CN101874339A - Slide stage, and slide stage movable in x- and y-directions - Google Patents

Slide stage, and slide stage movable in x- and y-directions Download PDF

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Publication number
CN101874339A
CN101874339A CN200880117814A CN200880117814A CN101874339A CN 101874339 A CN101874339 A CN 101874339A CN 200880117814 A CN200880117814 A CN 200880117814A CN 200880117814 A CN200880117814 A CN 200880117814A CN 101874339 A CN101874339 A CN 101874339A
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CN
China
Prior art keywords
mentioned
slider
objective table
line motor
platform
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Granted
Application number
CN200880117814A
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Chinese (zh)
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CN101874339B (en
Inventor
小池晴彦
加来靖彦
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0472—Active magnetic bearings for linear movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/06—Magnetic cores, or permanent magnets characterised by their skew
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/26—Means for adjusting casings relative to their supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings

Abstract

A slide stage can be made low and compact, can transfer smoothly at a high speed and in high precision, and can be manufactured at a low price. A surface table (1) and a slider (4) are dug, and the slider (4) for injecting air downward to the face of the surface table (1) and linear motors (7 and 8) having an electromagnetic suction force are combined. The vertical guides are restrained by the repulsion between the air and the electromagnetic suction force, and the transverse directions are retrained only by the repulsion of the air. A locating device (9) having a guide reference face and a driving-thrust generating face made coextensive and considering an Abbe's error is disposed over the central portion of the slide stage.

Description

Slip objective table and the XY direction objective table that movably slides
Technical field
The present invention relates in printed base plate, semiconductor, liquid crystal, solar cell panel, the biological association area use the slip objective table used of the precision positioning of air bearing and line motor, position detecting device (linear staff) and the XY direction objective table that movably slides.
Background technology
The slip objective table that has made up air bearing and line motor is complete noncontact, and have not can produce frictional heat because of moving, because of the uniformization effect of air bearing makes the advantage that the posture precision is highly stable, can realize precision positioning (sub-micron), also have on the contrary and must also be limited to the shortcoming of product at high price with accessory, the material that micron unit is processed to form bearing.
In the objective table of existing use air bearing, has weight balancing type objective table shown in Figure 47.Figure 47 is the cutaway view of existing weight balancing type objective table, and in Figure 47,1 ' is platform, and 2 ' is guide rail, the 3rd, and air cushion, 4 ' is slider, the 5th, hollow line motor.Make from the weight of top and downward air ejection by air pressure to average out, laterally, obtain weight balancing by repelling each other and, carry the hollow line motor 5 that not influenced by magnetic force between the air pressure by central authorities' constraint.
Yet, though existing weight balancing type objective table shown in Figure 47 has the advantage that can make at a low price because of simple in structure, since unfettered at above-below direction, so the mobile accuracy of above-below direction (lengthwise flatness, pitching etc.) is poor.
In addition, the posture change during because of acceleration produces the contact of bearing portion etc., the problem that therefore existence can't be shortened the acceleration time, mobile beat prolongs.In the example that reality is used, use slider low as the large-scale plane, the center of gravity that are difficult for this problem of generation, Heavy Weight, guide portion is laterally suffering restraints by the air cushion of staple.
This mode is especially used in liquid crystal manufacturing installation etc., is difficult to carry out the practicability miniaturization under, the problem that can't move but exist under variable loading, also the problem that existence can't anxious acceleration.
Owing to producing distance between slip height and transmission driving height longitudinally, therefore when acceleration, produce moment, there is influence in pitch orientation, and not only precision, idle running (lostmotion) variation repeatedly also can produce accidents such as the air cushion of vertical side and platform interference.
On layout, have following problem from air bearing is subjected to the harmful effect this point of magnetic attracting force: must use is the two-sided magnet of no electromagnetic attraction and the hollow line motor of high price, position detecting device (linear staff) be provided with the place in the outside of guide rail, slider, downside etc., be easy to generate the influence of Abbe error (the difference error of the necessary position of detection position and precision), positioning accuracy, low precision repeatedly.
In addition, Figure 47 (b) represents near the air cushion of Figure 47 (a) with enlarged drawing, as shown in the drawing, air cushion 3 is pressed and combines with slider 4 ' by screw 4p, therefore air cushion 3 is pressed and has degradation problem under loosening, the rigidity in the part that a 3q of the sphere of screw 4p pushes air cushion 3, does not preferably use the mode of air cushion 3.
In addition, in the objective table of existing use air bearing, it is also known for Figure 48～air restricted type objective table shown in Figure 50.Figure 48～Figure 50 is the various air restricted type objective tables cutaway view separately of existing apparatus, and in Figure 48～Figure 50,1 ' is platform, and 2 ' is guide rail, and 4 ' is slider, the 5th, and hollow line motor, the 6th, air ejection portion.Any does not all use air cushion, and has the hole that becomes air flue on slider 4 ', directly sprays air to guide surface from slider.In addition, upper and lower horizontal square carries the hollow line motor that not influenced by magnetic force to be subjected to central authorities' constraint by repelling each other between the air pressure, carries out the air constraint.
Figure 48～existing air restricted type objective table shown in Figure 50, owing to reach laterally and suffer restraints up and down, in the time of therefore can not being moved substantially and the posture change during acceleration, the mobile accuracy height, can also shorten mobile beat, can miniaturization (about 100mm square).But there is following problem: owing to need manage the air gap with micron unit (several microns), therefore need make the size relationship precision of rail portion and slider portion make up processing (the combination precision that need make 4 directions is several microns units) with micron unit, accessory unit price height can't simultaneously a large amount of production identical items.
In addition, in the objective table of Figure 48, owing to producing distance between slider height and transmission driving height longitudinally, therefore when acceleration, produce moment, there is influence in pitch orientation, precision, idle running are poor repeatedly, but also the accidents such as guide rail interference of the slider that produces vertical side and vertical side.
In addition, in the objective table of Figure 49 and Figure 50, owing between horizontal slider position and transmission activation point, produce distance, therefore when acceleration, produce moment, there is influence in yawing moment, precision, idle running are poor repeatedly, but also the generation slider of cross side and the accidents such as guide rail interference of cross side.On layout, have following problem from air bearing is subjected to the harmful effect this point of magnetic attracting force: must use is the two-sided magnet of no electromagnetic attraction and the hollow line motor of high price, position detecting device (linear staff) be provided with the place in the outside, downside etc., be easy to generate the influence of Abbe error (the difference error of the necessary position of detection position and precision), positioning accuracy, low precision repeatedly.
In addition, the objective table (with reference to patent documentation 1) shown in the known Figure 51 of existing mixed type objective table.Figure 51 is the vertical view of existing mixed type objective table, and in Figure 51,1 ' is platform, and 2 ' is guide rail, and 4 ' is slider, the 6th, and air ejection portion, the 7th, line motor magnet portion (fixed part), the 8th, line motor coil portion (movable part).Above-below direction by motor coil portion motor core (not shown) and motor magnet between the electromagnetic attraction that acts on and the balance of air pressure suffer restraints, laterally be subjected to central authorities' constraint by repelling each other between the air pressure.
Patent documentation 1:JP opens flat 7-44457 communique in fact
Mixed type objective table shown in Figure 51 can solve the problem of above-mentioned 2 kinds of modes a little, but needing integratedly, high-precision processing is used for reaching slide rail longitudinally at the slide rail of lateral confinement, especially needing to make the depth of parallelism of horizontal slide rail two sides is that 5 μ m process to get off, so the manufacturing cost of slide rail very at high price, and be difficult to tackle long stroke (more than the 1m), length and width degree (more than the 500mm) etc.
Though can be reduced in 1 height, not that monomer uses usually, but must be fixed on the platform etc.At this moment, this part height uprises, and perhaps just needs 2 times height when XY makes up, and there is no advantage on practice.
Figure 52 be Figure 51 through the E-E of the line of the Width of slider 4 ' central authorities to cutaway view.In the figure, 1 ' is platform, and 2 ' is guide rail, 4 ' is slider, the 6th, tracheae, 6u are following air ejection portions, and 6s is a plane of structure air ejection portion, the 7th, line motor magnet portion (fixed part), 7a is a magnet, the 8th, and line motor coil portion (movable part, belt carcass or band yoke), the 9th, linear staff (9H is a head, and 9S is a scale).Slider 4 ' is formed by the 4f of upper planar portion and two parts of the 4k of foot, and 4c combines both with screw.
This slip objective table produces electromagnetic attraction (direction of arrow among Figure 52) between magnet 7a and line motor coil portion 8.On slider 4 ', spray air respectively from following air ejection 6u of portion and the side air ejection 6s of portion, to following ejection air, this side air ejection 6s of portion sprays the plane of structure air from the 4k of foot to guide rail 2 ' to air ejection 6u of portion from the 4f of upper planar portion below this.By producing the buoyancy that lifts slider 4 ', float over the gravity of this buoyancy and slider 4 ' and the position on electromagnetic attraction and vertical direction equilibrium from the ejection of the air of the following air ejection 6u of portion.In addition,, and leaving generation power on the direction of guide rail 2 ' respectively, so slider 4 ' is positioned at the position on the horizontal direction of these two power equilibriums by air ejection from two air ejection 6s of portion of the 4k of foot of slider 4 '.
Like this, this electromagnetic attraction is applied to the central authorities of upper planar portion of the slider 4 ' of Figure 53 along the direction of arrow F3.In addition, by air ejection, and leaving generation power on the direction of guide rail 2 ' respectively, so this power is applied to the 4k of foot of the slider 4 ' of Figure 53 along the direction of arrow F1, F2 from two air ejection 6s of portion of slider 4 '.
Summary of the invention
The problem that invention will solve
By the slip objective table shown in research Figure 52, notice following problem 1～5.
＜problem 1 〉
Slider 4 ' forms by the good and tough granite of processability, ceramic making, though granite, pottery are strong to the tolerance of compression, but exists in shortcoming weak on the bending direction.Therefore, on the 4k of foot, a side is by screw, to the opposing party's directed force F 2, therefore produces bending force on the 4k of foot, shown in Figure 53 * there is the possibility of breaking in the B of portion (junction surface and screw-driving portion).In addition, carry out the constraint of above-below direction, so the distortion shown in Figure 53 and stress always applies burden to slider, exist to diminish the reproducibility of precision or the danger that objective table self breaks by the balance that electromagnetic attraction and air repel each other.
Therefore,, need carry out intensity enhancing, so can run in the opposite direction, that is to say that objective table self can become big with the direction that will carry out miniaturization in order to prevent to produce this state.
＜problem 2 〉
At Width is in the guide rail 2 ' of U font, make the top of U font foot be the sliding surface of above-below direction, so the depth of parallelism and the flatness above the foot of this above foot and U font bottom surface (installed surface) all needs to carry out accurately fine finishining.In addition, the side that makes U font foot is horizontal sliding surface, therefore also needs to carry out accurately fine finishining for the depth of parallelism between the foot of U font guide rail.
The guide rail 2 ' of U font is by granite, ceramic making, because its machining accuracy height (being finish-machined to about error 5 μ m) therefore has long rectangular thing (article that 1m is above) to carry out the shortcoming that fine finishining needs time and cost about error 5 μ m.
＜problem 3 〉
The slider and accidents such as the guide rail of vertical side interfere/contacts of vertical side when acceleration rapidly, have been produced.Therefore, the acceleration of not carrying out rapidly in order to prevent to produce interference/contact accident is controlled, and has the shortcoming of the slip objective table that becomes the acceleration control that can't carry out rapidly.
＜problem 4 〉
In addition, have the positioning accuracy of the detected signal of position detecting device (linear staff), the problem of low precision repeatedly.
＜problem 5 〉
Affact the foot of the guide rail of U font from the pressure of the air of the plane of structure air ejection 6s of the portion ejection of the 4k of foot of the slider of both sides in crooked to the inside mode, the problem that therefore exists the foot of U font to be out of shape to the inside.If foot's distortion, then the depth of parallelism between the plane of structure of guide rail worsens, and the foot of slider contacts with the foot of guide rail, and the damage guide surface.
The means that are used to deal with problems
In order to address the above problem the following formation of the present invention.
The invention of technical scheme 1 described slip objective table is corresponding to Fig. 1, and it comprises: platform; Be laid on the line motor magnet portion on the above-mentioned platform; 2 guide rails clip above-mentioned line motor magnet portion and are fixed in parallel with each other on the above-mentioned platform; Slider is placed in the top and the space between above-mentioned 2 guide rails of above-mentioned line motor magnet portion, is the U font under the section vertical with direct of travel; With the line motor coil portion, in the opening of the U of above-mentioned slider font across space and relative configuration of above-mentioned line motor magnet portion, described slip objective table is characterised in that, on the sidewall of the above-mentioned U font that constitutes above-mentioned slider, be provided with from this sidewall and directly spray air and to the air ejection portion of plane of structure ejection air to following above-mentioned platform, by by the buoyancy that produces to the air that sprays below from above-mentioned air ejection portion, and electromagnetic attraction and gravity between above-mentioned line motor magnet portion and above-mentioned line motor coil portion, and average out and float, by the drive force between above-mentioned line motor magnet portion and above-mentioned line motor coil portion.
The invention of technical scheme 2, is characterized in that in technical scheme 1 described slip objective table corresponding to Fig. 3, comprising: excavate the platform that elongated slot is arranged; Be laid on the line motor magnet portion in the above-mentioned elongated slot; 2 guide rails clip above-mentioned elongated slot and are fixed in parallel with each other on the above-mentioned platform; Slider is placed in the top and the space between above-mentioned 2 guide rails of above-mentioned elongated slot, is the U font under the section vertical with direct of travel; With the line motor coil portion, in the opening of the U of above-mentioned slider font across space and relative configuration of above-mentioned line motor magnet portion, wherein, on the sidewall of the above-mentioned U font that constitutes above-mentioned slider, be provided with from this sidewall and directly spray air and to the air ejection portion of plane of structure ejection air to following above-mentioned platform, by by the buoyancy that produces to the air that sprays below from above-mentioned air ejection portion, and electromagnetic attraction and gravity between above-mentioned line motor magnet portion and above-mentioned line motor coil portion, and average out and float, by the drive force between above-mentioned line motor magnet portion and above-mentioned line motor coil portion.
Technical scheme 3 described inventions, is characterized in that in technical scheme 1 described slip objective table corresponding to Fig. 3, comprising: excavate the platform that elongated slot is arranged; Be laid on the line motor magnet portion in the above-mentioned elongated slot; 2 guide rails clip above-mentioned elongated slot and are fixed in parallel with each other on the above-mentioned platform; Slider is placed in the top and the space between above-mentioned 2 guide rails of above-mentioned elongated slot, is the U font under the section vertical with direct of travel; With the line motor coil portion, in the opening of the U of above-mentioned slider font across space and relative configuration of above-mentioned line motor magnet portion, wherein, on the sidewall of the above-mentioned U font that constitutes above-mentioned slider, be provided with from this sidewall and directly spray air and to the air ejection portion of plane of structure ejection air to following above-mentioned platform, and make and float face with consistent by the drive surface of the drive force between above-mentioned line motor magnet portion and above-mentioned line motor coil portion, float on the face by by the buoyancy that produces to the air that sprays below from above-mentioned air ejection portion described, and the electromagnetic attraction between above-mentioned line motor magnet portion and above-mentioned line motor coil portion and gravity and average out.
Technical scheme 4 described inventions, is characterized in that in technical scheme 1 described slip objective table corresponding to Fig. 4, have connected between the sidewall that constitutes above-mentioned U font in the direct of travel front and the rear end side of above-mentioned slider.
Technical scheme 5 described inventions, is characterized in that in technical scheme 1 described slip objective table corresponding to Fig. 2, and the direct of travel of above-mentioned slider that constitutes the sidewall of above-mentioned U font is provided with many places above-mentioned air ejection portion.
Technical scheme 6 described inventions, is characterized in that in technical scheme 1 described slip objective table corresponding to Fig. 6, are formed with chamfering in the outside and the inboard in the bight of above-mentioned slider.
Technical scheme 7 described inventions at technical scheme 1 described slip objective table, is characterized in that corresponding to Fig. 7 sidewall vertical with direct of travel above-mentioned slider the direction that constitutes above-mentioned U font is provided with many places above-mentioned air ejection portion.
Technical scheme 8 described inventions are corresponding to Fig. 8 and Fig. 9, in technical scheme 2 described slip objective tables, it is characterized in that, on above-mentioned platform, excavate the above-mentioned elongated slot of multiple row in parallel with each other, in each elongated slot, lay above-mentioned line motor magnet portion respectively, in the above-mentioned U font opening of slider, keep each line motor coil portion of the relative configuration of devices spaced apart respectively, and between each line motor coil portion of above-mentioned slider, be provided with the air ejection portion below above-mentioned with each line motor magnet portion.
Technical scheme 9 described inventions in technical scheme 8 described slip objective tables, is characterized in that corresponding to Fig. 9 the multiple row of above-mentioned elongated slot is 2 row or 3 row.
Technical scheme 10 described inventions are corresponding to Figure 10, in technical scheme 1 described slip objective table, it is characterized in that, replace above-mentioned slider, use the following slider that constitutes by metallic plate: this slider below above-mentioned line motor coil portion is installed and constitutes the side wall portion of the above-mentioned U font of above-mentioned slider.
Technical scheme 11 described inventions in technical scheme 10 described slip objective tables, is characterized in that above-mentioned metallic plate is provided with coolant and uses the hole corresponding to Figure 10.
Technical scheme 12 described XY directions are movably slided the invention of objective table corresponding to Figure 13, it is characterized in that, operation technique scheme 8 described first slip objective tables and the technical scheme 10 described second slip objective tables, with the slider of above-mentioned first objective table platform as the above-mentioned second slip objective table, and so that the mode of the moving direction quadrature of the slider of the moving direction of the slider of the above-mentioned first slip objective table and the above-mentioned second slip objective table, with the above-mentioned second slip objective table mounting to the above-mentioned first slip objective table.
Technical scheme 13 described inventions, is characterized in that in technical scheme 12 described XY directions are movably slided objective table corresponding to Figure 14, and the above-mentioned second slip objective table is driven for two.
Technical scheme 14 described inventions are corresponding to Figure 15, in technical scheme 1 described slip objective table, it is characterized in that, be fixed at top base portion on the above-mentioned slider from above-mentioned slider with leaving, the position is provided with the linear staff head in the space between above-mentioned top base portion and above-mentioned slider and directly over the above-mentioned line motor coil portion on the above-mentioned slider, in addition in the space between above-mentioned top base portion and above-mentioned slider, from above-mentioned linear staff head and other parts that move float fixing linear staff scale portion.
Technical scheme 15 described inventions, is characterized in that in technical scheme 14 described slip objective tables corresponding to Figure 15, in the space between above-mentioned top base portion and above-mentioned slider limit switch are installed.
Technical scheme 16 described inventions, is characterized in that in technical scheme 14 described slip objective tables corresponding to Figure 17, and the installation base portion that will be used to install above-mentioned linear staff scale portion forms the U font under the Width section.
Technical scheme 17 described inventions are corresponding to Figure 18, in technical scheme 13 described XY directions are movably slided objective table, it is characterized in that, excavation is to the slotted hole of the moving direction extension of the slider of the above-mentioned second slip objective table on the platform of the above-mentioned second slip objective table, in above-mentioned slotted hole, take in planar linear staff head and the end of above-mentioned planar linear staff head is fixed to above-mentioned slider, on the platform of the above-mentioned first slip objective table, dispose the planar linear staff.
Technical scheme 18 described inventions are corresponding to Figure 20, in technical scheme 17 described XY directions are movably slided objective table, it is characterized in that, above-mentioned planar linear staff header arrangement at 2 foursquare diagonal positions, and is disposed a plurality of above-mentioned planar linear staffs planely on the platform of the above-mentioned first slip objective table.
Technical scheme 19 described inventions are corresponding to Figure 21, in technical scheme 1 described slip objective table, it is characterized in that, between above-mentioned slider and above-mentioned 2 row guide rails and between above-mentioned slider and the above-mentioned platform, paste the object of low-friction coefficient and firm material respectively in above-mentioned slider side, above-mentioned rail-sides and above-mentioned platform side, can contact between the object of the material of above-mentioned low-friction coefficient.
Technical scheme 20 described inventions, is characterized in that in technical scheme 19 described slip objective tables corresponding to Figure 21, and the object of the material of above-mentioned low-friction coefficient is any of carbon fiber, pottery, quartz, agate.
Technical scheme 21 described inventions are corresponding to Figure 22, in technical scheme 1 described slip objective table, it is characterized in that, above-mentioned platform and above-mentioned 2 guide rails are formed, and below above-mentioned platform, dispose horizontal adjusting bolt, dispose the position limit bolt in the side of above-mentioned platform.
The invention of technical scheme 22 described slip objective tables is corresponding to Figure 25, it is characterized in that, on sheet metal processing pallet, be arranged in parallel many technical schemes 21 described slip objective tables, workpiece absorption base portion is set on the top of above-mentioned slip objective table, can carries out horizontal adjusting by above-mentioned horizontal adjusting bolt.
The XY direction of technical scheme 23 described door frame types is movably slided the invention of objective table corresponding to Figure 28, it is characterized in that, two ends on sheet metal processing pallet are arranged parallel to each other 2 formula technical schemes, 21 described slip objective tables, and are provided with above-mentioned slip objective table in upper lateral.
Technical scheme 24 described inventions are corresponding to Figure 31, in technical scheme 1 described slip objective table, it is characterized in that, " I " font that above-mentioned guide rail is seen be Roman capitals under the section vertical with direct of travel, has the groove that is used to be provided with above-mentioned line motor magnet portion in the upper central of above-mentioned guide rail, above-mentioned slider below above-mentioned air ejection portion ejection air and by with the balance of the electromagnetic attraction of above-mentioned line motor magnet portion and above-mentioned line motor coil portion, and walking on two of above-mentioned groove, the walking from above-mentioned plane of structure air ejection portion ejection air time the with the above-mentioned slider of mode that surrounds above-mentioned guide rail upside two sides.
Technical scheme 25 described inventions are corresponding to Figure 42, in technical scheme 24 described slip objective tables, it is characterized in that, at the fixing negative thread lining of the flange part of the lower end, end of above-mentioned guide rail, above-mentioned horizontal adjusting bolt is made of the bolt fastening horizontal adjusting bolt and the set bolt that screw togather with above-mentioned negative thread lining, this set bolt break-through by the central shaft that forms on this bolt fastening horizontal adjusting bolt and the through hole of perforation.
The invention effect
According to technical scheme 1 described invention, starting point of the present invention is only to play the top sliding surface that directly effectively is utilized as of platform of effect of the mounting table of mounting parts so far.Therefore, guide rail no longer is the such complicated shape of U font of the guide rail 2 ' of existing Figure 52, as long as fix rectangular rod simply, when making so long as can correctly obtain the processing of the perpendicularity of the face relative and get final product with platform and slider.Relative with it, the guide rail 2 ' of Figure 52 is top as sliding surface with U font foot, therefore except the flatness of this sliding surface, also requires surface accuracy for the depth of parallelism between U font foot.Therefore, guide rail 2 ' can only be made the rectangular thing of the length about 1m at most in order to keep surface accuracy, but guide rail of the present invention is simple shape, therefore can obtain to reach the long high-precision rectangular thing of 6m～7m, therefore can be applied to the manufacturing installation of big liquid crystal panel.
In addition, the thickness part D of the guide rail 2 ' of Figure 52 can be omitted, therefore height can be reduced.
According to technical scheme 2 described inventions, except the effect of technical scheme 1, can also further reduce the height part of line motor magnet portion.
According to technical scheme 3 described inventions, since the drive surface of motor and objective table float (slip) face basically identical, therefore there is not offset distance, the slider that can prevent the sliding stop objective table contacts with the bottom sliding surface, even increase the worry that acceleration does not have objective table and sliding surface friction yet, can provide can high acceleration the slip objective table.
In addition, can reduce the thickness part of above-below direction of the U font of guide rail 2 ', therefore be beneficial to miniaturization.
And then, guide rail 2 is as long as fix rectangular rod simply, therefore when making so long as can correctly obtain the processing of the perpendicularity of the face relative and get final product with platform 1 and slider 4, can omit the processing of precision of the U font of the guide rail 2 ' that obtains Figure 52, therefore be easy to process.
In addition, because for excavating (pit) structure, so the stress of electromagnetic attraction do not have directly slider 4 and influences, so slider main body can not be out of shape, and the stability of precision, reproducibility are good.
According to technical scheme 4 described inventions, slider need not across on guide rail, thereby slider if central portion dig out be used to take in the line motor coil portion cuboid partly, can be provided with the front end that two foots coupled together, connect direct of travel about between two foots the coupling part and similarly connect direct of travel the rear end about coupling part between two foots, so the foot of the both sides of slider can not be out of shape.
In addition, for onesize line motor coil is installed, because it is not therefore comparatively small-sized across guide rail, thereby as long as less material, the thickness that is used to thicken the top of slider by a part with remaining material, even at the top of slider active force, thickness is also enough, therefore can not cave in significantly to downside.
According to technical scheme 5 described inventions, can obtain stable buoyancy.
According to technical scheme 6 described inventions, carry out chamfering by the inboard and the outside in the bight like this, stress is not concentrated on the angle, so the tolerance of counter stress is strong, and the bight of slider is difficult to break more.
According to technical scheme 7 described inventions, can realize wide cut, large-area slip objective table simply.
Invention according to claim 8, by a plurality of line motors are set, can make the slip objective table of actuating force arbitrarily, and then, at interval 2 line motors are set by separating each other, and can carry out two side drives, therefore the tolerance with respect to yawing moment strengthens, carry out Synchronization Control by line motor, linear staff, can further improve the precision of deflection, horizontal glacing flatness by both sides.
According to technical scheme 9 described inventions, can not cause deflection because of two line motors drive, in addition, when improper stopping if only the line motor of central authorities is applied dynamic braking, what then apply braking is central portion, so slider can stop to not side-to-side vibrations.
According to technical scheme 10 described inventions, so, because metallic plate is strong to the tolerance of bending, even therefore metallic plate only the central portion distortion can not break yet, in addition, the influence of electromagnetic attraction only affacts top connection base portion, therefore only slider (made of stones) has been applied the power of compression direction, because stone is very strong to the tolerance of compression, so stone and indeformable, the stability of precision, reproducibility are good.
By using metallic plate, not only realized the precision raising, and the height of objective table has also further reduced the part of removing heavy wall position, slider top.
According to technical scheme 11 described inventions, can on the metal base that connects, form the cold air medium simply and use the hole, therefore by water, air are flow through wherein, can cut off the heating of line motor coil portion.
According to technical scheme 12 described inventions, obtain to reduce the XY objective table of the height that piles up thus.
According to technical scheme 13 described inventions, can reduce height thus, and all carry out two the driving, therefore improve mobile accuracy in both sides for X-axis and Y-axis, thereby can improve horizontal mobile accuracy (deflection, horizontal glacing flatness), so all can carry out high-precision moving in X-axis and Y-axis.
According to technical scheme 14 described inventions, be not configured on the same axis with respect to there is skew ground as the slider of measuring thing detecting head, even so slider produce deflection, central portion is not subjected to the influence of deflection yet, therefore measures the precision raising.
According to technical scheme 15 described inventions, can effectively utilize the space between slider and the top base portion and be used to prevent the limit switch of the excess of stroke etc. in this installation, therefore can be outstanding to the outside of device, the worry of no breakage etc.
According to technical scheme 16 described inventions since linear staff base portion is installed is elongated strip and install downwards, therefore be subjected to the influence of gravity easily and be out of shape, but owing to be section U font, therefore tolerance grow being out of shape.
According to technical scheme 17 described inventions, make the X-axis slider when directions X moves, two-dimentional linear staff head moves in pit, reads the planar linear staff at directions X.In addition, when the Y-axis slider was moved, the X-axis slider also moved, and the two-dimentional linear staff head that therefore is installed on the below of X-axis slider moves, thereby can read the planar linear staff in the Y direction.Its result, two-dimentional linear staff head can read the planar linear staff in the XY direction.
According to technical scheme 18 described inventions, must there be some heads to read two-dimentional linear staff in 2 two-dimentional linear staff heads, even in directions X and Y direction the two-dimentional linear staff of random length is set, also can reads scale by two-dimentional linear staff head effectively.
According to technical scheme 19 described inventions, slider can move with the zero clearance substantially on the surface of platform, therefore can carry out accurate control.
According to technical scheme 20 described inventions, obtain the object of low-friction coefficient and firm material, so durability is good, slider can move with the zero clearance substantially on the surface of platform in addition, therefore can carry out accurate control.
According to technical scheme 21 described inventions, it is the structure that makes platform and the integrated combination of guide rail, configuration level is adjusted bolt below platform track, at side allocation position restriction bolt, therefore, with respect to the bending longitudinally that causes because of the deadweight of platform track and load loading etc., by being adjusted at the horizontal adjusting bolt that is provided with below, do not have the platform made of stones etc. of flatness but do not have under the situation of sheet metal processing pallet etc. of precision can be provided with even be not below yet, the glacing flatness of walking also can be adjusted into about 3～10 μ m, similarly, horizontal precision also can be adjusted platform track by the position limit bolt, and the glacing flatness of walking is adjusted into about 3～10 μ m.
According to technical scheme 22 described inventions, on platform, be arranged in parallel many slip objective tables, be provided with workpiece absorption base portion on top, therefore can carry out the transmission of large-sized panel display device (FPD) workpiece.
According to technical scheme 23 described inventions, two ends on sheet metal processing pallet are arranged in parallel 2 formula slip objective tables, can carry out horizontal adjusting, therefore pass through on top the slip objective table of horizontally set present embodiment similarly, can constitute the objective table of the portal-framed structure corresponding with large-scale FPD workpiece.
According to technical scheme 24 described inventions, for making the become one guide rail of the shape that is Roman capitals " I " font of type of platform and guide rail, therefore the rigidity of main body is also strong, disposed the bolt fastening horizontal adjusting bolt in the bottom, therefore the bending longitudinally that causes with respect to deadweight and load loading etc. because of guide rail, by being adjusted at the horizontal adjusting bolt that is provided with below, do not have the platform made of stones etc. of flatness but do not have under the situation of sheet metal processing pallet etc. of precision can be provided with even be not below yet, the glacing flatness of walking also can be adjusted into about 3～10 μ m, similarly, horizontal precision also can be adjusted platform track by the position limit bolt, and the glacing flatness of walking is adjusted into about 3～10 μ m.
According to technical scheme 25 described inventions, with engage the bolt fastening horizontal adjusting bolt that fixing negative thread lining push-and-pull adjustment is provided with guide rail as pin thread, and determined highly, and be fixed on the mechanical material with set bolt, even thereby following be not to have the platform made of stones etc. of flatness but do not have under the situation of sheet metal processing pallet etc. of precision can be provided with yet, the glacing flatness of walking also can be adjusted into about 3～10 μ m.Therefore, even be that the above rectangular thing of 10m also can carry out high-precision transmission location under the situation of low precisions such as sheet metal processing pallet in bottom as benchmark.
In addition, by with the contrast of existing apparatus, by said structure, produce following effect.
With respect to the problem of existing weight balancing type, because above-below direction is restrained, so the mobile accuracy of above-below direction (lengthwise flatness, pitching etc.) improves.
Because the change of the posture during acceleration is few, therefore do not produce the contact of bearing portion etc., can shorten the acceleration time, can prolong mobile beat.
Can carry out the practicability under the miniaturization, even under variable loading, also can move, also can suddenly quicken in addition/anxious the deceleration.
Sliding height and transmit to drive between height and do not producing distance longitudinally, so do not producing moment during acceleration, to not influence of pitch orientation, precision, idle running improve repeatedly, can not produce the slider and platform interference of vertical side.
Need not to use hollow line motor, and use the line motor of single face magnet, therefore can reduce cost into two-sided magnet high price.
Position detecting device (linear staff) the place is set is not in the outside or downside etc., and make the position that is arranged on Figure 14 described later, Figure 17, thereby eliminated the influence of Abbe error (detection position and precision need the difference error of position), positioning accuracy, precision improves repeatedly.
For the problem of existing air restricted type, owing to need not, therefore need not size relationship precision with micron unit's combination processing rail portion and slider portion with micron unit management air gap, the parts unit price becomes cheaply, can simultaneously a large amount of production same object.
Because at slider height longitudinally with transmit to drive between height and do not producing distance, therefore do not produce moment when acceleration, to not influence of pitch orientation, precision, idle running improve repeatedly, vertically the slider of side can not interfered with the guide rail of vertical side.
Because in horizontal slider position with transmit between activation point and do not produce distance, therefore do not produce moment when acceleration, to not influence of yawing moment, precision, idle running improve repeatedly, the slider of cross side can not interfered with the guide rail of cross side.
Need not to use hollow line motor, and use the line motor of single face magnet, therefore can reduce cost into two-sided magnet high price.
In addition, compare with real " carriage " of opening flat 7-44457 communique record of JP, problem with respect to mixed type, because therefore following usage platform itself does not need special processing, the guide rail that is used for lateral confinement is that 1 body need not to process accurately, need not the depth of parallelism of the two sides of correspondence is processed as below the 5 μ m, as long as the flatness of obtaining, so the manufacturing cost of guide rail is low, and can tackle long stroke (more than the 3m), length and width degree (more than the 2m) etc.
Further can reduce the height under 1, because above the usage platform and can further reduce.
In addition, be not to become 2 times height merely when XY makes up, can further reduce as the height that makes up, have the advantage of substantive.
Because at slider height longitudinally with transmit to drive between height and do not producing distance, therefore do not produce moment when acceleration, to not influence of pitch orientation, precision, idle running improve repeatedly, vertically the slider of side can not interfered with the guide rail of vertical side.
The balance that attraction and air by magnetic repels each other is carried out the constraint of above-below direction, can not apply the burden of distortion and stress to slider, does not have the danger that reproducibility is impaired or objective table self breaks of precision.
In addition, need not to carry out intensity enhancing and produce to prevent this state, therefore can miniaturization.
Description of drawings
Fig. 1 is the longitudinal section of the slip objective table of the embodiment of the invention 1.
Fig. 2 is the figure in cross section that sees the slip objective table of embodiment 2 to the B-B of Fig. 3 section to apparent direction.
Fig. 3 is the figure in vertical section that sees the slip objective table of embodiment 2 to the A-A of Fig. 2 section to apparent direction.
Fig. 4 is the figure of the slider of the explanation embodiment of the invention 3, and Fig. 4 (a) is its perspective illustration, (b) is the perspective view that slider is turned upside down for the timber that slider is described.
Fig. 5 is that the C-C of slider of Fig. 4 (a) is to cutaway view.
Fig. 6 is the cutaway view of the slip objective table of embodiment 4.
Fig. 7 is the cutaway view of the slip objective table of embodiment 5.
Fig. 8 is the cutaway view of the slip objective table of embodiment 6.
Fig. 9 is the cutaway view of the slip objective table of embodiment 7.
Figure 10 is the figure of the slip objective table of explanation embodiment 8, is the cutaway view of slip objective table.
Figure 11 is the perspective illustration of the slider of embodiment 8.
Figure 12 is that the B-B of slider of Figure 11 is to cutaway view.
Figure 13 is 3 figure of the slip objective table of embodiment 9.
Figure 14 is 3 figure of the slip objective table of embodiment 10.
Figure 15 is the longitudinal section of the slip objective table of embodiment 11.
Figure 16 is near the perspective cutaway view, the linear staff 9 of embodiment 11.
Figure 17 is the longitudinal section of the slip objective table of embodiment 12.
Figure 18 is 3 figure of the slip objective table of embodiment 13.
Figure 19 is the vertical view of the plane X Y linear staff of use among the embodiment 13.
Figure 20 is the vertical view of the plane X Y linear staff of embodiment 14.
Figure 21 is the cutaway view of the slip objective table of embodiment 15.
Figure 22 is the longitudinal section of the slip objective table of the embodiment of the invention 16.
Figure 23 is the longitudinal section of the variation (band coldplate) of the slip objective table of the embodiment of the invention 16.
Figure 24 is 3 figure of the slip objective table of the embodiment of the invention 16.
Figure 25 is the longitudinal section of the slip objective table application examples (1) of the embodiment of the invention 16.
Figure 26 is the longitudinal section of the slip objective table application examples (2) of the embodiment of the invention 16.
Figure 27 is the longitudinal section of the slip objective table application examples (3) of the embodiment of the invention 16.
Figure 28 is the longitudinal section of the slip objective table application examples (4) of the embodiment of the invention 16.
Figure 29 is the longitudinal section of the slip objective table application examples (5) of the embodiment of the invention 16.
Figure 30 is the vertical view of the slip objective table application examples (6) of the embodiment of the invention 16.
Figure 31 is the longitudinal section of the slip objective table of the embodiment of the invention 17.
Figure 32 is 3 figure of the slip objective table of the embodiment of the invention 17.
Figure 33 is the embodiment that line motor magnet portion partly is installed in the upper central of platform track.
Figure 34 similarly has the embodiment that is used for being provided with in the upper central portion of platform track the groove of line motor magnet portion with embodiment 2 (Fig. 2, Fig. 3).
Figure 35 is the end view of embodiment that the banded scale of linear staff portion is installed on the guide surface of platform track.
Figure 36 is the longitudinal section of the slip objective table application examples (1) of the embodiment of the invention 17.
Figure 37 is the longitudinal section of the slip objective table application examples (2) of the embodiment of the invention 17.
Figure 38 is the longitudinal section of the slip objective table application examples (3) of the embodiment of the invention 17.
Figure 39 is the longitudinal section of the slip objective table application examples (4) of the embodiment of the invention 17.
Figure 40 is the longitudinal section of the slip objective table application examples (5) of the embodiment of the invention 17.
Figure 41 is the longitudinal section of the slip objective table application examples (6) of the embodiment of the invention 17.
Figure 42 is the amplification details drawing of A portion of Figure 31 of the slip objective table of the embodiment of the invention 17, and (a) expression makes the state in the way that objective table rises, and (b) expression rises to maximum state, (c) the fixing state of expression.
Figure 43 is illustrated on the above-below direction adjusting mechanism of Figure 42 and has further appended the horizontal adjusting mechanism of platform track and the cutaway view that mechanism is shared in loading.
Figure 44 is the embodiment that has constituted the objective table of door frame (gantry) structure corresponding with large-scale FPD workpiece down by the slip objective table that present embodiment 16 is set.
Figure 45 can make glacing flatness longitudinally be forced to the end view of straight explanation usefulness by the bolt fastening horizontal adjusting bolt state of platform track bending.
Figure 46 can make horizontal glacing flatness be forced to the vertical view of straight explanation usefulness by the position limit bolt state of platform track bending.
Figure 47 is the cutaway view of existing weight balancing type objective table, (a) is overall diagram, (b) is near the enlarged drawing the air cushion.
Figure 48 is the cutaway view of existing air restricted type objective table 1.
Figure 49 is the cutaway view of existing air restricted type objective table 2.
Figure 50 is the cutaway view of existing air restricted type objective table 3.
Figure 51 is the vertical view of existing mixed type objective table.
Figure 52 is the cutaway view of existing mixed type objective table.
Figure 53 is the slider deformation pattern of existing mixed type objective table.
Label declaration
1 ... platform
1a ... elongated slot
2 ... guide rail
3 ... air cushion
4 ... slider
4s ... the slider sidewall
5 ... hollow line motor
6 ... tracheae
6k ... peristome
6r ... timber
6s ... plane of structure air ejection portion
6u ... following air ejection portion
7 ... line motor magnet portion (fixed part)
7a ... magnet
8 ... line motor coil portion (movable part)
9 ... linear staff portion
9B ... base portion is installed
9H ... the linear staff head
9S ... linear staff (scale portion)
10 ... connect base portion
11 ... coolant is used hole (water-cooled or air cooling)
12 ... the Y-axis guide rail
13 ... the Y-axis slider
14 ... Y-axis line motor magnet portion (fixed part)
15 ... Y-axis line motor coil portion (movable part)
16 ... the Y-axis linear staff
17 ... the X-axis guide rail
18 ... the X-axis slider
19 ... X-axis line motor magnet portion (fixed part)
20 ... X-axis line motor coil portion (movable part)
21 ... the X-axis linear staff
22 ... the glass linear staff is installed base portion
22H ... the base portion installing component is installed
23 ... the space base portion
24 ... the top base portion
25 ... limiting sensor
26 ... cable rack
27 ... the planar linear staff
28 ... planar linear staff glass
29 ... planar linear staff head
30 ... planar linear staff head 2 heads
31 ... hold-down screw
32 ... the contact guide rail
33 ... the contact slider
34 ... platform track
35 ... sheet metal processing pallet
36 ... horizontal adjusting bolt
37,37a ... the position limit bolt
38 ... workpiece absorption base portion
39 ... platform track
40 ... the bolt fastening horizontal adjusting bolt
41 ... pillar
42 ... set bolt
43 ... negative thread lining (engage with 39 fixing)
44 ... screwed hole
81 ... coldplate
Embodiment
Following with reference to the description of drawings embodiments of the present invention.
Embodiment 1
Fig. 1 is the longitudinal section of the slip objective table of the embodiment of the invention 1.
In Fig. 1, the 1st, platform, the 2nd, guide rail, the 4th, slider, the 6th, air ejection portion, the 7th, line motor magnet portion (fixed part), 7a (Fig. 1) is a magnet, the 8th, line motor coil portion (movable part belt carcass or band yoke), 9 (Fig. 1) are linear staff portion (9H are the linear staff heads, and 9S is linear staff (a scale portion)).
The guide rail 2 ' of the guide rail 2 of comparing embodiment 1 (Fig. 1) and known example (Figure 52), the guide rail 2 ' of known example (Figure 52) is complex-shaped, in order to obtain the high accuracy of flatness 5 μ m, can only make the rectangular thing (purposes that therefore is limited to semiconductor-fabricating device) about length 1m at most, relative with it, therefore guide rail 2 simple shape of embodiment 1 can obtain to reach the long high-precision rectangular thing of 6m～7m (therefore can be applied to the manufacturing installation of big liquid crystal panel).Be to be fixed to simple structure platform 1 in mode parallel to each other by screw 31 by the guide rail 2,2 of 2 rectangular bar constructions.
Thereby the face of platform 1 has carried out correct grinding originally and had become even surface, for the flatness (even surface) of same degree above the foot of the U font of guide rail 2 ', so the face of usage platform 1 is no problem.
Place slider 4 above platform 1 and in the space between the 2 row guide rails 2,2.This slider 4 is seen as the U font that turns upside down under the section vertical with direct of travel, possess line motor coil portion 8 in the opening of this reverse U shape.Line motor magnet portion 7 and line motor coil portion 8 dispose across the space is relative each other, the core (iron core) of the inside (not shown) by line motor coil portion 8 and produce electromagnetic attraction between line motor magnet portion 7 and line motor coil portion 8.
The two side 4s, the 4s that constitute the reverse U shape of slider 4 are provided with tracheae 6, and this tracheae 6 has below the following ejection air air ejection 6u of portion and towards the plane of structure air ejection 6s of portion of horizontal lateral slider 4 outsides ejection air.
Bump against platform 1 and slider 4 is produced buoyancy towards the air that sprays below from the following air ejection 6u of portion.Obtained on the position of balance at the electromagnetic attraction by 8 of line motor magnet portion 7 and line motor coil portions and gravity and above-mentioned buoyancy, slider 4 floats.In embodiment 1, on the distance of anomaly table top 5 μ m～tens μ m, become and float face.
In addition, bump against the guide rail 2 of both sides from the plane of structure air ejection 6s of portion to the air of the outside of plane of structure ejection, the result keeps balance in central authorities.
In addition, by from sidewall sidelong to the pressure of the air of periphery ejection, produce the power that pushes sidewall from guide rail 2 to the inside.Similarly produce the power of the sidewall of opening slider laterally with situation about illustrating among Figure 53 by electromagnetic attraction, pressure from the air of plane of structure air ejection portion ejection becomes the power that sidewall is returned to the inside as mentioned above, therefore has by adjusting the effect that pressure reduces the distortion of sidewall.
When not adjusting air pressure, the additional part that becomes timber gets final product on the sidewall of the peristome of the U font of Fig. 4 (a) slider that is shown in 4 as described later.
In addition, as described later shown in Fig. 4 (b), residually on the sidewall of slider 4 become the part of timber 6r and when processing peristome 6k, have following effect:, also can suppress the distortion (distortion of Figure 53) of sidewall by timber 6r even applied the power of outwards opening sidewall by electromagnetic attraction.
In addition, between line motor magnet portion 7 and line motor coil portion 8, produce actuating force, follow away direction by this actuating force and drive slider 4.The lower end of line motor coil portion 8 becomes drive surface.
In addition, can reduce the thickness D of above-below direction of the U font of guide rail 2 ' (Figure 52), therefore be beneficial to miniaturization.
And then, the guide rail 2 of embodiment 1 is as long as fix rectangular rod simply, therefore when making so long as correctly draw the processing of the perpendicularity of the face relative and get final product with platform 1 and slider 4, can omit the processing of precision of the U font of the guide rail 2 ' that draws Figure 52, therefore be easy to process.
In addition,, then can reduce the amount of guide rail distortion, therefore can solve the problem 5 of prior art (Figure 52) by pressure from the air of the plane of structure air ejection portion ejection of slider sidewall if increase the width of the guide rail 2 of design implementation example 1.
Therefore, guide rail 2 also can obtain high-precision rectangular thing reaching on the length of 6m～7m, can be applied to the manufacturing installation of big liquid crystal panel.
By the horizontal position of guide rail constraint slider,, therefore has the effect that independently to adjust the horizontal walking precision and the precision of walking longitudinally by the position longitudinally of platform constraints slider.
Embodiment 2
Fig. 2 and Fig. 3 are the figure of slip objective table of explanation embodiments of the invention 2, and Fig. 2 sees the figure in the cross section of slip objective table to the B-B of Fig. 3 section to apparent direction, and Fig. 3 is the figure that sees the vertical section of slip objective table to the A-A of Fig. 2 section to apparent direction.
In Fig. 2 and Fig. 3, omit explanation for the label identical with Fig. 1.
On the platform 1 of embodiment 2, excavate elongated slot 1a (Fig. 3), in this elongated slot 1a, lay the line motor magnet portion 7 that top has magnet 7a.At this moment, the surface of the top and platform 1 of magnet 7a is substantially in same plane.Thereby the face of platform 1 had carried out correct grinding originally for even surface, become the flatness (even surface) of same degree above the foot with the U font of guide rail 2 ', so the face of usage platform 1 was no problem.
In addition, 2 guide rails 2,2 are fixed to and clip elongated slot 1a each other and parallel.
If increase the width of design guide rail 2, then can reduce the amount of guide rail distortion by pressure from the air of the plane of structure air ejection portion ejection of slider sidewall, therefore can solve the problem 5 of prior art (Figure 52).
Place slider 4 above this elongated slot 1a and in the space between the 2 row guide rails 2,2.This slider 4 is seen as reverse U shape under the section vertical with direct of travel, possess line motor coil portion 8 in the opening of this reverse U shape.Line motor magnet portion 7 and line motor coil portion 8 dispose across the space is relative each other, the core (iron core) of the inside (not shown) by line motor coil portion 8 and produce electromagnetic attraction between line motor magnet portion 7 and line motor coil portion 8.
In addition, becoming the part of timber 6r and when processing peristome 6k with embodiment is similarly residual on sidewall on the slider 4, obtain following effect:, also can suppress the distortion (distortion of Figure 53) of sidewall by timber 6r even applied the power of outwards opening sidewall by electromagnetic attraction.
So, in embodiment 2, drive surface of line motor (lower end of line motor coil 8) and objective table float (slip) face (from flat surface 1 tens μ m upwards) basically identical, therefore there is not offset distance, contacting of slider 4 ' that in the slip objective table of Figure 52, produces and guide rail 2 '.
At this, the reason based on the applicant draws does not then have the reason that contacts of slider and guide rail to describe to there being offset distance.
Turn back to Figure 52 as known example.What represent at Figure 52 middle distance t is offset distance between the sliding surface L2 of the drive surface L1 of slider 4 ' and slider 4 '.This increases apart from t, then since when acceleration under the state of the upper support of slider 4 ' (floating) apply moment to preacceleration (or deceleration) in the bottom of slider 4 ', the front-end and back-end of the direct of travel of slider 4 ' are shaken (pitching) significantly at above-below direction, its result causes that the direct of travel front-end and back-end of slider 4 ' may contact with the top of guide rail 2 ' etc.Yet, if this is apart from t 0 (Fig. 3), then the drive surface of slider 4 is with to float (slip) face consistent, therefore in the face of the power of the acceleration that applies slider 4 (or deceleration), float/slide/move, therefore the direct of travel front-end and back-end of slider 4 are not shaken at above-below direction, and its result does not have the direct of travel front-end and back-end and worries such as platform 1 contacts of slider 4.
Like this, there is the offset distance t shown in Figure 52, there is distance between slider height and transmission driving height longitudinally, therefore when acceleration, produce moment, influential to pitch orientation, not only precision, idle running are poor repeatedly, and also produce accidents such as the slider of vertical side and the guide rail of vertical side interfere/contact when acceleration rapidly.Therefore, on the contrary in order not cause that interference/contact accident just can't carry out acceleration control rapidly, have the shortcoming of the slip objective table that becomes the acceleration control that can't carry out rapidly, but can solve this shortcoming by embodiment 2.Therefore, according to embodiment 2, even increase the worry that acceleration does not have objective table and sliding surface friction yet, can provide can high acceleration the slip objective table.
In addition, because for excavating (pit) structure, so the stress of electromagnetic attraction do not have directly slider 4 and influences, so slider main body can not be out of shape, and the stability of precision, reproducibility are good.
Embodiment 3
Fig. 4 is the figure of the slider of explanation embodiments of the invention 3, and Fig. 4 (a) is its perspective illustration, (b) is the perspective view that slider is turned upside down.Fig. 5 is that the C-C of slider of Fig. 4 (a) is to cutaway view.
Existing glide device 4 ' is the slider that is used for the slip objective table of Figure 52, is across the type of advancing on guide rail 2 '.Structurally between the front end of the direct of travel of two 4k of foot, the 4k of slider 4 ' and can't close and opening between the rear end.Therefore, if spray repulsion F1, the F2 that produces because of air, then shown in Figure 53, produce the 4k of foot of the both sides that will make slider 4 ', the power that 4k opens laterally, and open in slider 4 ' upper edge direction of arrow effect.In order to prevent that this situation from need thicken wall thickness, run in the opposite direction with miniaturization/cost degradation/light-weighted demand.
In addition, shown in Figure 53 during along direction of arrow F3 effect electromagnetic attraction, if the thickness low LCL on slider 4 ' top then caves in to downside shown in Figure 53.In order to prevent that this situation from need thicken wall thickness equally, run in the opposite direction with miniaturization/cost degradation/light-weighted demand.
Relative with it, the slider 4 of Fig. 4 (a) is the types of being advanced between 2 guide rails 2 by the slider of Fig. 2 and Fig. 3, therefore slider 4 need not across on guide rail 2, thereby slider 4 if central portion dig out be used to take in line motor coil portion 8 cuboid partly, can shown in hacures 4x, be provided with two foots are coupled together, connect direct of travel front end about between two foots the coupling part and similarly connect direct of travel the rear end about coupling part between two foots, even thereby on slider 4, produce the electromagnetic attraction F1 of the direction of arrow, F2, the coupling part of front end that also can be by direct of travel and the connecting portion of rear end assign to stop the foot of both sides will open this situation, and therefore the foot of the both sides of slider 4 can be crooked as shown in Figure 5.
Fig. 4 (b) is the figure that slider is turned upside down.For upwards having pulled down the state of line motor coil portion 8, become the part of timber 6r and processed peristome 6k in that sidewall is residual among the figure.Even have by electromagnetic attraction and apply the effect that the power of outwards opening sidewall also can suppress the distortion (distortion of Figure 53) of sidewall by timber 6r.
In addition, for onesize line motor coil 8 is installed, the slider 4 ' of Figure 52 is owing to across become large-scale on guide rail 2 ', therefore material also needs more, but the slider 4 of Fig. 2 is not because therefore comparatively small-sized across guide rail, thereby as long as less material, the thickness that is used to thicken the top of slider 4 by a part with remaining material, even along direction of arrow F3 effect electromagnetic attraction, the thickness on the top of slider 4 is also enough, therefore can not cave in significantly to downside as shown in Figure 5.
Embodiment 4
Fig. 6 is the cutaway view of the slip objective table of embodiment 4.
What Fig. 6 was different with embodiment 2 (Fig. 3) is the shape of slider.Slider 41 among Fig. 6 similarly becomes reverse U shape with the slider 4 of Fig. 3, but no matter the inboard still outside is the right angle at the angle of the reverse U shape of the slider 4 of Fig. 3, the angle of the U font of the slider 41 of Fig. 6 then is the outside and inboard chamfering (R) shape of avoiding stress, the two difference in this of being.Carry out chamfering by the inboard and the outside in the bight like this, stress is not concentrated on the angle, so the tolerance of counter stress is strong, and the bight of slider 41 is difficult to break more.
Embodiment 5
Fig. 7 is the cutaway view of the slip objective table of embodiment 5.
The slip objective table of embodiment 2 (Fig. 3) is the structure of the guide rail 2 of the 2 rectangular rods of both sides screw on platform 1, therefore can tackle the demand of wide cut, large-area slider simply, and embodiment 5 also can tackle the demand of more large-area slider.The slip objective table of Fig. 7 is answered right this demand, it is by being provided with line motor (line motor magnet portion 7 and line motor coil portion 8) in central authorities, guide rail 2,2 is set in both sides, a plurality of air ejiction openings 61,62 are set below the U of slider 42 font two ends in order to increase buoyancy, and can realize wide cut, large-area slip objective table simply.
The label identical with Fig. 3 is the parts of identical function, therefore omits explanation.
Embodiment 6
Fig. 8 is the cutaway view of the slip objective table of embodiment 6.
According to embodiment 5 (Fig. 7), can make the long slip objective table of wide cut, depth simply, and the slip objective table of embodiment 6 is compared actuating force with the slip objective table of embodiment 5 and is doubled.The slip objective table of embodiment 6 by a plurality of line motors 51,52 are set, can be made the slip objective table of actuating force arbitrarily as shown in Figure 8.
In Fig. 8, be provided with 2 line motors 51,52 in the both sides of slider 43 and platform 1, thereby can make actuating force become 2 times.
And then, for shown in the embodiment 5 (Fig. 7) when the driving that central authorities are undertaken by 1 line motor, rotate (deflection) to the left and right with respect to direct of travel easily, but 2 line motors 51 are set by the compartment of terrain that separates each other, 52, linear staff with both sides for example is installed in guide rail 2 in addition, 2 side surface part or above, can carry out two side drives, therefore the tolerance with respect to yawing moment strengthens, by line motor by both sides, linear staff carries out Synchronization Control, can further improve deflection, laterally the precision of glacing flatness can make to be generally 3 seconds, 3 μ m became below 1 second, below the 1 μ m.
Embodiment 7
Fig. 9 is the cutaway view of the slip objective table of embodiment 7.
The slip objective table of Fig. 9 can be described as that slip objective table with the slip objective table of Fig. 3 and Fig. 8 combines, and has obtained increasing the slip objective table of actuating force.It is so that but effect has more than, and has obtained the effect of beyong contemplation.That is, can overcome the weakness that the slip objective table of the slip objective table of Fig. 3 and Fig. 8 is had respectively by embodiment 7.
The weakness of the slip objective table of Fig. 3 is deflection, can solve this weakness and drive by two line motors as shown in Figure 8.
In addition, two line motors of Fig. 8 drive the weakness that has, when improper stopping, to apply braking to two line motors, but the method that the braking that in fact is difficult to make two line motors proves effective is identical, therefore the braking of two line motors prove effective method not simultaneously, slider can side-to-side vibrations.Its reason is, when stopping motor, apply dynamic braking usually, but dynamic braking just makes motor coiling short circuit by resistance improper, and therefore because the deviation of the resistance of each motor, the time that motor stops also deviation can occurring.
Yet, when the slip objective table at Fig. 9 applies improper stopping, if make the line motor of both sides be in free-running operation (stopping naturally because of frictional resistance when motor moves) state, and only the line motor of central authorities is applied dynamic braking, what then apply braking is central portion, so slider 44 can stop to not side-to-side vibrations.
In addition, the line motor above 3 can be set also, thereby can produce the high thrust that needs.
Embodiment 8
Figure 10～Figure 12 is the figure of slip objective table of explanation embodiment 8, and Figure 10 is the cutaway view of slip objective table, and Figure 11 is the perspective illustration of the slider of embodiment 8, and Figure 12 is that the B-B of slider of Figure 11 is to cutaway view.
In Figure 10～Figure 12, the slider 45 of embodiment 8 is the structure identical with the slider 4 of the slip objective table of embodiment 2 (Fig. 3) on principle, but the slider 45 of embodiment 8 is characterised in that, dig out fully at the heavy wall position on the top of the part that the line motor coil portion 8 of the slider 4 of Fig. 3 is entered, and become to be used to the structure of two foots of taking in air ejection portion 6 only residual.And, about the top of two sliders 45,45 the connection base portion 10 that is made of metallic plate (steel, stainless steel etc.) is set, at this line motor coil portion 8 is set.
And then, can effectively utilize to connect base portion 10 and be the advantage of metallic plate, form coolant simply in the inside that connects base portion 10 with hole 11, thus the heat that can remove from coil with hole 11 by coolant, so cut off thermal impact fully to top.
Thus, even electromagnetic attraction shown in Figure 12 is to metallic plate 10 effects, because the tolerance of 10 pairs of bendings of metallic plate is strong, even therefore metallic plate 10 as shown in the figure only the central portion distortion can not break (relative with it yet, the central portion of the slider made of stones 4 of Fig. 5 to the tolerance of bending slightly a little less than, therefore to thicken as mentioned above).Therefore in addition, the influence of electromagnetic attraction only affacts top connection base portion 10, only slider 45 (made of stones) has been applied the power of compression direction, because stone is very strong to the tolerance of compression, so stone and indeformable, the stability of precision, reproducibility are good.
Like this, by using the connection base portion 10 that constitutes by metallic plate, not only can realize the raising of precision, and the objective table height also can further reduce the part at the heavy wall position, slider 4 top of removing Fig. 3.That is, be metallic plate owing to connect base portion 10, so do not need the thickness of the slider made of stones 4 that needs among Fig. 5 that can further reduce the height of slip objective table, the height from platform is 50mm in the present embodiment.And the slip objective table of Fig. 3 is 70mm from the height of platform.Relative with it, the slip objective table of Figure 52 of conventional example is up to 100mm.
In addition, use hole 11 by making the coolant that water, air flow through connection base portion 10, the heating that can cool off line motor coil portion 8 cuts off the heat conduction to other parts simultaneously.
Embodiment 9
Figure 13 is 3 figure of the slip objective table of embodiment 9.
The structure of the slip objective table of embodiment 9 is, places the metallic plate slip objective table of embodiment 8 (Figure 10) on two slip objective tables 8 that drive of embodiment 6, and constitutes the XY objective table that can move in the X-Y direction.
Among the figure, 1 is platform, and 6 is air ejection portion, 10 for connecting base portion, and 12 is the Y-axis guide rail, and 13 is the Y-axis slider, 14 is Y-axis line motor magnet portion (fixed part), and 15 is Y-axis line motor coil portion, and 16 is the Y-axis linear staff, 17 is the X-axis guide rail, 18 is the X-axis slider, and 19 is X-axis line motor magnet portion (fixed part), and 20 is X-axis line motor coil portion, 21 is the X-axis linear staff, and 31 is hold-down screw.
In this embodiment 9, on the slip objective table of embodiment 6, it is not the slip objective table that piles up embodiment 8 simply, the platform 1 (Figure 10) that it is characterized in that the slip objective table of the slider 43 (Fig. 8) of slip objective table of shared embodiment 6 and embodiment 8, groove and overlapping is excavated on top at the slider 43 of the slip objective table of embodiment 6, obtains comparing with the height that piles up the XY objective table that can reduce height thus.
In addition, in Figure 13, on the guide rail of X-axis or Y-axis, shown in Figure 46 (aftermentioned), install and use the position limit bolt 37a of limit screw, thereby can reduce the deformation of guide rail, can improve the walking precision of X-axis or Y-axis.
Y-axis slider 13 is if become the part of timber 6r and process peristome 6k in that sidewall is residual similarly to Example 1, then can obtain following effect:, also can suppress the distortion (distortion shown in Figure 53) of sidewall by timber 6r even apply the power of outwards opening sidewall by electromagnetic attraction.
X-axis slider 18 also can use the slider of embodiment 1 to realize, at this moment, if similarly to Example 1 in the residual part that becomes timber 6r of sidewall, then the distortion of sidewall is inhibited.
Embodiment 10
Figure 14 is 3 figure of the slip objective table of embodiment 10.
Constituting of the objective table of embodiment 10 gone up the metallic plate slip objective table of placing embodiment 8 (Figure 10) at two slip objective tables (Fig. 8) that drive of embodiment 6, and then added two features that drive of embodiment 6.
Thus, can reduce height similarly to Example 9, and X-axis and Y-axis are all carried out two the driving, therefore improve mobile accuracy in both sides, thereby can improve horizontal mobile accuracy (deflection, laterally glacing flatness), so all can carry out high-precision moving in X-axis and Y-axis.
In addition, in Figure 14, on the guide rail of X-axis or Y-axis, shown in Figure 46 (aftermentioned), install and use the position limit bolt 37a of limit screw, thereby can reduce the deformation of guide rail, can improve the walking precision of X-axis or Y-axis.
Embodiment 11
Figure 15 is the longitudinal section of the slip objective table of embodiment 11.
In the drawings, 1 is platform, and 40 is guide rail, and 4 is slider, and 6 is air ejection portion, and 8 is the line motor coil portion, and 9 is linear staff portion, and 9B is for installing base portion, and 9H is the linear staff head, and 9S is linear staff (a scale portion).22 for being used to install the installation base portion of glass linear staff, and 23 is the space base portion, and 24 is the top base portion, and 25 is limiting sensor, and 26 is cable rack, and 31 is hold-down screw.
Drive part is and the identical structure of embodiment 2 (Fig. 3) that different is the allocation position of position detecting device (linear staff) substantially.In embodiment 2, slider 4 is when direct of travel side-to-side vibrations (deflection), and the output of position detecting device (linear staff) has produced the detection error, and its reason is found out to because linear staff 9 is installed on the side of slider 4.That is, slider 4 is when direct of travel side-to-side vibrations (deflection), and the position of position detecting device and slider is inconsistent, has therefore produced the detection error.So, in embodiment 11, by position detecting device (linear staff) 9 is configured in the central authorities of slider 4, and eliminated this error.As concrete configuration structure,, on slider 4, from 2 space base portions of central portion fixed-site away from each other 23,23, and top base portion 24 is installed thereon in order to ensure the space that linear staff 9 is configured in the central authorities of slider 4.
In addition, linear staff is installed in the central space of base portion 22 between 4,2 space base portions 23 of slider and top base portion 24 and is disposed linear staff.
Figure 16 is near the perspective cutaway view, the linear staff 9 of embodiment 11.
As shown in figure 16, be used to install the linear staff installation base portion 22 of linear staff (scale portion) 9S, for having the clava that reaches as the strip of the length at the direct of travel both ends of slider 4 movings range, in the central space that this linear staff installation base portion 22 connects between 4,2 space base portions 23 of slider and the top base portion 24, and be fixed on the upright installing component 22H that establishes in direct of travel both ends.And, linear staff (scale portion) 9S by two-sided tape, binding agent, screw etc. be fixed to linear staff install base portion 22 below.Thus, even slider 4 moves in moving range in length and breadth, linear staff (scale portion) 9S also is and slider 4 non-contacting states and motionless.
On the other hand, in order to read the scale of this linear staff 9S, linear staff head 9H head install base portion 9B directly over and near linear staff 9S below and by screw.Thus, if slider 4 moves in moving range in length and breadth, then linear staff head 9H also moves with slider 4, so linear staff head 9H can read the scale of motionless linear staff 9S.Be not configured on the same axis with respect to having skew ground detecting head 9H as the slider 4 of measuring thing, even so slider 4 produce deflections, central portion is not subjected to the influence of deflection yet, therefore measures precision raising (Abbe's principle).According to embodiment 11, owing to be the position detecting device of having considered Abbe's principle, so the positioning accuracy under the position error of objective table reaches, and positioning accuracy is best repeatedly.In addition, 9H is near to the distance of top base portion 24 from the linear staff head, so the error of pitch orientation also tails off, and also improves thereby measure precision.
In addition, the limit switch 25 that is used to prevent the excess of stroke etc. was provided with to the horizontal of device in the past side-prominently, but in embodiment 11, can effectively utilize the outside of slider 4, space base portion 23 and the space between the top base portion 24 and be installed in this, therefore can be not outstanding to the outside of device, worries such as no breakage.
Thus, even slider 4 moves in moving range in length and breadth, linear staff (scale portion) 9S also is and slider 4 non-contacting states and motionless.
And then, linear staff (scale portion) 9S be fixed on linear staff install base portion 22 below, so linear staff installs base portion 22 and plays the effect of lid, thereby is difficult for adhering to dust/dust/rubbish of falling from the top etc. on linear staff (scale portion) 9S.
Embodiment 12
Figure 17 is the longitudinal section of the slip objective table of embodiment 12.
In the drawings, 22 ' for being used to install the installation base portion of glass linear staff, and other are identical with Figure 15.The slip objective table of embodiment 12 is different with the slip objective table of embodiment 11 is the shape this point that is used to install the installation base portion 22 ' of glass linear staff.Linear staff is installed base portion 22 (Figure 15) to be elongated strip and to install towards the below, therefore be subjected to the influence of gravity easily and be out of shape, and install in the base portion 22 ', form protuberance from the Width two ends downwards at linear staff, become cross section U font, therefore the tolerance to distortion is strong.
In addition, substantially be the structure identical, but dwindled platform 1 and make it compact, so can gather and be module with the foregoing description 12.
And then linear staff (scale portion) 9S is installed base portion 22 ' by linear staff and covers, and therefore dust/dust/the rubbish etc. that falls from the top is difficult to be attached on linear staff (scale portion) 9S more.In addition, scale head 9H also installs walking under the base portion 22 ' at linear staff, so dust/dust/rubbish etc. also is difficult to be attached on the scale head 9H.
Embodiment 13
Figure 18 is 3 figure of the slip objective table of embodiment 13.The embodiment 10 with Figure 14 aspect the objective table part is identical for this slip objective table, and difference is for to be configured in the bottom with planar linear staff 27.As shown in figure 18, can increase width, prolong depth, can constitute the XY objective table, therefore can in the space of vacating of central authorities, planar linear staff 27 be set by two drivings.Thereby, in the formation of the XY of embodiment 5 objective table, the planar linear staff 27 that can detect in plane X Y direction is set in the space (face of platform 1) that central authorities are vacating, on the other hand, pit 13H is set on Y-axis slider 13, under the state that planar linear staff head 29 is inserted in this pit 13H, be installed in X-axis slider 18 below.
Figure 19 is the vertical view of the plane X Y linear staff of use among the embodiment 13.In the drawings, 27 is the planar linear staff, and 28 is the planar linear staff glass of load plane two dimension linear staff 27, and 29 for reading the planar linear staff head of planar linear staff 27.
Therefore, make X-axis slider 18 when directions X moves, planar linear staff head 29 moves in pit 13H, reads planar linear staff 27 at directions X.In addition, make Y-axis slider 13 in the drawings when above-below direction moves, X-axis slider 18 also moves, and the planar linear staff head 28 that therefore is installed on the below of X-axis slider 18 also moves at above-below direction, thereby reads planar linear staff 27 in the Y direction.Its result, planar linear staff head 29 can read planar linear staff 27 in the XY direction.
Embodiment 14
Figure 20 is the vertical view of the plane X Y linear staff of embodiment 14.The effective travel of the plane X Y linear staff of selling on the market is 68mm square as shown in figure 19, therefore wanting to detect when wider, shown in embodiment 14 (Figure 20), separate each other predetermined space t and dispose a plurality of (being 4 in the drawings) planar linear staff 27 in direction up and down.
On the other hand, in order to read a plurality of planar linear staffs 27 that devices spaced apart t arranges in the plane, dispose following planar linear staff head 2 heads 30:, can carry out position probing by the two is switched at 2 planar linear staffs of foursquare diagonal arranged askew head 29.These planar linear staff head 2 heads 30 can move in the scope shown in the square 30R in Figure 20.And, predetermined space t, between the end of adjacent planar two dimension linear staff 27,27 than in above-mentioned diagonal arranged askew 2 the interval of directions X, Y direction of 29,29 on planar linear staff head short slightly, when adjacent planar two dimension linear staff 27 shifted, planar linear staff head 29,29 must overlap planar linear staff head 29,29 from planar linear staff 27.
Thus, planar linear staff head 2 heads 30 are in square 30R when mobile, must there be some heads to read planar linear staff 28 in 2 planar linear staff heads 29,29, therefore as long as always switch to the head of normal read out-of-plane two dimension linear staff 28.Always switch to the head that detects normally in 2 two-dimentional linear staff heads 29, can pass through the known handoff technique in 2 linear staff heads of directions X, the configuration of Y direction application one dimension direction respectively, and realize simply.In addition, for example on the books in TOHKEMY 2005-308592 communique as known handoff technique, therefore as long as this technology of use.
Embodiment 15
Figure 21 is the cutaway view of the slip objective table of embodiment 15.
In the drawings, the bottom is a platform 1, with 2 guide rails, 2 equal screw, has slider 4 in both sides therebetween.On platform 1 and the inner face of the guide rail 2 of both sides, paste contact guide rails 32 by embodiment 15, on the slider face of its relative face, similarly be provided with contact slider 33 by embodiment 15.Other structures are identical with embodiment 4 (Fig. 6), therefore omit explanation.
Therefore the slider 4 that uses among the embodiment 2～13 is as stone or ceramic, might produce dust if contact then with guide rail 2.Therefore, in order to prevent to produce dust, in embodiment 2～13 above platform 1 and the guide rail 2 of both sides separated from one another about 5 μ m.
But,, then produced little vibration at above-below direction and moving direction if slider 4 is floated from above.
In the existing apparatus of Figure 48～Figure 50, usually air bearing by upward air pressure and air pressure balance downwards float, in addition, in the existing apparatus and slip objective table of the present invention of Figure 52, float by electromagnetic attraction and air pressure balance, but in fact the pulsation by air pressure has produced up-down vibration about about 0.1 μ m～0.3 μ m.Therefore, the objective table main body is also inadvertently vibrated at above-below direction.
Yet, by embodiment 15 owing to can realize zero floatation volume (concave-convex surface when microcosmic is seen, therefore protruding and protruding contact the, the state of part in addition) for floating by air, by make it to contact minutely eliminate about little vibration.
In addition, about moving direction, also has the effect of the vibration that suppresses existing 20～30nm by contact.
Suppose: the object of pasting low-friction coefficient such as carbon fibers and firm material as contact guide rail 32, in addition as the object of same low-friction coefficient such as the quartz of contact slider 33 album leaves, agate and firm material, " contact minutely " is meant that the surface of carbon fiber is the fine hair shape, be contact agate or the state that does not contact agate in the air layer that comprises between this fine hair, contact slider 33 moves along contact guide rail 32 under this state.
As above, according to the present invention, four problems that can be had by the whole known slip objective table of the actual solution of simple structure.
(1) slider easy deformation has the danger that reproducibility is impaired or objective table self breaks of precision.
(2) the Width section is the machining accuracy higher (being finish-machined to about error 5 μ m) of the guide rail of U font, therefore needs time and cost.
(3) when acceleration rapidly, produce slider and accidents such as guide rail interfere/contacts.Therefore, in order not interfere/the contact accident, and become the slip objective table of the acceleration control that can't carry out rapidly.
(4) positioning accuracy of the detected signal of position detecting device (linear staff), low precision repeatedly.
Embodiment 16
Figure 22 is the longitudinal section of the slip objective table of the embodiment of the invention 16, Figure 23 is the longitudinal section of variation of the slip objective table of the embodiment of the invention 16, and Figure 24 is 3 figure of the slip objective table of Figure 22, (a) is vertical view, (b) being end view, (c) is front view.
In Figure 22 and Figure 24,35 are sheet metal processing pallet, and 36 is horizontal adjusting bolt, 37 is the position limit bolt, 34 is platform track, and 4 is slider, and 6s is a plane of structure air ejection portion, 6u is a following air ejection portion, 7 is line motor magnet portion (fixed part), and 8 is line motor coil portion (movable part), and 9 is linear staff portion, 24 is the top base portion, and 26 is cable rack.As the material of platform track 34, generally use change in size few, the time do not produce black Gang Yan or ceramic material, the carbon fiber etc. of bounce-back in contact, the structure of drive division and guide rail is identical with embodiment 1.
In addition, on slider 4 if residually on sidewall similarly to Example 1 become the part of timber 6r and process peristome 6k, then can obtain following effect:, also can suppress the distortion (distortion of Figure 53) of sidewall by timber 6r even apply the power of outwards opening sidewall by electromagnetic attraction.
The barbed portion in the outside of the rail sections above platform track is installed linear staff portion 9, by head part 9k is installed the head of linear staff is combined (Figure 22) with the side of slider 4.Therefore, has effect in the transverse width that linear staff can be accommodated in platform track 34.
In addition, on the rail sections of platform track 34 and top base portion 24 below between the space in, the linear staff 9aS (Figure 23) of belt can be installed.The banded scale 9aS (Figure 23) of installation linear staff portion on the rail sections of platform track 34 is at the head 9aH (Figure 23) below by head installation part 9k installation linear staff of top base portion.
The height of head 9aH above slider 4 of linear staff portion, the weak point of comparing with the situation of linear staff 9, the mensuration precision that therefore has pitch orientation improves the effect (Figure 22) of (Abbe's principle).
The platform track 34 of embodiment 16 (Figure 22, Figure 24) is the structure with platform among the embodiment 11 and guide rail 2 integrated combinations, it is characterized in that disposing horizontal adjusting bolt 36 below platform track 34, disposes position limit bolt 37 in the side.Comparing embodiment 16 and known example (Figure 52), under the situation of the structure of the rail portion of the U font of known example (Figure 52), in the time of on it being arranged on device etc., guide rail keeps its machining accuracy and uses, therefore can only make the length about 1m at most, it is provided with the place, and also can only to be arranged on top flatness be that the following platform made of stones of 10 μ m etc. goes up and use that (if be fixed on the face of flatness difference, then main body is reversed and become the state that can't use.Therefore, be limited to purposes than the semiconductor-fabricating device of the little stroke of liquid crystal purposes.)。
Relative with it, the present invention adjusts bolt 36 at the configuration level that makes below the one-piece type platform track 34 of platform and guide rail of embodiment 16, and at side allocation position restriction bolt 37, thereby the present invention is integrated with platform and guide rail, therefore compare with known example (Figure 52), the distortion of guide rail is few.In addition, with respect to because of deadweight and the bending longitudinally that causes of load loading etc., by being adjusted at the horizontal adjusting bolt 36 that is provided with below, do not have the platform made of stones etc. of flatness but do not have under the situation of sheet metal processing pallet 35 grades of precision even be not below, also the slider objective table can be set, the glacing flatness of walking also can be adjusted into about 3～10 μ m, similarly, horizontal precision also can be adjusted platform track 34 by position limit bolt 37, and the glacing flatness of walking is adjusted into about 3～10 μ m.
This is the integrated and effect that causes of platform and guide rail.Owing to become one, rail sections also can change during therefore by bolt inching platform.
In addition, can clip coldplate 81 at the upper part (rightabout of magnet face) of line motor coil portion and be installed to slider (Figure 23).In coldplate 81, have the hole, can easily realize water-cooled or air cooling.
As above, even be under the situation of low precisions such as sheet metal processing pallet, also can carry out high-precision transmission location by the rectangular thing more than the 10m in bottom as benchmark.
And, known example (Figure 52) is producing offset distance between line motor magnet portion 7 that produces the position as driving power and the line motor coil portion 8 and on the walking guide surface of slider 4, relative with it, among the embodiment 16 (Figure 22), produce between the line motor magnet portion 7 of position and the line motor coil portion 8 and the walking guide surface unanimity of slider 4 as driving power, offset distance is zero substantially, therefore do not produce the moment of pitch orientation, pitch error during acceleration and deceleration tails off, acceleration and deceleration can be carried out quickly, high accuracy can be carried out, transmit at a high speed.
In addition, embodiment 16 also can carry out following application, FPD (flat-panel monitor) uses or solar cell panel is used manufacturing, the testing fixture that therefore can fully be used to maximize and advance, and the standardization of objective table of can sliding, and realized the cost reduction.
(1) as shown in figure 25, the slip objective table of the many playscripts with stage directions embodiment 16 that is arranged in parallel on platform 1 is provided with workpiece absorption base portion 38, thereby can carries out the transmission of large-scale FPD workpiece, solar cell panel on top.
(2) as shown in figure 26, the slip objective table of the many playscripts with stage directions embodiment 16 that is arranged in parallel on sheet metal processing pallet 35 carries out horizontal adjusting, and on top workpiece absorption base portion 38 is set, thereby can carry out the transmission of large-scale FPD workpiece, solar cell panel.This structure can't realize in known example (Figure 52).
In known example, if long stroke, then the guide rail of U font is being fixed under the crooked state on the sheet metal processing pallet, so the walking low precision of slider, adsorbs base portion with a plurality of sliders in conjunction with driving workpiece under this state.The walking error of each slider interacts between each line motor by workpiece absorption base portion, thus the motor remarkable action.
In the present invention, crooked by position limit bolt and horizontal adjusting bolt dressing plate track can improve the walking precision of slider, therefore can reduce the walking error between slider, can make each line motor regular event.
(3) as shown in figure 27, two ends on platform 1 are arranged in parallel the slip objective table of 2 formula present embodiments 16, and on top similarly laterally or down (Figure 44) the slip objective table of present embodiment 16 is set, thereby can constitute the objective table of door frame (gantry) structure corresponding with large-scale FPD workpiece.
In the present invention, compare enough big (for example big about 10 times) with the loading of slider with the electromagnetic attraction of the motor of aerostatic buoyancy balance, even therefore the slip objective table is installed problems such as slider falls can not occur yet down.
(4) as shown in figure 28, two ends on sheet metal processing pallet 35 are arranged in parallel the slip objective table of 2 formula present embodiments 16, carry out horizontal adjusting, on top similarly laterally or down (Figure 44) the slip objective table of present embodiment 16 is set, thereby can constitute the objective table with large-scale FPD workpiece, portal-framed structure that solar cell panel is corresponding.This structure can't realize in known example (Figure 52).
(5) as shown in figure 29, a plurality of horizontally sets similarly have been set in Figure 28 movable slider 4 of the slip objective table and objective table large-scale FPD workpiece, portal-framed structure that solar cell panel is corresponding of present embodiment 16, thus can carry out a plurality of work simultaneously.
(6) as shown in figure 30, when producing deficiency etc., when wanting transmission thing to top to apply average loading because of the loading on top, the relation that produces thrust, on identical guide rail 2, pick up a plurality of line motor coil portion (moving elements) 8 and slider, top base portion 24 as direct of travel, carry out run-in synchronism, thus the reply can carry out producing deficiency the time, when wanting transmission thing to top to apply average loading because of loading, the relation that produces thrust.This structure can't realize in known example (Figure 52).
In addition, the line motor coil portion (moving element) 8 among Figure 24, Figure 27, Figure 28, Figure 29, Figure 30, top base portion 24 actual should hiding in the accompanying drawings, but illustrate in order to express feature of the present invention.
Embodiment 17
Figure 31 is the longitudinal section of the slip objective table of the embodiment of the invention 17.Figure 32 is 3 figure of the slip objective table of the embodiment of the invention 17.
In Figure 31 and Figure 32,35 are sheet metal processing pallet, 40 is the bolt fastening horizontal adjusting bolt, and 39 is platform track, and 4 is slider, 6s is a plane of structure air ejection portion, 6u is a following air ejection portion, and 7 is line motor magnet portion (fixed part), and 8 is line motor coil portion (movable part), 9 is linear staff portion, and 26 is cable rack.As the material of platform track 39, generally use change in size few, the time do not produce black Gang Yan or ceramic material, the carbon fiber etc. of bounce-back in contact, the structure of drive division is identical with embodiment 1.
The structure of the guide rail shown in the embodiment 1 (Fig. 1) has been made up in the two sides of platform track 39 above platform of embodiment 17 (Figure 31, Figure 32) respectively integratedly, and the two sides of the top of platform track are guide surface.Platform track 39 is seen the shape that is Roman capitals " I " font under the section vertical with direct of travel, the Width of two sides and the thickness of above-below direction have been increased, even therefore the rectangular thing about 10m also can become the depth of parallelism attrition process between the guide surface of two sides the precision about 5 μ m.
In addition, similarly line motor magnet portion 7 (Figure 33) partly is installed with embodiment 1 (Fig. 1) in the upper central of platform track 39.Perhaps, similarly have the groove that is used to be provided with line motor magnet portion 7, and line motor magnet 7 (Figure 34) of portion are installed in the upper central portion of platform track 39 with embodiment 2 (Fig. 2, Fig. 3).
Slider 4 and embodiment 1 (Fig. 1), embodiment 2 (Fig. 2, Fig. 3) similarly see to be reverse U shape to possess line motor coil portion 8 (Figure 33, Figure 34) in the opening of this reverse U shape under the section vertical with direct of travel.
In addition, on slider 4 if residually on sidewall similarly to Example 1 become the part of timber 6r and process peristome 6k, then can obtain following effect:, also can suppress the distortion (distortion of Figure 53) of sidewall by timber 6r even apply the power of outwards opening sidewall by electromagnetic attraction.
Make the transverse width of the transverse width of slider 4, connect horizontal slider 4a respectively by bolt, and compact configuration is to the top of platform track 39 in the bottom of two sides greater than the rail portion of platform track 39.Slider 4 and the horizontal slider one of Figure 31 separately constitute horizontal slider 4a and installation with it relatively in Figure 33 and Figure 34.
Slider 4 constitutes, walk by averaging out from the following air ejection 6u of portion (Figure 31, Figure 32, Figure 34) ejection air and with the electromagnetic attraction of motor magnet portion 7 and line motor coil portion 8, in the mode of the upside two sides that surround platform track 39, walking in the time of from the plane of structure air ejection 6s of portion (Figure 31, Figure 32, Figure 34) the ejection air of horizontal slider 4a.
In addition, by air from the plane of structure air ejection 6s of portion of horizontal slider 4a ejection, to the upside two sides of platform rail 39 along the direction application of force of compressing to the inside from both sides.By figure (Figure 31,33,34) as can be known, platform track has sufficient thickness, and granite etc. are less with respect to the compression stress distortion, therefore has the almost indeformable effect of guide surface of upside two sides.
This is by constituting the guide rail of the transverse movement that retrains slider in the upside two sides of platform as mentioned above and can realizing.In the prior art of Figure 52, though similarly spray the plane of structure air to the inside with the present invention, the problem (problem 5) that exists the guide rail of U font to be out of shape to the inside, therefore comparing with the present invention has the internal difference on the consideration mode.
Therefore platform track 39 is the shape of I font, is the structure of the few high rigidity of the bending of main body, it is characterized by in the bottom of platform track 39 and disposes bolt fastening horizontal adjusting bolt 40.Comparing embodiment 17 and known example (Figure 52), under the situation of the structure of the rail portion of the U font of known example (Figure 52), in the time of on it being arranged on device etc., guide rail keeps its machining accuracy and uses, therefore can only make the length about 1m at most, it is provided with the place, and also can only to be arranged on top flatness be that the following platform made of stones of 10 μ m etc. goes up and use that (if be fixed on the face of flatness difference, then main body is reversed and become the state that can't use.Therefore, be limited to purposes than the semiconductor-fabricating device of the little stroke of liquid crystal purposes.)。
Relative with it, the present invention's shown in Figure 43 as details drawing, make become one type and under the section vertical, be seen as the platform track 39 of the structure of " I " font of platform and guide rail for embodiment 17 with direct of travel, therefore the rigidity of main body is strong, in bottom configuration bolt fastening horizontal adjusting bolt 40 and horizontal adjusting bolt 36, used the position limit bolt 37a of limit screw in side configuration,, be high rigidity therefore with respect to the bending longitudinally that causes because of deadweight and load loading etc.And then, adjust the bolt fastening horizontal adjusting bolt 40 that the bottom is provided with engage fixing negative thread lining 43 (Figure 42) push-and-pull with platform track 39 as pin thread, and determined highly, and be fixed on the mechanical material with set bolt 42 (Figure 42), even thereby following be not to have the platform made of stones etc. of flatness but do not have under the situation of sheet metal processing pallet 35 grades of precision, also the slider objective table can be set, the glacing flatness of walking also can be adjusted into about 3～10 μ m.
Similarly, the position limit bolt 37a that horizontal precision also can be passed through the bottom of platform track 39 adjusts, and the glacing flatness of walking is adjusted into about 3～10 μ m (Figure 43).
In addition, with illustrated in fig. 23 same, can clip coldplate at the upper part (rightabout of magnet face) of the line motor coil portion of Figure 31～Figure 34 and be installed to slider.In coldplate, have the hole, can easily realize water-cooled or air cooling.
As above, even be under the situation of low precisions such as sheet metal processing pallet, also can carry out high-precision transmission location by the rectangular thing more than the 10m in bottom as benchmark.
In addition, the load loading of mounting to slider 4 greatly, in the time of only can't supporting by bolt fastening horizontal adjusting bolt 40, on sheet metal processing pallet 35, horizontal adjusting bolt 36 (Figure 33, Figure 34) is installed, the loading that is applied to bolt fastening horizontal adjusting bolt 40 can be shared by the bottom of pushing to platform track, the load loading can be increased.
And, known example (Figure 52) is producing offset distance between line motor magnet portion 7 that produces the position as driving power and the line motor coil portion 8 and on the walking guide surface of slider 4, relative with it, among the embodiment 17 (Figure 31), produce between the line motor magnet portion 7 of position and the line motor coil portion 8 and the walking guide surface unanimity of slider 4 as driving power, offset distance is zero (Figure 31 substantially, 33,34), therefore do not produce the moment of pitch orientation, pitch error during acceleration and deceleration tails off, acceleration and deceleration can be carried out quickly, high accuracy can be carried out, transmit at a high speed.
In the top of horizontal slider 4a (Figure 33, Figure 34), make the breach space, the linear staff 9a of belt can be installed at the position of the horizontal slider 4a of the guide surface of object platform track 39 (Figure 35).At this, shown in Figure 35 as end view installed the banded scale 9aS of linear staff portion on the guide surface of platform track 39, by head the head 9aH that part is installed linear staff is installed in the notch part of the side of slider 4a central portion.
The height of head 9aH above slider 4a of linear staff portion, the weak point of comparing with the situation of linear staff 9, the mensuration precision that therefore has pitch orientation improves the effect (Figure 33, Figure 34) of (Abbe's principle).
In addition, embodiment 17 also can carry out following application, FPD uses or solar cell panel is used manufacturing, the testing fixture that therefore can fully be used to maximize and advance, and the standardization of objective table of can sliding, and realized the cost reduction.
(1) as shown in figure 36, the slip objective table of the many playscripts with stage directions embodiment 17 that is arranged in parallel on platform 1 is provided with workpiece absorption base portion 38, thereby can carries out the transmission of large-scale FPD workpiece on top.
(2) as shown in figure 37, the slip objective table of the many playscripts with stage directions embodiment 17 that is arranged in parallel on sheet metal processing pallet 35 carries out horizontal adjusting, and on top workpiece absorption base portion 38 is set, thereby can carry out the transmission of large-scale FPD workpiece, solar cell panel.This structure can't realize in known example (Figure 52).
In the present invention, crooked by position limit bolt, bolt fastening horizontal adjusting bolt dressing plate track can improve the walking precision of slider, therefore can reduce the walking error between slider, can make each line motor regular event.
(3) as shown in figure 38, two ends on platform 1 are arranged in parallel the slip objective table of 2 formula present embodiments 17, and the slip objective table of embodiment 16 in upper lateral or before (Figure 44) is provided with, thereby can constitute the objective table of the portal-framed structure corresponding down with large-scale FPD workpiece.
(4) as shown in figure 39, two ends on sheet metal processing pallet 35 are arranged in parallel the slip objective table of 2 formula present embodiments 17, carry out horizontal adjusting, the slip objective table of embodiment 16 in upper lateral or before (Figure 44) is provided with down, thus can constitute the objective table of the portal-framed structure corresponding with large-scale FPD workpiece.This structure can't realize in known example (Figure 52).
(5) as shown in figure 40, be provided with on the top of the Figure 39 of above-mentioned (4) a plurality of similarly laterally or down (Figure 44) be provided with the movable slider 4 (figure 40 illustrates top base portion 24) of objective table of the portal-framed structure slip objective table, corresponding with large-scale FPD workpiece of present embodiment 26, thereby can carry out a plurality of work simultaneously.
(6) as shown in figure 41, the platform track 39 of the slip objective table of horizontally set present embodiment 17 supports its central authorities with pillar 41, and slider 4 laterally is set in both sides, any slider 4 all can self contained function, only just can two-sidedly use by 1 platform track 39.In addition, under the situation of a plurality of sliders of above-mentioned (5), can dispose the slider 4 of its quantity of 2 times.
(7) with (6) of the foregoing description 16 similarly, as shown in figure 30, when producing deficiency etc., when wanting transmission thing to top to apply average loading because of the loading on top, the relation that produces thrust, on identical guide rail 2, pick up a plurality of line motor coil portion (moving elements) 8 and slider 4, top base portion 24 as direct of travel, carry out run-in synchronism, thus the reply can carry out producing deficiency the time, when wanting transmission thing to top to apply average loading because of loading, the relation that produces thrust.This structure can't realize in known example (Figure 52).
In addition, line motor coil portion (moving element) 8 actual should the hiding in the accompanying drawings among Figure 32, Figure 38, Figure 39, Figure 40, but illustrate in order to express feature of the present invention.
The above-below direction adjusting mechanism of＜platform track 〉
Figure 42 is the amplification details drawing of A portion of Figure 31 of slip objective table that can adjust the embodiment of the invention 17 of platform track at above-below direction, (a) expression makes the state in the way that objective table rises, (b) expression rises to maximum state, (c) the fixing state of expression.
In the drawings, 35 are sheet metal processing pallet, and 39 is platform track, and 40 is the bolt fastening horizontal adjusting bolt, and 42 is set bolt, and 43 is to engage fixing negative thread lining with platform track, and 44 is screwed hole.On the flange part of the lower end, end of platform track 39, engage and be fixed with negative thread lining 43.In addition, the position on the negative thread lining 43 residing sheet metal processing pallets 35 in the time of on platform track 39 being placed sheet metal processing pallet 35 is formed with screwed hole 44.Thereby, under the state that bolt fastening horizontal adjusting bolt 40 and negative thread lining 43 are screwed togather platform track 39 is being placed on the sheet metal processing pallet 35, set bolt 42 is connected in bolt fastening horizontal adjusting bolt 40, after screwed hole 44 aligned in position of sheet metal processing pallet 35, make the set bolt 42 upright screwed holes 44 of being located at.
The above-below direction adjustment operation of＜platform track 〉
Next utilize Figure 42 that the operation of the height of the above-below direction of the platform track 39 of adjusting this state is described.Negative thread lining 43 is engaged the flange part of the lower end, end that is fixed to platform track 39.
At first, in the figure (a) of the state that the height that does not also carry out platform track 39 is regulated, make bolt fastening horizontal adjusting bolt forward or reverse, the height of platform track 39 is adjusted to the height of hope by spanner etc.Figure (b) shows platform track 39 is adjusted to the highest situation.After being adjusted to predetermined height, set bolt 42 is embedded in bolt fastening horizontal adjusting bolt 40 and the screwed hole 44,, thereby makes bolt fastening horizontal adjusting bolt 40 fixing by the fixed horizontal adjusting bolt 40 of set bolt 42 fastening bolts.
Finish the height of platform track 39 thus and regulate operation.
Mechanism is shared in the horizontal adjusting mechanism and the loading of＜platform track 〉
With reference to Figure 43, the above-below direction adjusting mechanism that in Figure 42, illustrates (40,42), also possesses the horizontal adjusting mechanism that to adjust platform track at horizontal (left and right directions among the figure).Laterally adjusting mechanism been has specifically has been installed and used the position qualification bolt 37a of limit screw on guide rail, with position limit bolt 37a pushing guide rail, thereby corrective rail crooked (with reference to Figure 46).
In addition, and not only bear the loading of platform track by bolt fastening horizontal adjusting bolt 40, the horizontal adjusting bolt of using among Figure 22 36 is used for sheet metal processing pallet 35, makes horizontal adjusting bolt 36 also share the loading of platform track (Figure 33,34,43).
Figure 45 can make glacing flatness longitudinally of the present invention be forced to the end view of straight explanation usefulness, the state of platform track 39 bendings (can be schemed a), by bolt fastening horizontal adjusting bolt 40 (40c, 40s), adjust the bolt fastening horizontal adjusting bolt 40c of central authorities in the drawings and platform track 39 is injurious to life, adjust the bolt fastening horizontal adjusting bolt 40s at two ends and platform track 39 is descended, glacing flatness is forced to straight (figure b) the most longitudinally.
In addition, Figure 46 can make horizontal glacing flatness of the present invention be forced to the vertical view of straight explanation usefulness, the state of platform track 39 bendings (can be schemed a), adjust as shown in the figure by position limit bolt 37a and to make platform track 39 displacement, the most horizontal glacing flatness is forced to straight (figure b).

Claims (25)

1. a slip objective table comprises: platform; Be laid on the line motor magnet portion on the above-mentioned platform; 2 guide rails clip above-mentioned line motor magnet portion and are fixed in parallel with each other on the above-mentioned platform; Slider is placed in the top and the space between above-mentioned 2 guide rails of above-mentioned line motor magnet portion, is the U font under the section vertical with direct of travel; With the line motor coil portion, across space and relative configuration of above-mentioned line motor magnet portion, described slip objective table is characterised in that in the opening of the U of above-mentioned slider font,
On the sidewall of the above-mentioned U font that constitutes above-mentioned slider, be provided with from this sidewall and directly spray air and to the air ejection portion of plane of structure ejection air to following above-mentioned platform, by by buoyancy that produces to the air that sprays below from above-mentioned air ejection portion and electromagnetic attraction and the gravity between above-mentioned line motor magnet portion and above-mentioned line motor coil portion, and average out and float, by the drive force between above-mentioned line motor magnet portion and above-mentioned line motor coil portion.
2. slip objective table according to claim 1 is characterized in that,
Comprise: excavate the platform that elongated slot is arranged; Be laid on the line motor magnet portion in the above-mentioned elongated slot; 2 guide rails clip above-mentioned elongated slot and are fixed in parallel with each other on the above-mentioned platform; Slider is placed in the top and the space between above-mentioned 2 guide rails of above-mentioned elongated slot, is the U font under the section vertical with direct of travel; With the line motor coil portion, in the opening of the U of above-mentioned slider font across space and relative configuration of above-mentioned line motor magnet portion,
Wherein, on the sidewall of the above-mentioned U font that constitutes above-mentioned slider, be provided with from this sidewall and directly spray air and to the air ejection portion of plane of structure ejection air to following above-mentioned platform, by by buoyancy that produces to the air that sprays below from above-mentioned air ejection portion and electromagnetic attraction and the gravity between above-mentioned line motor magnet portion and above-mentioned line motor coil portion, and average out and float, by the drive force between above-mentioned line motor magnet portion and above-mentioned line motor coil portion.
3. slip objective table according to claim 1 is characterized in that,
Comprise: excavate the platform that elongated slot is arranged; Be laid on the line motor magnet portion in the above-mentioned elongated slot; 2 guide rails clip above-mentioned elongated slot and are fixed in parallel with each other on the above-mentioned platform; Slider is placed in the top and the space between above-mentioned 2 guide rails of above-mentioned elongated slot, is the U font under the section vertical with direct of travel; With the line motor coil portion, in the opening of the U of above-mentioned slider font across space and relative configuration of above-mentioned line motor magnet portion,
Wherein, on the sidewall of the above-mentioned U font that constitutes above-mentioned slider, be provided with from this sidewall and directly spray air and to the air ejection portion of plane of structure ejection air to following above-mentioned platform, and make and float face with consistent by the drive surface of the drive force between above-mentioned line motor magnet portion and above-mentioned line motor coil portion, float on the face by averaging out described by buoyancy that produces to the air that sprays below from above-mentioned air ejection portion and electromagnetic attraction and the gravity between above-mentioned line motor magnet portion and above-mentioned line motor coil portion.
4. slip objective table according to claim 1 is characterized in that,
Direct of travel front and rear end side at above-mentioned slider have connected between the sidewall that constitutes above-mentioned U font.
5. slip objective table according to claim 1 is characterized in that,
The direct of travel of above-mentioned slider that constitutes the sidewall of above-mentioned U font is provided with many places above-mentioned air ejection portion.
6. slip objective table according to claim 1 is characterized in that,
The outside and inboard in the bight of above-mentioned slider are formed with chamfering.
7. slip objective table according to claim 1 is characterized in that,
Sidewall vertical with direct of travel above-mentioned slider the direction that constitutes above-mentioned U font is provided with many places above-mentioned air ejection portion.
8. slip objective table according to claim 2 is characterized in that,
On above-mentioned platform, excavate the above-mentioned elongated slot of multiple row in parallel with each other, in above-mentioned each elongated slot, lay above-mentioned line motor magnet portion respectively, in the above-mentioned U font opening of slider, keep each line motor coil portion of the relative configuration of devices spaced apart respectively, and between each line motor coil portion of above-mentioned slider, be provided with the air ejection portion below above-mentioned with above-mentioned each line motor magnet portion.
9. slip objective table according to claim 8 is characterized in that,
The multiple row of above-mentioned elongated slot is 2 row or 3 row.
10. slip objective table according to claim 1 is characterized in that,
Replace above-mentioned slider, use the following slider that constitutes by metallic plate: this slider below above-mentioned line motor coil portion is installed and constitutes the side wall portion of the above-mentioned U font of above-mentioned slider.
11. slip objective table according to claim 10 is characterized in that,
Above-mentioned metallic plate is provided with coolant and uses the hole.
The objective table 12. an XY direction is movably slided is characterized in that,
Use described first slip objective table of claim 8 and the described second slip objective table of claim 10, with the slider of above-mentioned first objective table platform as the above-mentioned second slip objective table, and so that the mode of the moving direction quadrature of the slider of the moving direction of the slider of the above-mentioned first slip objective table and the above-mentioned second slip objective table, with the above-mentioned second slip objective table mounting to the above-mentioned first slip objective table.
The objective table 13. XY direction according to claim 12 is movably slided is characterized in that, the above-mentioned second slip objective table is driven for two.
14. slip objective table according to claim 1 is characterized in that,
Be fixed at top base portion on the above-mentioned slider from above-mentioned slider with leaving, the position is provided with the linear staff head in the space between above-mentioned top base portion and above-mentioned slider and directly over the above-mentioned line motor coil portion on the above-mentioned slider, in addition in the space between above-mentioned top base portion and above-mentioned slider, from above-mentioned linear staff head and other parts that move float fixing linear staff scale portion.
15. slip objective table according to claim 14 is characterized in that,
In the space between above-mentioned top base portion and above-mentioned slider limit switch is installed.
16. slip objective table according to claim 14 is characterized in that,
The installation base portion that will be used to install above-mentioned linear staff scale portion forms the U font under the Width section.
The objective table 17. XY direction according to claim 13 is movably slided, it is characterized in that, excavation is to the slotted hole of the moving direction extension of the slider of the above-mentioned second slip objective table on the platform of the above-mentioned second slip objective table, in above-mentioned slotted hole, take in planar linear staff head and the end of above-mentioned planar linear staff head is fixed to above-mentioned slider, on the platform of the above-mentioned first slip objective table, dispose the planar linear staff.
The objective table 18. XY direction according to claim 17 is movably slided, it is characterized in that, above-mentioned planar linear staff header arrangement at 2 foursquare diagonal positions, and is disposed a plurality of above-mentioned planar linear staffs planely on the platform of the above-mentioned first slip objective table.
19. slip objective table according to claim 1 is characterized in that,
Between above-mentioned slider and above-mentioned 2 row guide rails and between above-mentioned slider and the above-mentioned platform, paste the object of low-friction coefficient and firm material respectively in above-mentioned slider side, above-mentioned rail-sides and above-mentioned platform side, can contact between the object of the material of above-mentioned low-friction coefficient.
20. slip objective table according to claim 19 is characterized in that,
The object of the material of above-mentioned low-friction coefficient is any of carbon fiber, pottery, quartz, agate.
21. slip objective table according to claim 1 is characterized in that,
Above-mentioned platform and above-mentioned 2 guide rails are formed, and below above-mentioned platform, dispose horizontal adjusting bolt, dispose the position limit bolt in the side of above-mentioned platform.
22. a slip objective table is characterized in that,
This slip objective table forms platform and 2 guide rails, and below above-mentioned platform, dispose horizontal adjusting bolt, dispose the position limit bolt in the side of above-mentioned platform, on sheet metal processing pallet, be arranged in parallel many above-mentioned slip objective tables, workpiece absorption base portion is set on the top of above-mentioned slip objective table, can carries out horizontal adjusting by above-mentioned horizontal adjusting bolt.
The objective table 23. the XY direction of a door frame type is movably slided is characterized in that,
Two ends on sheet metal processing pallet are arranged parallel to each other the described slip objective table of 2 formula claims 21, and are provided with above-mentioned slip objective table in upper lateral.
24. slip objective table according to claim 1 is characterized in that,
" I " font that above-mentioned guide rail is seen be Roman capitals under the section vertical with direct of travel, has the groove that is used to be provided with above-mentioned line motor magnet portion in the upper central of above-mentioned guide rail, above-mentioned slider below above-mentioned air ejection portion ejection air and by with the balance of the electromagnetic attraction of above-mentioned line motor magnet portion and above-mentioned line motor coil portion, and walking on two of above-mentioned groove, the walking from above-mentioned plane of structure air ejection portion ejection air time the with the above-mentioned slider of mode that surrounds above-mentioned guide rail upside two sides.
25. slip objective table according to claim 24 is characterized in that,
At the fixing negative thread lining of the flange part of the lower end, end of above-mentioned guide rail,
Above-mentioned horizontal adjusting bolt is made of the bolt fastening horizontal adjusting bolt and the set bolt that screw togather with above-mentioned negative thread lining, this set bolt break-through by the central shaft that forms on this bolt fastening horizontal adjusting bolt and the through hole of perforation.
CN200880117814.6A 2007-11-30 2008-10-29 Slide stage, and slide stage movable in x- and y-directions Expired - Fee Related CN101874339B (en)

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JP2007311073 2007-11-30
PCT/JP2008/069698 WO2009069423A1 (en) 2007-11-30 2008-10-29 Slide stage, and slide stage movable in x- and y-directions

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CN105945322B (en) * 2016-06-15 2018-06-05 江苏新光华机械有限公司 For boring the lathe of stepped hole
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JP5353710B2 (en) 2013-11-27
KR101478393B1 (en) 2014-12-31
TW200936294A (en) 2009-09-01
JPWO2009069423A1 (en) 2011-04-07
KR20100101603A (en) 2010-09-17
WO2009069423A1 (en) 2009-06-04
CN101874339B (en) 2013-03-06
TWI460047B (en) 2014-11-11

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