CN217462894U - Guide rail supporting structure and sliding module - Google Patents

Abstract

The application relates to a guide rail bearing structure and slip module, guide rail bearing structure is used for supporting the guide rail, includes: the supporting platform is provided with a side supporting structure arranged along a first direction, the length direction of the guide rail is arranged along the first direction and is arranged on the supporting platform, and the side surface of the guide rail is in contact with the side supporting structure. This application is through setting up the side brace structure on a supporting bench, and during the guide rail installation, paste the side brace structure with the side of guide rail to fix a position the installation to the guide rail, improve the installation effectiveness of guide rail, in the guide rail use, because the side brace structure is to the support of guide rail side, guide rail non-deformable.

Description

Guide rail supporting structure and sliding module

Technical Field

The application relates to the technical field of guide rails, in particular to a guide rail supporting structure and a sliding module.

Background

At present, a guide rail mechanism is used in various linear motion mechanisms to improve the stability in a linear sliding process, and particularly in precision equipment, such as laser marking equipment, exposure equipment, semiconductor processing equipment and the like, the requirement on the movement precision is high, so that the requirement on the guide rail is high.

In the related art, in order to improve the accuracy of the linear motion and ensure that the sliding member moves in a certain direction, when the guide rail is installed, a micrometer is used to adjust the linearity of the guide rail so as to avoid the sliding member from shifting when sliding along the guide rail.

However, in the process of mounting the guide rail, it is necessary to control the straightness of the guide rail by measuring different positions of the guide rail using a micrometer many times, so that the mounting efficiency of the guide rail is slow, and when the slider slides on the guide rail, particularly when another guide rail mechanism is loaded on the slider, the guide rail is deformed by an external force in the width direction thereof, which affects the accuracy of the guide rail and the movement accuracy of the slider.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a guide rail supporting structure and a sliding module to solve the technical problems that in the related art, the installation efficiency of a guide rail is low and the guide rail is easy to deform.

In a first aspect, there is provided a rail support structure for supporting a rail, comprising: the supporting platform is provided with a side supporting structure arranged along a first direction, the length direction of the guide rail is arranged along the first direction and is arranged on the supporting platform, and the side surface of the guide rail is in contact with the side supporting structure.

In some embodiments, the side brace structure comprises side braces connected to the top surface of the support table, the side surfaces of the side braces contacting the side surfaces of the guide rail.

In some embodiments, the height of the side stays is less than the height of the rails.

In some embodiments, a plurality of first notches are formed at intervals along the first direction on a side surface of the side stay, which is in contact with the guide rail.

In some embodiments, the side supporting structure includes a side supporting groove, the side supporting groove is opened on the top surface of the supporting table, the guide rail is connected with the bottom of the side supporting groove, and the wall of the side supporting groove is in contact with the side surface of the guide rail.

In some embodiments, the depth of the side brace groove is less than the height of the rail.

In some embodiments, the groove wall of the side supporting groove is provided with a plurality of second notches at intervals along the first direction.

In some embodiments, the guide rail has a plurality of mounting holes spaced along the first direction, the support platform has a plurality of threaded holes spaced along the first direction, and the diameter of the threaded holes is smaller than that of the mounting holes.

In some embodiments, the support platform and the side brace are both made of marble.

The beneficial effect that technical scheme that this application provided brought includes:

the embodiment of the application provides a guide rail supporting structure, and when the guide rail was installed on a supporting bench, because the existence of the side brace structure on the supporting bench, paste the side of guide rail on the side brace structure to the guide rail location, can make the length direction of guide rail set up along the first direction, need not to utilize the straightness accuracy of micrometer calibration guide rail, improved the installation effectiveness of guide rail. In the use process of the guide rail, under the supporting action of the side supporting structure on the side surface of the guide rail, the guide rail is not easy to deform under the action of external force so as to maintain the precision of the guide rail.

In a second aspect, a sliding module is provided, comprising a guide rail support structure as described above.

In another embodiment of the present application, since the sliding module includes the above-mentioned rail supporting structure, the beneficial effects thereof are consistent with those of the above-mentioned rail supporting structure, and are not repeated herein.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

Fig. 1 is a schematic view of a guide rail support structure provided in an embodiment of the present application;

FIG. 2 is an enlarged view taken at A in FIG. 1;

FIG. 3 is a side view of a portion of a rail support structure provided by an embodiment of the present application;

FIG. 4 is a partial schematic view of a rail support structure with a first notch according to an embodiment of the present disclosure;

FIG. 5 is a schematic view of a rail support structure provided in accordance with another embodiment of the present application;

FIG. 6 is an enlarged view at B in FIG. 5;

FIG. 7 is a side view of a portion of a rail support structure provided in accordance with another embodiment of the present application;

fig. 8 is a partial schematic view of a rail support structure with a second notch according to another embodiment of the present application.

In the figure: 1. a support table; 101. a side stay; 1011. a first notch; 102. a side supporting groove; 1021. a second notch; 103. a threaded hole; 2. a guide rail; 201. and (7) installing holes.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The embodiment of the application provides a guide rail bearing structure and sliding module, it is through setting up the side brace structure on a supporting bench, during the guide rail installation, pastes the side brace structure with the side of guide rail to fix a position the installation to the guide rail, improve the installation effectiveness of guide rail, in the guide rail use, because the side brace structure is to the support of guide rail side, guide rail non-deformable. The technical problems that in the related art, the installation efficiency of the guide rail is low and the guide rail is easy to deform are solved.

Referring to fig. 1 and 2, a guide rail supporting structure for supporting a guide rail 2 includes a supporting table 1 and a side supporting structure disposed on a top surface of the supporting table 1.

Referring to fig. 1 and 2, the length direction of the side brace structure is arranged along a first direction, which is the Y-axis direction in the figure. The guide rail 2 mounted on the support table 1 is also arranged in the first direction in the longitudinal direction, and the side surface of the guide rail 2 is in contact with a side support structure that supports the side surface of the guide rail 2. When 2 installations of guide rail, paste the side brace structure with 2's sides of guide rail to fix a position the installation to guide rail 2, improve 2's installation effectiveness, in 2 use of guide rail, because the side brace structure is to the support of 2 sides of guide rail, 2 non-deformable of guide rail.

Referring to fig. 1 and 2, wherein the side supporting structure includes a side supporting bar 101, the side supporting bar 101 is connected to the supporting table 1, in this embodiment, the side supporting bar 101 is integrally formed on the top surface of the supporting table 1, and the side supporting bar 101 can be formed by machining the supporting table 1. In other embodiments, the side stay 101 and the supporting platform 1 may be bolted, inserted, or bonded. The guide rail 2 and the side stay 101 are sequentially arranged in a second direction, which is an X-axis direction in the figure, and a side surface of the guide rail 2 contacts with a side surface of the side stay 101. When the guide rail 2 is attached, the side surface of the guide rail 2 is brought into contact with the side surface of the side stay 101 to position the guide rail 2 so that the longitudinal direction of the guide rail 2 is set in the first direction, thereby improving the accuracy and efficiency of attaching the guide rail 2. In addition, even if an external force is applied to the guide rail 2 by the slider on the guide rail 2 during use of the guide rail 2, the guide rail 2 is not easily deformed by the supporting action of the side stay 101 on the side surface of the guide rail 2, so that the accuracy of the guide rail 2 is maintained, and the guide rail 2 does not need to be calibrated frequently.

Referring to fig. 3, further, the height of the side stay 101 is smaller than the height of the guide rail 2, i.e. the length in the third direction, which is the Z-axis direction in the figure. Because the height of the side stay 101 is less than that of the guide rail 2, the side stay 101 is prevented from interfering with the sliding part on the guide rail 2, and the installation and sliding of the sliding part on the guide rail 2 are not affected. Preferably, the height of the side stay 101 is 3 mm.

Wherein, brace table 1 and side brace 101 are the marble material, and the plane degree of marble material is high, can reach 0.003 mm's plane degree. Thus, when the rail 2 is mounted, the rail 2 is positioned by abutting the side stay 101, and the mounting accuracy of the rail 2 is higher. In other embodiments, the support base 1 and the side stay 101 may be made of a material that is not easily deformed, such as cast iron.

Referring to fig. 4, preferably, in some embodiments, a plurality of first notches 1011 are formed in a side surface of the side brace 101, which is in contact with the guide rail 2, and the plurality of first notches 1011 are uniformly spaced along the first direction. The first notch 1011 is arranged to support the side stay 101 on the guide rail 2 in a multi-point supporting manner, so that the supporting strength of the side stay 101 on the guide rail 2 is maintained. The contact area between the side stay bar 101 and the guide rail 2 is reduced by the plurality of first notches 1011, and when the guide rail 2 is positioned and installed, the installation accuracy of the guide rail 2 is not easily affected by the unevenness of the side surface of the guide rail 2.

Referring to fig. 5 and 6, in other embodiments, the side brace structure includes a side brace groove 102, the side brace groove 102 is opened on the top surface of the support table 1, the length direction of the side brace groove 102 is arranged along the first direction, and the width of the side brace groove 102 is greater than the width of the guide rail 2. The guide rail 2 is installed at the bottom of the side brace groove 102, and one side of the guide rail 2 is in contact with one groove wall of the side brace groove 102. When the guide rail 2 is installed, one side surface of the guide rail 2 is attached to the groove wall of the side supporting groove 102 to position the guide rail 2, so that the length direction of the guide rail 2 is arranged along the first direction, and the installation accuracy and efficiency of the guide rail 2 are improved. In addition, when the guide rail 2 is used, the sliding part on the guide rail 2 applies external force to the guide rail 2, and the guide rail 2 is not easy to deform under the supporting action of the groove wall of the side supporting groove 102 to the side surface of the guide rail 2, so that the precision of the guide rail 2 is maintained, and the guide rail 2 does not need to be calibrated frequently. Since the support base 1 is made of marble, the flatness of the groove bottom and the groove wall of the side brace groove 102 is good, and the mounting accuracy of the guide rail 2 is high when the guide rail 2 is positioned and mounted.

Referring to fig. 7, further, the depth of the side brace groove 102 is smaller than the height of the guide rail 2. Because the depth of the side supporting groove 102 is less than the height of the guide rail 2, the interference of the side supporting groove 102 on the sliding part on the guide rail 2 is avoided, and the installation and the sliding of the sliding part on the guide rail 2 are not influenced. Preferably, the depth of the side brace groove 102 is 3 mm.

Referring to fig. 8, preferably, in some embodiments, a plurality of second gaps 1021 are formed on a groove wall of the side supporting groove 102 contacting the guide rail 2, and the plurality of second gaps 1021 are uniformly arranged at intervals along the first direction. The second notch 1021 is arranged to laterally brace the guide rail 2 in a multi-point bracing manner by the groove wall of the lateral bracing groove 102, so that the bracing strength of the groove wall of the lateral bracing groove 102 to the guide rail 2 is maintained. The contact area between the groove wall of the side supporting groove 102 and the guide rail 2 is reduced by the plurality of second notches 1021, and when the guide rail 2 is positioned and installed, the installation accuracy of the guide rail 2 is not easily affected by the unevenness of the side surface of the guide rail 2.

Referring to fig. 2 and 6, alternatively, the guide rail 2 is generally connected to the support table 1 by bolts, a plurality of mounting holes 201 are formed through the guide rail 2, and the plurality of mounting holes 201 are spaced along the first direction. Bolts are passed through the guide rail 2 through the mounting holes 201 and screwed with the support table 1. A plurality of threaded holes 103 are formed in the support table 1, and the plurality of threaded holes 103 are arranged at intervals in the first direction. The aperture of the threaded hole 103 is smaller than that of the mounting hole 201, when the guide rail 2 is mounted, a bolt penetrates through the mounting hole 201 of the guide rail 2 and is threaded into the threaded hole 103, at the moment, the position of the guide rail 2 can be adjusted because the aperture of the mounting hole 201 is larger than that of the threaded hole 103, so that the guide rail 2 is attached to the side support structure, and finally, the bolt is screwed to enable the head of the bolt to be abutted to the guide rail 2, and the guide rail 2 is fixed.

Referring to fig. 2 and 6, in order to adapt to the installation of the guide rails 2 with different widths, a plurality of rows of threaded holes 103 may be formed in the support table 1, and the plurality of rows of threaded holes 103 are spaced in the second direction to adapt to the installation of the guide rails 2 with different width specifications.

Referring to fig. 2 and 6, when the side brace structure is the side brace 101, the threaded hole 103 is opened at the top surface of the support table 1, and when the side brace structure is the side brace groove 102, the threaded hole 103 is opened at the bottom of the side brace groove 102.

The embodiment of the application provides a guide rail supporting structure, when guide rail 2 installs on a supporting bench 1, because the existence of the side stay structure on a supporting bench 1, paste the side of guide rail 2 on the side stay structure to guide rail 2 location, can be so that guide rail 2's length direction sets up along first direction, need not to utilize micrometer calibration guide rail 2's straightness accuracy, improved guide rail 2's installation effectiveness. When the guide rail 2 is used, under the supporting action of the side supporting structure on the side surface of the guide rail 2, the guide rail 2 is not easy to deform under the action of external force, so that the precision of the guide rail 2 is maintained.

Another embodiment of the present application provides a sliding module, which includes the above-mentioned rail support structure.

Another embodiment of the present application provides an exposure machine, which includes the above-mentioned rail support structure, and/or the above-mentioned sliding module.

In the description of the present application, it is to be understood that the forward direction of "X" in the drawings represents the right direction, and correspondingly, the reverse direction of "X" represents the left direction; the forward direction of "Y" represents forward, and correspondingly, the reverse direction of "Y" represents rearward; the forward direction of "Z" represents the upward direction, and correspondingly, the reverse direction of "Z" represents the downward direction, and the directions or positional relationships indicated by the terms "X", "Y", "Z", etc. are based on the directions or positional relationships shown in the drawings of the specification, and are only for convenience of describing and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular direction, be constructed and operated in a particular direction, and thus should not be construed as limiting the present application. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A guide rail support structure for supporting a guide rail, comprising: the supporting platform is provided with a side supporting structure arranged along a first direction, the length direction of the guide rail is arranged along the first direction and is arranged on the supporting platform, and the side surface of the guide rail is in contact with the side supporting structure.

2. The rail support structure of claim 1, wherein the side brace structure comprises side braces connected to a top surface of the support table, side surfaces of the side braces contacting side surfaces of the rail.

3. The rail support structure of claim 2, wherein the height of the side stays is less than the height of the rails.

4. The rail support structure of claim 2, wherein the side of the side stay in contact with the rail has a plurality of first notches spaced apart along the first direction.

5. The rail support structure of claim 1, wherein the side brace structure comprises a side brace groove that opens at a top surface of the support table, the rail is connected to a groove bottom of the side brace groove, and a groove wall of the side brace groove is in contact with a side surface of the rail.

6. The guide rail support structure of claim 5, wherein the depth of the side brace groove is less than the height of the guide rail.

7. The rail support structure of claim 5, wherein the wall of the side brace slot has a plurality of second notches spaced along the first direction.

8. The guide rail support structure according to claim 1, wherein the guide rail has a plurality of mounting holes spaced apart along the first direction, the support platform has a plurality of threaded holes spaced apart along the first direction, and an aperture of each threaded hole is smaller than an aperture of each mounting hole.

9. The track support structure of claim 2 wherein the support platform and the side stays are marble.

10. A sliding module comprising a guide rail support structure according to any one of claims 1 to 9.

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