JPH05238548A - Air slide device - Google Patents

Air slide device

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Publication number
JPH05238548A
JPH05238548A JP7870692A JP7870692A JPH05238548A JP H05238548 A JPH05238548 A JP H05238548A JP 7870692 A JP7870692 A JP 7870692A JP 7870692 A JP7870692 A JP 7870692A JP H05238548 A JPH05238548 A JP H05238548A
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JP
Japan
Prior art keywords
slider
guide member
air
body
provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7870692A
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Japanese (ja)
Inventor
Yuji Nasuno
雄二 那須野
Original Assignee
Ntn Corp
エヌティエヌ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Ntn Corp, エヌティエヌ株式会社 filed Critical Ntn Corp
Priority to JP7870692A priority Critical patent/JPH05238548A/en
Publication of JPH05238548A publication Critical patent/JPH05238548A/en
Application status is Granted legal-status Critical

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Abstract

PURPOSE: To perform sanitary conveyance in a clean room and in a spot avoiding an oil stain and to attain manufacture at a low cost with a simple structure by guiding and driving a slider perfectly in noncontact.
CONSTITUTION: An air slide device is constituted of a hollow guide member 1 of triangular section, slider 2 and an internal mover 3. The guide member 1 is formed in a pipe shape by providing a drive part mounting plate in an angle material of aluminum. In the slider 2, a pair of divided slider main units 2a of symmetrical shape are connected by building metal fixtures 24. The internal mover 3 is driven to advance and reverse on a rail 10. In both sides of a divided part of the slider 2, an air blow port 6 is provided in a lower surface, and further magnets 4, 5 attracting each other are provided in the internal mover 3 and the slider 2. The slider 2 is supported to hold a bearing space by balancing a static pressure by jetted air with magnetic attraction force and moved by the magnetic attraction force according to movement of the internal mover 3.
COPYRIGHT: (C)1993,JPO&Japio

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】この発明は、クリーンルーム内における搬送や、油汚れを嫌う機器等に使用されるエアスライド装置に関するものである。 BACKGROUND OF THE INVENTION This invention is transported and in a clean room, it relates to an air slide apparatus for use in equipment that dislikes oil stains.

【0002】 [0002]

【従来の技術】従来、クリーンルーム内での部品の搬送や、食品,薬品等を衛生的に搬送する場合、非接触式のエアスライド装置や磁気浮上スライド装置、またはベルトコンベヤやボールねじなどの接触式の搬送装置が主に用いられている。 Conventionally, the transport of parts in a clean room, food, when transporting chemicals such as hygienically, contact such as a non-contact type air slide device or a magnetic levitation sliding device or a belt conveyor or a ball screw, wherein the transport device is mainly used. 接触式の搬送装置は、構造が簡単で安価である反面、粉塵の発生が避けられず、潤滑油による汚染の問題もあるため、前述のような使用箇所では非接触式の搬送装置が好ましい。 Contact type conveying device, although the structure is simple and inexpensive, generation of dust can not be avoided, because some pollution problems due to the lubricating oil, a non-contact type transfer apparatus is preferred in point of use as described above. 非接触の搬送装置として使用されている一般のエアスライド装置は、レール状のガイド部材を囲んで角筒形のスライダを設け、このスライダとガイド部材との間の軸受隙間に圧縮空気を噴出させて、静圧により負荷能力を得るようにしたものである。 Air slide device generally used as a transport device for non-contact, the slider of the rectangular tube shape provided surrounding the rail-shaped guide member, is ejected compressed air to the bearing gap between the slider and the guide member Te, in which to obtain a load capacity by static pressure.

【0003】しかし、上記形式のエアスライド装置は、 [0003] However, the air slide device of the type described above,
スライダがガイド部材の周囲を囲む角筒状であるため、 Since the slider is rectangular tube surrounding the guide member,
構造が複雑であるうえ、軸受隙間を小さくして空気圧による支持剛性を高めようとすると、ガイド部材の僅かな撓みなどでスライダがガイド部材に接触する恐れが生じ、非常に高い精度が要求される。 After the structure is complicated and by reducing the bearing clearance is trying to increase the support rigidity pneumatic, slight deflection slider including a guide member is caused is a risk of contact with the guide member, is a very high accuracy is required . そのため、高価なものとなり、また長ストローク化が難しい。 Therefore, it is expensive, also it is difficult longer stroke.

【0004】このような問題点を解消したエアスライド装置として、従来、スライダとガイド部材とに磁石を設けて吸引力を生じさせ、この吸引力と空気圧とを釣り合わせてスライダを浮上支持するものが提案されている。 [0004] which the air slide device which solves such problems, conventionally, causes a suction force of the magnet provided on the slider and the guide member, floats support the slider by balancing and the suction force and the air pressure There has been proposed.
この構成の場合は、磁気吸引力でスライダの脱落が防止されるために、スライダはガイド部材の2面に対面する形状であれば良く、構造が簡単で、精度上の要求も緩和される。 For this configuration, in order to fall off the slider is prevented by the magnetic attraction force, the slider may have a shape facing the second surface of the guide member, the structure is simple, request on accuracy is relaxed. スライダの駆動は、スライダに螺合するボールねじ等で行うようにしてある。 Slider driving, are to perform the ball screw or the like to be screwed to the slider.

【0005】また、従来、汚染防止の確実を図った磁気浮上式の搬送装置として、パイプ状のガイド部材内に内部移動体を設け、ガイド部材の外部に配置したスライダと内部移動体とに磁性体および電磁石を各々設けて、内部移動体の移動に伴い、スライダを浮上させながら移動させるようにしたものが提案されている。 Further, conventionally, magnetic as a magnetic levitation conveyor apparatus which attained reliably prevent contamination, the internal moving body disposed in the pipe-shaped guide member, the slider and which is arranged outside the guide member and the inner moving body and each provided with a body and an electromagnet, with the movement of the internal moving body, that the move has been proposed while floating the slider. この構成の場合、駆動手段が全てガイド部材内にあってスライダの配置空間から隔離され、しかも非接触でスライダが支持されるため、確実な汚染防止が行える。 In this configuration, in the driving means all guide members are isolated from the configuration space of the slider, and since the slider is supported in a non-contact, can be performed reliably pollution.

【0006】 [0006]

【発明が解決しようとする課題】前記の磁気併用のエアスライド装置は、駆動の伝達系統がガイド部材の外部にあって、スライダに接触する構造であるため、確実な粉塵の発生防止のためには満足できるものではない。 [SUMMARY OF THE INVENTION The air slide device of the magnetic combination of the transmission system of the drive is in the outside of the guide member, because of the structure in contact with the slider, for prevention of reliable dust not satisfactory.

【0007】また、前記のパイプ内に駆動部を配置した磁気浮上式の搬送装置は、駆動手段を確実に隔離できるという優れた効果があるが、磁気吸引力だけで浮上および駆動伝達を行わせるために、内部移動体の磁石に大きな電磁石が必要になって、構造の面で満足できるものではない。 [0007] The magnetic levitation conveyor apparatus arranged to drive unit into the pipe, it is excellent effect that the driving means can be reliably isolated to perform the floating and the drive transmission by only the magnetic attraction force for, become necessary large electromagnets the magnet inside the mobile, it is not satisfactory in terms of structure.

【0008】この発明の目的は、スライダの設置部付近に粉塵を発生する問題がなく、かつ構造が簡単で安価に製造できるエアスライド装置を提供することである。 An object of the present invention has no problem of generating dust in the vicinity of the installation portion of the slider, and is to provide an air slide device that can be easily and inexpensively manufactured structure.

【0009】 [0009]

【課題を解決するための手段】この発明のエアスライド装置は、上面の断面形状を山形とした中空のガイド部材と、このガイド部材の上面に配置したスライダと、前記ガイド部材の内部で進退駆動される内部移動体とで構成される。 SUMMARY OF THE INVENTION The air slide device comprising a hollow guide member and the upper surface of the cross-sectional shape chevron, a slider disposed on the upper surface of the guide member, driven forward and backward inside the guide member constituted by the internal moving body is. 前記スライダは、下面をガイド部材の上面に沿う溝形とし、その溝形下面の両側部分に前記エア吹出し口と前記磁石または磁性体とを設ける。 The slider, the channel-shaped along the lower surface to the upper surface of the guide member, provided with the magnet or magnetic body and the air blowing opening on both side portions of the groove-shaped bottom surface.

【0010】 [0010]

【作用】スライダは、下面のエア吹出し口から噴出する空気の静圧力と、スライダと内部移動体間に作用する磁気吸引力とが釣り合うことにより、ガイド部材から浮上して支持される。 [Action] slider, the static pressure of air ejected from the lower surface of the air blowing port, by the magnetic attraction force is balanced acting between the slider and the inner moving body, is supported by floats from the guide member. ガイド部材の上面は断面形状が山形に形成され、かつスライダの下面は溝形に形成されているため、前記静圧力および磁気吸引力により、上下方向と左右方向の剛性および負荷容量が同時に得られる。 Upper surface of the guide member is a cross-sectional shape is formed in Yamagata, and since the lower surface of the slider is formed in a groove shape, by the hydrostatic pressure and the magnetic attraction force, stiffness and load capacity of the vertical lateral direction is obtained at the same time . このように非接触でスライダの支持が行われ、またガイド部材内を移動する内部移動体により非接触でスライダを進退駆動できるため、スライダを粉塵の発生箇所と完全に隔離することができる。 Thus non-contact support of the slider is performed by, and because the slider can be driven forward and backward without contact by an internal moving body moving in the guide member, the slider can be completely isolated from the generation part of the dust.

【0011】 [0011]

【実施例】この発明の一実施例を図1ないし図5に基づいて説明する。 EXAMPLES be described with reference to an embodiment of the present invention in FIGS. 1 to 5. このエアスライド装置は、図4に示すように上面が三角山形の断面形状のガイド部材1と、下面が三角溝形に形成されてガイド部材1上に配置されたスライダ2とを備える。 The air slide device includes an upper surface as shown in FIG. 4 is a guide member 1 of the triangular chevron sectional shape, and a slider 2 that the lower surface is placed on the guide member 1 is formed in a triangular groove form. ガイド部材1は、アルミ等の非磁性体のアングル素材を必要長さに切断したガイド部材本体1aと駆動部取付板1bとで三角形のパイプ状に形成したものある。 The guide member 1 is intended to form a pipe-shaped triangle and the guide member body 1a and the drive unit attachment plate 1b of the angle material of the nonmagnetic material was cut into required lengths such as aluminum.

【0012】スライダ2は、左右に2分割された一対の対称形状の分割スライダ本体2aからなり、両分割スライダ本体2aは、ゴムシート23を挟んで組付金具24 [0012] The slider 2 is composed of a divided slider body 2a of bisected pair of symmetrical right and left, both split slider body 2a is assembled bracket 24 sandwiching the rubber sheet 23
により相互に接合されている。 They are joined to each other by. 組付金具24は、両端に長孔25を有する平角状の部材からなり、スライダ2の進行方向の前後両面に上下2本ずつ設けられている。 Assembling bracket 24 is made of a rectangular-shaped member having a long hole 25 at both ends, is provided by two upper and lower around both sides of the traveling direction of the slider 2. これら組付金具24は、各々スライダ2の所定位置に加工されたねじ孔(図示せず)に長孔25を貫通するビス2 These assembly bracket 24 through a long hole 25 to each processed screw hole at a predetermined position of the slider 2 (not shown) bis 2
6で締付け固定される。 It is fastened at 6. 両分割スライダ本体2aは、ガイド部材1に押当てた状態で組付金具24による接合を行うことにより、ガイド部材本体1aの直角度が材料により多少異なっていても、長孔25における自由度によって、その直角度に倣った形状に組立てられる。 Both split slider body 2a, by performing the bonding by assembling bracket 24 in a state of abutting push the guide member 1, even if the perpendicularity of the guide member body 1a is somewhat different from the material, the degree of freedom in the long hole 25 are assembled into a shape conforming to the perpendicularity.

【0013】ガイド部材1の内部の底面中央にはレール10が取付けられ、その上に図1に示すように内部移動体3が、転がり形式のリニアベアリング11を介して移動自在に設置されている。 [0013] rails 10 on the bottom center of the inside of the guide member 1 is attached, on its internal moving body 3 as shown in FIG. 1, it is installed movably through the form of linear bearings 11 rolling . 内部移動体3は、磁性材料からなるヨーク8の上面がガイド部材1の内面と対応する三角山形に形成され、両側の上面部分に磁石4が取付けられている。 Internal moving body 3, the upper surface of the yoke 8 made of a magnetic material is formed in a triangular chevron corresponding to the inner surface of the guide member 1, a magnet 4 is attached to the upper surface portion of each side. スライダ2の各スライダ本体2aの下面には、内部移動体3の各磁石4と吸引し合う磁石5と、エア吹出し口6とが設けてある。 On the lower surface of the slider body 2a of the slider 2, a magnet 5 which mutually sucked each magnet 4 inside the movable body 3, and an air blowing port 6 is provided. 各エア吹出し口6は、空気圧によるスライダ2の支持剛性を高めるために、自成絞り等の絞りが施されている。 Each air blowing port 6, in order to increase the supporting rigidity of the slider 2 by the air pressure, the diaphragm, such as self-formed diaphragm is applied.

【0014】図2はスライダ2の下面図である。 [0014] FIG. 2 is a bottom view of the slider 2. エア吹出し口6は、多数個がスライダ2の分割部を挟んで進行方向に一列ずつ所定の間隔で設けられ、各分割スライダ本体2a内に形成された2本の給気孔12に各々開通している。 Air blowing port 6, a large number are provided at predetermined intervals one by one row in the traveling direction across the divided portions of the slider 2, and respectively open to the air supply hole 12 of the two formed in the divided slider body 2a there. 両給気孔12は一端で連結チューブ13により相互に連結され、一方の吸気孔12に設けた空気流入口12aは、給気チューブ14(図4)で圧縮空気の供給源に接続される。 Both supply hole 12 is connected to each other by a connecting tube 13 at one end, one of the intake hole 12 to the provided air flow inlet 12a is connected to a source of compressed air in the air supply tube 14 (Figure 4).

【0015】図3(A)および図5に示すように、内部移動体3およびスライダ2の磁石4,5は、磁性材料のヨーク8,9に複数個ずつ取付けてある。 [0015] As shown in FIG. 3 (A) and FIG. 5, the magnets 4 and 5 of the inner movable body 3 and the slider 2, it is mounted by a plurality yoke 8 and 9 of magnetic material. これら磁石4,5は、進行方向に所定の間隔で配列し、かつ各々互いに対面させてあり、これにより進行方向へのスライダ2の剛性を得る。 These magnets 4, 5 are arranged at predetermined intervals in the traveling direction, and Yes in each is opposed to each other, thereby obtaining the stiffness of the slider 2 in the direction of travel.

【0016】図3において、内部移動体3はタイミングベルト15に連結片16で連結してあり、タイミグベルト15はガイド部材1の両端に各々配置したモータ17 [0016] In FIG. 3, the internal moving body. 3 are linked by a linking piece 16 to the timing belt 15, the motor 17 Taimiguberuto 15 which were each placed at both ends of the guide member 1
およびプーリ支持台18の歯付きプーリ19a,19b And the toothed pulley 19a of the pulley support stand 18, 19b
間に掛装されている。 It is hung between. モータ17にはパルスモータ等が使用される。 Pulse motor or the like is used for the motor 17. ガイド部材1の両端は、モータ側密封ボックス20および支持台側密封ボックス21で各々閉じられ、前記モータ17,タイミングベルト15,および内部移動体3で構成される駆動部22の全体が、ガイド部材1の内部に密封される。 Both ends of the guide member 1 are each closed on the motor side sealing box 20 and the support base side sealed box 21, the whole of the motor 17, the timing belt 15 and the internal moving body 3 in configured drive unit 22, is, the guide member It is sealed inside the 1.

【0017】上記構成の動作を説明する。 [0017] explaining the operation of the above configuration. スライダ2 The slider 2
は、下面のエア吹出し口6から噴出される圧縮空気の静圧力によりガイド部材1から浮上して支持される。 It is supported by floats from the guide member 1 by the electrostatic pressure of the compressed air ejected from the lower surface of the air blowing port 6. 浮上量は、噴出空気の静圧力と磁石4,5間に作用する吸引力とで定まる。 The flying height is determined by the attractive force acting between static pressure and the magnet 4 and 5 of injected air. ガイド部材1の上面は断面形状が三角山形に形成され、かつスライダ2の下面はこの山形形状に沿う溝形に形成されているため、前記静圧力および磁気吸引力により、上下方向と左右方向の剛性および負荷容量が同時に得られる。 Upper surface of the guide member 1 has a cross-sectional shape is formed in a triangular chevron, and since the lower surface of the slider 2 is formed in a groove shape along the chevron shape, by the hydrostatic pressure and the magnetic attraction force, the vertical direction in the horizontal direction stiffness and load capacity can be obtained at the same time.

【0018】このようにスライダ2を浮上させた状態で、内部移動体3をタイミングベルト15の駆動により移動させると、内部移動体3とスライダ2の間に作用する磁気吸引力のために、スライダ2は内部移動体3に連動して移動する。 [0018] In a state of being floated thus the slider 2, when the inner movable body 3 moves by the drive of the timing belt 15, due to the magnetic attraction force acting between the inner movable body 3 and the slider 2, the slider 2 moves in conjunction with the internal moving body 3.

【0019】このエアスライド装置は、このようにスライダ2が完全に非接触で支持され、しかも内部移動体3 [0019] The air slide device, thus the slider 2 is supported in a completely non-contact, yet the internal moving body 3
やタイミングベルト15,モータ17などからなる駆動部22がガイド部材1内に密閉されるので、スライダ2 And a timing belt 15, the drive unit 22 composed of a motor 17 is enclosed in the guide member 1, the slider 2
の設置部付近を駆動部22等の粉塵の発生箇所から完全に隔離できる。 The vicinity of the installation part can be completely isolated from the generation part of the dust such as the drive unit 22. そのため、高度に清浄性の要求されるクリーンルーム内や、食品,薬品の搬送装置のように油汚れを嫌う箇所等にも使用することができる。 Therefore, it is possible to use highly or a clean room to be cleaned of the request, the food, even places like dislike oil stains like conveying device of the drug. 給気ノズル6から噴出させる空気にクリーンエアを用いれば、クリーン度のより高い環境下でも使用可能となる。 The use of clean air to the air jetting from the air supply nozzle 6, also becomes available with higher environment of cleanliness.

【0020】また、スライダ2の浮上支持を空気圧と磁気吸引力との釣合いで行うようにしたので、従来の磁力のみで浮上支持するものと異なり、内部移動体3の磁石4が小さなもので済む。 Further, since the floating support of the slider 2 to perform in balance between air pressure and the magnetic attraction force, different from those for floatingly supported only in traditional magnetic force, the magnet 4 of the inner movable body 3 requires only small ones . スライダ2にはエア吹出し口6 The slider 2 air blow-out port 6
が必要になるが、孔加工等を行うだけで良く、これらのために全体の構造が簡単になり、安価に製造できる。 Although is required, it is only performing the hole drilling and the like, is simplified structure of the whole for these, it can be manufactured at low cost. しかも、スライダ2はガイド部材1の傾斜した2面の上面部分のみで案内するものであるため、従来のガイド部材の外周を囲むものと異なり、組立が容易で精密な調整の必要がない。 Moreover, the slider 2 since they are to guide only at the upper surface portion of the two surfaces inclined guide member 1, different from those surrounding the outer periphery of the conventional guide members, there is no need for easy and precise adjustment assembly. そのため、ガイド部材1にこの実施例のようにアルミのアングル素材等が使用できて、より一層コスト低下が図れる。 Therefore, available angle material such as aluminum is, as in this embodiment the guide member 1, further cost reduction can be achieved. また、この実施例ではスライダ2が一対の分割スライダ本体2aに分割されているため、前記のようにガイド部材1の直角度に倣った組立が容易に行える。 Further, in this embodiment since the slider 2 is divided into a pair of split slider body 2a, assembly following the perpendicularity of the guide member 1 as described above can be easily.

【0021】なお、前記実施例では、スライダ2を一対の分割スライダ本体2aで構成したが、スライダ2は一体に加工したものであっても良い。 [0021] In the above embodiment has been configured the slider 2 by a pair of split slider body 2a, the slider 2 may be obtained by machining together. ガイド部材1は、三角山形に限らず、台形や、半円、半楕円状など、各種の山形断面形状のものであっても良い。 The guide member 1 is not limited to a triangular chevron, trapezoidal or semi-circular, semi-elliptical, may be of various chevron sectional shape. また、前記実施例ではスライダ2および内部移動体3の両方に磁石4,5 Further, the magnets 4, 5 on both the slider 2 and the internal moving body 3 in the embodiment
を設けたが、スライダ2および内部移動体3の一方のみに磁石を設け、他方には磁性体を設けても良い。 Although provided, a magnet is provided only on one of the slider 2 and the internal moving body 3, it may be provided a magnetic material on the other. 磁性体は、必ずしもスライダ2および内部移動体3に別部品として設けたものでなくても良く、スライダ2または内部移動体3の全体を磁性体としても良い。 Magnetic material, may not be construed necessarily provided as a separate component to the slider 2 and the internal moving body 3, the whole of the slider 2 or an internal moving body 3 may be magnetic.

【0022】さらに、前記実施例ではスライダ2のエア吹出し口6を小孔状のものとしたが、スリット状に形成しても良い。 Furthermore, the it is assumed the air blowing port 6 of the slider 2 of the small hole shape in the embodiment, may be formed in a slit shape. また、スライダ2のエア吹出し口6の周囲に環状の排気溝(図示せず)を設け、噴出空気を強制回収する構成としても良く、これにより通常の空気を噴出用に使用してもクリーンルーム等における使用が可能となる。 Further, an annular exhaust groove (not shown) provided around the air blowing port 6 of the slider 2 may be configured to force recovering injected air, thereby clean room using conventional air for ejection or the like use in becomes possible. 内部移動体3の案内および駆動を行う手段は、リニアベアリング11やタイミングベルト15によるものに限らず、送りねじやその他の種々の構成のものが使用できる。 Means for performing a guidance and driving of the internal moving body 3 is not limited to by the linear bearings 11 and the timing belt 15, it can be used as a feed screw or other various configurations. また、ガイド部材1の両端は必ずしも密閉しなくても良く、例えばスライダ2が配置されるクリーンルームを貫通してガイド部材1を設け、その両端を外部に開放しても良い。 Both ends of the guide member 1 may not necessarily sealed, the guide member 1 provided through the clean room, for example, the slider 2 is arranged, may be open at both ends to the outside.

【0023】 [0023]

【発明の効果】この発明のエアスライド装置は、空気圧と磁気吸引力との釣合いでスライダを支持すると共に、 Air slide apparatus according to the present invention this invention is to support the slider balance between air pressure and the magnetic attraction force,
中空のガイド部材内を移動する内部移動体により磁気吸引力でスライダを移動させるようにしたため、スライダを完全に非接触で支持し、かつ駆動部をスライダの設置空間と完全に隔離することができる。 Because you move the slider in the magnetic attraction force by an internal moving body moving within the hollow of the guide member, a slider supported by a completely non-contact, and the drive unit can be completely isolated from the installation space of the slider . そのため、スライダの設置部周辺への粉塵の発生がなく、高度に清浄性の要求されるクリーンルームや、油汚れを嫌う箇所にも使用することができる。 Therefore, there is no generation of dust to the installation portion surrounding the slider, clean rooms and that are highly cleanliness requirements, can also be used in locations hate oil stains. また、ガイド部材の上面を山形断面に形成し、かつスライダの下面を溝形に形成したため、前記空気圧および磁気吸引力により、上下方向と左右方向の剛性および負荷容量が同時に得られる。 Moreover, since forming the upper surface of the guide member Yamagata section, and to form the lower surface of the slider in the groove-shaped, by the air pressure and the magnetic attraction force, stiffness and load capacity of the vertical lateral direction is obtained at the same time. しかも、内部移動体は磁石または磁性体を設けるだけで良く、スライダも磁石または磁性体とエア吹出し口とを設けるだけで良いため、構造が簡単で安価に製造できる。 Moreover, the internal moving body need only provide a magnet or magnetic body, since the slider is also good only by providing a magnet or a magnetic body and an air blowing port, the structure can be simple and inexpensive to manufacture.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】この発明の一実施例にかかるエアスライド装置を示す横断面図である。 1 is a transverse sectional view showing an air slide apparatus according to an embodiment of the present invention.

【図2】そのスライダの下面図である。 FIG. 2 is a bottom view of the slider.

【図3】(A)はそのエアスライド装置の縮小破断側面図、(B)は同じくその縮小破断平面図である。 3 (A) is reduced cutaway side view of the air slide device, (B) is likewise reduced cutaway plan view thereof.

【図4】同じくそのエアスライド装置の外観斜視図である。 [4] which is also a perspective view of the air slide device.

【図5】同じくその磁石の配置状態の説明図である。 [5] which is also explanatory view of an arrangement state of the magnet.

【符号の説明】 DESCRIPTION OF SYMBOLS

1…ガイド部材、2…スライダ、2a…分割スライダ本体、3…内部移動体、4,5…磁石、6…エア吹出し口、10…レール、15…タイミングベルト、17…モータ、22…駆動部、24…組付金具 1 ... guide member, 2 ... slider, 2a ... split slider body, 3 ... inner moving body, 4,5 ... magnets, 6 ... air blowing opening, 10 ... rail, 15 ... timing belt, 17 ... motor, 22 ... driving unit , 24 ... assembling bracket

Claims (1)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 中空のガイド部材と、その外面に配置したスライダと、前記ガイド部材の内部で進退駆動される内部移動体と、前記スライダおよび内部移動体に互いに吸引可能に設けた磁石または磁性体と、前記スライダのガイド部材対向面に設けたエア吹出し口とを備え、前記ガイド部材の上面形状を山形断面とし、前記スライダの下面を前記ガイド部材の上面に沿う溝形とし、その溝形下面の両側部分に前記エア吹出し口と前記磁石または磁性体とを設けたエアスライド装置。 And 1. A hollow guide member, a slider arranged on an outer surface thereof, the guide and the inner moving body is driven forward and backward is inside the member, the magnet or magnetic provided to be sucked together with the slider and the internal moving body comprising a body, and an air blowing port formed in a guide member facing surface of the slider, the upper surface shape of the guide member and chevron cross section, a groove-shaped along the lower surface of the slider on the upper surface of the guide member, the groove-shaped wherein on both side portions of the lower surface air blowing port and air slide device provided with said magnet or magnetic body.
JP7870692A 1992-02-27 1992-02-27 Air slide device Granted JPH05238548A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7870692A JPH05238548A (en) 1992-02-27 1992-02-27 Air slide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7870692A JPH05238548A (en) 1992-02-27 1992-02-27 Air slide device

Publications (1)

Publication Number Publication Date
JPH05238548A true JPH05238548A (en) 1993-09-17

Family

ID=13669312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7870692A Granted JPH05238548A (en) 1992-02-27 1992-02-27 Air slide device

Country Status (1)

Country Link
JP (1) JPH05238548A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007165910A (en) * 2001-10-30 2007-06-28 Semiconductor Energy Lab Co Ltd Laser apparatus
US7863541B2 (en) 2001-08-10 2011-01-04 Semiconductor Energy Laboratory Co., Ltd. Laser annealing apparatus and semiconductor device manufacturing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7863541B2 (en) 2001-08-10 2011-01-04 Semiconductor Energy Laboratory Co., Ltd. Laser annealing apparatus and semiconductor device manufacturing method
JP2007165910A (en) * 2001-10-30 2007-06-28 Semiconductor Energy Lab Co Ltd Laser apparatus
JP4619348B2 (en) * 2001-10-30 2011-01-26 株式会社半導体エネルギー研究所 Laser system
US7892952B2 (en) 2001-10-30 2011-02-22 Semiconductor Energy Laboratory Co., Ltd. Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment

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