JP3021949B2 - Bonder air bearing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air bearing device for a bonder, and more particularly, to an air bearing device used for moving means for moving a bonding portion in a horizontal direction.

[0002]

2. Description of the Related Art In a bonder such as a wire bonder for connecting a semiconductor electrode and a substrate electrode with wires, an air bearing linear motor is often used as a means for sliding a wire bonding portion holding a horn in the XY directions at a high speed. ing.

FIG. 8 shows a conventional wire bonder, in which a linear motor device 100X in the X direction and a linear motor device 100Y in the Y direction are assembled vertically and vertically in two stages. The wire bonding section 31 is placed on the first side. A horn 33 extends from a driving unit 32 of the wire bonding unit 31, and the tip of the horn 33 has a capillary tool 3.
4 are held. Reference numeral 35 denotes a wire inserted into the capillary tool 34.

Next, the linear motor device 100 (100X,
100Y) will be described. Reference numeral 101 denotes a guide block, which has a coil portion 102 therein. 10
Reference numeral 3 denotes a slider slidably mounted on the guide block 101, and a magnet 104 is mounted at a position facing the coil unit 102. The guide block 101 and the slider 103 are moved by the air pressure of the air blown out from the air blowing portion 105 perforated in the slider 102.
When the coil section 102 is energized while maintaining a close state with a slight gap G, the slider 103 slides along the guide block 101 by the magnetic force, and moves the wire bonding section 31 in the X direction or the Y direction. Let it. Reference numeral 106 denotes a base plate on which the drive unit 32 is placed.

[0005]

However, the above-described conventional means has the following problems.

(A) The gap G is generally about 5 μm, which is extremely small, and strict spacing accuracy is required. Therefore, the dimensional accuracy required for the guide block 101 and the slider 103 is extremely strict, so that the molding process is correspondingly difficult. There is a cost increase.

(B) The coil portion 102 gradually generates heat while the coil portion 102 is energized, and the heat causes the slider 103 to thermally expand and expand. As a result, the size of the gap G changes. Not only does the magnetic force fluctuate, but also in some cases, the guide block 101 and the slider 1
03 comes into sliding contact, and the slider 103 cannot slide smoothly.

(C) On both sides of the guide block 101, wall portions 101A surrounding both end portions of the slider 103 are provided.
(Shadow line) is required, and guide block 1
01 weight increase. Therefore, the lower linear motor 100
The weight load of Y is large, and it is difficult to move the wire bonding portion 31 at high speed.

Accordingly, an object of the present invention is to provide an air bearing device for a bonder which can solve the problems of the conventional means.

[0010]

In order to achieve this, the present invention is directed to a direction in which the magnetic force of a magnetic means such as a magnet or a coil provided between a guide block and a slider presses a side surface of the slider against a wall of the guide block. To act on.

[0011]

According to the above construction, when air is blown out from the air blowout portion, the slider tends to be pushed out in the direction opposite to the wall of the guide block due to the reaction force of the air. This reaction force is canceled by the force, and an appropriate gap is maintained between the joining surfaces of the wall portion and the slider. Also, when using a coil part as a magnetic means,
Although the slider thermally expands due to the heat generated by the coil portion, the gap can be appropriately maintained because the slider can freely extend to the side opposite to the wall portion.

[0012]

(Embodiment 1) Next, an embodiment of the present invention will be described with reference to the drawings. First, the basic structure of an air bearing device used for a wire bonder will be described. FIG. 1 is a perspective view of an air bearing device, and FIG. 2 is a cross-sectional view. The air bearing device 10 is configured as follows. Reference numeral 1 denotes a guide block, in which a magnetic body 2 such as iron is provided. The guide block 1 has a substantially L-shaped cross section, and a wall 1a is erected only on one side thereof, and an inner surface of the wall 1a serves as a joint surface 1a1 for sliding.

Reference numeral 3 denotes a plate-shaped slider, which is slidably mounted on the guide block 1.
In FIG. 2, reference numeral 4 denotes a magnet, which is attached to the lower surface of the slider 3 so as to face the magnetic body 2.
As shown in the drawing, the opposing surfaces of the magnetic body 2 and the magnet 4 are inclined surfaces, so that a magnetic force F in an oblique direction is generated. F1 is a component force in the vertical direction, and acts in a direction in which the slider 3 is vertically pressed against the guide block 1 so as not to rattle. The horizontal component force F2 acts in a direction to press the slider 3 against the wall 1a.

An air blowing portion 5a constituting an air bearing is formed on the left joining surface 3a1 of the slider 3, and a reaction force of air blown from the air blowing portion 5a to the wall portion 1a in the horizontal direction. By opposing the component force F2, a predetermined gap G1 is secured between the joint surface 1a1 and the joint surface 3a1. Similarly, on the lower surface on both sides of the slider 3,
An air blowing section 5 for blowing air to the upper surface of the guide block 1
b, 5c are formed, and the air blowing portions 5b, 5c
The slider 3 floats above the guide block 1 with a gap G2 due to the reaction force of the air blown out from the slider.

On the right side of the guide block 1, a slider 3
There is no wall constituting the air bearing opposed to the right side surface 3b1 of the right side, and a flat horizontal surface 1b1 is formed. Therefore, according to this air bearing device, strict dimensional accuracy is not required for the guide block 1 and the slider 3 as in the conventional means shown in FIG. 8, processing is extremely simple, and the guide block 1 is lightweight. Can be

(Embodiment 2) FIGS. 3 and 4 show the basic structure of an air bearing device 20 used for a wire bonder. The guide block 1 is provided with a coil 8, and the slider 3 is provided with a magnet 9 facing the coil 8. As shown in the figure, since the upper surface of the iron core 8a of the coil portion 8 and the lower surface of the magnet 9 are inclined, a magnetic force F in an oblique direction can be obtained as in the first embodiment. When the coil section 8 is energized, the slider 3 slides in the length direction of the guide block 1 due to the magnetic force, and the coil section 8 and the magnet 9 constitute a linear motor.

During operation for a long time, the coil portion 8 gradually generates heat, and the heat causes the slider 3 to thermally expand and expand. However, since the right side surface 3b1 of the slider 3 is a free end surface, the slider 3 is heated. Can be freely extended to the right by inflation,
The gap G1 is properly maintained. Therefore, unnecessary friction between the joint surface 1a1 of the wall portion 1a and the joint surface 3a1 of the slider 3 which occurs in the conventional means is eliminated, and the slide can be smoothly performed at a high speed even with a small magnetic force.

Next, an example in which the air bearing device 10 of the first embodiment and the air bearing device 20 of the second embodiment are applied to a wire bonder will be described.

In FIGS. 5 and 6, reference numeral 10 denotes the air bearing device shown in FIGS. 20A is an air bearing device in the X direction, 20B is an air bearing device in the Y direction,
This is the same as the air bearing device 20 shown in FIG. 3 and FIG. As described above, the air bearing device 20 (20A,
20B) also serves as a linear motor device, and is hereinafter referred to as a linear motor.

Linear motor 20A and linear motor 20B
Are arranged perpendicularly in the XY directions on the same plane without being stacked. By arranging without stacking in this way, unlike the conventional means shown in FIG. 8, the upper linear motor device does not become a heavy load on the lower linear motor device, and the lower linear motor device can move at high speed. Is possible. Further, the air bearing device 10 includes the linear motor 2
It is installed on a slider 3 of 0A. Reference numeral 31 denotes a wire bonder, which is the same as that shown in FIG. 8, and a description thereof will be omitted. Reference numeral 22 denotes a plate on which the drive unit 32 is installed on the slider 3.

Next, means for connecting the air bearing device 10 and the linear motor 20B in the Y direction will be described. Reference numeral 15 denotes a base plate, which is fixed on the slider 3 by bolts 16. The bracket 41 is fixed on the base plate 15. 4
Reference numeral 2 denotes an arm extending from the bracket 41 onto the slider 3 of the air bearing device 10. The tip of the arm 42 is bent downward. As shown in FIG. 6, a block 43 constituting an air bearing is provided inside the arm 42 so as to sandwich the standing wall 26 erected at the side end of the plate 22. As shown in FIG. 7, the block 43 has a blowing hole 44 for blowing air to the standing wall 26.
Are perforated. Therefore, the connecting portion 40 allows the air bearing device 10 to slide in the X direction by driving the linear motor 20A.

In FIG. 7, a bearing 43 is interposed between the block 43, the bracket 41 and the arm 42 so that the block 43 can be swung slightly. By allowing the block 43 to swing freely in this manner, assembly errors are absorbed, and the slider 3 of the air bearing device 10 can slide smoothly.

The present apparatus has the above-described configuration, and the entire operation will be described next. By driving the linear motors 20A and 20B, the wire bonder 31 is slid in the X and Y directions to perform a bonding operation such as wire bonding or bump formation. In this case, one linear motor 20A is not installed on the other linear motor 20B,
Since they are arranged side by side, the load of the linear motor 20A does not become a load of the linear motor 20B, and the wire bonder 31 can be smoothly moved at a high speed in the XY directions. Further, as described in the first and second embodiments, the guide blocks 1 do not need the wall portions 101A on both sides described with reference to FIG. Thus, the weight load on the linear motors 20A and 20B is reduced, and the wire bonder 31 can be moved at high speed. Further, even if the coil portion 2 generates heat during a long operation, and the heat causes each of the sliders 3 to thermally expand and extend, the slider 3
The joint surface 3a1 does not needlessly slide on the joint surface 1a1 of the wall portion 1a and does not load the sliding operation.
Since the wire bonder 1 is properly held, the wire bonder 31 can move in the X and Y directions at high speed and stably.

[0024]

According to the present invention, one of the wall portions conventionally required on both sides of the guide block can be made unnecessary, so that not only the weight can be reduced but also the guide block and the slider can be used. Strict machining accuracy is not required,
Cost can be greatly reduced.

When a coil portion is employed as the magnetic means, the slider thermally expands due to heat generated by the coil portion during a long operation, but the slider can freely extend to the opposite side of the guide block wall. The slider can slide smoothly without the gap of the air bearing part being out of order or the joint surface of the slider slidingly contacting the wall.

When the air bearing device of the present invention is applied as a means for moving a bonder such as a wire bonder, various operations such as wire bonding and bump formation are performed while moving the bonder at high speed in the X and Y directions. And thus is particularly useful as a means of moving the bonder.

[Brief description of the drawings]

FIG. 1 is a perspective view of an air bearing device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of the air bearing device according to the first embodiment of the present invention.

FIG. 3 is a perspective view of an air bearing device according to a second embodiment of the present invention.

FIG. 4 is a sectional view of an air bearing device according to a second embodiment of the present invention.

FIG. 5 is a perspective view of a wire bonder according to the present invention.

FIG. 6 is a side view of the wire bonder according to the present invention.

FIG. 7 is a partial sectional view of a wire bonder according to the present invention.

FIG. 8 is a front view of a conventional wire bonder.

[Description of Signs] 1 Guide block 1a Wall 2 Magnetic body (magnetic means) 3 Slider 4 Magnet (magnetic means) 5 Air blowing section 8 Coil section (magnetic means) 9 Magnet (magnetic means)

Claims (3)

(57) [Claims] A guide block, a slider slidably mounted on the guide block, a wall portion provided on the guide block, and an air blowing portion on a side surface of the slider facing the wall portion. Wherein said guide block and said slider are provided with magnetic means, and a magnetic force of said magnetic means acts in a direction of pressing said side surface against said wall portion. apparatus. 2. The air bearing device for a bonder according to claim 1, wherein said magnetic means comprises a magnet and a magnetic material. 3. The linear motor according to claim 1, wherein said magnetic means comprises a magnet provided on said slider, and a coil part provided on said guide block, said magnetic means comprising a linear motor for sliding said slider along said guide block. 3. The air bearing device for a bonder according to claim 1, wherein said air bearing device is also used concurrently.