CN116633191A - Walking type piezoelectric actuation displacement device and assembly method - Google Patents

Abstract

The invention discloses a walking type piezoelectric actuation displacement device and an assembly method, wherein a guide rail is detachably arranged between a second platform and a first platform, extends along a first direction and is provided with at least two guide rails at intervals along a second direction perpendicular to the first direction; the driving assembly is positioned between the two guide rails and comprises a rotor and a walking type piezoelectric motor capable of driving the rotor to move along a first direction, the walking type piezoelectric motor is connected with the first platform, the rotor extends along the first direction and is detachably arranged on the second platform, a centering block is arranged between each guide rail and the rotor, and the two opposite side surfaces of the centering block are perpendicular to a second direction; the lateral compression assemblies are at least two at intervals along the second direction, and each lateral compression assembly is movably connected with the first platform and is abutted to the guide rail so that the two opposite side surfaces of the centering block are respectively attached to the guide rail and the rotor. The invention can ensure that the output direction of the walking piezoelectric motor, the moving direction of the mover and the guide rail are consistent, and avoid the problem of movement displacement deviation.

Description

Walking type piezoelectric actuation displacement device and assembly method

Technical Field

The invention belongs to the technical field of precision driving equipment, and particularly relates to a walking type piezoelectric actuation displacement device and an assembly method.

Background

Along with the increasing requirements of various instruments and equipment on large-stroke and high-precision displacement control, the requirements of piezoelectric motor driven and micro-nano high-precision motion platforms are increased. The driving device directly determines the size, the speed and the precision of the motion platform, the structural design directly determines the stroke and the system efficiency of the motion platform, especially optical detection equipment, an electron microscope, piezoelectric dispensing equipment and the like, and the motion platform needs to work in vacuum, non-magnetic and low-heat-consumption environments, so that higher requirements are provided for the motion stroke and the motion precision of the motion platform.

In the prior art, a motion platform based on piezoelectric driving only reaches hundreds to thousands of micrometers of strokes by using a flexible mechanism, and is insufficient to meet the actual requirements of large-stroke, high-precision and high-resolution motion. For example, the patent application document with publication number of CN113285629A discloses a large-stroke piezoelectric precision displacement platform and a driving method, which are designed based on the stick-slip principle and the piezoelectric driving technology, and adopt a structure of integrally combining a rotor and a driving mechanism, so that the problem of limited stroke of the conventional piezoelectric driver is solved, and the piezoelectric driver has stable driving capability in a larger stroke range. Although the stroke of the displacement platform is increased by a flexible hinge mechanism, the stroke of the displacement platform driven by piezoelectricity is not yet increased in a breakthrough manner.

The walking piezoelectric driver converts electric energy into mechanical energy by utilizing the inverse piezoelectric effect, realizes high-precision motion based on the inchworm walking principle in bionics, has the characteristics of small volume, large output force and strong anti-interference capability, and is particularly suitable for realizing large-stroke displacement and nano-scale displacement fine adjustment under the conditions of vacuum, no magnetism and low heat consumption. For example, the piezoelectric displacement device disclosed in the publication CN114598180a and the piezoelectric actuator disclosed in the publication CN114629374a can realize a large stroke actuation without depending on the structure such as a guide rail and a flexible mechanism.

However, in the related art, the long-stroke displacement platform driven by the traveling piezoelectric motor comprises a guide rail and a mover, and in the assembly work, the installation position and the movement direction of the mover deflect relative to the guide rail due to the deviation of the pretightening force, so that the output direction of the traveling piezoelectric motor, the movement direction of the mover and the movement direction of the guide rail are inconsistent, and therefore, the output and the displacement of the long-stroke displacement platform deviate, and the movement precision of the long-stroke displacement platform is reduced.

Disclosure of Invention

The invention aims to provide a walking type piezoelectric actuation displacement device and an assembly method, which not only have the advantages of large movement stroke, high resolution, high positioning accuracy, high response speed and strong robustness, but also can ensure that the output direction of a walking type piezoelectric motor, the movement direction of a rotor and the movement direction of a guide rail are consistent, thereby effectively improving the movement accuracy and the movement stability of the walking type piezoelectric actuation displacement device after assembly and avoiding the problem of movement displacement deviation.

The technical scheme adopted for solving the technical problems is as follows:

in a first aspect, the present invention provides a walk behind piezoelectric actuation displacement device comprising:

a first platform;

the second platform is positioned above the first platform, guide rails extending along a first direction are detachably connected between the second platform and the first platform, at least two guide rails are arranged at intervals along a second direction, and the second direction is perpendicular to the first direction;

the driving assembly is positioned between the two guide rails and comprises a rotor and a walking piezoelectric motor for driving the rotor to move along a first direction, the walking piezoelectric motor is connected with the first platform, the rotor extends along the first direction and is detachably connected with the second platform, a centering block is arranged between each guide rail and the rotor, and the opposite two side surfaces of the centering block are perpendicular to the second direction;

the lateral compression assemblies are arranged at intervals along the second direction, each lateral compression assembly is movably connected with the first platform and is abutted to the guide rail, so that the opposite two side surfaces of the centering block are respectively attached to the guide rail and the rotor.

The walking type piezoelectric actuation displacement device provided by the invention has at least the following beneficial effects: a driving assembly, a centering block and a guide rail are arranged between the first platform and the second platform, the driving assembly is used for driving the second platform to move along a first direction relative to the first platform, and the guide rail is used for stably guiding and supporting the linear motion of the second platform; in the assembly work of the walking type piezoelectric actuation displacement device, after the walking type piezoelectric motor is fixedly connected to the first platform, the mover can move along the first direction under the driving action of the walking type piezoelectric motor and can be used for driving the second platform to carry out large-stroke displacement.

At this time, the mover is used as the motion base surface, set up centering piece between the mover and the guide rail, when utilizing side direction to compress tightly the subassembly and exerting equal and stable pressure to the guide rail, and make the mover and the guide rail paste with the opposite both sides face of centering piece respectively, because the opposite both sides face of centering piece is perpendicular to the second direction, consequently, can realize that the direction of motion of guide rail is consistent with the direction of motion of mover, simultaneously, under the effect of side direction compressing tightly the subassembly, guide rail and mover reach the force balanced state in the second direction, and be difficult for taking place displacement in the second direction, consequently, when guide rail and mover carry out fixed connection with the second platform respectively, can overcome the mover and guide rail and take place certain deflection in the second direction and then cause the problem that the motion precision descends because of the connecting effort that receives, thereby can reduce walking type piezoelectric actuation displacement device's assembly degree of difficulty and processing degree of difficulty, ensure that walking type piezoelectric actuation displacement device has very high motion precision and motion stability after accomplishing the assembly, prevent to take place the deviation in the motion process, can satisfy the displacement control requirement of big stroke high precision.

As a further improvement of the technical scheme, the first platform is provided with the protruding blocks extending along the first direction, the protruding blocks are at least two along the second direction at intervals, each protruding block is provided with a plurality of screw holes distributed along the first direction, the lateral compression assembly comprises a plurality of jacking screws, and each jacking screw is in threaded connection with the screw hole and is in butt joint with the guide rail.

Guide rail, active cell and centering piece are located between two lugs on the first platform, screw the screw on the lug with the tight screw that pushes up, let tight screw and guide rail butt to apply certain effort to the guide rail, make guide rail, active cell and centering piece contact laminating each other, and a plurality of screw on the lug are arranged along first direction, consequently, can increase the area of contact of side direction hold-down subassembly and guide rail, realize applying even pressure effect to the guide rail in first direction through a plurality of tight screws that pushes up.

As a further improvement of the technical scheme, the walking type piezoelectric motor is detachably connected to the first platform, the first platform is provided with a first mounting surface and a first positioning block, the first mounting surface is perpendicular to the upper and lower directions, the first positioning block is provided with a first positioning surface perpendicular to the first direction, the bottom surface of the walking type piezoelectric motor is attached to the first mounting surface, and the side surface of the walking type piezoelectric motor is attached to the first positioning surface.

When the walking type piezoelectric motor is installed on the first platform, the side face of the walking type piezoelectric motor is enabled to be in fit contact with the first positioning face, the walking type piezoelectric motor is enabled to be parallel to the first direction, the bottom face of the walking type piezoelectric motor is enabled to be in fit contact with the first installation face, the mover loaded on the walking type piezoelectric motor can be enabled to be in fit contact with the bottom face of the second platform, and finally accurate installation and positioning work of the walking type piezoelectric motor on the first platform is completed.

As a further improvement of the technical scheme, the walking piezoelectric motor comprises a shell and a combined stack, wherein the shell is provided with a groove with an upward opening, notches communicated with the groove are formed in two opposite side surfaces of the shell in the first direction, two groups of combined stacks are arranged at intervals along the second direction and in the groove, each group of combined stacks comprises at least two piezoelectric stacks which are arranged at intervals along the first direction, and the mover penetrates through the notches and is positioned between the two groups of combined stacks.

The mover is arranged between the two groups of combined stacks in the shell, so that the mover can be stressed and balanced when the walking piezoelectric motor works, and meanwhile, clamping acting force can be applied to the mover by utilizing the two groups of combined stacks, so that the mover is connected with the walking piezoelectric motor through pretightening force, the output force direction of the walking piezoelectric motor is ensured to be consistent with the movement direction of the mover, and the walking piezoelectric actuation displacement device is ensured to have high movement precision. Moreover, each group of combined stacks comprises at least two piezoelectric stacks, and the high-precision motion of the mover can be realized according to the inchworm walking principle.

As a further improvement of the above technical solution, the mover is connected with the second platform by bolts, and the guide rail includes a fixed rail and a sliding rail; the fixed rail is connected with the first platform through bolts, and the sliding rail is connected with the second platform through bolts.

So set up for the easy dismouting of active cell and guide rail, and the connected effect that receives after the installation is strong, avoids appearing active cell and guide rail and takes place the position offset relative first platform and second platform easily, and then leads to active cell and guide rail inconsistent and cause the problem that the motion precision receives the influence in the direction of motion.

As a further improvement of the above technical solution, the centering block is connected to the second platform by a bolt. So set up, make centering piece can follow second platform, active cell and guide rail and move together, make active cell and guide rail in the motion in-process laminate with the relative both sides face of centering piece respectively, remain the state of contact throughout, at this moment, the centering piece plays fine motion guiding action to the active cell, lets the active cell can follow first direction steady movement, avoids appearing the active cell and takes place the position offset in the second direction, leads to active cell and guide rail inconsistent in the direction of motion, and then causes the problem that the motion precision of second platform descends.

As a further improvement of the above technical solution, a linear grating ruler for measuring the displacement of the second platform relative to the first platform is provided between the first platform and the second platform. And the displacement generation amount of the second platform relative to the first platform is accurately measured by using the linear grating ruler, so that the movement position of the second platform relative to the first platform can be controlled with high precision.

As a further improvement of the above technical solution, the guide rail is a cross roller guide rail. The crossed roller guide rail is adopted, so that rolling friction force is small, loads in all directions can be borne, and high-precision, high-rigidity and stable linear motion are realized.

In a second aspect, the present invention provides a method of assembling a walk behind piezoelectric actuated displacement device, comprising the steps of:

mounting a walking piezoelectric motor on a first platform, and loading a mover on the walking piezoelectric motor so as to enable the mover to move along a first direction;

the two opposite sides of the mover along the second direction are sequentially provided with a centering block and a guide rail, and the upper surfaces of the centering block, the mover and the guide rail are flush, wherein the second direction is perpendicular to the first direction;

the guide rail is pre-fixed on the first platform, and the second platform is fixedly connected with the rotor;

Driving each guide rail to move towards a direction close to the mover by utilizing a lateral compression assembly, and enabling opposite side surfaces of the centering block to be respectively attached to the guide rails and the mover, wherein the opposite side surfaces of the centering block are perpendicular to a second direction;

and fixedly connecting the first platform and the second platform with the guide rail respectively.

The assembly method of the walking type piezoelectric actuation displacement device provided by the invention has at least the following beneficial effects: after the walking type piezoelectric motor and the mover are arranged on the first platform, centering blocks and guide rails are arranged on two opposite sides of the mover, so that the mover, the centering blocks and the guide rails are sequentially arranged along a second direction, and the upper surfaces of the centering blocks and the guide rails are level with each other, so that the upper surfaces of the centering blocks and the guide rails can be in contact with the lower surface of the second platform; then, the mover is fixedly connected with the second platform, the mover is used as the positioning precision, the guide rail is pre-fixed on the first platform, when the lateral compression assembly is utilized to apply pressure to the guide rail, the guide rail can move towards the direction close to the mover, the guide rail and the mover clamp the centering block and are in contact with the opposite side surfaces of the centering block, so that the movement direction of the guide rail is adjusted, the movement direction of the guide rail is consistent with the movement direction of the mover after assembly, and the high-precision movement of the walking piezoelectric actuation displacement device is improved.

As a further improvement of the above technical solution, after fixedly connecting the second platform with the guide rail, the method further includes the following steps: and fixedly connecting the second platform with the centering block.

The centering block is fixedly connected with the second platform, so that the centering block can move along with the second platform, and in the moving process, the guide rail and the mover are always kept in contact with the centering block, so that the mover can be prevented from being shifted in the second direction, and the second platform is ensured to have high moving precision.

Drawings

The invention is further described below with reference to the drawings and examples;

FIG. 1 is an exploded view of a walking piezoelectric actuation displacement device according to an embodiment of the present invention;

FIG. 2 is a front view of a walk behind piezoelectric actuation displacement device in a first state provided by an embodiment of the present invention;

FIG. 3 is a schematic diagram of a walking piezoelectric actuation displacement device in a second state according to an embodiment of the present invention;

FIG. 4 is a schematic structural view of a connection between a linear grating ruler and a centering block of the walking piezoelectric actuation displacement device according to the embodiment of the present invention;

FIG. 5 is an exploded view of a mover in the walking-type piezoelectric-actuated displacement device according to the embodiment of the present invention;

Fig. 6 is a schematic structural diagram of a walking piezoelectric motor in the walking piezoelectric actuation displacement device according to the embodiment of the present invention;

fig. 7 is a schematic structural diagram of a second platform in the walking piezoelectric actuation displacement device according to the embodiment of the present invention;

fig. 8 is a schematic diagram of the working principle of a walking piezoelectric motor in the walking piezoelectric actuation displacement device provided by the embodiment of the invention; the working schematic diagram of clamping the mover together by the first piezoelectric stack and the second piezoelectric stack, (b) the working schematic diagram of clamping the mover independently by the first piezoelectric stack, and (c) the working schematic diagram of driving the mover to move by the first piezoelectric stack;

fig. 9 is a schematic diagram of a working principle of a walking piezoelectric motor in the walking piezoelectric actuation displacement device provided by the embodiment of the invention; wherein, (d) is a working schematic diagram of the first piezoelectric stack and the second piezoelectric stack clamping the mover together after moving; (e) A working schematic diagram for singly clamping the mover for the second piezoelectric stack; (f) A working schematic diagram for driving the mover to move by the second piezoelectric stack;

fig. 10 is a flow chart of an assembling method according to an embodiment of the invention.

The figures are marked as follows: 100. a second platform; 110. a second step surface; 200. centering blocks; 300. a mover; 310. a board core; 311. a mounting groove; 320. wear-resistant plate blocks; 400. a guide rail; 500. a walking piezoelectric motor; 510. a housing; 511. a groove; 512. a notch; 520. a combined stack; 521. a first piezoelectric stack; 522. a second piezoelectric stack; 600. a first platform; 610. a screw hole; 620. a first step surface; 630. a receiving groove; 640. a bump; 650. a first positioning block; 660. a first mounting surface; 670. a second mounting surface; 710. a scale grating; 720. a grating reading head.

Detailed Description

Reference will now be made in detail to the present embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present invention, but not to limit the scope of the present invention.

In the description of the present invention, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present invention and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.

In the description of the present invention, if there is a word description such as "a plurality" or the like, the meaning of the plurality is one or more, the meaning of the plurality is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and above, below, within, etc. are understood to include the present number. The description of first, second, and third is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of technical features indicated.

It should be noted that, in the drawing, the X direction is from the rear side to the front side of the walking piezoelectric actuation displacement device; the Y direction is from the left side to the right side of the walking piezoelectric actuation displacement device; the Z direction is directed from the underside of the walk-behind piezoelectric actuated displacement device to the upper side.

In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present invention can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.

Referring to fig. 1 to 10, the following description exemplifies several embodiments of the walking type piezoelectric actuation displacement device and the assembly method of the present invention.

As shown in fig. 1 to 9, the first embodiment of the invention provides a walking piezoelectric actuation displacement device, which has the advantages of large motion stroke, high resolution, high positioning precision, high response speed and strong robustness, can be used as a micro-nano-level high-precision motion platform, can realize large-stroke displacement and nano-level displacement fine adjustment under the conditions of vacuum, no magnetism and low heat consumption, is very suitable for being applied to various instruments and equipment, and simultaneously meets the requirements of various instruments and equipment on high-precision displacement control.

The structure of the walking type piezoelectric actuation displacement device comprises a first platform 600, a second platform 100, a guide rail 400, a centering block 200, a driving component and a lateral compression component, and can ensure that the driving direction of the driving component is consistent with the movement direction of the guide rail 400, thereby effectively improving the movement precision and the movement stability of the walking type piezoelectric actuation displacement device and avoiding the problem of movement displacement deviation.

The first platform 600 may be used as a fixing platform, and may be mounted on a connection surface of a fixing member such as a workbench. The second platform 100 is disposed above the first platform 600, and then the second platform 100 may be used as a moving platform and installed on a connection surface of a moving part, such as an instrument device, so as to enable the moving part to move together with the second platform 100, and enable the moving part to perform large-stroke displacement and nano-scale displacement fine adjustment. It is understood that the shape and size of the first and second stages 600 and 100 are not limited, and are not particularly limited herein. Of course, the use of the second platform 100 as a fixed platform and the use of the first platform 600 as a moving platform is not precluded.

A guide rail 400 is disposed between the second platform 100 and the first platform 600, opposite ends of the guide rail 400 extend along the first direction, and the second platform 100 can move back and forth stably along the first direction relative to the first platform 600 under the guiding action of the guide rail 400. The guide rail 400 is detachably connected to the first and second stages 600 and 100, respectively. The number of the guide rails 400 is two, and the two guide rails 400 are arranged at certain intervals along a second direction, wherein the second direction is perpendicular to the first direction. In this way, the second stage 100 can be supported sufficiently, and the second stage 100 is less likely to be displaced in the up-down direction.

In the present embodiment, the first direction is assumed to be the front-rear direction, and the second direction is assumed to be the left-right direction. The two guide rails 400 are disposed in bilateral symmetry with respect to the second stage 100 and the first stage 600.

It is understood that the structure of the guide rail 400 includes a sliding rail and a fixed rail. Wherein, can take place relative slip between slip rail and the fixed rail. In this embodiment, the sliding rail is movable in a first direction relative to the fixed rail. The fixed rail is fixedly connected with the first platform 600 through bolts, and the sliding rail is fixedly connected with the second platform 100 through bolts.

Specifically, as shown in fig. 2 and 7, the first platform 600 is provided with a second mounting surface 670 corresponding to the fixing rail, the second mounting surface 670 is perpendicular to the up-down direction, the lower surface of the fixing rail is attached to the second mounting surface 670, and bolts are utilized to sequentially pass through the connection holes of the first platform 600 and the connection holes of the fixing rail from bottom to top, so as to promote the fixing rail to be fixed on the first platform 600. Similarly, the upper surface of the sliding rail is attached to the mounting surface of the second platform 100, and bolts are used to pass through the corresponding connecting holes of the sliding rail and the second platform 100 from top to bottom, so that the sliding rail is fixedly connected with the second platform 100.

In order to reduce the friction action of the guide rail 400 during the movement, as shown in fig. 2 and 7, the first platform 600 is provided with a first step surface 620 for avoiding the sliding rail on the second platform 100, so as to avoid sliding friction between the first platform 600 and the sliding rail; the second platform 100 is provided with a second step surface 110 for avoiding the fixed rail on the first platform 600, and preventing sliding friction between the second platform 100 and the fixed rail.

In this embodiment, the guide rail 400 is a cross roller guide rail, so that the guide rail 400 has the advantages of small rolling friction force, good stability and the like, can well bear loads in all directions, and can realize high-precision, high-rigidity and stable linear motion. Since the cross roller guide rail has high rigidity, the cross roller guide rail is less likely to be displaced in the second direction and the up-down direction when the cross roller guide rail moves. Of course, it is not precluded that rail 400 employs other types of rail products.

The drive assembly is arranged between the two guide rails 400, which in this embodiment may be located in an intermediate position of the second platform 100 in the second direction. The first platform 600 is provided with an upwardly open receiving groove 630, the receiving groove 630 penetrating opposite sides of the first platform 600 in the first direction, and the driving assembly is mounted in the receiving groove 630.

The driving assembly includes a mover 300 and a traveling piezoelectric motor 500. The opposite ends of the mover 300 extend along the first direction, and the mover 300 and the second platform 100 are detachably connected. In the present embodiment, mover 300 is a rectangular block. Opposite sides of the mover 300 in the second direction are planar. The mover 300 and the second stage 100 are fixedly coupled to each other by bolts. The traveling piezoelectric motor 500 can drive the mover 300 to move along the first direction, and the traveling piezoelectric motor 500 is fixedly connected with the first platform 600. When the walking piezoelectric motor 500 works, the mover 300 drives the second platform 100 to displace along the first direction with a large stroke relative to the first platform 600.

In this embodiment, the mover 300 is connected with the walking piezoelectric motor 500 through a pre-tightening force, so that the mover 300 is clamped and fixed by the walking piezoelectric motor 500, and the output force direction of the walking piezoelectric motor 500 and the movement direction of the mover 300 can be ensured to be consistent, so that the walking piezoelectric actuation displacement device can be ensured to have high movement precision.

The mover 300 is provided at opposite sides in the second direction with centering blocks 200, the centering blocks 200 being located between the mover 300 and each guide rail 400, opposite sides of the centering blocks 200 being planar and both being perpendicular to the second direction. It is understood that the shape and size of the centering block 200 is not limited. In the present embodiment, the number of the centering blocks 200 is two, and may be rectangular plate blocks.

The number of the lateral pressing members is two, and the two lateral pressing members are arranged at intervals along the second direction. Each lateral compression component is movably connected to the first platform 600, and can drive the lateral compression component to move relative to the first platform 600, and make the lateral compression component abut against the guide rail 400, so that the guide rail 400 approaches along the first direction and abuts against the centering block 200 under the influence of the acting force of the lateral compression component, and the guide rail 400 is caused to make contact with one side surface of the centering block 200, and the mover 300 is caused to make contact with the other side surface of the centering block 200. Lateral compression assemblies located on opposite sides of mover 300 apply equal and stable forces to corresponding guide rail 400.

In this embodiment, the centering block 200 and the mover 300 may be identical in length dimension, and the length of the guide rail 400 is greater than the length of the mover 300.

It will be appreciated that in the assembly work of the walking type piezoelectric actuation displacement device provided in this embodiment, after the walking type piezoelectric motor 500 is fixed to the first platform 600 and the mover 300 is assembled with the walking type piezoelectric motor 500, the centering block 200 can be disposed between the mover 300 and the guide rail 400 with the mover 300 as a movement reference plane, and two opposite sides of the centering block 200 in the second direction are utilized as a connecting bridge between the mover 300 and the guide rail 400, so that the mover 300 and the guide rail 400 can be kept consistent in the movement direction by disposing the centering block 200.

Then, when the guide rail 400 is pre-fixed on the first platform 600, the guide rail 400 can be displaced relative to the first platform 600 in the second direction, so that the lateral pressing assembly can apply equal and stable pressure to the guide rail 400 by utilizing the action of the lateral pressing assembly, so that the guide rail 400 is promoted to move in the second direction and push the centering block 200 to tightly abut against the mover 300, at this time, the centering block 200 is clamped by the mover 300 and the guide rail 400, and the mover 300 and the guide rail 400 are respectively correspondingly attached to the opposite two sides of the centering block 200.

Because the two opposite sides of the centering block 200 are planes and are perpendicular to the second direction, and the two opposite sides of the mover 300 are also planes and are also perpendicular to the second direction, the moving direction of the guide rail 400 is parallel to the moving direction of the mover 300, and the guide rail 400 and the mover 300 reach a good force balance state in the second direction under the acting force of the lateral compression assembly, and are not easy to displace in the second direction (i.e. deflect relative to the first direction), so that the problem that the mover 300 and the guide rail 400 deflect in the second direction due to the connection effect when the second platform 100 is fixedly connected with the guide rail 400 and the mover 300 respectively can be well solved, thereby ensuring that the walking type piezoelectric actuation displacement device has very high moving precision and moving stability after the assembly work is completed, preventing the displacement deviation of the second platform 100 in the moving process, and meeting the requirement of displacement control with high stroke precision.

In addition, there is no need to manufacture a plurality of positioning holes on the first and second stages 600 and 100 in order to ensure that the guide rail 400 and the mover 300 are maintained to be uniform in the moving direction, which helps to reduce the difficulty in manufacturing the walk-behind piezoelectric actuation displacement device.

As shown in fig. 2, the walking piezoelectric actuation displacement device is in a first state, and the second platform 100 is not displaced relative to the first platform 600 in the first direction. As shown in fig. 3, the walk-behind piezo-actuated displacement device is in the second state, and the second platform 100 is displaced in the first direction relative to the first platform 600.

In some embodiments, the first platform 600 is provided with bumps 640 (or ribs), two opposite ends of the bumps 640 extend along the first direction, and the bumps 640 are two in number and are arranged at intervals along the second direction. In this embodiment, the left side and the right side of the first platform 600 are both raised upwards, and form a long bump 640, the bump 640 is integrally formed with the first platform 600, and the length of the bump 640 is consistent with the length of the first platform 600. The guide rail 400, the centering block 200 and the mover 300 are all located between two bumps 640 on the first platform 600.

Further, each of the bosses 640 is provided with screw holes 610, the axes of the screw holes 610 are extended in the second direction, and the screw holes 610 are plural in number and are arranged at uniform intervals in the first direction. The lateral pressing assembly comprises a plurality of pushing screws, and the number of the pushing screws corresponds to the number of the screw holes 610 one by one. Each tightening screw can correspondingly enter and exit the screw hole 610, so that the tightening screw is in threaded connection with the screw hole 610. Since the screw hole 610 is a through hole, a jack screw can be screwed into the screw hole 610 and abutted against the surface of the guide rail 400 near the bump 640.

It will be appreciated that by controlling the length of the jack screw extending into the threaded bore 610, the compression force applied by the jack screw to the rail 400 is adjusted. In this embodiment, the tightening screw is mounted by a fixed torque method, and the tightening screw is allowed to apply a uniform tightening force to the mover 300 under the condition that the torque value is not lower than 0.15N/m.

In other embodiments, where the first platform 600 is provided with two lugs 640, wedges may be used instead of the set screws. Specifically, a wedge assembly may be disposed between the bump 640 and the guide rail 400, where the wedge assembly includes two wedges, and the two wedges are relatively displaced in a first direction to change the size of the wedge assembly in a second direction, so that the wedge assembly applies a certain compression force to the guide rail 400. Of course, it is not excluded that only one wedge is used, cooperating with the projection 640 and the guide 400 to adjust the amount of force of the wedge against the guide 400.

In some embodiments, the walk-behind piezoelectric motor 500 and the first platform 600 are detachably connected, and may also be welded. In the present embodiment, the walk-behind piezoelectric motor 500 is fixedly coupled to the first platform 600 by bolts.

In some embodiments, as shown in fig. 7, the first platform 600 is provided with a first mounting surface 660, the first mounting surface 660 is located in the receiving groove 630, and the first mounting surface 660 is perpendicular to the up-down direction. While the bottom surface of the walk-behind piezoelectric motor 500 is flat and can be attached to the first attachment surface 660.

In addition, the first platform 600 is further provided with a first positioning block 650, and the first positioning block 650 is integrally formed with the first platform 600. The first positioning block 650 has a first positioning surface perpendicular to the first direction. The side surface of the walk type piezoelectric motor 500 can be attached to the first positioning surface.

In the present embodiment, the first positioning block 650 is located at the rear side of the first mounting surface 660, and the front side surface of the first positioning block 650 may make surface-to-surface contact with the rear side surface of the walk-behind piezoelectric motor 500.

It can be appreciated that when the walking piezoelectric motor 500 is fixedly mounted on the first platform 600, the side surface of the walking piezoelectric motor 500 can be in contact with the first positioning surface, so that the output force direction of the walking piezoelectric motor 500 is ensured to be parallel to the first direction, and meanwhile, the bottom surface of the walking piezoelectric motor 500 can be in contact with the first mounting surface 660, so that the mover 300 mounted on the walking piezoelectric motor 500 can be ensured to be in contact with the bottom surface of the second platform 100, and finally, the accurate positioning work of the walking piezoelectric motor 500 when mounted on the first platform 600 is completed, so that the output force direction of the walking piezoelectric motor 500 is ensured to be consistent with the movement direction of the mover 300, and the movement precision of the walking piezoelectric actuation displacement device is improved.

In some embodiments, as shown in fig. 6, the structure of the walk-behind piezoelectric motor 500 includes a housing 510 and a combined stack 520.

The housing 510 is provided with a groove 511, an opening of the groove 511 is upward, two opposite sides of the housing 510 in the first direction are provided with notches 512, and the notches 512 are communicated with the groove 511. It will be appreciated that the gap 512 is sized to allow the mover 300 to pass therethrough and to allow the mover 300 to move in the first direction.

The number of combined stacks 520 is two and arranged at intervals along the second direction. Both sets of combined stacks 520 are disposed within recess 511. The mover 300 is disposed through the notch 512 of the housing 510 along the first direction, and the mover 300 is disposed between the two sets of combined stacks 520.

Each set of combined stacks 520 includes at least two piezoelectric stacks, and for each set of combined stacks 520, all of the piezoelectric stacks are spaced apart along the first direction.

In this embodiment, the two sets of combined stacks 520 are symmetrically disposed. Each set of combined stacks 520 includes four piezoelectric stacks. Of course, it is not excluded that the number of piezoelectric stacks of each set of combined stacks 520 is set to six, eight, etc. The upper portion of the mover 300 is in contact with the centering block 200 and the lower portion of the mover 300 is in contact with the combined stack 520.

As shown in fig. 8 and 9, taking an example in which each of the combined stacks 520 includes two piezoelectric stacks, a first direction is set to a front-rear direction (i.e., X direction), a second direction is set to a left-right direction (i.e., Y direction), and one of the piezoelectric stacks is set as a first piezoelectric stack 521 and the other piezoelectric stack is set as a second piezoelectric stack 522 for each of the combined stacks 520.

It will be appreciated that each piezoelectric stack includes an X-stack and a Y-stack, defining an actuation direction of the X-stack as the X-direction and an actuation direction of the Y-stack as the Y-direction, i.e., each piezoelectric stack has two actuation directions.

As shown in fig. 8, fig. 8 (a) shows the walk-behind piezoelectric motor 500 in a start state, where high voltages are applied to the Y-stacks of the first piezoelectric stack 521 and the second piezoelectric stack 522, and the mover 300 is preloaded in the Y-direction. In fig. 8 (b), the first piezoelectric stack 521 keeps the mover 300 preloaded in the Y direction, and the voltage of the Y stack in the second piezoelectric stack 522 is reduced to reduce the preload so that the first piezoelectric stack 521 is ready for actuation in the X direction. In fig. 8 (c), the first piezoelectric stack 521 maintains the pretension of the mover 300 in the Y direction, and at the same time, the voltage is applied to the X stack in the first piezoelectric stack 521 to perform the X-direction actuation, so that the mover 300 can move linearly in the X direction.

As shown in fig. 9, fig. 9 (d) shows the walk-behind piezoelectric motor 500 in the X-direction actuation end state, where the Y-stack in the second piezoelectric stack 522 returns to the high voltage loading to pretension the mover 300 in the Y-direction. In fig. 9 (e), the second piezoelectric stack 522 maintains the Y-direction pretension to the mover 300, reduces the voltage loading of the Y-stack in the first piezoelectric stack 521, reduces the pretension, and simultaneously reduces the voltage of the X-stack in the first piezoelectric stack 521, and releases the X-direction actuation. In fig. 9 (f), the second piezoelectric stack 522 keeps the mover 300 preloaded in the Y direction, and the voltage of the X stack in the second piezoelectric stack 522 is increased to perform the X-direction actuation, causing the mover 300 to continue the linear motion along the X direction.

It will be appreciated that after each actuation, the first piezoelectric stack 521 and the second piezoelectric stack 522 will pre-tighten the mover 300, so that the first piezoelectric stack 521 and the second piezoelectric stack 522 sequentially perform the actuation, thereby realizing the walking linear motion.

It can be appreciated that the walking piezoelectric motor 500 is electrically connected to the driver, and driven by an analog signal, so that the second platform 100 performs full-step motion and micro-step motion under the driving action of the walking piezoelectric motor 500. Mover 300 is preloaded with combined stack 520.

In some embodiments, the opposite sides of the mover 300 are made of a high stiffness wear resistant material, such as ceramic, alumina, silicon carbide, etc., to improve the wear resistance of the mover 300.

In this embodiment, the mover 300 includes a plate core 310 and a wear plate 320. Wherein the core 310 is made of a metal material and the wear plate block 320 is made of an alumina material. Mounting grooves 311 are provided on opposite sides of the core 310 so that the abrasion resistant plate 320 can be fitted into the mounting grooves 311. The wear plates 320 are in contact with not only the centering blocks 200, but also the combined stack 520.

It will be appreciated that the opposite sides of the mover 300 are movement bases, i.e. the contact surface between the mover 300 and the centering block 200, and the contact surface between the mover 300 and the traveling piezoelectric motor 500, require a certain level processing requirement, wherein the flatness is not lower than 0.01 with reference to GB/T11337-2004, and the surface roughness is not lower than ra1.6 with reference to GB/T3505-2000.

In some embodiments, the centering block 200 is fixedly connected to the second platform 100 by bolts. Then, the centering block 200 can move together with the second platform 100, the mover 300 and the guide rail 400, so that the mover 300 and the guide rail 400 are respectively attached to the opposite side surfaces of the centering block 200 in the moving process, and always keep a contact state; at this time, the rigidity of the centering block 200 is utilized to make the centering block 200 serve as a guide rail of the mover 300, so as to exert an excellent guiding effect on the movement of the mover 300 in the first direction, and effectively avoid the problem that the movement direction of the mover 300 is inconsistent with the movement direction of the guide rail 400 and the movement accuracy of the second platform 100 is reduced due to the occurrence of the positional deviation of the mover 300 in the second direction.

It can be appreciated that, since the centering blocks 200 are disposed on opposite sides of the mover 300 and are attached to each other, the centering blocks 200 can limit the mover 300 in the second direction, and prevent the mover 300 from being easily biased in the second direction under the driving of the traveling type piezoelectric motor 500; since the upper surface of the mover 300 is bonded to the lower surface of the second stage 100, the second stage 100 can restrict the mover 300 in the up-down direction, and the mover 300 is prevented from being easily displaced in the up-down direction by the driving of the traveling piezoelectric motor 500. Therefore, the walking type piezoelectric actuation displacement device of this embodiment has a strong load capacity.

In other embodiments, the centering block 200 is not fixedly connected to the second platform 100, and therefore, when the second platform 100 moves, the centering block 200 moves in the first direction relative to the second platform 100, the guide rail 400, and the mover 300, and sliding friction exists between the centering block 200 and the mover 300, between the centering block 200 and the guide rail 400, and between the centering block 200 and the second platform 100. In order to ensure high motion accuracy of the second platform 100, the centering block 200 may be adjusted in geometric size and shape according to the actual space size or engineering requirements, so that the mover 300 and the guide rail 400 can be ensured to maintain contact with the centering block 200 in the maximum stroke range of the displacement device.

It will be appreciated that weight reducing holes may be machined in the second platform 100 and the centering block 200 in order to reduce the weight of the second platform 100 and the centering block 200.

In some embodiments, the walk behind piezo-actuated displacement device further comprises a linear grating scale. The linear scale is disposed between the first stage 600 and the second stage 100, and can be used to measure the amount of displacement of the second stage 100 relative to the first stage 600.

Further, the linear grating ruler and the walking piezoelectric motor 500 may be electrically connected to an upper computer or a controller, thereby forming a closed-loop control system. The displacement generation amount of the second platform 100 relative to the first platform 600 is precisely measured by using the linear grating ruler, corresponding data are obtained, and the controller controls the walking piezoelectric motor 500 to stop working after receiving the corresponding data of the linear grating ruler, so that the motion position of the second platform 100 relative to the first platform 600 can be precisely controlled.

The linear grating scale includes a scale grating 710 and a grating reading head 720. Specifically, the scale grating 710 may be fixedly coupled to the second stage 100 or the mover 300, and the grating reading head 720 is mounted in the receiving groove 630 of the first stage 600. If the centering blocks 200 are fixed to the second stage 100, the scale grating 710 may be mounted on one of the centering blocks 200. In this embodiment, as shown in fig. 2 and 4, the lower surface of the centering block 200 extends downward to form ribs that provide mounting locations for the scale grating 710.

The first stage 600 is provided with a mounting plane for the grating reading head 720, the reading direction of the grating reading head 720 being parallel to the movement direction of the cross roller guide rail. The height of the scale grating 710 is consistent with the height of the grating read head 720 and remains horizontal.

In addition, as shown in fig. 1 to 10, a first embodiment of the present invention further provides an assembly method of a walking piezoelectric actuation displacement device, which includes the following steps:

step S1: the walk-behind piezoelectric motor 500 is mounted to the first stage 600, and the mover 300 is loaded to the walk-behind piezoelectric motor 500 such that the mover 300 moves in the first direction.

After the walking piezoelectric motor 500 is positioned on the first platform 600, a screw may be used for fixing. The mover 300 and the traveling piezoelectric motor 500 may be mounted with a pre-tightening force therebetween, and a driving assembly is formed, which may enable the combined stack 520 of the traveling piezoelectric motor 500 to clamp and fix the mover 300, so that the output force direction of the traveling piezoelectric motor 500 is kept consistent with the movement direction of the mover 300.

Step S2: the centering block 200 and the guide rail 400 are sequentially provided at opposite sides of the mover 300 in the second direction, which is perpendicular to the first direction, and the upper surfaces of the centering block 200, the mover 300 and the guide rail 400 are flush.

After the installation of the driving assembly is completed, a centering block 200 and a guide rail 400 are disposed at opposite sides of the mover 300, and the centering block 200 is located between the mover 300 and the guide rail 400, and at the same time, the upper surface of the centering block 200, the upper surface of the mover 300 and the upper surface of the guide rail 400 are ensured to be in the same horizontal plane (i.e., coplanar), so that the centering block 200, the mover 300 and the guide rail 400 are conveniently attached to the lower surface of the second platform 100, respectively, thereby ensuring that the second platform 100 can be kept horizontal.

Step S3: the guide rail 400 is pre-fixed to the first stage 600, and the second stage 100 is fixedly connected to the mover 300.

Then, the guide rail 400 may be pre-installed on the first platform 600 using bolts, at which time the position of the guide rail 400 in the second direction may be adjusted. Since the moving direction of the mover 300 is parallel to the output force direction of the walk type piezoelectric motor 500 and is based on the moving direction of the mover 300, the second stage 100 can be fixed to the mover 300.

Step S4: each guide rail 400 is driven to move towards the direction approaching to the mover 300 by using the lateral compression assembly, and opposite side surfaces of the centering block 200 are respectively attached to the guide rail 400 and the mover 300, wherein the opposite side surfaces of the centering block 200 are perpendicular to the second direction.

The opposite sides of the first platform 600 are provided with lateral compression assemblies, the lateral compression assemblies are utilized to apply acting force to the guide rail 400, the guide rail 400 is driven to push the centering block 200 to move, the centering block 200 is enabled to be abutted against the mover 300, at the moment, the mover 300 and the guide rail 400 correspondingly clamp the centering block 200 and are in contact with the opposite sides of the centering block 200, so that the movement direction of the guide rail 400 is adjusted, the movement direction of the guide rail 400 is consistent with the movement direction of the mover 300 after assembly, and high-precision movement of the walking type piezoelectric actuation displacement device is facilitated to be improved.

It will be appreciated that when the guide rail 400 is urged against the centering block 200 by the lateral compression assemblies, the lateral compression assemblies on opposite sides of the mover 300 are sequentially operated to prevent the mover 300 from being biased in the second direction by the strong force of the centering block 200.

Step S5: the first platform 600 and the second platform 100 are fixedly connected with the guide rail 400, respectively.

Finally, the first platform 600 and the guide rail 400 may be fixedly connected by bolts, and the second platform 100 and the guide rail 400 may be fixedly connected, thereby completing the assembly work of the walking type piezoelectric actuation displacement device.

In other embodiments, after the positions of the guide rail 400, the centering block 200, and the mover 300 are adjusted by means of the lateral compression assembly, the first platform 600 is fixedly connected to the guide rail 400, and the second platform 100 is fixedly connected to the guide rail 400 and the mover 300, respectively. So set up, utilize side direction to compress tightly under the effect of subassembly, guarantee that guide rail 400 and runner 300 atress balance in the second direction, be difficult for taking place the skew, consequently, when runner 300 and guide rail 400 carry out bolted connection with second platform 100, can overcome runner 300 and guide rail 400 and take place the displacement deviation because of the effort that receives the bolt in the bolted connection process to guarantee walking type piezoelectricity actuation displacement device has very high motion precision after the assembly.

It can be understood that, during the installation process, each component such as the mover 300, the guide rail 400, the centering block 200 and the like uses the output force direction of the traveling piezoelectric motor 500 as a positioning reference, and performs a successive reciprocating motion and sequentially completes positioning and assembly.

In some embodiments, in step S5, that is, after the step of fixedly connecting the second platform 100 to the guide rail 400, the following steps are further included: the second platform 100 is fixedly connected with the centering block 200.

In this way, the centering block 200 can move along with the second platform 100, and in the moving process of the second platform 100, the guide rail 400 and the mover 300 are always kept in contact with the centering block 200, so that the mover 300 can be prevented from being shifted in the second direction, the mover 300 and the guide rail 400 are ensured to be consistent in the moving direction, and therefore, the second platform 100 is ensured to have high moving precision.

While the preferred embodiment of the present application has been described in detail, the application is not limited to the embodiments, and various equivalent modifications and substitutions can be made by those skilled in the art without departing from the spirit of the application, and these modifications and substitutions are intended to be included in the scope of the present application as defined in the appended claims.

Claims (10)

1. A walk behind piezoelectric actuated displacement device comprising:

a first platform;

the second platform is positioned above the first platform, guide rails extending along a first direction are detachably connected between the second platform and the first platform, at least two guide rails are arranged at intervals along a second direction, and the second direction is perpendicular to the first direction;

the driving assembly is positioned between the two guide rails and comprises a rotor and a walking piezoelectric motor for driving the rotor to move along a first direction, the walking piezoelectric motor is connected with the first platform, the rotor extends along the first direction and is detachably connected with the second platform, a centering block is arranged between each guide rail and the rotor, and the opposite two side surfaces of the centering block are perpendicular to the second direction;

the lateral compression assemblies are arranged at intervals along the second direction, each lateral compression assembly is movably connected with the first platform and is abutted to the guide rail, so that the opposite two side surfaces of the centering block are respectively attached to the guide rail and the rotor.

2. The walking type piezoelectric actuation displacement device according to claim 1, wherein the first platform is provided with a protruding block extending along a first direction, at least two protruding blocks are arranged at intervals along a second direction, each protruding block is provided with a plurality of screw holes distributed along the first direction, the lateral pressing assembly comprises a plurality of tightening screws, and each tightening screw is in threaded connection with the screw hole and is abutted to the guide rail.

3. The traveling piezoelectric actuator displacement device according to claim 1, wherein the traveling piezoelectric motor is detachably connected to the first platform, the first platform is provided with a first mounting surface and a first positioning block, the first mounting surface is perpendicular to the up-down direction, the first positioning block is provided with a first positioning surface perpendicular to the first direction, the bottom surface of the traveling piezoelectric motor is attached to the first mounting surface, and the side surface of the traveling piezoelectric motor is attached to the first positioning surface.

4. A walking piezoelectric actuation displacement device according to claim 3, wherein the walking piezoelectric motor comprises a housing and a combined stack, the housing is provided with a groove with an upward opening, two opposite sides of the housing in a first direction are provided with notches communicated with the groove, the combined stack is provided with two groups at intervals along a second direction and is arranged in the groove, each group of combined stack comprises at least two piezoelectric stacks arranged at intervals along the first direction, and the mover penetrates through the notches and is positioned between the two groups of combined stacks.

5. The walk behind piezo actuated displacement device of claim 4, wherein the mover is connected to the second platform by bolts, the guide rail comprising a fixed rail and a sliding rail; the fixed rail is connected with the first platform through bolts, and the sliding rail is connected with the second platform through bolts.

6. The walk behind piezo-actuated displacement device of claim 1, wherein the centering block is bolted to the second platform.

7. The walk piezoelectric actuation displacement device according to claim 1, wherein a linear grating ruler for measuring the displacement of the second stage relative to the first stage is provided between the first stage and the second stage.

8. The walk behind piezo-actuated displacement device of claim 1, wherein the rail is a cross roller rail.

9. The assembly method of the walking type piezoelectric actuation displacement device is characterized by comprising the following steps of:

mounting a walking piezoelectric motor on a first platform, and loading a mover on the walking piezoelectric motor so as to enable the mover to move along a first direction;

the two opposite sides of the mover along the second direction are sequentially provided with a centering block and a guide rail, and the upper surfaces of the centering block, the mover and the guide rail are flush, wherein the second direction is perpendicular to the first direction;

the guide rail is pre-fixed on the first platform, and the second platform is fixedly connected with the rotor;

Driving each guide rail to move towards a direction close to the mover by utilizing a lateral compression assembly, and enabling opposite side surfaces of the centering block to be respectively attached to the guide rails and the mover, wherein the opposite side surfaces of the centering block are perpendicular to a second direction;

and fixedly connecting the first platform and the second platform with the guide rail respectively.

10. The method of assembling a walk behind piezoelectric actuation displacement device of claim 9, further comprising the steps of, after fixedly connecting the second platform to the rail: and fixedly connecting the second platform with the centering block.