CN110310695A - A kind of change frictional force series parallel type two-freedom stick-slip driving precisely locating platform - Google Patents
A kind of change frictional force series parallel type two-freedom stick-slip driving precisely locating platform Download PDFInfo
- Publication number
- CN110310695A CN110310695A CN201910500124.9A CN201910500124A CN110310695A CN 110310695 A CN110310695 A CN 110310695A CN 201910500124 A CN201910500124 A CN 201910500124A CN 110310695 A CN110310695 A CN 110310695A
- Authority
- CN
- China
- Prior art keywords
- platform
- rectangular
- piezoelectric ceramic
- ceramic actuator
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of change frictional force series parallel type two-freedom stick-slips to drive precisely locating platform, there are two Y-direction guide rail support rim on pedestal, has Y-direction crossed roller guide rail on the outside of each Y-direction guide rail support rim；There is displacement input mechanism among pedestal, is rectangular platform using double parallel sheet-form flexible hinge and symmetrical structure in parallel, center, rectangular Platform center has Z axis piezoelectric ceramic actuator, there is bulb cap on Z axis piezoelectric ceramic actuator；X-axis piezoelectric ceramic actuator and Y-axis piezoelectric ceramic actuator are mutually perpendicular on the outside of displacement input mechanism；Intermediate connecting layer center is rectangular through-hole, and a pair of X direction guiding rail support rim is arranged, has X to crossed roller guide rail on the outside of each X direction guiding rail support rim；There is friction block on rectangular platform, there is rectangular displacement platform at friction block center, and there is friction shim on rectangular displacement platform top.The present invention is suitable for the fields such as micro-electronic manufacturing, biologic medical engineering, micro-nano operation and Ultra-precision Turning.
Description
Technical field
The present invention relates to precisely locating platforms, and it is viscous that more specifically, it relates to a kind of change frictional force series parallel type two-freedoms
Sliding driving precisely locating platform.
Background technique
With micro-electronic manufacturing, biologic medical engineering, micro-nano operation and the continuous development in the fields such as Ultra-precision Turning, these
To big stroke precision locating platform, higher requirements are also raised in field.Current mini positioning platform technology has been achieved for very big
Development, but still have greater room for improvement in terms of the big stroke precision positioning of multiple degrees of freedom, while to the side such as resolution ratio, load capacity
There has also been increasingly higher demands in face.
Traditional big stroke precision locating platform generallys use the structure type of motor driven and guide rail guiding, may be implemented
Big stroke positioning and biggish load capacity, however precision and resolution ratio limitation due to motor, are unable to satisfy micro-nano operation etc.
The high accuracy positioning demand in field.Compared with driving motor, piezoelectric ceramic actuator rigidity is big, small in size, high resolution, and soft
Property hinge be used cooperatively after nanoscale precision positioning can be achieved, but be limited by driver stroke and hinge stress, flexible micro- positioning
Platform range is typically limited to micron level.
For in grade stroke realize micro-nano precision positioning, using stick-slip mechanism Piezoelectric Driving locating platform
It has obtained relatively broad application.By controlling driven object body using the difference between maximum static friction force and force of sliding friction
Displacement is generated, grand movement and nanoscale positioning resolution can be achieved at the same time in stick-slip driving locating platform, and structure is simply easy
Micromation.However in two-freedom stick-slip locating platform, generally use two single-degree-of-freedom stick-slip locating platform series connection are folded
The structure type added, underlying platform need to carry upper platform and movement is realized in driving, and dynamic characteristic and load capacity are all
Limitation.And since there are backhauls to slide situation for stick-slip driving platform, when bearing load, step pitch reduces, and speed can be substantially reduced.
Summary of the invention
Purpose of the invention is to overcome the shortcomings in the prior art, proposes a kind of change frictional force series parallel type two-freedom
Stick-slip drives precisely locating platform, that is, the big row of two-freedom of frictional force piezoelectricity stick-slip driving is laid out and become based on mixed connection
Journey, high-precision precisely locating platform.The characteristics of locating platform is using stick-slip drive mechanism, can be achieved at the same time big stroke and
In high precision；Two groups of crossed roller guide rail series connection arranged crosswises are, it can be achieved that two-freedom output decoupling；It adopts two-freedom importation
With the flexible structure of parallel arrangement, it can be achieved that high frequency precise motion and input decoupling；Frictional force can between friction block and sliding platform
It is adjusted by piezoelectric ceramics dynamic.The locating platform have big stroke, high-precision, speed is fast, load capacity is strong, input and output are double
The characteristics of decoupling.
The purpose of the present invention is what is be achieved through the following technical solutions.
The present invention becomes frictional force series parallel type two-freedom stick-slip and drives precisely locating platform, including sets gradually from the bottom to top
Pedestal, intermediate connecting layer and sliding platform, Y-direction crossed roller guide rail, institute are provided between the pedestal and intermediate connecting layer
It states and is provided with X between intermediate connecting layer and sliding platform to crossed roller guide rail；
The pedestal is set as rectangular configuration, and the pedestal upper surface is arranged symmetrically, and there are two the Y-direction guide rails being parallel to each other
Support rim, each Y-direction guide rail support rim outside are provided with one group of Y-direction crossed roller guide rail；Setting among the pedestal
There is displacement input mechanism, motion guide and two-freedom solution are realized using double parallel sheet-form flexible hinge and symmetrical structure in parallel
Coupling, the displacement input mechanism center are rectangular platform, and the rectangular Platform center is machined with circular trough and bolt hole, the circle
Z axis piezoelectric ceramic actuator is provided in shape slot, Z axis piezoelectric ceramic actuator top is provided with bulb cap；The displacement
Setting is respectively arranged with X-axis piezoelectric ceramic actuator and Y in two empty slots there are two orthogonal empty slot on the outside of input mechanism
Axis piezoelectric ceramic actuator；
The intermediate connecting layer is set as rectangular configuration, is provided centrally with rectangular through-hole, the intermediate connecting layer upper surface
Be symmetrically arranged with a pair of X direction guiding rail support rim being parallel to each other, and rectangular through-hole be located at two X direction guiding rail support rims it
Between, one group of X is provided with to crossed roller guide rail on the outside of each X direction guiding rail support rim；
The rectangular table top of the displacement input mechanism is fixed with friction block, and the friction block passes through intermediate connecting layer
Rectangular through-hole setting；The friction block uses engraved structure, and center is machined with rectangular displacement platform, and is provided in the upper half
The board-like hinge arrangement of dual-layer Parallel, the rectangular displacement platform top are provided with friction shim.
The X-axis piezoelectric ceramic actuator, Y-axis piezoelectric ceramic actuator and Z axis piezoelectric ceramic actuator pass through preload
Bolt applies pretightning force, is fixed by fastening bolt.
It connect on the outside of the intermediate connecting layer and Y-direction crossed roller guide rail, and is fixed by fastening bolt, connected in centre
Layer outside is machined with bolt hole, installs pretension bolt.
The sliding platform and X are fixed to connection on the outside of crossed roller guide rail by fastening bolt, outside sliding platform
Side is machined with bolt hole, installs pretension bolt.
The Z axis piezoelectric ceramic actuator is contacted by bulb cap with friction block.
The friction shim behind Z-direction position with sliding platform bottom surface by adjusting contacting.
Compared with prior art, the beneficial effects brought by the technical solution of the present invention are as follows:
The present invention uses piezoelectricity stick-slip drive mechanism, and big travel displacement output and high-precision discriminating rate can be achieved at the same time；Position
It moves input mechanism and uses parallel flexible structure, it can be achieved that two freedom decoupling displacement output, has high speed, high-precision, high stable
The features such as property, dynamic property is good；X arranges that displacement decoupling effect is good, easy for installation to Y-direction crossed roller guide rail overlapped in series；
Friction block bottom surface is equipped with piezoelectric ceramic actuator, can adjust the frictional force of friction plate and output stage；Z axis Piezoelectric Ceramic
Device mounting ball head cap, protects driver not by fail in shear；Using parallel connection plus series-mode frame, the rigidity of motion platform can be improved
And bearing capacity.
Detailed description of the invention
Fig. 1 is planar structure schematic diagram of the invention；
Fig. 2 is base construction schematic diagram in the present invention；
Fig. 3 is intermediate connecting layer structural schematic diagram in the present invention；
Fig. 4 is friction block structural schematic diagram in the present invention.
Fig. 5 is X-axis and Y-axis piezoelectric ceramic actuator driving voltage schematic diagram in the present invention；
Fig. 6 is Z axis piezoelectric ceramic actuator driving voltage schematic diagram in the present invention.
Appended drawing reference: 1 pedestal, 2Y direction guiding rail support rim, 3 double parallel sheet-form flexible hinges, 4 rectangular platforms, 5X axis pressure
Electroceramics driver, 6Y axis piezoelectric ceramic actuator, 7Z axis piezoelectric ceramic actuator, 8Y are connected to crossed roller guide rail, 9 centres
Layer, 10X direction guiding rail support rim, 11X is to crossed roller guide rail, and 12 sliding platforms, 13 friction blocks, 14 friction shims, 15 fasten
Bolt, 16 pretension bolts, 17 bulb caps.
Specific embodiment
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and cooperate attached drawing
Detailed description are as follows.
As shown in Figures 1 to 4, the present invention becomes frictional force series parallel type two-freedom stick-slip driving precisely locating platform, including
Pedestal 1, intermediate connecting layer 9 and the sliding platform 12 set gradually from the bottom to top, sets between the pedestal 1 and intermediate connecting layer 9
It is equipped with Y-direction crossed roller guide rail 8, X is provided between the intermediate connecting layer 9 and sliding platform 12 to crossed roller guide rail 11.
The pedestal 1 is set as rectangular configuration, including guide supporting part and displacement input mechanism.Table on the pedestal 1
Face is symmetrically arranged with two Y-direction guide rail support rims 2 being parallel to each other, while being machined with spiral shell on 2 surface of Y-direction guide rail support rim
Keyhole is provided with one group of Y-direction crossed roller guide rail 8 for fixing guide rail on the outside of each Y-direction guide rail support rim 2.The base
Be provided with displacement input mechanism among seat 1, using double parallel sheet-form flexible hinge 3 and symmetrical structure in parallel realize motion guide and
Two freedom decoupling.The displacement input mechanism is set between two Y-direction crossed roller guide rails 8, and center is rectangular platform 4,
It is machined with bolt hole for transmitting output displacement, and in rectangular 4 surrounding of platform, is machined with circular trough and bolt hole at center,
Z axis piezoelectric ceramic actuator 7 is provided in the circular trough, 7 top of Z axis piezoelectric ceramic actuator is provided with bulb cap
17.Setting is respectively arranged with X-axis piezoelectricity pottery in two empty slots there are two orthogonal empty slot on the outside of the displacement input mechanism
Porcelain driver 5 and Y-axis piezoelectric ceramic actuator 6.The X-axis piezoelectric ceramic actuator 5, Y-axis piezoelectric ceramic actuator 6 and Z axis
Piezoelectric ceramic actuator 7 applies pretightning force by pretension bolt 16, fixed by fastening bolt 15.
The intermediate connecting layer 9 is set as rectangular configuration, is provided centrally with rectangular through-hole, table on the intermediate connecting layer 9
Face is symmetrically arranged with a pair of X direction guiding rail support rim 10 being parallel to each other, and rectangular through-hole is located at two X direction guiding rail support rims
Between 10, while bolt hole is machined with for fixing guide rail on 10 surface of X direction guiding rail support rim, each X direction guiding rail support is convex
One group of X is provided on the outside of platform 10 to crossed roller guide rail 11.Connect on the outside of the intermediate connecting layer 9 and Y-direction crossed roller guide rail 8
It connects, and fixed by fastening bolt 15.It is machined with bolt hole on the outside of intermediate connecting layer 9, pretension bolt 16 is installed.The sliding
Platform 12 and X are and fixed by fastening bolt 15 to connecting on the outside of crossed roller guide rail 11.It is machined on the outside of sliding platform 12
Bolt hole installs pretension bolt 16.
It is fixed with friction block 13 at the top of the rectangular platform 4 of the displacement input mechanism, the friction block 13 connects across centre
Connect the rectangular through-hole setting of layer 9.The Z axis piezoelectric ceramic actuator 7 is contacted by bulb cap 17 with friction block 13.The friction
Block 13 uses engraved structure, and center is machined with rectangular displacement platform, and the upper half is provided with the board-like hinge knot of dual-layer Parallel
Structure, guarantor's morpheme moving stage can realize Z-direction displacement output.It is machined with bolt positioning hole in 13 bottom surrounding of friction block, it is described to rub
The rectangular platform 4 that cleaning block 13 is displaced output mechanism with pedestal 1 is bolted by quadrangle, and can be adjusted and be rubbed by pretension bolt 16
Cleaning block rectangular displacement platform Z-direction position.The rectangular displacement platform top, which is pasted, is provided with friction shim 14, and the friction shim 14 is logical
It is contacted after crossing adjustment Z-direction position with 12 bottom surface of sliding platform.
The working principle of the invention:
Precisely locating platform of the present invention can realize two direction precise motion of X, Y.Piezoelectric ceramics pretightning force is adjusted first, makes X
Axis piezoelectric ceramic actuator 5, Y-axis piezoelectric ceramic actuator 6, Z axis piezoelectric ceramic actuator 7 are in suitable Pre strained state, and
Contact friction shim 14 with 12 bottom surface of sliding platform.
When needing to drive sliding platform 12, to when moving, to input the letter of voltage shown in Fig. 5 to X-axis piezoelectric ceramic actuator 5 along X
Number, voltage signal shown in Fig. 6 is inputted to Z axis piezoelectric ceramic actuator 7.
When in t0-t1When the moment, Z axis piezoelectric ceramic actuator 7 bears high voltage and extends, friction shim 14 and sliding
12 frictional force of platform increase.X-axis piezoelectric ceramic actuator 5 is extended with slower speed, pushes rectangular platform 4 along X to moving, double
Parallel plate type flexible hinge 3 plays guiding role.Rectangular platform 4 drives friction block 13 along X to moving, and under frictional force effect
Sliding platform 12 is driven to move along X to realization.
When in t1-t2When the moment, Z axis piezoelectric ceramic actuator 7 bears low-voltage, friction shim 14 and sliding platform 12
Between frictional force reduce.X-axis piezoelectric ceramic actuator 5 is retracted with fast speed, bullet of the rectangular platform 4 in the board-like hinge 3 of double parallel
Property power effect under return to initial position.Due to 12 effect of inertia of sliding platform and friction is small, and sliding platform 12 will keep t1
Moment position is constant.
It repeats the above process, sliding platform 12, which can be realized, to be moved along X to large scale and high accuracy.
It is similar with X-direction movement, when inputting voltage signal shown in Fig. 5 to Y-axis piezoelectric ceramic actuator 6, make pottery to Z axis piezoelectricity
When porcelain driver 7 inputs voltage signal shown in Fig. 6, sliding platform 12 and intermediate connecting layer 9 can be realized along Y-direction large scale and high accuracy
Movement.
In conclusion precisely locating platform of the invention can realize along X to and a wide range of precise motion of Y-direction.Have benefited from position
The parallel-connection structure of importation and the arranged in series of guide rail are moved, it can be achieved that the bilingual coupling of input and output.Since Z-direction is provided with piezoelectricity pottery
Porcelain adjusts frictional force, can reduce sliding rollback phenomenon and increase load capacity.
Although function and the course of work of the invention are described above in conjunction with attached drawing, the invention is not limited to
Above-mentioned concrete function and the course of work, the above mentioned embodiment is only schematical, rather than restrictive, ability
The those of ordinary skill in domain under the inspiration of the present invention, is not departing from present inventive concept and scope of the claimed protection situation
Under, many forms can also be made, all of these belong to the protection of the present invention.
Claims (6)
1. a kind of change frictional force series parallel type two-freedom stick-slip drives precisely locating platform, which is characterized in that including from the bottom to top
Pedestal (1), intermediate connecting layer (9) and the sliding platform (12) set gradually, between the pedestal (1) and intermediate connecting layer (9)
It is provided with Y-direction crossed roller guide rail (8), is provided with X to crossed roller between the intermediate connecting layer (9) and sliding platform (12)
Guide rail (11)；
The pedestal (1) is set as rectangular configuration, and pedestal (1) upper surface is arranged symmetrically, and there are two the Y-directions being parallel to each other to lead
Rail support rim (2), each Y-direction guide rail support rim (2) outside are provided with one group of Y-direction crossed roller guide rail (8)；The base
It is provided with displacement input mechanism among seat (1), realizes that movement is led using double parallel sheet-form flexible hinge (3) and symmetrical structure in parallel
To and two freedom decoupling, the displacement input mechanism center be rectangular platform (4), rectangular platform (4) center is machined with
Circular trough and bolt hole are provided with Z axis piezoelectric ceramic actuator (7) in the circular trough, the Z axis piezoelectric ceramic actuator
(7) top is provided with bulb cap (17)；There are two orthogonal empty slot, two empty slots for setting on the outside of the displacement input mechanism
Inside it is respectively arranged with X-axis piezoelectric ceramic actuator (5) and Y-axis piezoelectric ceramic actuator (6)；
The intermediate connecting layer (9) is set as rectangular configuration, is provided centrally with rectangular through-hole, table on the intermediate connecting layer (9)
Face is symmetrically arranged with a pair of X direction guiding rail support rim (10) being parallel to each other, and rectangular through-hole is convex positioned at two X direction guiding rails supports
Between platform (10), one group of X is provided with to crossed roller guide rail (11) on the outside of each X direction guiding rail support rim (10)；
It is fixed with friction block (13) at the top of the rectangular platform (4) of the displacement input mechanism, the friction block (13) passes through centre
The rectangular through-hole of articulamentum (9) is arranged；The friction block (13) uses engraved structure, and center is machined with rectangular displacement platform,
And the upper half is provided with the board-like hinge arrangement of dual-layer Parallel, the rectangular displacement platform top is provided with friction shim (14).
2. change frictional force series parallel type two-freedom stick-slip according to claim 1 drives precisely locating platform, feature exists
In the X-axis piezoelectric ceramic actuator (5), Y-axis piezoelectric ceramic actuator (6) and Z axis piezoelectric ceramic actuator (7) pass through
Pretension bolt (16) applies pretightning force, fixed by fastening bolt (15).
3. change frictional force series parallel type two-freedom stick-slip according to claim 1 drives precisely locating platform, feature exists
In the intermediate connecting layer (9) and Y-direction crossed roller guide rail (8) outside are connect, and fixed by fastening bolt (15), in
Between bolt hole is machined on the outside of articulamentum (9), install pretension bolt (16).
4. change frictional force series parallel type two-freedom stick-slip according to claim 1 drives precisely locating platform, feature exists
In the sliding platform (12) and X are fixed to connection on the outside of crossed roller guide rail (11), and by fastening bolt (15), in cunning
It is machined with bolt hole on the outside of moving platform (12), installs pretension bolt (16).
5. change frictional force series parallel type two-freedom stick-slip according to claim 1 drives precisely locating platform, feature exists
In the Z axis piezoelectric ceramic actuator (7) is contacted by bulb cap (17) with friction block (13).
6. change frictional force series parallel type two-freedom stick-slip according to claim 1 drives precisely locating platform, feature exists
In the friction shim (14) contacts by adjusting behind Z-direction position with sliding platform (12) bottom surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910500124.9A CN110310695B (en) | 2019-06-11 | 2019-06-11 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910500124.9A CN110310695B (en) | 2019-06-11 | 2019-06-11 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110310695A true CN110310695A (en) | 2019-10-08 |
| CN110310695B CN110310695B (en) | 2021-07-06 |
Family
ID=68077131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910500124.9A Expired - Fee Related CN110310695B (en) | 2019-06-11 | 2019-06-11 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110310695B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110890850A (en) * | 2019-12-05 | 2020-03-17 | 松山湖材料实验室 | Nano-precision piezoelectric drive linear displacement platform |
| CN111451791A (en) * | 2020-03-24 | 2020-07-28 | 天津大学 | Two-degree-of-freedom swing platform based on stick-slip principle |
| CN112217416A (en) * | 2020-09-30 | 2021-01-12 | 天津大学 | Two-degree-of-freedom piezoelectric ultrasonic motor driven high-precision micro-assembly robot |
| CN112558263A (en) * | 2020-12-10 | 2021-03-26 | 上海精测半导体技术有限公司 | Micro-displacement device and method, light path adjusting equipment and application of micro-displacement device |
| CN112838786A (en) * | 2019-11-22 | 2021-05-25 | 北京大学 | Linear motor with precise driving and positioning functions |
| CN112994512A (en) * | 2021-02-03 | 2021-06-18 | 哈尔滨工业大学 | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator |
| CN114253004A (en) * | 2021-12-26 | 2022-03-29 | 中国人民解放军国防科技大学 | Linear two-dimensional translation normal stress type electromagnetic micro-motion platform |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1353110A2 (en) * | 2002-04-10 | 2003-10-15 | Physik Instrumente (PI) GmbH & Co. KG | Positioning table |
| CN2596512Y (en) * | 2002-12-20 | 2003-12-31 | 北京有色金属研究总院 | Computer control precise X-Y mobile station |
| CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
| CN107464586A (en) * | 2017-08-17 | 2017-12-12 | 天津大学 | A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling |
| CN108561700A (en) * | 2018-06-08 | 2018-09-21 | 天津大学 | A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform |
| CN108877871A (en) * | 2018-04-12 | 2018-11-23 | 天津大学 | A kind of built-in two-freedom precisely locating platform of driver |
| CN108962336A (en) * | 2018-05-22 | 2018-12-07 | 郑州轻工业学院 | A kind of two-dimensional parallel flexible micro platform based on Piezoelectric Driving |
| CN109493913A (en) * | 2018-12-26 | 2019-03-19 | 杭州电子科技大学 | A kind of two degrees of freedom micro-nano locating platform |
| CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
-
2019
- 2019-06-11 CN CN201910500124.9A patent/CN110310695B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1353110A2 (en) * | 2002-04-10 | 2003-10-15 | Physik Instrumente (PI) GmbH & Co. KG | Positioning table |
| CN2596512Y (en) * | 2002-12-20 | 2003-12-31 | 北京有色金属研究总院 | Computer control precise X-Y mobile station |
| CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
| CN107464586A (en) * | 2017-08-17 | 2017-12-12 | 天津大学 | A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling |
| CN108877871A (en) * | 2018-04-12 | 2018-11-23 | 天津大学 | A kind of built-in two-freedom precisely locating platform of driver |
| CN108962336A (en) * | 2018-05-22 | 2018-12-07 | 郑州轻工业学院 | A kind of two-dimensional parallel flexible micro platform based on Piezoelectric Driving |
| CN108561700A (en) * | 2018-06-08 | 2018-09-21 | 天津大学 | A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform |
| CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
| CN109493913A (en) * | 2018-12-26 | 2019-03-19 | 杭州电子科技大学 | A kind of two degrees of freedom micro-nano locating platform |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112838786A (en) * | 2019-11-22 | 2021-05-25 | 北京大学 | Linear motor with precise driving and positioning functions |
| CN110890850A (en) * | 2019-12-05 | 2020-03-17 | 松山湖材料实验室 | Nano-precision piezoelectric drive linear displacement platform |
| CN110890850B (en) * | 2019-12-05 | 2024-04-19 | 松山湖材料实验室 | Nanometer precision piezoelectric driving linear displacement table |
| CN111451791A (en) * | 2020-03-24 | 2020-07-28 | 天津大学 | Two-degree-of-freedom swing platform based on stick-slip principle |
| CN112217416A (en) * | 2020-09-30 | 2021-01-12 | 天津大学 | Two-degree-of-freedom piezoelectric ultrasonic motor driven high-precision micro-assembly robot |
| CN112558263A (en) * | 2020-12-10 | 2021-03-26 | 上海精测半导体技术有限公司 | Micro-displacement device and method, light path adjusting equipment and application of micro-displacement device |
| CN112994512A (en) * | 2021-02-03 | 2021-06-18 | 哈尔滨工业大学 | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator |
| CN114253004A (en) * | 2021-12-26 | 2022-03-29 | 中国人民解放军国防科技大学 | Linear two-dimensional translation normal stress type electromagnetic micro-motion platform |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110310695B (en) | 2021-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110310695A (en) | A kind of change frictional force series parallel type two-freedom stick-slip driving precisely locating platform | |
| CN108962336B (en) | Two-dimensional parallel flexible micro-motion platform based on piezoelectric drive | |
| CN101533226B (en) | Leveling and focusing mechanism and microstage and workpiece stage using same | |
| CN100535765C (en) | 6-freedom micro-motion platform capable of isolating exterior vibration | |
| CN104595642A (en) | Two-degree-of-freedom piezoelectric driving nanometer positioning platform | |
| CN107705821B (en) | A kind of two degrees of freedom Inchworm type micro-nano locating platform | |
| CN103592824A (en) | Two-degree-of-freedom high-precision large-stroke air-flotation workpiece table | |
| CN1866494A (en) | High precision silicon slice bench and uses thereof | |
| CN102623070A (en) | Precise two-degree of freedom micro-displacement positioning device | |
| CN105981107A (en) | Xy[theta] table device | |
| CN104896268B (en) | A kind of Three Degree Of Freedom big stroke flexible nano locating platform | |
| CN101567223A (en) | Pneumatic semi-suspension two-freedom co-baseplane motion workbench with high speed and large stroke | |
| CN104864230B (en) | Driving unit modularization stick-slip driving positioning platform | |
| CN207888241U (en) | A kind of a wide range of Ultra-precision positioning work stage of numerically-controlled machine tool | |
| CN103345126A (en) | Three-degree-of-freedom nanometer positioning micro-motion silicon wafer stage | |
| CN101207344B (en) | Creeping motion type piezoelectricity straight line driver | |
| CN104070518B (en) | A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure | |
| CN109818524B (en) | Piezoelectric precision driving device and method based on bird wing-shaped bionic flexible mechanism | |
| CN109465652B (en) | Contact type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method | |
| CN112737270A (en) | Special two-axis linkage cross motion rectangular sliding table module | |
| CN207953769U (en) | A kind of two dimension precision movement platform | |
| CN102495529B (en) | Lintel type dual-guide rail dual-drive stepping scanning double silicon wafer stage exchanging device and method thereof | |
| CN114913913B (en) | Two-dimensional high-precision piezoelectric positioning platform and method | |
| CN112720374B (en) | Three-degree-of-freedom precise micro-displacement positioning platform | |
| CN102930904B (en) | Micro-motion platform for improving resolution of linear motor based on flexible inclined beam |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210706 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |