, an air bearing linear motor device is widely used as a means for sliding a wire bonder in XY directions at high speed.

【０００３】図３は、従来のリニアモータ装置を示すも
のであって、図中、１００はガイドブロックであり、コ
イル部１０１を有している。１０２はガイドブロック１
００上にスライド自在に載置されたスライダであり、コ
イル部１０１に対向する位置にマグネット１０３が装着
されている。なお、コイル部１０１の中心線ＮＡ１とマ
グネット１０３の中心線ＮＡ２は一致している。スライ
ダ１０２に穿孔されたエア吹出部１０４から吹き出され
る空気の空気圧により、ガイドブロック１００の接合面
１００ａ、１００ｂと、スライダ１０２の接合面１０２
ａ、１０２ｂは、僅かなギャップＧをおいて近接した状
態を保持し、コイル部１０１に通電すると、その磁気力
により、スライダ１０２はガイドブロック１００上をス
ライドするようになっている。FIG. 3 shows a conventional linear motor device, in which 100 is a guide block having a coil portion 101. 102 is a guide block 1
00 is a slider that is slidably mounted on a magnet, and a magnet 103 is mounted at a position facing the coil portion 101. The center line NA1 of the coil portion 101 and the center line NA2 of the magnet 103 coincide with each other. Due to the air pressure of the air blown from the air blowing portion 104 formed in the slider 102, the joining surfaces 100a and 100b of the guide block 100 and the joining surface 102 of the slider 102 are formed.
The a and 102b are kept close to each other with a slight gap G, and when the coil portion 101 is energized, the slider 102 slides on the guide block 100 by its magnetic force.

【０００４】[0004]

【発明が解決しようとする課題】ところが、コイル部１
０１に通電している間にこのコイル部１０１は次第に発
熱し、その熱によりスライダ１０２が熱膨張して伸長す
る結果、ギャップＧの大きさが変化し、このため磁気力
に狂いを生じるだけでなく、場合によっては接合面１０
０ｂと接合面１０２ｂが摺接し、スライダ１０２がスム
ーズにスライドできなくなる問題点があった。However, the coil portion 1
While the coil portion 101 is energized 01, the coil portion 101 gradually generates heat, and the heat causes the slider 102 to thermally expand and expand. As a result, the size of the gap G changes. None, depending on the case 10
0b and the joint surface 102b are in sliding contact with each other, so that the slider 102 cannot slide smoothly.

【０００５】そこで本発明は、コイル部の発熱にともな
う上記問題点を解消できるリニアモータ装置を提供する
ことを目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a linear motor device which can solve the above problems associated with heat generation of a coil portion.

【０００６】[0006]

【課題を解決するための手段】このために本発明は、ガ
イドブロックと、このガイドブロック上にスライド自在
に載置されたスライダと、このガイドブロックの中央部
に設けられたコイル部と、このコイル部に対向する上記
スライダの中央部に設けられたマグネットとを備え、上
記ガイドブロックには一方の側部のみに立壁が立設さ
れ、この立壁に対向する上記スライダの接合面にエア吹
出部を設けて空気軸受となし、また上記マグネットとコ
イル部の間に、上記スライダを上記空気軸受側へ吸着す
るスラスト力を発生させるべく、上記マグネットと、コ
イル部を相対的に変位させてリニアモータ装置を構成し
た。To this end, the present invention provides a guide block, a slider slidably mounted on the guide block, a coil portion provided at the center of the guide block, and A magnet provided in the central portion of the slider facing the coil portion, a standing wall is erected only on one side of the guide block, and an air blowout portion is provided on the joint surface of the slider facing the standing wall. To form an air bearing, and between the magnet and the coil section, the magnet and the coil section are relatively displaced to generate a thrust force that attracts the slider to the air bearing side. Configured the device.

【０００７】[0007]

【作用】上記構成によれば、コイル部に通電して、エア
吹出部から空気を吹き出すと、スライダの接合面の空気
軸受から吹き出される空気の反力により、スライダはこ
の空気軸受と反対方向に押し出されようとするが、コイ
ル部とマグネットの間に発生するスラスト力によりこの
反力は打ち消されて、立壁とスライダとの接合面間は適
正なギャップが保たれる。またコイル部の発熱によりス
ライダは熱膨張するが、スライダは上記空気軸受と反対
側に自由に伸長できるので、上記ギャップは適正に保た
れる。According to the above construction, when the coil portion is energized and air is blown out from the air blowing portion, the slider is driven in the opposite direction to the air bearing due to the reaction force of the air blown from the air bearing on the joint surface of the slider. However, the reaction force is canceled by the thrust force generated between the coil portion and the magnet, and a proper gap is maintained between the joint surface between the standing wall and the slider. Further, the slider thermally expands due to the heat generated in the coil portion, but the slider can freely extend to the side opposite to the air bearing, so that the gap is properly maintained.

【０００８】[0008]

【実施例】次に、図面を参照しながら本発明の実施例を
説明する。Embodiments of the present invention will now be described with reference to the drawings.

【０００９】図１はリニアモータ装置の斜視図、図２は
断面図である。１はガイドブロックであって、その中央
部にはコイル部２が設けられている。このガイドブロッ
ク１の断面は横Ｌ字形であって、その一側部のみに立壁
１ａが立設されており、この立壁１ａの内側面がスライ
ド用の接合面１ａ′となっている。FIG. 1 is a perspective view of a linear motor device, and FIG. 2 is a sectional view. Reference numeral 1 is a guide block, and a coil portion 2 is provided in the central portion thereof. The guide block 1 has a horizontal L-shaped cross section, and an upright wall 1a is provided upright only on one side of the guide block 1, and an inner side surface of the upright wall 1a serves as a slide joint surface 1a '.

【００１０】３はプレート状のスライダであって、この
ガイドブロック１上にスライド自在に載置されている。
図２において、４はマグネットであり、コイル部２と対
向するように、スライダ３に取り付けられている。ま
た、このコイル部２の中心線ＮＡ１は、マグネット４の
中心線ＮＡ２より幅ｔだけ上記立壁１ａ方向に変位して
いる。このようにマグネット４とコイル部２を相対的に
変位させることにより、スライダ３を立壁１ａ側へ吸着
するスラスト力を発生させる。また、その一側部は、上
記接合面１ａ′にわずかなギャップＧをおいて接合する
接合面３ａとなっている。スライダ３には、この接合面
３ａ側と両端部の下面側に空気軸受を構成するエア吹出
部５（５ａ，５ｂ，５ｃ）が穿孔されており、これらの
エア吹出部５から吹き出される空気の反力により、この
スライダ３はガイドブロック１上にわずかに浮上する。A plate-shaped slider 3 is slidably mounted on the guide block 1.
In FIG. 2, reference numeral 4 denotes a magnet, which is attached to the slider 3 so as to face the coil portion 2. The center line NA1 of the coil portion 2 is displaced from the center line NA2 of the magnet 4 by the width t in the vertical wall 1a direction. By thus relatively displacing the magnet 4 and the coil portion 2, a thrust force for attracting the slider 3 to the standing wall 1a side is generated. Further, one side thereof is a joint surface 3a which is joined to the joint surface 1a 'with a slight gap G. The slider 3 is provided with air blowout portions 5 (5a, 5b, 5c) forming air bearings on the joint surface 3a side and the lower surface sides of both ends, and the air blown out from these air blowout portions 5 is formed. The slider 3 slightly floats on the guide block 1 due to the reaction force of.

【００１１】図１において、１１はワイヤボンダであっ
て、駆動部１２と、この駆動部１２から延出するホーン
１３と、このホーン１３の先端部に保持されたキャピラ
リツール１４から成っており、スライダ３上に設置され
る。上記コイル部２に通電すると、マグネット４との間
に生じる磁気力により、スライダ３はガイドブロック１
の長手方向にスライドし、キャピラリツール１４に挿通
されたワイヤ１５により、ワイヤボンディングが行われ
る。In FIG. 1, 11 is a wire bonder, which comprises a drive unit 12, a horn 13 extending from the drive unit 12, and a capillary tool 14 held at the tip of the horn 13, and a slider. Installed on top of 3. When the coil portion 2 is energized, the slider 3 is moved to the guide block 1 by the magnetic force generated between the coil portion 2 and the magnet 4.
Wire bonding is performed by the wire 15 which is slid in the longitudinal direction and is inserted into the capillary tool 14.

【００１２】本装置は上記のような構成により成り、次
に動作を説明する。図１に示すようにコイル部２に通電
して、各エア吹出部５から空気を吹き出すと、その空気
圧により、スライダ３はガイドブロック１上にわずかに
浮上し、ガイドブロック１上をスライドする。ここで図
２において、エア吹出部５ａから吹き出される空気圧の
反力により、スライダ３は右方へ押し出されようとする
が、上記のように互いに変位して配設されたコイル部２
とマグネット４の間に発生するスラスト力が左方へ作用
するので、上記反力とこのスラスト力は互いに打ち消し
合い、したがってスライダ３が右方へ押し出されること
はなく、立壁１ａとスライダ３との接合面１ａ′，３ａ
間は適正なギャップＧに保たれ、スライダ３はスムーズ
にスライドできる。The present apparatus has the above-mentioned structure, and its operation will be described below. As shown in FIG. 1, when the coil portion 2 is energized and air is blown out from each air blowing portion 5, the slider 3 slightly floats on the guide block 1 due to the air pressure and slides on the guide block 1. Here, in FIG. 2, the slider 3 tends to be pushed out to the right by the reaction force of the air pressure blown out from the air blowing portion 5a, but the coil portion 2 arranged by being displaced from each other as described above.
Since the thrust force generated between the magnet 4 and the magnet 4 acts to the left, the reaction force and this thrust force cancel each other out, so that the slider 3 is not pushed to the right, and the standing wall 1a and the slider 3 are not pushed out. Bonding surface 1a ', 3a
The gap G is maintained at an appropriate interval, and the slider 3 can slide smoothly.

【００１３】長時間運転する間に、コイル部２は次第に
発熱し、その熱によりスライダ３は熱膨張して伸長する
が、ガイドブロック１の立壁１ａの反対側（図２におい
て右方）には障害となる壁がないので、スライダ３は右
方へ自由に伸長でき、上記ギャップＧは適正に保持され
る。したがって従来手段において生じるような接合面１
ａ′と接合面３ａの不要な摩擦は無くなり、小さな磁気
力であっても高速度でスムーズにスライドさせることが
できる。During long-time operation, the coil portion 2 gradually generates heat, and the heat causes the slider 3 to thermally expand and expand, but on the side opposite to the standing wall 1a of the guide block 1 (on the right side in FIG. 2). Since there is no obstacle wall, the slider 3 can freely extend to the right and the gap G is properly held. Therefore, the joining surface 1 as occurs in the conventional means
Unnecessary friction between a'and the joining surface 3a is eliminated, and even a small magnetic force can be smoothly slid at high speed.

【００１４】本発明は上記実施例に限定されないのであ
って、例えば本装置を２個直交させて組み合わせること
により、上記ワイヤボンダ１１等をＸＹ方向にスライド
させるＸＹテーブルとなすこともできる。The present invention is not limited to the above-mentioned embodiment. For example, two wire bonding devices 11 and the like can be combined to make an XY table for sliding the wire bonder 11 in the XY directions.

【００１５】[0015]

【発明の効果】以上説明したように本発明は、ガイドブ
ロックと、このガイドブロック上にスライド自在に載置
されたスライダと、このガイドブロックの中央部に設け
られたコイル部と、このコイル部に対向する上記スライ
ダの中央部に設けられたマグネットとを備え、上記ガイ
ドブロックには一方の側部のみに立壁が立設され、この
立壁に対向する上記スライダの接合面にエア吹出部を設
けて空気軸受となし、また上記マグネットとコイル部の
間に、上記スライダを上記空気軸受側へ吸着するスラス
ト力を発生させるべく、上記マグネットと、コイル部を
相対的に変位させたことにより、このスライダが空気軸
受と反対方向に押し出されることはなく、またコイル部
の発熱によるスライダの熱膨張を吸収して、立壁とスラ
イダとの接合面間は適正なギャップが保持され、従来手
段において生じるような接合面間の不要な摩擦が無くな
り、スライダをスムーズにスライドさせることができ
る。As described above, according to the present invention, the guide block, the slider slidably mounted on the guide block, the coil portion provided in the central portion of the guide block, and the coil portion are provided. A magnet provided in the central portion of the slider facing each other, and a standing wall is erected only on one side of the guide block, and an air blowing portion is provided on the joining surface of the slider facing the standing wall. And an air bearing, and the magnet and the coil portion are relatively displaced in order to generate a thrust force that attracts the slider to the air bearing side between the magnet and the coil portion. The slider will not be pushed out in the direction opposite to the air bearing, and the thermal expansion of the slider due to the heat generation of the coil will be absorbed, and the space between the joint surface Proper gap is maintained, there is no unnecessary friction between joint surfaces, such as occurs in conventional means, it is possible to slide the slider smoothly.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明に係るリニアモータ装置の斜視図FIG. 1 is a perspective view of a linear motor device according to the present invention.

【図２】本発明に係るリニアモータ装置の断面図FIG. 2 is a sectional view of a linear motor device according to the present invention.

【図３】従来手段に係るリニアモータ装置の断面図FIG. 3 is a sectional view of a linear motor device according to conventional means.

【符号の説明】[Explanation of symbols]

１ ガイドブロック １ａ 立壁 ２ コイル部 ３ スライダ ３ａ 接合面 ４ マグネット ５ エア吹出部 1 Guide block 1a Standing wall 2 Coil part 3 Slider 3a Joining surface 4 Magnet 5 Air blowout part

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】ガイドブロックと、このガイドブロック上
にスライド自在に載置されたスライダと、このガイドブ
ロックの中央部に設けられたコイル部と、このコイル部
に対向する上記スライダの中央部に設けられたマグネッ
トとを備え、上記ガイドブロックには一方の側部のみに
立壁が立設され、この立壁に対向する上記スライダの接
合面にエア吹出部を設けて空気軸受となし、また上記マ
グネットとコイル部の間に、上記スライダを上記空気軸
受側へ吸着するスラスト力を発生させるべく、上記マグ
ネットと、コイル部を相対的に変位させたことを特徴と
するリニアモータ装置。1. A guide block, a slider slidably mounted on the guide block, a coil portion provided in the central portion of the guide block, and a central portion of the slider facing the coil portion. The guide block is provided with an upright wall only on one side, and an air blowout part is provided on the joint surface of the slider facing the upright wall to form an air bearing. Between the magnet and the coil portion, the magnet and the coil portion are relatively displaced in order to generate a thrust force that attracts the slider to the air bearing side.
JP20167291A 1991-08-12 1991-08-12 Linear motor device Expired - Fee Related JP3156283B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20167291A JP3156283B2 (en) 1991-08-12 1991-08-12 Linear motor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20167291A JP3156283B2 (en) 1991-08-12 1991-08-12 Linear motor device

Publications (2)

Publication Number Publication Date
JPH0549228A true JPH0549228A (en) 1993-02-26
JP3156283B2 JP3156283B2 (en) 2001-04-16

Family

ID=16444989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20167291A Expired - Fee Related JP3156283B2 (en) 1991-08-12 1991-08-12 Linear motor device

Country Status (1)

Country Link
JP (1) JP3156283B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116505A1 (en) * 2006-03-31 2007-10-18 Hitachi, Ltd. Linear motor
JP2009053210A (en) * 2008-12-02 2009-03-12 Sumitomo Heavy Ind Ltd Stage device and semiconductor inspecting apparatus
WO2009069423A1 (en) * 2007-11-30 2009-06-04 Kabushiki Kaisha Yaskawa Denki Slide stage, and slide stage movable in x- and y-directions
CN114175476A (en) * 2019-07-19 2022-03-11 雅科贝思私人有限公司 Iron core linear motor force application device with integrated aerostatic bearing direction

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116505A1 (en) * 2006-03-31 2007-10-18 Hitachi, Ltd. Linear motor
WO2009069423A1 (en) * 2007-11-30 2009-06-04 Kabushiki Kaisha Yaskawa Denki Slide stage, and slide stage movable in x- and y-directions
JP5353710B2 (en) * 2007-11-30 2013-11-27 株式会社安川電機 Slide stage and XY direction movable slide stage
TWI460047B (en) * 2007-11-30 2014-11-11 Yaskawa Denki Seisakusho Kk Sliding table and XY direction movable sliding table
KR101478393B1 (en) * 2007-11-30 2014-12-31 가부시키가이샤 야스카와덴키 Slide stage, and slide stage movable in x- and y-directions
JP2009053210A (en) * 2008-12-02 2009-03-12 Sumitomo Heavy Ind Ltd Stage device and semiconductor inspecting apparatus
CN114175476A (en) * 2019-07-19 2022-03-11 雅科贝思私人有限公司 Iron core linear motor force application device with integrated aerostatic bearing direction

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