JPS61209840A - Table with linear motor - Google Patents

Abstract

PURPOSE:To fix a table body with good response merely by controlling electrically by installing an elastic body between a linear bearing and either of a base or said table body. CONSTITUTION:When a pulse is inputted in the movable member 19 of a linear motor 17, the movable member 19 is fed in the longitudinal direction of a base 1 at every 1/4 pitches with respect to the fixed member 18 of a table body 3 while maintaining a gap (g) which is determined by load, suction force between the movable body 19 and the fixed member 18, and an elastic modulus of a conical spring 8 between each linear bearing 2 and the base 1. When the table body 3 is to be fixed, a current for the movable member 19 is increased to increase the suction force toward the fixed member 18, while the conical springs 8 are deflected to reduce the gap (g), which rapidly increases the suction force to firmly hold the table body 3. When the gap l between the bearing 2 and the base 1 becomes zero, the fixed member 18 is brought into close contact with the movable member 29, stably holding the table 3.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a table with a linear motor in which a linear motor is interposed between opposing surfaces of a first member such as a table body and a second member such as a base. Regarding.

(Prior Art) Conventionally, this type of table saves space because, for example, a linear motor as a drive source is inserted between the table main body as a first member and the base as a second member. In addition, it is possible to reduce the size and weight because there is no need for a drive mechanism that converts the rotation of the motor into reciprocating motion of the table body, unlike when driving with a rotary motor. It has an excellent advantage of being able to perform accurate positioning. A predetermined gap is provided between the stator and the movable element of the linear motor, and the table main body is transported by a constant thrust and is self-held by electromagnetic force at a stopped position.

(Problem to be solved by the invention) However, in the case of such a conventional example, when machining work etc. is performed on the table body, the table body cannot be moved by the suction force between the stator and mover of the linear motor alone. Because it moves and is unstable, the table body had to be mechanically fixed using a separate clamping device. In other words, if the gap between the stator and the mover is made smaller, the suction force will be increased, and the holding force at the stop position will also be increased, but if the gap is made smaller, the gap between the table body and the base will become weaker, etc. There was a risk that the mover and stator would interfere, and a gap of a certain size was required to absorb the evening light. Therefore, there is a problem in that a swivel for attaching a clamping device or the like is required, and the space-saving effect achieved by using a linear motor is halved. Further, there is a problem in that a clamping device or the like must be attached, making it troublesome to assemble the table. Furthermore, fixing the table body using a clamp device or the like only holds a part of the table body so that the table body does not move, and the table body cannot be fixed evenly. As a result, there are problems such as the table body lifting up when it rotates around the holder.

The present invention has been made in order to solve the problems of the prior art, and its purpose is to make the gap between the stator and mover of a linear motor variable so that the first member and the first member When fixing the second member, the gap is made as small as possible or zero to increase the holding force, and the IJ linear motor can fix the first member and the λ-th member only with the suction force of the linear motor. The purpose is to provide an attached table.

(Means for Solving the Problems) Therefore, in order to achieve the above object, the present invention has the following features:
and a second member are supported so as to be relatively movable via a linear bearing, and a stator and a movable element are disposed facing each other between opposing surfaces of the first member and the second member. an elastic body is interposed between the linear bearing and either the first member or the second member, and the linear bearing is connected to the first member by the bending of the elastic body. The second member is moved in a direction to change the gap between the facing surfaces, thereby making the gap between the stator and the movable element of the linear motor variable.

(Example) The present invention will be explained below based on the illustrated example. 1st
A first embodiment of the present invention is shown in Figures 1 to 10. In FIGS. 1 to 84 showing the overall configuration of a table with a linear motor according to the first embodiment, reference numeral 1 denotes a base as a ζ member fixed to a fixed object (not shown) such as a bed; This base 1 has two pairs of left and right linear bearings 2.
, 2 : 2. The table main body 3 as the 21b member is attached so as to be linearly movable along the longitudinal direction.

Id walls 4.4 are integrally formed on both sides of the upper surface of the base 1 and extend in the longitudinal direction and protrude upward. is arranged on the upper surface of the base 1 by a gel 5.

On the other hand, a protrusion 6 that protrudes toward the upper surface of the base 1 is formed at the center of the lower surface of the table body 1, and both sides of the protrusion 6 are formed by the side walls 4.4 of the base 1 described above. is facing. Two load ball rolling grooves 7, 7 are formed on both sides of the protrusion 6, and the linear bearing 2
It is supposed to guide you through the load of mail.

The above-mentioned linear bearing 2 is attached to the upper surface of the base 1 by means of a gel 5 via a disc spring 8 as an elastic body. The melt 5 was loosely fitted into the gel insertion hole 9 provided in the linear bearing 2, and the linear bearing 2 was formed between the top surface of the base 1 and the linear bearing 2 due to the deflection of the disc spring 8. It is possible to move only by the gap. This gap t is the stator 1 of the linear motor 17, which will be described later.
It is formed to be equal to the gap g between the movable element 8 and the movable element 19.

The relationship between the gap t and g may be such that t>g. In this case, the stator 18 and the movable element 19 are in close contact with each other, but there is still some space t.

It is also possible to set L<g, but in this case, even though the gap between the linear bearing 2 and the base 1 is zero, there is still a gap between the stator 18 and the mover 19. , g are desirably formed to values as close to t as possible.

As shown in FIGS. 11 to 13, each linear bearing 2.2 is a bearing block with two ball rolling grooves 10° 10 on one side and a goal escape hole 11° 11 inside. 12, a retainer 13 that holds two rows of loaded balls, a mail rolling groove 10.10, a goal escape hole 11.11, and f! r: a pair of side lids 14, 1 that pass through
It is composed of 4. Load mail 15, 15...
are mail rolling groove 10.10 and pole escape hole 11.1
It is designed to circulate between 1 and 2. This mail rolling groove 1
The contact angle α between 0°10 and the load goal 15.15... is approximately 45 degrees, but it is not limited to 45 degrees (it may be in the range of 30 to 60 degrees. As shown in FIG.
The gap between the two side surfaces is adjusted by gap adjustment bolts 16, 16, . . . . In other words, gap adjustment) 16.
Linear bearing 2 by tightening 16...
．． 2 is pressed against the protruding part 6 side of the table body 3, and the reaction force of the pressing force of the clearance adjustment lever) 16.16... acts on the linear bearing 2.2 on the opposite side, causing the load mail to increase to 15°. Preload is applied to 15....

On the other hand, a linear motor 17 is interposed between the base 1 and the table main body 3. In this embodiment, the linear motor 17 is a linear pulse motor, a stator 18 and a mover 1.
9, and is operated by inputting an arm force to the movable element 19 from a pulse generation source (not shown). Although the stator 18 is attached to the lower surface of the protrusion 6 of the table body 3 and the mover 19 is attached to the upper surface of the base l, the arrangement may be reversed.

The configuration of the linear motor 17 is shown below in Fig. 14(a).
This will be explained in detail with reference to FIG. 14(b).

In the figure, reference numeral 3 denotes a table main body, and a flat plate-shaped stator 18 made of a magnetic material is disposed on the lower surface of the table main body 3 in the longitudinal direction. On the other hand, the upper surface of the base 1 faces the stator 18,
A mover 19 is attached. Each movable element 19 is composed of two magnetic cores 21 and 22 arranged opposite to each other on the left and right sides of the permanent magnet 20t. A first magnetic pole 23 and a second magnetic pole 24 are formed in the other magnetic core 22, and a third magnetic pole 25 and a fourth magnetic pole 26 are formed in the other magnetic core 22 by a permanent magnet 20. is formed.

As shown in FIG. 14(&), the stator 18 has fixed teeth 18 having a U-shaped cross section and extending in a direction substantially perpendicular to the longitudinal direction.
& are provided at equal intervals at the same pitch P over substantially the entire length in the longitudinal direction. Each magnetic pole 23 to 26 also has a stator 18
The magnetic pole teeth 23 & - 26a are formed with the same pitch.

A first coil 27 and a second coil 28 are wound around the first magnetic pole 23 and second magnetic pole 24 on the north pole side, and when current flows, magnetic fluxes in opposite directions are generated. (wired in series), / blue russ source (not shown)
electrically connected to. On the other hand, the third magnetic pole 2 on the S pole side
Similarly, a third coil 29 and a fourth coil 30 connected in series are wound around the fifth and fourth magnetic poles 26, and are connected to a pulse generation source (not shown). Here, for convenience of explanation, for example, the magnetic pole teeth 23 of the first magnetic pole 23
The magnetic pole teeth 24a of the second magnetic pole 24 are out of phase by one pitch (LP) with respect to a, and the magnetic pole teeth 26a of the fourth magnetic pole 26 are similarly shifted from the magnetic pole teeth 25a of the third magnetic pole 25. Assume that the phase is shifted by Σ pitch (TP),
Furthermore, a third magnetic pole 25 on the S-pole side with respect to the magnetic pole teeth 23a, 24a of the first magnetic pole 23 and the second magnetic pole 24 on the N-pole side.
It is assumed that the magnetic pole teeth 25a and 26a of the fourth magnetic pole 26 are out of phase by one pitch (1P).

Here, the principle of operation of the glue anorxis motor of this embodiment will be explained. Figures 15 (al to d) are schematic diagrams showing the operating principle of the linear arm sys motor.
The coil 27 and the second coil 28 are connected from the terminal a to the third coil 28.
Pulses are input to the coil 29 and the fourth coil 30 through terminals. In Figure 15(a),
In the direction of exciting the first magnetic pole 23 at terminal a (mode ■)
In FIG. 15(b), the terminal a is in the direction of exciting the fourth magnetic pole 26 (mode ■), and in FIG. 15(C), the terminal a is in the direction of exciting the second magnetic pole 24 (mode ■). , and FIG. 15(d) show a state in which a pulse is input to each terminal in the direction of exciting the third magnetic pole 25' (mode ■).

Here, Table 1 shows the magnetic force generation state of each magnetic pole in the case of modes ① to ②.

As shown in Table 1, in the case of mode ■, the magnetic force of the first magnetic pole 23 on the N pole side is strong, and the first magnetic pole 23 and the stator 18
Due to the suction force between the fixed teeth 18 and the movable element 19
is maintained and in a stable state. On the other hand, the third and fourth magnetic poles 25 and 26 on the S pole side are respectively connected to the fixed teeth 18 of the stator 18.
The phase is shifted by τ pitch with respect to a. In mode 2, the magnetic force caused by the coil 27 of the first magnetic pole 234 disappears, and instead the magnetic force of the fourth magnetic pole 26 on the S pole side becomes strong, and the movable element 19 18 fixed teeth 1
The first and second magnetic poles 23 and 24 on the north pole side are shifted in phase by one pitch (1P) by moving relatively in the direction in which the phase matches that of the magnetic pole 8a.

Furthermore, in mode (3), the magnetic force of the second magnetic pole 24 on the N pole side becomes strong, and the second magnetic pole 24
The movable element 19 moves relatively and advances by one pitch (-P) in the direction in which the phases match, and the third and fourth magnetic poles 25 and 26 on the S pole side are out of phase by ÷ pitch (1P). In mode ■, the magnetic force of the third magnetic pole 25 on the S pole side is strong;
The mover 19 moves relatively in the direction in which the third magnetic pole 25 is in phase with the fixed teeth 18a of the stator 18, and moves one pitch (
IP) Proceed. Furthermore, the mode returns to mode (2) again, and the magnetic force of the first magnetic pole 23 on the north pole side becomes strong, and the movable element 19 relatively advances by τ pitch (7P) to reach the state shown in FIG. 15(a). In this way, by repeating the mode ① to ②, the current sea pitch (1P) is moved.

For a table with a linear motor configured like this,
When the movable element 19 of the linear motor 7 is inputted with .sciss from a nosis generation source (not shown), the movable element 19 moves 1 pitch (- Therefore, the table main body 3 moves relative to the base l in the longitudinal direction of the base l by a pitch of 1.
) are transferred. The gap between the movable element 19 and the stator 18 during transfer is determined by the load applied from the table body 3, the suction force between the movable element 19 and the stator 18, and each linear bearing 2.
(determined by the elastic modulus of the disc spring 8 interposed between the base 1 and the base 1), and moves while maintaining a predetermined gap g.

Next, when fixing the table body 3, the current flowing through the movable element 19 of the linear motor 7 is increased to strengthen the attractive force between the stator 18 and the movable element 19.

With this increase in suction force, the disc spring 8 is bent and the stator 18
The gap g between the movable element 19 and the mover 19 becomes smaller. As the gap g becomes smaller, the suction force increases in inverse proportion to the square of the gap g, so the suction force increases rapidly and the table body 3 is held with a strong force. In addition, linear earrings 2 with disc springs 8
When the gap t between the stator 1 and the base 1 becomes zero, the stator 1
8 is in close contact with the movable element 19, and the load placed on the table body 3 is supported by the base 1, so that the table body 3 is stably held.

Furthermore, even if a load is applied to the table body 3, preload is applied to the sunia bearings 2, 2, so there is no possibility of looseness occurring between the table body 3 and the base 1. , furthermore, a gale rolling groove 10 and a load gale 15
Since the contact angle with the IJ near motor is around t-45 degrees, it is possible to evenly support loads from four directions (up, down, left and right). The thrust is always kept constant.

In addition, since the linear bearings 2, 2, etc., which are rolling bearings, are used, there is little wear, so even if a load is applied to the table body 3, there is no risk of interference between the movable element and the stator, and therefore the movable A large thrust and stopping force can be obtained by narrowing the gap between the child and the stator.

In addition, in the linear system motor of this embodiment, the fixed tooth is moved by one pitch per pulse, but any motor that moves by a fixed amount per pulse may be used. The motor is not limited to a sys motor, and other types such as a linear DC motor or a linear synchronous motor may be used.

Next, a second embodiment of the present invention is shown in FIGS. 16 to 18, and the same components as in the first embodiment are denoted by the same reference numerals. Now, the first
The member and the second member are stacked in two layers. That is, an intermediate sliding table 324 as a second member is movably supported on the base 1 as a first member via a first linear bearing 311, and an intermediate sliding table 324 as a first member is movably supported on the base 1 as a first member. A table main body 3 serving as a second member is movably supported on the moving table 32 via a second linear bearing 33. A first linear motor 34 is interposed between the base 1 and the intermediate sliding table 32, and a second linear motor 35 is interposed between the intermediate sliding table 32 and the table main body 3.

The first IJ near motor 34 includes a first stator 34a attached to the lower surface of the intermediate sliding table 32 and a first movable element 34b attached to the upper surface of the base 1. Further, the second linear motor 35 includes a second stator 35a attached to the upper surface of the intermediate sliding table 32, and a second movable element 35b attached to the lower surface of the table body 3.

The first linear bearing 31 has a countersunk 3 on the top surface of the base 1.
The movable member 34b is attached to a bolt 37 via a bolt 37, and is movable in a direction to close the gap g1 between the first movable element 34b and the first stator 34a. The second linear bearing 35 is attached to the upper surface of the intermediate sliding table 32 by a bolt 39 via a disc spring 38, and, like the first linear bearing 31, the movable element 35b of the drop 2 and the second Stator 3
It is possible to move in the direction of closing the FJ gt for a period of 58 seconds.

Furthermore, the pitch PK of the magnetic pole teeth of the first stator 34a of the first linear motor 34 is different from the pitch P of the magnetic pole teeth of the stator 35a of the second linear motor 35.

For a table with a linear motor of this kind of configuration,
Rapid forwarding and fine forwarding are now possible. First, when performing rapid forwarding, the first movable element 34 of the first linear motor 34
When 4 cis is inputted to b from a /4 lus generation source (not shown), the first movable element 34b is 1. Therefore, the table main body 3 together with the intermediate sliding table 32 is moved in the longitudinal direction of the base 1 by 1 pitch (i pl) per pulse, and -1 second linear mode The second mover 3 on the side 35 (on the table main body 3 side)
When a signal of opposite polarity is input from a pulse generation source (not shown) to 5b, the second movable element 35b moves to the intermediate sliding table 32
The table main body 3 moves relative to the upper W, 2 stator 35& by one pitch ("pt) per pulse in the same direction as the moving direction of the first linear motor 34. The table body 3 is moved relative to the base 32 in the same direction as the movement direction by the first IJ near motor 34. As a result, the table body 3 is moved relative to the base 1 by a distance (
It is moved by −p++τP, that is, it is fast-forwarded.

Next, when performing fine movement, the first linear motor 34
When pulses of the same polarity are input to the first movable element 34b and the second movable element 35b of the second linear motor 35,
The first linear motor 34 moves the table main body 3 along with the intermediate sliding table 32 in the longitudinal direction of the base 1 by 1-4 sea pitches (7 Ps), and the second linear motor 35 moves the table main body 3 in the longitudinal direction of the base 1. is 1/1 in the direction opposite to the direction of movement by the first linear motor 34 with respect to the intermediate sliding table 32.
Since the table body 3 is moved by an upward pitch (-!-pg) every 9 russes, the table body 3 is moved at a distance ('P1) with respect to the base 1.
-'P2), that is, fine movement is performed.

When stopping and fixing the table body 3, as in the first embodiment, increase the current flowing through the first movable element 34b and the second movable element 35b of the first linear motor 34 and the second IJ near motor 35, Disc plate 36.38t - Gap gt between first stator 34 & and first mover 34b by bending
, the gap g between the second stator 35a and the second movable element 35b is made as small as possible or zero, and fixed.

The other configurations and operations are substantially the same as those of the first embodiment, and their explanations will be omitted.

In the description of the above embodiments, it goes without saying that the movable element and the stator may be disposed on any of the base 1, the table main body 3, and the intermediate sliding base 32.

Also, in this example, a two-stage configuration was shown, but a three-stage configuration was shown.
A multi-stage configuration such as a stage configuration may also be used.

(Effects of the Invention) The present invention has the above configuration and operation, and since an elastic body is interposed between the linear bearing and either the first member or the second member, the first member When fixing the second member, a large current is applied to the mover to strengthen the attractive force between the stator and the mover, the elastic body is bent, and the gap between the stator and the mover becomes smaller. The attractive force between the stator and mover increases in inverse proportion to the square of the distance, and a strong stopping force is obtained. There is no chance of it moving. Therefore, there is no need for a conventional clamping device for fixing the table, the structure is simplified, and a highly versatile table with a linear motor can be obtained. Furthermore, since there is no need to assemble a clamp device or the like, productivity is improved and the number of parts is also reduced, leading to cost reductions. Furthermore, since the table body can be fixed only by electrical control rather than being held mechanically by a clamping device or the like, responsiveness is extremely quick and work efficiency is improved. In addition, since the space between the stator and the mover is attracted as a whole, the first member and the second member are held evenly over the entire opposing surface, and the floating of the table that occurs when holding the table partially as in the conventional case is avoided. It is possible to obtain moderate effects such as prevention of problems such as scratches and stable holding.

[Brief explanation of the drawing]

FIG. 1 is a front sectional view of a table with a linear motor according to the first embodiment of the present invention, FIG. 2 is a partially enlarged sectional view showing the vicinity of the IJ near bearing of the device shown in FIG. 1, and FIG. 4 is a partially cutaway side view of the device shown in FIG. 1, FIG. 5 is a bottom view of the table body, and FIG. 6 is a front view of the table body of FIG. Figure 7 is Figure 5■-■
Line sectional view, Figure 8 is a plan view of the base, Figure 9 is Figure 8 IX
-IX sectional view, Fig. 10 is a XX sectional view of Fig. 8, Fig. 11 is a front view of the IJ near bearing, Fig. 12 is a partially cutaway plan view of the linear bearing, Fig. 13 is a sectional view on the oxm-xm line in Figure 12, *Figure 14 (a
) An enlarged side view of the linear motor, Fig. 14(b) is the first
BB line sectional view in Figure 4(a), Figures 15(a) to (d)
) is a partial side view showing the operating principle of the IJ near motor, FIG. 16 is a front sectional view of a table with a linear motor according to the second embodiment of the present invention, FIG. 17 is a plan view of the device shown in FIG. 16, and FIG. The figure is a partially cutaway side view of the apparatus of FIG. 16. Explanation of symbols 1... Base (first member) 2... Linear bearing 3... Table body (second member) 8... Disc spring (elastic body) 17... IJ near motor 18 ...Stator 19...Movable element g...
·gap

Claims (1)

[Claims] A linear member in which a first member and a second member are supported so as to be relatively movable via a linear bearing, and a stator and a movable member are disposed facing each other between opposing surfaces of the first member and the second member. A motor is interposed, an elastic body is interposed between the linear bearing and either the first member or the second member, and the bending of the elastic body causes the linear bearing to connect with the first member. A table with a linear motor, characterized in that the second member is moved in a direction to change the gap between opposing surfaces, thereby making the gap between the stator and the mover of the linear motor variable.